# Patent

## Title
Method for forming wiring structure

## Abstract

After a plurality of grooves are formed in an insulating film and in an antireflection film on the insulating film, a barrier metal film and a conductive film are deposited on the anti-reflection film such that each of the grooves is filled. Subsequently, the portions of the conductive film outside the grooves are removed by a first polishing step and then the portions of the barrier metal film outside the grooves are removed by polishing. Thereafter, foreign matter adhered to the surface of the anti-reflection film is removed and a third polishing step is conducted on the surface of the anti-reflection film using an abrasive agent of the same type as used in the first polishing step of the conductive film.

## Background
BACKGROUND OF THE INVENTION
The present invention relates to a method for forming a wiring structure in a semiconductor device.
As a conventional method for forming a wiring structure, there has been used one disclosed in, e.g., Japanese Laid-Open Patent Publication No. HEI 10-214834. Referring to the drawings, the conventional method for forming a wiring structure will be described by using, as an example, the case where plugs are formed in holes formed in an insulating film.
FIGS. 8A to 8C are cross-sectional views illustrating the individual process steps of the conventional method for forming a wiring structure.
First, as shown in FIG. 8A, a silicon dioxide film 12 having a thickness of about 1 μm is deposited as an insulating film on a silicon substrate 11. Then, holes 13 each having a diameter of about 0.8 μm are formed by lithography and dry etching in specified regions of the silicon dioxide film 12 to extend therethrough. Next, a titanium film 14 having a thickness of 30 nm and serving as a lower-layer conductive film and a titanium nitride film 15 having a thickness of 100 nm and serving as an interlayer conductive film are deposited successively by PVD (physical vapor deposition) over the entire surface of the silicon dioxide film 12 including the holes 13. Thereafter, a tungsten film 16 having a thickness of 1 μm and serving as an upper-layer conductive film is deposited by CVD (chemical vapor deposition) over the entire surface of the titanium nitride film 15, whereby a conductive film having a three-layer structure is deposited. In the three-layer conductive film, each of the titanium film 14 and the titanium nitride film 15 is a barrier metal.
Next, the respective portions of the tungsten film 16 and the titanium nitride film 15 deposited on regions outside the holes 13 are removed by chemical mechanical polishing (CMP) using an abrasive agent, as shown in FIG. 8B. This completely exposes the portions of the titanium film 14 deposited on the regions outside the holes 13.
Next, the portions of the titanium film 14 deposited on the regions outside the holes 13 are removed by CMP using another abrasive agent, as shown in FIG. 8C. This forms plugs 17 composed of tungsten in the holes 13 and exposes the silicon dioxide film 12.
Although the formation of tungsten plugs has been described above by way of example, it is also possible to form, e.g., copper wires in wiring grooves formed in an insulating film by the same method. With the scaling down of a wiring pattern, the spacing between adjacent wires (wire-to-wire spacing) has been reduced increasingly so that an anti-reflection layer (hereinafter referred to as ARL) has been used in a lithographic step for forming wiring grooves, via holes, and the like.
However, the formation of wires using an ARL film based on the foregoing conventional method for forming a wiring structure has the problem that a short circuit occurs between wires.
SUMMARY OF THE INVENTION
It is therefore an object of the present invention to prevent a short circuit between wires buried in an insulating film and in an ARL film on the insulating film.
To attain the object, the present inventors have examined causes for the short circuit occurring between the wires in the conventional method for forming a wiring structure and made the following finding.
In forming wires in accordance with the conventional method for forming a wiring structure, a barrier metal under polishing locally peels off to form foreign matter. Since the foreign matter is hard, if an ARL film composed of a material more fragile than an insulating film present between wires has been formed on the insulating film, the foreign matter causes a microcrack in a surface of the ARL film. In the case where the microcrack extends from one wire to another wire adjacent thereto, if a metal (the barrier metal or a wiring conductive film) is buried in the microcrack during the formation of wiring, a short circuit occurs between the wires.
Since the spacing between wires is reduced as the wiring structure is scaled down, the microcrack mentioned above is more likely to extend between the adjacent wires so that the metal buried in the microcrack is more likely to form a pseudocross-linking structure between the wires. As a result, a short circuit is more likely to occur between the wires.
FIG. 9 is a plan view showing the metal buried in the microcrack caused in the ARL film between the wires.
The present invention has been achieved in view of the foregoing finding.
Specifically, a method for forming a wiring structure according to the present invention comprises: a groove forming step of forming an anti-reflection film on an insulating film and then forming, in each of the anti-reflection film and the insulating film, a first groove and a second groove adjacent to the first groove; a film depositing step of depositing a barrier metal film and a conductive film on the anti-reflection film such that each of the first and second grooves is filled therewith; a first polishing step of removing the portion of the conductive film outside the first and second grooves by polishing; a second polishing step of removing, after the first polishing step, the portion of the barrier metal film outside the first and second grooves by polishing; a foreign matter removing step of removing a foreign matter adhered to a surface to be polished after the second polishing step therefrom; and a third polishing step of polishing, after the foreign matter removing step, a surface of the anti-reflection film by using an abrasive agent of the same type as used in the first polishing step.
