# Patent

## Title
Radiation detector module

## Abstract

A radiation detector module 10A includes a scintillator for converting radiation made incident from a predetermined direction to light, a two-dimensional PD array 12 for receiving light from the scintillator, a connection substrate 13 formed by stacking dielectric layers 130a to 130f, and mounted with the two-dimensional PD array 12 on one substrate surface thereof, and an integrated circuit device 14 mounted on the other substrate surface of the connection substrate 13, and for reading out electrical signals output from the two-dimensional PD array 12. The integrated circuit device 14 has a plurality of unit circuit regions 14b separated from each other. The connection substrate 13 has a plurality of through conductors 20 and a plurality of radiation shielding films 21a to 23a formed integrally with each of the plurality of through conductors 20 and separated from each other. Accordingly, the readout circuits of the integrated circuit device can be protected from radiation with a simple configuration.

## Background
TECHNICAL FIELD
The present invention relates to a radiation detector module.
BACKGROUND ART
Patent Document 1 describes an X-ray CT device having a configuration for protecting a signal processing circuit provided in an X-ray detector from exposure to X-rays. In this X-ray CT device, on a back surface side of a wiring board with a detection element mounted at its front surface, a circuit board mounted with a signal processing circuit is disposed. In the wiring board, an X-ray shielding portion is placed so as to cover the signal processing circuit from above. The wiring board and circuit board are electrically connected to each other by a connecting member provided around the X-ray shielding portion.
Patent Document 2 describes a medical diagnostic imaging device using X-rays and an X-ray radiation detector. This X-ray radiation detector includes a supporting substrate. The supporting substrate supports a photosensitive element on its front surface side, and provides an electrical path to its rear surface side. Between the supporting substrate and a signal processing circuit, an X-ray radiation shielding portion is disposed. The area of the X-ray radiation shielding portion viewed from an X-ray incident direction is larger than that of the signal processing circuit included in an ASIC readout chip.
CITATION LIST
Patent Literature
Patent Document 1: Japanese Patent Application Laid-Open No. 2009-189384

    Patent Document 2: Japanese Translation of International Application No. 2004-536313


