# Patent

## Title
Semiconductor processing methods

## Abstract

Semiconductor processing methods of forming integrated circuitry, and in particular, dynamic random access memory (DRAM) circuitry are described. In one embodiment, a single masking step is utilized to form mask openings over a substrate, and both impurities are provided and material of the substrate is etched through the openings. In one implementation, openings are contemporaneously formed in a photo masking layer over substrate areas where impurities are to be provided, and other areas where etching is to take place. In separate steps, the substrate is doped with impurities, and material of the substrate is etched through the mask openings. In another implementation, two conductive lines are formed over a substrate and a masking layer is formed over the conductive lines. Openings are formed in the masking layer in the same step, with one of the openings being received over one conductive line, and another of the openings being received over the other conductive line. Impurities provided through an opening into the substrate proximate one conductive line, and material from over the other conductive line is removed through the other opening to at least partially form a contact opening over the other conductive line.

## Background
CROSS REFERENCE TO RELATED APPLICATION
This is a Continuation of application Ser. No. 10/243,156 filed on Sep. 12, 2002 now U.S. Pat. No. 6,740,583 which is a Continuation of Ser. No. 09/879,741, filed on Jun. 11, 2001, now U.S. Pat. No. ,6,500,738 B2, which is a Divisional Application of U.S. patent application Ser. No. 09/689,237, filed Oct. 11, 2000, now U.S. Pat. No. 6,337,261 B1, entitled “Semiconductor Processing Methods of Forming Integrated Circuitry and Semiconductor Processing Methods of Forming Dynamic Random Access Memory (DRAM) Circuitry”, which is a Continuation of U.S. patent application Ser. No. 09/141,776, filed Aug. 27, 1998, now U.S. Pat. No. 6,177,339, the disclosure of which is incorporated by reference.


TECHNICAL FIELD
This invention relates to semiconductor processing methods of forming integrated circuitry and to semiconductor processing methods of forming dynamic random access memory (DRAM) circuitry.
BACKGROUND OF THE INVENTION
Processing of semiconductor devices typically involves many steps which include masking, doping, and etching. Each time one of these steps is performed, certain risks can arise which can jeopardize the integrity of a wafer being processed. For example, a mask misalignment error can cause a subsequent etch to undesirably etch into wafer or substrate structure which can cause catastrophic failure. Accordingly, it is desirable to reduce the number of processing steps utilized in the formation of integrated circuitry.
This invention arose out of concerns associated with reducing the number of processing steps needed in the formation of integrated circuitry. This invention also arose out of concerns associated with improving the manner in which integrated circuitry memory devices, and in particular dynamic random access memory (DRAM) devices are fabricated.
SUMMARY OF THE INVENTION
Semiconductor processing methods of forming integrated circuitry, and in particular, dynamic random access memory (DRAM) circuitry are described. In one embodiment, a single masking step is utilized to form mask openings over a substrate, and both impurities are provided and material of the substrate is etched through the openings. In one implementation, openings are contemporaneously formed in a photo masking layer over substrate areas where impurities are to be provided, and other areas where etching is to take place. In separate steps, the substrate is doped with impurities, and material of the substrate is etched through the mask openings. In another implementation, two conductive lines are formed over a substrate and a masking layer is formed over the conductive lines. Openings are formed in the masking layer in the same step, with one of the openings being received over one conductive line, and another of the openings being received over the other conductive line. Impurities provided through an opening into the substrate proximate one conductive line, and material from over the other conductive line is removed through the other opening to at least partially form a contact opening over the other conductive line.



BRIEF DESCRIPTION OF THE DRAWINGS
Preferred embodiments of the invention are described below with reference to the following accompanying drawings.
FIG. 1 is a diagrammatic sectional view of a semiconductor wafer in process, in accordance with one aspect of the invention.
FIG. 2 is a view of the FIG. 1 wafer at a different processing step.
FIG. 3 is a view of the FIG. 2 wafer at a different processing step.
FIG. 4 is a view of the FIG. 3 wafer at a different processing step.
FIG. 5 is a diagrammatic sectional view of a semiconductor wafer fragment undergoing processing, in accordance with a preferred embodiment of the invention.



DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
This disclosure of the invention is submitted in furtherance of the constitutional purposes of the U.S. Patent Laws “to promote the progress of science and useful arts” (Article 1, Section 8).
Referring to FIG. 1, a semiconductor wafer fragment in process is shown generally at 10 and includes a semiconductive substrate 12. In the context of this document, the term “semiconductive substrate” is defined to mean any construction comprising semiconductive material, including, but not limited to, bulk semiconductive materials such as a semiconductive wafer (either alone or in assemblies comprising other materials thereon), and semiconductive material layers (either alone or in assemblies comprising other materials). The term “substrate” refers to any supporting structure, including, but not limited to, the semiconductive substrates described above. Preferably, substrate 12 comprises a bulk monocrystalline substrate.
In the illustrated example, substrate 12 includes a pair of field oxide regions 14 with a thin oxide layer 16, e.g., around 60 Angstroms, extending therebetween. A pair of conductive lines 18, 20 are formed over substrate 12. The two illustrated conductive lines include a polysilicon layer 22 and a silicide layer 24, e.g. WSix. Insulative material 26 is provided over the conductive lines and preferably covers layers 22, 24. In the illustrated example, insulative material 26 comprises a first insulative material 28 and a second insulative material 30 which is different from first insulative material 28. Preferably, the first and second insulative materials are selected such that one can be etched selectively relative to the other.
In this example, first insulative material 28 comprises an oxide material and second insulative material 30 comprises a nitride material. The first insulative material 28 can be formed to a thickness of around 80 Angstroms over the sidewalls of each conductive line, and to around 300 Angstroms over top portions of the conductive lines. A suitable oxide material for first insulative material 28 is an oxide formed through decomposition of TEOS. Second insulative material 30 can be formed to a thickness over the top portions of conductive lines 18, 20 of around 1900 Angstroms (not shown to scale). An exemplary material for second insulative material 30 is silicon nitride. Of course, other materials, including other oxide and nitride materials are possible for materials 28, 30.
Referring to FIG. 2, a photomasking layer 32 is formed over substrate 12 and conductive lines 18, 20. Masking layer 32 has been patterned to form masking layer openings 34, 36 which are received over conductive lines 18, 20, respectively. The openings are preferably contemporaneously formed. In the illustrated example, opening 34 has a different, larger transverse cross-sectional dimension than opening 36. Opening 34 is dimensioned such that insulative material 26 over conductive line 18 is entirely exposed therethrough, while insulative material 26 over conductive line 20 is only partially exposed through opening 36. Opening 34 is preferably formed over a substrate area where doping impurities are primarily intended to be provided, while opening 36 is formed over a substrate area where etching is primarily intended to take place. Preferably, the etching which is to take place through opening 36 forms a contact opening to conductive line 20, as will become apparent below.
Referring to FIGS. 2 and 5, a preferred embodiment is set forth. There, memory circuitry, such as dynamic random access memory (DRAM) circuitry, is being formed over substrate 12. Accordingly, conductive lines 38 are formed over a memory array area of substrate 12, and other conductive lines 18, 20, are formed over a substrate area comprising a peripheral area proximate the memory array. In the photomasking step just described, the memory array is entirely masked with masking layer 32, and remains so masked during the processing which is described just below. Accordingly, such constitutes keeping the memory array masked with masking layer 32 while forming openings, i.e., openings 34, 36, over the peripheral area.
Referring to FIG. 3, doping impurities are provided into substrate 12 proximate conductive line 18 sufficient to form diffusion regions 40. Doping of the substrate preferably comprises providing n+ dopant to form the diffusion regions. Some doping impurities can be received through opening 36 and into insulative material 30, but do not meaningfully affect conductive line 20.
Referring to FIGS. 3 and 4, doping impurities are provided into the substrate through openings 34, 36, and material of the substrate is etched through the openings. In a preferred embodiment, the doping of the substrate takes place prior to, and in a separate step from, the etching of the substrate material. In the illustrated example, the openings are dimensioned to permit some of the doping impurity to be received by the substrate as diffusion regions through only some of the openings. Accordingly, diffusion regions 40 are formed only relative to opening 34 and not opening 36. Of course, doping can take place after the etching of the substrate material through the openings.
Referring to FIG. 4, material of the substrate is etched through all of the openings, e.g., openings 34, 36. Such constitutes removing material from over the conductive lines and, in particular, from over conductive line 20 wherein a contact opening is at least partially formed thereto. Preferably, second insulative material 30 is dry etched selectively relative to first insulative material 28. Exemplary etching conditions include, in the context of a Lam 9400 etcher, a pressure of 20 mTorr, 500 Watts source power, 0 Watts bias power, 40 sccm SF6, and 20 sccm HBr. Such etch conditions can etch nitride at a rate of about 1200 Angstrom/minute and oxide at a rate of about 100 Angstrom/minute. Such etching can take place either anisotropically or isotropically. In the illustrated example, the etching of the second layer comprises an isotropic etch which removes insulative material from the sides of both conductive lines.
The inventive methods can reduce processing complexity by combining, in a single masking step, the doping of impurities into a substrate through openings formed in a mask layer and the etching of material of the substrate through the openings. In a preferred embodiment, the methods are employed in the formation of memory circuitry, and in particular DRAM circuitry. Accordingly, and in the preferred embodiment, processing can now take place to form capacitor constructions over the memory array (FIG. 5).
In compliance with the statute, the invention has been described in language more or less specific as to structural and methodical features. It is to be understood, however, that the invention is not limited to the specific features shown and described, since the means herein disclosed comprise preferred forms of putting the invention into effect. The invention is, therefore, claimed in any of its forms or modifications within the proper scope of the appended claims appropriately interpreted in accordance with the doctrine of equivalents.

