<PAGE>
                                                                   Exhibit 10.50


                                                                Award No. ______

                            ASYST TECHNOLOGIES, INC.

                           2003 EQUITY INCENTIVE PLAN

                            STOCK OPTION AWARD NOTICE

Asyst Technologies, Inc. (the "Company"), pursuant to its 2003 Equity Incentive
Plan (the "Plan"), hereby awards to Optionee an option over the number of shares
of the Company's Common Stock set forth below. This stock option award is
subject to all of the terms and conditions as set forth in this Stock Option
Award Notice, and in the accompanying Stock Option Award Agreement, and Plan,
all of which are deemed incorporated herein in their entirety as one single and
fully integrated agreement (the "Option").

Optionee:                                          _____________________________
Date of Grant:                                     _____________________________
Vesting Commencement Date:                         _____________________________
Number of Shares Subject to Option (the "Shares"): _____________________________
Exercise Price (per Share subject to the Option):  _____________________________
Option Expiration Date (Term):                     _____________________________

Incentive Stock Option:                            Yes    [ ]     No    [ ]

VESTING SCHEDULE: 1/4th of the Shares vest and become exercisable on the first
                  anniversary of the Vesting Commencement Date; and
                  1/4th of the Shares vest and become exercisable on each of the
                  subsequent three (3) anniversaries of the Vesting Commencement
                  Date.]

ADDITIONAL TERMS/ACKNOWLEDGEMENTS: The undersigned Optionee acknowledges receipt
of, and understands and agrees that the Option is subject to, the terms and
conditions set forth in this Stock Option Award Notice, the accompanying Stock
Option Award Agreement, and the Plan. Optionee further acknowledges that as of
the Date of Grant, this Stock Option Award Notice, the Stock Option Award
Agreement and the Plan set forth the entire understanding between Optionee and
the Company regarding the acquisition of stock in the Company and supersede all
prior oral and written agreements on that subject, except to the extent
expressly provided to the contrary with respect to the following: (i) awards
previously granted and delivered to Optionee under the Plan, and (ii) the
following agreements only:

         OTHER AGREEMENTS:                         _____________________________

Optionee understands and agrees that the Option may be amended or modified only
as of and to the extent expressly agreed in writing, executed by Optionee and
the Company.

ASYST TECHNOLOGIES, INC.                       OPTIONEE:

By: _______________________________            _________________________________
             Signature                                      Signature

Name: _____________________________            Name: ___________________________

Title: ____________________________            Date: ___________________________

Date: _____________________________

ATTACHMENTS: Stock Option Award Agreement and 2003 Equity Incentive Plan.

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                                                                Award No. ______

                          STOCK OPTION AWARD AGREEMENT

         Unless and to the extent otherwise expressly defined hereinafter, the
terms in this Stock Option Award Agreement shall be given the same meanings as
defined in the Stock Option Award Notice and the Plan. In the case of any
inconsistency between the meaning of terms defined in such documents, the
meanings of terms defined in the Plan shall control.

         1. Grant of Option. As of the Date of Grant, Asyst Technologies, Inc.,
a California corporation (the "Company"), has granted to Optionee a right to
purchase the Shares at the Exercise Price per share, subject to the terms and
provisions of the Stock Option Award Notice, this Stock Award Agreement, and the
Plan, as may be amended from time to time. Except as otherwise provided in
Sections 5 through 7, below, the Option will automatically expire on the Option
Expiration Date. In no event shall the Option, or any portion, be exercised or
deemed exercisable at any time beyond the Option Expiration Date. Optionee
acknowledges and agrees that he or she has no right, title, interest or
recourse, and the Company has no obligation or liability, with respect to the
Option as of or following the Option Expiration Date.

                  (a) Incentive Stock Options. If designated as an Incentive
Stock Option in the Stock Option Award Notice, the Option is intended to qualify
as an Incentive Stock Option as defined in Section 422 of the Code. However,
notwithstanding such designation, to the extent that the aggregate Fair Market
Value of the Shares designated as Incentive Stock Options which become
exercisable for the first time by the Optionee during any calendar year (under
all plans of the Company or any Affiliate or subsidiary) exceeds $100,000, the
Shares that exceed such limit (according to the order in which they were
granted) shall be treated as Nonstatutory Stock Options.

