# Patent

## Title
Transfer method of functional region, LED array, LED printer head, and LED printer

## Abstract

A method includes arranging a bonding layer of a predetermined thickness on at least one of a first functional region bonded on a release layer, which is capable of falling into a releasable condition when subjected to a process, on a first substrate, and a region, to which the first functional region is to be transferred, on a second substrate; bonding the first functional region to the second substrate through the bonding layer; and separating the first substrate from the first functional region at the release layer.

## Background
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to transfer methods of a functional region for fabrication of semiconductor members, semiconductor products, semiconductor devices, and the like.
2. Related Background Art
Techniques of transferring, to a silicon substrate, constituent layers of a light emitting diode formed on a GaAs substrate via a sacrificial layer are known. U.S. Pat. No. 6,913,985 discloses such technology. More specifically, constituent layers of the light emitting diode deposited on the GaAs substrate via the sacrificial layer is initially divided into plural light emitting regions by forming grooves therein. The sacrificial layer is exposed to the groove. Then, a dry film resist is attached to constituent layers of the light emitting diode, and a support member of a mesh metal wire is bonded on the dry film resist.
Thereafter, portions of the resist other than portions right under the mesh metal wire are removed. The sacrificial layer is brought into contact with an etchant through the mesh support member to etch the sacrificial layer. Thus, the GaAs substrate is separated from the composite structure. Further, after separation of the GaAs substrate, a silicon substrate is bonded on the light emitting diode with constituent layers. The light emitting diode with constituent layers is transferred to the silicon substrate.
Japanese Patent Laid-open No. 2003-174041 discloses techniques of placing a chip portion selected from plural semiconductor chips formed on a substrate onto another substrate. More specifically, a first laminated layer structure with a device layer formed on a first substrate is prepared, and a second laminated layer structure with a release layer formed on a second substrate is prepared. Then, facing the device layer and the release layer to each other, the first laminated layer structure and the second laminated layer structure are bonded. The laminated layer structure including the device layer and the release layer is divided into plural portions in a predetermined pattern. Thus, plural chips including devices are formed on the second substrate. A predetermined chip selected from the plural chips is bonded to a predetermined position on a third substrate. Thereafter, the second substrate is separated from the selected chip at the release layer, and the selected chip is thus placed on the third substrate.
Where an LED array or the like is produced by using a compound semiconductor, such as GaAs, on a GaAs substrate, an efficient use of the GaAs substrate is used because the GaAs substrate is expensive compared to the silicon substrate. Further, where the size of the GaAs substrate (for example, 2, 4, 6, or 8-inch substrate) is different from the size of the silicon substrate (for example, 4, 5, 6, 8, or 12-inch substrate), a transferable region is a region of the smaller substrate when the transfer is performed collectively or all at once per a unit of substrate. Accordingly, in order to attain an efficient transfer, sizes of both substrates with the size of the smaller one are to be accorded.
When the transfer is performed in such a manner as disclosed in U.S. Pat. No. 6,913,985, a usable GaAs semiconductor layer is only a portion corresponding to a device formed on the silicon substrate. Thus, GaAs semiconductor corresponding to a portion between devices on the silicon substrate is abandoned without being used.
The above situation will be described with reference to FIGS. 16A and 16B. FIGS. 16A and 16B illustrate circuit devices formed on a silicon substrate and light emitting device layers formed on a GaAs substrate, respectively. Reference numeral 11 denotes the GaAs substrate, reference numeral 12 denotes the light emitting device layers of GaAs, reference numeral 13 denotes the silicon substrate, and reference numeral 14 denotes the circuit device formed on the silicon substrate 13. The light emitting device can be acquired by transferring the light emitting device layers 12 onto the circuit device 14. The light emitting device layers 12 are placed on or close to a portion of the circuit device 14. The size of the light emitting layers 12 is about 10 mm*50 microns, for example. In contrast thereto, the size of the circuit device 14 is about 10 mm*0.3 mm, for example. Therefore, where light emitting device layers 12 are collectively transferred onto circuit devices 14, the arrangement and transferable number of the light emitting layers 12 are limited due to the arrangement of the circuit devices 14. Consequently, a usable area of the light emitting layers 12 per a unit area of the GaAs substrate 11 is liable to be small.
On the other hand, according to techniques of Japanese Patent Laid-open No. 2003-174041, a large number of chips are formed on the first substrate, and a portion of the chips is selectively transferred on the second substrate. Therefore, chips corresponding to transfer portions on a plurality of the second substrates can be formed on the first substrate. Thus, the first substrate can be efficiently used to a certain degree. According to such techniques, however, when the chip is selectively transferred, an adhesive is deposited on the chip for transfer. Therefore, there is a possibility that the following situations may occur. When the chip size is small (for example, a width is less than several hundreds microns), the adhesive is likely to protrude from an intended chip. In such a case, an unintended chip is likely to be also bonded, and an unfavorable transfer can occur. As a result, the yield is likely to decrease.
Further, as the chip size decreases, the thickness of the adhesive is set to be thinned so that the adhesive does not protrude from the intended chip. If a bonding process is performed under such condition, an unintended chip is likely to be brought into contact with the second substrate, and accordingly some damage may occur.
SUMMARY OF THE INVENTION
According to one aspect, the present invention provides a method that includes arranging a first bonding layer of a first predetermined thickness on at least one of a first functional region bonded on a release layer, which is capable of falling into a releasable condition when subjected to a process, on a first substrate, and a region, to which the first functional region is to be transferred, on a second substrate; bonding the first functional region to the second substrate through the first bonding layer; and separating the first substrate from the first functional region at the release layer.
Further features of the present invention will become apparent from the following description of exemplary embodiments and examples, with reference to the attached drawings.



BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1A to 1C are cross-sectional views illustrating a step of preparing a first substrate in an embodiment of the transfer method according to the present invention.
FIGS. 2A and 2B are cross-sectional views illustrating a step of forming a bonding layer in an embodiment of the transfer method according to the present invention.
FIGS. 3A and 3B are cross-sectional views illustrating a step of selectively transferring a functional region on a first substrate to a second substrate in an embodiment of the transfer method according to the present invention.
FIGS. 4A and 4B are cross-sectional views illustrating a step of selectively transferring a functional region on a first substrate to a third substrate in an embodiment of the transfer method according to the present invention.
FIG. 5A is a plan view illustrating plural transfer expected regions on a second substrate.
FIG. 5B is a plan view illustrating plural functional regions on a first substrate.
FIG. 6 is a cross-sectional view illustrating a combination of patterned release layers on a surface of a first substrate.
FIG. 7 is a cross-sectional view illustrating a step of preparing a first substrate in a first example of the transfer method according to the present invention.
FIG. 8 is a plan view obtained by viewing an a1-b1 cross section of FIG. 6 from one side.
FIG. 9 is a plan view obtained by viewing an a2-b2 cross section of FIG. 6 from one side.
FIG. 10 is a disassembled perspective view illustrating the positional relationship between a first groove and a groove in a semiconductor substrate, and a manner in which an island-like compound semiconductor laminated layer is arranged between grooves in the semiconductor substrate.
FIGS. 11A to 11D are cross-sectional views illustrating a step of preparing a first substrate in a second example of the transfer method according to the present invention.
FIG. 12 is a perspective view illustrating an example of an LED printer head.
FIG. 13 is a cross-sectional view illustrating a manner in which a driver circuit formed directly in a Si substrate is connected to an LED device.
FIG. 14 is a plan view illustrating a light emitting device array circuit capable of being driven in a time sharing manner so that the number of electrodes can be reduced.
FIG. 15A is a view illustrating a configuration of an example of an LED printer.
FIG. 15B is a view illustrating a configuration of an example of an LED color printer.
FIG. 16A is a plan view illustrating plural transfer expected regions on a substrate in a conventional example.
FIG. 16B is a plan view illustrating plural functional regions on a seed substrate in a conventional example.



