# Patent

## Title
FinFET device including a uniform silicon alloy fin

## Abstract

A method includes forming at least one fin on a semiconductor substrate. A silicon alloy material is formed on the fin and on exposed surface portions of the substrate. A thermal process is performed to define a silicon alloy fin from the silicon alloy material and the fin and to define silicon alloy surface portions from the silicon alloy material and the exposed surface portions of the substrate. A semiconductor device includes a substrate, a fin defined on the substrate, the fin comprising a silicon alloy and having a substantially vertical sidewall, and silicon alloy surface portions on the substrate adjacent the fin.

## Background
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present disclosure generally relates to the fabrication of semiconductor devices, and, more particularly, to a finFET device including a uniform silicon alloy fin and methods for making same.
2. Description of the Related Art
In modern integrated circuits, such as microprocessors, storage devices and the like, a very large number of circuit elements, especially transistors, are provided and operated on a restricted chip area. In integrated circuits fabricated using metal-oxide-semiconductor (MOS) technology, field effect transistors (FETs) (both NMOS and PMOS transistors) are provided that are typically operated in a switching mode. That is, these transistor devices exhibit a highly conductive state (on-state) and a high impedance state (off-state). FETs may take a variety of forms and configurations. For example, among other configurations, FETs may be either so-called planar FET devices or three-dimensional (3D) devices, such as finFET devices.
A field effect transistor (FET), irrespective of whether an NMOS transistor or a PMOS transistor is considered, and irrespective of whether it is a planar or 3D FinFET device, typically comprises doped source/drain regions that are formed in a semiconductor substrate that are separated by a channel region. A gate insulation layer is positioned above the channel region and a conductive gate electrode is positioned above the gate insulation layer. The gate insulation layer and the gate electrode may sometimes be referred to as the gate structure for the device. By applying an appropriate voltage to the gate electrode, the channel region becomes conductive and current is allowed to flow from the source region to the drain region. In a planar FET device, the gate structure is formed above a substantially planar upper surface of the substrate. In some cases, one or more epitaxial growth processes are performed to form epitaxial (epi) semiconductor material in recesses formed in the source/drain regions of the planar FET device. In some cases, the epi material may be formed in the source/drain regions without forming any recesses in the substrate for a planar FET device, or the recesses may be overfilled, thus forming raised source/drain regions. The gate structures for such planar FET devices may be manufactured using so-called “gate-first” or “replacement gate” (gate-last) manufacturing techniques.
To improve the operating speed of FETs, and to increase the density of FETs on an integrated circuit device, device designers have greatly reduced the physical size of FETs over the years. More specifically, the channel length of FETs has been significantly decreased, which has resulted in improving the switching speed of FETs. However, decreasing the channel length of a FET also decreases the distance between the source region and the drain region. In some cases, this decrease in the separation distance between the source and the drain makes it difficult to efficiently inhibit the electrical potential of the source region and the channel from being adversely affected by the electrical potential of the drain. This is sometimes referred to as a so-called short channel effect, wherein the characteristic of the FET as an active switch is degraded.
In contrast to a FET, which has a planar structure, a so-called finFET device has a three-dimensional (3D) structure. FIG. 1A is a perspective view of an illustrative prior art finFET semiconductor device 100 that is formed above a semiconductor substrate 105. In this example, the finFET device 100 includes three illustrative fins 110, a gate structure 115, sidewall spacers 120 and a gate cap 125. The gate structure 115 is typically comprised of a layer of insulating material (not separately shown), e.g., a layer of high-k insulating material or silicon dioxide, and one or more conductive material layers (e.g., metal and/or polysilicon) that serve as the gate electrode for the device 100. The fins 110 have a three-dimensional configuration. The portions of the fins 110 covered by the gate structure 115 is the channel region of the finFET device 100. An isolation structure 130 is formed between the fins 110.
