# 1 

# SEPTEMBER12, 2011



# Test Report for the Enhanced FTIR Stack Sampling of Greenhouse Gases (GHG): Alternative Study for 40CFR98 Subpart I Reporting Requirements

Prepared for:

Dr. Raymond Merrill U.S. Environmental Protection Agency (EPA) Office of AirQuality Planning and Standards

Air Quality Assessment Division Research Triangle Park, NC 27711

Prepared by:

IMACC (Industrial Monitor & Control Corporation)

800 Paloma Drive, Suite 100 Round Rock, TX 78664

Texas Instruments, Incorporated (TI)

13350 TIBoulevard, MS 329 Dallas, Texas 75243

Texas Instruments contracted IMACC to test the stacks at the Dallas Texas facility to study the enhanced FTIR ability to measure the GHG emissions and validate to EPA Method 320.i

# 2 TABLE OF CONTENTS

i

# 1.0 Introduction

....................................................................................................................3 1.1 Summary of Test Program

.........................................................................................3 1.2 Gas Analytes

..............................................................................................................3 1.3 Validation and Testing Schedule

...............................................................................4 1.4 Key Personnel

............................................................................................................5 2.0 Source and Sampling Location Description

..................................................................5 3.0 Summary and Discussion of Test Results

....................................................................10 3.1 Objectives and Test Matrix

......................................................................................10 3.2 Enhanced FTIR Limits of Detection (LODs) and Field Detection Limits (FDLs)

..12 3.3 Enhanced FTIR Analysis Validation by Method 320

..............................................14 3.4 Enhanced FTIR Analysis of Stack Emissions, Including QA Gas Spiking

.............19 3.5 Determination of Stack Flow Rates

.........................................................................23 4.0 Samplingand Analytical Procedures

...........................................................................25 4.1 EPA Method 320 using Extractive Enhanced FTIR

................................................25 4.2 EPA Method 320 Enhanced FTIR Instrument Diagnostics

.....................................27 5.0 Quality of Sampling and Analytical Procedures

..........................................................28 5.1 EPA Method 320 Minor Deviations

.......................................................................28 5.2 EPA Method 1 and2 Minor Deviation at One Stack Location

..............................28

APPENDICES

A Process Operations Exhaust Flow Diagram

B FAB1 and FAB2 Exhaust Drawings and Operational Screens for FAB1, FAB2 and FAB3

C Stack Dimensions and Elevation

D Exhaust % Fan Speed and Pressure Charts

E Stack Flow Measurements(3

-2011 & 8

-2011),Gas Standard Certificationsand Mass Flow Controller Calibrations

F Test Data Provided Electronically

LIST OF TABLES

Table 1

-1 Compounds Included in the Enhanced FTIR Analysis Method.........5

Table 1

-2 Schedulesof Field Activities................................................6

Table 2

-1

-1 Total F

-Gas Mass Discharge for Each Fab Stack..........................8

# 3

Table 2

-1

-2 Fab Building Acid Exhaust System Characteristics.......................10

Table 3

-1 Enhanced FTIR Analytical Measurement Test Matrix....................12

Table 3

-2 Enhanced FTIR Detection Limits............................................14

Table 3

-3 Enhanced FTIR LOD Spike Results.........................................14

Table 3

-4 M320 Enhanced FTIR Validation Results of Low Concentration (< 50

ppbv) Fluorinated GHGs......................................................16

Table 3

-5 M320 Enhanced FTIR Validation Results of Moderate Concentration

(~500 ppbv) Fluorinated GHGs..............................................18

Table 3

-6 M320 Enhanced FTIR Validation Results of High Concentration (up to

tens of ppmv) GHGs...........................................................19

Table 3

-7 M320 Enhanced FTIR QA/CTS Results of Multiple F

-GHGs

..........22

Table 3

-8 Stack Flow Rates Measured by EPA Method 2............................23

Table 3

-9 Total F

-Gas Mass Discharge for Each Fab Stack..........................24

LIST OF FIGURES

Figure 2

-1 Typical interconnections between the Fab supply gases and the POU

abatement unit..................................................................9

Figure 3

-1 Enhanced FTIR Spike Test over Ambient Air.............................15

Figure 3

-2 Enhanced FTIR Validation Run at Moderate Concentration Spike

Levels...........................................................................20

Figure 4

-1 Enhanced FTIR Field Gas Spiking and Stack Sampling

Configuration..................................................................26

# 4

1.0 Introduction

1.1 Summary of Test Program

The US Environmental Protection Agency (EPA), including the office of Air Quality Planning and Standards (OAQPS) and the Emission Factor and Inventory Group (EFIG), is responsible for developing and maintaining air pollution emission factors for industrial processes. The EPA, in collaboration with SEMATECH, is presently studying greenhouse gas (GHG) emissions associated with the semiconductor industry. The purpose of this test program is to develop, validate and report results from a measurement method designed to determine the quantity of GHG emissions at very low (sub

-ppbv) to moderate (tens of ppmv) levels from the stacks of semiconductor manufacturing facilities. The method is instrumentally based on enhanced form of extractive Fourier Transform Infrared (FTIR) spectroscopy,and follows the same procedures as the conventional FTIR stack sampling so that EPA Method 320 protocols can be followed. The primary objective is to qualify a stack measurement method that would satisfy the reporting requirement under a revised Subpart I to 40 CFR Part 98.

The analytical method validation and testing reported herein was conducted atthe Texas Instruments (TI) multiple wafer fabrication (fab) facility in Dallas, Texas. Stack emissions were measured via EPA Method 320 and evaluated at the following fabs: 1. Two stacks at the 300 mm wafer production fab (FAB1) 2. One stack at a 200 mm waferproduction fab (FAB2) 3. Two stacks at a 200 mm wafer production fab (FAB3)

Stack exit air flow rates were also characterized via EPA Methods 1 and 2 to allow for the conversion of volumetric concentrations to mass emission rates. Primarily fluorinated GHGemission rates, along with pertinent nonfluorinated GHGs, semiconductor process by

-products and combustion by

-products from point

-of

-use (POU) abatement devices1



# , were all included in the enhanced FTIR analysis method in order to accurately characterize stack emissions.

1.2 Gas Analytes

The focus of this test program is to validate and report the all

-encompassing stack emissions pertaining to fluorinated GHGs and N2

# O from FAB1, FAB2 and FAB3. The sample matrix at each stack was complicated by the presence of other process and POU by

-products, however, predicating the need to include all of the gaseous compounds listed in Table 1

-1 in the enhanced FTIR analysis method. Ten of these compounds were validated, per procedures detailed in Section 13 of EPA Method 320 (M320), and therefore are the ones reported/discussed in Section 3 of this report. Those ten are indicated in Table 1

-1.

1 

# Exhaust f

rom some of the semiconductor process tools, especially Chemical Vapor Deposition (CVD) chambers,, were treated by POU abatement devices. These emissions are combined with the plasma etch and thin film tool emissions before exiting the stacks.

# 5

Table 1

-1. Compounds Included in the Enhanced FTIR Analysis Method.

Formula Name; Description Validated by M320?

C2

# F6 

# Hexafluoroethane; process gas and plasma by

-product Yes

CF4 

# Carbon Tetrafluoride; process gas and plasma by

-product Yes

CHF3 

# Trifluoromethane; process gas and plasma by

-product Yes

NF3 

# Nitrogen Trifluoride; chamber clean process gas Yes

SF6 

# Sulfur Hexafluoride; process gas Yes

N2

# O Nitrous Oxide; process gas and POU combustion by

-product Yes

cC4

# F8 

# Octafluorocyclobutane; process gas Yes

C3

# F8 

# Perfluoropropane; process gas Yes

CH2

# F2 

# Difluoromethane; process gas and plasma by

-product Yes

C4

# F6 

# Hexafluorobutadiene; process gas Yes

C5

# F8 

# Octafluorocyclopentene; process gas No

CH4 

# Methane; POU process gas No

COF2 

# Carbonyl Fluoride; plasma by

-product No

SiH4 

# Silane; process gas No

SiF4 

# Silicon Tetrafluoride; plasma by

-product No

C2

# H4 

# Ethylene; POU combustion by

-product No

CO2 

# Carbon Dioxide; combustion by

-product, stack gas

component No

H2

# O Water; from aqueous scrubbers No



# Only a few other fluorinated gases (F

-Gases), such as C5

# F8

# and C4

# F8

# O (not listed in the table), are potentially utilized as plasma fluorine sources for semiconductor processes. C4

# F8

# O was not included in the enhanced FTIR analysis method for this test program because it is not used at TI. C5

# F8

# was included qualitatively because it is sparingly used at TI. A certified standard was not available for C5

# F8

# at the time of testing for validation of analysis method accuracy, but it was confirmed not to be present (above instrument sensitivities) during testing at each stack.

1.3 Validation and Testing Schedule

Table 1

-2 provides an outline ofthe field activities performed throughout the test program. The field project required a little over two weeks to complete (July 25, 2011 through August 9, 2011).

# 6

Table 1

-2. Schedule of Field Activities.

Date Activity

7/25/11 Transport equipment to TI;begin setup

7/26/11 Complete setup; run diagnostics and limit of detection (LOD) tests

7/27/11 Method 320 validation runs at low (< 25 ppbv) concentrations

7/28/11 Complete low conc. validations; start high conc. (<1 ppmv) validations

7/29/11 Completehigh conc. validations

7/31/11 Start Method 320 validation runs for NF3

# /N2

# O

8/01/11 Complete NF3

# /N2

# O validations; start 24

-hr emissions test at FAB1, stack1

8/02/11 Complete test at FAB1, stack1; start 24

-hr emissions test at FAB1, stack2

8/03/11 Complete test at FAB1, stack2; move to FAB2, stack1

8/04/11 Start 24

-hr emissions test at FAB2, stack1

8/05/11 Complete test at FAB2; move to FAB3 and start 24

-hr test at FAB3, stack1

8/06/11 Complete test at FAB3, stack1

8/08/11 Move to and start 24

-hr emission test at FAB3, stack2

8/09/11 Complete test at FAB3, stack2; transport equipment back to IMACC

Also, EPA Method 2 was performed at each stack (from 8/2/11

–8/9/11) to characterize air flow

rates.



# 1.4 Key Personnel

This test program was carried out as a collaborative effort amongst the following entities:

 Industrial Monitor and Control Corporation (IMACC): FTIR system manufacturer that developed the enhanced FTIR method and performed the analytical testing activities at TI (Principal Investigator, Curtis Laush Ph.D, claush@imacc

instruments.com)

 SEMATECH: a semiconductor industry research consortium

 Texas Instruments: a SEMATECH member and the test site location; provided all facility resources and process information (Senior Engineer, Tina Gilliland P.E., t

gilliland@ti.com)

 U.S. EPA, Office of Air Quality and Planning Standards, Raymond Merrill Ph.D

2.0 Source and Sampling Location Description

2.1 Process Description

Integrated circuits are manufactured in a continuous series of progressive and repetitive material composite and layering processes that embed, pattern, isolate, connect, and protect the elements of solid state electronics. The process begins with preparing and polishing one side of round, single crystal silicon wafers to removeall imperfections.

# 7

The reverse side is finely ground to produce a flat material approximately 25/1000 of an inch thick. This silicon wafer is cycled repeatedly through a series of high temperature oxidation, diffusion, chemical vapor deposition, and metallization processes until the circuit composite is complete through the passivation process. All wafers qualified through passivation are routed to the backgrinding process where thickness is removed from the backside of the wafer. This process lowers the wafer resistance, removes surface damage, and permits the final chip of circuitry to conform to industry packaging specifications. During this series of operations, various acids, caustics, gases, and solvents are used for cleaning, etching, material deposition and implantation, and photographic processing of the silicon wafers. The exhausts from this integrated circuit manufacturing operation are divided into four dedicated exhaust streams: solvent, acid,

ammonium hydroxide, and general. Refer toAppendix A for an example fab process operations exhaust flow diagram.

Texas Instruments (TI) has semiconductor manufacturing “fabs” that use fluorinated process gases primarily in equipment referred to as “tools.” Most commonly, there are two types of tools that are in use at TIthat utilize fluorinated process gases: Chemical Vapor Deposition (CVD) tools and plasma etch tools. In both cases the process feed

-gases are introduced into a reaction chamber where a plasma causes the gases to undergo partial orfull decomposition and/or transformation. The extent of the decomposition of these gases depends on the type of process. For example, NF3

# in a CVD chamber plasma

-clean processes can have ~90% decomposition, whilein plasma etch

processesit may be only10%. The decomposition for a particular gas is strongly related to the bond strengths of the component molecules as well as to the plasma reaction chamber conditions.

Fab operations are conducted 24 hours per day seven days per week. The TI Dallas facility is a large semiconductor site with multiple wafer fab operations.ThreeTI fabs, eachwith multiple toolsare the subject ofthis report. The plasma etch and CVD chamber

-clean processes are conducted as batch operations lasting a few minutes at a time.However, they are run in rapid succession on a large number of tools.A fab typically produce hundreds to thousands of wafers each day with each wafer requiring perhaps100individual plasma etch operations. As a result, thecombinations of exhausts fromall concurrent operations tendto make the overall fab emissions look nearly continuous.From a similar study performed earlier in 2011,Table 2.1.1 shows the total stackdischarge flow andcalculated mass discharge from the average of theF

-gas

concentrations in a 24 hour period for each of the fab’s stacks tested

.

# 8 Table 2

-1

-1 TotalF

-Gas Mass Discharge for Each FabStack

(Kilogramsin 24 hours)

Wafer Fab Total

Flow, dscfm SF6 

# C3

# F8 

# C2

# F6 

# CHF3 

# CF4 

# NF3 

# C4

# F8



# Fab1 Stack1 90782 0.15 0.21 0.39 0.55 2

.39 2.82 ND* Fab1 Stack 2 58940 0.01 ND 0.50 0.72 4

.58 2.75 ND Fab2 Stack 1 81209 0.02 ND 22.0 0.45 4

.61 ND ND

Fab3 Stack 1 88965 1

.45 1

.09 5.17 0.82 2.74 0.14 0.74 Fab3 Stack 2 52292 0.01 5.92 13.79 0.22 7.33 0.27 ND 

# *ND is NotDetected

.



# 2.2 Control Equipment Description

The fabs have two types of emission control systems: “house” or end

-of

-pipe (EOP) scrubbers external to the fab and “point

-of

-use” (POU) abatement2

# at the individual tools. The POU abatement systems employ thermal oxidationtechnology coupled with wet scrubbers.The thermal oxidization portion breaks down some of the fluorinated gases formingsome inorganicgasesand other byproducts. Those compounds that are water solubleareabsorbed by the wet scrubber at typically 90% or better efficiencies. Any remaining process gasesincludingF

-gasesare usually unaffected by thePOU scrubberand the subsequentEOP scrubber.

Several different models of POU devices are in useat TI and they have varying destruction efficiencies.POU abatementdevices aregenerally installed on the CVD process tools. N2

# O is not targeted for POU abatement in any of the fabs to avoid formation of NOx.CF4

# is not abated in thePOU thermaloxidizers because additional combustion gasessuch as excess oxygenare requiredandare not available at theseTI fabs. The typical gas flowin a fab and througha typical POU system is shown schematically in Figure 2.1.1.

All streams from the POU devicesas well as those coming directly from the tool, pass to a series end

-of

-pipe scrubbers outside the fab. Table 2.1.2 shows the characteristics of the scrubbers for the three fabs at TI, Dallas. By way of example, FAB1 has two stacks and 6 scrubbers. Thefirst four scrubbers are routed to stack 1 and remaining two on stack 2.Detailed schematic flow diagrams for the stacksforFab 1 and Fab 2 are provided as examples inAppendixB and also each fab’s exhaust operational schematic.

2 

# The POU abatement systems were installed voluntarily

.

# 9

Figure 2

-1. Typical interconnections between the Fab supply gases and the POU abatement unit

.

# 10 Table 2

-1

-2. Fab Building Acid Exhaust System Characteristics

.

Wafer Fab Wafer Diameter StackNo. No. of Scrubbers No. of Fans Total flow dscfm Fab1 300mm 1 4 3 90782 Fab1 300mm 2 2 2 58940 Fab2 200mm 1 4 4 81209 Fab3 200mm 1 5 4 88965 Fab3 200mm 2 4 4 52292



# 2.3 Exhaust Gas Sampling Locations



# The exhaust gas sampling locations for each stack testing are depictedinAppendixC diagramsalong with thestack heightandelevation. The stacks are typically fitted with four sampling ports approximately 90 degrees apart and the ports are typically 4

-inchesin diameter. The diagrams showthe distance from the last disturbance to the sample ports andthe downstream and upstream distances.FAB 2 Stack 1 is slightly less than 2 duct diameters downstream of the flow disturbance see AppendixC. This deviation is discussed in Section 5.2 of thereport.

# 11

3.0 Summary and Discussion of Test Results

3.1 Objectives and Test Matrix

The primary purpose of the test program was to develop, validate and report results from an enhanced FTIR measurement methodthat has been specificallydesigned to quantify GHG emissions at sub

-ppbv to ppmv concentration levels from semiconductor fab stacks. The specific analytical measurement objectives can be summarized as follows:

 Determine the instrumental limits of detection (LODs) of the ten target analytes listed in Table 1

-1 as being validated by EPA Method 320 procedures. The field detection limits (FDLs) of the target analytes can then be estimated from actual stack sample data for comparison.

 Validate the enhanced FTIR measurement accuracy of the ten target analytes, per EPA Method 320 Section 13 gas spiking procedures, in a representative stack gas matrix and over applicable dynamic measurement ranges.

 Report enhanced FTIR measurement results for the 24

-hour monitoring periods, including pre

-test and post

-testQA and calibration transfer standard (CTS) gas spikes, at each stack.

 Empirically determine stack exhaust gas flow rates by EPA Methods 1 and 2.

 Analyze each of the five stacks was sequentially and treat as similar sources. The enhanced FTIR analysis method provides24

-hours of repetitive measurements, rather than replicate samples. Averaging of the fluorinated GHG emissions, as derived from the data set, can be done in any desired duration (hourly, 8

-hours, 12

-hours, etc.). Exhaust pressure and % exhaust fan speedwill bemonitored during the stack testtodemonstratestability in the exhaust flow(see AppendixD for these results)

.

Table 3

-1 presents the analytical test matrix. It summarizes the actual testing and gas spiking parameters utilized inthe field for this study. Expected gas spiking concentrations were determined empirically, via precise measurement (by mass flow meter) of the total sample flow through the enhanced FTIR system and precise delivery of the certified gas standards by mass f low controller. The expected spike concentration for a given analyte, excluding contribution from its native concentration in the sample stream, is thus calculatedusing the equation:

Raw spike concentration (ppb) = mass flow controller setting (sccm) /mass flow meter reading (sccm)*certified gas standard concentration (ppm) * 1000 (1)

The Method 320 validation and QA gas spike results were evaluated taking native stack concentrations into account. These data arepresented anddiscussed inSections3.3 and 3.4 of this report.

# 12 The calibration data sheets for the mass flow controllers and the mass flow meter used in the field are included in AppendixE. The gas standard certifications, obtained from the third party specialty gas manufacturers, are also included in AppendixE. The analytical accuracy of the gas concentrations in each cylinder was certifiedas +/

-5%.

# 13

3.2 Enhanced FTIR Limits of Detection (LODs) and Field Detection Limits (FDLs)

The measurement sensitivities of the enhanced FTIR system have been evaluated for this study on two different levels.

The limits of detection (LODs) characterize the instrument noise

-limited detection capabilities of the analysis method when quantifying the fluorinated GHGs, and N2

# O, simultaneously. The LODs were statistically determined by taking two times the standard deviation (for 95% confidence) of the quantitative values consecutively collected over an hour's duration of a series of noise equivalent absorbance (NEA) spectra.3 

# The ~12 NEA spectra used for the LOD assessments carriedRMS noise levels on the order of 0.04 mAU (4 x 10-5

# absorbance units), on average, over an approximate center region (1000

–1100 cm-1

# )of the quantitative analysis windows chosen for the target analytes. This system noise limit, in combination with the inherent infrared absorbance strengths of the target GHGs and increased cell path length associated with the enhanced FTIR system, lead to the LODs listed in Table 3

-2 for the ten GHGs validated by Method 320, plus C5

# F8



# .

The field detection limits (FDLs) of the enhanced FTIR analysis method take actual sample matrix variability and biasing into account, since a complex mixture of overlapping infrared absorbance features was always present over the spectral noise floor. The FDLs can be estimated from the quantitative analysis method software which, as a result of the K

-matrix4

# multivariate analysis routines, produces a set of mathematical residuals in a given spectral analysis region (one for each compound). Each residual represents a 2 * sigma “error bar” bracketing the measurement, and is also treated as a “worst case” detection limit if it exceeds the measurement value. In effect, the method residual estimates an analyte's FDL as dynamically influenced by all the otherinfrared signal attenuations from the stack sample matrix, whether by chemical absorption, aerosol scattering, sample flow turbulences, etc. Table 3

-2 lists representative FDLs for the target analytes with their associated LODs. The FDLs were averaged values derived from stack test data during periods the analytes were not detected

.CF4

# and CHF3

# were present at each stack at levels well above detection limits; therefore their FDLs need not be estimated. As anticipated, the FDLs were generally a factor of~5X greater than their respective LODs.

3 

# A NEA spectrum, for the purposes of this test program, is a field collected “zero” spectrum. It was generated by recording an enhanced FTIR background spectrum immediately followed by a sample spectrum, thenratioed together to produce an absorbance spectrum. Both background and sample were collected under the same conditions; humid ambient air flowing through the dryer

-sample cell assembly of the enhanced FTIR system at a comparable flow rate and pressure that stack gas samples were collected throughout the test program.

4

# K

-matrix is a multivariate analysis routine to produce a set of mathematical residuals for selected spectral analysis regions (one for each compound).

# 14

Table 3

-2. Enhanced FTIR Detection Limits.

Analyte LOD

(ppbv) Estimated FDL

(ppbv)

C2

# F6 

# 0.184 2.0

CF4 

# 0.596 n/a*

CHF3 

# 0.344 n/a*

NF3 

# 0.875 3.0

SF6 

# 0.031 0.1

N2

# O 952 2000

cC4

# F8 

# 0.420 0.8

C3

# F8 

# 0.404 1.5

CH2

# F2 

# 0.544 3.5

C4

# F6 

# 0.734 2.6

C5

# F8 

# 0.157 0.8 *These were always present at levels well above detection limits, therefore their FDLs need not be estimated.

Before stack testing commenced, a validation of analysis method sensitivity was performed by calibrated gas spiking of the certified fluorinated GHG mixture (gas standard #4 listed in Table 3

-1) into ambient air samples. A ~40 ppbv spike level was stepped down two times to a final ~8 ppbv spike level as the system ran continuously while sampling ambient air. Table 3

-3 summarizes the results obtained for the seven analytes tested. Percent recoveries for all the GHGs were verified to fall within the allowed 70

–130% range before stack testing was started. Figure 3

-1 graphically illustrates the spike results.

Table 3

-3. Enhanced FTIR LOD Spike Results (in ppmv; obs = observed, calc = calculated)

# 15

3.3 Enhanced FTIR Analysis Validation by Method 320

Before stack monitoring was performed at the five designated sources, the enhanced FTIR system was validated for measurement accuracy per EPA Method 320 Section 13. The first wet scrubber acid stack (FAB1, stack2) was considered representative of all the stacks in the test program, so certified gas standards containing fluorinated GHGs (and N2O) werespiked by calibrated flows at the closest point of sample extraction while carefully metering the analyzerflow rate. Since the native stack concentrations for the target analytes are at different levels,and displaysome variability because of processactivity5

# , thegas spiking was performed with settings categorized at three different levels. The spike parameters of each category are summarized in Table 3

- 1. Validation runs consisted of 12 sampling trials of gas spiked and unspiked pairs (for a totalof 24 independent “samples”) so that statistics could be calculated, per EPA Method 301 Section 6.3, which assessed measurement accuracy while taking the variability of native emissions into account.

Several of the targetF

-Gases (SF6

# , C4

# F8

# , C3

# F8

# , CH2

# F2

# , C2

# F6

# and C4

# F6

# ) were present in the stack emissions at low levels (less than 50 ppbv). So the first of the three

5 

# For the purposes of this report, variability means a collection of measurements resulting in a standard deviation from the mean, on the ~15 minute time scale resolution of the enhanced FTIR system.

# 16

spiking validation categories involvedspiking at concentrations under 60 ppbv. Table 3

- 4 summarizes the measurement results and M301 basedstatistics for the low concentration validation category. As shown, the accuracy for each analyte was good; the measurement bias (always < 15% of the calculated spike value) was considered statistically insignificant, so no correction factor was applied to subsequent measurements. A % recovery column for each analyte, that takes the native (unspiked) stack concentrations into account, is also included in the table to further illustrate accuracy and (especially) variability for each individual spiked/unspiked pair. It was calculated as such:

% Recovery = (MS

–US) / CS * 100 (2)

MS = FTIR measured concentration value while spiking;

CS = calculated spike concentration; from Eqn (1) of Section 3.1 in this report;

US = unspiked (native) contribution after dilution by spike gas, by calculation it is: FTIR measured unspiked conc * (1

–mass flow controller setting / mass flow meter reading)

Table 3

-4. M320 Enhanced FTIR Validation Results of Low Concentration (< 50 ppbv) Fluorinated GHGs (s = spiked sample, u = unspiked sample; concs are in ppbv)

# 17

Two of the target GHGs (CF4

# and CHF3

# ) were present in the stack emissions at moderate levels (less than ~500 ppbv), so a second validation category was to conduct the gas spiking at concentrations around 600 ppbv. Table 3

-5 summarizes the measurement results and M301 based statistics for the moderate concentration validation category. The low concentration compounds can also be validated at this spike level, so their results are included in Table 3

-5, as well. As shown, the accuracies for CF4

# and CHF3

# were good; the measurement biases were considered statistically insignificant, so no correction factors were applied to subsequent measurements. The accuracies for the other GHGs were generally good, even atmoderately high spike levels; measurement biases were statistically insignificant, except for C4

# F8

# , where slight correction factors would be necessary. However, emissions for C4

# F8

# were well below these concentration levels at any of the five tested stacks, so correction factors were not applicable. Percent recoveries for the spiked/unspiked pairs are also included in Table 3

-5 to further illustrate measurement accuracies and variabilities.

# 18

Table 3

-5. M320 Enhanced FTIR Validation Results of Moderate Concentration (~500 ppbv) Fluorinated GHGs (s = spiked sample, u = unspiked sample; concs are in ppbv)



# The final two available GHGs (NF3

# and N2

# O) were present in the stack emissions at moderate

-to

-high levels (a few hundred ppbv to tens of ppmv) and witha little more variability than the others, so the third validation category was to conduct the gas spiking at concentrations of 1

–10 ppmv. Table 3

-6 summarizes the measurement results and M301 based statistics for the high concentration validation category. As shown, the accuracy for each analyte was good;andthe measurement bias was considered statistically insignificant, so no correction factor was applied to subsequent measurements. The % recovery for each spiked/unspiked pair is also included inthe table to further illustrate accuracy and variability.

# 19

Table 3

-6. M320 Enhanced FTIR Validation Results of High Concentration (up to tens of ppmv) GHGs (s = spiked sample, u = unspiked sample; concs are in ppbv)



# Figure 3

-2 shows a graphical illustration of how a validation spiking runwhich containsa mixture of analytes was conducted.This figure shows atime series plot pertaining to the moderate concentration validation run, and provides the data that populates Table 3

-5. This provided the data that populates Table 3

-5. The third spectrum of each spiked/unspiked run, after approximately 15

-16 minutes of sample purge time, was the designated “sample” used to calculate the measurement accuracies listed in the previous tables.

# 20

3.4 Enhanced FTIR Analysis of Stack Emissions, Including QA Gas Spiking

After the Method 320 validations had proven the enhanced FTIR system to be an accurate and sensitive analysis method, 24

-hour sampling runs were conducted at five wet scrubber acid stacks (see Table 3

-1). Each testing period included a pretest and post

test QA run spiking run (except for the first stack analyzed, FAB1stack2, which only had a post

-test QA run since its test period immediately followed all the validation runs), which were carried out according to EPA Method 320 Section 8.6.2. The gas standard (see Table 3

-1 for gas standard conc.) containing the mixture of seven fluorinated GHGs and the NF3

# gas standard was used, and gas spiking levels at concentrations high enough to smooth out any emission variability were employed (see Table 3

-1 for the flow parameters per test location). Table 3

-7 summarizes the QA spiking results, which are categorized according to stack location and time (pretest versus post

-test). QA spike runs consisted of collecting gas spike samples in triplicate, after sufficient purge time between sampling runs, averaging the results, then comparing them to expected values after considering their native concentrations in the stack. Percent recoveries, as calculated per equation (2) in Section 3.3 of this report, are also included for each analyte in Table 3

-7. The two unspiked measurements that bracket each continuous spike run are averaged to determine the native contribution in the sample stream during the spike. As shown,all the % recoveries fall within the acceptance criteria of 70

-130%.

# 21 As referenced in EPA Method 320 Section 8.6.1, calibration transfer standard (CTS) runs are called for along with the QA spikes. The CTS is used to confirm the accurate transfer of FTIR calibrations from one test location to the next test location. A separate analyte, contained in a gas standard is often used, but for the case of this test

program,adequate CTS' were contained in each QA spiking run since multiple analytes that absorbacross all applicable spectral analysis regions were employed. Certainly, the acceptable recoveries displayed in Table 3

-7 for all the pretest and post

-test spike runs indicate a stable interferometer and calibration transferability. In addition, a sharply absorbing non

-GHG compound present in each of the stack emissions (C2

# H4

# , a combustion by

-product from the POU abatement devices in each fab) was tracked as a spectral wavelength standard. The C2

# H4

# absorption lines did not appreciably shift throughoutthe entire test program.

# 22

Table 3

-7. M320 Enhanced FTIR QA/CTS Results of Multiple Fluorinated GHGs (obs = FTIR measured value, calc = calculated spike concentration based on flows summarized in Table 3

-1; concs are in ppmv)

# 23 The stack monitoring testresults pertaining to the compounds listed in Table 1

-1, as bracketed by the QA spiking runs, are included with this test report as electronic Excel spreadsheets. TI plans to correlate the measured emissions with process gas usage. The following observations can be made regarding these data:

 The concentrations reported in the spreadsheets (in units of ppmv) can be converted to mass emission ratesfor each stack(such as units ofkgs/hr) by using the stack air flow velocity measurement results reported inSection 3.5.

 The enhanced FTIR system dries the sample gas before analysis for better sensitivities. Therefore, the concentrations reported in the spreadsheets are reported onadrybasis. The moisture content at each stack is reported in Table 3

-8, so the mass emissions can be computed for either dry or wet conditions. The difference is small, since the water content in the stack exhausts was under 1% (10,000 ppmv) for the air streams passing through the scrubbers at 65

-70o

# F.

 The concentrations reportedin the spreadsheets have associated measurement uncertainties (“error bars”) also listed. The uncertainties are 2* errors, or 95% confidence limits.

 Columns of data reported as “ND” mean that those compounds were not detected throughout the sampling period. Their associated error columns were, instead, estimated FDLs.

3.5 Determination of Stack Flow Rates

Stack exhaust air flow rates were measured by EPA Method 2, after traverse points were determined by EPA Method 1. A standard five foot pitot tube was used. The data sheets (and calibration sheet pertaining to the digital manometer used onsite) are included in Appendix E. Table 3

-8 shows the calculation spreadsheet results which converted differential pressures to flow rates. Stack moisture content was determined by FTIR at the end of each GHG monitoring period. These air flow rates will be used to convert the GHG volumetric concentrations, measured by the enhanced FTIR system, to mass emission rates.

Table 3

-8. Stack Flow Rates Measured by EPA Method 2

# 24

3.6 Total Mass Discharge by Compound for Each Fab

Using the ideal gas law (PV=nRT), the total mass dischargeof eachF

-gasfor eachstackislistedin Table 3

-9 below. The average concentrations for each compound (reported in Section 3 of this reportand in Appendix F)and the measured stack flow in Table 3

-8 was used to calculate thetotalmass discharge inKilogramsover the 24 hours of thetest.

Table 3

-9 TotalF

-GasMass Dischargefor Each Fab Stack (Kilogramsin 24 hours)

Wafer Fab Total

Flow, dscfm SF6 

# C3

# F8 

# C2

# F6 

# CHF3 

# CF4 

# NF3 

# C4

# F8



# Fab1 Stack1 90782 0.17 0.22 0.08 0.36 2.28 2.24 ND*

Fab1 Stack 2 58940 0.03 0.20 0.38 0.70 4.13 1.84 ND

Fab2 Stack 1 81209 0.03 ND 26.11 0.73 5.24 ND ND

Fab3 Stack 1 88965 2.05 0.80 6.48 1.14 3.38 0.25 0.51

Fab3 Stack 2 52292 0.02 10.75 12.80 0.34 11.56 0.34 ND



# *ND is NotDetected

# 25

4.0 Sampling and Analytical Procedures

4.1 EPA Method 320 using Extractive Enhanced FTIR

Typical extractive FTIR systems employ IR multipass sample cells of path lengths inthe 5 to 32 meter range. Their interferometers are usually capable of 0.5 to 1

cm-1

# spectral resolutions and utilize Globar blackbodies as sources of infrared radiation. A cryogenically cooled quantum IR detector, such as one with a mercury

-cadmium

telluride (MCT) element, is often used for maximum responsivity and best signal

-to

noise. These features lead to a stack monitoring system capable of sensitivities in the 20

- 200 ppbv range for most GHGs. In an effort to lower this sensitivity range by two orders of magnitude (to better than a 200

-2000pptvdetection limit range), IMACC implemented a series of hardware and software modifications to one of its existing FTIR assemblies. In general terms, the following signal

-to

-noise and analysis method improvements were done to produce an “enhanced FTIR” GHG monitoring system:

 High temperature infrared source. Typical Globar sources emit blackbody radiation at 1100o

# C, but this FTIR system utilized a source that operates several hundred to one thousand degrees hotter than standard. The results in significantly more energy in the mid

-IR “fingerprint” region, thus increasing the signal

-to

-noise ratio over GHG absorptions.

 Customized IR detector. A special detector was installed to provide a much more sensitive response, and a lower dark current, in the regions where the majority of GHGs absorb.

 Long path length sample cell. A specially designed multipass cell was utilized to achieve infrared path lengths exceeding 80 meters. Since the intensity of molecular absorptions are proportional to the concentration

-path length product, according to the Beer

-Lambert Law, this type of sample cell alone offered a factor of 2

-3 increase in GHG detection sensitivities.

 Interferometer operation at optimal signal

-to

-noise. Theinterferometer was operated under scanning parameters that are less conventional than typically utilized in the field. The result was a higher signal

-to

-noise ratio for each IR spectrum collected and analyzed.

 Drying of extracted stack samples. An analysis method is more sensitive and accurate when strongly absorbing interfering compounds are minimized in each spectral analysis region. The most prevalent interferant in semiconductor stack gases is water vapor. The IMACC FTIR employed a gas drying systemthat effectively removed moisture to dew points below

-40o

# C without affecting the GHG concentrations.

 Analysis method optimization. Finally, great care was taken to optimize the spectral analysis regions under the modified resolution and path length. The method was then tested in the lab and subsequently validated in the field.

Figure 4

-1 illustrates how the enhanced FTIR system was set up in the field for stack sampling and certified gas spiking. Stack sample flows were maintained at ~4.4 lpm throughthe 100 ft PFA Teflon tube (1/4” OD) and FTIR dryer

-sample cell assembly.

# 26

A ceramic mesh filter, designed to trap 99.9999% of particles larger than 0.1 micron diameter, was placed in line between the sample probe and a 1/4” stainless steel tee fitting which connected the gas spiking Teflon tube and the extraction tube to the instrument. The sample probe, placed at the vertical central axis of each stack, was 3/8” OD stainless steel, with an open

-ended elbow fitting situated against (perpendicular to) theair flow. The enhanced FTIR sample cell has an internal volume of 10 L, so a good purge time between “samples” was ~ 16 minutes (to make seven cell exchanges at 4.4 lpm). The signal averaging period for each FTIR spectrum was 7.5 to 8 minutes. Therefore, when gas spiking a representative sample was considered at every third spectrum after a state change, as discussed in Section 3.3 and illustrated in Figure 3

-2 of this report.

Figure 4

-1. Enhanced FTIR Field Gas Spiking and Stack Sampling Configuration

# 27

4.2 EPA Method 320 Enhanced FTIR Instrument Diagnostics

After the enhanced FTIR system was set up at the first stack, and before the first gas spiking validation run, diagnostic checks of the sampling system, FTIR interferometer and detector wereperformed. These help ensure proper signal

-to

-noise ratio and spectral accuracy before validation of the analysis method and stack emissions testing. The majority of these pretest field checksarediscussed in Section 8 of EPA Method 320 include the following:

 FTIR cell, sample probe and gas spiking system leak checks. The FTIR sample cell and dryer assembly were evacuated to a pressure below 100 torr, then sealed off and observed. The pressure rise did not exceed 0.1 torr in any two minute period during a 20

-minute observation period. This indicates that theleak rateis ~0.6 ml/min into the 10 liter cell, and thereforewell within the acceptance criteria set in Section 8.2 of Method 320. The sample probe, as connected to the filter housing and the gasspiking/extraction tube tee assembly, was capped off and pressurized with ~10 psig (~1.7 atm) of nitrogen. All the external gas fittings were then saturated with a surfactant (“snoop”) solution and observed. No gas leaks were observed to be leaking outof the extraction assembly. At that point, the entire sampling system was deemed to be acceptable for stack monitoring.

 Infrared detector linearity. Per Section 8.3.3 of Method 320, the detector response for the enhanced FTIR system was confirmed to be linear by observing a zero single beam response in spectrally opaque regions.

 FTIR background spectra.Since the enhanced FTIR system was equipped with an in

-line dryer, and the reporting of precise stack emissions for CO2 and CH4 were not required for this test program, the flowing of ambient air through the FTIR cell assembly provided the means to record a background spectrum (a sample blank). This way, all the gas flow and cell pressure settings could best mimic the actual stack sampling flow conditionsfor each test. New single beam backgrounds were collected on a daily basis during the Method 320 validation runs and at each stack testing location.

 Noise equivalent absorbance (NEA) test and detector signal checks. An NEA test, defined in Section 3.2 of this report, was performed prior to the first validation run. This was necessary to confirm the adequate signal

-to

-noise ratio needed to achieve the sub

-ppbv LODs required to characterize GHG stack emissions. RMS noise levels on the order of 0.04 mAU (4 x 10-5

# absorbance units), on average, over an approximate center region (1000

–1100 cm-1

# ) of the GHG quantitative analysis windows was needed (given the FTIR cell path length employed) for this test program. A detector signal, expressed as a 0

-10V voltage value after A

-to

-D conversion of the detector preamp signal, was recorded during the LOD tests described in Section 3.2 of this report. That signal was then tracked on a continuous basis during all the stack tests and observed to be maintained at an acceptable level throughout (always greater than 70% of optimum).

 Verification that stack flows were not cyclonic. The velocity traverse data sheets of AppendixEcontain the differential pressure (velocity) measurements at 12 traverse points across the diameters of each stack tested. The data show no

# 28 indication of excessively high flows near each stack wall compared to its center region.

 Verification that stack flows were stable.Each of thefive stackswassequentially testedand treatedas similar sources. Exhaust pressure and % exhaust fan speed monitored during the stack test demonstratedstability in the exhaust flow (see Appendix D for these results).

5.0 Quality of Sampling and Analytical Procedures

5.1 EPA Method 320 Minor Deviations

No major deviations from Method 320 procedures were found during these tests. However, some minor field deviations could be defined as follows:

1. EPA Method 320 procedures (ref: 13.2.1) statesthat10 cell volumes of purgingis required betweentherecording of samples. This procedure was deemed impractical given the internal volume of the enhanced FTIR cell. The validation testing report here, used~7 cell volumes of purging between samples,and resulted in a near complete (> 99%) sample exchange rate. 2. Method 320suggests the use of NIST traceable gas standards with +/

-2%

accuracy.The most accurate gas standards available were used for these tests. The analytical accuracies for gas blends involving these GHG compounds were certified to+/

-5%.

5.2EPA Method 1 and 2 Minor Deviation at One Stack Location

A minor deviation occurred for Method 1 Traverse Points 11.1 Selection of a measurement site. FAB 2 Stack 1was slightly less than the preferred 2duct diameters downstreamdistanceof the flow disturbance see AppendixC

.The velocity traverse (Method 2) (refer to AppendixE)resulted in astandard deviation of the differential pressure measurements across the entire traverseofonly 15% of its mean value, indicating a relatively uniform flow profile. Therefore, given that the port

-to

-flow disturbance distance deviation was less than 10% of the required distance, and the velocity traverse results were uniform, the overall deviation for this particular stack was considered insignificant.

