# Patent

## Title
Semiconductor device

## Abstract

As semiconductor devices including semiconductors, logic circuits are given. Logic circuits include dynamic logic circuits and static logic circuits and are formed using transistors and the like. Dynamic logic circuits can store data for a certain period of time. Thus, leakage current from transistors causes more severe problems in dynamic logic circuits than in static logic circuits. A logic circuit includes a first transistor whose off-state current is small and a second transistor whose gate is electrically connected to the first transistor. Electric charge is supplied to a node of the gate of the second transistor through the first transistor. Electric charge is supplied to the node through a plurality of capacitors. On/off of the second transistor is controlled depending on a state of the electric charge. The first transistor includes an oxide semiconductor in a channel formation region.

## Background
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a semiconductor device including a semiconductor.
2. Description of the Related Art
As semiconductor devices including semiconductors, logic circuits are given. Logic circuits include dynamic logic circuits and static logic circuits and are formed using transistors and the like. Dynamic logic circuits can store data for a certain period of time. Thus, leakage current from transistors causes more severe problems in dynamic logic circuits than in static logic circuits. Leakage current is attributed to off-state current flowing when transistors are turned off.
For example, in a dynamic circuit, leakage current is high when a MOS transistor which controls supply of electric charge to a dynamic node is off, which is regarded as a problem. To solve this problem, a structure has been suggested in which a MOS transistor circuit is inserted into a current path to a dynamic node (Patent Document 1).
Further, another structure is suggested in which a leakage current detecting circuit that detects current corresponding to leakage current and, in addition, a leakage current correcting circuit that operates in correcting leakage current are provided in a dynamic circuit (Patent Document 2).
Furthermore, added functions of logic circuits have been under consideration. For example, a reconfigurable logic circuit which can have a property of being dynamically reconfigurable can be given. Suggested is a structure in which such a logic circuit includes a switching portion for switching between OR/AND and NOR/NAND/NOT (Patent Document 3).
The off-state current of a thin film transistor is 10−13 A to 10−14 A when Vgs is 0 V or lower (Patent Document 4).
REFERENCE


    [Patent Document 1] Japanese Published Patent Application No. H6-244714
    [Patent Document 2] Japanese Published Patent Application No. H10-022816
    [Patent Document 3] Japanese Published Patent Application No. 2010-087911
    [Patent Document 4] Japanese Published Patent Application No. H8-274342


SUMMARY OF THE INVENTION
An object of one embodiment of the present invention is to solve a problem of leakage current in a logic circuit.
Another object of one embodiment of the present invention is to make a logic circuit have a property of being dynamically reconfigurable.
In view of the above objects, provided is a logic circuit including at least a transistor whose off-state current is lower than that of a transistor included in an LSI.
It is possible to provide a logic circuit including such a transistor whose off-state current is low and thus having a property of being dynamically reconfigurable.
Provision of a transistor whose off-state current is low makes it possible to solve a problem of leakage current.
Provision of a transistor whose off-state current is low allows provision of a dynamically reconfigurable logic circuit.
A logic circuit according to one embodiment of the present invention has a circuit configuration simpler than a conventional circuit configuration.



BRIEF DESCRIPTION OF THE DRAWINGS
In the accompanying drawings:
FIG. 1 is a circuit diagram of a logic circuit according to one embodiment of the present invention;
FIG. 2 is a circuit diagram of a logic circuit according to one embodiment of the present invention;
FIG. 3 is a circuit diagram of a logic circuit according to one embodiment of the present invention;
FIG. 4A is a circuit diagram of a logic circuit according to one embodiment of the present invention and FIGS. 4B and 4C are timing charts;
FIGS. 5A and 5B are views illustrating structures of transistors;
FIGS. 6A to 6E are diagrams each illustrating a CAAC structure;
FIGS. 7A to 7C are diagrams illustrating a CAAC structure;
FIGS. 8A to 8C are diagrams illustrating a CAAC structure;
FIGS. 9A to 9E illustrate a method for manufacturing a transistor;
FIG. 10 is a graph showing the relation between gate voltage and field-effect mobility of a transistor;
FIGS. 11A and 11B are diagrams each illustrating a structure of a transistor;
FIGS. 12A to 12C are graphs each showing calculation results of electric characteristics of a transistor;
FIGS. 13A to 13C are graphs each showing calculation results of electric characteristics of a transistor;
FIGS. 14A to 14C are graphs each showing calculation results of electric characteristics of a transistor;
FIGS. 15A to 15C are graphs each showing calculation results of electric characteristics of a transistor;
FIGS. 16A and 16B are graphs each showing calculation results of electric characteristics of a transistor;
FIGS. 17A and 17B are graphs each showing calculation results of electric characteristics of a transistor;
FIG. 18 is a graph showing XRD measurement results of transistors;
FIG. 19 is a graph showing characteristics of a transistor;
FIG. 20 is a graph showing characteristics of a transistor;
FIGS. 21A and 21B are graphs each showing characteristics of a transistor;
FIG. 22 is a diagram illustrating an arithmetic processing unit including a logic circuit according to one embodiment of the present invention;
FIGS. 23A to 23D show electronic devices each including a logic circuit according to one embodiment of the present invention; and
FIGS. 24A and 24B are diagrams each illustrating a CAAC structure.



DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments will be described with reference to the accompanying drawings. However, the embodiments can be implemented in various modes. It will be readily appreciated by those skilled in the art that the modes and details can be changed in various ways without departing from the spirit and scope of the present invention. Therefore, one embodiment of the present invention should not be construed as being limited to the following descriptions of the embodiments.
Embodiment 1
In this embodiment, a basic structure of a logic circuit will be described. FIG. 1 illustrates a logic circuit including a plurality of capacitors (C1, . . . Cn), a first transistor (OSFET) 104 whose off-state current is low, and a second transistor (FET) 105.
The first transistor 104 is also referred to as an OSFET because it includes an oxide semiconductor in a channel formation region. A channel formation region including an oxide semiconductor has n-type conductivity in many cases; thus, the first transistor 104 is an n-channel transistor. The off-state current of such a transistor including an oxide semiconductor in a channel formation region is significantly low. The details of the transistor will be described in the following embodiment.
A transistor including silicon in a channel formation region is used as the second transistor 105 since the off state-current of the second transistor 105 is not necessarily as low as that of the first transistor 104. Such a transistor is referred to as an FET. A description will be given of the case where the second transistor has the same conductivity type as the first transistor, i.e., the case where the second transistor is an n-channel transistor.
The plurality of capacitors (C1, . . . Cn), the first transistor 104, and the second transistor 105 are electrically connected to one another as illustrated in FIG. 1. One electrode of each of the plurality of capacitors is electrically connected to a gate of the second transistor 105. One electrode of each of the plurality of capacitors is electrically connected to one of a source and a drain of the first transistor 104. Since the first transistor 104 is an n-channel transistor, the drain of the first transistor 104 is electrically connected to the one electrode of each of the plurality of capacitors.
The other electrode of a corresponding capacitor of the plurality of capacitors is electrically connected to the terminal A1, . . . An. Signals are input from the terminals A1, . . . An. In other words, a signal is input from the other electrode of a corresponding capacitor of the plurality of capacitors. Each of these signals has any of the following potentials: high potentials (also referred to as High, Vdd, H, and 1) and low potentials (also referred to as Low, Vss, L, and 0). A high potential and a low potential are relative. A low potential is not limited to 0 V.
On state or off state (also referred to as On/off) of the first transistor 104 is controlled by a signal input to a gate thereof. On/off of the second transistor 105 is controlled by a signal input to the gate thereof.
As illustrated in FIG. 1, the capacitance values of the plurality of capacitors (C1, . . . Cn) are denoted as C1, . . . Cn, respectively; electric charge of a node connected to the one electrode of the first capacitor is denoted as Q; the voltage of the node is denoted as Vg; and the gate capacitance of the second transistor 105 is denoted as Cg. The voltage Vg of the node is expressed in Formula 1. Assume that the source-drain voltage of the second transistor 105 is 0 V, for the sake of simplicity.




  
    
      
        Vg
        =
        
          
            
              C
              ⁢
              
                
              
              ⁢
              1
              ⁢
              V
              ⁢
              
                
              
              ⁢
              1
            
            +
            
              C
              ⁢
              
                
              
              ⁢
              2
              ⁢
              V
              ⁢
              
                
              
              ⁢
              2
            
            +
            ...
            +
            CnVn
            +
            Q
          
          
            
              C
              ⁢
              
                
              
              ⁢
              1
            
            +
            
              C
              ⁢
              
                
              
              ⁢
              2
            
            +
            ...
            +
            Cn
            +
            Cg
          
        
      
    
    
      
        [
        
          FORMULA
          ⁢
          
            
          
          ⁢
          1
        
        ]
      
    
  




In Formula 1, the numerator depends on the value of electric charge Q. In other words, the value of the numerator varies depending on a signal input through the first transistor 104. This is because the electric charge Q depends on a signal input through the first transistor 104. Since the off-state current of the first transistor 104 is significantly low, the value of electric charge Q input can be held. Unlike in a conventional technique, the value of electric charge Q input can be held without another element.
As is expressed by Formula 1, Vg is a function of the input signals (A1, A2, . . . An) and the electric charge Q. The function is denoted as Vg (A1, A2, . . . An)(Q). In this circuit, the second transistor 105 is turned on when Vg is larger than Vth, and is turned off when Vg is smaller than Vth (Vth indicates the threshold voltage of the second transistor 105).
For example, in the case where n=3 and C1=C2=C3 (=C) are satisfied, Vg depends on input signals and can have four values. That is, the following cases are given: V3=Vg (1,1,1)(Q); V2=Vg (1,1,0)(Q)=Vg (1,0,1)(Q)=Vg (0,1,1)(Q); V1=Vg (1,0,0)(Q)=Vg (0,1,0)(Q)=Vg (0,0,1)(Q); and V0=Vg (0,0,0)(Q). V0<V1<V2<V3 is satisfied.
As can be seen from Formula 1, when the value of the electric charge Q is varied, the values of V0, V1, V2, and V3 can be varied without changing the Magnitude relation. When the values of V0, V1, V2, and V3 are determined (specifically, when the magnitude relation with the threshold voltage Vth of the second transistor 105 is determined), the function of the circuit (truth table) is determined. The electric charge Q is determined by supplying (writing) a predetermined potential to the gate of the second transistor 105 through the first transistor 104. In other words, the electric charge Q can be controlled by the writing operation through the first transistor 104, resulting in determination of the function of the circuit.
The first transistor 104 is an OSFET and thus the leakage current is low. The first transistor 104 is turned off, whereby the electric charge Q can be held for a long time. Therefore, when writing through the first transistor 104 is not performed, the first transistor 104 is turned off, so that the function of the circuit (truth table) can be kept for a long time.
It is found that the circuit can be dynamically reconfigured so that the function of the circuit can be changed as needed.
Specific functions (truth table) will be described.
The electric charge Q is controlled, whereby V0<V1<V2<Vth<V3 can be satisfied. Assume that the electric charge which satisfies the above relation is Q3. In this case, when (A1, A2, A3) is (1,1,1), the second transistor 105 is turned on. Meanwhile, when the state of input signals is other than (1,1,1), the second transistor 105 is turned off.
The electric charge Q is controlled, whereby V0<V1<Vth<V2<V3 can be satisfied. Assume that the electric charge which satisfies the above relation is Q2. In this case, when (A1, A2, A3) is (1,1,1), (1,1,0), (1,0,1), or (0,1,1), the second transistor 105 is turned on. Meanwhile, when the state of input signals is other than (1,1,1), (1,1,0), (1,0,1), and (0,1,1), the second transistor 105 is turned off.
The electric charge Q is controlled, whereby V0<Vth<V1<V2<V3 can be satisfied. Assume that the electric charge which satisfies the above relation is Q1. In this case, when (A1, A2, A3) is (0,0,0), the second transistor 105 is turned off. Meanwhile, when the state of input signals is other than (0,0,0), the second transistor 105 is turned on. Table 1 is a truth table.














