Exhibit 21.1

SUBSIDIARIES OF NOVELLUS SYSTEMS, INC. (a California corporation)



|                                                            |  |                          
|----------------------------------------------------------- |  | -------------------------
|Name                                                        |  | Jurisdiction             
|Novellus Systems Export, Inc.                               |  | Barbados                 
|GaSonics World Trade Inc.                                   |  | Barbados                 
|Novellus Systems International, LLC                         |  | California, United States
|Angstron Systems, Inc.                                      |  | California, United States
|Gamma Precision Technology                                  |  | California, United States
|Simation                                                    |  | Canada                   
|Novellus Systems International Holdings Ltd.                |  | Cayman Islands           
|Novellus Systems Semiconductor Equipment Shanghai Co. Ltd.  |  | China                    
|Novellus Systems International Trading (Shanghai) Co. Ltd.  |  | China                    
|Novellus International Holdco, Inc.                         |  | Delaware, United States  
|SpeedFam-IPEC International Services, LLC                   |  | Delaware, United States  
|Tmation Inc.                                                |  | Delaware, United States  
|Novellus Development Company, LLC                           |  | Delaware, United States  
|Novellus Systems SARL                                       |  | France                   
|Novellus Singapore Pte. Ltd., France Branch                 |  | France                   
|Novellus Systems GmbH                                       |  | Germany                  
|Novellus Systems Service GmbH                               |  | Germany                  
|NHL Sub GmbH                                                |  | Germany                  
|Peter Wolters GmbH                                          |  | Germany                  
|Novellus Systems (H.K.) Limited                             |  | Hong Kong                
|Novellus Systems Service (Hong Kong) Limited                |  | Hong Kong                
|Peter Wolters of America, Inc.                              |  | Illinois, United States  
|Novellus Systems (India) Pvt. Ltd.                          |  | India                    
|Novellus Systems Ireland Ltd.                               |  | Ireland                  
|GaSonics Ireland Ltd.                                       |  | Ireland                  
|Novellus Systems Israel Ltd.                                |  | Israel                   
|GaSonics Israel Ltd.                                        |  | Israel                   
|Novellus Systems Italy SRL                                  |  | Italy                    
|Peter Wolters Japan Co., Ltd.                               |  | Japan                    
|Novellus Systems Japan, G.K.                                |  | Japan                    
|Novellus Singapore Pte. Ltd., Japan Branch                  |  | Japan                    
|SpeedFam IPEC (Malaysia) Sdn. Bhd.                          |  | Malaysia                 
|Novellus Systems (Malaysia) Sdn. Bhd.                       |  | Malaysia                 
|Novellus Singapore Pte. Ltd., Malaysia Branch               |  | Malaysia                 
|Novellus Systems BV                                         |  | Netherlands              
|Novellus Systems International BV                           |  | Netherlands              
|Voumard, Inc.                                               |  | New York, United States  
|Novellus Korea LLC                                          |  | Republic of South Korea  
|Novellus Singapore Pte. Ltd., Korea Branch                  |  | Republic of South Korea  
|Novellus Systems International BV, Singapore Branch         |  | Singapore                
|Novellus Singapore Pte. Ltd.                                |  | Singapore                
|Novellus Singapore Holdings Pte. Ltd.                       |  | Singapore                
|Novellus Systems Inc., Singapore Branch                     |  | Singapore                
|Novellus Systems (Schweiz) Holding GmbH                     |  | Switzerland              
|Voumard Machines Co SARL                                    |  | Switzerland              
|Novellus Systems (H.K.) Limited, Taiwan Branch              |  | Taiwan                   
|Novellus Systems Service (Hong Kong) Limited, Taiwan Branch |  | Taiwan                   
|Peter Wolters UK Ltd.                                       |  | United Kingdom           
|Novellus Systems UK Limited                                 |  | United Kingdom           
|Novellus Vietnam LLC                                        |  | Vietnam