# Patent

## Title
Organic layer deposition apparatus

## Abstract

An organic layer deposition apparatus capable of reducing or minimizing shifting of a pattern, caused when a patterning slit sheet sags.

## Background
CROSS-REFERENCE TO RELATED PATENT APPLICATION
This application claims priority to and the benefit of Korean Patent Application No. 10-2010-0107712, filed on Nov. 1, 2010, in the Korean Intellectual Property Office, the entire content of which is incorporated herein by reference.
BACKGROUND
1. Field
One or more aspects of the present invention relate to an organic layer deposition apparatus.
2. Description of the Related Art
Organic light-emitting display devices have a larger viewing angle, better contrast characteristics, and a faster response rate than other display devices, and thus have drawn attention as next-generation display devices.
An organic light-emitting display device includes intermediate layers, including an emission layer disposed between a first electrode and a second electrode that are arranged opposite to each other. The electrodes and the intermediate layers may be formed by using various methods, one of which is to perform a separate deposition method for each layer. When an organic light-emitting display device is manufactured by using the deposition method, a fine metal mask (FMM) having the same pattern as a thin film to be formed is disposed to closely contact a substrate, and a thin film material is deposited over the FMM in order to form the thin film having a desired pattern.
However, the deposition method using such a FMM is not suitable for manufacturing larger devices using a mother glass having a fifth generation (5G) size sheet or greater. In other words, when such a large mask is used, the mask may bend due to self-gravity, thereby distorting a pattern. This is not conducive for the recent trend towards high-definition patterns.
SUMMARY
In order to address the drawback of the deposition method using a fine metal mask (FMM), one or more aspects of the present invention are directed toward an organic layer deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and can reduce or prevent a pattern from being shifted and a shadow from being created, which are caused when a patterning slit sheet is sagging.
According to an embodiment of the present invention, there is provided an organic layer deposition apparatus for forming an organic layer on a substrate, the apparatus including a deposition source for discharging a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed to face the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction perpendicular to the first direction. The plurality of patterning slits include a central patterning slit formed at a center of the patterning slit sheet; a plurality of left patterning slits disposed to the left of the central patterning slit; and a plurality of right patterning slits disposed to the right of the central patterning slit. The plurality of left patterning slits and the plurality of right patterning slits bend toward the central patterning slit.
A lengthwise direction of the central patterning slit may be parallel with the first direction.
The plurality of left patterning slits and the plurality of right patterning slits may bend toward a midpoint on the central patterning slit.
Widths of the plurality of patterning slits may be the same.
Distances between adjacent left patterning slits may be the same.
Distances between adjacent right patterning slits may be the same.
Distances between adjacent patterning slits may not be the same.
The farther the plurality of left patterning slits are located away from the central patterning slit, the shorter the distances between adjacent left patterning slits may be.
The farther the plurality of right patterning slits are located away from the central patterning slit, the shorter the distances between adjacent right patterning slits may be.
Widths of the plurality of patterning slits may be the same.
Widths of the plurality of patterning slits may not be the same.
The farther the plurality of left patterning slits are located away from the central patterning slit, the less the widths of the plurality of left patterning slits may be.
The farther the plurality of right patterning slits are located away from the central patterning slit, the less the widths of the plurality of right patterning slits may be.
Distances between adjacent left patterning slits may be the same.
Distances between adjacent right patterning slits may be the same.
The deposition source, the deposition source nozzle unit, and the patterning slit sheet may be integrated as one body.
The deposition source, the deposition source nozzle unit, and the patterning slit sheet may be integrated as one body via connection members that guide movement of the deposition material.
The connection members may be formed to seal a space between the deposition source, the deposition source nozzle unit, and the patterning slit sheet.
The plurality of deposition source nozzles may be tilted at a set or predetermined angle.
The plurality of deposition source nozzles may include deposition source nozzles arranged in two rows in the first direction, wherein the deposition source nozzles in the two rows are tilted to face each other.
The plurality of deposition source nozzles may include deposition source nozzles arranged in first and second rows in the first direction. The deposition source nozzles of the first row located to overlap a left side of the patterning slit sheet may be arranged to face a right side of the patterning slit sheet. The deposition source nozzles of the second row located to overlap the right side of the patterning slit sheet may be arranged to face the left side of the patterning slit sheet.
The central patterning slit may extend along a direction to correspond to the first direction in which the plurality of deposition source nozzles are arranged.



BRIEF DESCRIPTION OF THE DRAWINGS
The accompanying drawings, together with the specification, illustrate exemplary embodiments of the present invention, and, together with the description, serve to explain the principles of the present invention.
FIG. 1 illustrates an organic layer deposition system that includes an organic layer deposition apparatus according to an embodiment of the present invention;
FIG. 2 illustrates a modified example of the organic layer deposition system of FIG. 1;
FIG. 3 is a schematic view of an electrostatic chuck according to an embodiment of the present invention;
FIG. 4 is a schematic perspective view of an organic layer deposition apparatus according to an embodiment of the present invention;
FIG. 5 is a schematic side sectional view of the organic layer deposition apparatus of FIG. 4;
FIG. 6 is a schematic plan view of the organic layer deposition assembly of FIG. 4;
FIG. 7 is a schematic perspective view illustrating a state in which a patterning slit sheet is sagging;
FIG. 8 is a cross-sectional view taken along the line I-I of FIG. 7;
FIG. 9 illustrates a diagram comparing an organic layer pattern to be formed when a patterning slit sheet is sagging to an organic layer pattern to be formed when the patterning is not sagging;
FIG. 10 illustrates an organic layer pattern formed on a substrate when a patterning slit sheet is sagging;
FIG. 11 is a plan view illustrating a modified example of a patterning slit sheet according to an embodiment of the present invention;
FIG. 12 is a plan view illustrating another modified example of a patterning slit sheet according to an embodiment of the present invention;
FIG. 13 is a plan view illustrating another modified example of a patterning slit sheet according to an embodiment of the present invention;
FIG. 14 is a schematic perspective view of an organic layer deposition apparatus according to another embodiment of the present invention;
FIG. 15 is a schematic perspective view of an organic layer deposition apparatus according to another embodiment of the present invention;
FIG. 16 is a cross-sectional view of an active matrix organic light-emitting display device fabricated by using an organic layer deposition apparatus according to an embodiment of the present invention.



