# Patent

## Title
Liquid jetting head

## Abstract

A vibration plate forms a part of each of pressure chambers communicated with a nozzle orifice from which a liquid droplet is ejected. A plurality of piezoelectric vibrators include a drive vibrator and a dummy vibrator which are disposed on the vibration plate such that at least the drive vibrator opposes to each of the pressure chambers. The drive vibrator is provided with a drive electrode, a first piezoelectric layer laminated on the drive electrode, and a first common electrode laminated on the first piezoelectric layer. The dummy vibrator is provided with a connection electrode electrically connected to the first common electrode, a second piezoelectric layer laminated on the connection electrode, and a second common electrode laminated on the second piezoelectric layer and electrically connected to the first common electrode. A first terminal is electrically connected to the drive electrode to supply a drive signal thereto. A second terminal is electrically connected to the connection electrode to supply a common signal thereto.

## Background
BACKGROUND OF THE INVENTION
This invention relates to a liquid jetting head for ejecting a liquid droplet from a nozzle orifice by causing pressure fluctuation to occur in liquid in a pressure chamber as a piezoelectric vibrator becomes deformed.
Liquid jetting heads each for ejecting a liquid droplet from a nozzle orifice by causing pressure fluctuation to occur in liquid in a pressure chamber include a recording head, a liquid crystal jetting head, a color material jetting head, and the like, for example. The recording head is installed in an image recording apparatus such as a printer or a plotter for ejecting ink liquid as ink droplets. The liquid crystal jetting head is used with a display manufacturing apparatus for manufacturing liquid crystal displays. In the display manufacturing apparatus, a liquid crystal ejected from the liquid crystal jetting head is poured into a predetermined grid of a display substrate having a large number of grids. The color material jetting head is used with a filter manufacturing apparatus for manufacturing a color filter, and ejects a color material onto the surface of a filter substrate.
Various types of liquid jetting heads are available, one of which is a liquid jetting head for ejecting liquid droplets by deflecting and deforming piezoelectric vibrators formed on the surface of a vibration plate. This liquid jetting head is made up of an actuator unit including pressure chambers and piezoelectric vibrators and a flow passage unit including nozzle orifices and a common liquid reservoir, for example. In the liquid jetting head, a piezoelectric vibrator on the vibration plate is deformed, whereby the volume of the corresponding pressure chamber is changed for causing pressure fluctuation to occur in liquid stored in the pressure chamber. Using the pressure fluctuation, a liquid droplet is ejected from the corresponding nozzle orifice. For example, the pressure chamber is contracted, whereby liquid is pressurized for pushing out the liquid from the nozzle orifice.
In such a liquid jetting head, a drive signal is supplied to each piezoelectric vibrator 53 of an actuator unit 52 through a discrete terminal 51, for example, as shown in FIG. 11. The drive signal is supplied using a film-like wiring board 54 such as an FPC (flexible printed circuit) or a TCP (tape carrier package), as shown in FIG. 12. The wiring board 54 is formed with a conductor pattern on the surface of a base film of polyimide, etc., and the conductor pattern except contact terminals 55 is covered with a resist 59 (see FIG. 14). Since the discrete terminals 51 are formed in a state in which they are arranged like rows, the contact terminals 55 are also formed in a state in which they are arranged like rows. Since the liquid jetting head has a plurality of the actuator units 52 placed side by side, the wiring board 54 must be overlaid on the actuator unit 52.
Each piezoelectric vibrator in deflection vibration mode has a piezoelectric body layer sandwiched between a common electrode and a discrete electrode; for example, the discrete electrode is extended toward one side of the vibrator in the longitudinal direction thereof for electric connection to the discrete terminal 51, and branch common electrode is extended toward an opposite side of the vibrator in the longitudinal direction thereof for electric connection to a proximal common electrode 56. Since the proximal common electrode 56 is positioned on an opposite side to the connection terminal 51 with the piezoelectric body layer between, each piezoelectric vibrator at the vibrator row end is used as a dummy vibrator and the proximal common electrode 56 and the discrete terminal 51 are electrically connected via a connection electrode 57 deposited on the surface of the dummy vibrator. Each branch common electrode is adjusted to a common potential through the discrete terminal 51. For example, a GND line is electrically connected to the discrete terminal 51, thereby adjusting each branch common electrode to a ground potential.
The connection electrode 57 is formed using two or three (in FIG. 11, two) piezoelectric vibrators (dummy vibrators) 53 from the row end, for example. Since the number of the piezoelectric vibrators (drive vibrators) 53 involved in ejecting liquid droplets is large (for example, several tens), the connection electrode needs to be made thick so as to allow much electric current to flow without a hitch. Therefore, to form the connection electrode, printing is used and a coat of a paste-like electrode material about 10 to 20 μm thick is applied via a mask.
In the connection electrode 57 thus formed on the surfaces of the dummy electrodes, a burr-like part pointed upward easily occurs in an edge portion; this is a problem. The possible reason is that when the mask is lifted up and removed after a coat of the electrode material is applied, the edge portion of the electrode material is also lifted up as the mask is removed.
The connection electrodes 57 and conductor patterns 58 on the wiring board cross as shown in FIGS. 12 and 13. Thus, as the burr-like part of the connection electrode 57 is baked and hardens, it is anxiety that the burr-like part would stick into the resist 59 when the wiring board 54 is attached, for example, as shown in FIG. 14. In this case, the extension direction of the connection electrode 57 crosses that of the conductor pattern 58 and thus if the burr-like part deeply sticks into the resist 59, it is anxiety that the conductor pattern 58 will be short-circuited or broken.
SUMMARY OF THE INVENTION
It is therefore an object of the invention to provide a liquid jetting head for preventing a burr-like part in a connection electrode from occurring to avoid short-circuited or broken of a conductor pattern.
In order to achieve the above object, according to the invention, there is provided a liquid jetting head, comprising:
a vibration plate, which forms a part of each of pressure chambers communicated with a nozzle orifice from which a liquid droplet is ejected;
a plurality of piezoelectric vibrators, including a drive vibrator and a dummy vibrator which are disposed on the vibration plate such that at least the drive vibrator opposes to each of the pressure chambers, the drive vibrator comprising:

    
    
        
        
            a drive electrode;
            a first piezoelectric layer, laminated on the drive electrode; and
            a first common electrode, laminated on the first piezoelectric layer, the dummy vibrator comprising:
            a connection electrode, electrically connected to the first common electrode;
            a second piezoelectric layer, laminated on the connection electrode; and
            a second common electrode, laminated on the second piezoelectric layer, and electrically connected to the first common electrode;
        
        
    
    


a first terminal, electrically connected to the drive electrode to supply a drive signal thereto; and
a second terminal, electrically connected to the connection electrode to supply a common signal thereto.
Preferably, the drive vibrator further comprises: a third common electrode, formed on the vibration plate and electrically connected to the first common electrode; and a third piezoelectric layer, interposed between the third common electrode and the drive electrode. The dummy vibrator further comprises: a fourth common electrode, formed on the vibration plate and electrically connected to the second common electrode; and a fourth piezoelectric layer, interposed between the fourth common electrode and the connection electrode.
In such a configuration, since the dummy vibrator is provided with the connection electrode extends through the lower side of the piezoelectric layer, a burr-like part is prevented from occurring. Accordingly, the conductor pattern of the wiring board can be effectively prevented from being short-circuited or broken.



BRIEF DESCRIPTION OF THE DRAWINGS
The above objects and advantages of the present invention will become more apparent by describing in detail preferred exemplary embodiments thereof with reference to the accompanying drawings, wherein:
FIG. 1 is an exploded perspective view to show the configuration of a recording head according to one embodiment of the invention;
FIG. 2 is a sectional view to show an actuator unit and a flow passage unit in the recording head;
FIG. 3 is a partially enlarged view to show a nozzle plate in the recording head;
FIG. 4 is a perspective view of the actuator unit viewed from the side of a piezoelectric vibrator;
FIGS. 5 and 6 are sectional views to show the structure of the piezoelectric vibrator;
FIG. 7 is an enlarged view of A part in FIG. 6;
FIG. 8 is an enlarged view of B part in FIG. 6;
FIG. 9 is a drawing to show the structure of one end portion of a dummy vibrator of the recording head;
FIG. 10 is a drawing to show the structure of the other end portion of the dummy vibrator.
FIG. 11 is a perspective view to show a related-art actuator unit;
FIG. 12 is a plan view to show an attachment state of a wiring board onto the related-art actuator unit;
FIG. 13 is an enlarged view of C part in FIG. 12; and
FIG. 14 is a section view to explain a problem occurred in the related-art actuator unit.



DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring now to the accompanying drawings, there will be described one preferred embodiment of the invention. In the description that follows, as a liquid jetting head, a recording head 1 installed in an image recording apparatus such as a printer or a plotter is taken as an example, as shown in FIG. 1. The recording head 1 is roughly made up of a flow passage unit 2, actuator units 3, and a film-like wiring board 4. The actuator units 3 are joined side by side on the surface of the flow passage unit 2, and the wiring board 4 is attached to the surfaces of the actuator units 3 on the opposite side to the flow passage unit 2.
For example, as shown in FIG. 7, the wiring board 4 is formed with a conductor pattern 4B on the surface of a base film 4A and with a contact terminal 20 left, the conductor pattern 4B is covered with a resist 4C and thus the contract terminal 20 is soldered to a discrete terminal 19 (described later) for attaching the wiring board 4.
As shown in FIG. 2 (sectional view), the flow passage unit 2 is made up of a supply port formation substrate 7 formed with through holes used as a part of an ink supply port 5 and a part of each nozzle communication port 6, an ink chamber formation substrate 9 formed with through holes used as a common ink reservoir 8 and a part of each nozzle communication port 6, and a nozzle plate 11 having nozzle orifices 10 arranged in a subscanning direction. The supply port formation substrate 7, the ink chamber formation substrate 9, and the nozzle plate 11 are produced by pressing a stainless steel plate material, for example.
FIG. 2 shows a part of the flow passage unit 2 corresponding to one actuator unit 3. In the embodiment, three actuator units 3 are joined to one flow passage unit 2 and therefore a total of three sets of the ink supply port 5, the nozzle communication ports 6, the supply port formation substrate 7, the common ink reservoir 8, etc., are formed in a one-to-one correspondence with the three actuator units 3.
To produce the flow passage unit 2, the nozzle plate 11 is placed on one surface of the ink chamber formation substrate 9 (the lower side in the figure) and the supply port formation substrate 7 is placed on an opposite surface of the ink chamber formation substrate 9 (the upper side in the figure) and the supply port formation substrate 7, the ink chamber formation substrate 9, and the nozzle plate 11 are joined, for example, with a sheet-like adhesive.
The nozzle orifices 10 are made like rows at predetermined pitches as shown in FIG. 3. The nozzle orifices 10 made like a row make up each nozzle row 12. For example, 92 nozzle orifices 10 make up one nozzle row 12. The two nozzle rows 12 are formed for one actuator unit 3. Thus, a total of six nozzle rows 12 are formed side by side for one flow passage unit 2.
The actuator unit 3 is also called a head chip and is one type of piezoelectric actuator. As shown in FIG. 2, the actuator unit 3 is made up of a pressure chamber formation substrate 14 formed with through holes used as pressure chambers 13, a vibration plate 15 for defining a part of each pressure chamber 13, a lid member 17 formed with through holes used as a supply communication port 16 and a part of each nozzle communication port 6, and piezoelectric vibrators 18. As for the plate thicknesses of the members, preferably each of the pressure chamber formation substrate 14 and the lid member 17 is 50 μm or more, more preferably 100 μm or more. Preferably, the vibration plate 15 is 50 μm or less, more preferably about 3 to 12 μm.
To produce the actuator unit 3, the lid member 17 is placed on one surface of the pressure chamber formation substrate 14 and the vibration plate 15 is placed on an opposite surface and the members are formed in one piece. That is, the pressure chamber formation substrate 14, the vibration plate 15, and the lid member 17 are made of ceramics of alumina, zirconium oxide, etc., and are baked and put into one piece.
For example, work of cutting, punching, etc., is performed on a green sheet (unbaked sheet member) to form necessary through holes, etc., for forming each sheet-like precursor of the pressure chamber formation substrate 14, the vibration plate 15, and the lid member 17. The sheet-like precursors are deposited on each other and are baked, whereby they are put into one piece to form one ceramic sheet. In this case, the sheet-like precursors are baked in one piece and therefore a special adhesion treatment is not required. A high sealing property can also be provided on the joint faces of the sheet-like precursors.
One ceramic sheet is formed with pressure chambers 13, nozzle communication ports 6, etc., of a plurality of units. In other words, a plurality of actuator units (head chips) 3 are produced from one ceramic sheet. For example, a plurality of chip areas each to form one actuator unit 3 are set like a matrix within one ceramic sheet. Necessary members of the piezoelectric vibrators 18, etc., are formed in each chip area and then the sheet-like member (ceramic sheet) is cut for each chip area, whereby a plurality of actuator units 3 are provided.
