<PAGE>

                   [BORLAND MONTGOMERIE KEYDEN - LETTERHEAD]


John Ellis, Esq
Novellus Systems Limited
7 Marine Drive
Barton on Sea
New Milton
Hants BH25 7EE

AB/NR                                                       21st February 1995

Dear Mr Ellis

THE FORUM, CALLENDAR BUSINESS PARK, FALKIRK

I refer to your telephone call and now enclose page 10 of the Lease which
requires to be signed on behalf of your company to two Directors or one Director
and one Secretary.

I enclose schedule of Particulars of Signing for completion with the details of
signing and look forward to hearing from you on your return from America.

Kind Regards

Yours sincerely




/s/ Anne M. Blackstock


ANNE M. BLACKSTOCK

<PAGE>


                          DIRECTIONS FOR EXECUTING DOCUMENTS
                                          BY
                                  LIMITED COMPANIES
                             (UNDER THE LAW OF SCOTLAND)


PLEASE PRINT

COMPANY:-----------------------------------------------------------------------

DOCUMENT:----------------------------------------------------------------------

IMPORTANT NOTES TO BE READ BEFORE THE ACCOMPANYING DOCUMENT IS SIGNED.


The accompanying document requires to be signed on behalf of the company named
above.  Please read through the document carefully before it is signed.  If
there are any queries on the contents or alterations required, please contact
immediately the person who sent you the document.

The document must be signed on behalf of the company as follows:-
1) by two Directors; or
2) by a Director and the Secretary; or
3) by two persons authorised to sign on behalf of the company (authorised
   signatories); or
4) by a Director and an authorised signatory; or
5) by the Secretary and an authorised signatory.


All signatories should sign their normal signature.  A fountain pen or biro or
other pen with indelible ink should be used.

The document will consist of one or more pages and may have a schedule or
schedules and plan(s) attached.  The document should be signed as follows:-
(a) at the end of the last page of text of the document (excluding attached
    schedule(s) and plan(s), if any);
(b) at the end of each schedule, if any; and
(c) on each plan, if any.

Each page or plan to be signed will usually be marked with a pencil line and the
words Director' or 'Director/Secretary' written in pencil.  If you are unsure
where to sign, then please contact immediately the person who sent you the
document.

Neither the company seal nor witnesses are required.  Do not make any
alterations to the document.  Do not fill in any blanks.

                         PLEASE COMPLETE THE SECTION OVERLEAF

<PAGE>

                             [NOVELLUS - LETTERHEAD]



Miss A. M. Blackstock                                       3rd February 1995
Borland Montgomerie Keyden
Apsley House
29 Wellington Street
Glasgow G2 6JA

                   Re:  The Forum, Callendar Business Park, Falkirk

Dear Miss Blackstock,


Thank you for your letter dated 18th January 1995 concerning the engrossed Sub-
Lease for the Falkirk office.

I have signed the Sub-Lease as the only U.K. based director of Novellus Systems
Ltd.  The other two directors are based in our worldwide headquarters in
California, U.S.A.


Please let me know if there are any problems with the completed documentation.

Yours sincerely,



/s/ John Ellis

John Ellis
Novellus Systems Ltd.

<PAGE>


                   INSTRUCTIONS FOR EXECUTION OF DEEDS BY COMPANIES

                             NOVELLUS SYSTEMS
         ------------------------------------------------------------ LIMITED

1    The Deed and the last page of any Plan, Schedule, Inventory or other
     annexation should be signed by either:-

     (i)  Two Directors; or

     (ii) A Director and the Company Secretary; or


     (iii)Two persons authorised to sign on behalf of the Company.

