# Patent

## Title
Semiconductor structure and manufacturing method thereof

## Abstract

A semiconductor structure comprising a first layer, a metal layer and a second layer is disclosed. The first layer comprises a recessed surface. The metal layer is above a portion of the recessed surface. The second layer is above the metal layer and confined by the recessed surface. The second layer comprises a top surface, a first lateral side and a second lateral side. The etch rate of an etchant with respect to the metal layer is greater than the etch rate of the etchant with respect to the second layer. The thickness of the second layer in the middle of the second layer is less than the thickness of the second layer at the first lateral side or the second lateral side. A method of forming a semiconductor structure is disclosed.

## Background
FIELD
This disclosure relates to semiconductor structures and related manufacturing methods.
BACKGROUND
The semiconductor integrated circuit (IC) industry has experienced rapid growth. In the course of IC evolution, functional density (i.e., the number of interconnected devices per chip area) has generally increased while geometric size (i.e., the smallest component (or line) that can be created using a fabrication process) has decreased. This down-scaling process generally provides benefits by increasing production efficiency and lowering associated costs. Such down-scaling has also increased the complexity of processing and manufacturing ICs and, in order to realize these advances, corresponding developments in IC processing and manufacturing are needed. As the dimensions of transistors decrease, the thickness of the gate oxide must be reduced to maintain performance with the decreased gate length. High dielectric constant (high-k) gate insulator layers may be used to reach larger physical thickness while keeping the same effective capacitance provided by other gate insulator layers, such as typical gate oxides.
As technology progresses, in some IC designs, there has been a desire to replace typical poly-silicon gate electrodes with metal gate (MG) electrodes so as to improve device performance. One process of forming the MG electrode is termed “gate last” process, as opposed to another MG electrode formation process termed “gate first.” The “gate last” process allows for a reduced number of subsequent processes, including high temperature processing, that must be performed after the formation of gates.
Additionally, it is important to reduce the number of malfunctioning devices per manufactured wafer in order to improve yields.



BRIEF DESCRIPTION OF THE DRAWINGS
Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
FIG. 1 is a schematic cross-sectional view of a semiconductor structure comprising a gate structure in accordance with some embodiments of the present disclosure.
FIG. 2A is a schematic cross-sectional view of the gate structure of the semiconductor structure illustrated in FIG. 1 in accordance with some embodiments of the present disclosure.
FIG. 2B is a schematic cross-sectional view of another gate structure of the semiconductor structure in accordance with some embodiments of the present disclosure.
FIGS. 3A-3I are schematic cross-sectional views of a semiconductor structure comprising a gate structure at various stages of fabrication in accordance with some embodiments of the present disclosure.