The pressure chambers 13 are each a hollow elongated in a direction orthogonal to the nozzle row 12 and are formed in a one-to-one correspondence with the nozzle orifices 10. That is, the pressure chambers 13 are placed like a row in the nozzle row direction, as shown in FIG. 3. Each pressure chamber 13 communicates at one end with the common ink reservoir 8 through the supply communication port 16 and the ink supply port 5. The pressure chamber 13 communicates at an opposite end to the supply communication port 16 with the corresponding nozzle orifice 10 through the nozzle communication port 6. Further, a part of the pressure chamber 13 (lower surface) is defined by the vibration plate 15.
The piezoelectric vibrators 18 are each a piezoelectric vibrator 18 in deflection vibration mode and are formed in a one-to-one correspondence with the pressure chambers 13 on the vibration plate surface opposite to the pressure chambers 13. The piezoelectric vibrator 18 is shaped like a block elongated in the longitudinal direction of the pressure chamber. It has a width roughly equal to that of the pressure chamber 13 and a length a little longer than that of the pressure chamber 13. Further, the piezoelectric vibrator 18 is disposed so that both end portions are beyond the end portions of the pressure chamber 13 in the longitudinal direction thereof.
As shown in FIG. 4, the piezoelectric vibrators 18 are provided in a one-to-one correspondence with the pressure chambers 13 on the vibration plate surface opposite to the pressure chambers 13. That is, the piezoelectric vibrators 18 are arranged in the nozzle row direction. The piezoelectric vibrators 18 at the ends of each vibrator row are dummy vibrators 18a not involved in ejecting ink droplets (namely, not deformed because no drive signal is supplied). The piezoelectric vibrators 18 other than the dummy vibrators 18a serves as drive vibrators 18b involved in ejecting ink droplets (namely, deformed as a drive signal is supplied).
The discrete terminals 19 are provided in a one-to-one correspondence with the piezoelectric vibrators 18 on one side of the piezoelectric vibrators 18 (drive vibrators 18b and dummy vibrators 18a) in the longitudinal direction thereof. The above-mentioned contact terminals 20 of the wiring board 4 (see FIG. 7) are electrically connected to the discrete terminals 19. A linear proximal common electrode 21 forming a part of a common electrode is extended in the nozzle row direction on an opposite side of the piezoelectric vibrators 18 in the longitudinal direction thereof.
The piezoelectric vibrator 18 (drive vibrator 18b) in the embodiment has a multilayer structure including a piezoelectric layer 22, a branch common electrode 23, a drive electrode (discrete electrode) 24, etc., and the piezoelectric layer 22 is sandwiched between the drive electrode 24 and the branch common electrode 23, as shown in FIG. 5. A supply source (not shown) of a drive signal is electrically connected to the drive electrode 24 through the discrete electrode 19 while the branch common electrode 23 is adjusted to ground potential, for example, through the proximal common electrode 21, etc. When a drive signal is supplied to the drive electrode 24, an electric field of the strength responsive to the potential difference is generated between the drive electrode 24 and the branch common electrode 23. The electric field is given to the piezoelectric layer 22, which then becomes deformed in response to the strength of the given electric field.
That is, the higher the potential of the drive electrode 24, the more contracted the piezoelectric layer 22 in the direction orthogonal to the electric field, deforming the vibration plate 15 so as to reduce the volume of the pressure chamber 13. On the other hand, the lower the potential of the drive electrode 24, the more extended the piezoelectric layer 22 in the direction orthogonal to the electric field, deforming the vibration plate 15 so as to increase the volume of the pressure chamber 13.
The actuator unit 3 and the flow passage unit 2 are joined to each other. For example, a sheet-like adhesive is placed between the supply port formation substrate 7 and the lid member 17 and in this state, the actuator unit 3 is pressed against the flow passage unit 2, whereby the actuator unit 3 and the flow passage unit 2 are joined.
In the described recording head 1, ink flow passages each from the common ink reservoir 8 through the ink supply port 5, the supply communication port 16, the pressure chamber 13, and the nozzle communication port 6 to the nozzle orifice 10 are formed in a one-o-one correspondence with the nozzle orifices 10. At the operating time, the ink flow passage fills with ink. As the piezoelectric vibrator 18 is deformed, the corresponding pressure chamber 13 is contracted or expanded and pressure fluctuation occurs in ink in the pressure chamber 13. As the ink pressure is controlled, an ink droplet can be ejected from the nozzle orifice 10. For example, if the pressure chamber 13 of a stationary volume is once expanded and then rapidly contracted, the pressure chamber 13 is filled with ink as the pressure chamber 13 is expanded, and then the ink in the pressure chamber 13 is pressurized because of the later rapid contraction of the pressure chamber 13, ejecting an ink droplet. Further, as an ink droplet is ejected from the nozzle orifice 10, new ink is supplied from the common ink reservoir 8 into the ink flow passage, so that successively ink droplets can be ejected.