TABLE 1










Q = Q3
Q = Q2
Q = Q1



A1
A2
A3
FET(105)
FET(105)
FET(105)









1
1
1
ON
ON
ON



1
1
0
OFF
ON
ON



1
0
1
OFF
ON
ON



0
1
1
OFF
ON
ON



1
0
0
OFF
OFF
ON



0
1
0
OFF
OFF
ON



0
0
1
OFF
OFF
ON



0
0
0
OFF
OFF
OFF










Table 1 shows that a function of the circuit can be changed by controlling the electric charge Q.
The same generally applies to n. In the case where C1=C2= . . . =Cn (=C), Vg depends on input signals and can have (n+1) values. That is, the following cases are given: Vn=Vg (1, 1, . . . 1)(Q); V(n−1)=Vg (A1, A2, . . . An)(Q) (one of n input signals is a low-level signal); . . . ; V(1)=Vg (A1, A2, . . . An)(Q) (one of n input signals is a high-level signal); and V0=Vg (0, 0, . . . 0)(Q). The relation V0<V1<V2< . . . <Vn is satisfied.
As can be seen from Formula 1, when the value of the electric charge Q is varied, the values of V0, V1, V2, . . . Vn can be varied without changing the magnitude relation. When the values of V0, V1, V2, . . . Vn are determined (specifically, when the magnitude relation with the threshold voltage Vth of the second transistor 105 is determined), the function of the circuit (truth table) is determined. The electric charge Q is determined by supplying (writing) a predetermined potential to the gate of the second transistor 105 through the first transistor 104. In other words, the electric charge Q can be controlled by the writing operation through the first transistor 104, resulting in determination of the function of the circuit.
The first transistor 104 is an OSFET and thus the leakage current is low. The first transistor 104 is turned off, whereby the electric charge Q can be held for a long time. Therefore, when writing through the first transistor 104 is not performed, the first transistor 104 is turned off, so that the function of the circuit (truth table) can be kept for a long time.
It is found that the circuit can be dynamically reconfigured so that the function of the circuit can be changed as needed.
Specific functions of the circuit (truth table) will be described. The electric charge Q is controlled, whereby V(k−1)<Vth<Vk (k is 1 to n) can be satisfied. Assume that the electric charge which satisfies the above relation is Qk. In this case, when k or more input signals of n input signals of (A1, A2, . . . An) are high-level signals, the second transistor 105 is turned on. Meanwhile, when the state of input signals is other than the above state, the second transistor 105 is turned off.
Table 2 is a truth table.










TABLE 2








Q = Qk



Input
FET(105)













  
    
      ∑
      
        i
        =
        1
      
      n
    
    ⁢
    
      
    
    ⁢
    Ai
  
  ≥
  k




ON



 







  
    
      ∑
      
        i
        =
        1
      
      n
    
    ⁢
    
      
    
    ⁢
    Ai
  
  <
  k




OFF










Table 2 shows that the function of the circuit can be Changed by controlling the electric charge Q. In the circuit, the second transistor 105 is turned on when k or more input signals are high-level signals. The term k can be varied depending on the electric charge Q.
Further, the circuit is effective also in the case where C1, C2, . . . Cn vary. In this case, Vg depends on input signals and can have at most 2′′ values. A set including these values as elements is denoted as {Vg}.
As can be seen from Formula 1, when the value of the electric charge Q is varied, the value of {Vg} can be varied without changing the magnitude relation. The function of the circuit (truth table) depends on the magnitude relation with the threshold voltage Vth of the second transistor 105. The electric charge Q is determined by supplying (writing) a predetermined potential to the gate of the second transistor 105 through the first transistor 104. In other words, the electric charge Q can be controlled by the writing operation through the first transistor 104, resulting in determination of a function of the circuit.
The first transistor 104 is an OSFET and thus the leakage current is low. The first transistor 104 is turned off, whereby the electric charge Q can be held for a long time. Therefore, when writing through the first transistor 104 is not performed, the first transistor 104 is turned off, so that the function of the circuit (truth table) can be kept for a long time.
It is found that the circuit can be dynamically reconfigured so that the function of the circuit can be changed as needed.
For example, input signals which allow satisfaction of Vth<Vg (Vg (A1, A2, . . . An))(Q) when Q is a predetermined value (this set is denoted as {(A1, A2, . . . An)} (Vth<Vg, Q)) are input, so that the second transistor 105 is turned on. Meanwhile, input signals which allow satisfaction of Vth>Vg (Vg (A1, A2, . . . An))(Q) (this set is denoted as {(A1, A2, . . . An)}(Vth>Vg, Q)) are input, so that the second transistor 105 is turned off. The set varies depending on the electric charge Q. As the electric charge Q is larger, the number of sets of signals input to turn off the second transistor 105 is reduced. Thus, a function of the circuit can be changed by controlling the electric charge Q. In the circuit where C1 to Cn vary, the capacitors are used for weighting of signals unlike in a circuit where C1 to Cn are the same.
When a transistor including an oxide semiconductor in a channel formation region is used as the first transistor 104, the logic circuit can have both a function of performing logic operation and a function of storing data.
According to one embodiment of the present invention, since dynamic reconfiguration can be performed when a transistor (OSFET) is turned on, a pulse may be applied to a gate of the transistor. Thus, the state of the transistor can be determined in a short time.
The dynamic reconfiguration according to one embodiment of the present invention is not adversely affected by an input signal because the function can be controlled independently of an input signal.
According to one embodiment of the present invention, a problem of leakage current can be solved.
According to one embodiment of the present invention, dynamic reconfiguration can be performed.
According to one embodiment of the present invention, the circuit configuration is simpler than a conventional circuit configuration.
Embodiment 2
In this embodiment, a basic structure of a logic circuit in which the second transistor described in Embodiment 1 is a p-channel transistor will be described. FIG. 2 illustrates a logic circuit including the plurality of capacitors (C1, . . . Cn), the first transistor (OSFET) 104 whose off-state current is low, and a second transistor (FET) 205. The second transistor 205 is a p-channel transistor.
The plurality of capacitors (C1, . . . Cn), the first transistor 104, and the second transistor 205 are electrically connected to one another as illustrated in FIG. 2. One electrode of each of the plurality of capacitors is electrically connected to a gate of the second transistor 205. The one electrode of each of the plurality of capacitors is also electrically connected to one of a source and a drain of the first transistor 104. Since the first transistor 104 is an n-channel transistor, the drain of the first transistor 104 is electrically connected to the one electrode of each of the plurality of capacitors.
The other electrode of a corresponding capacitor of the plurality of capacitors is electrically connected to the terminal A1, . . . An. High-level signals, a high-level signal (high-level signals) and low-level signals (a low-level signal), or low-level signals are input from the terminals A1, . . . An.
On state or off state (also referred to as On/off) of the first transistor 104 is controlled by a signal input to a gate thereof. On/off of the second transistor 205 is controlled by a signal input to the gate thereof.
As illustrated in FIG. 2, the capacitance values of the plurality of capacitors (C1, . . . Cn) are denoted as C1, . . . Cn, respectively, electric charge of a node electrically connected to the one electrode of a first capacitor is denoted as Q, the voltage of the node is denoted as Vg, and the gate capacitance of the second transistor 205 is denoted as Cg. Vg is expressed by Formula 2. Assume that the source-drain voltage of the second transistor 205 is Vdd, for the sake of simplicity.




  
    
      
        Vg
        =
        
          
            
              C
              ⁢
              
                
              
              ⁢
              1
              ⁢
              V
              ⁢
              
                
              
              ⁢
              1
            
            +
            
              C
              ⁢
              
                
              
              ⁢
              2
              ⁢
              V
              ⁢
              
                
              
              ⁢
              2
            
            +
            ...
            +
            CnVn
            +
            Q
            +
            CgVdd
          
          
            
              C
              ⁢
              
                
              
              ⁢
              1
            
            +
            
              C
              ⁢
              
                
              
              ⁢
              2
            
            +
            ...
            +
            Cn
            +
            Cg
          
        
      
    
    
      
        [
        
          FORMULA
          ⁢
          
            
          
          ⁢
          2
        
        ]
      
    
  