# Ultrapure



# Water Process



# Gases Reactive 

# Gases & Solids Silicon 

# Wafers Coatings & 

# Dopants Solvents &



# Chemicals Caustics 

# & Acids 

# Integrated Circuit Manufacturing ACID

Packed Bed Wet Scrubbers Exhaust Stacks



# Mixed Acid & Chemical Fumes /Mists Exhausts

Disposal or Recycle

Classification To POTW

On

-Site Wastewater pH Adjust City Sewer



# Process Operations Wastewater GENERAL

Facility General Exhausts Exhaust Stacks



# Equipment Heat & Cooling Exhaust 

# VOC

Zeol Rotor Concentrators w/ Thermal Oxidizers 

# Exhaust Stack



# HC & Mixed Solvent Fumes /Vapor Exhausts 

# APPENDIX A: PROCESS OPERATIONS EXHAUST FLOW DIAGRAM



# Resource Supplies Collected Waste Packaging

Completed Wafers Wafer Backside Grinding Caustic

Packed Bed Wet Scrubbers Exhaust Stacks



# Ammonia Hydroxide Vapor Exhaust GHG Process Emissions are typically routed to acid stacks.

# Appendix B: FAB 1 Exhaust Schematic

# Appendix B: FAB 2 Acid Exhaust Schematic

To Stack

Future

# Appendix B: Flow Diagrams for all stacks on the threefabsat TI Dallas

B1: Fab1, Stack 1 Acid Exhaust Schematic

# B2: Fab1, Stack 2 Acid Exhaust Schematic

# B2: Fab1, Stack 2 Acid Exhaust Schematic

# B3: Fab2, Stack 1 Acid Exhaust Schematic

# B4: Fab2, Stack 1 Acid Exhaust Schematic

# B6: Fab3, Stack 1 Acid Exhaust Schematic

# B5: Fab3, Stack 2 Acid Exhaust Schematic

# 60 64 68 72 76 80

8/1/2011 0:00 8/2/2011 0:00 8/3/2011 0:00 

# Fan Speed (%) Acid Fan 1

Fan Speed (%) Acid Fan 2

Fan Speed (%) Acid Fan 3

Fan Speed (%) Acid Fan 5

Fan Speed (%) Acid Fan 6

Fan Speed (%) Acid Fan 7

0.00 1.00 2.00 3.00 4.00 

# 5.00

8/1/2011 0:00 8/2/2011 0:00 8/3/2011 0:00 

# System Header Exhaust Pressure (psig) 

# Appendix D: FAB1 Stack 1& 2 from 8/1 to 8/3Acid Exhaust continuous % fan speed and exhaust pressure

# Appendix D: FAB2 Stack 1from 8/4 to 8/5Acid Exhaust continuous % fan speed and exhaust pressure Chart

# Appendix D: Fab3 Stack 1 from 8/5 to 8/6Acid Exhaust continuous % fan speed and exhaust pressure

# Appendix D: FAB3 Stack 2 from 8/8 to 8/9Acid Exhaust continuous % fan speed and exhaust pressure

### FAB1_Stack1

Timestamp NF3 NF3Error SiH4 SiH4 FDL C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8 FDL C3F8 C3F8Error C5F8 C5F8 FDL SiF4 SiF4Error CH2F2 08/02/11 05:29:31 PM 0.255302 0.00337123 0.02184 0.00434432 0.050121 0.0038859 ND 0.00296425 0.013553 0.00010382 ND 0.00103433 0.002765 0.00134575 ND 0.000690198 0.000493 0.000381044 ND 08/02/11 05:35:23 PM 0.324322 0.00448719 0.010829 0.0057824 0.069633 0.00354933 ND 0.00270751 0.0085859.48281e-005 ND 0.000944742 ND 0.000639908 ND 0.00032819 0.000837 0.000429154 ND 08/02/11 06:52:15 PM 0.272022 0.0023338 0.058147 0.00300745 0.080168 0.0060527 ND 0.00461714 0.029891 0.000161711 ND 0.00161108 0.002034 0.000794004 ND 0.000407222 0.00132 0.000492516 ND 08/02/11 06:58:08 PM 0.234026 0.00318963 0.054761 0.0041103 0.074169 0.00677888 ND 0.00517109 0.031476 0.000181113 ND 0.00180437 ND 0.000915111 ND 0.000469334 0.00164 0.000460421 ND 08/02/11 07:04:00 PM 0.16502 0.00308868 0.04981 0.00398021 0.070677 0.00475888 ND 0.00363019 0.010499 0.000127144 ND 0.00126669 ND 0.00105016 ND 0.000538599 0.001621 0.000425484 ND 08/02/11 07:09:59 PM 0.122526 0.00339763 0.056897 0.00438203 0.082493 0.00446476 ND 0.00317797 0.009749 0.000119156 ND 0.000919624 ND 0.000777925 ND 0.000377434 0.001659 0.000390059 ND 08/02/11 07:15:55 PM 0.214311 0.00353158 0.042205 0.00455479 0.066464 0.00591177 ND 0.00420793 0.022721 0.000157774 ND 0.00121767 ND 0.000847631 ND 0.000411254 0.001621 0.000486565 ND 08/02/11 07:21:50 PM 0.190003 0.00278168 0.030561 0.00361361 0.057869 0.00473716 ND 0.00326709 0.015431 0.000126237 ND 0.000727442 ND 0.000730901 ND 0.000341428 0.00094 0.000458556 ND 08/02/11 07:27:39 PM 0.126601 0.00460339 0.029413 0.00593713 0.05305 0.00507679 ND 0.0036136 0.0096 0.00013549 ND 0.00104568 ND 0.00105791 ND 0.000513278 0.001531 0.000446222 ND 08/02/11 07:33:29 PM 0.106947 0.00298622 0.028441 0.00387932 0.049215 0.00392801 ND 0.00270904 0.008856 0.000104674 ND 0.000603188 ND 0.000848973 ND 0.000396584 0.000985 0.000375594 ND 08/02/11 07:39:24 PM 0.154334 0.00327132 0.018935 0.00424969 0.051725 0.00438059 ND 0.00302117 0.009661 0.000116735 ND 0.000672687 ND 0.000901511 ND 0.000421126 0.00096 0.000401963 ND 08/02/11 07:45:19 PM 0.439867 0.00350525 0.017519 0.00455358 0.039841 0.00460781 ND 0.00317788 0.009287 0.00012279 ND 0.00070758 ND 0.00100067 ND 0.000467448 0.001193 0.000740207 ND 08/02/11 07:51:16 PM 0.439211 0.00356093 ND 0.00462591 0.022778 0.00533891 ND 0.0036821 0.009009 0.000142272 ND 0.000819848 ND 0.00101128 ND 0.000472405 0.001041 0.0007382 ND 08/02/11 07:57:09 PM 0.24909 0.00319994 ND 0.00415696 0.037124 0.00469774 ND 0.0032399 0.00942 0.000125186 ND 0.000721389 ND 0.00112396 ND 0.00052504 0.000909 0.0004978 ND 08/02/11 08:03:07 PM 0.274518 0.00306524 0.015721 0.00398197 0.040422 0.0046123 ND 0.00318097 0.008884 0.000122909 ND 0.000708268 0.003394 0.00121583 ND 0.000567957 0.000582 0.000537555 ND 08/02/11 08:09:07 PM 0.248859 0.00280574 0.017404 0.00364487 0.032599 0.0057356 ND 0.00395568 0.018506 0.000152843 ND 0.000880763 0.003386 0.00125592 ND 0.000586683 0.00062 0.000516361 ND 08/02/11 08:15:03 PM 0.127986 0.00272959 ND 0.00354594 0.032912 0.00595151 ND 0.00410459 0.01861 0.000158597 ND 0.000913918 0.004123 0.00123973 ND 0.000579118 0.000405 0.000367742 ND 08/02/11 08:20:58 PM 0.247973 0.00296882 ND 0.00385672 0.029108 0.00521945 ND 0.00359971 0.015819 0.000139089 ND 0.000801503 0.005787 0.00122454 ND 0.000572023 0.000481 0.00050071 ND 08/02/11 08:26:51 PM 0.294797 0.00327659 ND 0.00425654 0.029737 0.00592198 ND 0.00408422 0.020612 0.00015781 ND 0.000909384 0.004766 0.00112786 ND 0.000526864 0.000827 0.000543022 ND 08/02/11 08:32:49 PM 0.217276 0.00320605 ND 0.0041649 0.03711 0.00423871 ND 0.00292332 0.010046 0.000112954 ND 0.000650899 0.00531 0.00105433 ND 0.000492512 0.000918 0.000463834 ND 08/02/11 08:38:42 PM 0.217575 0.00374156 ND 0.00486056 0.097954 0.00441272 ND 0.00304333 0.00992 0.000117591 ND 0.000677621 0.007516 0.00105705 ND 0.000493783 0.000783 0.000468224 ND 08/02/11 08:44:40 PM 0.107997 0.0039144 0.012624 0.0050851 0.064672 0.00611907 ND 0.00422015 0.022337 0.000163062 ND 0.000939649 0.007196 0.00101328 ND 0.000473338 0.000842 0.000349478 ND 08/02/11 08:50:37 PM 0.115168 0.00401636 0.016957 0.00521755 0.03196 0.00753289 ND 0.00519522 0.029902 0.000200738 ND 0.00115676 0.007332 0.00104611 ND 0.000488672 0.000817 0.000329956 ND 08/02/11 08:56:32 PM 0.210527 0.00402497 0.019332 0.00522874 0.027074 0.00789098 ND 0.00544219 0.030035 0.00021028 ND 0.00121174 0.006873 0.000924182 ND 0.000431716 0.000932 0.000444846 ND 08/02/11 09:02:33 PM 0.231285 0.00424886 0.016328 0.00551958 0.02897 0.00543766 ND 0.0037502 0.016623 0.000144904 ND 0.000835012 0.007714 0.000928068 ND 0.000433532 0.000781 0.000475858 ND 08/02/11 09:08:30 PM 0.451488 0.00420978 0.028392 0.00546882 0.034111 0.00496019 ND 0.0034209 0.009022 0.00013218 ND 0.000761691 0.006839 0.000810785 ND 0.000378745 0.001208 0.000759183 ND 08/02/11 09:14:24 PM 0.301407 0.00398357 0.034927 0.00517495 0.050146 0.00419373 ND 0.0028923 0.008413 0.000111755 ND 0.000643993 0.005798 0.000735365 ND 0.000343514 0.001226 0.0005852 ND 08/02/11 09:20:15 PM 0.127222 0.00404763 0.047103 0.00525818 0.052557 0.00512797 ND 0.00353662 0.017675 0.000136651 ND 0.000787455 0.005768 0.000741201 ND 0.00034624 0.000937 0.000366068 ND 08/02/11 09:26:10 PM 0.241451 0.00412563 0.041544 0.0053595 0.061035 0.00503221 ND 0.00347057 0.016145 0.000134099 ND 0.00077275 0.008201 0.000785077 ND 0.000366736 0.000904 0.000502052 ND 08/02/11 09:32:03 PM 0.209227 0.00396705 0.059682 0.00515349 0.066874 0.00388602 ND 0.00268008 0.005689 0.000103555 ND 0.00059674 0.007652 0.00088419 ND 0.000413035 0.000929 0.000470961 ND 08/02/11 09:37:53 PM 0.130186 0.00419396 0.067875 0.00544827 0.068225 0.00332702 ND 0.00229455 0.0015248.86592e-005 ND 0.0005109 0.007394 0.000893867 ND 0.000417555 0.001002 0.000390009 ND 08/02/11 09:43:54 PM 0.088462 0.00453433 0.071574 0.00589044 0.092278 0.00362416 ND 0.00249948 0.0010699.65775e-005 ND 0.00055653 0.008165 0.000806271 ND 0.000376636 0.000862 0.000337419 ND 08/02/11 09:49:49 PM 0.073021 0.00381327 0.060816 0.00495373 0.076889 0.00401565 ND 0.00276948 0.000954 0.00010701 ND 0.000616647 0.006904 0.000787128 ND 0.000367694 0.000779 0.000309649 ND 08/02/11 09:55:46 PM 0.151643 0.0039242 0.04667 0.00509783 0.06598 0.00377364 ND 0.00260257 0.001035 0.000100561 ND 0.000579483 0.006741 0.000762031 ND 0.00035597 0.001002 0.000384964 ND 08/02/11 10:01:46 PM 0.268556 0.00459942 0.038885 0.00597499 0.075337 0.00385215 ND 0.00265672 0.00103 0.000102653 ND 0.000591539 0.007241 0.000749375 ND 0.000350058 0.001058 0.000515853 ND 08/02/11 10:07:41 PM 0.406077 0.00436556 0.017477 0.00567119 0.082625 0.00399069 ND 0.00275227 0.001023 0.000106345 ND 0.000612813 0.007243 0.000802546 ND 0.000374896 0.000965 0.000708231 ND 08/02/11 10:13:36 PM 0.441768 0.0043184 0.014618 0.00560992 0.065332 0.00368774 ND 0.00254333 0.0010339.82716e-005 ND 0.000566292 0.007979 0.000894401 ND 0.000417805 0.000684 0.000747943 ND 08/02/11 10:19:35 PM 0.384706 0.00413153 0.057804 0.00536717 0.067795 0.00418889 ND 0.00288896 0.000976 0.000111626 ND 0.000643249 0.008872 0.000979268 ND 0.000457449 0.000867 0.000680375 ND 08/02/11 10:25:31 PM 0.165997 0.00415718 0.125663 0.00540049 0.063892 0.00442008 ND 0.0030484 0.000971 0.000117787 ND 0.000678751 0.007355 0.00125021 ND 0.000584014 0.001 0.000420227 ND 08/02/11 10:31:27 PM 0.102808 0.00436529 0.132738 0.00567084 0.086301 0.00459294 ND 0.00316762 0.001079 0.000122394 ND 0.000705296 0.006881 0.0012663 ND 0.000591533 0.001089 0.000356747 ND 08/02/11 10:37:19 PM 0.10576 0.00399016 0.051976 0.00518352 0.052028 0.00464601 ND 0.00320422 0.00091 0.000123808 ND 0.000713445 0.008039 0.000816475 ND 0.000381403 0.001404 0.000345225 ND 08/02/11 10:43:07 PM 0.058855 0.00380748 0.038056 0.0049462 0.055628 0.00364561 ND 0.00251427 0.0009269.71488e-005 ND 0.000559822 0.008516 0.00082389 ND 0.000384867 0.001056 0.00030242 ND 08/02/11 10:48:55 PM 0.089075 0.00433834 0.029543 0.00563583 0.058543 0.0036041 ND 0.00248564 0.0070469.60426e-005 ND 0.000553448 0.008188 0.000833241 ND 0.000389235 0.000829 0.000362211 ND 08/02/11 10:54:54 PM 0.255819 0.00460258 0.024233 0.00597909 0.048761 0.00467253 ND 0.00322251 0.013077 0.000124514 ND 0.000717517 0.008236 0.000881573 ND 0.000411812 0.000866 0.000542727 ND 08/02/11 11:00:55 PM 0.321121 0.00443005 ND 0.00575497 0.049675 0.00406277 ND 0.00280198 0.00304 0.000108266 ND 0.000623883 0.008724 0.000868452 ND 0.000405683 0.000869 0.000607216 ND 08/02/11 11:06:49 PM 0.375879 0.00427486 ND 0.00555336 0.043692 0.00530226 ND 0.00365682 0.014666 0.000141296 ND 0.000814219 0.008178 0.000846029 ND 0.000395208 0.000812 0.000674767 ND 08/02/11 11:12:42 PM 0.326031 0.00420424 0.011273 0.00546163 0.058693 0.00414216 ND 0.00285673 0.009121 0.000110381 ND 0.000636073 0.007249 0.00079416 ND 0.000370979 0.001032 0.000594798 ND 08/02/11 11:18:35 PM 0.40356 0.00442015 0.018045 0.00574211 0.048358 0.00563158 ND 0.00388394 0.019708 0.000150071 ND 0.000864789 0.005983 0.000834046 ND 0.000389611 0.001187 0.000702914 ND 08/02/11 11:24:25 PM 0.222081 0.00422246 0.01966 0.0054853 0.057265 0.00423073 ND 0.00291781 0.009485 0.000112741 ND 0.000649674 0.005293 0.000793335 ND 0.000370594 0.001324 0.00050288 ND 08/02/11 11:30:24 PM 0.138827 0.00501585 0.01578 0.00646909 0.046645 0.00604703 ND 0.0043042 0.013808 0.000161384 ND 0.00124553 0.003175 0.00130171 ND 0.000631562 0.002298 0.000634065 ND 08/02/11 11:36:15 PM 0.123227 0.00490285 ND 0.00632335 0.061759 0.0052683 ND 0.00374992 0.002151 0.000140601 ND 0.00108513 0.004829 0.00141134 ND 0.000684752 0.001913 0.000557847 ND 08/02/11 11:42:08 PM 0.138139 0.00453048 0.015654 0.0058431 0.061654 0.00507643 ND 0.00361334 0.000122 0.00013548 ND 0.00104561 0.005321 0.00140982 ND 0.000684017 0.001888 0.00054582 ND 08/02/11 11:48:01 PM 0.234929 0.00475625 0.019607 0.00613427 0.063661 0.00498276 ND 0.00354667 0.000085 0.00013298 ND 0.00102632 0.00845 0.00144437 ND 0.000700781 0.001243 0.000513981 ND 08/02/11 11:53:56 PM 0.352476 0.00504377 0.028788 0.0065051 0.060448 0.00514722 ND 0.00366373 0.000091 0.00013737 ND 0.00106019 0.009583 0.00140847 ND 0.00068336 0.001248 0.000630939 ND 08/02/11 11:59:55 PM 0.189958 0.00501499 0.044153 0.00646255 0.069213 0.00513542 ND 0.00391742 0.000116 0.000137204 ND 0.00136692 0.005887 0.001798 ND 0.000922141 0.001499 0.000459238 ND 08/03/11 12:05:51 AM 0.240409 0.0052022 0.030988 0.0067038 0.078747 0.0048913 ND 0.0037312 0.00011 0.000130682 ND 0.00130194 0.005522 0.00177139 ND 0.000908495 0.001346 0.000509724 ND 08/03/11 12:11:47 AM 0.437226 0.00513428 0.01449 0.00661627 0.072399 0.00508243 ND 0.003877 0.000144 0.000135788 ND 0.00135282 0.006528 0.00179605 ND 0.000921141 0.001376 0.000728691 ND 08/03/11 12:17:41 AM 0.347461 0.0050966 0.020227 0.00656771 0.075973 0.00479314 ND 0.00365632 0.000171 0.000128059 ND 0.00127581 0.006157 0.00172127 ND 0.000882788 0.001379 0.00062646 ND 08/03/11 12:23:32 AM 0.258047 0.0048841 0.024687 0.00629387 0.076057 0.00455718 ND 0.00347633 0.000154 0.000121755 ND 0.00121301 0.00596 0.00168295 ND 0.000863139 0.001318 0.000528506 ND 08/03/11 12:29:29 AM 0.171914 0.00499349 0.037162 0.00643484 0.078524 0.00448504 ND 0.0034213 0.000259 0.000119828 ND 0.00119381 0.00549 0.00161279 ND 0.000827151 0.0013 0.000451886 ND 08/03/11 12:35:23 AM 0.221377 0.00458513 0.023179 0.0059086 0.075614 0.00461191 ND 0.00351808 0.000471 0.000123217 ND 0.00122757 0.006096 0.0016036 ND 0.000822441 0.001312 0.000468215 ND 08/03/11 12:41:15 AM 0.239697 0.00458939 0.022373 0.0059141 0.061552 0.00547864 ND 0.00417924 0.01517 0.000146374 ND 0.00145828 0.004973 0.00151826 ND 0.000778671 0.001752 0.000495956 ND 08/03/11 12:47:12 AM 0.367288 0.00445221 0.017721 0.00573732 0.064502 0.00639103 ND 0.00487523 0.022771 0.00017075 ND 0.00170113 0.004988 0.00147108 ND 0.000754474 0.001683 0.000640176 ND 08/03/11 12:53:06 AM 0.340191 0.00434256 0.014909 0.00559602 0.074479 0.00525748 ND 0.00401053 0.013357 0.000140465 ND 0.00139941 0.004631 0.00150018 ND 0.000769397 0.001816 0.000607102 ND 08/03/11 12:59:02 AM 0.192587 0.00413782 0.012289 0.00533219 0.066732 0.00524272 ND 0.00399927 0.012967 0.000140071 ND 0.00139548 0.005552 0.00162217 ND 0.000831966 0.001481 0.000448323 ND 08/03/11 01:04:59 AM 0.123642 0.00459024 0.019927 0.0059152 0.054539 0.00486358 ND 0.00371006 0.010512 0.000129941 ND 0.00129456 0.006052 0.00156895 ND 0.000804671 0.001004 0.0003897 ND 08/03/11 01:10:56 AM 0.101434 0.00452561 0.028538 0.00583191 0.06195 0.00435774 ND 0.00332419 0.001967 0.000116427 ND 0.00115992 0.006277 0.00165633 ND 0.000849483 0.000822 0.000379213 ND 08/03/11 01:16:48 AM 0.143092 0.00464063 0.028756 0.00598013 0.084663 0.00433693 ND 0.00330831 0.00178 0.000115871 ND 0.00115438 0.006054 0.00167856 ND 0.000860886 0.000914 0.000402036 ND 08/03/11 01:22:47 AM 0.363738 0.0045861 ND 0.00590986 0.084246 0.00517257 ND 0.00394576 0.009357 0.000138197 ND 0.00137681 0.006266 0.00162655 ND 0.00083421 0.001194 0.000623098 ND 08/03/11 01:28:40 AM 0.290018 0.00473872 ND 0.00610653 0.066689 0.00559617 ND 0.00426889 0.013009 0.000149514 ND 0.00148956 0.005945 0.00150026 ND 0.00076944 0.001443 0.000546142 ND 08/03/11 01:34:36 AM 0.304396 0.00482431 0.015757 0.00621682 0.079358 0.00445616 ND 0.00339926 0.002773 0.000119056 ND 0.00118612 0.007286 0.00153997 ND 0.000789804 0.001192 0.000544226 ND 08/03/11 01:40:29 AM 0.302405 0.00481531 0.021388 0.00620523 0.082551 0.0047292 ND 0.00360755 0.001841 0.000126351 ND 0.00125879 0.007081 0.00154491 ND 0.000792341 0.001111 0.00055883 ND



### Page 1

### FAB1_Stack1

Timestamp NF3 NF3Error SiH4 SiH4 FDL C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8 FDL C3F8 C3F8Error C5F8 C5F8 FDL SiF4 SiF4Error CH2F2 08/03/11 01:46:22 AM 0.187384 0.00427334 0.023151 0.00550682 0.072282 0.00458401 ND 0.00349679 0.001699 0.000122472 ND 0.00122015 0.007315 0.0016003 ND 0.000820746 0.001065 0.000455174 ND 08/03/11 01:52:14 AM 0.116447 0.00391849 0.01295 0.00504955 0.06558 0.00466346 ND 0.0035574 0.001891 0.000124595 ND 0.00124129 0.007034 0.00164782 ND 0.00084512 0.000994 0.000375555 ND 08/03/11 01:58:09 AM 0.068236 0.00446094 0.012268 0.00574857 0.057142 0.00395997 ND 0.00302076 0.00193 0.000105799 ND 0.00105404 0.006611 0.00161791 ND 0.000829778 0.000963 0.000342511 ND 08/03/11 02:04:03 AM 0.042912 0.00450511 0.029248 0.00580549 0.060706 0.00397752 ND 0.00303415 0.001845 0.000106268 ND 0.00105872 0.005472 0.00155551 ND 0.000797777 0.001039 0.000310459 ND 08/03/11 02:10:00 AM 0.119422 0.00456863 0.032773 0.00588735 0.060453 0.00386706 ND 0.00294989 0.00187 0.000103317 ND 0.00102931 0.004901 0.00143755 ND 0.000737278 0.00103 0.000355287 ND 08/03/11 02:15:53 AM 0.188798 0.00435181 0.050738 0.00560794 0.060734 0.00393627 ND 0.00300268 0.001504 0.000105166 ND 0.00104773 0.004398 0.00137913 ND 0.000707314 0.001164 0.000429482 ND 08/03/11 02:21:48 AM 0.19665 0.00401456 0.054018 0.00517335 0.068206 0.00409159 ND 0.00312116 0.001179 0.000109316 ND 0.00108908 0.005465 0.00140655 ND 0.000721378 0.00117 0.000423594 ND 08/03/11 02:27:43 AM 0.23492 0.00392525 0.035824 0.00505826 0.074875 0.00428945 ND 0.0032721 0.001412 0.000114602 ND 0.00114174 0.006134 0.00143081 ND 0.00073382 0.000876 0.000460068 ND 08/03/11 02:33:39 AM 0.260497 0.00445115 0.042256 0.00573595 0.114687 0.00406389 ND 0.00310003 0.001424 0.000108576 ND 0.00108171 0.006647 0.00136183 ND 0.000698442 0.000862 0.000489742 ND 08/03/11 02:39:32 AM 0.417624 0.00411837 0.035395 0.00530712 0.105493 0.00455494 ND 0.00347462 0.007847 0.000121695 ND 0.00121241 0.006494 0.00133664 ND 0.000685523 0.001085 0.000675222 ND 08/03/11 02:45:25 AM 0.386546 0.00364364 0.028289 0.00469536 0.06725 0.00543239 ND 0.00414396 0.013983 0.000145138 ND 0.00144597 0.006241 0.00134386 ND 0.000689226 0.00144 0.000642768 ND 08/03/11 02:51:17 AM 0.213602 0.00345958 0.028786 0.00445818 0.077023 0.00460686 ND 0.00351422 0.004535 0.000123082 ND 0.00122623 0.005099 0.00134456 ND 0.000689586 0.001468 0.000488086 ND 08/03/11 02:57:16 AM 0.081735 0.0037366 0.042707 0.00481516 0.071767 0.00434991 ND 0.00331822 0.00836 0.000116218 ND 0.00115784 0.003575 0.00135791 ND 0.000696435 0.001697 0.000477731 ND 08/03/11 03:03:07 AM 0.039964 0.00411405 0.04191 0.00530156 0.085404 0.00413646 ND 0.00315539 0.008744 0.000110515 ND 0.00110102 0.002545 0.00135869 ND 0.000696833 0.001532 0.000440071 ND 08/03/11 03:09:00 AM 0.082626 0.00459557 0.039 0.00592206 0.113022 0.00409746 ND 0.00312564 0.008715 0.000109473 ND 0.00109064 0.003223 0.00127496 ND 0.000653892 0.00149 0.000411629 ND 08/03/11 03:14:55 AM 0.147029 0.00440944 0.037143 0.00568221 0.121929 0.00400685 ND 0.00305652 0.008482 0.000107052 ND 0.00106652 0.004497 0.00132357 ND 0.000678819 0.001432 0.000436334 ND 08/03/11 03:20:45 AM 0.102469 0.00421683 0.044553 0.005434 0.112205 0.00424098 ND 0.00323512 0.008244 0.000113307 ND 0.00112884 0.004258 0.00124647 ND 0.000639276 0.001521 0.000462143 ND 08/03/11 03:26:39 AM 0.165787 0.00504525 0.050569 0.00650154 0.106292 0.00480217 ND 0.00366321 0.015637 0.0001283 ND 0.00127822 0.003551 0.00121584 ND 0.000623567 0.001771 0.000509659 ND 08/03/11 03:32:32 AM 0.258168 0.00424843 0.053 0.00547472 0.086613 0.00637953 ND 0.00486646 0.026172 0.000170443 ND 0.00169807 0.005153 0.00119671 ND 0.000613758 0.001558 0.00049479 ND 08/03/11 03:38:28 AM 0.183221 0.00412855 0.046954 0.00532024 0.088225 0.00408411 ND 0.00311546 0.010322 0.000109116 ND 0.00108709 0.006786 0.00131828 ND 0.000676105 0.001201 0.00040724 ND 08/03/11 03:44:15 AM 0.154113 0.0038945 0.064453 0.00501864 0.084288 0.00400789 ND 0.00305731 0.008684 0.00010708 ND 0.0010668 0.007561 0.00128814 ND 0.000660651 0.001117 0.000389048 ND 08/03/11 03:50:07 AM 0.246887 0.00451531 0.052859 0.00581864 0.067131 0.00453192 ND 0.00345706 0.011734 0.00012108 ND 0.00120628 0.007084 0.0013149 ND 0.000674372 0.001113 0.000469603 ND 08/03/11 03:56:03 AM 0.20689 0.00458668 0.022533 0.00591061 0.06083 0.00572624 ND 0.00436811 0.022067 0.000152989 ND 0.00152418 0.006816 0.00125813 ND 0.000645259 0.000908 0.000415333 ND 08/03/11 04:01:57 AM 0.152102 0.00434584 0.013157 0.00560025 0.075808 0.00418443 ND 0.00319198 0.011638 0.000111796 ND 0.00111379 0.006847 0.00122838 ND 0.000629999 0.000814 0.000364116 ND 08/03/11 04:07:57 AM 0.196015 0.00436456 ND 0.00562437 0.076244 0.0057305 ND 0.00437136 0.024639 0.000153103 ND 0.00152531 0.003473 0.00121401 ND 0.000622631 0.001507 0.000542137 ND 08/03/11 04:13:46 AM 0.117934 0.00416149 ND 0.00536269 0.065485 0.00577696 ND 0.0044068 0.022279 0.000154344 ND 0.00153768 ND 0.00123488 ND 0.000633334 0.001824 0.000625336 ND 08/03/11 04:19:41 AM 0.222557 0.00453378 ND 0.00584243 0.070885 0.00404258 ND 0.00308378 0.005492 0.000108006 ND 0.00107603 0.00348 0.00125165 ND 0.000641933 0.0015 0.000576162 ND 08/03/11 04:25:34 AM 0.247089 0.00449827 0.010281 0.00579668 0.055108 0.00501228 ND 0.00382348 0.017349 0.000133914 ND 0.00133414 0.004057 0.00119027 ND 0.000610455 0.001221 0.000503726 ND 08/03/11 04:31:33 AM 0.251982 0.00432732 0.022585 0.00557638 0.087669 0.00422693 ND 0.00322441 0.008552 0.000112932 ND 0.0011251 0.003642 0.00115764 ND 0.000593719 0.001377 0.000554022 ND 08/03/11 04:37:28 AM 0.199663 0.00440135 0.022115 0.00567178 0.09663 0.00379836 ND 0.00289748 0.001992 0.000101482 ND 0.00101103 0.004646 0.00109865 ND 0.000563466 0.001419 0.000520468 ND 08/03/11 04:43:25 AM 0.101043 0.00417671 0.027599 0.0053823 0.090053 0.00381979 ND 0.00291383 0.001835 0.000102054 ND 0.00101673 0.003877 0.00111624 ND 0.000572486 0.001322 0.000434915 ND 08/03/11 04:49:18 AM 0.073437 0.00376592 0.023498 0.00485293 0.08627 0.00358684 ND 0.00273612 0.0017789.58302e-005 ND 0.000954725 0.006091 0.00114563 ND 0.000587561 0.000897 0.000300067 ND 08/03/11 04:55:12 AM 0.168672 0.00376768 0.015925 0.0048552 0.070478 0.00373569 ND 0.00284967 0.0016349.98072e-005 ND 0.000994346 0.00661 0.00120553 ND 0.000618281 0.000908 0.000369668 ND 08/03/11 05:01:07 AM 0.18625 0.0043926 ND 0.00566051 0.108913 0.00395958 ND 0.00302046 0.001681 0.000105789 ND 0.00105394 0.007577 0.00121006 ND 0.000620605 0.000698 0.00037618 ND 08/03/11 05:06:58 AM 0.189285 0.00437076 0.011525 0.00563236 0.101634 0.00501117 ND 0.00382264 0.017894 0.000133884 ND 0.00133385 0.007177 0.00117452 ND 0.000602378 0.000657 0.000378693 ND 08/03/11 05:12:55 AM 0.156965 0.00456378 ND 0.00588109 0.079921 0.00883745 ND 0.00674142 0.043935 0.000236112 ND 0.00235231 0.006255 0.00128617 ND 0.000659637 0.000801 0.000344569 ND 08/03/11 05:18:42 AM 0.287358 0.00445539 ND 0.00574142 0.098777 0.00377048 ND 0.00287621 0.009383 0.000100737 ND 0.00100361 0.007522 0.00122521 ND 0.000628377 0.00076 0.000510186 ND 08/03/11 05:24:40 AM 0.468605 0.00433338 ND 0.00558419 0.088121 0.0035199 ND 0.00268506 0.0020439.40418e-005 ND 0.000936908 0.008065 0.00120094 ND 0.000615927 0.000781 0.000728299 ND 08/03/11 05:30:35 AM 0.350964 0.00428737 ND 0.0055249 0.085759 0.00363361 ND 0.00277181 0.0014929.708e-005 ND 0.000967177 0.007253 0.00116487 ND 0.000597426 0.001192 0.00059059 ND 08/03/11 05:36:31 AM 0.167663 0.00408921 0.011498 0.00526955 0.104201 0.00335975 ND 0.0025629 0.001691 8.97631e-005 ND 0.00089428 0.005891 0.00116212 ND 0.000596018 0.001149 0.00039699 ND 08/03/11 05:42:26 AM 0.155386 0.00448134 0.010843 0.00577486 0.103203 0.00332426 ND 0.00253582 0.0017628.88148e-005 ND 0.000884833 0.006755 0.00118243 ND 0.000606436 0.001075 0.000367229 ND 08/03/11 05:48:23 AM 0.202762 0.0040659 ND 0.0052395 0.09589 0.00334035 ND 0.0025481 0.001338.92448e-005 ND 0.000889118 0.007686 0.00118158 ND 0.000605996 0.000751 0.000410981 ND 08/03/11 05:54:17 AM 0.168867 0.00363442 0.01714 0.00468348 0.094014 0.00368919 ND 0.00281421 0.0012499.85649e-005 ND 0.000981971 0.008071 0.00119324 ND 0.00061198 0.00068 0.000373594 ND 08/03/11 06:00:09 AM 0.0758 0.00384781 0.029032 0.00495847 0.113321 0.00350132 ND 0.00267089 0.0011249.35455e-005 ND 0.000931964 0.007797 0.00116265 ND 0.000596288 0.000695 0.000271619 ND 08/03/11 06:06:06 AM 0.194078 0.00345717 0.023159 0.00445507 0.090821 0.0037696 ND 0.00287554 0.000983 0.000100713 ND 0.00100337 0.008444 0.00121131 ND 0.000621245 0.000727 0.00041489 ND 08/03/11 06:11:58 AM 0.210467 0.00355876 0.017845 0.00458598 0.084151 0.0039441 ND 0.00300865 0.001153 0.000105375 ND 0.00104982 0.009131 0.00121105 ND 0.000621114 0.000837 0.000427876 ND 08/03/11 06:17:51 AM 0.202995 0.00352599 ND 0.00454375 0.07619 0.0036621 ND 0.00279354 0.0010059.7841e-005 ND 0.000974758 0.009191 0.00116934 ND 0.00059972 0.000774 0.000433409 ND 08/03/11 06:23:49 AM 0.249862 0.00418641 0.011252 0.0053948 0.097986 0.00334362 ND 0.00255059 0.001088.93321e-005 ND 0.000889986 0.009275 0.00118123 ND 0.000605817 0.000706 0.000488501 ND 08/03/11 06:29:41 AM 0.295051 0.00370363 0.013335 0.00477266 0.086091 0.00370973 ND 0.00282987 0.0015829.91136e-005 ND 0.000987437 0.008835 0.00117934 ND 0.000604851 0.000678 0.000552885 ND 08/03/11 06:35:38 AM 0.156555 0.00412684 0.023918 0.00531803 0.093064 0.00338984 ND 0.00258585 0.0017839.0567e-005 ND 0.000902289 0.008485 0.00115676 ND 0.000593268 0.00077 0.000393794 ND 08/03/11 06:41:32 AM 0.179087 0.00437878 0.027743 0.00564269 0.099535 0.0035486 ND 0.00270696 0.0012979.48087e-005 ND 0.000944549 0.00881 0.00118712 ND 0.000608839 0.000824 0.0004217 ND 08/03/11 06:47:25 AM 0.1198 0.00437219 0.022405 0.00563421 0.109299 0.00369157 ND 0.00281602 0.0050449.86283e-005 ND 0.000982602 0.008806 0.00120395 ND 0.000617469 0.000983 0.00037304 ND 08/03/11 06:53:23 AM 0.171284 0.00423047 ND 0.00545157 0.10911 0.00429466 ND 0.00327607 0.008135 0.000114741 ND 0.00114313 0.007072 0.00115616 ND 0.000592961 0.001401 0.000454503 ND 08/03/11 06:59:20 AM 0.093965 0.00479168 0.019816 0.00617477 0.095118 0.00442403 ND 0.00337476 0.008533 0.000118198 ND 0.00117757 0.010426 0.0010586 ND 0.000542927 0.00173 0.000509459 ND 08/03/11 07:05:06 AM 0.121943 0.00507566 0.033365 0.00654073 0.09629 0.00583904 ND 0.00445416 0.008448 0.000156003 ND 0.0015542 0.016909 0.00159521 ND 0.000818138 0.00187 0.00060063 ND 08/03/11 07:11:00 AM 0.373723 0.0061035 0.023007 0.00786525 0.080694 0.00737346 ND 0.00562465 0.008764 0.000196998 ND 0.00196263 0.025637 0.00214898 ND 0.00110215 0.001826 0.000825 ND 08/03/11 07:16:53 AM 0.591151 0.00723701 ND 0.00932594 0.063793 0.00891636 ND 0.00680161 0.008439 0.00023822 ND 0.00237331 0.033039 0.00282951 ND 0.00145117 0.002132 0.00112351 ND 08/03/11 07:22:43 AM 0.607291 0.00847671 ND 0.0109235 0.05329 0.00813692 ND 0.00641295 0.014304 0.000217675 ND 0.00245357 0.032711 0.00279071 ND 0.00155983 0.002443 0.00120965 ND 08/03/11 07:28:35 AM 0.60671 0.0104654 ND 0.0134862 0.068905 0.0101396 ND 0.00799685 0.025451 0.000271276 ND 0.00305196 0.03828 0.00335401 ND 0.00187443 0.002795 0.00128325 ND 08/03/11 07:34:24 AM 0.608333 0.0160492 ND 0.0206818 0.053725 0.0118397 ND 0.00933126 0.032576 0.000316732 ND 0.00357011 0.043687 0.00377394 ND 0.0021094 0.002714 0.001264 ND 08/03/11 07:40:19 AM 0.671466 0.0293548 ND 0.037828 0.038404 0.0127382 ND 0.0100394 0.025785 0.000340767 ND 0.00384103 0.051558 0.00431217 ND 0.00241024 0.003074 0.00137084 ND 08/03/11 07:46:13 AM 0.826043 0.0548506 ND 0.0706829 0.047145 0.0131148 ND 0.0103433 0.01154 0.000350876 ND 0.00394749 0.056391 0.00538379 ND 0.0030088 0.003977 0.00158919 ND 08/03/11 07:52:12 AM 0.91003 0.0926358 ND 0.119375 0.04942 0.0167646 ND 0.0132219 0.021644 0.000448525 ND 0.00504608 0.064402 0.00626118 ND 0.00349914 0.004469 0.00149111 ND 08/03/11 10:16:47 AM 0.052573 0.00459738 0.031002 0.0059244 0.122513 0.00483619 ND 0.00368916 0.010126 0.000129209 ND 0.00128727 0.009294 0.00146198 ND 0.000749806 0.001215 0.000325953 ND 08/03/11 10:22:44 AM 0.053377 0.00459455 0.033064 0.00592074 0.14582 0.00553841 ND 0.00422483 0.014593 0.000147971 ND 0.00147418 0.009461 0.00161477 ND 0.000828169 0.00144 0.000334508 ND 08/03/11 10:28:40 AM 0.115598 0.00475626 0.02934 0.00612914 0.135157 0.00532761 ND 0.00406403 0.005283 0.000142339 ND 0.00141808 0.010502 0.00162682 ND 0.000834349 0.001535 0.000395203 ND 08/03/11 10:34:38 AM 0.16578 0.00506317 0.031862 0.00652463 0.140616 0.00590002 ND 0.00450067 0.015827 0.000157632 ND 0.00157044 0.007819 0.00167742 ND 0.000860302 0.002172 0.000553872 ND 08/03/11 10:40:25 AM 0.196067 0.00537712 0.022106 0.00692921 0.114052 0.00537108 ND 0.00409719 0.004855 0.0001435 ND 0.00142965 0.007203 0.00170464 ND 0.00087426 0.00229 0.000612106 ND 08/03/11 10:46:20 AM 0.220278 0.00557459 0.026641 0.00718367 0.072979 0.00508753 ND 0.00388089 0.001309 0.000135924 ND 0.00135417 0.006379 0.00170871 ND 0.000876345 0.002285 0.000625613 ND 08/03/11 10:52:13 AM 0.188067 0.00569788 0.032123 0.00734255 0.053425 0.00511192 ND 0.0038995 0.000831 0.000136576 ND 0.00136066 0.007303 0.0017681 ND 0.000906807 0.002225 0.000562988 ND 08/03/11 10:58:05 AM 0.149045 0.00564689 0.036295 0.00727684 0.078043 0.00523416 ND 0.00399274 0.000768 0.000139842 ND 0.0013932 0.007116 0.0017545 ND 0.000899833 0.00243 0.000586402 ND 08/03/11 11:04:01 AM 0.068498 0.0059786 0.040731 0.0077043 0.075916 0.00516642 ND 0.00394107 0.000762 0.000138032 ND 0.00137517 0.006846 0.00172883 ND 0.000886665 0.002481 0.000530526 ND



### Page 2

### FAB1_Stack1

Timestamp NF3 NF3Error SiH4 SiH4 FDL C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8 FDL C3F8 C3F8Error C5F8 C5F8 FDL SiF4 SiF4Error CH2F2 08/03/11 11:09:52 AM 0.065242 0.00606167 0.048556 0.00781135 0.098872 0.005395 ND 0.00411543 0.00078 0.000144139 ND 0.00143601 0.006113 0.00173103 ND 0.000887795 0.00274 0.000532661 ND 08/03/11 11:15:44 AM 0.125149 0.00718417 0.0309 0.00925785 0.08316 0.00504641 ND 0.00384952 0.000711 0.000134826 ND 0.00134323 0.008861 0.00174087 ND 0.000892841 0.00216 0.000455162 ND 08/03/11 11:21:34 AM 0.213308 0.00702004 0.024231 0.00904635 0.084984 0.00498906 ND 0.00380577 0.000744 0.000133294 ND 0.00132796 0.009472 0.00170535 ND 0.000874623 0.001968 0.000536319 ND 08/03/11 11:27:27 AM 0.197439 0.0059579 0.018104 0.00767762 0.083757 0.00517124 ND 0.00394475 0.004027 0.000138161 ND 0.00137645 0.009008 0.00171179 ND 0.000877926 0.001853 0.000511297 ND 08/03/11 11:33:19 AM 0.211448 0.00514115 ND 0.00662513 0.074156 0.00590636 ND 0.00450551 0.016356 0.000157801 ND 0.00157212 0.008019 0.0017719 ND 0.000908755 0.001881 0.000538227 ND 08/03/11 11:39:07 AM 0.245438 0.00519048 ND 0.00668869 0.066044 0.00519965 ND 0.00396642 0.004037 0.00013892 ND 0.00138402 0.009246 0.00177642 ND 0.000911075 0.001944 0.000580302 ND 08/03/11 11:44:56 AM 0.271594 0.00519799 ND 0.00669836 0.074178 0.00525155 ND 0.00400601 0.00089 0.000140307 ND 0.00139783 0.009761 0.00185658 ND 0.000952187 0.001884 0.000622225 ND 08/03/11 11:50:50 AM 0.113541 0.00530107 0.037923 0.0068312 0.079905 0.0051666 ND 0.00394121 0.000735 0.000138037 ND 0.00137522 0.009772 0.00176113 ND 0.000903232 0.001992 0.000461622 ND 08/03/11 11:56:46 AM 0.05804 0.00550304 0.111059 0.00709147 0.080772 0.00584826 ND 0.00446119 0.014096 0.000156249 ND 0.00155666 0.009061 0.00191002 ND 0.000979592 0.002184 0.000410947 ND 08/03/11 12:02:41 PM 0.068197 0.00576664 0.110029 0.00743115 0.076177 0.00557638 ND 0.0042538 0.006968 0.000148985 ND 0.00148429 0.009138 0.00182261 ND 0.000934763 0.002254 0.000436794 ND 08/03/11 12:08:31 PM 0.152879 0.0056861 0.100482 0.00732737 0.067213 0.00585943 ND 0.00446972 0.01157 0.000156548 ND 0.00155963 0.009161 0.0018183 ND 0.000932552 0.002054 0.000505698 ND 08/03/11 12:14:29 PM 0.373865 0.00576225 0.029745 0.0074255 0.06132 0.00549672 ND 0.00419303 0.009566 0.000146857 ND 0.00146309 0.010197 0.0017523 ND 0.000898705 0.001807 0.000739865 ND 08/03/11 12:20:23 PM 0.391698 0.00613648 0.019815 0.00790774 0.062753 0.00514757 ND 0.00392669 0.001292 0.000137529 ND 0.00137015 0.010863 0.00175235 ND 0.000898728 0.001598 0.000761875 ND 08/03/11 12:26:18 PM 0.246958 0.00602451 0.021138 0.00776346 0.055075 0.0051473 ND 0.00392649 0.000964 0.000137521 ND 0.00137008 0.009637 0.0016996 ND 0.000871675 0.001618 0.00058312 ND 08/03/11 12:32:15 PM 0.370165 0.00575043 0.02418 0.00741027 0.055362 0.00532204 ND 0.00405978 0.000954 0.00014219 ND 0.00141659 0.009062 0.0016929 ND 0.000868242 0.001715 0.000715952 ND 08/03/11 12:38:10 PM 0.387741 0.00550002 0.100149 0.00708757 0.067452 0.00611757 ND 0.00466663 0.001841 0.000163444 ND 0.00162834 0.008315 0.00196618 ND 0.0010084 0.002205 0.000728306 ND 08/03/11 12:44:00 PM 0.261783 0.00529165 0.143752 0.00681907 0.083421 0.00607239 ND 0.00463216 0.001331 0.000162237 ND 0.00161632 0.007424 0.00236757 ND 0.00121426 0.002988 0.000592946 ND 08/03/11 12:50:00 PM 0.283449 0.00599216 0.079916 0.00772177 0.091063 0.00520776 ND 0.0039726 0.001214 0.000139137 ND 0.00138617 0.007953 0.00186926 ND 0.000958691 0.002684 0.000618649 ND 08/03/11 12:55:57 PM 0.118175 0.00611917 0.021959 0.00788544 0.085699 0.00483757 ND 0.00369021 0.0021 0.000129246 ND 0.00128764 0.008549 0.00167405 ND 0.000858573 0.002282 0.00045345 ND 08/03/11 01:01:54 PM 0.061779 0.00549916 0.031303 0.00708647 0.08437 0.00533961 ND 0.00407318 0.012274 0.000142659 ND 0.00142127 0.008442 0.00170072 ND 0.000872249 0.002165 0.000397195 ND 08/03/11 01:07:49 PM 0.054051 0.00531257 0.029478 0.00684602 0.07558 0.00518661 ND 0.00395647 0.009655 0.000138572 ND 0.00138054 0.009227 0.0016978 ND 0.000870753 0.002126 0.000386939 ND 08/03/11 01:13:41 PM 0.07907 0.00550269 0.021576 0.00709102 0.083348 0.00532885 ND 0.00406497 0.011707 0.000142372 ND 0.00141841 0.009241 0.00170013 ND 0.000871948 0.001992 0.000395664 ND 08/03/11 01:19:42 PM 0.126232 0.0058186 0.035461 0.00749811 0.08681 0.00661392 ND 0.00504525 0.027711 0.000176705 ND 0.00176046 0.008712 0.00169458 ND 0.0008691 0.001899 0.000438232 ND 08/03/11 01:25:35 PM 0.218208 0.00578596 0.032423 0.00745605 0.089553 0.00522708 ND 0.00398734 0.007872 0.000139653 ND 0.00139132 0.009905 0.00166443 ND 0.000853636 0.001902 0.000532153 ND 08/03/11 01:31:27 PM 0.169943 0.0053666 0.037071 0.00691565 0.094377 0.00534097 ND 0.00407422 0.00215 0.000142696 ND 0.00142163 0.009591 0.00165689 ND 0.000849769 0.001993 0.000472603 ND 08/03/11 01:37:22 PM 0.140984 0.00536328 0.039568 0.00691137 0.098694 0.00541343 ND 0.00412949 0.002743 0.000144632 ND 0.00144092 0.009653 0.00161428 ND 0.000827917 0.002101 0.000434149 ND 08/03/11 01:43:22 PM 0.193772 0.00504835 0.014931 0.00650553 0.085513 0.00555284 ND 0.00423584 0.005339 0.000148356 ND 0.00147803 0.008898 0.00161753 ND 0.000829585 0.002127 0.000484336 ND 08/03/11 01:49:13 PM 0.365492 0.0052509 ND 0.00676655 0.075489 0.00563571 ND 0.00429905 0.001398 0.00015057 ND 0.00150008 0.007083 0.00163041 ND 0.000836189 0.002594 0.000759745 ND 08/03/11 01:55:04 PM 0.485359 0.00540894 ND 0.00697021 0.085621 0.00606471 ND 0.00462631 0.014464 0.000162032 ND 0.00161427 0.006022 0.00164789 ND 0.000845156 0.002888 0.000950884 ND 08/03/11 02:00:56 PM 0.344616 0.00530474 ND 0.00683593 0.087324 0.00541218 ND 0.00412854 0.010505 0.000144598 ND 0.00144059 0.005335 0.00162393 ND 0.000832868 0.002993 0.000797185 ND 08/03/11 02:06:50 PM 0.146323 0.00520608 0.015323 0.00670879 0.08741 0.00496911 ND 0.00379056 0.002837 0.000132761 ND 0.00132265 0.00569 0.00160083 ND 0.000821017 0.002982 0.000559119 ND 08/03/11 02:12:44 PM 0.099989 0.00514955 0.011381 0.00663594 0.081196 0.00505347 ND 0.00385491 0.002256 0.000135015 ND 0.00134511 0.005746 0.00158832 ND 0.000814601 0.002902 0.000578386 ND 08/03/11 02:18:41 PM 0.18181 0.00505516 ND 0.0065143 0.084306 0.00507147 ND 0.00386864 0.001892 0.000135496 ND 0.0013499 0.004912 0.00161737 ND 0.000829503 0.002879 0.000644599 ND 08/03/11 02:24:33 PM 0.196963 0.00484074 ND 0.006238 0.075342 0.00517312 ND 0.00394618 0.001648 0.000138211 ND 0.00137695 0.004669 0.00162755 ND 0.000834726 0.002911 0.00063175 ND 08/03/11 02:30:25 PM 0.18734 0.00500132 ND 0.00644493 0.074222 0.00489552 ND 0.00373442 0.00167 0.000130795 ND 0.00130306 0.007492 0.00161315 ND 0.00082734 0.002249 0.000459725 ND 08/03/11 02:36:20 PM 0.185518 0.00499102 0.046438 0.00643165 0.073001 0.00513546 ND 0.00391745 0.010864 0.000137205 ND 0.00136693 0.007543 0.00152469 ND 0.000781971 0.002424 0.000445856 ND 08/03/11 02:42:16 PM 0.093951 0.00512437 0.055805 0.00660349 0.07341 0.00507436 ND 0.00387085 0.010745 0.000135573 ND 0.00135067 0.008093 0.00147538 ND 0.000756678 0.002622 0.000348467 ND 08/03/11 02:48:09 PM 0.179888 0.00502773 0.047257 0.00647896 0.072896 0.00494455 ND 0.00377182 0.002606 0.000132105 ND 0.00131612 0.007976 0.0014628 ND 0.000750226 0.003108 0.000462992 ND 08/03/11 02:53:57 PM 0.402198 0.00508556 0.028569 0.00655349 0.061837 0.00819086 ND 0.00624818 0.039191 0.000218837 ND 0.0021802 0.005549 0.00139242 ND 0.000714133 0.003819 0.000816085 ND 08/03/11 02:59:51 PM 0.532109 0.00535085 0.012731 0.00689535 0.061455 0.00657612 ND 0.00501642 0.024166 0.000175696 ND 0.0017504 0.006189 0.00147985 ND 0.000758974 0.003891 0.000949489 ND 08/03/11 03:05:43 PM 0.24385 0.00514789 0.014378 0.0066338 0.067481 0.00505929 ND 0.00385935 0.004028 0.00013517 ND 0.00134666 0.006229 0.00156325 ND 0.000801746 0.003289 0.000605852 ND 08/03/11 03:11:30 PM 0.17374 0.00495893 0.015246 0.00639031 0.074128 0.00490858 ND 0.00374438 0.002753 0.000131144 ND 0.00130654 0.005741 0.00156364 ND 0.000801947 0.002831 0.000536856 ND 08/03/11 03:17:22 PM 0.192436 0.00474803 0.010326 0.00611853 0.074893 0.0049142 ND 0.00374867 0.002045 0.000131294 ND 0.00130804 0.005364 0.00169747 ND 0.000870581 0.002849 0.000617933 ND 08/03/11 03:23:17 PM 0.26304 0.00467237 ND 0.00602103 0.07884 0.00511573 ND 0.0039024 0.002411 0.000136678 ND 0.00136168 0.006006 0.00175059 ND 0.000897827 0.002756 0.000686375 ND 08/03/11 03:29:12 PM 0.137632 0.00464055 ND 0.00598003 0.092241 0.0048975 ND 0.00373593 0.002111 0.000130848 ND 0.00130359 0.006617 0.00174995 ND 0.0008975 0.002528 0.000472795 ND 08/03/11 03:35:04 PM 0.151423 0.00458381 ND 0.00590691 0.102951 0.00476929 ND 0.00363813 0.001676 0.000127422 ND 0.00126947 0.008581 0.00169223 ND 0.000867894 0.002033 0.000382468 ND