SUMMARY OF INVENTION
Technical Problem
In recent years, as radiation detectors for X-ray inspection apparatuses and the like, devices including photoelectric conversion devices such as photodiode arrays having pluralities of two-dimensionally arrayed photoelectric conversion regions and scintillators disposed on the photoelectric conversion devices have been put into practical use. As compared with conventional detectors using X-ray sensitive films, such radiation detectors offer a high level of convenience such as not requiring development and being able to confirm images in real time, and are also excellent in data storage and ease in handling.
In such radiation detectors, the photoelectric conversion device is mounted on a substrate in most cases. Moreover, because it is necessary to amplify minute signals output from the photoelectric conversion device, an integrated circuit device having a plurality of built-in readout circuits such as a plurality of integrator circuits corresponding to the plurality of photoelectric conversion regions is used. The plurality of readout circuits consist of, for example, integrator circuits. It is preferable that the integrated circuit device is mounted on the backside of the substrate for downsizing of the device.
However, when the photoelectric conversion device is mounted on one of the substrate surfaces of the substrate, and the integrated circuit device is mounted on the other substrate surface, the following problem occurs. That is, when radiation made incident into the scintillator is transmitted in part without being absorbed in the scintillator, the radiation may be transmitted through the substrate to reach the integrated circuit device. In the readout circuits of the integrated circuit device, circuit elements that are easily affected by radiation such as, for example, operational amplifiers, capacitors, or switching MOS transistors are included. Hence, radiation having reached the integrated circuit device may cause an abnormality in the circuit elements. Therefore, it is demanded to protect the readout circuits from radiation by some measure.
Also, in the devices described in Patent Documents 1 and 2, a radiation shield having a size such as to cover the whole integrated circuit device is provided in the substrate. However, in such a configuration, wiring for connection between the photoelectric conversion device and the integrated circuit device must be disposed so as to bypass the radiation shield. Therefore, in the case such as, for example, flip-chip bonding the photoelectric conversion device and the integrated circuit device onto the substrate, substrate wiring is complicated.
It is an object of the present invention to provide a radiation detector module capable of protecting readout circuits of an integrated circuit device from radiation with a simple configuration.
Solution to Problem
A radiation detector module according to an embodiment of the present invention includes (a1) a scintillator for converting radiation made incident from a predetermined direction to light, (b) a photoelectric conversion device having a plurality of photoelectric conversion regions arrayed two-dimensionally, and for receiving light from the scintillator at the photoelectric conversion regions, (c) a connection substrate formed by stacking a plurality of dielectric layers, and mounted with the photoelectric conversion device on one substrate surface thereof, and (d) an integrated circuit device mounted on the other substrate surface of the connection substrate, and for individually reading out electrical signals output from each of the plurality of photoelectric conversion regions of the photoelectric conversion device. The integrated circuit device has a plurality of unit circuit regions. The plurality of unit circuit regions are arrayed two-dimensionally and separated from each other. The plurality of unit circuit regions include a plurality of readout circuits corresponding to the plurality of photoelectric conversion regions, respectively. The connection substrate has a plurality of metallic through conductors. The plurality of through conductors are provided penetrating through at least three dielectric layers adjacent to each other out of the plurality of dielectric layers. The plurality of through conductors serve as a part of paths for the electric signals. In this radiation detector module, a plurality of metallic radiation shielding films are provided at two or more interlayer parts in the at least three dielectric layers. The plurality of radiation shielding films are formed integrally with each of the plurality of through conductors, and separated from each other. Each of a plurality of first regions of projection of the plurality of radiation shielding films onto a virtual plane normal to the predetermined direction includes each of a plurality of second regions of projection of the plurality of unit circuit regions onto the virtual plane.