         2. Exercise of Option.

                  (a) Right to Exercise. The Option shall be exercisable during
its term in accordance with the Vesting Schedule, and with the applicable
provisions of the Plan and this Stock Option Award Agreement. The Option shall
be subject to the provisions of Section 11(c) of the Plan relating to the
exercisability or termination of the Option in the event of a Corporate
Transaction.

                  (b) Method of Exercise. The Option shall be exercisable only
by delivery of a written notice which shall state the election to exercise the
Option, the whole number of shares in respect of which the Option is being
exercised, and such other provisions as may be required by the Committee. Such
exercise notice shall be signed by the Optionee and shall be delivered in
person, by certified mail, or by such other method as determined from time to
time by the Committee to the Company accompanied by payment of the Exercise
Price. The Option shall be deemed to be exercised upon receipt by the Company of
such written notice accompanied by the Exercise Price, which, to the extent
selected, shall be deemed to be satisfied by use of the broker-dealer sale and
remittance procedure to pay the exercise price provided in Section 3(d), below.
An exercise may be made with respect to whole shares only, and not for a
fraction of a share.

                  (c) Taxes. No shares subject to the Option will be delivered
to the Optionee or other person pursuant to the exercise of the Option until the
Optionee or other person has made arrangements acceptable to the Committee for
the satisfaction of applicable federal, state or local

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                                                                Award No. ______

tax withholding obligations, including, without limitation, obligations incident
to the receipt of shares or the disqualifying disposition of shares received on
exercise of a stock option. Such withholding obligations may be satisfied by any
of the following means: (i) tendering a cash payment; (ii) authorizing the
Company to withhold shares of Common Stock from the Shares otherwise issuable to
the Optionee as a result of the exercise the Option; provided, however, that no
Shares may be withheld with a value exceeding the minimum amount of tax required
to be withheld by law (or such lesser amount as may be necessary to avoid
variable award accounting); or (iii) delivering to the Company owned and
unencumbered shares of Common Stock.

                        (i) Regardless of any action the Company takes with
                  respect to any or all income tax, social insurance, payroll
                  tax, payment on account or other tax-related withholding
                  ("Tax-Related Items"), the Optionee acknowledges that the
                  ultimate liability for all Tax-Related Items legally due by
                  the Optionee is and remains his or her responsibility and that
                  the Company (1) makes no representations or undertakings
                  regarding the treatment of any Tax-Related Items in connection
                  with any aspect of the Option, including the award, vesting or
                  exercise of the Option, the subsequent sale of Shares acquired
                  pursuant to such exercise and the receipt of any dividends;
                  and (2) does not commit to structure the terms of the award or
                  any aspect of the Option to reduce or eliminate the Optionee's
                  liability for Tax-Related Items.

                        (ii) Prior to exercise of the Option, the Optionee shall
                  pay or make adequate arrangements satisfactory to the Company
                  to satisfy all withholding and payment on account obligations
                  of the Company. In this regard, the Optionee authorizes the
                  Company to withhold all applicable Tax-Related Items legally
                  payable by the Optionee from his or her wages or other cash
                  compensation paid to the Optionee by the Company or from
                  proceeds of the sale of the Shares. Alternatively, or in
                  addition, if permissible under local law, the Company may (1)
                  sell or arrange for the sale of Shares that the Optionee
                  acquires to meet the withholding obligation for Tax-Related
                  Items, and/or (2) withhold in Shares, provided that the
                  Company only withholds the number of Shares necessary to
                  satisfy the minimum withholding amount. Finally, the Optionee
                  shall pay to the Company any amount of Tax-Related Items that
                  the Company may be required to withhold as a result of the
                  Optionee's participation in the Plan or the purchase of Shares
                  that cannot be satisfied by the means previously described.
                  The Company may refuse to honor the exercise and refuse to
                  deliver the Shares if the Optionee fails to comply with his or
                  her obligations in connection with the Tax-Related Items as
                  described in this section.

