# Patent

## Title
Low electron temperature, edge-density enhanced, surface wave plasma (SWP) processing method and apparatus

## Abstract

A surface wave plasma (SWP) source couples microwave (MW) energy into a processing chamber through, for example, a radial line slot antenna, to result in a low mean electron energy (Te). An ICP source, is provided between the SWP source and the substrate and is energized at a low power, less than 100 watts for 300 mm wafers, for example, at about 25 watts. The ICP source couples energy through a peripheral electric dipole coil to reduce capacitive coupling.

## Background
FIELD OF THE INVENTION
The invention relates to plasma sources, particularly microwave (MW) and surface wave plasma (SWP) sources, for example as produced with a radial line slot antenna, and more particularly, to a method and apparatus providing relatively low electron temperature and plasma uniformity.
BACKGROUND OF THE INVENTION
Typically, during semiconductor processing, a plasma etch process, for example a dry plasma etch process, is utilized to remove or etch material along fine lines or within vias or contacts patterned on a semiconductor substrate. The plasma etch process generally involves positioning a semiconductor substrate with an overlying patterned, protective layer, for example a photoresist layer, into a processing chamber and etching exposed areas of the substrate through the pattern.
Once the substrate is positioned within the chamber, it is etched by introducing an ionizable, dissociative gas mixture into the chamber at a pre-specified flow rate, while throttling a vacuum pump to achieve a processing pressure. Then, plasma is formed when a portion of the gas species is ionized by collisions with energetic electrons. The heated electrons dissociate some of the gas species in the gas mixture to create reactant species suitable for the exposed surface etch chemistry. Once the plasma is formed, any exposed surfaces of the substrate are etched by the plasma. The process is adjusted to achieve optimal conditions, including an appropriate concentration of desirable reactant and ion populations to more selectively etch various desired features (e.g., trenches, vias, contacts, etc.) in the exposed regions of substrate. The exposed regions of the substrate where etching is required are typically formed of materials such as silicon dioxide (SiO2), poly-silicon and silicon nitride, for example.
Conventionally, various techniques have been implemented for exciting a gas into plasma for the treatment of a substrate during such semiconductor device fabrication. In particular, capacitively coupled plasma (CCP) processing systems, such as parallel-plate systems, for example, or inductively coupled plasma (ICP) processing systems, have been utilized for plasma excitation. Among other types of plasma sources, there are microwave (MW) plasma sources, including those utilizing electron-cyclotron resonance (ECR), surface wave plasma (SWP) sources, and helicon plasma sources.
It is becoming common wisdom that SWP sources offer improved plasma processing performance, particularly for etching processes, over CCP systems, ICP systems and resonantly heated systems. This improved performance of SWP sources includes in general the production of a high degree of ionization at a relatively lower Boltzmann electron temperature (Te). In addition, SWP sources generally produce plasma richer in electronically excited molecular species with reduced molecular dissociation. However, the practical implementation of SWP sources still suffers from several deficiencies including, for example, plasma stability and uniformity, and electron temperature that is still higher than preferred.
SUMMARY OF THE INVENTION
According to principles of the present invention, a surface wave plasma (SWP) source is provided that produces a high degree of ionization at substantially lower electron temperature than SWP sources of the prior art. According to further principles of the invention, the low electron temperature is provided with enhanced plasma uniformity.
According to certain embodiments of the present invention, a surface wave plasma (SWP) source is provided in which pulsed microwave energy is coupled into a processing chamber through, for example, a radial line slot antenna, to apply a less-than-full duty cycle that results in a low mean electron energy or low Te. In the illustrated embodiments of the invention, microwave (MW) energy is pulsed to a SWP source to produce plasma with a relatively low average electron temperature.
In accordance with further principles of the present invention, in order to prevent impingement of the microwave energy onto the surface of the wafer when plasma density is low, such as between pulses of the microwave energy from the SWP, a secondary plasma source in the form of an ICP source, which can be, for example, a helical inductive source, a planar RF coil, or other inductively coupled source, is provided to produce a secondary plasma between the SWP source and the wafer that is opaque to microwave energy.
In an illustrated embodiment of the invention, an ICP source is pulsed in synchronized relationship with the pulsing of the microwave plasma to confine the duration of the ICP to the ramping up of the microwave energy at the beginning of the microwave pulses.
According to further principles of the invention, the ICP is combined with the SWP so as to introduce a ring-shaped distribution of energy to add an edge dense distribution of plasma to a generally chamber centric plasma produced by the SWP. As a result, improved plasma uniformity is provided. The relative energy delivered by the ICP and SWP sources provide a uniformity control parameter for the resulting plasma.
Also according to principles of the invention, the combined ICP and SWP source provides a source with a wide operating pressure range for plasma processing. In particular, the ICP extends the operating pressure range downward from that typical of the SWP source alone.
According to other embodiments of the invention, a very low power ICP, for example, a continuous wave (CW) excited plasma, is combined with a main SWP or other chamber-centric plasma, to add edge density to the plasma with minimal increase in the electron temperature. In cooperation with these embodiments, an ICP source is provided in the kHZ to MHz, LF to MF, frequency range, The low power may be below the RF power level needed to ignite or sustain an ICP power alone. At the low power level, the ICP the potential difference between near-wall or edge and the plasma center or bulk can be adjusted. In this way, the plasma diffusion of the SWP or other main plasma can be controlled or re-directed by adjusting this potential difference so that a more uniform plasma can be achieved.
According to further embodiments of the invention, a plasma source is provided having an ICP secondary source powered in the low frequency to mid frequency RF range. In certain embodiments, the ICP source includes an electric dipole coil disposed in the perimeter of the chamber with the centermost windings disposed closest to the center and maintained at a near zero potential at all phases of the RF power. Successive windings are wound progressively outwardly from the centermost windings in opposite directions with the end windings being the outermost windings that are connected to the RF power source. The coil, so provided, results in low capacitive coupling into the chamber.
These and other objectives and advantages of the present invention are set forth in the following detailed description of the drawings in which:



