# Patent

## Title
Optoelectronic device and the manufacturing method thereof

## Abstract

An optoelectronic device comprising a substrate; a first window layer on the substrate, having a first sheet resistance, a first thickness, and a first impurity concentration; a second window layer having a second sheet resistance, a second thickness, and a second impurity concentration; and a semiconductor system between the first window layer and the second window layer; wherein the second window layer comprises a semiconductor material different from the semiconductor system, and the second sheet resistance is greater than the first sheet resistance.

## Background
This application claims priority to U.S. provisional application No. 61/302,662, filed Feb. 9, 2010, entitled “OPTOELECTRONIC SEMICONDUCTOR DEVICE AND THE MANUFACTURING METHOD THEREOF”, and the contents of which are incorporated herein by reference.


BACKGROUND
1. Technical Field
The application relates to an optoelectronic device and the manufacturing method thereof.
2. Related Application Data
Recently, efforts have been put to promote the luminous efficiency of the light-emitting diode (LED) in order to implement the device in the lighting field, and further conserve the energy and reduce carbon emission. The LED luminous efficiency can be increased through several aspects. One is to increase the internal quantum efficiency (IQE) by improving the epitaxy quality to enhance the combination efficiency of electrons and holes. Another is to increase the light extraction efficiency (LEE) that emphasizes on the increase of light which is emitted by the light-emitting layer capable of escaping outside the device, and therefore reducing the light absorbed by the LED structure.
SUMMARY
The present disclosure provides a novel structure and the manufacturing method thereof for increasing the light extraction efficiency.
One aspect of the present disclosure provides an optoelectronic device comprising a substrate; a first window layer on the substrate having a first sheet resistance, a first thickness, and a first impurity concentration; a second window layer having a second sheet resistance, a second thickness, and a second impurity concentration; and a semiconductor system between the first window layer and the second window layer; wherein the second window layer comprises a semiconductor material different from the semiconductor system, and the second sheet resistance is greater than the first sheet resistance.
One aspect of the present disclosure provides an optoelectronic device comprising a substrate; a metal layer comprising a metal element on the substrate; a first window layer comprising the metal element; and a transparent conductive layer between the metal layer and the first window layer; wherein an atomic concentration of the metal element in the first window layer is less than 1*1019 cm−3.
One aspect of the present disclosure provides an optoelectronic device comprising a substrate; an n-type window layer on the substrate; a semiconductor system on the n-type window layer; a p-type window layer on the semiconductor system; wherein the optoelectronic device emits amber or red light with an optical efficiency at least 70 lumen/watt at a driving current density ranging from 0.1 ̃0.32 mA/mil2.
One aspect of the present disclosure provides a method for manufacturing an optoelectronic device in accordance with the present disclosure. The method comprises the steps of providing a substrate; forming a semiconductor system on the substrate; forming a window layer on the semiconductor system, wherein the window layer comprises a semiconductor material different from the semiconductor system; selectively removing the window layer thereby forming a width difference between the window layer and the semiconductor system, and the width difference is greater than 1 micron.



BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1A to 1H illustrate the corresponding structures fabricated by the manufacturing method step-by-step according to one embodiment of the present disclosure.
FIG. 2 illustrates an optoelectronic device according to one embodiment of the present disclosure.
FIG. 3 illustrates an SEM photograph of the optoelectronic device in accordance with the present disclosure.
FIG. 4 illustrates a top view of the first ohmic contact layer.
FIGS. 5A ̃5E illustrate the corresponding structures fabricated by the manufacturing method step-by-step according to one embodiment of the present disclosure.
FIG. 6 illustrates a top view of the second ohmic contact layer.



DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
FIGS. 1A to 1H show the corresponding structures fabricated by the manufacturing method step-by-step according to one embodiment of the present disclosure. With reference to FIG. 1A, the method for manufacturing an optoelectronic device in accordance with the present disclosure comprises a step of providing a substrate 101, such as a growth substrate for growing or carrying an optoelectronic system 120, and the material for the substrate 101 includes but is not limited to germanium (Ge), gallium arsenide (GaAs), indium phosphide (InP), gallium phosphide (GaP), sapphire, silicon carbide (SiC), silicon (Si), lithium aluminum oxide (LiAlO2), zinc oxide (ZnO), gallium nitride (GaN), aluminum nitride (AlN), glass, composite, diamond, CVD diamond, diamond-like carbon (DLC), and so on.
A first window layer 111 is formed on the substrate 101 made of a material containing at least one element selected from the group consisting of Al, Ga, In, As, P, and N, such as GaN, AlGaInP or any other suitable materials. The first window layer 111 is a layer with a conductivity-type, such as n-type or p-type (AlxGa(1-x))0.5In0.5P where 0.5≦x≦0.8. The first window layer 111 has two opposite surface wherein the first surface of the first window layer 111 is closer to the substrate 101.
A transition layer could be optionally formed between the substrate 101 and the first window layer 111. The transition layer between two material systems can be used as a buffer system. For the structure of the light-emitting diode, the transition layer is used to reduce the lattice mismatch between two material systems. On the other hand, the transition layer could also be a single layer, multiple layers, or a structure to combine two materials or two separated structures where the material of the transition layer can be organic, inorganic, metal, semiconductor, and so on, and the structure can be a reflection layer, a heat conduction layer, an electrical conduction layer, an ohmic contact layer, an anti-deformation layer, a stress release layer, a stress adjustment layer, a bonding layer, a wavelength converting layer, a mechanical fixing structure, and so on.
Next, the optoelectronic system 120 is formed on the second surface of the first window layer 111 including at least a first layer 121 having a first conductivity-type, a conversion unit 122, and a second layer 123 having a second conductivity-type in sequence. The first layer 121 and the second layer 123 are two single-layer structures or two multiple layers structure (“multiple layers” means two or more than two layers) having different conductivities, electrical properties, polarities, and/or dopants for providing electrons or holes respectively. If the first layer 121 and the second layer 123 are composed of semiconductor materials, such as (AlxGa(1-x))0.5In0.5P where 0.5≦x≦0.8, the first or second conductivity-type can be p-type or n-type. The first window layer 111 has the same conductivity-type with the first layer 121, such as n-type. Besides, the first window layer 111 has greater impurity concentration than the first layer 121 to have a better conductivity. The conversion unit 122 disposed between the first layer 121 and the second layer 123 is a region where the light energy and the electrical energy could transfer or could be induced to transfer. The optoelectronic system 120, such as applied to a semiconductor device, equipment, product, circuit, can proceed or induce the light energy and electrical energy transfer. Specifically speaking, the optoelectronic system includes at least one of a light-emitting diode (LED), a laser diode (LD), a solar cell, a liquid crystal display, or an organic light-emitting diode. The optoelectronic system having the conversion unit 122 transferring the electrical energy to the light energy is a light-emitting diode, a liquid crystal display, or an organic light-emitting diode. The optoelectronic system having the conversion unit 122 transferring the light energy to the electrical energy is a solar cell or an optoelectronic diode. The phrase “optoelectronic system” in the specification does not require that all the sub-systems or units in the system manufactured by semiconductor materials. Other non-semiconductor materials such as metal, oxide, insulator, and so on could also be selectively integrated in this optoelectronic system 120.
