# Patent

## Title
Semiconductor processing reactor and components thereof

## Abstract

A reactor having a housing that encloses a gas delivery system operatively connected to a reaction chamber and an exhaust assembly. The gas delivery system includes a plurality of gas lines for providing at least one process gas to the reaction chamber. The gas delivery system further includes a mixer for receiving the at least one process gas. The mixer is operatively connected to a diffuser that is configured to diffuse process gases. The diffuser is attached directly to an upper surface of the reaction chamber, thereby forming a diffuser volume therebetween. The diffuser includes at least one distribution surface that is configured to provide a flow restriction to the process gases as they pass through the diffuser volume before being introduced into the reaction chamber.

## Background
CROSS-REFERENCE TO RELATED APPLICATIONS
The present application claims priority under 35 U.S.C. 119(e) to U.S. Provisional Patent Application No. 61/167,093, filed Apr. 6, 2009.


FIELD OF THE INVENTION
The present application relates generally to semiconductor processing equipment and specifically to an apparatus and system for delivering process gases to a substrate reaction chamber.
BACKGROUND OF THE INVENTION
Atomic layer deposition (“ALD”) is a well known process in the semiconductor industry for forming thin films of materials on substrates such as silicon wafers. ALD is a type of vapor deposition wherein a film is built up through deposition of multiple ultra-thin layers with the thickness of the film being determined by the number of layers deposited. In an ALD process, gaseous molecules of one or more compounds (precursors) of the material to be deposited are supplied to the substrate or wafer to form a thin film of that material on the substrate. In one pulse, a first precursor material is adsorbed largely intact in a self-limiting process on the substrate. The precursor material may be decomposed in a subsequent reactant pulse to form a single molecular layer of the desired material. Alternatively, the adsorbed precursor material may react with the reactant of a subsequent reactant pulse to form a single molecular layer of a compound. Thicker films are produced through repeated growth cycles until the target thickness is achieved.
In an ALD process, one or more substrates with at least one surface to be coated are introduced into the reactor or deposition chamber. The substrate is heated to a desired temperature above the condensation temperature but below the thermal decomposition temperature of the selected vapor phase reactants. One reactant is capable of reacting with the adsorbed species of a prior reactant to form a desired product on the substrate surface. The product can be in the form of a film, liner, or layer.
During an ALD process, the reactant pulses, all of which are typically in vapor or gaseous form, are pulsed sequentially into the reactor with removal steps between reactant pulses. For example, inert gas pulses are provided between the pulses of reactants. The inert gas purges the chamber of one reactant pulse before the next reactant pulse to avoid gas phase mixing or CVD type reactions. A characteristic feature of ALD is that each reactant is delivered to the substrate until a saturated surface condition is reached. The cycles are repeated to form an atomic layer of the desired thickness. To obtain a self-limiting growth, sufficient amount of each precursor is provided to saturate the substrate. As the growth rate is self-limiting, the rate of growth is proportional to the repetition rate of the reaction sequences rather than to the flux of reactant as in CVD.
Typical reaction chambers used for ALD processing include a top plate and a bottom plate with a slot formed through the top plate. The slot allows process gases to be introduced into the reaction chamber therethrough, and the slot is a substantially linear opening arranged perpendicular to the primary access of gas flow. However, because the process gases introduced into the reaction chamber through the slot typically have the same flow velocity along the entire width of the slot, as the process gases flow through the reaction chamber, the amount of time that it takes for the process gases to contact a leading edge of the wafer differs across the width of the reaction chamber. In other words, although the velocity of process gases being introduced into the reaction chamber via the slot is substantially constant across the width of the slot, the time that it takes for the gases introduced into the reaction chamber near the edges of the reaction chamber to contact the leading edge of the substrate is greater than the time it takes for the gases introduced into the reaction chamber near the centerline of the reaction chamber to contact the leading edge of the substrate, as illustrated in FIG. 1A. Hence, the leading edge of the substrate near the centerline of the reaction chamber is exposed to a greater amount of process gases before the lateral-most edges of the substrate closest to the side walls of the reaction chamber are exposed to process gases. This typically results in the leading edge of the substrate near the centerline of the reaction chamber having a greater deposition thickness than the lateral edges of the substrate over many ALD cycles because the concentration of precursor in the process gas decreases as the precursor adsorbs to the leading edge of the substrate nearer the centerline of the reaction chamber. The decrease in precursor concentration within the process gases flowing over the substrate from the leading to the trailing edge of the substrate—and a similar decrease in concentration from the longitudinal centerline relative to the side edges of the reaction chamber—results in non-uniform deposition on the substrate. Accordingly, the ideal residence time distribution of process gases introduced into the reaction chamber through a slot should be substantially the same across the entire width of the slot such that the time that it takes the process gases to travel from the slot to a corresponding location of the leading edge of the substrate is constant across the width of the reaction chamber.
The residence time distribution (“RTD”) is a contour of constant time (i.e., the time it takes for a fluid element to reach a fixed location is constant) should be optimized such that the shape of the RTD corresponds to the entire leading edge of the substrate, as shown in FIG. 1B. Thus, there is a wave of process gases having substantially the same concentration across the entire leading edge of the substrate, from the lateral edges to the front edge of the substrate near the centerline of the reaction chamber.
Therefore, a need exists for a gas delivery system that distributes process gases such that the distributed process gases are introduced into a reaction chamber resulting in a pre-determined RTD between the slot introducing the process gases into the reaction chamber and the leading edge of the substrate to produce a more uniform film deposition across the entire substrate being processed.
BRIEF SUMMARY OF THE INVENTION
In one aspect of the present invention, a gas delivery system for delivering at least one process gas to a reaction chamber is provided. The gas delivery system includes a diffuser that is in fluid communication with the reaction chamber. The diffuser is attached directly to an upper surface of the reaction chamber. A diffuser volume for distributing the process gas is defined between the diffuser and the upper surface of the reaction chamber.
In another aspect of the present invention, a diffuser for distributing at least one process gas prior to introduction of the process gas into a reaction chamber is provided. The diffuser includes an inlet portion having a channel formed therethrough for receiving the process gas. The diffuser further includes a distribution portion attached to the inlet portion. The distribution portion comprises a mounting surface, a first distribution surface, a second distribution surface, a third distribution surface, and a fourth distribution surface, wherein the first, second, third, and fourth distribution surfaces extend laterally between a first side surface and a second side surface. The first and second side surfaces extend between the first, second, third, and fourth distribution surfaces and the mounting surface.
In yet another aspect of the present invention, a reactor for processing a semiconductor substrate is provided. The reactor includes a diffuser. The diffuser has at least a first wetted surface. The reactor further includes a reaction chamber operatively connected to the diffuser. The reaction chamber is in fluid communication with the diffuser, and the reaction chamber has at least a second wetted surface. The reactor also includes a surface texturing on at least one of the first, second, or third wetted surfaces. The surface texturing has a surface roughness of between about 50-250 Ra.
Advantages of the present invention will become more apparent to those skilled in the art from the following description of the embodiments of the invention which have been shown and described by way of illustration. As will be realized, the invention is capable of other and different embodiments, and its details are capable of modification in various respects. Accordingly, the drawing(s) and description are to be regarded as illustrative in nature and not as restrictive.



BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS
FIG. 1A is a diagram of the residence time distribution of process gases through a reaction chamber commonly used in the art.
FIG. 1B is a diagram of a preferred residence time distribution of process gases through a reaction chamber.
FIG. 2 is a top perspective view of an embodiment of a gas distribution system, reaction chamber, and an exhaust system.
FIG. 3 is an exploded view of the gas distribution system, reaction chamber, and exhaust system shown in FIG. 2.
FIG. 4 is a cross-sectional view of the gas distribution system, reaction chamber, and exhaust system shown in FIG. 2 taken along line 4-4.
FIG. 5A is a top perspective view of an embodiment of a diffuser.
FIG. 5B is a bottom perspective view of the diffuser shown in FIG. 5A.
FIG. 5C is a bottom plan view of the diffuser shown in FIG. 5A.
FIG. 5D is a rear plan view of the diffuser shown in FIG. 5A.
FIG. 5E is a cross-sectional view of the diffuser shown in FIG. 5C taken along the line X-X.
FIG. 5F is a magnified, cross-sectional view of a portion of the diffuser shown in FIG. 5E.
FIG. 6A is a top perspective view of an embodiment of a top plate of a reaction chamber.
FIG. 6B is a top plan view of the top plate shown in FIG. 6A.
FIG. 6C is a bottom plan view of the top plate shown in FIG. 6A.
FIG. 6D is a cross-sectional view of the top plate shown in FIG. 6B taken along the line F-F.
FIG. 6E is a magnified cross-sectional view of a portion of the gas distribution system and reaction chamber shown in FIG. 4.
FIG. 7A is a top perspective view of an embodiment of a bottom plate of a reaction chamber.
FIG. 7B is a top plan view of the bottom plate shown in FIG. 7A.
FIG. 7C is a bottom plan view of the bottom plate shown in FIG. 7A.
FIG. 7D is a cross-sectional view of the bottom plate shown in FIG. 7B taken along line D-D′.
FIG. 8 is a top plan view of an embodiment of an exhaust shim.



DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
Referring to FIGS. 2-4, an exemplary embodiment of a reactor 10 for use in a semiconductor processing tool is shown. The reactor 10 includes a housing 12, a gas delivery system 14, a reaction chamber 16, and an exhaust assembly 18. The housing 12 forms a chamber in which a semiconductor substrate can be processed. The reactor 10 is configured to receive a semiconductor substrate that is inserted into the reaction chamber 16. Once in the reaction chamber 16, any number of different processes and chemical reactions can be performed on the substrate including an etching process, a film deposition process, a baking process, or any other process known to one of ordinary skill in the art. After the substrate is processed within the reaction chamber 16, the substrate is removed, and another substrate can then be inserted into the reaction chamber 16 to be processed. In an embodiment, the housing 12 provides a reduced pressure chamber in which the processing components reside. In another embodiment, the housing 12 provides a chamber that remains at or near atmospheric pressure.
Referring to FIGS. 2-4, an exemplary embodiment of the gas delivery system 14, reaction chamber 16, and exhaust assembly 18 are shown. The gas delivery system 14 includes a plurality of gas lines configured to transport gases to a mixer 20 that is in fluid communication with a diffuser 22. The diffuser 22 is operatively and fluidly connected to the reaction chamber 16 in which semiconductor substrates are processed. The reaction chamber 16 includes a top plate 24 and a bottom plate 26, and the top and bottom plates 24, 26 define a reaction space 28 therewithin. A susceptor 30 is configured to be raised and lowered relative to the reaction chamber 16 to introduce a substrate 32 into the reaction space 28 as well as remove the substrate 32 therefrom. The exhaust assembly 18 is operatively and fluidly connected to the reaction chamber 16 to withdraw process gases and effluent therefrom. As shown in FIG. 4, the flow path A of gases through the mixer 20, diffuser 22, reaction chamber 16, and exhaust assembly 18 is shown. In particular, the gases flowing through the mixer 20 and the diffuser 22 flow in the substantially opposite direction the direction of these gases flowing through the reaction chamber 16.
As shown in FIGS. 2-3, the gas delivery system 14 includes plurality of gas lines that are operatively connected to the mixer 20. In an embodiment, the gas lines for introducing reactant gases or liquids into the mixer 20 may include: a first reactant gas line 34, a second reactant gas line 36, a third reactant gas line 38, and a fourth reactant gas line 40. It should be understood by one of ordinary skill in the art that any number of reactant gas lines may be operatively and fluidly connected to the mixer 20 for delivering reactants thereto. The reactant gas lines 34, 36, 38, 40 are configured to transport reactants, such as a vaporized precursor from a solid source, a vaporized precursor from a liquid source, ozone, water or any other reactant that is used in processing a substrate. Although the gas lines 34, 36, 38, 40 are described as being configured to transport gases, it should be understood by one of ordinary skill in the art that gases, vapors, and/or liquids may likewise be transported through these lines to the mixer 20. The gas delivery system 14 also includes a first bypass line 42, a second bypass line 44, a third bypass line 46, and a fourth bypass line 46. The bypass lines 42, 44, 46, 48 are configured to transport an inert gas to the mixer 20. Each bypass line 42, 44, 46, 48 is operatively connected to a corresponding reactant gas line 34, 36, 38, 40. The bypass lines 42, 44, 46, 48 are in fluid communication with the corresponding reactant gas lines 34, 36, 38, 40 as well as the mixer 20. The gas delivery system 14 further includes a first back-suction line 50, a second back-suction line 52, a third back-suction line 54, and a fourth back-suction line 56. The back-suction lines 50, 52, 54, 56 are operatively and fluidly connected to a corresponding reactant gas line 34, 36, 38, 40, bypass line 42, 44, 46, 48, and the exhaust assembly 18. The back-suction lines 50, 52, 54, 56 are configured to selectively transfer reactant gases from the reactant gas lines 34, 36, 38, 40 and/or inert gases from the bypass lines 42, 44 to the exhaust assembly 18 by withdrawing these gases and bypassing the reaction chamber 16. In an embodiment, the reactant gas lines 34, 36, 38, 40, bypass lines 42, 44, 46, 48, and back-suction lines 50, 52, 54, 56 are all formed of titanium, but it should be understood by one of ordinary skill in the art that these lines can be made of stainless steel, or any other material that will not react with any gases or fluids being transferred to the mixer 20 or the exhaust assembly 18.
As shown in FIGS. 2-4, the gas delivery system 14 further includes a mixer 20 configured to receive the reactant gases and the inert gases from the reactant gas lines 34, 36, 38, 40 and bypass lines 42, 44, 46, 48. In an embodiment, the reactant gas lines 34, 36, 38, 40 are permanently attached to the mixer 20 via a weld. In another embodiment, the reactant gas lines 34, 36, 38, 40 are removably secured to the mixer 20 such that if a gas line is damaged or otherwise needs to be replaced, only the individual gas line and corresponding bypass and back-suction lines can be detached from the mixer 20 for replacement. In an embodiment, the mixer 20 includes a body 58 and a chamber 60 formed into the body 58, as shown in cross-section in FIG. 4. In an embodiment, two of the reactant gas lines 34, 36 are attached to one side of the body 58 and two other reactant gas lines 38, 40 are attached to the opposing side of the body such that gases can be introduced into the chamber 60 in opposing directions, thereby causing the gases to circulate within the chamber 60 prior to the gases flowing into the diffuser 22. The mixer 20 is removably attached to and in fluid communication with the diffuser 22. In an embodiment, the mixer 20 is formed of titanium, but it should be understood by one of ordinary skill in the art the mixer can alternatively be made of stainless steel, or any other material that will not react with any gases or fluids being transferred through the mixer 20 to the diffuser 22.
The gas delivery system 14 also includes a diffuser 22 in fluid communication with the mixer 20, and the diffuser 22 is configured to provide a distributed gas flow to the reaction chamber 16, as shown in FIG. 4. The top plate 24 of the reaction chamber 16 includes an upper surface 62, a lower surface 64, and an edge 66 that extends between the upper and lower surfaces 62, 64. The diffuser 22 is directly attached to the upper surface 62 of the reaction chamber 16, thereby defining a diffuser volume 68 therebetween. Referring to FIGS. 5A-5F, an exemplary embodiment of a diffuser 22 is shown. In the illustrated embodiment, the diffuser 22 is a fan-shaped member that is releasably securable to the upper surface 62 of the top plate 24 of the reaction chamber 16. The diffuser 22 includes an inlet portion 70 and a distribution portion 72. In an embodiment, the inlet portion 70 and the distribution portion 72 are integrally formed. In another embodiment, the inlet portion 70 and the distribution portion 72 are formed separately and subsequently fixedly attached to each other. The diffuser 22 further includes a connecting surface 74, a mounting surface 76, an upper surface 78, an end surface 80, and a pair of bosses 82 extending from the upper surface 78. The connecting surface 74 is configured to abut the body 58 of the mixer 20 when the diffuser 22 is attached thereto. The mounting surface 76 is configured to contact the upper surface 62 of the top plate 24 of the reaction chamber 16 to which the diffuser 22 is attached. The upper surface 78 of the diffuser 22 is the surface opposing the mounting surface 76 and is directed away from the reaction chamber 16. The end surface 80 extends between the mounting surface 76 and the upper surface 78, and the end surface 80 is a curved surface that forms the curved end of the diffuser 22 opposite the inlet portion 70.
The inlet portion 70 of the diffuser 22 is configured to provide a pathway for the gases exiting the mixer 20 before the gases are introduced into the distribution portion 72 of the diffuser 22, as illustrated in FIGS. 5C-5E. The inlet portion 70 includes an inlet block 84 that is a substantially square member that is configured to be directly attached to the body 58 of the mixer 20, as shown in FIG. 4. The inlet block 84 includes a channel 86 formed therethrough. The channel 86 is in direct fluid communication with the chamber 60 of the mixer 20 such that the gases introduced into the mixer 20 are transferred therefrom into the channel 86 formed in the inlet block 84 of the diffuser 22. The channel 86 preferably provides a substantially linear pathway between the mixer 20 and the distribution portion 72 of the diffuser 22. The channel 86 is preferably symmetrical about a central axis B (FIG. 5E) that extends through the inlet portion 70. In an embodiment, the channel 86 is formed of a first passageway 88 and an adjacent second passageway 90, wherein the first and second passageway 88, 90 form a continuous flow pathway. The first passageway 88 is defined by a first inlet surface 92, and the second passageway 90 is defined by a second inlet surface 94.
