### Cover Letter

FUJIFILM Electronic Materials U.S.A., Inc. 80 Circuit Drive North Kingstown, RI 02852 May 1, 2014 U.S. Environmental Protection Agency Office of Pollution Prevention and Toxics Document Control Office TS-7407M TSCA Data Processing Center – CBIC, Room 6428 1201 Constitution Ave. NW Washington, DC. 20460 Re: Low Volume PMN Exemption Notice (TS-14D020) Dear Sir or Madam: Enclosed please find an electronic submission file of a new PMN application submitted under paragraph (1) of TSCA Section 5 (h) (4). Please provide me with EPA’s case number and the commencement date for the 30- day review period for this action. If there are any questions regarding this submission, please email or call me in my capacity as the Technical Representative for this submission. My phone number, fax number and email address are listed below. Information is provided on the solid form of the NCS for characterization purposes, but this NCS is not isolated but made as an intermediate solution which is then used in the manufacture of finished Chemical Mechanical Polishing Slurries (CMS), which are marketed to the end users. See the continuation sheet to PMN pages 8-9a (attachment 14) for further information. If you have any questions, please contact me. Sincerely yours,
Richard E. Hopla Product Regulatory Compliance Manager Phone: (401) 522-9418 Fax: (401) 294-2269
Page 1 SANITIZED SUBMISSIONrichard_hopla@fujifilm-ffem.com

Page 2 SANITIZED SUBMISSION200601 TS14140501624962365 14D020

X X X X

X
X

X Page 3 SANITIZED SUBMISSIONX



### X

Page 4 SANITIZED SUBMISSIONRichard Hopla Product Regulatory Compliance Manager FUJIFILM Electronic Materials USA Inc. 80 Circuit Drive North Kingstown RI 02852 richard_hopla@fujifilm-ffem.com

Richard Hopla Product Regulatory Compliance Manager FUJIFILM Electronic Materials USA Inc. 80 Circuit Drive North Kingstown RI 02852 richard_hopla@fujifilm-ffem.com 401-522-9418



### X X X X

Page 5 SANITIZED SUBMISSION

### X

XXX 

### X

XXX 

### X 302669 Sanitized CAS IES Name NCS TS-14D020.pdf XXX 

### X See Attachment 002 (Sanitized Structure NCS TS-14D020.pdf)

Sanitized Structure NCS TS-14D020.pdf
Page 6 SANITIZED SUBMISSIONXXX

XXX

XXX 

### X

X

X Sanitized Structures and CAS #s of Reactants NCS TS-14D020.pdf

Sanitized Reaction Scheme NCS TS-14D020.pdf

Sanitized Reaction Scheme NCS TS-14D020.pdf
Page 7 SANITIZED SUBMISSIONPage 8 SANITIZED SUBMISSIONPage 9 SANITIZED SUBMISSIONPotassium amine complex

Dishing Reducer-1 Corrosion Inhibitor-1
Dishing Reducer-1

Potassium Amine complex

Page 10 SANITIZED SUBMISSIONXXX XXX 

### X

X Dishing reducer CSL9054C 16506_NA_EN 140218.pdf XXX X X XXX X XXX X XXX XXX XXX XXX X X

XXX X XXX X XXX X XXX XXX XXX XXX X X

Page 11 SANITIZED SUBMISSION

### X

XXX XXX XXX 

### X XXX X

XXX 

### X X FUJIFILM Planar Solutions, LLC 6550 South Mountain Road Mesa AZ 85212

Page 12 SANITIZED SUBMISSIONSee Attachment 008 (Sanitized Flow Diagram for how NCS TS-14D020 is used.pdf)

Sanitized Flow Diagram for how NCS TS-14D020 is used.pdf
Page 13 SANITIZED SUBMISSIONXXX XXX XXX XXX XXX 

### X

Page 14 SANITIZED SUBMISSIONXXX XXX XXX XXX XXX XXX X X X X X
XXX XXX XXX XXX XXX XXX X X X X X
XXX XXX XXX XXX XXX XXX X X X X
XXX XXX XXX XXX XXX XXX X X X X
XXX XXX XXX XXX XXX XXX X X X X

Page 15 SANITIZED SUBMISSIONXXX XXX XXX XXX XXX XXX X X
XXX XXX XXX XXX XXX XXX X X
XXX XXX XXX XXX XXX XXX X X
XXX XXX XXX XXX XXX XXX X X
XXX XXX XXX XXX XXX XXX X X

Page 16 SANITIZED SUBMISSIONXXX 

### X

See Attachment 006 (Typical chemical mechanical polishing (CMP) cycle [Compatibility Mode].pdf)

Typical chemical mechanical polishing (CMP) cycle [Compatibility Mode].pdf Page 17 SANITIZED SUBMISSIONP10SB1(a)(4)1 Part II, Section B, 1(a)(4). Operation Site Locations

