EXHIBIT 21.1          **SUBSIDIARIES OF NOVELLUS**   Novellus Systems International, Inc. Novellus Systems JapanNovellus Systems Export, Inc. KSP Bldg., R&D C-10F,4000 N. First St. 3-2-1 Sakado, Takatsu-ku, Kawasaki-shiSan Jose, CA 95134 USA Kanagawa-ken 213-0012, JapanT 408.943.9700 T 81.44.850.1500F 408.943.3422 F 81.44.850.1778   Novellus Systems BV Novellus Systems Korea Co. Ltd.European Logistics 2F, DaeWoo Engineering BuildingGanderweg 1 9-3 SuNae-Dong, BunDang-Ku,PO Box 75519 SungNam CityLuchthaven, Schiphol Kyungki-Do, 463-020, KoreaThe Netherlands 1118 ZN T 82.31.738.1114T 31.20.655.6205 F 82.31.714.9921F 31.20.655.6195       Novellus Systems (H.K.) Ltd., TaiwanNovellus Systems SARL 9F, No. 6, Lane 99Parc de la Julienne, Bat. D, 1er etage, Pu-Ting Road91830 Le Coudray Montceaux Hsinchu City, Taiwan 30801 R.O.C.France T 886.3.5730550T 33.1.64.93.7070 F 886.3.5730553F 33.1.64.93.8787     Novellus Systems SARL Novellus Systems SemiconductorParc Technologique des Fontaines Equipment (Shanghai) Co. Ltd.Chemin des Fontaines Unit 10 SOHO Building38190 Bernin 439 Chun Xiao Road, Pudong New Area,France Shanghai 201203, P.R.ChinaT 33.4.76.08.0000 T 86.21.50802056F 33.4.76.08.7667 F 86.21.50802103   Novellus Systems GmbH Novellus Systems InternationalMoritzburger Weg 67, Entrance E 1st Floor Trading (Shanghai) Co. Ltd.01109 Dresden, Rm. 237, No. 2, Tai Zhong South Road,Germany Waigaoqiao Free Trade Zone, Pudong New AreaT 49.351.8838.3200 Shanghai 200131, P.R. ChinaF 49.351.8838.3299 T 86.21.50802056  F 86.21.50802103 Novellus Systems Ireland Ltd. Novellus Singapore Pte LTDMill Street 3 Tampines GrandeMaynooth, County Kildare #09-01 AIA TampinesIreland Singapore 528799T 353.1.629.3270 T 65.6353.9288F 353.1.601.6584 F 65.6353.6833 Novellus Systems Italy Novellus Systems (Malaysia) Sdn. Bhd.Via 16a Strada 48-50 Suite B3-1 Ground FloorZona Industriale Kulim Hi-Tech Park,Piano d’Arci 09000 Kulim95121 Catania, Italy Kedah Darul Amam, MalaysiaT 39.095.592.810 T 604.403.3368  F 604.403.3378F 39.095.592.810       Novellus Systems (India) Pvt. Ltd.Novellus Systems Israel Ltd. Le Parc Richmonde, 2nd Fl.2 Tzoran St. (0-3S) 51 Richmond RoadThe New Industrial Zone Bangalore, India 560025Qiryat-Gat, 82109 T 91.80.22296146T 972.7.666.2743 F 91.80.22296145F 972.7.666.6362  
 

 
   SpeedFam-IPEC, Inc. SpeedFam-IPEC Limited300 N. 56th Street Brindley Road, Dodwells BridgeChandler, Arizona 85226 Industrial EstatesT 480.961.1600 Hinckley LeicestershireF 480.705.2122 LE10 3BY England  T 44.1455.631707  F 44.1455.611360   Peter Wolters Surface Technologies GmbH & Co KG Peter Wolters AktiengesellschaftBüsumer Str. 96 Büsumer Str. 9624768 Rendsburg 24768 RendsburgGermany GermanyT 49.4331.458.0 T 49.4331.458.0F 49.4331.290 F 49.4331.290   Peter Wolters Verwaltungs GmbH Peter Wolters Laepp — and Poliertechnik GmbHBüsumer Str. 96 Benzstr. 1724768 Rendsburg D-70771 Leinfelden-EchterdingenGermany T 49.711.903.632.0T 49.4331.458.0 F 49.711.903F 49.4331.290     Peter Wolters Japan Co. Ltd. RIWO Drahtwerk GmbHTaisho Building Büsumer Str. 9612-28, Esaka-cho 1-chome 24768 RendsburgSuita-shi GermanyOsaka T 49.4331.458.0Japan F 49.4331.290T 81.66.821.7024  F 81.66.821.7031     Peter Wolter UK Ltd. Voumard (UK) Limited.Brindley Road, Dodwells Bridge 15 Connelly CloseIndustrial Estates Plains Estate ArnoldHinckley Leicestershire Nottingham NG5 6RALE10 3BY United KingdomUnited Kingdom T 0044.115.967.0069T 44.1455.63.17.07  F 44.1455.61.13.60   Voumard Machines CO S.A. Voumard IncorporatedRouges-Terres 61 175 Clearbrook Road2068 Hauterive PO BOX 445Switzerland 10523-0445 Elmsford, NY USAT 0041.32727.3333 T 914.345.3000