2    The undernoted information should be entered in the spaces provided:-

     Place where Deed Executed     7 MARINE DRIVE, BARTON-ON-SEA
                                   --------------------------------------------

     Date of Execution             2-2-95
                                   --------------------------------------------

     First Signatory               /s/ John Ellis
     (Name in Full)                --------------------------------------------

     Official Position             DIRECTOR/SECRETARY
                                   --------------------------------------------

     Second Signatory
     (Name in Full)                --------------------------------------------

     Official Position             --------------------------------------------

3    If signed by two authorised signatories please give evidence (by way of
     certified copy Power of Attorney, certified Excerpt of Board Minute etc) of
     the authority of the authorised signatory to sign.

4         If it is proposed to execute the Deed otherwise than as 
          indicated above (eg by one Authorised Signatury under a 
          Power of Attorney) 2 witnesses will require to sign also but 
          only on the last page of the narrative of the Deed.  They 
          should simply sign their names on the left opposite the other 
          signatures writing the word "Witness" after their signature.  
          Their full names, addresses and occupations should be added in 
          the spaces overleaf.

5    On completion please return the Deed and the completed Instructions to:
                                 Mitchells Robertson
                                   [George House]

<PAGE>


                    ARE FOR USE ONLY IF WITNESSES ARE REQUIRED:-


                    JOANNA COLLINGE     /s/ Joanna Collinge
                    --------------------------------------------------
                    21 HIGH STREET LYMINGTON HANTS
                    --------------------------------------------------
                    BANK OFFICIAL
                    --------------------------------------------------

                    DEREK ELLIS        /s/ Derek Ellis
                    --------------------------------------------------
                    16 GUIBAL ROAD, LEE, LONDON SE129CX
                    --------------------------------------------------
                    RETIRED
                    --------------------------------------------------


<PAGE>


          SUB-LEASE

          between

          LEYLAND DAF FINANCE PLC incorporated under the Companies Acts and
          having their Registered Office formerly at Kent House, Upper Mulgrave
          Road, Cheam, Sutton, Surrey, SM2 7AY and now at Four Mulgrave 
          Chambers, 26/28 Mulgrave Road, Sutton, Surrey SM2 6LE, Registered 
          Number 1286313 (who and whose successors as tenants under the Lease 
          in their favour of the Premises aftermentioned are hereinafter 
          referred to as "the Mid-Landlord")


          with the consent of

          CENTRAL REGIONAL COUNCIL, incorporated under the Local Government
          (Scotland) Act 1973, Viewforth, Stirling (who and whose successors are
          hereinafter referred to as "the Landlord") OF THE ONE PART


          and

          NOVELLUS SYSTEMS LIMITED, incorporated under the Companies Acts and
          having their registered office at 7 Marine Drive, New Milton, Hants
          BH25 7EE, Registered Number 2223831 (who and whose successors in the
          right of occupancy under this Sub-Lease and their permitted assignees
          and sub-under-tenants and in the case of an individual his executors
          and representatives are hereinafter referred to as "the Sub-Tenant")
          OF THE OTHER PART

     In this Sub-Lease unless there is something in the subject or context
     inconsistent therewith:

1.   "Date of Expiry" means the date of expiry or sooner termination of the Sub-
Lease (however the same may be determined).

<PAGE>

                                         -3-

SECOND              The Mid-Landlord hereby sub-lets to the Sub-Tenant (but
PERIOD OF THE       excluding assignees and Sub-Under-Tenants legal or
SUB-LEASE           voluntary and creditors and managers for creditors in any
                    form except where permitted under the Sub-Lease) the
                    Premises subject to the same provisos, conditions and 
                    disclaimers in favour of the Mid-Landlord and where 
                    applicable the Landlord as are contained in the Lease
                    and that for the period from the Second day of December
                    Nineteen hundred and Ninety four ("the Date of Entry") until
                    the First day of December Nineteen hundred and Ninety nine 
                    and the Sub-Tenant accepts the Premises in their present
                    condition; Declaring, however, that either party shall be
                    entitled to terminate this Sub-Lease on the third
                    anniversary of the Date of Entry by giving written notice to
                    that effect to the other party not less than six months
                    before the said third anniversary.