To execute high-speed recording, a larger number of ink droplets need to be ejected in a short time. To meet the requirement, it is necessary to consider compliance of the vibration plate 15 of the portion defining the pressure chamber 13 and the deformation amount of the piezoelectric vibrator 18. The reason why the compliance and the deformation amount need to be considered is that as the compliance of the vibration plate 15 increases, responsibility to the deformation worsens and it becomes difficult to drive at a high frequency and that as the compliance of the vibration plate 15 lessens, the vibration plate 15 becomes hard to deform and the shrinkage amount of the pressure chamber 13 lessens, decreasing the ink amount of one droplet.
In the embodiment, the piezoelectric vibrators 18 each of a multilayer structure are used to lessen the compliance of the vibration plate 15 and it is made possible to eject an ink droplet of the necessary amount at a higher frequency than ever. The end portions of the discrete terminals 19 are deposited on the piezoelectric vibrators 18 for miniaturizing the actuator unit 3 in the width direction thereof. Further, a connection electrode for electrically connecting the proximal common electrode 21 and the discrete electrode 19 is placed in each dummy electrode 18a. These points will be discussed below:
To begin with, the structure of the drive vibrator 18b will be discussed. As shown in FIG. 5, the piezoelectric layer 22 is formed like a block elongated in the longitudinal direction of the pressure chamber and is made up of an upper piezoelectric body (outer piezoelectric body) 31 and a lower piezoelectric body (inner piezoelectric body) 32 deposited on each other. The branch common electrode 23 is made up of an upper common electrode (outer common electrode) 33 and a lower common electrode (inner common electrode) 34. The branch common electrode 23 and the drive electrode 24 make up an electrode layer.
The term “upper (outer)” or “lower (inner)” mentioned here is used to indicate the position relationship with the vibration plate 15 as the reference. That is, the term “upper (outer)” is used to indicate the side distant from the vibration plate 15 and the term “lower (inner)” is used to indicate the side near to the vibration plate 15.
The drive electrode 24 is formed on the boundary between the upper piezoelectric body 31 and the lower piezoelectric body 32. The lower common electrode 34 and the upper common electrode 33 together with the proximal common electrode 21 make up the common electrode. That is, the common electrode is pectinated so as to form a plurality of branch common electrodes 23 (lower common electrode 34 and upper common electrode 33) extended from the proximal common electrode 21.
The lower common electrode 34 is formed between the lower piezoelectric body 32 and the vibration plate 15, and the upper common electrode 33 is formed on the surface of the upper piezoelectric body 31 on the opposite side to the lower piezoelectric body 32. That is, the drive vibrator 18b is of a multilayer structure wherein the lower common electrode 34, the lower piezoelectric body 32, the drive electrode 24, the upper piezoelectric body 31, and the upper common electrode 33 are deposited in order from the vibration plate 15 side.
In the embodiment, the piezoelectric layer 22 has a thickness of about 17 μm (the thickness of the upper piezoelectric body 31 plus the thickness of the lower piezoelectric body 32). The total thickness of the piezoelectric vibrator 18 including the branch common electrode 23 is about 20 μm. The related-art piezoelectric vibrator of the single-layer structure has a total thickness of about 15 μm. Therefore, as the thickness of the piezoelectric vibrator 18 increases, the compliance of the vibration plate 15 lessens accordingly.
The upper common electrode 33 and the lower common electrode 34 are adjusted to a constant potential, for example, ground potential regardless of a drive signal. The drive electrode 24 is changed in potential in response to the supplied drive signal. Therefore, as the drive signal is supplied, electric fields opposite in direction occur between the drive electrode 24 and the upper common electrode 33 and between the drive electrode 24 and the lower common electrode 34.
As materials forming the electrodes, various conductors of discrete metal, an alloy, a mixture of electric insulating ceramics and metal, and the like can be selected, but it is required that a defective condition of deterioration, etc., should not occur at the baking temperature. In the embodiment, gold is used for the upper common electrode 33 and platinum is used for the lower common electrode 34 and the drive electrode 24.
