**Exhibit 23.1**

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM 

We consent to the incorporation by reference in the followingRegistration Statements of Novellus Systems, Inc.: 

(1) Registration Statement (Form S-8 No. 333-149482) pertaining to the Amended and Restated 1992Employee Stock Purchase Plan and the Amended and Restated 2001 Stock Incentive Plan, 

(2) Registration Statement (Form S-8 No. 333-126807) pertainingto the Novellus Systems, Inc. 2001 Stock Incentive Plan and Novellus Systems, Inc. Amended and Restated 1992 Employee Stock Purchase Plan, 

(3) RegistrationStatements (Form S-8 Nos. 33-62807, 333-11825, 333-35487, 333-65567, 333-80453) pertaining to the Novellus Systems, Inc. Amended and Restated 1992 Stock Option Plan, and the Novellus Systems, Inc. Amended and Restated 1992 Employee Stock PurchasePlan, 

(4) Registration Statement (Form S-8 No. 333-54056) pertaining to the Gasonics International Corporation 1994 Stock Option/Stock Issuance Plan,and the Gamma Precision Technology 1998 Stock Option Plan, 

(5) Registration Statement (Form S-8 No. 333-54058) pertaining to the Novellus Systems,Inc. Amended and Restated 1992 Stock Option Plan, 

(6) Registration Statement (Form S-8 No. 333-70146) pertaining to the Novellus Systems, Inc. 2001Stock Incentive Plan, 

(7) Registration Statement (Form S-8 No. 333-54056) pertaining to the GaSonics International Corporation 1994 Stock Option/StockIssuance Plan, Gamma Precision Technology 1998 Stock Option Plan, GaSonics International Corporation 2000 Supplemental Stock Option Plan, and the Novellus Systems, Inc. 401(k) Plan, 

(8) Registration Statement (Form S-8 No. 333-89742) pertaining to the Novellus Systems, Inc. Amended and Restated 1992 Stock Option Plan, Novellus Systems, Inc. Amended and Restated 1992 Employee Stock PurchasePlan, Novellus Systems, Inc. 2001 Stock Incentive Plan, Novellus Systems, Inc. 2001 Non-Qualified Stock Option Plan, Novellus Systems, Inc. 401(k) Plan, GaSonics International Corporation 1994 Stock Option/Stock Issuance Plan, Gamma PrecisionTechnology 1998 Stock Option Plan, and the GaSonics International Corporation 2000 Supplemental Stock Option Plan, 

(9) Registration Statement (Form S-8No. 333-101730) pertaining to the SpeedFam, Inc. 1991 Employee Incentive Stock Option Plan, as amended, SpeedFam-IPEC, Inc. 1992 Stock Option Plan, as amended, 1995 Stock Plan for Employees and Directors of SpeedFam-IPEC International, Inc., asamended, 2001 Nonstatutory Stock Option Plan of SpeedFam-IPEC, Inc., and the Stand-Alone Nonstatutory Stock Option Agreement of SpeedFam-IPEC, Inc., dated June14, 2001, 

(10) Registration Statement (Form S-8 No. 333-102784) pertaining to the Novellus Systems, Inc. 2001 Non-Qualified Stock Option Plan, as amended, 

(11) Registration Statement (Form S-8 No. 333-121248) pertaining to the Novellus Systems, Inc. Retirement Plan, and 

(12) Registration Statement (Form S-8 No. 333-117169) pertaining to the New Employee Stand-Alone Non-Statutory Stock Option Agreement, New Employee Stand-Alone Restricted Stock Award and the Novellus Systems, Inc. Retirement Plan;

of our reports dated February 26, 2009, with respect to the consolidated financial statements and schedule of Novellus Systems, Inc., and theeffectiveness of internal control over financial reporting of Novellus Systems, Inc., included in this Annual Report (Form 10-K) for the year ended December 31, 2008. 

/s/ Ernst & Young LLP 

San Jose,California 

February 26, 2009