# Patent

## Title
Integration of factory level and tool level advanced process control systems

## Abstract

Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system.

## Background
BACKGROUND OF THE INVENTION
1. Technical Field
The present invention relates generally to manufacturing control systems, and more particularly, to integration of a factory level advanced process control (APC) system and a local tool level APC system.
2. Related Art
Manufacturers, especially semiconductor fabricators, who implement advanced process control (APC) systems, generally do so at the factory level. APC systems take measurements of particular structures before and after a processing step and provide corrections to recipes for feeding forward and/or feeding back to tools 12 to achieve a better product. Typically, factory level APC systems are implemented such that individual tools are controlled by the factory level APC system. Presently, however, tool vendors are beginning to implement embedded APC systems in tools. For example, FIG. 1 shows a typical semiconductor fabricator environment 10 including a number of tools 12, a manufacturing execution system (MES) 14 that controls all product movements through environment 10, i.e., it schedules product movements, a factory level APC (FL-APC) system 16, and an equipment interface (EI) 18 that interfaces between MES 14 and different tools. Although not shown, middleware may be present for communication between MES 14, FL-APC system 16 and EI 18. Each tool 12 includes process equipment 20 particular to its function, e.g., an etching chamber, gas source, appropriate electronics, etc. for an etching tool. Metrology instruments may be provided as an integrated metrology (IM) system 22 and/or external metrology systems 24 and 26.
Presently, tool manufacturers are beginning to implement advanced process control systems on their tools. Accordingly, each tool 12 may now include a tool level APC (TL-APC) system 30. Although new tool level APC systems hold promise for increased efficiency, they also present a challenge in that no effective and standard method exists to coordinate and manage the process control functions between the factory level APC system and the tool level APC system. Accordingly, each tool with a new tool level APC system represents a set of customization challenges relative to integration with the factory level APC system. In addition, the variety of scenarios that must be addressed is based on which of the following is desired: FL-APC and/or TL-APC control, external and/or integrated metrology, lot-to-lot and/or wafer-to-wafer evaluation. As a result, the customization challenges are immense.
In view of the foregoing, there is a need in the art for a solution for integrating factory level and tool level APC systems.
SUMMARY OF THE INVENTION
Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system with or without integrated metrology.
A first aspect of the invention is directed to a method comprising the steps of: providing a plurality of advanced processing control (APC) operation modes for selection by a manufacturing execution system that interacts with at least one of: a) a factory level advanced processing control (FL-APC) system, and b) at least one tool level advanced processing control (TL-APC) system, wherein the plurality of APC operation modes indicate different operational settings for the FL-APC system and the at least one TL-APC system; and implementing a selected APC operation mode.
A second aspect of the invention includes a system comprising: a manufacturing execution system (MES); a factory level advanced process control (FL-APC) system coupled to the MES; at least one tool including a tool level advanced process control (TL-APC) system coupled to the FL-APC system; and a plurality of selectable advanced process control (APC) operation modes, each APC operation mode indicating an operational setting for the FL-APC system and the TL-APC system.
A third aspect of the invention related to a system comprising: a manufacturing execution system (MES); a factory level advanced process control (FL-APC) system coupled to the MES; at least one tool including a tool level advanced process control (TL-APC) system coupled to the FL-APC system; and a plurality of selectable advanced process control (APC) operation modes, each APC operation mode indicating an operational setting for the FL-APC system and the TL-APC system.
A fourth aspect of the invention is directed to a computer program product comprising computer readable medium including a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: provide a plurality of advanced processing control (APC) operation modes for selection by a manufacturing execution system that interacts with at least one of: a) a factory level advanced processing control (FL-APC) system, and b) at least one tool level advanced processing control (TL-APC) system, wherein the plurality of APC operation modes indicate different operational settings for the FL-APC system and the at least one TL-APC system; and implement a selected APC operation mode.
The foregoing and other features of the invention will be apparent from the following more particular description of embodiments of the invention.