DETAILED DESCRIPTION
In the following detailed description, only certain exemplary embodiments of the present invention are shown and described, by way of illustration. As those skilled in the art would recognize, the invention may be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Also, in the context of the present application, when a first element is referred to as being “on” a second element, it can be directly on the second element or be indirectly on the second element with one or more intervening elements interposed therebetween. Like reference numerals designate like elements throughout the specification.
FIG. 1 illustrates an organic layer deposition system that includes an organic layer deposition apparatus according to an embodiment of the present invention. FIG. 2 illustrates a modified example of the organic layer deposition system of FIG. 1. FIG. 3 is a schematic view of an electrostatic chuck 600 according to an embodiment of the present invention.
Referring to FIG. 1, the organic layer deposition apparatus includes a loading unit 710, a deposition unit 730, an unloading unit 720, a first conveyer unit 610, and a second conveyer unit 620.
The loading unit 710 may include a first rack 712, a transport robot 714, a transport chamber 716, and a first inversion chamber 718.
A plurality of substrates 500 onto which a deposition material is not applied are stacked up on the first rack 712. The transport robot 714 picks up one of the substrates 500 from the first rack 712, disposes it on an electrostatic chuck 600 transferred by the second conveyor unit 620, and moves the electrostatic chuck 600 having the substrate 500 thereon into the transport chamber 716.
The first inversion chamber 718 is disposed adjacent to the transport chamber 716. A first inversion robot 719 disposed in the first inversion chamber 718 inverts the electrostatic chuck 600 and then loads it into the first conveyer unit 610 of the deposition unit 730.
Referring to FIG. 3, the electrostatic chuck 600 may include an electrode 602 embedded in a main body 601 of the electrostatic chuck 600. Here, the main body 601 is formed of ceramic, and the electrode 602 is supplied with power. The substrate 500 is attached to a surface of the main body 601 when high voltage is applied to the electrode 602.
Referring back to FIG. 1, the transport robot 714 places one of the substrates 500 on the electrostatic chuck 600, and the electrostatic chuck 600 having the substrate 500 thereon is loaded into the transport chamber 716. The first inversion robot 719 inverts the electrostatic chuck 600 so that the substrate 500 is turned upside down in the deposition unit 730.
The unloading unit 720 is constituted to operate in an opposite manner to the loading unit 710 described above. Specifically, a second inversion robot 729 in a second inversion chamber 728 inverts the electrostatic chuck 600 having the substrate 500 thereon, which has passed through the deposition unit 730, and then moves the electrostatic chuck 600 having the substrate 500 thereon into an ejection chamber 726. Then, an ejection robot 724 removes the electrostatic chuck 600 having the substrate 500 thereon from the ejection chamber 726, separates the substrate 500 from the electrostatic chuck 600, and then loads the substrate 500 onto the second rack 722. The electrostatic chuck 600 separated from the substrate 500 is returned back into the loading unit 710 via the second conveyer unit 620.
However, the present invention is not limited to the above description. For example, when the substrate 500 is initially disposed on the electrostatic chuck 600, the substrate 500 may be fixed onto a bottom surface of the electrostatic chuck 600 and then moved into the deposition unit 730. In this case, for example, the first inversion chamber 718 and the first inversion robot 719, and the second inversion chamber 728 and the second inversion robot 729 are not required.
The deposition unit 730 may include at least one deposition chamber. Referring to FIG. 1, the deposition unit 730 may include a first chamber 731, in which first to four organic layer deposition apparatuses 100, 200, 300, and 400 are disposed. Although FIG. 1 illustrates that a total of four organic layer deposition apparatuses, i.e., the first to fourth organic layer deposition apparatuses 100 to 400, are installed in the first chamber 731, the total number of organic layer deposition apparatuses that may be installed in the first chamber 731 may vary according to a deposition material and deposition conditions. The first chamber 731 is maintained in a vacuum state during a deposition process.
Referring to FIG. 2, according to another embodiment of the present invention, the deposition unit 730 may include the first chamber 731 and a second chamber 732 that are connected to each other. The first and second organic layer deposition apparatuses 100 and 200 may be disposed in the first chamber 731, and the third and fourth organic layer deposition apparatuses 300 and 400 may be disposed in the second chamber 732. In this regard, more than two chambers may be used.
In the current embodiment of FIG. 1, the electrostatic chuck 600 having the substrate 500 thereon may be moved at least to the deposition unit 730 or may be moved sequentially to the loading unit 710, the deposition unit 730, and the unloading unit 720 by the first conveyor unit 610. If the substrate 500 is separated from the electrostatic chuck 600 by the unloading unit 720, then the electrostatic chuck 600 is moved back to the loading unit 710 by the second conveyor unit 620.
FIG. 4 is a schematic perspective view of an organic layer deposition apparatus 100 according to an embodiment of the present invention. FIG. 5 is a schematic side sectional view of the organic layer deposition apparatus 100 of FIG. 4. FIG. 6 is a schematic plan sectional view of the organic layer deposition apparatus 100 of FIG. 4.
Referring to FIGS. 3, 4 and 6, the organic layer deposition apparatus 100 includes a deposition source 110, a deposition source nozzle unit 120, and a patterning slit sheet 150.
Specifically, the first chamber 731 of FIG. 1 should be basically maintained in a high-vacuum state as in a deposition method using a fine metal mask (FMM) so that a deposition material 115 emitted from the deposition source 110 and discharged through the deposition source nozzle unit 120 and the patterning slit sheet 150 may be deposited onto a substrate 500 in a desired pattern. In addition, the temperature of the patterning slit sheet 150 should be sufficiently lower than the temperature of the deposition source 110. In this regard, the temperature of the patterning slit sheet 150 may be about 100° C. or less. The temperature of the patterning slit sheet 150 should be sufficiently low so as to reduce thermal expansion of the patterning slit sheet 150.