To improve carrier mobility, it is useful to use materials in the fin that are different from the base silicon of the substrate 105. For example, silicon germanium (SiGe) is a useful fin material. Fabricating SiGe fin portions introduces difficulties associated with a difference in the thermal gradients of Si and SiGe. Also, annealing processes for isolation structures on the device exposes SiGe to an oxygen atmosphere that consumes some of the silicon germanium. One solution is to clad the fin with SiGe after the isolation structure anneal and recess; however, cladding silicon at this step does not provide a uniform film growth and thus a uniform channel, since the film is faceted.
FIG. 1B illustrates a cross-sectional view depicting the formation of epi semiconductor material, such as silicon germanium, on various fins across the substrate 105, including fins for the finFET device 100. This cladding may be performed prior to forming the gate structure 115 if the alloy is desired in the channel region, or after forming the gate structure 115 if the alloy is only desired in the source/drain regions. The fins 110 shown in FIG. 1A are densely-spaced fins. Additional isolated fins 135 are illustrated representing a different region of the substrate 105. For example, the densely-spaced fins 110 may be part of a logic device or SRAM NFET, while the isolated fins 135 may be part of an SRAM PFET. During the epi material growth process, the growth starts in the direction of a (111) crystallographic plane of the substrate 105. In the case of the densely spaced fins 110, the epi regions can grow between the fins 110 and merge to form a substantially horizontal surface. Further growth from the horizontal surface occurs in a direction corresponding to a (100) plane of the substrate. Growth occurs much faster in a (100) plane as compared to a (111) plane, thus resulting in a merged epi structure 140 above the densely-spaced fins 110 and discrete faceted epi structures 145 above the isolated fins 135.
In cases where the alloy is present in the channel region, the non-uniform profile can alter the operating characteristics of the gate structure. In the case of the source/drain regions, the merged epi structure 140 can have different device characteristics as compared to a device with the discrete epi structure 145. For example, the resistance of the device may be higher for the device with the merged epi structure 140. Conductive contact structures will eventually be formed to the source/drain regions of the device. Due to the higher topology of the merged epi structure 140, the contact etches terminate differently, and the contact structures have different sizes. This size difference results in a difference in resistance. In addition, the fins 110 may be associated with separate devices (e.g., an N-channel device and a P-channel device), and the merged epi structure 140 may cause a short circuit between the fins 110 of the separate devices, which may destroy their functionality.
The present disclosure is directed to various methods and resulting devices that may avoid, or at least reduce, the effects of one or more of the problems identified above.
SUMMARY OF THE INVENTION
The following presents a simplified summary of the invention in order to provide a basic understanding of some aspects of the invention. This summary is not an exhaustive overview of the invention. It is not intended to identify key or critical elements of the invention or to delineate the scope of the invention. Its sole purpose is to present some concepts in a simplified form as a prelude to the more detailed description that is discussed later.
Generally, the present disclosure is directed to various methods of forming semiconductor devices. A method includes forming at least one fin on a semiconductor substrate. A silicon alloy material is formed on the fin and on exposed surface portions of the substrate. A thermal process is performed to define a silicon alloy fin from the silicon alloy material and the fin and to define silicon alloy surface portions from the silicon alloy material and the exposed surface portions of the substrate.
Another method includes forming a fin on a semiconductor substrate and forming a silicon germanium material on the fin and on exposed surface portions of the substrate. An insulating layer is formed above the silicon germanium material. A thermal process is performed to define a silicon germanium fin from the silicon germanium material and the fin and to define silicon germanium surface portions from the silicon germanium material and the exposed surface portions of the substrate. The silicon germanium fin has a substantially vertical sidewall profile.
One illustrative semiconductor device includes, among other things, a substrate, a fin defined on the substrate, the fin comprising a silicon alloy and having a substantially vertical sidewall, and silicon alloy surface portions on the substrate adjacent the fin.