Both the upper piezoelectric body 31 and the lower piezoelectric body 32 are made of piezoelectric material consisting essentially of lead zirconate titanate (PZT), for example. The upper piezoelectric body 31 and the lower piezoelectric body 32 are opposite in polarization direction. Thus, the upper piezoelectric body 31 and the lower piezoelectric body 32 are identical in the extending or contracting direction when the drive signal is applied, and can deform the vibration plate 15 without a hitch. That is, as the potential of the drive electrode 24 is made higher, the upper piezoelectric body 31 and the lower piezoelectric body 32 deform the vibration plate 15 so as to lessen the volume of the pressure chamber 13; as the potential of the drive electrode 24 is made lower, the upper piezoelectric body 31 and the lower piezoelectric body 32 deform the vibration plate 15 so as to increase the volume of the pressure chamber 13.
Next, the structure of one side (common ink reservoir 8 side) of the drive vibrator 18b will be discussed.
On the one side, the discrete terminal 19 is formed as described above. The discrete terminal 19 of the drive vibrator 18b is a drive potential supply terminal for supplying a drive signal (drive potential), and is electrically connected to the contact terminal 20 of the wiring board 4. The discrete terminal 19 is electrically connected to the drive electrode 24 extended in the longitudinal direction of the pressure chamber 13. That is, a part of the discrete terminal 19 is deposited on an end portion of the drive electrode 24.
The embodiment is characterized by the fact that the end portion of the discrete terminal 19 is overlaid on the surface of the vibrator end portion (upper piezoelectric body) which is not superposed on the pressure chamber 13, and further the discrete terminal 19 is formed away from the upper common electrode 33 (branch common electrode 23).
That is, as shown in FIGS. 6 and 7, the one end portion of the piezoelectric vibrator 18 is extended beyond the end portion of the pressure chamber 13, in other words, to a non-superposition area outside the superposition area on the pressure chamber 13. The vibrator-side end portion of the discrete terminal 19 is deposited on the upper surface of the piezoelectric vibrator 18 in the non-superposition area. The end portion of the discrete terminal 19 formed on the piezoelectric vibrator 18 becomes an electric connection (conduction) part with the wiring board 4 (contact terminal 20), which will be hereinafter also called conduction part 19a. On the other hand, the end portion of the upper common electrode 33 is formed to a point before the discrete terminal 19, but an isolation area X from the discrete terminal 19 is provided and therefore they are not electrically connected.
Such a structure makes it possible to miniaturize the actuator unit 3. That is, the end portion of the discrete terminal 19 is positively overlaid on the surface of the piezoelectric vibrator 18, so that the discrete terminal 19 can be formed leaning to the piezoelectric vibrator side as a whole. Thus, as for the discrete terminal 19, while the length required for electric connection (namely, the necessary length for joint to the contact terminal 20) is ensured, the width of the actuator unit 3, particularly, the width in the longitudinal direction of the pressure chamber can be shortened.
As the actuator unit 3 is miniaturized, at the manufacturing time, a larger number of actuator units 3 can be laid out on a ceramic sheet of the same area as the ceramic sheet in the related art. Therefore, in a case where the same process as that in the related art is applied, a larger number of actuator units 3 can be manufactured so that the manufacturing efficiency can be improved. The raw material can also be saved. Since the manufacturing efficiency can be improved and the raw material can be saved, cost reduction in the actuator unit 3 is also made possible.
At the connecting time to the wiring board 4, with the contact terminal 20 of the wiring board 4 put on the discrete terminal 19, a heating terminal (not shown) is pressed from the wiring board surface on the opposite side to the discrete terminal 19 for soldering the discrete terminal 19 and the contact terminal 20, as shown in FIG. 7. In this case, the conduction part 19a of the discrete terminal 19 is positioned above the piezoelectric vibrator 18 and is at the highest position in the actuator unit 3 and therefore is most strongly pressurized by the heating terminal. Thus, reliable soldering can be accomplished.
Further, the conduction part 19a is formed on the piezoelectric vibrator 18 and thus the member below the conduction part 19a is thickened as much as the piezoelectric vibrator 18, so that the member is enhanced in rigidity and can also receive reliably the press force from the heating terminal.
Next, the structure of an opposite side (nozzle orifice 10 side) of the drive vibrator 18b will be discussed.
As shown in FIGS. 6 and 8, on the opposite side of the drive vibrator 18b, the upper common electrode 33 and the lower common electrode 34 are extended in the longitudinal direction of the pressure chamber 13. That is, the lower common electrode 34 is formed through the top of the vibrator plate 15 to the lower face of the proximal common electrode 21. The upper common electrode 33 is formed through a side end face of the piezoelectric layer 22 to the surface of the lower common electrode 34. Further, the upper common electrode 33 is also formed to the lower face of the proximal common electrode 21. Therefore, both the upper common electrode 33 and the lower common electrode 34 are electrically connected to the proximal common electrode 21.
