##### Table of Contents



STRICTLY CONFIDENTIAL
    
    Execution Copy




---



##### 



TABLE OF CONTENTS
 PageARTICLE IDEFINITIONSSECTION 1.01.
    
    Certain Defined Terms
    
    
    1SECTION 1.02.
    
    Definitions
    
    
    6SECTION 1.03.
    
    Interpretation and Rules of Construction
    
    
    7ARTICLE IIPURCHASE AND SALESECTION 2.01.
    
    Purchase and Sale of the Shares
    
    
    8SECTION 2.02.
    
    Aggregate Purchase Price
    
    
    8SECTION 2.03.
    
    Closing
    
    
    8SECTION 2.04.
    
    Closing Deliveries by the Sellers
    
    
    8SECTION 2.05.
    
    Closing Deliveries by the Purchaser
    
    
    9SECTION 2.06.
    
    Post-Closing Adjustment of Aggregate Purchase Price
    
    
    9ARTICLE IIIREPRESENTATIONS AND WARRANTIES OF HITACHISECTION 3.01.
    
    Organization, Authority and Qualification of the Sellers
    
    
    11SECTION 3.02.
    
    Organization, Authority and Qualification of the Company
    
    
    12SECTION 3.03.
    
    Capitalization; Ownership of Shares
    
    
    12SECTION 3.04.
    
    No Conflict
    
    
    13SECTION 3.05.
    
    Governmental and Third Party Consents and Approvals
    
    
    13SECTION 3.06.
    
    Financial Information
    
    
    14SECTION 3.07.
    
    Absence of Undisclosed Material Liabilities
    
    
    14SECTION 3.08.
    
    Conduct in the Ordinary Course
    
    
    15SECTION 3.09.
    
    Litigation.
    
    
    15SECTION 3.10.
    
    Compliance with Laws
    
    
    15SECTION 3.11.
    
    Environmental Matters
    
    
    15SECTION 3.12.
    
    Proprietary Rights
    
    
    16SECTION 3.13.
    
    Real Property
    
    
    16SECTION 3.14.
    
    Employee Benefit Matters
    
    
    17SECTION 3.15.
    
    Taxes
    
    
    18SECTION 3.16.
    
    Material Contracts
    
    
    19SECTION 3.17.
    
    Brokers
    
    
    20SECTION 3.18.
    
    Tangible Personal Property; Sufficiency of
Assets; Capacity of Wafer Fabrication Facility
    
    
    20SECTION 3.19.
    
    Insurance
    
    
    21SECTION 3.20.
    
    Related Party Transactions
    
    
    21SECTION 3.21.
    
    Suppliers
    
    
    22
 Execution Copy
    
    i




---



##### Table of Contents



PageSECTION 3.22.
    
    Labor Matters
    
    
    22SECTION 3.23.
    
    Permits
    
    
    22SECTION 3.24.
    
    Disclaimer of Sellers
    
    
    22ARTICLE IVREPRESENTATIONS AND WARRANTIES OF THE PURCHASERSECTION 4.01.
    
    Organization and Authority of the Purchaser
    
    
    23SECTION 4.02.
    
    No Conflict
    
    
    23SECTION 4.03.
    
    Governmental and Third Party Consents and Approvals
    
    
    23SECTION 4.04.
    
    Financing
    
    
    23SECTION 4.05.
    
    Litigation
    
    
    23SECTION 4.06.
    
    Brokers
    
    
    24SECTION 4.07.
    
    Independent Investigation; Sellers Representations
    
    
    24ARTICLE VADDITIONAL AGREEMENTSSECTION 5.01.
    
    Conduct of Business Prior to the Closing
    
    
    24SECTION 5.02.
    
    Access to Properties and Information
    
    
    26SECTION 5.03.
    
    Confidentiality
    
    
    27SECTION 5.04.
    
    Regulatory and Other Authorizations; Notices and Consents
    
    
    27SECTION 5.05.
    
    Retained Names and Marks
    
    
    28SECTION 5.06.
    
    Notifications
    
    
    28SECTION 5.07.
    
    Cash at Closing
    
    
    29SECTION 5.08.
    
    Further Action
    
    
    29SECTION 5.09.
    
    Tax Matters
    
    
    29SECTION 5.10.
    
    Aggregate Purchase Price Allocation Schedule
    
    
    30SECTION 5.11.
    
