# Patent

## Title
Multi-hinge mirror assembly

## Abstract

A scanning device includes a substrate, which is etched to define a recess in the substrate and to define the following structures contained in the recess: At least first and second mirrors are disposed along a common axis of rotation. Torsion hinges extend collinearly along the axis of rotation and connect the first and second mirrors to the substrate so that the first and second mirrors rotate on the torsion hinges about the axis of rotation. Rigid struts are disposed alongside the axis of rotation and connect the first mirror to the second mirror so that the struts rotate about the axis of rotation together with the first and second mirrors.

## Background
CROSS-REFERENCE TO RELATED APPLICATION
This application claims the benefit of U.S. Provisional Patent Application 62/234,688, filed Sep. 30, 2015, which is incorporated herein by reference.


FIELD OF THE INVENTION
The present invention relates generally to micro-mechanical systems, and particularly to optical scanning using such systems.
BACKGROUND
Microelectromechanical system (MEMS) technologies have been used to produce various sorts of scanning devices, and particularly miniature scanning mirrors. For example, U.S. Pat. No. 7,952,781, whose disclosure is incorporated herein by reference, describes a method of scanning a light beam and a method of manufacturing a microelectromechanical system (MEMS), which can be incorporated in a scanning device. Other methods for fabrication of MEMS scanning devices are described in PCT International Publication WO 2014/064606, whose disclosure is incorporated herein by reference, as well.
MEMS technologies have also been used to produce arrays of scanning mirrors. For example, the Lamda scanner module, produced by the Fraunhofer Institute for Photonic Microsystems IPMS (Dresden, Germany), is constructed based on a segmented MEMS scanner device consisting of identical scanning mirror elements. A single scanning mirror of the collimated transmit beam oscillates parallel to a segmented scanning mirror device of the receiver optics.
As another example, PCT International Publication WO 2013/140307, whose disclosure is incorporated herein by reference, describes a gimbaled scanning mirror array. As described in this publication, a scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.
In a similar vein, Yang et al. describe a multi-mirror MEMS device in “Phase Synchronization of Micro-Mirror Arrays Using Elastic Linkages,” Sensors and Actuators A95 (2001), pages 55-60. This device is intended to replace a conventional large-area mirror, thus increasing the working frequency and inducing smaller vibration amplitude.
SUMMARY
Embodiments of the present invention that are described hereinbelow provide improved multi-element synchronized scanners.
There is therefore provided, in accordance with an embodiment of the invention, a scanning device, including a substrate, which is etched to define a recess in the substrate and to define the following structures contained in the recess: At least first and second mirrors are disposed along a common axis of rotation. First and second torsion hinges extend along the axis of rotation and connect the first mirror to the substrate on opposing sides of the first mirror so that the first mirror rotates on the first and second torsion hinges about the axis of rotation. Third and fourth torsion hinges extend along the axis of rotation collinearly with the first and second hinges and connect the second mirror to the substrate on opposing sides of the second mirror so that the second mirror rotates on the third and fourth torsion hinges about the axis of rotation. Rigid struts are disposed alongside the axis of rotation and connect the first mirror to the second mirror so that the struts rotate about the axis of rotation together with the first and second mirrors.
In a disclosed embodiment, the structures include an anchor, which is fixed to the substrate at a location between the first and second mirrors, wherein the second and third torsion hinges connect the first and second mirrors, respectively, to the anchor.
Typically, the struts are sufficiently stiff to synchronize an angle of rotation of the first and second mirrors.
In a disclosed embodiment, the at least first and second mirrors include a third mirror, and the substrate is further etched to define fifth and sixth torsion hinges, which extend along the axis of rotation and connect the third mirror to the substrate on opposing sides of the third mirror, and further rigid struts, which are disposed alongside the axis of rotation and connect the third mirror to the second mirror, so that the third mirror and the further struts rotate about the axis of rotation together with the first and second mirrors.
In some embodiments, the substrate includes one or more semiconductor wafers. In one embodiment, the substrate includes at least first and second semiconductor wafers, which are bonded together, wherein the first and second semiconductor wafers are etched before bonding to define internal cavities within at least the first mirror. Typically, the mirrors have respective surface areas of at least 20 mm2 and respective thicknesses no greater than 0.5 mm.
There is also provided, in accordance with an embodiment of the invention, a method for producing a scanning device, which includes etching a substrate to define a recess in the substrate and to define the structures described above, contained in the recess.
The present invention will be more fully understood from the following detailed description of the embodiments thereof, taken together with the drawings in which:



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is schematic, pictorial illustration of a scanning multi-mirror array, in accordance with an embodiment of the invention;
FIG. 2 is a schematic detail view of the array of FIG. 1; and
FIG. 3 is a schematic sectional view of the array of FIG. 1.