In Formula 2, the numerator depends on the value of electric charge Q. In other words, the value of the numerator varies depending on a signal input through the first transistor 104. This is because the electric charge Q depends on a signal input through the first transistor 104. Since the off-state current of the first transistor 104 is significantly low, the value of electric charge Q input can be held. Unlike in a conventional technique, the value of electric charge Q input can be held without another element.
As is expressed by the Formula 2, Vg is a function of the input signals (A1, A2, . . . An) and the electric charge Q. The function is denoted as Vg (A1, A2, . . . An)(Q). In this circuit, the second transistor 205 is turned off when Vg is larger than Vthp, and is turned on when Vg is smaller than Vthp (Vthp indicates the threshold value of the second transistor 205).
For example, in the case where n=3 and C1=C2=C3 (=C) are satisfied, Vg depends on input signals and can have four values. That is, the following cases are given: V3=Vg (1,1,1)(Q); V2=Vg (1,1,0)(Q)=Vg (1,0,1)(Q)=Vg (0,1,1)(Q); V1=Vg (1,0,0)(Q)=Vg (0,1,0)(Q)=Vg (0,0,1)(Q); and V0=Vg (0,0,0)(Q). V0<V1<V2<V3 is satisfied.
As can be seen from Formula 2, when the value of the electric charge Q is varied, the values of V0, V1, V2, and V3 can be varied without changing the magnitude relation. When the values of V0, V1, V2, and V3 are determined (specifically, when the magnitude relation with the threshold voltage Vthp of the second transistor 205 is determined), a function of the circuit (truth table) is determined. The electric charge Q is determined by supplying (writing) a predetermined potential to the gate of the second transistor 205 through the first transistor 104. In other words, the electric charge Q can be controlled by the writing operation through the first transistor 104, resulting in determination of a function of the circuit.
The first transistor 104 is an OSFET and thus the leakage current is low. The first transistor 104 is turned off, whereby the electric charge Q can be held for a long time. Therefore, when writing through the first transistor 104 is not performed, the first transistor 104 is turned off, so that the function of the circuit (truth table) can be kept for a long time.
It is found that the circuit can be dynamically reconfigured so that the function of the circuit can be changed as needed.
Specific functions (truth table) will be described.
The electric charge Q is controlled, whereby V0<V1<V2<Vthp<V3 can be satisfied. Assume that the electric charge which satisfies the above relation is Q3p. In this case, when (A1, A2, A3) is (1,1,1), the second transistor 205 is turned off. Meanwhile, when the state of input signals is other than (1,1,1), the second transistor 205 is turned on.
The electric charge Q is controlled, whereby V0<V1<Vthp<V2<V3 can be satisfied. Assume that the electric charge which satisfies the above relation is Q2p. In this case, when (A1, A2, A3) is (1,1,1), (1,1,0), (1,0,1), or (0,1,1), the second transistor 205 is turned off. Meanwhile, when the state of input signals is other than (1,1,1), (1,1,0), (1,0,1), and (0,1,1), the second transistor 205 is turned on.
The electric charge Q is controlled, whereby V0<Vthp<V1<V2<V3 can be satisfied. Assume that the electric charge which satisfies the above relation is Q1p. In this case, when (A1, A2, A3) is (0,0,0), the second transistor 205 is turned on. Meanwhile, when the state of input signals is other than (0,0,0), the second transistor 205 is turned off.
Table 3 is a truth table.














TABLE 3










Q = Qp3
Q = Qp2
Q = Qp1



A1
A2
A3
FET(205)
FET(205)
FET(205)









1
1
1
OFF
OFF
OFF



1
1
0
ON
OFF
OFF



1
0
1
ON
OFF
OFF



0
1
1
ON
OFF
OFF



1
0
0
ON
ON
OFF



0
1
0
ON
ON
OFF



0
0
1
ON
ON
OFF



0
0
0
ON
ON
ON










Table 3 shows that a function of the circuit can be changed by controlling the electric charge Q.
The same generally applies to n. In the case where C1=C2= . . . =Cn (=C), Vg depends on input signals and can have (n+1) values. That is, the following cases are given: Vn=Vg (1, 1, . . . 1)(Q); V(n−1)=Vg (A1, A2, . . . An)(Q) (one of n input signals is a low-level signal); . . . ; V(1)=Vg (A1, A2, . . . An)(Q) (one of n input signals is a high-level signal); and V0=Vg (0, 0, . . . 0)(Q). The relation V0<V1<V2< . . . <Vn is satisfied.
As can be seen from Formula 2, when the value of the electric charge Q is varied, the values of V0, V1, V2, . . . Vn can be varied without changing the magnitude relation. When the values of V0, V1, V2, . . . Vn are determined (specifically, when the magnitude relation with the threshold voltage Vthp of the second transistor 205 is determined), a function of the circuit (truth table) is determined. The electric charge Q is determined by supplying (writing) a predetermined potential to the gate of the second transistor 205 through the first transistor 104. In other words, the electric charge Q can be controlled by the writing operation through the first transistor 104, resulting in determination of the function of the circuit.
The leakage current of the first transistor 104 is low; thus, the first transistor 104 is turned off, whereby the electric charge Q can be held for a long time. Therefore, when writing through the first transistor 104 is not performed, the first transistor 104 is turned off, so that the function of the circuit (truth table) can be kept for a long time.
It is found that the circuit can be dynamically reconfigured so that the function of the circuit can be changed as needed.
Specific functions of the circuit (truth table) will be described. The electric charge Q is controlled, whereby V(k−1)<Vth<Vk (k is 1 to n) can be satisfied. Assume that the electric charge which satisfies the above relation is Qkp. In this case, when k or more input signals of n input signals of (A1, A2, . . . An) are high-level signals, the second transistor 205 is turned off. Meanwhile, when the state of input signals is other than the above state, the second transistor 205 is turned on.
Table 4 is a truth table.










TABLE 4








Q = Qkp



Input
FET(105)













  
    
      ∑
      
        i
        =
        1
      
      n
    
    ⁢
    
      
    
    ⁢
    Ai
  
  ≥
  k




OFF



 







  
    
      ∑
      
        i
        =
        1
      
      n
    
    ⁢
    
      
    
    ⁢
    Ai
  
  <
  k




ON










Table 4 shows that the function of the circuit can be changed by controlling the electric charge Q. In the circuit, the second transistor 205 is turned off when k or more input signals are high-level signals. The term k can be varied depending on the electric charge Q.
Further, the circuit is effective also in the case where C1, C2, . . . Cn vary. In this case, Vg depends on input signals and can have at most 2n values. A set including these values as elements is denoted as {Vg}.
As can be seen from Formula 2, when the value of the electric charge Q is varied, the value of {Vg} can be varied without changing the magnitude relation. A function of the circuit (truth table) depends on the magnitude relation with the threshold voltage Vth of the second transistor 205. The electric charge Q is determined by supplying (writing) a potential to the gate of the second transistor 205 through the first transistor 104. In other words, the electric charge Q can be controlled by the writing operation through the first transistor 104, resulting in determination of a function of the circuit (truth table).
The leakage current of the first transistor 104 is low; thus, the first transistor 104 is turned off, whereby the electric charge Q can be held for a long time. Therefore, when writing through the first transistor 104 is not performed, the first transistor 104 is turned off, so that the function of the circuit (truth table) can be kept for a long time.
It is found that the circuit can be dynamically reconfigured so that the function of the circuit can be changed as needed.
For example, input signals which allow satisfaction of Vthp<Vg (Vg (A1, A2, . . . An))(Q) when the electric charge Q is a predetermined value (this set is denoted as {(A1, A2, . . . An)}(Vthp<Vg, Q)) are input, so that the second transistor 205 is turned off. Meanwhile, input signals which allow satisfaction of Vthp>Vg (Vg (A1, A2, . . . An))(Q) (this set is denoted as {(A1, A2, . . . An)}(Vthp>Vg, Q)) are input, so that the second transistor 205 is turned on. The set varies depending on the electric charge Q. As the electric charge Q is larger, the number of sets of signals input to turn on the second transistor 205 is reduced. Thus, a function of the circuit can be changed by controlling the electric charge Q. In the circuit where C1 to Cn vary, the capacitors are used for weighting of signals unlike in a circuit where C1 to Cn are the same.
When a transistor including an oxide semiconductor in a channel formation region is used as the first transistor 104, the logic circuit can have both a function of performing logic operation and a function of storing data.
According to one embodiment of the present invention, since dynamic reconfiguration can be performed when the first transistor (OSFET) 104 is turned on, a pulse may be applied to a gate of the first transistor 104. Thus, the state of the transistor can be determined in a short time.
The dynamic reconfiguration according to one embodiment of the present invention is not adversely affected by an input signal because the function can be controlled independently of an input signal.
According to one embodiment of the present invention, a problem of leakage current can be solved.
According to one embodiment of the present invention, dynamic reconfiguration can be performed.
According to one embodiment of the present invention, the circuit configuration is simpler than a conventional circuit configuration.
Embodiment 3
In this embodiment, a logic circuit in which the circuit described in Embodiment 1 is combined with the circuit described in Embodiment 2 will be described.
In the circuit described in Embodiment 1 (see FIG. 1), the second transistor 105 is an n-channel transistor. In the circuit described in Embodiment 2 (see FIG. 2), the second transistor 205 is a p-channel transistor. These circuits can be combined to form a CMOS circuit.
FIG. 3 illustrates a CMOS circuit including a plurality of first capacitors (C1, . . . Cn), a plurality of second capacitors (CS1, . . . CSn), a first transistor (OSFET) 504, a second transistor (OSFET) 514, a third transistor 205, and a fourth transistor 105. The third transistor 205 and the fourth transistor 105 are a p-channel transistor and an n-channel transistor, respectively.
These components are electrically connected to one another as illustrated in FIG. 3. The other electrode of a first capacitor of the plurality of first capacitors is electrically connected to a corresponding terminal of a plurality of terminals A1, . . . An. The other electrode of a second capacitor of the plurality of second capacitors is electrically connected to a corresponding terminal of the plurality of terminals A1, . . . An. Signals are input from the plurality of terminals A1, . . . An (IN). One of a source and a drain of the first transistor (OSFET) 504 is electrically connected to one electrode of each of the plurality of first capacitors. The one of the source and the drain of the first transistor (OSFET) 504 is electrically connected to a gate of the third transistor (FET) 205. Electric charge of a node connected to the gate of the third transistor (FET) 205
is denoted as Qp. Since the first transistor 504 is an n-channel transistor, the drain of the first transistor 504 is electrically connected to the gate of the third transistor (FET) 205. One of a source and a drain of the second transistor (OSFET) 514 is electrically connected to one electrode of each of the plurality of second capacitors. The one of the source and the drain of the second transistor (OSFET) 514 is electrically connected to a gate of the fourth transistor (FET) 105. Electric charge of a node connected to the gate of the fourth transistor (FET) 105 is denoted as Qn. Since the second transistor 514 is an n-channel transistor, the drain of the second transistor 514 is electrically connected to the gate of the fourth transistor (FET) 105. One of a source and a drain of the third transistor 205 is electrically connected to one of a source and a drain of the fourth transistor 105 and signals are output from the one of the source and the drain of the third transistor 205 and the one of the source and the drain of the fourth transistor 105 (OUT).
Table 5 shows the relation between input signals input to the plurality of terminals and output signal (OUT). Note that Qp=Qkp and Qn=Qk are satisfied.