         3. Method of Payment. Payment of the Exercise Price shall be made by
any of the following, or a combination thereof, at the election of the Optionee;
provided, however, that such exercise method does not then violate any
applicable law:

                  (a) cash;

                  (b) check;

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                                                                Award No. ______

                  (c) surrender of shares or delivery of Common Stock which have
a Fair Market Value on the date of surrender equal to the aggregate Exercise
Price of the Shares which are being exercised (but only to the extent that such
exercise of the Option would not result in an accounting compensation charge
with respect to the shares used to pay the exercise price); or

                  (d) payment through a broker-dealer sale and remittance
procedure pursuant to which the Optionee (i) shall provide written instructions
to a Company designated brokerage firm to effect the immediate sale of some or
all of the purchased shares and remit to the Company, out of the sale proceeds
available on the settlement date, sufficient funds to cover the aggregate
Exercise Price payable for the purchased shares and (ii) shall provide written
directives to the Company to deliver the certificates for the purchased shares
directly to such brokerage firm in order to complete the sale transaction.

         4. Restrictions on Exercise. The Option may not be exercised if the
issuance of the Shares upon such exercise would constitute a violation of any
applicable laws.

         5. Termination or Change of Continuous Service. In the event the
Optionee's Continuous Service terminates, other than due to the Optionee's death
or Disability (as defined in the Plan), the Optionee may, to the extent
otherwise so entitled at the date of such termination (the "Termination Date"),
exercise the Option within the period of time ending on the earlier of (i) the
date three (3) months following the Termination Date (if the termination is
determined by the Company, for any reason), (ii) the date 30 days following the
Termination Date (if the termination is determined by the Optionee, for any
reason), or (iii) the Option Expiration Date (the "Post-Termination Exercise
Period"). In no event shall the Option be exercised or deemed exercisable later
than the Option Expiration Date set forth herein. In the event of the Optionee's
change in status from Employee, Director or Consultant to any other status of
Employee, Director or Consultant, the Option shall remain in effect and, except
to the extent otherwise determined by the Committee, continue to vest. Except as
provided in Sections 6 and 7 below, to the extent that the Optionee is not
entitled to exercise the Option on the Termination Date, or if the Optionee does
not exercise the Option within the Post-Termination Exercise Period, the Option
shall terminate. In no event shall the Option be exercised or deemed exercisable
at any time with respect to Shares which have not vested as of the Termination
Date.

         6. Disability of Optionee. In the event the Optionee's Continuous
Service terminates as a result of his or her Disability (as defined in the
Plan), the Optionee may, but only within twelve (12) months from the Termination
Date (and in no event later than the Option Expiration Date), exercise the
Option to the extent he or she was otherwise entitled to exercise it on the
Termination Date. To the extent that the Optionee is not entitled to exercise
the Option on the Termination Date, or if the Optionee does not exercise the
Option to the extent so entitled within the time specified herein, the Option
shall expire. In no event shall the Option be exercised or deemed exercisable at
any time with respect to Shares which have not vested as of the Termination
Date.

         7. Death of Optionee. In the event of the termination of the Optionee's
Continuous Service as a result of his or her death, the Option may be exercised
by the Optionee's estate, by a person who acquired the right to exercise the
Option by bequest or inheritance or by a person designated pursuant to Section
6(d) of the Plan, but only to the extent the Optionee could exercise the Option
at the date of termination, within twelve (12) months from the date of death

                                       4

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                                                                Award No. ______

(but in no event later than the Option Expiration Date). To the extent that the
Optionee is not entitled to exercise the Option on the date of death, or if the
Option is not exercised to the extent so entitled within the time specified
herein, the Option shall expire. In no event shall the Option be exercised or
deemed exercisable at any time with respect to Shares which have not vested as
of the Termination Date.

         8. Transferability of Option. The Option may be transferred by will, by
the laws of descent and distribution, and to the extent and in the manner
authorized by the Committee, to members of the Optionee's immediate family (as
determined by the Committee) or pursuant to a domestic relations order. The
terms of the Option shall be binding upon the executors, administrators, heirs
and successors of the Optionee.

