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<A NAME=A001></A>
<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>INTELLECTUAL PROPERTY
SECURITY AGREEMENT </FONT></H1>

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<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>        This
Intellectual Property Security Agreement is entered into as of June 26, 2002 by and
between SILICON VALLEY BANK (“Secured Party”) and TEGAL CORPORATION
(“Grantor”). </FONT></P>

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<A NAME=A002></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>RECITALS</U> </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>        A. Secured
     Party and Borrower are entering into that certain Loan and Security
     Agreement by dated of even date herewith (as the same may be amended,
     modified or supplemented from time to time, the “Loan Agreement”;
     capitalized terms used herein which are not defined, have the meanings set
     forth in the Loan Agreement). </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>        B. Pursuant to
     the terms of the Loan Agreement, Grantor has granted to Secured Party a
     security interest in all of Grantor’s right, title and interest, whether
     presently existing or hereafter acquired, in, to all Intellectual Property
     and all other Collateral. </FONT></P>

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<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>        NOW,
THEREFORE, as collateral security for the payment and performance when due of all of the
Obligations, Grantor hereby grants, represents, warrants, covenants and agrees as follows: </FONT></P>

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<A NAME=A003></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>AGREEMENT</U> </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>        1.
          <U>Grant of Security Interest.</U> To secure all of the Obligations, Grantor
          grants and pledges to Secured Party a security interest in all of Grantor’s
          right, title and interest in, to and under its Intellectual Property (as defined
          in the Loan Agreement), including without limitation the following: </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (a) All of present and future United States registered copyrights and copyright
          registrations, including, without limitation, the registered copyrights, maskworks, software, computer programs and other works of authorship subject to
          United States copyright protection listed in <U>Exhibit A-1</U> to this
          Agreement (and including all of the exclusive rights afforded a copyright
          registrant in the United States under 17 U.S.C.<B> </B>§106 and any
          exclusive rights which may in the future arise by act of Congress or otherwise)
          and all present and future applications for copyright registrations (including
          applications for copyright registrations of derivative works and compilations)
          (collectively, the “Registered Copyrights”), and any and all
          royalties, payments, and other amounts payable to Borrower in connection with
          the Registered Copyrights, together with all renewals and extensions of the
          Registered Copyrights, the right to recover for all past, present, and future
          infringements of the Registered Copyrights, and all computer programs, computer
          databases, computer program flow diagrams, source codes, object codes and all
          tangible property embodying or incorporating the Registered Copyrights, and all
          other rights of every kind whatsoever accruing thereunder or pertaining thereto. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (b) All present and future copyrights, maskworks, software, computer programs and
          other works of authorship subject to (or capable of becoming subject to) United
          States copyright protection which are not registered in the United States
          Copyright Office (the “Unregistered Copyrights”), whether now owned or
          hereafter acquired, including without limitation the Unregistered Copyrights
          listed in <U>Exhibit A-2</U> to this Agreement, and any and all royalties,
          payments, and other amounts payable to Borrower in connection with the
          Unregistered Copyrights, together with all renewals and extensions of the
          Unregistered Copyrights, the right to recover for all past, present, and future
          infringements of the Unregistered Copyrights, and all computer programs,
          computer databases, computer program flow diagrams, source codes, object codes
          and all tangible property embodying or incorporating the Unregistered
          Copyrights, and all other rights of every kind whatsoever accruing thereunder or
          pertaining thereto. The Registered Copyrights and the Unregistered Copyrights
          collectively are referred to herein as the “Copyrights.” </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (c) All right, title and interest in and to any and all present and future license
          agreements with respect to the Copyrights. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (d) All present and future accounts, accounts receivable, royalties, and other
          rights to payment arising from, in connection with or relating to the
          Copyrights. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (e) All patents, patent applications and like protections including, without
          limitation, improvements, divisions, continuations, renewals, reissues,
          extensions and continuations-in-part of the same, including without limitation
          the patents and patent applications set forth on <U>Exhibit B</U> attached
          hereto (collectively, the “Patents”); </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (f) All trademark and servicemark rights, whether registered or not, applications to
          register and registrations of the same and like protections, and the entire
          goodwill of the business of Borrower connected with and symbolized by such
          trademarks, including without limitation those set forth on <U>Exhibit C</U>
          attached hereto (collectively, the “Trademarks”); </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (g) Any and all claims for damages by way of past, present and future infringements
          of any of the rights included above, with the right, but not the obligation, to
          sue for and collect such damages for said use or infringement of the rights
          identified above; </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (h) All licenses or other rights to use any of the Copyrights, Patents or
          Trademarks, and all license fees and royalties arising from such use to the
          extent permitted by such license or rights; </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (i) All amendments, extensions, renewals and extensions of any of the Copyrights,
          Trademarks or Patents; and </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>                (j) All proceeds and products of the foregoing, including without limitation all
          payments under insurance or any indemnity or warranty payable in respect of any
          of the foregoing, and all license royalties and proceeds of infringement suits,
          and all rights corresponding to the foregoing throughout the world and all
          re-issues, divisions continuations, renewals, extensions and
          continuations-in-part of the foregoing. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>        2.    
          <U>Loan Agreement.</U> This security interest is granted in conjunction with the
          security interest granted to Secured Party under the Loan Agreement. The rights
          and remedies of Secured Party with respect to the security interest granted
          hereby are in addition to those set forth in the Loan Agreement and the other
          Loan Documents, and those which are now or hereafter available to Secured Party
          as a matter of law or equity. Each right, power and remedy of Secured Party
          provided for herein or in the Loan Agreement or any of the other Loan Documents,
          or now or hereafter existing at law or in equity shall be cumulative and
          concurrent and shall be in addition to every right, power or remedy provided for
          herein and the exercise by Secured Party of any one or more of the rights,
          powers or remedies provided for in this Agreement, the Loan Agreement or any of
          the other Loan Documents, or now or hereafter existing at law or in equity,
          shall not preclude the simultaneous or later exercise by any person, including
          Secured Party, of any or all other rights, powers or remedies. </FONT></P>