In the method for forming a wiring structure according to the present invention, the barrier metal film and the conductive film are buried in the grooves formed in the insulating film and in the anti-reflection film on the insulating film and then the respective portions of the conductive film and the barrier metal film outside the grooves are removed by polishing. Thereafter, the foreign matter adhered to the surface to be polished during polishing is removed and then the surface of the anti-reflection film is polished. This achieves the following effects if a microcrack is formed in the surface of the anti-reflection film present between the grooves (i.e., between wires) during the polishing of the barrier metal film and a metal is buried in the microcrack. Since final polishing is performed with respect to the surface of the anti-reflection film after the foreign matter adhered to the surface to be polished during the polishing of the barrier metal film or the like is removed therefrom, it is possible to remove the metal buried in the microcrack, while preventing new damage caused by the foreign matter to the surface of the anti-reflection film. This allows the situation in which the metal buried in the microcrack causes cross-linking between the wires to be circumvented and thereby reduces the frequency of short circuits occurring between the wires. As a result, high-performance wiring can be formed.
In addition, the method for forming a wiring structure according to the present invention uses, in the third polishing step (polishing of the anti-reflection film), an abrasive agent of the same type as used in the first polishing step (polishing of the conductive film). The arrangement reliably removes the metal buried in the crack of the surface of the antireflection film if the metal is a part of the conductive film.
Preferably, the method for forming a wiring structure according to the present invention further comprises, between the second and third steps, the step of removing a foreign matter adhered to polishing pad used in the second polishing step therefrom.
The arrangement more reliably prevents damage to the surface of the antireflection film if the polishing pad used in the second polishing step (polishing of the barrier metal film) is used also in the third polishing step (polishing of the anti-reflection film). In this case, if the step of removing the foreign matter adhered to the polishing pad therefrom includes the step of cleaning the polishing pad, damage to the surface of the anti-reflection film can be prevented more reliably. The same effect is achievable if the step of removing the foreign matter adhered to the polishing pad therefrom includes the step of brushing a surface of the polishing pad with a grindstone.
In the method for forming a wiring structure according to the present invention, each of the first and third polishing steps is preferably performed by using the same polishing system and the same polishing pad.
The arrangement improves work efficiency in the formation of wiring.
In the method for forming a wiring structure according to the present invention, a polishing time is preferably shorter in the third polishing step than in each of the first and second polishing steps.
The arrangement prevents the conductive film buried in the grooves from being significantly polished in the third polishing step so that an increase in wiring resistance is prevented.
In the method for forming a wiring structure according to the present invention, a pressure under which the surface to be polished is pressed onto a polishing pad and a rotating speed of the polishing pad are preferably higher in the third polishing step than in the second polishing step. In other words, the foregoing pressure and rotating speed in the third polishing step are preferably the same as in the first polishing step. If the metal buried in the crack in the surface of the anti-reflection film is a part of the conductive film, the arrangement more reliably removes the metal.
In the method for forming a wiring structure according to the present invention, the third polishing step may include a polishing step performed in two stages under different polishing conditions. In this case, an abrasive agent used in one of the two stages of the polishing step is preferably the same as used in the second polishing step and an abrasive agent used in the other of the two stages of the polishing step is preferably the same as used in the first polishing step.
The arrangement improves a yield rate in the formation of wiring.
In the method for forming a wiring structure according to the present invention, the foreign matter removing step preferably includes the step of cleaning the surface to be polished by using an organic acid or an organic alkali.
The arrangement ensures the removal of the foreign matter adhered to the surface to be polished.
In the method for forming a wiring structure according to the present invention, if a spacing between the first and second grooves is 0.25 μm or less, the present invention more remarkably achieves the foregoing effects than the prior art.
In the method for forming a wiring structure according to the present invention, the first and second grooves may be arranged in parallel with each other.
In the method for forming a wiring structure according to the present invention, formation of wires in the first and second grooves may be performed by a dual damascene method.
In the method for forming a wiring structure according to the present invention, the anti-reflection film may be composed of a silicon containing material.
The arrangement ensures an improved accuracy with which a pattern is formed in a lithographic step for forming the grooves. If a KrF excimer laser beam (at a wavelength of 248 nm), e.g., is used as a light source in the lithographic step, a multilayer film consisting of a lower-layer SiON film having a thickness of 75 nm and an upper-layer SiO2 film having a thickness of 8 nm exhibits a high absorption efficiency to the KrF excimer laser beam so that the multilayer film has excellent performance as an anti-reflection film.
If a silicon compound is used as a material composing the anti-reflection film, equipment for forming a hole in the silicon dioxide film can be used commonly as equipment for forming a hole in the anti-reflection film, which achieves a reduction in fabrication cost for the semiconductor device.
In the method for forming a wiring structure according to the present invention, the conductive film is preferably a copper film and the barrier metal film is preferably a tantalum film, a tantalum nitride film, or a multilayer film composed of a tantalum film and a tantalum nitride film.
The arrangement allows the formation of low-resistance wiring. In this case, a wire formed in the first or second groove may be connected electrically to a plug formed under the wire.



BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1A to 1C are cross-sectional views illustrating the individual process steps of a method for forming a wiring structure according to a first embodiment of the present invention;
FIGS. 2A and 2B are cross-sectional views illustrating the individual process steps of the method for forming a wiring structure according to the first embodiment;
FIGS. 3A and 3B are cross-sectional views illustrating the individual process steps of the method for forming a wiring structure according to the first embodiment;
FIG. 4 is a cross-sectional view showing one of the process steps of the method for forming a wiring structure according to the first embodiment;
FIG. 5 is a schematic structural view of a CMP system used in the method for forming a wiring structure according to the first or second embodiment of the present invention;
FIGS. 6A to 6C are cross-sectional views illustrating the individual process steps of the method for forming a wiring structure according to the second embodiment of the present invention;
FIGS. 7A and 7B are cross-sectional views illustrating the individual process steps of the method for forming a wiring structure according to the second embodiment;
FIGS. 8A to 8C are cross-sectional views illustrating the individual process steps of a conventional method for forming a wiring structure; and
FIG. 9 is a view for illustrating the problem of the conventional method for forming a wiring structure.



DETAILED DESCRIPTION OF THE INVENTION
Embodiment 1
Referring to the drawings, a description will be given herein below to a method for forming a wiring structure according to a first embodiment of the present invention.
FIGS. 1A to 1C, FIGS. 2A and 2B, FIGS. 3A and 3B, and FIG. 4 are cross-sectional views illustrating the individual process steps of the method for forming a wiring structure according to the first embodiment.
First, as shown in FIG. 1A, a first silicon dioxide film 101 is formed on a substrate 100 composed of, e.g., silicon. Then, lower-layer wires 102 each composed of, e.g., a tungsten film are formed on the first silicon dioxide film 101. Thereafter, a second silicon dioxide film 103 is deposited by, e.g., CVD over the upper surface of the first silicon dioxide film 101 including the upper surfaces of the lower-layer wires 102.
Next, as shown in FIG. 1B, via holes 104 reaching the lower-layer wires 102 are formed by lithography and dry etching in the second silicon dioxide film 103.
Next, as shown in FIG. 1C, a titanium (Ti) film 105 and a titanium nitride (TiN) film 106 are deposited successively by, PVD or CVD on the second silicon dioxide film 103 such that the via holes 104 are filled midway therewith. Then, a tungsten film 107 is formed by, e.g., CVD on the titanium nitride film 106 such that the via holes 104 are filled completely therewith. In the resulting structure, each of the titanium film 105 and the titanium nitride film 106 is a barrier metal.
Next, as shown in FIG. 2A, the respective portions of the titanium film 105, the titanium nitride film 106, and the tungsten film 107 deposited on regions outside the via holes 104 are removed by, e.g., CMP. As a result, plugs 108 composed of tungsten which are protected reliably by the barrier metals are formed in the via holes 104 in the second silicon dioxide film 103.
Next, as shown in FIG. 2B, a silicon dioxide film 109 doped with fluorine (hereinafter referred to as an FSG (Fluorine Doped Silicate Glass) film) and an ARL film 110 is deposited successively by, e.g., CVD on the second silicon dioxide film 103. The ARL film 110 has a two-layer structure consisting of, e.g., an upper-layer SiON film and a lower-layer SiO2 film as well as the function of improving resolution during exposure in the subsequent lithographic step. Then, a plurality of wiring grooves (trenches) 111 are formed by lithography and dry etching in the ARL film 110 and in the FSG film 109 (and in the surface portion of the second silicon dioxide film 103). It is to be noted that the plurality of wiring grooves 111 include wiring grooves reaching the plugs 108. The wiring grooves 111 are arranged in, e.g., parallel with each other and the spacing between the wiring grooves 111 is about 0.25 μm.
Next, as shown in FIG. 3A, a tantalum nitride (TaN) film 112 and a first copper (Cu) film 113 are deposited successively by, e.g., PVD over the ARL film 110 such that each of the wiring grooves 111 is filled midway therewith. The first copper film 113 functions herein as a seed layer in the subsequent plating step, while the tantalum nitride film 112 functions as a barrier layer. Subsequently, a second copper film 114 is deposited by, e.g., plating on the first copper film 113 such that each of the wiring grooves 111 is filled completely therewith.
Then, as shown in FIG. 3B, the respective portions of the first and second copper films 113 and 114 deposited on regions outside the wiring grooves 111 are removed by CMP using an abrasive agent (slurry) for polishing Cu (first polishing step). This exposes the portions of the tantalum nitride film 112 outside the wiring grooves 111. Subsequently, the portions of the tantalum nitride film 112 deposited on regions outside the wiring grooves 111 are removed by CMP using a slurry for polishing a barrier layer (TaN) (second polishing step). As a result, copper wires (upper-layer wires) 115 each having a barrier layer between itself and the FSG film 109 are formed in the individual wiring grooves 111 and a surface of the ARL film 110 is exposed. The copper wires 115 are connected electrically to the plugs 108 formed thereunder.
The first and second polishing steps will be described below in greater detail. The present embodiment performs each of the first and second polishing steps by using the same CMP system.
FIG. 5 is a schematic structural view of the CMP system used in the first and second polishing steps.
As shown in FIG. 5, a wafer 151 as a substrate to be polished (substrate 100) is held by a holder 152 provided rotatable and vertically movable. A polishing pad 153 for polishing a surface of the wafer 151 is attached to a surface of a platen 154 performing a rotating movement. A slurry 155 is supplied dropwise from a slurry supply pipe 156 onto the polishing pad 153. If the platen 154 is rotated in this state to rotate the polishing pad 153 and the holder 152 is lowered in level while it is rotated, the wafer 151 held by the holder 152 and the polishing pad 153 rub each other, whereby the surface of the wafer 151 is polished.