BRIEF DESCRIPTION OF THE DRAWINGS
The embodiments of this invention will be described in detail, with reference to the following figures, wherein like designations denote like elements, and wherein:
FIG. 1 shows a conventional semiconductor fabrication environment.
FIG. 2 shows a semiconductor fabrication environment according to the invention.
FIG. 3 shows a block diagram of a factory level-tool level advance process control integration system according to one embodiment of the invention.
FIG. 4 shows a flow diagram of one embodiment of a method of operation of the system of FIG. 3.
FIGS. 5–12 show tables listing illustrative operation modes for the system of FIG. 3.



DETAILED DESCRIPTION
With reference to the accompanying drawings, FIG. 2 shows an illustrative semiconductor fabricator environment 50 according to the invention. Environment 50 includes a number of tools 52, a manufacturing execution system (MES) 54 that controls all product movements through the environment, i.e., it schedules product movements, a factory level APC (FL-APC) system 56, and an equipment interface (EI) 58 that interfaces between MES 54 and FL-APC system 56 with different tools. Although not shown, middleware may be present for communication between MES 54, FL-APC system 56 and EI 58. As known in the art, FL-APC system 56 uses measurements of particular structures before (pre) and after (post) a particular processing step, and provides corrections to recipes (i.e., a recipe parameter adjustment (RPA)) for feeding forward and/or feeding back to tools 52 to achieve a better product.
Continuing with FIG. 2, each tool 52 includes process equipment 60 particular to its function, e.g., an etching chamber, gas source, appropriate electronics, etc. for an etching tool. Metrology instruments may be provided as an integrated metrology (IM) system 62 and/or external metrology systems 64 and 66. Each tool 52 also includes a tool level APC (TL-APC) system 70, which similarly to FL-APC system 56 may use pre-measurements and post-measurements of particular structures and provide corrections to recipes for feeding forward and/or feeding back to process equipment 60 of the tool or to other tools 52 to achieve a better product. A factory level-tool level advanced process control (FL-TL APC) integration system 100 (hereinafter “integration system”) is provided that integrates operation of FL-APC system 56, MES 54, EI 58 and any number of TL-APC systems 70. It should be recognized that the positioning of integration system 100, as well as MES 54, EI 58, FL-APC system 56, etc., is only illustrative, and that the positioning can be changed as required by a user.
Referring to FIG. 3, a block diagram of one embodiment of integration system 100 in accordance with the invention is shown. In this embodiment, integration system 100 is shown implemented on computer 102 as computer program code. To this extent, computer 102 is shown including a memory 112, a processor 114, an input/output (I/O) interface 116, and a bus 118. Further, computer 102 is shown in communication with an external I/O device/resource 120 and a storage system 122. In general, processor 114 executes computer program code, such as system 100, that is stored in memory 112 and/or storage system 122. While executing computer program code, processor 114 can read and/or write data to/from memory 112, storage system 122, and/or I/O device 120. Bus 118 provides a communication link between each of the components in computer 102, and I/O device 120 can comprise any device that enables user to interact with computer 102 (e.g., keyboard, pointing device, display, etc.).
Alternatively, a user can interact with another computing device (not shown) in communication with computer 102. In this case, I/O interface 116 can comprise any device that enables computer 102 to communicate with one or more other computing devices over a network (e.g., a network system, network adapter, I/O port, modem, etc.). The network can comprise any combination of various types of communications links. For example, the network can comprise addressable connections that may utilize any combination of wireline and/or wireless transmission methods. In this instance, the computing devices (e.g., computer 102) may utilize conventional network connectivity, such as Token Ring, Ethernet, WiFi or other conventional communications standards. Further, the network can comprise one or more of any type of network, including the Internet, a wide area network (WAN), a local area network (LAN), a virtual private network (VPN), etc. Where communications occur via the Internet, connectivity could be provided by conventional TCP/IP sockets-based protocol, and a computing device could utilize an Internet service provider to establish connectivity to the Internet.