Next, the structure of the dummy electrode 18a will be discussed. The basic structure of the dummy electrode 18a is the same as that of the drive vibrator 18b described above. That is, as shown in FIGS. 9 and 10, the dummy electrode 18a also has a piezoelectric layer 22 including an upper piezoelectric body 31 and a lower piezoelectric body 32 and formed like a block elongated in the pressure chamber longitudinal direction and is formed with an electrode layer between the vibration plate 15 and the lower piezoelectric body 32, an electrode layer on the boundary between the upper piezoelectric body 31 and the lower piezoelectric body 32, and an electrode layer on the surface of the upper piezoelectric body 31 opposite to the lower piezoelectric body 32.
In the embodiment, the electrode layer between the vibration plate 15 and the lower piezoelectric body 32, which will be hereinafter referred to as a first connection electrode 35, and the electrode layer on the boundary between the upper piezoelectric body 31 and the lower piezoelectric body 32, which will be hereinafter referred to as a second connection electrode 36, are extended to both sides in the longitudinal direction of the pressure chamber 13 for electrically connecting the proximal common electrode 21 and the discrete terminal 19.
That is, the first connection electrode 35 is formed from the proximal common electrode 21 through the lower side of the lower piezoelectric body 32 to the discrete terminal 19, and the second connection electrode 36 is formed from the proximal common electrode 21 through the lower side of the upper piezoelectric body 31 to the discrete terminal 19. In the embodiment, the connection electrodes are formed with the same electrode material as the lower common electrode 34 and the drive electrode 24.
In the structure, the discrete terminal 19 provided on the dummy electrode 18a and the proximal common electrode 21 are electrically connected through the connection electrodes 35, 36, so that the discrete terminal 19 can be used as a supply terminal to supply common potential (for example, ground potential). Since the discrete terminal 19 is formed in the same row as the discrete terminal 19 for the drive vibrator 18b, the actuator unit 3 can be miniaturized. To electrically connect the wiring board 4 and each discrete terminal 19, the discrete terminal 19 for the dummy vibrator 18a and the discrete terminal 19 for the drive vibrator 18b can be electrically connected collectively, so that the work efficiency can be improved.
The connection electrodes are placed on the lower side of the piezoelectric layer 22, no burr-like parts will occur. Thus, defective conditions of breaking or short-circuiting the wiring due to a burr-like part after the wiring board 4 is mounted can be prevented reliably. Therefore, full use of the stable performance of the recording head 1 with less trouble can be made.
Further, the connection electrodes 35 and 36 are separated into two layers and thus a sufficient thickness can be ensured, so that the resistance value of the electrode can be suppressed to a low value. In addition, the connection electrodes 35 and 36 are formed with the same electrode material as the lower common electrode 34 and the drive electrode 24 and thus can be manufactured at the same time as the lower common electrode 34 and the drive electrode 24. That is, the first connection electrode 35 can be manufactured at the same time as the lower common electrode 34, and the second connection electrode 36 can be manufactured at the same time as the drive electrode 24. This eliminates the need for executing the specific process for forming the connection electrodes, and the manufacturing efficiency can be enhanced.
It is to be understood that the invention is not limited to the specific embodiment and the combination and arrangement of parts may be resorted to without departing from the spirit and the scope of the invention as claimed.
For example, in the embodiment, the piezoelectric vibrator 18 is of the multilayer structure wherein the upper and lower piezoelectric bodies 31 and 32 and the like are deposited, but the invention can also be applied to the piezoelectric vibrator of a single-layer structure including a single layer of piezoelectric layer. For example, for the drive vibrator 18b, the drive electrode 24 is formed between the piezoelectric layer 22 and the vibration plate 15, and the upper common electrode 33 and the discrete electrode 19 are formed on the piezoelectric layer surface opposite to the vibration plate 15. For the dummy vibrator 18a, the connection electrode is formed between the piezoelectric layer 22 and the vibration plate 15.
Although the liquid jetting head has been described by taking the recording head 1, one type of liquid jetting head, as an example, the invention can also be applied to other liquid jetting heads such as a liquid crystal jetting head and a color material jetting head.