<hr STYLE="page-break-after:always">

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>        3.    
          <U>Covenants and Warranties.</U> Borrower represents, warrants, covenants and
          agrees as follows: </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>              (a) Subject to Section 8 (4) of the Schedule to the Loan Agreement, all of
          Borrower’s present and future maskworks, software, computer programs and
          other works of authorship subject to (or capable of becoming subject to) United
          States copyright protection, the sale, licensing or other disposition of which
          results in royalties receivable, license fees receivable, accounts receivable or
          other sums owing to Borrower (collectively, “Accounts”), have been and
          shall be registered with the United States Copyright Office prior to the date
          Borrower requests or accepts any Loan from Secured Party with respect to such
          Accounts and prior to the date Borrower includes any such Accounts in any
          accounts receivable aging, borrowing base report or certificate or other similar
          report provided to Secured Party, and Borrower shall provide to Secured Party
          copies of all such registrations promptly upon the receipt of the same. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>              (b) Borrower shall undertake all reasonable measures to cause its employees, agents
          and independent contractors to assign to Borrower all rights of authorship to
          any copyrighted material in which Borrower has or may subsequently acquire any
          right or interest. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>              (c) Borrower shall promptly advise Secured Party of any Trademark, Patent or
          Copyright not specified in this Agreement, which is hereafter acquired by
          Borrower. </FONT></P>

<!-- MARKER FORMAT-SHEET="Para (List) Flush" FSL="Default" -->
     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>              (d) Subject to Section 8 (4) of the Schedule to the Loan Agreement, Borrower shall
          promptly register the most recent version of any of Borrower’s Copyrights,
          which are not already so registered, and which are referred to in Section 3(a)
          above or which are material to its business, and shall, from time to time,
          execute and file such other instruments, and take such further actions as
          Secured Party may reasonably request from time to time to perfect or continue
          the perfection of Secured Party’s interest in the Collateral. </FONT></P>

<!-- MARKER FORMAT-SHEET="Para (List) Flush" FSL="Default" -->
     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>       4.
          <U>General</U>. If any action relating to this Agreement is brought by either
          party hereto against the other party, the prevailing party shall be entitled to
          recover reasonable attorneys fees, costs and disbursements. This Agreement may
          be amended only by a written instrument signed by both parties hereto. To the
          extent that any provision of this Agreement conflicts with any provision of the
          Loan Agreement, the provision giving Secured Party greater rights or remedies
          shall govern, it being understood that the purpose of this Agreement is to add
          to, and not detract from, the rights granted to Secured Party under the Loan
          Agreement. This Agreement, the Loan Agreement, and the other Loan Documents
          comprise the entire agreement of the parties with respect to the matters
          addressed in this Agreement. This Agreement shall be governed by the laws of the
          State of California, without regard for choice of law provisions. Borrower and
          Secured Party consent to the nonexclusive jurisdiction of any state or federal
          court located in Santa Clara County, California. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>       <B>5.</B> 
          <B><U>WAIVER OF RIGHT TO JURY TRIAL</U>. SECURED PARTY AND BORROWER EACH HEREBY
          WAIVE THE RIGHT TO TRIAL BY JURY IN ANY ACTION OR PROCEEDING BASED UPON, ARISING
          OUT OF, OR IN ANY WAY RELATING TO: (I) THIS AGREEMENT; OR (II) ANY OTHER PRESENT
          OR FUTURE INSTRUMENT OR AGREEMENT BETWEEN SECURED PARTY AND BORROWER; OR (III)
          ANY CONDUCT, ACTS OR OMISSIONS OF SECURED PARTY OR BORROWER OR ANY OF THEIR
          DIRECTORS, OFFICERS, EMPLOYEES, AGENTS, ATTORNEYS OR ANY OTHER PERSONS
          AFFILIATED WITH SECURED PARTY OR BORROWER; IN EACH OF THE FOREGOING CASES,
          WHETHER SOUNDING IN CONTRACT OR TORT OR OTHERWISE.</B> </FONT></P>

