Table 1. Labor Costs: Semiconductor Mfg (Tier 2b) 

Labor Rates (per hour) 

Lawyer 

Industrial 

Manager 

Industrial 

Engineer/Technician 

Administrative 

Support 

$101.00 $71.03 $55.20 $29.65 

Labor Cost per 

Year per 

Reporting 

Unit/Facility 

Activity 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

Planning $0 $0

QA/QC $0 $0

Recordkeeping 2.39 2.39 24.7 24.7 5.7 5.7 $1,702 $1,702

Samplinga 11.17 11.17 186.49 186.49 11 11 $11,413 $11,413

Reportingb 0.26 0.26 14.26 14.26 28.82 28.82 10.14 10.14 $2,931 $2,931

Total 0.26 0.26 27.82 27.82 240.01 240.01 26.84 26.84 $16,046 $16,046

Note: The data presented in this table are found in Section 4 of the Economic Impact Analysis for the F-Gas rule. This table was 

developed using the labor categories and hourly rates in Table 4-3 on page 4-10 of the EIA in conjunction with Table 4-4: 

Responsibilities for Regulation Compliance by Labor Category Per Facility Category on pages 4-11 – 4-13 of the EIA. 

All values are in 2006$. 

a

Includes labor hours for PFC emission estimates (fluorinated GHGs and N2O), and heat transfer fluid estimates. 

b

Includes labor hours for reporting PFC emissions and heat transfer fluid estimates. 
Table 2. Labor Costs: Semiconductor Mfg (Tier 2c) 

Labor Rates (per hour) 

Lawyer 

Industrial 

Manager 

Industrial 

Engineer/ 

Technician 

Administrative 

Support 

$101.00 $71.03 $55.20 $29.65 

Labor Cost per 

Year per 

Reporting 

Unit/Facility 

Activity 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

Planning $0 $0

QA/QC $0 $0

Recordkeeping 2.39 2.39 24.7 24.7 5.7 5.7 $1,702 $1,702

Samplinga 6.21 6.21 266.78 266.78 6.11 6.11 $15,347 $15,347

Reportingb 0.26 0.26 14.26 14.26 28.82 28.82 10.14 10.14 $2,931 $2,931

Total 0.26 0.26 22.86 22.86 320.30 320.30 21.95 21.95 $19,980 $19,980

Note: The data presented in this table are found in Section 4 of the Economic Impact Analysis for the F-Gas rule. This table was 

developed using the labor categories and hourly rates in Table 4-3 on page 4-10 of the EIA in conjunction with Table 4-4: 

Responsibilities for Regulation Compliance by Labor Category Per Facility Category on pages 4-11 – 4-13 of the EIA. 

All values are in 2006$. 

a

Includes labor hours for pfc emission estimates (fluorinated GHGs and N2O), and heat transfer fluid estimates. 

b

Includes labor hours for reporting PFC emissions and heat transfer fluid estimates. 
Table 3. Labor Costs: Semiconductor Mfg (Tier 2d) 

Labor Rates (per hour) 

Lawyer 

Industrial 

Manager 

Industrial 

Engineer/Technician Administrative 

Support 

$101.00 $71.03 $55.20 $29.65 

Labor Cost per 

Year per 

Reporting 

Unit/Facility 

Activity 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

First 

Year 

Subseq. 

Year 

Planning $0 $0

QA/QC $0 $0

Recordkeeping 2.39 2.39 24.7 24.7 5.7 5.7 $1,702 $1,702

Samplinga 18.18 18.18 246.14 246.14 10.32 10.32 $15,183 $15,183

Reportingb 0.26 0.26 14.30 14.30 60.80 60.80 10.30 10.30 $4,703 $4,703

Total 0.26 0.26 34.87 34.87 331.64 331.64 26.32 26.32 $21,588 $21,588

Note: The data presented in this table are found in Section 4 of the Economic Impact Analysis for the F-Gas rule. This table was 

developed using the labor categories and hourly rates in Table 4-3 on page 4-10 of the EIA in conjunction with Table 4-4: 

Responsibilities for Regulation Compliance by Labor Category Per Facility Category on pages 4-11 – 4-13 of the EIA. 

All values are in 2006$. 

a

Includes labor hours for pfc emission estimates (fluorinated GHGs and N2O), and heat transfer fluid estimates. 

b

Includes labor hours for reporting PFC emissions, heat transfer fluid estimates, and DRE certification. 
Table 4. Capital and O&M Costs: Semiconductor Mfg (Tier 2d) 

Cost Categories 

Total Reporting 

per Unit/Facility 

Cost (2006$) 

Activity 

Capital 

Cost 

(2006$) 

Equipment 

Lifetime 

Annualized 

Capital Cost 

(2006$/year)a

O&M Costs 

(2006$/year)b,c

First 

Year 

Subseq. 

Yearsd

Equipment (selection, purchase, 

installation)e

$125,628 $23,311 $66,240 $23,311 $89,551

Performance testingf $76,138 $10,840 $20,710 $10,840 $31,550

Recordkeeping $0 $0

Travel $0 $0

Sampling costs $0 $0

Total $201,766 $34,151 $86,950 $34,151 $121,100

Note: The data presented in this table are found in Section 4 of the Economic Impact Analysis for the F-Gas rule. This table was 

developed using the labor categories and hourly rates in Table 4-3 on page 4-10 of the EIA in conjunction with the capital and 

O&M costs text outlined on pages 4-14 and 4-15 of the EIA. 

All values are in 2006$. 

a

Based on a 7% interest rate. 

b

Software capital cost for the whole industry is based on the assumption that each company would pay the full software 

development cost (2,000 labor hours at an Industrial Engineer rate for fluorinated GHG tracking for one of its facilities and 

each subsequent facility would pay half. O&M cost represents 500 industrial engineer labor hours to revise and make 

adjustments in subsequent years and the assumption that each company would pay the full software O&M cost (500 hours) for 

one facility and each subsequent facility would pay half. 

c

1st year EF testing is based on 3 full-time technical staff at 2,000 hours/yr and on the assumption that no new equipment is 

needed for testing. O&M cost for EF testing is based on 20% of the initial costing, assuming revisions/adjustments to the EF 

need to be made in subsequent years. 

d

Facilities are allowed to use Best Available Monitoring Methods (BAMM) for emission factors during year 2. 

e

Capital cost includes cost for emission factor testing. Emission factor testing cost is assumed to be a company cost (each 

company will test once for all facilities it owns). 

f

Performance testing cost includes costs for developing emissions tracking software for fluorinated GHGs.