UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

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FORM 10-Q

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[X]       QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE
             SECURITIES EXCHANGE ACT OF 1934

For the quarterly period ended October 1, 2006

OR

[  ]  TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES
     EXCHANGE ACT OF 1934

For the transition period from ________to _________

Commission file number 000-24838

Mattson Technology, Inc.(Exact name of Registrant as Specified in its Charter)



|Delaware                                                       | 77-0208119                             
|-------------------------------------------------------------- | ---------------------------------------
|(State or Other Jurisdiction of Incorporation or Organization) | (I.R.S. Employer Identification Number)

47131 Bayside Parkway
Fremont, California      94538

(510) 657-5900

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Indicate by check mark whether the registrant (1) has filed all reports required
to be filed by Section 13 or 15 (d) of the Securities Exchange Act of 1934
during the preceding 12 months (or for such shorter period that the registrant
was required to file reports), and (2) has been subject to such filing
requirements for the past 90 days.  YES    x NO     ̈

Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, or a non-accelerated filer.
See definition of "accelerated filer and large accelerated filer" in Rule 12b-2 of the Exchange Act. (Check one):

Large accelerated filer      ̈ Accelerated filer    x Non-accelerated filer     ̈

Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Exchange Act).
YES     ̈ NO    x Number of shares of common stock outstanding as of October 31, 2006: 52,548,674.
Note:PDF provided as a courtesy
MATTSON TECHNOLOGY, INC.
                                       FORM 10-Q
                                  FOR THE QUARTER ENDED OCTOBER 1, 2006
                                       TABLE OF CONTENTS

PART I.   FINANCIAL INFORMATION

Page No.Item 1.   Financial Statements (Unaudited):Condensed Consolidated Balance Sheets — at October 1, 2006 and December 31, 2005

3Condensed Consolidated Statements of Operations — for the Three and Nine Months Ended October 1, 2006 and September 25, 2005

4Condensed Consolidated Statements of Cash Flows — for the Nine Months Ended October 1, 2006 and September 25, 2005

5Notes to Condensed Consolidated Financial Statements

6Item 2.     Management's Discussion and Analysis of Financial
                      Condition and Results of Operations

19Item 3.    Quantitative and Qualitative Disclosures About Market Risk

28Item 4.    Controls and Procedures

29PART II.  OTHER INFORMATIONItem 1.    Legal Proceedings

30Item 1A.    Risk Factors

30Item 6.     Exhibits

30Signatures

31

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Part I -- FINANCIAL INFORMATION

Item 1.  Financial Statements (Unaudited)



|MATTSON TECHNOLOGY, INC.                                                                                                                                                                                        
|----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
|CONDENSED CONSOLIDATED BALANCE SHEETS (unaudited)                                                                                                                                                               
|                                                                                                                                                                                                                
|                                                                                                                                                                                                                
|                                                                                                                                                                                                                
|ASSETS                                                                                                                                                                                                          
|Current assets:                                                                                                                                                                                                 
|Cash and cash equivalents                                                                                                                                                                                       
|Short-term investments                                                                                                                                                                                          
|Accounts receivable, net                                                                                                                                                                                        
|Advance billings                                                                                                                                                                                                
|Inventories                                                                                                                                                                                                     
|Inventories - delivered systems                                                                                                                                                                                 
|Prepaid expenses and other assets                                                                                                                                                                               
|Total current assets                                                                                                                                                                                            
|                                                                                                                                                                                                                
|Property and equipment, net                                                                                                                                                                                     
|Goodwill                                                                                                                                                                                                        
|Intangibles, net                                                                                                                                                                                                
|Other assets                                                                                                                                                                                                    
|Total assets                                                                                                                                                                                                    
|                                                                                                                                                                                                                
|LIABILITIES AND STOCKHOLDERS' EQUITY                                                                                                                                                                            
|Current liabilities:                                                                                                                                                                                            
|Accounts payable                                                                                                                                                                                                
|Accrued liabilities                                                                                                                                                                                             
|Deferred revenue                                                                                                                                                                                                
|Total current liabilities                                                                                                                                                                                       
|                                                                                                                                                                                                                
|Other liabilities                                                                                                                                                                                               
|Total liabilities                                                                                                                                                                                               
|                                                                                                                                                                                                                
|Commitments and contingencies (Note 5)                                                                                                                                                                          
|                                                                                                                                                                                                                
|Stockholders' equity:                                                                                                                                                                                           
|Preferred stock, 2,000 shares authorized; none issued and outstanding                                                                                                                                           
|Common stock, par value $0.001, 120,000 authorized shares; 
            52,890 shares issued and 52,515 shares outstanding in 2006; 
                 52,470 shares issued and 52,095 shares outstanding in 2005
|Additional paid-in capital                                                                                                                                                                                      
|Accumulated other comprehensive income                                                                                                                                                                          
|Treasury stock, 375 shares in 2006 and 2005, at cost                                                                                                                                                            
|Accumulated deficit                                                                                                                                                                                             
|Total stockholders' equity                                                                                                                                                                                      
|Total liabilities and stockholders' equity                                                                                                                                                                      

The accompanying notes are an integral part of these condensed consolidated financial statements.

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|MATTSON TECHNOLOGY, INC.                                   
|-----------------------------------------------------------
|CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (unaudited)
|                                                           
|                                                           
|                                                           
|                                                           
|                                                           
|                                                           
|Net sales                                                  
|Cost of sales                                              
|Gross profit                                               
|                                                           
|Operating expenses:                                        
|Research, development and engineering                      
|Selling, general and administrative                        
|Amortization of intangibles                                
|Gain on disposition of Wet Business                        
|Total operating expenses                                   
|                                                           
|Income from operations                                     
|                                                           
|Interest and other income, net                             
|                                                           
|Income before income taxes                                 
|                                                           
|Provision for (benefit from) income taxes                  
|                                                           
|Net income                                                 
|                                                           
|Net income per share:                                      
|Basic                                                      
|Diluted                                                    
|                                                           
|Shares used in computing net income per share:             
|Basic                                                      
|Diluted                                                    

The accompanying notes are an integral part of these condensed consolidated financial statements.

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|MATTSON TECHNOLOGY, INC.                                    
|------------------------------------------------------------
|CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS (unaudited) 
|                                                            
|                                                            
|                                                            
|                                                            
|                                                            
|Cash flows from operating activities:                       
|Net income                                                  
|Adjustments to reconcile net income to net cash provided by 
|operating activities:                                       
|Allowance for doubtful accounts                             
|Amortization of intangibles                                 
|Deferred taxes                                              
|Depreciation                                                
|Gain on disposition of Wet Business                         
|Inventory valuation charge                                  
|Stock-based compensation                                    
|Other non-cash items                                        
|Changes in assets and liabilities:                          
|Accounts receivable                                         
|Advance billings                                            
|Inventories                                                 
|Inventories - delivered systems                             
|Prepaid expenses and other current assets                   
|Other assets                                                
|Accounts payable                                            
|Accrued liabilities                                         
|Deferred revenue                                            
|Other liabilities                                           
|Net cash provided by operating activities                   
|                                                            
|Cash flows from investing activities:                       
|Purchases of available-for-sale investments                 
|Sales and maturities of  available-for-sale investments     
|Purchases of property and equipment                         
|Sales of property and equipment                             
|Proceeds from the disposition of Wet Business               
|Net cash used in investing activities                       
|                                                            
|Cash flows from financing activities:                       
|Proceeds from stock plans                                   
|Restricted cash                                             
|Net cash provided by financing activities                   
|                                                            
|Effect of exchange rate changes on cash and cash equivalents
|Net increase (decrease) in cash and cash equivalents        
|                                                            
|Cash and cash equivalents, beginning of period              
|Cash and cash equivalents, end of period                    

The accompanying notes are an integral part of these condensed consolidated financial statements.

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MATTSON TECHNOLOGY, INC.
                  NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS (unaudited)October 1, 2006

Note 1.	Basis of Presentation
Basis of Presentation

The accompanying unaudited condensed consolidated financial statements have been prepared in accordance with United
States (U.S.) generally accepted accounting principles for interim financial information and with the instructions to Article 10 of
Regulation S-X. Accordingly, they do not include all of the information and footnotes required by U.S. generally accepted
accounting principles for complete financial statements. In the opinion of management, all adjustments (consisting only of normal
recurring adjustments) considered necessary for a fair statement of financial position and operations have been included. The
accompanying unaudited condensed consolidated financial statements should be read in conjunction with the audited consolidated
financial statements of Mattson Technology, Inc. (the Company or Mattson) for the year ended December 31, 2005, which are included
in the Company's Annual Report on Form 10-K.

The Company's current year will end December 31, 2006 and include 52 weeks. The Company closes its fiscal quarters
on the Sunday closest to March 31, June 30, and September 30, and closes its fiscal year on December 31.  The latest fiscal quarter
ended October 1, 2006.  The results of operations for the three and nine months ended October 1, 2006 are not necessarily indicative
of results that may be expected for future quarters or for the entire year ending December 31, 2006.

The consolidated financial statements include the accounts of the Company and its subsidiaries. All significant intercompany
accounts and transactions have been eliminated in consolidation.

Reclassifications

For presentation purposes, certain prior period amounts have been reclassified to conform to the reporting in the
current period financial statements. These reclassifications do not affect the Company's net income, cash flows or stockholders' equity.
Depreciation expense associated with customer evaluation tools was previously classified as a component of cost of goods sold.
Effective July 3, 2006, the Company classifies this depreciation expense as a selling expense which is included in selling, general and
administrative expenses in the accompanying statement of operations.

Recent Accounting Pronouncements

In September 2006, the Securities and Exchange Commission (SEC) issued Staff Accounting
Bulletin (SAB) No. 108, Considering the Effects of Prior Year Misstatements when Quantifying Current Year
Misstatements. SAB No. 108 requires analysis of misstatements using multiple approaches in assessing materiality and
provides for a one-time cumulative effect transition adjustment. SAB No. 108 is effective for the Company's fiscal year 2006
annual financial statements. The Company is currently assessing the potential impact that the adoption of SAB No. 108 will have
on its financial statements.

In September 2006, the Financial Accounting Standards Board (FASB) issued Statement of Financial
Accounting Standards (SFAS) No. 157, Fair Value Measurements,which defines fair value, establishes a framework for
measuring fair value in generally accepted accounting principles, and expands disclosures about fair value measurements. SFAS
No. 157 does not require any new fair value measurements, but provides guidance on how to measure fair value by providing a
fair value hierarchy used to classify the source of the information. This statement is effective for the Company beginning January 1,
2008. The Company is currently assessing the potential impact that the adoption of SFAS No. 157 will have on its financial
statements.