The present embodiment changes polishing conditions including the type of the slurry in a transition from the first polishing step to the second polishing step. Specifically, the pressure under which the wafer 151 is pressed onto the polishing pad 153 and the rotating speed of the polishing pad 153 are lower in the second polishing step than in the first polishing step. If the wafer 151 rotates in conjunction with the holder 152, the rotating speed of the polishing pad 153 indicates the relative velocity of the polishing pad 153 to the wafer 151 in the present specification.
At the end time of the second polishing step using CMP as described above, a metal 116 such as copper is buried in a crack formed in the surface of the ARL film 110 between the copper wires 115, as shown in FIG. 3B. If the metal 116 buried in the crack forms a pseudocross-linking structure between the copper wires 115, a short circuit occurs between the copper wires 115 disadvantageously.
To reduce the frequency of short circuits occurring between the copper wires 115, while minimizing a reduction in the thickness of the copper film composing the copper wires 115, the present embodiment removes the metal 116 buried in the crack by using the following method.
After the completion of the second polishing step, the substrate 100 (wafer 151) is retrieved from the CMP system and the surface of the substrate 100 is cleaned. This allows shavings (foreign matter) produced in the first or second polishing step to be washed away from the surface of the substrate 100. For example, an organic acid solution or an organic alkaline solution is used for the cleaning of the substrate 100. It is important here to remove the shavings as the foreign matter. If the metal 116 buried in the crack in the surface of the ARL film 110 is removed with the shavings left on the substrate 100, the shavings may cause new damage to the ARL film 110 or to the copper wires 115. Specifically, even if the metal 116 buried initially in the crack is removed successfully, the copper wires 115 may be damaged (i.e., the copper film composing the copper wires 115 may be thinned) or the metal may be buried in a new crack formed in the ARL film 110.
In the present embodiment, the cleaning step (foreign matter removing step) for the substrate 100 (wafer 151) described above is performed by moving the substrate 100 from the CMP system to a cleaning system. Preferably, while the substrate 100 is cleaned, shavings (foreign matter) adhered to the polishing pad 153 are removed therefrom separately. The reason for this is the same as in the case of cleaning the substrate 100 described above. By removing the shavings remaining on the polishing pad 153 therefrom, new damage to the surface of the ARL film 110 or the like when the metal 115 buried in the crack in the surface of the ARL film 110 on the substrate 100 is removed therefrom by continuously using the polishing pad 153 can be prevented more reliably. The removing of the shavings remaining on the polishing pad 153 is performed by, e.g., supplying pure water in place of the slurry while rotating the polishing pad 153 in the CMP system to clean the polishing pad 153. Alternatively, the shavings may be removed by brushing the surface of the polishing pad 153 with a grindstone. These ensure the removal of the shavings adhered to the surface of the polishing pad 153.
Next, after the foreign matter removing step, the surface of the ARL film 110 is polished by CMP (third polishing step) such that the metal 116 buried in the microcrack in the surface of the ARL film 110 is removed therefrom. This allows the metal 116 in the crack which may cause a short circuit between wires to be removed together with the crack, as shown in FIG. 4.
The present embodiment performs the third polishing step by using the same CMP system (see FIG. 5) as used in the first and second polishing steps. The polishing conditions for the third polishing step except for the polishing time are the same as in the first polishing step (i.e., the polishing step for the copper films 113 and 114 (wiring conductive films)). Specifically, the pressure under which the substrate 100 (wafer 151) is pressed onto the polishing pad 153 and the rotating speed of the polishing pad 153 in the third polishing step are the same as those in the first polishing step. In other words, the foregoing pressure and rotating speed are higher in the third polishing step than in the second polishing step. The slurry used in the third polishing step is a slurry for polishing Cu, which is the same as in the first polishing step. On the other hand, the polishing time in the third polishing step is adjusted to a time shorter (e.g., about 10 seconds) than the polishing time of the wiring conductive films in the first polishing step. This is shorter than the polishing time of the tantalum nitride film 112 (barrier metal film) in the second polishing step.
The setting of the foregoing conditions has been made in consideration of ensured removal of the metal 116 (e.g., copper) in the crack therefrom and prevention of a reduction in the thickness of the conductive film composing the copper wires 115. Specifically, the use of the slurry for polishing Cu in the third polishing steps allows easy removal of the metal 116 buried in the crack of the ARL film 110 if the metal 116 is a part of the copper film 113 or 114. If polishing using the slurry for polishing Cu is performed for a long period of time, however, the copper wires 115 are significantly scraped so that the polishing time in the third polishing step is adjusted to be shorter. In other words, CMP for polishing Cu performed in the first polishing step is used also in the third polishing step to remove the unneeded metal 116 buried in the fragile ARL film 110, while the polishing time in the third polishing step is adjusted to be extremely short compared with the polishing time in the first polishing step such that reductions in the thicknesses of the wiring conductive films are minimized. This ensures the removal of copper buried in the ARL film 110 by the third polishing step for which polishing conditions are the same as those for the first polishing step except for the polishing time. It is to be noted that the conductive film composing the copper wires 115 is not polished significantly by the third polishing step performed for only a short period of time.
