# Patent

## Title
Lockout tagout for semiconductor vacuum valve

## Abstract

A device for limiting travel of a valve including a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.

## Background
FIELD OF THE DISCLOSURE
This disclosure relates generally to semiconductor processing, and more particularly to an apparatus and method for safely locking out and tagging out a vacuum valve on a semiconductor reaction chamber.
BACKGROUND
Semiconductor fabrication processes are typically conducted with the substrates supported within a chamber under controlled conditions. For many purposes, semiconductor substrates (e.g., wafers) are heated inside the process chamber. For example, substrates can be heated by direct physical contact with an internally heated wafer holder or “chuck.” “Susceptors” are wafer supports used in systems where the wafer and susceptors absorb heat.
Some of the important controlled conditions for processing include, but are not limited to, pressure of the chamber, fluid flow rate into the chamber, temperature of the reaction chamber, temperature of the fluid flowing into the reaction chamber, and wafer position on the susceptor during wafer loading.
Wafers are loaded through vacuum valves into the chamber with a robot. During operation, the vacuum valves facilitate a separation between the wafer transfer regions and the processing region (the reaction chamber). Advantageously, the vacuum valve is a simple gate valve style device that may operate pneumatically, hydraulically, or by other suitable mechanism. Inevitably the reaction chamber will need to be serviced or cleaned. In some of these instances, it may be necessary or advantageous to keep the vacuum valve in place while performing maintenance. In these cases, it is unsafe because the vacuum valve may be operable and crush/sever a finger or limb.
SUMMARY
Various aspects and implementations are disclosed herein that relate to a reaction chamber with a vacuum valve lockout tagout apparatus. In one aspect, a device for limiting travel of a valve includes a body removably connected to a transfer module, a vacuum valve, or a reaction chamber, a travel limiting rod passing through the body to engage and limit travel of the valve, and wherein the body includes at least one mounting flange opposite the travel limiting rod.
In one implementation, the at least one mounting flange may further include a locating aperture and a mounting aperture. The device may include at least two mounting flanges. The device may include a bottom wall extending perpendicular to the mounting flange. The bottom wall may further include a hole for receiving the travel limiting rod. The hole may be threaded. The travel limiting rod may be threaded. Only a portion of the travel limiting rod may be threaded. The bottom wall may further include a locking hole. The travel limiting rod may further include a plurality of holes which can be aligned with the locking hole. The travel limiting rod may further include a recessed portion on one end. The recessed portion may be engaged with a valve. The device may be removed from the transfer module, the vacuum valve, or the reaction chamber. The travel limiting rod may be rotatable in a first direction to restrict valve movement and rotatable in a second direction to permit valve movement. The base may further include a cutout for surrounding the valve.
In another aspect, a method of locking out a vacuum valve includes the steps of mounting a body to the vacuum valve, positioning a travel limiting rod within a portion of the body, and moving the travel limiting rod to a position which restricts movement of the vacuum valve.
In an implementation, the body may further include at least one locating aperture for connection with a transfer module. The travel limiting rod may be rotated into contact with the vacuum valve. The method may include the step of removing the body after performing a maintenance operation. The method may further include the step of locking the travel limiting rod with a secondary lock.
This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. Furthermore, the claimed subject matter is not limited to implementations that solve any or all disadvantages noted in any part of this disclosure.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 illustrates a front view of the device for limiting travel of a valve mounted to a reaction chamber and vacuum valve.
FIG. 2 illustrates a perspective view of the travel limiting device.
FIG. 3 illustrates a view of the travel limiting device taken generally about line 3-3 in FIG. 1.
FIG. 4 illustrates a front view of the travel limiting device in the unlocked positioned and the travel limiting rod in the unlocked position.
FIG. 5 illustrates a front view of the travel limiting device and travel limiting rod in the locked position.
FIG. 6 illustrates a sectional view of the vacuum valve taken generally about line 6-6 in FIG. 5.
FIG. 7 illustrates a sectional view of a secondary lock taken generally about line 7-7 in FIG. 5.



