# Patent

## Title
Method of producing high quality relaxed silicon germanium layers

## Abstract

A method for minimizing particle generation during deposition of a graded Si.sub.1-xGe.sub.x layer on a semiconductor material includes providing a substrate in an atmosphere including a Si precursor and a Ge precursor, wherein the Ge precursor has a decomposition temperature greater than germane, and depositing the graded Si.sub.1-xGe.sub.x layer having a final Ge content of greater than about 0.15 and a particle density of less than about 0.3 particles/cm.sup.2 on the substrate.

## Background
This application is a continuation of U.S. patent application Ser. No. 11/371,442, filed Mar. 9, 2006 and entitled “Method of Producing High Quality Relaxed Silicon Germanium Layers,” which is a continuation of U.S. patent application Ser. No. 10/392,338, filed Mar. 19, 2003 and entitled “Method of Producing High Quality Relaxed Silicon Germanium Layers,” now U.S. Pat. No. 7,041,170, which is a continuation-in-part of U.S. patent application Ser. No. 09/665,139, filed Sep. 19, 2000 and entitled “Method of Producing Relaxed Silicon Germanium Layers,” which claims the benefit of U.S. provisional application Ser. No. 60/154,851 and entitled “Method of Producing High Quality Relaxed Silicon Germanium Layers,” filed Sep. 20, 1999.
TECHNICAL FIELD
This invention relates generally to producing silicon germanium layers and more particularly to producing high quality silicon germanium layers.
BACKGROUND
Conventional techniques for producing relaxed silicon germanium (SiGe) layers on Si substrates typically consist of flowing germane (GeH4) and a silicon precursor, such as silane (SiH4) or dichlorosilane (SiH2Cl2), across a hot semiconductor substrate. When the temperature of these precursors reaches their respective decomposition temperatures, the precursors break down and Si and Ge atoms are free to deposit on the heated substrate. If the substrate is maintained at a sufficiently high temperature, thin-film crystal growth proceeds.
Commercialization of this method to produce relaxed SiGe layers on semiconductor substrates for use in optoelectronic and electronic devices demands an economical process of forming high quality SiGe layers. This means that production costs, such as equipment costs and production time must be minimized, while at the same time, the material properties of the SiGe layers produced must be tailored or optimized for their specific purpose.
Under most conditions, chemical vapor deposition (CVD) processes provide the most economical method of depositing thin layers of crystalline semiconductors. For example, in general, CVD equipment costs are much lower than corresponding equipment costs required to produce the same thin layer product using molecular beam epitaxy (MBE) techniques. Further, high thin-film growth rates can be achieved using CVD. These high growth rates (i.e. greater than 0.1 microns/minute) are essential in producing economical relaxed SiGe materials, since high growth rates reduce deposition time, thereby maximizing production rate and lowering the cost of the product.
While it is important to keep production costs low, it is equally important to produce high quality SiGe layers that possess the appropriate material properties for use in optoelectronic and electronic devices. High quality SiGe films have a low particle defect density (i.e. less than 0.3 particles/cm2) and a low threading dislocation density (i.e. less than 106/cm2). If the produced SiGe layers do not achieve this level of quality, the electronic properties of the layers will not be suitable for use in optoelectronic and electronic devices.
Therefore, commercial production of high quality relaxed SiGe layers depends on the following three criteria:

    
    
        A high growth rate is needed so that deposition time is minimized and production rate is maximized, thereby reducing costs of producing SiGe layers. An increase in growth rate is typically achieved by increasing the substrate temperature and precursor gas concentration.
        The deposited SiGe layer has a low threading dislocation density, so that the deposited SiGe layer is of high quality. A decrease in threading dislocation density is typically achieved by increasing the deposition temperature.
        The deposited SiGe layer has a low particle defect density to produce a high quality SiGe layer. A major source of particle defects during epitaxial deposition is flaking of deposits on a reactor wall. Therefore a decrease in reactor wall coating buildup generally decreases the number of particles that subsequently deposit on the SiGe layers.
    