    Ancillary Agreements
    
    
    30ARTICLE VIEMPLOYEE MATTERSSECTION 6.01.
    
    Continued Employment
    
    
    30SECTION 6.02.
    
    Expatriate Personnel
    
    
    31ARTICLE VIICONDITIONS TO CLOSINGSECTION 7.01.
    
    Conditions to Obligations of the Sellers
    
    
    31SECTION 7.02.
    
    Conditions to Obligations of the Purchaser
    
    
    31SECTION 7.03.
    
    Mutual Conditions
    
    
    32
 Execution Copy
    
    ii




---



##### Table of Contents



PageARTICLE VIIIINDEMNIFICATIONSECTION 8.01.
    
    Survival of Representations and Warranties
    
    
    33SECTION 8.02.
    
    Indemnification by the Sellers
    
    
    33SECTION 8.03.
    
    Indemnification by the Purchaser
    
    
    34SECTION 8.04.
    
    Limits on Indemnification
    
    
    34SECTION 8.05.
    
    Notice of Loss; Third Party Claims
    
    
    35SECTION 8.06.
    
    Remedies
    
    
    35ARTICLE IXTERMINATION, AMENDMENT AND WAIVERSECTION 9.01.
    
    Termination
    
    
    35SECTION 9.02.
    
    Effect of Termination
    
    
    36ARTICLE XGENERAL PROVISIONSSECTION 10.01.
    
    Expenses
    
    
    37SECTION 10.02.
    
    Notices
    
    
    37SECTION 10.03.
    
    Public Announcements
    
    
    38SECTION 10.04.
    
    Severability
    
    
    38SECTION 10.05.
    
    Entire Agreement
    
    
    38SECTION 10.06.
    
    Assignment
    
    
    38SECTION 10.07.
    
    Amendment
    
    
    38SECTION 10.08.
    
    Waiver
    
    
    38SECTION 10.09.
    
    No Third Party Beneficiaries
    
    
    38SECTION 10.10.
    
    Currency
    
    
    39SECTION 10.11.
    
    Governing Law
    
    
    39SECTION 10.12.
    
    Arbitration
    
    
    39SECTION 10.13.
    
    Counterparts
    
    
    39
 EXHIBITSA
    
    
    
    Form of Aggregate Purchase Price Allocation ScheduleB
    
    
    
    Matters To Be Covered In Opinions of Sellers CounselSCHEDULES1.01
    
    
    
    Sellers Knowledge2.04
    
    
    
    Closing Deliveries by Seller2.06(a)
    
    
    
    Estimated Working Capital Statement5.11(b)
    
    
    
    Ancillary Agreements with Hitachis Affiliates5.11(c)
    
    
    
    Eight Shut Down Tools
 Execution Copy
    
    iii




---



##### Table of Contents



Agreement Hitachi HAS Seller Sellers Purchaser
 Company Business
 Class A Shares Class C Shares Hitachi
Recapitalization Shares HAS Recapitalization Shares Recapitalization Shares Shares
  Renesas Foundry Agreement
  
 ARTICLE I
 
 DEFINITIONS
 
 Certain Defined Terms
 Action
 Execution Copy
    
    1




---



##### Table of Contents



Affiliate
 Aggregate Purchase Price Allocation Schedule
 Assets
 Balance Sheet Date
 Business Day
 CCS
 Closing Financial Statements
 Closing Working Capital Statement
 Competition Act
 control controlled by under common control
with
 Conveyance Taxes
 Designated Amount
 Disclosure Schedule
 Execution Copy
    
    2




---



##### Table of Contents



Encumbrance
 Environmental Law
 Environmental Permits
 Estimated Working Capital Statement
 Excluded Liabilities
 Excluded Taxes provided however
 Execution Copy
    
    3




---



##### Table of Contents



Governmental Authority
 Governmental Order
 HIT
 HIT Intercompany Liabilities
 Indemnified Party
 Indemnifying Party
 Law
 Leased Real Property
 Liabilities
 Material Adverse Effect
 Execution Copy
    
    4




---



##### Table of Contents



Organizational Documents
 Permitted Encumbrances
 Person
 Proprietary Rights
 Purchase Price Bank Accounts
 Purchasers Accountants
 Sellers Accountants
 Execution Copy
    