### Page 3

### FAB1_Stack1

Timestamp 08/02/11 05:29:31 PM 08/02/11 05:35:23 PM 08/02/11 06:52:15 PM 08/02/11 06:58:08 PM 08/02/11 07:04:00 PM 08/02/11 07:09:59 PM 08/02/11 07:15:55 PM 08/02/11 07:21:50 PM 08/02/11 07:27:39 PM 08/02/11 07:33:29 PM 08/02/11 07:39:24 PM 08/02/11 07:45:19 PM 08/02/11 07:51:16 PM 08/02/11 07:57:09 PM 08/02/11 08:03:07 PM 08/02/11 08:09:07 PM 08/02/11 08:15:03 PM 08/02/11 08:20:58 PM 08/02/11 08:26:51 PM 08/02/11 08:32:49 PM 08/02/11 08:38:42 PM 08/02/11 08:44:40 PM 08/02/11 08:50:37 PM 08/02/11 08:56:32 PM 08/02/11 09:02:33 PM 08/02/11 09:08:30 PM 08/02/11 09:14:24 PM 08/02/11 09:20:15 PM 08/02/11 09:26:10 PM 08/02/11 09:32:03 PM 08/02/11 09:37:53 PM 08/02/11 09:43:54 PM 08/02/11 09:49:49 PM 08/02/11 09:55:46 PM 08/02/11 10:01:46 PM 08/02/11 10:07:41 PM 08/02/11 10:13:36 PM 08/02/11 10:19:35 PM 08/02/11 10:25:31 PM 08/02/11 10:31:27 PM 08/02/11 10:37:19 PM 08/02/11 10:43:07 PM 08/02/11 10:48:55 PM 08/02/11 10:54:54 PM 08/02/11 11:00:55 PM 08/02/11 11:06:49 PM 08/02/11 11:12:42 PM 08/02/11 11:18:35 PM 08/02/11 11:24:25 PM 08/02/11 11:30:24 PM 08/02/11 11:36:15 PM 08/02/11 11:42:08 PM 08/02/11 11:48:01 PM 08/02/11 11:53:56 PM 08/02/11 11:59:55 PM 08/03/11 12:05:51 AM 08/03/11 12:11:47 AM 08/03/11 12:17:41 AM 08/03/11 12:23:32 AM 08/03/11 12:29:29 AM 08/03/11 12:35:23 AM 08/03/11 12:41:15 AM 08/03/11 12:47:12 AM 08/03/11 12:53:06 AM 08/03/11 12:59:02 AM 08/03/11 01:04:59 AM 08/03/11 01:10:56 AM 08/03/11 01:16:48 AM 08/03/11 01:22:47 AM 08/03/11 01:28:40 AM 08/03/11 01:34:36 AM 08/03/11 01:40:29 AM CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.0041397 0.005153 0.00322167 0.018997 0.00585325 ND 0.0414703 0.11954 0.00599143 15.259121 0.71176 11.148349 1.13541 0.00195321 0.006923 0.000716912 0.033882 0.00187251 ND 0.0279155 0.134158 0.00550235 17.895628 0.996945 12.810356 1.59035 0.00339283 0.010866 0.00219381 0.042192 0.00188265 ND 0.0231612 0.226879 0.00461582 19.287962 0.831449 10.104672 1.33719 0.00381635 0.011541 0.00313243 0.049404 0.00278413 ND 0.0233209 0.243545 0.00468616 18.273353 1.04186 11.203872 1.67559 0.0045266 0.007904 0.00370377 0.037374 0.00346448 ND 0.0222916 0.190702 0.00355909 17.69117 0.789659 9.433567 1.26998 0.00423011 0.007612 0.0029068 0.032044 0.00232087 ND 0.0234371 0.161283 0.00546864 17.814329 0.975993 10.55773 1.55669 0.00408784 0.008576 0.00320121 0.03056 0.00235006 ND 0.0234449 0.157351 0.0051817 17.850721 0.742735 8.439978 1.18465 0.00201322 0.011427 0.00118672 0.039045 0.00199719 ND 0.0247559 0.156331 0.00513823 17.421035 0.768395 8.978374 1.22374 0.0048429 0.010398 0.00367531 0.036026 0.00250729 ND 0.0258303 0.152342 0.00478625 17.135946 0.862972 6.533971 1.37643 0.00222233 0.00929 0.00117491 0.032741 0.00203388 ND 0.0281255 0.131719 0.00409731 17.196407 0.758503 4.620122 1.20799 0.00178628 0.009223 0.00129317 0.033547 0.0020969 ND 0.0290492 0.126753 0.00394969 17.332821 0.899753 5.334848 1.43294 0.00295505 0.006037 0.00117181 0.028674 0.0022448 ND 0.0297223 0.177618 0.00581284 16.501988 1.03176 6.832987 1.64317 0.00341725 0.005424 0.00117221 0.026335 0.00240458 ND 0.0300224 0.186403 0.00281707 16.079792 0.980488 7.893686 1.57486 0.00326169 0.004048 0.00115106 0.025942 0.00237172 ND 0.031477 0.129549 0.00407895 17.656322 0.934386 6.240429 1.4881 0.00210014 0.00381 0.00109291 0.025894 0.00242039 ND 0.0324355 0.12829 0.00410109 18.021275 1.00558 6.275743 1.60148 0.0023564 0.002929 0.00109213 0.024577 0.00247358 ND 0.0334409 0.101612 0.00334832 18.244611 0.981432 5.745942 1.56302 0.00231449 0.00447 0.00109218 0.034691 0.0023453 ND 0.034707 0.099588 0.00338284 18.050944 1.07872 6.019711 1.71796 0.00228822 0.002903 0.00104486 0.038895 0.00242782 ND 0.0362073 0.098364 0.00343744 18.259962 0.969261 4.873829 1.54364 0.00200097 0.003225 0.00104953 0.041765 0.00239997 ND 0.0339056 0.108969 0.00361719 18.161371 0.944554 6.380505 1.50429 0.00247462 0.004124 0.00106567 0.045868 0.00236288 ND 0.0339476 0.115964 0.00386127 19.562121 0.973561 5.988547 1.55049 0.0028271 0.003725 0.000989931 0.046923 0.00242447 ND 0.0361927 0.128611 0.00445639 20.261537 1.22927 4.242607 1.62848 0.00318056 0.00349 0.00101584 0.043022 0.00248541 ND 0.0356893 0.144525 0.00495982 19.637353 1.36236 5.6448 1.80479 0.00317705 0.004454 0.00108822 0.049075 0.00247673 ND 0.0341778 0.14295 0.00471 18.678917 0.898121 6.967621 1.43034 0.00316194 0.004145 0.00113829 0.045439 0.00245521 ND 0.0351809 0.152219 0.0051005 18.164749 0.985817 6.21224 1.57001 0.00296375 0.004518 0.00107805 0.04632 0.00245121 ND 0.0331533 0.160417 0.00538702 18.439558 0.934776 7.805684 1.48872 0.0026576 0.004395 0.00113617 0.048894 0.00251409 ND 0.0328183 0.156505 0.00524891 18.168631 1.15747 9.729757 1.84337 0.00278169 0.004947 0.00113118 0.049465 0.00246569 ND 0.0334045 0.156394 0.00528756 19.352224 1.05305 7.788572 1.67708 0.00267642 0.005597 0.00105429 0.049211 0.00240587 ND 0.033681 0.162167 0.00559303 20.186789 1.21461 5.188484 1.60906 0.00317247 0.006643 0.00103666 0.048887 0.00243969 ND 0.030988 0.199567 0.0033827 19.543731 1.11014 9.696036 1.7831 0.00351832 0.007209 0.0010803 0.048186 0.00236678 ND 0.0312098 0.231715 0.00391088 17.824611 1.06273 8.71874 1.70696 0.00303474 0.005759 0.00101801 0.045228 0.00239176 ND 0.0324267 0.201825 0.00321204 17.431758 1.05636 7.206126 1.69672 0.00304244 0.004714 0.000967979 0.042185 0.00230648 ND 0.0328451 0.171512 0.00586378 18.6817 0.918785 6.99645 1.46325 0.00207162 0.004814 0.00100624 0.041143 0.00232657 ND 0.0332793 0.168159 0.00579772 19.894413 0.994539 5.397911 1.31752 0.00168286 0.005101 0.000977447 0.039577 0.00233699 ND 0.0326003 0.172478 0.00598466 20.184334 0.901278 5.687608 1.19397 0.00151386 0.004748 0.00092953 0.038628 0.00228565 ND 0.0340718 0.157709 0.00544815 20.098408 0.898308 4.058222 1.19004 0.00177576 0.003211 0.00103035 0.03728 0.00232743 ND 0.0313282 0.149195 0.00502114 19.668605 0.888703 7.894926 1.41534 0.00198104 0.002911 0.000999077 0.039007 0.00235805 ND 0.0309996 0.164506 0.00555661 18.726832 0.806991 7.836012 1.28521 0.00266623 0.002892 0.00106522 0.040533 0.00237469 ND 0.0303171 0.184986 0.0029899 18.319305 0.872364 7.509781 1.40119 0.00288158 0.002665 0.00106273 0.039697 0.00230265 ND 0.0303922 0.162615 0.00544877 18.433985 0.808782 7.086866 1.28806 0.00279914 0.002627 0.00099481 0.039649 0.00229554 ND 0.0310429 0.173326 0.00592123 19.073858 0.690203 5.407922 1.09921 0.00257931 0.002407 0.00108508 0.039322 0.00231837 ND 0.0303374 0.163869 0.00554051 19.217056 1.22552 8.87594 1.95175 0.00238914 0.002455 0.0010148 0.039336 0.00229765 ND 0.029848 0.154063 0.00519077 18.91487 1.11015 8.781201 1.76802 0.0026715 0.002472 0.000895757 0.037322 0.0022536 ND 0.0289529 0.156983 0.00537405 19.257082 1.07711 8.841264 1.7154 0.00236244 0.003701 0.000867174 0.037602 0.0022237 ND 0.0292504 0.152844 0.00537891 19.346377 1.0894 12.230904 1.73497 0.00249619 0.003654 0.000897005 0.03927 0.00216845 ND 0.0299277 0.15536 0.0052061 18.847079 0.983687 7.225095 1.56661 0.00275679 0.004693 0.00102154 0.041649 0.00215279 ND 0.0285434 0.182492 0.00298988 18.537795 1.12049 7.696699 1.79973 0.00243709 0.005476 0.00106782 0.046998 0.00216097 ND 0.0278441 0.187799 0.00314612 19.010844 1.11198 8.061442 1.78606 0.00224931 0.0048 0.000975781 0.042495 0.00218167 ND 0.0278424 0.203747 0.00376542 19.403119 1.07047 10.886506 1.71939 0.00343351 0.004533 0.000919818 0.037875 0.00221554 ND 0.027102 0.251044 0.00453557 18.140856 1.24888 10.478103 2.00594 0.0083766 0.004037 0.00372514 0.040981 0.00269581 ND 0.0292653 0.230514 0.00397394 17.341567 1.00539 7.628392 1.61676 0.00715978 0.003386 0.00363346 0.042534 0.00259901 ND 0.0288421 0.2072 0.003398 18.112841 1.26665 6.936254 2.03688 0.00670277 0.001983 0.00352419 0.030922 0.00255489 ND 0.0281477 0.173221 0.00601578 19.716198 1.28163 5.280836 1.70018 0.00469521 0.001695 0.00340321 0.028012 0.00251261 ND 0.0263489 0.174981 0.00614613 20.544789 1.67908 9.441183 2.22742 0.00527545 0.002477 0.00335613 0.033602 0.00247398 ND 0.0258172 0.204367 0.00355042 20.689292 1.51183 8.55267 2.02059 0.0057119 0.001522 0.00448819 0.037567 0.00409226 ND 0.0258364 0.181685 0.00310479 19.933981 1.14396 5.920749 1.52906 0.00568118 0.000871 0.00445687 0.033039 0.00406744 ND 0.0258927 0.163503 0.00550993 19.357283 1.31214 8.216966 2.09315 0.00551367 ND 0.0043618 0.031408 0.00402077 ND 0.028612 0.155806 0.0054125 19.108447 0.834375 6.985907 1.33101 0.00551575 ND 0.00426002 0.027364 0.00385487 ND 0.0258679 0.149858 0.00500705 19.341608 0.714148 5.3756 1.13922 0.00555842 0.000741 0.00413927 0.033402 0.00366461 ND 0.0250587 0.156899 0.00532775 19.797031 0.850211 6.413359 1.35627 0.00555103 0.002162 0.00399636 0.041667 0.00346342 ND 0.0237436 0.172673 0.00597546 19.748261 0.732381 8.373755 1.16831 0.00518946 0.004238 0.00389176 0.046975 0.00332186 ND 0.0220931 0.201929 0.00344047 19.581789 0.818503 8.080819 1.31637 0.00486684 0.005848 0.00391045 0.048686 0.00335124 ND 0.0218219 0.208789 0.00349392 19.345169 1.06449 8.658112 1.71198 0.00474013 0.006458 0.00373276 0.043653 0.0032035 ND 0.0216396 0.210059 0.00354751 18.92083 0.937801 8.073519 1.50823 0.00524747 0.006456 0.00364074 0.043883 0.0030403 ND 0.0215918 0.216801 0.00368746 18.665476 0.849283 7.275354 1.36587 0.00625481 0.007627 0.00363701 0.049943 0.00301707 ND 0.0213405 0.289513 0.00558325 17.230775 0.958118 9.131828 1.54091 0.00549132 0.007377 0.00359019 0.054437 0.00302238 ND 0.0216242 0.259682 0.00460612 16.28831 0.847387 7.705785 1.36282 0.00487156 0.006253 0.00361976 0.04965 0.00304911 ND 0.0233935 0.233678 0.00430435 17.934962 0.774117 7.760584 1.24499 0.00495918 0.006635 0.00359429 0.04876 0.00305276 ND 0.0243821 0.241067 0.00470124 17.767429 0.849716 11.712207 1.36657 0.00444864 0.0077 0.00354418 0.054716 0.0030121 ND 0.0239415 0.274809 0.00545376 16.644573 0.913364 11.940084 1.46893 0.00458051 0.007578 0.00354712 0.056435 0.00305509 ND 0.0246506 0.268466 0.00537275 15.880975 1.09068 13.744075 1.7541 0.00425872 0.005969 0.00347866 0.053179 0.00297066 ND 0.0237539 0.229882 0.00444152 17.122814 1.20101 12.638221 1.93154 0.00459616 0.005925 0.00357433 0.055198 0.00302525 ND 0.0224911 0.237596 0.00439246 16.672738 0.889085 10.692602 1.42989



### Page 4

### FAB1_Stack1

Timestamp 08/03/11 01:46:22 AM 08/03/11 01:52:14 AM 08/03/11 01:58:09 AM 08/03/11 02:04:03 AM 08/03/11 02:10:00 AM 08/03/11 02:15:53 AM 08/03/11 02:21:48 AM 08/03/11 02:27:43 AM 08/03/11 02:33:39 AM 08/03/11 02:39:32 AM 08/03/11 02:45:25 AM 08/03/11 02:51:17 AM 08/03/11 02:57:16 AM 08/03/11 03:03:07 AM 08/03/11 03:09:00 AM 08/03/11 03:14:55 AM 08/03/11 03:20:45 AM 08/03/11 03:26:39 AM 08/03/11 03:32:32 AM 08/03/11 03:38:28 AM 08/03/11 03:44:15 AM 08/03/11 03:50:07 AM 08/03/11 03:56:03 AM 08/03/11 04:01:57 AM 08/03/11 04:07:57 AM 08/03/11 04:13:46 AM 08/03/11 04:19:41 AM 08/03/11 04:25:34 AM 08/03/11 04:31:33 AM 08/03/11 04:37:28 AM 08/03/11 04:43:25 AM 08/03/11 04:49:18 AM 08/03/11 04:55:12 AM 08/03/11 05:01:07 AM 08/03/11 05:06:58 AM 08/03/11 05:12:55 AM 08/03/11 05:18:42 AM 08/03/11 05:24:40 AM 08/03/11 05:30:35 AM 08/03/11 05:36:31 AM 08/03/11 05:42:26 AM 08/03/11 05:48:23 AM 08/03/11 05:54:17 AM 08/03/11 06:00:09 AM 08/03/11 06:06:06 AM 08/03/11 06:11:58 AM 08/03/11 06:17:51 AM 08/03/11 06:23:49 AM 08/03/11 06:29:41 AM 08/03/11 06:35:38 AM 08/03/11 06:41:32 AM 08/03/11 06:47:25 AM 08/03/11 06:53:23 AM 08/03/11 06:59:20 AM 08/03/11 07:05:06 AM 08/03/11 07:11:00 AM 08/03/11 07:16:53 AM 08/03/11 07:22:43 AM 08/03/11 07:28:35 AM 08/03/11 07:34:24 AM 08/03/11 07:40:19 AM 08/03/11 07:46:13 AM 08/03/11 07:52:12 AM 08/03/11 10:16:47 AM 08/03/11 10:22:44 AM 08/03/11 10:28:40 AM 08/03/11 10:34:38 AM 08/03/11 10:40:25 AM 08/03/11 10:46:20 AM 08/03/11 10:52:13 AM 08/03/11 10:58:05 AM 08/03/11 11:04:01 AM CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.00489852 0.00571 0.00363148 0.052694 0.00310063 ND 0.0236764 0.252763 0.00482874 17.104947 1.02515 11.630804 1.64871 0.00487901 0.004886 0.00355932 0.047328 0.00307369 ND 0.0220297 0.220165 0.00404645 17.490013 0.966646 11.129394 1.55462 0.00488602 0.004894 0.0034515 0.045393 0.00298461 ND 0.0250933 0.21425 0.00444163 18.307544 1.05562 12.939744 1.69771 0.00376443 0.004398 0.00318818 0.042541 0.00262704 ND 0.0230747 0.20229 0.00404995 18.800458 0.965811 11.16296 1.55328 0.00344267 0.003895 0.00301645 0.039562 0.00247704 ND 0.0233804 0.188188 0.0039683 19.533737 0.790296 11.030217 1.27101 0.003658 0.00275 0.00301409 0.040108 0.00250618 ND 0.023899 0.185702 0.0040191 19.143614 1.01078 12.231579 1.6256 0.0036204 0.003207 0.00298242 0.043375 0.00249971 ND 0.0227096 0.217997 0.00423989 17.424815 0.898467 11.346369 1.44497 0.00390128 0.001197 0.00295236 0.039751 0.00250003 ND 0.0230976 0.180893 0.00381827 15.102221 0.741068 11.825721 1.19183 0.00315302 0.001433 0.00279108 0.040901 0.00226988 ND 0.0205433 0.174965 0.00590796 13.98646 0.816053 10.380778 1.30178 0.00317515 0.001253 0.00286097 0.045572 0.00234639 ND 0.0218893 0.217078 0.0040912 13.167614 0.817036 11.363593 1.31401 0.00364535 0.002182 0.0029497 0.046314 0.00238456 ND 0.0209043 0.231017 0.00416549 12.955601 0.996937 11.365839 1.60334 0.00440758 0.002426 0.00294243 0.048929 0.00232248 ND 0.0218837 0.216774 0.00419071 14.153054 0.887285 11.939789 1.42699 0.00579679 0.002768 0.00291619 0.054896 0.00220807 ND 0.0203668 0.239077 0.00439352 14.009878 0.827992 10.847469 1.33163 0.00540179 0.002183 0.00278513 0.055696 0.00212626 ND 0.0213973 0.218454 0.00418776 15.013676 0.83562 10.799773 1.3439 0.00439435 0.003141 0.00261334 0.052888 0.00199932 ND 0.0204364 0.215306 0.0040128 15.58784 0.81347 9.94842 1.30828 0.00413958 0.003282 0.00257012 0.054891 0.00201338 ND 0.0205364 0.237446 0.00442037 14.280838 0.829266 10.554067 1.33368 0.00538555 0.00401 0.00267273 0.062937 0.002061 ND 0.0199408 0.246676 0.00453161 14.67549 0.876806 9.988264 1.41014 0.00544507 0.006514 0.00249579 0.066691 0.00190834 ND 0.0193085 0.243956 0.00443063 16.058874 0.852823 9.398919 1.37157 0.00330633 0.006928 0.00236357 0.060997 0.00184618 ND 0.022094 0.237087 0.00457619 15.81042 0.718942 10.965218 1.15625 0.00339073 0.005895 0.00248083 0.056801 0.00194546 ND 0.0215197 0.251487 0.00484203 15.176727 0.877034 11.196302 1.4105 0.00357499 0.006123 0.00252991 0.056417 0.00201282 ND 0.0228442 0.278278 0.00566291 15.444922 0.905511 11.944639 1.4563 0.00315567 0.004705 0.0023747 0.051518 0.00189135 ND 0.0217345 0.232141 0.00456255 16.285431 0.878966 11.432863 1.41361 0.00331671 0.004266 0.00226977 0.05145 0.00194053 ND 0.027484 0.237511 0.00539939 15.363469 0.854245 14.434748 1.37385 0.00340275 0.003027 0.00226302 0.044502 0.0017221 ND 0.0240558 0.218172 0.00449426 13.237834 0.845262 10.399387 1.35941 0.00574073 0.001216 0.0021577 0.031508 0.0016821 ND 0.0205449 0.247658 0.00459578 11.09094 0.910901 10.113274 1.46497 0.00833092 0.002608 0.00214812 0.036698 0.00161383 ND 0.0191106 0.205808 0.00372913 10.959398 0.737105 9.257444 1.18546 0.00594654 0.002395 0.00211926 0.03617 0.00170478 ND 0.0197181 0.218899 0.0040084 10.814756 0.756621 10.163961 1.21685 0.00382577 0.000895 0.00204982 0.031251 0.00172078 ND 0.0220816 0.207245 0.00423919 10.824585 0.806121 11.925524 1.29646 0.00489817 0.001288 0.00195982 0.032966 0.00162635 ND 0.0222298 0.19431 0.0041324 12.134269 0.716664 11.202074 1.15259 0.00505928 0.002348 0.00188615 0.036424 0.00147217 ND 0.0191784 0.210366 0.00390593 12.096159 0.790733 9.804354 1.27171 0.00467488 0.003282 0.00172046 0.034899 0.00135814 ND 0.0182914 0.21699 0.00389405 12.878751 0.75651 8.014931 1.21667 0.00227825 0.003333 0.00176155 0.035117 0.00147734 ND 0.0197832 0.252955 0.0048219 12.373862 0.744074 9.418533 1.19667 0.00222659 0.004428 0.00171785 0.036587 0.00156085 ND 0.0197231 0.257189 0.00484629 11.811013 0.689445 9.2437 1.10881 0.00261628 0.00259 0.00160817 0.03639 0.00145489 ND 0.0186208 0.211756 0.00384255 12.181113 0.604853 7.368815 0.972766 0.00274437 0.00245 0.00142065 0.036378 0.00141864 ND 0.0187595 0.214728 0.00388661 12.752561 0.6819 7.144433 1.09668 0.00340627 0.003117 0.00132775 0.035729 0.00147357 ND 0.0187224 0.205676 0.00377385 13.856316 0.770869 7.191481 1.23976 0.00311134 0.002893 0.00135477 0.040099 0.0015112 ND 0.0187182 0.198863 0.00362694 15.089887 0.698419 5.576371 1.12324 0.00239309 0.003733 0.00135622 0.041017 0.0015549 ND 0.0189393 0.233117 0.00432569 16.170975 0.753395 6.473021 1.21166 0.00219746 0.003059 0.00145554 0.042015 0.00168517 ND 0.0203092 0.225003 0.00435084 14.84002 0.697243 8.338679 1.12135 0.00215479 0.002267 0.00136139 0.037891 0.00164343 ND 0.0179259 0.206427 0.00367395 13.331903 0.753338 6.276325 1.21157 0.00165353 0.003268 0.00127874 0.030602 0.00166546 ND 0.0182444 0.217565 0.00380269 12.869493 0.722747 5.679852 1.16237 0.00266857 0.002589 0.00114711 0.028193 0.00172745 ND 0.0188985 0.193051 0.00361172 13.004486 0.647794 5.797441 1.04182 0.00299787 0.004978 0.0012032 0.03058 0.00178022 ND 0.0202364 0.211429 0.00408559 13.393311 0.692781 8.040397 1.11418 0.00303202 0.00532 0.00114808 0.028502 0.00189644 ND 0.0197806 0.219833 0.00414537 14.006984 0.710482 7.559235 1.14264 0.0030453 0.00488 0.00124063 0.027376 0.00197176 ND 0.0197232 0.205697 0.00393346 14.147186 0.745363 7.683941 1.19874 0.00342498 0.003999 0.00122929 0.023401 0.00227228 ND 0.0307967 0.218449 0.0054985 13.535464 0.755685 14.569379 1.21534 0.00317886 0.004072 0.00126813 0.024698 0.00227107 ND 0.029233 0.212421 0.00515768 12.929443 0.844556 13.745222 1.35827 0.00288036 0.003264 0.00126184 0.027254 0.00235038 ND 0.0308333 0.198103 0.00516724 13.668873 0.739647 13.164897 1.18955 0.00286627 0.003641 0.00131872 0.029756 0.00232506 ND 0.0304465 0.200164 0.00516813 13.599777 0.774339 13.589461 1.24534 0.00294323 0.004175 0.00127353 0.029174 0.00247785 ND 0.0332667 0.195691 0.00544902 14.152053 0.838108 14.611101 1.3479 0.0030174 0.004144 0.00121554 0.026341 0.00246431 ND 0.0314354 0.194498 0.00524396 14.738793 0.905648 13.788789 1.45652 0.00355426 0.005489 0.00112217 0.033572 0.00256536 ND 0.0325126 0.204124 0.00546001 14.274806 0.916175 14.51391 1.47345 0.00304118 0.006965 0.00116074 0.036728 0.00256798 ND 0.0304912 0.221193 0.00534663 12.967423 0.76531 13.32724 1.23082 0.00449115 0.005961 0.00118248 0.028007 0.00250496 ND 0.036288 0.234949 0.00565717 12.661224 0.900546 16.141587 1.44832 0.00467399 0.004224 0.00146858 0.025976 0.00234051 ND 0.0404501 0.228206 0.00584857 12.743758 0.871967 18.811827 1.40236 0.00434151 0.003988 0.00158807 0.028628 0.0024679 ND 0.0381993 0.234045 0.00565989 12.304173 1.02634 19.851231 1.65062 0.00567258 0.004744 0.00167847 0.032143 0.00255165 ND 0.0392661 0.268953 0.00560985 12.347409 0.90607 18.819284 1.4572 0.00680873 0.005048 0.00167341 0.039059 0.00248844 ND 0.0402926 0.266791 0.00571879 12.340313 0.871573 21.12499 1.40172 0.00786742 0.004163 0.00182414 0.038423 0.00277633 ND 0.039155 0.261941 0.00537708 12.508654 1.35967 22.385565 2.18671 0.0104541 0.003555 0.00191227 0.03216 0.00302302 ND 0.0411034 0.255327 0.00551247 12.406578 1.13262 22.502153 1.82156 0.0134105 0.001953 0.0019451 0.027712 0.00322022 ND 0.0430142 0.269542 0.00588744 11.222537 1.87785 27.070394 3.02008 0.0155424 0.000801 0.00210633 0.022622 0.00375537 ND 0.04798 0.244748 0.00595425 11.908209 1.08562 26.201687 1.74596 0.0170256 0.002313 0.00205823 0.014942 0.00377314 ND 0.0475135 0.258683 0.00608361 10.666978 1.36516 27.329342 2.19554 0.00508071 0.001148 0.00318394 0.02823 0.00542565 ND 0.037472 0.167053 0.00678769 16.784918 0.765668 10.102474 1.22141 0.00537218 0.001536 0.00364768 0.021916 0.00602696 ND 0.0401912 0.162666 0.0067944 16.179205 0.749118 11.012642 1.19501 0.00531726 0.001505 0.00392229 0.023477 0.00636089 ND 0.0410517 0.153145 0.00648761 16.51595 0.753364 9.438166 1.20178 0.00665274 0.001496 0.00412155 0.020909 0.0065764 ND 0.0440864 0.166643 0.00714275 16.732206 0.779075 10.812227 1.2428 0.00704945 0.003095 0.00420517 0.026328 0.00674381 ND 0.0456938 0.181184 0.00610664 16.658712 0.744915 10.839688 1.19802 0.00693159 0.00209 0.00432284 0.019917 0.00682603 ND 0.0466248 0.166377 0.00762448 16.56501 0.763686 12.261662 1.21825 0.00616175 0.002252 0.00441209 0.022418 0.00698908 ND 0.0479913 0.163323 0.00745177 16.418774 0.772295 11.797302 1.23198 0.00716589 0.00387 0.00440354 0.031248 0.00698314 ND 0.0480059 0.181175 0.00640377 16.58919 0.751233 10.655604 1.20818 0.00693958 0.004523 0.00443071 0.033411 0.00697587 ND 0.0463793 0.184604 0.00621521 16.981541 0.771447 9.450782 1.24069



### Page 5

### FAB1_Stack1

Timestamp 08/03/11 11:09:52 AM 08/03/11 11:15:44 AM 08/03/11 11:21:34 AM 08/03/11 11:27:27 AM 08/03/11 11:33:19 AM 08/03/11 11:39:07 AM 08/03/11 11:44:56 AM 08/03/11 11:50:50 AM 08/03/11 11:56:46 AM 08/03/11 12:02:41 PM 08/03/11 12:08:31 PM 08/03/11 12:14:29 PM 08/03/11 12:20:23 PM 08/03/11 12:26:18 PM 08/03/11 12:32:15 PM 08/03/11 12:38:10 PM 08/03/11 12:44:00 PM 08/03/11 12:50:00 PM 08/03/11 12:55:57 PM 08/03/11 01:01:54 PM 08/03/11 01:07:49 PM 08/03/11 01:13:41 PM 08/03/11 01:19:42 PM 08/03/11 01:25:35 PM 08/03/11 01:31:27 PM 08/03/11 01:37:22 PM 08/03/11 01:43:22 PM 08/03/11 01:49:13 PM 08/03/11 01:55:04 PM 08/03/11 02:00:56 PM 08/03/11 02:06:50 PM 08/03/11 02:12:44 PM 08/03/11 02:18:41 PM 08/03/11 02:24:33 PM 08/03/11 02:30:25 PM 08/03/11 02:36:20 PM 08/03/11 02:42:16 PM 08/03/11 02:48:09 PM 08/03/11 02:53:57 PM 08/03/11 02:59:51 PM 08/03/11 03:05:43 PM 08/03/11 03:11:30 PM 08/03/11 03:17:22 PM 08/03/11 03:23:17 PM 08/03/11 03:29:12 PM 08/03/11 03:35:04 PM CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.00701358 0.005072 0.00446351 0.02925 0.00707114 ND 0.0497029 0.180033 0.00659011 17.652677 0.788451 12.184865 1.26804 0.00486087 0.00451 0.00424814 0.0245 0.0067204 ND 0.0462174 0.174459 0.0075853 18.787666 0.778144 10.631094 1.24131 0.00501838 0.005876 0.00408104 0.025392 0.00656236 ND 0.0476894 0.182652 0.00637659 18.784453 0.773052 11.331861 1.24327 0.00508269 0.007002 0.0039282 0.028843 0.00634951 ND 0.0413976 0.186504 0.00561234 17.931847 0.761363 8.267337 1.22448 0.00548197 0.00701 0.00407518 0.033198 0.00645146 ND 0.0404025 0.215774 0.0057059 16.994776 0.754886 7.507432 1.21406 0.0058677 0.005341 0.00421983 0.029898 0.00661467 ND 0.0398586 0.216742 0.00564105 17.171969 0.764219 6.462925 1.22907 0.0055907 0.004369 0.00416777 0.02747 0.00650182 ND 0.0396328 0.222133 0.00574376 17.773271 0.752645 6.837631 1.21045 0.00545396 0.004369 0.0040029 0.027255 0.00627058 ND 0.0404671 0.217047 0.00581015 17.664529 0.748253 7.821411 1.20339 0.00552944 0.003284 0.00414106 0.027166 0.00646313 ND 0.0432775 0.188347 0.00595438 16.811319 0.743451 9.667222 1.19567 0.0054884 0.00408 0.00426342 0.029311 0.00662108 ND 0.0405016 0.153262 0.00634192 14.227037 0.692918 7.644385 1.10536 0.00551778 0.002165 0.0042549 0.024353 0.00661612 ND 0.0442745 0.150992 0.00671803 13.122355 0.732124 11.102879 1.1679 0.00527982 0.001752 0.00410557 0.024659 0.00633934 ND 0.0429291 0.151613 0.0066318 13.034372 0.698591 10.832073 1.11441 0.00505392 0.003518 0.00398223 0.026342 0.00622856 ND 0.0448224 0.189475 0.00631554 12.968665 0.730407 11.586634 1.17469 0.00471008 0.004345 0.00371829 0.027659 0.00598921 ND 0.0423028 0.203924 0.00607875 11.997879 0.709834 10.679786 1.1416 0.00483759 0.002274 0.00373522 0.025577 0.00583325 ND 0.0397932 0.156985 0.00649672 11.829766 0.702075 10.580829 1.11996 0.00490867 0.000947 0.00359582 0.023515 0.00573691 ND 0.0455317 0.142512 0.00685471 11.496046 0.715507 14.39412 1.14139 0.00474641 0.001145 0.00330819 0.023883 0.00534795 ND 0.037988 0.126927 0.00577166 11.668553 0.690404 11.213862 1.10135 0.0044239 0.000914 0.00320094 0.02257 0.00526972 ND 0.0368703 0.119654 0.0055296 11.57342 0.676805 9.753356 1.07965 0.00434759 ND 0.00314041 0.021211 0.00524873 ND 0.0374937 0.127847 0.00579524 11.665175 0.699854 10.478381 1.11642 0.00460995 ND 0.00322457 0.019726 0.00523149 ND 0.0374482 0.1528 0.00639596 11.874496 0.682699 10.586557 1.08906 0.00459513 ND 0.00320786 0.028922 0.00511973 ND 0.035079 0.15744 0.00623021 12.487404 0.673027 9.412239 1.07362 0.00444345 ND 0.00306552 0.021971 0.00493513 ND 0.0369193 0.141792 0.00613515 13.056251 0.675643 10.459511 1.0778 0.00433804 ND 0.00297691 0.019667 0.00478819 ND 0.0340171 0.143175 0.00590891 12.898141 0.668984 9.537676 1.06718 0.00414408 ND 0.00290086 0.028646 0.0046623 ND 0.0338823 0.134831 0.00570058 13.020155 0.661149 9.283983 1.05468 0.00399356 ND 0.00275391 0.026276 0.00444018 ND 0.0325058 0.13625 0.00559737 12.716026 0.642436 9.78996 1.02483 0.00393973 0.000786 0.00262131 0.031573 0.00433403 ND 0.0332806 0.131381 0.00554225 13.081417 0.65702 9.819975 1.04809 0.00370577 ND 0.00248804 0.034957 0.00422158 ND 0.0339937 0.129275 0.00563249 12.528833 0.674365 11.047073 1.07576 0.00585605 ND 0.00236029 0.019888 0.00389796 ND 0.0352111 0.14955 0.00626172 11.820494 0.698415 13.567906 1.11413 0.00716541 ND 0.00219069 0.029477 0.00352787 ND 0.0267442 0.130433 0.00495006 12.072699 0.640015 7.73226 1.02096 0.00669994 ND 0.00209283 0.027071 0.00348503 ND 0.0256744 0.135834 0.00496772 12.327693 0.607942 6.635323 0.969801 0.00543709 0.000766 0.00200998 0.03553 0.0035031 ND 0.025249 0.133827 0.00485249 12.372797 0.603288 6.218366 0.962377 0.00626514 ND 0.00190769 0.034326 0.00317359 ND 0.0242035 0.133244 0.00482439 12.666215 0.622311 6.468699 0.992722 0.00659388 ND 0.00174058 0.03901 0.00297586 ND 0.028759 0.140967 0.00571081 12.658214 0.621512 11.251051 0.991447 0.00657109 0.000908 0.00171661 0.042306 0.00290201 ND 0.0316078 0.150739 0.0061985 12.250546 0.641627 13.745938 1.02354 0.00262956 ND 0.00164441 0.038974 0.00287547 ND 0.0328668 0.150637 0.0063329 12.332026 0.62608 13.915015 0.998734 0.00265349 ND 0.00166339 0.030584 0.00291302 ND 0.0303029 0.130214 0.0056238 12.503054 0.627811 12.295337 1.0015 0.0028334 ND 0.00159916 0.030461 0.00280369 ND 0.0316081 0.144948 0.00603392 11.961955 0.612731 13.489997 0.97744 0.00282153 ND 0.00150634 0.036807 0.00243228 ND 0.0284505 0.14803 0.00577429 12.120223 0.587795 12.03634 0.937662 0.00617824 ND 0.00162595 0.033197 0.00229249 ND 0.0299867 0.14474 0.00590695 11.962994 0.682735 14.473089 1.08911 0.0065596 ND 0.00169513 0.03588 0.00226123 ND 0.0277125 0.142284 0.00569988 11.948855 0.609319 12.957859 0.971998 0.00505647 0.002761 0.00164741 0.044588 0.00225872 ND 0.0302635 0.154971 0.006266 12.311683 0.609045 13.032053 0.97156 0.00492428 0.001639 0.00164579 0.039781 0.00217468 ND 0.0287439 0.139137 0.00571845 12.010825 0.619525 13.217935 0.988278 0.00625229 0.001581 0.00177246 0.044929 0.00222398 ND 0.0301358 0.175611 0.0067926 12.173712 0.626128 13.897377 0.998812 0.00637715 0.003171 0.00178548 0.05272 0.00223089 ND 0.0313221 0.172528 0.00675047 14.105322 0.642148 13.441755 1.02437 0.004024 0.002873 0.00172997 0.050599 0.00210981 ND 0.0311803 0.166953 0.00669551 16.520457 0.670967 13.319426 1.07034 0.00334848 0.001521 0.00170313 0.044417 0.00220671 ND 0.0320095 0.16014 0.00655456 15.284333 0.664406 14.588658 1.05987



### Page 6

### FAB2_Stack1

Timestamp NF3 NF3 FDL SiH4 SiH4Error C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6 FDL cC4F8 cC4F8 FDL C3F8 C3F8 FDL C5F8 C5F8 FDL SiF4 08/04/11 10:02:35 AM ND 0.0022842 0.001008 0.00294353 0.00441 0.00274161 ND 0.00209136 ND 7.32481e-005 ND 0.000729747 ND 0.00118556 ND 0.000608039 0.000723 08/04/11 10:10:20 AM ND 0.0020103 0.011641 0.00259057 0.014621 0.00293998 ND 0.00224269 ND 7.85481e-005 ND 0.000782549 ND 0.00120432 ND 0.00061766 0.001712 08/04/11 10:18:03 AM ND 0.00183695 0.017499 0.00236717 0.01851 0.00306261 ND 0.00233623 ND 8.18243e-005 ND 0.000815189 ND 0.00122098 ND 0.000626207 0.001567 08/04/11 10:25:48 AM ND 0.00179609 0.019114 0.00231452 0.024424 0.0032154 ND 0.00245278 ND 8.59064e-005 ND 0.000855858 ND 0.00126995 ND 0.000651322 0.001389 08/04/11 10:33:38 AM ND 0.00180389 0.019119 0.00232458 0.031589 0.00338635 ND 0.00258319 ND 9.04738e-005 ND 0.000901361 ND 0.00130484 ND 0.000669213 0.001283 08/04/11 12:14:15 PM ND 0.00172064 0.032334 0.0022173 0.038625 0.00431801 ND 0.00329388 0.002886 0.000115365 ND 0.00114935 ND 0.00154483 ND 0.0007923 0.001016 08/04/11 12:22:03 PM ND 0.00172348 0.028597 0.00222095 0.035305 0.0042274 ND 0.00322476 0.002609 0.000112944 ND 0.00112523 ND 0.00152995 ND 0.000784665 0.00118 08/04/11 12:29:48 PM ND 0.00180289 0.032248 0.00234209 0.034598 0.00522285 ND 0.00360206 0.002407 0.00013918 ND 0.000802026 ND 0.00165818 ND 0.000774591 0.002288 08/04/11 12:37:37 PM ND 0.00188202 0.029192 0.00242526 0.031243 0.00483933 ND 0.00369156 0.002811 0.000129293 ND 0.00128811 ND 0.0016882 ND 0.000865829 0.002304 08/04/11 12:45:21 PM ND 0.00190608 0.023698 0.00245626 0.04345 0.00485646 ND 0.00370462 0.002841 0.000129751 ND 0.00129267 ND 0.00176416 ND 0.000904789 0.00184 08/04/11 12:53:02 PM ND 0.00184 0.021302 0.00237111 0.042942 0.00490946 ND 0.00374505 0.00294 0.000131167 ND 0.00130677 ND 0.00178909 ND 0.000917573 0.001849 08/04/11 01:00:48 PM ND 0.00183305 0.020487 0.00236215 0.049623 0.00499568 ND 0.00381082 0.002702 0.000133471 ND 0.00132972 ND 0.00182412 ND 0.000935536 0.001515 08/04/11 01:08:36 PM ND 0.00179727 0.021409 0.00231605 0.046666 0.00507385 ND 0.00387046 0.003152 0.000135559 ND 0.00135053 ND 0.0018311 ND 0.00093912 0.001057 08/04/11 01:16:27 PM ND 0.00176824 0.01788 0.00227864 0.040317 0.00501667 ND 0.00382683 0.002774 0.000134031 ND 0.00133531 ND 0.00185198 ND 0.000949826 0.000974 08/04/11 01:24:10 PM ND 0.00178758 0.024086 0.00230356 0.043098 0.00510632 ND 0.00389522 0.001384 0.000136427 ND 0.00135917 ND 0.00186061 ND 0.000954253 0.001024 08/04/11 01:31:51 PM ND 0.00174046 0.012286 0.00224284 0.053852 0.00521367 ND 0.00397711 0.00124 0.000139295 ND 0.00138775 ND 0.00194658 ND 0.000998343 0.001072 08/04/11 01:39:34 PM ND 0.00187817 0.098927 0.00242029 0.05159 0.00555788 ND 0.00423968 0.001023 0.000148491 ND 0.00147937 ND 0.00168872 ND 0.000866098 0.00126 08/04/11 01:47:21 PM ND 0.00218897 0.18123 0.00282081 0.029877 0.00604663 ND 0.00461251 0.00071 0.000161549 ND 0.00160946 ND 0.00172579 ND 0.000885105 0.001666 08/04/11 01:55:13 PM ND 0.00234929 0.19405 0.0030274 0.044573 0.00602493 ND 0.00459596 0.00013 0.000160969 ND 0.00160368 ND 0.00174386 ND 0.000894375 0.001465 08/04/11 02:03:00 PM ND 0.00236597 0.200368 0.0030489 0.048739 0.00605533 ND 0.00461915 0.000485 0.000161781 ND 0.00161178 ND 0.00177779 ND 0.000911778 0.001391 08/04/11 02:10:42 PM ND 0.00236921 0.20248 0.00305307 0.032689 0.00607648 ND 0.00463529 0.001588 0.000162347 ND 0.00161741 ND 0.00178124 ND 0.000913548 0.001055 08/04/11 02:18:28 PM ND 0.00251227 0.208389 0.00323743 0.030896 0.00612896 ND 0.00467532 0.002464 0.000163749 ND 0.00163138 ND 0.00182289 ND 0.000934907 0.001113 08/04/11 02:26:14 PM ND 0.00234304 0.191453 0.00301936 0.030024 0.00594475 ND 0.00453479 0.002275 0.000158827 ND 0.00158234 ND 0.00173364 ND 0.000889132 0.00141 08/04/11 02:34:01 PM ND 0.00236888 0.193737 0.00305265 0.03427 0.00604308 ND 0.0046098 0.002324 0.000161454 ND 0.00160852 ND 0.00173287 ND 0.000888739 0.001314 08/04/11 02:41:40 PM ND 0.00234566 0.157004 0.00302272 0.02442 0.00575665 ND 0.00439131 0.002333 0.000153802 ND 0.00153228 ND 0.00170253 ND 0.000873177 0.001151 08/04/11 02:49:22 PM ND 0.00208945 0.13548 0.00269256 0.035917 0.00568667 ND 0.00433793 0.001275 0.000151932 ND 0.00151365 ND 0.00167033 ND 0.000856666 0.001179 08/04/11 02:57:11 PM ND 0.00184892 0.016072 0.0023826 0.035542 0.00531269 ND 0.00405265 0.002317 0.00014194 ND 0.00141411 ND 0.00188342 ND 0.000965949 0.001297 08/04/11 03:04:57 PM ND 0.00181815 0.006088 0.00234295 0.029933 0.00543348 ND 0.00414479 0.002222 0.000145167 ND 0.00144626 ND 0.00198649 ND 0.00101881 0.001094 08/04/11 03:12:38 PM ND 0.00178484 0.006197 0.00230003 0.030936 0.00541678 ND 0.00413205 0.002457 0.000144721 ND 0.00144181 ND 0.00202129 ND 0.00103666 0.001137 08/04/11 03:20:16 PM ND 0.00181103 0.007227 0.00233377 0.021128 0.00551485 ND 0.00420686 0.00223 0.000147341 ND 0.00146791 ND 0.00205424 ND 0.00105356 0.001054 08/04/11 03:28:02 PM ND 0.00186943 0.009645 0.00240903 0.0319 0.00564503 ND 0.00430616 0.002218 0.000150819 ND 0.00150256 ND 0.00205308 ND 0.00105297 0.001185 08/04/11 03:35:52 PM ND 0.00190825 0.010344 0.00245906 0.016781 0.00566767 ND 0.00432343 0.001917 0.000151424 ND 0.00150859 ND 0.00208832 ND 0.00107104 0.001253 08/04/11 03:43:36 PM ND 0.0019495 0.009665 0.00251222 0.009826 0.00563106 ND 0.00429551 0.000777 0.000150446 ND 0.00149885 ND 0.0020593 ND 0.00105615 0.001369 08/04/11 03:51:19 PM ND 0.00204745 0.007092 0.00263844 0.013227 0.0058154 ND 0.00443613 0.00149 0.000155371 ND 0.00154791 ND 0.00222734 ND 0.00114234 0.001715 08/04/11 03:59:00 PM ND 0.0020755 0.006515 0.00267458 0.028416 0.00574049 ND 0.00437898 0.00084 0.00015337 ND 0.00152797 ND 0.00220432 ND 0.00113053 0.002077 08/04/11 04:06:53 PM ND 0.00207834 0.006145 0.00267825 0.05536 0.00583824 ND 0.00445355 0.000666 0.000155982 ND 0.00155399 ND 0.00226243 ND 0.00116033 0.002388 08/04/11 04:14:38 PM ND 0.00199496 0.006045 0.0025708 0.023037 0.00579412 ND 0.00441989 0.000547 0.000154803 ND 0.00154225 ND 0.00222189 ND 0.00113954 0.001663 08/04/11 04:22:24 PM ND 0.00198191 0.006074 0.00255398 0.020248 0.00582857 ND 0.00444618 ND 0.000155723 ND 0.00155142 ND 0.00216872 ND 0.00111227 0.001138 08/04/11 04:30:09 PM ND 0.00193318 0.00563 0.00249119 0.025478 0.00601424 ND 0.0045878 0.001073 0.000160684 ND 0.00160084 ND 0.00228493 ND 0.00117187 0.001262 08/04/11 04:37:51 PM ND 0.00190064 0.008642 0.00244925 0.020131 0.00591044 ND 0.00450862 0.001746 0.00015791 ND 0.00157321 ND 0.00218611 ND 0.00112119 0.001118 08/04/11 04:45:35 PM ND 0.00190756 0.007583 0.00245817 0.026758 0.00588054 ND 0.00448582 0.002957 0.000157112 ND 0.00156525 ND 0.00214219 ND 0.00109867 0.001082 08/04/11 04:53:19 PM ND 0.00243776 0.008745 0.00314141 0.032213 0.00564134 ND 0.00430335 0.002859 0.000150721 ND 0.00150158 ND 0.00205177 ND 0.00105229 0.001087 08/04/11 05:01:09 PM ND 0.00189063 0.006915 0.00243636 0.035575 0.00573847 ND 0.00437744 0.002713 0.000153316 ND 0.00152744 ND 0.00204782 ND 0.00105027 0.000959 08/04/11 05:08:58 PM ND 0.00191457 0.008106 0.0024672 0.034806 0.00571549 ND 0.00435991 0.002807 0.000152702 ND 0.00152132 ND 0.00206202 ND 0.00105755 0.000906 08/04/11 05:16:40 PM ND 0.00198823 0.008475 0.00256213 0.034331 0.00562641 ND 0.00429196 0.00118 0.000150322 ND 0.00149761 ND 0.00202433 ND 0.00103822 0.001327 08/04/11 05:24:24 PM ND 0.00200359 0.009643 0.00258192 0.027077 0.0057848 ND 0.00441278 0.000762 0.000154554 ND 0.00153977 ND 0.00211076 ND 0.00108255 0.001289 08/04/11 05:32:08 PM ND 0.00201571 0.025723 0.00259754 0.009224 0.00577175 ND 0.00440283 0.001352 0.000154205 ND 0.00153629 ND 0.00200787 ND 0.00102978 0.001379 08/04/11 05:39:54 PM ND 0.00210705 0.08264 0.00271525 0.013569 0.0057337 ND 0.0043738 0.001371 0.000153188 ND 0.00152617 ND 0.0017435 ND 0.000894192 0.000966 08/04/11 05:47:41 PM ND 0.00214408 0.100533 0.00276296 0.018438 0.00578269 ND 0.00441118 0.002184 0.000154497 ND 0.00153921 ND 0.00172021 ND 0.000882247 0.000863 08/04/11 05:55:17 PM ND 0.00204179 0.067933 0.00263114 0.019091 0.00567923 ND 0.00433225 0.001733 0.000151733 ND 0.00151167 ND 0.0017801 ND 0.000912963 0.001067 08/04/11 06:03:07 PM ND 0.00209253 0.063797 0.00269654 0.01902 0.00577376 ND 0.00440436 0.000859 0.000154259 ND 0.00153683 ND 0.00183972 ND 0.000943538 0.001716 08/04/11 06:10:47 PM ND 0.00202553 0.027889 0.00261019 0.016897 0.00568221 ND 0.00433452 0.000805 0.000151813 ND 0.00151246 ND 0.00198599 ND 0.00101856 0.001749 08/04/11 06:18:34 PM ND 0.00195363 0.006573 0.00251754 0.015108 0.00569393 ND 0.00434346 0.000929 0.000152126 ND 0.00151558 ND 0.00209583 ND 0.00107489 0.001322 08/04/11 06:26:22 PM ND 0.00197974 0.007344 0.00255119 0.007231 0.00561131 ND 0.00428044 0.00093 0.000149919 ND 0.00149359 ND 0.00204752 ND 0.00105011 0.001326 08/04/11 06:34:10 PM ND 0.00194254 0.007825 0.00250324 0.012776 0.00566413 ND 0.00432073 0.001336 0.00015133 ND 0.00150765 ND 0.0020962 ND 0.00107508 0.001444 08/04/11 06:41:59 PM ND 0.00187235 0.007643 0.0024128 0.0307 0.00571773 ND 0.00436162 0.000931 0.000152762 ND 0.00152192 ND 0.00211591 ND 0.00108519 0.001435 08/04/11 06:49:43 PM ND 0.00182775 0.007007 0.00235533 0.030092 0.00526065 ND 0.00401295 0.000725 0.00014055 ND 0.00140025 ND 0.00192491 ND 0.000987231 0.001107 08/04/11 06:57:30 PM ND 0.00223565 0.012305 0.00290427 0.01351 0.0062824 ND 0.00433279 0.001903 0.000167415 ND 0.00096473 ND 0.00196834 ND 0.000919476 0.001665 08/04/11 07:05:17 PM ND 0.00255533 0.026411 0.00331956 0.019357 0.00691308 ND 0.00476775 0.000744 0.000184221 ND 0.00106158 ND 0.00210518 ND 0.000983399 0.001796 08/04/11 07:13:01 PM ND 0.00247612 0.017432 0.00321667 0.040968 0.00670932 ND 0.00462723 ND 0.000178791 ND 0.00103029 ND 0.00203011 ND 0.000948332 0.001604 08/04/11 07:20:52 PM ND 0.00232943 0.02431 0.0030261 0.016637 0.00628834 ND 0.00433689 ND 0.000167573 ND 0.000965642 ND 0.00179144 ND 0.000836844 0.001673 08/04/11 07:28:39 PM ND 0.0021725 0.035885 0.00282224 0.0189 0.00611485 ND 0.00421724 ND 0.00016295 ND 0.000939002 ND 0.00165086 ND 0.000771173 0.001571 08/04/11 07:36:27 PM ND 0.0019719 0.036707 0.00256164 0.038379 0.00587322 ND 0.0040506 ND 0.000156511 ND 0.000901897 ND 0.00154444 ND 0.000721461 0.001232 08/04/11 07:44:11 PM ND 0.00185903 0.014967 0.00241502 0.028184 0.00587574 ND 0.00405234 ND 0.000156578 ND 0.000902284 ND 0.00174029 ND 0.000812949 0.001042 08/04/11 07:52:03 PM ND 0.00163927 0.006765 0.00212954 0.055974 0.00556627 ND 0.0038389 0.000429 0.000148331 ND 0.000854761 ND 0.00164379 ND 0.000767868 0.000788 08/04/11 07:59:48 PM ND 0.00157855 0.006362 0.00205066 0.075946 0.00543445 ND 0.00374799 0.000583 0.000144818 ND 0.000834519 ND 0.00163942 ND 0.000765827 0.000676