    


One of the problems encountered when trying to extend conventional research methods of producing SiGe layers to a commercially viable process is that efforts to increase the growth rate and decrease the threading dislocation density also increase the particle defect density. This occurs because an increase in deposition temperature and an increase in precursor concentration leads to particle defects nucleating and depositing on the substrates and to an increase in coating buildup on the reactor walls, which eventually leads to flaking of the coating during growth of the SiGe layers.
This problem is exacerbated by the use of germane gas as a precursor. Germane decomposes at a much lower temperature, 675° C., than its silicon precursor counterpart (i.e. 900° C. for silane gas and 950° C. for dichlorosilane). Thus, any increase in deposition temperature increases the amount of Ge atoms available for deposition and thus increases deposits on reactor walls and particle defects on the substrate. The result of high temperature growth with germane is the formation of a brown or black, partially opaque coating on an inner surface of the reactor. In the case of a typical lamp-heated production CVD reactor, this coating limits the transmission of radiated energy from the lamps through the quartz reactor wall to the substrate. The loss of transmissivity of the reactor, which is typically a quartz tube, causes the inner surface of the reactor to heat to a temperature above 700° C., resulting in further deposits. Eventually, if left unchecked, the temperature of the reactor wall will reach 1000° C., at which point devitrification occurs. Both the reactor coating and devitrification can flake from the reactor walls and deposit on the substrate.
Most applications for relaxed Si1-xGex layers require an atomic Ge content above about 15% (x=0.15). In order to increase the Ge content in the layer, the precursor concentration of germane must be increased, thereby increasing particle defect generation.
Thus, it would be desirable to develop a method of producing relaxed SiGe layers on a semiconductor substrate that minimizes particle defect generation during deposition of SiGe layers, especially for high-Ge-content SiGe layers.
SUMMARY OF THE INVENTION
One solution to this problem is to change the gas chemistry such that deposition on the reactor walls is reduced, especially when producing Si1-xGex layers having a x value greater than 0.15. Thus, it is desirable to use a germanium precursor that decomposes at higher temperature.
Since the main problem in SiGe film growth is the low decomposition temperature of the germane gas, the present invention uses a germanium precursor having a higher decomposition temperature than germane, such as a germanium-halide. In this way, the decomposition temperatures of the precursors can be optimally chosen such that very high growth rates can be achieved at high growth temperatures, yet excessive reactor coating and particle defect introduction can be kept to a minimum.
Germanium halides include germanium-chlorine-containing species such as GeCl4, or GeHCl3, or GeH2Cl2, germanium-fluorine containing species, such as GeF4, as well as germanium-bromine-containing species, such as GeBr4, germanium-iodine-containing species, such as GeI4, and germanium-astatine containing species, such as GeAt4. In addition, any other combinations of these halides with germanium, such as GeClBr3 or more generally a germanium-halide(1)x-halide(2)y, where x+y=4, that have a higher decomposition temperature than germane may be used as a germanium precursor. These precursors can, unlike germane, be used at growth temperatures in excess of 800° C. to grow thick, relaxed SiGe layers without excessive reactor wall coating and particle defect formation. They can be utilized in gaseous form or in liquid form. In the case of a liquid precursor, a hydrogen carrier gas is typically bubbled through the liquid, and vapor from the liquid is carried into the reactor. Thus, typically the precursor will be in gaseous form inside the reactor. The germanium halide precursors can be combined with any of the typical silicon precursors, such as SiH4, SiH2Cl2, SiHCl3, SiHCl4. Another advantage of this approach is that higher growth temperatures lead to lower threading dislocation densities in the relaxed graded layer. Thus, incorporating a different precursor for germanium leads to a lower defect density in the relaxed SiGe layers.
In general, in one aspect, the invention features a method for minimizing particle defect generation during deposition of a graded Si1-xGex layer on a semiconductor material. The method includes providing a substrate in an atmosphere including a Si precursor and a Ge precursor, wherein the Ge precursor has a higher decomposition temperature than germane (e.g., a germanium halide), and depositing a graded Si1-xGex layer having a final Ge content of greater than about 0.15 and a particle density of less than about 0.3 particles/cm2 on the substrate.
Embodiments of this aspect of the invention include depositing the graded Si1-xGex layer at a temperature greater than about 600° C. In some embodiments, the Si1-xGex layer is deposited at a temperature greater than 800° C. In still yet other embodiments, the Si1-xGex layer is deposited at a temperature greater than 1000° C., and is preferably deposited at a temperature of 1100° C. In other embodiments, the graded Si1-xGex layer has a final Ge content of greater than 0.2, i.e. x>0.2. In another embodiment, the final Ge content is substantially equal to 1.0. The deposited Si1-xGex layers formed using the above method are grown with a deposition rate in excess of 0.3 microns/minute and under certain growth conditions, the deposition rate can exceed 3.0 microns/minute. In another embodiment, a low energy plasma, such as that produced by a direct current (DC) arc discharge is utilized in the reactor to enhance the reaction kinetics and hence the growth rate of the Si1-xGex layer. Gases such as Ar or H2 can be used to facilitate the low energy plasma discharge. Low energy plasma rectors useful in carrying out the present invention include the CLUSTERLINE® LEP, manufactured by Unaxis, having corporate headquarters in Pfäffikon, Switzerland.
In another aspect, the invention features a method for minimizing particle defect generation during deposition of a graded Si1-xGex layer on a semiconductor material, wherein the reverse of the deposition or etching reaction removes unwanted deposits from the reactor chamber walls while the decomposition is in progress. The method includes providing a substrate in an atmosphere comprising a Si precursor, a Ge precursor, and an etchant gas. Removal of unwanted deposits on the reactor walls occurs because the halide etchant species (e.g., HCl produced from the decomposition of GeCl4) is introduced as a byproduct of the decomposition of the silicon or germanium halide species. In addition, the hydrogen halides produce much higher etch rates than hydrogen species alone. Alternatively, the etchant gas (e.g., HCl, HBr, HF, or HI or a halide alone Cl2, Br2, F2, or I2) can be co-injected or introduced (i.e. etchant gas is present during at least some part of SiGe deposition) to reduce the accumulation of unwanted deposits on the reactor chamber walls.
In another aspect, the invention features a semiconductor material formed using the method as described above. The semiconductor material can be commercially produced because it is formed at high temperatures and deposition rates and because the material is of high quality, that is it has a defect level of less than about 0.3 particles/cm2 and has a threading dislocation density of less than about 1×106/cm2.
In another aspect, the invention features a method including the steps of providing a substrate in an atmosphere of SiH2Cl2 and GeCl4 and depositing a Si1-xGex layer on the substrate. The deposited Si1-xGex layer has a x value greater than or equal to 0.02 and a particle density of less than about 0.3 particles/cm2.