In June 2006, the FASB ratified the Emerging Issues Task Force (EITF) conclusion on Issue No. 06-02, Accounting for
Sabbatical Leave and Other Similar Benefits Pursuant to Financial Accounting Standards Board (FASB) Statement No. 43,
"Accounting for Compensated Absences" (EITF No. 06-02). The EITF concluded that companies should accrue for
employee sabbatical leave over the service period in which employees earn the right to sabbatical leave. The Company does not
expect that the adoption of EITF No. 06-02 will have a material effect on its financial position and results of operations. EITF No. 06-02
is effective for years beginning after June 28, 2006, and will be adopted by the Company on January 1, 2007. The Company will adopt
EITF No. 06-02 as a change in accounting principle, and will show the cumulative effect of adoption in the first quarter of 2007, if any,
as permitted by the transition provisions of EITF No. 06-02.

In June 2006, the FASB issued FASB Interpretation (FIN) No. 48, Accounting for Uncertainty in Income Taxes: An
Interpretation of FASB Statement No. 109. FIN No. 48 clarifies the accounting for uncertainty in income taxes recognized in
an enterprise's financial statements in accordance with SFAS No. 109, Accounting for Income Taxes. This Interpretation
defines the minimum recognition threshold a tax position is required to meet before being recognized in the financial
statements. FIN No. 48 is effective for fiscal years beginning after December 15, 2006. The Company is currently
evaluating the effect that the adoption of FIN No. 48 will have on its financial position and results of operations.

In December 2004, the FASB issued SFAS No. 123 (revised 2004), Share-Based Payment. SFAS No. 123(R) requires the
Company to measure all employee stock-based compensation awards using a fair value method and record such expense in its
consolidated financial statements. In March 2005, the SEC issued SAB No. 107, which provides the SEC Staff's views regarding
interactions between SFAS No. 123(R) and certain SEC rules and regulations and provides interpretations of the valuation of share-based
payments for public companies. The adoption of SFAS No. 123(R) requires additional accounting related to the income tax
effects and additional disclosure regarding the cash flow effects resulting from share-based payment arrangements. The adoption of
SFAS No. 123(R) in the three and nine months ended October 1, 2006, had a material impact on the Company's consolidated results of
operations, financial position and statement of cash flows. For more information on stock-based compensation costs during the three
and nine months ended October 1, 2006, refer to Note 7 - Stock-Based Compensation.


Note 2.	Balance Sheet Details

October 1,

December 31,2006

2005(thousands)Cash and cash equivalents:Cash in bank
$          31,789

$          35,969Money market funds
18,160

35,675Commercial paper and notes
34,136

44,949$          84,085

$        116,593Short-term investments:United States agency securities
$          41,067

$          11,325United States corporate bonds
7,397

1,364$          48,464

$          12,689Inventories:Purchased parts and raw materials
$          25,583

$          22,529Work-in-process
12,640

5,339Finished goods
9,061

5,008$          47,284

$          32,876Property and equipment, net:Machinery and equipment
$          46,141

$          38,706Furniture and fixtures
11,351

12,777Leasehold improvements
12,627

12,15370,119

63,636Less: accumulated depreciation
(43,012)

(41,121)$          27,107

$          22,515

October 1,

December 31,2006

2005(thousands)Accrued liabilities:Warranty
$          15,814

$          13,458Accrued compensation and benefits
9,117

5,530Income taxes payable
4,660

3,913Other
14,151

12,577$          43,742

$          35,478As of October 1, 2006 and December 31, 2005, the reserve for excess and obsolete inventories was $15.4 million and
$19.3 million, respectively.  All short-term investments are marked to market with unrealized gains (losses) recorded under other
comprehensive income (see Note 12 to condensed consolidated financial statements).

The maturities of short-term investments as of October 1, 2006 and December 31, 2005 are shown below:

October 1,

December 31,2006

2005(thousands)Due within one year
$          35,586

$          12,689Due in one to two years
12,878

-$          48,464

$          12,689Note 3. 	Guarantees

The warranty offered by the Company on its system sales generally ranges from 12 months to 36 months
depending on the product. A provision for the estimated cost of warranty, based on historical costs, is recorded as cost of sales when
the revenue is recognized. The Company's warranty obligations require it to repair or replace defective products or parts, generally at a
customer's site, during the warranty period at no cost to the customer. The actual system performance and/or field expense profiles
may differ from historical experience, and in those cases, the Company adjusts its warranty accruals accordingly.

The following table summarizes changes in the product warranty accrual for the three and nine months ended October 1, 2006
and September 25, 2005:

Three Months Ended

Nine Months EndedOctober 1,

September 25,

October 1,

September 25,2006

2005

2006

2005(thousands)Balance at the beginning of the period
$        13,878

$           15,069

$        13,458

$           16,044Accrual for warranties issued during the period
6,422

3,470

15,845

9,305Settlements made during the period
(4,486)

(4,474)

(13,489)

(11,284)Balance at the end of the period
$        15,814

$           14,065

$        15,814

$           14,065During the ordinary course of business, the Company's bank provides standby letters of credit or other guarantee instruments
on behalf of the Company to certain parties as required. The maximum potential amount that the Company could be required to pay is
$1.6 million, representing standby letters of credit outstanding as of October 1, 2006. The Company has not recorded any liability in
connection with these guarantee arrangements beyond that required to appropriately account for the underlying transaction being
guaranteed. The Company does not believe, based on historical experience and information currently available, that it is probable that
any amounts will be required to be paid under these guarantee arrangements.

The Company is a party to a variety of agreements, pursuant to which it may be obligated to indemnify the other party with
respect to certain matters. Typically, these obligations arise in the context of contracts under which the Company may agree to hold the
other party harmless against losses arising from a breach of representations or with respect to certain intellectual property or tax-related
matters. The Company's obligations under these agreements may be limited in terms of time and/or amount, and in some instances the
Company may have defenses to asserted claims and/or recourse against third parties for payments made by the Company. It is not
possible to predict the maximum potential amount of future payments under these or similar agreements due to the conditional nature
of the Company's obligations and the unique facts and circumstances involved in each particular agreement. Historically, payments
made by the Company under these agreements have not had a material effect on the Company's financial position or results of
operations. The Company believes if it were to incur a loss in any of these matters, such loss would not have a material effect on the
Company's financial position or results of operations.

Note 4.	Borrowing Facilities

The Company has a $10 million revolving line of credit with a bank, which may be increased to $20 million at the option
of the Company. The revolving line of credit was renewed in April 2006 and expires in April 2007, and has an annual commitment
fee of $30,000.  All borrowings under this credit line bear interest at a per annum rate equal to the bank's prime rate plus 100 basis
points. The line of credit is collateralized by a blanket lien on all of the Company's domestic assets including intellectual property. The
line of credit requires the Company to satisfy certain quarterly financial covenants, including maintaining a minimum consolidated cash
balance, maintaining a minimum domestic cash balance of unrestricted cash and cash equivalents, maintaining a minimum balance of
investment accounts, and not exceeding a maximum net loss limit.  At October 1, 2006, there was no borrowing under this credit line. In
April and May 2006, the Company was out of compliance with one covenant under the line of credit, which requires the Company to
provide audited financial statements within 90 days of its fiscal year-end. The Company obtained a waiver to this covenant through May
3, 2006, the date it filed its Annual Report on Form 10-K with the SEC, including its audited financial statements for the year ended
December 31, 2005.

Note 5.	Commitments and Contingencies

In 2005, the Company entered into a new lease agreement for its existing corporate headquarters building in Fremont,
California. The lease is for a period of 10 years, commencing upon expiration of the current sublease on May 31, 2007, and has an
initial annual base rent cost of approximately $1.4 million, with annual base rent increases of approximately 3.5%. The Company has
one five-year option to extend the lease at market lease rates in effect on the expiration date. Additionally, insurance, real property
taxes and operating expenses are to be paid by the Company. The Company is responsible for an additional minimum lease payment
at the end of the lease term of approximately $1.5 million, subject to adjustment, which is being accounted for in accordance with SFAS
No. 13 Accounting for Leases, and will be accrued on a straight-line basis over the lease term. The Company has
provided the Landlord a letter of credit for $1.5 million to secure this obligation. The letter of credit amount may be increased to reflect
any adjustments made to the additional minimum lease payment provision included in the lease.

The Company leases two buildings previously used to house its manufacturing and administrative functions related to wet
surface preparation products in Exton, Pennsylvania. The lease for both buildings will expire March 31, 2019 with a current
combined rental cost of approximately $1.5 million annually. The Company expects to make payments related to the above noted
leases over the next thirteen years, less any sublet amounts. The lease agreement for both buildings allows for subleasing the
premises without the approval of the landlord. In June 2002, the administrative building was sublet for a period of approximately
five years, until December 2007, with an option for the subtenant to extend for an additional five years. Total lease payments of
approximately $7.2 million are expected to cover all related costs on the administrative building during the sublease period.  The
sublessee for the manufacturing building at the Exton, Pennsylvania location vacated the premises in September 2006 and the
Company is currently marketing the property to prospective tenants.  In determining the facilities lease loss, various assumptions were
made, including the time period over which the buildings will be vacant; expected sublease terms; and expected sublease rates. As of
October 1, 2006 and December 31, 2005, the Company had an accrual balance of $1.2 million and $1.3 million, respectively, related to
these leases. Adjustments to the accrual for these leases will be made in future periods, if necessary, as soon as evidence of any
adjustment can be reasonably estimated as future events and circumstances become known.

In connection with the acquisition of Vortek Industries Ltd., the Company became party to an agreement between Vortek
and the Canadian Minister of Industry (the Minister) relating to an investment in Vortek by Technology Partnerships Canada. Under that
agreement, as amended, the Company or Vortek agreed to various covenants, including (a) payment by the Company of a
royalty to the Minister of 1.4% of revenues from flash RTP products, up to a total of CAD14,269,290 (approximately $12.8 million
at October 1, 2006), and (b) Vortek maintaining a specified average workforce of employees in Canada through
October 27, 2009. If the Company, or Vortek, does not satisfy its obligations, the Minister may demand payment of liquidated
damages in the amount of CAD14,269,290 less any royalties paid by Vortek or the Company to the Minister.

In the ordinary course of business, the Company is subject to claims and litigation, including claims that it infringes third party
patents, trademarks and other intellectual property rights. Although the Company believes that it is unlikely that any current claims or
actions will have a material adverse impact on its operating results or its financial position, given the uncertainty of litigation, the
Company cannot be certain of this. Moreover, the defense of claims or actions against the Company, even if not meritorious, could
result in the expenditure of significant financial and managerial resources.

The Company is currently party to legal proceedings and claims, either asserted or unasserted, which arise in the ordinary
course of business. While the outcome of these matters is not presently determinable and cannot be predicted with certainty,
management does not believe that the outcome of any of these matters or any of the above mentioned legal claims will have a material
adverse effect on the Company's financial position, results of operations or cash flows.


