Exhibit 21.1



Subsidiaries of Registrant



|                                                                       |  |               
|---------------------------------------------------------------------- |  | --------------
|Company Name                                                           |  | Jurisdiction  
|Domestic Subsidiaries:                                                 |  |               
|Automation Unlimited, Inc. (indirect; inactive)                        |  | Massachusetts 
|Birch Nantucket Holding Company, LLC                                   |  | Delaware      
|Design Technology Corporation (inactive)                               |  | Massachusetts 
|GKS Inspection Services, Inc.                                          |  | Michigan      
|Kensington Laboratories, Inc.                                          |  | California    
|Micro Robotics Systems, Inc.                                           |  | Delaware      
|Newport Domestic International Sales Corporation (inactive)            |  | California    
|Newport European Distribution Company                                  |  | California    
|Newport Finance Company I, LLC                                         |  | Delaware      
|Newport Finance Company II, LLC                                        |  | Delaware      
|Newport Government Systems, Inc. (inactive)                            |  | California    
|Newport Precision Optics Corporation                                   |  | New York      
|Spectra-Physics, Inc. (indirect)                                       |  | Delaware      
|Spectra-Physics Franklin, Inc. (indirect)                              |  | Delaware      
|Spectra-Physics Optics Corporation (indirect)                          |  | California    
|Spectra-Physics Rochester, Inc. (indirect)                             |  | Delaware      
|Spectra-Physics Semiconductor Lasers, Inc. (indirect)                  |  | Delaware      
|Spectra-Physics Stratford, Inc. (indirect)                             |  | Delaware      
|Unique Equipment Co. (d/b/a Newport Advanced Automation Systems Group) |  | Arizona       
|                                                                       | 
|Foreign Subsidiaries:                                                  |  |               
|Hilger Analytical Limited (indirect; inactive)                         |  | United Kingdom
|Hilger Crystals Limited (indirect)                                     |  | United Kingdom
|Micro Controle Finance Holding 1 (indirect)                            |  | France        
|Micro Controle Finance Holding 2 (indirect)                            |  | France        
|Micro-Controle Holdings Ltd. (inactive)                                |  | United Kingdom
|Micro-Controle Italia S.r.l.                                           |  | Italy         
|Micro-Controle Ltd. (indirect; inactive)                               |  | United Kingdom
|Micro-Controle S.A.                                                    |  | France        
|Micro-Controle UK Ltd. (indirect; inactive)                            |  | United Kingdom
|MRSI Asia Pte. Ltd. (indirect)                                         |  | Singapore     
|MRSI (Europe), B.V. (indirect)                                         |  | Netherlands   
|Newport B.V.                                                           |  | Netherlands   
|Newport Corporation (Barbados) SRL                                     |  | Barbados      
|Newport GmbH                                                           |  | Germany       
|Newport Instruments AG (inactive)                                      |  | Switzerland   



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|                                                 |  |               
|------------------------------------------------ |  | --------------
|Company Name                                     |  | Jurisdiction  
|Newport Instruments Canada Corporation           |  | Canada        
|Newport Ltd.                                     |  | United Kingdom
|Newport Opto-Electronics Technologies (indirect) |  | China         
|NPT Instruments AB (indirect)                    |  | Sweden        
|Spectra-Physics France S.A. (indirect)           |  | France        
|Spectra-Physics GmbH (indirect)                  |  | Germany       
|Spectra-Physics K.K. (indirect)                  |  | Japan         
|Spectra-Physics Lasers B.V. (indirect)           |  | Netherlands   
|Spectra-Physics Lasers Limited (indirect)        |  | United Kingdom
|Spectra-Physics Limited (indirect; inactive)     |  | United Kingdom