BRIEF DESCRIPTION OF THE DRAWINGS
The disclosure may be understood by reference to the following description taken in conjunction with the accompanying drawings, in which like reference numerals identify like elements, and in which:
FIGS. 1A-1B schematically depict an illustrative prior art finFET device;
FIGS. 2A-2E depict various methods disclosed herein of forming a finFET device; and
FIGS. 3A-3B depict an alternative thermal processing technique for the flow depicted in FIGS. 2A-2E.



While the subject matter disclosed herein is susceptible to various modifications and alternative forms, specific embodiments thereof have been shown by way of example in the drawings and are herein described in detail. It should be understood, however, that the description herein of specific embodiments is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.
DETAILED DESCRIPTION
Various illustrative embodiments of the invention are described below. In the interest of clarity, not all features of an actual implementation are described in this specification. It will of course be appreciated that in the development of any such actual embodiment, numerous implementation-specific decisions must be made to achieve the developers' specific goals, such as compliance with system-related and business-related constraints, which will vary from one implementation to another. Moreover, it will be appreciated that such a development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure.
The present subject matter will now be described with reference to the attached figures. Various structures, systems and devices are schematically depicted in the drawings for purposes of explanation only and so as to not obscure the present disclosure with details that are well known to those skilled in the art. Nevertheless, the attached drawings are included to describe and explain illustrative examples of the present disclosure. The words and phrases used herein should be understood and interpreted to have a meaning consistent with the understanding of those words and phrases by those skilled in the relevant art. No special definition of a term or phrase, i.e., a definition that is different from the ordinary and customary meaning as understood by those skilled in the art, is intended to be implied by consistent usage of the term or phrase herein. To the extent that a term or phrase is intended to have a special meaning, i.e., a meaning other than that understood by skilled artisans, such a special definition will be expressly set forth in the specification in a definitional manner that directly and unequivocally provides the special definition for the term or phrase.
The present disclosure generally relates to various methods of forming a finFET device with a uniform silicon alloy fin. As will be readily apparent to those skilled in the art upon a complete reading of the present application, the present method is applicable to a variety of devices, including, but not limited to, logic devices, memory devices, etc. With reference to the attached figures, various illustrative embodiments of the methods and devices disclosed herein will now be described in more detail.
FIGS. 2A-2E illustrate various methods for forming a finFET device 200. FIGS. 2A-2E show a cross-sectional view (in the gate width direction of the device 200) of a substrate 205 with a plurality of fins 210 defined thereon. As shown in FIG. 2A, the fins 210 have a width 211. The substrate 205 may have a variety of configurations, such as the depicted bulk silicon configuration. The substrate 205 may also have a silicon-on-insulator (SOI) configuration that includes a bulk silicon layer, a buried insulation layer and an active layer, wherein semiconductor devices are formed in and above the active layer. The substrate 205 may be formed of silicon or silicon germanium or it may be made of materials other than silicon, such as germanium. Thus, the terms “substrate” or “semiconductor substrate” should be understood to cover all semiconducting materials and all forms of such materials. The substrate 205 may have different layers. For example, the fins 210 may be formed in a process layer formed above a base layer of the substrate 205.
FIG. 2B illustrates the device 200 after an epitaxial growth process is performed to cover the fins 210 and exposed surface portions of the substrate 205 with a silicon alloy cladding material 215, such as silicon germanium having a thickness 216. For purposes of the following examples, it is assumed that the alloy material is germanium. Because the entire height of the fins 210 and the substrate 205 is exposed, the silicon alloy growth is uniform (i.e., the sidewalls of the fins 210 remain substantially vertical) without the characteristic faceting illustrated in FIG. 1B.
FIG. 2C illustrates the device 200 after a deposition process is performed to form an insulating layer 220 above the fins 210 and cladding material 215.