Taking the light-emitting diode as an example, the emission spectrum of the transferred light could be adjusted by changing the physical or chemical arrangement of one layer or more layers in the optoelectronic system 120. The commonly used materials are the series of aluminum gallium indium phosphide (AlGaInP), the series of aluminum gallium indium nitride (AlGaInN), the series of zinc oxide (ZnO), and so on. The conversion unit 122 can be a single heterostructure (SH) structure, a double heterostructure (DH) structure, a double-side double heterostructure (DDH) structure, or a multi-quantum well (MWQ) structure. Specifically, the conversion unit 122 comprises a MQW structure comprising a plurality of barrier layers and well layers alternately stacked, each of the barrier layers comprises (AlyGa(1-y))0.5In0.5P where 0.5≦y≦0.8; and each of the well layers comprises In0.5Ga0.5P. Besides, the wavelength of the emitted light could also be adjusted by changing the number of the pairs of the quantum well or the composition of the barrier layer, e.g. the emitted light is red light with dominant wavelength between 600 and 630 nm by having y around 0.7 or amber light with dominant wavelength between 580 and 600 nm by having y around 0.55.
Forming a second window layer 112 on a first surface of the optoelectronic system 120 whose material contains at least one element selected from the group consisting of Al, Ga, In, As, P, and N, such as GaN, AlGaInP or any other suitable materials, and the second window layer 112 comprises at least one material different from the optoelectronic semiconductor system or the second layer 123. The second window layer 112 is preferred a layer with a conductivity-type the same with the second layer 123, such as a p-type GaP layer. In another embodiment, the sidewall of the second window layer 112 and/or the semiconductor system 120 need not be orthogonal to the substrate, but rather may be oblique thereto as indicated in FIG. 3.
Then, forming a first ohmic contact layer 130 formed by conductive material such as BeAu or GeAu alloy on the second window layer 112, and therefore forming a first stack 10 structure as shown in FIG. 1A, wherein the first ohmic contact layer 130 comprises a plurality of fingers 132 extending toward borders of the first stack 10 structure as shown in FIG. 4. A first alloying process is then performed at an alloying temperature of around 300 ̃500° C. or more for forming an ohmic contact between the first ohmic contact layer 130 and the second window layer 112. The detail of the alloying process is well-known for those skilled in this field, and not necessarily disclosed herein.
Next, bonding a temporary substrate 102 formed by supportive material such as glass to the first ohmic contact layer 130 and the second window layer 112 of the first stack structure 10 as shown in FIG. 1B, and removing the substrate 101, and therefore exposing the first surface of the first window layer 111 as shown in FIG. 1C.
Next, forming a second ohmic contact layer 140 formed by conductive material like GeAu or BeAu alloy on the first surface of the first window layer 111, and therefore forming a second stack structure as shown in FIG. 1D, wherein the second ohmic contact layer 140 comprises a plurality of dots that are arranged in a two-dimensional array and is preferred substantially do not overlap with the first ohmic contact layer 130 in vertical direction as shown in FIG. 1D and for better current spreading effect. A second alloying process is then performed at an alloying temperature of around 300 ̃500° C. or more for forming an ohmic contact between the second ohmic contact layer 140 and the first window layer 111. The detail of the alloying process is well-known for those skilled in this field, and not necessarily disclosed herein.
Next, a transparent conductive layer 141 is sequentially formed by e-beam or sputtering to cover the second ohmic contact layer 140, wherein the material of the transparent conductive layer 141 comprises metal oxide, such as at least one material selected from the group consisting of indium tin oxide (ITO), cadmium tin oxide (CTO), antimony tin oxide, indium zinc oxide, zinc aluminum oxide, and zinc tin oxide; and the thickness is about 0.005 μm ̃0.6 μm, 0.005 μm ̃0.5 μm, 0.005 μm ̃0.4 μm, 0.005 μm ̃0.3 μm, 0.005 μm ̃0.2 μm, 0.2 μm ̃0.5 μm, 0.3 μm ̃0.5 μm, 0.4 μm ̃0.5 μm, 0.2 μm ̃0.4 μm, or 0.2 μm ̃0.3 μm.
Next, a reflecting layer 150 is formed with a conductive material comprising metal, such as Ag, on the transparent conductive layer 141 as shown in FIG. 1E, and then the reflecting layer 150 is bonded to a supporting substrate 103 by a metal layer 160 as shown in FIG. 1F. In this embodiment, the supporting substrate 103 comprises Si, and the metal layer 160 served as a bonding layer comprises at least one material selected from the group consisting of In, Au, Sn, Pb, InAu, SnAu, and the alloy thereof.