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<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>        IN
WITNESS WHEREOF, the parties have cause this Intellectual Property Security Agreement to
be duly executed by its officers thereunto duly authorized as of the first date written
above. </FONT></P>

<table border="0" cellpadding="0" cellspacing="0" style="border-collapse: collapse" bordercolor="#111111" width="100%" id="AutoNumber2" height="259">
  <tr>
    <td width="50%" height="15"><font size="2" face="Times New Roman">Address of
    Grantor:</font></td>
    <td width="50%" height="15"><font size="2" face="Times New Roman">Grantor:
    </font></td>
  </tr>
  <tr>
    <td width="50%" height="30"><font size="2" face="Times New Roman">2201 South
    McDowell Blvd.<br>
Petaluma, CA  94954</font></td>
    <td width="50%" height="30"><FONT FACE="Times New Roman" SIZE=2><br>
    </FONT><font size="2" face="Times New Roman">TEGAL CORPORATION</font></td>
  </tr>
  <tr>
    <td width="50%" height="19"> </td>
    <td width="50%" height="19"> </td>
  </tr>
  <tr>
    <td width="50%" height="19"><font size="2">Executed 6/26/02</font></td>
    <td width="50%" height="19"><font size="2">
    By <u>/s/ Michael L. Parodi                                                       
    </u></font></td>
  </tr>
  <tr>
    <td width="50%" height="19"> </td>
    <td width="50%" height="19"><font size="2">
    Title <u>Chairman, President & CEO                                        
    </u></font></td>
  </tr>
  <tr>
    <td width="50%" height="19"> </td>
    <td width="50%" height="19"><font size="2">Name: <u>Michael L. Parodi                                                       
    </u></font></td>
  </tr>
  <tr>
    <td width="50%" height="19"> </td>
    <td width="50%" height="19"> </td>
  </tr>
  <tr>
    <td width="50%" height="15"><font size="2">Address of Secured Party:</font></td>
    <td width="50%" height="15"><font size="2">Secured Party: </font></td>
  </tr>
  <tr>
    <td width="50%" height="19"> </td>
    <td width="50%" height="19"> </td>
  </tr>
  <tr>
    <td width="50%" height="30"><font size="2">3003 Tasman Drive                                          <br>
    Santa Clara, California  95054</font></td>
    <td width="50%" valign="top" height="30"><font size="2">SILICON VALLEY BANK
    </font></td>
  </tr>
  <tr>
    <td width="50%" height="17"></td>
    <td width="50%" height="17"></td>
  </tr>
  <tr>
    <td width="50%" height="17"><font size="2">Executed 6/26/02</font></td>
    <td width="50%" height="17"><font size="2">
    By <u>/s/ Patrick J. O'Donnell                                                   
    </u></font></td>
  </tr>
  <tr>
    <td width="50%" height="19"> </td>
    <td width="50%" height="19"><font size="2">
    Title <u>Vice President                                                               
    </u></font></td>
  </tr>
  <tr>
    <td width="50%" height="19"> </td>
    <td width="50%" height="19"> </td>
  </tr>
</table>

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<A NAME=A008></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>EXHIBIT A-1</U> </FONT></P>

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<A NAME=A009></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>REGISTERED COPYRIGHTS</U>
<br>
 (including
copyrights that are the subject of an application for registration)</FONT></P>