## Claims

1. A semiconductor processing method comprising:
providing a semiconductive substrate supporting at least two conductive lines and first and second materials; 
forming openings in the first material over at least the two conductive lines in the same step; 
providing impurity through one of the openings to form at least one doped region using the semiconductive substrate proximate one of the two conductive lines; and 
removing the second material over another of the two conductive lines through another of the openings to a least partially form a contact opening over the other conductive line.

2. The semiconductor processing method of claim 1 wherein the forming of the openings comprises forming one of the openings to have a larger transverse cross-section than another of the openings.

3. The semiconductor processing method of claim 1 wherein the removing the second material comprises removing the second material from over both conductive lines.

4. The semiconductor processing method of claim 1 wherein the second material comprises insulative material disposed over a top portion of the another of the two conductive lines, the insulative material comprising first and second different insulative materials, and wherein the removing comprises selectively etching the first insulative material relative to the second insulative material.

5. The semiconductor processing method of claim 4 wherein the first insulative material comprises a nitride material.

6. The semiconductor processing method of claim 1 wherein the second material comprises insulative material disposed over respective top portions of at least both the two conductive lines, the insulative material comprising first and second different insulative materials, and wherein the removing comprises selectively etching the first insulative material relative to the second insulative material.

7. The semiconductor processing method of claim 1 wherein the contact opening enables contact to the other conductive line.

8. The semiconductor processing method of claim 1 wherein the first material comprises photoresist.

9. The semiconductor processing method of claim 1 wherein the second material comprises insulative material.

10. The semiconductor processing method of claim 1 wherein the other of the openings remains open during the providing of the impurity through one of the openings.

11. The semiconductor processing method of claim 1 wherein the one of the openings remains open during the removing of the second material.

12. A semiconductor processing method comprising:
providing a substrate supporting at least two conductive lines, a material, and first and second insulative materials; 
forming two openings through the material over at least the two conductive lines; 
providing impurity through one of the two openings and into a semiconductive substrate proximate one of the two conductive lines to form at least one doped region; and 
etching one of the first and second insulative materials to at least partially form a contact opening to at least one of the two conductive lines.

13. The semiconductor processing method of claim 12 further comprising providing the impurity into the substrate prior to the etching of the one of the first and second insulative materials.