DETAILED DESCRIPTION
The present aspects and implementations may be described in terms of functional block components and various processing steps. Such functional blocks may be realized by any number of hardware or software components configured to perform the specified functions and achieve the various results. For example, the present aspects may employ various sensors, detectors, flow control devices, heaters, and the like, which may carry out a variety of functions. In addition, the present aspects and implementations may be practiced in conjunction with any number of processing methods, and the apparatus and systems described may employ any number of processing methods, and the apparatus and systems described are merely examples of applications of the invention.
FIGS. 1-7 illustrate various views of a reaction chamber assembly 10 having a reactor 12 with a vacuum valve 14 controlling access to the reactor 12 through vacuum valve opening 16. Vacuum valve 14 includes a mechanical system 18 for operating the vacuum valve. The mechanical system may include a gate 17 with an upper portion 17A passing into vacuum valve opening 16 and a lower portion 17B connected to a valve pin 66. Valve pin 66 is connected to the gate 17 and mechanical system 18 and extends through a hole 19 in the bottom of the mechanism.
A travel limiting device 20 includes a travel limiting body 21 with a cutout 22 and valve tabs 24 arranged around the vacuum valve once mounted to the reactor chamber assembly. The body 21 may also include mounting flanges 25 having mounting apertures 26 with alignment apertures 28 and securing apertures 30 arranged to receive a mounting pin 56 with mounting pin head 58 therein. Mounting flanges 25 also include a top end 32 opposite sidewalls 35 and a bottom wall 34 with a locking aperture 36 in the bottom wall and a threaded sleeve coaxially aligned with locking aperture 36. Still further, bottom wall 34 may also include a tag out aperture 38 for receiving a locking device.
A travel limiting rod 40 includes a non-threaded portion 42, a threaded portion 44, a handle 46, and a plurality of tag out apertures 48. The travel limiting rod 40 moves vertically in the directions associated with arrows 64 and 65 by rotating handle 46 to engage the threaded portion 44 of the travel limiting rod with the locking aperture 36 of body 21. The travel limiting rod 40 may also include a recessed portion 50 at the top end of the rod and is arranged to contact valve pin 66 and ensure consistent contact between the travel limiting rod and the vacuum valve so that the reaction chamber may be safely and properly locked out during maintenance and other necessary work.
Body 21 may also include a cavity 52 formed in part by bottom wall 34, sidewalls 35, and valve tab inner surfaces 54. Valve tab inner surfaces 54 are positioned to contact or at least be in close proximity to the vacuum valve body.
Moving to FIG. 3, mounting pin 56 is shown in greater detail with the mounting pin head 58 positioned outward of a holding area 60 and arranged to receive the body 21 of the travel limiting device. As can be seen, a reactor body 62 receives the mounting pin 56 therein and contacts a rear surface of the travel limiting device.
FIGS. 5 and 7 illustrate views of the tagout 68 having a plurality of tagout apertures 70 arranged to receive a lock 72 therein. Further, a lockout clasp 74 is shown attached through limiting rod tagout aperture and tagout aperture 38. Accordingly, when lockout clasp 74 is closed in position, lock 72 can be used to prevent clasp 74 from opening and thereby limit rotational movement of travel limiting rod 40.
In operation, body 21 may be positioned on mounting pins 56 as shown in FIGS. 1 and 3. Next, travel limiting rod 40 is moved vertically in the direction associated with arrow 64 by rotating handle 46 to provide vertical displacement of recessed portion 50 through hole 19 as seen in FIG. 4. FIG. 5 next shows the vertical displacement of travel limiting rod 40 in the fully upward position as identified by arrow 65. In this manner, upper portion 17A of the gate is locked in the closed position. The interaction between recessed portion 50 and valve pin 66 prevents vertical motion of the valve in the downward direction unless travel limiting rod 40 is rotated. FIG. 7 illustrates how travel limiting rod rotation is limited. Specifically, tagout clasp 74 is passed through travel limiting rod tagout aperture 48 in the handle 46 and tagout aperture 38 in body 21 and prevents relative rotational movement between the body and the handle. Accordingly, the tagout device prevents the travel limiting rod from rotating and thereby allowing the gate valve to move which keeps the device safe during maintenance processes.
These and other embodiments for methods and apparatus for a lockout tagout device therein may incorporate concepts, embodiments, and configurations as described with respect to embodiments of apparatus for measuring devices described above. The particular implementations shown and described are illustrative of the invention and its best mode and are not intended to otherwise limit the scope of the aspects and implementations in any way. Indeed, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the system may not be described in detail. Furthermore, any connecting lines shown in the various figures are intended to represent exemplary functional relationships and/or physical couplings between the various elements. Many alternative or additional functional relationship or physical connections may be present in the practical system, and/or may be absent in some embodiments. Further, various aspects and implementations of other designs may be incorporated within the scope of the disclosure.
As used herein, the terms “comprises”, “comprising”, or any variation thereof, are intended to reference a non-exclusive inclusion, such that a process, method, article, composition or apparatus that comprises a list of elements does not include only those elements recited, but may also include other elements not expressly listed or inherent to such process, method, article, composition or apparatus. Other combinations and/or modifications of the above-described structures, arrangements, applications, proportions, elements, materials or components used in the practice of the present invention, in addition to those not specifically recited, may be varied or otherwise particularly adapted to specific environments, manufacturing specifications, design parameters or other operating requirements without departing from the general principles of the same.

