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CONTACT REPORT – RTI PROJECT NO. 0210826.015.002

From: Jason Goldsmith, Roy Neulicht, Karen Schaffner

Date of Contact: December 4, 2009 Contacted by: Telephone

Person Contacted/Title: Scott Lausch, District Sales Manager and Jacques LaBrosse, Sales Specialist Company/Agency: MKS Instruments

Telephone Number: 610-631-1042

=========================================== CONTACT SUMMARY

RTI identified the MKS Instruments Multigas 2030 FTIR instrume nt as a potential infrared monitoring technology to be used as a continuous emissions monitor (CEMS) for the measurement of fluorinated greenhouse gases. A brochure on the instrument available on the MKS Instruments corporate website indicated that the e quipment can be used for the measurement of PFC gases. Scott Lausch, the regional MK S Instruments representative for our region, contacted RTI in response to an inquiry and arra nged for a conference call with himself and Jacques LaBrosse, who is involved with both sales and applications of the equipment. Jason Goldsmith, Roy Neulicht and Karen Schaffner from RTI I nternational participated in the

conference call.

Mr. Lausch and Mr. LaBrosse (MKS) identified one applica tion of the Multigas equipment for the monitoring of nitrogen trifluoride (NF 3 ) at a production facility in Delaware that uses a 2 centimeter gas cell. MKS explained that their company ha s developed a standard list of gases for which the FTIR CEMS equipment has been calibrated, includ ing certain fluorinated gases. They offered to share the list of compounds with RTI. [List from MKS was received on December 8, 2009.] They noted that the user would not need to run calibra tion gases in the equipment as it is already factory calibrated. MKS typically sets up a so ftware package based on the compounds expected in the measured vent, and the software is revise d for other compounds as needed. For those gases whose spectrum is not included in the provided li brary, MKS can perform a search to identify those unknowns. The unit typically has a standa rd cell, however, depending on the concentration of pollutants, other cell lengths are ava ilable. A shorter cell length would be used for higher concentrations and a longer cell length would be used for lower concentrations. Another option for higher concentrations might be to use gas dilution of the sample along with a standard cell. MKS stated that the accuracy of the equ ipment is within 1 percent.2

Roy Neulicht inquired as to the potential issue of hydrogen fluoride (HF) in the gas stream creating problems for the equipment. MKS responded that th ey use specially configured gas cells to address this issue, specifically a magnesium fl uoride (“mirror”) coating on gold is used to protect cells from high HF concentrations and use special types of unit seals (o-rings) that are inert to corrosive gases. They did note that in the perc ent range of concentration, hydrogen fluoride is a problematic issue commonly dealt with. MKS also suggested that unit seals that are inert to corrosive compounds can be used.

The MKS FTIR unit is not used for leak detection and repair (LDAR). With respect to the equipment being portable, MKS responded that the equipment c an be placed on a cart for transport, but is not available as a portable handheld unit . They mentioned that a benchtop model mass spectrometry unit for atmospheric gas sampling would be more appropriate for LDAR measurements. MKS also noted that the sample c ell can be adjusted to accommodate concentration levels, where a shorter cell length can be used for higher concentrations and longer cell lengths can be used for lower concentrations. Ano ther option for high concentrations might

include use of dilution and a standard cell.

MKS quoted the FTIR CEMS equipment as costing approximately $64,000, with on-site installation costs of $2400, including advanced training at the facility. MKS noted that the units require liquid nitrogen cooling and the liquid nitrogen vessel ( dewar) has a limited capacity. These nitrogen cooled units can operate for up to 12 hours o n a single charge (nitrogen), and continuous operation of the unit could be achieved through th e use of an extended dewar with an automated fill cycle. With the extended dewar, the unit c an operate for approximately 3 days. The cost of an extended dewar was quoted as $3,600. MKS not ed that the FTIR CEMS can operate 24 hr/day, and for continuous operation of the unit an automated fill cycle would need to be arranged. MKS also offers onsite installation and training for an additional $2,400, and facility staff can attend offsite training classes too. A facility would also need to purchase a data acquisition system (DAS) to record and help with reportin g data.

MKS suggested an FTIR CEMS demonstration meeting that coul d be set up with EPA. We discussed the possibility of arranging a demo.