DETAILED DESCRIPTION
In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure. However, it will be understood by those skilled in the art that the present disclosure may be practiced without these specific details. In other instances, well-known methods, procedures, components and circuits are not described in detail so as not to obscure the present disclosure.
Further, the present disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
Further, spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
The making and using of the embodiments of the present disclosure are discussed in detail below. It should be appreciated, however, that the provided subject matter provides many applicable inventive concepts that may be embodied in a wide variety of specific contexts. The specific embodiments discussed herein are merely illustrative and do not limit the scope of the provided subject matter.
FIG. 1 illustrates the cross-sectional view of a semiconductor structure 1 in accordance with some embodiments of the present disclosure. The semiconductor structure 1 comprises a semiconductor layer 10, which comprises a surface 10a. The semiconductor structure 1 may comprise one or more isolation regions 101 and one or more source/drain regions 102. The semiconductor structure 1 may comprise other parts on or above the surface 10a of the semiconductor layer 10, such as interlayer dielectric (ILD) layers 12, 13 and an etch stop layer (ESL) 11. In some embodiments, the ILD layer 13 may be in contact with at least a portion of the ILD layer 12. The semiconductor structure 1 may also comprise a gate structure 14, which may comprise, among others, a gate dielectric layer 141, a spacer 142, an intermediate layer 143, a metal layer 144 and a protection layer 145. At least one contact 16 may be formed above the source/drain region 102. In some embodiments, the contact 16 electrically connects the source/drain region 102 to circuit elements external to the semiconductor structure 1.
The semiconductor layer 10 may comprise a crystalline silicon substrate (e.g., wafer) in accordance with some embodiments of the present disclosure. The semiconductor layer 10 may comprise various doped regions depending on design requirements (e.g., p-type substrate or n-type substrate). In some embodiments, the doped regions may be doped with p-type or n-type dopants. For example, the doped regions may be doped with p-type dopants, such as boron or BF2; n-type dopants, such as phosphorus or arsenic; and/or any suitable combinations thereof. The doped regions may be configured for an n-type FinFET or planar MOSFET, or alternatively configured for a p-type FinFET or planar MOSFET. Various other layers may be formed on the semiconductor layer 10, such as dielectric layers, doped layers, poly-silicon layers and/or conductive layers. Various devices may also be formed on the semiconductor layer 10, such as transistors, resistors, and/or capacitors. These devices may be interconnected through an interconnect layer to other circuit elements that may be part of one or more integrated circuits.
As illustrated in FIG. 1, one or more isolation regions 101 may be formed in the semiconductor layer 10 in order to define and electrically isolate various parts of the semiconductor structure 1. In some embodiments, the isolation regions 101 may be shallow trench isolation (STI) regions. The isolation regions may comprise silicon oxide, silicon nitride, silicon oxynitride, fluoride-doped silicate glass (FSG), a low-K dielectric material, and/or any suitable combinations thereof. The isolation regions 101 (or the STI regions, as the case may be in some embodiments) may be formed by any suitable processes. In one embodiment, the formation of the isolation regions 101 may include filling trenches in the semiconductor structure 1 (for example, by a chemical vapor deposition (CVD) process) with a dielectric material. In some embodiments, the filled trench may have a multi-layer structure such as a thermal oxide liner layer filled with silicon nitride or silicon oxide.
The source/drain region 102 may comprise a silicon-containing material, such as SiGe, SiC, or SiP. In some embodiments, the source/drain region 102 may be formed by doping the semiconductor structure 1 with desired amounts of any suitable dopants. In some embodiments, the source/drain region 102 may be formed by epitaxy. Although the source/drain region 102 as illustrated in FIG. 1 is under the surface 10a of the semiconductor structure 1, a portion of the source/drain region 102 may be above the surface 10a in accordance with some embodiments of the present disclosure. In some embodiments, the amount of doping in the source/drain region 102 may be uniform. In some embodiments, the amount of doping in the source/drain region 102 may be different in different parts of the source/drain region 102; for example, a portion of the source/drain region 102 may be a lightly doped source/drain (LDD) region. In some embodiments, the edge of the source/drain region 102 may be aligned with the edge of the spacer 142. In some embodiments, the edge of the source/drain region 102 may not be aligned with the edge of the spacer 142. Similarly, the edge of the source/drain region 102 may or may not be aligned with the edge of the gate dielectric layer 141 in different embodiments of the present disclosure. A channel region may be formed between the source/drain regions 102 under the gate structure 14 of the semiconductor structure 1.