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a simplified schematic representation of a plasma processing system according to an embodiment of the present invention;
FIG. 2 is a simplified schematic representation of a surface wave plasma (SWP) source that can be used for the plasma processing system depicted in FIG. 1 in accordance with one embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of an electromagnetic (EM) wave launcher according to an embodiment of the SWP of FIG. 2;
FIG. 4 provides a bottom view of the EM wave launcher depicted in FIG. 3;
FIG. 5 provides a bottom view of one embodiment of the EM wave launcher depicted in FIG. 3;
FIG. 6 is a schematic cross-sectional view of a portion of the EM wave launcher depicted in FIG. 4;
FIG. 7 is a graph representing one version of a pulsed microwave energy waveform applied to the EM wave launcher of FIG. 4, and the resulting plasma density.
FIG. 8 is a is a simplified schematic representation, similar to FIG. 1, of a plasma processing system according to another embodiment of the present invention;
FIG. 9 is a graph, similar to FIG. 7, representing a version of a pulsed microwave energy waveform applied to the EM wave launcher and the RF energy applied to the ICP antenna of the system of FIG. 8, and the resulting plasma density.
FIG. 10 is a cross-sectional view of a processing system according to certain embodiments of the invention.
FIG. 11 is an enlarged cross-sectional view through the ICP coil portion of the system of FIG. 9.
FIG. 12 is an perspective view, partially cut away, of an eddy groove portion of the processing system of FIG. 9.



DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
A microwave plasma processing method and apparatus are disclosed in various embodiments. However, one skilled in the relevant art will recognize that the various embodiments may be practiced without one or more of the specific details, or with alternative methods, materials, or components. Well-known structures, materials, or operations are not shown or described in detail to avoid obscuring aspects of various embodiments of the invention.
Similarly, for purposes of explanation, specific numbers, materials, and configurations are set forth in order to provide a thorough understanding of the invention. Nevertheless, the invention may be practiced with alternative specific details. Furthermore, the various embodiments shown in the figures are illustrative representations and are not necessarily drawn to scale.
References throughout this specification to “one embodiment” or “an embodiment” or “certain embodiments” or variations thereof means that a particular feature, structure, material, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention, but do not denote that they are present in every embodiment. Thus, the appearances of the phrases such as “in one embodiment” or “in an embodiment” or “in certain embodiments” in various places throughout this specification are not necessarily referring to the same embodiment of the invention. Furthermore, the particular features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments.
Nonetheless, it should be appreciated that, contained within the description are features which, notwithstanding the inventive nature of the general concepts being explained, are also of an inventive nature.
Referring now to the drawings, wherein like reference numerals designate identical or corresponding parts throughout the several embodiments or several views, FIG. 1 illustrates a plasma processing system 10 according to certain embodiments of the invention. The plasma processing system 10 may be, for example, a dry plasma etching system or a plasma enhanced deposition system.
The plasma processing system 10 includes a processing chamber 12 having a chamber wall 11 configured to enclose a process space 13. The processing chamber 12 has therein a substrate holder 14 configured to support a substrate 15 in the process space 13. During operation of the system 10, the substrate 15 is exposed to plasma or process chemistry or both in process space 13. Furthermore, the processing chamber 12 has a plasma source 20 coupled to the processing chamber 12 and configured to energize a plasma in the process space 13. The plasma source 20 of the system 10 is a surface-wave plasma (SWP) source that may include a radial line slot antenna, to be discussed below.
As seen in FIG. 1, the plasma processing system 10 is provided with a gas supply system 16 that is configured to deliver process gas to the processing chamber 12 through a gas inlet port 17, which is coupled to the processing chamber 12 and configured to introduce a process gas to process space 13. In the illustrated embodiment, the system 10 may, for example, be configured to perform a dry plasma etching process on the substrate 15. During dry plasma etching, process gas from the gas supply system 16 typically includes an inert gas and may also include an etchant or a passivant, or a combination thereof. For example, when plasma etching is performed on a dielectric film on the substrate 15, such as, for example, a film of silicon oxide (SiOx) or silicon nitride (SixNy), the plasma etch gas composition generally includes an inert gas, fluorocarbon-based chemistry (CxFy) such as C4F8, C5F8, C3F6, C4F6, CF4, etc., fluorohydrocarbon-based chemistry (CxHyFz) such as of CHF3, CH2F2, etc., oxygen, CO or CO2, or a combination of these. Additionally, for example, when etching polycrystalline silicon (polysilicon), the plasma etch gas composition generally includes a halogen-containing gas such as HBr, Cl2, NF3, or SF6 or a combination of thereof, fluorohydrocarbon-based chemistry, inert gas, oxygen, CO or CO2, or a combination thereof. During plasma enhanced deposition, the process gas may include a film forming precursor, a reduction gas, an inert gas, or a combination thereof.
The plasma processing system 10 also includes a pumping system 18 that is coupled to the processing chamber 12 and configured to evacuate the processing chamber 12 and control the pressure within the processing chamber 12. Optionally, the plasma processing system 10 further includes a control system 19, with an electrical energy supply, coupled to the processing chamber 12, the substrate holder 14, the SWP plasma source 20, the gas supply system 16, and the pumping system 18. The control system 19 can be configured to execute a process recipe for performing an etch process or a deposition process or both on the substrate 15 in the processing chamber 12.
Referring still to FIG. 1, the plasma processing system 10 may be configured to process 200 mm substrates, 300 mm substrates, or larger-sized substrates, and may be configured to process substrates, wafers or LCDs regardless of their size, as would be appreciated by those skilled in the art.
The processing chamber 12 is configured to facilitate the generation of plasma in process space 13 and introduce process chemistry in process space 13 adjacent a surface of the substrate 15. For example, in an etch process, the process gas can include molecular constituents that, when dissociated, are reactive with material being etched on the surface of the substrate 15. Once plasma is formed in the process space 13, heated electrons typically collide with molecules in the process gas causing dissociation and the formation of reactive radicals for performing an etch process, for example.
FIG. 2 is a schematic representation of the plasma source 20 that is in the form of a surface-wave plasma (SWP) source, according to certain embodiments of the invention. The SWP plasma source 20 comprises an electromagnetic (EM) wave launcher 22 configured to couple EM energy in a desired EM wave mode to a plasma in the process space 13 by generating a surface wave on a plasma surface 60 of the EM wave launcher 22. The SWP plasma source 20 comprises a power coupling system 24 coupled to the EM wave launcher 22, and configured to provide the EM energy to the EM wave launcher 22 for forming the plasma.
The EM wave launcher 22 includes a microwave launcher configured to radiate microwave power into process space 13 (FIG. 1). The EM wave launcher 22 is coupled to the power coupling system 24 via coaxial feed 23 through which microwave energy is transferred. The power coupling system 24 includes a microwave source 25, such as, for example, a 2.45 GHz microwave power source. Microwave energy generated by the microwave source 25 is guided through a waveguide 26 to an isolator 27 for absorbing microwave energy reflected back to the microwave source 25. Thereafter, the microwave energy is converted to a coaxial TEM (transverse electromagnetic) mode via a coaxial converter 28. A tuner may be employed for impedance matching, and improved power transfer. The microwave energy is coupled to the EM wave launcher 22 via the coaxial feed 23, wherein another mode change occurs from the TEM mode in the coaxial feed 23. An EM wave is launched from a plasma surface 60 of the EM wave launcher 22 into the process space 13 of FIG. 1. Additional details regarding the design of the coaxial feed 23 and the EM wave launcher 22 can be found in U.S. Pat. No. 5,024,716, entitled “Plasma processing apparatus for etching, ashing, and film-formation”; the content of which is herein incorporated by reference in its entirety.
