# Patent

## Title
Nanoscale structures on optical fiber for surface enhanced Raman scattering and methods related thereto

## Abstract

A nanoscale structure fabricated on a planar end facet of an optic fiber is described, to enable detection of molecules by surface-enhanced Raman scattering. The nanoscale structure may comprise an array of nanopillars. The nanoscale structure may also comprise a non periodic, or random, surface-relief structure. The nanoscale structure may be coated in a metal, comprising, for example, silver, gold, aluminum, iridium, platinum, palladium, copper, or a combination of the same. The nanoscale structure may be fabricated on a planar end facet of an optical fiber by interference lithography.

## Background
CROSS REFERENCE TO RELATED APPLICATIONS
The present application claims priority to U.S. Provisional Application 61/691,036, filed on Aug. 20, 2012, which is incorporated herein by reference in its entirety. The present application may be related to U.S. Pat. No. 8,059,924 entitled “Multiplexed Photonic Membranes and Related Detection Methods for Chemical and/or Biological Sensing Applications”, granted on Nov. 15, 2011, U.S. application Ser. No. 12/958,302 entitled “Methods and Systems for Raman and Optical Cross-Interrogation in Flow-Through Silicon Membranes”, filed on Dec. 1, 2010, U.S. application Ser. No. 13/117,079 entitled “Methods for Isolation and Viability Assessment of Biological Organisms”, filed on May 26, 2011, U.S. application Ser. No. 12/957,883 (US 2011/0128536 A1) entitled “Nanoscale array structures suitable for surface enhanced Raman scattering and methods related thereto”, filed on Dec. 1, 2010, and U.S. application Ser. No. 13/410,226, filed on Mar. 1, 2012, entitled “Plasmon resonant cavities in vertical nanowire arrays”, the disclosure of each of these references being incorporated herein by reference in their entirety.


BRIEF DESCRIPTION OF DRAWINGS
The accompanying drawings, which are incorporated into and constitute a part of this specification, illustrate one or more embodiments of the present disclosure and, together with the description of example embodiments, serve to explain the principles and implementations of the disclosure.
FIG. 1 depicts a schematic of an array structure on an optical fiber for surface-enhanced Raman scattering.
FIG. 2A depicts an optical fiber coated by an antireflective layer and a photoresist.
FIG. 2B depicts an optical fiber coated by an antireflective layer and a photoresist exposed to interference lithography laser light.
FIG. 2C is a perspective view of a pattern of nanopillars defined on an optic fiber coated in photoresist.
FIG. 2D depicts an optical fiber coated by an antireflective layer and a photoresist after the photoresist has been developed.
FIG. 2E depicts an optical fiber coated by an antireflective layer and a photoresist during a removal step of the fabrication.
FIG. 2F depicts an optical fiber coated by an antireflective layer during a removal step of the fabrication.
FIG. 2G depicts an optical fiber with an array of nanopillars having been etched on the surface.
FIG. 2H depicts a metal coating on a nanopillars array on an optical fiber.
FIG. 3 depicts an SEM picture of an array nanostructure of nanopillars at two different magnifications.
FIG. 3A depicts an example of a non periodic relief structure.
FIG. 4 depicts a ceramic ferrule attached to an optical fiber.
FIG. 5 depicts a front end detection configuration.
FIG. 6 depicts a remote end detection configuration.
FIG. 7 depicts steps to fabricate an array structure on an optical fiber by lithography.
FIG. 8 depicts an optical fiber and ferrule attached to a spin coater chuck.
FIG. 9 depicts an optical fiber fitted to a photolithographic set-up.
FIG. 10 depicts a metal coating on a nanopillars array on an optical fiber, with a functional layer on the metal coating.



SUMMARY
According to a first aspect, a structure for detecting molecules is provided, comprising: a planar facet end of an optic fiber; a nanoscale structure on the planar facet end; a metal covering the nanoscale structure.