DETAILED DESCRIPTION OF EMBODIMENTS
When large mirrors (for example, a centimeter or more on a side) are to be produced by MEMS processes, it becomes difficult to make the mirrors stiff enough to avoid internal vibrational modes. The internal vibrations lead to loss of optical quality and precision in the reflected beams.
Embodiments of the present invention addresses this problem by effectively breaking the large mirror into an array of multiple smaller mirrors, which are separately hinged but are coupled together by rigid struts in order to ensure precise synchronization. Surprisingly, the resulting combined mirror, with multiple sets of hinges and struts, has been found to eliminate the troublesome internal modes of vibration. The struts are “rigid” in the sense that they do not significantly deform as the mirrors rotate, and are thus sufficiently stiff to synchronize the angle of rotation of the mirrors to within a specified tolerance, for example, no more than 1° of angular difference between the mirrors.
In the disclosed embodiments, a scanning device is produced by etching a substrate to create a recess in the substrate and to define an array of mirrors and supporting structures, contained within the recess. The mirrors are disposed along a common axis of rotation, and rotate about the axis on respective pairs of torsion hinges, which connect the mirrors to the substrate. The hinges on at least one side of each of the mirrors typically connect to the substrate via an anchor within the recess, wherein the anchor is fixed to the substrate at a location between the mirrors.
The mirrors are connected to one another by rigid struts, which are disposed alongside the axis of rotation and thus rotate about the axis of rotation together with the mirrors. These struts maintain the desired angular synchronization between the mirrors, while the arrangement of hinges and struts inhibits the development of undesirable vibrational modes, including modes of longitudinal vibration. Another advantage of this sort of array, relative to a single large mirror of similar overall dimensions, is that the mirrors have lower inertia and thus require less drive power to maintain a given angular range and frequency.
Reference is now made to FIGS. 1-3, which schematically illustrate a scanning multi-mirror array 20, in accordance with an embodiment of the invention. FIG. 1 presents a pictorial overview of the array, while FIGS. 2 and 3 show details in sectional views, taken respectively along the lines II-II and III-III in FIG. 1.
Array 20 comprises a substrate 22, which comprises at least one semiconductor wafer, such as a silicon wafer, or in the present example, two such wafers 50 and 52, which are separately etched and then bonded together. For mechanical strength and stability, substrate 22 is mounted on a base 24, which may similarly comprise one or more semiconductor wafers, suitably etched and cut, or another suitable material, such as a rigid metal or plastic piece. Although base 24 is shown in the figures as a solid sheet, the base may alternatively be open in the center and comprise only a peripheral frame with transverse supports where required.
Substrate 22 is etched to define mirrors 26, 28 and 30, which are contained in a central recess 32 in the substrate. Typically, a reflective coating, such as a suitable metal layer, is deposited over the semiconductor material in the area of the mirrors. Depending on application requirements, each of mirrors 26, 28 and 30 may have dimensions (such as length and width, or diameter) of 5 mm or more, meaning that each mirror has a surface area of at least 20 mm2. In the pictured embodiment, array 20 thus has an overall length of about 3 cm and a width of about 1 cm. Alternatively, the mirrors and array may be made to larger or smaller dimensions. Assuming substrate 22 to be made from two bonded wafers 50 and 52, the thicknesses of the substrate and of mirrors 26, 28 and 30 are typically no greater than 0.5 mm, and may be only a few hundred microns.
Mirrors 26, 28, 30 are suspended on torsion hinges 34, which extend collinearly along an axis 35 of rotation and connect the mirrors to substrate 22 by means of anchors 36, 38 located on opposing sides of the mirrors. Hinges 34 are etched from substrate 22 but are made sufficiently thin and flexible to twist without breaking as mirrors 26, 28 and 30 rotate on their respective hinges about axis 35. For example, hinges 34 are typically in the range of 0.4 mm to 3 mm long and have cross sectional dimensions between 0.1 and 0.9 mm. Anchors 36 are etched from substrate 22 within recess 32 between mirrors 26 and 28 and between mirrors 28 and 30. In the pictured embodiment, anchors 36 are fixed to substrate 22 indirectly, via base 24, although the anchors may alternatively be fixed directly to the surrounding substrate.
Rigid struts 40, typically with dimensions in the range of 0.1 mm to 2 mm, for example, are disposed on either side of axis 35 and connect each mirror 26, 28, 30 to the neighboring mirror or mirrors. Thus, as the mirrors rotate about axis 35, struts 40 rotate with the mirrors and maintain angular synchronization between all of the mirrors in the array.
As can be seen in FIG. 2, before bonding wafers 54 and 56 together into substrate 22, the wafers are etched to define internal cavities 58. After bonding, cavities 58 are contained within at least mirror 26, and typically within mirrors 28 and 30, as well. This mode of construction of the mirrors is useful in reducing their mass, and hence reduces the moments of inertia of the mirrors and the energy required to drive their rotation.
As shown in FIGS. 2 and 3, base 24 is etched or otherwise molded or machined to create a cavity 60, within which mirrors 26, 28 and 30 rotate. In the pictured example, cavity 60 is shallow, and the angular range of rotation of the mirrors is accordingly small. When a larger range of rotation is needed, cavity 60 may be made deeper or even opened entirely at the bottom, so that at least the edges of the mirrors can protrude through the plane of the base as they rotate.
Any suitable means that are known in the art may be applied to drive the rotation of mirrors 26, 28, 30, and the driving means are therefore omitted from the figures for the sake of simplicity. In some embodiments, magnetic rotors are coupled to the mirrors and driven by an electromagnetic drive, such as a drive of the type described in the above-mentioned U.S. Pat. No. 7,952,781 or in PCT international Publication WO 2014/016794, whose disclosure is incorporated herein by reference. In other embodiments, mirrors 26, 28, 30 are driven by electrostatic or piezoelectric drives, for example. All such alternative embodiments are considered to be within the scope of the present invention.
Although array 20 comprises three mirrors of particular shapes and sizes, the principles of the present invention may be applied in producing synchronized arrays comprising only two mirrors or comprising three, four, or more mirrors, having the same or different sizes and shapes. Furthermore, these principles are applicable not only to scanning mirror arrays, but also to other sorts of moving components that are required to rotate in mutual synchronization, such as MEMS-based inertial sensors.
It will thus be appreciated that the embodiments described above are cited by way of example, and that the present invention is not limited to what has been particularly shown and described hereinabove. Rather, the scope of the present invention includes both combinations and subcombinations of the various features described hereinabove, as well as variations and modifications thereof which would occur to persons skilled in the art upon reading the foregoing description and which are not disclosed in the prior art.