The substrate 500 that is a deposition target substrate is disposed in the first chamber 731. The substrate 500 may be a substrate for flat panel displays. A large substrate, such as a mother glass, for manufacturing a plurality of flat panel displays, may be used as the substrate 500. Other suitable substrates may also be employed.
In the current embodiment, deposition is performed while the substrate 500 is moved relative to the organic layer deposition apparatus 100.
In particular, in the conventional deposition method using an FMM, the size of the FMM has to be equal to the size of a substrate. Thus, since the size of the FMM has to be increased as the substrate becomes larger, it is neither straightforward to manufacture a large FMM nor to extend an FMM to be accurately aligned with a pattern.
In order to overcome this problem, in the organic layer deposition apparatus 100 according to the current embodiment, deposition may be performed while the organic layer deposition apparatus 100 or the substrate 500 is moved relative to the other. In other words, deposition may be continuously performed while the substrate 500, which is disposed such as to face the organic layer deposition apparatus 100, is moved in a Y-axis direction. That is, deposition may be performed in a scanning manner while the substrate 500 is moved in a direction (first direction) indicated by an arrow A in FIG. 4.
In the organic layer deposition apparatus 100 according to the current embodiment, the patterning slit sheet 150 may be significantly smaller than a FMM used in the conventional deposition method. In other words, in the organic layer deposition apparatus 100, deposition is continuously performed, i.e., in a scanning manner while the substrate 500 is moved in the Y-axis direction. Thus, lengths of the patterning slit sheet 150 in the X-axis and Y-axis directions may be significantly less than the lengths of the substrate 500 in the X-axis and Y-axis directions. As described above, since the patterning slit sheet 150 may be formed to be significantly smaller than the FMM used in the conventional deposition method, it is relatively easy to manufacture the patterning slit sheet 150. In other words, using the patterning slit sheet 150, which is smaller than the FMM used in the conventional deposition method, is more convenient in all processes, including etching and other subsequent processes, such as precise extension, welding, moving, and cleaning processes, compared to the conventional deposition method using the larger FMM. This is more advantageous for a relatively large display device.
The deposition source 110 that contains and heats the deposition material 115 is disposed in an opposite side of the first chamber 731 to a side in which the substrate 500 is disposed. While being vaporized in the deposition source 110, the deposition material 115 is deposited on the substrate 500.
In particular, the deposition source 110 includes a crucible 112 filled with the deposition material 115, and a cooling block 111 that heats the crucible 112 to vaporize the deposition material 115 contained in the crucible 112 towards a side of the crucible 112, and in particular, towards the deposition source nozzle unit 120. The cooling block 111 reduces or prevents radiation of heat from the crucible 112 to the outside, e.g., into the first chamber 731. The cooling block 111 may include a heater that heats the crucible 112.
The deposition source nozzle unit 120 is disposed at a side of the deposition source 110, and in particular, at the side of the deposition source 110 facing the substrate 500. The deposition source nozzle unit 120 includes a plurality of deposition source nozzles 121 that may be arranged at equal intervals in the Y-axis direction, i.e., a scanning direction of the substrate 500. The deposition material 115, which is vaporized in the deposition source 110, passes through the deposition source nozzle unit 120 towards the substrate 500. As described above, when the deposition source nozzle unit 120 includes the plurality of deposition source nozzles 121 arranged in the Y-axis direction, that is, the scanning direction of the substrate 500, the size of a pattern formed of the deposition material 115 discharged through each of a plurality of patterning slits 151 of the patterning slit sheet 150 is affected by the size of one of the deposition source nozzles 121 (since there is only one line of the deposition source nozzles 121 in the X-axis direction). Thus, no shadow zone may be formed on the substrate 500. In addition, since the plurality of deposition source nozzles 121 are arranged in the scanning direction of the substrate 500, even if there is a difference in flux between the deposition source nozzles 121, the difference may be compensated for and deposition uniformity may be maintained constant.
The patterning slit sheet 150 and a frame 155 are disposed between the deposition source 110 and the substrate 500. A shape of the frame 155 is similar to a window frame. The patterning slit sheet 150 is bound inside the frame 155. The patterning slit sheet 150 includes the plurality of patterning slits 151 arranged in the X-axis direction. The deposition material 115, which is vaporized in the deposition source 110, passes through the deposition source nozzle unit 120 and the patterning slit sheet 150 towards the substrate 500. The patterning slit sheet 150 may be manufactured by etching, which is the same method as used in a conventional method of manufacturing an FMM, and in particular, a striped FMM. In this regard, the total number of the patterning slits 151 may be greater than the total number of the deposition source nozzles 121.
The patterning slit sheet 150 may further include a supporter so as to block or prevent the patterning slit sheet 150 from sagging toward the deposition source 110. This will be described later.