DETAILED DESCRIPTION
Raman scattered light is considered a chemical signature of chemical and biological molecules since all molecules with unique chemical compositions have unique Raman scattering spectra. Raman scattering spectroscopy is thus a powerful technique to detect chemical and biological molecules without labeling and has potential applications in high-sensitivity detections of explosives, pathogens, and contaminants in the field. Unfortunately, Raman scattering is an extremely inefficient process due to its weak sensitivity as compared to other scattering mechanisms—roughly only 1 in 108 photons ends up in Raman scattering (Jarvis and Goodacre, 2004 Anal. Chem 76 40)—and also due to typical lower scattering cross-sections of the Raman process (about 10−30 cm2), which is around 15 orders of magnitude lower than fluorescence emission (Vo-Dinh et al., 2002 J. Raman Spectrosc. 33 511). In order to get a detectable Raman scattering signal, it is necessary to use an array of filtering techniques or to enhance the Raman scattering process. The latter of the two can be achieved using surface enhanced Raman scattering, which is also known as surface enhanced Raman scattering spectroscopy or surface enhanced Raman spectroscopy. For the sake of clarity, throughout the present disclosure, the term “SERS” intends to indicate surface enhanced Raman scattering.
Surface-enhanced Raman scattering (SERS) is a powerful spectroscopic technique for molecular detection due to its high sensitivity and molecular specificity. SERS can provide a nondestructive and ultrasensitive detection technique which is effective down to a single-molecule level. SERS is able to give a molecular “fingerprint” information with high sensitivity. As part of the standard set-up for this technique, optical fibers have been used as SERS probes because of their low cost, flexibility, compactness, and remote sensing capability. In the present disclosure, fabricating a nanoscale structure on a facet end of an optical fiber enables the nanoscale structure to be used as a probe to detect molecules by surface-enhanced Raman scattering. The close integration of the optical fiber with the nanoscale structure may include several advantages, one being an enhancement in detection of the SERS signal.
The nanoscale structure may be fabricated by different methods, and may comprise a periodic array, such as an array of nanopillars; it may also comprise a non periodic, or even random, surface-relief pattern. The longitudinal axis of the periodic array, or the average vector of the longitudinal axis in a random relief pattern, may be substantially aligned to the longitudinal axis of the optical fiber. For example, the axis of an array of nanopillars may be aligned to the longitudinal axis of the optical fiber. As another example, if the surface-relief pattern comprises a number of irregular, elongated, ellipsoidal shapes, such shapes might be randomly aligned (or non aligned) to each other, or they might be elongated approximately in the same direction. The average direction of such random relief patterns, or of regular, periodical arrays such as an array of nanopillars, may also be aligned at a specific angle to the longitudinal axis of the optical fiber, depending on the requirements of a specific set-up used to detect specific molecules by SERS.
An example of a random surface-relief pattern that may be fabricated on an optical fiber for SERS application can be found in Hobbs (U.S. Pat. No. 8,187,481 B1), incorporated herein by reference in its entirety. Hobbs describes a surface-relief structure consisting of a random distribution of surface features with varying feature profile and depth. The random texture of Hobbs suppresses reflection of electromagnetic waves. A similar relief pattern, if coated with a metal layer and fabricated on an optical fiber, might enable surface enhanced Raman scattering with, for example, better signal-to-noise ratios, as it could decrease unwanted reflection of the incident light used in the SERS detection technique. In general, any method that can be used to create a ‘moth's eye’ or nanoscale antireflection surface structure on a fiber facet may also be used to create similar features that may be suitable for SERS devices when coated with a metal film.