DETAILED DESCRIPTION OF THE EMBODIMENTS
Embodiments of the present invention will hereinafter be described. In this specification, the functional region typically means a region including a semiconductor junction. The region can be a device. Further, the functional region can be a region having piezoelectric properties, insulating properties, magnetic properties or the like, such as regions usable as functional devices having electric or magnetic function. At any rate, a critical point of the present invention is that when a portion of functional regions is selectively transferred from a substrate with the functional regions to a predetermined location of another substrate, a bonding layer of a predetermined thickness is placed on at least one of the above portion of functional regions and the above predetermined location. The predetermined thickness is such a sufficient thickness that can achieve the following purposes. First purpose is that a strong contact between a portion of the functional regions not to be transferred and the above another substrate is prevented so that this portion cannot be bonded to this substrate. Second purpose is that the bonding layer can achieve its inherent bonding function.
Further, it is also important that the roughness of a surface of a position of the above another substrate or region other than the position for transfer is set greater than the roughness of a surface of the bonding layer. In other words, even if a surface of the functional region not to be transferred is brought into contact with the portion other than the portion for transfer, the number of contact points is limited and small due to the surface roughness so that interatomic or intermolecular force (van der Waals force) is weak. As a result, even when accidental contact at the position other than the bonding layer occurs, a sufficient bonding force is not generated, and hence no bonding is attained at this position.
Embodiments of the present invention will be described with reference to the drawings. On the basis of the above inventive concept, a fundamental transfer method of the present invention includes the first to third steps described above. In the case where the bonding strength of the release layer is weakened by light irradiation, the first substrate can have light-transmitting properties, or can be transparent.
The first substrate is initially prepared in the first step. FIGS. 1A to 1C illustrate a step of preparing the first substrate 100 with functional regions. In this embodiment, as shown in FIGS. 1A to 1C, each of first and second functional regions 101 and 102 to be transferred from the compound semiconductor substrate 103 of the seed substrate to the first substrate 100 includes the compound semiconductor layer 106. Further, each of first and second functional regions 101 and 102 includes the etching sacrificial layer 105 and the compound semiconductor layer 106 formed on the compound semiconductor substrate 103 in this order. Here, the resist layer 107 is formed and patterned on the compound semiconductor layer 106 on the substrate 103, and a portion between the first and second functional regions 101 and 102 is etched to form the first groove 110 by using the patterned resist layer 107. Thus, island-like first and second functional regions 101 and 102 are separated from each other.
Further, the second groove 111 (it finally becomes a through hole) is formed in at least one of the first substrate 100 and the compound semiconductor substrate 103. The second groove 111 is formed so as to connect to the first groove 110. In this embodiment, the second groove 111 is formed in the compound semiconductor substrate 103 that is a GaAs substrate. The etching of GaAs is performed by an etchant of NH4OH+H2O2 and/or Deep RIE (reactive ion etching). The first substrate 100 is a transparent substrate of glass or the like. The compound semiconductor layer 106 in the first and second functional regions 101 and 102 can include a distributed Bragg reflection (DBR) layer and an LED layer, and the etching sacrificial layer 105 can be an AlAs layer or the like.
As the seed substrate 103, a GaAs substrate, a p-type GaAs substrate, an n-type GaAs substrate, an InP substrate, a SiC substrate, a GaN substrate or the like can be used. Further, in place of the above compound semiconductor substrate, a sapphire substrate, a Ge substrate or the like can also be used. The etching sacrificial layer 105 is a layer that is etched at a faster etching rate than the compound semiconductor laminated layer. As described above, the etching sacrificial layer 105 in this embodiment is an AlAs layer or AlGaAs layer (for example, Al0.6Ga0.4As). Where the AlGaAs layer is an AlxGax−1As layer (x is equal to or less than one (1), and equal to or more than 0.6), the etching selectivity is prominent when x is equal to or grater than 0.6. Where the etching sacrificial layer is the AlAs layer, an HF solution diluted to a range from two (2) percent to 10 percent can be used as the etchant.
Where the seed substrate 103 is a sapphire substrate, a metal nitride layer, such as a chrome nitride (CrN), can be used as the etching sacrificial layer. In this case, a functional laminated layer for producing a device (like LED or laser) for blue or ultraviolet radiation can be epitaxially grown on the chrome nitride. In the laminated layer, GaInN as an active layer and AlGaN or GaN as a spacer layer can be used. As the etchant for the sacrificial layer of chrome nitride (CrN) or the like, a normal Cr etchant (a chrome etching liquid or the like) can be used.
As shown in FIG. 1B, the compound semiconductor substrate 103 is lapped from the bottom surface so that the second groove 111 penetrates the substrate 103. Further, the first substrate 100 is bonded to the first and second functional regions 101 and 102 on the compound semiconductor substrate 103 with the release layer 115 like a sheet with adhesive layers. Here, although the second groove 111 is formed in the compound semiconductor substrate 103, the second groove can be readily formed rather in the substrate 100 since the GaAs substrate is very fragile and relatively small in physical strength compared to the substrate 100 of glass or the like. The second groove in the substrate 100 is indicated by dotted lines in FIG. 1A.
In this embodiment, the release layer 115 is a sheet wherein an ultraviolet (UV) releasable adhesive layer is attached on one surface of a base material sheet and a thermal releasable adhesive layer is attached on the other surface of the base material sheet. In place of the thermal releasable adhesive layer, a pressure sensitive releasable adhesive layer can also be used. Here, the UV releasable adhesive layer is a layer including a material whose decomposition or decrease in bonding strength occurs by light irradiation. The thermal releasable adhesive layer is a layer including a material whose decomposition or decrease in bonding strength occurs by heating or cooling. Further, in the following step, the light blocking layer 117 can be provided on a surface of the first substrate 100 corresponding to a region of the second functional region 102. The light blocking layer 117 can be formed by vacuum evaporation or the like. In place of the light blocking layer 117, a stencil mask capable of being readily peeled can also be used. Further, in the following step described below, UV irradiation can be selectively performed only to a desired area by, for example, converging and scanning laser light at UV wavelength (300 nm to 400 nm). In this case, there is no need to use the light blocking layer.
Where the second groove is to be provided in the first substrate 100, the groove can be formed as follows. Where the first substrate is a silicon substrate, a penetrating groove of the second groove can be formed in an atmosphere of SF6 or the like by the RIE using fluorine. The free radical species is not limited to fluorine. In the case of wet etching, NaOH KOH, TMAH or the like can be used. More specifically, after the release layer 115 is placed on one surface of the silicon substrate 100, a mask layer for forming the groove is formed with a resist on the other surface of the silicon substrate 100, and the groove is formed in the silicon substrate using the mask. While the dry etching like RIE and wet etching can be used, sand blaster or the like can also be used. In the sand blaster, fine particles of quartz or the like are blown on an exposed location to physically break a portion of the silicon substrate and form the groove. Such a penetrating groove can be formed in a thick silicon wafer of several hundreds microns, for example. In this formation of the penetrating groove, its side wall can be protected so that no degradation of its aspect ratio occurs. Further, this method is also readily applicable to the glass substrate or the like. Thus, instead of the above chemical etching, the formation of the penetrating groove can also be executed by the sand blasting method or a blowing method of blowing fluid energy. Laser drill or micro drill can also be used to form the groove.
As described above, there can be prepared a substrate structure wherein the first groove 110 is formed in the compound semiconductor layer 106, and the penetrating second groove 111 connecting to the first groove 110 is formed in at least one of the substrate 100 and the substrate 103. FIG. 1B shows this substrate structure.