Computer 102 is only representative of various possible combinations of hardware and software. For example, processor 114 may comprise a single processing unit, or be distributed across one or more processing units in one or more locations, e.g., on a client and server. Similarly, memory 112 and/or storage system 122 and/or APC operation modes database 160 (which may be part of either memory 112 or storage system 122) may reside at one or more physical locations. Memory 112 and/or storage system 122 and/or APC operation modes database 160 (hereinafter simply “database 160”) can comprise any combination of various types of computer-readable media and/or transmission media including magnetic media, optical media, random access memory (RAM), read only memory (ROM), a data object, etc. I/O interface 116 can comprise any system for exchanging information with one or more I/O devices. Further, it is understood that one or more additional components (e.g., system software, math co-processor, etc.) not shown in FIG. 3 can be included in computer 102. To this extent, computer 102 can comprise any type of computing device such as a network server, a desktop computer, a laptop, a handheld device, a mobile phone, a pager, a personal data assistant, etc. However, if computer 102 comprises a handheld device or the like, it is understood that one or more I/O devices (e.g., a display) and/or storage system 122 could be contained within computer 102, not externally as shown. Computer 102 may also be implemented as part of systems that provide MES 54 and/or FL-APC system 56.
As discussed further below, integration system 100 is shown including a selector 124, an implementer 126, a decoder 130 and other system components 140. Other system components 140 may include any other functionality necessary for implementation of integration system 100 not expressly described herein. In addition, integration system 100 includes a plurality of advanced processing control (APC) operation modes stored in database 160.
Turning to FIG. 4, a flow diagram of one embodiment of a method of operation of integration system 100 is illustrated. Description of FIG. 4 will be made in conjunction with FIGS. 2 and 3.
In a first step S1, a plurality of advanced process control (APC) operation modes are provided for selection by MES 54 that interacts with at least one of: a) FL-APC system 56, and b) at least one TL-APC system 70. Each of the APC operation modes may indicate a different operational setting for FL-APC system 56 and the at least one TL-APC system 70. FIGS. 5–12 show tables providing a non-exhaustive listing of illustrative operational settings that may be selected. In addition, each APC operation mode may also indicate an operational setting for: an external pre-measurement metrology tool 64 upstream from a tool 52 including a TL-APC system 70, an external post-measurement metrology tool 66 downstream from the tool including TL-APC system 70, an integrated metrology tool 62 of the tool including the TL-APC system, and/or use of an integrated metrology tool 62 as an external pre or post measurement upstream or downstream of the tool 52. Furthermore, each APC operation mode may indicate an ‘APC criteria’ such as lot-to-lot evaluation and/or wafer-to-wafer evaluation. Each APC operation mode may also indicate a duration for at least one portion of the APC operation mode. In this case, a ‘duration’ may indicate, for example, a number of wafers to be evaluated using the particular APC operation mode or a duration of a control job. A “control job” is a unit of work flow which is used to specify one or more process operations to be performed on specific lots or wafers on specific equipment.
In FIGS. 5–12, each row indicates a potential APC operation mode. Each APC operation mode may have some sort of name and/or classification (not shown) for identification purposes. The examples shown provide indications relative to: FL-APC system 54 and TL-APC system 70 on-off, i.e., YES or NO, the APC criteria (e.g., lot-to-lot (L2L) and/or wafer-to-wafer (W2W)), the mode for FL-APC system 56 (i.e., active or passive) and the mode for TL-APC system 70 indicated (i.e., active or disabled). In addition, the scenario of operation is also indicated. FIG. 5 shows factory level control without tool level control (with external 64, 66 and integrated 62 metrology). FIG. 6 shows tool level control without factory level control (with external 64, 66 and internal 62 metrology). FIG. 7 shows factory level control with tool level control, where the factory level control (FLC) uses external metrology 64, 66 and the tool level control (TLC) uses integrated metrology 62. FIG. 8 shows factory level control with tool level control, where the factor level control (FLC) uses integrated metrology 62 and the tool level control (TLC) uses external metrology 64, 66. FIG. 9 shows factory level control with tool level control, where only external metrology 64, 66 is used. FIG. 10 shows factory level control with tool level control, where only integrated metrology 62 is used. FIG. 111 shows a special set of APC operation modes in which the factory level control in a simulation mode using external metrology. The FIG. 11 APC operation modes are used during initial operation of a new tool and its TL-APC system 70 such that integration system 100 can be used to check operation of a new TL-APC system 70. FIG. 12 shows another special set of APC operation modes in which the factory level control operating in a simulation mode using integrated metrology is selectable for testing of a new TL-APC system 70.