Moreover, a radiation detector module according to another embodiment of the present invention includes (a2) a scintillator for converting radiation to light, (b) a photoelectric conversion device having a plurality of photoelectric conversion regions arrayed two-dimensionally, and for receiving light from the scintillator at the photoelectric conversion regions, (c) a connection substrate formed by stacking a plurality of dielectric layers, and mounted with the photoelectric conversion device on one substrate surface thereof, and (d) an integrated circuit device mounted on the other substrate surface of the connection substrate, and for individually reading out electrical signals output from each of the plurality of photoelectric conversion regions of the photoelectric conversion device. The integrated circuit device has a plurality of unit circuit regions. The plurality of unit circuit regions are arrayed two-dimensionally and separated from each other. The plurality of unit circuit regions include a plurality of readout circuits corresponding to the plurality of photoelectric conversion regions, respectively. The connection substrate has a plurality of metallic through conductors. The plurality of through conductors are provided penetrating through at least three dielectric layers adjacent to each other out of the plurality of dielectric layers. The plurality of through conductors serve as a part of paths for the electric signals. In this radiation detector module, a plurality of metallic radiation shielding films are provided at two or more interlayer parts in the at least three dielectric layers. The plurality of radiation shielding films are formed integrally with each of the plurality of through conductors, and separated from each other. Each of a plurality of first regions of projection of the plurality of radiation shielding films onto a virtual plane parallel to the one substrate surface includes each of a plurality of second regions of projection of the plurality of unit circuit regions onto the virtual plane.
In these radiation detector modules, the integrated circuit device mounted on the other substrate surface of the connection substrate has a plurality of unit circuit regions including a plurality of readout circuits respectively. In addition, these plurality of unit circuit regions are arrayed two-dimensionally and separated from each other. Therefore, regarding gaps between these unit circuit regions, there is little influence from radiation because no readout circuits exist.
On the other hand, in the connection substrate, a plurality of through conductors that penetrate through at least three dielectric layers and a plurality of metallic radiation shielding films formed integrally with each of the plurality of through conductors are provided. Thus, the radiation shielding films formed integrally with the through conductors do not obstruct arrangement of the through conductors, so that it is not necessary to form a complicated wiring such as to bypass a radiation shield as in, for example, the device described in Patent Document 1. Therefore, the current path, that is, the wiring length between the photoelectric conversion device and the integrated circuit device can be reduced, and noise to be superimposed on a photoelectric current can be further reduced.
In addition, these plurality of metallic radiation shielding films are separated from each other and provided at two or more interlayer parts in the at least three dielectric layers. Further, each of the plurality of first regions of projection of the plurality of radiation shielding films onto a virtual plane includes each of the plurality of second regions of projection of the plurality of unit circuit regions onto the virtual plane. Here, the virtual plane is a plane normal to the predetermined direction, that is, the radiation incident direction. Alternatively, when the radiation incident direction is normal to the substrate surfaces of the connection substrate, the virtual plane is a plane parallel to one of the substrate surfaces of the connection substrate. Due to such a configuration, each of the pluralities of radiation shielding films formed inside the connection substrate protects each corresponding unit circuit region from radiation. Moreover, radiation that has passed through the gaps between the pluralities of radiation shielding films can reach the integrated circuit device, but there is no problem because the part of arrival corresponds to gaps between the plurality of unit circuit regions.
As described in the above, by the radiation detector module described above, the readout circuits of the integrated circuit device can be protected from radiation with a simple configuration.
Moreover, in the radiation detector module described above, the plurality of unit circuit regions of the integrated circuit device are separated from each other. Therefore, noise to be generated by electrical crosstalk between the plurality of unit circuit regions can be reduced.
Moreover, in the radiation detector module described above, the first region for the radiation shielding film formed integrally with one through conductor in one interlayer part and the first region for the radiation shielding film formed integrally with another through conductor in another interlayer part may not overlap each other. Accordingly, the radiation shielding films formed integrally with each of the one through conductor and the other through conductor are not opposed to each other, so that a parasitic capacitance to be generated between the one through conductor and the other through conductor can be reduced. Therefore, noise to be superimposed on photoelectric currents output from the plurality of photoelectric conversion regions of the photoelectric conversion device can be reduced.
Moreover, in the radiation detector module described above, each of a plurality of third regions of projection of the plurality of through conductors onto the virtual plane may be included in each of the plurality of second regions, and each radiation shielding film may be extended around each corresponding through conductor.
Moreover, in the radiation detector module described above, the readout circuit may include an operational amplifier, a capacitor, and a MOS transistor.
Advantageous Effects of Invention
By the radiation detector module according to the present invention, the readout circuits of the integrated circuit device can be protected from radiation with a simple configuration.