### Page 1

### FAB2_Stack1

Timestamp NF3 NF3 FDL SiH4 SiH4Error C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6 FDL cC4F8 cC4F8 FDL C3F8 C3F8 FDL C5F8 C5F8 FDL SiF4 08/04/11 08:07:28 PM ND 0.00143776 0.005658 0.00186776 0.069503 0.00530091 ND 0.00365589 0.001136 0.00014126 ND 0.000814012 ND 0.0015556 ND 0.000726675 0.000464 08/04/11 08:15:13 PM ND 0.00139628 0.005029 0.00181387 0.016595 0.0051378 ND 0.0035434 0.000543 0.000136913 ND 0.000788965 ND 0.00156159 ND 0.00072947 0.000648 08/04/11 08:23:01 PM ND 0.00134536 0.003341 0.00174772 0.01453 0.00490474 ND 0.00338266 ND 0.000130703 ND 0.000753177 ND 0.00147958 ND 0.000691164 0.000683 08/04/11 08:30:42 PM ND 0.00128017 0.014065 0.00166304 0.013484 0.00498777 ND 0.00343993 0.000626 0.000132915 ND 0.000765926 ND 0.00145183 ND 0.0006782 0.000801 08/04/11 08:38:25 PM ND 0.0012145 0.013328 0.00157773 0.015363 0.00486903 ND 0.00335803 0.000534 0.000129751 ND 0.000747692 ND 0.00144763 ND 0.000676236 0.000749 08/04/11 08:46:08 PM ND 0.00118047 0.010816 0.00153352 0.012626 0.00473805 ND 0.0032677 0.000506 0.00012626 ND 0.000727578 ND 0.00139009 ND 0.00064936 0.000058 08/04/11 08:53:49 PM ND 0.00116748 0.028142 0.00151664 0.009658 0.00470831 ND 0.00324719 0.000491 0.000125468 ND 0.000723012 ND 0.00124074 ND 0.000579592 0.000028 08/04/11 09:01:33 PM ND 0.00119185 0.030974 0.0015483 0.005249 0.00449889 ND 0.00310276 ND 0.000119887 ND 0.000690854 ND 0.00120089 ND 0.000560975 0.0001 08/04/11 09:09:16 PM ND 0.00128134 0.060145 0.00166455 0.001665 0.00468556 ND 0.0032315 ND 0.000124862 ND 0.000719519 ND 0.00102708 ND 0.000479784 0.000405 08/04/11 09:17:01 PM ND 0.00128708 0.069139 0.00167201 0.012405 0.00473118 ND 0.00326296 ND 0.000126077 ND 0.000726523 ND 0.000981875 ND 0.000458667 0.00038 08/04/11 09:24:38 PM ND 0.00115032 0.027241 0.00149435 0.004568 0.00462074 ND 0.00318679 ND 0.000123134 ND 0.000709564 ND 0.00123037 ND 0.000574745 0.000347 08/04/11 09:32:23 PM ND 0.0011312 0.008552 0.00146951 -0.001892 0.00457238 ND 0.00315344 ND 0.000121846 ND 0.000702139 ND 0.00131309 ND 0.000613388 0.000116 08/04/11 09:40:04 PM ND 0.00113572 0.005445 0.00147538 0.009652 0.00464782 ND 0.00320547 ND 0.000123856 ND 0.000713724 ND 0.00144646 ND 0.000675689 0.000372 08/04/11 09:47:50 PM ND 0.00113954 0.003852 0.00148035 0.016384 0.00465091 ND 0.0032076 ND 0.000123938 ND 0.000714197 ND 0.00146441 ND 0.000684074 0.000372 08/04/11 09:55:29 PM ND 0.00110313 0.003327 0.00143305 0.01352 0.00471409 ND 0.00325118 ND 0.000125622 ND 0.0007239 ND 0.00142491 ND 0.000665624 0.000244 08/04/11 10:03:15 PM ND 0.00115171 0.003463 0.00149615 0.003817 0.0045719 ND 0.00315311 ND 0.000121833 ND 0.000702064 ND 0.00141889 ND 0.000662811 0.000771 08/04/11 10:10:56 PM ND 0.00116171 0.003504 0.00150914 -0.00188 0.00447439 ND 0.00308586 ND 0.000119234 ND 0.000687091 ND 0.00136684 ND 0.000638497 0.000737 08/04/11 10:18:41 PM ND 0.0011383 0.003975 0.00147873 0.001707 0.00451939 ND 0.0031169 ND 0.000120434 ND 0.000694001 ND 0.00136981 ND 0.000639883 0.000587 08/04/11 10:26:29 PM ND 0.00116572 0.002747 0.00151436 0.004512 0.00451626 ND 0.00311474 ND 0.00012035 ND 0.000693521 ND 0.00139301 ND 0.000650723 0.001092 08/04/11 10:34:11 PM ND 0.00115103 0.002653 0.00149528 0.008438 0.00458115 ND 0.00315949 ND 0.000122079 ND 0.000703485 ND 0.00142392 ND 0.000665163 0.001639 08/04/11 10:41:52 PM ND 0.00111385 0.003867 0.00144697 0.011372 0.00465217 ND 0.00320847 ND 0.000123972 ND 0.000714391 ND 0.00149429 ND 0.000698034 0.001772 08/04/11 10:49:46 PM ND 0.00112259 0.008165 0.00145833 0.012732 0.00465805 ND 0.00321253 ND 0.000124129 ND 0.000715294 ND 0.00142217 ND 0.000664344 0.0018 08/04/11 10:57:33 PM ND 0.00111356 0.00464 0.0014466 0.009391 0.00461208 ND 0.00318082 0.000308 0.000122904 ND 0.000708234 ND 0.00136951 ND 0.000639744 0.001328 08/04/11 11:05:15 PM ND 0.00106351 0.004234 0.00138157 0.00985 0.00476777 ND 0.0032882 0.001411 0.000127052 ND 0.000732143 ND 0.0013837 ND 0.000646373 0.001149 08/04/11 11:12:58 PM ND 0.00108754 0.021059 0.0014128 0.011614 0.00460536 ND 0.00317619 0.001633 0.000122725 ND 0.000707203 ND 0.00120392 ND 0.000562393 0.000877 08/04/11 11:20:48 PM ND 0.0010293 0.006285 0.00133713 0.004228 0.00445641 ND 0.00307346 0.001431 0.000118755 ND 0.00068433 ND 0.00126912 ND 0.000592848 0.001094 08/04/11 11:28:34 PM ND 0.00100443 0.005823 0.00130483 0.007565 0.00453518 ND 0.00312779 0.002141 0.000120854 ND 0.000696427 ND 0.00127714 ND 0.000596597 0.000797 08/04/11 11:36:16 PM ND 0.00102581 0.013537 0.00133261 0.01621 0.00448161 ND 0.00309084 0.001601 0.000119427 ND 0.0006882 ND 0.00118424 ND 0.000553201 0.000253 08/04/11 11:44:04 PM ND 0.000993113 0.003591 0.00129013 0.016561 0.00440826 ND 0.00304025 0.001437 0.000117472 ND 0.000676936 ND 0.00119717 ND 0.00055924 0.000273 08/04/11 11:51:47 PM ND 0.00106038 0.026798 0.00137752 0.020332 0.00446464 ND 0.00307913 0.000596 0.000118975 ND 0.000685593 ND 0.00109444 ND 0.000511252 0.000568 08/04/11 11:59:28 PM ND 0.0010273 0.00546 0.00133458 0.023712 0.0045755 ND 0.00315598 0.00095 0.000121903 ND 0.000705019 ND 0.00130209 ND 0.000609257 0.001119 08/05/11 12:07:12 AM ND 0.0010965 0.004903 0.00142443 0.074368 0.00470119 ND 0.00324228 0.000878 0.000125278 ND 0.000721918 ND 0.00132723 ND 0.000619995 0.001515 08/05/11 12:14:56 AM ND 0.00101341 0.007689 0.0013165 0.078053 0.00456088 ND 0.00314551 0.000896 0.000121539 ND 0.000700372 ND 0.0013757 ND 0.000642635 0.001193 08/05/11 12:22:35 AM ND 0.00280969 0.014793 0.00362375 0.055607 0.00488643 ND 0.00347811 0.000268 0.00013041 ND 0.00100648 ND 0.00170024 ND 0.000824924 0.000959 08/05/11 12:30:22 AM ND 0.00103444 0.029337 0.00134382 0.02548 0.00457003 ND 0.00315182 ND 0.000121783 ND 0.000701777 ND 0.00111487 ND 0.000520793 0.000332 08/05/11 12:38:04 AM ND 0.00105793 0.031791 0.00137432 0.017064 0.0044566 ND 0.00307359 ND 0.00011876 ND 0.000684359 ND 0.00109867 ND 0.000513228 0.000787 08/05/11 12:45:52 AM ND 0.00120089 0.075056 0.00156004 -0.000185 0.00461926 ND 0.00318577 ND 0.000123095 ND 0.000709337 ND 0.000862656 ND 0.000402976 0.001314 08/05/11 12:53:28 AM ND 0.00125538 0.075247 0.00163083 0.004983 0.00471982 ND 0.00325513 ND 0.000125775 ND 0.00072478 ND 0.000888726 ND 0.000415154 0.001654 08/05/11 01:01:10 AM ND 0.00105837 0.028473 0.0013749 0.010571 0.00470178 ND 0.00324268 ND 0.000125294 ND 0.000722009 ND 0.0012363 ND 0.000577515 0.001754 08/05/11 01:08:52 AM ND 0.00107106 0.037146 0.00139139 0.009993 0.00494888 ND 0.00341311 ND 0.000131879 ND 0.000759954 ND 0.00124948 ND 0.000583674 0.001853 08/05/11 01:16:31 AM ND 0.00104706 0.035811 0.00136021 0.001635 0.00490795 ND 0.00338488 ND 0.000130788 ND 0.000753669 ND 0.00121163 ND 0.000565994 0.001264 08/05/11 01:24:17 AM ND 0.00203365 0.030332 0.00262286 0.002104 0.0047817 ND 0.00340356 ND 0.000127614 ND 0.000984904 ND 0.00154384 ND 0.000749042 0.00139 08/05/11 01:31:58 AM ND 0.000985368 0.011896 0.00128007 -0.002816 0.00494808 ND 0.00341255 0.000183 0.000131857 ND 0.000759831 ND 0.00131976 ND 0.000616506 0.000823 08/05/11 01:39:44 AM ND 0.00196978 0.016421 0.00253834 0.015711 0.00469709 ND 0.00358305 0.000159 0.000125493 ND 0.00125025 ND 0.00179043 ND 0.00091826 0.000531 08/05/11 01:47:28 AM ND 0.00103268 0.01992 0.00134153 0.029292 0.00485545 ND 0.00334867 0.000112 0.000129389 ND 0.000745607 ND 0.00129092 ND 0.000603032 0.000662 08/05/11 01:55:18 AM ND 0.00181941 0.007206 0.00234457 0.032383 0.0046056 ND 0.00351327 0.000201 0.000123049 ND 0.0012259 ND 0.00185217 ND 0.000949922 0.001024 08/05/11 02:03:07 AM ND 0.00176383 0.030065 0.00227296 0.022818 0.00477358 ND 0.0036414 0.000176 0.000127537 ND 0.00127061 ND 0.00173516 ND 0.000889914 0.001289 08/05/11 02:10:52 AM ND 0.00173601 0.034007 0.00223711 0.011329 0.00482124 ND 0.00367776 0.000144 0.00012881 ND 0.00128329 ND 0.00173723 ND 0.000890972 0.000906 08/05/11 02:18:42 AM ND 0.00163301 0.030876 0.00210437 0.020449 0.00481693 ND 0.00367447 0.000213 0.000128695 ND 0.00128215 ND 0.00168594 ND 0.00086467 0.000889 08/05/11 02:26:25 AM ND 0.00153714 0.007077 0.00198083 0.005049 0.00493406 ND 0.00376382 0.000161 0.000131824 ND 0.00131332 ND 0.00195605 ND 0.0010032 0.001269 08/05/11 02:34:03 AM ND 0.00146204 0.012886 0.00188405 0.00723 0.00489361 ND 0.00373296 ND 0.000130744 ND 0.00130256 ND 0.00185987 ND 0.000953875 0.001144 08/05/11 02:41:46 AM ND 0.00139948 0.010012 0.00180343 0.013254 0.00485985 ND 0.00370721 ND 0.000129842 ND 0.00129357 ND 0.00176767 ND 0.000906585 0.000784 08/05/11 02:49:32 AM ND 0.00133832 0.008184 0.00172463 0.018698 0.00482792 ND 0.00368285 ND 0.000128989 ND 0.00128507 ND 0.00175387 ND 0.000899511 0.000458 08/05/11 02:57:22 AM ND 0.00127267 0.014282 0.00164002 0.018357 0.00487431 ND 0.00371824 ND 0.000130228 ND 0.00129742 ND 0.00178048 ND 0.000913158 0.000955 08/05/11 03:05:10 AM ND 0.00126445 0.02683 0.00162943 0.016627 0.00508967 ND 0.00388252 ND 0.000135982 ND 0.00135474 ND 0.0017362 ND 0.000890444 0.001017 08/05/11 03:12:51 AM ND 0.00124454 0.042887 0.00160378 0.007828 0.00523911 ND 0.00399652 0.000501 0.000139974 ND 0.00139452 ND 0.00170349 ND 0.00087367 0.001053 08/05/11 03:20:34 AM ND 0.00125337 0.057168 0.00161515 0.004287 0.00525263 ND 0.00400683 0.000718 0.000140336 ND 0.00139812 ND 0.00160664 ND 0.000824001 0.00124 08/05/11 03:28:18 AM ND 0.00128254 0.069222 0.00165274 0.004757 0.00533875 ND 0.00407252 0.000675 0.000142636 ND 0.00142104 ND 0.00152669 ND 0.000782994 0.000903 08/05/11 03:36:02 AM ND 0.00145884 0.11187 0.00187992 0.01601 0.00553838 ND 0.00422481 0.000776 0.00014797 ND 0.00147418 ND 0.00143989 ND 0.00073848 0.00093 08/05/11 03:43:48 AM ND 0.00127956 0.05626 0.0016489 0.014147 0.00541843 ND 0.00413331 0.000643 0.000144765 ND 0.00144225 ND 0.00160118 ND 0.0008212 0.001273 08/05/11 03:51:33 AM ND 0.00124116 0.04424 0.00159942 0.009965 0.00545375 ND 0.00416025 0.000724 0.000145709 ND 0.00145165 ND 0.00177627 ND 0.000910998 0.001301 08/05/11 03:59:17 AM ND 0.00140238 0.093814 0.00180717 -0.002305 0.0055451 ND 0.00422994 ND 0.00014815 ND 0.00147597 ND 0.00146758 ND 0.000752679 0.000698 08/05/11 04:06:57 AM ND 0.00138 0.084311 0.00177833 0.040867 0.00555888 ND 0.00424045 ND 0.000148518 ND 0.00147963 ND 0.00148353 ND 0.000760858 0.000593 08/05/11 04:14:44 AM ND 0.00141909 0.086584 0.0018287 0.058881 0.00564309 ND 0.00430468 ND 0.000150767 ND 0.00150205 ND 0.00150494 ND 0.000771841 0.000599 08/05/11 04:22:27 AM ND 0.00165654 0.130152 0.00213469 0.053014 0.00579243 ND 0.0044186 ND 0.000154757 ND 0.0015418 ND 0.00138026 ND 0.000707895 0.000505 08/05/11 04:30:04 AM ND 0.00169555 0.130927 0.00218496 0.003661 0.00576046 ND 0.00439422 ND 0.000153903 ND 0.00153329 ND 0.00141912 ND 0.000727823 0.000705



### Page 2

### FAB2_Stack1

Timestamp NF3 NF3 FDL SiH4 SiH4Error C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6 FDL cC4F8 cC4F8 FDL C3F8 C3F8 FDL C5F8 C5F8 FDL SiF4 08/05/11 04:37:43 AM ND 0.00151852 0.090536 0.00195683 0.006563 0.00563459 ND 0.0042982 ND 0.000150541 ND 0.00149979 ND 0.00151237 ND 0.000775651 0.000778 08/05/11 04:45:28 AM ND 0.00145919 0.087672 0.00188038 0.008488 0.00591435 ND 0.00451161 ND 0.000158015 ND 0.00157425 ND 0.00157513 ND 0.000807837 0.000913 08/05/11 04:53:12 AM ND 0.00149857 0.064589 0.00193113 0.012783 0.00584355 ND 0.0044576 ND 0.000156123 ND 0.00155541 ND 0.00168565 ND 0.000864522 0.001342 08/05/11 05:01:03 AM ND 0.00158675 0.102116 0.00204476 0.025643 0.00607999 ND 0.00463796 ND 0.00016244 ND 0.00161834 ND 0.00154083 ND 0.000790245 0.001082 08/05/11 05:08:54 AM ND 0.00166632 0.105144 0.0021473 0.042476 0.00602076 ND 0.00459278 ND 0.000160858 ND 0.00160257 ND 0.00154606 ND 0.000792929 0.001031 08/05/11 05:16:36 AM ND 0.00161567 0.074123 0.00208203 0.026089 0.00578215 ND 0.00441076 ND 0.000154483 ND 0.00153906 ND 0.001597 ND 0.000819056 0.000551 08/05/11 05:24:16 AM ND 0.00169533 0.081784 0.00218468 0.02002 0.00577694 ND 0.00440679 ND 0.000154344 ND 0.00153768 ND 0.00155646 ND 0.000798265 0.000591 08/05/11 05:32:07 AM ND 0.00186541 0.10454 0.00240385 0.024267 0.00592659 ND 0.00452095 ND 0.000158342 ND 0.00157751 ND 0.00154044 ND 0.000790045 0.000669 08/05/11 05:39:57 AM ND 0.0017761 0.044181 0.00228876 0.035667 0.00576833 ND 0.00440022 ND 0.000154114 ND 0.00153538 ND 0.00173496 ND 0.000889813 0.001313 08/05/11 05:47:42 AM ND 0.00191088 0.004512 0.00246244 0.046937 0.00577278 ND 0.00440361 ND 0.000154232 ND 0.00153657 ND 0.00198186 ND 0.00101644 0.0022 08/05/11 05:55:28 AM ND 0.00189435 0.001536 0.00244114 0.031405 0.00569297 ND 0.00434273 ND 0.0001521 ND 0.00151533 ND 0.00194413 ND 0.000997089 0.002017 08/05/11 06:03:17 AM ND 0.00185073 0.001323 0.00238494 0.002707 0.00569314 ND 0.00434286 ND 0.000152105 ND 0.00151537 ND 0.00190377 ND 0.000976387 0.001432 08/05/11 06:10:58 AM ND 0.00187468 0.042838 0.00241579 -0.000979 0.00568738 ND 0.00433847 ND 0.000151951 ND 0.00151384 ND 0.00175028 ND 0.000897668 0.001231 08/05/11 06:18:48 AM ND 0.00196571 0.057877 0.00253311 0.0152 0.00570761 ND 0.0043539 ND 0.000152491 ND 0.00151922 ND 0.0016846 ND 0.00086398 0.00072 08/05/11 06:26:39 AM ND 0.00215895 0.102516 0.00278212 0.041348 0.00606909 ND 0.00462965 ND 0.000162149 ND 0.00161544 ND 0.00158531 ND 0.000813061 0.000734 08/05/11 06:34:24 AM ND 0.00243877 0.167473 0.00314271 0.05694 0.0063897 ND 0.00487422 ND 0.000170715 ND 0.00170078 ND 0.00164869 ND 0.000845567 0.001015 08/05/11 06:42:04 AM ND 0.00256202 0.17723 0.00330153 0.068276 0.00645645 ND 0.00492513 ND 0.000172498 ND 0.00171854 ND 0.00166904 ND 0.000856001 0.00109 08/05/11 06:49:49 AM ND 0.00233338 0.120783 0.0030069 0.0539 0.00618007 ND 0.00471431 ND 0.000165114 ND 0.00164498 ND 0.00160339 ND 0.000822333 0.000855 08/05/11 06:57:36 AM ND 0.00239329 0.099574 0.0030841 0.061748 0.00607471 ND 0.00463393 ND 0.000162299 ND 0.00161693 ND 0.00163099 ND 0.000836487 0.001378 08/05/11 07:05:20 AM ND 0.00237488 0.102329 0.00306038 0.050528 0.0060477 ND 0.00461333 ND 0.000161578 ND 0.00160975 ND 0.0016465 ND 0.000844442 0.001626 08/05/11 07:13:05 AM ND 0.00256187 0.130893 0.00330135 0.058677 0.00643252 ND 0.00490688 ND 0.000171859 ND 0.00171217 ND 0.00164392 ND 0.000843117 0.001276 08/05/11 07:20:47 AM ND 0.00258558 0.104549 0.00333189 0.070384 0.0058376 ND 0.00445306 ND 0.000155964 ND 0.00155382 ND 0.00118993 ND 0.000610281 0.001149 08/05/11 07:28:24 AM ND 0.00355033 0.093857 0.00457512 0.069382 0.00741691 ND 0.00565779 ND 0.000198159 ND 0.00197419 ND 0.00191633 ND 0.000982829 0.001152 08/05/11 07:36:12 AM ND 0.00488603 0.032171 0.00629636 0.036468 0.00791725 ND 0.00603947 ND 0.000211527 ND 0.00210737 ND 0.00251407 ND 0.0012894 0.00124 08/05/11 07:43:54 AM ND 0.00669637 0.000344 0.00862925 0.021946 0.00991416 ND 0.00756276 ND 0.000264879 ND 0.0026389 ND 0.00358947 ND 0.00184094 0.001288 08/05/11 07:51:39 AM ND 0.00987004 -0.020687 0.012719 0.009452 0.0105676 ND 0.00832868 ND 0.000282701 ND 0.00318652 ND 0.0036169 ND 0.00202163 0.00202 08/05/11 07:59:27 AM ND 0.0187681 -0.055944 0.0241854 0.018781 0.012017 ND 0.00947097 ND 0.000321474 ND 0.00362356 ND 0.00452043 ND 0.00252664 0.003313 08/05/11 08:07:15 AM ND 0.0413911 -0.138698 0.0533385 0.019899 0.0145355 ND 0.0114559 ND 0.000388848 ND 0.00438298 ND 0.00551462 ND 0.00308233 0.004319



### Page 3

### FAB2_Stack1

Timestamp 08/04/11 10:02:35 AM 08/04/11 10:10:20 AM 08/04/11 10:18:03 AM 08/04/11 10:25:48 AM 08/04/11 10:33:38 AM 08/04/11 12:14:15 PM 08/04/11 12:22:03 PM 08/04/11 12:29:48 PM 08/04/11 12:37:37 PM 08/04/11 12:45:21 PM 08/04/11 12:53:02 PM 08/04/11 01:00:48 PM 08/04/11 01:08:36 PM 08/04/11 01:16:27 PM 08/04/11 01:24:10 PM 08/04/11 01:31:51 PM 08/04/11 01:39:34 PM 08/04/11 01:47:21 PM 08/04/11 01:55:13 PM 08/04/11 02:03:00 PM 08/04/11 02:10:42 PM 08/04/11 02:18:28 PM 08/04/11 02:26:14 PM 08/04/11 02:34:01 PM 08/04/11 02:41:40 PM 08/04/11 02:49:22 PM 08/04/11 02:57:11 PM 08/04/11 03:04:57 PM 08/04/11 03:12:38 PM 08/04/11 03:20:16 PM 08/04/11 03:28:02 PM 08/04/11 03:35:52 PM 08/04/11 03:43:36 PM 08/04/11 03:51:19 PM 08/04/11 03:59:00 PM 08/04/11 04:06:53 PM 08/04/11 04:14:38 PM 08/04/11 04:22:24 PM 08/04/11 04:30:09 PM 08/04/11 04:37:51 PM 08/04/11 04:45:35 PM 08/04/11 04:53:19 PM 08/04/11 05:01:09 PM 08/04/11 05:08:58 PM 08/04/11 05:16:40 PM 08/04/11 05:24:24 PM 08/04/11 05:32:08 PM 08/04/11 05:39:54 PM 08/04/11 05:47:41 PM 08/04/11 05:55:17 PM 08/04/11 06:03:07 PM 08/04/11 06:10:47 PM 08/04/11 06:18:34 PM 08/04/11 06:26:22 PM 08/04/11 06:34:10 PM 08/04/11 06:41:59 PM 08/04/11 06:49:43 PM 08/04/11 06:57:30 PM 08/04/11 07:05:17 PM 08/04/11 07:13:01 PM 08/04/11 07:20:52 PM 08/04/11 07:28:39 PM 08/04/11 07:36:27 PM 08/04/11 07:44:11 PM 08/04/11 07:52:03 PM 08/04/11 07:59:48 PM SiF4Error CH2F2 CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.000236953 ND 0.00424664 0.92338 0.0116915 0.014722 0.00530551 ND 0.151454 0.173376 0.0128485 4.859003 0.543012 6.246457 0.866224 0.000273485 ND 0.00414542 2.318636 0.0215157 0.040355 0.00352969 ND 0.0712743 0.592145 0.0204094 10.138082 0.794287 10.896583 1.27743 0.000250635 ND 0.0037482 2.17972 0.0199758 0.042841 0.0028736 ND 0.0737037 0.635706 0.0234015 11.816003 0.767944 8.229425 1.23506 0.000240276 ND 0.00260359 1.273704 0.0100733 0.059131 0.00253221 ND 0.043409 0.441151 0.012254 12.123332 0.763484 7.872497 1.22789 0.000252054 ND 0.00236128 1.224889 0.00945176 0.060738 0.00280305 ND 0.0397916 0.37039 0.00842854 10.183015 0.817465 9.693798 1.3147 0.000338308 ND 0.00148887 0.692912 0.00573743 0.05882 0.00308716 ND 0.0401205 0.219401 0.00606712 11.067605 0.81152 15.114664 1.30514 0.000454 ND 0.00213101 1.261388 0.0108303 0.057921 0.00296695 ND 0.0641351 0.356 0.00981705 11.137922 0.759999 13.388276 1.22228 0.000605482 ND 0.00473922 2.95548 0.0368196 0.063031 0.00190588 ND 0.175165 0.547369 0.0210724 12.462571 0.68019 5.618872 1.09252 0.000745408 ND 0.00528296 3.556375 0.0469843 0.065665 0.00318403 ND 0.13216 0.782617 0.0332596 17.223042 0.776869 6.070919 1.24941 0.000818351 ND 0.00452015 3.207939 0.0386638 0.064841 0.00313561 ND 0.111943 0.704867 0.0273168 11.546036 0.838388 9.698739 1.34835 0.000861943 ND 0.00445681 2.864124 0.0310831 0.070612 0.00311079 ND 0.0918583 0.714986 0.0274679 10.608851 0.785813 9.077385 1.2638 0.000916108 ND 0.0036938 2.534871 0.0254144 0.066207 0.00305659 ND 0.0857133 0.637022 0.022932 12.030716 0.757481 8.700268 1.21823 0.000910151 ND 0.0025599 1.418387 0.0113808 0.049715 0.00290897 ND 0.0460662 0.477785 0.0132039 9.739037 0.708808 8.072141 1.13995 0.000929949 ND 0.00233184 1.243397 0.00993708 0.051359 0.00294888 ND 0.0426323 0.475086 0.0130207 8.697435 0.808988 10.763962 1.30107 0.000961491 ND 0.00240428 1.342663 0.0106423 0.050586 0.00282945 ND 0.0457095 0.492246 0.0140511 9.815757 0.851212 12.266793 1.36898 0.000963521 ND 0.00249296 1.358091 0.0107804 0.049201 0.00271095 ND 0.0456416 0.559407 0.0176611 9.951195 0.85575 10.866833 1.37627 0.000987357 ND 0.00300209 1.787754 0.0155109 0.062653 0.00276506 ND 0.0664235 0.632998 0.0231015 14.997176 0.833539 9.182291 1.34055 0.000991194 ND 0.0038042 2.024624 0.0177913 0.069053 0.00275908 ND 0.068017 0.710806 0.0283186 20.019767 1.09938 9.04271 1.46948 0.000964026 ND 0.00343477 1.484248 0.0120386 0.079669 0.0027063 ND 0.0488614 0.66572 0.0244534 13.337519 0.736692 6.742531 1.1848 0.000928865 ND 0.00339686 0.908827 0.00748097 0.087707 0.00256135 ND 0.0383231 0.523631 0.0165207 13.406024 0.802017 7.174531 1.28986 0.000879025 ND 0.00225215 0.63771 0.00526739 0.102264 0.00261649 ND 0.0287905 0.376091 0.00879806 15.113387 0.772293 8.339089 1.24205 0.000834759 ND 0.00216766 0.72093 0.0060312 0.100444 0.00254801 ND 0.0358856 0.23323 0.00523951 14.621702 0.816065 10.996374 1.31245 0.000793931 ND 0.00297397 1.520462 0.0125556 0.102657 0.00271179 ND 0.0550012 0.442971 0.0125134 15.888306 0.811246 11.27811 1.3047 0.000757315 ND 0.00242843 1.445204 0.0116181 0.103234 0.00292518 ND 0.0551955 0.495899 0.0152868 16.825592 0.895069 14.894719 1.43951 0.000704308 ND 0.00215218 0.860667 0.00695276 0.103963 0.00290127 ND 0.0467882 0.353865 0.00925246 15.443746 0.801992 16.960724 1.28982 0.000639134 ND 0.00221273 0.93268 0.00793242 0.094556 0.00261281 ND 0.0496348 0.283372 0.00727765 14.389971 0.789327 13.868547 1.26945 0.000596566 ND 0.00259243 1.489436 0.0120672 0.07513 0.00277914 ND 0.0533737 0.412532 0.0109222 13.923984 0.858002 13.554137 1.3799 0.000550077 ND 0.00230812 0.836584 0.00671604 0.079608 0.00271682 ND 0.0420941 0.326209 0.00786784 14.561639 0.78888 15.130579 1.26873 0.00052417 ND 0.00270427 0.531221 0.00446341 0.090317 0.00240654 ND 0.0299858 0.238197 0.00509691 14.187746 0.852042 11.240124 1.37031 0.000488164 ND 0.00250892 0.404117 0.00349011 0.105682 0.00228609 ND 0.0254959 0.170937 0.0061826 19.277874 0.888921 8.909792 1.41802 0.00045292 ND 0.00220937 0.957052 0.00777927 0.108811 0.00204561 ND 0.0396144 0.278068 0.00588554 20.364135 1.09347 7.220668 1.46158 0.000443058 ND 0.00235204 1.148392 0.0091768 0.105935 0.00182352 ND 0.0393529 0.302992 0.00595748 17.822173 0.75917 5.075513 1.22095 0.000407932 ND 0.00276311 1.538864 0.0126768 0.101124 0.00185394 ND 0.0505127 0.29979 0.00575233 15.08209 0.714118 4.161781 1.14849 0.000392136 ND 0.00386258 2.302307 0.0228315 0.096207 0.00199861 ND 0.090366 0.412556 0.0109538 14.783022 0.746148 6.653738 1.2 0.000384995 ND 0.0050838 2.813427 0.0314838 0.094548 0.0021507 ND 0.105507 0.532443 0.0172079 14.411521 0.833458 7.330435 1.34042 0.000382147 ND 0.00660882 2.766054 0.0304811 0.09343 0.0020618 ND 0.103717 0.788067 0.0326768 15.95863 0.850385 6.66873 1.36765 0.000320072 ND 0.00440068 1.566 0.0146705 0.089976 0.00196301 ND 0.0870092 0.604024 0.022768 17.058824 0.845863 9.259245 1.36037 0.000280971 ND 0.00269711 0.691431 0.00568361 0.089999 0.00222045 ND 0.0371602 0.456986 0.0126437 13.192498 0.821188 14.476195 1.32069 0.000275871 ND 0.002924 0.930897 0.00754122 0.102235 0.00205097 ND 0.0376248 0.552643 0.0175728 13.747418 0.900873 12.422379 1.44884 0.000257637 ND 0.00271956 0.701067 0.00578932 0.090466 0.00197809 ND 0.0327191 0.498937 0.0147916 15.131482 0.890857 11.549328 1.43274 0.000235971 ND 0.0027421 0.533646 0.00452137 0.067971 0.00211825 ND 0.0345621 0.459342 0.012976 15.608542 0.868296 14.271044 1.39645 0.000226678 ND 0.00283107 0.43311 0.00371115 0.058496 0.00211696 ND 0.0322269 0.317096 0.00697234 15.107714 0.93265 14.003011 1.49995 0.000208756 ND 0.0024174 0.389224 0.00338705 0.039769 0.002106 ND 0.0317369 0.239419 0.00554531 15.702856 0.75442 12.503686 1.21331 0.000199338 ND 0.00229611 0.444639 0.00381834 0.039954 0.00215071 ND 0.0323692 0.172534 0.00677215 17.20537 0.87102 13.870181 1.38947 0.000197009 ND 0.003003 1.388508 0.0117826 0.032488 0.0023297 ND 0.058915 0.306664 0.00797777 16.116519 0.856469 14.474428 1.37743 0.000201157 ND 0.00303179 0.997193 0.00813445 0.030849 0.00222673 ND 0.0449712 0.377234 0.00951949 16.202553 0.946848 14.967242 1.52278 0.000195875 ND 0.00298514 1.058045 0.00874608 0.038434 0.00214376 ND 0.0467069 0.332073 0.00797831 16.584596 0.834939 13.356513 1.34281 0.000174799 ND 0.00235336 0.320577 0.00289896 0.036941 0.00205437 ND 0.0294356 0.198792 0.00499596 15.805874 0.744991 12.213614 1.19814 0.000178384 ND 0.00224099 0.041005 0.00119187 0.035876 0.00203043 ND 0.0297143 0.083212 0.00451171 17.272498 0.72152 12.101555 1.15098 0.000156839 ND 0.0025075 0.626621 0.00834471 0.032402 0.00205949 ND 0.0850726 0.124905 0.00790012 19.264311 0.712296 10.712735 1.13627 0.000189569 ND 0.00413515 2.550339 0.0267293 0.021489 0.00229316 ND 0.0978204 0.475091 0.0147467 20.57139 1.15725 9.791647 1.54683 0.000189021 ND 0.00408179 2.325079 0.023111 0.027419 0.00225014 ND 0.0883957 0.54354 0.0183877 20.30715 1.14602 10.215153 1.53182 0.000176567 ND 0.00307148 1.244892 0.010885 0.035678 0.00215878 ND 0.0618374 0.430254 0.0125423 18.359102 0.844872 11.304205 1.35878 0.000173576 ND 0.00306776 1.302708 0.0106567 0.037811 0.00217574 ND 0.049265 0.411683 0.0108242 18.572031 0.877024 11.498782 1.41049 0.000171641 ND 0.00383151 0.890978 0.00719812 0.037107 0.00218579 ND 0.0377241 0.23976 0.00536525 19.911095 0.864689 10.699689 1.39065 0.000167027 ND 0.00492145 0.436683 0.00376632 0.039471 0.00250379 ND 0.0391781 0.232265 0.00636925 19.43054 0.928811 15.901035 1.49377 0.000136019 ND 0.00311771 0.333436 0.00321047 0.043773 0.00226776 ND 0.0300875 0.164534 0.00654296 20.881169 1.01805 9.77521 1.35069 0.00017511 ND 0.00431189 2.469898 0.0272585 0.052785 0.00207333 ND 0.13848 0.530904 0.0201053 21.473541 1.04546 5.902394 1.3958 0.000198234 ND 0.00441609 2.467712 0.0266847 0.052774 0.00237237 ND 0.121375 0.731395 0.0307187 22.292914 1.10127 3.524322 1.47032 0.000165712 ND 0.00354137 1.763981 0.0160567 0.049538 0.00242655 ND 0.0769531 0.497888 0.0154377 20.80931 1.01638 1.436684 1.35698 0.00012438 ND 0.00418093 2.018164 0.0198185 0.031628 0.0025184 ND 0.0913914 0.527489 0.0172607 20.465201 1.03822 3.162576 1.38614 0.000111828 ND 0.00395148 1.453562 0.0131635 0.029716 0.00256121 ND 0.0668993 0.553821 0.0184965 19.900171 1.23276 6.823816 1.64587 9.163e-005 ND 0.00330494 1.136031 0.0102575 0.035977 0.00260175 ND 0.0577604 0.408238 0.0104517 18.81634 1.01136 7.11156 1.62445 8.65971e-005 ND 0.00321645 1.177715 0.0110509 0.029368 0.00266075 ND 0.0645618 0.419301 0.011636 23.183267 1.26556 6.639123 1.68966 9.00557e-005 ND 0.00283545 0.925143 0.00859008 0.046794 0.00265501 ND 0.0545692 0.452577 0.0133766 25.746445 1.0426 5.189501 1.39199 8.40103e-005 ND 0.00258513 0.676143 0.0063665 0.047824 0.00276434 ND 0.0450218 0.341318 0.00717939 18.207082 0.972312 7.343522 1.56172



### Page 4

### FAB2_Stack1

Timestamp 08/04/11 08:07:28 PM 08/04/11 08:15:13 PM 08/04/11 08:23:01 PM 08/04/11 08:30:42 PM 08/04/11 08:38:25 PM 08/04/11 08:46:08 PM 08/04/11 08:53:49 PM 08/04/11 09:01:33 PM 08/04/11 09:09:16 PM 08/04/11 09:17:01 PM 08/04/11 09:24:38 PM 08/04/11 09:32:23 PM 08/04/11 09:40:04 PM 08/04/11 09:47:50 PM 08/04/11 09:55:29 PM 08/04/11 10:03:15 PM 08/04/11 10:10:56 PM 08/04/11 10:18:41 PM 08/04/11 10:26:29 PM 08/04/11 10:34:11 PM 08/04/11 10:41:52 PM 08/04/11 10:49:46 PM 08/04/11 10:57:33 PM 08/04/11 11:05:15 PM 08/04/11 11:12:58 PM 08/04/11 11:20:48 PM 08/04/11 11:28:34 PM 08/04/11 11:36:16 PM 08/04/11 11:44:04 PM 08/04/11 11:51:47 PM 08/04/11 11:59:28 PM 08/05/11 12:07:12 AM 08/05/11 12:14:56 AM 08/05/11 12:22:35 AM 08/05/11 12:30:22 AM 08/05/11 12:38:04 AM 08/05/11 12:45:52 AM 08/05/11 12:53:28 AM 08/05/11 01:01:10 AM 08/05/11 01:08:52 AM 08/05/11 01:16:31 AM 08/05/11 01:24:17 AM 08/05/11 01:31:58 AM 08/05/11 01:39:44 AM 08/05/11 01:47:28 AM 08/05/11 01:55:18 AM 08/05/11 02:03:07 AM 08/05/11 02:10:52 AM 08/05/11 02:18:42 AM 08/05/11 02:26:25 AM 08/05/11 02:34:03 AM 08/05/11 02:41:46 AM 08/05/11 02:49:32 AM 08/05/11 02:57:22 AM 08/05/11 03:05:10 AM 08/05/11 03:12:51 AM 08/05/11 03:20:34 AM 08/05/11 03:28:18 AM 08/05/11 03:36:02 AM 08/05/11 03:43:48 AM 08/05/11 03:51:33 AM 08/05/11 03:59:17 AM 08/05/11 04:06:57 AM 08/05/11 04:14:44 AM 08/05/11 04:22:27 AM 08/05/11 04:30:04 AM SiF4Error CH2F2 CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.000101725 ND 0.00235798 0.326944 0.00335605 0.045855 0.00278426 ND 0.0369371 0.316967 0.00639669 19.040613 0.905177 6.98406 1.45389 0.000152204 ND 0.00285891 0.723784 0.00725507 0.04267 0.00275875 ND 0.055354 0.266809 0.00498804 16.925349 0.8849 4.61368 1.42132 0.000115989 ND 0.00331895 0.96796 0.00964179 0.039739 0.00271549 ND 0.0626963 0.276394 0.00554977 18.600961 0.985784 4.556067 1.58336 0.000100174 ND 0.00392844 0.662676 0.00673184 0.043486 0.00290059 ND 0.0477411 0.228503 0.00417394 18.100862 0.915908 10.5137 1.47113 0.000107616 ND 0.0041431 0.291938 0.00326468 0.045253 0.00281928 ND 0.037077 0.20525 0.00348456 18.357058 0.92547 8.291294 1.48649 0.000103987 ND 0.00209321 0.043662 0.00143641 0.041648 0.00289809 ND 0.0359113 0.087367 0.00341545 17.697353 0.952197 10.547446 1.51646 0.000102092 ND 0.00198504 0.023403 0.00139835 0.036115 0.00293029 ND 0.0360008 0.065018 0.00312625 17.670937 0.947623 11.117572 1.50918 0.000107817 ND 0.00195739 0.021901 0.00136311 0.033518 0.00290192 ND 0.0360488 0.057874 0.00304636 17.731757 0.80738 11.020237 1.28583 0.000139635 ND 0.00324838 0.749956 0.00834168 0.038017 0.00278212 ND 0.0639167 0.190429 0.00441019 17.933128 0.837829 8.265022 1.34572 0.000123628 ND 0.00291852 0.641877 0.00696293 0.046797 0.00285153 ND 0.0505689 0.285588 0.00595718 16.812896 0.884116 9.942794 1.42007 0.000107029 ND 0.00303827 0.768996 0.00815545 0.065285 0.00271669 ND 0.0545426 0.233023 0.00438569 21.432505 1.10083 7.367904 1.46973 9.78284e-005 ND 0.00229256 0.326647 0.00367495 0.072343 0.00270051 ND 0.0372646 0.184168 0.0034924 22.919739 1.17989 7.909905 1.57528 0.00010973 ND 0.0031399 0.780532 0.00871105 0.092211 0.00258648 ND 0.0654306 0.255054 0.00543588 18.413918 0.831089 4.522259 1.33489 0.000103292 ND 0.00307764 0.706638 0.00750892 0.099181 0.00266477 ND 0.049829 0.403994 0.0102475 16.605912 0.850296 8.129705 1.36574 0.000113262 ND 0.0025894 0.264658 0.00312767 0.097999 0.0025343 ND 0.0373602 0.304521 0.00605624 16.852735 0.870572 4.916533 1.39831 0.000169248 ND 0.00472268 1.378401 0.0154407 0.093096 0.00258679 ND 0.0892146 0.301496 0.00634996 17.006714 1.04176 5.497061 1.67327 0.000156318 ND 0.00506878 1.552593 0.0176382 0.091027 0.00260272 ND 0.0968161 0.281728 0.0059751 18.107562 0.910656 4.428543 1.46269 0.000132311 ND 0.00484856 1.571453 0.0179487 0.090574 0.00263153 ND 0.0968166 0.310073 0.00688288 19.57798 1.10982 6.756605 1.78259 0.000157104 ND 0.00737323 2.402714 0.0324902 0.09893 0.00274734 ND 0.160727 0.459773 0.0144075 18.903988 1.00132 5.808005 1.60831 0.000207314 ND 0.00847711 2.665807 0.0368706 0.100719 0.00273016 ND 0.166057 0.622929 0.0234975 19.205759 1.00726 3.975908 1.61786 0.000240722 ND 0.00845048 2.337274 0.0302812 0.098698 0.00262146 ND 0.141164 0.731356 0.0299307 17.36912 0.880595 4.0322 1.41441 0.000250126 ND 0.00858778 2.50081 0.0333508 0.099162 0.00266758 ND 0.151509 0.90798 0.0413528 16.439534 0.872312 6.002217 1.40111 0.00024027 ND 0.00809973 2.730372 0.0384995 0.102491 0.00288636 ND 0.168381 0.986871 0.0467791 15.679404 0.922033 9.153014 1.48097 0.000270304 ND 0.00684496 2.073891 0.025905 0.098361 0.00267473 ND 0.128451 0.900434 0.042114 21.729742 1.22528 8.936559 1.63587 0.00021866 ND 0.00505914 1.569487 0.0176478 0.092607 0.00249219 ND 0.0931595 0.605108 0.0229927 27.107079 1.56186 9.21496 2.08525 0.000212832 ND 0.00514156 1.464559 0.0161721 0.089435 0.00252987 ND 0.086162 0.588299 0.0219717 26.853984 1.3847 10.456753 1.84872 0.000219605 ND 0.00390298 0.765496 0.00806131 0.093099 0.00269767 ND 0.0531883 0.318856 0.00848172 24.493325 1.17132 13.332945 1.56384 0.000188688 ND 0.00223681 0.390363 0.00406918 0.103838 0.00284721 ND 0.0405044 0.148803 0.00649865 23.101102 1.1536 15.896384 1.52823 0.000188434 ND 0.00220324 0.366183 0.00385485 0.106776 0.00261396 ND 0.0359813 0.138905 0.005645 23.601435 1.0386 12.759744 1.37588 0.000204105 ND 0.00309546 0.639753 0.00645907 0.092431 0.00252443 ND 0.0428366 0.22224 0.00491778 22.772981 1.18321 12.219563 1.57971 0.000213898 ND 0.00684396 2.100791 0.0291542 0.081296 0.00253298 ND 0.201085 0.43378 0.0179028 30.8612 1.36107 9.140749 1.81016 0.000245506 ND 0.00786009 2.708712 0.0372595 0.077698 0.00245978 ND 0.176139 0.866207 0.0413954 32.238125 1.24102 5.247811 1.6569 0.000256227 ND 0.00517607 1.25256 0.0134491 0.077898 0.0020773 ND 0.0799184 0.554191 0.0202308 27.448431 1.11251 3.494392 1.48532 0.000270589 ND 0.00475582 0.66867 0.00699454 0.070463 0.00230527 ND 0.0421339 0.330152 0.00837091 29.661263 1.25187 6.565111 1.67316 0.000149484 ND 0.00277768 0.75591 0.00782996 0.072078 0.00233827 ND 0.0536213 0.201973 0.00550791 29.652221 1.14781 11.732765 1.53245 0.000148155 ND 0.00468916 1.660404 0.0182263 0.090891 0.00231187 ND 0.0966034 0.321393 0.00874288 30.806401 1.3479 10.238038 1.79958 0.000179852 ND 0.00700267 2.470149 0.0331253 0.100701 0.00245011 ND 0.177636 0.463801 0.0172922 30.070631 1.48395 9.948091 1.98123 0.00018567 ND 0.00823839 3.247989 0.0479105 0.097956 0.00257225 ND 0.189846 0.564431 0.0217016 29.146097 1.29369 8.783166 1.72721 0.000188988 ND 0.00793655 2.945489 0.040501 0.086344 0.00244761 ND 0.164582 0.58319 0.0222565 28.177805 1.41335 9.520375 1.88697 0.000241474 ND 0.00707063 2.078599 0.0240241 0.082812 0.00220799 ND 0.115902 0.527811 0.0187572 28.481022 1.45402 10.578808 1.94128 0.00018512 ND 0.00514072 1.342088 0.0138186 0.083066 0.0020614 ND 0.0770709 0.461034 0.0150152 28.363821 1.42479 11.076329 1.90225 0.000181402 ND 0.00557173 1.187793 0.0119568 0.084831 0.00193283 ND 0.0674401 0.382698 0.0107749 29.431419 1.38799 8.759741 1.85508 0.000116251 ND 0.00399915 1.204287 0.0127213 0.08989 0.00219819 ND 0.0855575 0.435756 0.0151822 33.186558 1.40943 13.76385 1.88174 0.000182737 ND 0.0033639 0.248472 0.0034119 0.088615 0.00228869 ND 0.0375053 0.211592 0.00643648 26.460786 1.23642 14.853804 1.65265 0.000117627 ND 0.00368725 1.39928 0.014623 0.094722 0.00202339 ND 0.0936044 0.363388 0.0110591 21.724661 1.27927 10.675012 1.70796 0.000159291 ND 0.00502993 1.633766 0.0168166 0.096155 0.00184217 ND 0.0821803 0.58114 0.0204893 19.088682 1.03299 8.369117 1.66132 0.000163515 ND 0.00583553 2.054542 0.0226564 0.096656 0.0019014 ND 0.101751 0.74526 0.0307314 17.770858 0.836907 7.718295 1.34597 0.000148997 ND 0.00426758 1.155385 0.0113767 0.085371 0.00178006 ND 0.0621601 0.659496 0.0254839 17.17313 0.851309 9.226646 1.36913 0.000164525 ND 0.00383169 1.005989 0.00943877 0.081692 0.00166576 ND 0.0497284 0.572179 0.0198389 17.880823 0.862641 8.898478 1.38736 0.000345272 ND 0.00565701 1.103702 0.0105059 0.077698 0.00171177 ND 0.05878 0.558233 0.0202381 25.126611 1.31757 9.313329 1.76113 0.000322984 ND 0.00499642 0.545073 0.00503728 0.071183 0.00162508 ND 0.0323328 0.344825 0.00848768 24.706279 1.22467 8.887268 1.63695 0.000164563 ND 0.00303241 0.461408 0.00439019 0.068339 0.001794 ND 0.0300105 0.270134 0.00596733 19.483955 0.996571 11.303791 1.60275 0.000154458 ND 0.00252001 0.121276 0.00173746 0.055737 0.00207255 ND 0.031713 0.155955 0.00656068 18.848273 0.929003 14.521086 1.48196 0.000169928 ND 0.00369897 1.324448 0.0125358 0.052131 0.00201347 ND 0.0683679 0.214804 0.00590172 18.493653 0.802439 12.289417 1.29054 0.000174425 ND 0.00413549 1.662766 0.0159328 0.0787 0.00191703 ND 0.0726489 0.269005 0.00585646 17.9998 0.856745 7.124146 1.37787 0.0001621 ND 0.00428232 1.929537 0.0193359 0.106543 0.00211221 ND 0.0836712 0.484876 0.0145401 15.42655 0.838091 6.196386 1.34787 0.000282569 ND 0.00471098 1.251288 0.0114935 0.103939 0.0021552 ND 0.0602504 0.499103 0.0159061 18.335273 0.901708 7.945527 1.45019 0.000239103 ND 0.00371493 0.828584 0.00726749 0.099827 0.00253393 ND 0.0449124 0.402773 0.0108683 16.682654 0.886446 12.792115 1.42564 0.000113488 ND 0.00332027 1.570316 0.0142383 0.101636 0.00301364 ND 0.0693049 0.308266 0.00818658 15.106191 0.860283 16.087509 1.38356 0.000141417 ND 0.00456088 2.108333 0.0220921 0.10186 0.00318014 ND 0.105882 0.458442 0.0155491 18.502311 0.975968 15.972953 1.56962 0.000225657 ND 0.00438701 1.676338 0.0153366 0.100562 0.00306549 ND 0.0728875 0.596866 0.022269 22.880687 1.20234 13.732315 1.60711 0.000127931 ND 0.00236206 0.82553 0.00694422 0.099732 0.00308048 ND 0.0433165 0.434457 0.0125185 18.471945 0.867003 13.684316 1.39437 0.00015869 ND 0.0023803 0.51283 0.00449767 0.097869 0.00298829 ND 0.0320049 0.320724 0.00740647 14.97628 0.771376 10.975531 1.24058 0.000170524 ND 0.00250747 0.288008 0.00275762 0.097122 0.00307783 ND 0.0286064 0.225031 0.00512202 16.190129 0.793016 9.986584 1.27538 0.000139453 ND 0.00210484 0.421347 0.00396063 0.097491 0.00328631 ND 0.0363724 0.130787 0.00605073 18.619265 0.802653 12.01505 1.28041 0.000135238 ND 0.00236947 0.945033 0.00781563 0.097397 0.00328388 ND 0.0417901 0.288583 0.006506 15.879214 0.844887 10.970326 1.3588