## Claims

1. A liquid jetting head, comprising:
a vibration plate, which forms a part of each of pressure chambers communicated with a nozzle orifice from which a liquid droplet is ejected; 
a plurality of piezoelectric vibrators, including a drive vibrator and a dummy vibrator which are disposed on the vibration plate such that at least the drive vibrator opposes to each of the pressure chambers, the drive vibrator comprising: 
a drive electrode; 
a first piezoelectric layer, laminated on the drive electrode; and 
a first common electrode, laminated on the first piezoelectric layer, the dummy vibrator comprising: 
a connection electrode, electrically connected to the first common electrode; 
a second piezoelectric layer, laminated on the connection electrode; and 
a second common electrode, laminated on the second piezoelectric layer, and electrically connected to the first common electrode; 

a first terminal, electrically connected to the drive electrode to supply a drive signal thereto; and 
a second terminal, electrically connected to the connection electrode to supply a common signal thereto, 
wherein the drive vibrator is deformed such that the vibration plate is deformed in a direction that the vibration plate, the drive electrode, the first piezoelectric layer and the first common electrode are laminated.

2. The liquid jetting head as set forth in claim 1, wherein:
the drive vibrator further comprises: 
a third common electrode, formed on the vibration plate and electrically connected to the first common electrode; and 
a third piezoelectric layer, interposed between the third common electrode and the drive electrode; and 

the dummy vibrator further comprises: 
a fourth common electrode, formed on the vibration plate and electrically connected to the second common electrode; and 
a fourth piezoelectric layer, interposed between the fourth common electrode and the connection electrode.

3. The liquid jetting head as set forth in claim 2, wherein the connection electrode is provided above the fourth piezoelectric layer and the fourth common electrode is provided below the fourth piezoelectric layer.

4. The liquid jetting head as set forth in claim 1, wherein a discrete terminal is provided to supply a common potential to the drive vibrator.

5. The liquid jetting head as set forth in claim 1, wherein a plurality of discrete terminals are provided in a one-to-one correspondence with the plurality of piezoelectric vibrators.

6. The liquid jetting head as set forth in claim 5, wherein contact terminals of a wiring board are to be connected to the discrete terminals.

7. The liquid jetting head as set forth in claim 1, wherein the connection electrode is provided on a lower side of the second piezoelectric layer, said lower side being a side of the piezoelectric layer which faces the vibration plate.

8. A liquid jetting head, comprising:
a vibration plate, which forms a part of each of pressure chambers communicated with a nozzle orifice from which a liquid droplet is ejected; 
a plurality of piezoelectric vibrators, including a drive vibrator and a dummy vibrator which are disposed on the vibration plate such that at least the drive vibrator opposes to each of the pressure chambers, the drive vibrator comprising: 
a drive electrode; 
a first piezoelectric layer, laminated on the drive electrode; and 
a first common electrode, laminated on the first piezoelectric layer, the dummy vibrator comprising: 
a connection electrode, electrically connected to the first common electrode; 
a second piezoelectric layer, laminated on the connection electrode; and 
a second common electrode, laminated on the second piezoelectric layer, and electrically connected to the first common electrode; 

a first terminal, electrically connected to the drive electrode to supply a drive signal thereto; and 
a second terminal, electrically connected to the connection electrode to supply a common signal thereto; 
the drive vibrator further comprises: 
a third common electrode, formed on the vibration plate and electrically connected to the first common electrode; and 
a third piezoelectric layer, interposed between the third common electrode and the drive electrode; and 

the dummy vibrator further comprises: 
a fourth common electrode, formed on the vibration plate and electrically connected to the second common electrode; and 
a fourth piezoelectric layer, interposed between the fourth common electrode and the connection electrode.