In addition, the deposition source 110 and the deposition source nozzle unit 120 coupled to the deposition source 110 may be disposed to be separated from the patterning slit sheet 150 by a set or predetermined distance. The deposition source 110 and the deposition source nozzle unit 120 coupled to the deposition source 110 may be connected to the patterning slit sheet 150 by first connection members 135. That is, the deposition source 110, the deposition source nozzle unit 120, and the patterning slit sheet 150 may be integrally formed as one body by being connected to each other via the first connection members 135. The first connection members 135 may guide the deposition material 115 which is discharged through the deposition source nozzles 121, to move straight and not to flow in the X-axis direction. Referring to FIG. 4, the first connection members 135 are formed on left and right sides of the deposition source 110, the deposition source nozzle unit 120, and the patterning slit sheet 150 to guide the deposition material 115 not to flow in the X-axis direction; however, aspects of the present invention are not limited thereto. For example, the first connection members 135 may be formed in the form of a sealed box so as to guide the deposition material 115 to not flow in both the X-axis and Y-axis directions.
As described above, the organic layer deposition apparatus 100 according to the current embodiment performs deposition while being moved relative to the substrate 500. In order to move the organic layer deposition apparatus 100 relative to the substrate 500, the patterning slit sheet 150 is separated from the substrate 500 by a predetermined distance.
In particular, in the conventional deposition method using a FMM, deposition is performed with the FMM in close contact with a substrate in order to reduce or prevent formation of a shadow zone on the substrate. However, when the FMM is used in close contact with the substrate, the contact may cause defects. In addition, in the conventional deposition method, the size of the mask has to be the same as the size of the substrate since the mask cannot be moved relative to the substrate. Thus, the size of the mask has to be increased as display devices become larger. However, it is not easy to manufacture such a large mask.
In order to overcome this problem, in the organic layer deposition apparatus 100 according to the current embodiment, the patterning slit sheet 150 is disposed to be separated from the substrate 500 by a set or predetermined distance.
As described above, according to an embodiment of the present invention, a mask is formed to be smaller than a substrate, and deposition is performed while the mask is moved relative to the substrate. Thus, the mask can be easily manufactured. In addition, defects caused due to the contact between a substrate and a FMM, which occur in the conventional deposition method, may be reduced or prevented. Furthermore, since it is unnecessary to dispose the FMM in close contact with the substrate during a deposition process, the manufacturing time may be reduced.
Hereinafter, a structure of patterning slits formed in a patterning slit sheet of an organic layer deposition apparatus according to the embodiment of the present invention will be described in more detail.
FIG. 7 is a schematic perspective view illustrating a state in which a patterning slit sheet 150 is sagging. FIG. 8 is a cross-sectional view taken along the line I-I of FIG. 7. FIG. 9 illustrates a diagram comparing an organic layer pattern to be formed when the patterning slit sheet 150 is sagging to an organic layer pattern to be formed when the patterning 150 is not sagging. FIG. 10 illustrates an organic layer pattern formed on a substrate when a patterning slit sheet is sagging.
Referring to FIGS. 7 and 8, the patterning slit sheet 150 is sagging in a Z-axis direction. Referring to FIGS. 8 and 9, the originally positioned patterning slit sheet 150′ is disposed on an XY plane in parallel with the ground surface, and the substrate 500 may be disposed apart from the patterning slit sheet 150′ and be moved on the XY plane in a Y-axis direction. Since the originally positioned patterning slit sheet 150′ is disposed in parallel with the ground surface, it sags toward the ground surface, i.e., in the Z-axis direction, due to self-gravity, as the sagging patterning slit sheet 150.
When the originally positioned patterning slit sheet 150′ sags toward the ground surface, the distance between the deposition source nozzles 121 (see FIG. 4) and the patterning slit sheet 150 that is sagging is not the same as when the originally positioned patterning slit sheet 150′ is not sagging and is disposed parallel with the ground surface. That is, FIG. 9 illustrates an organic layer pattern expected to be formed by using the patterning slit sheet 150 that is sagging. Referring to FIG. 9, the distance S between the originally positioned patterning slit sheet 150′ and the substrate 500 is maintained constant. In this case, referring to FIGS. 4 and 9, the deposition material 115 discharged from the deposition source nozzles 121 is moved along a path u, passes through the originally positioned patterning slit sheet 150′, and is finally deposited on the substrate 500, thereby forming an organic layer 150d′. However, when the originally positioned patterning slit sheet 150′ sags due to self-gravity, the distance S′ between the patterning slit sheet 150 that is sagging and the substrate 500 is greater than the distance S. In this case, the deposition material 115 discharged from the deposition source nozzles 121 is moved along a path v, passes through the sagging patterning slit sheet 150, and is finally deposited on the substrate 500, thereby forming an organic layer 150d. The organic layer 150d formed by using the patterning slit sheet 150 is shifted by a distance P in the Y-axis direction, compared to the organic layer 150d′. That is, a pattern shifting phenomenon occurs.
When the pattern shifting phenomenon occurs, organic layers 150c and organic layers 150b formed to the left and right of an organic layer 150a formed via a central patterning slit of the patterning slit sheet 150 that is sagging, bend toward both ends of the patterning slit sheet 150, which is caused by the patterning slit sheet 150 that is sagging, as illustrated in FIG. 10. Also, the farther a patterning slit 121 is located from the center of the patterning slit sheet 150, i.e., in an −X-axis direction or +X-axis direction, the greater an incident angle between the deposition source nozzle 121 and the patterning slit sheet 150. Thus, the distances between the organic layers 150c or 150b are increased. In order to prevent the original patterning slit sheet 150′ from sagging, high tension may be applied when the original patterning slit sheet 150′ is bound inside the frame 155. However, if the original patterning slit sheet 150′ is large, it is difficult to completely prevent it from sagging due to self-gravity.