FIGS. 3 and 4 are a schematic cross-sectional view and a bottom view, respectively, of one embodiment 22a of the EM wave launcher 22 of FIG. 2. The EM wave launcher 22a includes the coaxial feed 23 having an inner conductor 40, an outer conductor 42, and insulator 41, and a slot antenna 46. The slot antenna 46 has a plurality of slots 48 and a second plurality of slots 49 coupled between the inner conductor 40 and the outer conductor 42 as shown in FIG. 3. The pluralities of slots 48 and 49 permit the coupling of EM energy from a first region 45 above the slot antenna 46 to a second region 47 below the slot antenna 46. The EM wave launcher 22a may further comprise a slow wave plate 44, shown occupying the first region 45, and a resonator plate 50 (illustrated as an embodiment thereof 50a), shown occupying the second region 47. The resonator plate 50a has a plasma surface 60a facing the plasma that is formed in the process space 13.
The number, geometry, size, and distribution of the slots 48 and 49 are all factors that can contribute to the spatial uniformity of the plasma formed in process space 13 (see FIG. 1). Thus, the design of the slot antenna 46 may be used to control the spatial uniformity of the plasma in process space 13.
As further shown in FIG. 3, the EM wave launcher 22a may have a fluid channel 56 configured to flow a temperature control fluid for temperature control of the EM wave launcher 22a. Although not shown, the EM wave launcher 22a may further be configured with the gas inlet ports 17 (FIG. 1) therein to introduce process gas through the plasma surface 60a to the plasma in the process space 13.
Referring still to FIG. 3, the EM wave launcher 22a may be coupled to the chamber wall 11 of a processing chamber 12, wherein a vacuum seal can be provided between the chamber wall 11 and the EM wave launcher 22a using a O-ring or other sealing device 54.
In general, the inner conductor 40 and the outer conductor 42 of the coaxial feed 23 are formed of a metal or other electrically conductive material, while the slow wave plate 44 and the resonator plate 50a can be formed of a dielectric material. The slow wave plate 44 and the resonator plate 50a preferably, but not necessarily, are formed of the same material. The material selected for fabrication of the slow wave plate 44 and the resonator plate 50a is chosen to reduce the wavelength of the propagating electromagnetic (EM) wave relative to the corresponding free-space wavelength, and the dimensions of the slow wave plate 44 and the resonator plate 50a are chosen to ensure the formation of a standing wave effective for radiating EM energy into process space 13.
The slow wave plate 44 and the resonator plate 50a may, for example, be fabricated from a silicon-containing material such as quartz (silicon dioxide), or a high-dielectric-constant (high-k) material. For example, the high-k material may have a dielectric constant greater than a value of 4. In particular, when the plasma processing system is utilized for an etch process, quartz is often chosen for compatibility with the etch process.
A high-k material may, for example, include intrinsic crystal silicon, alumina ceramic, aluminum nitride, and sapphire. Moreover, a particular high-k material may be selected in accordance with the parameters of a particular process. For example, when the resonator plate 50a is fabricated from intrinsic crystal silicon, the plasma frequency may exceed 2.45 GHz at a temperature of 45 degrees C. Therefore, intrinsic crystal silicon is appropriate for low temperature processes (i.e., less than 45 degrees C.). For higher temperature processes, the resonator plate 50a can be fabricated from alumina (Al2O3), or sapphire.
Plasma uniformity and plasma stability can be challenges for the practical implementation of a SWP source as described above. For example, plasma instability may result from a standing wave at the resonator plate-plasma interface, i.e., at the plasma surface 60a, that may be prone to mode jumps as plasma parameters shift. This can be controlled by shaping the plasma surface 60a of the resonator plate 50a as discussed in U.S. patent application Ser. No. 12/555,080, filed Sep. 8, 2009, hereby expressly incorporated by reference herein.
For example, as shown in FIGS. 3 and 4, the EM wave launcher 22a is fabricated with a first recess configuration 62a formed in the plasma surface embodiment 60a of the plasma surface 60 of FIG. 2, and a second recess configuration 64a formed in the plasma surface 60a. Recesses in the first recess configuration 62a may be of any of a number of shapes. The plasma surface 60a on resonator plate 50a may be a planar surface 66a within which the first recess configuration 62a and the second recess configuration 64a are formed. Alternatively, the resonator plate 50a comprises an arbitrary geometry. Therein, the plasma surface 60a may comprise a non-planar surface within which the first recess configuration and the second recess configuration are formed.
FIGS. 5 and 6 are a bottom view and a schematic cross-sectional view, respectively, of another embodiment 22b of the EM wave launcher 22 of FIG. 2. The EM wave launcher comprises an embodiment 50b of the resonator plate 50 with an embodiment 60b of the plasma surface 60. The EM wave launcher 22b further comprises slot antenna 46 having the first plurality of slots 48 and optionally the second plurality of slots 49. The first plurality of slots 48 and the second plurality of slots 49 permit the coupling of EM energy from a first region above the slot antenna to a second region below the slot antenna wherein the resonator plate 50b is located.
As shown in FIGS. 5 and 6, the EM wave launcher 22b is fabricated with a first recess configuration 62b formed in the plasma surface 60b and a second recess configuration 64b formed in the plasma surface 60b according to one embodiment.
The first recess configuration 62b may comprise a channel having a trapezoidal or frusto-triangular cross-section. However, the channel in the first recess configuration 62b may comprise an arbitrary geometry including, for example, a cylindrical geometry, a conical geometry, a frusto-conical geometry, a spherical geometry, an aspherical geometry, a rectangular geometry, a pyramidal geometry, or any arbitrary shape. The first recess configuration 62b may comprise a channel characterized by a first size (e.g., latitudinal dimension (or width), and/or longitudinal dimension (or depth)).
The second recess configuration 64b may comprise a plurality of recesses. Each recess in the second recess configuration 64b may comprise a unique indentation or dimple formed within the plasma surface 60b. For example, a recess in the second recess configuration 64b may comprise a cylindrical geometry (as shown), a conical geometry, a frusto-conical geometry, a spherical geometry, an aspherical geometry, a rectangular geometry, a pyramidal geometry, or any arbitrary shape. The second recess configuration 64b may comprise recesses characterized by a second size (e.g., latitudinal dimension (or width), and/or longitudinal dimension (or depth)). The first size of the channel in the first recess configuration 62b may or may not be the same as the second size of the recesses in the second recess configuration 64b. For instance, the second size may be smaller than the first size.
A recess in any one of the recess configurations described in the embodiment of FIGS. 3 and 4 may have any one of the cross-sectional shapes illustrated in FIGS. 5 and 6.