    5




---



##### Table of Contents



Sellers Knowledge Knowledge of the Sellers
 SFRS
 Singapore
 S$ Singapore dollars
 Stamp Duty Documents
 Straddle Period
 Subsidiary
 Tax Taxes
 Tax Returns
 Working Capital
 
 Definitions
 Definition
    
    LocationAgreement
    
    PreambleAggregate Purchase Price
    
    2.02Business
    
    RecitalsClass A Shares
    
    RecitalsClass C Shares
    
    RecitalsClosing
    
    2.03Closing Date
    
    2.03Confidential Memorandum
    
    4.07
 Execution Copy
    
    6




---



##### Table of Contents



Definition
    
    LocationCompany
    
    RecitalsEmployee Benefit Plans
    
    3.14(a)Foundry Agreement
    
    RecitalsFinancial Statements
    
    3.06(a)Governmental Approval
    
    5.04(a)HAS
    
    PreambleHAS Recapitalization Shares
    
    RecitalsHitachi
    
    PreambleHitachi Recapitalization Shares
    
    RecitalsIndependent Accounting Firm
    
    2.06(c)(ii)Loss
    
    8.02(a)Material Contracts
    
    3.16(a)Nondisclosure Agreement
    
    5.03(a)Permits
    
    3.23Personal Property Lease
    
    3.16(a)(vii)Purchaser
    
    PreamblePurchaser Indemnified Party
    
    8.02(a)Recapitalization
    
    3.03(b)Recapitalization Shares
    
    RecitalsRenesas
    
    RecitalsRenesas Employee Benefit Plans
    
    3.14(a)Renesas Irrevocable Purchase Order
    
    5.11(c)Renesas MOU
    
    3.16(c)Retained Names and Marks
    
    5.05(a)Secondee Loans
    
    3.14(g)Seller
    
    PreambleSeller Indemnified Party
    
    8.03Sellers
    
    PreambleShares
    
    RecitalsThird Party Claim
    
    8.05(b)
 
 Interpretation and Rules of Construction
     Execution Copy
    
    7




---



##### Table of Contents



ARTICLE II
 
 PURCHASE AND SALE
 
 Purchase and Sale of the Shares
 
 Aggregate Purchase Price Aggregate Purchase Price
 
 Closing Closing Closing Date
 
 Closing Deliveries by the Sellers
   Execution Copy
    
    8




---



##### Table of Contents



Closing Deliveries by the Purchaser
    
 Post-Closing Adjustment of Aggregate Purchase Price
 Estimated Working Capital Statement
 Closing Working Capital Statement; Closing Financial Statements
 Disputes
 Execution Copy
    
    9




---



##### Table of Contents



provided however Independent Accounting Firm
  Aggregate Purchase Price Adjustment
 Execution Copy
    
    10




---



##### Table of Contents



Interest on Payments
 Withholding
 
 ARTICLE
III
 
 REPRESENTATIONS AND WARRANTIES OF HITACHI
  
 Organization, Authority and Qualification of the Sellers
 Execution Copy
    
    11




---



##### Table of Contents



Organization, Authority and Qualification of the Company
  
 Capitalization; Ownership of Shares
 Recapitalization
 Execution Copy
    
    12




---



##### Table of Contents



No Conflict
 
 Governmental and Third Party Consents and Approvals
 Execution Copy
    
    13




---



##### Table of Contents



Financial Information Financial Statements
       
 Absence of Undisclosed Material Liabilities
  Execution Copy
    
    14




---



##### Table of Contents



Conduct in the Ordinary Course
 
 Litigation.
 
 Compliance with Laws
 
 Environmental Matters
 Execution Copy
    
    15




---



##### Table of Contents



Proprietary Rights
     
 Real Property
  Execution Copy
    
    16




---



##### Table of Contents



Employee Benefit Matters Employee Benefit Plans Renesas Employee Benefit Plans
   Execution Copy
    
    17




---



##### Table of Contents



Secondee Loans
 
 Taxes
  Execution Copy
    
    18




---



##### Table of Contents



Material Contracts Material Contracts
       Execution Copy
    
    19




---



##### Table of Contents



Personal Property
Lease Personal Property Leases
   Renesas MOU
 
 Brokers
 
 Tangible Personal Property; Sufficiency of Assets; Capacity of Wafer
Fabrication Facility
 Execution Copy
    