Thus, according to the first embodiment, the barrier metal film (the tantalum nitride film 112) and the wiring conductive films (the copper films 113 and 114) are buried successively in the wiring grooves 111 formed in the FSG film 109 on the substrate 100 and in the ARL film 110 on the FSG film 109 and then the respective portions of the wiring conductive films and the barrier metal film located outside the wiring grooves 111 are removed by polishing. After the foreign matter (shavings) adhered to the substrate 100 during polishing is then removed, the surface of the ARL film 110 is polished. This achieves the following effects when a microcrack is formed in the surface of the ARL film 110 present between the wiring grooves 111 (i.e., between the copper wires 115) and the metal 116 is buried in the crack during the polishing of the barrier metal film. Since final polishing is performed with respect to the surface of the ARL film 110 after the removal of the foreign matter adhered to the substrate 100 during the polishing of the barrier metal film, it becomes possible to remove the metal 116 buried in the crack therefrom, while preventing new damage caused by the foreign matter to the surface of the ARL film 110. This allows the situation in which the metal 116 buried in the crack causes cross-linking between the copper wires 115 to be circumvented and thereby allows a wiring structure in which the occurrence of short circuits between wires is suppressed, i.e., high-performance wiring to be formed.
With the prior art technology, short circuits between wires began to occur frequently as the spacing between the adjacent wires is reduced, especially when the wire-to-wire spacing becomes 0.25 μm or less. By contrast, the present embodiment more remarkably achieves the effect of preventing the short circuits between wires when the wire-to-wire spacing is 0.25 μm or less.
Since the first embodiment has used, in the third polishing step (polishing of the ARL film 110), the same slurry for polishing Cu as used in the first polishing step (polishing of the wiring conductive films), the metal 116 buried in the crack in the ARL film 110 can be removed reliably if the metal 116 is a part of the wiring conductive film.
According to the first embodiment, the polishing time is shorter in the third polishing step than in each of the first and second polishing steps (polishing of the tantalum nitride film 112 (barrier metal film)) so that the wiring conductive films composing the copper wires 115 are prevented from being significantly polished in the third polishing step and an increase in wiring resistance is thereby prevented.
According to the first embodiment, moreover, the pressure under which the substrate 100 is pressed onto the polishing pad 153 and the rotating speed of the polishing pad 153 in the third polishing step are the same as those in the first polishing step. In other words, the polishing conditions for the third polishing step except for the polishing time are the same as those for the first polishing step. This more reliably removes the metal 116 buried in the crack in the ARL film 110 if the metal 116 is a part of the wiring conductive film.
Embodiment 2
Referring to the drawings, a description will be given herein below to a method for forming a wiring structure according to a second embodiment of the present invention. The second embodiment is different from the first embodiment in that it uses a dual damascene method for the formation of copper wires.
FIGS. 6A to 6C and FIGS. 7A and 7B are cross-sectional views illustrating the individual process steps of the method for forming a wiring structure according to the second embodiment.
First, as shown in FIG. 6A, a first silicon dioxide film 201 is formed on a substrate 200 composed of, e.g., silicon. Then, lower-layer wires 202 each composed of, e.g., a tungsten film are formed on the first silicon dioxide film 201. Thereafter, a second silicon dioxide film 203 and an ARL film 204 are deposited successively by, e.g., CVD over the upper surface of the first silicon dioxide film 201 including the upper surfaces of the lower-layer wires 202. The ARL film 204 has a two-layer structure consisting of, e.g., an upper-layer SiON film and a lower-layer SiO2 film as well as the function of improving resolution during exposure in the subsequent lithographic step. Thereafter, via holes 205 reaching the lower-layer wires 202 are formed by lithography and dry etching in the ARL film 204 and in the second silicon dioxide film 203.
Next, as shown in FIG. 6B, a resist is coated on the entire surface of the substrate 200. Then, a resist pattern 206 having openings corresponding to regions to be formed with wiring grooves is formed by lithography.
Next, as shown in FIG. 6C, dry etching is performed with respect to the ARL film 204 and to the second silicon dioxide film 203 by using the resist pattern 206 as a mask, thereby forming a plurality of wiring grooves 207. Then, the resist pattern 206 is removed by ashing. It is to be noted that the plurality of wiring grooves 207 include wiring grooves (formed in regions containing the upper portions of the original via holes 205) reaching the via holes 205. The wiring grooves 207 are arranged in, e.g., parallel with each other. The spacing between the wiring grooves 207 is about 0.25 μm.
Next, as shown in FIG. 7A, a tantalum nitride (TaN) film 208 is deposited on the ARL film 204 such that each of the wiring grooves 207 and the via holes 205 is filled midway therewith. The tantalum nitride film 208 functions as a barrier layer. Subsequently, a copper film 209 is deposited on the tantalum nitride film 208 such that each of the wiring grooves 207 and the via holes 205 is filled completely therewith.
Next, as shown in FIG. 7B, the portions of the copper film 209 deposited on regions outside the wiring grooves 207 and the via holes 205 are removed by CMP using a slurry for polishing Cu (first polishing step). This exposes the portions of the tantalum nitride film 208 located outside the wiring grooves 207 and the via holes 205. Subsequently, the portions of the tantalum nitride film 208 deposited on regions outside the wiring grooves 207 and the via holes 205 are removed by CMP using a slurry for polishing the barrier layer (TaN) (second polishing step). As a result, copper wires (upper-layer wires) 210 each having a barrier layer between itself and an insulating film such as the second silicon dioxide film 203 are formed in the individual wiring grooves 207 and in the individual via holes 205 and a surface of the ARL film 204 is exposed. The copper wires 210 have plug portions formed in the via holes 205 and connected electrically to the lower wires 202.
