Exhibit 21.1

SUBSIDIARIES OF NOVELLUS SYSTEMS, INC. (a California corporation)



|                                                           |  |                          
|---------------------------------------------------------- |  | -------------------------
|Name                                                       |  | Jurisdiction             
|Novellus Systems Export, Inc.                              |  | Barbados                 
|GaSonics World Trade Inc.                                  |  | Barbados                 
|Novellus Systems International, LLC                        |  | California, United States
|Angstron Systems, Inc.                                     |  | California, United States
|Gamma Precision Technology                                 |  | California, United States
|Simation                                                   |  | Canada                   
|Novellus Systems International Holdings Ltd.               |  | Cayman Islands           
|Novellus Systems Semiconductor Equipment Shanghai Co. Ltd. |  | China                    
|Novellus Systems International Trading (Shanghai) Co. Ltd. |  | China                    
|Novellus Systems International Holdco, Inc.                |  | Delaware, United States  
|SpeedFam-IPEC International Services, LLC                  |  | Delaware, United States  
|Tmation Inc.                                               |  | Delaware, United States  
|Novellus Development Company, LLC                          |  | Delaware, United States  
|Novellus Systems SARL                                      |  | France                   
|Novellus Systems GmbH                                      |  | Germany                  
|Peter Wolters Verwaltungs GmbH                             |  | Germany                  
|NHL Sub GmbH                                               |  | Germany                  
|Peter Wolters GmbH                                         |  | Germany                  
|Novellus Systems (H.K.) Limited                            |  | Hong Kong                
|Peter Wolters of America, Inc.                             |  | Illinois, United States  
|Novellus Systems (India) Pvt. Ltd.                         |  | India                    
|Novellus Systems Ireland Ltd.                              |  | Ireland                  
|GaSonics Ireland Ltd.                                      |  | Ireland                  
|Novellus Systems Israel Ltd.                               |  | Israel                   
|GaSonics Israel Ltd.                                       |  | Israel                   
|Novellus Systems Italy SRL                                 |  | Italy                    
|Peter Wolters Japan Co., Ltd.                              |  | Japan                    
|Novellus Systems Japan, G.K.                               |  | Japan                    
|SpeedFam IPEC (Malaysia) Sdn. Bhd.                         |  | Malaysia                 
|Novellus Systems (Malaysia) Sdn. Bhd.                      |  | Malaysia                 
|Novellus Systems BV                                        |  | Netherlands              
|Novellus Systems International BV                          |  | Netherlands              
|Voumard, Inc.                                              |  | New York, United States  
|Novellus Korea LLC                                         |  | Republic of South Korea  
|Novellus Systems International BV, Singapore Branch        |  | Singapore                
|Novellus Singapore Pte. Ltd.                               |  | Singapore                
|Novellus Singapore Holdings Pte. Ltd.                      |  | Singapore                
|Novellus Systems (Schweiz) Holding GmbH                    |  | Switzerland              
|Voumard Machines Co SARL                                   |  | Switzerland              
|Novellus Systems (H.K.) Limited, Taiwan Branch             |  | Taiwan                   
|Voumard Limited                                            |  | United Kingdom           
|Peter Wolters UK Ltd.                                      |  | United Kingdom           
|Novellus Systems UK Limited                                |  | United Kingdom           
|Peter Wolters Project UK Limited                           |  | United Kingdom           
|Novellus Vietnam LLC                                       |  | Vietnam