FIG. 2D illustrates the device 200 after a condensation process is performed. During the condensation process, an oxygen-containing ambient is provided or excess oxygen is provided in the insulating layer 220 and the substrate 205 is heated to approximately 400° C. to 1000° C. The oxygen reacts with silicon in the fins 210 and the silicon alloy cladding material 215, causing silicon dioxide to form and precipitate out (i.e., forming a silicon dioxide layer on an outer surface of the fins 210). The germanium in the silicon alloy cladding material 215 thermally mixes with the silicon in the fins 210 to define silicon alloy fins 225. The concentration of the germanium in the silicon alloy fins 225 depends on the initial germanium concentration in the silicon alloy cladding material 215 and the length of the condensation process. For example, the silicon alloy fins 225 may have substantially equal concentrations of silicon and germanium or the silicon alloy fins 225 may be germanium rich (i.e., the germanium concentration is higher than the silicon concentration). Due to the precipitation of silicon dioxide, the width 226 of the silicon alloy fins 225 is decreased compared to the width 211 (FIG. 2A) of the fins 210 with the cladding material 215. In some embodiments, the width 226 of the silicon alloy fins 225 may be less than the width 211 of the original fins 210. Note that the surface portions of the substrate 205 also include silicon alloy surface regions 230. The thermal condensation also serves to anneal and densify the insulating layer 220.
Although the condensation process is illustrated as being performed in the presence of the insulating layer 220 so as to advantageously anneal the insulating layer 220 concurrently with the condensation (e.g., a condensation annealing process), it is contemplated that the condensation process could also be performed prior to depositing the insulating layer 220.
FIG. 2E illustrates the device 200 after a planarization process is performed on the insulating layer 220 (e.g., chemical mechanical planarization) to remove a first portion extending above the silicon alloy fins 225 and an etch process is performed to recess the remaining portion of the insulating layer 220 between the silicon alloy fins 225 to define isolation structures therebetween.
Additional processing steps (not shown) may be performed to complete fabrication of the finFET device 200, such as the forming of a gate electrode structure and implantation steps to dope source/drain regions of the finFET device 200. Silicidation processes may be performed to form contact areas on the finFET device 200, and subsequent metallization layers and interconnect lines and vias may be formed. Other layers of material, such as a stress-inducing contact etch stop layer and the like, may be present but are not depicted in the attached drawings.
FIGS. 3A-3B illustrate an alternative process flow for forming a plurality of silicon alloy fins 300, where an anneal is performed in FIG. 3A to facilitate a thermal mixing process between the fins 210 and silicon alloy cladding material 215 shown in FIG. 2C in lieu of a condensation process by performing the thermal processing in an inert ambient (e.g., nitrogen). During the thermal mixing process, the germanium in the silicon alloy cladding material 215 mixes with the silicon in the fins 210 to define the silicon alloy fins 300. The concentration of the germanium in the silicon alloy fins 300 depends on the initial germanium concentration in the silicon alloy cladding material 215, as there is no precipitation of the silicon. Each silicon alloy fin 300 has a critical dimension 301 corresponding to a width 211 (FIG. 2A) of the fins 210 plus twice the thickness 216 (FIG. 2B) of the silicon alloy cladding material 215. The thermal mixing anneal also serves to anneal and densify the insulating layer 220.
Although the thermal mixing process is illustrated as being performed in the presence of the insulating layer 220 so as to advantageously anneal the insulating layer 220 concurrently with the thermal mixing, e.g., a thermal mixing annealing process, it is contemplated that the process could also be performed prior to depositing the insulating layer 220.
FIG. 3B illustrates the device 200 after a planarization process is performed on the insulating layer 220 (e.g., chemical mechanical planarization) to remove a first portion extending above the silicon alloy fins 300 and an etch process is performed to recess the remaining portion of the insulating layer 220 between the silicon alloy fins 300 to define isolation structures therebetween. Again, subsequent process steps may be performed to complete the fabrication of the device 200.
The uniformity provided by the substantially vertical sidewall profiles of the silicon alloy fins 225, 300 reduce pitch problems as they do not merge in dense regions. Also, the fins 225, 300 are uniform in the channel regions, so they do not affect the operating characteristics of the gate electrode.
The particular embodiments disclosed above are illustrative only, as the invention may be modified and practiced in different but equivalent manners apparent to those skilled in the art having the benefit of the teachings herein. For example, the process steps set forth above may be performed in a different order. Furthermore, no limitations are intended to the details of construction or design herein shown, other than as described in the claims below. It is therefore evident that the particular embodiments disclosed above may be altered or modified and all such variations are considered within the scope and spirit of the invention. Note that the use of terms, such as “first,” “second,” “third” or “fourth” to describe various processes or structures in this specification and in the attached claims is only used as a shorthand reference to such steps/structures and does not necessarily imply that such steps/structures are performed/formed in that ordered sequence. Of course, depending upon the exact claim language, an ordered sequence of such processes may or may not be required. Accordingly, the protection sought herein is as set forth in the claims below.