An example of a fabrication technique to be used for realizing nanoscale structures for SERS detection might include, in one embodiment, the application of interference lithography, enabling fabrication of a periodic array structure on an optic fiber, which can be used as a probe to detect molecules by surface-enhanced Raman scattering. Interference lithography, as known by those skilled in the art, is the creation of an interference pattern with a single source of light (whose beam can be divided into at least two beams) or with at least two sources of light. An example of a source of coherent light for interference lithography might be a laser.
FIG. 1 depicts a schematic cross sectional point of view of one embodiment of the present disclosure, where a number of periodically spaced elements (105) forms an array structure, the structure fabricated on one end of an optical fiber (110). The spacing between pillars could be adjusted for optimal SERS detection; for example, it could be about 300 nm. By way of example and not of limitation, in one embodiment the optical fiber conveys the light of a laser (115) from the optic fiber towards the array structure at the tip of the optic fiber, and also in the opposite direction, away from the array structure and into the optic fiber. In one embodiment, the array structure is formed by a number of nanopillars with axis parallel to each other. The axis of each nanopillar is substantially aligned with the longitudinal axis of the optical fiber. The nanopillars may be of the same material of the optic fiber (for example, obtained by etching the fiber), or they may be of a different material. In another embodiment, the nanopillars may be of the same material of the optic fiber, and coated with a different material, for example a metal.
In one embodiment, the nanopillars are fabricated by interference lithography, through the use of coherent light creating interference patterns onto a photoresist. By way of example and not of limitations, some exemplary methods of fabrications for array structures suitable for SERS are described in a previous disclosure (US 2011/0128536, incorporated herein by reference in its entirety).
Referring now to FIG. 2A, in one embodiment of the present disclosure a method is provided to fabricate an array structure at an end facet of an optical fiber. First, an optical fiber is provided, suitable for a SERS measurement; for example, a standard silica multimode optical fiber can be used. One end facet of the optical fiber (210) is covered in an antireflection coating (230), an advantage of the coating (230) being to limit unwanted back-reflection. Such coating might be applied, for example, by spin coating, a method well known to those skilled in the art. The antireflective layer (230) is an optional layer which serves to improve the effective resolution of the photoresist layer (220) interaction with the light source by reducing or removing the reflection from the substrate (210). Then a photoresist (220) is deposited on the antireflective coating (230). Several standard methods exist to apply photoresist to a surface, for example nozzle spraying or spin coating; in one embodiment, spin coating is used to apply the photoresist (220).
The photoresist (230) is subsequently defined by interferometrically-arranged laser beams, forming an array pattern on the photoresist (220). Photolithography techniques are well known in the art and might include several substeps; for example, the photoresist layer might actually be composed of two different photoresist layers. FIG. 2B depicts the result of the interference lithography step which creates an array pattern, prior to the development of the photoresist. Development is a standard process well known as such to those skilled in the art, typically consisting of a solution designed to wash away selected parts of the photoresist. After the photolithography light exposure by the interferometrically-arranged laser beams, some parts of the photoresist (240) become more resistant to development and other parts of the photoresist (245) become less resistant. For example, the parts (240) might be crosslinked while the parts (245) might not.
FIG. 2C depicts a perspective view of FIG. 2B, showing a pattern for an array of nanopillars, with parts (240) of the photoresist more resistant to development, and parts (245) of the photoresist less resistant to development.
In a next step, depicted in FIG. 2D, the photoresist is developed, leaving a photoresist array of nanopillars (240), on top of the antireflection coating (230) and the optical fiber (210).