BRIEF DESCRIPTION OF DRAWINGS
FIG. 1 is a sectional view showing an embodiment of a radiation detector module.
FIG. 2 is a sectional view showing an internal configuration of a connection substrate and integrated circuit device.
FIG. 3 shows an arrangement of structural elements of an integrated circuit device viewed from an incident direction of radiation.
FIG. 4 is an equivalent circuit diagram showing a configuration example of a readout circuit.
FIG. 5 is a view showing projection of radiation shielding films and unit circuit regions onto a virtual plane.
FIG. 6 is a sectional view showing a modification of a radiation detector module.
FIG. 7 is a view showing projection of radiation shielding films and unit circuit regions onto a virtual plane in the modification.



DESCRIPTION OF EMBODIMENTS
Hereinafter, embodiments of a radiation detector module according to the present invention will be described in detail with reference to the accompanying drawings. Also, the same elements will be denoted with the same reference signs in the description of drawings, and overlapping description will be omitted.
FIG. 1 is a sectional view showing a configuration of an embodiment of a radiation detector module. The radiation detector module 10A shown in FIG. 1 includes a scintillator 11, a photodiode array 12, a connection substrate 13, and an integrated circuit device 14.
The scintillator 11 is a plate-shaped member for converting radiation R made incident from a predetermined direction to light. The radiation R is, for example, X-rays. The scintillator 11 is divided into a plurality of pixels arrayed in M rows and N columns, and disposed on a light incident surface of the two-dimensional photodiode array 12. N and M are both integers not less than 2. The scintillator 11 produces scintillation light in response to the incident radiation R to convert a radiation image into a light image, and outputs the light image to the two-dimensional photodiode array 12. The scintillator 11 is made of, for example, CsI. The scintillator 11 can be placed so as to cover the two-dimensional photodiode array 12, or can be provided by vapor deposition on the two-dimensional photodiode array 12.
The two-dimensional photodiode array 12 serves as a photoelectric conversion device in the present embodiment. The two-dimensional photodiode array 12 has a plurality of photodiodes as a plurality of photoelectric conversion regions arrayed two-dimensionally such as in M rows and N columns, and receives light from the scintillator 11 at the plurality of photodiodes. The two-dimensional photodiode array 12 has a plurality of bump electrodes 12a, which is a conductive bonding material for so-called flip-chip bonding, on a back surface on the opposite side to the light incident surface, and these plurality of bump electrodes 12a are arrayed two-dimensionally such as in M rows and N columns on the back surface of the two-dimensional photodiode array 12. The two-dimensional photodiode array 12 has planar dimensions of, for example, 20 mm×35 mm.
The connection substrate 13 is mounted with the two-dimensional photodiode array 12 on one substrate surface 13a, and is mounted with the integrated circuit device 14 to be described later on the other substrate surface 13b. The connection substrate 13 is formed by stacking a plurality of dielectric layers, and has an internal wiring for electrical connection between the two-dimensional photodiode array 12 and the integrated circuit device 14. Moreover, on the one substrate surface 13a of the connection substrate 13, a plurality of land-shaped wirings to mount the two-dimensional photodiode array 12 are arrayed two-dimensionally such as in M rows and N columns, and on the other substrate surface 13b, a plurality of land-shaped wirings to mount the integrated circuit device 14 are arrayed two-dimensionally.
The integrated circuit device 14 individually detects electrical signals such as a photoelectric current output from each of the plurality of photodiodes of the two-dimensional photodiode array 12 to thereby read out these electric signals. The integrated circuit device 14 has a structure for which a plurality of readout circuits corresponding to the plurality of photodiodes of the two-dimensional photodiode array 12 are collectively packaged into a chip. Moreover, a plurality of bump electrodes 14a as a conductive bonding material to serve as input terminals to these plurality of readout circuits are arrayed two-dimensionally on a surface of the integrated circuit device 14 opposed to the connection substrate 13.
Moreover, the radiation detector module 10A further includes a flexible printed board 15 to externally output an electrical signal output from the integrated circuit device 14. One end of the flexible printed board 15 is electrically connected onto the other substrate surface 13b of the connection substrate 13.
Moreover, the radiation detector module 10A further includes a heat sink 16 to cool the integrated circuit device 14. The heat sink 16 is in contact with a surface of the integrated circuit device 14 on the opposite side to the surface opposed to the connection substrate 13, and has a shape of a large number of fins projecting to the outside.
FIG. 2 is a sectional view showing an internal configuration of the connection substrate 13 and the integrated circuit device 14. In the same figure, there is illustrated a two-dimensional photodiode array 12, but illustration of a scintillator 11 and a heat sink 16 is omitted.
As shown in FIG. 2, the integrated circuit device 14 has a plurality of unit circuit regions 14b and a plurality of circuit regions 14c. In the plurality of unit circuit regions 14b, a plurality of front-stage amplifiers are respectively included as a plurality of readout circuits. These plurality of readout circuits respectively correspond to the plurality of photodiodes of the two-dimensional photodiode array 12, and respectively receive electrical signals such as photoelectric currents from the corresponding photodiodes. In the circuit region 14c, a rear-stage amplifier is provided as an amplifier circuit to further amplify a signal output from the readout circuit of the unit circuit region 14b. 