## Claims

1. A device for limiting travel of a valve comprising:
a body removably connected to a vacuum valve or a reaction chamber, the body comprising a cutout to receive a portion of a gate of the valve, wherein the gate moves linearly in a first direction;
a travel limiting rod passing through the body to engage and limit travel of the gate along the first direction by moving the travel limiting rod in a second direction opposite the first direction;
wherein the body includes at least one mounting flange opposite the travel limiting rod; and
wherein the travel limiting rod is rotatable in a first rotational direction to restrict valve movement and rotatable in a second rotational direction to permit valve movement.

2. The device of claim 1 wherein the at least one mounting flange further comprises an alignment aperture.

3. The device of claim 2 further comprising at least two mounting flanges.

4. The device of claim 1 wherein the body comprises a bottom wall extending perpendicular to the mounting flange.

5. The device of claim 4 wherein the bottom wall comprises a hole for receiving the travel limiting rod.

6. The device of claim 5 wherein the hole is threaded.

7. The device of claim 6 wherein the travel limiting rod is threaded.

8. The device of claim 6 wherein only a portion of the travel limiting rod is threaded.

9. The device of claim 4 wherein the bottom wall further comprises a locking hole.

10. The device of claim 9 wherein the travel limiting rod further comprises a plurality of holes which can be aligned with the locking hole.

11. The device of claim 1 wherein the travel limiting rod further comprises a recessed portion on one end.

12. The device of claim 11 wherein the recessed portion is engaged with a valve.

13. The device of claim 1 wherein the device may be removed from the vacuum valve or the reaction chamber.

14. The device of claim 1 wherein the at least one mounting flange further comprises a mounting aperture.

15. The device of claim 1 wherein the body further comprises a valve tab.

16. A method of locking out a vacuum valve comprising the steps of:
providing a vacuum valve comprising a gate that moves in a first direction;
mounting a body to the vacuum valve or a surface;
positioning a travel limiting rod within a portion of the body to limit travel of the gate along the direction;
moving the travel limiting rod in a second direction opposite the first direction to a position which restricts movement of the vacuum valve; and
wherein the travel limiting rod is rotated into contact with a valve pin of the vacuum valve.

17. The method of claim 16 wherein the body further comprises at least one aperture for receiving a mounting pin.

18. The method of claim 16 further comprising the step of removing the body after performing a maintenance operation.

19. The method of claim 16 further comprising the step of locking the travel limiting rod with a secondary lock.