To solve this problem, in an organic layer deposition apparatus according to an embodiment of the present invention, the shapes of the patterning slits 151 of the patterning slit sheet 150 are modified, thereby compensating for the sagging of the patterning slit sheet 150. Referring to FIG. 11, a central patterning slit 151a, left patterning slits 151b, and right patterning slits 151c are formed in a patterning slit sheet 150. The left patterning slits 151b and the right patterning slits 151c bend toward the central patterning slit 151a. The shapes of the left patterning slits 151b and the right patterning slits 151c are opposite to those of the organic layers 150b and 150c illustrated in FIG. 10, respectively. In other words, FIG. 10 illustrates the organic layers 150a to 150c deposited via the patterning slit sheet 150, the patterning slits of which straighten when the patterning slit sheet 150 sags due to self-gravity. Referring to FIG. 10, the organic layers 150b and the organic layers 150c bend towards the both ends of the patterning slit sheet 150, i.e., the organic layers 150c in the X-axis direction and the organic layers 150b in the X-axis direction, with respect to the central organic layer 150a, respectively. In contrast, referring to FIG. 11, in the patterning slit sheet 150 of an organic layer deposition apparatus according to an embodiment of the present invention, the left patterning slits 151b and the right patterning slits 151c bend toward the central patterning slit 151a. When the shapes of the patterning slits 150b and 150c are modified as described above, it is possible to reduce or minimize the pattern shifting phenomenon which is caused when the patterning slit sheet 150 sags.
The central patterning slit 151a is formed at the center of the patterning slit sheet 150. A lengthwise direction of the central patterning slit 151a corresponds to the direction in which the deposition source nozzles 121 are arranged. Since the central patterning slit 151a is disposed directly above the deposition source nozzles 121, an organic layer formed via the central patterning slit 151a is not shifted.
The left patterning slits 151b are disposed to the left of the central patterning slit 151a, i.e., in the X-axis direction, and the right patterning slits 151c are disposed to the right of the central patterning slit 151a, i.e., in the X-axis direction.
The left patterning slits 151b may bend at centers thereof toward a midpoint O on the central patterning slit 151a, and the right patterning slits 151c may bend at centers thereof toward the midpoint O on the patterning slit 151a. 
The distances t1 and t2 between adjacent left patterning slits 151b are the same, and the distances t3 between adjacent patterning slits 151c may also be the same.
The widths of the patterning slits 150a to 150c may be the same. Specifically, the widths w3 of the left patterning slits 151b may be the same, and the widths w2 of the right patterning slits 151c may also be the same. In addition, the widths w3 of the left patterning slits 151b may be the same as the widths w2 of the right patterning slits 151c. In addition, the width w1 of the central patterning slit 151a, the widths w3 of the left patterning slits 151b, and the widths w2 of the right patterning slits 151c may be the same.
FIG. 12 is a plan view illustrating another modified example of a patterning slit sheet according to an embodiment of the present invention. Referring to FIG. 12, a central patterning slit 451a, left patterning slits 451b, and right patterning slits 451c may be formed in a patterning slit sheet 450. The left patterning slits 451b and the right patterning slits 451c may bend at centers thereof toward a midpoint O on the central patterning slit 451a. 
The distances between adjacent left patterning slits 451b and the distances between adjacent right patterning slits 451c may not be the same. For example, the farther the left patterning slits 451b are located away from the central patterning slit 451a, the shorter the distances t′1, t′2, t′3, and t′4 between adjacent left patterning slits 451b may be. Also, the farther the right patterning slits 451c are located away from the central patterning slit 451a, the shorter the distances between adjacent right patterning slits 451c may be.
The widths of the patterning slits 451a, 451b, and 451c may be the same. Specifically, the widths w′4 of the left patterning slits 451b may be the same, and the widths w′2 and w′3 of the right patterning slits 451c may be the same. In addition, the widths w′4 of the left patterning slits 451b, the widths w′2 and w′3 of the right patterning slits 451c, and the width w′1 of the central patterning slit 451a may be the same.
FIG. 13 is a plan view illustrating another modified example of a patterning slit sheet according to an embodiment of the present. Referring to FIG. 13, a central patterning slit 551a, left patterning slits 551b, and right patterning slits 551c may be formed in a patterning slit sheet 550. The left patterning slits 551b and the right patterning slits 551c may bend at centers thereof toward a midpoint O on the central patterning slit 551a. 
The widths of the patterning slits 551b and 551c may not be the same. For example, the farther the right patterning slits 451c are located away from the central patterning slit 451a, the shorter the widths w′′2, w′′3, and w′′4 of the right patterning slits 551c may be. Also, the farther the left patterning slits 551b are located away from the central patterning slit 551a, the shorter the widths of the left patterning slits 551b may be.
Distances t′′1, t′′2, and t′′3 between adjacent left patterning slits 551b may be the same, and distances between adjacent right patterning slits 551c may be the same. Also, the distances t′′1, t′′2, and t′′3 between adjacent left patterning slits 551b may be the same as the distances between adjacent right patterning slits 551c. 
FIG. 14 is a schematic perspective view of an organic layer deposition apparatus according to another embodiment of the present invention. Referring to FIG. 14, the organic layer deposition apparatus 100′ includes a deposition source 110, a deposition source nozzle unit 120, and a patterning slit sheet 150. The deposition source 110 includes a crucible 112 filled with a deposition material 115, and a cooling block 111 that heats the crucible 112 to vaporize the deposition material 115 in the crucible 112 toward the deposition source nozzle unit 120. The deposition source nozzle unit 120, which has a planar shape, is disposed at a side of the deposition source 110. The deposition source nozzle unit 120 includes a plurality of deposition source nozzles 121 arranged in the Y-axis direction. The patterning slit sheet 150 and a frame 155 are further disposed between the deposition source 110 and a substrate 500. The patterning slit sheet 150 includes a plurality of patterning slits 151 arranged in the X-axis direction. The deposition source 110 and the deposition source nozzle unit 120 may be connected to the patterning slit sheet 150 by second connection members 133.