In an embodiment, the first inlet surface 92 defining the first passageway 88 through the inlet block 84 has a substantially conical shape such that the diameter of the first inlet surface 92 is larger at a position adjacent to the mixer 20 relative to a smaller diameter at a position adjacent to the second passageway 90, as illustrated in FIG. 5E. Because the cross-sectional area of the first passageway 88 decreases in the direction of the flow path of the gases exiting the mixer 20, the flow velocity of these gases increases as the gases travel along the length of the first passageway 88. In another embodiment, the first inlet surface 92 is substantially cylindrical, thereby providing a substantially constant cross-section of the first passageway 88 along the length thereof. It should be understood by one of ordinary skill in the art that the first inlet surface 92 may be formed of any shape that may increase, decrease, or maintain a constant gas flow velocity of through the first passageway 88.
In an embodiment, the second inlet surface 94 defining the second passageway 90 through the inlet block 84 is substantially cylindrical, thereby providing a substantially constant cross-section of the second passageway 90 along the length thereof, as shown in FIG. 5E. When the first inlet surface 92 is substantially conical and the second inlet surface 94 is substantially cylindrical, the interface between the surfaces provides a transition such that the gas flow velocity through the first passageway 88 continually increases along the length thereof, whereas the gas flow velocity through the second passageway 90 remains substantially the same along the length thereof. In another embodiment, the second inlet surface 94 has a substantially conical shape (not shown) such that the diameter of the second inlet surface 94 is larger at a position adjacent to the first inlet surface 92 relative to a smaller diameter at a position adjacent to the distribution portion 72. When the first and second inlet surfaces 92, 94 are both substantially conical, these surfaces can be configures such that the first and second passageways 88, 90 provide for a continuously narrowing passageway through the inlet block 84, thereby providing a more gradual increase in flow velocity of the gases flowing therethrough. It should be understood by one of ordinary skill in the art that the second inlet surface 94 may be formed of any shape that may increase, decrease, or maintain a constant gas flow velocity through the second passageway 90. The end of the second passageway 90 opposite the first passageway 88 opens into the distribution portion 72 of the diffuser 22.
Process gases are introduced into the distribution portion 72 by way of the channel 86 formed through the inlet portion 70 extending between the mixer 20 and the distribution portion 72, as shown in FIGS. 5C-5E. In an embodiment, the distribution portion 72 includes a first distribution surface 96, a second distribution surface 98, a third distribution surface 100, and a first deflecting surface 102, and a first side surface 104 and a second side surface 106 defining the lateral boundaries of the diffuser volume 68 with a third side surface 108 extending therebetween. It should be understood by one of ordinary skill in the art that although the illustrated embodiment includes four distinct surfaces extending between the inlet portion 70 and the third side surface 108 of the distribution portion 72, there can be any number of distinct surfaces that can be combined to extend therebetween.
In the embodiment illustrated in FIGS. 5C, 5E, and 5F, the first distribution surface 96 is bounded by the inlet portion 70, the second distribution surface 98, and the first and second side surfaces 104, 106 of the distribution portion 72. In an embodiment, the first distribution surface 96 is sloped such that the distance between the first distribution surface 96 and the upper surface 62 of the top plate 24 of the reaction chamber 16 decreases in the direction from the inlet portion 70 toward the third side surface 108 of the distribution portion 72, shown as angle α in FIG. 5F. In an embodiment, the first distribution surface 96 is sloped between about 0-10°. In another embodiment, the first distribution surface 96 is sloped between about 3-7°. In yet another embodiment, the first distribution surface 96 is sloped about 4°. In an embodiment, there is no lateral slope of the first distribution surface 96 between the first and second side surfaces 104, 106. In another embodiment, the first distribution surface 96 may be sloped or curved in any manner between the first and second side surfaces 104, 106.
In the embodiment illustrated in FIGS. 5C, 5E, and 5F, the second distribution surface 98 is bounded by the first distribution surface 96, the third distribution surface 100, and the first and second side surfaces 104, 106 of the distribution portion 72. In an embodiment, the second distribution surface 98 is sloped such that the distance between the second distribution surface 98 and the upper surface 62 of the top plate 24 of the reaction chamber 16 decreases in the direction from the first distribution surface 96 toward the third side surface 108 of the distribution portion 72, shown as angle β in FIG. 5F. In an embodiment, the second distribution surface 98 is sloped between about 5-20°. In another embodiment, the second distribution surface 98 is sloped between about 7-15°. In yet another embodiment, the second distribution surface 98 is sloped about 10°. In an embodiment, there is no lateral slope of the second distribution surface 98 between the first and second side surfaces 104, 106. In another embodiment, the second distribution surface 98 may be sloped or curved in any manner between the first and second side surfaces 104, 106.
The process gases flowing through the diffuser volume 68 flow past the third diffusion surface 100 prior to flowing past the first deflecting surface 102, and the third distribution surface 100 is described in more detail below. In the embodiment illustrated in FIGS. 5C, 5E, and 5F, the first deflecting surface 102 is bounded by the third distribution surface 100 and the first, second, and third side surfaces 104, 106, 108 of the distribution portion 72. In an embodiment, the first deflecting surface 102 is sloped such that the distance between the first deflecting surface 102 and the upper surface 62 of the top plate 24 of the reaction chamber 16 decreases in the direction from the third distribution surface 100 toward the third side surface 108 of the distribution portion 72, shown as angle θ in FIG. 5F. In an embodiment, the first deflecting surface 102 is sloped between about 10-35°. In another embodiment, the first deflecting surface 102 is sloped between about 20-30°. In yet another embodiment, the first deflecting surface 102 is sloped about 26°. It should be understood by one of ordinary skill in the art that the first distribution surface 96, second distribution surface 98, and the first deflecting surface 102 can be sloped at any angle in either the longitudinal direction from the inlet portion 70 toward the third side surface 108 of the distribution portion 72 or the lateral direction from the first side surface 104 to the second side surface 106. In an embodiment, there is no lateral slope of the first deflecting surface 102 between the first and second side surfaces 104, 106. In another embodiment, the first deflecting surface 102 may be sloped or curved in any manner between the first and second side surfaces 104, 106.
In the embodiment illustrated in FIGS. 5C, 5E, and 5F, the third distribution surface 100 is bounded by the second distribution surface 98, the first deflecting surface 102, and the first and second side surfaces 104, 106 of the distribution portion 72. In an embodiment, the third distribution surface 100 is sloped in the lateral direction when the first and second distribution surfaces 96, 98 are sloped in the longitudinal direction, as described above. The third distribution surface 100 is symmetrical about a centerline 110 aligned along the longitudinal axis (FIG. 5C) of the diffuser 22. When the diffuser 22 is attached to the top plate 24 of the reaction chamber 16, the distance between the centerline 110 of the third distribution surface 100 and the upper surface 62 of the top plate 24 is between about 1.0-3.0 mm, in an embodiment. In another embodiment, the distance between the centerline 110 of the third distribution surface 100 and the upper surface 62 of the top plate 24 is between about 2.0-2.5 mm. In another embodiment, the distance between the centerline 110 of the third distribution surface 100 and the upper surface 62 of the top plate 24 is about 2.24 mm. The third distribution surface 100 is sloped in the lateral direction such that the third distribution surface 100 immediately adjacent to the first and second side surfaces 104, 106 is spaced further away from the upper surface 62 of the top plate 24 relative to the distance between the centerline 110 of the third distribution surface 100 and the upper surface 62 of the top plate 24. In an embodiment, the distance between the third distribution surface 100 immediately adjacent to the first and second side surfaces 104, 106 and the upper surface 62 of the top plate 24 is between about 3.0-5.0 mm. In another embodiment, the distance between the third distribution surface 100 immediately adjacent to the first and second side surfaces 104, 106 and the upper surface 62 of the top plate 24 is between about 3.5-4.8 mm. In yet another embodiment, the distance between the third distribution surface 100 immediately adjacent to the first and second side surfaces 104, 106 and the upper surface 62 of the top plate 24 is about 4.0 mm. The lateral slope of the third distribution surface 100 between the centerline 110 and the opposing first and second side surfaces 104, 106 may be continuous slope or may be curved such that the distance that the third distribution surface 100 is spaced apart from the upper surface 62 of the top plate 24 is non-linear between the centerline 110 and the first and second side surfaces 104, 106.