    20




---



##### Table of Contents



Insurance
 
 Related Party Transactions
  Execution Copy
    
    21




---



##### Table of Contents



Suppliers
 
 Labor Matters
 
 Permits Permits
 
 Disclaimer of Sellers
 
 ARTICLE IV
 
 REPRESENTATIONS AND WARRANTIES
OF THE PURCHASER
  Execution Copy
    
    22




---



##### Table of Contents



Organization and Authority of the Purchaser
 
 No Conflict
 
 Governmental and Third Party Consents and Approvals
 
 Financing
 
 Litigation
 Execution Copy
    
    23




---



##### Table of Contents



Brokers
 
 Independent Investigation; Sellers Representations Confidential
Memorandum
 
 ARTICLE V
 
 ADDITIONAL AGREEMENTS
 
 Conduct of Business Prior to the Closing
 Execution Copy
    
    24




---



##### Table of Contents



Execution Copy
    
    25




---



##### Table of Contents



Access to Properties and Information provided however
 provided however
 provided however
 Execution Copy
    
    26




---



##### Table of Contents



Confidentiality Nondisclosure Agreement provided however
  
 Regulatory and Other Authorizations; Notices and Consents Governmental Approvals Governmental Approvals
  Execution Copy
    
    27




---



##### Table of Contents



Retained Names and Marks Retained Names and Marks
   
 Notifications provided however
 Execution Copy
    
    28




---



##### Table of Contents



Cash at Closing
 
 Further Action
 
 Tax Matters
    Execution Copy
    
    29




---



##### Table of Contents



Aggregate Purchase Price Allocation Schedule
 
 Ancillary Agreements
  Renesas Irrevocable Purchase Order
 
 ARTICLE VI
 
 EMPLOYEE MATTERS
 
 Continued Employment
 Execution Copy
    
    30




---



##### Table of Contents



provided however provided further,
 
 Expatriate Personnel
 
 ARTICLE VII
 
 CONDITIONS TO CLOSING
 
 Conditions to Obligations of the Sellers
 Representations, Warranties and Covenants
 Governmental Approvals
 
 Conditions to Obligations of the Purchaser
 Representations, Warranties and Covenants
 Execution Copy
    
    31




---



##### Table of Contents



No Material Adverse Effect
 Governmental Approvals
 Foundry Agreement
 Renesas Irrevocable Purchase Order
 Additional Events
   
 Mutual Conditions
 Execution Copy
    
    32




---



##### Table of Contents



ARTICLE VIII
 
 INDEMNIFICATION
 
 Survival of Representations and Warranties provided however provided further provided however
 
 Indemnification by the Sellers Purchaser Indemnified
Party Loss
    Execution Copy
    
    33




---



##### Table of Contents



Indemnification by the Purchaser Seller Indemnified
Party
 
 Limits on Indemnification
  Execution Copy
    
    34




---



##### Table of Contents



Notice of Loss; Third Party Claims
 Third Party Claim provided however
 
 Remedies
 
 ARTICLE IX
 
 TERMINATION, AMENDMENT AND WAIVER
 
 Termination
 Execution Copy
    
    35




---



##### Table of Contents



provided however
    
 Effect of Termination
 Execution Copy
    
    36




---



##### Table of Contents



ARTICLE X
 
 GENERAL PROVISIONS
 
 Expenses
 
 Notices
 (a)
    
    if to the Sellers:Hitachi, Ltd.Nihon Seimei Marunouchi Building6-6 Marunouchi 1-chomeChiyoda-ku, Tokyo 100-8280JapanFacsimile:
    
    +81-3-4564-2159Attention:
    
    Shoji OkuyoshiSenior ManagerGroup Company OfficeHitachi Group Headquarters(b)
    
    if to the Purchaser:Chartered Semiconductor Manufacturing Ltd.60 Woodlands Industrial Park DStreet 2Singapore 738406Facsimile:
    
    +65-6360-4970Attention:
    
    General Counsel
 Execution Copy
    
    37




---



##### Table of Contents



Public Announcements
 
 Severability
 
 Entire Agreement
 
 Assignment provided however
 
 Amendment
 
 Waiver
 
 No Third Party Beneficiaries
 Execution Copy
    
    38




---



##### Table of Contents



Currency
 
 Governing Law
 
 Arbitration
 
 Counterparts
 Execution Copy
    
    39




---



##### Table of Contents



HITACHI, LTD.By:
    /s/ Eiji TakedaName: Eiji TakedaTitle: Vice President and Executive Officer HITACHI ASIA LTD.By:
    /s/ Toshio TodaName: Toshio TodaTitle: Managing Director CHARTERED SEMICONDUCTOR MANUFACTURING LTD.By:
    /s/ Chia Song HweeName: Chia Song HweeTitle: President and Chief Executive Officer Execution Copy
    40