Additionally, as shown in FIGS. 5 and 6, the EM wave launcher 22b may be fabricated with a stepped mating surface having a first mating surface 52 and a second mating surface 53. The stepped mating surface may be configured to couple with the slot antenna. The EM wave launcher 22b may comprise an edge wall extension 57 located near a periphery of the resonator plate 50b and configured to couple with the process chamber wall. Furthermore, the EM wave launcher 22b may comprise an opening 58 and a gas passage 59. The opening 58 may be configured to receive fastening devices for securing a gas line through the inner conductor of the EM wave launcher 22b to the gas passage 59 in resonator plate 50b. Although only one gas passage is shown, additional gas passages may be fabricated in the resonator plate 50b. Moreover, although the shape of the gas passage is straight having a cylindrical cross-section, it may be arbitrary, e.g., helical having an arbitrary cross-section. Any one or more of these features described in FIGS. 5 and 6 may be implemented in the embodiments described in FIGS. 3 and 4.
Using the design criteria set forth in the embodiments described in FIGS. 3 through 6, these embodiments and combinations thereof may be designed to produce stable, uniform plasma for a process window extending from pressures of from 0.1 mTorr to 20 Torr, and more particularly from 2 mTorr to 1 Torr. Powers may be from 0.1 kW to up to 15 kW, but more particularly from 0.5 kW to 5 kW. The electron temperature achieved at the substrate plane may be about 1 eV. The relatively smaller recesses may discharge more readily at relatively high pressure, while the relatively larger recesses may discharge more readily at relatively low pressure. Additionally, the relatively smaller recesses may absorb excess power when the relatively larger recesses saturate. In these configurations, the plasma discharge may stabilize while natural EM modes may lock and/or break up. Thus, a stable discharge may be observed near the EM wave launcher and uniform plasma properties may be observed near the substrate plane within the above identified process window.
Although not shown in the embodiments provided in FIGS. 3 through 6, one or more recesses in a recess configuration may be interconnected. Additionally, one or more recesses of one recess configuration may be interconnected with one or more recesses of another recess configuration. For example, one or more recesses may be interconnected or linked by a groove or channel.
The SWP plasma source 20 of the system 10 described above, particularly the microwave (MW) radial line slot antenna plasma source that employs the EM wave launcher 22 described in connection with FIGS. 3-6, produces a kind of diffusion plasma that can have quiescent low temperature plasma near the substrate processing region through a pure diffusion process. Achieving low mean electron energy, or low electron temperature (Te) in the processing plasma has advantages of reducing wafer damage and producing more negative ions that can further alleviate the charge damage and electron shading effects.
According to certain aspects of the present invention, to further reduce the electron temperature in the wafer region and increase the negative ion population in the plasma, pulsing the MW energy to the radial line slot antenna is provided, as illustrated by the square wave pulses 70 in the graph of FIG. 7. Such pulsed MW energy delivered to the plasma produces a similarly fluctuating electron density or plasma density (ne), illustrated by the curve 71, and corresponding electron temperature (Te), as represented by the curve 72.
More specifically, the application of microwave energy from the EM wave launcher 22 causes the electron temperature (Te) to rise from a background level of, for example,  ̃0.1 eV, to a maximum temperature (Te) of, for example, Te(Max), which would be the average electron temperature that would result when the MW energy is applied constantly. With MW energy applied in accordance with the pulsed waveform 70, the electron temperature (Te) switches between a background temperature of  ̃0.1 eV and Te(Max), resulting in an average electron temperature Te(Avg), as illustrated in FIG. 7.
But while pulsing the MW to the plasma alone has the advantage of lowering electron temperature and increasing negative ion population near the substrate, it has the potential problem of producing a plasma that can become underdense during after-glow, following the energization pulses, while a continuously energized MW plasma would be generally opaque to the microwaves from the radial line slot antenna EM wave launcher 22. This opaqueness normally prevents microwave energy from directly impinging on the substrate 15 where it might damage the wafer. But when the plasma is pulsed, the plasma density drops after a MW pulse is extinguished, so that upon the start of the next pulse, while the plasma density is ramping up, it might be underdense, and the MW from the radial line slot antenna can then penetrate into bulk plasma and reach to substrate. Strong EM energy impinging on the wafer at the pulsing frequency can cause undesirable results during the performance of a real process on the wafer by interfering with the process, or can directly damage the structures on the wafer. Typically, when the plasma density (ne) is less than 108, the plasma is not sufficiently opaque to the MW energy to prevent these undesirable effects. As seen in FIG. 7, this occurs in the interval 73 at the beginning of each MW pulse.
Preventing the undesirable effects of an underdense plasma at the beginning of the MW pulses discussed in connection with FIG. 7 above, according to another aspect of the invention, is achieved by providing the features of the plasma processing system 80 illustrated in FIG. 8. The plasma processing system 80 includes processing chamber 12 having chamber wall 11 that encloses process space 13, with the processing chamber 12 containing the substrate holder 14 configured to support a substrate 15 in the process space 13. Processing chamber 12 also has plasma source 20 at its top that is coupled to the processing chamber 12 to energize plasma in the process space 13, with the plasma source 20 being a surface wave plasma (SWP) source that may include a radial line slot antenna as described in connection with FIGS. 3-6 above.
As seen in FIG. 8, the plasma processing system 80 may also be provided with gas supply system 16, gas inlet port 17, pumping system 18, and a control system 19 (not shown) such as described in connection with FIG. 1.
The plasma source 20 is a surface wave plasma (SWP) source, having an electromagnetic (EM) wave launcher 22 configured to couple EM energy to a plasma in the process space 13 by generating a surface wave on plasma surface 60, as described in connection with FIG. 2. The EM wave launcher 22 is coupled to the power coupling system 24 (FIG. 1) via coaxial feed 23 (not shown in FIG. 1) through which microwave energy is transferred.
But to enable pulsing a MW radial line slot antenna plasma source without encountering the underdense plasma situation during the ramping-up time of MW power-on period while still achieving a lower electron temperature plasma and higher negative ion population, a further aspect of the present invention employs an inductively coupled plasma (ICP) or a helical resonator source 82 in combination with the SWP plasma source 20. The ICP or helical resonator sources 82 includes a single turn or multi-turn coil(s) or a helical resonator antenna 83 that surrounds a dielectric window 84 at the top of the chamber wall 11 adjacent the SWP plasma source 20. An RF energy source 85 is coupled to the coils or helical resonator antenna 83. The RF energy source 85 is controlled to energize an ICP or a helical resonator source adjacent the EM wave launcher 22 that is sufficiently dense during the ramp-up of the microwave energy at the beginning of the MW pulses to render the plasma opaque to the microwaves during the interval 73 at the beginning of each MW pulse 70.