BRIEF DESCRIPTION OF THE DRAWINGS
The invention, in accordance with preferred and exemplary embodiments, together with further advantages thereof, is more particularly described in the following detailed description, taken in conjunction with the accompanying drawings.
In the drawings, like reference characters generally refer to the same parts throughout the different views. Also, the drawings are not necessarily to scale, emphasis instead generally being placed upon illustrating principles of the invention.
FIG. 1 shows an Arrhenius plot of silicon growth rate versus temperature for SiH4, SiH2Cl2, SiHCl3, and SiCl4.
FIG. 2a shows an Arrhenius plot of normalized germanium growth rate in SiGe versus temperature for GeH4.
FIG. 2b shows a graph of calculated Gibbs free energy of reaction versus temperature for several Si and Ge precursors.
FIG. 2c shows a table of decomposition temperatures for several silicon precursors and germanium precursors.
FIG. 3 shows a schematic view of one embodiment of a reactor used for producing relaxed SiGe layers in accordance with the present invention.
FIG. 4 shows a flow chart of an embodiment of a method for minimizing particle generation during deposition of a graded Si1-xGex layer.
FIG. 5a shows a graph of growth rate of SiGe deposited in a research reactor versus mass ratio of GeCl4 to SiH2Cl2 at 1000° C., 75 torr, and 100 sccm of SiH2Cl2.
FIG. 5b shows a graph of atomic fraction of Ge in SiGe grown in the research reactor versus mass ratio of GeCl4 to SiH2Cl2 at 1000° C., 75 torr, and 100 sccm of SiH2Cl2.
FIG. 6a shows a cross-sectional view of a substrate including a graded Si1-xGex layer formed in accordance with the invention. Disposed on top of the graded Si1-xGex layer is a relaxed SiGe cap layer.
FIG. 6b shows a cross-sectional view of a substrate including a graded Si1-xGex layer formed in accordance with the invention. Disposed on top of the graded Si1-xGex layer is a relaxed SiGe layer, and a thin, strained semiconductor layer of Ge.
FIG. 7 shows a table of achievable Si growth rates and achievable Si0.8Ge0.2 growth rates when GeCl4 is used for the Ge precursor.
FIG. 8 shows a flow chart of an embodiment of a method for minimizing particle generation during deposition of a semiconductor material.



DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
FIG. 1 is a graph showing the growth rate of silicon versus temperature for various silicon precursors, SiH4 102, SiH2Cl2 104, SiHCl3 106, and SiCl4 108. Two distinct growth regimes are evident. For low temperatures, the growth rate has an exponential dependence on temperature, indicating that the growth is reaction rate or kinetically limited. For high temperatures, the growth rate has a weak dependence on temperature, indicating that the growth is mass-transport or diffusion-limited. Epitaxial layers are typically formed in the mass-transport limited-regime to minimize the effects of temperature variations during growth.
In between the two distinct growth regimes shown in FIG. 1 is a transition point 110. The temperature corresponding to the transition point for each precursor 102, 104, 106, and 108 is the decomposition temperature, or the temperature at which the precursor is nearly completely decomposed.
It is well known that as more hydrogen atoms in the SiH4 molecule are replaced with chlorine atoms, the decomposition temperature of the precursor increases. This effect is reflected in the shift of the reaction-limited regime to higher temperatures for precursors with increasing chlorine content. For example, the mass-transport-limited growth regime of SiCl4 108 is shifted over 200° C. toward a higher temperature compared to that of SiH4 102. As a result, epitaxial films can be grown with SiCl4 at much higher temperatures than with SiH4 while avoiding the effects of particle defect formation and reactor wall coating. Additionally, extremely high growth rates can be achieved at higher temperatures using these chlorine-based precursor chemistries.
It is also known for silicon precursors that as the pressure at which deposition is carried out is changed from atmospheric to reduced pressure, chamber coating tends to increase. This is supported by the chemical equations for decomposition reactions, which have a larger number of moles of gaseous product than of reactants. This characteristic of the decomposition reactions (larger volume of reactants than products) favors the forward reaction, i.e. formation reaction, at lower pressure. Thus the decomposition temperature of the precursors will generally be lower at reduced pressures, a characteristic that can be extended to the germanium precursors as well. For this reason, atmospheric pressure deposition may be preferred to reduce chamber coating.
Since the main problem with conventional techniques of depositing SiGe layers is the low decomposition temperature of the germane gas, the present invention uses any germanium precursor that has a higher decomposition temperature than germane, such as a germanium-halide precursor. As in the silicon system, chlorogermanes and other germanium halides can be used to extend growth temperatures to more than 200° C. over germane, GeH4, growth temperatures without increasing particle defect deposition.
FIG. 2a shows a graph of temperature versus normalized growth rate of Ge in SiGe for a conventional Ge precursor, GeH4 202. Using FIG. 2a, FIG. 2b, a graph of calculated Gibbs free energy of reaction versus temperature for several Si and Ge precursors, and FIG. 1, which shows that the decomposition temperature increases with increasing the chlorine (halide) content, it is expected that the decomposition temperature of any germanium halide precursor will be significantly higher than germane, GeH4. For example, FIG. 1 shows that the decomposition temperature, the temperature corresponding to the transition point 110, of SiH4 102 is 900° C., the decomposition temperature for SiH2Cl2 104 is 950° C., and the decomposition temperature of SiCl4 108 is 1150° C. FIG. 2b shows that the calculated Gibbs free energy curve for SiCl4 204 is greater than a calculated Gibbs free energy curve for SiH2Cl2 206, which is greater than a calculated Gibbs free energy curve for SiH4 208. Thus, it is expected that Ge precursors will follow the same trends as the Si precursors and that Ge precursors that have a calculated Gibbs free energy curve that is greater than the calculated Gibbs free energy curve for GeH4 will also have a greater decomposition temperature than GeH4.
As shown in FIG. 2a, germane, GeH4 210, has the lowest Gibbs free energy of reaction indicating that it decomposes at the lowest temperature of all of the Ge precursors shown. GeCl4 212, GeBr4 214, GeF4 216, and GeI4 218 have much higher decomposition temperatures than GeH4 210. Thus, when high purity sources of these germanium halides are used as the Ge precursor, SiGe growth can occur with minimal reactor coating at temperatures above 600° C. In this way, the decomposition temperatures of precursors can be optimally chosen such that very high growth rates can be achieved at high temperatures. For example, selecting a Si precursor and a Ge precursor that both have a decomposition temperature above about 900° C. can minimize particle defect generation. If both selected Si and Ge precursor gases decompose at about the same high temperature then most of the free Si and Ge atoms should react and form epitaxial Si1-xGex layers on the heated substrate. Otherwise, if the decomposition temperatures of the selected precursors are not within the same range, i.e. ±200° C., then the free atoms of the precursor that decomposes at a lower temperature will begin to rapidly deposit on surfaces, such as reactor walls and substrates, as particle defects prior to the decomposition of the other precursor.