TABLE 5








Qp = Qkp, Qn = Qk



Input
OUT













  
    
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Thus, even a CMOS circuit can be dynamically reconfigured.
Further, even a CMOS circuit can have a circuit configuration simpler than a conventional configuration.
Embodiment 4
In this embodiment, a logic circuit in which another element is provided to perform AND operation and OR operation will be described.
FIG. 4A illustrates a logic circuit including the plurality of capacitors (C1, . . . Cn), the first transistor (OSFET) 104 whose off-state current is low, the second transistor (FET) 205, a third transistor (OSFET) 311, a fourth transistor (OSFET) 312, and an inverter 313.
The logic circuit in FIG. 4A is different from the logic circuit in FIG. 2 in that the third transistor (OSFET) 311, the fourth transistor (OSFET) 312, and the inverter 313 are additionally provided.
The first transistor 104, the third transistor 311, and the fourth transistor 312 are also denoted as OSFETs because they include oxide semiconductors in channel formation regions. A channel formation region including an oxide semiconductor has n-type conductivity in many cases; thus, the first transistor, the third transistor, and the fourth transistor are n-channel transistors. The off-state current of such a transistor including an oxide semiconductor in a channel formation region is significantly low. A transistor including an oxide semiconductor does not always have to be applied to the third transistor and the fourth transistor since the off state-current of the third transistor and the fourth transistor is not necessarily as low as that of the first transistor.
A transistor including silicon in a channel formation region is used as the second transistor since the off state-current of the second transistor is not necessarily as low as that of the first transistor, the third transistor, and the fourth transistor. The second transistor 205 is a p-channel transistor.
The plurality of capacitors (C1, . . . Cn), the first transistor 104, the second transistor 205, the third transistor 311, the fourth transistor 312, and the inverter 313 are electrically connected to one another as illustrated in FIG. 4A. One electrode of each of the plurality of capacitors is electrically connected to a gate of the second transistor 205. One electrode of each of the plurality of capacitors is electrically connected to one of a source and a drain of the first transistor 104. When the first transistor 104 is an n-channel transistor, the drain of the first transistor 104 is electrically connected to the one electrode of each of the plurality of capacitors. One of a source and a drain of the second transistor 205 is electrically connected to one of a source and a drain of the third transistor 311. The other of the source and the drain of the third transistor 311 is electrically connected to one of a source and a drain of the fourth transistor 312. The other of the source and the drain of the third transistor 311 and the one of the source and the drain of the fourth transistor 312 are electrically connected to a first terminal of the inverter 313. The first terminal of the inverter 313 is an input terminal. From a second terminal of the inverter 313, signals are output. A second terminal of the inverter 313 is an output terminal.
On/off of the first transistor 104 is controlled by a signal input to a gate thereof. On/off of the second transistor 205 is controlled by a signal input to the gate thereof. The other electrode of a corresponding capacitor of the plurality of capacitors is electrically connected to the terminal A1, . . . An. Signals are input from the terminals A1, . . . An. These signals are high-level signals and low-level signals. Thus, on/off of the second transistor 205 is controlled in a manner similar to that described in Embodiment 2. When the second transistor 205 is on, Vdd is applied.
On/off of the third transistor 311 is controlled by a signal input to a gate thereof. On/off of the fourth transistor 312 is controlled by a signal input to a gate thereof. A control signal S1 is input to the gate of the third transistor 311. The control signal S1 is a high-level signal or a low-level signal. A control signal S2 is input to the gate of the fourth transistor 312. The control signal S2 is a high-level signal or a low-level signal.
Operations of the logic circuit in FIG. 4A will be described with reference to FIGS. 4B and 4C. Assume that Q=Qkp (corresponding to Table 4) is held and high-level signals are being input to the terminals A1, A2, . . . An. In this case, the second transistor 205 is off. First, the control signal S1 remains at a low level and a control signal S2 becomes at a high level. In response, the third transistor 311 is turned off and the fourth transistor 312 is turned on. The potential of a node FN becomes Vss and an inverter output OUT becomes at a high level.
Then, the control signal S2 becomes at a low level, and the control signal S1 becomes at a high level. In response, the third transistor 311 is turned on, and the fourth transistor 312 is turned off. The second transistor 205 is off and thus the potential of the node FN remains Vss. (Although the potential of the node FN rises gradually due to the leakage current of the second transistor 205, the node FN is maintained at the potential close to Vss for a short time.) Thus, the inverter output OUT remains at a high level.
As a result of the above operations, an output signal also becomes at a high level when Q=Qkp (corresponding to Table 4) is held and high-level signals are input to the terminals A1, A2, . . . An.
Assume that Q=Qkp (corresponding to Table 4) is held and low-level signals are being input to the terminals A1, A2, . . . An in FIG. 4C. In this case, the second transistor 205 is on. First, the control signal S1 remains at a low level and the control signal S2 becomes at a high level. In response, the third transistor 311 is turned off and the fourth transistor 312 is turned on. The potential of a node FN becomes Vss and the inverter output OUT becomes at a high level.
Then, the control signal S2 becomes at a low level, and the control signal 51 becomes at a high level. In response, the third transistor 311 is turned on, and the fourth transistor 312 is turned off. The second transistor 205 is on and thus the potential of the node FN becomes Vdd. Thus, the inverter output OUT becomes at a low level.
As a result of the above operations, an output signal also becomes at a low level when Q=Qkp (corresponding to Table 4) is held and low-level signals are input to the terminals A1, A2, . . . An.
Note that when the control signal S2 and the control signal S1 become at a low level, the third transistor 311 and the fourth transistor 312 are turned off, so that the potential of the node FN is maintained. The potential of the node FN can be stably retained for a long time because it is maintained by the off state of the OSFETs.
The above operations show that the circuit in FIG. 4A outputs a low-level signal when the second transistor 205 is on, and outputs a high-level signal when the second transistor 205 is off. Thus, a truth table of the circuit illustrated in FIG. 4A is obtained based on Table 4. Table 6 is the truth table. Assume that Q=Qkp is satisfied.










TABLE 6








Q = Qkp



Input
OUT













  
    