The ESL 11 may be formed over the semiconductor structure 1, as illustrated in FIG. 1. The ESL 11 may be formed by any suitable process, such as film deposition. In some embodiments, the ESL 11 may comprise silicon nitride, silicon oxynitride, other suitable materials, and/or combinations thereof. In some embodiments, the ESL 11 may be a contact etch stop layer (CESL) comprising silicon nitride.
The ILD layer 12 may be above a portion of the ESL 11. Another ILD layer 13 may be formed above some other portions of the ESL 11, the ILD layer 12 and/or the gate structure 14, as illustrated in FIG. 1. In some embodiments, a portion of the ILD layer 13 is in contact with the ESL 11, the ILD layer 12, the spacer 142, the intermediate layer 143 and/or the protection layer 145. The ILD layers 12, 13 may comprise a dielectric material. The dielectric material may comprise silicon oxide, silicon nitride, silicon oxynitride, spin-on glass (SOG), fluorinated silica glass (FSG), carbon doped silicon oxide (e.g., SiCOH), BLACK DIAMOND® (Applied Materials of Santa Clara, Calif.), XEROGEL®, AEROGEL®, amorphous fluorinated carbon, Parylene, BCB (bis-benzocyclobutenes), FLARE®, SILK® (Dow Chemical, Midland, Mich.), polyimide, other proper porous polymeric materials, other suitable dielectric materials, and/or combinations thereof. In some embodiments, the ILD layers 12, 13 may include a high density plasma (HDP) dielectric material (e.g., HDP oxide) and/or a high aspect ratio process (HARP) dielectric material (e.g., HARP oxide). The ILD layers 12, 13 may comprise any suitable thickness. In some embodiments, the ILD layers 12, 13 may each comprise a thickness of about 10 Å to 100 Å. The ILD layer 13 may comprise one or more dielectric materials and/or one or more dielectric layers.
At least one contact 16 may exist in the semiconductor structure 1 so as to electrically connect the source/drain region 102 to circuit elements external to the semiconductor structure 1. In some embodiments, the contact 16 may be in contact with a portion of the ESL 11, the ILD layer 12 and/or the ILD layer 13. The contact 16 may comprise suitable materials, such as metals, metal compounds, metal alloys and/or other electrically conductive materials. In some embodiments, the contact 16 may comprise one or more materials and/or one or more layers. The contact 16 may be formed by any suitable processes, including but not limited to chemical vapor deposition (CVD), physical vapor deposition (PVD) and atomic layer deposition (ALD).
Still referring to FIG. 1, the gate structure 14 of the semiconductor structure 1 may comprise, among others, a gate dielectric layer 141, a spacer 142, an intermediate layer 143, a metal layer 144 and a protection layer 145. The location of the gate structure 14 may be at least partially defined by the locations of other parts of the semiconductor structure 1, such as the locations of the ESL 11 and the ILD layer 12.
Although the gate dielectric layer 141 is illustrated in FIG. 1, the gate dielectric layer 141 may be optional in accordance with some embodiments of the present disclosure. In some embodiments, the gate dielectric layer 141 may comprise silicon oxide, silicon oxynitride, a high-k dielectric layer and/or combinations thereof. The gate dielectric layer 141 may further comprise an interfacial layer to reduce damages between the gate dielectric layer 141 and the semiconductor layer 10. The interfacial layer may comprise silicon oxide. The gate dielectric layer 141 may be formed by any suitable process.
The gate structure 14 may additionally comprise one or more spacers 142. In some embodiments, the spacers 142 may surround at least a portion of the gate dielectric layer 141. The spacers 142 may be formed using any suitable process to any suitable thickness, including the processes described herein. The spacers 142 may comprise a dielectric material such as silicon nitride, silicon oxide, silicon carbide, silicon oxynitride, other suitable materials, and/or combinations thereof. In some embodiments, the spacers 142 may comprise a multilayer structure. The spacers 142 may help define the location of the gate structure 14 in the semiconductor structure 1. In some embodiments of the present disclosure, the top surface 142a of the spacer 142 may be substantially coplanar with the top surface of the ESL 11 and/or the ILD layer 12. In some embodiments, the top surface 142a of the spacer 142 may be in contact with a portion of the ILD layer 13.
Still referring to FIG. 1, an intermediate layer 143 may be formed above the semiconductor layer 10 and/or the gate dielectric layer 141. In some embodiments, the intermediate layer 143 may be in contact with the gate dielectric layer 141 and/or the spacers 142. In some embodiments, the top surface of the intermediate layer 143 may be substantially coplanar with the top surface of the ESL 11, the ILD layer 12 and/or the spacer 142. The intermediate layer 143 comprises a surface 143a. In some embodiments, the surface 143a may be recessed. In some embodiments, the top surface of the intermediate layer 143 may be in contact with a portion of the ILD layer 13.