Note 6.	Employee Compensation Benefit Plans

2005 Equity Incentive Plan

On May 25, 2005, the Company amended and restated the Company's 1989 Stock Option Plan (the 1989 Plan) as the 2005
Equity Incentive Plan (the 2005 Plan), under which a total of 11,975,000 shares of common stock have been reserved for issuance.
The Company's 2005 Plan is a broad-based, long-term retention program that is intended to attract and retain qualified management
and technical employees, and align stockholder and employee interests.

As of October 1, 2006, out of the total shares authorized for issuance under the 1989 and 2005 Plans, approximately
4,127,000 shares had been issued, 6,020,000 shares were subject to outstanding options, 150,000 shares were subject to outstanding
restricted stock units, and 1,566,000 shares remained available for future grant.

The 2005 Plan amends the 1989 Plan to expand the types of stock-based incentives authorized under the 1989 Plan and to
restate the 1989 Plan as the 2005 Plan.  In addition to stock options, the 2005 Plan authorizes the grant of stock purchase rights, stock
bonuses and restricted stock units. Options and stock purchase rights granted under the 2005 Plan are for periods not to exceed seven
years. Generally, incentive stock option and non-statutory stock option grants under the 2005 Plan must be at prices at least 100% of
the fair market value of the stock on the date of grant.
Employee Stock Purchase Plan

In August 1994, the Company adopted an employee stock purchase plan (the Purchase Plan) under which
6,175,000 shares of common stock had been reserved for issuance. At October 1, 2006, approximately 3,570,000 shares were still
reserved and available for future issuance under the Purchase Plan.

The Purchase Plan is administered over varying offering periods up to 27 months. During the three and nine months ended
September 25, 2005, the Company had a six-month offering period from August 1, 2004 to January 31, 2005, and a five-month offering
period from June 1, 2005 to October 31, 2005. During the three and nine months ended October 1, 2006, the Company began a seven-
month offering period on April 12, 2006 which will end on November 10, 2006.

Eligible employees may designate not more than 15% of their gross cash compensation to be deducted each pay period for
the purchase of common stock under the Purchase Plan and participants may not purchase more than $25,000 worth of common stock
in any calendar year or 10,000 shares in any offering period. On the last business day of each purchase period, shares of common
stock are purchased with the employees' payroll deductions accumulated during the offering period. For the offering periods in 2005,
the offering was at a price per share equal to 85% of the market price of the common stock on the date immediately preceding the
offering date or the date immediately preceding the purchase date, whichever was lower. For the offering period in 2006, the offering is
at a price per share equal to 90% of the market price of the common stock on the date immediately preceding the purchase date.

Deferred Compensation Plan

Effective January 1, 2006, the Company adopted a Deferred Compensation Plan. Under the Deferred Compensation Plan, the
Company provides eligible employees and non-employee members of its Board of Directors who participate in the plan (Participants)
the opportunity to defer a specified percentage of their base salary or retainer fees for participation on the Company's Board and Board
Committees. In addition, the Company's Board of Directors may make discretionary contributions to the accounts of one or more
Participants.

Under the Plan, the Company is obligated to deliver on a future date the deferred compensation credited to a Participant's account,
adjusted for any positive or negative investment results from investment alternatives selected by the Participant under the Plan (the
Obligations). The Obligations are unsecured general obligations of the Company and rank in parity with other unsecured and
unsubordinated indebtedness of the Company. The Obligations are not transferable, except upon death of a Participant. There is no
trading market for the Obligations.

As of October 1, 2006, the Company had approximately $293,000 in net assets under the Plan, which are invested
primarily in equity investment funds. The Company has recorded these assets as other assets and has recorded the corresponding
liability to Plan participants as other long-term liabilities in the accompanying balance sheets. Unrealized gains and losses on Plan
investments are recorded in accumulated other comprehensive income in the accompanying balance sheets. Unrealized gains and
losses for the three and nine months ended October 1, 2006 were not material.


Note 7.	Stock-Based Compensation

Effective January 1, 2006, Mattson adopted the provisions of SFAS No. 123(R), Share-Based Payment. SFAS No. 123(R)
establishes accounting for stock-based awards exchanged for employee services. Accordingly, stock-based compensation cost is
measured at grant date, based on the fair value of the award, and is recognized as expense over the requisite service period for the
employee. The Company previously applied Accounting Principles Board (APB) Opinion No. 25, Accounting for Stock Issued to
Employees, and related interpretations, and provided the required pro forma disclosures of SFAS No. 123, Accounting for
Stock-Based Compensation.

Prior to the adoption of SFAS No. 123(R)

Prior to the adoption of SFAS No. 123(R), the Company provided the disclosures required under SFAS No. 123, Accounting for
Stock-Based Compensation, as amended by SFAS No. 148, Accounting for Stock-Based Compensation - Transition and
Disclosures. The pro-forma information for the three and nine months ended September 25, 2005 was as follows:

Three Months Ended

Nine Months EndedSeptember 25, 2005

September 25, 2005(in thousands, except per share amounts)Net income as reported:
$                      1,129

$                      6,538Deduct:  Total employee stock-based compensationexpense determined under fair value method, net of tax
(10,327)

(12,668)Pro forma net loss
$                    (9,198)

$                    (6,130)Basic net income (loss) per share:As reported
$                        0.02

$                        0.13Pro forma
$                      (0.18)

$                      (0.12)Diluted net income (loss) per share:As reported
$                        0.02

$                        0.12Pro forma
$                      (0.18)

$                      (0.12)Impact of the adoption of SFAS No. 123(R)

The Company elected to adopt SFAS No. 123(R) using the modified prospective application method as described therein.
Accordingly, during the three and nine months ended October 1, 2006, the Company recorded stock-based compensation costs totaling
the amount that would have been recognized had the fair value method been applied since the effective date of SFAS No. 123,
adjusted for estimated forfeitures. Previously reported amounts have not been restated. The effect of recording stock-based
compensation for the three and nine months ended October 1, 2006 was as follows:

Three Months Ended

Nine Months EndedOctober 1, 2006

October 1, 2006(in thousands, except per share amounts)Stock-based compensation by type of award:Stock options
$                         590

$                      1,299Restricted stock units(1)
141

243Employee stock purchase plan
27

44Total stock-based compensation
758

1,586Tax effect on stock-based compensation
-

-Effect on net income
$                         758

$                      1,586Stock-based compensation by category of expense:Cost of sales
$                           18

$                           38Research, development and engineering
77

192Selling, general and administrative
663

1,356Effect on net income
$                         758

$                      1,586Effect on earnings per share:Basic
$                        0.01

$                        0.03Diluted
$                        0.01

$                        0.03(1) Stock-based compensation expense of $141,000 and $243,000 for the three and nine months ended
October 1, 2006, related to restricted stock units, would also have been recorded under the provisions of APB No. 25.As of December 31, 2005, the Company had an unrecorded deferred stock-based compensation balance
related to stock options of $2.0 million after estimated forfeitures. In the Company's pro forma disclosures prior to the adoption of SFAS
No. 123(R), the Company accounted for forfeitures upon occurrence. SFAS No. 123(R) requires forfeitures to be estimated at the time
of grant and revised if necessary in subsequent periods if actual forfeitures differ from those estimates. During the three and nine
months ended October 1, 2006, the Company granted stock options and restricted stock units to acquire approximately 213,000 and
1,013,000 shares of common stock, respectively, with an estimated total grant-date fair value of $1.2 million and $8.1 million,
respectively. As of October 1, 2006, the unrecorded deferred stock-based compensation balance related to stock options and restricted
stock units was $7.2 million after estimated forfeitures which will be recognized over an estimated weighted average amortization period
of 1.6 years.

Valuation Assumptions

In connection with the adoption of SFAS No. 123(R), the Company reassessed its valuation technique and related
assumptions. The Company estimates the fair value of stock options using the Black-Scholes valuation model, consistent with the
provisions of SFAS No. 123(R), SAB No. 107, Share-Based Payment, and the Company's prior period pro forma disclosures of
net earnings, including stock-based compensation (determined under a fair value method as prescribed by SFAS No. 123). The fair
value of each option grant is estimated on the date of grant using the Black-Scholes option valuation model and the straight-line
attribution approach with the following weighted-average assumptions:

Three Months Ended

Nine Months EndedOctober 1,

September 25,

October 1,

September 25,2006

2005

2006

2005Options:Expected dividend yield
-

-

-

-Expected stock price volatility
88%

87%

88%

90%Risk-free interest rate
4.5%

4.1%

4.4%

4.0%Expected life of options
5 years

4 years

5 years

4 yearsESPP:Expected dividend yield
n/a (2)

(1)

n/a (2)

-Expected stock price volatility
n/a (2)

(1)

n/a (2)

52%Risk-free interest rate
n/a (2)

(1)

n/a (2)

2.8%Expected life of options
n/a (2)

(1)

n/a (2)

0.5 year(1)	The Company did not complete an offering under its ESPP program during the three months ended September 25, 2005.

(2)	In 2006, the Company's offering does not include a look-back option feature. As there is no option feature in 2006,
compensation cost for 2006 is determined using the intrinsic value of the 10% discount, and the use of an option-pricing model is not
applicable.SFAS No. 123(R) requires the use of option pricing models that were not developed for use in valuing employee stock options. The
Black-Scholes option-pricing model was developed for use in estimating the fair value of short-lived exchange traded options that have
no vesting restrictions and are fully transferable. In addition, option-pricing models require the input of highly subjective assumptions,
including the option's expected life and the price volatility of the underlying stock. The expected life of each option was determined by
analyzing historical exercise and post-vest forfeiture patterns. The risk-free interest rate was determined using the rates for United
States Treasury notes for similar terms. The expected stock price volatility assumption was determined using the historical volatility of
the Company's common stock.


The following table summarizes the Company's equity compensation plans as of October 1, 2006:

Number of securities to be issued upon exercise of outstanding options (1)

Weighted-average exercise price of outstanding options

Number of securities remaining available for future issuance under equity
 compensation plans (2) (excluding securities reflected in column (a))(a)


(b)


(c)Equity compensation plansapproved by security holders


6,037,000


$  9.25


5,136,000Equity compensation plans notapproved by security holders


-


-


-Total


6,037,000


$  9.25


5,136,000(1) Amounts shown are for options granted only. There were also restricted stock units for 150,000 shares
outstanding under the 2005 Plan as of October 1, 2006. Amount includes options to purchase 17,000 shares of common stock
outstanding under stock option plans the Company assumed upon acquisition of CFM Technology in 2001.