---



##### Table of Contents



EXHIBIT A
  
   Agreement Purchaser
  (1)
    
    Amount
    
    :
    
    S$[]Payment to
    
    :
    
    The Bank of Tokyo Mitsubishi UFJ, Ltd.Account Name
    
    :
    
    Hitachi, LtdBranch
    
    :
    
    Head OfficeSWIFT Code
    
    :
    
    BOTKJPJTAccount No.
    
    :
    
    0153613(2)
    
    Amount
    
    :
    
    S$[]Payment to
    
    :
    
    The Bank of Tokyo Mitsubishi UFJ, Ltd.Account Name
    
    :
    
    Hitachi International Treasury Ltd.For the benefit of
    
    :
    
    Hitachi, LtdBranch
    
    :
    
    Singapore BranchSWIFT Code
    
    :
    
    BOTKSGSXAccount No.
    
    :
    
    100298
 Execution Copy
    
    Exhibit A-1




---



##### Table of Contents



(3)
    
    Amount
    
    :
    
    S$[]Payment to
    
    :
    
    The Bank of Tokyo Mitsubishi UFJ, Ltd.Account Name
    
    :
    
    Hitachi Asia Ltd.Branch
    
    :
    
    Singapore BranchSWIFT Code
    
    :
    
    BOTKSGSXAccount No.
    
    :
    
    029658(4)
    
    Amount
    
    :
    
    S$[]Payment to
    
    :
    
    The Bank of Tokyo Mitsubishi UFJ, Ltd.Account Name
    
    :
    
    Hitachi International Treasury Ltd.For the benefit of
    
    :
    
    Hitachi Asia Ltd.Branch
    
    :
    
    Singapore BranchSWIFT Code
    
    :
    
    BOTKSGSXAccount No.
    
    :
    
    100298
 Very truly yours,
Hitachi, Ltd.By:Name:Title: Execution Copy
    
    Exhibit A-2




---



##### Table of Contents



EXHIBIT B
   1.
    
    Each Seller is a corporation validly existing under the laws of [Japan] [Singapore].
(Japanese counsel and Singapore counsel)2.
    
    Each Seller (a) has the corporate power to execute, deliver and perform the Stock Purchase
Agreement, (b) has taken all corporate action necessary to authorize the execution, delivery
and performance of the Stock Purchase Agreement, and (c) has duly executed and delivered the
Stock Purchase Agreement. (Japanese counsel and Singapore counsel)3.
    
    The execution and delivery by each Seller of the Stock Purchase Agreement does not, and the
performance by it of its obligations thereunder and the consummation of the transactions
contemplated thereby will not, (a) result in a violation of such relevant partys articles of
incorporation or by-laws (or similar charter documents), or (b) result in a violation of
applicable Law. (Japanese counsel and Singapore counsel)4.
    
    The Stock Purchase Agreement is the legal, valid and binding obligation of each Seller that
is a party thereto, enforceable against such Seller in accordance with its terms. (US counsel)5.
    
    The Companys authorized capital stock consists of [], [] of which are issued
and outstanding of record prior to the Closing. All of such issued and outstanding shares are
duly authorized and validly issued and fully paid and nonassessable. (Singapore counsel)6.
    
    Assuming the Purchaser acquire the Shares in good faith and without notice of adverse claim
and in compliance with any applicable laws, the delivery of the share certificates and other
instruments of transfer in the manner provided in the Stock Purchase Agreement will transfer
to the Purchaser good and valid title to the Shares, free and clear of all Encumbrances.
(Singapore counsel)
 Execution Copy
    
    Exhibit B




---



##### Table of Contents



SCHEDULE 1.01
  1.
    
    Yoshiatsu Hayashi2.
    
    Mitsuaki Nishiyama3.
    
    Shoji Okuyoshi4.
    
    Kunihiro Wakabayashi5.
    
    Yutaka Emoto6.
    