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     <TH COLSPAN=2>
     <p align="left"><font size="2">Description </font></TH>
     <TH COLSPAN=2>
<font size="2">Registration/ <BR>
 Application  <BR>
   Number </font>
</TH>
     <TH COLSPAN=2>
<font size="2">Registration/<BR>
 Application <BR>
    Date </font>
</TH></TR>
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     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=2></TD></TR>
<TR VALIGN=Bottom>
     <TD WIDTH=61% ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>V4.02C (PT/20) 26-041-006 U1</FONT></TD>
     <TD WIDTH=2% ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD WIDTH=18% ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-674</FONT></TD>
     <TD WIDTH=2% ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD WIDTH=15% ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD WIDTH=2% ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>MCFTASK.SRC</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-675</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>MCFTASK.SRC</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-676</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>V4.02G (PT/9) 26-041-016 U1</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-677</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>RFTASK.SRC</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-678</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>MFCTASK.SRC</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-679</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>901e plasma production etcher: system manual: vol. 1-2</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-689</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>T901e plasma production etcher: system manual: vol. 1-2</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-690</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>T903e plasma production etcher: system manual: vol. 1-2</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-691</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>903e plasma production etcher: system manual: vol. 1-2</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-4-222-692</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>9XX SECs user's manual</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>TX-5-340-216</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
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     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
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<A NAME=A010></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>EXHIBIT A-2</U> </FONT></P>

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<A NAME=A011></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>UNREGISTERED
COPYRIGHTS</U> </FONT></P>

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<A NAME=A012></A>
<P ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>None. </FONT></P>


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<A NAME=A013></A>
<P ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>September 25, 1996 </FONT></P>

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<A NAME=A014></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>EXHIBIT B</U> </FONT></P>

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<A NAME=A015></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>PATENTS</U> </FONT></P>

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<TABLE CELLPADDING=0 CELLSPACING=0 BORDER=0 WIDTH=600 style="border-collapse: collapse" bordercolor="#111111">
<TR VALIGN=Bottom>
     <TH>
     <p align="left"><font size="2">Description </font></TH>
     <TH>
<font size="2">Registration/ <BR>
 Application  <BR>
   Number </font>
</TH>
     <TH>
<font size="2">Registration/<BR>
 Application <BR>
    Date </font>
</TH></TR>
<TR>
     <TD COLSPAN=3><HR NOSHADE COLOR=Black SIZE=2></TD></TR>
</TABLE>


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</div>

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<A NAME=A018></A>
<P ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>See attached list. </FONT></P>


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<A NAME=A019></A>
<P ALIGN=CENTER> </P>

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<A NAME=A020></A>
<P ALIGN=center><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>EXHIBIT C</U> </FONT></P>

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<A NAME=A021></A>
<P ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2><U>TRADEMARKS</U> </FONT></P>

<PRE>


<div align="center"><center><TABLE CELLPADDING=0 CELLSPACING=0 BORDER=0 WIDTH=600 style="border-collapse: collapse" bordercolor="#111111"><TR VALIGN=Bottom>
     <TH COLSPAN=2><font size="2">Description</font></TH>
     <TH COLSPAN=2>
<font size="2">Registration/ <BR>
 Application <BR>
    Number </font></TH>
     <TH COLSPAN=2>
<font size="2">Registration/ <BR>
 Application <BR>
    Date </font></TH></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=2></TD></TR>
<TR VALIGN=Bottom>
     <TD WIDTH=64% ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: TEGAL COMPLETE CUSTOMER SATISFACTION</FONT></TD>
     <TD WIDTH=2% ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD WIDTH=15% ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1,493,986</FONT></TD>
     <TD WIDTH=2% ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD WIDTH=15% ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>6/28/1988</FONT></TD>
     <TD WIDTH=2% ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: TEGAL</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>--</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>--</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: TEGAL</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1,494,896</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>7/5/1988</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: <br>TEGAL AND AN UPWARD ARROW CONTAINED IN AN UNENCLOSED BOX</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>858993</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>6/23/1998</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: <br>TEGAL AND AN UPWARD ARROW CONTAINED IN AN UNENCLOSED BOX</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>2,495,626</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>10/9/2001</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: 903G</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>76/201,864</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1/30/2001</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: 901G</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>76/201,857</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1/30/2001</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: i901</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>76/201,866</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1/30/2001</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: i903</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>76/201,861</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1/30/2001</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: 980</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>76/201,858</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1/30/2001</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: 981</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>76/201,854</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1/30/2001</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: 983</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>76/201,862</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1/30/2001</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR VALIGN=Bottom>
     <TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>Mark: SPECTRA</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>--</FONT></TD><TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD>
     <TD ALIGN=right><FONT FACE="Times New Roman, Times, Serif" SIZE=2>1/15/2002</FONT></TD><TD ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2> </FONT></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
<TR>
     <TD COLSPAN=6><HR NOSHADE COLOR=Black SIZE=1></TD></TR>
</TABLE>


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