The present embodiment also performs each of the first and second polishing steps by using the same CMP system (see FIG. 5), similarly to the first embodiment. The present embodiment also changes polishing conditions including the type of the slurry in a transition from the first polishing step to the second polishing step. Specifically, the pressure under which the substrate 200 is pressed onto the polishing pad and the rotating speed of the polishing pad are lower in the second polishing step than in the first polishing step. At the end time of the second polishing step using CMP as described above, a metal such as copper (not shown) is buried in a crack formed in the surface of the ARL film 204 between the copper wires 210. If the metal buried in the crack forms a pseudocross-linking structure between the copper wires 210, a short circuit occurs between the copper wires 210 disadvantageously.
To reduce the frequency of short circuits occurring between the copper wires 210, while minimizing a reduction in the thickness of the copper film composing the copper wires 210, the present embodiment removes the metal buried in the crack by using the following method.
After the completion of the second polishing step, the substrate 200 is retrieved from the CMP system and the surface of the substrate 200 is cleaned. This allows shavings (foreign matter) produced in the first or second polishing step to be washed away from the surface of the substrate 200. For example, an organic acid solution or an organic alkaline solution is used for the cleaning of the substrate 200. It is important here to remove the shavings as the foreign matter. If the metal buried in the crack in the surface of the ARL film 204 is removed with the shavings left on the substrate 200, the shavings may cause new damage to the ARL film 204 or to the copper wires 210. Specifically, even if the metal buried initially in the crack is removed successfully, the copper wires 210 may be damaged (i.e., the copper film composing the copper wires 210 may be thinned) or the metal may be buried in a new crack formed in the ARL film 204.
In the present embodiment, the cleaning step (foreign matter removing step) for the substrate 200 described above is performed by moving the substrate 200 from the CMP system to a cleaning apparatus. Preferably, while the substrate 200 is cleaned, the shavings (foreign matter) adhered to the polishing pad are removed therefrom separately. The reason for this is the same as in the case of cleaning the substrate 200 described above. By removing the shavings remaining on the polishing pad therefrom, new damage to the surface of the ARL film 204 or the like when the metal buried in the crack in the surface of the ARL film 204 on the substrate 200 is removed by continuously using the polishing pad can be prevented more reliably. The cleaning of the polishing pad is performed by, e.g., supplying pure water in place of the slurry while rotating the polishing pad in the CMP system to clean the polishing pad. Alternatively, the shavings may be removed by brushing the surface of the polishing pad with a grindstone. These ensure the removal of the shavings adhered to the surface of the polishing pad.
Next, after the foreign matter removing step, the surface of the ARL film 204 is polished by CMP (third polishing step) such that the metal buried in the microcrack in the surface of the ARL film 204 is removed therefrom. This allows the metal in the crack which may cause a short circuit between wires to be removed together with the crack.
The present embodiment also performs the third polishing step by using the same CMP system (see FIG. 5) as used in the first and second polishing steps, similarly to the first embodiment. The polishing conditions for the third polishing step except for the polishing time are the same as in the first polishing step (i.e., the polishing step for the copper film 209 (wiring conductive film)). Specifically, the pressure under which the substrate 200 is pressed onto the polishing pad and the rotating speed of the polishing pad in the third polishing step are the same as those in the first polishing step. In other words, the foregoing pressure and rotating speed are higher in the third polishing step than in the second polishing step. The slurry used in the third polishing step is a slurry for polishing Cu, which is the same as in the first polishing step. On the other hand, the polishing time in the third polishing step is adjusted to a time shorter (e.g., about 10 seconds) than the polishing time of the wiring conductive film in the first polishing step. This is shorter than the polishing time of the tantalum nitride film 208 (barrier metal film) in the second polishing step.
The setting of the foregoing conditions has been made in consideration of ensured removal of the metal (e.g., copper) in the crack therefrom and prevention of a reduction in the thickness of the conductive film composing the copper wires 210. Specifically, the use of the slurry for polishing Cu in the third polishing steps allows easy removal of the metal buried in the crack of the ARL film 204 if the metal is a part of the copper film 209. If polishing using the slurry for polishing Cu is performed for a long period of time, however, the copper wires 210 are significantly scraped so that the polishing time in the third polishing step is adjusted to be shorter. In other words, CMP for polishing Cu performed in the first polishing step is used also in the third polishing step to remove the unneeded metal buried in the fragile ARL film 204, while the polishing time in the third polishing step is adjusted to be extremely short compared with the polishing time in the first polishing step such that a reduction in the thickness of the wiring conductive film is minimized. This ensures the removal of copper buried in the ARL film 204 by the third polishing step for which polishing conditions are the same as those for the first polishing step except for the polishing time. It is to be noted that the conductive film composing the copper wires 210 is not polished significantly by the third polishing step performed for only a short period of time.