    Kazunori Uete
 Execution Copy
    
    Schedule 1.01




---



##### Table of Contents



SCHEDULE 2.04
   (a)
    
    a certificate of a duly authorized officer of that Seller, dated as of the Closing Date,
certifying as to the matters set forth in Sections 7.01(b) and Sections 7.02(a), (b) and (f),
in form and substance reasonably satisfactory to the Purchaser;(b)
    
    the written resignations of each director of the Company with an acknowledgement from each
director that he has no claims against the Company for compensation for loss of office,
redundancy, unfair dismissal or otherwise;(c)
    
    certified true copies of the resolutions, duly adopted by the board of directors of each
Seller and in form and substance reasonably satisfactory to the Purchaser, authorizing that
Sellers execution and delivery of this Agreement and the consummation of the transactions
contemplated hereby and thereby;(d)
    
    an opinion of counsel to the Sellers, Shearman & Sterling LLP, on New York law, dated as of
the Closing Date, covering the matters set forth in Exhibit B, in form and substance
reasonably satisfactory to the Purchaser;(e)
    
    an opinion of counsel to the Sellers, Allen & Gledhill LLP, on Singapore law, dated as of the
Closing Date, covering the matters set forth in Exhibit B, in form and substance reasonably
satisfactory to the Purchaser;(f)
    
    an opinion of counsel to the Sellers, Mori Hamada & Matsumoto, on Japanese law, dated as of
the Closing Date and with a certified English translation, covering the matters set forth in
Exhibit B, in form and substance reasonably satisfactory to the Purchaser;(g)
    
    the Stamp Duty Documents; and(h)
    
    such other documents as may be reasonably requested by the Purchaser to evidence the
satisfaction by the Sellers of the other conditions set forth in Section 7.01, Section 7.02 or
Section 7.03 or which may otherwise be necessary to effect the transactions contemplated
hereby or thereby,
  Execution Copy
    
    Schedule 2.04




---



##### Table of Contents



SCHEDULE 2.06(a)
    Current AssetsInventories
    
    
    24,251,000Trade Receivables
    
    
    19,392,000Other receivables, deposits and prepayments
    
    
    1,995,000Short term deposits
    
    
    Cash and cash equivalents
    
    
    300,00045,938,000Current LiabilitiesTrade Payables
    
    
    25,644,000Other payables and accruals
    
    
    12,155,000Loan from a related company
    
    
    Provision for income tax
    
    
    7,00037,806,000Working CapitalCurrent Assets
    
    
    45,938,000 Current Liabilities
    
    
    37,806,0008,132,000
     Execution Copy
    
    Schedule 2.06(a)




---



##### Table of Contents



SCHEDULE 5.11(b)
  1.
    
    Consignment Agreement for Utility Facilities Maintenance, dated as of March 31, 2006, between
the Company and Hitachi Plant Engineering and Construction Co., Ltd.2.
    
    Maintenance Services Agreement, dated as of May 1, 2007, between the Company and Hitachi High
  Technologies (Singapore) Pte Ltd relating to the provision of support and services for the
FACIM sub-system.
 Execution Copy
    
    Schedule 5.11(b)




---



##### Table of Contents



SCHEDULE 5.11(c)
  SerialNumber
    
    Process Category
    
    M/C Model
    
    Maker
    
    EquipmentNumber
    
    Installation site1.
    
    465
    
    Poly Si Depo
    
    DJ-853V
    
    Kokusai Electric
    
    H-P03
    
    RT/Kofu2.
    
    474
    
    Poly Si Depo (L/L)
    
    DJ-835V (L/L)
    
    Kokusai Electric
    
    H-N06
    
    RT/Kofu3.
    
    475
    
    Poly Si Depo (L/L)
    
    DJ-835V (L/L)
    
    Kokusai Electric
    
    H-N07
    
    RT/Kofu4.
    
    506
    
    Lamp Anneal
    
    HP8800
    
    METRON
    
    N-G01
    
    RT/Kofu5.
    
    507
    
    Lamp Anneal
    
    HP8800
    
    METRON
    
    N-G02
    
    RT/Kofu6.
    
    509
    
    Lamp Anneal
    
    HP8800
    
    METRON
    
    N-G04
    
    RT/Naka7.
    
    510
    
    Lamp Anneal
    
    HP8800
    
    METRON
    
    N-G05
    
    RT/Kofu8.
    
    512
    
    Lamp Anneal
    
    HP8800
    
    METRON
    
    N-H03
    
    RT/Naka
 Execution Copy
    
    Schedule 5.11(c)