FIG. 2c illustrates estimated decomposition temperatures for various Si precursors and Ge precursors. The most readily available germanium halide precursor is germanium tetrachloride, GeCl4. This precursor, unlike germane, GeH4, can be used at growth temperatures in excess of 800° C. to grow thick, relaxed Si1-xGex layers without excessive reactor coating and particle defect formation. It can be combined with any of the Si precursors, such as SiH4, SiH2Cl2, SiHCl3, and SiCl4 to form high quality SiGe layers. However, it is noted that in a preferred embodiment of the invention a combination of SiH2Cl2 and GeCl4 is used, since the decomposition temperatures for these gases are within 25° C. of each other.
In the present invention, a CVD reactor 300, as shown in FIG. 3, is used to produce the relaxed SiGe layers on semiconductor substrates. The CVD reactor 300 includes a quartz tube 302, a heat source 304, a precursor gas inlet 306, a susceptor 308, and in some embodiments a vacuum pump 310 (shown in phantom view). To produce relaxed SiGe layers on a semiconductor material, a silicon substrate 311 is positioned on the susceptor 308. Next, the vacuum pump can be activated to continuously evacuate the gases within the quartz tube 302 and to maintain a constant pressure (760 torr to 0.010 torr) within the reactor 300 during deposition. Then the heat source 304, which typically comprises multiple tungsten-halogen lamps, is activated so that the temperature of the Si substrate is increased to deposition temperature (600° C.-1200° C.). Once the Si substrate 311 has reached the specified deposition temperature, a Si precursor 312 and a Ge precursor 314 having a decomposition temperature greater than germane (e.g., a germanium halide precursor) enter the reactor 300 through the gas inlet 306. The concentration of the precursors is typically controlled through mass-flow controllers connected to the precursor tanks These precursors 312, 314 flow over the heated silicon substrate 311 and deposit thereon. A Ge content, x, of the Si1-xGex layer is controlled by the relative concentration of the Si and Ge precursors. In some embodiments, a SiGe layer having a uniform content of Ge throughout is deposited on the silicon substrate. For example, a layer of material having a uniform concentration of Si0.98Ge0.02 can be deposited on the Si substrate 311. In other embodiments, multiple Si1-xGex layers each having a successively greater Ge, x, content may be deposited on the silicon substrate to form a graded layer. Alternatively, the graded layer Ge content profile may be substantially linear (i.e. no individual layers are evident within the profile.) By increasing the Ge content gradually, the strain due to lattice mismatch between Si and Ge is relieved, thereby minimizing threading dislocation density in the deposited relaxed SiGe layer. Typically, the Ge content of the graded Si1-xGex layer is increased at a rate of less than about 25% Ge per micron. However, in some embodiments the increase may be greater than 25% Ge per micron. In either embodiment, due to the high processing temperatures available in the present invention, the density of threading dislocation intersecting the top surface of the Si1-xGex layer is less than about 1×106/cm2.
For graded Si1-xGex layers deposited using this method, a final Ge content, i.e. the Ge content of the final layer deposited, will exceed 15% and in some embodiments the final Ge content will exceed 20%. In other embodiments, the Ge content may approach 100%.
FIG. 4 shows a flow chart of one embodiment of the method of the invention. Specifically, a method 400 for minimizing particle generation particle generation during deposition of a graded Si1-xGex layer on a semiconductor material within a reactor, such as the reactor 300 shown in FIG. 3, includes at least two steps. First, as shown in step 402, a substrate is placed within an atmosphere including both a Si precursor and a Ge precursor. The Ge precursor is any germanium source that has a decomposition temperature higher than that of germane. In general, germanium halides, such as, for example, GeCl4, GeHCl3, GeH2Cl2, GeBr4, GeI4, GeF4, and GeAt4, have a decomposition temperature higher than the decomposition temperature of germane. The Si precursor is typically selected from the group consisting of SiHCl3, SiH2Cl2, SiCl4, and SiH4. However, any Si-based precursor that has a decomposition temperature above about 700° C. may be selected as a Si precursor, possibly including other silicon-halide compounds.
Next, as shown in step 404, a graded Si1-xGex layer having a final Ge content of greater than about 15% (i.e. x>0.15) and a particle defect density less than about 0.3 particles/cm2 is deposited on the substrate. The low particle defect density and high final Ge content of the Si1-xGex layer results because the method 400 takes advantage of using a germanium halide for the Ge precursor and matching the decomposition temperature of the selected germanium halide to a particular Si precursor. For example, with reference to FIGS. 1 and 2, the graded Si1-xGex layer may be deposited in reactor 300 using a combination of SiH4 and GeH2Cl2 at a temperature above about 600° C., and more preferably at a temperature above about 800° C. At these temperatures, a low energy plasma can be used to aid the cracking of the precursors and to give higher growth rates at a lower temperature.