In some embodiments of the present disclosure, the intermediate layer 143 may comprise one or more materials and/or one or more layers. For example, the intermediate layer 143 may comprise a dielectric layer, a high-K dielectric layer, a barrier layer, and/or a work function layer. The dielectric layer may comprise silicon oxide, silicon nitride, silicon oxynitride, polyimide, other suitable dielectric materials, and/or combinations thereof. The high-k dielectric layer may comprise hafnium oxide (HfO2), hafnium silicon oxide (HfSiO), hafnium silicon oxynitride (HfSiON), hafnium tantalum oxide (HfTaO), hafnium titanium oxide (HfTiO), hafnium zirconium oxide (HfZrO), metal oxides, metal nitrides, metal silicates, transition metal-oxides, transition metal-nitrides, transition metal-silicates, oxynitrides of metals, metal aluminates, zirconium silicate, zirconium aluminate, silicon nitride, silicon oxynitride, zirconium oxide, titanium oxide, aluminum oxide, hafnium dioxide-alumina (HfO2—Al2O3) alloy, other suitable high-k dielectric materials, and/or combinations thereof. In some embodiments, the barrier layer may comprise TiN, TiCN, TaN, TaCN, WN and/or WCN. In some embodiments, the work function layer may comprise metal carbonitride, metal silicon nitride, metal aluminide, TiSiN, TiAlN, TiAl, TaAl, other suitable materials, and/or combinations thereof. The dielectric layer, the high-K dielectric layer, the barrier layer, and/or the work function layer may be formed by suitable processes, comprising at least ALD, PVD, CVD and plasma-enhanced chemical vapor deposition (PECVD).
Still referring to FIG. 1, a metal layer 144 may be above a portion of the recessed surface 143a of the intermediate layer 143. In some embodiments of the present disclosure, at least a portion of the metal layer 144 is surrounded by the intermediate layer 143. The metal layer 144 may comprise a top surface 144a. The metal layer 144 may comprise single metals, such as Al, W, WN, TaN, and Ru; metal compounds, such as TaN, TiN, W, WN, and WCN; other suitable materials; and/or combinations thereof. In some embodiments, the metal layer 144 may comprise one or more layers. The metal layer 144 may be formed by any suitable processes, including but not limited to CVD and PVD.
Still referring to FIG. 1, a protection layer 145 may be above at least a portion of the metal layer 144. In some embodiments of the present disclosure, at least a portion of the protection layer 145 is surrounded by the intermediate layer 143. In some embodiments, the protection layer 145 comprises a top surface 145a that may be substantially coplanar with the top surface of the ESL 11 and/or the ILD layer 12. In some embodiments, a portion of the top surface 145a of the protection layer 145 may be higher or lower than the top surface of the ESL 11 and/or the ILD layer 12. In some embodiments, the top surface 145a of the protection layer 145 may be substantially coplanar with the top surface 142a of the spacer 142 and/or the top surface of the intermediate layer 143. In some embodiments, the top surface 145a of the protection layer 145 may be higher or lower than the top surface 142a of the spacer 142 and/or the top surface of the intermediate layer 143. The protection layer 145 may comprise metal oxides such as AlxOy, WxOy, other suitable materials and/or combinations thereof. In some embodiments, the protection layer 145 is an oxide compound of the material of the metal layer 144.
In some embodiments, the protection layer 145 may have an etch rate that is different from the etch rate of the metal layer 144 with respect to a particular etchant used in various processes. In some embodiments of the present disclosure, the etchant may include abrasive, surfactant, organic KOH, NH4OH, or other etchants with suitable selectivity between the protection layer 145 and the metal layer 144. With respect to a given etchant, the etch rate of the protection layer 145 is lower than the etch rate of the metal layer 144. In some embodiments of the present disclosure, the ratio of the etch rate of the protection layer 145 to the etch rate of the metal layer 144 with respect to the given etchant may be in a range of from about 1/10 to about 1/100.
FIG. 2A illustrates an enlarged cross-sectional view of a gate structure 14 of a semiconductor structure 1 in accordance with some embodiments of the present disclosure. The gate structure 14 may comprise a gate dielectric layer 141, a spacer 142, an intermediate layer 143, a metal layer 144 and a protection layer 145. The intermediate layer 143 comprises a surface 143a that may be recessed. The protection layer 145 may comprise a top surface 145a, a lateral side 1451, a lateral side 1452 and a middle part 1453.
Different parts of the protection layer 145 may have different thicknesses. In some embodiments of the present disclosure, the protection layer 145 has a thickness of D1 at the lateral side 1451, a thickness of D2 at the lateral side 1452, and a thickness of DM1 at the middle part 1453. In some embodiments, D1 may be greater than DM1. In some embodiments, D2 may be greater than DM1. In some embodiments, both D1 and D2 may be greater than DM1. In some embodiments, D1 may be greater than or less than D2. The amount by which D1 is greater than DM1 may be variable. In some embodiments, D1 may be greater than DM1 by a range of from about 10% to about 500%. The amount by which D2 is greater than DM1 may also be variable. In some embodiments, D2 may be greater than DM1 by a range of from about 10% to about 500%. In some embodiments, D1 may be between 1 Å and 500 Å. In some embodiments, D2 may be between 1 Å and 500 Å. In some embodiments, DM1 may be between 1 Å and 100 Å.
FIG. 2B illustrates an enlarged cross-sectional view of a gate structure 14 of a semiconductor structure 1 in accordance with some embodiments of the present disclosure. The gate structure 14 may comprise a gate dielectric layer 141, a spacer 142, an intermediate layer 143, a metal layer 144 and a protection layer 145. The intermediate layer 143 comprises a surface 143a that may be recessed. The metal layer 144 may comprise a top surface 144a, a lateral side 1441, a lateral side 1442 and a middle part 1443.