Then, an etchant is brought into contact with the etching sacrificial layer 105 through the first and second grooves 110 and 111 to etch the etching sacrificial layer 105. The compound semiconductor substrate 103 is thereby separated from the functional regions 101 and 102. The first substrate 100 with the first and second functional regions 101 and 102 is prepared as illustrated in FIG. 1C. The separated compound semiconductor substrate 103 can be reused to newly form functional regions with compound semiconductor layers thereon. Where the first groove 110 or groove 111 is deep, there is a possibility that bubbles of gas (hydrogen) generated by the etching of the etching sacrificial layer of AlAs or the like may close an outlet port of the groove. In such a case, supersonic waves can be continuously or intermittently applied to the etchant or the compound semiconductor substrate. Further, alcohol or lubricant for decreasing the wetting angle can be added to the etchant (for example, hydrofluoric acid) to suppress or remove the bubbles during the etching.
As described in the examples below, the method of preparing the first substrate with the functional regions placed thereon via the release layer is not limited to the above method. For example, the first substrate can be prepared by a method in which a fluid is blown to a side or its vicinity of an interface separable or release layer of the substrate structure to separate the substrate 103 therefrom.
In a next step, the bonding layer 205 of a predetermined thickness is attached on at least one of the first functional region 101 to be selectively transferred and a region of a second substrate 200 to which the first functional region 101 is to be transferred (the first step described above). In this embodiment, as illustrated in FIGS. 2A and 2B, the bonding layer 205 is placed on the second substrate 200 of a silicon substrate with a driver circuit. Initially, as illustrated in FIG. 2A, the bonding layer 205 (for example, an organic insulating layer) is formed on the second substrate 200. Then, the masking with the resist 206 is performed only to a transfer expected region of the first functional region 101 on the second substrate 200. As illustrated in FIG. 2B, the etching is executed by chemical etching or RIE to form the bonding layer 205 only on the transfer expected region of the second substrate 200, and the resist 206 is removed by the asher or the like. Here, the thickness of the bonding layer 205 is about 2.0 microns, and its surface is sufficiently smoothed. With such a thickness, a strong pressure of the second functional region 102 against a surface of the second substrate 200 can be prevented when the first functional region 101 is bonded to the bonding layer 205.
In the present invention, the thickness of the bonding layer 205 is approximately in a range from 1.0 micron to 10 microns. With a thickness below 1.0 micron, the bonding effect decreases. With a thickness above 10 microns, there may be a possibility that the issue of wiring breakage at steps and the like arises when the functional region is electrically connected to the driver circuit and the like formed on the second substrate with metal wiring after the functional region is transferred to the second substrate. Further, the transfer method of this embodiment can include a step of forming a predetermined unevenness 208 on a surface in a region of the second substrate 200 other than the region to which the first functional region 101 is to be transferred, as illustrated in FIG. 2B, according to necessity (the fourth step described above).
With such an unevenness 208, even if the second functional region 102 contacts with the surface of the second substrate 200 due to stress or the like at the time of bonding, the bonding between the second functional region 102 and the substrate 200 can be more effectively prevented. The unevenness 208 can be formed by over-etching performed when the bonding layer 205 is formed, for example. A surface of the unevenness 208 is sufficiently rough compared to the surface of the bonding layer 205. For example, smoothness Rpv (the maximum of a peak-to-valley difference of unevenness) of the surface of the bonding layer 205 is below about 2 nm, and Ra (the average of the peak-to-valley difference) is below about 0.2 nm. In contrast thereto, a surface roughness Rpv of the unevenness 208 can be over about 2 nm, and Ra of the unevenness 208 can be over about 0.2 nm.
As described above, plural island-like functional regions 101 and 102 are provided on the release layer 115 placed on the first substrate 100. In this example, the unevenness 208 is formed on the surface of the above region on the second substrate 200.
In this embodiment, the bonding layer 205 is formed of the organic material. As the organic material, there are polyimide and the like. An epoxy-based bonding layer can also be used. In place of the above organic material layer, spin-on-polymer and organic spin-on-glass (SOG) can also be used. In these materials, methyl radical, ethyl radical, phenyl radical or the like is added to an inorganic insulating oxidized layer like a silicon oxide layer, and the plasticity is thereby increased. For example, where the circuit region is formed on and/or in a silicon substrate of the second substrate 200, the following treatment can be performed. Using the organic SOG, the silicon oxide insulating layer for increasing flatness on the circuit region is formed on the second substrate 200 to a predetermined thickness, and is patterned. The silicon oxide insulating layer has a given stickiness at about the pre-bake temperature of 100 degrees centigrade.
In the present invention, such stickiness of the surface of the bonding layer 205 after the pre-bake process is beneficial for effective bonding in the following bonding step. Generally, tackness (stickiness) is considered to appear owing to silanol group of hydrolysis radical, alkoxy group of organic component or the like contained in the organic insulating material (for example, spin-on-polymer). These constituents can cause junction or bonding strength between wafers or devices as dehydration-condensation reaction proceeds at process temperatures. With respect to the plasticity, non-hydrolysis radical out of the organic constituents contributes to stability of the plasticity of material at high temperatures (>400 degrees centigrade). Critical factors of the bonding are considered to be surface flatness and particles. In connection therewith, the flatness of an underlayer with device structures and the bonding surface can be relaxed by the presence of the organic insulating layer having the plasticity and tackness.
Further, with respect to the influence of particles, particles of some sizes can be buried in the organic insulating layer due to its plasticity. Accordingly, the influence of particles can be substantially eliminated. The plasticity also greatly serves to relax the strain stored when the thickness of the layer is increased. When the amount of organic constituent for increasing the plasticity is small and a relatively thick layer (over one (1) micron) is formed, defects like cracks are likely to appear. For these reasons, when the amount of organic constituent in hydrolysis and non-hydrolysis radicals contained in the organic SOG is set to be above about 1 (one) wt. percent, appropriate stickiness and plasticity can be obtained. Accordingly, even a layer having a thickness in the micron order can be a stable layer.
As described above, the second substrate 200 is, for example, a semiconductor substrate, a silicon substrate, a silicon wafer with an oxidized layer on its surface, a silicon wafer provided with an electric circuit (for example, a driver circuit), or the like. Where an LED is fabricated including a compound semiconductor laminated layer, the driver circuit is, for example, a circuit for drive-controlling the LED. The silicon substrate can be a substrate with an epitaxial silicon layer on its surface as well as a so-called CZ wafer. In place of the silicon substrate, a silicon-on-insulator (SOI) substrate can also be used.
Description will be made of the second step in which the first functional region 101 is bonded to the second substrate 200 by the bonding layer 205, and the third step in which the first substrate 100 is separated from the first functional region 101 at the release layer 115. As illustrated in FIG. 3A, in the second step, the first functional region 101 on the release layer 115 placed on the first substrate 100 is aligned with and bonded to the bonding layer 205. As illustrated in FIG. 3B, in the third step, the first substrate 100 is separated from the first functional region 101 at the release layer 115. In this embodiment, the release layer is subjected to a predetermined process and becomes releasable. The predetermined process is a process for causing decomposition or decrease in bonding strength of the release layer. Here, irradiation of UV light is performed from a side of the transparent substrate 100 to cause decomposition or decrease in bonding strength of a UV releasable adhesive layer of the release layer 115. Thus, the first substrate 100 is separated from the first functional region 101. Due to the presence of the light blocking layer 117, no UV irradiation is executed to a portion of the release layer 115 corresponding to the second functional region 102. Therefore, the portion of the release layer 115 remains unchanged, and as illustrated in FIG. 3B, the second functional region 102 remains on the first substrate 100. In the third step, UV laser light can be condensed to a fine spot, and scanned.