## Claims

1. A scanning device, comprising a substrate, which is etched to define a recess in the substrate and to define the following structures contained in the recess:
at least first and second mirrors, which are disposed along a common axis of rotation;
first and second torsion hinges, which extend along the axis of rotation and connect the first mirror to the substrate on opposing sides of the first mirror so that the first mirror rotates on the first and second torsion hinges about the axis of rotation;
third and fourth torsion hinges, which extend along the axis of rotation collinearly with the first and second hinges and connect the second mirror to the substrate on opposing sides of the second mirror so that the second mirror rotates on the third and fourth torsion hinges about the axis of rotation; and
rigid struts, which are disposed alongside the axis of rotation and connect the first mirror to the second mirror so that the struts rotate about the axis of rotation together with the first and second mirrors.

2. The device according to claim 1, wherein the structures comprise an anchor, which is fixed to the substrate at a location between the first and second mirrors, wherein the second and third torsion hinges connect the first and second mirrors, respectively, to the anchor.

3. The device according to claim 1, wherein the struts are sufficiently stiff to synchronize an angle of rotation of the first and second mirrors.

4. The device according to claim 1, wherein the at least first and second mirrors comprise a third mirror, and wherein the substrate is further etched to define:
fifth and sixth torsion hinges, which extend along the axis of rotation and connect the third mirror to the substrate on opposing sides of the third mirror; and
further rigid struts, which are disposed alongside the axis of rotation and connect the third mirror to the second mirror, so that the third mirror and the further struts rotate about the axis of rotation together with the first and second mirrors.

5. The device according to claim 1, wherein the substrate comprises one or more semiconductor wafers.

6. The device according to claim 5, wherein the substrate comprises at least first and second semiconductor wafers, which are bonded together, wherein the first and second semiconductor wafers are etched before bonding to define internal cavities within at least the first mirror.

7. The device according to claim 5, wherein the mirrors have respective surface areas of at least 20 mm2 and respective thicknesses no greater than 0.5 mm.

8. A method for producing a scanning device, comprising etching a substrate to define a recess in the substrate and to define the following structures contained in the recess:
at least first and second mirrors, which are disposed along a common axis of rotation;
first and second torsion hinges, which extend along the axis of rotation and connect the first mirror to the substrate on opposing sides of the first mirror so that the first mirror rotates on the first and second torsion hinges about the axis of rotation;
third and fourth torsion hinges, which extend along the axis of rotation collinearly with the first and second hinges and connect the second mirror to the substrate on opposing sides of the second mirror so that the second mirror rotates on the third and fourth torsion hinges about the axis of rotation; and
rigid struts, which are disposed alongside the axis of rotation and connect the first mirror to the second mirror so that the struts rotate about the axis of rotation together with the first and second mirrors.

9. The method according to claim 8, wherein etching the substrate comprises fixing an anchor to the substrate at a location between the first and second mirrors, wherein the second and third torsion hinges connect the first and second mirrors, respectively, to the anchor.

10. The method according to claim 8, wherein the struts are sufficiently stiff to synchronize an angle of rotation of the first and second mirrors.

11. The method according to claim 8, wherein the at least first and second mirrors comprise a third mirror, and wherein etching the substrate comprises defining:
fifth and sixth torsion hinges, which extend along the axis of rotation and connect the third mirror to the substrate on opposing sides of the third mirror; and
further rigid struts, which are disposed alongside the axis of rotation and connect the third mirror to the second mirror, so that the third mirror and the further struts rotate about the axis of rotation together with the first and second mirrors.

12. The method according to claim 8, wherein the substrate comprises one or more semiconductor wafers.

13. The method according to claim 12, and comprising bonding together at least first and second semiconductor wafers to produce the substrate, wherein the first and second semiconductor wafers are etched before bonding to define internal cavities within at least the first mirror.

14. The method according to claim 12, wherein the mirrors have respective surface areas of at least 20 mm2 and respective thicknesses no greater than 0.5 mm.