### Table 1. Labor Costs: Semiconductor Mfg (Tier 2b)
Labor Rates (per hour)

Lawyer Industrial Manager IndustrialEngineer/Technician Administrative Support $101.00 $71.03 $55.20 $29.65 Labor Cost per Year per Reporting Unit/Facility

Activity First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year Planning $0 $0 QA/QC $0 $0 Recordkeeping 2.39 2.39 24.7 24.7 5.7 5.7 $1,702 $1,702 Sampling a 11.17 11.17 186.49 186.49 11 11 $11,413 $11,413 Reporting b 0.26 0.26 14.26 14.26 28.82 28.82 10.14 10.14 $2,931 $2,931
Total 0.26 0.26 27.82 27.82 240.01 240.01 26.84 26.84 $16,046 $16,046
Note: The data presented in this table are found in Section 4 of the Economic Impact Analysis for the F-Gas rule. This table wa s developed using the labor categories and hourly rates in Table 4-3 on page 4-10 of the EIA in conjunction with Table 4-4: Responsibilities for Regulation Compliance by Labor Category Pe r Facility Category on pages 4-11 – 4-13 of the EIA. All values are in 2006$.

a Includes labor hours for PFC emission estimates (fluorinated GHGs and N 2 O), and heat transfer fluid estimates. b Includes labor hours for reporting PFC emissi ons and heat transfer fluid estimates.

### Table 2. Labor Costs: Semiconductor Mfg (Tier 2c)
Labor Rates (per hour)

Lawyer Industrial Manager Industrial Engineer/ Technician Administrative Support $101.00 $71.03 $55.20 $29.65 Labor Cost per Year per Reporting Unit/Facility

Activity First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year Planning $0 $0 QA/QC $0 $0 Recordkeeping 2.39 2.39 24.7 24.7 5.7 5.7 $1,702 $1,702 Sampling a 6.21 6.21 266.78 266.78 6.11 6.11 $15,347 $15,347 Reporting b 0.26 0.26 14.26 14.26 28.82 28.82 10.14 10.14 $2,931 $2,931
Total 0.26 0.26 22.86 22.86 320.30 320.30 21.95 21.95 $19,980 $19,980
Note: The data presented in this table are found in Section 4 of the Economic Impact Analysis for the F-Gas rule. This table wa s developed using the labor categories and hourly rates in Table 4-3 on page 4-10 of the EIA in conjunction with Table 4-4: Responsibilities for Regulation Compliance by Labor Category Pe r Facility Category on pages 4-11 – 4-13 of the EIA. All values are in 2006$.

a Includes labor hours for pfc emission estimates (f luorinated GHGs and N 2 O), and heat transfer fluid estimates. b Includes labor hours for reporting PFC emissi ons and heat transfer fluid estimates.

### Table 3. Labor Costs: Semiconductor Mfg (Tier 2d)

Labor Rates (per hour)

Lawyer Industrial Manager IndustrialEngineer/Technician Administrative Support $101.00 $71.03 $55.20 $29.65 Labor Cost per Year per Reporting Unit/Facility

Activity First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year First Year Subseq. Year Planning $0 $0 QA/QC $0 $0 Recordkeeping 2.39 2.39 24.7 24.7 5.7 5.7 $1,702 $1,702 Sampling a 18.18 18.18 246.14 246.14 10.32 10.32 $15,183 $15,183 Reporting b 0.26 0.26 14.30 14.30 60.80 60.80 10.30 10.30 $4,703 $4,703
Total 0.26 0.26 34.87 34.87 331.64 331.64 26.32 26.32 $21,588 $21,588
Note: The data presented in this table are found in Section 4 of the Economic Impact Analysis for the F-Gas rule. This table wa s developed using the labor categories and hourly rates in Table 4-3 on page 4-10 of the EIA in conjunction with Table 4-4: Responsibilities for Regulation Compliance by Labor Category Pe r Facility Category on pages 4-11 – 4-13 of the EIA. All values are in 2006$.

a Includes labor hours for pfc emission estimates (f luorinated GHGs and N 2 O), and heat transfer fluid estimates. b Includes labor hours for reporting PFC emissions, heat transfer fluid estimates, and DRE certification.

### Table 4. Capital and O&M Costs: Semiconductor Mfg (Tier 2d)

Cost Categories Total Reporting per Unit/Facility

Cost (2006$)

Activity Capital Cost (2006$) Equipment Lifetime Annualized Capital Cost (2006$/year) a O&M Costs (2006$/year) b,c First Year Subseq. Years d Equipment (selection, purchase, installation) e $125,628 $23,311 $66,240 $23,311 $89,551

Performance testing f $76,138 $10,840 $20,710 $10,840 $31,550 Recordkeeping $0 $0
Travel $0 $0 Sampling costs $0 $0
Total $201,766 $34,151 $86,950 $34,151 $121,100 Note: The data presented in this table are found in Section 4 of the Economic Impact Analysis for the F-Gas rule. This table wa s developed using the labor categories and hourly rates in Table 4- 3 on page 4-10 of the EIA in conjunction with the capital and O&M costs text outlined on pages 4-14 and 4-15 of the EIA. All values are in 2006$.

a Based on a 7% interest rate. b Software capital cost for the whole industry is based on the assumption that each company would pay the full software

development cost (2,000 labor hours at an Industrial Engineer rate for fluorinated GHG tracking for one of its facilities and each subsequent facility would pay half. O&M cost represents 500 industrial engineer labor hours to revise and make adjustments in subsequent years and the assumption that each company would pay the full software O&M cost (500 hours) for one facility and each subsequent facility would pay half.

c 1st year EF testing is based on 3 full-tim e technical staff at 2,000 hours/yr and on the assumption that no new equipment is

needed for testing. O&M cost for EF tes ting is based on 20% of the initial costing, assuming revisions/ad justments to the EF need to be made in subsequent years. d Facilities are allowed to use Best Available Monitoring Methods (BAMM) for emission factors during year 2.

e Capital cost includes cost for emission factor testing. Emission factor testing cost is assumed to be a company cost (each

company will test once for all facilities it owns).
f Performance testing cost in cludes costs for developi ng emissions tracking softwa re for fluorinated GHGs.