(2) 2005 Plan awards of restricted stock are counted against the total number of shares issuable under the plan at 1.75 shares for
every one share subject thereto. Including the 150,000 restricted stock units issued in the first nine months of 2006 (applying the 1.75
ratio as required by the 2005 Plan),  the total securities remaining available at October 1, 2006 include the 3,570,000 shares reserved
for issuance under the employee stock purchase plan, and the 1,566,000 options to purchase shares under the 2005 Equity Incentive
Plan.The options outstanding and exercisable at October 1, 2006 were in the following exercise price ranges:

Options Outstanding

Options ExercisableWeighted-







Weighted-Average

Weighted-





Average

Weighted-Remaining

Average

Aggregate



Remaining

Average

AggregateRange of



Contractual

Exercise

Intrinsic



Contractual

Exercise

IntrinsicExercise Prices

Number

Life

Price

Value

Number

Life

Price

Value(thousands)

(years)



(thousands)

(thousands)

(years)



(thousands)$   1.55
-
$   3.20

814

6.4

$     2.48

$    4,733

703

6.4

$     2.48

$    4,0893.30
-
7.43

812

4.9

6.62

1,367

677

4.3

6.56

1,1757.48
-
8.30

864

5.8

7.76

465

559

5.4

7.70

3368.33
-
9.77

1,070

7.0

9.13

-

944

7.1

9.19

-9.94
-
10.44

624

4.8

10.39

-

622

4.8

10.39

-10.75
-
12.00

1,251

7.1

11.49

-

745

7.5

11.21

-12.08
-
69.20

602

5.1

18.42

-

580

5.1

18.65

-$   1.55
-
$ 69.20

6,037

6.1

$     9.25

$    6,565

4,830

5.9

$     9.28

$    5,600The aggregate intrinsic value in the table above represents the total pretax intrinsic value, based on the Company's closing
stock price of $8.30 as of September 29, 2006, which would have been received by the option holders had all option holders exercised
their options as of that date. The total number of shares of common stock subject to in-the-money options exercisable as of October 1,
2006 was 1.9 million.

The weighted average grant date fair value of options granted during the nine months ended October 1, 2006 and September 25,
2005 was $7.44 and $5.78 per share, respectively. The weighted average fair value of ESPP shares granted during the nine months
ended September 25, 2005 was $2.48 per share.

The total intrinsic value of options exercised during the nine months ended October 1, 2006 and September 25, 2005 was $2.1
million and $1.0 million, respectively. The total cash received from employees as a result of employee stock option exercises during the
nine months ended October 1, 2006 and September 25, 2005 was approximately $2.9 million and $1.2 million, respectively. The
Company settles employee stock option exercises with newly issued common shares.

The following table summarizes the combined activity under all of the Company's equity incentive plans for the indicated
periods, including 17,000 shares outstanding under the Company's CFM plans as of October 1, 2006:

Weighted-Awards



AverageAvailable

Options

ExerciseFor Grant

Outstanding

Price(thousands)

(thousands)Balances at December 31, 2005
2,469

5,822

$            8.93Options granted
(862)

862

10.51Options exercised
-

(421)

6.69Options cancelled/expired/forfeited
221

(226)

10.78Restricted stock units granted
(264)

-

-Restricted stock units cancelled
2

-

-Balances at October 1, 2006
1,566

6,037

$            9.25Restricted Stock Units

As of December 31, 2005, the Company had no deferred stock-based compensation balance related to restricted stock units.
During the three months ended October 1, 2006, no shares of restricted stock units were granted. During the nine months ended
October 1, 2006, the Company's Board of Directors approved the grant of 151,000 shares of restricted stock units, of which 150,000
shares were outstanding at October 1, 2006. These restricted stock units generally vest 1⁄4 of the units granted on the first anniversary
of the date of grant, and 1/36 of the units per month thereafter. The value of the restricted stock units was based on the closing market
price of the Company's common stock on the date of award. The total grant date fair value of the restricted stock units granted during
the nine months ended October 1, 2006 was $1.5 million, after estimated forfeitures. Stock-based compensation cost for restricted
stock units for the three and nine months ended October 1, 2006 was $141,000 and $243,000, respectively.

As of October 1, 2006, there was $1.3 million of total deferred stock-based compensation after estimated forfeitures related to
nonvested restricted stock units granted under the 2005 Plan. That cost is expected to be recognized over an estimated weighted
average amortization period of 1.7 years.


Note 8.	Reportable Segments

SFAS No. 131, Disclosures about Segments of an Enterprise and Related Information, establishes standards for
reporting information about operating segments, geographic areas and major customers in financial statements. Operating segments
are defined as components of an enterprise about which separate financial information is available that is evaluated regularly by the
chief operating decision maker, or chief decision making group, in deciding how to allocate resources and in assessing performance.
The Chief Executive Officer of the Company is the Company's chief operating decision maker. As the Company's business is
completely focused on one industry segment, the design, manufacturing and marketing of advanced fabrication equipment for the
semiconductor manufacturing industry, management believes that the Company has one reportable segment. The Company's
revenues and profits are generated through the sales of products and services for this one segment.

The following shows net sales by geographic areas based on the installation locations of the systems and the location of services
rendered:

Three Months Ended

Nine Months EndedOctober 1, 2006

September 25, 2005

October 1, 2006

September 25, 2005(thousands)

%

(thousands)

%

(thousands)

%

(thousands)

%United States

$         5,761

8

$         6,336

14

$       21,155

11

$       21,709

14Japan

23,084

30

13,640

30

39,312

20

32,873

21Korea

14,090

18

977

2

48,508

24

17,465

11Taiwan

13,544

18

17,790

39

49,134

25

58,412

36Other Asia

11,428

15

3,203

7

25,956

13

14,371

9Europe and others

8,553

11

3,936

8

14,112

7

14,141

9$       76,460

100

$       45,882

100

$     198,177

100

$     158,971

100For purposes of determining sales to significant customers representing 10% or more of the Company's total net sales, the
Company includes sales to customers through its distributors (at the sales price to the distributors) and excludes the distributors as
significant customers. For the three months ended October 1, 2006, three customers accounted for 18%, 17% and 12% of net sales,
respectively. For the three months ended September 25, 2005, two customers accounted for 14% and 12% of net sales. For the nine
months ended October 1, 2006, two customers accounted for 16% and 12% of net sales. For the nine months ended September 25,
2005, one customer accounted for 13% of net sales.

Geographical information relating to the Company's property and equipment as of October 1, 2006 and December 31, 2005
is as follows:

October 1, 2006

December 31, 2005(thousands)

%

(thousands)

%The United States
$          14,956

55

$          13,868

62Germany
6,095

23

4,978

22Others
6,056

22

3,669

16$          27,107

100

$          22,515

100Note 9.	DNS Patent Infringement Suit Settlement

On June 24, 2002, the Company entered into a settlement agreement and a license agreement with Dainippon Screen
Manufacturing Co., Ltd. (DNS), under which DNS agreed to make payments to the Company totaling between $75 million
(minimum) and $105 million (maximum), relating to past damages, partial reimbursement of attorney fees and costs, and license
fees.

In April 2006, DNS paid the Company the minimum annual royalty payment of $6.0 million.  In June 2006, DNS paid the
Company an additional royalty payment of $2.4 million for royalties due through March 31, 2006. Royalty payments received by the
Company in excess of the minimum annual payments are recorded as royalty revenue and recognized as net sales in the period they
are reported to the Company by DNS, which is generally in June of each year. The last royalty payment to be paid by DNS under the
license agreement will be due in June 2008.

As of October 1, 2006, DNS has made payments aggregating $77.2 million under the terms of the settlement and license
agreements. Of the $77.2 million paid by DNS as of October 1, 2006, $1.5 million was withheld for Japanese income tax. The
Company recognized $1.4 million and $1.4 million of royalty revenue for the three months ended October 1, 2006 and September 25,
2005, respectively.  The Company recognized $6.5 million and $9.5 million of royalty revenue for the nine months ended October 1,
2006 and September 25, 2005, respectively.

Note 10.	Income Taxes

The provision for income taxes was $452,000 for the quarter ended October 1, 2006.  The tax provision was primarily due to
domestic taxes of $322,000. The provision for income taxes was $61,000 for the quarter ended September 25, 2005.  The tax provision
was primarily due to a net provision of $49,000 for deferred taxes and a provision of $12,000 for state taxes.  In the first nine months of
2006, the provision for income taxes was $1.2 million. The tax provision was primarily due to foreign taxes of $846,000.  In the first nine
months of 2005, the Company recorded an income tax benefit of approximately $0.4 million, which primarily consisted of a deferred tax
benefit on the amortization of certain intangible assets of $0.3 million, and a benefit for foreign taxes of approximately $0.1 million.

On a quarterly basis, the Company evaluates its expected income tax expense or benefit based on its year to date operations,
and records an adjustment in the current quarter. The net tax provision is the result of the mix of profits earned by the Company and its
subsidiaries in tax jurisdictions with a broad range of income tax rates.

The Company's valuation allowance at October 1, 2006 is primarily attributable to Federal and state deferred tax assets, as
well as certain foreign deferred tax assets. Management believes that sufficient uncertainty exists with regard to the realizability of
these tax assets such that a valuation allowance is necessary. Factors considered in providing a valuation allowance include the lack of
a significant history of consistent profits and the lack of carry-back capacity to realize these assets. Based on the absence of objective
evidence, management is unable to assert that it is more likely than not that the Company will generate sufficient taxable income to
realize these remaining net deferred tax assets.


Note 11.	Net Income Per Share

Net income (loss) per share is calculated in accordance with SFAS No. 128, Earnings Per Share. SFAS
No. 128 requires dual presentation of basic and diluted net income (loss) per share on the face of the income statement. Basic
earnings per share is computed by dividing income (loss) available to common stockholders by the weighted average number of
common shares outstanding for the period. Diluted net income (loss) per share is computed using the weighted average number of
common shares outstanding plus the effect of all dilutive securities representing potential common shares outstanding during the
period. The dilutive effect of outstanding options and restricted stock is reflected in diluted earnings per share by application of the
treasury stock method, which includes consideration of stock-based compensation required by SFAS No. 123(R).

The following table summarizes the incremental shares from these potentially dilutive securities, calculated using the treasury
stock method:

Three Months Ended

Nine Months EndedOctober 1,

September 25,

October 1,

September 25,2006

2005

2006

2005(thousands)Weighted average shares outstanding - Basic
52,502

51,504

52,409

51,431Diluted potential common shares from stock options
726

990

1,058

998Escrow shares related to Vortek
-

290

-

290Weighted average shares outstanding - Diluted
53,228

52,784

53,467

52,719Total stock options outstanding of 3.7 million and 2.8 million for the three and nine months ended October 1, 2006,
respectively, and 4.0 million and 3.9 million for the three and nine months ended September 25, 2005, respectively, were excluded from
the computations because their inclusion would have been antidilutive.