Different parts of the metal layer 144 may have different thicknesses. In some embodiments of the present disclosure, the metal layer 144 has a thickness of D3 at the lateral side 1441, a thickness of D4 at the lateral side 1442, and a thickness of DM2 at the middle part 1443. In some embodiments, D3 may be less than DM2. In some embodiments, D4 may be less than DM2. In some embodiments, both D3 and D4 may be less than DM2. In some embodiments, D3 may be greater than or less than D4. The amount by which D3 is less than DM2 may be variable. In some embodiments, D3 may be less than DM2 by a range of from about 5% to about 90% of DM2. The amount by which D4 is less than DM2 may also be variable. In some embodiments, D4 may be less than DM2 by a range of from about 5% to about 90% of DM2. In some embodiments, D3 may be between 200 Å and 500 Å. In some embodiments, D4 may be between 200 Å and 500 Å. In some embodiments, DM2 may be between 201 Å and 1000 Å.
In some embodiments of the present disclosure, the metal layer 144 and the protection layer 145 may be separated by other layers that are not illustrated in the figures. In some embodiments, the metal layer 144 and the protection layer 145 may be in contact with each other as illustrated in FIGS. 2A and 2B, where a bottom surface of the protection layer 145 is in contact with a top surface 144a of the metal layer 144. In some embodiments in which the metal layer 144 is in contact with the protection layer 145, the sum of the thickness of the metal layer 144 at the lateral side 1441 and the thickness of the protection layer 145 at the lateral side 1451 may be substantially equal to the sum of the thickness of the metal layer 144 at the lateral side 1442 and the thickness of the protection layer 145 at the lateral side 1452. In some embodiments in which the metal layer 144 is in contact with the protection layer 145, the sum of the thickness of the metal layer 144 at the lateral side 1441 and the thickness of the protection layer 145 at the lateral side 1451 may be substantially equal to the sum of the thickness of the metal layer 144 at the middle part 1443 and the thickness of the protection layer 145 at the middle part 1453. In some embodiments in which the metal layer 144 is in contact with the protection layer 145, the sum of the thickness of the metal layer 144 at the lateral side 1442 and the thickness of the protection layer 145 at the lateral side 1452 may be substantially equal to the sum of the thickness of the metal layer 144 at the middle part 1443 and the thickness of the protection layer 145 at the middle part 1453.
Since the protection layer 145 is thicker at the lateral side 1451 (D1) and/or the lateral side 1452 (D2) than at the middle part 1453 (DM1), a greater portion of the protection layer 145 at the lateral side 1451 and/or lateral side 1452 may be etched away without exposing the metal layer 144. Therefore, it is more likely that the protection layer 145 will protect the metal layer 144 and prevent the metal layer 144 from being undesirably etched away by etchants in the current and/or subsequent manufacturing process steps, thereby increasing the number of functional devices on a given semiconductor wafer and improving the production yield.
FIGS. 3A-3I are schematic cross-sectional views of a semiconductor structure comprising a gate structure at various stages of fabrication in accordance with some embodiments of the present disclosure.
Referring to FIG. 3A, a semiconductor layer 10 with a surface 10a, at least one isolation region 101 and at least one source/drain region 102 is provided. An etch stop layer (ESL) 11 and a spacer 142 may also be provided above the surface 10a. In some embodiments, a portion of the source/drain region 102 may be above the surface 10a. In some embodiments, an optional gate dielectric layer 141 may be provided on the surface 10a. A dummy gate 241 may be provided above the (optional) gate dielectric layer 141 and at least partially surrounded by the spacer 142. An interlayer dielectric (ILD) layer 12 may be formed above the ESL 11, the spacer 142 and/or the dummy gate 241. In some embodiments, the ILD layer 12 may be in contact with at least one of the ESL 11, the spacer 142 and the dummy gate 241.
The dummy gate 241 may comprise a single layer or multilayer structure in accordance with some embodiments of the present disclosure. The dummy gate 241 may comprise poly-silicon and/or other suitable materials. In some embodiments, the dummy gate 241 may be doped poly-silicon.
Referring to FIG. 3B, the ILD layer 12 is planarized to expose a surface of the dummy gate 241. The planarization of the ILD layer 12 may also expose a surface of the spacer 142. In some embodiments, the dummy gate 241 is at least partially surrounded by the spacer 142, the ESL 11 and the ILD layer 12 after the planarization of the ILD layer 12. In some embodiments, the ILD layer 12 is planarized in such a way that the top surface of the dummy gate 241 is substantially coplanar with the top surface of at least one of the spacer 142, a portion of the ESL 11 and a portion of the ILD layer 12. The planarization may be achieved by a chemical-mechanical-polishing (CMP) process and/or any other suitable processes.