Here, Part (a) of FIG. 3 is a view showing a configuration example of the integrated circuit device 14. Part (a) of FIG. 3 shows an arrangement of the structural elements of the integrated circuit device 14 viewed from an incident direction of radiation R. Part (b) of FIG. 3 is a view showing one of the unit circuit regions 14b of the integrated circuit device 14 in an enlarged manner. The integrated circuit device 14 has a size of, for example, 9 mm×11 mm.
As shown in Part (a) of FIG. 3, the unit circuit regions 14b are arrayed two-dimensionally in J rows and K columns in the interior of the integrated circuit device 14. J and K are integers not less than 2. In each unit circuit region 14b, an input pad 14e is provided as shown in Part (b) of FIG. 3. On the input pad 14e, the bump electrode 14a shown in FIG. 1 is provided. Moreover, these unit circuit regions 14b are separated from each other, and between one unit circuit region 14b and other unit circuit regions 14b, a region where no circuit elements such as transistors and capacitors exist extends in the row direction and column direction. However, in this region, a metal wiring to connect circuit elements to each other may exist. A single unit circuit region 14b has dimensions of, for example, 0.5 mm in the row direction and 0.5 mm in the column direction, and the gap interval between the neighboring unit circuit regions 14b is, for example, 0.16 mm.
K circuit regions 14c are disposed corresponding to the columns of the unit circuit regions 14b. These circuit regions 14c are disposed aligned in the row direction, and their input ends are electrically connected with the unit circuit regions 14b of the corresponding columns, respectively.
In the front-stage amplifier as a readout circuit included in the unit circuit region 14b and the rear-stage amplifier as an amplifier circuit included in the circuit region 14c, switches are individually provided. Designation of a row to be read out can be performed by using the switch of the readout circuit of the unit circuit region 14b, and designation of a column to be read out can be performed by using the switch of the amplifier circuit of the circuit region 14c. 
Output ends of the K circuit regions 14c are electrically connected with an A/D converter 14d. The A/D converter 14d converts an analog signal output from each circuit region 14c to a digital signal. The digital signal output from the A/D converter 14d is output to the outside of the integrated circuit device 14 via one of the plurality of input/output pads 14f arrayed along an edge of the integrated circuit device 14. Other input/output pads 14f are used for power supply voltage input, input of a reference potential such as a ground potential, clock input, and the like.
FIG. 4 is an equivalent circuit showing a configuration example of the readout circuit included in each unit circuit region 14b. In this equivalent circuit, the readout circuit 140 consists of an integrator circuit, and includes an operational amplifier 141, a capacitor 142 as a feedback capacitance, and a reset switch 143. A non-inverting input terminal of the operational amplifier 141 is connected to a reference voltage Vref, and an inverting input terminal of the operational amplifier 141 is connected to an anode of one of the photodiodes 12b included in the two-dimensional photodiode array 12 shown in FIG. 1. A cathode of the photodiode 12b is connected to the reference voltage Vref, and a reverse bias is applied to the photodiode 12b. 
The capacitor 142 is connected between the inverting input terminal and output terminal of the operational amplifier 141. In the capacitor 142, a charge due to a photoelectric current output from the photodiode 12b is accumulated. The reset switch 143 is connected in parallel to the capacitor 142, and resets the charge accumulated in the capacitor 142. The reset switch 143 is suitably realized by, for example, a MOS transistor.
Referring again to FIG. 2, the connection substrate 13 will be described in detail. The connection substrate 13 of the present embodiment has a base material 130 formed by stacking a plurality of dielectric layers 130a to 130f. In FIG. 2, six dielectric layers 130a to 130f are shown. The dielectric layers 130a to 130f of the base material 130 are formed of, for example, a ceramic substrate made mainly from a ceramic material such as alumina. The thickness of each of the dielectric layers 130a to 130f is, for example, not less than 100 μm and not more than 200 μm.
Moreover, the connection substrate 13 has a plurality of through conductors 20. The through conductor 20 is provided penetrating through at least three dielectric layers 130c to 130f adjacent to each other out of the dielectric layers 130a to 130f. In one example, the through conductor 20 is provided penetrating through four dielectric layers 130c to 130f. Each of the plurality of through conductors 20 corresponds one-to-one to each of the plurality of photodiodes of the two-dimensional photodiode array 12, and serves as a part of a path for a photoelectric current output from the photodiode. The through conductor 20 is made of, for example, a metal material such as tungsten, and is formed by the metal material being implanted into a through-hole formed in the dielectric layers 130c to 130f In the present embodiment, the pitch of the neighboring through conductors 20 is equal to the pitch between the unit circuit regions 14b of the integrated circuit device 14, so that each through conductor 20 is located immediately above the corresponding unit circuit region 14b. The pitch of the neighboring through conductors 20 is, for example, 500 μm. Moreover, the diameter of the through conductors 20 is, for example, 100 μm.
Moreover, the connection substrate 13 has a plurality of radiation shielding film groups 21 to 23 provided at two or more interlayer parts in the at least three dielectric layers 130c to 130f. In FIG. 2, the plurality of radiation shielding film groups 21 to 23 are provided at three interlayer parts in four dielectric layers 130c to 130f. Specifically, the radiation shielding film group 21 is provided at an interlayer part between the dielectric layers 130c and 130d, the radiation shielding film group 22 is provided at an interlayer part between the dielectric layers 130d and 130e, and the radiation shielding film group 23 is provided at an interlayer part between the dielectric layers 130e and 130f. 
