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CONTACT REPORT – RTI PROJECT NO. 0210826.015.002 

From: Jason Goldsmith, Roy Neulicht, Karen Schaffner 

Date of Contact: December 4, 2009 

Contacted by: Telephone 

Person Contacted/Title: Scott Lausch, District Sales Manager and 

Jacques LaBrosse, Sales Specialist 

Company/Agency: MKS Instruments 

 

Telephone Number: 610-631-1042 

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CONTACT SUMMARY 

RTI identified the MKS Instruments Multigas 2030 FTIR instrument as a potential infrared 

monitoring technology to be used as a continuous emissions monitor (CEMS) for the 

measurement of fluorinated greenhouse gases. A brochure on the instrument available on the 

MKS Instruments corporate website indicated that the equipment can be used for the 

measurement of PFC gases. Scott Lausch, the regional MKS Instruments representative for our 

region, contacted RTI in response to an inquiry and arranged for a conference call with himself 

and Jacques LaBrosse, who is involved with both sales and applications of the equipment. Jason 

Goldsmith, Roy Neulicht and Karen Schaffner from RTI International participated in the 

conference call. 

Mr. Lausch and Mr. LaBrosse (MKS) identified one application of the Multigas equipment for 

the monitoring of nitrogen trifluoride (NF3) at a production facility in Delaware that uses a 2 

centimeter gas cell. MKS explained that their company has developed a standard list of gases for 

which the FTIR CEMS equipment has been calibrated, including certain fluorinated gases. They 

offered to share the list of compounds with RTI. [List from MKS was received on December 8, 

2009.] They noted that the user would not need to run calibration gases in the equipment as it is 

already factory calibrated. MKS typically sets up a software package based on the compounds 

expected in the measured vent, and the software is revised for other compounds as needed. For 

those gases whose spectrum is not included in the provided library, MKS can perform a search to 

identify those unknowns. The unit typically has a standard cell, however, depending on the 

concentration of pollutants, other cell lengths are available. A shorter cell length would be used 

for higher concentrations and a longer cell length would be used for lower concentrations. 

Another option for higher concentrations might be to use gas dilution of the sample along with a 

standard cell. MKS stated that the accuracy of the equipment is within 1 percent. 
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Roy Neulicht inquired as to the potential issue of hydrogen fluoride (HF) in the gas stream 

creating problems for the equipment. MKS responded that they use specially configured gas 

cells to address this issue, specifically a magnesium fluoride (“mirror”) coating on gold is used to 

protect cells from high HF concentrations and use special types of unit seals (o-rings) that are 

inert to corrosive gases. They did note that in the percent range of concentration, hydrogen 

fluoride is a problematic issue commonly dealt with. MKS also suggested that unit seals that are 

inert to corrosive compounds can be used. 

The MKS FTIR unit is not used for leak detection and repair (LDAR). With respect to the 

equipment being portable, MKS responded that the equipment can be placed on a cart for 

transport, but is not available as a portable handheld unit. They mentioned that a benchtop 

model mass spectrometry unit for atmospheric gas sampling would be more appropriate for 

LDAR measurements. MKS also noted that the sample cell can be adjusted to accommodate 

concentration levels, where a shorter cell length can be used for higher concentrations and longer 

cell lengths can be used for lower concentrations. Another option for high concentrations might 

include use of dilution and a standard cell. 

MKS quoted the FTIR CEMS equipment as costing approximately $64,000, with on-site 

installation costs of $2400, including advanced training at the facility. MKS noted that the units 

require liquid nitrogen cooling and the liquid nitrogen vessel (dewar) has a limited capacity. 

These nitrogen cooled units can operate for up to 12 hours on a single charge (nitrogen), and 

continuous operation of the unit could be achieved through the use of an extended dewar with an 

automated fill cycle. With the extended dewar, the unit can operate for approximately 3 days. 

The cost of an extended dewar was quoted as $3,600. MKS noted that the FTIR CEMS can 

operate 24 hr/day, and for continuous operation of the unit an automated fill cycle would need to 

be arranged. MKS also offers onsite installation and training for an additional $2,400, and 

facility staff can attend offsite training classes too. A facility would also need to purchase a data 

acquisition system (DAS) to record and help with reporting data. 

MKS suggested an FTIR CEMS demonstration meeting that could be set up with EPA. We 

discussed the possibility of arranging a demo.