         9. Refusal to Transfer. The Company shall not be required (i) to
transfer on its books any shares that have been sold or otherwise transferred in
violation of any of the provisions of this Agreement or (ii) to treat as owner
of such shares or to accord the right to vote or pay dividends to any purchaser
or other transferee to whom such shares shall have been so transferred.

         10. Tax Consultation. The Optionee understands that he or she may
suffer adverse tax consequences as a result of the Optionee's purchase or
disposition of the shares under the Plan. The Optionee represents that he or she
has consulted or will have an opportunity to consult with any tax consultants
the Optionee deems advisable in connection with the purchase or disposition of
the shares and that the Optionee is not relying on the Company for any tax
advice.

         11. Entire Agreement: Governing Law. Except to the extent expressly
identified on the Stock Option Award Notice, the Stock Option Award Notice, the
Stock Option Award Agreement and the Plan constitute the entire agreement of the
parties with respect to the subject matter hereof and supersede in their
entirety all prior undertakings and agreements of the Company and the Optionee
with respect to the subject matter hereof, and may not be modified adversely to
the Optionee's interest except by means of a writing signed by the Company and
the Optionee. Nothing in the Stock Option Award Notice, the Stock Option Award
Agreement and the Plan (except as expressly provided therein) is intended to
confer any rights or remedies on any persons other than the parties. The Stock
Option Award Notice, the Stock Option Award Agreement and the Plan are to be
construed in accordance with and governed by the laws of the State of California
without giving effect to any conflict of law rule. Should any provision of the
Stock Option Award Notice, the Stock Option Award Agreement and the Plan be
determined by a court of law to be illegal or unenforceable, such provision
shall be enforced to the fullest extent allowed by law and the other provisions
shall nevertheless remain effective and shall remain enforceable.

         12. Headings. The captions used in the Stock Option Award Notice, the
Stock Option Award Agreement and the Plan are inserted for convenience and shall
not be deemed a part of the Option for construction or interpretation.

         13. Notices. Any notice required or permitted hereunder shall be given
in writing and shall be deemed effectively given upon personal delivery or upon
deposit in the United States mail by certified mail (if the parties are within
the United States) or upon deposit for delivery by an internationally recognized
express mail courier service (for international delivery of notice),

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                                                                Award No. ______

with postage and fees prepaid, addressed to the other party at its address as
shown below or to such other address as such party may designate in writing from
time to time to the other party.

         14. Rights as Shareholder. Until the Optionee has satisfied all
requirements for exercise of the Option pursuant to the terms of the Stock
Option Award Notice, the Stock Option Award Agreement and the Plan, the Optionee
shall not be deemed to be a shareholder or to have any of the rights of a
shareholder with respect to any Shares.

         15. Mandatory Arbitration to Resolve Disputes. Any differences,
disputes or controversies arising from the Option, and rights or obligations
hereunder, shall be exclusively submitted to binding arbitration before an
independent and qualified arbitrator in accordance with the American Arbitration
Association and its rules then in effect, without reference to conflict of laws
principles. Arbitration shall be the exclusive forum for any dispute, claim or
cause arising with respect to the Option or hereunder, and the decision and
award by the arbitrator shall be final, binding upon and non-appealable by the
parties and may be entered in any state court of California having jurisdiction.
The arbitrator shall be without authority or jurisdiction to award either party
its attorneys' fees or costs incurred in the matter. In addition, the arbitrator
shall be without authority or jurisdiction to award either party, for any claim,
cause or action arising hereunder, any incidental, special, consequential or
exemplary damages of any nature, including but not limited to punitive damages;
provided, however, that provisional or injunctive remedies and relief shall be
available as appropriate to each party.

         16. Waiver of Right to Jury Trial. Each party, to the fullest extent
permitted by law, waives any right or expectation against the other to trial or
adjudication by a jury of any claim, cause or action arising with respect to the
Option or hereunder, or the rights, duties or liabilities created hereby.