THIRD               The Sub-Tenant hereby undertakes:
SUB-TENANT'S
MONETARY
OBLIGATIONS

RENT           1.   To pay to the Mid-Landlord the yearly rent of FIFTEEN
                    THOUSAND ONE HUNDRED AND TWENTY FIVE POUNDS (L15,125) 
                    STERLING or from each Date of Review the corresponding 
                    Revised Rent and if the Mid-Landlord has so opted or opts 
                    or if otherwise payable by law, Value Added Tax thereon at 
                    the standard rate (or if at any time in the future the 
                    standard rate shall no longer apply to rents, such rate as 
                    shall then be applicable) by equal quarterly payments in 
                    advance at the terms of Candlemas, (28th February) 
                    Whitsunday (28th May Lammas (28th August) and Martinmas 
                    (28th November) clear of all deductions whatsoever the first
                    of such payments to be made on the Date of Entry for the 
                    period from the Date of Entry until the term day immediately
                    succeeding the Date of Entry calculated on a daily basis and
                    so forth quarterly, termly and proportionally thereafter 
                    during the currency of the Sub-Lease such rent or Revised 
                    Rent to be paid without any written demand and if the 
                    Mid-Landlord so requires by Banker's Order; Under 
                    declaration that the Sub-Tenant is hereby granted a twenty 
                    five per centum (25%) reduction in the rent payable in 
                    respect of the first six months of the Sub-Lease after the 
                    said Date of Entry.

<PAGE>

                                         -4-

REIMBURSEMENT  2.   To reimburse to the Mid-Landlord on demand all payments made
                    by way of reimbursement or otherwise by the Mid-Landlord to
                    the Landlord under the Lease with the exception of:-

                    (i)  the rent and the Revised Rent provided for in the Lease
                         and
                    (ii) interest on and any expenses incurred by the Landlord
                         in procuring payment of any sum of money payable or
                         reimburseable to the Landlord under the Lease which
                         shall have become due but remain unpaid by the Mid-
                         Landlord.

RATES & OTHER  3.   To pay when due (or reimburse the Mid-Landlord on demand any
CHARGES             sum paid by the Mid-Landlord for) the rates, taxes, duties,
                    charges, assessments, impositions and outgoings for the
                    payment of which the Mid-Landlord is responsible in terms
                    of the Lease other than taxes arising on the rent payable
                    under the Sub-Lease or taxes arising on the disposal or
                    deemed disposal by the Mid-Landlord of or other dealing by
                    the Mid-Landlord with its interest in the Premises.

               4.   To reimburse the Mid-Landlord on demand all sums which the
                    Mid-Landlord may from time to time pay for insuring and
                    keeping insured the Premises for the loss of rent.

INTEREST ON    5.   To pay on demand to the Mid-Landlord, without prejudice to
PAYMENTS            any other right, remedy or power available to the Mid-
IN ARREARS          Landlord, interest at the Prescribed Rate on any rent or any
                    other sum of money payable or reimburseable to the Mid-
                    Landlord under the Sub-Lease which shall have become due but
                    remain unpaid for fourteen days, such interest to run (as
                    well after as before any judgement) from the date when the
                    same shall become due until payment thereof.

FOURTH              The Sub-Tenant also undertakes:
SUB-TENANTS
FURTHER
OBLIGATIONS

FULFILMENT     1.   To fulfill the obligations of a non monetary nature
OF                  undertaken by the Mid-Landlord under the Lease.
MID-LANDLORD'S
OBLIGATIONS

<PAGE>

                                         -5-

ENTRY TO       2.   In any case where the Landlord has reserved a right of entry
PREMISES            to the Premises under the Lease, to permit such right to be
                    exercised by the Landlord and/or the Mid-Landlord subject to
                    any condition in the Lease.