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Such a logic circuit needs to hold the node potential on the input terminal side of the inverter 313. Instead of the inverter 313, a switch, a buffer, or the like can be provided.
Embodiment 5
In this embodiment, a description will be given of field-effect transistors which are applicable to transistors (e.g., the first transistor, the third transistor, and the fourth transistor) whose off-state current needs to be low in the logic circuit according to any of the above embodiments. The field-effect transistors each include an oxide semiconductor layer in a channel formation region.
Structural examples of the transistors in this embodiment will be described with reference to FIGS. 5A and 5B.
A transistor in FIG. 5A includes a conductive layer 601—a, an insulating layer 602—a, a semiconductor layer 603—a, a conductive layer 605a—a, and a conductive layer 605b—a. 
The semiconductor layer 603—a includes a region 604a—a and a region 604b—a, which are apart from each other and to each of which a dopant is added. A region between the region 604a—a and the region 604b—a serves as a channel formation region. The semiconductor layer 603—a is provided over an element formation layer 600—a. Although it is not necessary to provide the region 604a—a and the region 604b—a, provision of the region 604a—a and the region 604b—a leads to a reduction in resistance and an increase in mobility in some cases.
The conductive layer 605a—a and the conductive layer 605b—a are provided over the semiconductor layer 603—a to be electrically connected to the semiconductor layer 603—a. Further, side surfaces (on the inner side) of the conductive layer 605a—a and the conductive layer 605b—a are tapered. The region 604a—a and the region 604b—a can be formed using the conductive layer 605a—a and the conductive layer 605b—a as part of a mask.
The conductive layer 605a—a overlaps with the region 604a—a so that the resistance between the conductive layer 605a—a and the region 604a—a can be small. However, one embodiment of the present invention is not necessarily limited thereto.
Further, a region of the semiconductor layer 603—a which overlaps with the conductive layer 605a—a may be wholly the region 604a—a to which a dopant is added. However, one embodiment of the present invention is not necessarily limited thereto.
The conductive layer 605b—a overlaps with the region 604b—a so that the resistance between the conductive layer 605b—a and the region 604b—a can be small. However, one embodiment of the present invention is not necessarily limited thereto. Further, a region of the semiconductor layer 603—a which overlaps with the conductive layer 605b—a may be wholly the region 604b—a to which a dopant is added.
The insulating layer 602—a is provided over the semiconductor layer 603—a, the conductive layer 605a—a, and the conductive layer 605b—a. The insulating layer 602—a serves as a gate insulating film.
The conductive layer 601—a is provided over part of the insulating layer 602—a and overlaps with the semiconductor layer 603—a with the insulating layer 602—a interposed therebetween. A region of the semiconductor layer 603—a which overlaps with the conductive layer 601—a with the insulating layer 602—a interposed therebetween is the channel formation region. The region 604a—a and the region 604b—a can be formed using the conductive layer 601a as part of a mask.
A transistor in FIG. 5B includes a conductive layer 601—b, an insulating layer 602—b, a semiconductor layer 603—b, a conductive layer 605a—b, a conductive layer 605b—b, an insulating layer 606a, an insulating layer 606b, and an insulating layer 607.
The semiconductor layer 603—b includes a region 604a—b and a region 604b—b, which are apart from each other and to each of which a dopant is added. The semiconductor layer 603—b is, for example, provided over an element formation layer 600—b and electrically connected to the conductive layer 605a—b and the conductive layer 605b—b. Although it is not necessary to provide the region 604a—b and the region 604b—b, provision of the region 604a—b and the region 604b—b leads to a reduction in resistance and an increase in mobility in some cases.
The insulating layer 602—b is provided over part of the semiconductor layer 603—b. 
The conductive layer 601—b is provided over part of the insulating layer 602—b and overlaps with the semiconductor layer 603—b with the insulating layer 602—b interposed therebetween. A region of the semiconductor layer 603—b which overlaps with the conductive layer 601—b with the insulating layer 602—b interposed therebetween is a channel formation region of the transistor. Note that an insulating layer may be provided over the conductive layer 601—b. 
The insulating layer 606a is provided over the insulating layer 602—b and is in contact with one of a pair of side surfaces of the conductive layer 601—b. The insulating layer 606b is provided over the insulating layer 602—b and is in contact with the other, of the pair of side surfaces of the conductive layer 601—b. The insulating layer 606a and the insulating layer 606b are called sidewalls.
Note that the concentration of the dopant of part of the region 604a—b and part of the region 604b—b which overlap with the insulating layer 606a and the insulating layer 606b, respectively, with the insulating layer 602—b interposed therebetween may be lower than that of part of the dopant of the region 604a—b and part of the region 604b—b which do not overlap with the insulating layer 606a and the insulating layer 606b, respectively. The concentration of the dopant may be lowered gradually toward the channel formation region.
The conductive layer 605a—b and the conductive layer 605b—b are provided over the semiconductor layer 603—b. 
The conductive layer 605a—b is electrically connected to the region 604a—b. Further, the conductive layer 605a—b is in contact with the insulating layer 606a. 
The conductive layer 605b—b is electrically connected to the region 604b—b. Further, the conductive layer 605b—b is in contact with the insulating layer 606b. 
The insulating layer 606a can prevent the contact between the conductive layer 601—b and the conductive layer 605a—b. The insulating layer 606b can prevent the contact between the conductive layer 601—b and the conductive layer 605b—b. 
The insulating layer 607 is provided over the conductive layer 601—b, the conductive layer 605a—b, the conductive layer 605b—b, the insulating layer 606a, and the insulating layer 606b. 
Further, the components illustrated in FIGS. 5A and 5B will be described.
As the element formation layer 600—a and the element formation layer 600—b, insulating layers, substrates having insulating surfaces, or the like can be used, for example. Alternatively, layers over which elements are formed in advance can be used as the element formation layer 600—a and the element formation layer 600—b. 
Each of the conductive layers 601—a and 601—b functions as a gate of the transistor. Note that a layer functioning as a gate of the transistor is also referred to as a gate electrode or a gate wiring.
As each of the conductive layers 601—a and 601—b, it is possible to use, for example, a layer of a metal material such as molybdenum, magnesium, titanium, chromium, tantalum, tungsten, aluminum, copper, neodymium, or scandium or an alloy material containing any of these materials as a main component. A stack of any of the metal materials, a stack of any of the alloy materials, or a stack of them may be used for each of the conductive layers 601—a and 601—b. The work functions of these materials are considered.
Each of the insulating layers 602—a and 602—b functions as a gate insulating layer of the transistor.
As each of the insulating layers 602—a and 602—b, for example, a silicon oxide layer, a silicon nitride layer, a silicon oxynitride layer, a silicon nitride oxide layer, an aluminum oxide layer, an aluminum nitride layer, an aluminum oxynitride layer, an aluminum nitride oxide layer, a hafnium oxide layer, or a lanthanum oxide layer can be used. Alternatively, each of the insulating layers 602—a and 602—b may be formed using a stack of any of the above materials.
Alternatively, as each of the insulating layers 602—a and 602—b, an insulating layer of a material containing, for example, an element that belongs to Group 13 in the periodic table and oxygen may be used. For example, when each of the semiconductor layers 603—a and 603—b contains an element that belongs to Group 13, the use of insulating layers each containing an element that belongs to Group 13 as insulating layers in contact with the semiconductor layers 603—a and 603—b enables the states of interfaces between the insulating layers and the oxide semiconductor layers to be favorable.
Examples of the material containing an element that belongs to Group 13 and oxygen include gallium oxide, aluminum oxide, aluminum gallium oxide, and gallium aluminum oxide. Note that aluminum gallium oxide refers to a substance in which the amount of aluminum is larger than that of gallium in atomic percent, and gallium aluminum oxide refers to a substance in which the amount of gallium is larger than or equal to that of aluminum in atomic percent. For example, a material represented by Al2Ox (x=3+a, where a is larger than 0 and smaller than 1), Ga2Ox (x=3+a, where a is larger than 0 and smaller than 1), or GaxAl2-xO3+a (x is larger than 0 and smaller than 2 and a is larger than 0 and smaller than 1) may be used.
Each of the insulating layers 602—a and 602—b can be formed using a stack of any of the above materials which can be used for the insulating layers 602—a and 602—b. For example, each of the insulating layers 602—a and 602—b can be formed using a stack of a plurality of layers containing gallium oxide represented by Ga2Ox. Alternatively, each of the insulating layers 602—a and 602—b may be formed using a stack of an insulating layer containing gallium oxide represented by Ga2Ox and an insulating layer containing aluminum oxide represented by Al2Ox.
Each of the semiconductor layers 603—a and 603—b functions as a layer in which a channel of the transistor is formed. As oxide semiconductors which can be applied to the semiconductor layer 603—a and the semiconductor layer 603—b, for example, an In-based oxide (e.g., indium oxide), a Sn-based oxide (e.g., tin oxide), and a Zn-based oxide (e.g., zinc oxide) can be given.
As the metal oxide, a four-component metal oxide, a three-component metal oxide, or a two-component metal oxide may be used, for example. Note that a metal oxide which can be used as the above oxide semiconductor may contain gallium as a stabilizer for reducing variation in characteristics. A metal oxide which can be used as the above oxide semiconductor may contain tin as a stabilizer. A metal oxide which can be used as the above oxide semiconductor may contain hafnium as a stabilizer. A metal oxide which can be used as the above oxide semiconductor may contain aluminum as a stabilizer. A metal oxide which can be used as the above oxide semiconductor may contain one or more of following materials as a stabilizer: lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium which are lanthanoid. Further, the metal oxide that can be used as the oxide semiconductor may contain silicon oxide.
For example, as a four-component metal oxide, an In—Sn—Ga—Zn-based oxide, an In—Hf—Ga—Zn-based oxide, an In—Al—Ga—Zn-based oxide, an In—Sn—Al—Zn-based oxide, an In—Sn—Hf—Zn-based oxide, an In—Hf—Al—Zn-based oxide, or the like can be used.
As a three-component metal oxide, for example, an In—Ga—Zn-based oxide (also referred to as IGZO), an In—Sn—Zn-based oxide, an In—Al—Zn-based oxide, a Sn—Ga—Zn-based oxide, an Al—Ga—Zn-based oxide, a Sn—Al—Zn-based oxide, an In—Hf—Zn-based oxide, an In—La—Zn-based oxide, an In—Ce—Zn-based oxide, an In—Pr—Zn-based oxide, an In—Nd—Zn-based oxide, an In—Sm—Zn-based oxide, an In—Eu—Zn-based oxide, an In—Gd—Zn-based oxide, an In—Tb—Zn-based oxide, an In—Dy—Zn-based oxide, an In—Ho—Zn-based oxide, an In—Er—Zn-based oxide, an In—Tm—Zn-based oxide, an In—Yb—Zn-based oxide, an In—Lu—Zn-based oxide, or the like can be used.
As the binary metal oxide, for example, an In—Zn-based oxide, a Sn—Zn-based oxide, an Al—Zn-based oxide, a Zn—Mg-based oxide, a Sn—Mg-based oxide, an In—Mg-based oxide, an In—Sn-based oxide, an In—Ga-based oxide, or the like can be used.
Note that, for example, an In—Ga—Zn-based oxide means an oxide containing In, Ga, and Zn, and there is no limitation on the composition ratio of In, Ga, and Zn. The In—Ga—Zn-based oxide may further contain a metal element other than In, Ga, and Zn.
As the oxide semiconductor, a material represented by InLO3 (ZnO)m (m is larger than 0) may be used. Here, L in InLO3(ZnO)m represents one or more metal elements selected from Ga, Al, Mn, and Co.