         17. Nature of Option. In accepting the Option, the Optionee
acknowledges and agrees that:

                  (a) the Plan is established voluntarily by the Company, it is
discretionary in nature and it may be modified, amended, suspended or terminated
by the Company at any time, unless otherwise provided in the Plan and this
Agreement;

                  (b) the award of the Option is voluntary and occasional, and
does not create any contractual or other right to receive future grants of
options, or benefits in lieu of options, even if options have been granted
repeatedly in the past;

                  (c) all decisions with respect to future option grants, if
any, will be at the sole discretion of the Company;

                  (d) the Optionee's participation in the Plan shall not create
a right to further employment with the Employer and shall not interfere with the
ability of the Company to terminate the Optionee's employment relationship at
any time, with or without cause;

                  (e) the Optionee is voluntarily participating in the Plan;

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                                                                Award No. ______

                  (f) the Option is an extraordinary item that does not
constitute compensation of any kind for services of any kind rendered to the
Company, and which is outside the scope of the Optionee's employment contract,
if any;

                  (g) the Option is not part of normal or expected compensation
or salary for any purposes, including, but not limited to, calculating any
severance, resignation, termination, redundancy, end of service payments,
bonuses, long-service awards, pension or retirement benefits or similar
payments;

                  (h) in the event that the Optionee is not an employee of the
Company, the Option will not be interpreted to form an employment contract or
relationship with the Company; and furthermore, the Option will not be
interpreted to form an employment contract with any subsidiary or Affiliate of
the Company;

                  (i) the future value of the Shares is unknown and cannot be
predicted with certainty;

                  (j) if the Shares do not increase in value, the Options will
have no value;

                  (k) if the Optionee exercises the Option and obtains Shares,
the value of the Shares obtained upon exercise may increase or decrease in
value, even below the Exercise Price;

                  (l) in consideration of the Option, the Optionee does not
acquire any claim or entitlement to compensation or damages that otherwise could
arise from termination of the Option or diminution in value of the Option, or
Shares purchased through exercise of the Option, upon termination of the
Optionee's employment by the Company (for any reason whatsoever and whether or
not in breach of local labor laws), and the Optionee hereby irrevocably waives
and releases the Company from any such claim or entitlement that may arise; if,
notwithstanding the foregoing, any such claim or entitlement is found by a court
of competent jurisdiction to have arisen;

                  (m) by signing this Stock Option Award Agreement, the Optionee
shall be deemed irrevocably to have waived his or her right to pursue or seek
remedy for any such claim or entitlement;

                  (n) notwithstanding any terms or conditions of the Plan to the
contrary, in the event of involuntary termination of the Optionee's employment
(whether or not in breach of local labor laws), the Optionee's right to receive
Shares under the Plan, or vesting of such right, if any, will terminate
automatically as of the Termination Date, and will not be extended by any notice
period mandated under local law (e.g., active employment would not include a
period of "garden leave" or similar period pursuant to local law);

                  (o) in the event of involuntary termination of employment
(whether or not in breach of local labor laws), the Optionee's right to exercise
the Option after termination of employment, if any, will be determined as
otherwise provided herein and will not be extended by any notice period mandated
under local law; and

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                                                                Award No. ______

                  (p) the Committee shall have the exclusive discretion to
determine when the Optionee is no longer actively employed for purposes of this
Option.

         18. Data Privacy. The Optionee hereby explicitly and unambiguously
consents to the collection, use and transfer, in electronic or other form, of
his or her personal data as described in this document by and among, as
applicable, the Company and its subsidiaries and Affiliates for the exclusive
purpose of implementing, administering and managing the Optionee's participation
in the Plan.