EXPENSES       3.   To reimburse the Mid-Landlord all expenses incurred by the
                    Mid-Landlord:

               a)   Incidental to the preparation and service of all notices and
                    schedules relating to deficiencies in repair or requiring
                    the Sub-Tenant to remedy the breach of any of its
                    obligations under the Sub-Lease whether the same be served
                    before or after the Date of Expiry but which relate to the
                    period of this Sub-Lease.

               b)   In the preparation and service of a schedule of
                    dilapidations before or after the Date of Expiry which
                    relates to the period of this Sub-Lease.

               c)   In procuring the remedy of any breach of any obligation or
                    the payment of arrears due by the Sub-Tenant under the Sub-
                    Lease.

APPLICATION    4.   Upon making an application for any consent or approval which
FOR CONSENT         is required under the Sub-Lease to disclose to the 
OR APPROVAL         Mid-Landlord such information as the Mid-Landlord may 
                    require and pay the Mid-Landlord's properly incurred 
                    expenses in connection with such application (including 
                    applications where consent or approval is refused or an 
                    application is withdrawn).

ALIENATION     5.   Not at any time to assign, sub-under-let or otherwise
                    dispose of or for any purpose or in any way deal with the
                    Sub-Tenant's interest in or part with or share possession or
                    occupation of part only of the Premises.

               6.   Not at any time to sub-under-let the Premises as a whole.

               7.   Not at any time to assign or otherwise dispose of or for any
                    purpose or in any way deal with the Sub-Tenant's interest in
                    or part with or share possession or occupation of the whole
                    of the Premises without the consent of the Landlord and the
                    Mid-Landlord.


<PAGE>

                                         -6-

FIFTH               The Mid-Landlord hereby undertakes provided that the Sub-
MID-LANDLORDS'      Tenant indemnifies the Mid-Landlord against any costs 
OBLIGATIONS         incurred by or awarded against the Mid-Landlord in the
                    course of its fulfilment of such undertaking:

               1.   On the request of the Sub-Tenant unless such request is
                    demonstrably unreasonable having regard to the Mid-
                    Landlord's interest in the Premises to adopt any procedure
                    designed to enforce the fulfilment of the obligations
                    undertaken by the Landlord under the Lease;

               2.   In relation to Rent Review:--

                    (i)  Not without the approval of the Sub-Tenant (such
                         approval not to be unreasonably withheld having regard
                         to the Mid-Landlord's interest in the Premises) to
                         agree with the Landlord on the Revised Rent nor on the
                         Surveyor to be nominated for the purposes of
                         determination of the Revised Rent and

                    (ii) If so required by the Sub-Tenant to request the
                         nomination by the Chairman for the time being of the
                         Scottish Branch of the Royal Institution of Chartered
                         Surveyors of a Surveyor for the purpose of such
                         determination; and


               3.   To keep in force insurance against loss of rent for three
                    years in an amount which would take into account potential
                    increases of rent in accordance with the rent review
                    provisions contained in the Lease and the Sub-Lease.

SIXTH               The same rights and remedies as are available to the 
MID-LANDLORD'S      Landlord against the Tenant under the Lease shall be 
REMEDIES            available to the Mid-Landlord against the Sub-Tenant under
                    the Sub-Lease and shall be subject to the same conditions.

SEVENTH             If the Premises shall at any time during the period of the 
SUSPENSION OF       Sub-Lease be so damaged or destroyed by reason of any of the
RENT                risks against which insurance is effected in terms of the
                    Lease as to render the Premises unfit for occupation or use
                    in whole or in part in accordance with the terms and
                    provisions of the Sub-Lease then the Sub-Lease shall not
                    come to an end and if the insurance policy or policies
                    effected under the Lease shall not have been rendered void
                    or payment of the 