Next, the temporary substrate 102 is removed to expose the first ohmic contact layer 130 and the second window layer 112, and therefore forming a third stack structure. Then the third stack structure is patterned by the lithographic-etching process to form a plurality of chip areas (not shown) on the supporting substrate 103, wherein the etchants of the etching process, e.g. dry-etching chemicals comprising fluoride or chloride etch the second window layer 112 relatively faster than the optoelectronic system 120 such that a first mesa region 51 is formed on the surface of the optoelectronic system 120 or the second layer 123, and the width of the optoelectronic system 120 or the second layer 123 is larger than the width of the second window layer 112 at the interface of the optoelectronic system 120 or the second layer 123 and the second window layer 112 as indicated in FIG. 1G. It can also be noted that a second mesa region S2 is formed on the surface of the first window layer 111, and the bottom width of the first window layer 111 is larger than the optoelectronic system 120 or the first layer 121.
Next, at least the exposed top and sidewall surfaces of the second window layer 112 is wet etched such that the exposed top and sidewall surfaces of the second window layer 112 are roughened, wherein the etching solution, such as a mixture of hydrofluoric acid (HF), nitric acid (HNO3), and acetic acid (CH3COOH), etches the second window layer 112 relatively faster than the optoelectronic system 120 such that the width difference L1 is further expanded and become larger, and the second window layer 112 has an enhanced surface roughness higher than that of the optoelectronic system 120, and wherein the width difference L1 is greater than 1 micron and/or less than 10 microns as indicated in FIG. 1H or FIG. 3.
Finally, a first pad 171 is formed on the first ohmic contact layer 130, a second pad 172 is formed on the supporting substrate 103, and a passivation layer 180 covers the second window layer 112 and the first ohmic contact layer 130 to form the optoelectronic device in accordance with the present disclosure as shown in FIG. 2. The passivation layer 180 serves as a protection layer to protect the optoelectronic device from environment damage, such as moisture, or mechanical damage. The SEM photograph of the optoelectronic device according to one embodiment of the present disclosure is demonstrated as in FIG. 3.
According to one embodiment of the present disclosure, the first window layer 111 comprises semiconductor material, such as (AlxGa(1-x))0.5In0.5P where 0.5≦x≦0.8, and the reflecting layer 150 comprising a metal element, e.g. Ag, is formed after the first and second alloying process such that the metal element in the reflecting layer is less diffused into the first window layer 111, where the first window layer 111 comprises a semiconductor material, preferred a material with substantially the same composition to the first layer 121. According to another embodiment of the present disclosure, the atomic concentration of the metal element in the first window layer is less than 1*1017 cm−3 and the atomic concentration of the metal element is greater than 1*1016 cm−3, therefore causing less degradation to the reflecting layer. The reflecting layer has a reflectivity greater than 90%.
Table 1 shows the optical efficiencies tested under given conditions by the optoelectronic device of the present disclosure. For an optoelectronic device with a small chip size, such as 10 mil2, the optical efficiency is as high as about 70 lumen/watt under 20 mA or 0.2 mA/mil2 of driving current. For an optoelectronic device with a relative smaller chip size, such as 14 mil2, the optical efficiency is as high as about 100 lumen/watt under 20 mA or 0.1 mA/mil2 of driving current. For an optoelectronic device with a relative larger chip size, such as 28 mil2, the optical efficiency is as high as about 106 lumen/watt under 250 mA or 0.32 mA/mil2 of driving current. For an optoelectronic device with a large chip size, such as 42 mil2, the optical efficiency is as high as about 121 lumen/watt under 350 mA or 0.2 mA/mil2 of driving current. It can be observed from table 1 that the optoelectronic device according to the embodiment of the present disclosure achieves an optical efficiency at least 70 lumen/watt, or preferred at least 100 lumen/watt at a driving current density ranging from 0.1 ̃0.32 mA/mil2.