                  (a) The Optionee understands that the Company may hold certain
personal information about him or her, including, but not limited to, the
Optionee's name, home address and telephone number, date of birth, social
security or insurance number or other identification number, salary,
nationality, job title, any shares of stock or directorships held in the
Company, details of the Option or any other entitlement to Shares, canceled,
exercised, vested, unvested or outstanding in the Optionee's favor, for the
purpose of implementing, administering and managing the Plan ("Data"). The
Optionee understands that Data may be transferred to any third parties assisting
in the implementation, administration and management of the Plan, that these
recipients may be located in the Optionee's country or elsewhere, and that the
recipients `country may have different data privacy laws and protections than
the Optionee's country. The Optionee understands that he or she may request a
list with the names and addresses of any potential recipients of the Data by
contacting his or her local human resources representative. The Optionee
authorizes the recipients to receive, possess, use, retain and transfer the
Data, in electronic or other form, for the purposes of implementing,
administering and managing the Optionee's participation in the Plan, including
any requisite transfer of such Data as may be required to a broker or other
third party with whom the Optionee may elect to deposit any Shares acquired upon
exercise of the Option. The Optionee understands that Data will be held as long
as is reasonably necessary to implement, administer and manage the Optionee's
participation in the Plan. The Optionee understands that he or she may, at any
time, view Data, request additional information about the storage and processing
of Data, require any necessary amendments to Data or refuse or withdraw the
consents herein, in any case without cost, by contacting in writing the
Optionee's local human resources representative. The Optionee understands,
however, that refusing or withdrawing his or her consent may affect the
Optionee's ability to participate in the Plan. For more information on the
consequences of refusal to consent or withdrawal of consent, the Optionee
understands that he or she may contact his or her local human resources
representative.

         19. Language. If the Optionee has received this or any other document
related to the Plan translated into a language other than English and if the
translated version is different than the English version, the English version
will control.

         20. AT WILL RELATIONSHIP. THE OPTIONEE ACKNOWLEDGES AND AGREES THAT THE
VESTING OF SHARES PURSUANT TO THE OPTION RESULTS ONLY BY CONTINUING SERVICES OR
EMPLOYMENT AT THE WILL OF THE COMPANY (NOT THROUGH THE ACT OF BEING HIRED, BEING
AWARDED THIS OPTION OR ACQUIRING SHARES HEREUNDER). THE OPTIONEE FURTHER
ACKNOWLEDGES AND AGREES THAT THIS OPTION, THE TERMS AND CONDITIONS WHICH ARE

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                                                                Award No. ______

INCORPORATED HEREIN AND MADE A PART HEREOF BY REFERENCE, THE TRANSACTIONS
CONTEMPLATED HEREUNDER AND THE VESTING SCHEDULE SET FORTH HEREIN DO NOT
CONSTITUTE AN EXPRESS OR IMPLIED PROMISE OF CONTINUED EMPLOYMENT OR ENGAGEMENT
AS AN EMPLOYEE, CONSULTANT OR OTHERWISE WITH OR BY THE COMPANY, OR ANY OF ITS
SUBSIDIARIES OR AFFILIATES, FOR THE VESTING PERIOD OR FOR ANY PERIOD OR AT ALL,
AND SHALL NOT INTERFERE WITH OPTIONEE'S RIGHT OR THE COMPANY'S RIGHT TO
TERMINATE OPTIONEE'S EMPLOYMENT OR CONSULTANT OR OTHER RELATIONSHIP AT ANY TIME,
FOR ANY REASON, WITH OR WITHOUT CAUSE.

         21. Electronic Delivery. The Company may, in its sole discretion,
decide to deliver any documents related to the Option under the Plan and
participation in the Plan, or future options that may be granted under the Plan,
by electronic means or to request the Optionee's consent to participate in the
Plan by electronic means. The Optionee hereby consents to receive such documents
by electronic delivery and, if requested, to agree to participate in the Plan
through an on-line or electronic system established and maintained by the
Company or another third party designated by the Company.

                          ****************************

         Optionee acknowledges receipt of a copy of the Plan, and represents
that he or she is familiar with the terms and provisions thereof, and hereby
accepts the Option subject to all of the terms and conditions of the Stock
Option Award Notice, the Stock Option Award Agreement and the Plan. Optionee has
had the opportunity to review the Stock Option Award Notice, the Stock Option
Award Agreement and the Plan in their entirety, as well as to obtain the advice
of counsel, and fully understands all provisions of the Stock Option Award
Notice, the Stock Option Award Agreement and the Plan. The Optionee agrees to
notify the Company upon any change in the residence address below.

Submitted by:                                       Accepted by:

OPTIONEE:                                           ASYST TECHNOLOGIES, INC.

                                                    By: ________________________

                                                    Title: _____________________
___________________________________________
             (Signature)

Address:                                            Address:

____________________________________________
                                                    48761 Kato Road
____________________________________________        Fremont, CA 94538

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