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INDUSTRIAL SPACE LEASE
 (SINGLE TENANT NET)
 Lease Landlord Tenant Effective Date of this Lease
 ARTICLE 1
 REFERENCES
  A.
    
    Tenants Address for Notice Prior
to March 16, 2006:
    
    Asyst Technologies, Inc.
48761 Kato Road
Fremont, CA 94538
Attention: General Counselwith a copy to:Asyst Technologies, Inc.
48761 Kato Road
Fremont, CA 94538
Attention: CFOTenants Address for
Notices subsequent to
March 16, 2006:
    
    Asyst Technologies, Inc.
46897 Bayside Parkway
Fremont, CA 94538
Attention: General Counselwith a copy to:Asyst Technologies, Inc.
46897 Bayside Parkway
Fremont, CA 94538
Attention: CFOB.
    
    Tenants Representative:
    
    Steve Debenham, Esq.
Vice President, General CounselPhone Number:
    
    (510) 661-5000




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C.
    
    Landlords Address for Notices:
    
    100 Bush Street, 26th Floor
San Francisco, California 94104D.
    
    Landlords Representative:
     Phone Number:
    
    Lynn Tolin
(415) 772-5900E.
    
    Intended Term:
    
    7 yearsF.
    
    Lease Expiration Date:
    
    March 15, 2013G.
    
    First Months Prepaid Rent:
    
    $98,769.90H.
    
    *Tenants Security Deposit:
    
    $750,000 letter of credit (months
1  14 beginning on the Lease
Commencement Date)

Reducing to $500,000 letter of
credit (beginning month 15
through the remainder of the
Lease Term)


* Subject to the provisions of
Section 3.7I.
    
    Late Charge Amount:
    
    5% of current Monthly Base RentJ.
    
    Tenants Required Liability
Coverage:
    
    $5,000,000K.
    
    Brokers:
    
    Spieker Stratmore Commercial,
Inc.  TenantCornish & Carey Commercial 
Landlord
 Exhibit A
 Exhibit A
 Outside Areas
  2




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Month
    
    Base Monthly RentLease Commencement Date  May 15, 2007
    
    $
    0May 16, 2007  March 15, 2008
    
    $
    98,769.90March 16, 2008  March 15, 2009
    
    $
    103,491.35March 16, 2009  March 15, 2010
    
    $
    108,212.80March 16, 2010 - March 15, 2011
    
    $
    112,934.25March 16, 2011 - March 15, 2012
    
    $
    117,655.70March 16, 2012 - March 15, 2013
    
    $
    122,377.15
 Permitted Use
 Exhibits
 Exhibit A
    
    Site Plan showing the Property and delineating the Building in
which the Leased Premises are located.Exhibit B
    
    Floor Plan outlining the Leased PremiseExhibit C
    
    Subordination AgreementExhibit D
    
    Tenant Improvement AgreementSchedule 1
    
    Designation of Outside Area For Lease Sign PlacementSchedule 2
    
    Personal Property
 ARTICLE 2
 LEASED PREMISES, TERM AND POSSESSION
 2.1 DEMISE OF LEASED PREMISES
 3




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2.2 RIGHT TO USE OUTSIDE AREAS
 2.3 LEASE COMMENCEMENT DATE AND LEASE TERM Lease Commencement Date Commencement Date Confirmation Notice Lease Term
 2.4 DELIVERY OF THE LEASED PREMISES Delivery Date
 4




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2.5 ACCEPTANCE OF POSSESSION
 2.6 SURRENDER OF POSSESSION Exhibit D
 5
        2.7 EARLY OCCUPANCY
 2.8 OPTION TO EXTEND Extension Option Extended Term Election Notice
 Fair Market Rent
 6




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Notifying Party Non-Notifying Party
   7
           ARTICLE 3
 RENT, LATE CHARGES AND SECURITY DEPOSITS
 3.1 BASE MONTHLY RENT Base Monthly
Rent
 3.2 ADDITIONAL RENT Additional Rent
 Maintenance Costs Cap
  8




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3.3 YEAR-END ADJUSTMENTS AND REVIEW RIGHTS
  9