For example, an In—Ga—Zn-based oxide with an atomic ratio of In:Ga:Zn=1:1:1 (=1/3:1/3:1/3) or In:Ga:Zn=2:2:1 (=2/5:2/5:1/5), or any of oxides whose composition is in the neighborhood of the above compositions can be used as the, oxide semiconductor. Alternatively, an In—Sn—Zn-based oxide with an atomic ratio of In:Sn:Zn=1:1:1 (=1/3:1/3:1/3), In:Sn:Zn=2:1:3 (=1/3:1/6:1/2), or In:Sn:Zn=2:1:5 (=1/4:1/8:5/8), or any of oxides whose composition is in the neighborhood of the above compositions may be used as the oxide semiconductor.
Note that one embodiment of the disclosed invention is not limited thereto, and a material having appropriate composition depending on semiconductor characteristics (mobility, threshold voltage, variation, and the like) may be used. Further, it is preferable to appropriately set the carrier concentration, the impurity concentration, the defect density, the atomic ratio of a metal element and oxygen, the interatomic distance, the density, or the like in order to obtain necessary semiconductor characteristics.
The oxide semiconductor may have a single crystal structure.
Alternatively, the oxide semiconductor may have a non-single-crystal structure.
In the case where the oxide semiconductor has a non-single-crystal structure, the non-single-crystal oxide semiconductor may be amorphous.
In the case where the oxide semiconductor has a non-single-crystal structure, the non-single-crystal oxide semiconductor may be polycrystalline.
The oxide semiconductor may have either an amorphous structure including a portion having crystallinity or a non-amorphous structure.
The oxide semiconductor can have the above structure depending on the composition ratio thereof. Alternatively, the oxide semiconductor can have the above structure depending on the thickness thereof. Alternatively, the oxide semiconductor can have the above structure depending on heat treatment performed thereon, the substrate temperature in film formation, or the like.
For the semiconductor layer 603—a and the semiconductor layer 603—b, a layer containing an oxide including a crystal with c-axis alignment (also referred to as a c-axis aligned crystal (CAAC)), which has a triangular or hexagonal atomic arrangement when seen from the direction of an a-b plane, a surface, or an interface can be used. In the crystal, metal atoms are arranged in a layered manner, or metal atoms and oxygen atoms are arranged in a layered manner along the c-axis, and the direction of the a-axis or the b-axis is varied in the a-b plane (the crystal rotates around the c-axis).
The CAAC is not a single crystal, but this does not mean that the CAAC is composed of only an amorphous component. Although the CAAC includes a crystallized portion (crystalline portion), a boundary between one crystalline portion and another crystalline portion is not clear in some cases.
In the case where oxygen is included in the CAAC, nitrogen may be substituted for part of oxygen included in the CAAC. The c-axes of individual crystalline portions included in the CAAC may be aligned in one direction (e.g., the direction perpendicular to a surface of a substrate over which the CAAC is formed or a surface of the CAAC). Alternatively, the normals of the a-b planes of the individual crystalline portions included in the CAAC may be aligned in one direction (e.g., the direction perpendicular to a surface of a substrate over which the CAAC is formed or a surface of the CAAC).
The oxide semiconductor can be a conductor, a semiconductor, or an insulator depending on its composition or the like. The oxide semiconductor transmits or does not transmit visible light depending on its composition or the like.
As an example of such a CAAC, there is a crystal which is formed into a film shape and has a triangular or hexagonal atomic arrangement when observed from the direction perpendicular to a surface of the film or a surface of a substrate over which the CAAC is formed, and in which metal atoms are arranged in a layered manner or metal atoms and oxygen atoms (or nitrogen atoms) are arranged in a layered manner when a cross section of the film is observed.
As the oxide semiconductor, a semiconductor layer including a crystalline region with c-axis alignment may be used. Note that the composition of the crystalline region with c-axis alignment is represented by In1+δGa1−δO3(ZnO)M (0<δ<1, 1≦M≦3), and the composition of the entire semiconductor layer including the crystalline region with c-axis alignment is represented by InPGaQOR(ZnO)M (0<P<2, 0<Q<2, 1≦M≦3).
Further, in the case where the semiconductor layer 603a and the semiconductor layer 603—b are CAAC oxide semiconductor layers and the channel length of each of the transistors is 30 nm, even when the thickness of each of the semiconductor layer 603—a and the semiconductor layer 603—b is, for example, approximately 5 nm, short channel effects in the transistors can be suppressed.
Here, an example of a crystal structure of the CAAC will be further described with reference to FIGS. 6A to 6E, FIGS. 7A to 7C, and FIGS. 8A to 8C. In FIGS. 6A to 6E, FIGS. 7A to 7C, and FIGS. 8A to 8C, the vertical direction corresponds to the c-axis direction and a plane perpendicular to the c-axis direction corresponds to the a-b plane, unless otherwise specified. When the expressions “upper half” and “lower half” are simply used, they refer to the upper half above the a-b plane and the lower half below the a-b plane (the upper half and the lower half with respect to the a-b plane). Further, in FIGS. 6A to 6E, O surrounded by a circle represents tetracoordinate O and a double circle represents tricoordinate O.
FIG. 6A illustrates a structure including one hexacoordinate indium (also referred to as hexacoordinate In) atom and six tetracoordinate oxygen (also referred to as tetracoordinate O) atoms proximate to the In atom. Note that a portion including one metal atom such as In and oxygen atoms proximate thereto is referred to as a small group. The small group in FIG. 6A is actually an octahedral structure, but is illustrated as a planar structure for simplicity. Note that three tetracoordinate O atoms exist in each of the upper half and the lower half in FIG. 6A. In the small group illustrated in FIG. 6A, electric charge is 0.
FIG. 6B illustrates a structure including one pentacoordinate Ga atom, three tricoordinate oxygen (also referred to as tricoordinate O) atoms proximate to the pentacoordinate Ga atom, and two tetracoordinate O atoms proximate to the pentacoordinate Ga atom. All the three tricoordinate O atoms exist on the a-b plane. One tetracoordinate O atom exists in each of the upper half and the lower half in FIG. 6B. The structure illustrated in FIG. 6B may include one pentacoordinate In atom, three tricoordinate O atoms, and two tetracoordinate O atoms because there is not only a tetracoordinate In atom but also a pentacoordinate In atom. In the small, group illustrated in FIG. 6B, electric charge is 0.
FIG. 6C illustrates a structure including one tetracoordinate zinc (also referred to as tetracoordinate Zn) atom and four tetracoordinate O atoms proximate to the tetracoordinate Zn atom. In FIG. 6C, one tetracoordinate O atom exists in the upper half and three tetracoordinate O atoms exist in the lower half. Alternatively, three tetracoordinate O atoms may exist in the upper half and one tetracoordinate O atom may exist in the lower half in FIG. 6C. In the small group illustrated in FIG. 6C, electric charge is 0.
FIG. 6D illustrates a structure including one hexacoordinate tin (also referred to as hexacoordinate Sn) atom and six tetracoordinate O atoms proximate to the hexacoordinate Sn atom. In FIG. 6D, three tetracoordinate O atoms exist in each of the upper half and the lower half In the small group illustrated in FIG. 6D, electric charge is +1.
FIG. 6E illustrates a small group including two zinc atoms. In FIG. 6E, one tetracoordinate O atom exists in each of the upper half and the lower half. In the small group illustrated in FIG. 6E, electric charge is −1.
Note that a plurality of small groups faun a medium group, and a plurality of medium groups form a large group (also referred to as a unit cell).
Now, a rule of bonding between the small groups will be described. For example, the three tetracoordinate O atoms in the upper half with respect to the hexacoordinate In atom are each bonded to three proximate hexacoordinate In atoms in the downward direction, and the three tetracoordinate O atoms in the lower half are each bonded to three proximate hexacoordinate In atoms in the upward direction. The one tricoordinate O atom in the upper half with respect to the pentacoordinate Ga atom is bonded to one proximate pentacoordinate Ga atom in the downward direction, and the one tricoordinate O atom in the lower half is bonded to one proximate pentacoordinate Ga atom in the upward direction. The one tetracoordinate O atom in the upper half with respect to the tetracoordinate Zn atom is bonded to one proximate tetracoordinate Zn atom in the downward direction, and the three tetracoordinate O atoms in the lower half are each bonded to three proximate tetracoordinate Zn atoms in the upward direction. In this manner, the number of the tetracoordinate O atoms above the metal atom is equal to the number of the metal atoms proximate to and below each of the tetracoordinate O atoms. Similarly, the number of the tetracoordinate O atoms below the metal atom is equal to the number of the metal atoms proximate to and above each of the tetracoordinate O atoms. In this case, since the coordination number of the tetracoordinate O atom is 4, the sum of the number of the metal atoms proximate to and below the O atom and the number of the metal atoms proximate to and above the O atom is 4. Accordingly, when the sum of the number of tetracoordinate O atoms above a metal atom and the number of tetracoordinate O atoms below another metal atom is 4, the two kinds of small groups including the metal atoms can be bonded. For example, in the case where the hexacoordinate metal (In or Sn) atom is bonded through three tetracoordinate O atoms in the lower half, it is bonded to the pentacoordinate metal (Ga or In) atom or the tetracoordinate metal (Zn) atom.
A metal atom whose coordination number is 4, 5, or 6 is bonded to another metal atom through a tetracoordinate O atom in the c-axis direction. In addition to the above, a medium group can be formed in a different manner by combining a plurality of small groups so that the total electric charge of the layered structure is 0.
FIG. 7A illustrates a model of a medium group included in a layered structure of an In—Sn—Zn-based material. FIG. 7B illustrates a large group including three medium groups. Note that FIG. 7C illustrates an atomic arrangement in the case where the layered structure in FIG. 7B is observed from the c-axis direction.
In FIG. 7A, a tricoordinate O atom is omitted for simplicity, and a tetracoordinate O atom is illustrated by a circle; the number in the circle shows the number of tetracoordinate O atoms. For example, three tetracoordinate O atoms existing in each of the upper half and the lower half with respect to a Sn atom are denoted by circled 3. Similarly, in FIG. 7A, one tetracoordinate O atom existing in each of the upper half and the lower half with respect to an In atom is denoted by circled 1. FIG. 7A also illustrates a Zn atom proximate to one tetracoordinate O atom in the lower half and three tetracoordinate O atoms in the upper half, and a Zn atom proximate to one tetracoordinate O atom in the upper half and three tetracoordinate O atoms in the lower half.
In the medium group included in the layered structure of the In—Sn—Zn—O-based material in FIG. 7A, in the order starting from the top, a Sn atom proximate to three tetracoordinate O atoms in each of the upper half and the lower half is bonded to an In atom proximate to one tetracoordinate O atom in each of the upper half and the lower half, the In atom is bonded to a Zn atom proximate to three tetracoordinate O atoms in the upper half, the Zn atom is bonded to an In atom proximate to three tetracoordinate O atoms in each of the upper half and the lower half through one tetracoordinate O atom in the lower half and the Zn atom, the In atom is bonded to a small group that includes two Zn atoms and is proximate to one tetracoordinate O atom in the upper half, and the small group is bonded to a Sn atom proximate to three tetracoordinate O atoms in each of the upper half and the lower half through one tetracoordinate O atom in the lower half with respect to the small group. A plurality of such medium groups is bonded, so that a large group is formed.
Here, electric charge for one bond of a tricoordinate O atom and electric charge for one bond of a tetracoordinate O atom can be assumed to be −0.667 and −0.5, respectively. For example, electric charge of a (hexacoordinate or pentacoordinate) In atom, electric charge of a (tetracooridnate) Zn atom, and electric charge of a (pentacoordinate or hexacoordinate) Sn atom are +3, +2, and +4, respectively. Accordingly, electric charge in a small group including a Sn atom is +1. Therefore, electric charge of −1, which cancels +1, is needed to form a layered structure including a Sn atom. As a structure having electric charge of −1, the small group including two Zn atoms as illustrated in FIG. 6E can be given. For example, with one small group including two Zn atoms, electric charge of one small group including a Sn atom can be cancelled, so that the total electric charge of the layered structure can be 0.