The third distribution surface 100 acts as the first gas flow restriction for the process gases as they flow through the diffuser volume 68 from the mixer 20 to the reaction chamber 16. While the first and second distribution surfaces 96, 98 provide a continually increasing lateral width between the first and second side surfaces 104, 106 as well as a continually decreasing height between the first and second distribution surfaces 96, 98 and the upper surface of the top plate 24, the third distribution surface 100 is particularly shaped to cause the process gases to become distributed laterally between the first and second side surfaces 104, 106 prior to the process gases contacting the first deflecting surface 102 and being directed toward the reaction chamber 16. In addition to laterally distributing the process gases, the third distribution surface 100 also modifies the relative gas flow velocity of the process gases across the width of the diffuser volume 68. In particular, the third distribution surface 100 of the illustrated embodiment restricts the flow of gases near the centerline 110 so as to reduce the gas flow velocity near the central axis of the diffuser 22 while providing gradually less restriction to the flow of gases laterally relative to the centerline 110. Accordingly, the flow velocity of process gases contacting the first deflecting surface 102 adjacent to the first and second side surfaces 104, 106 is greater than the flow velocity of process gases contacting the first deflecting surface 102 adjacent to the centerline 110. Thus, the velocity of process gases flowing from the diffuser 22 into the reaction chamber 16 varies across the width of the first deflecting surface 102. It should be understood by one of ordinary skill in the art that the shape of third distribution surface 100 can be shaped or sloped in any manner to provide a pre-determined gas flow velocity distribution across the width thereof, and the resulting gas flow velocity distribution produces a corresponding residence time distribution, as discussed in more detail below. It should be understood by one of ordinary skill in the art that any of the surfaces extending in the direction between the inlet portion 70 and the third side surface 108 can provide a first flow restriction that controls the relative gas flow velocities across the width of the diffuser 22.
In an embodiment, the diffuser 22 further includes a first transition surface 112 and a second transition surface 114, as illustrated in FIGS. 5B-5C. The first and second transition surfaces 112, 114 are curved surfaces that provide a transition between the laterally oriented surfaces and the vertically oriented surfaces of the distribution portion 72 of the diffuser 22. The first transition surface 112 provides a transition between the substantially vertically oriented first side surface 104 and the substantially laterally oriented first distribution surface 96, second distribution surface 98, third distribution surface 100, and first deflecting surface 102. The second transition surface 114 provides a transition between the substantially vertically oriented second side surface 106 and the substantially laterally oriented first distribution surface 96, second distribution surface 98, third distribution surface 100, and first deflecting surface 102. In another embodiment, the vertically oriented first and second side surfaces 104, 106 transitions directly with the laterally oriented first distribution surface 96, second distribution surface 98, third distribution surface 100, and first deflecting surface 102 to form an angle therebetween without an intermediate transition surface.
In an embodiment, the first and second side surfaces 104, 106 of the distribution portion 72 of the diffuser 22 are each formed of multiple sections in which each adjacent section has a different curvature in the lateral direction relative to the centerline 110 of the diffuser 22, as shown in FIG. 5C. The shape of the first and second side surfaces 104, 106 in the lateral direction can be optimized in order to reduce or eliminate recirculation of process gases as these process gases contact the first and second side surfaces 104, 106. In another embodiment, the shape of the first and second side surfaces 104, 106 between the inlet portion 70 and the third side surface 108 has a consistent curvature therebetween.
After the process gases have passed through the diffuser 22, the process gases are introduced into the reaction chamber 16 through the top plate 24, as shown in FIGS. 4 and 6A-6D. The top plate 24 includes an upper surface 62, a lower surface 64, and an edge 66 extending between the upper and lower surfaces 62, 64. The lower surface 64, as shown in FIG. 6C, is a substantially planar surface. The upper surface 62 includes a pair of raised bosses 120 extending therefrom. The upper surface 62 further includes a recessed region 122 that extends from the upper surface 62 into the thickness of the top plate 24. The recessed region 122 is configured to receive the inlet portion 70 of the diffuser 22 when the diffuser 22 is attached to the top plate 24, as shown in FIG. 4. The depth of the recessed region 122 should be sized and shaped to allow the inlet portion 70 to be disposed therein.
As shown in FIGS. 4 and 6A-6D, the top plate 24 further includes a raised surface 124. The raised surface 124 is shaped to substantially correspond to the distribution portion 72 of the diffuser 22. Thus, when the diffuser 22 is directly attached to the upper surface 62 of the top plate 24, the mounting surface 76 of the diffuser 22 is substantially aligned with the raised surface 124 of the top plate 24. It should be understood by one of ordinary skill in the art that the raised surface 124 may be sized to be slightly larger than the outline of the mounting surface 76 of the diffuser 22 to ensure the entire mounting surface 76 is in an abutting relationship with the top plate 24. The diffuser volume 68 (FIG. 4) is defined between the raised surface 124 of the top plate 24 and the first, second, and third distribution surfaces 96, 98, 100, the first deflecting surface 102, the first, second and third side surfaces 104, 106, 108, and the first and second transition surfaces 112, 114 of the diffuser 22.
The top plate 24 further includes an inlet slot 126 formed through the thickness thereof, as shown in FIGS. 4 and 6A-6E. In an embodiment, the inlet slot 126 is formed as curved slot that substantially corresponds to the third side surface 108 of the diffuser 22. In an embodiment, the shape of the inlet slot 126 generally corresponds to the leading edge of the substrate 32 to reduce the distance that the process gases must flow between the inlet slot 126 and the leading edge of the substrate 32 and also so that the distance that the gases must travel between the inlet slot 126 and the leading edge of the substrate 32 is substantially the same across the entire width of the inlet slot 126. The shape of the inlet slot 126 can be optimized in combination with the shape of the third distribution surface 100 to provide a pre-determined residence time distribution of the process gases between the inlet slot 126 and the leading edge of the substrate 32 (FIG. 4). In another embodiment, the inlet slot 126 is substantially linear. It should be understood by one of ordinary skill in the art that the inlet slot 126 can be substantially linear, curved, or any other shape, and a curved inlet slot 126 can have any radius of curvature sufficient to provide a pre-determined residence time distribution within the reaction space 28. The inlet slot 126 should be sized and shaped so as to not provide an additional flow restriction to the process gases as they flow from the diffuser 22 to the reaction space 28.
As shown in FIGS. 4 and 6D-6E, the inlet slot 126 formed through the thickness of the top plate 24 is defined by an outer surface 128, an inner surface 130, a first angled surface 132, a second angled surface 133, and a pair of corner surfaces 134 that provide a transition between the outer surface 128 and the inner and angled surfaces 130, 132, 133. In an embodiment, the outer and inner surfaces 128, 130 are substantially concentric such that the distance between these surfaces is substantially the same along the entire length of the inlet slot 126. In an embodiment, the outer and inner surfaces 128, 130 are oriented in a substantially vertical manner to provide a substantially vertical passageway between the diffuser volume 68 and the reaction space 28. In an embodiment, the inlet slot 126 is formed with only outer and inner surfaces 128, 130 without the first and second angled surfaces 132, 133. In the illustrated embodiment, the first angled surface 132 extends downwardly from the upper surface 62 of the top plate 24. The first angled surface 132 provides a transition surface so that the process gases exiting the diffuser volume 68 into the inlet slot 126 do not traveling at a right angle. Instead, the first angled surface 132 allows the flow of gases to slowly transition from a substantially horizontal flow direction to a substantially vertical flow direction, thereby avoiding abrupt transitions that can create turbulent eddies, vortices, or recirculation that entrains the flow of process gases and can cause chemical vapor deposition growth modes in these localized areas.
The inner surface 130 surface extends in a substantially vertical manner between the first angled surface 132 and the second angled surface. In the embodiment shown in FIGS. 4 and 6D-6E, the second angled surface 133 extends upwardly from the lower surface 64 of the top plate 24 at an angle. The second angled surface 133 provides a transition surface so that the gases exiting the inlet slot 126 into the reaction space 28 do not traveling at a right angle which may cause turbulence problems noted above. Instead, the second angled surface 133 allows the flow of gases to slowly transition from a substantially vertical flow direction to a substantially horizontal flow direction. The first and second angled surfaces 132, 133 reduce the likelihood of recirculation or turbulence within the inlet slot 126. It should be understood by one of ordinary skill in the art that the first and second angled surfaces 132, 133 can be formed at any angle relative to the upper and lower surfaces 62, 64 of the top plate 24.