### Page 5

### FAB2_Stack1

Timestamp 08/05/11 04:37:43 AM 08/05/11 04:45:28 AM 08/05/11 04:53:12 AM 08/05/11 05:01:03 AM 08/05/11 05:08:54 AM 08/05/11 05:16:36 AM 08/05/11 05:24:16 AM 08/05/11 05:32:07 AM 08/05/11 05:39:57 AM 08/05/11 05:47:42 AM 08/05/11 05:55:28 AM 08/05/11 06:03:17 AM 08/05/11 06:10:58 AM 08/05/11 06:18:48 AM 08/05/11 06:26:39 AM 08/05/11 06:34:24 AM 08/05/11 06:42:04 AM 08/05/11 06:49:49 AM 08/05/11 06:57:36 AM 08/05/11 07:05:20 AM 08/05/11 07:13:05 AM 08/05/11 07:20:47 AM 08/05/11 07:28:24 AM 08/05/11 07:36:12 AM 08/05/11 07:43:54 AM 08/05/11 07:51:39 AM 08/05/11 07:59:27 AM 08/05/11 08:07:15 AM SiF4Error CH2F2 CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.000140157 ND 0.00256278 1.256216 0.0103868 0.126304 0.00344866 ND 0.0501763 0.358905 0.00876634 16.207925 0.874221 10.644738 1.40598 0.000147289 ND 0.00284735 1.355332 0.0119246 0.154294 0.00339349 ND 0.063187 0.41608 0.0117055 15.495072 0.878158 10.157815 1.41231 0.000191025 ND 0.00424465 2.572442 0.0277654 0.160183 0.00362975 ND 0.103358 0.787586 0.0344272 22.056027 1.09654 9.038787 1.46568 0.000182151 ND 0.00365946 1.716448 0.0161402 0.159333 0.00387764 ND 0.0906279 0.806095 0.0352459 16.544282 0.859768 11.384447 1.38274 0.000251789 ND 0.00367515 0.934043 0.00772211 0.152559 0.0041234 ND 0.039245 0.602285 0.0200674 3.753976 0.724998 10.405472 1.21633 0.000168838 ND 0.00260709 0.492608 0.00454767 0.134545 0.00424803 ND 0.0330583 0.272212 0.0060147 2.921064 0.687029 11.911946 1.15263 0.000162807 ND 0.00252027 0.789035 0.00681026 0.135542 0.00437845 ND 0.0408763 0.169669 0.00647748 2.407607 0.681294 12.206507 1.13354 0.000178642 ND 0.00268008 0.998577 0.00819693 0.129239 0.00450611 ND 0.0413507 0.254171 0.00555513 2.600309 0.723721 11.778082 1.21419 0.000295918 ND 0.00417138 1.825033 0.0170687 0.113102 0.00456809 ND 0.0861153 0.358294 0.00886563 2.59699 0.619879 7.015727 1.03997 0.00034727 ND 0.00619255 3.918016 0.0587121 0.100505 0.00497147 ND 0.16951 0.739465 0.0305949 7.473971 0.863175 8.098496 1.38822 0.000375185 ND 0.00576063 3.267576 0.04151 0.076072 0.00488596 ND 0.128359 0.844064 0.0362824 6.800297 0.773725 8.690653 1.24436 0.00034909 ND 0.00468346 2.332865 0.0222033 0.054325 0.00476375 ND 0.0731731 0.766258 0.0296364 2.070644 0.639757 8.636887 1.07332 0.000332917 ND 0.00448117 1.459525 0.0123739 0.050222 0.00464635 ND 0.0586499 0.5168 0.0155583 2.056881 0.68473 8.120304 1.14877 0.000224111 ND 0.00314394 0.88273 0.00746336 0.047843 0.0046704 ND 0.0345917 0.358055 0.00775007 2.526321 0.704875 7.234356 1.18257 0.000197071 ND 0.00309783 1.224849 0.00984121 0.066194 0.0049696 ND 0.0436169 0.339406 0.00723254 3.207031 0.71755 10.04244 1.20383 0.000232503 ND 0.00345063 1.912254 0.0162707 0.074479 0.00501361 ND 0.0603947 0.380767 0.0088131 5.898483 0.729616 6.69115 1.17342 0.000228964 ND 0.00374501 1.506514 0.0120573 0.082722 0.00518801 ND 0.0494156 0.362216 0.00816576 8.485986 0.789174 7.525744 1.2692 0.000212629 ND 0.00343155 1.397891 0.0115272 0.088125 0.0052505 ND 0.0516206 0.284521 0.00574894 4.735941 0.710476 5.420651 1.14264 0.000302972 ND 0.0042397 2.518788 0.0242036 0.088261 0.00544192 ND 0.0758348 0.431806 0.0108958 3.679119 0.713648 5.565083 1.19729 0.000342132 ND 0.00470746 2.839643 0.029826 0.099906 0.00571984 ND 0.086688 0.620155 0.0210962 3.155471 0.714687 8.744555 1.19903 0.000275647 ND 0.00422978 2.377144 0.0221954 0.118214 0.00609517 ND 0.0757996 0.797511 0.0317644 2.73116 0.697179 9.807901 1.16966 0.000246418 ND 0.00391335 1.572591 0.0126481 0.083754 0.00584925 ND 0.0501134 0.819986 0.0322665 2.864752 0.707954 7.444831 1.18773 0.00030436 ND 0.00423163 1.046218 0.0087886 0.058123 0.00551542 ND 0.0421992 0.655095 0.0225556 2.622285 0.623245 10.175189 1.04562 0.000377083 ND 0.00539224 1.188931 0.00961075 0.037218 0.00538639 ND 0.0431817 0.460597 0.0115498 1.974611 0.749429 13.389909 1.25732 0.00047218 ND 0.00728293 0.897888 0.00776227 0.029522 0.00527031 ND 0.043019 0.382042 0.00806989 1.208872 0.74107 16.114381 1.24329 0.00063839 ND 0.00929708 1.035886 0.00881488 0.034369 0.00535543 ND 0.0453659 0.300738 0.00610453 0.818419 0.760164 16.94102 1.27533 0.000787959 ND 0.011332 2.738525 0.0280787 0.045579 0.00555488 ND 0.080897 0.726344 0.0266656 1.009045 0.72195 16.251465 1.21122 0.000942659 ND 0.0135067 2.422519 0.024485 0.039183 0.00563891 ND 0.11806 0.842933 0.0341884 1.073479 0.77103 18.505257 1.29356



### Page 6

### FAB3_Stack1

Timestamp NF3 NF3 FDL SiH4 SiH4Error C2H4 C2H4 FDL C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8Error C3F8 C3F8 FDL C5F8 C5F8 FDL SiF4 SiF4Error CH2F2 CH2F2 FDL C2F6 08/05/11 01:04:50 PM ND 0.0023744 0.006379 0.00305976 ND 0.0112031 ND 0.00854602 0.053912 0.000299317 0.010572 0.00298199 0.003268 0.00151161 ND 0.00077526 0.00042 0.000200358 ND 0.00291921 0.208922 08/05/11 01:12:29 PM 0.003248 0.00185418 0.01462 0.00238938 ND 0.0178457 ND 0.0136131 0.093367 0.000476788 0.013611 0.00475008 ND 0.00161538 ND 0.00082848 0.00107 0.000145179 ND 0.00205012 0.519355 08/05/11 03:21:38 PM 0.009692 0.00220248 0.011333 0.00283822 ND 0.0151651 ND 0.0115683 0.084278 0.00040517 0.017083 0.00403658 0.002919 0.00172579 ND 0.000885109 0.001264 0.000178525 ND 0.00287316 0.282941 08/05/11 03:29:14 PM 0.012806 0.00234004 0.014191 0.00301549 ND 0.0155134 ND 0.011834 0.085651 0.000414474 0.016233 0.00412927 0.003498 0.00177999 ND 0.000912905 0.001345 0.000177379 ND 0.00304877 0.291963 08/05/11 03:36:48 PM ND 0.00231106 0.039144 0.00297814 ND 0.0137161 ND 0.0104629 0.073592 0.000366455 0.015511 0.00365087 0.002828 0.00162715 ND 0.000834518 0.001368 0.000176835 ND 0.00284796 0.135953 08/05/11 03:44:24 PM 0.008148 0.00221263 0.02165 0.0028513 ND 0.00552105 ND 0.00421159 0.027329 0.000147507 0.014156 0.00146956 0.013766 0.00147591 ND 0.000756949 0.001372 0.00018746 ND 0.00293347 0.283268 08/05/11 03:51:55 PM 0.011295 0.0023497 0.011803 0.00302793 ND 0.00724682 ND 0.00552805 0.020634 0.000193615 0.00484 0.00192892 0.365425 0.00201642 ND 0.00103416 0.001434 0.000201218 ND 0.00488266 0.751322 08/05/11 03:59:25 PM ND 0.00236696 0.012731 0.00305017 ND 0.00776403 ND 0.00592258 0.01837 0.000207433 0.002095 0.00206659 0.424954 0.00211151 ND 0.00108293 0.001465 0.000208436 ND 0.00584624 1.034215 08/05/11 04:06:58 PM 0.008453 0.00229339 0.011799 0.00295536 ND 0.00716859 ND 0.00546837 0.021863 0.000191525 0.005728 0.0019081 0.335206 0.00199204 ND 0.00102166 0.00166 0.000191184 ND 0.00470155 1.097462 08/05/11 04:14:35 PM 0.015177 0.00221515 0.010488 0.00285454 ND 0.0055308 ND 0.00421902 0.022398 0.000147767 0.012081 0.00147216 0.089571 0.00160934 ND 0.000825385 0.001637 0.000183508 ND 0.00386695 1.063609 08/05/11 04:22:12 PM 0.006254 0.00218118 0.010766 0.00281076 ND 0.00534118 ND 0.00407438 0.023795 0.000142701 0.013859 0.00142169 0.008137 0.00155782 ND 0.00079896 0.001499 0.000173238 ND 0.0035657 0.98728 08/05/11 04:29:47 PM ND 0.00215805 0.010688 0.00278096 ND 0.00552985 ND 0.0042183 0.024943 0.000147742 0.013242 0.00147191 0.004532 0.0015823 ND 0.000811514 0.001444 0.000168512 ND 0.00351578 0.963807 08/05/11 04:37:24 PM ND 0.00221332 0.011338 0.00285218 ND 0.00569458 ND 0.00434396 0.026865 0.000152143 0.013316 0.00151575 0.004054 0.00158152 ND 0.000811118 0.001449 0.000196216 ND 0.0042419 0.946414 08/05/11 04:44:58 PM ND 0.00215084 0.010114 0.00277167 ND 0.00522939 ND 0.0039891 0.023502 0.000139715 0.012163 0.00139193 0.004274 0.00151247 ND 0.000775702 0.00137 0.000182558 ND 0.00421034 0.923444 08/05/11 04:52:33 PM ND 0.00209511 0.011943 0.00269986 ND 0.00480633 ND 0.00366639 0.021723 0.000128412 0.010276 0.00127933 0.004248 0.00155788 ND 0.000798992 0.001278 0.000177147 ND 0.00301392 0.280276 08/05/11 05:00:10 PM 0.012584 0.00211609 0.049481 0.00272688 ND 0.00915729 ND 0.0069854 0.051414 0.000244657 0.008545 0.00243744 0.00383 0.00183041 ND 0.000938767 0.001168 0.000151385 ND 0.00247882 0.017607 08/05/11 05:07:50 PM 0.025845 0.00213288 0.055152 0.00274853 ND 0.00712835 ND 0.00543767 0.038934 0.000190449 0.010729 0.00189739 0.004286 0.00176209 ND 0.000903724 0.001181 0.000142274 ND 0.00243003 0.215096 08/05/11 05:15:25 PM ND 0.00209015 0.056216 0.00269346 ND 0.00450807 ND 0.00343886 0.02147 0.000120443 0.012217 0.00119993 0.004261 0.00168619 ND 0.000864796 0.001222 0.000153203 ND 0.00237115 0.258736 08/05/11 05:23:03 PM ND 0.00205315 0.051323 0.00264578 ND 0.0122514 ND 0.00934567 0.069839 0.000327323 0.012352 0.00326102 0.003448 0.0019044 ND 0.000976713 0.001197 0.000154164 ND 0.00233084 0.202516 08/05/11 05:30:30 PM ND 0.00208341 0.013571 0.00268478 ND 0.0145795 ND 0.0111216 0.081356 0.000389523 0.013669 0.00388069 0.003616 0.00179434 ND 0.000920265 0.001118 0.0001553 ND 0.00256252 0.021929 08/05/11 05:37:59 PM ND 0.00208673 0.007396 0.00268906 ND 0.0191098 ND 0.0145774 0.103817 0.000510561 0.016143 0.00508655 0.003265 0.00185356 ND 0.000950635 0.001101 0.000152515 ND 0.00258745 0.012339 08/05/11 05:45:35 PM 0.010976 0.00206332 0.007657 0.00265888 ND 0.0210262 ND 0.0160393 0.11289 0.000561761 0.015597 0.00559665 0.003718 0.00197219 ND 0.00101148 0.001068 0.000145308 ND 0.00240744 0.013542 08/05/11 05:53:03 PM ND 0.00206463 0.011431 0.00266058 ND 0.0227108 ND 0.0173243 0.120693 0.000606769 0.015933 0.00604505 0.003335 0.00199245 ND 0.00102187 0.001145 0.000152536 ND 0.00222753 0.012897 08/05/11 06:00:32 PM ND 0.00196356 0.010681 0.00253033 ND 0.0248728 ND 0.0189736 0.130847 0.000664531 0.018989 0.00662051 0.002933 0.00203617 ND 0.00104429 0.001168 0.000155469 ND 0.00232548 0.177546 08/05/11 06:08:06 PM ND 0.00188343 0.009463 0.00242707 ND 0.0251286 ND 0.0191687 0.132036 0.000671365 0.018486 0.00668859 0.002609 0.00201554 ND 0.00103371 0.001267 0.000143762 ND 0.00253912 0.487015 08/05/11 06:15:44 PM ND 0.00182573 0.00977 0.00235272 ND 0.0255859 ND 0.0195176 0.134103 0.000683585 0.017025 0.00681033 0.002345 0.00197013 ND 0.00101042 0.001332 0.000148452 ND 0.00242106 0.424227 08/05/11 06:23:20 PM 0.022824 0.001852 0.00844 0.00238657 ND 0.0295733 ND 0.0225592 0.150583 0.000790116 0.018169 0.00787167 0.00239 0.00213856 ND 0.0010968 0.001184 0.000138501 ND 0.00220726 0.210096 08/05/11 06:30:57 PM 0.020951 0.00182575 0.021959 0.00235274 ND 0.0179537 ND 0.0136955 0.099494 0.000479673 0.020444 0.00477883 0.03702 0.00196787 ND 0.00100927 0.001183 0.000141275 ND 0.00232905 0.187193 08/05/11 06:38:28 PM 0.013217 0.00268291 0.065704 0.00345732 ND 0.0178372 ND 0.0136066 0.099319 0.000476559 0.0152 0.0047478 0.22236 0.0024845 ND 0.00127423 0.001393 0.000137766 ND 0.00251009 0.187663 08/05/11 06:46:04 PM ND 0.00196087 0.067861 0.00252687 ND 0.0184028 ND 0.0140381 0.101296 0.000491671 0.013631 0.00489836 0.274346 0.00247621 ND 0.00126998 0.001332 0.000145599 ND 0.00269711 0.183908 08/05/11 06:53:39 PM ND 0.00192248 0.066811 0.00247739 ND 0.0189559 ND 0.01446 0.103694 0.000506448 0.011865 0.00504557 0.338443 0.00254503 ND 0.00130527 0.001493 0.000161182 ND 0.00270722 0.175728 08/05/11 07:01:07 PM 0.003393 0.0018454 0.036879 0.00237807 ND 0.0130721 ND 0.00997171 0.073758 0.00034925 0.014547 0.00347946 0.170996 0.0019966 ND 0.001024 0.001455 0.000156981 ND 0.00238727 0.168183 08/05/11 07:08:45 PM ND 0.00187207 0.009165 0.00241244 ND 0.00958696 ND 0.00731316 0.055824 0.000256137 0.014382 0.00255181 0.056004 0.00160019 ND 0.000820689 0.001261 0.000139863 ND 0.00242742 0.154537 08/05/11 07:16:17 PM 0.02253 0.00210444 0.007684 0.00271187 ND 0.00771867 ND 0.00588799 0.045759 0.000206221 0.012878 0.00205452 0.007234 0.00160883 ND 0.000825123 0.000888 0.000124155 ND 0.00228343 0.023022 08/05/11 07:23:49 PM ND 0.00212591 0.005614 0.00273954 ND 0.0133578 ND 0.0101896 0.078083 0.000356883 0.011243 0.00355551 0.003978 0.00179919 ND 0.000922752 0.000895 0.000135468 ND 0.00241528 0.008024 08/05/11 07:31:22 PM 0.004549 0.00207419 0.005131 0.0026729 ND 0.0135053 ND 0.0103021 0.07933 0.000360823 0.013507 0.00359476 0.004139 0.00157981 ND 0.000810238 0.000923 0.000110527 ND 0.00238712 0.007176 08/05/11 07:39:00 PM ND 0.0022276 0.009816 0.00287059 ND 0.0136853 ND 0.0104395 0.080965 0.000365634 0.012423 0.00364269 0.003838 0.00177573 ND 0.000910723 0.001233 0.000160622 ND 0.00247955 0.00852 08/05/11 07:46:44 PM ND 0.00248313 0.012278 0.00319987 ND 0.0135624 ND 0.0103457 0.07963 0.000362349 0.012714 0.00360997 0.00355 0.00183291 ND 0.000940048 0.001352 0.000188193 ND 0.00310403 0.008151 08/05/11 07:54:21 PM ND 0.00263642 0.012943 0.00339741 ND 0.0114005 ND 0.00869659 0.06492 0.00030459 0.012944 0.00303453 0.003264 0.00181533 ND 0.000931032 0.001382 0.000204799 ND 0.00349198 0.006425 08/05/11 08:01:55 PM ND 0.0028117 0.032666 0.00362329 ND 0.00602297 ND 0.00459447 0.026692 0.000160917 0.013105 0.00160316 0.004121 0.00182537 ND 0.000936182 0.001432 0.000218943 ND 0.00378423 0.005816 08/05/11 08:09:33 PM 0.011486 0.00296396 0.03786 0.00381949 ND 0.00580213 ND 0.00442601 0.02233 0.000155017 0.01454 0.00154438 0.004411 0.00191574 ND 0.000982529 0.001593 0.000220734 ND 0.00424875 0.248021 08/05/11 08:17:02 PM 0.005511 0.00307542 0.016892 0.00396313 ND 0.00615047 ND 0.00469173 0.023692 0.000164323 0.015381 0.0016371 0.004369 0.00192829 ND 0.000988965 0.0016 0.00025201 ND 0.00457252 0.308774 08/05/11 08:24:34 PM ND 0.00316995 0.015153 0.00408495 ND 0.00627514 ND 0.00478682 0.022469 0.000167654 0.013936 0.00167028 0.004317 0.00196845 ND 0.00100956 0.001671 0.000270668 ND 0.00500289 0.318114 08/05/11 08:32:07 PM 0.014663 0.00326855 0.014485 0.004212 ND 0.0174531 ND 0.0133136 0.089756 0.000466297 0.016205 0.00464557 0.003121 0.00217277 ND 0.00111435 0.001657 0.000266976 ND 0.00522596 0.314818 08/05/11 08:39:40 PM 0.006411 0.00339032 0.01506 0.00436892 ND 0.0219551 ND 0.0167479 0.112391 0.000586578 0.016852 0.00584389 0.002382 0.0022581 ND 0.00115811 0.001636 0.000276521 ND 0.0052774 0.309984 08/05/11 08:47:11 PM 0.004348 0.00343057 0.014429 0.00442078 ND 0.0226368 ND 0.0172679 0.114213 0.000604792 0.016437 0.00602535 ND 0.00222318 ND 0.00114021 0.001734 0.000303958 ND 0.00538146 0.306997 08/05/11 08:54:42 PM ND 0.00338709 0.015428 0.00436844 ND 0.0226155 ND 0.0160974 0.113383 0.000603564 0.014807 0.0046582 0.003133 0.00204521 ND 0.000992295 0.001699 0.000329332 ND 0.00497811 0.300931 08/05/11 09:02:15 PM 0.017504 0.00349797 0.014499 0.00450765 ND 0.0205469 ND 0.0156737 0.101081 0.000548956 0.013818 0.00546907 ND 0.00212274 ND 0.00108869 0.001796 0.000332941 ND 0.00618331 0.297265 08/05/11 09:09:54 PM ND 0.00384517 0.026665 0.00495506 ND 0.0123281 ND 0.00940414 0.058655 0.000329371 0.016551 0.00328142 ND 0.00207437 ND 0.00106389 0.00175 0.000529358 ND 0.0105238 0.100929 08/05/11 09:17:27 PM ND 0.00377833 0.061033 0.00486893 ND 0.0133329 ND 0.0101706 0.063402 0.000356217 0.016915 0.00354887 ND 0.00219089 ND 0.00112364 0.001693 0.000402202 ND 0.00769072 0.016591 08/05/11 09:24:55 PM 0.007451 0.00366179 0.061562 0.00471875 ND 0.012813 ND 0.00977405 0.060106 0.000342327 0.017971 0.00341049 0.002791 0.0021668 ND 0.00111129 0.001739 0.000355188 ND 0.00637012 0.01488 08/05/11 09:32:26 PM 0.005183 0.00375704 0.057738 0.00484149 ND 0.0125471 ND 0.00957124 0.058599 0.000335224 0.016468 0.00333973 0.003227 0.00215763 ND 0.00110658 0.001719 0.000358048 ND 0.00625508 0.014728 08/05/11 09:40:05 PM ND 0.00367828 0.033079 0.00474 ND 0.0133186 ND 0.0101597 0.062511 0.000355835 0.014972 0.00354506 0.002554 0.0020682 ND 0.00106072 0.001741 0.000345433 ND 0.00599462 0.015247 08/05/11 09:47:38 PM 0.004839 0.00369665 0.015365 0.00476368 ND 0.0163065 ND 0.012439 0.077713 0.000435665 0.015045 0.00434039 0.002458 0.00211503 ND 0.00108474 0.001772 0.000368299 ND 0.00618691 0.01437 08/05/11 09:55:15 PM 0.006907 0.00370257 0.014759 0.0047713 ND 0.0172216 ND 0.0131371 0.081516 0.000460113 0.014865 0.00458396 ND 0.00205407 ND 0.00105347 0.001823 0.00039354 ND 0.00635806 0.011586 08/05/11 10:02:47 PM 0.016109 0.00367541 0.012458 0.00473631 ND 0.0179345 ND 0.0136808 0.084563 0.000479159 0.015759 0.0047737 ND 0.00212068 ND 0.00108764 0.001771 0.000380128 ND 0.0062257 0.012048 08/05/11 10:10:16 PM ND 0.0036861 0.014307 0.00475008 ND 0.0185785 ND 0.0141721 0.087287 0.000496365 0.014391 0.00494512 ND 0.00215277 ND 0.00110409 0.001687 0.000374339 ND 0.00613154 0.012327 08/05/11 10:17:47 PM 0.010244 0.0036879 0.014755 0.00475239 ND 0.0180741 ND 0.0137874 0.084684 0.000482891 0.013972 0.00481088 ND 0.0021032 ND 0.00107867 0.001756 0.000354707 ND 0.00634866 0.281435 08/05/11 10:25:19 PM ND 0.0035085 0.014371 0.00452501 ND 0.0173091 ND 0.0123204 0.08025 0.000461946 0.016594 0.00356522 0.003389 0.00186444 ND 0.000904589 0.00169 0.000345174 ND 0.0057037 0.641937 08/05/11 10:32:53 PM 0.005302 0.00363262 0.014814 0.00468116 ND 0.0155157 ND 0.0118357 0.071706 0.000414535 0.01588 0.00412988 0.002241 0.0020932 ND 0.00107354 0.001661 0.000321064 ND 0.00652716 0.665881 08/05/11 10:40:23 PM 0.015007 0.00363887 0.017265 0.00468922 ND 0.00945152 ND 0.00720984 0.039422 0.000252518 0.014883 0.00251576 0.003205 0.0019499 ND 0.00100005 0.001562 0.000319408 ND 0.00648446 0.671445 08/05/11 10:48:03 PM 0.006194 0.00355882 0.017277 0.00458605 ND 0.00729292 ND 0.00556321 0.025467 0.000194846 0.012113 0.00194119 0.003746 0.00198574 ND 0.00101843 0.001598 0.000321877 ND 0.00644441 0.673651 08/05/11 10:55:37 PM 0.016336 0.0034592 0.013245 0.00445768 ND 0.00683111 ND 0.00521093 0.022126 0.000182508 0.010442 0.00181827 0.003531 0.00196119 ND 0.00100584 0.001479 0.00032236 ND 0.00634923 0.661634 08/05/11 11:03:09 PM ND 0.0034561 0.013833 0.00445369 ND 0.00654534 ND 0.00499294 0.018889 0.000174873 0.009981 0.00174221 0.00362 0.00190597 ND 0.000977517 0.001514 0.000317562 ND 0.00627564 0.647849 08/05/11 11:10:44 PM 0.009724 0.00340418 0.013194 0.00438678 ND 0.00654206 ND 0.00499044 0.019126 0.000174786 0.009728 0.00174133 0.003579 0.00195428 ND 0.00100229 0.001462 0.000314612 ND 0.00616736 0.637092 08/05/11 11:18:22 PM 0.005704 0.00338861 0.013403 0.00436672 ND 0.0103998 ND 0.00793324 0.044793 0.000277855 0.009069 0.00276818 0.003319 0.00202829 ND 0.00104025 0.001437 0.000306382 ND 0.00613549 0.629737 08/05/11 11:25:50 PM 0.008656 0.00331024 0.013914 0.00426572 ND 0.0229873 ND 0.0175353 0.103628 0.000614157 0.00583 0.00611865 0.002125 0.00211812 ND 0.00108632 0.001359 0.000313763 ND 0.005519 0.231029 08/05/11 11:33:25 PM 0.008614 0.00328241 0.012471 0.00422986 ND 0.0273236 ND 0.0208431 0.122214 0.000730011 0.005713 0.00727286 ND 0.00219936 ND 0.00112799 0.001234 0.000313648 ND 0.00535841 0.017941 08/05/11 11:40:58 PM 0.010218 0.00323375 0.013214 0.00416716 ND 0.0286298 ND 0.0218395 0.127454 0.000764909 0.009656 0.00762054 ND 0.00230591 ND 0.00118264 0.001204 0.000310644 ND 0.00525306 0.012451 08/05/11 11:48:27 PM 0.014496 0.00326123 0.012868 0.00420257 ND 0.0289776 ND 0.0221048 0.128806 0.000774201 0.011478 0.00771311 ND 0.00226567 ND 0.001162 0.001253 0.000298082 ND 0.00513528 0.011642 08/05/11 11:56:02 PM 0.013143 0.00318148 0.0133 0.00409981 ND 0.0303178 ND 0.0231272 0.132742 0.000810008 0.012864 0.00806985 ND 0.00225506 ND 0.00115655 0.001265 0.000315518 ND 0.00500345 0.007759 08/06/11 12:03:33 AM 0.007542 0.00308209 0.012362 0.00397173 ND 0.0230006 ND 0.0175454 0.104989 0.000614513 0.014857 0.00612219 ND 0.00213605 ND 0.00109552 0.001426 0.000311202 ND 0.00498834 0.007506



### Page 1

### FAB3_Stack1

Timestamp NF3 NF3 FDL SiH4 SiH4Error C2H4 C2H4 FDL C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8Error C3F8 C3F8 FDL C5F8 C5F8 FDL SiF4 SiF4Error CH2F2 CH2F2 FDL C2F6 08/06/11 12:11:06 AM ND 0.00302471 0.013148 0.00389778 ND 0.0217784 ND 0.0166131 0.100149 0.000581859 0.013961 0.00579687 ND 0.00208714 ND 0.00107043 0.001416 0.000308809 ND 0.00495174 0.111358 08/06/11 12:18:38 AM 0.005493 0.00292929 0.010365 0.00377482 ND 0.0212659 ND 0.0162221 0.097808 0.000568165 0.01447 0.00566044 ND 0.00200854 ND 0.00103012 0.001453 0.000288269 ND 0.00526173 0.473056 08/06/11 12:26:14 AM ND 0.0028252 0.010483 0.00364068 ND 0.0155587 ND 0.0118686 0.071781 0.000415685 0.017508 0.00414134 0.002627 0.00195314 ND 0.00100171 0.001441 0.000297912 ND 0.00519137 0.498098 08/06/11 12:33:43 AM 0.017571 0.00279406 0.010055 0.00360056 ND 0.0113372 ND 0.00864828 0.051137 0.000302898 0.019716 0.00301768 0.003296 0.00190265 ND 0.000975814 0.001351 0.000281529 ND 0.0050869 0.501654 08/06/11 12:41:14 AM 0.009156 0.00265771 0.009906 0.00342485 ND 0.0105837 ND 0.00807351 0.04762 0.000282767 0.019745 0.00281712 0.003384 0.00184491 ND 0.000946201 0.00141 0.000273267 ND 0.00495011 0.497625 08/06/11 12:48:51 AM 0.005075 0.00263346 0.009902 0.0033936 ND 0.0126337 ND 0.00963726 0.058432 0.000337536 0.018173 0.00336276 0.003514 0.00194305 ND 0.000996534 0.001401 0.000269392 ND 0.00509892 0.486906 08/06/11 12:56:25 AM 0.019257 0.00260968 0.009306 0.00336295 ND 0.023078 ND 0.0176044 0.105505 0.000616579 0.016056 0.00614278 0.002128 0.00200651 ND 0.00102908 0.001565 0.000244534 ND 0.00505393 0.471593 08/06/11 01:03:52 AM 0.004841 0.00261482 0.022662 0.00336958 ND 0.0281233 ND 0.0214531 0.126686 0.000751375 0.013579 0.00748571 ND 0.00221531 ND 0.00113617 0.001613 0.00025546 ND 0.00499935 0.4539 08/06/11 01:11:27 AM 0.014152 0.00259268 0.038002 0.00334105 ND 0.0276931 ND 0.0211249 0.125784 0.000739881 0.015267 0.0073712 ND 0.00221389 ND 0.00113544 0.001705 0.000251386 ND 0.00490016 0.449764 08/06/11 01:18:53 AM 0.026127 0.00255725 0.020603 0.00329539 ND 0.0284919 ND 0.0217343 0.129388 0.000761224 0.012547 0.00758383 0.002415 0.00218069 ND 0.00111841 0.001321 0.000252031 ND 0.00423251 0.151033 08/06/11 01:26:29 AM 0.006311 0.00255254 0.05317 0.00328932 ND 0.0283536 ND 0.0216288 0.12922 0.000757529 0.013113 0.00754701 ND 0.00239282 ND 0.00122721 0.001157 0.000252789 ND 0.00404722 0.011936 08/06/11 01:34:08 AM ND 0.00243276 0.057107 0.00313496 ND 0.0284475 ND 0.0217004 0.129435 0.000760037 0.016292 0.00757201 ND 0.00247012 ND 0.00126685 0.001168 0.000248043 ND 0.0038303 0.009186 08/06/11 01:41:44 AM ND 0.0023067 0.016206 0.00297252 ND 0.0228332 ND 0.0174177 0.107325 0.00061004 0.015404 0.00607763 0.00267 0.00214807 ND 0.00110168 0.001145 0.000231377 ND 0.00381541 0.024782 08/06/11 01:49:22 AM 0.023469 0.00226903 0.011798 0.00292398 ND 0.02436 ND 0.0185824 0.113718 0.000650832 0.014804 0.00648403 0.00241 0.00210749 ND 0.00108087 0.00128 0.000232899 ND 0.00396039 0.294578 08/06/11 01:56:54 AM ND 0.00228879 0.019153 0.00294944 ND 0.0250697 ND 0.0191238 0.116025 0.000669793 0.014903 0.00667294 0.002887 0.00217327 ND 0.00111461 0.001271 0.000225351 ND 0.00389796 0.335103 08/06/11 02:04:29 AM 0.008068 0.00228906 0.064135 0.00294978 ND 0.0172636 ND 0.0131691 0.084005 0.000461234 0.017732 0.00459513 0.003378 0.0021823 ND 0.00111924 0.001257 0.000221542 ND 0.00379626 0.337671 08/06/11 02:12:06 AM 0.02576 0.0022111 0.068431 0.00284933 ND 0.0338757 ND 0.0258412 0.149691 0.000905065 0.014477 0.00901687 ND 0.00257038 ND 0.00131827 0.001255 0.000211793 ND 0.00366322 0.33868 08/06/11 02:19:33 AM 0.024128 0.00229185 0.066703 0.00295338 ND 0.0480466 ND 0.0366511 0.199861 0.00128367 0.010871 0.0127888 ND 0.00281109 ND 0.00144173 0.001355 0.000217336 ND 0.00367221 0.335786 08/06/11 02:27:03 AM ND 0.00224871 0.054898 0.00289779 ND 0.0480146 ND 0.0366267 0.200592 0.00128282 0.009906 0.0127803 ND 0.00270449 ND 0.00138705 0.001372 0.000234576 ND 0.00360044 0.331894 08/06/11 02:34:36 AM 0.008406 0.00217792 0.014509 0.00280657 ND 0.0530446 ND 0.0404637 0.216501 0.0014172 0.006923 0.0141191 ND 0.00259428 ND 0.00133053 0.001441 0.000273222 ND 0.00393314 0.325472 08/06/11 02:42:10 AM ND 0.00211223 0.012772 0.00272192 ND 0.0434994 ND 0.0331823 0.185331 0.00116218 0.009122 0.0115784 ND 0.00246037 ND 0.00126185 0.001366 0.000258462 ND 0.00360593 0.321485 08/06/11 02:49:42 AM 0.012563 0.00205427 0.012025 0.00264723 ND 0.0334654 ND 0.0255282 0.153107 0.000894101 0.012571 0.00890764 ND 0.00228165 ND 0.00117019 0.001384 0.00025582 ND 0.0036688 0.318118 08/06/11 02:57:18 AM 0.01267 0.0020045 0.01218 0.00258309 ND 0.0304776 ND 0.0232491 0.142202 0.000814277 0.013751 0.00811238 ND 0.00220776 ND 0.0011323 0.001443 0.000273938 ND 0.00375696 0.130707 08/06/11 03:04:53 AM 0.016018 0.00202663 0.013018 0.00261161 ND 0.0289304 ND 0.0220688 0.137036 0.000772939 0.011992 0.00770055 ND 0.00213426 ND 0.0010946 0.001427 0.000301952 ND 0.0038299 0.01157 08/06/11 03:12:33 AM 0.040498 0.00193039 0.011192 0.00248759 ND 0.0249665 ND 0.019045 0.121202 0.000667034 0.011549 0.00664545 ND 0.00208155 ND 0.00106757 0.001391 0.000306713 ND 0.00393988 0.007506 08/06/11 03:20:01 AM ND 0.00189379 0.015709 0.00244043 ND 0.0236998 ND 0.0180788 0.116916 0.000633192 0.009366 0.00630829 ND 0.00194663 ND 0.000998372 0.001525 0.00034815 ND 0.00444208 0.006027 08/06/11 03:27:38 AM ND 0.00189943 0.015553 0.0024477 ND 0.0209559 ND 0.0159856 0.104889 0.000559882 0.009857 0.00557793 ND 0.00196754 ND 0.00100909 0.001391 0.000277173 ND 0.00343239 0.005905 08/06/11 03:35:18 AM 0.011929 0.00180475 0.014267 0.00232568 ND 0.0258385 ND 0.0197102 0.12577 0.000690332 0.010028 0.00687756 ND 0.00214952 ND 0.00110243 0.001366 0.000248472 ND 0.00322972 0.007111 08/06/11 03:42:45 AM 0.014508 0.00185768 0.014922 0.00239389 ND 0.0252685 ND 0.0192754 0.124069 0.000675103 0.012469 0.00672583 ND 0.00215225 ND 0.00110383 0.001258 0.000237478 ND 0.00302598 0.007856 08/06/11 03:50:22 AM 0.006932 0.00181876 0.012995 0.00234374 ND 0.0244185 ND 0.018627 0.120807 0.000652393 0.014377 0.00649958 0.002208 0.00212301 ND 0.00108883 0.001296 0.00024667 ND 0.00314175 0.008289 08/06/11 03:57:50 AM ND 0.00183223 0.013423 0.00236109 ND 0.0203929 ND 0.0155562 0.103241 0.000544842 0.015827 0.00542808 0.003327 0.00206924 ND 0.00106125 0.001193 0.000193628 ND 0.00324168 0.008362 08/06/11 04:05:30 AM 0.028436 0.00184741 0.010701 0.00238066 ND 0.028088 ND 0.0214262 0.135466 0.000750434 0.012689 0.00747633 0.002652 0.00217333 ND 0.00111464 0.001111 0.0001713 ND 0.00313969 0.007094 08/06/11 04:13:08 AM 0.036379 0.00179861 0.009744 0.00231777 ND 0.0284674 ND 0.0217156 0.138601 0.00076057 0.010832 0.00757731 0.003848 0.00190986 ND 0.000979513 0.001278 0.000154103 ND 0.00362827 0.006229 08/06/11 04:20:48 AM 0.004679 0.00267769 0.01024 0.00345059 ND 0.0263481 ND 0.0200989 0.129778 0.000703947 0.00972 0.00701319 0.011448 0.00182246 ND 0.000934686 0.001489 0.000230436 ND 0.00456846 0.091088 08/06/11 04:28:19 AM 0.023 0.00397777 0.007144 0.00512593 ND 0.025097 ND 0.0191446 0.125859 0.000670521 0.005378 0.00668018 0.020424 0.00179616 ND 0.000921198 0.001807 0.000313331 ND 0.00608102 0.303664 08/06/11 04:35:55 AM 0.045486 0.00577822 0.003465 0.00744608 ND 0.0253728 ND 0.019355 0.123793 0.00067789 0.003821 0.0067536 0.030053 0.00237388 ND 0.00121749 0.002144 0.000466585 ND 0.00771069 0.314971 08/06/11 04:43:27 AM 0.076498 0.00857267 -0.008828 0.0110471 ND 0.0207292 ND 0.0158127 0.097389 0.000553826 0.006719 0.00551759 0.040194 0.0031595 ND 0.00162042 0.002771 0.000596235 ND 0.00954702 0.306772 08/06/11 04:50:54 AM 0.095056 0.0157172 -0.03699 0.020254 ND 0.0213278 ND 0.0168091 0.100972 0.000570553 -0.000139 0.00643111 0.038923 0.00291585 ND 0.00162978 0.00387 0.000804231 ND 0.0106302 0.294994 08/06/11 04:58:30 AM 0.218045 0.0371587 -0.1179 0.0478844 ND 0.0304861 ND 0.0232556 0.137976 0.000814505 0.00496 0.00811465 0.057125 0.0053046 ND 0.00272057 0.004362 0.000939319 ND 0.0129791 0.106082 08/06/11 09:23:16 AM 0.023773 0.00154424 0.009757 0.00198998 ND 0.0103739 ND 0.00791344 0.055928 0.000277161 0.0163 0.00276127 0.005316 0.00177546 ND 0.000910584 0.000938 0.000165765 ND 0.00235067 0.00711 08/06/11 09:29:02 AM 0.039501 0.00173609 0.008655 0.0022372 ND 0.0157323 ND 0.012001 0.084474 0.000420323 0.015669 0.00418754 0.005158 0.00203506 ND 0.00104372 0.000899 0.00015427 ND 0.00249251 0.010767 08/06/11 09:35:00 AM 0.023621 0.00193332 0.008064 0.00249136 ND 0.0157535 ND 0.0120171 0.086166 0.000420889 0.017395 0.00419318 0.005675 0.00211382 ND 0.00108412 0.000806 0.000167107 ND 0.00280431 0.010661 08/06/11 09:40:49 AM ND 0.00208533 0.009139 0.00268726 ND 0.0167062 ND 0.0127439 0.09074 0.000446344 0.019482 0.00444678 0.005917 0.00226679 ND 0.00116257 0.000862 0.0001788 ND 0.00301347 0.011947 08/06/11 09:46:39 AM ND 0.00218783 0.008714 0.00281933 ND 0.0187872 ND 0.0143313 0.103017 0.000501941 0.019718 0.00500068 0.005533 0.00239951 ND 0.00123064 0.000826 0.000192355 ND 0.00322659 0.011698 08/06/11 09:52:32 AM 0.015621 0.00240311 0.014525 0.00309675 ND 0.0195909 ND 0.0149444 0.108225 0.000523415 0.017759 0.00521461 0.005762 0.0025393 ND 0.00130233 0.000786 0.000195255 ND 0.00334706 0.011434 08/06/11 09:58:19 AM 0.020042 0.00242394 0.033314 0.00312359 ND 0.019699 ND 0.0150268 0.110183 0.000526301 0.019631 0.00524337 0.005149 0.00263986 ND 0.00135391 0.00091 0.0002022 ND 0.00326504 0.011581 08/06/11 10:04:05 AM 0.014846 0.00241814 0.030634 0.00311613 ND 0.0164358 ND 0.0125376 0.094241 0.000439118 0.020642 0.00437479 0.005551 0.00257126 ND 0.00131872 0.000935 0.000201924 ND 0.0032734 0.011771 08/06/11 10:09:57 AM 0.005162 0.00262265 0.038851 0.00337966 ND 0.0172684 ND 0.0131728 0.098685 0.000461364 0.020564 0.00459642 0.005357 0.00269497 ND 0.00138217 0.000856 0.000230117 ND 0.00354136 0.011063 08/06/11 10:15:41 AM 0.004605 0.002713 0.051078 0.0034961 ND 0.0171585 ND 0.0130889 0.098829 0.000458428 0.021677 0.00456717 0.004909 0.00285314 ND 0.00146329 0.000938 0.000234332 ND 0.00362229 0.010141 08/06/11 10:21:31 AM 0.021456 0.0029186 0.053729 0.00376104 ND 0.011632 ND 0.00887314 0.067099 0.000310774 0.02031 0.00309614 0.005723 0.00268562 ND 0.00137738 0.001101 0.000269059 ND 0.00376657 0.009668 08/06/11 10:27:16 AM 0.00644 0.00282409 0.052372 0.00363925 ND 0.0107675 ND 0.00821367 0.062527 0.000287676 0.018605 0.00286603 0.005072 0.0026444 ND 0.00135624 0.00112 0.000280974 ND 0.00401733 0.008987 08/06/11 10:33:09 AM ND 0.00292516 0.051847 0.0037695 ND 0.0104254 ND 0.00795272 0.060811 0.000278537 0.01924 0.00277497 0.005604 0.00265294 ND 0.00136062 0.001078 0.000264503 ND 0.00376815 0.009108 08/06/11 10:39:04 AM 0.008629 0.00290131 0.030048 0.00373876 ND 0.0107336 ND 0.00818785 0.062994 0.000286772 0.018987 0.00285702 0.006656 0.00257038 ND 0.00131827 0.000846 0.000247721 ND 0.00384075 0.00896 08/06/11 10:44:52 AM ND 0.00283411 0.014305 0.00365216 ND 0.0110792 ND 0.0084515 0.064641 0.000296006 0.01824 0.00294901 0.006163 0.0025575 ND 0.00131167 0.000889 0.000249013 ND 0.00392693 0.286711 08/06/11 10:50:37 AM ND 0.00287084 0.057583 0.0036995 ND 0.0108109 ND 0.0082468 0.064326 0.000288837 0.016577 0.00287759 0.006134 0.00275679 ND 0.00141388 0.000996 0.000252023 ND 0.00393405 0.388028 08/06/11 10:56:29 AM 0.044508 0.00292486 0.061372 0.0037691 ND 0.0102791 ND 0.00784117 0.061247 0.00027463 0.015924 0.00273605 0.006428 0.00282338 ND 0.00144803 0.001003 0.000259968 ND 0.00398901 0.393187 08/06/11 11:02:16 AM 0.005365 0.00289006 0.062911 0.00372426 ND 0.010447 ND 0.00796922 0.062521 0.000279115 0.015337 0.00278073 0.005804 0.00277739 ND 0.00142444 0.001005 0.000251863 ND 0.00393151 0.381489 08/06/11 11:08:02 AM 0.010641 0.00286819 0.057158 0.00369608 ND 0.0115369 ND 0.00880064 0.069801 0.000308234 0.017134 0.00307084 0.00595 0.00279963 ND 0.00143585 0.000988 0.000254254 ND 0.00388738 0.361625 08/06/11 11:13:57 AM 0.023734 0.00295848 0.057466 0.00381243 ND 0.0129729 ND 0.00989603 0.080476 0.000346599 0.01565 0.00345306 0.006654 0.00281636 ND 0.00144443 0.000886 0.000244206 ND 0.00387026 0.074765 08/06/11 11:19:38 AM ND 0.00293859 0.040768 0.0037868 ND 0.00962815 ND 0.00734458 0.058185 0.000257237 0.013787 0.00256277 0.006954 0.00259463 ND 0.00133071 0.000939 0.000245944 ND 0.0038285 0.016612 08/06/11 11:25:25 AM ND 0.00286363 0.008237 0.0036902 ND 0.0092159 ND 0.00703011 0.054284 0.000246223 0.01517 0.00245304 0.007121 0.0024571 ND 0.00126018 0.00092 0.000237815 ND 0.00374511 0.012616 08/06/11 11:31:21 AM 0.021838 0.0028318 0.005278 0.00364919 ND 0.00877739 ND 0.00669561 0.052491 0.000234507 0.012671 0.00233632 0.006955 0.00235852 ND 0.00120962 0.000919 0.000241768 ND 0.00377125 0.121196 08/06/11 11:37:12 AM ND 0.00268318 0.005137 0.00345766 ND 0.00937354 ND 0.00715036 0.056181 0.000250435 0.015103 0.002495 0.006428 0.00237699 ND 0.00121909 0.001097 0.000245301 ND 0.00381189 0.477088 08/06/11 11:42:59 AM ND 0.00262894 0.005414 0.00338777 ND 0.00965666 ND 0.00736633 0.057695 0.000257999 0.015007 0.00257036 0.007026 0.00239055 ND 0.00122604 0.001089 0.000245666 ND 0.00383516 0.511661 08/06/11 11:48:48 AM 0.025431 0.00265377 0.004917 0.00341977 ND 0.00969618 ND 0.00739648 0.05814 0.000259055 0.018056 0.00258088 0.007027 0.00236454 ND 0.0012127 0.001124 0.000244699 ND 0.00381373 0.512856 08/06/11 11:54:37 AM 0.005256 0.00259085 0.005539 0.00333869 ND 0.0104751 ND 0.00799065 0.063012 0.000279865 0.020775 0.00278821 0.006526 0.00236771 ND 0.00121433 0.001174 0.000240298 ND 0.00374028 0.515169 08/06/11 12:00:20 PM ND 0.00257123 0.00673 0.00331341 ND 0.0108898 ND 0.00830702 0.065351 0.000290946 0.020217 0.0028986 0.00586 0.00238665 ND 0.00122405 0.001125 0.000242138 ND 0.00370354 0.518459 08/06/11 12:06:16 PM 0.018502 0.00257363 0.004765 0.0033165 ND 0.017178 ND 0.0131038 0.10255 0.000458947 0.018852 0.00457234 0.005434 0.00262668 ND 0.00134715 0.001148 0.000239923 ND 0.0037009 0.517183 08/06/11 12:12:05 PM 0.01521 0.00266837 0.005816 0.00343858 ND 0.0190887 ND 0.0145613 0.113754 0.000509996 0.016513 0.00508092 0.004768 0.00263733 ND 0.00135261 0.001408 0.000255905 ND 0.00378771 1.010472 08/06/11 12:17:52 PM 0.009893 0.00263459 0.005709 0.00339505 ND 0.0184173 ND 0.0140492 0.109963 0.00049206 0.017094 0.00490223 0.004597 0.00260996 ND 0.00133857 0.001523 0.000273456 ND 0.00377061 1.170691 08/06/11 12:23:43 PM 0.012031 0.00256809 0.004797 0.00330936 ND 0.0154001 ND 0.0117476 0.09272 0.000411449 0.0177 0.00409913 0.004751 0.00244025 ND 0.00125153 0.001631 0.000270698 ND 0.00364555 1.168392 08/06/11 12:29:36 PM 0.005942 0.00256264 0.003266 0.00330234 ND 0.0164918 ND 0.0125804 0.098664 0.000440615 0.020545 0.00438971 0.004845 0.0024643 ND 0.00126387 0.001784 0.000269326 ND 0.0038466 1.160603