TABLE 1







the optical efficiencies tested under given conditions according to


the optoelectronic device of the present disclosure.













Current
Optical



Chip
Operating
density
efficiency
Dominant


size [mil2]
current [mA]
[mA/mil2]
[lumen/watt]
wavelength [nm]














10
20
0.2
~70
~620


14
20
~0.1
~90
~620


28
250
~0.32
~106
~613


42
350
~0.2
~121
~613









According to the present disclosure, the sheet resistance of the first window layer 111 is higher than that of the second window layer 112. Also, the second ohmic contact layer 140 substantially does not overlap with the first ohmic contact layer 130 in vertical direction. Therefore, the driving current is crowding nearby the second ohmic contact layer 140. The light emitted by the optoelectronic device is corresponding to the region of the second ohmic contact layer 140 and is not blocked by the first ohmic contact layer 130, and therefore having the effect of current blocking and benefit to lateral current spreading.
According to another embodiment of the present disclosure, the first window layer 111 comprises a lower impurity concentration than that of the second window layer 112 to have a lower sheet resistance than that of the second window layer 112. According to another embodiment of the present disclosure, the first window layer 111 comprises an n-type impurity with an impurity concentration of around 1×1017 ̃5×1017 cm−3, and the second window layer 112 comprises a p-type impurity with an impurity concentration of 1×1018 ̃5×1018 cm−3 higher than that of the first window layer 111. According to another embodiment of the present disclosure, the thickness of the first window layer between 1 ̃5 microns is smaller than the thickness of the second window layer 112 between 5 ̃20 microns.
According to one embodiment of the present disclosure, because the sidewall surfaces of the second window layer 112 are roughened, the light can be laterally extracted easily. The chip areas can be rectangle in shape for better luminous efficiency. The ratio of the length to the width of the rectangle is preferred from 1.5:1 to 10:1.
As shown in FIGS. 5A to 5E, a method of manufacturing an optoelectronic device with different structure is disclosed in accordance with one embodiment. The difference between the optoelectronic devices disclosed in FIG. 5E and in FIG. 2 is the structure between the first window layer 111 and metal layer 160.
As shown in FIG. 5A, a second ohmic contact layer 140 formed of conductive material like GeAu or BeAu alloy is formed on the first surface of the first window layer 111, wherein the second ohmic contact layer 140 comprises a plurality of dots that are arranged between any two fingers 132 which are parallel to each other and is preferred not substantially overlapped with the first ohmic contact layer 130 in vertical direction as shown in FIG. 6 so the current spreading in enhanced. As FIG. 6 shows, the pattern of the second ohmic contact layer 140 is aligned with the pattern of the first ohmic contact layer 130. Each of the plurality of dots has at least one bevel. The thickness of each of the dots is about 1000 Å ̃10000 Å, and preferably is about 2000 Å ̃6000 Å. A second alloying process is then performed at an alloying temperature of around 300 ̃500° C. or more for forming an ohmic contact between the second ohmic contact layer 140 and the first window layer 111. The detail of the alloying process is well-known to those skilled in this field, and not necessarily disclosed herein.
As shown in FIG. 5B, an insulating layer 142 is formed by e-gun or PECVD to conformably cover the second ohmic contact layer 140 and the first surface of the first window layer 111, wherein the insulating layer 142 is formed of insulating material with refractive index about 1.3 ̃1.6, such as SiOx or MgF2. The refractive index of the insulating layer 142 is at least 1.5 lower than that of the first window layer 111. The thickness of the insulating layer 142 is about 500 Å ̃5000 Å, and preferably is about 500 Å ̃1000 Å. The thickness of the insulating layer 142 is smaller than that of the second ohmic contact layer 140.
Next, as shown in FIG. 5C, the insulating layer 142 is regionally etched by dry etching, such as RIE, or wet etching, such as BOE (buffer oxide etch), to expose the second ohmic contact layer 140. After the etching, a portion of the first surface of the first window layer 111 can be exposed, too. The pattern of the contact layer is complementary to the pattern of the insulating layer.
Next, as shown in FIG. 5D, an transparent conductive layer 141 is formed to cover the insulating layer 142 and the second ohmic contact layer 140, wherein the material of the transparent conductive layer 141 comprises metal oxide, such as at least one material selected from the group consisting of indium tin oxide (ITO), cadmium tin oxide (CTO), antimony tin oxide, indium zinc oxide, zinc aluminum oxide, and zinc tin oxide; and the thickness is about 50 Å ̃150 Å. Then, a reflecting layer 150 is formed on the transparent conductive layer 141, wherein the material of the reflecting layer 150 comprises metal, such as Ag and the thickness is about 2500 Å ̃7500 Å. The reflective layer 150 dose not reach the border of the transparent conductive layer 141 and reveals the border region 1431 of the transparent conductive layer 141. In the embodiment, the transparent conductive layer 141 is served as an adhesion layer for improving the adhesion between the reflecting layer 150 and the insulating layer 142.
Then, the reflecting layer 150 is bonded to a supporting substrate 103 by a metal layer 160 and the following process is the same as aforementioned embodiment. The final structure is shown in FIG. 5E. The reflecting layer 150 reveals the border region 1431, so a portion of the transparent conductive layer 141 is able to connect to the metal layer 160. In this embodiment, the supporting substrate 103 comprises Si, and the metal layer 160 served as a bonding layer comprises one material selected from the group consisting of In, Au, Sn, Pb, InAu, SnAu, and the alloy thereof. In the embodiment, the insulating layer 142 is capable of preventing the reflecting layer 150 from migrating to the first window layer 111 or the optoelectronic system 120 when an electrical current flows through the reflecting layer 150. The insulating layer 142 is also served as a current blocking. When the electrical current flows through the surface 1111, the electrical current can be blocked by the insulating layer 142 and passes through mainly the second ohmic contact layer 140. In the embodiment, the insulating layer 142 is disposed between the first window layer 111 and the reflecting layer 150, and since the difference of the refractive index between the first window layer 111 and the insulating layer 142 is larger than 1.5, the first window layer 111, the insulating layer 142 and the reflecting layer 150 are able to form an omnidirectional reflector (ODR) for reflecting the light emitted from the conversion unit 122. The reflectivity of the omnidirectional reflector (ODR) is larger than 95%, and preferably is larger than 97%.
It will be apparent to those having ordinary skill in the art that various modifications and variations can be made to the devices in accordance with the present disclosure without departing from the scope or spirit of the disclosure. In view of the foregoing, it is intended that the present disclosure covers modifications and variations of this disclosure provided they fall within the scope of the following claims and their equivalents.
Although the drawings and the illustrations above are corresponding to the specific embodiments individually, the element, the practicing method, the designing principle, and the technical theory can be referred, exchanged, incorporated, collocated, coordinated except they are conflicted, incompatible, or hard to be put into practice together.
Although the present application has been explained above, it is not the limitation of the range, the sequence in practice, the material in practice, or the method in practice. Any modification or decoration for present application is not detached from the spirit and the range of such.

