EXHIBIT 21.1

SUBSIDIARIES OF NOVELLUS

Novellus Systems International, Inc.
    
    Novellus Systems JapanNovellus Systems Export, Inc.
    
    KSP Bldg., R&D C-10F,4000 N. First St.
    
    3-2-1 Sakado, Takatsu-ku, Kawasaki-shiSan Jose, CA 95134 USA
    
    Kanagawa-ken 213-0012, JapanT 408.943.9700
    
    T 81.44.850.1500F 408.943.3422
    
    F 81.44.850.1778Novellus Systems BV
    
    Novellus Systems Korea Co. Ltd.European Logistics
    
    2F, DaeWoo Engineering BuildingGanderweg 1
    
    9-3 SuNae-Dong, BunDang-Ku,PO Box 75519
    
    SungNam CityLuchthaven, Schiphol
    
    Kyungki-Do, 463-020, KoreaThe Netherlands 1118 ZN
    
    T 82.31.738.1114T 31.20.655.6205
    
    F 82.31.714.9921F 31.20.655.6195Novellus Systems (H.K.) Ltd., TaiwanNovellus Systems SARL
    
    9F, No. 6, Lane 99Parc de la Julienne, Bat. D, 1er etage,
    
    Pu-Ting Road91830 Le Coudray Montceaux
    
    Hsinchu City, Taiwan 30801 R.O.C.France
    
    T 886.3.5730550T 33.1.64.93.7070
    
    F 886.3.5730553F 33.1.64.93.8787Novellus Systems SARL
    
    Novellus Systems SemiconductorParc Technologique des Fontaines
    
    Equipment (Shanghai) Co. Ltd.Chemin des Fontaines
    
    Unit 10 SOHO Building38190 Bernin
    
    439 Chun Xiao Road, Pudong New Area,France
    
    Shanghai 201203, P.R.ChinaT 33.4.76.08.0000
    
    T 86.21.50802056F 33.4.76.08.7667
    
    F 86.21.50802103Novellus Systems GmbH
    
    Novellus Systems InternationalMoritzburger Weg 67, Entrance E 1st Floor
    
    Trading (Shanghai) Co. Ltd.01109 Dresden,
    
    Rm. 237, No. 2, Tai Zhong South Road,Germany
    
    Waigaoqiao Free Trade Zone, Pudong New AreaT 49.351.8838.3200
    
    Shanghai 200131, P.R. ChinaF 49.351.8838.3299
    
    T 86.21.50802056F 86.21.50802103Novellus Systems Ireland Ltd.
    
    Novellus Singapore Pte. Ltd.Mill Street
    
    3 Tampines Grande, #09-01Maynooth, County Kildare
    
    AIA TampinesIreland
    
    Singapore 528799T 353.1.629.3270
    
    T 65.6.353.9288F 353.1.601.6584
    
    F 65.6.353.6833




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Novellus Systems Italy
    
    Novellus Systems (Malaysia) Sdn. Bhd.Via 16a Strada 48-50
    
    Suite B3-1 Ground FloorZona Industriale
    
    Kulim Hi-Tech Park,Piano dArci
    
    09000 Kulim95121 Catania, Italy
    
    Kedah Darul Amam, MalaysiaT 39.095.592.810
    
    T 604.403.3368F 39.095.592.810
    
    F 604.403.3378Novellus Systems Israel Ltd.
    
    Novellus Systems (India) Pvt. Ltd.2 Tzoran St. (0-3S)
    
    Le Parc Richmonde, 2nd Fl.The New Industrial Zone
    
    51 Richmond RoadQiryat-Gat, 82109
    
    Bangalore, India 560025T 972.7.666.2743
    
    T 91.80.22296146F 972.7.666.6362
    
    F 91.80.22296145SpeedFam-IPEC, Inc.
    
    SpeedFam-IPEC Limited300 N. 56th Street
    
    Brindley Road, Dodwells BridgeChandler, Arizona 85226
    
    Industrial EstatesT 480.961.1600
    
    Hinckley LeicestershireF 480.705.2122
    
    LE10 3BY EnglandT 44.1455.631707F 44.1455.611360Peter Wolters Surface Technologies GmbH & Co KG
    
    Peter Wolters AktiengesellschaftBüsumer Str. 96
    
    Büsumer Str. 9624768 Rendsburg
    
    24768 RendsburgGermany
    
    GermanyT 49.4331.458.0
    
    T 49.4331.458.0F 49.4331.290
    
    F 49.4331.290Peter Wolters Verwaltungs GmbH
    
    Peter Wolters Laepp - und Poliertechnik GmbHBüsumer
        Str. 96
    
    Benzstr. 1724768 Rendsburg
    
    D-70771 Leinfelden-EchterdingenGermany
    
    T 49.711.903.632.0T 49.4331.458.0
    
    F 49.711.903F 49.4331.290Peter Wolters Japan Co. Ltd.
    
    RIWO Drahtwerk GmbHTaisho Building
    
    Büsumer Str. 9612-28, Esaka-cho 1-chome
    
    24768 RendsburgSuita-shi
    
    GermanyOsaka
    
    T 49.4331.458.0Japan
    
    F 49.4331.290T 81.66.821.7024F 81.66.821.7031
    
    Peter Wolters of America Inc.P.O. Box 1585Peter Wolters UK Ltd.
    
    14 High StreetBrindley Road, Dodwells Bridge
    
    Plainville, Massachusetts 02762Industrial Estates
    
    USAHinckley Leicestershire
    
    T 1.508.695.7151LE10 3BY
    
    F 1.508.695.7154United KingdomT 44.1455.63.17.07F 44.1455.61.13.60
    
    Peter Wolters Asia Pte LtdNo. 160 Paya Lebar Road# 05-05/06 Orion Industrial BuildingSingapore 409022Singapore