More particularly, in order to avoid MW energy penetration into and through the bulk plasma that will reach the substrate during the start of each active-glow of pulsing MW radial line slot antenna, the RF energy to the ICP source or helical resonator source is pulsed in synchronism with the MW pulses 70, as shown by the ICP or helical resonator source pulses 90 in the graph of FIG. 9. These ICP or helical resonator source pulses 90 are applied at the same frequency as the MW pulses 70 and phased to lead the MW pulses. As a result, the plasma density (ne) adjacent the EM wave launcher 22 rises to greater than 108 prior to the ramping up of the MW pulses 70, as illustrated by the curve 91 in FIG. 9. This produces an electron temperature (Te) as illustrated by the curve 92 in FIG. 9. That is, during the ramping-up time of the MW power-on period, ICP or Helical resonator pulsing brings the plasma density above the density needed to render the plasma opaque to MW radial line slot antenna plasma, which then blocks the MW wave from reaching the wafer surface of the substrate 15 during each MW pulse. Therefore, no underdense plasma situation is encountered when turning on the MW pulses. In this way, MW pulsing frequency is not critical and after-glow time can be extended, which enables the plasma to have very low (Te) to thereby create a higher negative ion population at the substrate 15, and provide all other benefits associated with a low average electron temperature, as explained before.
Another issue associated with diffusion plasma such as a radial line slot antenna plasma or other SWP is that non uniform plasma density at the wafer region has a tendency to occur due to the nature of the diffusion process to concentrate plasma centrally in the processing chamber 12. The addition of the ICP or helical resonator sources 82, on the other hand, produces a plasma that tends to initially form in a ring shape adjacent the coil or helical resonator antenna 83 and dielectric window 84. The edge density can therefore be increased and modulated by the power and duty cycle of ICP/Helical resonator pulsing because the induced field from the coil or helical resonator antenna 83 is stronger at the edge of the processing chamber 12 and much weaker near the center. This adds to the MW plasma producing a plasma from the combined sources having enhanced uniformity. Hence, the ICP or helical resonator source provides an adjustable uniformity control knob for the diffusion MW plasma to achieve a uniform plasma density near wafer surface.
For example, the RF coil or helical resonator antenna 83 in FIG. 9, when added near the side wall of a plasma source, such as an MW RLSA or other SWP source, either externally or internally, can effectively ionize the edge neutral gas and increase the edge plasma density. Meanwhile, the edge radical density and neutral dissociation degree can be also increased by effective dissociation that is induced by the inductive coil or helical resonator antenna due to its electron energy distribution function.
In addition, the added RF inductive coil or helical resonator antenna and power, preferably ranging from 0.5 to 5 kW associated with it, can extend MW SWP to plasma processes at very low pressure, such as less than 10 mT. This is because the energy coupled from an RLSA and an ICP or helical resonator into the plasma, prefers different pressure regions. RLSA can operate more effectively at relatively high pressure but is difficult to discharge at very low pressure. ICP, on the other hand, can easily operate at very low pressure but not very easily at high pressure. Extending the operational pressure window is desired in plasma processing for controlling e.g. etch profiles, thin film deposition rates, and other performance parameters. The combination of RLSA and ICP/Helical resonator plasma would extend the operating pressure window from 0.5 mT up to about 20 Torr, for example, which has been impossible for either RLSA or ICP alone.
Furthermore, the RF coil or helical resonator antenna 83 in FIG. 8, when added near the side wall of a plasma source, such as an MW RLSA or other SWP source in general, can be energized with a very low RF power that will effectively ionize the edge neutral gas and increase the edge plasma density. This low RF power energy can be a continuous wave RF energy as low as several watts, although powers of about 50 watts or up to, but less than 100 watts, may be effective with some system configurations for the processing of 300 millimeter wafers. And for 450 millimeter wafers, the ICP power may scale up to 200-300 watts, but is typically better if lower. In addition, at this low power, potential difference between near-wall or edge and plasma center or bulk can be adjusted. In this way, the plasma diffusion of the SWP or other main plasma can be controlled or re-directed by adjusting this potential difference, so that a more uniform plasma can be achieved. This is because plasma potential of an ICP plasma is typically higher than the plasma potential of an SWP/RLSA plasma. So in the near-wall region, proximate the ICP coil, the plasma potential is maintained higher than in the center of the plasma chamber where SWP/RLSA dominates. The higher plasma potential near the wall decreases the loss of ions to the wall, which is one of the main contributors to the lower plasma density next to the wall, and bad uniformity. Decreased loss of ions results in a higher plasma density near the wall compared to an SWP/RLSA plasma without the ICP. Thus, the higher plasma density near the wall contributes to improving plasma uniformity, and therefore improving processing uniformity. Furthermore, some but not all of the above described advantages can be achieved in some center-dense plasma systems by coupling ICP at powers of even up to 2 or 3 kWatts, which can be suitable for some processes.
As an example of the above, a RF inductive coil such as helical resonator antenna 83 along with an RF energy source 85 can be added near the side wall of a plasma processing chamber having a MW SWP primary source. A small RF power can be inductively coupled with the antenna into the chamber along with the main MW power from an SWP source. This small inductively-coupled power can effectively ionize the neutral gas near the perimeter of the chamber and at the edge of the wafer being processed, increasing the plasma edge density and uniformity at the wafer being processed. The added RF inductively coupled power can extend the MW SWP to plasma processes at very low pressure, such as less than 10 mTorr. Additionally, the combined MW SWP and ICP, along with RF bias power on the wafer, can form a flexible plasma system in which ion energy distribution, electron energy distribution, radical distribution, neutral dissociation degree and other properties of the plasma can be adjusted in wide ranges. This enables the plasma process to achieve large recipe variations, including varying selectivity, etch rate, profile control and other properties.