Note 12.	Comprehensive Income

The balance of accumulated comprehensive income is as follows:

October 1,

December 31,2006

2005(thousands)Cumulative translation adjustments
$           11,542

$             8,206Unrealized investment gain (loss)
39

(25)$           11,581

$             8,181The following are the components of comprehensive income:

Three Months Ended

Nine Months EndedOctober 1,

September 25,

October 1,

September 25,2006

2005

2006

2005(thousands)Net income
$             4,587

$             1,129

$           13,432

$             6,538Cumulative translation adjustments
393

(555)

3,336

(6,505)Unrealized investment gain (loss)
192

(20)

64

(47)Comprehensive income (loss)
$             5,172

$                554

$           16,832

$                 (14)Item 2. Management's Discussion and Analysis of Financial Condition and Results of Operations

This quarterly report on Form 10-Q contains forward-looking statements, which are subject to the Safe Harbor provisions created
by the Private Securities Litigation Reform Act of 1995.  These forward-looking statements are based on management's current
expectations and beliefs, including estimates and projections about our industry.  Our forward-looking statements may include
statements that relate to our future revenue, customer demand, market share, competitiveness, gross margins, product development
plans and levels of research and development (R&D activity), outsourcing plans and operating expenses, tax expenses, economic
conditions in general and in our industry, and the sufficiency of our financial resources to support future operations and capital
expenditures.  Forward-looking statements typically are identified by use of terms such as "anticipates,"
"expects," "intends," "plans," "seeks," "estimates," "believes," and
similar expressions, although some forward-looking statements are expressed differently.  These statements are not guarantees of
future performance and are subject to numerous risks, uncertainties, and assumptions that are difficult to predict.  Such risks and
uncertainties include those set forth in our Annual Report on Form 10-K in Item 1A under "Risk Factors That May Affect Future
Results and Market Price of Stock."  Our actual results could differ materially from those anticipated by these forward-looking
statements. The forward-looking statements in this report speak only as of the time they are made and do not necessarily reflect our
outlook at any other point in time.  We undertake no obligation to update publicly any forward-looking statements, whether as a result of
new information, future events, or for any other reason.
Documents to Review In Connection With Management's Discussion and Analysis of Financial Condition and Results of
Operations

This discussion should be read in conjunction with the condensed consolidated financial statements and notes presented in this
Quarterly Report on Form 10-Q and the consolidated financial statements and notes filed in our last Annual Report on Form 10-K, for
the year ended December 31, 2005.
Overview

In 2005, we were the leading supplier of dry strip equipment for the second consecutive year and the second largest supplier
of rapid thermal processing (RTP) equipment in the global semiconductor industry for the third consecutive year, according to Gartner
Dataquest, an independent research firm. Our manufacturing equipment is used for transistor level, or front-end-of-line manufacturing,
and also in specialized applications for processing the interconnect layer, or back-end-of-line processing. Our manufacturing equipment
utilizes innovative technology to deliver advanced processing capabilities and high productivity for the fabrication of current and next-
generation integrated circuits (ICs). Our tools, technologies and expertise are enablers in the semiconductor industry's transition to
larger 300 millimeter wafers, sub-90 nanometer design rules and the use of new materials, such as copper, low capacitance (low-k)
dielectrics and barrier metals.

Our business depends upon capital expenditures by manufacturers of semiconductor devices. The level of capital expenditures by
these manufacturers depends upon the current and anticipated market demand for such devices. Because the demand for
semiconductor devices is highly cyclical, the demand for wafer processing equipment is also highly cyclical.  The cyclicality and
uncertainties regarding overall market conditions continue to present significant challenges to us and impact our ability to forecast
near-term revenue. Given that many of our costs are fixed in the short-term, our ability to quickly modify our operations in response to
changes in market conditions is limited.

We continually invest in technology to ensure that our products deliver results on the wafer. Part of our strategy is to outsource
selected non-critical functions in manufacturing, spare parts logistics, subsystem design and other areas to third parties specializing in
these areas. This allows us to concentrate our resources on our core technologies in strip and RTP and achieve greater flexibility to
expand and contract manufacturing and other capacity as market conditions require. Although we have implemented cost cutting and
operational flexibility measures, we are largely dependent upon increases in sales in order to improve our profitability.

Going forward, the success of our business will be dependent on numerous factors, including, but not limited to, the market
demand for semiconductors and semiconductor wafer processing equipment and our ability to (a) significantly grow the
Company, either organically or through acquisitions, in order to enhance our competitiveness and profitability, (b) develop and bring to
market new products that address our customers' needs, (c) grow customer loyalty through collaboration with and support of our
customers, (d) maintain a cost structure that will enable us to operate effectively and profitably throughout changing industry
cycles, and (e) generate the gross margins necessary to enable us to make the necessary investments in our business.
For the three months ended October 1, 2006, our net sales were $76.5 million, an increase of 66.6 percent from $45.9 million
for the same period last year, primarily due to a $28.1 million increase in system sales and a $2.5 million increase in sales of service
and spare parts. For the nine months ended October 1, 2006, our net sales were $198.2 million, an increase of 24.7 percent from
$159.0 million for the same period last year, primarily due to a $35.5 million increase in system sales and a $6.7 million increase in
sales of service and spare parts, partially offset by a $3.0 million decrease in royalty revenues from DNS.

Gross profit margin for the three months ended October 1, 2006 was 34.4 percent, a decrease of 4.5 percentage points from 38.9
percent for the same period of 2005. Gross profit margin for the nine months ended October 1, 2006 was 38.7 percent, a decrease of
2.3 percentage points from 41.0 percent for the same period of 2005.


Operating expenses for the three months ended October 1, 2006 were $23.4 million, $3.2 million higher than the
$20.2 million reported for the same period of 2005, excluding the nonrecurring gains of $0.6 million recorded in the third quarter
of 2006 and $2.9 million recorded in the third quarter of 2005 related to the sale of our Wet Business. Operating expenses as a
percentage of net sales were 30.6 percent for the three months ended October 1, 2006, compared with 43.9 percent for the same
period of 2005, excluding the nonrecurring gains. Operating expenses for the nine months ended October 1, 2006 were $66.8 million,
$4.7 million higher than the $62.2 million reported for the same period of 2005, excluding the nonrecurring gains, primarily due to
increased selling, general and administrative expenditures in 2006. Operating expenses as a percentage of net sales were 33.7 percent
for the nine months ended October 1, 2006, compared with 39.1 percent for the same period of 2005 excluding the nonrecurring gains.

For the nine months ended October 1, 2006, net cash provided by operating activities was $7.1 million.  Cash, cash
equivalents, and short-term investments totaled $132.5 million as of October 1, 2006.
Critical Accounting Policies

Our condensed consolidated financial statements have been prepared in accordance with accounting principles generally
accepted in the United States of America. The preparation of these financial statements requires management to make estimates and
assumptions that affect the reported amounts of assets and liabilities, the disclosure of contingent assets and liabilities at the date of
the financial statements, and the reported amounts of revenues and expenses during the reporting periods. On an on-going basis,
management evaluates its estimates and judgments, including those related to reserves for excess and obsolete inventory, warranty
obligations, bad debts, intangible assets, income taxes, restructuring costs, contingencies and litigation. Management bases its
estimates and judgments on historical experience and on various other factors that are believed to be reasonable under the
circumstances. These form the basis for making judgments about the carrying values of assets and liabilities that are not readily
apparent from other sources. Actual results may differ from these estimates.

We consider certain accounting policies related to revenue recognition, warranty obligations, inventories, and income taxes as
critical to our business operations and an understanding of our results of operations.
Revenue Recognition.  We recognize revenue in accordance with SAB No. 104, Revenue Recognition
in Financial Statements. We account for equipment sales as follows: 1) for equipment sales of existing products with new
specifications and for all sales of new products, revenue is recognized upon customer acceptance; 2) for equipment sales to
existing customers who have purchased the same equipment with the same specifications and previously demonstrated acceptance
provisions, or equipment sales to new customers purchasing existing products with established reliability, we recognize revenue on a
multiple element approach in which we bifurcate a sale transaction into two separate elements based on objective evidence of fair
value. The two elements are the tool and installation of the tool. Under this approach, the portion of the invoice price that is due upon
shipment, generally 90% of the total invoice price, is recognized as revenue upon shipment and title transfer of the tool; and the
remaining portion of the total invoice price, generally 10% of the total invoice price, which is due once installation services have been
accepted, is not recognized as revenue until final customer acceptance of the tool. From time to time, however, we allow customers to
evaluate systems, and since customers can return such systems at any time with limited or no penalty, we do not recognize revenue
until these evaluation systems are accepted by the customers. Revenues associated with sales to customers in Japan are recognized
upon title transfer, which generally occurs upon customer acceptance, with the exception of sales of RTP products through our
distributor in Japan, where we recognize revenues upon title transfer to the distributor. For spare parts, we recognize revenue upon
shipment. We recognize service and maintenance contract revenue on a straight-line basis over the service period of the related
contract. Accounts receivable for which revenue has not been recognized are classified as "Advance Billings" in the accompanying
consolidated balance sheets.

In all cases, revenue is only recognized when persuasive evidence of an arrangement exists, delivery has occurred, the price
is fixed or determinable and collectibility is reasonably assured.

Warranty.  The warranty we offer on system sales generally ranges from 12 months to 36 months,
depending on the product. A provision for the estimated cost of warranty, based on historical costs, is recorded as a cost of revenue
when the revenue is recognized for the sale of the equipment or parts. Our warranty obligations require us to repair or replace defective
products or parts, generally at a customer's site, during the warranty period at no cost to the customer. The actual system performance
and/or field expense profiles may differ from historical experience, and in those cases, we adjust our warranty accruals accordingly.
While our warranty costs have historically been within our expectations and the provisions we have established, we cannot be certain
that we will continue to experience the same warranty costs that we have had in the past.

Inventories.  Inventories are stated at the lower of cost or market, with cost determined on a first-in, first-out
basis, and include material, labor and manufacturing overhead costs. Finished goods are reported as inventories until the point of title
transfer to the customer. When the terms of sale do not specify, we assume title transfers when we complete physical transfer of the
products to the freight carrier unless other customer practices prevail. All intercompany profits related to the sales and purchases of
inventory between our legal entities are eliminated from the consolidated financial statements.

Our policy is to assess the valuation of all inventories, including manufacturing raw materials, work-in-process, finished goods
and spare parts, in each reporting period. Although we attempt to accurately forecast future inventory demand, given the competitive
pressures and cyclicality of the semiconductor industry, there may be significant unanticipated changes in demand or technological
developments that could have a significant impact on the value of our inventories and reported operating results.