<PAGE>


                                         -7-

                    policy monies refused in whole or in part in consequence of
                    any act or default of the Sub-Tenant its servants or agents
                    the rent payable hereunder or (where part only of the
                    Premises has been destroyed or rendered incapable of use) a
                    fair proportion thereof shall be suspended until the
                    Premises or such part thereof have been restored to
                    substantially the same condition prevailing prior to such
                    destruction or damage and are reasonably capable of use in
                    accordance with the provisions hereof or until the Loss of
                    Rent insurance shall be exhausted, if earlier: Provided that
                    if at the expiry of one year from the date of such damage or
                    destruction, the Premises or such part thereof are still not
                    fit for occupation or use as aforesaid either party shall be
                    entitled, upon giving three month's notice to the other
                    party at any time after the expiry of the said one year
                    period, to terminate the Sub-Lease and thereupon the rights
                    and obligations of the parties shall cease and have no
                    effect but without prejudice to any antecedent right or
                    claim arising hereunder.

EIGHTH
IRRITANCY           Subject to Sections 4 to 7 of the Law Reform (Miscellaneous
                    Provisions) (Scotland) Act 1985, if at any time during the
                    Period of the Sub-Lease:--

                    (a)  the rents payable under the Sub-Lease or the Revised
                         Rent (or any of them or any part thereof) shall be in
                         arrear and unpaid for fourteen days after becoming
                         payable (whether legally demanded or not), or

                    (b)  there shall be any material breach, non-performance or
                         non-observance by the Sub-Tenant of any of the
                         obligations and conditions contained in the Sub-Lease;
                         or

                    (c)  the Sub-Tenant passes a resolution to wind-up, enter
                         into liquidation or insolvency whether compulsory or
                         voluntary (save for the purpose of amalgamation or
                         reconstruction of a solvent company) or has a Receiver
                         or Administrator appointed of its undertaking or enters
                         into an arrangement or composition for the benefit of
                         its creditors, or suffers any diligence to be done or
                         execution to be levied on its

<PAGE>
                                         -8-

                    goods or being a firm shall be sequestrated; the Mid-
                    Landlord shall be entitled forthwith to terminate this Sub-
                    Lease and treat this Sub-Lease and all transmissions thereof
                    with all that has followed or can competently follow thereon
                    as void and null and that without the necessity of any
                    declarator, process of removal, or other procedure at law
                    and the Premises shall thereupon revert to the Mid-Landlord.
                    In such event it shall be lawful for the Mid-Landlord or
                    any person or persons duly authorised by the Mid-
                    Landlord on their behalf to enter upon the possession of the
                    Premises or any part thereof in name of the whole and to
                    eject the Sub-Tenant and occupiers and thereafter use,
                    possess and enjoy the same free of all claims by the Sub-
                    Tenant as if this Sub-Lease had never been granted without
                    prejudice to any right of action or remedy of the Mid-
                    Landlord in respect of the premature termination of the Sub-
                    Lease or of any antecedent breach by the Sub-Tenant of any
                    of the conditions contained in the Sub-Lease which irritancy
                    is hereby declared to be pactional and not penal and shall
                    not be purgeable at the bar; Provided that (ONE) in the case
                    of a breach which is capable of being remedied the Mid-
                    Landlord shall not be entitled to terminate this Sub-Lease
                    as aforesaid unless it shall first have given notice of the
                    breach to the Sub-Tenant prescribing a time which in the
                    opinion of the Mid-Landlord is reasonable in the
                    circumstances (such circumstances not including the
                    financial position of the Sub-Tenant) within which such
                    breach must be remedied and the Sub-Tenant shall have
                    failed to remedy the breach within the time prescribed in
                    the notice and declaring that where the breach is the
                    failure to pay any sum of money, a reasonable time shall be
                    a period of not less than fourteen days; (TWO) in the case
                    of the Sub-Tenant going into liquidation (other than for
                    reconstruction or amalgamation as aforesaid) or in the case
                    of a Receiver or Administrator being appointed the Mid-
                    Landlord shall not exercise such right of forfeiture on the
                    ground of liquidation or insolvency or appointment of a
                    Receiver or Administrator unless and