Subsequently, as depicted in FIG. 2E, the antireflective coating (230) and the portion of the optical fiber (210) adjacent to the antireflective coating are partially removed by a removal process such as ion milling, reactive ion etch, or wet etch. The parts of the optical fiber (210) and of the antireflective coating (230) covered by the array of photoresist pillars (240) are protected while the exposed parts of the planar substrate (210) and of the antireflective coating (230) are removed.
As depicted in FIG. 2F, by continuing the removal process, the photoresist (240 in FIG. 2E) is completely removed and only the antireflective coating (230) and the end facet of the optical fiber (210) remain. During the removal process, portions of the upper surface (215) of the optical fiber (210) are removed as well. As the removal process continues longer still, the antireflective coating (230) is removed completely, and only the optical fiber (210) remains, as depicted in FIG. 2G. In FIG. 2G, an array of nanopillars (216), made entirely of the material of the optical fiber (210), is now present.
As depicted in FIG. 2H, in a further step a layer of metal (217) is deposited onto the array of nanopillars (216) on the optical fiber (210). By way of example and not of limitation, silver might be deposited by e-beam on the nanopillars (216). The metal coverage of the nanopillars (216) might not be complete. The metal layer of FIG. 2H is intended as an example. Due to the fabrication process, or because of a deliberate choice to enhance the SERS signal, the metal might be covered at angle to the longitudinal axis of the nanopillars, thereby more metal might be present on one side of the pillars, relative to the other side, or the metal layer might not be continuous. For example, little to no metal might be present on certain or all sides of the nanopillars. As a further example, little to no metal might be present on the surface of the optical fiber between the nanopillars.
By way of example and not of limitation, the metal coating can be selected from the group consisting of: silver, gold, aluminum, iridium, platinum, palladium and copper.
FIG. 3 depicts two scanning electron microscope (SEM) pictures, at different levels of magnifications, of an embodiment of the present disclosure, where the array is formed by nanopillars patterned onto an optic fiber.
FIG. 3A depicts an example of an embodiment of the disclosure with a random surface-relief pattern.
Referring now again to FIG. 1, the optical fiber (110), whose end facet has, in this embodiment, an array of nanopillars (105) (which may be coated in metal), can be used as a sensing probe to detect the presence of molecules (120), both chemical and biological. The sensing is carried out through surface-enhanced Raman scattering. Typically, the molecules (120) are adsorbed onto the surface. By way of example and not of limitations, a trans-1,2-bis(4-pyridyl)-ethylene (BPE) monolayer could be detected by the sensing probe. In another example, toluene vapor could be detected. Both examples have been described as such in a previous disclosure, X. Yang et al., Optics Express, Vol. 20, Issue 22, pp. 24819-24826 (22 Oct. 2012), which is incorporated by reference herein in its entirety, and referred to from now on as Yang.
To build a highly integrated optical SERS sensing system for practical applications, it is desirable to fabricate the SERS substrate on the facet of an optical fiber. The main challenge during fabrication is how to control the position and orientation of the fiber tip in the processes of spin coating, lithography, etching, and vapor deposition, such as those described in one embodiment of the present disclosure (in FIGS. 2A-2H), as the fiber has a small diameter and a large aspect ratio. For example, the optical fiber used in Yang had a 50 μm core diameter and a 125 μm cladding diameter, while a typical length was 10 cm.
As depicted in FIG. 4, a ceramic ferrule (405) can be attached at one end of the fiber (410) for processing and fabrication of the nanoarray. FIG. 4 includes an SEM image of the ceramic ferrule (405) and the optical fiber (410).