Further, when the large group illustrated in FIG. 7B is repeated, an In—Sn—Zn-based crystal (In2SnZn3O8) can be obtained. Note that a layered structure of the obtained In—Sn—Zn-based crystal can be expressed by a composition formula, In2SnZn2O7(ZnO)m (m is 0 or a natural number).
The above description also applies to the case of using the four-component metal oxide, the three-component metal oxide, the two-component metal oxide, or any other metal oxide which are described in this embodiment.
As an example, FIG. 8A illustrates a model of a medium group included in a layered structure of an In—Ga—Zn-based material.
In the medium group included in the layered structure of the In—Ga—Zn-based material in FIG. 8A, in the order starting from the top, an In atom proximate to three tetracoordinate O atoms in each of the upper half and the lower half is bonded to a Zn atom proximate to one tetracoordinate O atom in the upper half, the Zn atom is bonded to a Ga atom proximate to one tetracoordinate O atom in each of the upper half and the lower half through three tetracoordinate O atoms in the lower half with respect to the Zn atom, and the Ga atom is bonded to an In atom proximate to three tetracoordinate O atoms in each of the upper half and the lower half through one tetracoordinate O atom in the lower half with respect to the Ga atom. A plurality of such medium groups is bonded, so that a large group is formed.
FIG. 8B illustrates a large group including three medium groups. Note that FIG. 8C illustrates an atomic arrangement in the case where the layered structure in FIG. 8B is observed from the c-axis direction.
Here, since electric charge of a (hexacoordinate or pentacoordinate) In atom, electric charge of a (tetracoordinate) Zn atom, and electric charge of a (pentacoordinate) Ga atom are +3, +2, +3, respectively, electric charge of a small group including any of an In atom, a Zn atom, and a Ga atom is 0. As a result, the total electric charge of a medium group having a combination of such small groups is always 0.
In order to form the layered structure of the In—Ga—Zn-based oxide, a large group can be Ruined using not only the medium group illustrated in FIG. 8A but also a medium group in which the arrangement of the In atom, the Ga atom, and the Zn atom is different from that in FIG. 8A.
Specifically, when the large group illustrated in FIG. 8B is repeated, an In—Ga—Zn—O-based crystal can be obtained. Note that a layered structure of the obtained In—Ga—Zn—O-based crystal can be expressed by a composition formula, InGaO3(ZnO)n (n is a natural number).
In the case where n is 1 (InGaZnO4), a crystal structure illustrated in FIG. 24A can be obtained, for example. Note that in the crystal structure in FIG. 24A, since a Ga atom and an In atom each have five ligands as described in FIG. 6B, a structure in which Ga is replaced with In can be obtained.
In the case where n is 2 (InGaZn2O5), a crystal structure illustrated in FIG. 24B can be obtained, for example. Note that in the crystal structure in FIG. 24B, since a Ga atom and an In atom each have five ligands as described in FIG. 6B, a structure in which Ga is replaced with In can be obtained.
The above is a description of the structural example of the CAAC. In a crystalline oxide semiconductor such as a CAAC oxide semiconductor, the number of defects in the bulk is small.
Dopants are added to the region 604a—a, the region 604b—a, the region 604a—b, and the region 604b—b which are illustrated in FIGS. 5A and 5B, and the region 604a—a, the region 604b—a, the region 604a—b, and the region 604b—b function as sources and drains of the transistors. As the dopant which is added, for example, one or more of elements of Group 13 in the periodic table (e.g., boron), elements of Group 15 in the periodic table (e.g., one or more of nitrogen, phosphorus, and arsenic), and rare gas elements (e.g., one or more of helium, argon, and xenon) can be used. A region functioning as a source of a transistor is also referred to as a source region, and a region functioning as a drain of a transistor is also referred to as a drain region. Addition of the dopants to the region 604a—a, the region 604b—a, the region 604a—b, and the region 604b—b enables reduction in resistance between the conductive layers and these regions; therefore, the transistor can be downsized.
The conductive layers 605a—a, 605b—a, 605a—b, and 605b—b function as the sources and the drains of the transistors. Note that a layer functioning as a source of a transistor can also be called a source electrode or a source wiring, and a layer functioning as a drain of a transistor can also be called a drain electrode or a drain wiring. Source electrodes and drain electrodes are not provided, and the conductive layers 605a—a, 605b—a, 605a—b, and 605b—b are provided as source wirings and drain wirings. Accordingly, high integration can be achieved.
Each of the conductive layers 605a—a, 605b—a, 605a—b, and 605b—b can be formed using, for example, a layer of a metal material such as aluminum, magnesium, chromium, copper, tantalum, titanium, molybdenum, or tungsten; or an alloy material which contains the above metal material as a main component. For example, each of the conductive layers 605a—a, 605b—a, 605a—b, and 605b—b can be formed using a layer of an alloy material containing copper, magnesium, and aluminum. Alternatively, each of the conductive layers 605a—a, 605b—a, 605a—b, and 605b—b may be formed using a stack of layers of materials which can be used for the conductive layers 605a—a, 605b—a, 605a—b, and 605b—b. For example, each of the conductive layers 605a—a, 605b—a, 605a—b, and 605b—b can be formed using a stack including a layer of an alloy material containing copper, magnesium, and aluminum and a layer containing copper.
A layer containing a conductive metal oxide may be used as each of the conductive layers 605a—a, 605b—a, 605a—b, and 605b—b. As the conductive metal oxide, it is possible to use indium oxide, tin oxide, zinc oxide, indium tin oxide, or indium zinc oxide, for example. Note that the conductive metal oxide which can be used for the conductive layers 605a—a, 605b—a, 605a—b, and 605b—b may contain silicon oxide.
For each of the insulating layers 606a and 606b, for example, a layer of a material that can be used for the insulating layers 602—a and 602—b can be used. Alternatively, each of the insulating layers 606a and 606b can be formed using a stack of layers of materials that can be used for the insulating layers 606a and 606b. 
The insulating layer 607 functions as a protective insulating layer which suppresses the entry of an impurity into the transistor.
For the insulating layer 607, for example, a layer of a material which can be used for the insulating layers 602—a and 602—b can be used. Alternatively, the insulating layer 607 may be formed using a stack of layers of materials which can be used for the insulating layer 607. For example, the insulating layer 607 may be formed using a silicon oxide layer, an aluminum oxide layer, or the like. For example, the use of an aluminum oxide layer for the insulating layer 607 can more effectively prevent an impurity from entering the semiconductor layer 603—b and effectively prevent the semiconductor layer 603—b from releasing oxygen.
Note that the transistor of this embodiment may include an insulating layer over part of the oxide semiconductor layer serving as a channel formation layer and, a conductive layer serving as a source or a drain and overlapping with the oxide semiconductor layer with the insulating layer interposed therebetween. In the case of the above structure, the insulating layer serves as a layer protecting the channel formation layer (also referred to as a channel protective layer) of the transistor. As the insulating layer functioning as a channel protective layer, a layer of a material which can be used for the insulating layers 602—a and 602—b can be used for example. Alternatively, the insulating layer functioning as a channel protective layer may be formed using a stack of layers of materials which can be used for the insulating layers 602—a and 602—b. 
Base layers may be formed over the element formation layers 600—a and 600—b and the transistors may be formed over the base layers. In this case, the base layer can be a layer of a material that can be used for the insulating layers 602—a and 602—b, for example. Alternatively, the base layer may be formed using a stack of layers of materials which can be used for the insulating layers 602—a and 602—b. For example, the base layer formed using a stack of an aluminum oxide layer and a silicon oxide layer can prevent the base layer from releasing oxygen through the semiconductor layers 603—a and 603—b. 
As an example of a method for manufacturing the transistor according to this embodiment, an example of a method for manufacturing the transistor illustrated in FIG. 5A will be described with reference to FIGS. 9A to 9E. FIGS. 9A to 9E are schematic cross-sectional views illustrating the example of the method for manufacturing the transistor in FIG. 5A.
First, as illustrated in FIG. 9A, the element formation layer 600—a is prepared and the semiconductor layer 603—a is formed over the element formation layer 600—a. 
For example, a layer of an oxide semiconductor material (also referred to as an oxide semiconductor layer) which can be used for the semiconductor layer 603—a is formed by a sputtering method, so that the semiconductor layer 603—a can be formed. Note that part of the oxide semiconductor layer may be etched after the formation of the oxide semiconductor layer. Further, the oxide semiconductor film can be formed in a rare gas atmosphere, an oxygen atmosphere, or a mixed atmosphere of a rare gas and oxygen.
The oxide semiconductor layer can be formed using an oxide target having a composition ratio of In2O3:Ga2O3:ZnO=1:1:1 [molar ratio] as a sputtering target. Alternatively, for example, an oxide target having a composition ratio of In2O3:Ga2O3:ZnO=1:1:2 [molar ratio] may be used for formation of the oxide semiconductor layer.
Still alternatively, for formation of the oxide semiconductor layer, an oxide target having a composition ratio of In:Sn:Zn=1:2:2 [atomic ratio], 2:1:3 [atomic ratio], 1:1:1 [atomic ratio], or 4:9:7 [atomic ratio] may be used as a sputtering target. When an oxide target having a composition ratio of In:Sn:Zn=2:1:3 [atomic ratio] is used as a sputtering target, for formation of the oxide semiconductor layer, the oxide semiconductor layer can have high crystallinity.
An In—Zn-based oxide layer may be formed using an oxide target having the following composition ratio as a sputtering target: the composition ratio of In:Zn is 50:1 to 1:2 (In2O3:ZnO=25:1 to 1:4 in a molar ratio), preferably 20:1 to 1:1 (In2O3:ZnO=10:1 to 1:2 in a molar ratio), more preferably 15:1 to 1.5:1 (In2O3:ZnO=15:2 to 3:4 in a molar ratio). For example, when the target used for the formation of the In—Zn-based oxide semiconductor layer has an atomic ratio of In:Zn:O═S:U:R, R>1.5S+U is satisfied. An increase in In content allows the field-effect mobility (also simply referred to as the mobility) of the transistor to be higher.
In the case of employing a sputtering method, the semiconductor layer 603—a is formed, for example, in a rare gas (typically, argon) atmosphere, an oxygen atmosphere, or a mixed atmosphere of a rare gas and oxygen. When the semiconductor layer 603—a is formed in a mixed atmosphere of a rare gas and oxygen, it is preferable that the amount of oxygen be larger than that of the rare gas.
Further, in the case of performing film formation by a sputtering method, it is preferable to sufficiently suppress leakage from the outside of a deposition chamber and leakage of a gas from the deposition chamber through the interior wall thereof so that impurities such as hydrogen, water, a hydroxyl group, and hydride (also referred to as a hydrogen compound) are not contained in a film to be formed.
For example, before the film is formed by a sputtering method, preheating treatment may be performed in a preheating chamber of a sputtering apparatus. By the preheating treatment, the above impurity can be removed.
Further, before the film is formed by a sputtering method, for example, treatment in which voltage is applied not to the target side but to the substrate side in an argon atmosphere, a nitrogen atmosphere, a helium atmosphere, or an oxygen atmosphere with the use of RF power and plasma is generated so that a surface where the film is to be formed is modified (such treatment is also referred to as reverse sputtering) may be performed. By reverse sputtering, powdery substances (also referred to as particles or dust) attached to the surface where the film is to be formed can be removed.