Each of the radiation shielding film groups 21 to 23 includes a plurality of metallic radiation shielding films corresponding to the number of through conductors 20. That is, the radiation shielding film group 21 includes the same number of radiation shielding films 21a as that of the through conductors 20, the radiation shielding film group 22 includes the same number of radiation shielding films 22a as that of the through conductors 20, and the radiation shielding film group 23 includes the same number of radiation shielding films 23a as that of the through conductors 20. These radiation shielding films 21a to 23a are formed integrally with their corresponding through conductors 20, and extended around said through conductors 20.
In the respective radiation shielding film groups 21 to 23, the radiation shielding films are separated from each other. That is, the plurality of radiation shielding films 21a are provided at intervals from each other in one interlayer part, the plurality of radiation shielding films 22a are provided at intervals from each other in another interlayer part, and the plurality of radiation shielding films 23a are provided at intervals from each other in still another interlayer part. Thereby, the through conductors 20 are electrically isolated.
The planar shape of the radiation shielding films 21a is, for example, a regular square of 400 μm square. Moreover, the interval of the neighboring radiation shielding films 21a is, for example, 100 μm, and the thickness of the radiation shielding films 21a is, for example, 10 μm. The shape and dimensions are the same as for the radiation shielding films 22a, 23a. As the constituent material of the radiation shielding films 21a to 23a, for example, tungsten is suitable. The radiation shielding films 21a to 23a can be easily formed by the same method as the method for forming so-called via lands at interlayer parts between the dielectric layers 130c to 130f. 
Moreover, the connection substrate 13 further has a plurality of interlayer wirings 24. The interlayer wiring 24 is a wiring caused by a difference between the electrode pitch of the two-dimensional photodiode array 12 and the pitch of the plurality of through conductors 20. The interlayer wiring 24 is provided, out of the interlayer parts in the plurality of dielectric layers 130a to 130f, at one or two or more interlayer parts located closer to the one substrate surface 13a relative to the dielectric layers 130c to 130f provided with the radiation shielding films 21a to 23a. In FIG. 2, the interlayer wiring 24 is provided at an interlayer part between the dielectric layer 130a and the dielectric layer 130b, and at an interlayer part between the dielectric layer 130b and the dielectric layer 130c. 
Here, description will be given of a relative positional relationship between the radiation shielding films 21a to 23a of the connection substrate 13 and the plurality of unit circuit regions 14b of the integrated circuit device 14. For this description, the concept of a virtual plane to project the radiation shielding films and unit circuit regions will be introduced. The virtual plane is defined as a plane normal to a predetermined direction, which is the incident direction of radiation R shown in FIG. 1. Alternatively, when said incident direction is substantially normal to the substrate surfaces 13a, 13b of the connection substrate 13, the virtual plane may be defined as a plane parallel to the substrate surface 13a or 13b. 
FIG. 5 is a view showing projection of the pluralities of radiation shielding films 21a to 23a of the connection substrate 13 and the plurality of unit circuit regions 14b of the integrated circuit device 14 onto a virtual plane VP. In FIG. 5, reference sign PR1 denotes first regions obtained by projecting the pluralities of radiation shielding films 21a to 23a onto the virtual plane VP. Reference sign PR2 denotes second regions obtained by projecting the plurality of unit circuit regions 14b onto the virtual plane VP. Reference sign PR3 denotes third regions obtained by projecting the plurality of through conductors 20 onto the virtual plane VP.
As shown in FIG. 5, each of the plurality of first regions PR1 obtained by projecting the pluralities of radiation shielding films 21a to 23a onto the virtual plane VP includes each of the plurality of second regions PR2 obtained by projecting the plurality of unit circuit regions 14b onto the virtual plane VP. In other words, when viewed from the incident direction of radiation R or a direction normal to the substrate surface 13a, the plurality of unit circuit regions 14b are completely covered with the plurality of radiation shielding films 21a. The same applies to the plurality of radiation shielding films 22a and the plurality of radiation shielding films 23a. 
That is, in the radiation detector module 10A of the present embodiment, each of the pluralities of radiation shielding films 21a to 23a formed inside the connection substrate 13 protects each corresponding unit circuit region 14b from radiation. Moreover, radiation R that has passed through the gaps between the pluralities of radiation shielding films 21a to 23a can reach the integrated circuit device 14, but no unit circuit regions 14b exist at that part of arrival, so that there is little influence from the radiation R.
Moreover, each of the plurality of radiation shielding films 21a is formed integrally with the corresponding through conductor 20. The same applies to the pluralities of radiation shielding films 22a and 23a. Thus, the radiation shielding films 21a to 23a formed integrally with the through conductors 20 do not obstruct arrangement of the through conductors 20, so that it is not necessary to form a complicated wiring such as to bypass a radiation shield as in, for example, the device described in Patent Document 1. Therefore, the current path and wiring length between the two-dimensional photodiode array 12 and the integrated circuit device 14 can be reduced, and noise to be superimposed on electrical signals such as a photoelectric current can be further reduced.
Thus, by the radiation detector module 10A of the present embodiment, the readout circuits of the integrated circuit device 14 can be protected from radiation with a simple configuration.
Moreover, in the radiation detector module 10A, because the plurality of unit circuit regions 14b of the integrated circuit device 14 are separated from each other, noise to be generated by electrical crosstalk between the plurality of unit circuit regions 14b can also be reduced.