Referring to FIG. 3C, after the planarization of the ILD layer 12, the dummy gate 241 is removed to form a recess 242. The dummy gate 241 may be removed by a wet etch process, a dry etch process, other suitable processes and/or combinations thereof. In an embodiment, the wet etch process for a dummy gate 241 that comprises poly-silicon includes exposure to a hydroxide containing solution (e.g., ammonium hydroxide and tetramethylammonium hydroxide), deionized water, and/or other suitable etchant solutions.
In some embodiments of the present disclosure, the etchant for the dummy gate 241 will either not etch or only slightly etches the gate dielectric layer 141, thereby preventing the region of the semiconductor layer 10 under the gate dielectric layer 141 from being undesirably etched. In some embodiments, the etch rate of the dummy gate 241 to the gate dielectric layer 141 may be 5:1, 10:1, 15:1, 20:1 or higher.
Referring to FIG. 3D, after the dummy gate 241 is removed, an intermediate layer 143 may be formed above at least a portion of the gate dielectric layer 141. The intermediate layer 143 may have a surface 143a that is recessed. In some embodiments, the intermediate layer 143 partially fills the recess 242. In some embodiments, the intermediate layer 143 may cover at least a portion of the ESL 11, the ILD layer 12 and/or the spacer 142.
In some embodiments of the present disclosure, the intermediate layer 143 may comprise one or more materials and/or one or more layers. For example, the intermediate layer 143 may comprise a dielectric layer, a high-K dielectric layer, a barrier layer, and/or a work function layer. The dielectric layer may comprise silicon oxide, silicon nitride, silicon oxynitride, polyimide, other suitable dielectric materials, and/or combinations thereof. The high-k dielectric layer may comprise hafnium oxide (HfO2), hafnium silicon oxide (HfSiO), hafnium silicon oxynitride (HfSiON), hafnium tantalum oxide (HfTaO), hafnium titanium oxide (HfTiO), hafnium zirconium oxide (HfZrO), metal oxides, metal nitrides, metal silicates, transition metal-oxides, transition metal-nitrides, transition metal-silicates, oxynitrides of metals, metal aluminates, zirconium silicate, zirconium aluminate, silicon nitride, silicon oxynitride, zirconium oxide, titanium oxide, aluminum oxide, hafnium dioxide-alumina (HfO2—Al2O3) alloy, other suitable high-k dielectric materials, and/or combinations thereof. In some embodiments, the barrier layer may comprise TiN, TiCN, TaN, TaCN, WN and/or WCN. In some embodiments, the work function layer may comprise metal carbonitride, metal silicon nitride, metal aluminide, TiSiN, TiAlN, TiAl, TaAl, other suitable materials, and/or combinations thereof. The dielectric layer, the high-K dielectric layer, the barrier layer, and/or the work function layer may be formed by suitable processes, comprising at least ALD, PVD, CVD and PECVD.
The intermediate layer 143 may be formed by any suitable method or processes. In some embodiments, the intermediate layer 143 may be formed by deposition or thermal growth.
Referring to FIG. 3E, a metal layer 144 is formed after the formation of the intermediate layer 143 so that the recess 242 is filled. The metal layer 144 may comprise single metals, such as Al, W, WN, TaN, and Ru; metal compounds, such as TaN, TiN, W, WN, and WCN; other suitable materials; and/or combinations thereof. In some embodiments, the metal layer 144 may comprise one or more layers. The metal layer 144 may be formed by any suitable processes, including but not limited to CVD and PVD. In some embodiments, the metal layer 144 may cover at least a portion of the surface 143a of the intermediate layer 143. In some embodiments, the metal layer 144 may substantially fill the recess 242.
Referring to FIG. 3F, the metal layer 144 may be planarized to expose a surface of the ESL 11, the ILD layer 12, the spacer 142 and/or the intermediate layer 143. In some embodiments, the top surface 144b of the metal layer 144 may be so planarized as to be substantially coplanar with the top surface of a portion of the ESL 11, the ILD layer 12, the spacer 142 and/or a portion of the intermediate layer 143. The planarization may be achieved by a CMP process and/or any other suitable processes.
Referring to FIG. 3G, a protection layer 145 may be formed after the formation of the metal layer 144. The protection layer 145 may be above the metal layer 144. In some embodiments of the present disclosure, the protection layer 145 may be formed in such a way that the protection layer 145 and the metal layer 144 come into contact. In some embodiments, the metal layer 144 may comprise a non-uniform thickness after the formation of the protection layer 145. In some embodiments, the top surface 145a of the protection layer 145 may be so formed as to be substantially coplanar with the top surface of a portion of the ESL 11, the ILD layer 12, the spacer 142 and/or a portion of the intermediate layer 143. After the formation of the protection layer 145, a gate structure 14 comprising the gate dielectric layer 141, the spacer 142, the intermediate layer 143, the metal layer 144 and the protection layer 145 is also formed. The gate structure 14 so formed may be similar to the gate structure 14 illustrated in FIG. 2A or 2B.
In some embodiments of the present disclosure, the protection layer 145 may be formed by subjecting the top surface 144b of the metal layer 144 to a treatment after the planarization of the metal layer 144. In some embodiments, the treatment may comprise causing a chemical reaction in at least a portion of the metal layer 144. In some embodiments, the treatment may comprise oxidizing at least a portion of the metal layer 144 and/or other suitable processes. In some embodiments, the treatment may comprise integrated metrology close-loop control (IMCLC).
