**EXHIBIT          31**

**CERTIFICATION          OF THE CHIEF EXECUTIVE OFFICER**

**PURSUANT          TO SECTION 302 OF THE SARBANES-OXLEY ACT OF 2002 **

| 1. |   | I                    have reviewed this quarterly report on Form 10-Q of Tegal Corporation; |
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| 2. |   | Based                    on my knowledge, this report does not contain any untrue statement                    of a                    material fact or omit to state a material fact necessary to make                    the                    statements made, in light of the circumstances under which such                    statements                    were made, not misleading with respect to the period covered                    by this                    report; |
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| 3. |   | Based                    on my knowledge, the financial statements, and other financial                    information                    included in this report, fairly present in all material respects                    the                    financial condition, results of operations and cash flows of                    the                    registrant as of, and for, the periods presented in this                    report; |
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| 4. |   | The                    registrant’s other certifying officer and I are responsible for                    establishing and maintaining disclosure controls and procedures                    (as                    defined in Exchange Act Rules 13a-15(e) and 15d-14(e)) for the                    registrant                    and we have: |
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|  | (a) | designed                    such disclosure controls and procedures, or caused such disclosure                    controls and procedures to be designed under our supervision,                    to ensure                    that material information relating to the registrant, including                    its                    consolidated subsidiaries, is made known to us by others within                    those                    entities, particularly during the period in which this report                    is being                    prepared; |
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|  | (b) | evaluated                    the effectiveness of the registrant’s disclosure controls and procedures                    and presented in this report our conclusions about the effectiveness                    of                    the disclosure controls and procedures, as of the end of the                    period                    covered by this report based on such                    evaluation; |
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|  | (c) | disclosed                    in this report any change in the registrant’s internal control over                    financial reporting that occurred during the registrant’s most recent                    fiscal quarter (the registrant’s fourth fiscal quarter in the case of an                    annual report) that has materially affected, or is reasonably                    likely to                    materially affect, the registrant’s internal control over financial                    reporting; and |
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| 5. |   | The                    registrant’s other certifying officer and I have disclosed, based on our                    most recent evaluation of internal control over financial reporting,                    to                    the registrant’s auditors and the audit committee of the registrant’s                    board of directors (or persons performing the equivalent                    function): |
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|  | (a) | all                    significant deficiencies and material weaknesses in the design                    or                    operation of internal control over financial reporting which                    are                    reasonably likely to adversely affect the registrant’s ability to record,                    process, summarize and report financial information;                    and |
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|  | (b) | any                    fraud, whether or not material, that involves management or other                    employees who have a significant role in the registrant’s internal                    controls over financial reporting. |
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| Date: August                  14, 2006 |                                                     |  /s/ Thomas                  R. Mika |
|---------------------------------------------|----------------------------------------------------------|------------------------------------------------|
|                                        | Chief                    Executive Officer and President |
|                                        |                                                     |

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**CERTIFICATION            OF THE CHIEF FINANCIAL OFFICER**

**PURSUANT            TO SECTION 302 OF THE SARBANES-OXLEY ACT OF 2002 **

| 1. |   | I                      have reviewed this quarterly report on Form 10-Q of Tegal Corporation; |
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| 2. |   | Based                      on my knowledge, this report does not contain any untrue statement                      of a                      material fact or omit to state a material fact necessary to                      make the                      statements made, in light of the circumstances under which                      such statements                      were made, not misleading with respect to the period covered                      by this                      report; |
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| 3. |   | Based                        on my knowledge, the financial statements, and other financial                        information                        included in this report, fairly present in all material respects                        the                        financial condition, results of operations and cash flows                        of the                        registrant as of, and for, the periods presented in this                        report; |
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| 4. |   | The                        registrant’s other certifying officer and I are responsible for                        establishing and maintaining disclosure controls and procedures                        (as                        defined in Exchange Act Rules 13a-15(e) and 15d-14(e)) for                        the registrant                        and we have: |
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|  | (a) | designed                        such disclosure controls and procedures, or caused such disclosure                        controls and procedures to be designed under our supervision,                        to ensure                        that material information relating to the registrant, including                        its                        consolidated subsidiaries, is made known to us by others                        within those                        entities, particularly during the period in which this report                        is being                        prepared; |
|--|-----|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|

|  | (b) | evaluated                        the effectiveness of the registrant’s disclosure controls and procedures                        and presented in this report our conclusions about the effectiveness                        of                        the disclosure controls and procedures, as of the end of                        the period                        covered by this report based on such                        evaluation; |
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|  | (c) | disclosed                        in this report any change in the registrant’s internal control over                        financial reporting that occurred during the registrant’s most recent                        fiscal quarter (the registrant’s fourth fiscal quarter in the case of an                        annual report) that has materially affected, or is reasonably                        likely to                        materially affect, the registrant’s internal control over financial                        reporting; and |
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| 5. |   | The                        registrant’s other certifying officer and I have disclosed, based on                        our                        most recent evaluation of internal control over financial                        reporting, to                        the registrant’s auditors and the audit committee of the registrant’s                        board of directors (or persons performing the equivalent                        function): |
|----|--------|-----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|

|  | (a) | all                        significant deficiencies and material weaknesses in the design                        or                        operation of internal control over financial reporting which                        are                        reasonably likely to adversely affect the registrant’s ability to record,                        process, summarize and report financial information;                        and |
|--|-----|--------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------|

|  | (b) | any                        fraud, whether or not material, that involves management                        or other                        employees who have a significant role in the registrant’s internal                        controls over financial reporting. |
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| Date: August                      14, 2006 |                                                |  /s/ Christine                      Hergenrother |
|-------------------------------------------------|-----------------------------------------------------|------------------------------------------------------------|
|                                            | Chief Financial                        Officer |
|                                            |                                                |

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