In another embodiment of the graded Si1-xGex layer, the selected Si and Ge precursors are SiH2Cl2 and GeCl4. In this embodiment, the deposition occurs at a temperature greater than about 1000° C., and preferably at a temperature between 1050° C. and 1100° C. The SiH2Cl2 is introduced into the reactor 300 at a constant flow rate of about 100 sccm or greater. The GeCl4 is introduced into the reactor using a hydrogen carrier gas at an incremental flow rate increased from 0 to 250 sccm to produce a graded Si1-xGex layer having a final Ge content of about 20%, i.e. x=0.2. In some embodiments the GeCl4 is introduced into the reactor using a hydrogen carrier gas at an incremental flow rate increased from 0 to 350 sccm to produce a graded Si1-xGex layer having a final Ge content of about 30%, i.e. x=0.3.
In another embodiment, the deposition process is performed at atmospheric pressure for the purpose of reducing reactor chamber wall deposits to a lower level. This is done to take advantage of the reduced tendency of the silicon and germanium precursors to decompose at higher pressure.
Referring to FIGS. 5a and 5b, experimentation in a research reactor system at 1000° C. and 75 torr, shows that the growth rate of the SiGe layer increases with increasing a mass ratio of GeCl4 to SiH2Cl2 to a growth rate of about 0.25 microns/minute with a Ge atomic fraction of about 0.3. Since state of the art reactor systems typically achieve greater growth rates than research reactor systems, it is believed that deposition of SiGe layers from SiH2Cl2 and GeCl4 at this temperature (1000° C.), pressure (75 torr) in a state of the art reactor system will be at a growth rate greater than 0.25 microns/minute.
FIG. 6a shows a cross-sectional view of the silicon substrate 311 including a graded Si1-xGex layer 520 formed in accordance with the invention. Disposed on top of the graded Si1-xGex layer 520 is a substantially relaxed Si1-yGey layer 522. The layer 522 shown in this embodiment has a Ge content, y, that is approximately equal to the final Ge content of the graded Si1-xGex layer. Generally, the relaxed Si1-xGex layers and the Si1-yGey layers produced in accordance with the invention are smooth and have a surface roughness of less than 5 nm for a 40×40 micron atomic force microscopy scan. In an additional embodiment, shown in FIG. 6b, a thin, strained semiconductor 524 layer of Ge may be disposed above the substantially relaxed Si1-yGey layer. Alternatively, this layer 524 may be formed from Si or SiGe.
The ability to deposit films at high temperatures using a germanium halide gas, such as GeCl4, results in a lower particle defect density within the deposited relaxed Si1-xGex layer than for Si1-xGex layers formed at the same temperatures using conventional methods. For example, relaxed Si1-xGex layers formed in accordance with the present invention and at a temperature of about 1000° C. have a particle defect level of less than about 0.3 particles/cm2, whereas Si1-xGex layers formed using conventional research techniques (i.e. GeH4 gas used and a final Ge content below about 15%) have a particle defect density of 0.6 to 2 particles/cm2, or higher. Further, relaxed Si1-xGex layers produced in accordance with the present invention typically have a localized light-scattering defect level of less than about 0.3 defects/cm2 for particle defects having a size (diameter) greater than 0.13 microns, a defect level of about 0.2 defects/cm2 for particle defects having a size greater than 0.16 microns, a defect level of about 0.1 defects/cm2 for particle defects having a size greater than 0.2 microns, and a defect level of about 0.03 defects/cm2 for defects having a size greater than 1 micron. It is believed that process optimization will enable reduction of the localized light-scattering defect levels to about 0.09 defects/cm2 for particle defects having a size greater than 0.09 microns and to 0.05 defects/cm2 for particle defects having a size greater than 0.12 microns.
Thus, by using a Ge precursor with a decomposition temperature higher than that of germane (e.g., a germanium halide precursor), Si1-xGex layers may be produced at higher temperatures while maintaining a high quality level, i.e. particle defect density less than 0.3 particle defects/cm2, even at high Ge contents, e.g., x>0.15. Moreover, since deposition can occur at temperatures above 1000° C., growth rates greater than 0.1 microns/minute are achievable. For example, FIG. 7 shows a table of achievable Si growth rates and corresponding estimated achievable Si0.8Ge0.2 growth rates for deposition processes using GeCl4 and various silicon precursors. The estimated achievable SiGe growth rates are calculated using the lower value calculated from the following two equations, in which R is the growth rate and F is the atomic fraction:

RSiGe≈FGe*RGe+FSi*RSi   Equation 1

RSiGe≈RGe/FGe   Equation 2

Reported values of the growth rate for Si (RSi) for various Si precursors is shown in the second column of FIG. 7. The growth rate (RGe) of GeCl4 is estimated to be 0.75 microns/minute, a value based on a comparison of the decomposition temperature and resulting growth rates for SiH4 and SiH2Cl2. As shown in FIG. 7, an achievable growth rate for the combination of SiH2Cl2 and GeCl4 is 1.1 micron/minute and is 3.8 microns/minute for the combination of SiHCl3 and GeCl4. Both of these achievable growth rates allow production times to be drastically cut.

Production time in the present invention is further reduced due to the decrease in particles depositing and coating the reactor walls. Typically, once the coating on the reactor 300 reaches a thickness greater than 1 micron, the transmissivity of the quartz tube 302 will deteriorate quickly, resulting in an increase in temperature and ultimately in devitrification. To prevent contaminants from flaking off of the quartz tube 302 and landing on the depositing Si1-xGex layers 520, the quartz tube 302 is cleaned to remove the coating once the coating reaches a thickness of 1 micron or more. Since the invention limits the amount of reactor coating by increasing the decomposition temperature of the Ge precursor (germanium halide) to near that of the Si precursor, the coating takes longer to grow on the walls, e.g., 175 hours of deposition time, and thus less time is lost to cleaning the quartz tube 302. An additional source of coating minimization may arise from etching action arising from the halogen component of the Ge precursor.
Because hydrogen-halide and halide gases etch silicon at a significantly higher rate than hydrogen, these gases (primarily HCl) are typically used to etch coatings from quartz reactor walls. In the same way, halogen-containing byproducts of the SiGe deposition will aid this etching action. Thus in another aspect of this invention, the etching reduces the accumulation of unwanted deposits on the quartz walls while deposition is being done in the reactor. This can occur because the halide etchant species (e.g., HCl produced from the decomposition of GeCl4) is introduced as a byproduct of the decomposition of the silicon or germanium halide species. In another embodiment of this invention, the etchant gas (e.g., HCl, HBr, HF, or HI or a halide alone Cl2, Br2, F2, or I2) can be co-injected or introduced to reduce the accumulation of unwanted deposits on the reactor chamber walls, i.e., the quartz tube 302. For example, HCl can be co-injected into the reactor along with the Si and Ge precursors at a flow rate of less than or equal to 2 slm (standard liters per minute). In a preferred embodiment, HCl is co-injected into the reactor at a rate of less than or equal to 0.5 slm. Also, co-injection of the etchant gas can even be used to reduce reactor wall deposits when germane gas is used as the Ge precursor because the etchant gas, which includes a halide source, can reduce the accumulation of unwanted deposits at a higher rate than hydrogen. Co-injection can be more effective at introducing the etchant gas to the walls of the reactor than by introducing the etchant gas by reaction of the Si and Ge precursors, because delivery of the co-injected gases can be controlled. If the etchant gas is produced solely as a byproduct of deposition, it must diffuse from the susceptor 308 to the walls of the reactor 302 to etch the deposits. One helpful aspect of this process is that the Gibbs free energy of the etching reactions is much less temperature dependent than the deposition process so that the etch rate at the walls stays high even though the temperature at the wall is significantly lower than the temperature at the susceptor 308.
The invention can be further optimized to produce the highest quality relaxed Si1-xGex layers. For example, in one embodiment, the susceptor 308 can be rotated during deposition to compensate for depletion of a precursor and to produce a uniform deposition of Si1-xGex over the entire substrate 311.
Referring to FIG. 8, our invention also provides a method 700 for depositing a Si1-xGex layer having a uniform Ge content and a low particle defect density. Specifically, method 700 includes two steps, 702 and 704. First, as according to step 702, a substrate is positioned within a reactor having an atmosphere of SiH2Cl2 and GeCl4. Then, as shown in step 704, the Si1-xGex layer is deposited on the substrate. The deposited Si1-xGex layer has an x value of at least 0.02 and a particle defect density of less than about 0.3 particles/cm2. The low particle defect density observed in Si1-xGex layers deposited using method 700 is a result of using Si and Ge precursors that have a decomposition temperatures above about 700° C. and that are optimally matched, i.e. have a decomposition temperatures within ±25° C. of each other.
Using method 700, a uniform Si1-xGex layer having a particle defect density of less than 0.3 particles/cm2 can be deposited on substrates. For example, a Si0.98Ge0.02 layer may be formed on a Si wafer by introducing SiH2Cl2 gas into reactor 300 at a flow rate of about 100 sccm and GeCl4 gas within a hydrogen carrier gas at a constant flow rate of 25 sccm. The Si0.98Ge0.02 layer deposits at a temperature above about 600° C., and preferably at a temperature of 1100° C.
While the invention has been particularly shown and described with reference to specific preferred embodiments, it should be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