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3.4 LATE CHARGE AND INTEREST ON RENT IN DEFAULT Late Charge Amount th
 3.5 PAYMENT OF RENT
 3.6 PREPAID RENT First Months Prepaid Rent
 3.7 SECURITY DEPOSIT Letter of Credit Security Deposit
 10




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11




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ARTICLE 4
USE OF LEASED PREMISES AND OUTSIDE AREA
 4.1 PERMITTED USE Permitted Use
 12




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4.2 GENERAL LIMITATIONS ON USE
 4.3 NOISE AND EMISSIONS
 4.4 TRASH DISPOSAL
 13




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4.5 PARKING
 4.6 SIGNS
 4.7 COMPLIANCE WITH LAWS AND PRIVATE RESTRICTIONS
 4.8 COMPLIANCE WITH INSURANCE REQUIREMENTS
 14




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4.9 LANDLORDS RIGHT TO ENTER Schedule 1
 4.10
 4.11 RULES AND REGULATIONS
 4.12 ENVIRONMENTAL PROTECTION
 4.13 OUTSIDE AREAS
 15




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4.14 HAZARDOUS MATERIALS
    16




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17




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Hazardous Materials(s) et seq. et seq et seq et seq. et seq Hazardous Material Laws
  18




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ARTICLE 5
 REPAIRS, MAINTENANCE, SERVICES AND UTILITIES
 5.1 REPAIR AND MAINTENANCE
 Tenants Obligation
 19




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Landlords Obligation
 Americans With Disabilities Act ( ADA ) and Similar Acts
 20




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5.2 UTILITIES
 5.3 SECURITY
 5.4 ENERGY AND RESOURCE CONSUMPTION
 5.5 LIMITATION OF LANDLORDS LIABILITY
 21




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ARTICLE 6
 ALTERATIONS AND IMPROVEMENTS
 6.1 BY TENANT Alterations
 6.2 INITIAL ALTERATIONS Exhibit D
 6.3 OWNERSHIP OF ALTERATIONS
 22




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6.4 ALTERATIONS
 6.5 LIENS
 ARTICLE 7
ASSIGNMENT AND SUBLETTING BY TENANT
 7.1 BY TENANT
 23




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7.2 MERGER OR REORGANIZATION
 7.3 LANDLORDS ELECTION
  24




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7.4 CONDITIONS TO LANDLORDS CONSENT
        25




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7.5 ASSIGNMENT CONSIDERATION AND EXCESS RENTALS DEFINED Assignment Consideration Excess Rentals
 7.6 PAYMENTS
 7.7 GOOD FAITH
 26




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7.8 EFFECT OF LANDLORDS CONSENT
 7.9 Intentionally Omitted.
 7.10 PERMITTED TRANSFERS Tenant Affiliate Tenant Successor Control
 ARTICLE 8
LIMITATION ON LANDLORDS LIABILITY AND INDEMNITY
 8.1 LIMITATION ON LANDLORDS LIABILITY AND RELEASE
 27




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8.2 TENANTS INDEMNIFICATION OF LANDLORD
 ARTICLE 9
 INSURANCE
 9.1 TENANTS INSURANCE
 28




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29




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9.2 LANDLORDS INSURANCE
  30




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9.3 MUTUAL WAIVER OF SUBROGATION
 ARTICLE 10
 DAMAGE TO LEASED PREMISES
 10.1 LANDLORDS DUTY TO RESTORE
 10.2 INSURANCE PROCEEDS
 31




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10.3 LANDLORDS RIGHT TO TERMINATE
     10.4 TENANTS RIGHT TO TERMINATE
 32




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10.5 TENANTS WAIVER
 10.6 ABATEMENT OF RENT
 ARTICLE 11
CONDEMNATION
 11.1 TENANTS RIGHT TO TERMINATE
 11.2 LANDLORDS RIGHT TO TERMINATE
 33




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11.3 RESTORATION
 11.4 TEMPORARY TAKING
 11.5 DIVISION OF CONDEMNATION AWARD
 11.6 ABATEMENT OF RENT
 11.7 TAKING DEFINED
 ARTICLE 12
 DEFAULT AND REMEDIES
 12.1 EVENTS OF TENANTS DEFAULT
  34