Income Taxes.  We have recognized a net deferred tax asset of $3.0 million related to our German operations,
as we expect it is more likely than not that we will realize the benefit from the German net deferred tax asset as of October 1, 2006. For
all other tax jurisdictions, we recorded a 100% valuation allowance against our net deferred tax asset as we expect it is more likely than
not that we will not realize our net deferred tax asset as of October 1, 2006. In assessing the need for a valuation allowance, we
consider historical levels of income, expectations and risks associated with estimates of future taxable income and ongoing prudent and
feasible tax planning strategies. In the event we determine that we would be able to realize additional deferred tax assets in the future
in excess of the net recorded amount, or if we subsequently determine that realization of an amount previously recorded is unlikely, we
would record an adjustment to the deferred tax asset valuation allowance, which would change income in the period of adjustment.


Results of Operations

The following tables set forth our condensed consolidated results of operations for the periods indicated, along with amounts
expressed as a percentage of net sales, and comparative information regarding the absolute and percentage changes in these
amounts:

Three Months Ended

Increase (Decrease)October 1, 2006

September 25, 2005(thousands)

%

(thousands)

%

(thousands)

%Net sales
$       76,460

100.0

$       45,882

100.0

$      30,578

66.6Cost of sales
50,193

65.6

28,017

61.1

22,176

79.2Gross profit
26,267

34.4

17,865

38.9

8,402

47.0Operating expenses:Research, development and engineering
7,265

9.5

6,616

14.4

649

9.8Selling, general and administrative
15,936

20.8

13,039

28.4

2,897

22.2Amortization of intangibles
172

0.2

500

1.1

(328)

(65.6)Gain on disposition of Wet Business
(572)

(0.7)

(2,862)

(6.2)

2,290

(80.0)Total operating expenses
22,801

29.8

17,293

37.7

5,508

31.9Income from operations
3,466

4.6

572

1.2

2,894

505.9Interest and other income, net
1,573

2.0

618

1.4

955

154.5Income before income taxes
5,039

6.6

1,190

2.6

3,849

323.4Income tax expense
452

0.6

61

0.1

391

641.0Net income
$         4,587

6.0

$         1,129

2.5

$        3,458

306.3

Nine Months Ended

Increase (Decrease)October 1, 2006

September 25, 2005(thousands)

%

(thousands)

%

(thousands)

%Net sales
$     198,177

100.0

$     158,971

100.0

$      39,206

24.7Cost of sales
121,473

61.3

93,764

59.0

27,709

29.6Gross profit
76,704

38.7

65,207

41.0

11,497

17.6Operating expenses:Research, development and engineering
20,563

10.4

19,992

12.6

571

2.9Selling, general and administrative
45,760

23.1

40,673

25.6

5,087

12.5Amortization of intangibles
516

0.2

1,500

0.9

(984)

(65.6)Gain on disposition of Wet Business
(572)

(0.3)

(2,862)

(1.8)

(2,290)

(80.0)Total operating expenses
66,267

33.4

59,303

37.3

6,964

11.7Income from operations
10,437

5.3

5,904

3.7

4,533

76.8Interest and other income, net
4,231

2.1

199

0.1

4,032

2,026.1Income before income taxes
14,668

7.4

6,103

3.8

8,565

140.3Income tax expense (benefit)
1,236

0.6

(435)

(0.3)

1,671

n/m (1)Net income
$       13,432

6.8

$         6,538

4.1

$        6,894

105.4(1) not meaningfulNet Sales and Deferred Revenue

Net sales for the three months ended October 1, 2006 increased from the same period of 2005, primarily due to a $28.1 million
increase in system sales and a $2.5 million increase in sales of service and spare parts. Net sales for the third quarters of 2006 and
2005 each included royalty income from DNS of $1.4 million.

Net sales for the nine months ended October 1, 2006 increased from the same period of 2005, primarily due to a $35.5 million
increase in system sales and a $6.7 million increase in sales of service and spare parts, partially offset by a $3.0 million decrease in
royalty revenues from DNS. Net sales for the first nine months of 2006 and 2005 included $6.5 million and $9.5 million of royalty income
from DNS, respectively.

International sales as a percentage of total net sales are set forth in the table below.  We anticipate that international sales,
predominantly to customers based in Europe and the Pacific Rim, including China, Japan, Korea, Singapore and Taiwan, will continue
to account for a significant portion of our sales.

Three Months Ended

Nine Months EndedOctober 1,

September 25,

October 1,

September 25,2006

2005

2006

2005International sales
92%

86%

89%

86%Sales to the Pacific Rim
81%

78%

82%

77%Our deferred revenue at October 1, 2006 increased to $12.9 million from $12.5 million at December 31, 2005, primarily
due to a $4.1 million increase in deferred revenue for the deferral of a portion of system shipments in accordance with our revenue
recognition policy, a $1.0 million increase in deferred revenue from our license agreement with DNS, and a $0.1 million increase in
deferred service contract revenue, partially offset by an approximately $4.8 million decrease in deferred revenue for system shipments
which were fully deferred in accordance with our policy at December 31, 2005, which were recognized in 2006.

Gross Profit and Gross Profit Margin

Gross profit in the three months ended October 1, 2006 increased by $8.4 million compared to the same period of 2005,
primarily due to a $10.3 million increase in gross profit related to systems sales, and a $2.0 million increase in gross profit from service
and spare parts sales, which was partially offset by a $3.9 million decrease in gross profit due to net deferral of systems revenue in
accordance with our revenue recognition policy. The decrease in systems gross margin is due to the Company's deferral of a
percentage of the total invoice price, which is generally 10 percent, of delivered systems until customers have accepted installation
services. In periods of increasing sales, the total gross profit deferred typically exceeds acceptances from previously delivered systems,
resulting in a net decrease in gross profit in the current period, which will be recognized in future periods as the systems are accepted
by customers.

Gross profit in the nine months ended October 1, 2006 increased by $11.5 million compared to the same period of 2005, primarily
due to a $17.7 million increase in gross profit related to systems sales, and a $4.3 million increase in gross profit from service and
spare parts sales, which was partially offset by a $3.0 million decrease in gross profit from DNS and a $7.5 million decrease in gross
profit due to net deferral of systems revenue.

Gross profit margin in the three months ended October 1, 2006 decreased by 4.5 percentage points compared to the same
period of 2005, primarily due to lower gross profit margin of 6.3 percentage points due to net deferral of systems revenue in accordance
with our revenue recognition policy, lower gross profit margin from DNS of 1.2 percentage points, and lower gross profit margin from
service and spare parts sales of 0.4 percentage points, which was partially offset by higher gross profit margin related to systems sales
of 3.4 percentage points.

Gross profit margin in the nine months ended October 1, 2006 decreased by 2.3 percentage points compared to the same period of
2005, primarily due to lower gross profit margin from DNS of 2.7 percentage points and lower gross profit margin of 4.2 percentage
points due to net deferral of systems revenue in accordance with our revenue recognition policy, which was partially offset by higher
gross profit margin related to systems sales of 4.0 percentage points, and higher gross profit margin from service and spare parts sales
of 0.6 percentage points.

Due to intense competition, we continue to face pricing pressure that can affect our gross profit margin. We continue to
increase the proportion of manufacturing work performed by outsourcing partners. This outsourcing strategy is a key element of our
"cyclically flexible enterprise" business model, which is designed to enable us to expand and contract our manufacturing capacity to
meet market conditions. Our gross profit margin has varied over the years and will continue to be affected by many factors, including
competitive pressures, product mix, economies of scale, material costs and other costs, overhead absorption levels, and our revenue
recognition requirements.
Research, Development and EngineeringResearch, development and engineering expenses
(RD&E) increased for the three and nine months ended October 1, 2006 compared to the same periods of 2005. Increases in
RD&E expenses in 2006 were primarily due to activities to expand our product portfolio to accommodate sub-65 nanometer design
rules.

Selling, General and Administrative

Selling, general and administrative (SG&A) expenses for the three months ended October 1, 2006 increased compared to
the same period of 2005, primarily due to a $1.1 million increase in personnel costs and commissions due to higher levels of business
activity, a charge of $0.8 million for stock-based compensation in 2006 due to the adoption of SFAS No. 123(R), increased travel
expenses of $0.5 million due to higher levels of business activity, and increased support costs for evaluation equipment of $0.2 million.

Selling, general and administrative (SG&A) expenses for the nine months ended October 1, 2006 increased compared to
the same period of 2005, primarily due to a $2.1 million increase in audit, legal and other professional expenses which related primarily
due to the additional efforts needed to complete our 2005 Form 10-K and restate certain financial statements, a charge of $1.6 million
for stock-based compensation in 2006 due to the adoption of SFAS No. 123(R), increased travel expenses due to higher levels of
business activity of $1.2 million, and increased support costs for evaluation equipment of $0.3 million,  partially offset by a $1.7 million
decrease in depreciation expenses.

Amortization of Intangibles

Amortization of intangibles for the three and nine months ended October 1, 2006 decreased compared to the same period of
2005 as the intangibles resulting from our acquisition of the STEAG semiconductor division in January 2001 were fully amortized at
December 31, 2005. The amortization of intangibles in the three and nine months ended October 1, 2006 results from our acquisition of
Vortek Industries Ltd. on October 27, 2004.

Gain on Disposition of Wet Business

On March 17, 2003, we sold the portion of our business that related to developing, manufacturing, selling, and servicing
wet surface preparation products for the cleaning and preparation of semiconductor wafers (the Wet Business) to SCP Global
Technologies, Inc. (SCP). SCP paid us the initial purchase price of $2.0 million in cash. That initial purchase price was
subject to adjustment based on a number of criteria, including an earn-out up to an aggregate maximum of $5.0 million, payable
to us based upon sales by SCP of certain products to identified customers through December 31, 2004.

In the third quarter of 2005, we received a payment of approximately $2.9 million from SCP for sales by SCP of certain products to
identified customers in 2004. In accordance with SFAS No. 141, Business Combinations, we have recorded this payment
as additional proceeds from the sale of the Wet Business. The payment has been recorded as a reduction of operating expenses in the
accompanying condensed consolidated statement of operations.

In the third quarter of 2006, we concluded all activities related to the disposition of the Wet Business, and released a remaining
accrual of $0.6 million, which was previously established as an estimate of a portion of the projected costs to fulfill our obligations under
the sale of the Wet Business.

Interest and Other Income (Expense), Net

Interest and other income increased for the three months ended October 1, 2006 compared with the same period of 2005,
primarily due to higher average interest rates, which increased interest income by $0.8 million.

Interest and other income increased for the nine months ended October 1, 2006 compared with the same period of 2005,
primarily due to higher average interest rates, which increased interest income by $2.3 million, and a $1.5 million decrease in foreign
currency exchange loss. The foreign currency exchange loss in 2005 included a realized foreign exchange loss of $1.3 million on
forward foreign exchange contracts settled during January 2005.