In addition, ICP edge-enhancing CW energy can be employed in the low to mid frequency kHz to MHz range, which can be achieved with a far less costly RF generator than that used for the more conventional 13.56 MHz frequency. For example, 100 kHz to 2 MHz frequencies may be effectively employed. 400 kHz has been found to be suitable. The antenna for inductively coupling RF energy into the chamber at these frequencies is typically a multiple winding coil that will have higher inductance than that used for 13.56 MHz RF energy, for example, 100 to 300 microhenries.
While a multi turn inductive coil, such as the antenna 83, as illustrated in FIGS. 10 and 11, has been observed to enhance azimuthal uniformity for ICP processes, several difficulties with implementation exist. First, as the number of coil turns or winding increase, efficiency losses are experienced. This degradation in efficiency is linked to undesirable capacitive coupling effects. In a coil with a large number or turns, the impact of capacitive coupling of one turn with respect to adjacent turns, is amplified. This increase in net capacitive coupling diminishes the efficiency of the net induction, and consequently necessitates increased power from the RF energy source 85 to yield acceptable improvements in plasma density uniformity.
One embodiment of the invention resolves this problem by establishing an Electric Dipole Coil (EDC) as the antenna 83. As will be explained in detail below, the EDC's configuration greatly reduces detrimental capacitive coupling, and produces an efficient and highly inductive source. FIG. 10 shows an enlarged view of a portion of an embodiment of the system 10. The EDC version of the antenna 83 is embedded in a perimeter region or antenna receptacle 98, having a channel width 99, of the dielectric window 84. The cross sectional view of the individual windings of the antenna 83 are shown in this figure, and the corresponding second winding cross sectional view, disposed diametrically opposed within the dialectric window, 84 is not shown here.
FIG. 11 depicts two cross sectional winding views, juxtaposed next to each other. The first section 100 corresponds to the detail view of the antenna 83 seen in FIG. 10, while the second section 102 represents the cross sectional view of the winding at the opposite side of the cross sectioned dielectric window 84. The midpoint of a length of insulated conductor is applied tangentially to the dielectric window 94 (or other suitable core) at a first position 104. Each length of the insulated conductor extending from the midpoint at the first position 104 is wrapped around the dielectric window 84. One end is wrapped clockwise with respect to the first position 104 and the other end is wrapped counterclockwise with respect to the first position 104. The lengths of insulated conductor extending from the first position 104 meet in the second section 102 at a second position 106 and a third position 108. Each of the ends of the conductor are wrapped to complete one circumferential path around the dielectric window 84, and the ends of the conductor straddle the first position 104 at a fourth position 110 and fifth position 112.
As is standard convention, the dot in the center of first position 106 denotes that the conductor is pointing out of the page, while the “x” in the center of third position 108 denotes that the conductor is pointing out of the page. The same convention will apply throughout the rest of this discussion. Additionally, a plurality of legend values 110 are included to more clearly depict the path of the conductor. The legend value 114 at the 3 o'clock position denotes the layer 116 number of the wrapping. Likewise, the legend value 114 at the 3 o'clock position denotes the turn number of the current flow. Lastly, the legend value 114 at the 12 o'clock position denotes if the conductor has made a second appearance in a given layer 116. In addition to the conventions noted above, established dipoles are denoted by the pairings of black and white (for example fourth position 110 and fifth position 112 are shown with white and black fill, respectively).
This wrapping procedure is repeated until the ends of the insulated conductor terminate at a sixth position 118 and a seventh position 120. In this example, the antenna 83 is complete after five layers (or windings) 116 and the insulated conductor travels from positions 118 and 120 to the RF energy source 85. The end result of this configuration is as follows. The black and white filled regions of each layer 116 form an electric dipole at all RF phases. The first position 104 (center of the antenna 83) is always at zero volts at all RF phases, and the two sides of the antenna 83, looking from the first position 104, are always at voltages of the opposite sign. Since an electric dipole decreases with distance at a higher order than a monopole, the capacitive coupling of the antenna 83 into the plasma becomes negligible. The antenna 83 therefore acts as an almost purely inductive coupling source. Effective performance exists even in the absence of Faraday shields.
It should be noted that acceptable results may be achieved if each end of the insulated conductor is crossed as wrapping takes place from the first section 100 to the second region (or conversely). For example, with the same first position 104, second position 106, and third position 108, the ends of the insulated conductor could be crossed after leaving the second region 102. Therefore, positions 110 and 112 would be transposed to positions 110a and 112a. Just as in the first winding example, the outer layers 116 have the higher voltage, and the inner layers have the lower voltages (the first position 104 is at zero potential). However, in the crossed implementation the dipole is not clearly established from one layer 116 to the next layer 116 and higher order poles could be established. The crossed conductor implementation may produce satisfactory reduction of capacitive coupling at the expense of increased complexity.
Since the operation of the antenna 83 is inductive, heating of metal components adjacent the dielectric window 84 often results. This inductive heating is caused by eddy currents induced in conducting components of the system 10, and if unchecked, can be detrimental during prolonged operation, and reduce efficiency of the ICP. To reduce the heating impact of such eddy currents, one embodiment of the invention utilizes a plurality of shallow eddy slots or eddy channels in the surfaces of the system 10 near the dielectric window 84 and antenna 83. FIG. 12 shows one example of the eddy channels 130 impressed into horizontal and vertical surfaces of an exemplary flange 132. It has been observed that relatively shallow eddy channels 130, for example 0.030′′, effectively reduce eddy currents in the system 10. Likewise, it has been observed that relatively short eddy channel 130 lengths, for example 1-2′′, are also effective at reducing eddy currents and inductive heating in the system 10. While these dimensions are appropriate for operating frequencies of about 400 kHz, the eddy channel depths and lengths may be adjusted to limit eddy currents at skin depths corresponding to different operating frequencies as well.
Plasma sources other than SWP and RLSA can benefit from uniformity correction by using an ICP as disclosed here. Examples would include hollow cathode sources, and other plasma sources that have a tendency to produce a center-dense plasma.
Although only certain embodiments of this invention have been described in detail above, those skilled in the art will readily appreciate that many modifications are possible in the embodiments without materially departing from the novel teachings and advantages of this invention. Accordingly, all such modifications are intended to be included within the scope of this invention.