Returning to FIGS. 2–4, in a next step S2, a selection of an APC operation mode may be made via a selector 124, which may be provided as part of integration system 100 or as part of MES 54. Selector 124 may provide for selecting an appropriate APC operation mode in any now known or later developed fashion. The APC operation mode will be passed along with other logistic information to FL-APC system 56 and the appropriate APC operation will be performed.
In step S3, a selected APC operation mode is implemented by implementer 126. Implementer 126 implements the selected APC operation mode using FL-APC system 56 to control the at least one TL-APC system 70 based on the selected APC operation mode. That is, FL-APC system 56 is always enabled. As indicated in FIGS. 5–12, where FL-APC system 56 is not used, it remains in a ‘passive’ mode in which it monitors and coordinates TL-APC system 70 operation, regardless which APC operation mode is selected, FL-APC system 56 is required to perform all APC operations.
Each tool 52 and accordingly each TL-APC system 70 may operate using its own particular language. Accordingly, in one embodiment, the above-described method may also include translating data communicated between integration system 100, FL-APC system 56 and the at least one TL-APC system 70 using a decoder 130. In one embodiment, each tool 52 and TL-APC system 70 may have a set of instruction mappings for communication with MES 54, FL-APC system 56 and EI 58. In this fashion, any tool 52 and TL-APC system 70 can be integrated into environment 50.
In another embodiment, a method may provide the steps of providing MES 54 coupled to FL-APC system 56 that provides at least one of feedback and feedforward control for tool 52, wherein tool 52 includes a TL-APC system 70, and selecting an APC operation mode from a plurality of APC operation modes. As noted above, the plurality of APC operation modes indicate an operational setting for each of FL-APC system 56 and TL-APC system 70.
It is understood that the order of the above-described steps is only illustrative. To this extent, one or more steps can be performed in parallel, in a different order, at a remote time, etc. Further, one or more of the steps may not be performed in various embodiments of the invention. In addition, use of integration system 100 in a semiconductor fabrication environment 50 is only illustrative as the invention may find application in a number of different manufacturing settings.
It is understood that the present invention can be realized in hardware, software, a propagated signal, or any combination thereof, and may be compartmentalized other than as shown. Any kind of computer/server system(s)—or other apparatus adapted for carrying out the methods described herein—is suitable. A typical combination of hardware and software could be a general purpose computer system with a computer program that, when loaded and executed, carries out the respective methods described herein. Alternatively, a specific use computer, containing specialized hardware for carrying out one or more of the functional tasks of the invention (e.g., integration system 100), could be utilized. The present invention also can be embedded in a computer program product or a propagated signal, which comprises all the respective features enabling the implementation of the methods described herein, and which—when loaded in a computer system—is able to carry out these methods. Computer program, propagated signal, software program, program, or software, in the present context mean any expression, in any language, code or notation, of a set of instructions intended to cause a system having an information processing capability to perform a particular function either directly or after either or both of the following: (a) conversion to another language, code or notation; and/or (b) reproduction in a different material form. Furthermore, it should be appreciated that the teachings of the present invention could be offered as a business method on a subscription or fee basis. For example, the system and/or computer could be created, maintained, supported and/or deployed by a service provider that offers the functions described herein for customers. That is, a service provider could offer the functionality described above.
While this invention has been described in conjunction with the specific embodiments outlined above, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art. Accordingly, the embodiments of the invention as set forth above are intended to be illustrative, not limiting. Various changes may be made without departing from the spirit and scope of the invention as defined in the following claims.