In some embodiments of the present disclosure, the protection layer 145 may comprise metal oxides such as AlxOy, WxOy, other suitable materials and/or combinations thereof. In some embodiments, the rate at which the protection layer 145 is etched is different from the rate at which the metal layer 144 is etched. In some embodiments, the ratio of the etch rate of the protection layer 145 to the etch rate of the metal layer 144 with respect to a given etchant may be in a range of from about 1/10 to about 1/100.
Referring to FIG. 3H, an ILD layer 13 may be formed above the ESL 11, the ILD layer 12 and/or the gate structure 14. The ILD layer 13 may comprise any suitable materials and any suitable thickness. The ILD layer 13 may be formed by any suitable processes, including but not limited to CVD, PVD, ALD and PECVD. In some embodiments, the ILD layer 13 may comprise one or more dielectric materials and/or one or more dielectric layers.
Referring to FIG. 3I, after the formation of the ILD layer 13, at least one opening 15 may be formed so as to expose the source/drain region 102. The opening 15 may be formed by removing a portion of the ESL 11, the ILD layer 12 and/or the ILD layer 13. In some embodiments of the present disclosure, the opening 15 may be formed by etching. In some embodiments, etchants (including but not limited to acids) may be used to clean the opening 15 after the formation thereof.
After the formation of the opening 15, at least one contact 16 may be formed so as to arrive at the semiconductor structure 1 as illustrated in FIG. 1. The contact 16 may electrically connect the source/drain region 102 to circuit elements external to the semiconductor structure 1. The contact 16 may comprise any suitable materials as described herein and may be formed by any suitable processes as described herein. In some embodiments, the contact 16 may comprise one or more materials and/or one or more layers.
In some embodiments of the present disclosure, the semiconductor structure 1 may comprise a gate structure 14 as illustrated in FIG. 2A. The gate structure 14 may comprise the gate dielectric layer 141, the spacer 142, the intermediate layer 143, the metal layer 144 and the protection layer 145. The protection layer 145 may comprise a lateral side 1451, a lateral side 1452 and a middle part 1453. In some embodiments, the thickness of the protection layer 145 at the lateral side 1451 (D1) and/or the thickness of the protection layer 145 at the lateral side 1452 (D2) is greater than the thickness of the protection layer 145 at the middle part 1453.
Since the protection layer 145 of some embodiments of the present disclosure may have a greater thickness at the lateral side 1451 and/or the lateral side 1452 than at the middle part 1453, it is less likely that etchants will etch through the protection layer 145 and reach the metal layer 144, causing undesirable etching of the metal layer 144. In other words, the protection layer 145 of the semiconductor structure 1 of the present disclosure may provide better protection from the etchants to the metal layer 144, resulting in less malfunctioning devices and improved manufacturing yield.
In accordance with one embodiment of the present disclosure, a semiconductor structure comprises a first layer, a metal layer and a second layer. The first layer comprises a recessed surface. The metal layer is above a portion of the recessed surface. The second layer is above the metal layer and confined by the recessed surface. The second layer comprises a top surface, a first lateral side and a second lateral side. The etch rate of an etchant with respect to the metal layer is greater than the etch rate of the etchant with respect to the second layer. The thickness of the second layer in the middle of the second layer is less than the thickness of the second layer at the first lateral side or the second lateral side.
In accordance with another embodiment of the present disclosure, a semiconductor structure comprises a replacement gate structure, which comprises a metal layer, an etch-resistant layer and a dielectric layer. The metal layer comprises a first lateral side and a second lateral side. The etch-resistant layer is above the metal layer. The dielectric layer surrounds the metal layer and the etch-resistant layer. The etch rate of an etchant with respect to the etch-resistant layer is less than the etch rate of the etchant with respect to the metal layer. The thickness of the metal layer in the middle of the metal layer is greater than the thickness of the metal layer at the first lateral side or the second lateral side.
In accordance with another embodiment of the present disclosure, a method of forming a semiconductor structure comprises forming a first layer that comprises a recessed surface, forming a metal layer above a portion of the recessed surface, and forming a second layer that is above the metal layer and confined by the recessed surface. The metal layer comprises a top surface. The second layer comprises a first lateral side and a second lateral side. The etch rate of an etchant with respect to the metal layer is greater than the etch rate of the etchant with respect to the second layer, and the thickness of the second layer in the middle of the second layer is greater than the thickness of the second layer at the first lateral side or the second lateral side.
The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.