### Page 2

### FAB3_Stack1

Timestamp NF3 NF3 FDL SiH4 SiH4Error C2H4 C2H4 FDL C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8Error C3F8 C3F8 FDL C5F8 C5F8 FDL SiF4 SiF4Error CH2F2 CH2F2 FDL C2F6 08/06/11 12:35:25 PM 0.012175 0.00246606 0.004646 0.00317787 ND 0.0166494 ND 0.0127005 0.099624 0.000444825 0.019906 0.00443164 0.004795 0.00242741 ND 0.00124495 0.001876 0.000270136 ND 0.00380785 1.154377 08/06/11 12:41:16 PM 0.004278 0.00248759 0.004961 0.00320562 ND 0.016756 ND 0.0127819 0.100594 0.000447674 0.019417 0.00446003 0.004459 0.00249697 ND 0.00128062 0.001902 0.000270635 ND 0.003716 1.130466 08/06/11 12:47:03 PM 0.027522 0.00263621 0.003961 0.00339714 ND 0.0167771 ND 0.012798 0.100583 0.000448238 0.019097 0.00446565 0.005029 0.00245701 ND 0.00126013 0.001447 0.000247736 ND 0.00329292 0.765996 08/06/11 12:52:55 PM ND 0.0026076 0.007754 0.00336027 ND 0.0165694 ND 0.0126395 0.098862 0.000442687 0.018726 0.00441034 0.004809 0.00243187 ND 0.00124724 0.001265 0.000227138 ND 0.00317533 0.681974 08/06/11 12:58:40 PM ND 0.00250702 0.008824 0.00323066 ND 0.0169038 ND 0.0128946 0.100945 0.000451621 0.019247 0.00449936 0.00476 0.00242949 ND 0.00124601 0.001302 0.000224801 ND 0.00318833 0.66719 08/06/11 01:04:28 PM 0.025465 0.00254611 0.007035 0.00328103 ND 0.017522 ND 0.0133662 0.104594 0.00046814 0.020732 0.00466393 0.005573 0.00247102 ND 0.00126732 0.001315 0.000213873 ND 0.00316351 0.660779 08/06/11 01:10:18 PM ND 0.00251475 0.009618 0.00324062 ND 0.0166579 ND 0.012707 0.099124 0.000445052 0.018286 0.00443391 0.005496 0.00239174 ND 0.00122666 0.001406 0.000199672 ND 0.00303884 0.655306 08/06/11 01:16:13 PM ND 0.00245782 0.009153 0.00316726 ND 0.00860249 ND 0.00656219 0.048101 0.000229835 0.016421 0.00228977 0.006379 0.00212754 ND 0.00109115 0.001366 0.000193484 ND 0.00301925 0.640672 08/06/11 01:22:06 PM ND 0.00236725 0.009855 0.00305054 ND 0.00738332 ND 0.00563217 0.039046 0.000197262 0.01802 0.00196525 0.007018 0.00207445 ND 0.00106392 0.001248 0.000176785 ND 0.0028993 0.157463 08/06/11 01:27:55 PM 0.007354 0.00235574 0.008867 0.00303572 ND 0.00749706 ND 0.00571894 0.040309 0.0002003 0.020141 0.00199553 0.006798 0.00207993 ND 0.00106674 0.001191 0.000168273 ND 0.00273754 0.035659 08/06/11 01:33:46 PM 0.003031 0.00240542 0.010053 0.00309973 ND 0.00771711 ND 0.00588679 0.041465 0.000206179 0.02149 0.0020541 0.006867 0.00205377 ND 0.00105332 0.001173 0.000171613 ND 0.00280991 0.019105 08/06/11 01:39:38 PM 0.042437 0.00235297 0.007387 0.00303215 ND 0.00775442 ND 0.00591526 0.04169 0.000207177 0.021284 0.00206403 0.006971 0.00195177 ND 0.001001 0.001163 0.000170318 ND 0.00275934 0.015783 08/06/11 01:45:32 PM ND 0.00224963 0.00987 0.00289898 ND 0.00806062 ND 0.00614883 0.044274 0.000215357 0.022152 0.00214553 0.006434 0.00200561 ND 0.00102862 0.001231 0.000161008 ND 0.00258206 0.013268 08/06/11 01:51:21 PM 0.010515 0.00225537 0.008636 0.00290637 ND 0.00757368 ND 0.00577738 0.041357 0.000202347 0.019565 0.00201592 0.006178 0.0019333 ND 0.000991534 0.001278 0.000157842 ND 0.00261053 0.010691 08/06/11 01:57:12 PM 0.018959 0.00225165 0.008767 0.00290158 ND 0.00722773 ND 0.00551349 0.039014 0.000193105 0.019082 0.00192384 0.006346 0.00191591 ND 0.000982613 0.001233 0.000155487 ND 0.00266749 0.009651 08/06/11 02:03:00 PM 0.006962 0.00222091 0.021263 0.00286196 ND 0.00682882 ND 0.00520919 0.036028 0.000182447 0.019424 0.00181766 0.006302 0.0019546 ND 0.00100246 0.001217 0.000152795 ND 0.00261103 0.010169 08/06/11 02:08:48 PM ND 0.00225217 0.047098 0.00290224 ND 0.00726561 ND 0.00554238 0.039915 0.000194117 0.020423 0.00193392 0.006689 0.00205623 ND 0.00105458 0.001268 0.000150997 ND 0.0024962 0.01166 08/06/11 02:14:32 PM ND 0.00221438 0.053618 0.00285356 ND 0.00691721 ND 0.00527661 0.037177 0.000184809 0.02075 0.00184119 0.006534 0.00202857 ND 0.0010404 0.001268 0.000144501 ND 0.00252586 0.012031 08/06/11 02:20:24 PM 0.014481 0.00226804 0.041794 0.00292271 ND 0.00694525 ND 0.005298 0.037195 0.000185558 0.020007 0.00184865 0.006589 0.00195924 ND 0.00100484 0.001249 0.000140079 ND 0.00261396 0.011698 08/06/11 02:26:15 PM 0.017715 0.00230618 0.074825 0.00297185 ND 0.00694935 ND 0.00530113 0.037783 0.000185667 0.020288 0.00184974 0.006534 0.00214409 ND 0.00109964 0.001264 0.000135383 ND 0.00263626 0.011399 08/06/11 02:31:57 PM 0.053091 0.00232264 0.0561 0.00299306 ND 0.00700389 ND 0.00534273 0.037967 0.000187124 0.021262 0.00186426 0.006089 0.00207748 ND 0.00106548 0.001277 0.000143886 ND 0.00264982 0.011099 08/06/11 02:37:49 PM 0.008132 0.00222836 0.058609 0.00287157 ND 0.00690447 ND 0.0052669 0.037102 0.000184468 0.019433 0.0018378 0.006798 0.0020147 ND 0.00103328 0.001177 0.000129015 ND 0.00259535 0.01041 08/06/11 02:43:37 PM 0.016333 0.00216227 0.055779 0.0027864 ND 0.00652958 ND 0.00498092 0.034851 0.000174452 0.01748 0.00173801 0.006467 0.00199222 ND 0.00102175 0.001246 0.000133702 ND 0.00256661 0.010173 08/06/11 02:49:26 PM 0.009851 0.00210816 0.036861 0.00271668 ND 0.00670705 ND 0.0051163 0.036014 0.000179194 0.015766 0.00178525 0.006067 0.00190227 ND 0.000975622 0.001231 0.000117429 ND 0.00250618 0.008036 08/06/11 02:55:17 PM ND 0.00205901 0.01309 0.00265334 ND 0.00701651 ND 0.00535236 0.037728 0.000187461 0.020474 0.00186762 0.006023 0.00176047 ND 0.000902895 0.001241 0.000125252 ND 0.00246737 0.008343 08/06/11 03:01:11 PM 0.012151 0.00208843 0.00992 0.00269125 ND 0.00717737 ND 0.00547507 0.039038 0.000191759 0.019376 0.00191044 0.006227 0.00173072 ND 0.000887635 0.001309 0.000128427 ND 0.00237823 0.008853



### Page 3

### FAB3_Stack1

Timestamp 08/05/11 01:04:50 PM 08/05/11 01:12:29 PM 08/05/11 03:21:38 PM 08/05/11 03:29:14 PM 08/05/11 03:36:48 PM 08/05/11 03:44:24 PM 08/05/11 03:51:55 PM 08/05/11 03:59:25 PM 08/05/11 04:06:58 PM 08/05/11 04:14:35 PM 08/05/11 04:22:12 PM 08/05/11 04:29:47 PM 08/05/11 04:37:24 PM 08/05/11 04:44:58 PM 08/05/11 04:52:33 PM 08/05/11 05:00:10 PM 08/05/11 05:07:50 PM 08/05/11 05:15:25 PM 08/05/11 05:23:03 PM 08/05/11 05:30:30 PM 08/05/11 05:37:59 PM 08/05/11 05:45:35 PM 08/05/11 05:53:03 PM 08/05/11 06:00:32 PM 08/05/11 06:08:06 PM 08/05/11 06:15:44 PM 08/05/11 06:23:20 PM 08/05/11 06:30:57 PM 08/05/11 06:38:28 PM 08/05/11 06:46:04 PM 08/05/11 06:53:39 PM 08/05/11 07:01:07 PM 08/05/11 07:08:45 PM 08/05/11 07:16:17 PM 08/05/11 07:23:49 PM 08/05/11 07:31:22 PM 08/05/11 07:39:00 PM 08/05/11 07:46:44 PM 08/05/11 07:54:21 PM 08/05/11 08:01:55 PM 08/05/11 08:09:33 PM 08/05/11 08:17:02 PM 08/05/11 08:24:34 PM 08/05/11 08:32:07 PM 08/05/11 08:39:40 PM 08/05/11 08:47:11 PM 08/05/11 08:54:42 PM 08/05/11 09:02:15 PM 08/05/11 09:09:54 PM 08/05/11 09:17:27 PM 08/05/11 09:24:55 PM 08/05/11 09:32:26 PM 08/05/11 09:40:05 PM 08/05/11 09:47:38 PM 08/05/11 09:55:15 PM 08/05/11 10:02:47 PM 08/05/11 10:10:16 PM 08/05/11 10:17:47 PM 08/05/11 10:25:19 PM 08/05/11 10:32:53 PM 08/05/11 10:40:23 PM 08/05/11 10:48:03 PM 08/05/11 10:55:37 PM 08/05/11 11:03:09 PM 08/05/11 11:10:44 PM 08/05/11 11:18:22 PM 08/05/11 11:25:50 PM 08/05/11 11:33:25 PM 08/05/11 11:40:58 PM 08/05/11 11:48:27 PM 08/05/11 11:56:02 PM 08/06/11 12:03:33 AM C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2O FDL 0.00360103 0.041283 0.00482803 ND 0.0267636 0.134289 0.00498589 4.945025 0.56324 ND 0.898492 0.00462409 0.067435 0.0013006 ND 0.027637 0.243605 0.0038682 9.833803 0.563205 ND 0.905783 0.00306765 0.092002 0.00162352 ND 0.0227363 0.209136 0.0030767 7.402327 0.510056 ND 0.820306 0.00322267 0.117223 0.00181504 ND 0.023463 0.250099 0.00369582 7.325102 0.515027 ND 0.8283 0.00255348 0.120343 0.00194388 ND 0.0225877 0.225746 0.00319253 4.042788 0.447198 ND 0.719214 0.00341536 0.127091 0.00171862 ND 0.0302791 0.270218 0.00410728 0.718105 0.433444 ND 0.727189 0.00683149 0.126329 0.00185251 ND 0.0319704 0.434602 0.0103098 0.382908 0.430864 ND 0.722861 0.00931526 0.125536 0.00207537 ND 0.0390546 0.549111 0.0165921 0.295545 0.476515 ND 0.799449 0.00959104 0.125729 0.00175425 ND 0.0396419 0.496725 0.0136458 0.338417 0.579871 ND 0.97285 0.00918338 0.119857 0.00157397 ND 0.0414852 0.373314 0.00733576 0.586202 0.479725 ND 0.804834 0.00841826 0.114352 0.0015221 ND 0.0403127 0.354571 0.00653726 0.836975 0.44131 ND 0.740386 0.0082663 0.126155 0.00154899 ND 0.0393398 0.368629 0.0070955 0.707847 0.45662 ND 0.766072 0.00833346 0.123276 0.00177106 ND 0.0391234 0.37935 0.00751104 0.680636 0.446125 ND 0.748464 0.00814552 0.113554 0.00175335 ND 0.0379754 0.37443 0.00733594 0.611981 0.460061 ND 0.771845 0.00323047 0.085352 0.0013578 ND 0.025641 0.232581 0.00346333 0.711467 0.423452 ND 0.710427 0.00145072 0.092026 0.00133642 ND 0.0214349 0.199291 0.00305446 0.68431 0.398154 ND 0.667984 0.00237816 0.10186 0.00138218 ND 0.0197223 0.262159 0.00404964 6.214972 0.594254 ND 0.955719 0.00265397 0.099681 0.00142185 ND 0.0200444 0.270942 0.004305 7.534532 0.510166 ND 0.820483 0.00221081 0.09081 0.00141243 ND 0.0195976 0.241753 0.00368606 6.350843 0.55012 ND 0.88474 0.00129082 0.095821 0.00143442 ND 0.0218883 0.209855 0.00317517 1.023263 0.446678 ND 0.749392 0.00123298 0.111286 0.00150038 ND 0.0220226 0.240304 0.00349322 0.732573 0.430196 ND 0.721739 0.00108599 0.103256 0.00168555 ND 0.0214723 0.229387 0.00342403 0.702415 0.447611 ND 0.750957 0.00107948 0.101468 0.0016836 ND 0.0207891 0.219698 0.00334027 0.706384 0.422592 ND 0.708983 0.00204263 0.100585 0.00165059 ND 0.022275 0.221921 0.00337523 0.891111 0.450612 ND 0.755993 0.00429322 0.101683 0.00155272 ND 0.0269706 0.269773 0.00407529 1.924863 0.465794 ND 0.781464 0.00386039 0.106652 0.00159196 ND 0.0256136 0.279726 0.00432333 1.999912 0.488273 ND 0.819176 0.00219039 0.114078 0.00175251 ND 0.0220881 0.245802 0.00368812 2.243124 0.47333 ND 0.794106 0.00204461 0.110042 0.0018127 ND 0.0212597 0.232669 0.00352285 2.221745 0.48436 ND 0.812611 0.00215392 0.110547 0.00183228 ND 0.0205961 0.312048 0.00535724 2.022323 0.50994 ND 0.855527 0.00199939 0.111259 0.00195368 ND 0.0198184 0.380302 0.00802496 1.94505 0.520307 ND 0.872919 0.00192062 0.121002 0.00195946 ND 0.0200446 0.403173 0.00893721 1.816586 0.608773 ND 1.02134 0.00191104 0.115098 0.00199224 ND 0.0198556 0.319452 0.00561891 1.965846 0.521879 ND 0.875557 0.00185879 0.120291 0.00223766 ND 0.0202394 0.28678 0.00463324 1.890345 0.548348 ND 0.919964 0.00123971 0.099722 0.00250642 ND 0.0204492 0.203149 0.00345516 0.787584 0.477713 ND 0.80146 0.00140747 0.087903 0.00285758 ND 0.0211979 0.160575 0.00488278 0.72032 0.487368 ND 0.810888 0.00123386 0.094356 0.00256202 ND 0.0206468 0.176036 0.00534129 0.569259 0.460795 ND 0.766674 0.00129903 0.098803 0.00140665 ND 0.0195103 0.184207 0.00302785 0.570193 0.424774 ND 0.712643 0.00222669 0.094101 0.00194536 ND 0.0228012 0.167403 0.00482507 0.429231 0.362271 ND 0.60275 0.00270776 0.083234 0.00247351 ND 0.0249014 0.136131 0.00384974 0.4583 0.324195 ND 0.539398 0.00308119 0.081651 0.00289603 ND 0.026567 0.131711 0.00374001 0.370109 0.370323 ND 0.616147 0.00395372 0.087178 0.00335057 ND 0.0269723 0.184286 0.00273918 6.2802 0.445073 ND 0.715796 0.00445044 0.090444 0.0036484 ND 0.0287682 0.206311 0.00297076 7.84394 0.506575 ND 0.814707 0.00477737 0.085951 0.00396507 ND 0.0309345 0.19545 0.00288642 8.167987 0.574893 ND 0.924581 0.00489737 0.091061 0.00420764 ND 0.0328579 0.205927 0.00301436 8.312086 0.446723 ND 0.71845 0.00509311 0.094842 0.00447776 ND 0.0333594 0.225854 0.00331269 8.295108 0.4994 ND 0.803169 0.00520112 0.09895 0.00465476 ND 0.0343808 0.242253 0.00362556 8.371693 0.458584 ND 0.737525 0.00435316 0.091935 0.00252836 ND 0.035961 0.239312 0.00359616 8.230986 0.456049 ND 0.733365 0.00547044 0.091978 0.00493171 ND 0.0405268 0.241214 0.00361101 8.071895 0.499304 ND 0.803015 0.005978 0.093597 0.00684816 ND 0.0847252 0.18138 0.00305282 2.593308 0.341588 ND 0.573083 0.0053169 0.113856 0.00570953 ND 0.059061 0.203531 0.00321537 0.408372 0.379674 ND 0.636979 0.00514514 0.129361 0.00522978 ND 0.0455008 0.23147 0.00347954 0.400349 0.335127 ND 0.562242 0.00529508 0.144154 0.00527149 ND 0.0426695 0.242299 0.00364935 0.382801 0.34845 ND 0.584595 0.00523889 0.118908 0.0051571 ND 0.0395282 0.21145 0.00329569 0.622096 0.319806 ND 0.536538 0.005278 0.118465 0.00520481 ND 0.0389949 0.208247 0.00328327 0.679967 0.350597 ND 0.588196 0.00532324 0.107246 0.0052517 ND 0.0393395 0.181502 0.00313464 0.789493 0.304748 ND 0.511277 0.00530174 0.106744 0.00523028 ND 0.0396903 0.166862 0.00514849 0.789491 0.337234 ND 0.561092 0.00530836 0.115598 0.0051912 ND 0.0387649 0.206556 0.00325153 0.739369 0.382731 ND 0.642108 0.00600099 0.106121 0.00519894 ND 0.0431751 0.205594 0.003218 0.85238 0.346276 ND 0.580947 0.00715254 0.098508 0.00262609 ND 0.0518587 0.223684 0.00350467 0.950319 0.306781 ND 0.514625 0.00809757 0.098134 0.00501007 ND 0.0523934 0.21778 0.00342611 1.055143 0.365911 ND 0.613889 0.00813733 0.102225 0.00496038 ND 0.0521879 0.230782 0.00356826 1.085133 0.310702 ND 0.521265 0.00809324 0.108786 0.00487361 ND 0.0516332 0.238126 0.00366215 1.00459 0.406962 ND 0.68276 0.00794952 0.112994 0.00474124 ND 0.0507191 0.240348 0.00370172 1.088974 0.317367 ND 0.532446 0.0078267 0.105071 0.00469845 ND 0.0500713 0.236042 0.00363073 1.034237 0.374263 ND 0.627901 0.00767864 0.109814 0.00460959 ND 0.0491571 0.25716 0.00400396 1.153726 0.325751 ND 0.546513 0.00759884 0.119494 0.00451529 ND 0.0482758 0.284151 0.00459962 1.215486 0.358122 ND 0.600822 0.00518113 0.123986 0.00431501 ND 0.0372057 0.220451 0.00331959 1.240271 0.369038 ND 0.619135 0.004605 0.126862 0.00423838 ND 0.0357735 0.169679 0.00519095 1.440677 0.343048 ND 0.570767 0.00452973 0.110608 0.00418777 ND 0.034816 0.167297 0.0051307 2.075401 0.321217 ND 0.534443 0.00442359 0.108444 0.00403796 ND 0.0340759 0.163314 0.00497662 2.211576 0.331522 ND 0.551588 0.00434608 0.101415 0.00395933 ND 0.0336128 0.146961 0.0044185 2.018175 0.34268 ND 0.570154 0.00427326 0.101764 0.00388809 ND 0.0329045 0.154527 0.00466916 2.510173 0.390389 ND 0.649533



### Page 4

### FAB3_Stack1

Timestamp 08/06/11 12:11:06 AM 08/06/11 12:18:38 AM 08/06/11 12:26:14 AM 08/06/11 12:33:43 AM 08/06/11 12:41:14 AM 08/06/11 12:48:51 AM 08/06/11 12:56:25 AM 08/06/11 01:03:52 AM 08/06/11 01:11:27 AM 08/06/11 01:18:53 AM 08/06/11 01:26:29 AM 08/06/11 01:34:08 AM 08/06/11 01:41:44 AM 08/06/11 01:49:22 AM 08/06/11 01:56:54 AM 08/06/11 02:04:29 AM 08/06/11 02:12:06 AM 08/06/11 02:19:33 AM 08/06/11 02:27:03 AM 08/06/11 02:34:36 AM 08/06/11 02:42:10 AM 08/06/11 02:49:42 AM 08/06/11 02:57:18 AM 08/06/11 03:04:53 AM 08/06/11 03:12:33 AM 08/06/11 03:20:01 AM 08/06/11 03:27:38 AM 08/06/11 03:35:18 AM 08/06/11 03:42:45 AM 08/06/11 03:50:22 AM 08/06/11 03:57:50 AM 08/06/11 04:05:30 AM 08/06/11 04:13:08 AM 08/06/11 04:20:48 AM 08/06/11 04:28:19 AM 08/06/11 04:35:55 AM 08/06/11 04:43:27 AM 08/06/11 04:50:54 AM 08/06/11 04:58:30 AM 08/06/11 09:23:16 AM 08/06/11 09:29:02 AM 08/06/11 09:35:00 AM 08/06/11 09:40:49 AM 08/06/11 09:46:39 AM 08/06/11 09:52:32 AM 08/06/11 09:58:19 AM 08/06/11 10:04:05 AM 08/06/11 10:09:57 AM 08/06/11 10:15:41 AM 08/06/11 10:21:31 AM 08/06/11 10:27:16 AM 08/06/11 10:33:09 AM 08/06/11 10:39:04 AM 08/06/11 10:44:52 AM 08/06/11 10:50:37 AM 08/06/11 10:56:29 AM 08/06/11 11:02:16 AM 08/06/11 11:08:02 AM 08/06/11 11:13:57 AM 08/06/11 11:19:38 AM 08/06/11 11:25:25 AM 08/06/11 11:31:21 AM 08/06/11 11:37:12 AM 08/06/11 11:42:59 AM 08/06/11 11:48:48 AM 08/06/11 11:54:37 AM 08/06/11 12:00:20 PM 08/06/11 12:06:16 PM 08/06/11 12:12:05 PM 08/06/11 12:17:52 PM 08/06/11 12:23:43 PM 08/06/11 12:29:36 PM C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2O FDL 0.00435952 0.093752 0.00379864 ND 0.0332323 0.173301 0.00540634 2.968171 0.337859 ND 0.562132 0.00599712 0.095708 0.00365244 ND 0.0400529 0.228992 0.00341284 4.330545 0.387332 ND 0.622933 0.00614807 0.093292 0.00361661 ND 0.0412174 0.222061 0.00333148 4.805841 0.420052 ND 0.675555 0.0060904 0.092889 0.00349134 ND 0.0411454 0.194748 0.0030183 5.053665 0.361423 ND 0.581264 0.00593347 0.093183 0.00333932 ND 0.0403402 0.219248 0.00327074 5.165291 0.464192 ND 0.746545 0.00589852 0.105276 0.00326696 ND 0.0393622 0.255047 0.00395788 5.400447 0.475485 ND 0.764707 0.00568237 0.119242 0.00311921 ND 0.0381108 0.308502 0.00538015 5.213405 0.433923 ND 0.697864 0.00547446 0.11755 0.00301155 ND 0.0366544 0.319796 0.00574408 5.16444 0.448665 ND 0.721573 0.00541407 0.113504 0.00295753 ND 0.0361774 0.314931 0.00558027 5.352554 0.434389 ND 0.698613 0.00373832 0.104276 0.00292104 ND 0.0286209 0.221911 0.00328674 4.238975 0.417551 ND 0.671534 0.00330488 0.101064 0.00281946 ND 0.0269215 0.181674 0.00282378 3.935663 0.418495 ND 0.673051 0.00309424 0.08901 0.00257872 ND 0.0259584 0.189784 0.00287673 3.97386 0.418337 ND 0.672798 0.00306069 0.083007 0.0025268 ND 0.0251138 0.18836 0.00285298 4.95023 0.451792 ND 0.726601 0.00396596 0.077176 0.0024269 ND 0.0280497 0.215351 0.00325517 9.8131 0.538108 ND 0.865421 0.0041464 0.103608 0.00229062 ND 0.028566 0.253719 0.00407667 10.752024 0.532473 ND 0.856359 0.00408036 0.111659 0.00216484 ND 0.0284347 0.249958 0.00397163 10.557351 0.525141 ND 0.844566 0.00399571 0.107012 0.00204111 ND 0.0279449 0.224906 0.00348246 11.21912 0.518208 ND 0.833417 0.00396636 0.113326 0.00198875 ND 0.0273279 0.252566 0.00410337 11.465009 0.576249 ND 0.926761 0.00387534 0.116874 0.00189624 ND 0.0263296 0.261706 0.00430986 11.299412 0.540861 ND 0.869849 0.00374766 0.112238 0.00182291 ND 0.0253629 0.272226 0.00459076 10.994723 0.491299 ND 0.79014 0.00366267 0.113559 0.00174917 ND 0.0247705 0.278633 0.00479288 11.384312 0.544465 ND 0.875645 0.00365178 0.113025 0.00178425 ND 0.0248714 0.280501 0.00484603 11.170634 0.576255 ND 0.926771 0.00255692 0.109402 0.00173502 ND 0.0213269 0.227594 0.00345314 7.765188 0.49863 ND 0.80193 0.00217848 0.103192 0.00165792 ND 0.0212601 0.201175 0.00298121 3.310766 0.412381 ND 0.691852 0.00209644 0.083934 0.00160136 ND 0.0213211 0.142912 0.00420953 3.830523 0.439523 ND 0.731282 0.00200155 0.075276 0.00154249 ND 0.0207876 0.125529 0.00368209 4.264209 0.435749 ND 0.695116 0.00190493 0.078457 0.00145631 ND 0.0205723 0.148052 0.00438394 4.063548 0.435523 ND 0.694754 0.00190241 0.081283 0.00144423 ND 0.0202354 0.147032 0.00434817 4.496229 0.429478 ND 0.685111 0.0018908 0.084377 0.00144959 ND 0.0202834 0.148595 0.00439823 4.769021 0.440746 ND 0.703086 0.00179152 0.09382 0.0013869 ND 0.0200488 0.145985 0.00432375 5.07979 0.46683 ND 0.744696 0.00178305 0.075969 0.00138005 ND 0.0220723 0.119869 0.00351298 5.461749 0.444551 ND 0.709157 0.00166963 0.072116 0.00130664 ND 0.0205909 0.105884 0.00317167 6.647806 0.463732 ND 0.739754 0.00155289 0.062927 0.00128015 ND 0.0213483 0.085863 0.00263585 7.045488 0.489727 ND 0.781221 0.00186232 0.064298 0.00140983 ND 0.0189243 0.093225 0.00291269 7.09229 0.38684 ND 0.617095 0.00312751 0.079098 0.0015664 ND 0.0218702 0.187835 0.00315682 6.805056 0.466269 ND 0.749884 0.00313097 0.065747 0.00181974 ND 0.0228574 0.192135 0.0037227 6.698209 0.489152 ND 0.786687 0.00303791 0.063535 0.00223861 ND 0.0251674 0.189197 0.00402541 6.435141 0.559767 ND 0.900254 0.0031359 0.066149 0.00270412 ND 0.0268413 0.202151 0.00478418 6.371389 0.716026 ND 1.15156 0.00199687 0.069206 0.00316696 ND 0.0288165 0.17473 0.00653654 6.037605 0.744568 ND 1.18775 0.00128534 0.052535 0.00214506 ND 0.0195489 0.144566 0.00434645 0.387511 0.451614 ND 0.7514 0.00156363 0.081089 0.00281348 ND 0.0206227 0.214594 0.00361253 0.387375 0.485506 ND 0.814534 0.0019746 0.084034 0.00348369 ND 0.0225519 0.208455 0.00372698 0.246639 0.496265 ND 0.832585 0.0022674 0.082185 0.00387081 ND 0.0241682 0.201451 0.0037772 0.341491 0.564459 ND 0.946993 0.00249525 0.076048 0.00410909 ND 0.0251994 0.183301 0.00379657 0.448564 0.543383 ND 0.911635 0.00265489 0.072589 0.00432192 ND 0.0257699 0.180998 0.00384717 0.410229 0.556936 ND 0.934372 0.00250435 0.079264 0.00410968 ND 0.0252624 0.200163 0.00387959 0.430811 0.51217 ND 0.859269 0.00257178 0.079028 0.00418533 ND 0.0254859 0.212226 0.0039616 0.315167 0.531609 ND 0.891881 0.00294573 0.080093 0.00467335 ND 0.027119 0.198022 0.00404208 0.436159 0.547336 ND 0.918266 0.00308805 0.077669 0.00487325 ND 0.0278195 0.153162 0.00501763 0.469771 0.533062 ND 0.886914 0.00310089 0.076538 0.00488969 ND 0.0279311 0.136285 0.00459197 0.48262 0.55703 ND 0.926791 0.0032063 0.072031 0.0049765 ND 0.0280634 0.136002 0.00460125 0.435732 0.551289 ND 0.91724 0.00317985 0.072344 0.00493444 ND 0.0277669 0.124283 0.00435339 0.482283 0.582493 ND 0.969157 0.003244 0.071888 0.00504748 ND 0.0282484 0.118621 0.00426555 0.550828 0.5643 ND 0.938888 0.00445426 0.079593 0.00507806 ND 0.0294192 0.158487 0.00543906 5.795828 0.644602 ND 1.02828 0.00507388 0.078148 0.00502068 ND 0.0304371 0.184399 0.00429589 8.071207 0.59611 ND 0.958703 0.00509983 0.079024 0.00502972 ND 0.0304604 0.184965 0.00433771 8.521506 0.669798 ND 1.07721 0.00501212 0.078405 0.00497091 ND 0.0299245 0.197145 0.00437991 8.641864 0.63732 ND 1.02498 0.00488881 0.083302 0.0049195 ND 0.029489 0.225983 0.00459181 8.460228 0.635864 ND 1.02264 0.00337866 0.110767 0.00493544 ND 0.028 0.248333 0.00461327 2.363124 0.562548 ND 0.943787 0.00324459 0.105984 0.00495631 ND 0.0276769 0.233648 0.00442817 0.967015 0.519462 ND 0.871501 0.00314766 0.103598 0.00482992 ND 0.0272453 0.206984 0.0042296 0.934652 0.552113 ND 0.92628 0.00338254 0.095336 0.00468361 ND 0.0266231 0.231903 0.00440323 1.264317 0.524818 ND 0.880488 0.00551763 0.101508 0.00470286 ND 0.0285335 0.301916 0.00555839 2.678975 0.565201 ND 0.948239 0.00572373 0.109478 0.00471636 ND 0.0287758 0.322971 0.0061032 2.837433 0.563578 ND 0.945515 0.00568241 0.120478 0.00467588 ND 0.0289672 0.318347 0.00596654 2.821327 0.554459 ND 0.930217 0.00566696 0.11247 0.0045344 ND 0.028874 0.304727 0.0055689 2.726486 0.567886 ND 0.952744 0.00567798 0.092982 0.00441238 ND 0.0284695 0.253263 0.00455149 2.634037 0.538518 ND 0.903472 0.0056971 0.097411 0.00447573 ND 0.0284792 0.261881 0.00473198 2.838389 0.553721 ND 0.928978 0.00879903 0.110591 0.00456097 ND 0.0335953 0.365006 0.00757089 2.857685 0.615786 ND 1.0331 0.00975627 0.114738 0.00453652 ND 0.0346659 0.382933 0.00819624 2.803625 0.600187 ND 1.00694 0.00965803 0.115734 0.0044366 ND 0.034447 0.399919 0.00891419 2.812236 0.561419 ND 0.941894 0.00961363 0.118601 0.00434614 ND 0.034741 0.414554 0.00951175 2.657352 0.593119 ND 0.995076



### Page 5

### FAB3_Stack1

Timestamp 08/06/11 12:35:25 PM 08/06/11 12:41:16 PM 08/06/11 12:47:03 PM 08/06/11 12:52:55 PM 08/06/11 12:58:40 PM 08/06/11 01:04:28 PM 08/06/11 01:10:18 PM 08/06/11 01:16:13 PM 08/06/11 01:22:06 PM 08/06/11 01:27:55 PM 08/06/11 01:33:46 PM 08/06/11 01:39:38 PM 08/06/11 01:45:32 PM 08/06/11 01:51:21 PM 08/06/11 01:57:12 PM 08/06/11 02:03:00 PM 08/06/11 02:08:48 PM 08/06/11 02:14:32 PM 08/06/11 02:20:24 PM 08/06/11 02:26:15 PM 08/06/11 02:31:57 PM 08/06/11 02:37:49 PM 08/06/11 02:43:37 PM 08/06/11 02:49:26 PM 08/06/11 02:55:17 PM 08/06/11 03:01:11 PM C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2O FDL 0.00954902 0.118339 0.00411978 ND 0.0341989 0.414086 0.00945088 2.636665 0.602257 ND 1.01041 0.00942905 0.119023 0.0041397 ND 0.033736 0.408803 0.00921077 2.456494 0.591005 ND 0.991529 0.00713205 0.096178 0.00390845 ND 0.0290722 0.323885 0.00591393 1.475231 0.5404 ND 0.90663 0.00656878 0.076984 0.00387641 ND 0.0282459 0.298155 0.00519275 1.276985 0.563406 ND 0.945227 0.0063828 0.084618 0.00369398 ND 0.0276649 0.285716 0.00490201 1.25096 0.516404 ND 0.866372 0.00629473 0.099751 0.00360002 ND 0.0276518 0.318263 0.00565663 1.332491 0.550813 ND 0.9241 0.00619434 0.100122 0.0034042 ND 0.0266154 0.32239 0.00570869 1.285383 0.543382 ND 0.911633 0.00602041 0.098465 0.00318988 ND 0.0257739 0.314376 0.00547634 1.272582 0.511141 ND 0.857542 0.00268948 0.093143 0.00321815 ND 0.0222652 0.207864 0.00376216 1.321371 0.464865 ND 0.779904 0.00190161 0.090004 0.00292308 ND 0.0216152 0.174724 0.00540359 1.290559 0.457881 ND 0.761826 0.00189316 0.088983 0.00300089 ND 0.0219361 0.162775 0.00503052 1.267095 0.480714 ND 0.799816 0.00180606 0.08806 0.00287204 ND 0.0216737 0.171393 0.00527376 1.094625 0.467187 ND 0.777309 0.00161978 0.0798 0.00253127 ND 0.0210282 0.14419 0.00444435 1.174176 0.472535 ND 0.786208 0.00168325 0.063129 0.00261768 ND 0.0210189 0.110282 0.00362549 1.178117 0.462788 ND 0.769991 0.00169613 0.059834 0.00270254 ND 0.0212168 0.101405 0.00347714 1.238812 0.470779 ND 0.783286 0.00164808 0.076333 0.00266873 ND 0.0210032 0.126929 0.00401552 1.227387 0.476274 ND 0.79243 0.00153162 0.068957 0.00245826 ND 0.0205954 0.135517 0.00417962 1.250989 0.467869 ND 0.778445 0.00158009 0.057536 0.00248948 ND 0.0209139 0.132172 0.00410794 1.224847 0.497566 ND 0.827855 0.00160636 0.056699 0.00259836 ND 0.0211436 0.126309 0.00398473 1.22023 0.481329 ND 0.80084 0.00159561 0.059122 0.00258144 ND 0.0210567 0.127861 0.00402258 1.215199 0.490291 ND 0.81575 0.00150662 0.057582 0.002502 ND 0.0208974 0.118168 0.00377275 1.099609 0.447522 ND 0.744591 0.00155803 0.054853 0.00253263 ND 0.0209413 0.110504 0.00361125 1.079535 0.478424 ND 0.796007 0.00149136 0.049608 0.00242178 ND 0.0206361 0.096434 0.00332814 1.183441 0.453158 ND 0.753967 0.00138981 0.041526 0.0022986 ND 0.0200445 0.072191 0.0028875 1.101451 0.486888 ND 0.810088 0.00142077 0.039596 0.00223305 ND 0.0204893 0.078564 0.00297303 1.178662 0.468443 ND 0.7794 0.00127741 0.041007 0.00192894 ND 0.0201941 0.084711 0.0030043 1.191628 0.418721 ND 0.696672