Thus, according to the second embodiment, the barrier metal film (the tantalum nitride film 208) and the wiring conductive film (the copper film 209) are buried successively in the wiring grooves 207 and via holes 205 formed in the ARL film 204 and the second silicon dioxide film 203 on the substrate 200 and then the respective portions of the wiring conductive film and the barrier metal film located outside the wiring grooves 207 and the via holes 205 are removed by polishing. After the foreign matter (shavings) adhered to the substrate 200 during polishing is then removed, the surface of the ARL film 204 is polished. This achieves the following effects when a microcrack is formed in the surface of the ARL film 204 present between the wiring grooves 207 (i.e., between the copper wires 210) and the metal is buried in the crack during the polishing of the barrier metal film. Since final polishing is performed with respect to the surface of the ARL film 204 after the removal of the foreign matter adhered to the substrate 200 during the polishing of the barrier metal film, it becomes possible to remove the metal buried in the crack therefrom, while preventing new damage caused by the foreign matter to the surface of the ARL film 204. This allows the situation in which the metal buried in the crack causes cross-linking between the copper wires 210 to be circumvented and thereby allows a wiring structure in which the occurrence of short circuits between wires is suppressed, i.e., high-performance wiring to be formed.
With the prior art technology, short circuits between wires began to occur frequently as the spacing between the adjacent wires is reduced, especially when the wire-to-wire spacing becomes 0.25 μm or less. By contrast, the present embodiment more remarkably achieves the effect of preventing the short circuits between wires when the wire-to-wire spacing is 0.25 μm or less.
Since the second embodiment has used, in the third polishing step (polishing of the ARL film 204), the same slurry for polishing Cu as used in the first polishing step (polishing of the wiring conductive film), the metal buried in the crack in the ARL film 204 can be removed reliably if the metal is a part of the wiring conductive film.
According to the second embodiment, the polishing time is shorter in the third polishing step than in each of the first and second polishing steps (polishing of the tantalum nitride film 208 (barrier metal film)) so that the wiring conductive film composing the copper wires 210 is prevented from being significantly polished in the third polishing step and an increase in wiring resistance is thereby prevented.
According to the second embodiment, moreover, the pressure under which the substrate 200 is pressed onto the polishing pad and the rotating speed of the polishing pad in the third polishing step in the third polishing step are the same as those in the first polishing step. In other words, the polishing conditions for the third polishing step except for the polishing time are the same as those in the first polishing step. This more reliably removes the metal buried in the crack in the ARL film 204 if the metal is a part of the wiring conductive film.
Although the first or second embodiment has described the case where the first-layer copper wires are formed by using the ARL film, the method according to the present embodiment may also be applied to the formation of upper-layer copper wires in the second and higher-level layers when multilayer copper wiring is formed by using an ARL film. The method according to the present embodiment may also be applied to the case where wires are formed by burying a conductive film other than a copper film in the wiring grooves.
In the first or second embodiment, the type of the barrier metal film is not particularly limited. If a copper film is used as a wiring conductive film, e.g., a tantalum film, a tantalum nitride film, or a multilayer film composed of a tantalum film and a tantalum nitride film is used preferably. The types of an insulating film and an ARL film in each of which wires are buried are not particularly limited, either.
Preferably, the first or second embodiment performs the cleaning of the substrate by using an organic acid solution or an organic alkaline solution in the foreign matter removing step (substrate cleaning step) performed after the second polishing step (polishing of the barrier metal film). This ensures the removal of a foreign matter (residual shavings) adhered to the surface of the substrate. As the organic alkali used in this step, a hydroxylamine such as TMAH (tetramethylammonium hydride) may also be used. As the organic acid used in this step, a carboxylic acid having two or more carboxyl groups (COOH groups) such as an oxalic acid, a citric acid, or a malic acid may also be used.
In the first or second embodiment, the type of the slurry for polishing Cu and the type of the slurry for polishing the barrier layer (TaN) are not particularly limited. A slurry for polishing Cu containing, e.g., an aqueous hydrogen peroxide as an oxidizing agent, a slurry for polishing TaN containing, e.g., a nitric acid (or a derivative compound thereof) as an oxidizing agent, and the like may also be used. Alternatively, a slurry for polishing Cu and a slurry for polishing TaN having mutually different particles sizes may also be used.
Although the first or second embodiment has performed the first to third polishing steps, the third polishing step may also be performed in two stages. Specifically it is also possible to perform polishing in the first stage of the third polishing step under the same conditions as in the first polishing step and continuously perform polishing in the second stage of the third polishing step under the same conditions as in the second polishing step. In this case also, the total polishing time in the third polishing step is preferably shorter than the polishing time in each of the first and second polishing steps. This further improves a yield rate in the formation of wiring.
Although the first or second embodiment has performed each of the first to third polishing steps by using the same CMP system, it is also possible to perform the individual polishing steps by using different CMP systems instead or perform any one of the polishing steps by using another CMP system instead. However, each of the first and third polishing steps is preferably performed by using the same polishing system and the same polishing pad. This allows effective management of the polishing system. A CMP system that can be used in the first to third polishing steps is not limited to a scheme having one substrate holder such that a single substrate is polished in one polishing step. It is also possible to use a CMP system having a plurality of substrate holders such that a plurality of substrates are polished in one polishing step.