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35




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12.2 LANDLORDS REMEDIES
       36




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12.3 LANDLORDS DEFAULT AND TENANTS REMEDIES
   37




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12.4 LIMITATION ON TENANTS RECOURSE
     12.5 TENANTS WAIVER
 38




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ARTICLE 13
 GENERAL PROVISIONS
 13.1 TAXES ON TENANTS PROPERTY
 13.2 HOLDING OVER
 13.3 SUBORDINATION TO MORTGAGES
 39




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Exhibit C
 13.4 TENANTS ATTORNMENT UPON FORECLOSURE
 13.5 MORTGAGEE PROTECTION
 13.6 ESTOPPEL CERTIFICATES
 40




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13.7 TENANTS FINANCIAL INFORMATION
 13.8 TRANSFER BY LANDLORD
 13.9 FORCE MAJEURE
 13.10 NOTICES
  41




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13.11 ATTORNEYS FEES
 13.12 DEFINITIONS
 REAL PROPERTY TAXES Real Property Tax Real Property Taxes
 42




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LANDLORDS INSURANCE COSTS Landlords Insurance Costs
 PROPERTY MAINTENANCE COSTS Property Maintenance Costs
 43




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PROPERTY OPERATING EXPENSES Property Operating Expenses
 LAW Law
 LENDER Lender
 PRIVATE RESTRICTIONS Private Restrictions
 RENT
 13.13 GENERAL WAIVERS
 44




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13.14 ACCESS
 13.15 Schedule 2
 13.16 MISCELLANEOUS
 ARTICLE 14
 CORPORATE AUTHORITY,
 BROKERS AND ENTIRE AGREEMENT
 14.1 CORPORATE AUTHORITY
 45




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14.2 BROKERAGE COMMISSIONS
 14.3 ENTIRE AGREEMENT
 14.4 LANDLORDS REPRESENTATIONS
 [signature page follows]
 46




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AS LANDLORD:
    
    
    
    AS TENANT:JER BAYSIDE, LLC,
a 
Delaware limited liability company
    
    
    0ASYST TECHNOLOGIES, INC.,
a California corporationBy:
    
    JER Bayside Member, LLC,a Delaware limited liability company
    
    By:
    
    /s/ Stephen S. SchwartzIts:
    
    Sole Member
    
    
    
    
    Stephen S. SchwartzChairman, Chief Executive Officer, andPresidentBy:
    
    JER Bayside Investor, LLC,a Delaware limited liability companyIts:
    
    Member /s/ Craig Smith
    
    By:
    
    /s/ Robert J. NiklBy:
    
    Craig Smith
    Robert J. NiklIts:
    
    Vice President
    
    
    
    Chief Financial OfficerBy:
    
    TMG Bayside, LLC,
a Delaware limited liability companyIts:
    
    Administrative MemberBy:
    
    TMG Partners,
a California corporationIts:
    
    Managing MemberBy:
    
    /s/ Lynn TolinIts:
    
    Lynn Tolin SVP
 CORPORATION
 47




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Exhibit A Site Plan
 
 Page 1 of 1




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Exhibit
B Floor Plan
 
 Page 1 of 1




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EXHIBIT C
 RECORDING REQUESTED BY AND
AFTER RECORDING, RETURN TO:
 
 
  SUBORDINATION, NON-DISTURBANCE
 AND ATTORNMENT AGREEMENT
 Agreement Lender Landlord Tenant
 Background
 Loan Security Instrument Exhibit A Property
 Lease Leased Space
   Subordination




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Loan Number:
  Nondisturbance
 Attornment Successor Owner
 Prior Assignment; Rent Payments; Notice to Tenant Regarding Rent Payments
 2




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Loan Number:
  Lender Opportunity to Cure Landlord Defaults
 Right to Purchase
 Miscellaneous
 Notices
 3




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Loan Number:
 Entire Agreement; Modification
 Binding Effect; Joint and Several Obligations
 Unenforceable Provisions
 Duplicate Originals; Counterparts
 Construction of Certain Terms
 Governing Law
 Consent to Jurisdiction
 WAIVER OF JURY TRIAL . TO THE FULLEST EXTENT PERMITTED BY LAW, EACH PARTY HERETO
WAIVES AND AGREES NOT TO ELECT A TRIAL BY JURY WITH RESPECT TO ANY ISSUE ARISING OUT OF THIS
AGREEMENT.
 [Remainder of page is blank; signatures appear on next page.]
 4




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TENANT:[insert Tenants name]
 By:Name:Title:
 Tenant Notice Address:Attn:
 [Signatures continue on next page.]