14. The semiconductor processing method of claim 12 further comprising etching the one of the first and second insulative materials prior to the providing of the impurity.

15. The semiconductor processing method of claim 12, wherein the etching of the one of the first and second insulative materials comprises selectively etching said one of the first and second insulative materials relative to the other of the first and second insulative materials.

16. The semiconductor processing method of claim 12, wherein the forming of the two openings comprises forming said openings to have different transverse cross-sections.

17. The semiconductor processing method of claim 12, wherein insulative material over only one conductive line is exposed through an opening.

18. The semiconductor processing method of claim 12, wherein the one of the first and second insulative materials comprise a nitride material.

19. The semiconductor processing method of claim 12, wherein both the first and the second insulative materials are over each of the two conductive lines and the forming of the two openings entirely exposes an upper surface of one of the first and second insulative materials over only one of the two conductive lines.

20. The semiconductor processing method of claim 12 wherein the material comprises photoresist.

21. The semiconductor processing method of claim 12 wherein the forming of the openings exposes one and another conductive line structures comprising the one and another conductive lines and one of the conductive line structures remains exposed during the providing of the impurity through the one opening.

22. The semiconductor processing method of claim 12 wherein the forming of the openings exposes one and another conductive line structures comprising the one and another conductive lines and one of the conductive line structures remains exposed during the etching of one of the first and second insulative materials.

23. A semiconductor processing method comprising:
providing a substrate comprising a peripheral area associated with a memory array, the substrate supporting conductive lines and first and second materials; 
in the same masking step, forming a plurality of openings through the first material over the peripheral area while keeping the associated memory array masked; 
providing impurity through the openings to form at least one doped region; and 
removing the second material from over the conductive lines through the openings.

24. The semiconductor processing method of claim 23 further comprising providing the impurity prior to the removing of the second material from over the conductive lines.

25. The semiconductor processing method of claim 23 wherein the first material comprises photoresist.

26. The semiconductor processing method of claim 23 wherein the second material comprises insulative material.

27. The semiconductor processing method of claim 23 wherein the substrate and conductive lines comprise portions of DRAM circuitry.

28. A semiconductor processing method comprising:
providing a substrate supporting two conductive lines and on insulative material, the substrate having a masking layer thereover; 
in one processing operation, forming two openings through the masking layer, one of the openings being received over one conductive line of the two conductive lines, another of the openings being received over another conductive line of the two conductive lines; 
providing conductivity-altering dopant through the one opening and into the substrate proximate the one conductive line to form at least one doped region; and 
removing the insulative material over the other conductive line through the other opening to at least partially form a contact opening over the other conductive line.

29. The semiconductor processing method of claim 28, wherein the forming of the two openings comprises forming the one opening to have a larger transverse cross-section than the other of the openings.

30. The semiconductor processing method of claim 28, wherein the removing comprises removing the insulative material from over both conductive lines.

31. The semiconductor processing method of claim 28, wherein the insulative material comprises first and second different insulative materials, and wherein the removing comprises selectively etching the first insulative material relative to the second insulative material.

32. The semiconductor processing method of claim 28, wherein the first insulative material comprises a nitride material.

33. The semiconductor processing method of claim 28, wherein the insulative material is disposed over respective top portions of at least both of the conductive lines the insulative material comprising first and second different insulative materials, and wherein the removing comprises selectively etching the first insulative material relative to the second insulative material.

34. The semiconductor processing method of claim 28 wherein the masking layer comprises photoresist.

35. The semiconductor processing method of claim 28 wherein the other of the two openings formed through the masking layer remains open during the providing of the dopant.

36. The semiconductor processing method of claim 28 wherein the one of the two openings formed through the masking layer remains open during the removing of the insulative material.

37. A semiconductor processing method comprising:
providing a semiconductor substrate supporting two conductive lines having a material and a masking layer thereover; 
in the same step, forming two openings through the masking layer disposed over the two conductive lines, one of the openings being received over one conductive line and another the openings being received over another of the two conductive lines; 
providing impurity through the one opening and into the semiconductive substrate proximate the one conductive line to form at least one doped region; and 
removing the material over the other conductive line through the other opening to at least partially form a contact opening over the other conductive line.