In this embodiment, it is also possible to omit the light blocking layer 117, and perform entire light irradiation so that the first substrate 100 can be separated from the first functional region 101 at the release layer 115. In this case, entire decomposition or decrease in bonding strength of the release layer 115 occurs, and the first functional region 101 bonded to the bonding layer 205 is separated from the first substrate 100 with the aid of this bonding force between the first functional region 101 and the bonding layer 205. At this time, also in a portion of the second functional region 102 not bonded to the second substrate 200, adhesiveness of the UV releasable adhesive layer of the release layer 115 decreases. However, no peeling force from the second substrate 200 acts on the second functional region 102, so that the second functional region 102 remains on the first substrate 100.
When conditions (for example, material of the release layer, wavelength of irradiated light, light intensity, irradiation time and the like) are appropriately determined, this method can be readily performed at relatively low cost while maintaining reliability, without using the light blocking layer. In the case of such entire UV irradiation, an i-line (365 nm) UV lamp or an LED for generating UV light can be used. Also in this case, the second functional region 102 remaining on the first substrate 100 by the weakened UV releasable adhesive layer of the release layer 115 can be further transferred to another substrate as described below. Another substrate can be the second substrate, and the second functional region 102 is transferred to a portion of the second substrate 200 different from a portion to which the first functional region 101 has been already transferred.
The release layer 115 can have another configuration. For example, the release layer 115 can be composed of a single UV or thermal releasable adhesive layer, or a UV or thermal releasable adhesive layer and a pressure sensitive releasable adhesive layer. Further, as illustrated in FIG. 6, release layers 120 and 121 with different properties can be attached on the first substrate 100, corresponding to the first and second functional regions 101 and 102, respectively. For example, one is a UV releasable adhesive layer, and the other is a thermal releasable adhesive layer. Alternatively, one is a first radiation releasable adhesive layer, and the other is a second radiation releasable adhesive layer whose decomposition or decrease in bonding strength occurs by irradiation of light at a wavelength different from that of the first radiation releasable adhesive layer. Furthermore, one is a first thermal releasable adhesive layer, and the other is a second thermal releasable adhesive layer whose decomposition or decrease in bonding strength occurs at temperature different from that of the first radiation releasable adhesive layer. The temperature of the release layer can be controlled by heat due to local absorption of laser light or UV light. According to necessity, the temperature range can be more precisely regulated by local cooling.
The release layer 115 can be formed on the first substrate 100 by vacuum evaporation or the like, instead of using a sheet. More specifically, the release layer can be formed of a material containing thermal foaming capsules. The UV releasable adhesive material can be a material whose cross-link breaks due to UV energy irradiation, or a material containing capsules capable of being foamed by absorption of UV light. The thermal releasable adhesive material can be REVALPHA (product name by NITTO DENKO), or the like.
When the second functional region 102 is transferred to still another substrate (this can be the second substrate), substantially the same process as that for transfer of the first functional region 101 can be performed. In other words, as illustrated in FIG. 4A, a bonding layer 305 (for example, the organic insulating layer) is formed on a third substrate 300 (the fifth step described above), and the masking with a resist layer is executed only to a transfer region of the second functional region 102. Then, the etching is executed by chemical etching or RIE to form the bonding layer 305 only on the transfer expected region of the third substrate 300.
Next, as illustrated in FIG. 4A, the second functional region 102 is aligned with and bonded to the bonding layer 305 (the sixth step described above). As illustrated in FIG. 4B, the first substrate 100 is separated from the second functional region 102 at the release layer 115 (the seventh step described above). Here, the release layer 115 is subjected to heating at about 170 degrees centigrade to cause decomposition or decrease in bonding strength of the thermal releasable adhesive layer of the release layer 115.
In the bonding method, after the substrate is divided into plural chips or segments with plural active layers, the chips can be successively bonded to the silicon substrate wafer with the built-in device circuit. Alternatively, in order to further reduce the process time, the bonding can be collectively performed between entire wafers. In this specification, the segment is an area including active layers for constructing at least a circuit unit determined at the time of transfer of the functional region. In the present invention, even in the case of transfer between substrates of different sizes, functional regions can be transferred with little loss by repetition of plural transfers. For example, from a 4-inch substrate of the first substrate, plural segments each including regions are formed by division of the substrate. The functional regions on the first substrate can be arranged densely according to the size of the second substrate (for example, 5, 6, 8, or 12-inch silicon wafer). To the first transfer region on the 5, 6, 8, or 12-inch second substrate, only the functional region out of the functional regions on the first substrate, corresponding to the first transfer region, is selectively transferred. Thereafter, to the remaining second transfer region on the 5, 6, 8, or 12-inch second substrate, the functional region out of the functional regions on the first substrate, corresponding to the second transfer region, is selectively transferred.
Thus, transfer of the functional regions densely arranged can be attained with little loss. In view of economical point and the like, such a method is beneficial in the transfer between different substrates, different materials and different devices, such as the transfer between an expensive substrate material having a relatively small diameter, and a relatively low cost substrate material like silicon that is producible and available with a large diameter. Further, where plural active layers are formed on the segment and the active layers are transferred plural times, it is possible to obtain plural host wafers of a large diameter to each of which different active layers are transferred. Its economical benefit can be more than the wafer obtained by a single transfer.
Where the step shown in FIGS. 4A and 4B is a final transfer step, the first substrate 100 can be separated from the second functional region 102 by removing the resist 107 used in the formation of the island first and second functional regions 101 and 102, using asher. Further, where the release layer 115 including only the thermal releasable adhesive layer, a portion of the release layer 115 corresponding to the first functional region 101 can be locally heated in the step of FIGS. 3A and 3B. In this case, the light blocking layer 117 is not used. When thermal releasable adhesive layers with a sufficient difference in release temperature are placed on the first substrate as illustrated in FIG. 6, the selective transfer can be achieved more precisely.
The positional relationship between the UV releasable release layer and the thermal releasable release layer of the release layer 115 can be inverted. In such a case, in the step of FIGS. 3A and 3B, a portion of the release layer 115 corresponding to the first functional region 101 is locally heated without using the light blocking layer 117, for example. In the step of FIGS. 4A and 4B, decomposition or decrease in bonding strength of the UV releasable release layer of the release layer 115 is caused by irradiation of UV light from a side of the transparent substrate 100. Thus, the first substrate 100 is separated from the second functional region 102.
First and second functional regions 101 and 102 can be arranged on the first substrate 100 in any island-like pattern. Typically, the island-like first and second functional regions 101 and 102 are arranged on the substrate 100 at a predetermined inter-distance as illustrated in FIG. 5B. In this case, regions 405 to be bonded or connected to the first functional regions 101 are arranged on the second substrate 200 at a predetermined inter-distance as illustrated in FIG. 5A, for example.
The region 405 is a region including a spacer for the bonding layer 205 and a CMOS chip area. In such a configuration, when only the first functional region 101 on the first substrate 100 is transferred to the spacer for the bonding layer 205 on the second substrate 200, the transfer can be efficiently achieved if the following relations 1 to 3 are satisfied.

