Exhibit 21.1

**NEWPORT CORPORATION**

**Subsidiary List**

| **Company Name**         |                                                                                   | **Jurisdiction** |
|--------------------------|----------------------------------------------------------------------------------------|------------------|
|                          |                                                                                   |                  |
| *Domestic Subsidiaries:* |                                                                                   |             |
|                     | Automation Unlimited, Inc. (indirect)                                                  |             | Massachusetts |
|                     | Design Technology Corporation (d/b/a Newport Automation and Systems Integration Group) |             | Massachusetts |
|                     | GKS Inspection Services, Inc.                                                          |             | Michigan |
|                     | Kensington Laboratories, Inc.                                                          |             | California |
|                     | Newport Domestic International Sales Corporation (inactive)                            |             | California |
|                     | Newport European Distribution Company                                                  |             | California |
|                     | Newport Finance Company I, LLC                                                         |             | Delaware |
|                     | Newport Finance Company II, LLC                                                        |             | Delaware |
|                     | Newport Government Systems, Inc. (inactive)                                            |             | California |
|                     | Micro Robotics Systems, Inc.                                                           |             | Delaware |
|                     | Newport Precision Optics Corporation                                                   |             | New York |
|                     | Unique Equipment Co. (d/b/a Newport Advanced Automation Systems Group)                 |             | Arizona |
| *Foreign Subsidiaries:*  |                                                                                   |             |
|                     | MC Holding S.A.                                                                        |             | France |
|                     | Micro-Controle Benelux S.A. (inactive)                                                 |             | Belgium |
|                     | Micro Controle Finance Holding 1 (indirect)                                            |             | France |
|                     | Micro Controle Finance Holding 2 (indirect)                                            |             | France |
|                     | Micro-Controle Holdings Ltd. (inactive)                                                |             | United Kingdom |
|                     | Micro-Controle Italia S.r.l.                                                           |             | Italy |
|                     | Micro-Controle Ltd. (indirect; inactive)                                               |             | United Kingdom |
|                     | Micro-Controle S.A. (indirect)                                                         |             | France |
|                     | Micro-Controle UK Ltd. (indirect; inactive)                                            |             | United Kingdom |
|                     | MRSI Asia Pte. Ltd.                                                                    |             | Singapore |
|                     | MRSI (Europe), B.V. (indirect)                                                         |             | Netherlands |
|                     | Newport B.V.                                                                           |             | Netherlands |
|                     | Newport Corporation (Barbados) SRL                                                     |             | Barbados |
|                     | Newport GmbH                                                                           |             | Germany |
|                     | Newport Instruments AG                                                                 |             | Switzerland |
|                     | Newport Instruments Canada Corporation                                                 |             | Canada |
|                     | Newport Ltd.                                                                           |             | United Kingdom |
|                     | Newport Opto-Electronics Technologies (indirect)                                       |             | China |
|                     | NPT Instruments AB (indirect)                                                          |             | Sweden |