In operation, the process gases flow through the diffuser 22 where the flow of the gases is restricted between the third distribution surface 100 and the upper surface 62 of the top plate 24, and the process gases are then introduced into the reaction chamber 16 through the inlet slot 126. The third distribution surface 100 is configured to modify the gas flow velocity of the process gases across the width of the diffuser 22 relative to the centerline 110 thereof. Thus, as the process gases enter the inlet slot 126, the gas flow velocity of the process gases across the width of the inlet slot 126 likewise varies. In an embodiment, the varied gas flow velocities in combination with the shape of the inlet slot 126 produces a residence time distribution is shaped such that the wave of process gases substantially corresponds to the shape of the leading edge of the substrate, as shown in FIG. 1B. Residence time of the process gas is the time that it takes for a fluid element to travel a given distance. The residence time distribution is the contour of constant residence time across a width. Accordingly, FIG. 1B illustrates an exemplary residence time distribution in which the shape of the residence time distribution closely corresponds with the leading edge of the substrate such that the time that it takes the process gas to flow from the inlet slot 126 to the leading edge of the substrate is constant across the width of the reaction chamber 16. The illustrated shape of the residence time distribution is a result of the gas flow velocities exiting the inlet slot 126 at a higher gas flow velocity near the opposing side edges of the reaction chamber with respect to a lower gas flow velocity near the centerline of the reaction chamber. Although the overall distance between the inlet slot 126 and the leading edge of the substrate is nearly the same across the width of the reaction chamber, the fluid dynamics within the reaction space 28 requires such a pre-determined gas flow velocity distribution to produce such a shaped residence time distribution. FIG. 1B illustrates only an exemplary embodiment of a residence time distribution resulting from the restriction to the gas flow caused by the third distribution surface 100 of the diffuser 22, but it should be understood by one of ordinary skill in the art that the third distribution surface 100 —or any other surface of the diffuser configured to provide a gas flow restriction—can be modified to produce a pre-determined residence time distribution. In another embodiment, the third distribution surface 100 is shaped such that the resulting gas flow velocity distribution across the width of the inlet slot 126 produces a residence time distribution that has a substantially flat shape that it “center heavy”—or, in other words, the shape of the residence time distribution corresponds to the shape of the trailing edge of the substrate.
The top plate 24 is attached to the bottom plate 26 to form a reaction chamber 16 with a reaction space 28 formed between the top and bottom plates 24, 26, as shown in FIG. 4. As illustrated in FIGS. 7A-7C, the bottom plate 26 is a substantially flat member having an upper surface 136, a lower surface 138, and an edge 140 extending between the upper and lower surfaces 136, 138. The bottom plate 26 includes a recessed region 142 formed of a recessed surface 144, a first side edge 146, a second side edge 148, a third side edge 150, and a second deflecting surface 152, wherein the first, second, third side edges 146, 148, 150 and the second deflecting surface 152 extend between the recessed surface 144 and the upper surface 136 of the bottom plate 26. In an embodiment, the first, second, and third side edges 146, 148, 150 extend in a substantially linear manner between the upper surface 136 and the recessed surface 144, wherein the transition between the side edges 146, 148, 150 and the recessed surface 144 is generally at a right angle. In another embodiment, the first, second, and third side edges 146, 148, 150 extend from the upper surface 136 in a generally vertical manner but may include a slight radius of curvature for a transition between the side edges 146, 148, 150 and the recessed surface 144. It should be understood by one of ordinary skill in the art that the first, second, and third side edges 146, 148, 150 can be oriented in any manner as they extend between the upper surface 136 and the recessed surface 144 of the bottom plate 26.
The second deflecting surface 152 extends between the upper surface 136 and the recessed surface 144 of the bottom plate 26, as illustrated in FIGS. 4, 7B, and 7D. The second deflecting surface 152 is curved in both the lateral and vertical directions. In an embodiment, the second deflecting surface 152 is arced in the lateral direction about the longitudinal centerline of the bottom plate 26, wherein the arced shape of the second deflecting surface 152 substantially corresponds to the arced shape of the inlet slot 126 formed through the top plate 24. It should be understood by one of ordinary skill in the art that the radius of curvature of the second deflecting surface 152 in the lateral direction should correspond to the radius of curvature of the inlet slot 126 formed through the top plate 24 as well as the radius of curvature of the first deflecting surface 102 of the diffuser 22. In an embodiment, the second deflecting surface 152 is a curved surface that extends between the first and third sided edges 146, 150 of the recessed region 142. The second deflecting surface 152 provides a curved surface between the upper surface 136 of the 136 of the bottom plate 26 and the recessed surface 144 to redirect the process gases from a substantially vertical flow direction through the inlet slot 126 to a substantially horizontal flow direction through the reaction space 28. It should be understood by one of ordinary skill in the art that the radius of curvature and the overall length of the second deflecting surface 152 between the upper surface 136 and the recessed surface 144 may be any angle or length sufficient to allow the process gases to change flow direction without a significant amount of turbulence or recirculation of the gases.
The bottom plate 26 also includes an aperture 154 formed therethrough, as shown in FIGS. 7A-7D. The aperture 154 extends between the recessed surface 144 and the lower surface 138 of the bottom plate 26. The aperture 154 is configured to receive a susceptor 30 (FIG. 4) carrying a substrate 32 to be processed within the reaction chamber 16. In operation, the susceptor 30 is withdrawn, or lowered so as to receive a substrate 32 that is inserted into the housing 12. Once the substrate 32 has been seated on the susceptor 30, the susceptor 30 is raised into the aperture 154 to a processing position in which the susceptor 30 is positioned near or in contact with the bottom plate 26. After the substrate 32 has been processed, the susceptor 30 is lowered away from the aperture 154 and the cycle is repeated with another substrate 32.
Process gases are introduced into the reaction space 28 through the inlet slot 126 adjacent the second deflecting surface 152 of the bottom plate 26 and exit the reaction space 28 through an exhaust slot 156 formed adjacent the second side edge 148 of the recessed region 142 of the bottom plate 26, as shown in FIGS. 4 and 7A-7D. The exhaust slot 156 is an elongated slot extending between the recessed surface 144 and the lower surface 138 of the bottom plate 26. In an embodiment, the exhaust slot 156 extends the entire distance laterally between the first and third side edges 146, 150 of the recessed region 142. In another embodiment, the exhaust slot 156 extends laterally only a portion of the distance between the first and third side edges 146, 150. In an embodiment, the exhaust slot 156 is symmetrical about the longitudinal axis of the bottom plate 26. It should be understood by one of ordinary skill in the art that the exhaust slot 156 can have any length or width sufficient to allow process gases to exit the reaction space 28 between the top and bottom plates 24, 26. The exhaust slot 156 should be configured such that it does not provide a restriction to the flow of gases therethrough but can assist the gas delivery system 14 in overall control of the residence time distribution at the leading edge of substrate by tuning the conductance profile through the exhaust assembly 18. The process gases exit the reaction chamber 16 through the exhaust slot 156 and are then received in the exhaust assembly 18.
In the embodiment illustrated in FIGS. 2-4, the exhaust assembly 18 is operatively connected to the bottom plate 26 of the reaction chamber 16. In an embodiment, the exhaust assembly 18 includes an exhaust shim 158, an exhaust launder 160, and piping that transports the process gases and effluent from the exhaust launder 160 out of the housing 12. When assembled, the exhaust shim 158 is disposed between the exhaust launder 160 and the lower surface 138 of the bottom plate 26, and the exhaust assembly 18 is attached directly to the reaction chamber 16.