Moreover, in the radiation detector module 10A, the first region PR1 for the radiation shielding film 21a, 21b, or 21c formed integrally with one through conductor 20 in one interlayer part and the first region PR1 for the radiation shielding film 21b, 21c, or 21a formed integrally with another through conductor 20 in another interlayer part may not overlap each other. In the virtual plane VP shown in FIG. 5, the plurality of first regions PR1 do not overlap each other, and projection regions relating to the radiation shielding films 21a to 23a are all first regions PR1 and coincident with each other, and thus the radiation shielding films 21a to 23a do not overlap each other as long as these correspond to different through conductors 20. Accordingly, the radiation shielding films 21a to 23a formed integrally with one through conductor 20 and the radiation shielding films 21a to 23a formed integrally with another through conductor 20 are not opposed to each other, so that a parasitic capacitance to be generated between the plurality of through conductors 20 can be reduced. Therefore, noise to be superimposed on electrical signals such as photoelectric currents output from the plurality of photodiodes of the two-dimensional photodiode array 12 can be reduced.
Also, in the present embodiment, as shown in FIG. 5, each of the plurality of third regions PR3 of projection of the plurality of through conductors 20 onto the virtual plane VP is included in each of the plurality of second regions PR2. In such a configuration, because the radiation shielding films 21a to 23a are extended around the corresponding through conductors 20, each of the radiation shielding films 21a to 23a can suitably protect each corresponding unit circuit region 14b from radiation.
FIG. 6 is a view showing a configuration of a radiation detector module 10B as a modification of the embodiment described above. In FIG. 6, similar to FIG. 2, the two-dimensional photodiode array 12, the connection substrate 13, and the integrated circuit device 14 are shown. Of these, the two-dimensional photodiode array 12 and the integrated circuit device 14 have the same configuration as that of the embodiment described above.
In the present modification, the internal configuration of the connection substrate 13 is different from that of the above-described embodiment. That is, the radiation shielding film groups 21 and 22 of the connection substrate 13 include radiation shielding films 21b and 22b in place of the radiation shielding films 21a and 22a of the above-described embodiment. The position and size of these radiation shielding films 21b and 22b are different from the position and size of the radiation shielding films 21a and 22a of the above-described embodiment.
FIG. 7 is a view showing projection of the pluralities of radiation shielding films 21b and 22b and the plurality of unit circuit regions 14b of the integrated circuit device 14 onto a virtual plane VP in the present modification. In FIG. 7, reference sign PR4 denotes regions obtained by projecting the radiation shielding films 21b onto the virtual plane VP. Reference sign PR5 denotes regions obtained by projecting the radiation shielding films 22b onto the virtual plane VP. Reference signs PR2 and PR3 are the same as those in the above-described embodiment.
As shown in FIG. 7, in the present modification, the region PR4 for the radiation shielding film 21b formed integrally with one through conductor 20 in one interlayer part and the region PR5 for the radiation shielding film 22b formed integrally with another through conductor 20 in another interlayer part overlap each other. In such a case, as shown in FIG. 6, the radiation shielding film 21b formed integrally with one through conductor 20 and the radiation shielding film 22b formed integrally with another through conductor 20 are opposed to each other. However, even in such a mode, each of the pluralities of radiation shielding films 21b, 22b, and 23a protects each corresponding unit circuit region 14b from radiation. Moreover, the radiation shielding films 21b, 22b, and 23a formed integrally with the through conductors 20 do not obstruct arrangement of the through conductors 20, so that it is not necessary to form a complicated wiring such as to bypass a radiation shield. Therefore, also in the radiation detector module 10B of the present modification, the readout circuits of the integrated circuit device 14 can be protected from radiation with a simple configuration.
The radiation detector module according to the present invention is not limited to the embodiment described above, and various other modifications can be made. For example, in the above-described embodiment, the radiation shielding films 21a to 23a are provided at the three interlayer parts in the four dielectric layers 130c to 130f, but radiation shielding films can provide the same effects as those in the above-described embodiment by being provided at two or more interlayer parts in at least three dielectric layers. Moreover, for example, in the above-described embodiment, an integrator circuit including an operational amplifier, a capacitor, and a MOS transistor has been exemplified as an example of a readout circuit, but even by a readout circuit having a configuration different from that of the exemplification, the same effects as those in the above-described embodiment can be suitably obtained.
INDUSTRIAL APPLICABILITY 
The present invention can be applied as a radiation detector module capable of protecting readout circuits of an integrated circuit device from radiation with a simple configuration.
REFERENCE SIGNS LIST
10A, 10B: radiation detector module, 11: scintillator, 12: two-dimensional photodiode array, 12a: bump electrode, 12b: photodiode, 13: connection substrate, 13a, 13b: substrate surface, 14: integrated circuit device, 14a: bump electrode, 14b: unit circuit region, 14c: circuit region, 14d: A/D converter, 14e: input pad, 14f: input/output pad, 15: flexible printed board, 16: heat sink, 20: through conductor, 21, 22, 23: radiation shielding film group, 21a, 21b, 22a, 22b, 23a: radiation shielding film, 24: interlayer wiring, 130: base material, 130a ̃130f: dielectric layer, 140: readout circuit, 141: operational amplifier, 142: capacitor, 143: reset switch.