## Claims

1. A method, comprising:
forming at least one fin on a semiconductor substrate;
forming a silicon alloy material on said fin and on exposed surface portions of said substrate; and
performing a thermal process to define a silicon alloy fin from said silicon alloy material and said fin and to define silicon alloy surface portions from said silicon alloy material and said exposed surface portions of said substrate.

2. The method of claim 1, wherein said silicon alloy fin and said silicon alloy surface portions comprise silicon germanium.

3. The method of claim 2, wherein a germanium concentration of said silicon germanium is higher than a silicon concentration of said silicon germanium.

4. The method of claim 1, further comprising forming an insulating layer above said silicon alloy material prior to performing said thermal process.

5. The method of claim 4, further comprising recessing said insulating layer to a height less than a height of said silicon alloy fin.

6. The method of claim 1, wherein said thermal process comprises a condensation process.

7. The method of claim 1, wherein said thermal process comprises a thermal mixing anneal process.

8. The method of claim 1, wherein said silicon alloy fin has a substantially vertical profile.

9. The method of claim 1, wherein a width of said silicon alloy fin is less than a width of said at least one fin.

10. The method of claim 1, wherein a width of said silicon alloy fin corresponds to a width of said at least one fin and a thickness of said silicon germanium material.

11. A method, comprising:
forming a fin on a semiconductor substrate;
forming a silicon germanium material on said fin and on exposed surface portions of said substrate;
forming an insulating layer above said silicon germanium material; and
performing a thermal process after forming said insulating layer to define a silicon germanium fin from said silicon germanium material and said fin and to define silicon germanium surface portions from said silicon germanium material and said exposed surface portions of said substrate, wherein said silicon germanium fin has a substantially vertical sidewall profile.

12. The method of claim 11, wherein a germanium concentration of said silicon germanium is higher than a silicon concentration of said silicon germanium.

13. The method of claim 11, wherein said thermal process comprises a condensation process.

14. The method of claim 11, wherein said thermal process comprises a thermal mixing anneal process.

15. The method of claim 11, further comprising recessing said insulating layer to a height less than a height of said silicon germanium fin.

16. The method of claim 11, wherein a width of said silicon germanium fin corresponds to a width of said fin and a thickness of said silicon germanium material.

17. A semiconductor device, comprising:
a substrate;
a fin defined on said substrate, wherein said fin comprises a silicon alloy having a different material composition than said substrate and said fin has a substantially vertical sidewall; and
silicon alloy surface portions on said substrate adjacent said fin and having a different material composition than said substrate.

18. The device of claim 17, further comprising an isolation structure disposed adjacent said fin.

19. The device of claim 17, wherein said silicon alloy in said fin and said silicon alloy surface portions comprise silicon germanium.

20. The device of claim 19, wherein a germanium concentration of said silicon germanium is higher than a silicon concentration of said silicon germanium.