As described in Yang, as an example embodiment of the present disclosure, a standard silica multimode optical fiber (OFS Fitel, LLC., model: BF06864, NA=0.22), with a 50 μm core diameter and a 125 μm cladding diameter, was attached to a custom-made ceramic ferrule. The fiber facet with the fiber ferrule was first spin coated with a 260 nm thick antireflection layer and then coated with a 700 nm thick photoresist. The nanopillar array was then fabricated onto the fiber facet by interference lithography by laser light. The laser wavelength for interference lithography was 413 nm and the dose was around 80 mJ/cm2. The resultant photoresist pattern was a two-dimensional periodic nanopillar array with a 317 nm pitch and a 160 nm pillar diameter. An ion milling deep reactive ion etching step was used to remove the antireflection layer between the photoresist nanopillars (mask), after which the unprotected silica area was etched down to 600 nm and then the residual photoresist mask on the top of the nanopillars was washed away. Finally a 60 nm layer of silver was e-beam evaporated at a deposition rate of 0.1 nm/s onto the fiber facet at an angle of 60° to make it SERS-active. Experimentally, several deposition angles (relative to the longitudinal axis of the fiber) for the e-beam were tested, such as 0°, 30°, and 60°. In Yang, the 60° deposition angle resulted in the best SERS signal, however it will be obvious to those skilled in the art that the optimal deposition angle might vary depending on different factors, for example (and not limited to) the set-up configuration, the materials used, and the specific molecules to be detected. The present disclosure is not intended to be limited to any one specific angle of deposition for the metal layer.
Those skilled in the art will realize that different types of nanostructures could be fabricated, and the described embodiment is meant to provide an example and clarify the intended scope of the present disclosure, and is not intended as a limitation. For example, the method of using a ceramic ferrule for fabricating a nanostructure on the optical fiber is not limited to fabricating periodic structures such as the array of nanopillars, but may be used for other embodiments, with different fabrication techniques and different nanoscale structures.
In one embodiment, the size, gap width and height of the array of nanopillars are configured to enable surface enhancement of Raman scattering.
In another embodiment, the structure is comprised of nanorecesses. In yet another embodiment, the antireflection coating could be absent. The interferometry-lithography technique is intended as an exemplary technique of fabrication. Those skilled in the art will realize that a different technique of fabrication is intended to be within the scope and application of the present disclosure. In another embodiment, the antireflective coating and/or the metal coating layers are not continuous.
By way of example and not of limitation, for a SERS measurement using an array structure of the present disclosure, two exemplificatory configurations could be used. Referring to FIG. 5, a first configuration is denoted front end detection, in which a laser light (505) is focused directly by an objective lens onto the patterned fiber facet (510) (the facet with the nanoarray) of the optical fiber (515). A SERS signal (520), caused by the interaction with the molecules in the sample holder area (521), is collected via a backscattering geometry by the sensing apparatus (525) at the opposite, unpatterned, fiber facet (530).
Referring to FIG. 6, a second configuration is denoted remote end detection, in which the laser light (605) is coupled with the unpatterned fiber end (630) of the optical fiber (615). The laser light is propagated through the fiber to the remote patterned facet (610), and triggers a SERS signal (620) at the remote patterned facet (610) which is propagated back to the unpatterned end (630). In this second configuration, a SERS signal (620), from the molecules in the sample holder area (621), is collected from the distal (patterned) fiber end (610) and coupled back to a sensing apparatus (625) (for example, a Raman spectrometer) at the unpatterned facet (630) of the optic fiber (615).
In another aspect of the present disclosure, the optical fiber sensing probe, for example that of the embodiments described in FIG. 1, is characterized by a method using a front end detection, the method comprising focusing laser light onto the array of nanopillars, which constitutes a surface-enhanced Raman scattering (SERS) probe. As the focused laser light is backscattered, the method further comprises collecting a SERS signal via a backscattering geometry and estimating an enhancement factor based on the front end detection technique, enabling a comparison between the standard Raman detection technique, and SERS technique.
In one embodiment of the characterization method, the enhancement factor (EF) is calculated using the follow expression:




  EF
  =
  
    
      
        I
        SERS
      
      ⁢
      
        
      
      ⁢
      
        P
        Raman
      
      ⁢
      
        
      
      ⁢
      
        N
        Raman
      
      ⁢
      
        
      
      ⁢
      
        P
        Raman
      
    
    
      
        I
        Raman
      
      ⁢
      
        
      
      ⁢
      
        P
        
          SERS
          ⁢
          
            
          
        
      
      ⁢
      
        N
        SERS
      
      ⁢
      
        
      
      ⁢
      
        P
        SERS
      
    
  




where ISERS is the SERS intensity, IRaman is the Raman intensity; PSERS and PRaman are the laser power for SERS measurement and Raman measurement respectively; TSERS and TRaman are the integration time for SERS measurement and Raman measurement respectively; NSERS and NRaman are the number of molecules involved for SERS measurement and Raman measurement, respectively. As described in a previous disclosure, X. Yang et al., Optics Express, Vol. 20, Issue 22, pp. 24819-24826 (22 Oct. 2012), an enhancement factor EF=1.2×107 has been measured for the nanostructure of FIG. 3.

Generally, the remote end configuration is more useful in sensing applications, while characterization from the front end configuration provides a more direct measurement of the enhancement factor (EF) of the SERS substrate itself to give an indication of the quality and performance of the substrate. The present disclosure, however, is not intended to be limited to the front end or remote end configurations, as either could be used for any purpose, and another possible configurations might be used as well.
During fabrication of a nanostructure on an optical fiber it may be challenging to perform several of the fabrication steps, for example fixing an optical fiber on a spin coater, or keeping its longitudinal axis perpendicular to the photolithographic sources of light. In one embodiment of the present disclosure, a method is provided to fabricate a nanostructure on an optical fiber.
As shown in FIG. 7, an exemplary method comprises several steps. First, a standard optical fiber is obtained and the fiber is potted into a ferrule (710), using epoxy, for example, and the fiber facet polished and cleaned (720) along with the ferrule. A purpose of the polishing and cleaning step (720) may be to obtain a clean and flat surface, in order to evenly apply any necessary coating as well as limit light scattering by imperfections, during subsequent lithographic steps.
Next, the optical fiber with the ferrule can be fitted on a spin coater (730) as shown in FIG. 8.
This step (730) is described in detail referring to FIG. 8: the fiber end with the ferrule (810) can be press-fitted onto an adapter (820) such that the end to be coated (830) protrudes from the adapter (820). The assembly comprising the fiber and ferrule (810) and the adapter (820) can be mounted on a spin coater chuck (840) in such a way that the remaining part of the fiber (850) is inserted into the hollow shaft in the chuck which is also the vacuum supply line (860). Tape (870) can be used to make a vacuum-tight seal between the ferrule (810) and the hole in the adapter (820). An O-ring (880) can ensure a vacuum seal between the vacuum chuck adapter (820) and the vacuum chuck (840). There may also be a shaft seal (890) to seal the vacuum line (860).
Referring back to FIG. 7, a layer of absorbing (anti-reflective) film can be applied (740) to the fiber facet fitted to the spin coater. The application step (740) of the film may comprise, for example, spinning on the film, dismounting the fiber/ferrule assembly and curing the film by baking. This film can reduce back scattering during subsequent lithography steps. The fiber/ferrule assembly can be then be fitted again on the spin coater. Subsequently (750) a photoresist layer can be applied. The application step (750) for the photoresist may comprise, for example, spinning on the photoresist, dismounting the fiber/ferrule assembly and curing the photoresist by softbaking. Those skilled in the art will realize that a different coating procedure may be used, such as nozzle spraying.
Those skilled in the art will know that standardized film thickness for spun-on layers is normally provided, depending on several parameters, for example the rotational speed of a spin coater. However, due to the unique set-up required to apply the films on a fiber facet, it may be advantageous to measure the thickness of the film, as the expected, standardized film thicknesses may not be correct. The film thickness may be important, as known in the art, when determining the amount of irradiation needed during photolithography. Thickness calibration with samples of the same form factor may be required to determine the thickness of the applied and baked film layers. Measurement of film thickness was very challenging given the small diameter of the fiber in the center of the ferrule. To ensure a correct calibration, Focused Ion Beam (FIB) milling was used to remove a portion of the film layers so that scanning electron microscopy (SEM) could be employed to measure the film thickness.
In the next step the optical fiber is fitted onto a photolithographic set-up (760) and subsequently the photoresist is exposed (770) to obtain a photolithographic pattern on the fiber end coated in photoresist. Steps (760) and (770) may be carried out, for example, by standard laser interference lithography methods by exposing the fiber end coated in photoresist to interfering beams from a coherent laser source of wavelength λ incident on the fiber face at angle +/−θ, generating a latent grating with period d=λ/[2 sin (θ)]. An exemplary setup is shown in FIG. 9.
Referring to FIG. 9, in one embodiment the fiber/ferrule (910) can be fitted on a holder (920) with a screw (930). The remaining part of the fiber (940) is coiled into the hollowed-out recess on the back side of the holder (920). The fiber and holder assembly (also called adapter) (945) is then fitted onto the photolithographic set-up (950).
The photolithography set-up of FIG. 9 comprises a laser beam (955) which is splitted (960) into two beams (962, 964). The two beams converge onto the fiber/ferrule (910) fitted onto the adapter (945). Standard optical elements may be used as part of the photolithographic set-up, such as collimating lenses and minors.