38. The semiconductor processing method of claim 37, wherein the forming of the two openings comprises forming the one opening to have a larger transverse cross-section than the other of the openings.

39. The semiconductor processing method of claim 37, wherein the removing comprises removing the material from over both conductive lines.

40. The semiconductor processing method of claim 37, wherein the insulative material is disposed over a top portion of the other conductive line, the insulative material comprising first and second different insulative materials, and wherein the removing comprises selectively etching the first insulative material relative to the second insulative material.

41. The semiconductor processing method of claim 40, wherein the first insulative material comprises a nitride material.

42. The semiconductor processing method of claim 37, wherein the material is disposed over respective top portions of both the two conductive lines, the insulative material comprising first and second different insulative materials, and wherein the removing comprises selectively etching the first insulative material relative to the second insulative material.

43. The semiconductor processing method of claim 37 wherein the masking layer comprises photoresist.

44. The semiconductor processing method of claim 37 wherein the material comprises insulative material.

45. The semiconductor processing method of claim 37 wherein the other of the two openings formed through the masking layer remains open during the providing of the impurity.

46. The semiconductor processing method of claim 37 wherein the one of the two openings formed through the masking layer remains open during the removing of the material.

47. A semiconductor processing method comprising:
providing a semiconductive substrate supporting two conductive lines and first and second insulative materials, the semiconductive substrate having a masking layer thereover; 
forming two openings through the masking layer, one of the two openings being received over one of the two conductive lines and another of the openings being received over another of the two conductive lines; 
providing impurity through the one opening and into the semiconductive substrate proximate the one conductive line to form at least one doped region; and 
etching one of the first and second insulative materials to at least partially form a contact opening to at least one of the two conductive lines.

48. The semiconductor processing method of claim 47 further comprising providing the impurity into the substrate prior to the etching of the one insulative material.

49. The semiconductor processing method of claim 47 further comprising etching the one of the first and second insulative materials prior to the providing of the impurity.

50. The semiconductor processing method of claim 47, wherein the etching of the one of the first and second insulative materials comprises selectively etching the first insulative material relative to the second insulative material.

51. The semiconductor processing method of claim 47, wherein the forming of the two openings comprises forming said openings to have different transverse cross-sections.

52. The semiconductor processing method of claim 47, wherein insulative material over only one conductive line is exposed through an opening.

53. The semiconductor processing method of claim 47, wherein the first insulative material comprises a nitride material.

54. The semiconductor processing method of claim 47, wherein both the first and the second insulative materials are over each of the two conductive lines and the forming of the two openings entirely exposes an upper surface of one of the insulative materials over only one of the two conductive lines.

55. The semiconductor processing method of claim 47 wherein the masking layer comprises photoresist.

56. The semiconductor processing method of claim 47 wherein the other opening formed through the masking layer remains open during the providing of the impurity.

57. The semiconductor processing method of claim 47 wherein the one opening formed through the masking layer remains open during the etching of one of the first and second insulative materials.

58. The semiconductor processing method of claim 47, wherein both the first and second insulative materials are over each of the two conductive lines and the forming of the two openings entirely exposes an upper surface of one of the insulative materials over only one of the two conductive lines.

59. A semiconductor processing method comprising:
providing a masked substrate comprising a memory array area associated with a peripheral area, the substrate supporting conductive lines and a material; 
in the same masking step, forming a plurality of openings through the mask, the openings being formed over the peripheral area while keeping the memory array masked; 
providing impurity through the openings to form at least one doped region; and 
removing the material from over the conductive lines through the openings.

60. The semiconductor processing method of claim 59 further comprising providing the impurity prior to removing the material from over the conductive lines.

61. The semiconductor processing method of claim 59 wherein the mask comprises photoresist.

62. The semiconductor processing method of claim 59 wherein the substrate and conductive lines comprise portions of DRAM integrated circuitry.