Provision for Income Taxes

The provision for income taxes was $452,000 for the quarter ended October 1, 2006.  The tax provision was primarily due to
domestic taxes of $322,000. The provision for income taxes was $61,000 for the three months ended September 25, 2005.  The tax
provision was primarily due to a net provision of $49,000 for deferred taxes and a provision of $12,000 for state taxes.

On a quarterly basis, we evaluate our expected income tax expense or benefit based on our year to date operations and record an
adjustment in the current quarter. The net tax provision is the result of the mix of profits earned by us and our subsidiaries in tax
jurisdictions with a broad range of income tax rates.

Our valuation allowance at October 1, 2006 is primarily attributable to Federal and state deferred tax assets, as well as certain
foreign deferred tax assets. We believe that sufficient uncertainty exists with regard to the realizability of these tax assets such that a
valuation allowance is necessary. Factors considered in providing a valuation allowance include the lack of a significant history of
consistent profits and the lack of carry-back capacity to realize these assets. Based on the absence of objective evidence, we are
unable to assert that it is more likely than not that we will generate sufficient taxable income to realize these remaining net deferred tax
assets.

Stock-based Compensation

Effective January 1, 2006, we adopted the provisions of SFAS No. 123(R), Share-Based Payment. SFAS No. 123(R)
establishes accounting for stock-based awards exchanged for employee services. Accordingly, stock-based compensation cost is
measured at grant date, based on the fair value of the award which is computed using the Black-Scholes option valuation model, and is
recognized as expense over the requisite service period for the employee. We previously applied APB Opinion No. 25, Accounting
for Stock Issued to Employees, and related interpretations, and provided the required pro forma disclosures of SFAS No. 123,
Accounting for Stock-Based Compensation. We elected to adopt the modified prospective application method as provided by
SFAS No. 123(R). Accordingly, during the three and nine months ended October 1, 2006, we recorded stock-based compensation cost
totaling the amount that would have been recognized had the fair value method been applied since the effective date of SFAS No. 123.
We did not restate previously reported amounts.

During the three and nine months ended October 1, 2006, we recorded stock-based compensation related to stock options of
$590,000 and $1,299,000, respectively. As of October 1, 2006, the unrecorded deferred stock-based compensation after estimated
forfeitures related to stock options was $5.9 million and will be recognized over an estimated weighted average amortization period of
1.6 years. During the three and nine months ended October 1, 2006, we recorded stock-based compensation related to our employee
stock purchase plan of $27,000 and $44,000, respectively. Compensation cost related to restricted stock units for the three and nine
months ended October 1, 2006 was $141,000 and $243,000, respectively. Compensation cost for restricted stock units is determined
based on the grant date fair value of the shares of common stock, and is recognized on a straight-line basis over the requisite service
period. As of October 1, 2006, the unrecorded deferred stock-based compensation, after estimated forfeitures, related to nonvested
restricted stock units granted under the 2005 Equity Incentive Plan was $1.3 million. That cost is expected to be recognized over an
estimated weighted average amortization period of 1.7 years.

Liquidity and Capital Resources

Our cash, cash equivalents, and short-term investments were $132.5 million at October 1, 2006, an increase of
$3.3 million from $129.3 million as of December 31, 2005.  Stockholders' equity at October 1, 2006 was
$231.5 million.

Credit Arrangements

In April 2006, we renewed our $10 million revolving line of credit with a bank, which may be increased to $20
million at our option. The revolving line of credit now expires in April 2007, and has an annual commitment fee of $30,000.  In
April and May 2006, we were out of compliance with one covenant under the line of credit, which requires us to provide audited
financial statements within 90 days of our fiscal year-end. We obtained a waiver to this covenant through May 3, 2006, the date we filed
our Annual Report on Form 10-K with the SEC, including our audited financial statements for the year ended December 31, 2005.

Off-Balance-Sheet Arrangements

As of October 1, 2006, we did not have any "off-balance-sheet" arrangements, as defined in Item 303 (a)(4)(ii) of
Regulation S-K.

Contractual Obligations

Under U.S. generally accepted accounting principles, certain obligations and commitments are not required to be included in
our consolidated balance sheets. These obligations and commitments, while entered into in the normal course of business, may have a
material impact on our liquidity.

In September 2005, we entered into a new lease agreement for our existing corporate headquarters building in Fremont,
California. The lease is for a period of 10 years, commencing upon expiration of the current sublease on May 31, 2007, and has an
initial annual base rent cost of approximately $1.4 million. We have one five-year option to extend the lease at then current market
lease rates. Additionally, we are responsible for insurance, real property taxes, and operating expenses. Upon termination of the lease,
we are responsible for an additional lease payment of $1.5 million, subject to adjustment, and we have provided the Landlord a letter of
credit for $1.5 million to secure this obligation. The letter of credit amount will be increased to reflect any adjustments made to the
additional minimum lease payment.

In connection with the acquisition of Vortek Industries Ltd., we became party to an agreement between Vortek and the
Canadian Minister of Industry (the Minister) relating to an investment in Vortek by Technology Partnerships Canada. Under that
agreement, as amended, we or Vortek agreed to various covenants, including (a) payment by us of a royalty to the Minister of
1.4% of revenues from flash RTP products, up to a total of CAD14,269,290 (approximately $12.8 million at October 1, 2006), and
(b) Vortek maintaining a specified average workforce of employees in Canada through October 27, 2009. If we, or Vortek,
do not satisfy our obligations, the Minister may demand payment of liquidated damages in the amount of CAD14,269,290 less any
royalties paid by Vortek or us to the Minister.

Other Commitments and Legal Settlements

On June 24, 2002, we entered into a settlement agreement and a license agreement with DNS under which DNS agreed
to make payments to us totaling between $75 million (minimum) and $105 million (maximum), relating to past damages,
partial reimbursement of attorney fees and costs, and license fees (See Note 9).

In April 2006, DNS paid us the minimum annual royalty payment of $6.0 million.  In June 2006, DNS paid us an additional
royalty payment of $2.4 million for royalties due through March 31, 2006. As of October 1, 2006, DNS has made payments aggregating
$77.2 million under the terms of the settlement and license agreements.

Liquidity and Capital Resources Outlook

As of October 1, 2006, we had cash, cash equivalents, and short-term investments of $132.5 million. We
believe that these balances, including interest to be earned thereon, and anticipated cash flows from operating activities will be
sufficient to fund our working and other capital requirements over the course of the next twelve months and for the foreseeable future.
In the normal course of business, we evaluate the merits of acquiring technology or businesses, or establishing strategic relationships
with or investing in these businesses. We may use available cash, cash equivalents and marketable security investments to fund such
activities in the future. In the event additional needs for cash arise, we may raise additional funds from a combination of sources,
including the potential issuance of debt or equity securities. Additional financing might not be available on terms favorable to us, or at
all. If adequate funds were not available or were not available on acceptable terms, our ability to take advantage of unanticipated
opportunities or respond to competitive pressures could be limited.

Cash Flows from Operating Activities

>Net cash provided by operations during the nine months ended October 1, 2006 was $7.1 million, primarily
due to net income of $13.4 million, an increase in accrued liabilities of $8.3 million, an increase in accounts payable of $6.3 million,
depreciation and amortization of $4.9 million, a decrease in prepaid expenses and other current assets of $3.3 million, a decrease in
advanced billings of $1.9 million, a decrease in inventories-delivered systems of $2.5 million, inventory valuation charges of $1.7
million, and non-cash stock-based compensation of $1.6 million which was included in net income, partially offset by an increase in
inventories of $14.4 million and an increase in accounts receivable of $22.3 million. The increase in accounts receivable was primarily
due to an increase in revenues from the fourth quarter of 2005. The increase in inventories and accounts payable is primarily due to the
increase in system sales in 2006.

Net cash provided by operations during the nine months ended September 25, 2005 was $34.2 million, primarily due to net
income of $6.5 million, a decrease in accounts receivable of $28.8 million, a decrease in inventories and inventories-delivered systems
of $9.2 million, depreciation and amortization of $8.1 million, a decrease in advance billings of $5.9 million, and an inventory valuation
charge of $2.1 million, partially offset by a decrease in accrued liabilities $9.8 million, a decrease in accounts payable of
$7.7 million, a decrease in deferred revenue of $6.1 million, and the gain from disposition of Wet Business of $2.9 million.

We expect that cash provided by operating activities may fluctuate in future periods as a result of a number of factors including
fluctuations in our net sales and operating results, amount of revenue deferred, collection of accounts receivable and timing of
payments.

Cash Flows from Investing Activities

Net cash used in investing activities during the nine months ended October 1, 2006 was $44.6 million, primarily
due to purchases of $48.3 million of available-for-sale investments and capital spending of $9.3 million, partially offset by proceeds of
$12.7 million from sales and maturities of available-for-sale investments.

Net cash used in investing activities during the nine months ended September 25, 2005 was $7.8 million, primarily due
to purchases of $17.3 million of available-for-sale investments and capital expenditures of $2.1 million for computer equipment and
software, partially offset by proceeds of $8.8 million from sales and maturities of available-for-sale investments, and cash received from
the disposition of the Wet Business of $2.9 million.

Cash Flows from Financing Activities

Net cash provided by financing activities during the nine months ended October 1, 2006 was $2.9 million,
attributable to net proceeds of $2.9 million from stock options exercised.

Net cash provided by financing activities during the nine months ended September 25, 2005 was $2.6 million,
attributable to net proceeds of $2.1 million from stock options exercised and stock purchases under our employee stock purchase
plan and a $0.5 million reduction in restricted cash that was previously required as collateral for the Company's corporate credit cards.

Recent Accounting Pronouncements

In September 2006, the SEC issued SAB No. 108, Considering the Effects of Prior Year Misstatements when Quantifying
Current Year Misstatements. SAB No. 108 requires analysis of misstatements using multiple approaches and provides for a
one-time cumulative effect transition adjustment. SAB No. 108 is effective for our fiscal year 2006 annual financial statements.
We are currently assessing the potential impact that the adoption of SAB No. 108 will have on our financial statements; the
impact is not expected to be material.

In September 2006, the FASB issued SFAS No. 157, Fair Value Measurements,which
defines fair value, establishes a framework for measuring fair value in generally accepted accounting principles, and expands
disclosures about fair value measurements. SFAS No. 157 does not require any new fair value measurements, but provides
guidance on how to measure fair value by providing a fair value hierarchy used to classify the source of the information. This statement
is effective for us beginning January 1, 2008. We are currently assessing the potential impact that the adoption of SFAS No. 157
will have on our financial statements.

