Exhibit 21.1

Subsidiaries of Registrant



|                                                                                 |  |               
|-------------------------------------------------------------------------------- |  | --------------
|Company Name                                                                     |  | Jurisdiction  
|Domestic Subsidiaries:                                                           |  |               
|                                                                                 | 
|Automation Unlimited, Inc. (indirect; inactive)                                  |  | Massachusetts 
|                                                                                 | 
|Birch Nantucket Holding Company, LLC                                             |  | Delaware      
|                                                                                 | 
|Design Technology Corporation (inactive)                                         |  | Massachusetts 
|                                                                                 | 
|Kensington Laboratories, Inc. (inactive)                                         |  | California    
|                                                                                 | 
|Micro Robotics Systems, Inc.                                                     |  | Delaware      
|                                                                                 | 
|Newport Domestic International Sales Corporation (inactive)                      |  | California    
|                                                                                 | 
|Newport European Distribution Company                                            |  | California    
|                                                                                 | 
|Newport Finance Company I, LLC                                                   |  | Delaware      
|                                                                                 | 
|Newport Finance Company II, LLC                                                  |  | Delaware      
|                                                                                 | 
|Newport Franklin, Inc. (indirect)                                                |  | Delaware      
|                                                                                 | 
|Newport Government Systems, Inc. (inactive)                                      |  | California    
|                                                                                 | 
|Newport Inspection Holdings, Inc. (inactive)                                     |  | Michigan      
|                                                                                 | 
|Newport Precision Optics Corporation                                             |  | New York      
|                                                                                 | 
|Newport Rochester, Inc. (indirect)                                               |  | Delaware      
|                                                                                 | 
|Newport Stratford, Inc. (indirect)                                               |  | Delaware      
|                                                                                 | 
|Spectra-Physics, Inc. (indirect)                                                 |  | Delaware      
|                                                                                 | 
|Spectra-Physics Optics Corporation (indirect, inactive)                          |  | California    
|                                                                                 | 
|Spectra-Physics Semiconductor Lasers, Inc. (indirect)                            |  | Delaware      
|                                                                                 | 
|Unique Equipment Co. (inactive)(d/b/a Newport Advanced Automation Systems Group) |  | Arizona       
|                                                                                 | 
|Foreign Subsidiaries:                                                            |  |               
|                                                                                 | 
|Hilger Analytical Limited (indirect; inactive)                                   |  | United Kingdom
|                                                                                 | 
|Hilger Crystals Limited (indirect)                                               |  | United Kingdom
|                                                                                 | 
|Micro Controle Finance Holding 1 (indirect)                                      |  | France        
|                                                                                 | 
|Micro Controle Finance Holding 2 (indirect)                                      |  | France        
|                                                                                 | 
|Micro Controle Holdings Ltd. (inactive)                                          |  | United Kingdom
|                                                                                 | 
|Micro Controle Italia S.r.l.                                                     |  | Italy         
|                                                                                 | 
|Micro Controle Ltd. (indirect; inactive)                                         |  | United Kingdom
|                                                                                 | 
|Micro Controle Spectra-Physics S.A.                                              |  | France        
|                                                                                 | 
|Micro Controle UK Ltd. (indirect; inactive)                                      |  | United Kingdom
|                                                                                 | 
|MRSI Asia Pte. Ltd. (indirect)                                                   |  | Singapore     
|                                                                                 | 
|MRSI (Europe), B.V. (indirect)                                                   |  | Netherlands   
|                                                                                 | 
|Newport B.V.                                                                     |  | Netherlands   
|                                                                                 | 
|Newport Corporation (Barbados) SRL                                               |  | Barbados      
|                                                                                 | 
|Newport GmbH                                                                     |  | Germany       
|                                                                                 | 
|Newport Instruments AG (inactive)                                                |  | Switzerland   



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|                                                    |  |               
|--------------------------------------------------- |  | --------------
|Company Name                                        |  | Jurisdiction  
|Newport Instruments Canada Corporation              |  | Canada        
|                                                    | 
|Newport Spectra-Physics Ltd.                        |  | United Kingdom
|                                                    | 
|Newport Opto-Electronics Technologies (indirect)    |  | China         
|                                                    | 
|NPT Instruments AB (indirect)                       |  | Sweden        
|                                                    | 
|Spectra-Physics GmbH (indirect)                     |  | Germany       
|                                                    | 
|Spectra-Physics K.K. (indirect)                     |  | Japan         
|                                                    | 
|Spectra-Physics Lasers B.V. (indirect)              |  | Netherlands   
|                                                    | 
|Spectra-Physics Lasers Limited (indirect; inactive) |  | United Kingdom
|                                                    | 
|Spectra-Physics Limited (indirect; inactive)        |  | United Kingdom