l<or=L  (relation 1)

W>w  (relation 2)

W+S>w+s  (relation 3)

As illustrated in FIGS. 5A and 5B, w is the width of each of the first and second functional regions on the first substrate, l is the length of each functional region, s is the distance between the functional regions, W is the width of a region to be connected to the first functional region transferred to the second substrate, L is the length of the region on the second substrate, and S is the distance between the regions on the second substrate.

Further, satisfaction of the following relations 4 to 6 is also favorable.

l=L  (relation 4)

W=n*w  (relation 5)

W+S=n(w+s)  (relations 6)

where n is an integer equal to or more than 2. Here, the first functional regions 101 densely formed on the first substrate 100 can be selectively transferred to the region of the bonding layer 205 on the second substrate 200 repetitively, for example, n times. In such a case, when the functional region of a light emitting layer or the like is transferred to the circuit device or the like, the arrangement and adoptable number of the functional regions are not so limited by the arrangement of the circuit devices. Accordingly, a ratio of an area of the seed substrate usable for the formation of light emitting layers or the like can be increased. It is thus possible to efficiently use the compound semiconductor wafer that is expensive compared to the silicon wafer. Beneficial economical effects can be obtained in fabricating complex multi-functional-device integrated circuits and the like. Here, the second silicon substrate 200 illustrated in FIG. 5A includes the third functional region 405 with the CMOS chip, and the first functional region 101 is bonded or connected to the third functional region through the bonding layer 205. Similarly, the third substrate includes a fourth functional region, and the second functional region 102 is bonded to the fourth functional region through the bonding layer.