## Claims

1. A semiconductor structure, comprising:
a first layer comprising a recessed surface;
a metal layer above a portion of said recessed surface; and
a second layer above said metal layer and confined by said recessed surface, said second layer comprising a top surface, a first lateral side and a second lateral side,
wherein the etch rate of an etchant with respect to said metal layer is greater than the etch rate of said etchant with respect to said second layer, and the thickness of said second layer in the middle of said second layer is less than the thickness of said second layer at said first lateral side or said second lateral side,
wherein said metal layer has a same material across an entire range covered by the second layer with respect to a same etchant.

2. The semiconductor structure according to claim 1, wherein:
said metal layer comprises at least one of Al, W, WN, TaN, Ru, TiN and WCN.

3. The semiconductor structure according to claim 1, wherein:
said second layer comprises at least one of aluminum oxides and tungsten oxides.

4. The semiconductor structure according to claim 1, wherein:
the thickness of said second layer in the middle of said second layer is less than both the thickness of said second layer at said first lateral side and the thickness of said second layer at said second lateral side.

5. The semiconductor structure according to claim 4, wherein:
the thickness of said second layer at said first lateral side is greater than the thickness of said second layer at said second lateral side.

6. The semiconductor structure according to claim 5, wherein:
the ratio of the thickness of said second layer at said second lateral side to the thickness of said second layer in the middle of said second layer is more than 1.2.

7. The semiconductor structure according to claim 6, wherein:
the ratio of the thickness of said second layer at said second lateral side to the thickness of said second layer in the middle of said second layer is more than 4.

8. The semiconductor structure according to claim 5, wherein:
the thickness of said second layer at said first lateral side is between 1 Å and 500 Å.

9. The semiconductor structure according to claim 1, wherein:
said etchant comprises abrasive, surfactant, organic KOH, or NH4OH.

10. The semiconductor structure according to claim 1, wherein:
the ratio of the etch rate of said etchant with respect to said second layer to the etch rate of said etchant with respect to said metal layer is in a range of from about 1/10 to about 1/100.

11. The semiconductor structure according to claim 1, further comprising:
a spacer comprising a top surface and surrounding a portion of said metal layer and a portion of said second layer.

12. The semiconductor structure according to claim 11, wherein:
said top surface of said spacer is substantially coplanar with said top surface of said second layer.

13. The semiconductor structure according to claim 1, wherein:
said first layer comprises a high-K dielectric layer.

14. A semiconductor structure, comprising:
a semiconductor layer;
a replacement gate structure above said semiconductor layer, said replacement gate structure comprising:
a metal layer comprising a first lateral side and a second lateral side;
an etch-resistant layer above said metal layer, wherein the first lateral side and the second lateral side have a same material across an entire range covered by the etch-resistant layer with respect to a same etchant;
a dielectric layer surrounding said metal layer and said etch-resistant layer;
a spacer comprising a top surface and surrounding a portion of said metal layer and a portion of said etch-resistant layer, wherein said top surface of said spacer is substantially coplanar with said top surface of said etch-resistant layer;

an etch stop layer comprising a top surface, wherein said etch stop layer is above said semiconductor layer and adjacent said replacement gate structure, wherein said top surface of said etch stop layer is substantially coplanar with said top surface of said spacer;
wherein the etch rate of an etchant with respect to said etch-resistant layer is less than the etch rate of said etchant with respect to said metal layer;
wherein the thickness of said metal layer in the middle of said metal layer is greater than the thickness of said metal layer at said first lateral side or said second lateral side;
wherein said metal layer has an etch rate at the middle of said metal layer same as the etch rate of said metal layer at said first lateral side or said second lateral side with respect to the same etchant.

15. The semiconductor structure according to claim 14, wherein:
said metal layer comprises at least one of Al, W, WN, TaN, Ru, TiN and WCN.

16. The semiconductor structure according to claim 14, wherein:
the thickness of said metal layer in the middle of said metal layer is at least 5% greater than the larger of the thickness of said metal layer at said first lateral side and the thickness of said metal layer at said second lateral side.

17. The semiconductor structure according to claim 14, wherein:
the thickness of said metal layer in the middle of said metal layer is greater than the smaller of the thickness of said metal layer at said first lateral side and the thickness of said metal layer at said second lateral side by an amount in a range of from about 5% to about 90% of the thickness of said metal layer in the middle of said metal layer.

18. The semiconductor structure according to claim 14, wherein:
an upper surface of said metal layer is in contact with a bottom surface of said etch-resistant layer.

19. A method of forming a semiconductor structure, comprising:
forming a first layer, said first layer comprising a recessed surface;
forming a metal layer above a portion of said recessed surface, said metal layer comprising a top surface; and
forming a second layer above said metal layer and confined by said recessed surface, wherein said second layer comprises a first lateral side and a second lateral side,
wherein the etch rate of an etchant with respect to said metal layer is greater than the etch rate of said etchant with respect to said second layer, and the thickness of said second layer in the middle of said second layer is less than the thickness of said second layer at said first lateral side or said second lateral side,
wherein forming a second layer above said metal layer comprises treating said top surface of said metal layer, and
wherein treating said top surface of said metal layer comprises oxidizing at least a portion of said metal layer.