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LANDLORD:[insert Landlords name]
 By:Name:Title:
 Tenant Notice Address:Attn:
 [Signatures continue on next page.]




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LENDER:
  By:Name:Title:
 Lender Notice Address:




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STATE OF
    
    
    ))
    
    ss.:COUNTY OF
    
    
    )
   Notary Public




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Notary Acknowledgement for Landlord:
 STATE OF
    
    
    ))
    
    ss.:COUNTY OF
    
    
    )
    Notary Public




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Notary Acknowledgement for Lender:
 STATE OF
    
    
    )) ss.:COUNTY OF
    
    
    )
   Notary Public




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Attach: Exhibit A  Legal Description of the Property




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EXHIBIT D
 TENANT IMPROVEMENT AGREEMENT  Work Letter
 Exhibit A Leased Premises Premises Lease Exhibit D Exhibit D
 Improvements
 Section 1. Definitions .
  Tenants Architect
 Tenants Engineer
 General Contractor
 Design Development Drawings
 MEP Drawings
 Construction Drawings
 1




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Construction Schedule Schedule 1
 Section 2. Plans and Specifications .
    Tenants Plans
  2




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Final Plans
   Section 3. Removal of Improvements .
  Section 4. Construction of Improvements .
    3




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4




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Section 5. Completion of Improvements .
  Section 6. Tenant Improvement Allowance .
 Construction Budget
 Tenant Improvement Allowance Tenants Excess Costs
 Retained Amount
 5




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Section 7. Tenants Indemnity .
  6




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Exhibit D
 LANDLORD:
    
    JER BAYSIDE, LLC,a Delaware limited liability companyBy:
    
    JER Bayside Member, LLC,a Delaware limited liability companyIts:
    
    Sole MemberBy:
    
    JER Bayside Investor, LLC,
a Delaware limited liability companyIts:
    
    Member/s/ Craig SmithBy:
    
    Craig SmithIts:
    
    Vice PresidentBy:
    
    TMG Bayside, LLC,a Delaware limited liability companyIts:
    
    Administrative MemberBy: TMG Partners,a California corporationIts:
    
    Managing MemberBy:
    
    /s/ Lynn TolinIts:
    
    Lynn Tolin SVPTENANT:
    
    ASYST TECHNOLOGIES, INC.a California corporationBy:
    
    /s/ Robert J. NiklRobert J. NiklChief Financial OfficerBy:
    
    /s/ Robert DobbinRobert Dobbin
Assistant Secretary
 7




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SCHEDULE 1
 DATE
    
    ITEMDesign Development Drawings will be completed and delivered by
Tenants Architect.Landlord will give Tenant its approval of the Design Development
Drawings or its comments and revisions necessaryfor its approval to
be granted.MEP Drawings will be completed and delivered by Tenants Engineer.Construction Drawings are completed and delivered by Tenants
ArchitectTenant will issue Construction Drawings for bidding and apply for
permits.Bids will be due back.Final budget and construction schedule will be established.Construction commences.Substantial completion of the Tenant Improvements. Furniture,
fixtures equipment and cabling installation begins.Occupancy of the Leased Premises by Tenant.
 8




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Schedule 1
For Lease signs
 
 Page 1 of 1




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Schedule 2
 Personal Property
 HVAC Equipment
        Electrical Equipment
 (200)
    
    fluorescent lay-in light fixtures(1)
    
    1200 amp free-standing meter main(47)
    
    recessed can lights
 Miscellaneous
 (18)
    
    exit lights(18)
    
    boxes of misc. ceiling grid wires, etc.(1)
    
    pallet (56) boxes of mini blinds: black, 116.25x45.75x1
 (1)
    
    eye wash station