Further, on the seed substrate 103 illustrated in FIG. 1A, etching sacrificial layers and compound semiconductor laminated layers can be alternately formed repetitively. In such a case, the transfer of the compound semiconductor laminated layer to the first substrate can be repetitively executed. Etching stop layers, etching sacrificial layers, and compound semiconductor laminated layers can also be alternately formed repetitively. In this case, the number of thermal hysteresis times for epitaxial growth on the seed substrate is not plural.
Further, it is possible to entirely transfer the functional regions transferred to the second or third substrate to a final fourth substrate. In this case, the second or third substrate is a temporary carrier substrate similarly to the first substrate, but not a final transfer substrate. In such a transfer method, the following steps are performed. In the second step, the first functional region is bonded to the second substrate through the bonding layer of a second release layer that becomes releasable when subjected to a given process. For example, the bonding layer 205 of the organic insulating layer in FIG. 3A is replaced with a release layer like the release layer 115 in FIG. 1A. Then, the eighth to tenth steps are performed. In the eighth step, a second bonding layer of a predetermined thickness is placed on at least one of a fourth substrate and the first functional region bonded to the second substrate with the second release layer. Formation of the second bonding layer is approximately similar to that of the above bonding layer. No patterning is necessary. In the ninth step, all the functional regions on the second substrate are bonded to the fourth substrate by the second bonding layer. In the tenth step, the second substrate is separated from the functional regions at the second release layer. The second release layer is not required to be selectively releasable, so that the second release layer can be made simpler in structure than the above release layer. Further, the temporary second substrate can be formed of a material similar to that of the above first substrate, but no light blocking layer is necessary.
In this method, plural functional regions on the temporary first substrate 100 are selectively transferred to plural temporary second substrates, respectively. Thereafter, all the functional regions on each second substrate are entirely transferred to each final substrate. Although this method seems a roundabout way since the number of temporary substrates increases, it can make a working flow smooth and the transfer can be efficiently advanced in some situations.
Description will be made to specific examples directed to the transfer method, LED array, LED printer head, and LED printer.
First example including the step of preparing the first substrate with functional regions will be described with reference to FIG. 7 to FIG. 10. In FIG. 7, reference numeral 1000 denotes a substrate (for example, a compound semiconductor substrate, or a substrate of Ge or the like). Reference numeral 1009 denotes an etching stop layer, reference numeral 1010 denotes an etching sacrificial layer, and reference numeral 1020 denotes a compound semiconductor laminated layer. Reference numeral 1025 denotes a first groove for dividing the compound semiconductor laminated layer 1020 on the compound semiconductor substrate 1000 into island-like regions. The etching stop layer 1009 can be provided according to necessity.
Further, reference numeral 2000 denotes a first substrate (for example, a silicon substrate), reference numeral 2005 denotes a second groove formed in the first substrate 2000, and reference numeral 2010 denotes a release layer. A third groove 2006 is formed in the release layer 2010. The third groove 2006 connects to the second groove 2005. In this example, although the width and inter-distance of the first groove 1025 illustrated in FIG. 7 are equal to those of the second groove 2005, the width of the first groove 1025 can be made larger than that of the second groove 2005. Since the first groove 1025 should be connected to the groove 2005, the width of the compound semiconductor layer can be advantageously made narrower than the distance between the grooves 2005 penetrating the silicon substrate 2000. The first substrate 2000 is not limited to the silicon substrate. It can be a glass substrate or the like, as described above.
In FIG. 7, the width of the first groove 1025 is from several microns to several hundreds microns, for example. Further, the width of the second groove 2005 is from several microns to several hundreds microns, for example. The penetrating second groove 2005 can be above 50 microns, or above 100 microns, or above 200 microns so that an etchant can be readily introduced. However, it depends on the thickness of the first substrate 2000. It is important to determine the position of the penetrating groove 2005 so that a device region is not reduced as far as possible. Therefore, the position of the penetrating groove 2005 can be aligned with a scribe line having a chip separation width. There are many cases where the wire bonding pad on a silicon circuit (see FIG. 13) occupies an area larger than a device of the silicon circuit. In this case, the pad region cannot become a region to which the device is transferred. Therefore, when pad regions are concentrated to an end portion of the silicon circuit chip, regions of the first substrate corresponding to the concentrated pad regions can be used for the formation of the penetrating grooves.
FIG. 8 shows a cross section taken along a line a1-b1 in FIG. 7. As is apparent from FIG. 8, the compound semiconductor laminated layer 1020 is divided into island regions on the compound semiconductor substrate 1000. The island region protrudes from its surrounding region. The compound semiconductor laminated layer 1020 is to be divided in a desired pattern, and hence its divided shape may not be a rectangular one as illustrated in FIG. 8. The first groove 1025 is a space between the island regions of the compound semiconductor laminated layer 1020. In FIGS. 8 to 10, like elements in FIG. 7 are denoted by like reference numerals in FIG. 7.
FIG. 9 shows a cross section taken along a line a2-b2 in FIG. 7. As illustrated in FIG. 9, the groove 2005 is formed in the silicon substrate 2000. The semiconductor substrate grooves 2005 are formed at some appropriate inter-distances therebetween. Due to such arrangement of the penetrating grooves, for example, rigidity of the silicon wafer is not so degraded. Accordingly, handling is facilitated in the following processes. FIG. 10 shows the positional relationship between the first groove 1025 and the groove 2005 in the semiconductor substrate, and a manner in which the island region of the compound semiconductor laminated layer 1020 is arranged in a portion between the grooves 2005 in the semiconductor substrate 2000. In FIG. 10, release layer 2010, etching stop layer 1009, and etching sacrificial layer 1010 are omitted. As illustrated in FIG. 10, when the member of FIG. 8 and the member of FIG. 9 are stacked, the protruding island 1020 comes to a location between the penetrating grooves 2005.
The arrangement is not limited to that illustrated in FIGS. 9 and 10 so long as the protruding island 1020 can be supported. For example, the penetrating groove 2005 can be arranged in such a manner that it is orthogonal to the longitudinal direction of the protruding island 1020, or it intersects the protruding island 1020.
In this example, as described above, there is prepared the substrate structure including the seed substrate 1000, the etching sacrificial layer 1010, the compound semiconductor laminated layer 1020, the release layer 2010, and the first substrate 2000. The etchant can be introduced into the structure through the second groove 2005 penetrating the first substrate 2000 and the release layer 2010, and the third groove 2006. The etchant is thus brought into contact with the etching sacrificial layer 1010 to perform the etching process and separate the seed substrate 1000 from the substrate structure.
Although the first groove 1025 penetrates the etching sacrificial layer 1010 in FIG. 7, the first groove 1025 is not necessarily required to penetrate the etching sacrificial layer 1010. Exposure of the etching sacrificial layer 1010 to the etchant is important.
The etching stop layer 1009 is only performed according to necessity. Where the proceeding degree of etching is precisely managed timely, the etching stop layer may be omitted.
In the above transfer method, for example, when the LED is fabricated, the following compound semiconductor laminated layer is formed. P—AlAs layer (etching sacrificial layer) is formed on a p-type GaAs substrate (seed substrate), and the following layer are formed as the compound semiconductor laminated layer on the etching sacrificial layer. That is, p-type GaAs contact layer, p-type AlGaAs cladding layer, p-type AlGaAs active layer, n-type AlGaAs cladding layer, and n-type GaAs contact layer are deposited. Between the sacrificial layer and the compound semiconductor substrate, AlInGaP can be formed as the etching stop layer.
When the GaAs layer and AlGaAs layer are etched with sulfuric acid, the etching stops at the AlInGaP layer. Thereafter, the AlInGaP layer is removed by hydrochloric acid. When the GaAs layer and AlGaAs layer are etched with ammonia and hydrogen peroxide, AlAs can be used as the stop layer.
As the material of the compound semiconductor laminated layer, in place of the above GaAs system, AlGaInP system, InGaAsP system, GaN system, AlGaN system, or InAlGaN system can be used, for example.
Further, at least one of metal layer and DBR mirror can be provided on the compound semiconductor laminated layer. The metal layer can be formed of Au, Ti or Al, for example. Material of the metal layer can be selected according to the light emitting wavelength of the LED. When a red system LED of 600 nm to 800 nm is fabricated, Au, Ag or the like can be used as a material having high reflectance. In the case of a blue system LED near 360 nm, Al can be used.
The DBR mirror can be comprised of a structure wherein AlAs layers and AlGaAs layers are alternately formed plural times for GaAs system compound semiconductor material, for example. Or, Al oxide layers and Al0.2Ga0.8As layers are alternately formed. Because the aluminum oxide is difficult to form by the epitaxial growth, regulation of the refractive index can be executed by alternately changing a value of x in AlxGa1−xAs between 0.2 and 0.8.
Further, when the LED device is fabricated using the compound semiconductor laminated layer, a homo junction type LED can be adopted in place of the hetero junction type LED. In this case, after respective layers are formed by the epitaxial growth, pn-junction is formed in the active layer by impurity diffusion performed by the solid state diffusion method. To establish ohmic contact between a contact layer and a p-side or n-side electrode, the contact can have an impurity concentration higher than those of the cladding layers sandwiching the active layer.
Also in this first example, functional regions on the first substrate prepared as described above can be selectively transferred to another substrate with high accuracy owing to the presence of the bonding layer of a predetermined thickness.
Second example including the step of preparing the first substrate with functional regions will be described with reference to FIGS. 11A to 11D. In steps (an interface separation layer forming step, and a semiconductor layer forming step) of FIG. 11A, an interface separation layer 505 of a semiconductor layer (for example, InGaAs) is formed on a seed substrate 504 like a Ge substrate by the hetero epitaxial growth. The lattice constant and/or coefficient of thermal expansion of the semiconductor layer are different from those of the substrate 504. Then, a semiconductor layer 506 of GaAs or the like is formed on the interface separation layer 505. The separation layer 505 corresponds to the sacrificial layer described above.