### Page 6

## FAB3_Stack2

Timestamp NF3 NF3Error SiH4 SiH4Error C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8 FDL C3F8 C3F8Error C5F8 C5F8 FDL 08/08/11 11:23:55 AM 0.00992 0.00144366 ND 0.00186037 0.034297 0.00214932 ND 0.00163956 0.0003045.74239e-005 ND 0.000572096 0.010945 0.000862229 ND 0.000442212 08/08/11 11:29:46 AM 0.065576 0.00241037 0.003316 0.00310611 0.155962 0.00423801 ND 0.00323285 0.000342 0.000113228 ND 0.00112805 0.125842 0.00172017ND 0.000882226 08/08/11 11:35:46 AM 0.064434 0.00229627 0.003679 0.00295907 0.160322 0.00465714ND 0.00355258 0.000281 0.000124426 ND 0.00123961 0.246555 0.00192293 ND 0.000986214 08/08/11 11:41:32 AM 0.032047 0.0015828 0.002024 0.00203967 0.151416 0.00525709 ND 0.00401023 0.000351 0.000140455 ND 0.0013993 0.408001 0.00184302 ND 0.00094523 08/08/11 12:58:07 PM 0.026608 0.00157367 0.009836 0.0020279 0.163216 0.00428432 ND 0.00326818 0.001073 0.000114465 ND 0.00114038 0.263859 0.00153307ND 0.000786265 08/08/11 01:04:01 PM 0.039426 0.00156957 0.009124 0.00202262 0.160247 0.00523008 ND 0.00398963 0.000458 0.000139733 ND 0.00139211 0.368407 0.00170664ND 0.000875288 08/08/11 01:09:41 PM 0.044577 0.00156158 0.007946 0.00201233 0.150224 0.00947542 ND 0.00722808 0.00068 0.000253157ND 0.00252212 0.826365 0.00248636 ND 0.00127518 08/08/11 01:15:26 PM 0.053059 0.00159418 0.007502 0.00205433 0.151298 0.0115176 ND 0.00878593 0.000748 0.000307719 ND 0.00306571 1.107442 0.00307585 ND 0.00157751 08/08/11 01:21:16 PM 0.081277 0.00152416 0.007431 0.00196411 0.146301 0.0103066 ND 0.00786214 0.000708 0.000275364ND 0.00274337 0.987584 0.0027876 ND 0.00142968 08/08/11 01:27:03 PM 0.04732 0.00157552 0.023177 0.00203028 0.14793 0.0127225 ND 0.00970506 0.00086 0.000339911 ND 0.00338642 1.245832 0.003498 ND 0.00179402 08/08/11 01:32:52 PM 0.034747 0.00159642 0.026522 0.00205722 0.147529 0.0119965 ND 0.00915121 0.000811 0.000320513 ND 0.00319316 1.199783 0.0033952 ND 0.0017413 08/08/11 01:38:25 PM 0.036625 0.00158945 0.024895 0.00204824 0.153656 0.00930495 ND 0.00709804 0.000764 0.000248602 ND 0.00247674 0.903138 0.00284822 ND 0.00146077 08/08/11 01:44:12 PM 0.035965 0.00166398 0.031019 0.00214428 0.258399 0.00787949 ND 0.00601067 0.000481 0.000210518 ND 0.00209732 0.675337 0.00252208 ND 0.0012935 08/08/11 01:50:02 PM 0.033311 0.00163728 0.021998 0.00210987 0.245456 0.00722563ND 0.00551189 0.000426 0.000193049 ND 0.00192328 0.611127 0.00236719 ND 0.00121407 08/08/11 01:55:53 PM 0.071633 0.00168033 0.007733 0.00216535 0.185183 0.00448736 ND 0.00342306 0.000875 0.00011989 ND 0.00119442 0.244662 0.00170393 ND 0.000873895 08/08/11 02:01:48 PM 0.078072 0.00162519 0.006118 0.0020943 0.168021 0.00408123ND 0.00311326 0.001124 0.000109039 ND 0.00108632 0.122502 0.00155601 ND 0.000798031 08/08/11 02:07:38 PM 0.057726 0.00189573 0.008471 0.00244293 0.184806 0.00444986 ND 0.00339446 0.000664 0.000118888 ND 0.00118444 0.242726 0.00175472 ND 0.000899947 08/08/11 02:13:22 PM 0.034871 0.00181419 0.009395 0.00233784 0.172733 0.00443689 ND 0.00338456 0.000735 0.000118541 ND 0.00118099 0.248783 0.00173783 ND 0.000891281 08/08/11 02:19:09 PM 0.027945 0.00172648 0.007874 0.00222482 0.18779 0.00578533ND 0.00441318 0.000934 0.000154568 ND 0.00153991 0.402603 0.00193326 ND 0.000991514 08/08/11 02:24:53 PM 0.032005 0.00168365 0.006346 0.00216963 0.196607 0.00701089 ND 0.00534807 0.00104 0.000187311 ND 0.00186612 0.524858 0.00210568 ND 0.00107994 08/08/11 02:30:29 PM 0.030552 0.00162617 0.00772 0.00209556 0.199951 0.00660228 ND 0.00503638 0.000907 0.000176394ND 0.00175736 0.475158 0.00199896 ND 0.00102521 08/08/11 02:36:08 PM 0.032229 0.00166011 0.007883 0.0021393 0.18903 0.00796972 ND 0.00607949 0.00158 0.000212929 ND 0.00212134 0.634865 0.0022424ND 0.00115006 08/08/11 02:42:01 PM 0.024068 0.00177498 0.008416 0.00228732 0.222177 0.00977951 ND 0.00746004 0.001512 0.000261281 ND 0.00260306 0.878026 0.00278739 ND 0.00142957 08/08/11 02:47:47 PM 0.043637 0.00186805 0.008813 0.00240726 0.170677 0.0117093ND 0.00893215 0.003976 0.00031284ND 0.00311673 1.185376 0.00345738 ND 0.00177319 08/08/11 02:53:35 PM 0.03794 0.00174375 0.005297 0.00224708 0.15719 0.0101846 ND 0.00776905 0.002059 0.000272104ND 0.00271088 1.053582 0.00315386 ND 0.00161753 08/08/11 02:59:33 PM 0.041674 0.0017932 -0.000131 0.00231081 0.124981 0.00985232 ND 0.00751558 0.002122 0.000263226 ND 0.00262244 1.008839 0.00307578 ND 0.00157748 08/08/11 03:05:20 PM 0.037388 0.00188256 0.000926 0.00242596 0.126767 0.00943182 ND 0.00719482 0.002476 0.000251992 ND 0.00251051 0.924375 0.00282579 ND 0.00144927 08/08/11 03:11:04 PM 0.035442 0.00175104 0.002722 0.00225647 0.119366 0.00659475 ND 0.00503063 0.001555 0.000176193 ND 0.00175536 0.597102 0.0023063ND 0.00118283 08/08/11 03:16:58 PM 0.047215 0.00182663 0.007288 0.00235388 0.159287 0.00428935 ND 0.00327202 0.00114 0.000114599 ND 0.00114172 0.186829 0.00172629 ND 0.000885366 08/08/11 03:22:38 PM 0.056804 0.00178459 0.006427 0.00229971 0.164863 0.00424695 ND 0.00323968 0.000799 0.000113467ND 0.00113043 0.021497 0.0015597ND 0.000799926 08/08/11 03:28:28 PM 0.041847 0.00187 0.009529 0.00240976 0.208399 0.00459406 ND 0.00350446 0.000937 0.000122741 ND 0.00122282 0.003137 0.00155604ND 0.00079805 08/08/11 03:34:17 PM 0.036616 0.00183489 0.009545 0.00236452 0.176043 0.00447652 ND 0.0034148 0.001271 0.0001196 ND 0.00119154 0.005791 0.00157849 ND 0.000809561 08/08/11 03:40:02 PM 0.034458 0.00199858 0.010046 0.00257546 0.157392 0.00454293ND 0.00346545 0.001327 0.000121374ND 0.00120921 0.20002 0.00181704ND 0.000931907 08/08/11 03:45:55 PM 0.032981 0.00191291 0.010062 0.00246507 0.144069 0.00496072 ND 0.00378416 0.001344 0.000132537ND 0.00132042 0.315445 0.00195047ND 0.00100034 08/08/11 03:51:47 PM 0.030882 0.00193875 0.011199 0.00249836 0.154891 0.00556311 ND 0.00424367 0.001357 0.000148631 ND 0.00148076 0.391471 0.00202843 ND 0.00104032 08/08/11 03:57:34 PM 0.032921 0.00196636 0.010433 0.00253394 0.135208 0.00631159 ND 0.00481463 0.001249 0.000168628 ND 0.00167999 0.536694 0.0022529 ND 0.00115545 08/08/11 04:03:25 PM 0.06829 0.00182305 0.007982 0.00234927 0.133845 0.0063319 ND 0.00483012 0.001101 0.000169171 ND 0.00168539 0.526869 0.002234ND 0.00114576 08/08/11 04:09:12 PM 0.082646 0.00178856 0.0078 0.00230483 0.119696 0.00651832 ND 0.00497233 0.001566 0.000174151 ND 0.00173501 0.587758 0.00240449 ND 0.00123319 08/08/11 04:15:09 PM 0.039041 0.00172778 0.009869 0.0022265 0.128988 0.00570635 ND 0.00435294 0.001657 0.000152458 ND 0.00151889 0.454271 0.00214388 ND 0.00109954 08/08/11 04:21:01 PM 0.028718 0.00176548 0.011936 0.00227507 0.1479 0.00579371 ND 0.00441958 0.001605 0.000154792 ND 0.00154214 0.419855 0.00206074ND 0.00105689 08/08/11 04:26:50 PM 0.022343 0.00193214 0.015805 0.00248984 0.142968 0.00590089 ND 0.00450134 0.00158 0.000157655 ND 0.00157067 0.461882 0.00218797ND 0.00112215 08/08/11 04:32:44 PM 0.030782 0.00170206 0.01384 0.00219336 0.140614 0.00541067ND 0.00412738 0.001388 0.000144558 ND 0.00144018 0.383994 0.0020399 ND 0.00104621 08/08/11 04:38:39 PM 0.027977 0.00168651 0.013004 0.00217332 0.135233 0.00508603ND 0.00387975 0.001047 0.000135885 ND 0.00135377 0.279891 0.00188689 ND 0.000967732 08/08/11 04:44:34 PM 0.029518 0.00173785 0.012615 0.00223947 0.156678 0.00504646 ND 0.00384956 0.00079 0.000134827ND 0.00134324 0.254445 0.00187179 ND 0.000959989 08/08/11 04:50:26 PM 0.032085 0.00171494 0.011316 0.00220995 0.140116 0.00483932 ND 0.00369155 0.000747 0.000129293 ND 0.00128811 0.196685 0.00180903 ND 0.000927799 08/08/11 04:56:13 PM 0.085186 0.00168221 0.009663 0.00216777 0.130113 0.00474687ND 0.00362103 0.000685 0.000126823 ND 0.0012635 0.167248 0.00179358 ND 0.000919876 08/08/11 05:01:59 PM 0.060103 0.00167031 0.011346 0.00215244 0.135804 0.00511594ND 0.00390256 0.000763 0.000136684ND 0.00136173 0.245967 0.00190598 ND 0.00097752 08/08/11 05:07:50 PM 0.051676 0.00165666 0.011081 0.00213485 0.146299 0.00523285 ND 0.00399174 0.00086 0.000139807ND 0.00139285 0.252549 0.00191185 ND 0.000980534 08/08/11 05:13:40 PM 0.02309 0.00170621 0.012799 0.0021987 0.150371 0.00526978 ND 0.00401991 0.000862 0.000140794ND 0.00140268 0.268997 0.0019331 ND 0.000991429 08/08/11 05:19:31 PM 0.025408 0.00173881 0.015084 0.00224071 0.132439 0.00729374ND 0.00556384 0.000438 0.000194868 ND 0.00194141 0.606165 0.00255274ND 0.00130922 08/08/11 05:25:15 PM 0.0235 0.00167492 0.013703 0.00215837 0.127237 0.00752937ND 0.00574358 0.000388 0.000201164ND 0.00200413 0.661411 0.00265163 ND 0.00135994 08/08/11 05:31:05 PM 0.023042 0.00170196 0.013626 0.00219322 0.129292 0.00833156 ND 0.00635551 0.000416 0.000222596 ND 0.00221765 0.742649 0.00281423 ND 0.00144334 08/08/11 05:36:55 PM 0.028466 0.00166049 0.012531 0.00213978 0.115117 0.00784416 ND 0.00598371 0.000419 0.000209574ND 0.00208792 0.687165 0.00269541 ND 0.0013824 08/08/11 05:42:46 PM 0.042343 0.00162737 0.014882 0.00209711 0.114792 0.00675769 ND 0.00515493 0.000333 0.000180547ND 0.00179873 0.516803 0.00234068 ND 0.00120047 08/08/11 05:48:31 PM 0.085902 0.0017314 0.023338 0.00223117 0.108949 0.005389 ND 0.00411086 0.000207 0.000143979 ND 0.00143442 0.33983 0.00213396 ND 0.00109445 08/08/11 05:54:22 PM 0.034775 0.00179741 0.037368 0.00231623 0.140476 0.00514117ND 0.00392181 0.000107 0.000137358 ND 0.00136845 0.184154 0.0019382 ND 0.000994048 08/08/11 06:00:18 PM 0.041057 0.00177292 0.034669 0.00228467 0.154851 0.00564515 ND 0.00430625 0.000145 0.000150823 ND 0.0015026 0.253921 0.00204346 ND 0.00104803 08/08/11 06:06:01 PM 0.032603 0.00175917 0.016866 0.00226694 0.173013 0.00803635 ND 0.00613032 0.000358 0.000214709 ND 0.00213907 0.628085 0.00264387ND 0.00135597 08/08/11 06:11:50 PM 0.02872 0.00179644 0.012602 0.00231498 0.155357 0.0083492 ND 0.00636897 0.000368 0.000223067ND 0.00222235 0.674047 0.00272169 ND 0.00139587 08/08/11 06:17:39 PM 0.028967 0.00178094 0.012439 0.002295 0.155935 0.00753944ND 0.00575127 0.000301 0.000201433 ND 0.00200681 0.595987 0.0025324ND 0.00129879



## Page 1

## FAB3_Stack2

Timestamp NF3 NF3Error SiH4 SiH4Error C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8 FDL C3F8 C3F8Error C5F8 C5F8 FDL 08/08/11 06:23:25 PM 0.028393 0.00179861 0.012211 0.00231776 0.153431 0.00785206 ND 0.00598974 0.000353 0.000209785 ND 0.00209002 0.672084 0.00270467ND 0.00138715 08/08/11 06:29:09 PM 0.038749 0.00177376 0.011884 0.00228575 0.139065 0.00847611 ND 0.00646578 0.000425 0.000226458 ND 0.00225613 0.782755 0.00303062 ND 0.00155432 08/08/11 06:35:06 PM 0.066551 0.00177603 0.011553 0.00228867 0.121323 0.00806049 ND 0.00614873 0.000408 0.000215354ND 0.0021455 0.749806 0.00286527ND 0.00146951 08/08/11 06:40:54 PM 0.066584 0.00172434 0.011625 0.00222207 0.116741 0.00747922 ND 0.00570533 0.000382 0.000199824ND 0.00199078 0.689759 0.00273148 ND 0.0014009 08/08/11 06:46:46 PM 0.035218 0.00171303 0.011868 0.00220748 0.149966 0.00737429 ND 0.00562529 0.000383 0.00019702 ND 0.00196285 0.678614 0.00277183 ND 0.00142159 08/08/11 06:52:26 PM 0.043056 0.00175657 0.010961 0.0022636 0.136622 0.00740614ND 0.00564958 0.000368 0.000197871 ND 0.00197133 0.666613 0.00262163 ND 0.00134456 08/08/11 06:58:17 PM 0.045025 0.00186059 0.01109 0.00239765 0.128027 0.00647319 ND 0.00493791 0.000301 0.000172946 ND 0.001723 0.562329 0.0024259 ND 0.00124418 08/08/11 07:04:12 PM 0.036229 0.00197391 0.010844 0.00254367 0.140003 0.00598747ND 0.00456739 0.00022 0.000159969 ND 0.00159371 0.473618 0.00228561 ND 0.00117222 08/08/11 07:10:05 PM 0.034542 0.00207275 0.006834 0.00267104 0.138613 0.00535132 ND 0.00408212 0.000154 0.000142972 ND 0.00142439 0.374384 0.00214633 ND 0.00110079 08/08/11 07:15:57 PM 0.035681 0.00204472 0.010092 0.00263492 0.144699 0.00497522 ND 0.00379521 0.000092 0.000132924ND 0.00132428 0.270602 0.00202053 ND 0.00103627 08/08/11 07:21:43 PM 0.043624 0.00205213 0.009398 0.00264447 0.141423 0.0047808 ND 0.00364691 0.000111 0.00012773ND 0.00127253 0.235169 0.00199007ND 0.00102065 08/08/11 07:27:23 PM 0.071186 0.00177363 0.010697 0.00228558 0.138748 0.00471171 ND 0.0035942 0.000092 0.000125884ND 0.00125414 0.181035 0.00173972 ND 0.000892252 08/08/11 07:33:06 PM 0.059988 0.00163098 0.012009 0.00210176 0.144647 0.00713637ND 0.0054438 0.000201 0.000190664ND 0.00189952 0.411905 0.00200781 ND 0.00102974 08/08/11 07:38:58 PM 0.032621 0.00169582 0.011963 0.00218531 0.155902 0.00809684ND 0.00617647 0.000307 0.000216325 ND 0.00215518 0.526337 0.00236114ND 0.00121096 08/08/11 07:44:36 PM 0.041358 0.00184726 0.014636 0.00238046 0.140267 0.00852074ND 0.00649982 0.000331 0.00022765 ND 0.00226801 0.575835 0.00245302 ND 0.00125808 08/08/11 07:50:29 PM 0.03351 0.00196666 0.015299 0.00253433 0.137544 0.00884237ND 0.00674517 0.000383 0.000236243 ND 0.00235362 0.662371 0.00260629 ND 0.00133669 08/08/11 07:56:26 PM 0.042316 0.00200648 0.015361 0.00258564 0.125075 0.0110623ND 0.00843857 0.000556 0.000295553 ND 0.0029445 0.978063 0.00340227ND 0.00174493 08/08/11 08:02:16 PM 0.029846 0.00201798 0.016779 0.00260265 0.176853 0.0146787ND 0.0104481 0.000811 0.000391746 ND 0.00302343 1.141579 0.00376359 ND 0.00182602 08/08/11 08:08:10 PM 0.032235 0.00222523 0.017894 0.00286995 0.1555 0.0145804ND 0.0103782 0.000822 0.000389123 ND 0.00300318 1.151505 0.00377396 ND 0.00183105 08/08/11 08:14:05 PM 0.037793 0.00223825 0.017749 0.00288674 0.184084 0.0125372 ND 0.0089238 0.000721 0.000334593 ND 0.00258233 0.94685 0.00327772 ND 0.00159028 08/08/11 08:19:58 PM 0.090965 0.00232491 0.017077 0.00299599 0.24975 0.00820291 ND 0.00625738 0.000299 0.000219159 ND 0.00218341 0.54634 0.00240994ND 0.00123599 08/08/11 08:25:39 PM 0.046514 0.002194 0.016034 0.00282729 0.280732 0.00603673ND 0.00460497 0.000174 0.000161285 ND 0.00160683 0.305207 0.00173953 ND 0.000892154 08/08/11 08:31:27 PM 0.043129 0.00237383 0.017024 0.00305903 0.254721 0.00557611 ND 0.00425359 -0.000001 0.000148978 ND 0.00148422 0.043765 0.00189271 ND 0.000970717 08/08/11 08:37:03 PM 0.032889 0.00243581 0.01803 0.0031389 0.211 0.00554566 ND 0.00423036 0.000002 0.000148165 ND 0.00147612 0.00589 0.00190759 ND 0.000978347 08/08/11 08:42:52 PM 0.0437 0.00249652 0.01893 0.00321713 0.186655 0.00563461 ND 0.00429821 0.000126 0.000150541 ND 0.00149979 0.144481 0.00188049 ND 0.000964447 08/08/11 08:48:40 PM 0.036729 0.00244502 0.017537 0.00315077 0.18425 0.00664644ND 0.00507006 0.000231 0.000177574ND 0.00176911 0.34808 0.00212316 ND 0.00108891 08/08/11 08:54:23 PM 0.053789 0.00201192 0.014759 0.00261363 0.165597 0.00865456 ND 0.00596881 0.001242 0.000230629 ND 0.001329 0.525428 0.00226468 ND 0.00105791 08/08/11 09:00:14 PM 0.038139 0.00194493 0.015196 0.00252661 0.165223 0.00845561 ND 0.00583159 0.001239 0.000225327ND 0.00129845 0.489343 0.00213122 ND 0.000995563 08/08/11 09:06:05 PM 0.047143 0.00249844 0.017978 0.00322231 0.160323 0.00644146 ND 0.00458496 0.001156 0.00017191 ND 0.00132677 0.321257 0.00176206 ND 0.000854918 08/08/11 09:12:01 PM 0.038923 0.00249615 0.017985 0.00321936 0.169736 0.00660809 ND 0.00470356 0.001165 0.000176357ND 0.00136109 0.334787 0.00179104ND 0.000868974 08/08/11 09:17:37 PM 0.035692 0.00251813 0.020094 0.00324771 0.158643 0.0066791 ND 0.0047541 0.001243 0.000178252 ND 0.00137572 0.385724 0.00200256 ND 0.000971601 08/08/11 09:23:32 PM 0.038463 0.00195062 0.017156 0.002534 0.119743 0.011866 ND 0.00818365 0.002145 0.000316208 ND 0.00182215 0.895751 0.00365618 ND 0.00170793 08/08/11 09:29:16 PM 0.046734 0.00196693 0.017871 0.00255519 0.127371 0.0148449 ND 0.0102381 0.002946 0.000395589 ND 0.00227959 1.170937 0.00461926 ND 0.00215781 08/08/11 09:35:07 PM 0.042412 0.00196358 0.01675 0.00255084 0.115747 0.0140768 ND 0.00970836 0.002902 0.000375121 ND 0.00216164 1.096853 0.00437763 ND 0.00204494 08/08/11 09:40:49 PM 0.078413 0.0019224 0.016287 0.00249734 0.114589 0.0122457ND 0.00844551 0.002841 0.000326326 ND 0.00188046 0.889636 0.0035254ND 0.00164683 08/08/11 09:46:30 PM 0.045261 0.00182976 0.017999 0.00237699 0.125972 0.00937815 ND 0.00646784 0.002765 0.000249911 ND 0.00144012 0.648209 0.00260689 ND 0.00121776 08/08/11 09:52:15 PM 0.039828 0.00181318 0.016103 0.00235546 0.140773 0.0056244ND 0.00387899 0.002421 0.00014988 ND 0.000863687 0.331269 0.00160869 ND 0.000751472 08/08/11 09:58:00 PM 0.036258 0.00250473 0.018803 0.00323043 0.155381 0.0049637ND 0.0035331 0.00237 0.000132472 ND 0.00102239 0.274991 0.00162727ND 0.000789516 08/08/11 10:03:41 PM 0.036984 0.00247861 0.017829 0.00319673 0.143445 0.00432864ND 0.00308108 0.002485 0.000115523 ND 0.000891587 0.201174 0.00139645 ND 0.000677531 08/08/11 10:09:35 PM 0.037294 0.00242481 0.019217 0.00312472 0.172109 0.00342156 ND 0.00261004 0.0022789.14144e-005 ND 0.000910732 0.042054 0.00127892 ND 0.00065592 08/08/11 10:15:27 PM 0.039119 0.00248837 0.021741 0.00320662 0.155123 0.00331011 ND 0.00252503 0.002181 8.84369e-005 ND 0.000881068 0.007179 0.00123809 ND 0.000634981 08/08/11 10:21:02 PM 0.046716 0.0024919 0.041659 0.00321117 0.153492 0.00337726 ND 0.00257626 0.0024479.0231e-005 ND 0.000898942 0.001133 0.00121096 ND 0.000621065 08/08/11 10:26:57 PM 0.031822 0.00236831 0.045387 0.00305191 0.174841 0.00350567ND 0.00267421 0.0022989.36617e-005 ND 0.000933122 0.002465 0.00128202 ND 0.00065751 08/08/11 10:32:54 PM 0.033133 0.00240695 0.045067 0.0031017 0.158716 0.00384629 ND 0.00293404 0.002156 0.000102762 ND 0.00102378 0.138588 0.00151378 ND 0.000776371 08/08/11 10:38:40 PM 0.032129 0.00241529 0.037211 0.00311508 0.137513 0.00672054ND 0.0047836 0.002615 0.000179358 ND 0.00138425 0.429761 0.00213194ND 0.00103438 08/08/11 10:44:45 PM 0.044819 0.00235726 0.029411 0.00304023 0.137052 0.00691271 ND 0.00492039 0.002684 0.000184487ND 0.00142384 0.494093 0.00245218 ND 0.00118975 08/08/11 10:50:37 PM 0.026407 0.00226651 0.019009 0.00292318 0.138341 0.00743004ND 0.00528861 0.00168 0.000198294ND 0.00153039 0.522918 0.00250733 ND 0.0012165 08/08/11 10:56:17 PM 0.032443 0.0021889 0.017526 0.00282309 0.139289 0.00877069 ND 0.00624288 0.001341 0.000234073 ND 0.00180653 0.610835 0.0028213ND 0.00136884 08/08/11 11:02:13 PM 0.041284 0.0016927 0.013385 0.00219894 0.135847 0.0103491 ND 0.00713748 0.001416 0.000275785 ND 0.00158922 0.676632 0.00288412 ND 0.00134727 08/08/11 11:08:00 PM 0.048695 0.00173971 0.013263 0.00226001 0.145313 0.0114218 ND 0.00787731 0.00201 0.000304371 ND 0.00175394 0.739506 0.00311663 ND 0.00145588 08/08/11 11:13:53 PM 0.03869 0.00180641 0.013475 0.00234666 0.14889 0.00952373ND 0.00656825 0.001044 0.00025379 ND 0.00146247 0.63474 0.00277885 ND 0.00129809 08/08/11 11:19:47 PM 0.030503 0.00173351 0.012268 0.00225196 0.127764 0.00905377ND 0.00624413 0.00044 0.000241267ND 0.0013903 0.621844 0.0028284ND 0.00132124 08/08/11 11:25:48 PM 0.067409 0.00174011 0.003575 0.00226053 0.150695 0.0142664ND 0.00983916 0.002217 0.000380175 ND 0.00219077 0.909504 0.003738 ND 0.00174614 08/08/11 11:31:35 PM 0.068237 0.00173794 0.002257 0.00225771 0.134269 0.0151536 ND 0.010451 0.003426 0.000403815 ND 0.00232699 0.94635 0.00379954ND 0.00177489 08/08/11 11:37:27 PM 0.025779 0.00207712 0.005431 0.00267892 0.142476 0.013512 ND 0.00961771 0.003834 0.00036061 ND 0.00278312 0.909693 0.00394458 ND 0.00191383 08/08/11 11:43:15 PM 0.023933 0.00198742 0.009604 0.00256324 0.149942 0.0107182 ND 0.00762907 0.003886 0.000286048 ND 0.00220766 0.688852 0.00312775 ND 0.00151752 08/08/11 11:49:08 PM 0.026097 0.0019985 0.013358 0.00257752 0.160884 0.00996118 ND 0.00709025 0.003507 0.000265845 ND 0.00205174 0.651789 0.00297289 ND 0.00144239 08/08/11 11:55:03 PM 0.036727 0.00206586 0.01577 0.0026644 0.137234 0.00960014ND 0.00683327 0.003482 0.000256209 ND 0.00197738 0.645041 0.0028859 ND 0.00140018 08/09/11 12:01:02 AM 0.029114 0.00163362 0.015994 0.0021222 0.130592 0.0118654ND 0.00818323 0.003901 0.000316191 ND 0.00182206 0.824736 0.00354723 ND 0.00165703 08/09/11 12:06:46 AM 0.028014 0.0019324 0.016488 0.00249228 0.145348 0.0108566 ND 0.00772757 0.003607 0.000289741 ND 0.00223616 0.77665 0.00339134ND 0.00164541



## Page 2

## FAB3_Stack2

Timestamp NF3 NF3Error SiH4 SiH4Error C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8 FDL C3F8 C3F8Error C5F8 C5F8 FDL 08/09/11 12:12:41 AM 0.032365 0.00182755 0.017487 0.00235506 0.151529 0.00887122 ND 0.00676718 0.003323 0.000237014ND 0.0023613 0.710691 0.00321437ND 0.00164856 08/09/11 12:18:31 AM 0.078422 0.00193355 0.014709 0.00249167 0.132311 0.00734296 ND 0.00560138 0.00365 0.000196183 ND 0.00195451 0.543691 0.00245171 ND 0.00125741 08/09/11 12:24:26 AM 0.051467 0.00186109 0.014616 0.00239829 0.12956 0.00615737ND 0.00469699 0.003647 0.000164508 ND 0.00163894 0.404961 0.00203269 ND 0.00104251 08/09/11 12:30:12 AM 0.034452 0.00175845 0.01559 0.00226602 0.172913 0.00568217ND 0.00433449 0.003116 0.000151812 ND 0.00151245 0.380925 0.00209263 ND 0.00107325 08/09/11 12:36:07 AM 0.016545 0.00170752 0.016295 0.00220039 0.181105 0.00481218 ND 0.00367085 0.003186 0.000128568 ND 0.00128088 0.265258 0.00174921 ND 0.000897118 08/09/11 12:42:07 AM 0.018214 0.00167945 0.01735 0.00216422 0.175666 0.0058056 ND 0.00442865 0.003712 0.000155109 ND 0.0015453 0.40883 0.00213308 ND 0.001094 08/09/11 12:47:56 AM 0.022911 0.00171842 0.016914 0.00221443 0.199214 0.00741559 ND 0.00565679 0.003496 0.000198124ND 0.00197384 0.560967 0.00254251 ND 0.00130398 08/09/11 12:53:51 AM 0.024202 0.00165162 0.016662 0.00212836 0.204163 0.00733436 ND 0.00559482 0.003094 0.000195953 ND 0.00195222 0.532004 0.00249909 ND 0.00128171 08/09/11 12:59:41 AM 0.031275 0.00168061 0.015262 0.00216571 0.209731 0.00677553ND 0.00516853 0.003561 0.000181023 ND 0.00180347 0.461919 0.00223326 ND 0.00114538 08/09/11 01:05:33 AM 0.232531 0.00191748 0.007101 0.00247095 0.189365 0.00702929 ND 0.00536211 0.003703 0.000187803 ND 0.00187102 0.51147 0.00238322 ND 0.00122229 08/09/11 01:11:24 AM 0.125282 0.00177687 0.013278 0.00228976 0.184943 0.00801365 ND 0.00611301 0.003337 0.000214102 ND 0.00213303 0.611348 0.00263137ND 0.00134955 08/09/11 01:17:15 AM 0.066935 0.00169284 0.014322 0.00218147 0.157082 0.00773282 ND 0.00589878 0.000767 0.000206599 ND 0.00205828 0.58587 0.00258879 ND 0.00132772 08/09/11 01:23:02 AM 0.055104 0.00171335 0.014931 0.0022079 0.165508 0.00885718 ND 0.00675647 0.000472 0.000236639 ND 0.00235756 0.74645 0.00311479 ND 0.00159748 08/09/11 01:28:43 AM 0.061777 0.00163087 0.014679 0.00210161 0.136629 0.00875247ND 0.0066766 0.000466 0.000233842 ND 0.00232969 0.733624 0.00300904ND 0.00154325 08/09/11 01:34:29 AM 0.063931 0.00161574 0.014712 0.00208212 0.127813 0.0079881 ND 0.00609351 0.000417 0.00021342 ND 0.00212623 0.626141 0.00263217ND 0.00134996 08/09/11 01:40:24 AM 0.065848 0.00159192 0.013697 0.00205142 0.128412 0.00584399 ND 0.00445793 0.000287 0.000156135 ND 0.00155552 0.384001 0.00196005 ND 0.00100525 08/09/11 01:46:19 AM 0.073325 0.0015754 0.012823 0.00203014 0.133648 0.00417717ND 0.00318645 0.000104 0.000111602 ND 0.00111186 0.097779 0.00147881 ND 0.000758438 08/09/11 01:52:08 AM 0.068965 0.00168725 0.012947 0.00217427 0.196183 0.00440802 ND 0.00336254 0.000036 0.00011777ND 0.0011733 0.053654 0.00142947ND 0.000733133 08/09/11 01:57:52 AM 0.098008 0.00169681 0.016835 0.00218659 0.186107 0.00666633ND 0.00508524 0.000271 0.000178106 ND 0.00177441 0.435567 0.00228777ND 0.00117333 08/09/11 02:03:36 AM 0.036466 0.0016521 0.016113 0.00212897 0.186331 0.00758606 ND 0.00578683 0.000333 0.000202678 ND 0.00201922 0.568167 0.00266561 ND 0.00136712 08/09/11 02:09:13 AM 0.029546 0.00155647 0.016082 0.00200574 0.184539 0.00829145 ND 0.00632492 0.000426 0.000221524ND 0.00220698 0.629104 0.00278539 ND 0.00142854 08/09/11 02:14:59 AM 0.029581 0.00160776 0.016113 0.00207183 0.164799 0.00917616 ND 0.00699979 0.000442 0.000245161 ND 0.00244246 0.723032 0.00300097ND 0.00153911 08/09/11 02:20:58 AM 0.031124 0.0015319 0.015197 0.00197408 0.156968 0.00820648 ND 0.0062601 0.000378 0.000219254ND 0.00218436 0.667511 0.00289872 ND 0.00148667 08/09/11 02:26:51 AM 0.034799 0.00150213 0.013604 0.00193571 0.154077 0.00761199 ND 0.00580661 0.000308 0.000203371 ND 0.00202612 0.546806 0.00239056 ND 0.00122605 08/09/11 02:32:36 AM 0.031376 0.00155019 0.014022 0.00199765 0.138475 0.00676565 ND 0.005161 0.000384 0.000180759 ND 0.00180085 0.468314 0.00221258 ND 0.00113477 08/09/11 02:38:29 AM 0.030972 0.00147844 0.014944 0.00190518 0.148816 0.00755195 ND 0.00576081 0.00093 0.000201767ND 0.00201014 0.587037 0.00272835 ND 0.00139929 08/09/11 02:44:27 AM 0.056401 0.00157039 0.013332 0.00202367 0.131262 0.00884322 ND 0.00674582 0.000594 0.000236266 ND 0.00235384 0.769248 0.00313683 ND 0.00160879 08/09/11 02:50:20 AM 0.063853 0.00165549 0.012872 0.00213334 0.123011 0.00869407ND 0.00663204 0.000475 0.000232281 ND 0.00231414 0.758007 0.00310531 ND 0.00159262 08/09/11 02:56:11 AM 0.038903 0.00142635 0.012334 0.00183806 0.12425 0.0112569 ND 0.00858701 0.000683 0.000300752 ND 0.0029963 0.991708 0.00375174ND 0.00192416 08/09/11 03:02:01 AM 0.027431 0.00133842 0.012593 0.00172475 0.176788 0.0119626 ND 0.0091254 0.000707 0.000319609 ND 0.00318416 1.050833 0.00397492 ND 0.00203862 08/09/11 03:07:48 AM 0.024616 0.00135993 0.013087 0.00175247 0.156347 0.0119809 ND 0.00913934 0.001844 0.000320097ND 0.00318902 1.017419 0.0038633ND 0.00198137 08/09/11 03:13:52 AM 0.031581 0.0014711 0.012817 0.00189573 0.145933 0.0110986 ND 0.00846627 0.001622 0.000296523 ND 0.00295416 0.899642 0.00333377ND 0.00170979 08/09/11 03:19:45 AM 0.032114 0.00146844 0.011961 0.00189229 0.160815 0.0072175 ND 0.00550568 0.001644 0.000192831 ND 0.00192112 0.487344 0.00235874ND 0.00120973 08/09/11 03:25:40 AM 0.034257 0.00150849 0.009809 0.00194391 0.150279 0.005213ND 0.0039766 0.001157 0.000139277ND 0.00138757 0.217644 0.00167493 ND 0.000859021 08/09/11 03:31:36 AM 0.036045 0.0014812 0.006968 0.00190875 0.172339 0.00461639 ND 0.00352149 0.00133 0.000123337ND 0.00122877 0.029828 0.00155803 ND 0.000799068 08/09/11 03:37:29 AM 0.028672 0.00254503 0.006759 0.00327965 0.182146 0.00471986 ND 0.00360042 0.00121 0.000126101 ND 0.00125631 0.006354 0.00163188 ND 0.000836941 08/09/11 03:43:22 AM 0.030852 0.00156789 0.028996 0.00202045 0.158332 0.0046743ND 0.00356567 0.001254 0.000124884ND 0.00124418 0.002158 0.00160645 ND 0.000823901 08/09/11 03:49:16 AM 0.021108 0.00157724 0.037463 0.00203251 0.183199 0.00491537ND 0.00374957 0.001118 0.000131325 ND 0.00130835 0.007837 0.0016635 ND 0.000853163 08/09/11 03:54:55 AM 0.030377 0.00163339 0.03693 0.00210486 0.151796 0.00527607ND 0.00402471 0.001485 0.000140962 ND 0.00140436 0.22774 0.00201176 ND 0.00103177 08/09/11 04:00:49 AM 0.054308 0.00164165 0.03355 0.0021155 0.142002 0.00763932 ND 0.00582745 0.001458 0.000204101 ND 0.00203339 0.609381 0.002792 ND 0.00143193 08/09/11 04:06:51 AM 0.036109 0.00171219 0.032401 0.00220641 0.120816 0.0114719 ND 0.00875106 0.00204 0.000306498 ND 0.00305354 1.069287 0.00409173 ND 0.00209853 08/09/11 04:12:35 AM 0.047417 0.00176274 0.019908 0.00227154 0.116061 0.0120451 ND 0.00918828 0.001669 0.000321811 ND 0.0032061 1.148918 0.00418868 ND 0.00214825 08/09/11 04:18:29 AM 0.033098 0.00162578 0.01336 0.00209505 0.118511 0.0116087ND 0.00885542 0.002083 0.000310153 ND 0.00308995 1.059729 0.00392113 ND 0.00201104 08/09/11 04:24:28 AM 0.038494 0.00162615 0.009895 0.00209553 0.107659 0.00978382 ND 0.00746333 0.001941 0.000261396 ND 0.00260421 0.889736 0.003455 ND 0.00177197 08/09/11 04:30:14 AM 0.030435 0.00161365 0.010724 0.00207943 0.123548 0.0066445 ND 0.00506858 0.001677 0.000177522 ND 0.0017686 0.513497 0.00255843 ND 0.00131214 08/09/11 04:36:05 AM 0.030751 0.00166196 0.011295 0.00214168 0.138871 0.00544129 ND 0.00415075 0.000592 0.000145376 ND 0.00144833 0.284906 0.00207385 ND 0.00106362 08/09/11 04:41:52 AM 0.027245 0.00168058 0.014935 0.00216568 0.159524 0.00616427ND 0.00470225 0.00024 0.000164692 ND 0.00164077 0.400727 0.00232917ND 0.00119456 08/09/11 04:47:49 AM 0.039629 0.00167908 0.011717 0.00216374 0.141795 0.00564252 ND 0.00430425 0.000136 0.000150752 ND 0.0015019 0.306071 0.00211091 ND 0.00108262 08/09/11 04:53:37 AM 0.025674 0.00172982 0.010746 0.00222912 0.142205 0.00549683ND 0.00419311 0.000112 0.00014686 ND 0.00146312 0.259492 0.00203191 ND 0.00104211 08/09/11 04:59:28 AM 0.251362 0.00212374 0.004012 0.00273675 0.152032 0.00547586 ND 0.00417712 0.000126 0.0001463ND 0.00145754 0.247896 0.00203024ND 0.00104125 08/09/11 05:05:22 AM 0.041274 0.00178295 0.009243 0.00229759 0.152272 0.00525986 ND 0.00401235 0.000046 0.000140529 ND 0.00140004 0.184437 0.00190211 ND 0.000975539 08/09/11 05:11:17 AM 0.032751 0.00180112 0.010197 0.002321 0.145107 0.00492614ND 0.00375778 0.000648 0.000131613 ND 0.00131121 0.106638 0.00188197ND 0.00096521 08/09/11 05:17:11 AM 0.024799 0.00182368 0.009649 0.00235008 0.142922 0.00489644ND 0.00373512 0.000038 0.000130819 ND 0.00130331 0.049442 0.00180248 ND 0.00092444 08/09/11 05:22:59 AM 0.040798 0.00185051 0.010385 0.00238465 0.139037 0.00572789 ND 0.00436937 0.000326 0.000153033 ND 0.00152462 0.264589 0.0021045 ND 0.00107934 08/09/11 05:28:49 AM 0.037041 0.00192523 0.011185 0.00248094 0.143078 0.00840865 ND 0.00641432 0.003247 0.000224655 ND 0.00223817 0.708497 0.00299133 ND 0.00153417 08/09/11 05:34:45 AM 0.052391 0.00189591 0.009912 0.00244315 0.163574 0.0113026 ND 0.00862187 0.003929 0.000301973 ND 0.00300846 1.0699 0.00377509 ND 0.00193613 08/09/11 05:40:35 AM 0.032679 0.00191502 0.010111 0.00246779 0.14554 0.0112774ND 0.00860266 0.003555 0.0003013ND 0.00300176 1.078488 0.00376474ND 0.00193083 08/09/11 05:46:21 AM 0.024492 0.00195479 0.009321 0.00251904 0.115364 0.00962956 ND 0.00734566 0.003684 0.000257275 ND 0.00256315 0.897555 0.00335244ND 0.00171937 08/09/11 05:52:04 AM 0.044444 0.00197587 0.006836 0.0025462 0.10654 0.00681388 ND 0.00519779 0.003645 0.000182048 ND 0.00181368 0.528334 0.00253793 ND 0.00130163 08/09/11 05:57:59 AM 0.035023 0.00197204 0.010321 0.00254126 0.135745 0.00595967ND 0.00454618 0.00342 0.000159226 ND 0.00158631 0.408732 0.00233739 ND 0.00119878



## Page 3

## FAB3_Stack2

Timestamp NF3 NF3Error SiH4 SiH4Error C2H4 C2H4Error C4F6 C4F6 FDL SF6 SF6Error cC4F8 cC4F8 FDL C3F8 C3F8Error C5F8 C5F8 FDL 08/09/11 06:03:42 AM 0.029874 0.00191622 0.010453 0.00246933 0.13129 0.005867ND 0.00447549 0.003075 0.00015675 ND 0.00156165 0.356258 0.00219966 ND 0.00112814 08/09/11 06:09:35 AM 0.025574 0.00195858 0.010095 0.00252392 0.138574 0.00742725 ND 0.00566568 0.003594 0.000198435 ND 0.00197695 0.534354 0.00245829 ND 0.00126079 08/09/11 06:15:24 AM 0.022007 0.00199436 0.010977 0.00257003 0.169139 0.00754855 ND 0.00575822 0.003566 0.000201676 ND 0.00200923 0.52732 0.00249875 ND 0.00128154 08/09/11 06:21:11 AM 0.020318 0.00206441 0.010195 0.00266029 0.171925 0.00761763ND 0.00581091 0.003187 0.000203522 ND 0.00202762 0.531833 0.00249208 ND 0.00127812 08/09/11 06:27:00 AM 0.029899 0.00205752 0.009559 0.00265141 0.139947 0.00777732 ND 0.00593273 0.003457 0.000207788 ND 0.00207013 0.604032 0.00266764ND 0.00136816 08/09/11 06:32:49 AM 0.072447 0.00202126 0.008087 0.00260469 0.127671 0.00739669 ND 0.00564237 0.003938 0.000197619 ND 0.00196881 0.555492 0.00247183 ND 0.00126773 08/09/11 06:38:33 AM 0.056668 0.00197751 0.006408 0.00254831 0.112738 0.00550915 ND 0.00420251 0.004056 0.000147189 ND 0.0014664 0.31055 0.00204008 ND 0.0010463 08/09/11 06:44:19 AM 0.02365 0.00207772 0.007858 0.00267744 0.125025 0.00630042 ND 0.00480611 0.003283 0.00016833ND 0.00167701 0.468296 0.00235008 ND 0.00120529 08/09/11 06:50:12 AM 0.0221 0.00211861 0.009957 0.00273014 0.187119 0.00633517ND 0.00483262 0.003569 0.000169258 ND 0.00168626 0.454546 0.00236558 ND 0.00121324 08/09/11 06:56:01 AM 0.022228 0.00212706 0.009948 0.00274103 0.173471 0.00591338 ND 0.00451087 0.00347 0.000157989 ND 0.00157399 0.388058 0.00228071 ND 0.00116971 08/09/11 07:01:52 AM 0.022602 0.00225546 0.010888 0.00290648 0.159657 0.0050107ND 0.00382228 0.003046 0.000133872 ND 0.00133372 0.239569 0.00208633 ND 0.00107002 08/09/11 07:07:42 AM 0.021666 0.00223946 0.009245 0.00288587 0.155073 0.00518524ND 0.00395543 0.005156 0.000138535 ND 0.00138018 0.304832 0.00221653 ND 0.00113679 08/09/11 07:13:14 AM 0.028439 0.00228608 0.011388 0.00294595 0.164323 0.00604834ND 0.00461382 0.003267 0.000161595 ND 0.00160992 0.446001 0.00234653 ND 0.00120347 08/09/11 07:18:54 AM 0.024949 0.00220588 0.011253 0.0028426 0.160639 0.00648026 ND 0.0049433 0.000381 0.000173134ND 0.00172488 0.512824 0.00249193 ND 0.00127804 08/09/11 07:24:42 AM 0.043406 0.00220723 0.00943 0.00284434 0.137322 0.00642112 ND 0.00489818 0.000256 0.000171554ND 0.00170914 0.487242 0.00234188 ND 0.00120108 08/09/11 07:30:38 AM 0.089067 0.00221588 0.007226 0.00285549 0.129598 0.00621455 ND 0.00474061 0.000184 0.000166035 ND 0.00165416 0.436156 0.00218961 ND 0.00112299 08/09/11 07:36:19 AM 0.065153 0.00226206 0.007842 0.00291499 0.1355 0.0052095 ND 0.00397393 0.000409 0.000139183 ND 0.00138664 0.276174 0.00197578 ND 0.00101332 08/09/11 07:42:07 AM 0.024654 0.00226347 0.008595 0.00291681 0.129587 0.00504621 ND 0.00384937 0.000496 0.000134821 ND 0.00134318 0.2338 0.00196345 ND 0.001007 08/09/11 07:47:52 AM 0.017018 0.00243743 0.008034 0.00314098 0.138281 0.00514467ND 0.00392448 0.000099 0.000137451 ND 0.00136938 0.311014 0.00213207ND 0.00109348 08/09/11 07:53:33 AM 0.017133 0.00240108 0.01039 0.00309415 0.143585 0.00490413ND 0.00374099 0.000029 0.000131025 ND 0.00130536 0.230936 0.00201151 ND 0.00103165 08/09/11 07:59:27 AM 0.014303 0.00241661 0.011039 0.00311415 0.150694 0.00478942 ND 0.00365349 0.000004 0.00012796 ND 0.00127482 0.159111 0.00196117ND 0.00100583 08/09/11 08:05:26 AM 0.022135 0.00243326 0.010053 0.0031356 0.145543 0.00507488 ND 0.00387124 0.000077 0.000135587ND 0.00135081 0.192766 0.00199131 ND 0.00102128 08/09/11 08:11:20 AM 0.038365 0.00236443 0.014123 0.00304691 0.160775 0.0058123ND 0.00443376 0.000134 0.000155288 ND 0.00154709 0.316844 0.00205312 ND 0.00105298 08/09/11 08:17:12 AM 0.047031 0.0022954 0.028201 0.00295796 0.139329 0.00571254ND 0.00435766 0.000911 0.000152623 ND 0.00152053 0.316224 0.00202886 ND 0.00104054 08/09/11 08:23:09 AM 0.092784 0.00229314 0.023707 0.00295504 0.132859 0.00733843ND 0.00559793 0.001698 0.000196062 ND 0.0019533 0.575636 0.00240526 ND 0.00123359 08/09/11 08:29:01 AM 0.046101 0.00227807 0.013661 0.00293562 0.132176 0.00724017ND 0.00552297 0.001489 0.000193437ND 0.00192715 0.614815 0.00242747ND 0.00124498 08/09/11 08:34:46 AM 0.026239 0.00233046 0.007416 0.00300314 0.164174 0.00875381 ND 0.00667761 0.001865 0.000233877ND 0.00233004 0.83097 0.00293838 ND 0.00150701 08/09/11 08:40:38 AM 0.022692 0.00243249 0.009638 0.00313462 0.147211 0.011354ND 0.00866107 0.002086 0.000303346 ND 0.00302214 1.158683 0.00353064ND 0.00181076 08/09/11 08:46:27 AM 0.021052 0.002354 0.010142 0.00303347 0.132665 0.010471 ND 0.00798751 0.00193 0.000279755 ND 0.00278711 1.069689 0.00335974ND 0.00172311 08/09/11 08:52:19 AM 0.023773 0.00223269 0.010181 0.00287715 0.115298 0.010379 ND 0.00791734 0.002039 0.000277298 ND 0.00276263 1.072493 0.00306313 ND 0.00157099 08/09/11 08:58:16 AM 0.039779 0.00272226 0.006499 0.00350803 0.117399 0.0105486 ND 0.00804676 0.001587 0.00028183ND 0.00280778 0.995693 0.00291617ND 0.00149562 08/09/11 09:03:55 AM 0.05147 0.00354293 0.005107 0.00456559 0.140367 0.0125752 ND 0.00959269 0.000789 0.000335975 ND 0.00334721 1.037133 0.0027871 ND 0.00142942 08/09/11 09:09:49 AM 0.090559 0.00467054 0.00347 0.00601867 0.148798 0.0125884ND 0.00960274 0.000692 0.000336327ND 0.00335072 0.855804 0.00247324ND 0.00126845 08/09/11 09:15:38 AM 0.127693 0.00607366 ND 0.00782679 0.146059 0.0130768 ND 0.00997528 0.000607 0.000349375 ND 0.00348071 0.70382 0.00269057ND 0.00137991 08/09/11 09:21:31 AM 0.087758 0.00778297ND 0.0100295 0.138611 0.00945547ND 0.00745214 0.001803 0.000252949 ND 0.00285116 0.499888 0.00234124ND 0.00130861 08/09/11 09:27:23 AM 0.101496 0.0114681 ND 0.0147783 0.136836 0.00959172 ND 0.00755952 0.003003 0.000256594ND 0.00289225 0.33629 0.00258151 ND 0.0014429 08/09/11 09:50:41 AM 0.034321 0.00241471 0.010171 0.0031117 0.135182 0.00363682 ND 0.00277425 0.0015139.71656e-005 ND 0.000968029 0.00004 0.00138262 ND 0.000709107 08/09/11 09:56:24 AM 0.068485 0.00222143 0.007835 0.00286264 0.12931 0.00364863ND 0.00278326 0.00079.74812e-005 ND 0.000971174 0.032522 0.00151692 ND 0.000777984