After exposure of the photoresist a latent grating pattern of parallel lines is present into the photoresist layer on the fiber face; the adapter (945) is then rotated 90 degrees and another exposure carried out, to write a latent grating orthogonal to the first. The intersection of the nulls of the interference fields generates a periodic two-dimensional pattern (such as that of FIG. 2C). In other words, the intersection of the two orthogonal grating patterns of parallel lines defines a periodic pattern which can used to create nanopillars in the subsequent steps. This concludes step (770) of FIG. 7.
Referring back to FIG. 7, the next step is development and etching (780). The intersection of the nulls of the interference fields during exposure (770) has generated a periodic two-dimensional pillar array in the positive photoresist after the development step (780). Development can be carried out with a liquid base solution. In one embodiment, the periodic pattern can be transfer-etched into the silica fiber face first by etching through the absorbing layer, then etching into the bulk material of the fiber facet to the desired depth (see FIG. 2E). The photoresist and absorbing layer can be chemically removed, concluding the development and etching step (780) of FIG. 7.
In the last step (790), the periodic pillar array on the fiber end can be overcoated with metal (see FIG. 2H). Those skilled in the art will realize that the listed steps are exemplificatory and that different variations may be employed according to the present disclosure. For example, a different method to apply the photoresist (750) or the antireflective coating (740) may be employed (such as nozzle spraying). Similarly, a different lithographic technique may be used in (760,770), and the pattern of exposed photoresist may be non periodic or random.
During exposure of the photoresist in (770), it may be desirable to avoid back reflection from the optical fiber onto the photoresist; that may be an advantage provided by the antireflective coating (740, and 230 in FIG. 2A). Another way to reduce back reflection may be to bend, with a small bending radius, the part of the optical fiber which is not fitted to the ferrule (940 in FIG. 9). Bending can induce losses in the light that manages to go through the antireflective coating and starts propagating along the length of the fiber. Furthermore an additional absorbing coating (i.e. black paint) might be applied along the length of the optical fiber to help absorbing the light propagating through the fiber, to help removing the undesired back-reflections. Step (770) corresponds to FIG. 2B. As described above, the method depicted from FIGS. 2B-2H may be the followed to obtain the desired nanostructure on the optical fiber facet. The steps in FIGS. 2B-2H are summarized in FIG. 7 as photoresist development and etching (780) and metal coating (790).
In a further embodiment of the disclosure, the structure described above, in any of its different embodiments, could be used for a different detection technique, to detect molecules. Such technique comprises surface plasmonic resonance.
Plasmonic resonance, as those skilled in the art know, is a fundamental mechanism that can generate a field enhancement on the metallic nanoreliefs, which can be responsible for enhancing the Raman signal of the molecules. The electromagnetic field of the nanostructure field is enhanced at certain wavelengths (resonances) and when a molecule or other chemicals or media is close to the metallic nanostructure, the resonant wavelength changes. This shift in wavelength can be detected with appropriate electronic equipment, providing a way to detect molecules. Surface plasmonic resonance is not specific to a molecule, but rather it is a generic technique which can detect molecules without specificity. Specificity could be added by additional molecular recognition methods. For example, a functional layer may be added on top of the metallic layer, to provide binding sites to specific molecules. Alternatively, the metallic layer could be the functional layer as well (for example, gold, which is known to provide binding sites to specific molecules). Yet another alternative, as an example and not for limitation, would be to have a functional layer comprising two components, for example nanoparticles and a binding agent.
FIG. 10 depicts an example embodiment of a surface plasmonic resonance detection nanostructure, where a functional layer (25) is added on top of a metallic layer (15), where the nanostructure (11) on an optical fiber substrate (10) are fabricated using one of the techniques and methods described herein above, in the present disclosure. The relative size and spacing of the nanostructure in FIG. 10 is not indicative of the real dimension and spacing.
For Surface Plasmon Resonance (SPR) detection a different measurement set-up would be needed, relative to Raman scattering, as it is understood by a person skilled in the art. For SPR a white light (encompassing wavelengths at least between 400 nm and 800 nm) may be used as a light source to illuminate the nanostructure through the optical fiber. A spectrometer may be used to detect the light diffracted from the nanostructure, or alternatively a monochromator may be used, by sweeping over the detection wavelengths to collect a signal at each wavelength in turn.
All patents and publications mentioned in the specification may be indicative of the levels of skill of those skilled in the art to which the disclosure pertains. All references cited in this disclosure are incorporated by reference to the same extent as if each reference had been incorporated by reference in its entirety individually.
It is to be understood that the disclosure is not limited to particular methods or systems, which can, of course, vary. It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” include plural referents unless the content clearly dictates otherwise. The term “plurality” includes two or more referents unless the content clearly dictates otherwise. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the disclosure pertains.
The examples set forth above are provided to give those of ordinary skill in the art a complete disclosure and description of how to make and use the embodiments of the surface enhanced Raman detection array nanostructure, and are not intended to limit the scope of what the inventors regard as their disclosure. Modifications of the above-described modes for carrying out the disclosure may be used by persons of skill in the separation and sensing of molecules, and are intended to be within the scope of the following claims.
A number of embodiments of the present disclosure have been described. Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the present disclosure. Accordingly, other embodiments are within the scope of the following claims.