As shown in FIG. 8, the exhaust shim 158 includes an elongated restriction slot 162 formed therethrough. The exhaust shim 158 provides a second restriction to the flow of process gases. In an embodiment, the length of the restriction slot 162 substantially corresponds to the length of the exhaust slot 156 formed through the bottom plate 26. The restriction slot 162 is formed such that the slot is a bow-tie shape. In other words, the width of the restriction slot 162 is larger at the opposing ends 164 of the restriction slot 162 relative to a narrower width at the midpoint 166 of the restriction slot 162. Given a substantially consistent flow velocity of process gases along the width of the exhaust slot 156, the shape of the restriction slot 162 provides increased flow restriction to the process gases through the midpoint 166 of the restriction slot 162 relative to lesser flow restriction to the process gases near the ends 164 of the restriction slot 162. Accordingly, the gas flow velocity near the midpoint 166 of the restriction slot 162 is less than the gas flow velocity near the ends 164 of the restriction slot 162 as is exit the exhaust shim 158. As a result, this second gas flow restriction in combination with the gas flow restriction caused by the third distribution surface 100 of the diffuser 22 results in a residence time distribution through the reaction chamber 16 that closely corresponds to the shape of the entire leading edge of the substrate 32 being processed.
When the top and bottom plates 24, 26 are assembled to form the reaction chamber 16, as illustrated in FIG. 4, the reaction space 28 is defined between the recessed region 142 of the bottom plate 26, the susceptor 30, and the lower surface 64 of the top plate 24. The reaction space 28 provides a volume through which process gases can travel between the inlet slot 126 and the exhaust slot 156. Within the reaction space 28, the process gases contact the substrate 32 to deposit a layer of material on the substrate 32. The effluent—or the byproducts of the chemical reaction on the surface of the substrate—and any unreacted process gas is withdrawn from the reaction chamber 16 through the exhaust slot 156.
As shown in FIG. 6E, when the diffuser 22 is attached to the assembled reaction chamber 16, the edge formed at the junction of the outer surface 128 of the inlet slot 126 and the upper surface 62 of the top plate 24 is positioned immediately adjacent to the mounting surface 76 of the diffuser 22. As a result, the edge formed at the junction of the third side surface 108 and the mounting surface 76 of the diffuser 22 is positioned within the gap defining the inlet slot 126 formed in the top plate 24 such that the edge of the diffuser 22 is not aligned with the corresponding edge of the inlet slot 126.
Similarly, when the top plate 24 is attached to the bottom plate 26 to form the reaction chamber 16, the edge of the recessed region 142 formed between the second deflecting surface 152 and the upper surface 136 of the bottom plate 26 is positioned just slightly beyond the outer surface 128 of the inlet slot 126 of the top plate 24 such that the edge of the recessed region 142 positioned adjacent to the inlet slot 126 contacts the lower surface 64 of the top plate 24. As a result, the edge formed by the junction of the outer surface 128 and the lower surface 64 of the top plate 24 is positioned above the recessed region 142 of the bottom plate 26. Thus, the edge of the diffuser 22 is slightly offset relative to the corresponding edge of the inlet slot 126, and the edge of the inlet slot 126 is slightly offset relative to the corresponding edge of the recessed region 142 of the bottom plate. These offset edges provide a cascading flow effect as the process gases transition from the diffuser volume 68 to the inlet slot 126 to the reaction space 28, wherein flow of gases makes a generally u-turn change in flow direction. The cascading flow effect reduces or eliminates the recirculation of process gases that may otherwise occur if the corresponding edges of the diffuser 22, top plate 24, and bottom plate 26 are not properly aligned. Because the first gas flow restriction is moved upstream from the inlet slot 126 such that the inlet slot 126 does not act as a gas flow restriction, the disassembly of diffuser 22 and the reaction chamber 16 is simplified. As a result, the ease of disassembly allows for a more direct line-of-sight for cleaning or adding surface texturing to the surfaces of the diffuser 22 and reaction chamber 16.
In an embodiment, the entire gas delivery system 14 including the gas lines, the mixer 20, and the diffuser 22, as well as the top and bottom plates 24, 26 of the reaction chamber are formed of stainless steel. It should be understood by one of ordinary skill in the art that the gas lines, the mixer, and/or the diffuser 22 may also be formed of titanium, aluminum, an alloy, or any material that is inert with respect to the process gases used in substrate processing. The mixer 20, the diffuser 22, the top plate 24, and the bottom plate 26 all include surfaces that are contacted by process gases flowing from the gas lines to the exhaust assembly 18. Each of the surfaces that contact the process gases is a wetted surface, meaning that at least a portion of the entire surface is exposed to process gases as the process gases flow through the entire system. With respect to the mixer 20, the surface defining the chamber 60 is a wetted surface as it contacts process gases. With respect to the diffuser 22, the first and second inlet surfaces 92, 94 that form the channel 86 through the inlet portion 70 are wetted surfaces. Additionally, each of the surfaces defining the diffuser volume 68 is also a wetted surface. These wetted surfaces of the diffuser volume 68 includes: the first, second, and third distribution surfaces 96, 98, 100, the first deflecting surface 102, the first, second, and third side surfaces 104, 106, 108, the first and second transition surfaces 112, 114, and at least a portion of the raised surface 124 of the top plate 24. With respect to the inlet slot 126, the outer surface 128 as well as the first and second angled surfaces 132, 133 and the inner surface 130 are also wetted surfaces. With respect to the reaction chamber 16, all of the surfaces defining the reaction space 28 are wetted surfaces. The wetted surfaces of the reaction space 28 include: at least a portion of the lower surface 64 of the top plate 24 exposed by the recessed region 142 as well as the recessed surface 144, the first, second, and third side edges 146, 148, 150, and the second deflecting surface 152.
During processing of a substrate 32, as the process gases are introduced into the gas delivery system 14 and the reaction chamber 16, the process gases react with the wetted surface in a similar manner as the surface of the substrate 32 being processed. After each cycle of an ALD process, approximately a monolayer of material is deposited on the exposed surface of the substrate 32 as well as all of the wetted surfaces of the gas delivery system 14 and the reaction chamber 16. If the wetted surface has very little surface roughness, the deposited layers of material do no remain adhered to the wetted surfaces and tend to flake off the wetted surfaces with film accumulation. The flaking deposition layers can then land on the surface of substrates, thereby affecting the overall deposition uniformity on the substrate as well as result in less surface area of a substrate that can yield viable chips. However, if the wetted surface has too high a surface roughness, the total surface area of the wetted surface is increased by such an amount that the concentration of the process gases is reduced significantly due to the precursor materials in the process gases adhering to the wetted surfaces prior to the process gases reaching the substrate 32 being processed. Accordingly, the present invention provides a surface texturing to each of the wetted surfaces, wherein the surface texturing provides a surface roughness to each of the wetted surfaces such that the amount of flaking off of layers of deposited materials is reduced and the concentration of precursor material in the process gases that eventually contact the substrate surface is not significantly reduced by adsorption onto the wetted surfaces. Because ALD is a surface-sensitive process, the amount and degree of surface texturing should be optimized to balance the reduction in film stress caused by flaking and de-adhesion on the wetted surfaces with the chemical loss due to adsorption of the precursor on the wetted surfaces.
In an embodiment, the surface roughness of all the wetted surfaces is between about 30-250 Ra (or pinches). In another embodiment, the surface roughness of all of the wetted surfaces is between about 32-110 Ra. In yet another embodiment, the surface roughness of all of the wetted surfaces is about 90 Ra. The surface roughness of the wetted surfaces of the mixer 20, diffuser 22, and the reaction chamber 16 is done through a multiple-step process that may utilize both physical and chemical contact with the wetted surfaces.
Surface texturing is any technique used to treat a surface such that the vertical deviations from an ideal surface are largely controlled. Surface texturing can be accomplished by a variety of techniques including mechanical (i.e., grit or bead blasting, sanding, or machining to remove material) or coating a surface with a similar or dissimilar but compatible material to raise the surface from the starting surface (i.e., spray coating, powder coating, dipping, evaporation coating, spin-on coats, or the like).
While preferred embodiments of the present invention have been described, it should be understood that the present invention is not so limited and modifications may be made without departing from the present invention. The scope of the present invention is defined by the appended claims, and all devices, process, and methods that come within the meaning of the claims, either literally or by equivalence, are intended to be embraced therein.