## Page 4

## FAB3_Stack2

Timestamp 08/08/11 11:23:55 AM 08/08/11 11:29:46 AM 08/08/11 11:35:46 AM 08/08/11 11:41:32 AM 08/08/11 12:58:07 PM 08/08/11 01:04:01 PM 08/08/11 01:09:41 PM 08/08/11 01:15:26 PM 08/08/11 01:21:16 PM 08/08/11 01:27:03 PM 08/08/11 01:32:52 PM 08/08/11 01:38:25 PM 08/08/11 01:44:12 PM 08/08/11 01:50:02 PM 08/08/11 01:55:53 PM 08/08/11 02:01:48 PM 08/08/11 02:07:38 PM 08/08/11 02:13:22 PM 08/08/11 02:19:09 PM 08/08/11 02:24:53 PM 08/08/11 02:30:29 PM 08/08/11 02:36:08 PM 08/08/11 02:42:01 PM 08/08/11 02:47:47 PM 08/08/11 02:53:35 PM 08/08/11 02:59:33 PM 08/08/11 03:05:20 PM 08/08/11 03:11:04 PM 08/08/11 03:16:58 PM 08/08/11 03:22:38 PM 08/08/11 03:28:28 PM 08/08/11 03:34:17 PM 08/08/11 03:40:02 PM 08/08/11 03:45:55 PM 08/08/11 03:51:47 PM 08/08/11 03:57:34 PM 08/08/11 04:03:25 PM 08/08/11 04:09:12 PM 08/08/11 04:15:09 PM 08/08/11 04:21:01 PM 08/08/11 04:26:50 PM 08/08/11 04:32:44 PM 08/08/11 04:38:39 PM 08/08/11 04:44:34 PM 08/08/11 04:50:26 PM 08/08/11 04:56:13 PM 08/08/11 05:01:59 PM 08/08/11 05:07:50 PM 08/08/11 05:13:40 PM 08/08/11 05:19:31 PM 08/08/11 05:25:15 PM 08/08/11 05:31:05 PM 08/08/11 05:36:55 PM 08/08/11 05:42:46 PM 08/08/11 05:48:31 PM 08/08/11 05:54:22 PM 08/08/11 06:00:18 PM 08/08/11 06:06:01 PM 08/08/11 06:11:50 PM 08/08/11 06:17:39 PM SiF4 SiF4Error CH2F2 CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.00025 0.000172203 ND 0.00296928 0.249272 0.00328414 0.010871 0.00354338 ND 0.0321047 0.115887 0.00803238 1.119557 0.327319 1.967845 0.544595 0.001016 0.000506993 ND 0.00795346 0.814144 0.00762752 0.061613 0.00697565 ND 0.0461715 1.261158 0.0631292 7.648481 0.697209 6.623517 1.1213 0.00097 0.000480763 ND 0.00711309 0.765083 0.00726778 0.066501 0.00695541 ND 0.0461334 1.458608 0.0760744 13.718779 0.820363 7.537441 1.31936 0.000795 0.000366633 ND 0.00433801 0.546218 0.00518839 0.069417 0.00506522 ND 0.0379135 1.160751 0.0573429 15.566702 0.731282 8.765204 1.1761 0.000775 0.000466303 ND 0.00454096 0.856427 0.00679414 0.0283 0.0043222 ND 0.0341024 1.477716 0.0762241 8.919262 0.681009 6.394731 1.09524 0.000734 0.000450381 ND 0.00377108 0.866229 0.00685492 0.034046 0.00441565 ND 0.0334619 1.533626 0.0796077 8.779736 0.66803 5.903233 1.07437 0.001034 0.000558973 ND 0.00601472 0.87636 0.00689754 0.03718 0.00449262 ND 0.0368963 1.640748 0.0868748 8.820208 0.622659 7.291068 1.0014 0.001384 0.0006014ND 0.00590898 0.930694 0.00718593 0.038557 0.0044837 ND 0.0405378 1.759784 0.0948771 8.295566 0.656892 7.97084 1.05646 0.001366 0.000722761 ND 0.00853085 0.804191 0.00638955 0.036454 0.00432422 ND 0.0377427 1.816558 0.098575 8.597411 0.580162 8.38274 0.933055 0.001076 0.00058068 ND 0.00464979 0.885657 0.00690682 0.034114 0.00445544 ND 0.0416583 1.775762 0.0962791 8.559254 0.61144 9.93351 0.983359 0.000806 0.000541978 ND 0.00349055 0.924598 0.00716317 0.030496 0.00449541 ND 0.0424725 1.858769 0.101155 8.719171 0.633903 9.730807 1.01949 0.000939 0.000566778 ND 0.00404506 0.89033 0.00697682 0.030663 0.00446349 ND 0.0380986 1.81792 0.0984734 8.863363 0.675901 7.556987 1.08703 0.000386 0.000558718 ND 0.00353227 0.916365 0.00721436 0.029708 0.004585 ND 0.0383015 1.665669 0.0887752 8.820579 0.661711 9.217894 1.06421 0.000413 0.000543918 ND 0.00389773 0.750478 0.00626007 0.030554 0.00470657 ND 0.0368797 1.4677 0.0759622 9.165676 0.67681 8.544561 1.08849 0.00021 0.00057393ND 0.0032914 0.681555 0.00588533 0.038207 0.00479958 ND 0.0344177 1.277346 0.0632591 8.929386 0.685465 6.796664 1.10241 0.000206 0.000556277ND 0.0030922 0.920177 0.00734695 0.035724 0.0046783 ND 0.0369631 1.007328 0.0460448 9.019295 0.776464 6.090876 1.24876 0.000126 0.000556217ND 0.00323739 0.98784 0.00790768 0.038519 0.00508857 ND 0.040117 0.983947 0.0446323 8.770197 0.700406 6.737543 1.12644 0.000119 0.000514568 ND 0.00312632 0.856918 0.00708957 0.039953 0.00486333 ND 0.0414071 1.062892 0.0498784 8.925821 0.702712 6.827652 1.13015 0.000143 0.000500077ND 0.00324653 0.837585 0.00694697 0.056505 0.00516966 ND 0.0368676 1.113384 0.0531858 9.373585 0.694994 6.813881 1.11774 0.000117 0.000505847ND 0.00337224 0.879115 0.00713816 0.063716 0.00521617 ND 0.0394936 1.399707 0.0719621 9.454717 0.711067 7.208938 1.14358 0.000292 0.000504791 ND 0.0035233 0.957204 0.00754324 0.060356 0.00507351 ND 0.0390902 1.408496 0.0724184 9.039052 0.638919 7.46003 1.02755 0.000348 0.000507616 ND 0.00356622 0.977596 0.00764523 0.060984 0.00503778 ND 0.039793 1.282557 0.0644416 11.682463 0.662811 8.214659 1.06598 0.000204 0.000471798 ND 0.00340205 0.794025 0.00654025 0.041158 0.00493778 ND 0.0381051 1.237954 0.0609652 6.482304 0.652871 8.296684 1.04999 0.000089 0.000472286 ND 0.00353134 0.699381 0.00600083 0.036541 0.00502851 ND 0.0420673 1.234703 0.0610746 5.475865 0.614407 9.290472 0.98813 0.000154 0.000452958 ND 0.00297669 0.707482 0.00600999 0.036499 0.00489575 ND 0.0389143 1.050556 0.0490877 5.950125 0.647656 9.155966 1.0416 0.000115 0.000472608 ND 0.00325876 0.830599 0.00676864 0.030609 0.00479782 ND 0.038469 0.961279 0.0436284 8.458977 0.640358 9.294008 1.02987 0.000165 0.000459981 ND 0.00320087 0.899161 0.00724337 0.029877 0.00490512 ND 0.0415637 1.284133 0.0650713 13.552934 0.723995 9.72364 1.16438 0.000101 0.000442405 ND 0.00310942 0.899424 0.00720086 0.025849 0.00483162 ND 0.0363074 0.75448 0.0317153 12.952067 0.699053 7.483823 1.12426 0.000219 0.000457618 ND 0.00323792 1.022173 0.00797217 0.023147 0.00479505 ND 0.0380049 1.015616 0.0472375 14.948271 0.735298 6.26063 1.18255 0.000279 0.000461616 ND 0.00351537 0.978918 0.00774945 0.024102 0.00468675 ND 0.038541 1.091144 0.0517931 13.205936 0.725217 5.302181 1.16634 0.000166 0.000431586 ND 0.00303683 0.989068 0.00782071 0.027979 0.00454303 ND 0.038964 1.002375 0.0461886 15.086029 0.766945 5.350401 1.23345 0.000156 0.000418582 ND 0.00308163 1.050187 0.00814954 0.029113 0.0045425 ND 0.0391488 0.99629 0.046318 16.163819 0.780657 5.28706 1.2555 0.000078 0.000411712 ND 0.00313742 1.002306 0.00793694 0.034496 0.00491869 ND 0.0401136 1.043314 0.049627 19.047238 0.808798 6.34074 1.30076 0.000166 0.000402586 ND 0.00303766 0.946987 0.00752009 0.050486 0.00477231 ND 0.0382059 0.912278 0.0414881 17.710914 0.770451 6.4384 1.23909 0.00008 0.000398496 ND 0.00299934 0.907893 0.00731376 0.051108 0.00475559 ND 0.038593 1.127799 0.0552861 18.821425 0.747771 6.749654 1.20261 0.00033 0.000401223 ND 0.00340924 0.998104 0.00812682 0.051347 0.00472723 ND 0.0470529 1.145889 0.0573209 18.659911 0.743145 7.127697 1.19518 0.000493 0.000431168 ND 0.00369437 0.930816 0.0077214 0.051238 0.00431971 ND 0.0515191 1.114276 0.0563197 17.69468 0.707453 7.723346 1.13777 0.000446 0.000444032 ND 0.00289202 1.046569 0.00807303 0.05276 0.00404015 ND 0.0393037 1.112505 0.0550034 18.975375 0.706859 7.44725 1.13682 0.00043 0.0003876 ND 0.00291374 1.029597 0.00781533 0.054672 0.00372256 ND 0.035177 1.158971 0.0574061 17.565794 0.689219 6.596601 1.10845 0.000345 0.000358104ND 0.00278576 0.86064 0.00671629 0.052039 0.00343809 ND 0.0356533 0.941203 0.0435938 19.462453 0.710935 8.541205 1.14337 0.000311 0.000363857ND 0.00273742 0.894853 0.00705357 0.061137 0.0035837 ND 0.0370177 1.131894 0.0552254 15.459296 0.684545 6.841768 1.10093 0.000331 0.000352472 ND 0.00285124 0.928531 0.00723217 0.066395 0.00329724 ND 0.0378937 1.049915 0.0502327 16.681797 0.680748 8.221439 1.09482 0.00037 0.000348985 ND 0.00280184 0.881369 0.00680435 0.058403 0.00324426 ND 0.031502 1.099134 0.0529994 14.856207 0.705056 6.438757 1.13392 0.000418 0.000351903 ND 0.00312671 0.96226 0.00735051 0.05628 0.00341836 ND 0.0332959 1.061894 0.0513952 17.194321 0.67095 6.57085 1.07907 0.000445 0.000354785 ND 0.00302165 0.967336 0.00738281 0.059713 0.00353038 ND 0.034098 1.133855 0.0552896 15.398784 0.718184 5.904281 1.15503 0.00043 0.000389904ND 0.00290842 0.888789 0.00680614 0.061233 0.00313334 ND 0.0329094 1.08624 0.0523016 18.018944 0.705899 6.659931 1.13527 0.000461 0.000360323 ND 0.00232193 1.007433 0.00755856 0.062289 0.00265842 ND 0.0321419 0.926295 0.0422777 15.638259 0.679356 6.500594 1.09259 0.000416 0.000348908 ND 0.00256541 0.892871 0.00677891 0.063769 0.00274171 ND 0.0310603 0.913786 0.0413816 16.357136 0.657925 6.869986 1.05812 0.000333 0.00033118 ND 0.00254251 0.826278 0.00636711 0.055789 0.0027781 ND 0.0296496 0.979602 0.0455882 15.475762 0.653064 7.083203 1.0503 0.000319 0.000320438 ND 0.00263525 0.907372 0.00688972 0.056549 0.00273381 ND 0.0306524 1.178009 0.0583896 15.651289 0.619352 8.039615 0.996083 0.000288 0.000314907ND 0.0026857 0.717596 0.00556666 0.048341 0.0030518 ND 0.0297285 1.01028 0.0479436 16.802159 0.664629 7.746225 1.0689 0.0004 0.00030864ND 0.00296905 0.659319 0.0051419 0.049246 0.00277444 ND 0.028596 1.09691 0.0533955 17.10882 0.685629 8.298242 1.10267 0.000361 0.000305025 ND 0.00293203 0.620741 0.00488603 0.046979 0.00273536 ND 0.0273609 1.089057 0.0530181 17.192686 0.656686 7.665038 1.05613 0.000326 0.000308232 ND 0.00281372 0.573284 0.00464928 0.045004 0.00303798 ND 0.0273273 1.063101 0.0515333 17.680401 0.683886 7.418201 1.09987 0.000346 0.000336887ND 0.00297553 0.772298 0.00610069 0.044052 0.00344684 ND 0.0312343 1.133717 0.0559502 17.738244 0.720258 6.991464 1.15837 0.000176 0.000308407ND 0.00289484 0.752928 0.00605841 0.035791 0.00377771 ND 0.0330326 1.075847 0.0516872 18.511274 0.790935 6.114163 1.27203 0.000386 0.000318365 ND 0.00310335 0.835028 0.00660933 0.028713 0.00357131 ND 0.0344911 0.966248 0.0448013 18.318099 0.715059 6.297052 1.15 0.00045 0.000324803 ND 0.00355565 0.79312 0.00631663 0.03042 0.00392794 ND 0.0348578 1.115933 0.0549223 18.31026 0.726291 7.791447 1.16807 0.000355 0.000299449 ND 0.00350359 0.6999 0.00581911 0.027813 0.00421612 ND 0.0369642 1.138886 0.0565698 18.848762 0.692149 8.268237 1.11316 0.000571 0.000317277ND 0.00427327 0.884942 0.00694088 0.03495 0.00392426 ND 0.0353658 1.267983 0.0648023 17.610504 0.676385 8.020762 1.08781



## Page 5

## FAB3_Stack2

Timestamp 08/08/11 06:23:25 PM 08/08/11 06:29:09 PM 08/08/11 06:35:06 PM 08/08/11 06:40:54 PM 08/08/11 06:46:46 PM 08/08/11 06:52:26 PM 08/08/11 06:58:17 PM 08/08/11 07:04:12 PM 08/08/11 07:10:05 PM 08/08/11 07:15:57 PM 08/08/11 07:21:43 PM 08/08/11 07:27:23 PM 08/08/11 07:33:06 PM 08/08/11 07:38:58 PM 08/08/11 07:44:36 PM 08/08/11 07:50:29 PM 08/08/11 07:56:26 PM 08/08/11 08:02:16 PM 08/08/11 08:08:10 PM 08/08/11 08:14:05 PM 08/08/11 08:19:58 PM 08/08/11 08:25:39 PM 08/08/11 08:31:27 PM 08/08/11 08:37:03 PM 08/08/11 08:42:52 PM 08/08/11 08:48:40 PM 08/08/11 08:54:23 PM 08/08/11 09:00:14 PM 08/08/11 09:06:05 PM 08/08/11 09:12:01 PM 08/08/11 09:17:37 PM 08/08/11 09:23:32 PM 08/08/11 09:29:16 PM 08/08/11 09:35:07 PM 08/08/11 09:40:49 PM 08/08/11 09:46:30 PM 08/08/11 09:52:15 PM 08/08/11 09:58:00 PM 08/08/11 10:03:41 PM 08/08/11 10:09:35 PM 08/08/11 10:15:27 PM 08/08/11 10:21:02 PM 08/08/11 10:26:57 PM 08/08/11 10:32:54 PM 08/08/11 10:38:40 PM 08/08/11 10:44:45 PM 08/08/11 10:50:37 PM 08/08/11 10:56:17 PM 08/08/11 11:02:13 PM 08/08/11 11:08:00 PM 08/08/11 11:13:53 PM 08/08/11 11:19:47 PM 08/08/11 11:25:48 PM 08/08/11 11:31:35 PM 08/08/11 11:37:27 PM 08/08/11 11:43:15 PM 08/08/11 11:49:08 PM 08/08/11 11:55:03 PM 08/09/11 12:01:02 AM 08/09/11 12:06:46 AM SiF4 SiF4Error CH2F2 CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.000611 0.000312133 ND 0.00429749 0.84544 0.0065999 0.053173 0.00388704 ND 0.0359095 1.369572 0.0713351 17.873585 0.656648 9.28488 1.05607 0.000621 0.000331814ND 0.0044097 0.890789 0.0069801 0.059226 0.00398566 ND 0.0382081 1.143763 0.0578316 20.577075 0.941427 8.620434 1.25835 0.000669 0.000344992 ND 0.00382034 0.924551 0.00720767 0.058896 0.00408635 ND 0.037905 1.075285 0.0530813 20.003556 0.987594 7.804336 1.32006 0.00051 0.000321814ND 0.0030404 0.962296 0.00745715 0.050449 0.00387084 ND 0.0369625 1.129084 0.0562202 18.858327 0.728894 8.463761 1.17226 0.00026 0.000292364ND 0.00309695 1.035315 0.00798898 0.052558 0.00406324 ND 0.0391751 1.08918 0.0543442 19.554928 0.719623 8.752314 1.15735 0.00087 0.000337995 ND 0.00362055 0.97623 0.00759028 0.058208 0.00438903 ND 0.0389745 1.078003 0.0532331 18.727249 0.7437 8.463713 1.19607 0.001142 0.000487009 ND 0.00632353 1.049442 0.00822645 0.056159 0.0047881 ND 0.0416585 1.198042 0.0614592 18.153335 0.716636 8.146565 1.15254 0.000416 0.000319654ND 0.00358207 1.05892 0.00840522 0.055409 0.00521417 ND 0.0422325 1.15531 0.0574723 18.05617 0.720652 7.699562 1.159 0.000309 0.000323481 ND 0.00392621 1.018194 0.00827576 0.055712 0.00551857 ND 0.0442157 0.840315 0.0371998 18.473135 0.786518 7.406913 1.26493 0.000313 0.000304786 ND 0.00357729 0.945251 0.00769013 0.056786 0.00542988 ND 0.0413247 0.962782 0.044784 18.690999 0.793941 7.545548 1.27687 0.000269 0.000334176 ND 0.00410586 0.888406 0.0074597 0.055302 0.00564406 ND 0.0420943 1.103734 0.0539242 18.923551 0.780799 6.8044 1.25573 0.000957 0.000441912 ND 0.00545316 0.940952 0.00736696 0.056446 0.00421063 ND 0.0375665 1.013887 0.0481457 18.85355 0.730909 6.908905 1.1755 0.001741 0.000663954ND 0.00894144 0.811817 0.00610378 0.06159 0.00271412 ND 0.0299487 0.982087 0.045954 18.35137 0.682479 6.795764 1.09761 0.001025 0.000322746 ND 0.00258144 0.835809 0.00622475 0.067612 0.00207456 ND 0.0282422 0.977374 0.046036 18.370574 0.707279 7.494077 1.13749 0.001181 0.000355365 ND 0.00324479 0.86832 0.00654276 0.066422 0.00174526 ND 0.0291569 1.120922 0.0561382 18.787131 0.66155 6.842798 1.06395 0.001264 0.000365076 ND 0.00363353 0.742194 0.00564076 0.06372 0.00169033 ND 0.0264203 1.282014 0.0661296 18.929667 0.697889 7.906787 1.12239 0.001297 0.000353472 ND 0.00318059 0.925136 0.00711795 0.072855 0.00205417 ND 0.0331082 1.193285 0.0609082 18.318135 0.620617 8.115922 0.998117 0.001117 0.000333335 ND 0.00266941 0.759001 0.00578268 0.083286 0.00228568 ND 0.0309832 1.28748 0.0672066 17.512447 0.726377 9.492956 1.16807 0.001637 0.000543ND 0.00628086 0.781154 0.00604688 0.072298 0.00237862 ND 0.0314599 1.572813 0.0854613 16.983719 0.601308 8.441703 0.966953 0.001684 0.000570889 ND 0.00693607 0.855477 0.00665478 0.071962 0.00222 ND 0.0299929 1.287657 0.0672779 17.73721 0.614276 7.963934 0.987807 0.001815 0.000647865 ND 0.00853346 0.754673 0.00615231 0.066709 0.00189352 ND 0.025088 1.027431 0.0503345 18.333151 0.69136 7.070459 1.11189 0.001556 0.000500046 ND 0.00743804 0.867367 0.00724562 0.065666 0.00187658 ND 0.0353785 0.953443 0.0450012 19.101239 0.694225 5.909304 1.1165 0.000911 0.000314623 ND 0.00438516 0.9022 0.00772658 0.06248 0.0019465 ND 0.0404789 0.866693 0.039268 19.100839 0.634464 4.439035 1.02039 0.000861 0.000287909 ND 0.00454767 0.833423 0.00744341 0.054224 0.00190372 ND 0.0424554 0.79722 0.0352072 18.872519 0.685542 4.424253 1.10253 0.0012 0.000340258 ND 0.00485404 0.976733 0.00861037 0.03722 0.0019824 ND 0.0430402 0.954317 0.0456187 19.448041 0.615544 4.245402 0.989959 0.001177 0.00031529 ND 0.00425032 1.027899 0.00911176 0.048423 0.0020444 ND 0.0443988 0.673179 0.0270708 18.682637 0.894593 5.512641 1.43874 0.00121 0.000392736 ND 0.00373268 1.195161 0.0106427 0.054087 0.00181893 ND 0.0515016 1.176825 0.0609164 18.340675 0.580601 5.664225 0.93256 0.001231 0.000439791 ND 0.00446869 1.036632 0.00903132 0.0381 0.00184588 ND 0.0423056 1.288466 0.0680622 18.383302 0.700065 8.1463 1.12444 0.001572 0.00046062 ND 0.00608022 1.265154 0.0115678 0.034046 0.00175751 ND 0.0529227 1.205422 0.0617173 18.685675 0.678461 6.786978 1.09102 0.00151 0.000436001 ND 0.00559835 1.08479 0.00982451 0.034296 0.00178068 ND 0.0487661 0.939328 0.0452888 18.554754 0.688288 7.053307 1.10683 0.001156 0.00042341 ND 0.00463776 0.93729 0.00849877 0.050911 0.00185749 ND 0.04314 0.935948 0.0443826 18.673784 0.868865 7.777251 1.39721 0.000911 0.000455934ND 0.00296745 1.166364 0.0113226 0.064966 0.00254141 ND 0.0691978 1.121578 0.0583131 18.665889 0.68827 9.290603 1.1055 0.001014 0.000459895 ND 0.00329671 1.157183 0.0106722 0.067794 0.00293339 ND 0.051087 1.315048 0.0704558 18.169231 0.883164 10.154388 1.41854 0.001112 0.000474688 ND 0.00326901 1.120625 0.0103712 0.071699 0.00286772 ND 0.0475592 1.400479 0.0759921 18.628566 0.752425 9.11253 1.20854 0.001586 0.000603011 ND 0.00580559 1.12314 0.0105992 0.076565 0.00252676 ND 0.048509 1.280735 0.0683716 18.796545 0.673694 8.152821 1.08209 0.001514 0.000624047ND 0.00736224 0.926255 0.00878545 0.077467 0.00211351 ND 0.0463553 1.174288 0.060895 19.886745 0.709194 7.51054 1.13911 0.001181 0.000463815 ND 0.00476757 1.025043 0.0101961 0.074362 0.00175252 ND 0.065031 1.194652 0.0617721 19.45477 0.718915 7.254996 1.15472 0.000826 0.000389614ND 0.00430936 1.035476 0.00983448 0.072106 0.00177167 ND 0.0506135 1.039 0.0518128 20.145892 0.856059 5.844589 1.14414 0.000947 0.000399008 ND 0.00471779 0.983091 0.00929134 0.073254 0.0016479 ND 0.0495167 0.867701 0.0398695 19.784448 1.02589 5.903597 1.37112 0.000686 0.000383467ND 0.00505912 0.942103 0.00933737 0.075509 0.00184093 ND 0.051878 0.820769 0.0366663 20.15956 0.86063 4.758142 1.15036 0.000981 0.000390072 ND 0.00557811 0.878416 0.00857621 0.075347 0.00178007 ND 0.0473698 0.862674 0.0397717 19.991199 1.06817 5.907304 1.42776 0.000997 0.000401504ND 0.00573268 0.906453 0.00888878 0.075231 0.00180742 ND 0.0510516 0.820676 0.0372909 19.803387 0.88478 5.000329 1.18264 0.000559 0.000373386 ND 0.00490036 0.888072 0.00868889 0.074455 0.00167427 ND 0.0503364 0.849413 0.0392294 19.420504 0.860667 6.464916 1.38418 0.000566 0.000357126 ND 0.00471575 0.888444 0.00858114 0.07138 0.00174108 ND 0.0455372 0.993675 0.0481382 19.654575 0.681261 6.153915 1.09565 0.001093 0.000413605 ND 0.00533181 0.937542 0.00883036 0.067672 0.00181539 ND 0.0444725 1.13693 0.0580336 18.987533 0.6075 6.854428 0.976911 0.000731 0.00036883ND 0.00408709 1.048729 0.0100305 0.069004 0.00189562 ND 0.0484725 1.08771 0.0548206 18.679032 0.650803 7.125885 1.04655 0.000502 0.0003452 ND 0.00398537 0.930766 0.00882471 0.070326 0.00189485 ND 0.0427344 1.066345 0.0534161 18.537532 0.61556 7.068619 0.989872 0.000685 0.000332833 ND 0.00378104 0.944867 0.00893596 0.060501 0.00199195 ND 0.0431813 1.115713 0.056671 18.095055 0.753197 7.90205 1.2112 0.000755 0.000381734ND 0.00323082 0.949791 0.0089889 0.060241 0.00208611 ND 0.0443198 1.29637 0.0687743 17.987014 0.577845 7.216712 0.928134 0.000925 0.000398098 ND 0.00342623 0.903757 0.00842527 0.051568 0.00221683 ND 0.0404671 1.169725 0.0603257 17.822143 0.75511 8.440373 1.21286 0.000924 0.000363464ND 0.00338548 1.037417 0.00994249 0.030033 0.00204039 ND 0.0499475 1.213829 0.0632695 18.660364 0.634406 8.013551 1.01898 0.000504 0.000343939 ND 0.0031068 0.883197 0.00845689 0.029547 0.00200898 ND 0.0452477 1.234965 0.0646873 19.053362 0.647407 7.984819 1.03986 0.001283 0.000528569 ND 0.0056224 0.807164 0.00758021 0.033235 0.00242914 ND 0.0432011 0.753379 0.033149 19.258425 0.868261 8.709992 1.3946 0.001583 0.000713061 ND 0.00882326 0.878959 0.00811102 0.038637 0.00244696 ND 0.0430035 0.656612 0.0268641 18.766391 0.81564 8.493171 1.31008 0.00075 0.000331183 ND 0.0030638 0.775484 0.00713487 0.038146 0.00240969 ND 0.0376172 0.731925 0.0316667 19.120721 0.787301 8.608178 1.26605 0.000434 0.000301424ND 0.00352979 0.789981 0.00737604 0.038274 0.00207108 ND 0.0383796 1.154405 0.0595443 19.536065 0.654518 9.126452 1.05252 0.000639 0.000287407ND 0.00358648 0.867733 0.00829362 0.037478 0.00200834 ND 0.0458582 0.8835 0.0412698 18.866867 0.680289 7.997627 1.09396 0.001002 0.000315992 ND 0.00414774 0.914227 0.00879231 0.033571 0.00198512 ND 0.0480805 1.099551 0.0558138 18.977849 0.671803 7.868566 1.08032 0.000554 0.000310174ND 0.00359247 0.858408 0.00812342 0.031951 0.00223414 ND 0.0469651 1.304621 0.0693347 18.504167 0.64348 8.528312 1.03356 0.000587 0.000275522 ND 0.00287444 0.755422 0.00702435 0.032365 0.0021395 ND 0.0386273 1.342962 0.071697 18.957425 0.648696 8.538685 1.04316



## Page 6

## FAB3_Stack2

Timestamp 08/09/11 12:12:41 AM 08/09/11 12:18:31 AM 08/09/11 12:24:26 AM 08/09/11 12:30:12 AM 08/09/11 12:36:07 AM 08/09/11 12:42:07 AM 08/09/11 12:47:56 AM 08/09/11 12:53:51 AM 08/09/11 12:59:41 AM 08/09/11 01:05:33 AM 08/09/11 01:11:24 AM 08/09/11 01:17:15 AM 08/09/11 01:23:02 AM 08/09/11 01:28:43 AM 08/09/11 01:34:29 AM 08/09/11 01:40:24 AM 08/09/11 01:46:19 AM 08/09/11 01:52:08 AM 08/09/11 01:57:52 AM 08/09/11 02:03:36 AM 08/09/11 02:09:13 AM 08/09/11 02:14:59 AM 08/09/11 02:20:58 AM 08/09/11 02:26:51 AM 08/09/11 02:32:36 AM 08/09/11 02:38:29 AM 08/09/11 02:44:27 AM 08/09/11 02:50:20 AM 08/09/11 02:56:11 AM 08/09/11 03:02:01 AM 08/09/11 03:07:48 AM 08/09/11 03:13:52 AM 08/09/11 03:19:45 AM 08/09/11 03:25:40 AM 08/09/11 03:31:36 AM 08/09/11 03:37:29 AM 08/09/11 03:43:22 AM 08/09/11 03:49:16 AM 08/09/11 03:54:55 AM 08/09/11 04:00:49 AM 08/09/11 04:06:51 AM 08/09/11 04:12:35 AM 08/09/11 04:18:29 AM 08/09/11 04:24:28 AM 08/09/11 04:30:14 AM 08/09/11 04:36:05 AM 08/09/11 04:41:52 AM 08/09/11 04:47:49 AM 08/09/11 04:53:37 AM 08/09/11 04:59:28 AM 08/09/11 05:05:22 AM 08/09/11 05:11:17 AM 08/09/11 05:17:11 AM 08/09/11 05:22:59 AM 08/09/11 05:28:49 AM 08/09/11 05:34:45 AM 08/09/11 05:40:35 AM 08/09/11 05:46:21 AM 08/09/11 05:52:04 AM 08/09/11 05:57:59 AM SiF4 SiF4Error CH2F2 CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.000501 0.000282127ND 0.0037851 0.816272 0.0075363 0.03426 0.00202156 ND 0.036567 1.342973 0.0712557 18.942787 0.672107 8.777904 1.08093 0.001323 0.000554882 ND 0.00791303 0.878777 0.00804331 0.032229 0.00174649 ND 0.0387822 1.263111 0.0657363 19.135202 0.638544 8.090951 1.02695 0.001275 0.000419607ND 0.00601116 0.911912 0.00854118 0.031901 0.00159151 ND 0.045559 1.151245 0.0585088 19.374796 0.655772 7.3287 1.05466 0.000475 0.000258076 ND 0.00410865 0.921598 0.00853483 0.030283 0.00151954 ND 0.0438668 1.188891 0.0611562 19.377851 0.694931 7.506299 1.11763 0.00016 0.000237742 ND 0.00314145 0.613109 0.00554638 0.029093 0.00136172 ND 0.0290518 1.07279 0.0529145 19.246157 0.733435 7.387565 1.17956 0.000276 0.000251625 ND 0.00304637 0.528326 0.00484191 0.029296 0.00157153 ND 0.0251616 0.897087 0.0420864 19.724953 0.862344 6.870386 1.15265 0.000538 0.000250334ND 0.00237832 0.502683 0.0046415 0.027763 0.00176321 ND 0.0264767 0.866608 0.0403814 19.51647 0.939624 7.344923 1.25594 0.000597 0.000254953 ND 0.00300819 0.554417 0.0050618 0.028774 0.00171534 ND 0.0278445 0.987047 0.0478439 19.279179 0.758097 7.999943 1.21922 0.000645 0.000256406 ND 0.00293233 0.656433 0.00593098 0.029099 0.00165273 ND 0.0290254 1.055071 0.0523524 19.065212 0.650339 7.226635 1.04592 0.001041 0.000544107ND 0.00539404 0.74811 0.00662792 0.026908 0.00167785 ND 0.0306779 0.911624 0.0435959 18.356921 0.689103 8.0765 1.10826 0.001337 0.000577849 ND 0.00768086 0.668708 0.00593199 0.026786 0.00185337 ND 0.032103 1.072655 0.0538268 18.46757 0.660309 8.263338 1.06195 0.001376 0.000594215 ND 0.00830714 0.573336 0.00510857 0.027357 0.00185345 ND 0.0291057 0.999937 0.0485705 18.015579 0.683548 8.244492 1.09933 0.000913 0.000388538 ND 0.00448679 0.677378 0.00589679 0.030627 0.00211121 ND 0.0314824 1.025975 0.0503428 17.917694 0.631465 8.558925 1.01556 0.001159 0.000435413 ND 0.00560086 0.749641 0.00662909 0.02845 0.00206972 ND 0.0337548 1.177666 0.0606742 17.689241 0.630466 8.45496 1.01396 0.001106 0.000484464ND 0.00669778 0.735862 0.00638109 0.028418 0.00194627 ND 0.0310203 1.107465 0.0557106 17.752399 0.698661 8.700155 1.12363 0.001189 0.000443864ND 0.00591209 0.717708 0.00621003 0.027694 0.00173911 ND 0.0302841 1.099436 0.054687 17.896655 0.679183 7.47627 1.09231 0.00033 0.000283524ND 0.00321367 0.657348 0.00572263 0.030416 0.00155936 ND 0.0316046 0.961609 0.0454478 18.429409 0.656144 6.189528 1.05525 0.000309 0.000282729 ND 0.00324362 0.643666 0.00557977 0.005759 0.00146565 ND 0.0313787 0.931801 0.0432349 18.587579 0.66258 6.243324 1.0656 0.000344 0.000314073 ND 0.00262704 0.692699 0.00596756 0.003571 0.00179074 ND 0.0309522 0.905684 0.0421614 18.573118 0.76939 7.521573 1.23738 0.000328 0.000276474ND 0.0028432 0.864286 0.00769602 0.007165 0.0019547 ND 0.0430788 1.056837 0.0524727 19.270737 0.67645 7.696658 1.08791 0.000352 0.000260212 ND 0.0030795 0.930073 0.00805159 0.023214 0.00207273 ND 0.0387795 1.230302 0.0634577 18.901313 0.677437 8.33906 1.0895 0.000823 0.000281524ND 0.00319506 0.978867 0.00836415 0.031585 0.00220367 ND 0.0382712 1.328544 0.0702443 19.032027 0.633089 8.488794 1.01818 0.000719 0.0002581 ND 0.00327552 0.985499 0.00839948 0.029319 0.00227709 ND 0.0401269 1.412573 0.075233 18.774811 0.656751 8.660433 1.05623 0.001269 0.000374365 ND 0.00502055 0.967367 0.00826001 0.027148 0.00213481 ND 0.0393554 1.222834 0.0632285 18.350736 0.629892 7.2758 1.01303 0.000799 0.000281611 ND 0.00339706 0.96569 0.0083541 0.028143 0.00223378 ND 0.0408003 1.271371 0.0662897 18.039169 0.694217 7.089456 1.11649 0.000376 0.000251484ND 0.002926 0.922405 0.00777029 0.030786 0.00248921 ND 0.0376668 1.21694 0.0623207 18.252644 0.658156 6.489361 1.05849 0.000929 0.000354688 ND 0.00358563 0.859792 0.00724826 0.033443 0.00266633 ND 0.0387222 1.072379 0.0531781 18.004225 0.648789 7.816826 1.04343 0.000846 0.00039958 ND 0.00443651 0.839472 0.00716214 0.031738 0.00277475 ND 0.0415218 1.261876 0.0654971 17.799466 0.651126 9.541382 1.04718 0.00095 0.000378453 ND 0.00415589 1.019793 0.00851963 0.058091 0.00318198 ND 0.044631 1.651046 0.0921289 17.406718 0.65628 9.795983 1.05547 0.000297 0.000234552 ND 0.00291064 0.958436 0.00804042 0.070155 0.0031693 ND 0.0479451 1.680544 0.0940166 17.315551 0.613841 9.779804 0.98722 0.000473 0.00024953ND 0.00321621 0.752696 0.00619053 0.061347 0.00312638 ND 0.0380923 1.367686 0.0731501 17.721938 0.651678 9.175162 1.04807 0.00117 0.000429774ND 0.00473533 0.830561 0.00693413 0.042827 0.0030115 ND 0.0393212 1.203047 0.0618292 17.8993 0.648861 8.508231 1.04354 0.000726 0.000268872 ND 0.00344817 0.758945 0.00632195 0.048894 0.00276459 ND 0.0348756 1.369642 0.0719878 17.781558 0.66602 8.778457 1.07114 0.001063 0.000410713 ND 0.00574341 1.017858 0.00847286 0.055379 0.00284876 ND 0.0429284 1.105177 0.0543727 17.958147 0.703979 6.894975 1.13219 0.000391 0.000258492 ND 0.00301927 0.983769 0.00815736 0.057874 0.00293412 ND 0.0423822 0.666623 0.0261793 18.747495 0.734012 6.392806 1.18049 0.00043 0.000283908 ND 0.00341481 0.826825 0.00682288 0.067651 0.00295613 ND 0.0370391 0.445122 0.0136264 19.147143 0.760206 6.223695 1.22261 0.00029 0.000275549 ND 0.00325526 0.843849 0.0071364 0.076489 0.00304862 ND 0.0414846 0.982141 0.0472246 19.398234 0.704064 6.644181 1.13232 0.000117 0.000285226 ND 0.00280964 0.729859 0.00607645 0.064209 0.00315932 ND 0.0358609 0.719864 0.0334653 19.38991 0.738417 6.515499 1.18757 0.000238 0.000301136 ND 0.00331404 0.919124 0.0075878 0.057364 0.00335996 ND 0.0366636 1.132369 0.0580906 18.557801 0.694711 7.006833 1.11728 0.000189 0.000328129 ND 0.00290727 0.869881 0.0071119 0.053839 0.00359361 ND 0.0371824 1.35091 0.071289 18.587022 0.667856 8.822729 1.07409 0.000127 0.000326417ND 0.0032727 0.671856 0.00567811 0.050106 0.00386444 ND 0.0414303 1.587758 0.0868961 18.668243 0.675505 10.177269 1.08639 0.000345 0.000341863 ND 0.00349198 0.943402 0.00768899 0.047844 0.00403693 ND 0.0439275 1.543228 0.0840846 18.300271 0.682581 10.824502 1.09777 0.000038 0.000316043 ND 0.00301022 0.638926 0.0054091 0.051859 0.00382125 ND 0.0391842 1.174844 0.0608914 18.210616 0.657246 10.565913 1.05703 0.000072 0.000315281 ND 0.00279449 0.670674 0.00567509 0.05423 0.00374477 ND 0.0362595 1.076429 0.0536403 18.633325 0.708339 9.024826 1.1392 0.000002 0.000301682 ND 0.00254408 0.594929 0.00514116 0.051777 0.00373944 ND 0.0319192 0.951833 0.0450777 18.953298 0.69858 8.212231 1.1235 -0.000008 0.000301191 ND 0.00264057 0.51703 0.00464559 0.054613 0.00386211 ND 0.0328546 0.939056 0.0441806 18.860943 0.70098 8.642119 1.12736 0.000056 0.000299277ND 0.00264393 0.71293 0.00610708 0.072164 0.00401563 ND 0.0386914 0.888874 0.0416434 19.080853 0.715582 8.013517 1.15085 -0.000004 0.000306942 ND 0.00259402 0.61115 0.00529653 0.073648 0.0041148 ND 0.0339802 0.847948 0.0385069 19.162318 0.72881 7.699356 1.17212 0.000247 0.000290356 ND 0.00278959 0.672725 0.00578935 0.071482 0.00429093 ND 0.0349662 0.882892 0.0412685 19.06515 0.74841 7.294095 1.20364 0.000082 0.00050897ND 0.00274053 0.684779 0.00589505 0.069509 0.00429481 ND 0.035333 0.988876 0.0477334 19.509632 0.775275 7.019633 1.24685 0.000074 0.000318023 ND 0.00290452 0.730383 0.00632993 0.06811 0.00444431 ND 0.041081 1.296933 0.0671514 19.352486 0.753122 6.925702 1.21122 0.000089 0.000312374ND 0.00298258 0.764307 0.00652305 0.070194 0.00450022 ND 0.0409965 1.150149 0.057641 19.157836 0.740946 7.123906 1.19164 0.000172 0.00028811 ND 0.00305352 0.586099 0.00533485 0.073741 0.004595 ND 0.036085 0.777819 0.0342931 19.630995 0.774022 6.749588 1.24483 0.000155 0.000308961 ND 0.00274799 0.755203 0.0063739 0.077579 0.00468832 ND 0.0361656 0.790851 0.0347557 19.489094 0.748551 6.744956 1.20387 0.000084 0.000323982 ND 0.00334589 0.668049 0.00584327 0.074436 0.00487864 ND 0.0383082 1.031572 0.0500707 18.990889 0.718619 8.446405 1.15573 0.000174 0.000305989 ND 0.00303002 0.785964 0.00659973 0.074593 0.00493985 ND 0.0451404 1.445405 0.0775395 18.308208 0.706653 9.657866 1.13649 0.000186 0.00031778 ND 0.00352982 0.924555 0.00749347 0.07116 0.00504676 ND 0.0458909 1.468947 0.0798412 18.182973 0.694297 9.674913 1.11662 0.000151 0.000290948 ND 0.00357936 0.750651 0.00642236 0.065713 0.00508822 ND 0.0432283 1.530235 0.0838801 18.253207 0.771971 9.03175 1.24154 0.000568 0.000383952 ND 0.0042058 0.671261 0.00606066 0.05724 0.00507755 ND 0.0402232 1.229376 0.0635407 18.899717 0.762705 8.909786 1.22663 0.000193 0.000301044ND 0.00311899 0.791384 0.00674316 0.040049 0.00500831 ND 0.0404048 1.500494 0.0798041 19.100044 0.742076 8.277221 1.19346



## Page 7

## FAB3_Stack2

Timestamp 08/09/11 06:03:42 AM 08/09/11 06:09:35 AM 08/09/11 06:15:24 AM 08/09/11 06:21:11 AM 08/09/11 06:27:00 AM 08/09/11 06:32:49 AM 08/09/11 06:38:33 AM 08/09/11 06:44:19 AM 08/09/11 06:50:12 AM 08/09/11 06:56:01 AM 08/09/11 07:01:52 AM 08/09/11 07:07:42 AM 08/09/11 07:13:14 AM 08/09/11 07:18:54 AM 08/09/11 07:24:42 AM 08/09/11 07:30:38 AM 08/09/11 07:36:19 AM 08/09/11 07:42:07 AM 08/09/11 07:47:52 AM 08/09/11 07:53:33 AM 08/09/11 07:59:27 AM 08/09/11 08:05:26 AM 08/09/11 08:11:20 AM 08/09/11 08:17:12 AM 08/09/11 08:23:09 AM 08/09/11 08:29:01 AM 08/09/11 08:34:46 AM 08/09/11 08:40:38 AM 08/09/11 08:46:27 AM 08/09/11 08:52:19 AM 08/09/11 08:58:16 AM 08/09/11 09:03:55 AM 08/09/11 09:09:49 AM 08/09/11 09:15:38 AM 08/09/11 09:21:31 AM 08/09/11 09:27:23 AM 08/09/11 09:50:41 AM 08/09/11 09:56:24 AM SiF4 SiF4Error CH2F2 CH2F2 FDL C2F6 C2F6Error CHF3 CHF3Error COF2 COF2 FDL CF4 CF4Error CH4 CH4Error N2O N2OError 0.000396 0.000312616 ND 0.00333624 0.796639 0.00681321 0.040637 0.00502906 ND 0.0417117 1.284588 0.0660196 19.123106 0.767192 7.730217 1.23385 0.00052 0.000318474ND 0.00330632 0.906565 0.00755106 0.04124 0.00512104 ND 0.044777 1.41669 0.0746952 19.202501 0.713168 8.077307 1.14696 0.000197 0.000309392 ND 0.00356352 0.85159 0.00731582 0.044972 0.00510551 ND 0.0497372 1.670176 0.0908676 19.180385 0.771555 7.720301 1.24087 0.00005 0.000308889 ND 0.00371318 0.628789 0.00580647 0.046187 0.00531104 ND 0.0427364 1.903598 0.105571 19.628088 0.804501 8.376724 1.29385 0.000262 0.000309019 ND 0.00427513 0.645455 0.0059065 0.043713 0.00531138 ND 0.043451 1.693589 0.0924931 18.969228 0.71283 8.72 1.14642 0.00079 0.000373978 ND 0.00441335 0.679197 0.00605899 0.042914 0.00515779 ND 0.0404485 1.479225 0.0782218 19.203572 0.746153 8.394101 1.20001 0.000828 0.000444103 ND 0.00572891 0.650803 0.00594163 0.027482 0.00508903 ND 0.0401404 1.331578 0.0690667 18.714799 0.741173 9.677683 1.192 0.000591 0.000360747ND 0.00440547 0.660948 0.00610244 0.024841 0.00527557 ND 0.0395033 1.065482 0.0520472 18.881632 0.771172 9.061738 1.24025 0.000064 0.000288782 ND 0.00359625 0.500824 0.00525177 0.024249 0.00546107 ND 0.0407548 1.30085 0.0667163 18.571257 0.759377 9.78387 1.22128 0.000382 0.000305217ND 0.00361506 0.773418 0.00679321 0.008887 0.00548895 ND 0.0432725 1.407144 0.0735902 19.087766 0.773618 9.459727 1.24418 0.000347 0.00030737ND 0.00378678 1.400371 0.0111478 0.006296 0.0055597 ND 0.050587 1.513253 0.0802003 18.566671 0.761976 6.995463 1.22546 0.000138 0.000290029 ND 0.00363924 0.956999 0.00797563 0.003433 0.00565652 ND 0.0446523 1.538889 0.0819217 18.934235 0.828249 7.878176 1.33205 0.000013 0.000291642 ND 0.00378532 0.748023 0.00672895 0.000196 0.00570715 ND 0.0419866 1.513377 0.0796705 15.588251 0.787281 8.362267 1.26616 0.000082 0.000300623 ND 0.00395499 0.598765 0.00589188 -0.000046 0.00568822 ND 0.0428942 1.552245 0.0828046 17.867252 0.769026 9.016308 1.2368 0.000533 0.000355846 ND 0.00451489 0.544503 0.00566665 -0.002038 0.00577463 ND 0.04254 1.674929 0.0899661 15.998998 0.758716 9.175064 1.22022 0.001077 0.000583473 ND 0.00813176 0.642532 0.00622716 -0.004134 0.00583809 ND 0.0430267 1.842222 0.10075 17.125251 0.81175 8.559924 1.30551 0.000748 0.000433416 ND 0.0060155 0.694521 0.00651025 -0.000418 0.00589915 ND 0.0421977 1.460904 0.0765986 17.014834 0.791627 8.17414 1.27315 0.000578 0.000406992 ND 0.00582542 0.524423 0.00565286 0.01162 0.00595246 ND 0.0412159 1.344008 0.0689334 17.151123 0.764509 8.192205 1.22953 0.000074 0.000313324ND 0.00378238 0.666422 0.00641993 0.002189 0.00602177 ND 0.0427921 1.28445 0.0655345 18.428555 0.824477 7.895869 1.32598 0.00002 0.000302699 ND 0.00390306 0.642924 0.00634557 0.001461 0.00605657 ND 0.0421255 1.572148 0.0832222 16.319993 0.775422 7.686493 1.24708 -0.000131 0.000299889 ND 0.00394654 0.591048 0.0060491 0.002363 0.0060615 ND 0.0424456 1.336454 0.0685969 18.041683 0.825351 7.959147 1.32738 0.000012 0.000304158 ND 0.00404505 0.483203 0.00555361 0.006725 0.00609162 ND 0.040127 1.28122 0.0645978 15.823664 0.780231 7.367666 1.25482 0.000377 0.000322951 ND 0.00415473 0.588168 0.00610934 0.003311 0.00616019 ND 0.0428958 1.199203 0.0597814 18.832321 0.796748 8.29285 1.28138 0.00075 0.000431799 ND 0.00592429 0.740927 0.00687343 0.018916 0.00609456 ND 0.0418575 1.282496 0.0647032 15.937822 0.788255 7.468074 1.26772 0.001083 0.000610519 ND 0.00847528 0.680845 0.00650999 0.027657 0.00605981 ND 0.0447417 1.37676 0.0722555 18.709184 0.746234 9.337504 1.20014 0.000779 0.000457171 ND 0.00617963 0.681633 0.00649935 0.031473 0.00602915 ND 0.0435578 1.389989 0.0724884 16.386558 0.749754 8.276402 1.2058 0.00039 0.000323918 ND 0.00388787 0.834359 0.00731661 0.03327 0.00617685 ND 0.0487087 1.533545 0.0823038 18.564138 0.739915 10.52035 1.18998 0.000118 0.000318756 ND 0.00402187 0.772713 0.00699803 0.028887 0.00628515 ND 0.0517905 1.747716 0.096599 17.218285 0.783638 10.448617 1.2603 0.000096 0.000307282 ND 0.00411568 0.778501 0.00698049 0.039587 0.00615436 ND 0.0494177 1.545949 0.0835722 18.84499 0.739555 9.540827 1.1894 0.000147 0.000278342 ND 0.00385619 0.772909 0.00684086 0.041524 0.00595023 ND 0.0490484 1.616176 0.087091 17.164495 0.765438 9.914438 1.23103 0.000253 0.000327138 ND 0.00409047 0.903409 0.00748271 0.039637 0.00550922 ND 0.0496554 1.549946 0.0819659 17.730903 0.670628 11.040671 1.07855 0.000522 0.00036477ND 0.00509576 0.871329 0.00738712 0.046951 0.00559743 ND 0.0501385 1.632834 0.088149 17.30761 0.657025 12.445917 1.05667 0.00096 0.00051403ND 0.00531689 0.746251 0.00660369 0.04927 0.00576688 ND 0.0475856 1.687836 0.0904269 16.128434 0.672896 13.679528 1.0822 0.001754 0.000726524ND 0.00702817 0.851875 0.00716427 0.036758 0.00537315 ND 0.0505097 1.858966 0.100815 17.813532 0.659648 15.038954 1.06089 0.001822 0.000756412 ND 0.00680299 0.78383 0.00669384 0.03813 0.00530086 ND 0.0440567 1.51681 0.0791225 15.113485 0.70067 14.701416 1.12686 0.002021 0.000753888 ND 0.00818423 0.867858 0.00714984 0.026568 0.00541814 ND 0.0459189 1.285224 0.0637026 16.733397 0.816121 15.551484 1.31254 0.000373 0.000313947ND 0.00418558 1.770068 0.0141376 0.02273 0.00622543 ND 0.0572057 1.517468 0.0800835 18.516447 0.799954 6.92023 1.28654 0.000653 0.000400182 ND 0.00561041 1.774174 0.0146776 0.022241 0.00609223 ND 0.0623794 1.52489 0.0810352 15.781007 0.79974 5.297937 1.2862



## Page 8