## Claims

1. A method of producing a relaxed silicon germanium layer, the method comprising:
placing a substrate in a chamber;
creating in the chamber an atmosphere having a Si precursor and a Ge precursor, wherein the Ge precursor has a higher decomposition temperature than germane; and
depositing a film on the substrate, the film comprising Si1-xGex and having a final Ge content wherein x is greater than about 0.15 and a particle density of less than about 0.3 particles/cm2.

2. The method of claim 1, wherein a concentration of the Si precursor and a concentration of the Ge precursor each remain constant, and wherein the film has a uniform Ge content.

3. The method of claim 1, wherein at least one of a concentration of the Si precursor and a concentration of the Ge precursor is increased, and wherein the film is a graded film.

4. The method of claim 3, wherein the concentration of the Ge precursor is increased.

5. The method of claim 3, wherein the at least one of the concentration of the Si precursor and the concentration of the Ge precursor is increased linearly, and wherein the graded film has a linear grade.

6. The method of claim 3, wherein the at least one of the concentration of the Si precursor and the concentration of the Ge precursor is increased discretely, and wherein the graded film has a step grade.

7. The method of claim 1, wherein the Ge precursor comprises at least one of GeC14, GeHCl3, GeH2Cl2, GeBr4, GeI4, GeF4, and GeAt4.

8. The method of claim 1, wherein the Si precursor comprises at least one of SiHCl3, SiH2Cl2, SiCl4, and SiH4.

9. A method for forming silicon germanium, the method comprising:
providing a germanium halide precursor and a silicon precursor in an atmosphere having a first temperature, wherein the germanium halide precursor and the silicon precursor decompose at the first temperature to form a decomposed germanium halide precursor and a decomposed silicon precursor; and
reacting germanium from the decomposed germanium halide precursor and silicon from the decomposed silicon precursor thereby forming a silicon germanium film, the silicon germanium film having a particle defect density of 0.3 particles/cm2 or less.

10. The method of claim 9, wherein the silicon germanium film has a uniform concentration of germanium.

11. The method of claim 9 further comprising increasing the germanium halide precursor content in the atmosphere, and wherein the silicon germanium film comprises a graded concentration of germanium.

12. The method of claim 11, wherein a final germanium concentration is greater than about 15 percent.

13. The method of claim 9 further comprising reacting a first byproduct of the decomposed germanium halide precursor and a second byproduct of the decomposed silicon precursor thereby forming a hydrogen halide in the atmosphere.

14. The method of claim 9, wherein the first temperature is equal to or greater than 600° C.

15. A method of forming silicon germanium, the method comprising:
providing a silicon precursor and a germanium precursor in an atmosphere, the silicon precursor having a first decomposition temperature, the germanium precursor having a second decomposition temperature, the first decomposition temperature being within 200° C. of the second decomposition temperature; and
forming a silicon-germanium layer on a substrate in the atmosphere, the silicon germanium layer having a particle defect density of 0.3 particles/cm2 or less.

16. The method of claim 15 further comprising providing an etchant gas in the atmosphere.

17. The method of claim 16, wherein the etchant gas is formed at least in part by reacting byproducts of the silicon precursor and byproducts of the germanium precursor.

18. The method of claim 16, wherein the etchant gas comprises at least one of HCl, HBr, HF, HI, Cl2, Br2, F2, and I2.

19. The method of claim 15, wherein the first decomposition temperature is within 100° C. of the second decomposition temperature.

20. The method of claim 15, wherein the first decomposition temperature is within 25° C. of the second decomposition temperature.