In the current embodiment, the plurality of deposition source nozzles 121 formed on the deposition source nozzle unit 120 are tilted at a set or predetermined angle, unlike the organic layer deposition apparatus 100 of FIG. 4. In particular, the deposition source nozzles 121 may include deposition source nozzles 121a and 121b arranged in respective rows. The deposition source nozzles 121a and 121b may be arranged in respective rows to alternate in a zigzag pattern. The deposition source nozzles 121a and 121b may be tilted by a set or predetermined angle with respect to an XY plane.
In the current embodiment, the deposition source nozzles 121a and 121b are arranged to tilt at a set or predetermined angle. The deposition source nozzles 121a in a first row and the deposition source nozzles 121b in a second row may tilt to face each other. That is, the deposition source nozzles 121a of the first row in a left part of the deposition source nozzle unit 120 may tilt to face a right side portion of the patterning slit sheet 150, and the deposition source nozzles 121b of the second row in a right part of the deposition source nozzle unit 120 may tilt to face a left side portion of the patterning slit sheet 150.
Accordingly, a deposition rate of the deposition material 115 may be adjusted to lessen the difference between thicknesses of thin films formed on center and end portions of the substrate 500, thereby improving thickness uniformity. Moreover, utilization efficiency of the deposition material 115 may also be improved.
FIG. 15 is a schematic perspective view of an organic layer deposition apparatus 100′′ according to another embodiment of the present invention. Referring to FIG. 15, the organic layer deposition apparatus according to the current embodiment may include a plurality of organic layer deposition apparatuses, each of which has the structure of the organic layer deposition apparatus 100 illustrated in FIGS. 4 to 6. In other words, the organic layer deposition apparatus 100′′ may include a multi-deposition source that simultaneously discharges deposition materials for forming a red (R) emission layer, a green (G) emission layer, and a blue (B) emission layer.
In particular, the organic layer deposition apparatus 100′′ according to the current embodiment includes a first organic layer deposition apparatus 100, a second organic layer deposition apparatus 200, and a third organic layer deposition apparatus 300. The first to third organic layer deposition apparatuses 100 to 300 have the same structure as the organic layer deposition apparatus 100 described with reference to FIGS. 4 through 6, and thus a detailed description thereof will not be provided here.
The deposition sources 110 of the first organic layer deposition apparatus 100, the second organic layer deposition apparatus 200, and the third organic layer deposition apparatus 300 may contain different deposition materials, respectively. For example, the first organic layer deposition apparatus 100 may contain a deposition material for forming a red (R) emission layer, the second organic layer deposition apparatus 200 may contain a deposition material for forming a green (G) emission layer, and the third organic layer deposition apparatus 300 may contain a deposition material for forming a blue (B) emission layer.
In other words, in a conventional method of manufacturing an organic light-emitting display device, a separate chamber and mask are generally used to form each color emission layer. However, when the organic layer deposition apparatus 100′′ according to the current embodiment is used, the R emission layer, the G emission layer, and the B emission layer may be formed at the same time with a single multi-deposition source. Thus, the time needed to manufacture an organic light-emitting display device is sharply reduced. In addition, the organic light-emitting display device may be manufactured with a reduced number of chambers, so that equipment costs are also markedly reduced.
In one embodiment, a patterning slit sheet of the first organic layer deposition apparatus 100, a patterning slit sheet of the second organic layer deposition apparatus 200, a patterning slit sheet of the third organic layer deposition apparatus 300 may be arranged to be offset by a constant distance with respect to each other, thereby protecting or preventing deposition regions corresponding to the patterning slit sheets from overlapping with one another on the substrate 500. In other words, if the first organic layer deposition apparatus 100, the second organic layer deposition apparatus 200, and the third organic layer deposition apparatus 300 are used to deposit the R emission layer, the G emission layer, and the B emission layer, respectively, then patterning slits 151 of the first organic layer deposition apparatus 100, patterning slits 251 of the second organic layer deposition apparatus 200, and patterning slits 351 of the third organic layer deposition apparatus 300 are arranged not to be aligned with respect to each other, thereby forming the R emission layer, the G emission layer, and the B emission layer in different regions of the substrate 500, respectively.
The deposition materials for forming the R emission layer, the G emission layer, and the B emission layer may be vaporized at different temperatures, respectively. Therefore, the temperatures of deposition sources of the respective first to third organic layer deposition apparatuses 100 to 300 may be set to be different.
Although the organic layer deposition apparatus 100′′ according to the current embodiment includes three organic layer deposition apparatuses 100 to 300, the present invention is not limited thereto. In other words, an organic layer deposition apparatus according to another embodiment of the present invention may include a plurality of organic layer deposition apparatuses, each of which contains a different deposition material. For example, an organic layer deposition apparatus according to another embodiment of the present invention may include five organic layer deposition apparatuses respectively containing materials for an R emission layer, a G emission layer, a B emission layer, an auxiliary R′ layer of the R emission layer, and an auxiliary G′ layer of the G emission layer.
