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                                                                   EXHIBIT 10.15

             SUMMARY DESCRIPTION OF CYMER PROFIT SHARING PROGRAM AND
                          CYMER INCENTIVE BONUS PROGRAM
                                   MARCH 2000

      CYMER PROFIT SHARING PROGRAM

-  Every employee in the Company is eligible to receive Profit Sharing.

-  5.0% Profit Sharing paid if the Company achieves its BOD approved Annual
Operating Plan Operating Income target.

-  Threshold of the Plan is achievement of 80% of AOP Operating Income Target.
At 80% Plan attainment, Profit Sharing is 0%.

-  From 80% attainment to 100% attainment, payout is made on a linear curve. 80%
= 0% payout; 90% attainment = 2.5% payout; 100% attainment = 5.0% payout. Plan
is capped at a 5% payout.

-  Payout is based on an employee's base salary payroll for the Profit Sharing
period. For 1999, payout was annual; for 2000, Profit Sharing will be paid
quarterly, based on quarterly year-to-date progress against AOP.

-  Based on achievement of 1999 AOP, a full 5% Profit Sharing was paid to each
Cymer employee in March 2000.

      CYMER INCENTIVE BONUS PROGRAM

      -  Members of the Executive Committee, members of management, and selected
      individual contributors are eligible to participate in the Cymer Incentive
      Bonus Program.

      -  For 1999, the Bonus criteria were:

            EXECUTIVE COMMITTEE MEMBERS

                  33.33% based on achievement of AOP Revenue Target

                  33.33% based on achievement of AOP Net Profit Target,
                  expressed as a dollar amount.

                  33.33% based on achievement of individual MBOs

            NON-EXECUTIVE COMMITTEE MEMBERS

                  25.0% based on achievement of AOP Revenue Target

                  25.0% based on achievement of AOP Operating Profit Target,
                  expressed as a percentage of revenue

                  50.0% based on
                  achievement of individual MBOs

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      CYMER INCENTIVE BONUS PROGRAM (CONT'D)

      -  For 2000, the only change in the above criteria is that for
      Non-Executive Committee Members, the 25.0% based on achievement of AOP
      Operating Profit Target is expressed as a dollar amount, instead of a
      percentage of revenue.

      - The Bonus threshold for payout is achievement of 80% of the Annual
      Operating Profit target. Below 80% achievement, no bonuses will be
      paid. For the MBO portion of the bonus plan, threshold for receiving
      any bonus is 60% accomplishment of MBO for any bonus to be paid. Above
      60% accomplishment, bonus is paid on a linear basis with 60%
      achievement = 60% payment of MBO portion, 70% achievement equaling 70%
      payment; 100% achievement = 100% payment, etc.

      - For the two financial measures, from 80% achievement to 100%
      achievement, payment is made on a linear curve, with 80% = "0" payout,
      and 100% = 100% payout; thus 90% achievement = 50% payout, etc. Above a
      100% achievement of each financial parameter, a 2.5x multiplier effect
      occurs, such that at 120% achievement, there is a 150% payout of the
      parameter.

      - Bonus payments for revenue are uncapped; payments for profit
      achievement are capped at 200%.

      -  Bonus payments are made annually, after completion of the annual audit.

      -  For 1999, bonuses were paid to all eligible participants because the
      company exceeded its revenue and profit goals, as follows:

            EXECUTIVE COMMITTEE:        Revenue: 107.5%

                                        Net Profit expressed
                                        as a dollar amount: 200%

            NON-EXECUTIVE COMMITTEE:    Revenue: 107.5%

                                        Operating Profit expressed
                                        as a percentage: 145%

      -  1999 Bonuses were paid to eligible participants in March 2000.