## Claims

1. A method of enhancing uniformity of a plasma at a wafer surface without increasing electron temperature of the plasma in the vacuum processing of a substrate, comprising:
supporting a substrate for processing at one end of a vacuum processing chamber with a surface thereof facing a processing space in the vacuum processing chamber;
coupling energy into the processing space within the vacuum processing chamber from a first plasma source at an end of the vacuum processing chamber opposite the substrate and having a tendency to produce a center-dense plasma over the substrate surface; and
inductively coupling, from an antenna of a second plasma source with the antenna extending around the perimeter of the vacuum processing chamber and positioned in a plane extending through the processing space over the surface of the substrate, RF energy at a low power level of less than 100 watts where the substrate has a diameter of 300 millimeters or less and of less than 300 watts where the substrate has a diameter of more than 300 millimeters.

2. The method of claim 1 wherein:
the first plasma source is a surface wave plasma source;
the coupled energy from the surface wave plasma source is microwave energy coupled into the processing space from a radial line slotted antenna of the surface wave plasma source or from any microwave surface wave coupling mechanism.

3. The method of claim 1 wherein:
the first plasma source is a surface wave plasma source;
the coupled energy from the surface wave plasma source is microwave energy coupled into the processing space from a surface wave launcher.

4. The method of claim 1 wherein:
the antenna around the perimeter from which the RF energy is inductively coupled is a multiple winding coil, and the RF energy is inductively coupled therefrom and through a Faraday shield into the chamber at the periphery thereof.

5. The method of claim 1 wherein:
the inductive coupling of RF energy is at the low power level of from 10 watts to 50 watts.

6. The method of claim 1 wherein:
the inductive coupling of RF energy is at the low power level of about 25 watts.

7. The method of claim 1 wherein:
the antenna around the perimeter from which the RF energy is inductively coupled is a multiple winding coil having an innermost central winding maintained at approximately zero potential at all phases, with windings wound in opposite directions on opposite sides thereof and at increasing radii to terminal ends thereof.

8. The method of claim 1 wherein:
the first plasma source is a surface wave plasma source;
the coupled energy from the surface wave plasma source is microwave energy coupled into the processing space from a radial line slotted antenna.

9. The method of claim 1 further comprising:
adjusting the inductive coupling of the RF energy to adjust a potential difference between an edge of the plasma and a center of the plasma so as to reduce center-dense non-uniformity of the plasma over the surface of the substrate.