## Claims

1. A gas delivery system for delivering at least one process gas to a reaction chamber, the gas delivery system comprising:
a diffuser in fluid communication with said reaction chamber, said diffuser being attached directly to an upper surface of said reaction chamber, wherein a diffuser volume for distributing said at least one process gas is defined between said diffuser and said upper surface of said reaction chamber, and wherein said reaction chamber comprises opposing side edges and a centerline, wherein said diffuser comprises a plurality of distribution surfaces, a deflecting surface, a first curved side surface, a second curved side surface, and a third curved side surface, wherein the third curved side surface comprises a curve in a lateral direction, and
wherein said diffuser comprises an increasing lateral width between the first curved side surface and the second curved side surface, wherein a first and a second distribution surface of the plurality of distribution surfaces are sloped downwards at different angles relative to the upper surface, wherein a third distribution surface of the plurality of distribution surfaces is sloped in a lateral direction with respect to a main flow direction along the centerline to cause the at least one process gas to become distributed laterally between the first curved side surface and the second curved side surface prior to the at least one process gas contacting the deflecting surface, and
wherein said upper surface comprises a curved inlet slot substantially corresponding to said third curved side surface, wherein gas flow velocities exiting the inlet slot are higher near the opposing side edges relative to a lower gas flow velocity near the centerline.

2. The gas delivery system of claim 1, wherein at least one distribution surface of the plurality of distribution surfaces is configured to restrict flow of said at least one process gas such that the at least one distribution surface reduces flow near a central axis of the diffuser and relative to flow at a lateral distance away from the centerline of the diffuser.

3. The gas delivery system of claim 2, wherein at least a portion of said at least one distribution surface is spaced a first distance away from said upper surface of said reaction chamber and another portion of said at least one distribution surface is spaced a second distance away from said upper surface of said reaction chamber.

4. The gas delivery system of claim 3, wherein said second distance is greater than said first distance.

5. The gas delivery system of claim 3, wherein said first distance is less than said second distance, and said first distance is measured between a centerline of said at least one distribution surface and said upper surface of said reaction chamber.

6. The gas delivery system of claim 5, wherein said first distance is between about 2.0 mm and 2.5 mm.

7. The gas delivery system of claim 6, wherein said first distance is about 2.24 mm.

8. The gas delivery system of claim 5, wherein said second distance is between about 3.5 mm and 4.8 mm.

9. The gas delivery system of claim 8, wherein said second distance is about 4.0 mm.

10. The gas delivery system of claim 1, wherein said first curved side surface comprises a first curvature and an adjacent second curvature, wherein said first curvature is different than said second curvature.

11. The gas delivery system of claim 1, wherein said diffuser comprises the first distribution surface, the second distribution surface, and the third distribution surface, wherein said first, second, and third distribution surfaces and the deflecting surface extend laterally between the first curved side surface and the second curved side surface, and wherein said first and second curved side surfaces extend between said first, second, and third distribution surfaces and the deflecting surface and a mounting surface.

12. The gas delivery system of claim 1, wherein said diffuser comprises the deflecting surface adjacent one of the plurality of distribution surfaces.

13. The gas delivery system of claim 1, wherein a shape of the first and second curved side surface is designed to reduce recirculation of process gasses.

14. The gas delivery system of claim 1, wherein said diffuser is fan-shaped.

15. The gas delivery system of claim 1, wherein said diffuser comprises a plurality of distribution surfaces.