## Claims

1. A method comprising the steps of:
providing a plurality of advanced processing control (APC) operation modes for selection by a manufacturing execution system that interacts with at least one of: a) a factory level advanced processing control (FL-APC) system, and b) at least one tool level advanced processing control (TL-APC) system, wherein the plurality of APC operation modes indicate different operational settings for the FL-APC system and the at least one TL-APC system; and
implementing a selected APC operation mode.

2. The method of claim 1, wherein the implementing step includes using the FL-APC system to control the at least one TL-APC system based on the selected APC operation mode.

3. The method of claim 1, further comprising the step of translating data communicated between the FL-APC system and the at least one TL-APC system.

4. The method of claim 1, wherein each APC operation mode further indicates an operational setting for at least one of: an external pre-measurement metrology tool upstream from a tool including a TL-APC system, an external post-measurement metrology tool downstream from the tool including the TL-APC system, an integrated metrology tool of the tool including the TL-APC system, use of the integrated metrology tool as an external pre or post measurement upstream or downstream of the tool, an APC criteria, and a duration for at least one portion of the APC operation mode.

5. The method of claim 4, wherein the APC criteria includes at least one of lot-to-lot evaluation and wafer-to-wafer evaluation.

6. A method comprising the steps of:
providing a manufacturing execution system coupled to a factory level advanced process control (FL-APC) system that provides at least one of feedback and feedforward control for a tool, wherein the tool includes a tool level advanced process control (TL-APC) system; and
selecting an advanced process control (APC) operation mode from a plurality of APC operation modes, which indicate an operational setting for each of the FL-APC system and the TL-APC system.

7. The method of claim 6, further comprising the step of implementing the selected APC operation mode using the FL-APC system to control the at least one TL-APC system according to the selected APC operation mode.

8. The method of claim 6, further comprising the step of translating data communicated between the FL-APC system and the at least one TL-APC system.

9. The method of claim 6, wherein each APC operation mode further indicates an operational setting for at least one of: an external pre-measurement metrology tool upstream from a tool including a TL-APC system, an external post-measurement metrology tool downstream from the tool including the TL-APC system, an integrated metrology tool of the tool including the TL-APC system, use of the integrated metrology tool as an external pre or post measurement upstream or downstream of the tool, an APC criteria, and a duration for at least one portion of the APC operation mode.

10. The method of claim 9, wherein the APC criteria includes at least one of lot-to-lot evaluation and wafer-to-wafer evaluation.

11. A system comprising:
a manufacturing execution system (MES);
a factory level advanced process control (FL-APC) system coupled to the MES;
at least one tool including a tool level advanced process control (TL-APC) system coupled to the FL-APC system; and
a plurality of selectable advanced process control (APC) operation modes, each APC operation mode indicating an operational setting for the FL-APC system and the TL-APC system.

12. The system of claim 11, wherein the FL-APC system controls the at least one TL-APC system according to a selected APC operation mode.

13. The system of claim 11, further comprising a decoder for translating data communicated between the FL-APC system and the at least one TL-APC system.

14. The system of claim 11, further comprising at least one of: an external pre-measurement metrology tool upstream from a tool including a TL-APC system, an external post-measurement metrology tool downstream from the tool including the TL-APC system and an integrated metrology tool of the tool including the TL-APC system.

15. The system of claim 14, wherein each APC operation mode further indicates an operational setting for at least one of: the external pre-measurement metrology tool, the external post-measurement metrology tool, the integrated metrology tool of the tool including the TL-APC system, an APC criteria, and a duration for at least one portion of the APC operation mode.

16. The system of claim 15, wherein the APC criteria includes at least one of lot-to-lot evaluation and wafer-to-wafer evaluation.

17. A computer program product comprising computer readable medium including a computer readable program, wherein the computer readable program when executed on a computer causes the computer to:
provide a plurality of advanced processing control (APC) operation modes for selection by a manufacturing execution system that interacts with at least one of: a) a factory level advanced processing control (FL-APC) system, and b) at least one tool level advanced processing control (TL-APC) system, wherein the plurality of APC operation modes indicate different operational settings for the FL-APC system and the at least one TL-APC system; and
implement a selected APC operation mode.

18. The program product of claim 17, wherein the computer readable program when executed on a computer causes the computer to: implement the selected APC operation mode using the FL-APC system to control the at least one TL-APC system according to the selected APC operation mode.

19. The program product of claim 17, wherein the computer readable program when executed on a computer causes the computer to: translate data communicated between the FL-APC system and the at least one TL-APC system.

20. The program product of claim 17, wherein each APC operation mode further indicates an operational setting for at least one of: an external pre-measurement metrology tool upstream from a tool including a TL-APC system, an external post-measurement metrology tool downstream from the tool including the TL-APC system, an integrated metrology tool of the tool including the TL-APC system, use of the integrated metrology tool as an external pre or post measurement upstream or downstream of the tool, an APC criteria, and a duration for at least one portion of the APC operation mode.

21. The program product of claim 20, wherein the APC criteria includes at least one of lot-to-lot evaluation and wafer-to-wafer evaluation.