XXX

Page 18 SANITIZED SUBMISSIONSanitized PMN Page 10a Continuation Sheet NCS TS-14D020.pdf

Page 19 SANITIZED SUBMISSIONPage 20 SANITIZED SUBMISSION001 Sanitized CAS IES Name NCS TS14D020 Sanitized CAS IES Name NCS TS-14D020.pdf Pt.I, Sec.B, 1c. 1 002 Sanitized Structure NCS TS14D020 Sanitized Structure NCS TS14D020.pdf Pt.I, Sec.B, 1e. 1 003 Sanitized structures and CAS #s NCS TS14D202 Sanitized Structures and CAS #sof Reactants NCS TSPt.I, Sec.B, 1e(1). 1 004 Sanitized Reaction Scheme NCS TS14D020 Sanitized Reaction Scheme NCS TS-14D020.pdf Pt.I, Sec.B, 1e(2). | Pt.I, Sec.B, 1e(3). 1 005 Sanitized Support Data for physical properties NCS TS14D020 Sanitized Support Data forPhysical Properties NCS TS5 006 Flow Diagram of sites controlled by others Typical chemical mechanical polishing (CMP) cycle Pt.2, Sec.B, 1a. 1 007 Sanitized PMN Page 10a continuation sheet NCS 14D020 Sanitized PMN Page 10aContinuation Sheet NCS TSPt.2, Sec.B, End 1 008 Sanitized flow diagram for how NCS 14D020 is used Sanitized Flow Diagram for how NCS TS-14D020 is used.pdf Pt.2, Sec.A, 1d. 1 009 Sanitizes MSDS of solid NCS TS14D020 Sanitized MSDS of solid NCS TS-14D020.pdf 5 010 Sanitized MSDS of Intermediate solution of NCS 14D020 Sanitized MSDS of intermediate solution of NCS TS-14D020.pdf 5 011 MSDS of how NCS TS14D020 will be used CSL9054C 16506_NA_EN 140218.pdf Pt.I, Sec.C, 2b. 6 012 Sanitized Korean Government Toxicity Sanitized Korean Government 7 013 Sanitized estimated Toxicity Assessment NCS 14D020 Sanitized Estimated ToxicityAssessment of NCS TS5 014 Sanitized continuation sheet PMN pages 8-9a TS14D020 Sanitized Continuation sheetPMN pages 8-9a of NCS TS1

Page 21 SANITIZED SUBMISSIONXXX 

### X

XXX XXX 

### X

XXX XXX 

### X

Page 22 SANITIZED SUBMISSION

### ATTACHMENT HEADER SHEET
Attachment Number 001 Attachment Name Sanitized CAS IES Name NCS TS14D020 

### Associated PMN Section Number

Pt.I, Sec.B, 1c. Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 002 Attachment Name Sanitized Structure NCS TS14D020 

### Associated PMN Section Number

Pt.I, Sec.B, 1e. Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 003 Attachment Name Sanitized structures and CAS #s NCS TS14D202 

### Associated PMN Section Number

Pt.I, Sec.B, 1e(1). Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 004 Attachment Name Sanitized Reaction Scheme NCS TS14D020 

### Associated PMN Section Number Pt.I, Sec.B, 1e(2). | Pt.I, Sec.B, 1e(3). Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 005 Attachment Name Sanitized Support Data for physical properties NCS TS14D020



### Associated PMN Section Number

N/A Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 006 Attachment Name Flow Diagram of sites controlled by others 

### Associated PMN Section Number

Pt.2, Sec.B, 1a. Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 007 Attachment Name Sanitized PMN Page 10a continuation sheet NCS 14D020 

### Associated PMN Section Number

Pt.2, Sec.B, End Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 008 Attachment Name Sanitized flow diagram for how NCS 14D020 is used 

### Associated PMN Section Number

Pt.2, Sec.A, 1d. Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 009 Attachment Name Sanitizes MSDS of solid NCS TS14D020 

### Associated PMN Section Number

N/A Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 010 Attachment Name Sanitized MSDS of Intermediate solution of NCS 14D020 

### Associated PMN Section Number

N/A Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 011 Attachment Name MSDS of how NCS TS14D020 will be used 

### Associated PMN Section Number

Pt.I, Sec.C, 2b. Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 012 Attachment Name Sanitized Korean Government Toxicity Assessment NCS TS14#020



### Associated PMN Section Number

N/A Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 013 Attachment Name Sanitized estimated Toxicity Assessment NCS 14D020 

### Associated PMN Section Number

N/A Does not contain CBI 

### Report Number TS14140501624962365

### ATTACHMENT HEADER SHEET
Attachment Number 014 Attachment Name Sanitized continuation sheet PMN pages 8-9a TS14D020 

### Associated PMN Section Number

N/A Does not contain CBI 

### Report Number TS14140501624962365