As described above, a plurality of organic layers may be formed at the same time with a plurality of organic layer deposition apparatuses, and thus manufacturing yield and deposition efficiency are improved. In addition, the overall manufacturing process is simplified, and the manufacturing costs are reduced.
FIG. 16 is a cross-sectional view of an active matrix organic light-emitting display device fabricated by using an organic layer deposition apparatus according to an embodiment of the present invention.
Referring to FIG. 16, the active matrix organic light-emitting display device is formed on a substrate 30. The substrate 30 may be formed of a transparent material, for example, glass, plastic, or metal. An insulating layer 31, such as a buffer layer, is formed on an entire surface of the substrate 30.
Referring to FIG. 16, a thin film transistor (TFT) 40, a capacitor 50 that includes first and second capacitor layers 51 and 52, and an organic light-emitting diode (OLED) 60 are disposed on the insulating layer 31.
An active layer 41 is formed in a set or predetermined pattern on the insulating layer 31. A gate insulating layer 32 is formed to cover the active layer 41. The active layer 41 may include a p-type or n-type semiconductor material.
A gate electrode 42 of the TFT 40 is formed in a region of the gate insulating layer 32 corresponding to the active layer 41. An interlayer insulating layer 33 is formed to cover the gate electrode 42. Then, the interlayer insulating layer 33 and the gate insulating layer 32 are etched by, for example, dry etching, to form a contact hole for exposing parts of the active layer 41.
A source/drain electrode 43 is formed on the interlayer insulating layer 33 to contact the active layer 41 exposed through the contact hole. A passivation layer 34 is formed to cover the source/drain electrode 43, and is etched to expose a part of the drain electrode 43. Another insulating layer may be further formed on the passivation layer 34 so as to planarize the passivation layer 34.
The OLED 60 displays set or predetermined image information by emitting red, green, or blue light as current flows therethrough. The OLED 60 includes a first electrode 61 disposed on the passivation layer 34. The first electrode 61 is electrically connected to the drain electrode 43 of the TFT 40.
A pixel defining layer 35 is formed to cover the first electrode 61. An opening 64 is formed in the pixel defining layer 35, and an organic emission layer 63 is formed in a region defined by the opening 64. A second electrode 62 is formed on the organic emission layer 63.
The pixel defining layer 35, which defines individual pixels, is formed of an organic material. The pixel defining layer 35 planarizes the surface of a region of the substrate 30 in which the first electrode 61 is formed, and in particular, the surface of the passivation layer 34.
The first electrode 61 and the second electrode 62 are insulated from each other, and respectively apply voltages of opposite polarities to the organic emission layer 63 to induce light emission.
The organic emission layer 63 may be formed of a low-molecular weight organic material or a high-molecular weight organic material. If the low-molecular weight organic material is used, then the organic emission layer 63 may have a single or multi-layer structure including at least one selected from the group consisting of a hole injection layer (HIL), a hole transport layer (HTL), an emission layer (EML), an electron transport layer (ETL), and an electron injection layer (EIL). Examples of available organic materials may include copper phthalocyanine (CuPc), N,N′-di(naphthalene-1-yl)-N,N′-diphenyl-benzidine (NPB), tris-8-hydroxyquinoline aluminum (Alq3), or the like. Such a low-molecular weight organic material may be deposited using vacuum deposition by using one of the organic layer deposition apparatus of FIG. 4.
After the opening 64 is formed in the pixel defining layer 35, the substrate 30 is transferred to a chamber, as illustrated in FIG. 1.
After the organic emission layer 63 is formed, the second electrode 62 may be formed by the same deposition method as used to form the organic emission layer 63.
The first electrode 61 may function as an anode, and the second electrode 62 may function as a cathode, or vice versa. The first electrode 61 may be patterned to correspond to individual pixel regions, and the second electrode 62 may be formed to cover all the pixels.
The first electrode 61 may be formed as a transparent electrode or a reflective electrode. The transparent electrode may be formed of an indium tin oxide (ITO), an indium zinc oxide (IZO), a zinc oxide (ZnO), or an indium oxide (In2O3). The reflective electrode may be formed by forming a reflective layer from silver (Ag), magnesium (Mg), aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr) or a compound thereof and then forming a layer of an ITO, an IZO, a ZnO, or an In2O3 on the reflective layer. The first electrode 61 may be formed by forming a layer by, for example, sputtering, and then patterning the layer by, for example, photolithography.
The second electrode 62 may also be formed as a transparent electrode or a reflective electrode. When the second electrode 62 is formed as a transparent electrode, the second electrode 62 functions as a cathode. To this end, the transparent electrode may be formed by depositing a metal having a low work function, such as lithium (Li), calcium (Ca), lithium fluoride/calcium (LiF/Ca), lithium fluoride/aluminum (LiF/Al), aluminum (Al), silver (Ag), magnesium (Mg), or a compound thereof on a surface of the organic emission layer 63, and forming an auxiliary electrode layer or a bus electrode line thereon from ITO, IZO, ZnO, In2O3, or the like. When the second electrode layer 62 is formed as a reflective electrode, the reflective layer may be formed by depositing Li, Ca, LiF/Ca, LiF/Al, Al, Ag, Mg, or a compound thereof on the organic emission layer 63. The second electrode 62 may be formed by using the same deposition method as used to form the organic emission layer 63 described above.
The organic layer deposition apparatuses according to the above embodiments of the present invention may be applied to form an organic layer or an inorganic layer of an organic TFT, and to form layers from various suitable materials.
While the present invention has been described in connection with certain exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims, and equivalents thereof.