In June 2006,the FASB ratified the EITF conclusion on Issue No. 06-02, Accounting for Sabbatical Leave and Other Similar
Benefits Pursuant to FASB Statement No. 43, `Accounting for Compensated Absences' (EITF No. 06-02). The EITF concluded that
companies should accrue for employee sabbatical leave over the service period in which employees earn the right to sabbatical leave.
We do not expect that the adoption of EITF No. 06-02 will have a material effect on our financial position and results of operations. EITF
No. 06-02 is effective for years beginning after June 28, 2006, and will be adopted by us on January 1, 2007. We will adopt EITF 06-02
as a change in accounting principle, and will show the cumulative effect of adoption in the first quarter of 2007, as permitted by the
transition provisions of EITF No. 06-02.

In June 2006, the FASB issued FASB Interpretation (FIN) No. 48, Accounting for Uncertainty in Income Taxes:
An Interpretation of FASB Statement No. 109.FIN No. 48 clarifies the accounting for uncertainty in income taxes recognized
in an enterprise's financial statements in accordance with SFAS No. 109, Accounting for Income Taxes. This
Interpretation defines the minimum recognition threshold a tax position is required to meet before being recognized in the financial
statements. FIN No. 48 is effective for fiscal years beginning after December 15, 2006. We are currently evaluating the
effect that the adoption of FIN No. 48 will have on our financial position and results of operations.

In December 2004, the FASB issued SFAS No. 123 (revised 2004), Share-Based Payment. SFAS No. 123(R) requires
us to measure all employee stock-based compensation awards using a fair value method and record such expense in our consolidated
financial statements. In March 2005, the SEC issued SAB No. 107, which provides the SEC Staff's views regarding interactions
between SFAS No. 123(R) and certain SEC rules and regulations and provides interpretations of the valuation of share-based
payments for public companies. The adoption of SFAS No. 123(R) requires additional accounting related to the income tax effects and
additional disclosure regarding the cash flow effects resulting from share-based payment arrangements. The adoption of SFAS No.
123(R) in the three and nine months ended October 1, 2006, had a material impact on our consolidated results of operations, financial
position and statement of cash flows. For more information on stock-based compensation costs during the three months and nine
months ended October 1, 2006, refer to Note 7 - Stock-Based Compensation.

Item 3.Quantitative and Qualitative Disclosures About Market Risk

We are exposed to financial market risks, including changes in foreign currency exchange rates and changes in interest rates.

Interest Rate Risk

Our exposure to market risk for changes in interest rates relates to our investment portfolio of cash and cash equivalents and
short-term investments. We do not currently use derivative financial instruments in our investment portfolio, or hedge for interest rate
exposures. We place our investments with high credit quality issuers and, by policy, limit the amount of our credit exposure to any one
issuer. Our portfolio includes only marketable securities with active secondary or resale markets to ensure portfolio liquidity.

Our interest rate risk relates primarily to our investment portfolio, which consisted of $84.1 million in cash and cash equivalents
and $48.5 million in short-term marketable securities as of October 1, 2006. An immediate sharp increase in interest rates could have a
material adverse affect on the fair value of our investment portfolio. Conversely, immediate sharp declines in interest rates could
seriously harm interest earnings of our investment portfolio. By policy, we limit our exposure to longer-term investments. The maturities
of short-term investments in our portfolio as of October 1, 2006 and December 31, 2005 are shown below:

|                        | October 1,        |  | December 31,     
|----------------------- | ----------------- |  | -----------------
|                        | 2006              |  | 2005             
|                        | (thousands)      
|                        |                   |  |                  
|Due within one year     | $          35,586 |  | $          12,689
|Due in one to two years | 12,878            |  | -                
|                        | $          48,464 |  | $          12,689

Foreign Currency Risk

Historically, much of our revenues and capital spending has been transacted in U.S. dollars.

The functional currency of our foreign subsidiaries is their local currencies. Accordingly, all assets and liabilities of these foreign
operations are translated using exchange rates in effect at the end of the reporting period, and revenues and costs are translated using
average exchange rates for the period. Gains or losses from translation of foreign operations where the local currencies are the
functional currency are included as a component of accumulated other comprehensive income/(loss). Foreign currency translation
gains and losses are recognized in the consolidated statements of operations as they are incurred.  Because much of our revenues and
capital spending are transacted in U.S. dollars, we believe that foreign currency exchange rates should not materially adversely affect
our overall financial position, results of operations or cash flows.

During January 2005, we settled three forward foreign exchange contracts outstanding as of December 31, 2004 for the
purchase in total of 28.3 million Euros in exchange for US $38.6 million (weighted average contract rate of 1 Euro to US
$1.36) upon maturities and realized a total foreign exchange loss of $1.3 million, which was recorded under other expense, net in
the first quarter of 2005.  We did not enter into any new forward foreign exchange contracts during the three or nine months ended
October 1, 2006 and September 25, 2005.  There were no forward foreign exchange contracts outstanding as of October 1, 2006 or
December 31, 2005.

Item 4.	Controls and Procedures

Remediation Plan for Previously Identified Material Weaknesses

During the process of preparing our Annual Report on Form 10-K for the year ended December 31, 2005, our management
identified the following material weaknesses as of December 31, 2005:

1. We did not maintain effective controls, including monitoring, over the financial statement closing and reporting process.
2. We did not maintain effective controls over the valuation and accuracy of certain inventory and related costs of goods sold.

Beginning in the fourth quarter of 2005, and continuing through the third quarter of 2006, our management has been taking action
to remedy the material weaknesses identified above. These include actions to improve our finance organization by adding and
redefining positions and functional roles within the organization, improving control procedures, adding significant layers of internal
review, and hiring additional personnel with appropriate levels of financial reporting expertise. We expect to add additional finance
personnel in the fourth quarter of 2006.

We added an additional layer of internal review over the computation of our reserves for slow-moving and excess and obsolete
inventory calculations in the fourth quarter of 2005, which we have continued in the first three quarters of 2006.

Disclosure Controls and Procedures

Our management, with the participation of our Chief Executive Officer and Chief Financial Officer, conducted an evaluation of
our disclosure controls and procedures, as such term is defined in Rule 13a-15(e) promulgated under the Securities
Exchange Act of 1934, as amended, as of the end of the quarterly period covered by this report. Our disclosure controls and
procedures are intended to ensure that the information we are required to disclose in the reports that we file or submit under the
Securities Exchange Act of 1934 is (i) recorded, processed, summarized and reported within the time periods specified in the
Securities and Exchange Commission's rules and forms and (ii) accumulated and communicated to our management,
including the Chief Executive Officer and Chief Financial Officer, as the principal executive and financial officers, respectively, to allow
timely decisions regarding required disclosures.

Because of the material weaknesses described in Management's Report on Internal Control Over Financial Reporting in our Annual
Report on Form 10-K for the year ended December 31, 2005, which was filed with the SEC on May 3, 2006, our management has
concluded that, as of the end of the period covered by this report, our disclosure controls and procedures were not effective.

Notwithstanding the material weaknesses discussed in our Annual Report on Form 10-K for the year ended December 31, 2005,
our management has concluded that the financial statements included in this Form 10-Q present fairly, in all material respects
our financial position, results of operations and cash flows for the periods presented in conformity with generally accepted accounting
principles.

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements.  It should be
noted that any system of controls, however well designed and operated, can provide only reasonable, and not absolute, assurance that
the objectives of the system will be met.  Also, projections of any evaluation of effectiveness to future periods are subject to the risk that
controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures
may deteriorate.

Quarterly Evaluation of Changes in Internal Control over Financial Reporting

Our management, with the participation of our Chief Executive Officer and Chief Financial Officer, also conducted an
evaluation of our internal control over financial reporting to determine whether any change occurred during the third quarter of 2006 that
has materially affected, or is reasonably likely to materially affect, our internal control over financial reporting.  Based on that evaluation,
our management concluded that there was no such change during the third quarter of 2006.



PART II.	OTHER INFORMATION

Item 1.	Legal Proceedings

In the ordinary course of business, we are subject to claims and litigation, including claims that we infringe third party patents,
trademarks and other intellectual property rights. Although we believe that it is unlikely that any current claims or actions will have a
material adverse impact on our operating results or our financial position, given the uncertainty of litigation, we cannot be certain of this.
Moreover, the defense of claims or actions against us, even if not meritorious, could result in the expenditure of significant financial and
managerial resources.

Our involvement in any patent dispute, other intellectual property dispute or action to protect trade secrets and know-how could
result in a material adverse effect on our business. Adverse determinations in current litigation or any other litigation in which we may
become involved could subject us to significant liabilities to third parties, require us to grant licenses to or seek licenses from third
parties and prevent us from manufacturing and selling our products. Any of these situations could have a material adverse effect on our
business.

Item 1A.  Risk Factors

Other Items in this Quarterly Report on Form 10-Q describe risks and uncertainties associated with our business, including risks
and uncertainties that could cause actual results to differ materially from the results expressed or implied by forward-looking statements
contained in this Quarterly Report and in other statements we make publicly.  A more complete description of a number of primary risk
factors associated with our business, and which could cause our results to differ materially from the results expressed or implied by our
forward-looking statements contained in this Quarterly Report or elsewhere, is set forth in our Annual Report on Form 10-K for the year
ended December 31, 2005, filed with the SEC on May 3, 2006.

Item 6.  Exhibits



|Exhibit
                                  Number | Description                                                                                    
|------------------------------------------------ | -----------------------------------------------------------------------------------------------
|3.1(1)                                           | Amended and Restated Certificate of Incorporation of the Company.                              
|3.2(2)                                           | Third Amended and Restated Bylaws of the Company.                                              
|31.1                                             | Certification of Chief Executive Officer Pursuant to Sarbanes-Oxley Act Section 302(a).
    PDF
|31.2                                             | Certification of Chief Financial Officer Pursuant to Sarbanes-Oxley Act Section 302(a).
    PDF
|32.1                                             | Certification of Chief Executive Officer Pursuant to 18 U.S.C. Section 1350.
    PDF           
|32.2                                             | Certification of Chief Financial Officer Pursuant to 18 U.S.C. Section 1350.
    PDF           

_________________

(1)  Incorporated by reference from Mattson Technology, Inc. Current Report on Form 8-K filed on January 30, 2001.
                   (2)  Incorporated by reference from Mattson Technology, Inc. Quarterly Report on Form 10-Q filed on August 14, 2002.

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SIGNATURES

Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused
this report to be signed on its behalf by the undersigned thereunto duly authorized.

| |                                     
| | ------------------------------------
| | Mattson Technology, Inc.(Registrant)

Dated: November 13, 2006

| |                                                                                                                        
| | -----------------------------------------------------------------------------------------------------------------------
| | By: /s/ DAVID DUTTON
               David DuttonChief Executive Officer
                  (Principal Executive Officer)

Dated: November 13, 2006

| |                                                                                                                                                                                    
| | -----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------
| | By: /s/ LUDGER VIEFHUES
               Ludger ViefhuesExecutive Vice President — Finance and Chief Financial Officer
                  (Principal Financial and Accounting Officer)

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