In a bonding step illustrated in FIG. 11B, the semiconductor layer 506 on the seed substrate 504 is bonded to a release layer 510 formed on a first substrate 507 of Si or the like to obtain a composite structure 508. The release layer 510 can be the above-described release layer.
In a separating step of FIG. 11C, cracks extending in in-surface directions are generated in the interface separation layer 505, and/or an interface between the interface separation layer 505 and the semiconductor layer 506, and/or an interface between the interface separation layer 505 and the seed substrate 504. Thus, the semiconductor layer 506 and the first substrate 507 are separated from the composite structure 508. In the above steps, the semiconductor layer 506 is transferred from the seed substrate 504 to the first substrate 507. As illustrated in FIG. 11D, a substrate structure 509 comprised of the first substrate 507 with the release layer 510 and semiconductor layer 506 thereon can be obtained.
In the above steps, strain energy due to mismatch of the lattice constant and/or coefficient of thermal expansion is generated in a concentrated fashion in the interface separation layer 505, and/or the interface between the interface separation layer 505 and the semiconductor layer 506, and/or the interface between the interface separation layer 505 and the seed substrate 504. Thereafter, a separation inducing force is applied to the entire composite structure 508, or a portion thereof (for example, the interface separation layer 505, and/or the interface between the interface separation layer 505 and the semiconductor layer 506, and/or the interface between the interface separation layer 505 and the seed substrate 504). With the aid of the strain energy generated in the composite structure 508, the semiconductor layer 506 and first substrate 507 can be separated from the composite structure 508. Grooves are formed to divide the semiconductor layer 506 into plural island-like functional regions. Prior to the bonding step of FIG. 11B, the grooves can be formed to divide the semiconductor layer 506 into the island-like functional regions.
The seed substrate 504 can be formed of a single crystal material. In place of Ge, the seed substrate 504 can also be formed of Al2O3, SiC, GaAs, InP, or Si, for example. The interface separation layer 505 with the above-described lattice constant and/or coefficient of thermal expansion can be composed of a compound semiconductor material such as InGaAs, GaN, InGaN, AlGaN, AlN, AlAs, AlGaAs, InAlAs, InGaAlP, InGaAsP, or InGaP.
The semiconductor layer 506 can be composed of a compound semiconductor material including a material such as GaAs, GaN, AlGaAs, InP, InGaN, AlGaN, AlN, AlAs, InGaAs, InAlAs, InGaAlP, InGaAsP, or InGaP. The first substrate 507 can be formed of a semiconductor substrate of Si or the like, a metal substrate of Al, Cu, Cu—W or the like, an insulating substrate of glass or the like, or an elastic substrate of plastics or the like.
In the step of separating the semiconductor layer and first substrate from the composite structure 508, a fluid W (liquid or gas) can be blown to the interface separation layer 505 or its vicinity. Injection of the fluid W to the above-described location can generate cracks in the injected portion of the composite structure, leading to the above separation.
Also in the second example, functional regions on the first substrate prepared as described above can be selectively transferred to another substrate with high accuracy owing to the presence of the bonding layer of a predetermined thickness.
Description will be made to a third example directed to an LED array fabricated by the above transfer method. The LED array illustrated in FIG. 12 can be obtained by using the above transfer method. FIG. 12 shows a structure wherein the drive circuit and an LED array 4000 are connected and arranged on a print-circuit board 5000. The drive circuit and LED array can be obtained in the following manner. Plural LED devices are formed on the silicon substrate as illustrated in FIG. 5A, and plural portions acquired by division of the silicon substrate using dicing are arranged on the print-circuit board 5000. Cross sectional structures of each LED device and each drive circuit are similar to an LED device including an LED light emitting region and a driver circuit illustrated in FIG. 13 described below.
In the structure of FIG. 12, plural sets of LED array/drive circuits 4000 are linearly arranged on the print-circuit board 5000. In the LED array/drive circuit 4000, the LED device and the driver device of driver IC are electrically connected as illustrated in FIG. 13. A rod lens array 3000 (for example, SLA: Selfoc lens array) can be placed facing the LED array 4000 according to necessity. Thus, the LED printer head can be fabricated. Light emitted from the linearly-arranged LED array 4000 is condensed by the rod lens array 3000 to achieve image formation by the LED array.
Where LED device constituent layers are formed on the silicon substrate interposing a metal layer or DBR mirror therebetween, a fine light spot can be obtained owing to improvement of the directional property. In such a case, the LED printer head can be set up without using the rod lens array.
In a connecting configuration between the driver IC (driver circuit) and the LED device, the driver IC can be directly built in the silicon substrate, and connected to the LED device, as illustrated in FIG. 13. In the configuration of FIG. 13, an insulating layer 7010 of an organic material (see the bonding layer 205 in FIGS. 3A and 3B) is formed on a silicon substrate 7000 with a MOS transistor 7060 constituting the driver IC. An LED light emitting region 7070 including the compound semiconductor laminated layer is provided on the insulating layer 7010. Further, reference numeral 7080 denotes another insulating layer, reference numeral 7050 denotes a wire bonding pad forming a source or drain region of the MOS transistor 7060. Such a configuration can be fabricated from the structure of the second substrate 200 as illustrated in FIG. 3B, for example.
FIG. 14 illustrates a structure for matrix driving. A light emitting device array circuit 8500 in FIG. 14 can be driven in a time sharing manner for reducing the number of electrodes. In FIG. 14, reference numeral 8011 denotes an n-side electrode, reference numeral 8017 denotes a p-side electrode, reference numeral 8021 denotes an insulating layer on n-type AlGaAs, reference numeral 8022 denotes an insulating layer on p-type GaAs contact layer, and reference numeral 8023 denotes a light emitting region.
Low-cost high-performance LED array and LED printer head described above can be achieved by using the transfer method of the present invention.
FIG. 15A shows an example of an LED printer using the LED printer head described above. The LED printer includes the LED printer head, a photosensitive drum, and an electrostatic charging device. An image forming unit forms an electrostatic latent image on the photosensitive drum by using a light beam from a light source of the LED printer head.
In FIG. 15A of a schematic cross-sectional view showing a configuration of the LED printer, the photosensitive drum 8106 rotatable in a clockwise direction is placed in a printer body 8100. Above the photosensitive drum 8106, the LED printer head 8104 is arranged for exposure of the photosensitive drum. The LED printer head 8104 includes an LED array 8105 with plural light emitting diodes each emitting light according to an image signal, and a rod lens array 8101 for forming an image of radiation pattern of each light emitting diode on the photosensitive drum 8106. The rod lens array 8101 has the configuration described above. An image-formed plane of the light emitting diode is caused to coincide with a surface of the photosensitive drum 8106 by the rod lens array 8101. In other words, the optical conjugate relationship between the radiation surface of the light emitting diode and the photosensitive surface of the photosensitive drum is achieved by the rod lens array.
Around the photosensitive drum 8106, an electrostatic charging device 8103 for uniformly charging the surface of the photosensitive drum 8106, and a developing device 8102 for attaching toner to the photosensitive drum 8106 according to an exposure pattern by the printer head 8104 to form a toner image. There are further arranged a transfer electrostatic charging device 8107 for transferring the toner image to a transfer material like a copy sheet, and a cleaning portion 8108 for collecting waste toner remaining on the photosensitive drum 8106 subsequent to the transfer.
Further, in the printer body 8100, a sheet cassette 8109 for containing the transfer material, and a sheet feeding portion 8110 for feeding the transfer material to a location between the photosensitive drum 8106 and the electrostatic charging device 8107 are arranged. Furthermore, there are arranged a fixing device 8112 for fixing the transferred toner image on the transfer material, a conveying portion 8111 for conveying the transfer material to the fixing device 8112, and a sheet discharging tray 8113 for supporting the transfer material discharged subsequent to the fixation.
An example of an LED color printer will be described. The LED color printer includes plural sets of the LED printer head, the photosensitive drum, the electrostatic charging device, and the image forming unit for forming the electrostatic latent image on the photosensitive drum by using the LED printer head as a light source. FIG. 15B shows a schematic configuration of the LED color printer. In FIG. 15B, reference numerals 9001, 9002, 9003 and 9004 denote photosensitive drums of magenta (M), cyan (C), yellow (Y), and black (K), respectively. Reference numerals 9005, 9006, 9007 and 9008 denote respective LED printer heads. Reference numeral 9009 denotes a conveyer belt for conveying the transfer material and bringing the transfer material into contact with respective photosensitive drums 9001, 9002, 9003 and 9004. Reference numeral 9010 denotes a registration roller for feeding the sheet, and reference numeral 9011 denotes a fixing roller.
Further, reference numeral 9012 denotes a charger for adsorption-supporting the transfer material on the conveyer belt 9009, reference numeral 9013 denotes a charge eliminating device, and reference numeral 9014 denotes a sensor for detecting a leader of the transfer material.
As described in the foregoing, owing to the transfer method of the present invention, the seed substrate like the GaAs substrate can be efficiently used, and reused. Further, the functional region can be selectively transferred with high reliability, and hence low-cost high-performance LED array, LED printer head, LED printer and the like can be provided.
The present invention can be applied to an array device wherein semiconductor devices are arranged in an array on a semiconductor substrate, an LED printer using LED devices formed on a semiconductor substrate, a display apparatus using LED devices formed on a semiconductor substrate, manufacture of an optical transceiver device and an optical receiver device, and the like. In the case of the optical receiver device, a reliable scanner can be provided.
Except as otherwise discussed herein, the various components shown in outline or in block form in the Figures are individually well known and their internal construction and operation are not critical either to the making or using, or to a description of the best mode of the invention.
This application claims the benefit of Japanese Patent Application No. 2008-282679, filed Nov. 4, 2008, which is hereby incorporated by reference herein in its entirety.