## Claims

1. An optoelectronic device, comprising:
a semiconductor stack;
a contact layer having a first pattern on the semiconductor stack for ohmically contacting the semiconductor stack;
an insulating layer having a second pattern on the semiconductor stack;
a reflecting layer conformably covering the contact layer and the insulating layer; and
a transparent conductive layer between the insulating layer and the reflecting layer for connecting the insulating layer and the reflecting layer.

2. An optoelectronic device according to claim 1, wherein the semiconductor stack comprises:
a first semiconductor layer of a first conductivity-type;
a second semiconductor layer of a second conductivity-type; and
a conversion unit between the first semiconductor layer and the second semiconductor layer.

3. An optoelectronic device according to claim 1, wherein the transparent conductive layer conformably covers the insulating layer and the contact layer.

4. An optoelectronic device according to claim 1, wherein the thickness of the contact layer is more than twice as that of the insulating layer.

5. An optoelectronic device according to claim 1, further comprising a second contact layer having a plurality of fingers on a side of the semiconductor stack opposite to the contact layer.

6. An optoelectronic device according to claim 5, wherein the plurality of fingers are parallel to each other.

7. An optoelectronic device according to claim 5, wherein the plurality of fingers is substantially parallel to a side of the optoelectronic device.

8. An optoelectronic device according to claim 6, wherein the contact layer comprises a plurality of dots arranged among the plurality of fingers.

9. An optoelectronic device according to claim 5, wherein the second contact layer comprises a third pattern aligned with the first pattern.

10. An optoelectronic device according to claim 6, wherein the plurality of dots is not substantially overlapped with the plurality of fingers in vertical direction.

11. An optoelectronic device according to claim 1, wherein the semiconductor stack comprises a window layer having a first refractive index connected to the insulating layer, the insulating layer has a second refractive index, and the difference between the first refractive index and the second refractive index is larger than 1.5.

12. An optoelectronic device according to claim 1, wherein the reflecting layer exposes a portion of the transparent conductive layer.

13. An optoelectronic device according to claim 12, further comprising a supporting substrate on the semiconductor stack; and a conductive bonding layer bonding the supporting substrate and the semiconductor stack.

14. An optoelectronic device according to claim 13, wherein the conductive bonding layer covers a top and a sidewall of reflecting layer.

15. An optoelectronic device according to claim 1, wherein the transparent conductive layer contacts the semiconductor stack.

16. An optoelectronic device according to claim 1, wherein the first pattern is complementary to the second pattern.

17. An optoelectronic device according to claim 1, wherein the transparent conductive layer has a thickness between 50 Å and 150 Å.

18. The optoelectronic device according to claim 1, wherein the semiconductor stack comprises a window layer having a top surface, wherein the top surface is rough.

19. The optoelectronic device according to claim 18, wherein the window layer has a sidewall, wherein the sidewall is rough.

20. The optoelectronic device according to claim 1, wherein the adhesion between the transparent conductive layer and the reflecting layer is larger than the adhesion between the insulating layer and the reflecting layer if the reflecting layer being adhered to the insulating layer.