## Claims

1. A radiation detector module comprising:
a scintillator for converting radiation made incident from a predetermined direction to light;
a photoelectric conversion device having a plurality of photoelectric conversion regions arrayed two-dimensionally, and for receiving light from the scintillator at the photoelectric conversion regions;
a connection substrate formed by stacking a plurality of dielectric layers, and mounted with the photoelectric conversion device on one substrate surface thereof; and
an integrated circuit device mounted on the other substrate surface of the connection substrate, and for individually reading out electrical signals output from each of the plurality of photoelectric conversion regions of the photoelectric conversion device,
the integrated circuit device having a plurality of unit circuit regions arrayed two-dimensionally and separated from each other, the plurality of unit circuit regions including a plurality of readout circuits corresponding to the plurality of photoelectric conversion regions, respectively,
the connection substrate having a plurality of metallic through conductors provided penetrating through at least three dielectric layers adjacent to each other out of the plurality of dielectric layers, and for serving as a part of paths for the electric signals, wherein
a plurality of metallic radiation shielding films are formed integrally with each of the plurality of through conductors and separated from each other, the radiation shielding films being provided at two or more interlayer parts in the at least three dielectric layers, and
each of a plurality of first regions of projection of the plurality of radiation shielding films onto a virtual plane normal to the predetermined direction includes each of a plurality of second regions of projection of the plurality of unit circuit regions onto the virtual plane.

2. The radiation detector module according to claim 1, wherein the first region for the radiation shielding film formed integrally with one through conductor in one interlayer part and the first region for the radiation shielding film formed integrally with another through conductor in another interlayer part do not overlap each other.

3. The radiation detector module according to claim 1, wherein each of a plurality of third regions of projection of the plurality of through conductors onto the virtual plane is included in each of the plurality of second regions, and
each radiation shielding film is extended around each corresponding through conductor.

4. The radiation detector module according to claim 1, wherein the readout circuit includes an operational amplifier, a capacitor, and a MOS transistor.

5. A radiation detector module comprising:
a scintillator for converting radiation to light;
a photoelectric conversion device having a plurality of photoelectric conversion regions arrayed two-dimensionally, and for receiving light from the scintillator at the photoelectric conversion regions;
a connection substrate formed by stacking a plurality of dielectric layers, and mounted with the photoelectric conversion device on one substrate surface thereof; and
an integrated circuit device mounted on the other substrate surface of the connection substrate, and for individually reading out electrical signals output from each of the plurality of photoelectric conversion regions of the photoelectric conversion device,
the integrated circuit device having a plurality of unit circuit regions arrayed two-dimensionally and separated from each other, the plurality of unit circuit regions including a plurality of readout circuits corresponding to the plurality of photoelectric conversion regions, respectively,
the connection substrate having a plurality of metallic through conductors provided penetrating through at least three dielectric layers adjacent to each other out of the plurality of dielectric layers, and for serving as a part of paths for the electric signals, wherein
a plurality of metallic radiation shielding films are formed integrally with each of the plurality of through conductors and separated from each other, the radiation shielding films being provided at two or more interlayer parts in the at least three dielectric layers, and
each of a plurality of first regions of projection of the plurality of radiation shielding films onto a virtual plane parallel to the one substrate surface includes each of a plurality of second regions of projection of the plurality of unit circuit regions onto the virtual plane.

6. The radiation detector module according to claim 5, wherein the first region for the radiation shielding film formed integrally with one through conductor in one interlayer part and the first region for the radiation shielding film formed integrally with another through conductor in another interlayer part do not overlap each other.

7. The radiation detector module according to claim 5, wherein each of a plurality of third regions of projection of the plurality of through conductors onto the virtual plane is included in each of the plurality of second regions, and
each radiation shielding film is extended around each corresponding through conductor.

8. The radiation detector module according to claim 5, wherein the readout circuit includes an operational amplifier, a capacitor, and a MOS transistor.