## Claims

1. A method comprising:
arranging a first bonding layer of a first predetermined thickness at a region on a second substrate to which a first functional region bonded on a release layer on a first substrate is to be transferred, the release layer being capable of falling into a releasable condition when subjected to a process;
bonding the first functional region to the second substrate through the first bonding layer;
separating the first substrate from the first functional region at the release layer;
forming a predetermined unevenness on a region on the second substrate, other than the region to which the first functional region is to be transferred, and
wherein plural functional regions, including the first and a second functional regions, are bonded on the release layer on the first substrate, and the unevenness is formed on a region on the second substrate, corresponding to the second functional region remaining on the first substrate.

2. The method according to claim 1, wherein the first substrate has a light-transmitting property, the release layer includes a material subject to decomposition or decrease in bonding strength by irradiation of light, and the separating the first substrate includes performing irradiation of light to a portion of the release layer between the first functional region and the first substrate.

3. The method according to claim 1, wherein the first and the second functional regions are arranged on the first substrate at a first predetermined inter-distance, regions each of which is to be connected to the first functional region transferred to the second substrate are arranged on the second substrate at a second predetermined inter-distance.

4. The method according to claim 3, wherein relations 1 to 3 are satisfied


l<or=L  (relation 1)



W>w  (relation 2)



W+S>w+s  (relation 3)


where w is the width of each of the first and second functional regions on the first substrate, l is the length of each functional region, s is the distance between the functional regions, W is the width of the region to be connected to the first functional region transferred to the second substrate, L is the length of the region on the second substrate, and S is the distance between the regions on the second substrate.

5. The method according to claim 1, further comprising arranging a second bonding layer of a predetermined thickness on at least one of the second functional region remaining on the first substrate, and a region, to which the second functional region is to be transferred, on the second substrate or a region, to which the second functional region is to be transferred, on a third substrate; bonding the second functional region to the second substrate or the third substrate through the bonding layer; and a separating the first substrate from the second functional region at the release layer.

6. The method according to claim 5, further comprising forming a predetermined unevenness on a region on the second or third substrate, other than the region to which the second functional region is to be transferred.

7. The method according to claim 5, wherein the first substrate has a light-transmitting property, the release layer includes a material whose decomposition or decrease in bonding strength occurs by irradiation of light, and the seventh step includes a step of performing irradiation of light to a portion of the release layer between the second functional region and the first substrate.

8. The transfer method according to claim 5, wherein the release layer includes a material whose decomposition or decrease in bonding strength occurs by heating or cooling, and the seventh step includes a step of heating or cooling the release layer.

9. The method according to claim 5, wherein the second or third substrate includes a fourth functional region, and the second functional region is bonded to the fourth functional region through the bonding layer.

10. The method according to claim 1, wherein the second substrate includes a third functional region, and the first functional region is bonded to the third functional region through the bonding layer.

11. The method according to claim 1, wherein, the first functional region is bonded to the second substrate through the bonding layer which is a second release layer capable of falling into a releasable condition when subjected to a process, and
further comprising: arranging a second bonding layer of a second predetermined thickness on at least one of the first functional region on the second substrate, and a region, to which the first functional region is to be transferred, on a fourth substrate; bonding the first functional region on the second substrate to the fourth substrate through the second bonding layer; and separating the second substrate from the first functional region at the second release layer.

12. The method according to claim 1, wherein the first or second functional region on the first includes a compound semiconductor layer, and the first substrate is prepared by preparing a substrate structure in which the first or second functional region is formed by providing an etching sacrificial layer, the compound semiconductor layer, the release layer, and the first substrate on a compound semiconductor substrate in this order, a first groove is formed in the compound semiconductor layer, a penetrating second groove is formed at least one of the first substrate and the compound semiconductor substrate so that the penetrating second groove is connected to the first groove, and separating the compound semiconductor substrate from the substrate structure by bringing an etchant into contact into the etching sacrificial layer through the first groove and the penetrating second groove to etch the etching sacrificial layer.

13. The transfer method according to claim 1, wherein the first or second functional region includes a compound semiconductor layer, and the first substrate is prepared by: forming an interface separation layer on a seed substrate by a hetero epitaxial growth, forming the compound semiconductor layer on the interface separation layer, bonding the seed substrate with the interface separation layer and the compound semiconductor layer to the first substrate through the release layer, and separating the first substrate with the release layer and the compound semiconductor layer from a composite structure, utilizing the interface separation layer, to obtain the first substrate with the compound semiconductor layer.

14. A method comprising:
arranging a first bonding layer of a first predetermined thickness at a region on a second substrate to which a first functional region bonded on a release layer on a first substrate is to be transferred, the release layer being capable of falling into a releasable condition when subjected to a process;
bonding the first functional region to the second substrate through the first bonding layer;
separating the first substrate from the first functional region at the release layer;
forming a predetermined unevenness on a region on the second substrate, other than the region to which the first functional region is to be transferred, and
wherein the release layer includes a material subject to decomposition or decrease in bonding strength by heating or cooling, and the separating the first substrate includes heating or cooling the release layer.