## Claims

1. A method for forming an organic layer on a substrate by an organic layer deposition apparatus comprising a deposition source, a deposition source nozzle unit, and a patterning slit sheet, the method comprising:
disposing the deposition source nozzle unit at a side of the deposition source, the deposition source nozzle unit comprising a plurality of deposition source nozzles arranged in a first direction;
disposing the patterning slit sheet to face the deposition source nozzle unit, the patterning slit sheet having a plurality of patterning slits arranged in a second direction perpendicular to the first direction;
discharging a deposition material by the deposition source and through the deposition source nozzle unit and the patterning slit sheet to form the organic layer on the substrate,
wherein the plurality of patterning slits comprise:
a central patterning slit at a center of the patterning slit sheet;
a plurality of left patterning slits disposed to a left of the central patterning slit; and
a plurality of right patterning slits disposed to a right of the central patterning slit,
wherein, when the patterning slit sheet is planar and rectangular in shape, the plurality of left patterning slits and the plurality of right patterning slits bend toward the central patterning slit.

2. The method of claim 1, wherein a lengthwise direction of the central patterning slit is parallel with the first direction.

3. The method of claim 1, wherein the plurality of left patterning slits and the plurality of right patterning slits bend toward a midpoint on the central patterning slit.

4. The method of claim 1, wherein widths of the plurality of patterning slits are the same.

5. The method of claim 1, wherein distances between adjacent left patterning slits are the same.

6. The method of claim 1, wherein distances between adjacent right patterning slits are the same.

7. The method of claim 1, wherein distances between adjacent patterning slits are not the same.

8. The method of claim 7, wherein the farther the plurality of left patterning slits are located away from the central patterning slit, the shorter the distances between adjacent left patterning slits.

9. The method of claim 7, wherein the farther the plurality of right patterning slits are located away from the central patterning slit, the shorter the distances between adjacent right patterning slits.

10. The method of claim 7, wherein widths of the plurality of patterning slits are the same.

11. The method of claim 1, wherein widths of the plurality of patterning slits are not the same.

12. The method of claim 11, wherein the farther the plurality of left patterning slits are located away from the central patterning slit, the less the widths of the plurality of left patterning slits.

13. The method of claim 11, wherein the farther the plurality of right patterning slits are located away from the central patterning slit, the less the widths of the plurality of right patterning slits.

14. The method of claim 11, wherein distances between adjacent left patterning slits are the same.

15. The method of claim 11, wherein distances between adjacent right patterning slits are the same.

16. The method of claim 1, wherein the deposition source, the deposition source nozzle unit, and the patterning slit sheet are integrated as one body.

17. The method of claim 1, wherein the deposition source, the deposition source nozzle unit, and the patterning slit sheet are integrated as one body via connection members configured to guide movement of the deposition material.

18. The method of claim 17, wherein the connection members are formed to seal a space between the deposition source, the deposition source nozzle unit, and the patterning slit sheet.

19. The method of claim 1, wherein the plurality of deposition source nozzles are tilted at a set angle.

20. The method of claim 19, wherein the plurality of deposition source nozzles comprise deposition source nozzles arranged in two rows in the first direction, wherein the deposition source nozzles in the two rows are tilted to face each other.

21. The method of claim 19, wherein the plurality of deposition source nozzles comprise deposition source nozzles arranged in first and second rows in the first direction,
wherein the deposition source nozzles of the first row located to overlap a left side of the patterning slit sheet are arranged to face a right side of the patterning slit sheet, and
the deposition source nozzles of the second row located to overlap the right side of the patterning slit sheet are arranged to face the left side of the patterning slit sheet.

22. The method of claim 1, wherein the central patterning slit extends along a direction to correspond to the first direction in which the plurality of deposition source nozzles are arranged.

23. The method of claim 1, wherein the patterning slit sheet sags toward the deposition source.