## Claims

1. A method for forming a wiring structure, the method comprising:
a groove forming step comprises of forming an anti-reflection film on an insulating film and then forming, in each of the anti-reflection film and the insulating film, a first groove and a second groove adjacent to the first groove; 
a film deposition comprised step of depositing a barrier metal film and a conductive film on the anti-reflection film such that each of the first and second grooves is filled; 
a first polishing step comprises of removing the portion of the conductive film outside the first and second grooves by polishing; 
a second polishing step comprises of removing, after the first polishing step, the portion of the barrier metal film outside the first and second grooves by polishing; 
a foreign matter removal step comprises of removing deposition foreign matter adhered to a surface to be polished after the second polishing step; and 
after the foreign removal step, a third polishing step comprised of polishing a surface of the anti-reflection film by using an abrasive agent of the same type as used in the first polishing step.

2. The method of claim 1, further comprising between the second and third polishing steps, the step of removing foreign matter adhered to a polishing pad used in the second polishing step.

3. The method of claim 2, wherein the step of removing the foreign matter adhered to the polishing pad includes the step of cleaning the polishing pad.

4. The method of claim 2 wherein, the step of removing the foreign matter adhered to the polishing pad includes the step of brushing a surface of the polishing pad with a grindstone.

5. The method of claim 1, wherein each of the first and third polishing steps is performed by using the same polishing system and the same polishing pad.

6. The method of claim 1, wherein a polishing time is shorter in the third polishing step than in each of the first and second polishing steps.

7. The method of claim 1, wherein a pressure under which the surface to be polished is pressed onto a polishing pad and a rotating speed of the polishing pad are higher in the third polishing step than in the second polishing step.

8. The method of claim 1, wherein the third polishing step includes a polishing step performed in two stages under different polishing conditions.

9. The method of claim 8, wherein an abrasive agent used in one of the two stages of the third polishing step is the same as used in the second polishing step and an abrasive agent used in the other of the two stages of the third polishing step is the same as used in the first polishing step.

10. The method of claim 1, wherein the foreign matter removal step includes the step of cleaning the surface to be polished after the second polishing step by using an organic acid or an organic alkali.

11. The method of claim 1, wherein a spacing between the first and second grooves is 0.25 μm or less.

12. The method of claim 1, wherein the first and second grooves are arranged in parallel with each other.

13. The method of claim 1, wherein formation of wires in the first and second grooves is performed by a dual damascene method.

14. The method of claim 1, wherein the anti-reflection film is composed of a silicon containing material.

15. The method of claim 1, wherein
the conductive film is a copper film and 
the barrier metal film is a tantalum film, a tantalum nitride film, or a multilayer film composed of a tantalum film and a tantalum nitride film.

16. The method of claim 15, wherein a wire formed in the first or second groove is connected electrically to a plug formed under the wire.

17. The method of claim 1, wherein the third polishing step is conducted to remove a metal which is present in a micro-crack.