<PAGE>

                                         -9-

                    until they have allowed the Liquidator, Receiver or
                    Administrator or interim or permanent trustee (as the case
                    may be) a period of six months in which to dispose of the
                    Sub-Tenant's interest in this Sub-Lease and shall only be
                    entitled to terminate this Sub-Lease if the Liquidator,
                    Receiver, Administrator or interim or permanent trustee as
                    the case may be shall have failed to dispose of the Sub-
                    Tenant's said interest at the end of said period provided
                    always that the Liquidator, Receiver or Administrator or
                    interim or permanent trustee shall accept and implement in
                    writing within twenty one days of the date of liquidation or
                    receivership or appointment of an interim or permanent
                    trustee as the case may be personal responsibility for
                    payment of the rent for the Premises and performance of all
                    the Sub-Tenant's obligations under this Sub-Lease whether
                    arising before or after the date of liquidation or
                    receivership or appointment of an interim or permanent
                    trustee as the case may be to the expiry of the said period
                    or, if earlier, the date of entry under the disposal of the
                    Sub-Tenant's interest in this Sub-Lease and it is hereby
                    expressly declared that the Mid-Landlord shall deal with any
                    request to consent to assign this Sub-Lease made by such
                    Liquidator, Receiver, Administrator or interim or permanent
                    trustee as the case may be in the same manner as if such
                    requests had been made by the Sub-Tenant.

NINTH
VALUE 
ADDED TAX      1.   Where there is a provision under the Sub-Lease for the Sub-
                    Tenant to pay any fees, costs, charges, commission,
                    remunerations, expenses or outlays the Sub-Tenant shall also
                    be responsible for payment of any Value Added Tax thereon
                    together with interest thereon from the date of the demand
                    (or, in the case of rent), from the date when same falls
                    due) until paid by the Sub-Tenant.

               2.   Without prejudice to the foregoing sub-paragraph, in the
                    event that Value Added Tax shall be chargeable on the Mid-
                    Landlord in respect of any supplies as defined in the Value
                    Added Tax Act 1983 (or any statutory modification or

<PAGE>


                                         -10-

                    Sub-Tenant the Sub-Tenant shall in addition to any amounts
                    otherwise payable, pay to the Mid-Landlord the amount of the
                    Value Added Tax so chargeable.

               3.   Any rents and other sums payable under the Sub-Lease shall
                    (notwithstanding any present or future statutory provision
                    to the contrary) be exclusive of any Value Added Tax
                    chargeable thereon (whether or not chargeable as the result
                    of any change in the law and whether or not chargeable as
                    the result of the exercise by the Mid-Landlord the Sub-
                    Tenant or the Mid-Landlord and the Sub-Tenant jointly of any
                    option in respect of the charging of Value Added Tax).

TENTH
NOTICES        The provisions for notices contained in the Lease shall apply
               also under the Sub-Lease as if "the Mid-Landlord" had been
               substituted for "the Landlords" and "the Sub-Tenant" had been
               substituted for "the Tenants".

ELEVENTH
CONSENT TO 
REGISTRATION   The parties consent to registration hereof for preservation and
               execution:  IN WITNESS WHEREOF

<PAGE>

                                           


                                      SUB-LEASE

                                       between

                                LEYLAND DAF FINANCE PLC

                                         and

                               NOVELLUS SYSTEMS LIMITED

                                   with consent of

                               CENTRAL REGIONAL COUNCIL

                           -------------------------------


     SUBJECTS  Upper Ground Floor
               (East Wing)
               The Forum
               Callendar Business park
               Falkirk

         --------------------------------------------------------------------

                                  MITCHELLS ROBERTON
                                      SOLICITORS
                                     GEORGE HOUSE
                               36 NORTH HANOVER STREET
                                    GLASGOW G1 2AD

                             AB/DBR   FAS 5026  RE BOX 77
                                      LEY001.LSE