## Claims

1. A method comprising:
providing an optical fiber having a planar facet end;
attaching a ferrule to the optical fiber adjacent to the planar facet end;
fitting the optical fiber with the ferrule on a spin coater;
coating the planar facet end of the optical fiber with the ferrule with a photoresist;
producing a pattern in the photoresist for a nanoscale structure by interference lithography;
developing the photoresist;
removing the photoresist and a portion of the optic fiber unprotected by the photoresist, thus obtaining a nanoscale structure in the optic fiber; and
depositing a layer of metal on the nanoscale structure.

2. The method of claim 1, wherein the nanoscale structure is a periodic surface-relief structure.

3. The method of claim 1, wherein the nanoscale structure is a non periodic surface-relief pattern.

4. The method of claim 1, wherein the nanoscale structure is a random surface-relief pattern.

5. The method of claims 2, wherein the relief pattern is configured to be antireflective.

6. The method of claim 1, wherein the nanoscale structure is an array of nanopillars on the planar facet end of the optical fiber, the array of nanopillars substantially perpendicular to the planar facet end.

7. The method of claim 6, wherein the nanopillars have a substantially cylindrical shape.

8. The method of claim 6, wherein the nanopillars have a substantially conical shape.

9. The method of claim 1, wherein a planar antireflective material is coated onto the facet of the optical fiber attached to the ferrule, prior to coating the photoresist, and the antireflective coating is removed during the step which removes the photoresist and a portion of the optic fiber.

10. The method of claim 1, wherein the removal process comprises ion milling or deep reactive ion etching or inductively coupled plasma etching or electron cyclotron resonance etching.

11. The method of claim 1, wherein the metal layer is deposited by e-beam or sputtering or thermal evaporation or chemical vapor deposition.

12. The method of claim 1, wherein the metal layer is selected from the group consisting of: silver, gold, aluminum, iridium, platinum, palladium and copper.

13. The method of claim 1, wherein the metal layer covers also the surface of the optic fiber between the nanopillars.

14. The method of claim 1, wherein the metal layer coverage is non-continuous.