### Accelerating Sustainable Manufacturing

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# Additions & Corrections: ISMI/SIA Alternative to Recipe Specific Testing of 17 Nov 2011 Laurie Beu Consultant to ISMI 

# Michael Haslam Predictum, Consultant to ISMI 

# February 1, 2012

# Contents

• This slides set contains

– One new slide.

– Corrections to the slides in the 17 Nov 2011 presentation.

2

# Added slides
– 18 Jan 2012

• With and without gas error on the three factor model is added to the current slide on “Etch Error Comparison 

# Across Models

– Industry Level” and a new slide is created.

3

# Etch Error Comparison Across Models

- Industry Level
– with and without error on 3 Factor Model

4 

## • The ISMI Refined 2 factor model achieves substantially better precision for etch than the earlier IPCC Tier 2b and EPA Tier 2c methods and is 

## better than the ISMI Refined 3 factor model.
Notes: Upper and lower % error are vs. etch total F
- gas.

ISMI Refined uses full set of single
- and multi
- gas byproduct data. Calculated, not published, emission factors.

# Corrections to slides
– 18 Jan 

# 2012

• Several corrections were made to the calculations, resulting in changes to the tables and data in slides 10, 11, 22, 23, 29, 30, 31, and 32. The corrected or updated slides are attached below and annotated with the respective slide numbers All relevant slides from the original 17 Nov 2011 presentation are replaced here. Some changes in the numbers in the various tables will be noted. The major change is gas usage, 300mm, 2010, 2 factor model. There are no changes in text or conclusions.

– Originally, C3F8 was not carried through the calculations, both for etch emissions and other emissions. It is now included.

– Lower and upper emission factors were calculated using 1.92 * standard error. This is corrected to 1.96 * standard error.

– The 2010 300 mm gas usage data input source for the 2 factor model had a formatting error, causing incorrect gas usage input values. The original data had missing gas usage. This has been corrected.

– There were two typos in the use of the byproduct emission factors for Wafer cleaning and CVD. These have been corrected. The total FGas use went up with these corrections. This means that the % that is etch and etch byproducts went down.

5

# Calculated Emission Factor 

# Tables
– 2 Parameter (partial view)

6 January 24, 2012 Replacement for Slide 11 in the 11/17/2011 Presentation

# Calculated Emission Factor 

# Tables
– 3 Parameter (partial view)

7 January 24, 2012 Replacement for Slide 12 in the 11/17/2011 Presentation

# Etch Error Comparison Across 

# Models - Industry Level

8 January 24, 2012 

## • The ISMI Refined 2 factor model achieves substantially better precision for etch than the earlier IPCC Tier 2b and EPA Tier 2c methods and is 

## better than the ISMI Refined 3 factor model.
Notes: Upper and lower % error are vs. etch total F
- gas.

ISMI Refined uses full set of single
- and multi
- gas byproduct data. Calculated, not published, emission factors.

Replacement for Slide 23 in the 11/17/2011 Presentation

# Etch Error Comparison Across 

# Models
– EF Data Level (partial)

9 January 24, 2012 

### • Gas usage at a facility level used to determine error based on std dev of the individual emission factors. Note: ISMI Refined uses full set of single
- and multi
- gas byproduct data.

Replacement for Slide 24 in the 11/17/2011 Presentation

# Comparison of Emissions by 

# Etch Model: Industry Level

10 January 24, 2012 

## • 300mm F
- gas emissions are substantially reduced compared to 200mm because lower F
- gas emission chamber cleans have been implemented at 300mm.

– Etch emissions are a higher percent of all F
- gas emissions at 300 mm. Note: ISMI Refined uses full set including single
- and multi
- gas byproduct data. Replacement for Slide 30 in the 11/17/2011 Presentation

# Comparison of Emissions for 

# Tier 3 Facilities Only

11 January 24, 2012 

### • For the 200mm fab, the ISMI 2 factor model is closest to the Tier 3 result.

• For the 300mm fabs, all four methods are similar in comparison to Tier 3.

• ISMI 2
- factor model has the best precision of the methods presented here.
Notes: Only facilities with Tier 3 data are used here as proxy for EPA Tier 2d. 200 mm: 1 facility 300 mm: 2 facilities ISMI Refined uses full set including single
- and multi
- gas byproduct data. Emissions are reported in MTCO2e.

Replacement for Slide 31 in the 11/17/2011 Presentation

# Etch Error Comparison Across Models: Tier 3 Facilities

12 January 24, 2012 

## • Tier 3 variability is driven by gas apportioning.

• The additional error introduced by apportioning offsets any gain in precision from the use of 3
- factor, Subpart I Tier 2d, and IPCC Tier 3. Notes: Only facilities with Tier 3 data are used here as proxy for EPA Tier 2d. 200 mm: 1 facility 300 mm: 2 facilities ISMI Refined uses full set including single
- and multi
- gas byproduct data. Emissions are reported in MTCO2e. Replacement for Slide 32 in the 11/17/2011 Presentation

# Byproduct Methodology Comparisons
– ISMI 2 Factor

13 January 24, 2012 

## • ISMI 2 factor includes single
- and multi
- gas byproducts data.



## • For comparison:

– New byproduct emissions factors are calculated using only single
- gas byproduct data (multi
- gas data excluded).

– Byproduct emissions are calculated.

Replacement for Slide 33 in the 11/17/2011 Presentation