In the case where the film is fanned by a sputtering method, moisture remaining in a deposition chamber in which the film is to be formed can be removed with the use of an entrapment vacuum pump or the like. As the entrapment vacuum pump, a cryopump, an ion pump, or a titanium sublimation pump can be used, for example. Alternatively, moisture remaining in the deposition chamber can be removed with the use of a turbo molecular pump provided with a cold trap. The use of the entrapment vacuum pump permits suppression of the backflow of the exhaust containing the above impurity.
Note that when a high-purity gas from which the above impurities are removed is used as a sputtering gas, for example, the impurity concentration in the film formed can be lowered. For example, a gas with a dew point of −70° C. or lower is preferably used as the sputtering gas.
In the case where part of a film is etched to form a layer in the example of a method for manufacturing the transistor of this embodiment, for example, the following steps can be performed: a resist mask is formed over part of the film through a photolithography process and the film is etched using the resist mask, thereby forming the layer. Note that in this case, the resist mask is removed after the layer is formed.
In the case of forming a CAAC oxide semiconductor layer as the semiconductor layer 603—a, an oxide semiconductor layer is formed by a sputtering method while the temperature of the element formation layer where the oxide semiconductor layer is fowled is higher than or equal to 100° C. and lower than or equal to 500° C., preferably higher than or equal to 200° C. and lower than or equal to 350° C. When the oxide semiconductor layer is formed while the temperature of the film formation layer is high, the field-effect mobility of the transistor manufactured can be increased, and the stability against a gate-bias stress can be increased.
In that case, the element formation layer 600—a is preferably flat. The mean surface roughness of the element formation layer 600—a is preferably less than or equal to 1 nm, more preferably less than or equal to 0.3 nm When the flatness of the element formation layer 600—a is improved, the mobility can be increased to be higher than that of an oxide semiconductor in an amorphous state. The element formation layer 600—a can be planarized by, for example, one of or both chemical mechanical polishing (CMP) treatment and plasma treatment. The plasma treatment includes treatment for performing sputtering on a surface with rare gas ions and treatment of etching a surface with the use of an etching gas.
Next, the conductive layers 605a—a and 605b—a are formed over the semiconductor layer 603—a as illustrated in FIG. 9B.
For example, a film of a material applicable to the conductive layers 605a—a and 605b—a is formed as a first conductive film by a sputtering method or the like and the first conductive film is partly etched, whereby the conductive layers 605a—a and 605b—a can be formed.
Next, the insulating layer 602—a is formed in contact with the semiconductor layer 603—a as illustrated in FIG. 9C.
For example, the insulating layer 602—a can be knitted by formation of a film applicable to the insulating layer 602—a by a sputtering method in a rare gas (typically, argon) atmosphere, an oxygen atmosphere, or a mixed atmosphere of a rare gas and oxygen. The insulating layer 602—a formed by a sputtering method enables suppression of a reduction in resistance of a portion of the oxide semiconductor layer 603—a, which serves as a back channel of the transistor. The temperature of the element formation layer 600—a at the time of the formation of the insulating layer 602—a is preferably higher than or equal to room temperature and lower than or equal to 300° C.
Before the formation of the insulating layer 602—a, plasma treatment with the use of a gas of N2O, N2, Ar, or the like may be performed to remove water or the like adsorbed on an exposed surface of the semiconductor layer 603—a. In the case where the plasma treatment is performed, the insulating layer 602—a is preferably totaled after the plasma treatment without exposure to the air.
Then, the conductive layer 601—a is formed over the insulating layer 602—a. 
For example, a film of a material applicable to the conductive layer 601—a is totaled as a second conductive film by a sputtering method or the like and the second conductive film is partly etched, whereby the conductive layer 601—a can be totaled.
Further, in the example of the method for manufacturing the transistor in FIG. 5A, heat treatment is performed, for example, at higher than or equal to 600° C. and lower than or equal to 750° C., or higher than or equal to 600° C. and lower than the strain point of the substrate. For example, the heat treatment is performed after the oxide semiconductor layer is formed, after part of the oxide semiconductor layer is etched, after the first conductive film is totaled, after part of the first conductive film is etched, after the insulating layer 602—a is formed, after the second conductive film is formed, or after part of the second conductive film is etched. By the heat treatment, an impurity such as hydrogen, water, a hydroxyl group, or hydride can be removed from the semiconductor layer 603—a. 
Note that as a heat treatment apparatus for the heat treatment, an electric furnace or an apparatus for heating an object by heat conduction or heat radiation from a heater such as a resistance heater can be used; e.g., a rapid the thermal anneal (RTA) apparatus such as a gas rapid thermal anneal (GRTA) apparatus or a lamp rapid thermal anneal (LRTA) apparatus can be used. An LRTA apparatus is an apparatus for heating an object by radiation of light (an electromagnetic wave) emitted from a lamp such as a halogen lamp, a metal halide lamp, a xenon arc lamp, a carbon arc lamp, a high pressure sodium lamp, or a high pressure mercury lamp. A GRTA apparatus is an apparatus for heat treatment using a high-temperature gas. As the high-temperature gas, a rare gas or an inert gas (e.g., nitrogen) which does not react with the object due to the heat treatment can be used. Alternatively, laser irradiation may be performed for the heat treatment.
After the heat treatment, a high-purity oxygen gas, a high-purity N2O gas, or ultra-dry air (with a dew point of −60° C. or lower, preferably −60° C. or lower) may be introduced into the furnace that has been used in the heat treatment while the heating temperature is maintained or decreased. It is preferable that the oxygen gas or the N2O gas do not contain water, hydrogen, and the like. The purity of the oxygen gas or the N2O gas which is introduced into the heat treatment apparatus is preferably 6N or higher, more preferably 7N is higher, i.e., the impurity concentration in the oxygen gas or the N2O gas is preferably 1 ppm or lower, more preferably 0.1 ppm or lower. By the action of the oxygen gas or the N2O gas, oxygen is supplied to the semiconductor layer 603—a, so that vacancies caused by oxygen deficiency in the semiconductor layer 603—a can be reduced. Note that the introduction of a high-purity oxygen gas, a high-purity N70 gas, or ultra-dry air may be performed at the time of the above heat treatment.
Further, in the example of the method for manufacturing the transistor in FIG. 5A, oxygen may be added to the oxide semiconductor film by a method in which oxygen ions are accelerated by an electric field, such as oxygen doping treatment using oxygen plasma, after the semiconductor layer 603—a is formed, after the conductive layers 605a—a and 605b—a are formed, after the insulating layer 602—a is formed, after the conductive layer 601—a is formed, or after the heat treatment is performed. For example, oxygen doping treatment using high-density plasma of 2.45 GHz may be performed. The oxygen doping treatment may be performed by an ion implantation method. The oxygen doping treatment allows a reduction in variation of electrical characteristics of transistors to be manufactured. For example, the oxygen doping treatment is performed so that the insulating layer 602—a contains oxygen with a proportion higher than that in the stoichiometric composition.
When the insulating layer in contact with the semiconductor layer 603—a is made to excessively contain oxygen, the oxygen can be more easily supplied to the semiconductor layer 603—a. Thus, oxygen vacancies in the semiconductor layer 603—a or at the interface between the insulating layer 602—a and the semiconductor layer 603—a can be reduced, resulting in further reduction in the carrier concentration in the semiconductor layer 603—a. One embodiment of the present invention is not limited thereto. Even when the semiconductor layer 603—a is made to excessively contain oxygen through manufacturing steps, the insulating layer in contact with the semiconductor layer 603—a can suppress a release of oxygen from the semiconductor layer 603—a. 
For example, when an insulating layer containing gallium oxide is formed as the insulating layer 602—a, the composition of the gallium oxide can be set to be Ga2Ox by supplying the insulating layer with oxygen.
Alternatively, when an insulating layer containing aluminum oxide is formed as the insulating layer 602—a, the composition of the aluminum oxide can be set to be Al2Ox by supplying the insulating layer with oxygen.
Still alternatively, when an insulating layer containing gallium aluminum oxide or aluminum gallium oxide is formed as the insulating layer 602—a, the composition of the gallium aluminum oxide or the aluminum gallium oxide can be set to be GaxAl2-xO3+a by supplying the insulating layer with oxygen.
Through the above steps, an impurity such as hydrogen, water, a hydroxyl group, or hydride (also referred to as a hydrogen compound) is removed from the semiconductor layer 603—a and oxygen is supplied to the semiconductor layer 603—a; thus, the oxide semiconductor layer can be highly purified.
Further, in addition to the heat treatment, after the insulating layer 602—a is formed, heat treatment (preferably at higher than or equal to 200° C. and lower than or equal to 600° C., for example, at higher than or equal to 250° C. and lower than or equal to 350° C.) may be performed in an inert gas atmosphere or an oxygen gas atmosphere.
The temperature of the intentional heating of the element formation layer 600—a or the temperature of the heat treatment after the film formation is 150° C. or higher, preferably 200° C. or higher, more preferably 400° C. or higher. When the heat treatment after the formation of the oxide semiconductor film is performed at 300° C. or higher, impurities such as hydrogen contained in the film can be released, resulting in a removal of the impurities (dehydration or dehydrogenation).
The heat treatment can be performed in an oxygen atmosphere; alternatively, the heat treatment may be performed in two steps in such a manner that first heat treatment for dehydration or dehydrogenation is performed in a nitrogen atmosphere or under reduced pressure, and then second heat treatment is performed in an oxygen atmosphere. The second heat treatment performed in an oxygen atmosphere after dehydration or dehydrogenation allows addition of oxygen to the oxide semiconductor; thus, the heat treatment can be performed more effectively. For the treatment for supplying oxygen, heat treatment may be performed with the insulating layer provided in contact with the oxide semiconductor layer. For example, vacancies due to oxygen deficiency are easily caused in the oxide semiconductor layer or at the interface between the oxide semiconductor layer and a layer in contact with the oxide semiconductor layer; however, when oxygen is excessively contained in the oxide semiconductor by the heat treatment, it is possible to compensate for oxygen deficiency caused constantly, with excess oxygen. The excess oxygen is oxygen existing mainly between lattices. When the concentration of oxygen is set to higher than or equal to 1×1016/cm3 and lower than, or equal to 2×1020/cm3, oxygen can be contained in the oxide semiconductor layer without causing crystal distortion or the like even in the case where crystallization is performed, for example.
The heat treatment performed after the formation of the oxide semiconductor film makes it possible to increase the stability against a gate-bias stress of the transistor to be manufactured. Further, the field-effect mobility of the transistor can be improved.
Then, as illustrated in FIG. 9E, a dopant is added to the semiconductor layer 603—a from the side on which the conductive layer 601—a is formed, through the insulating layer 602—a, so that the region 604a—a and the region 604b—a are formed in a self-aligned manner.
For example, the dopant can be added with the use of an ion doping apparatus or an ion implantation apparatus.
Note that although the example of the method for manufacturing the transistor illustrated in FIG. 5A is described, one embodiment of the present invention is not limited thereto. For example, as for the components in FIG. 5B which have the same designations as the components in FIG. 5A and whose functions are at least partly the same as those of the components in FIG. 5A, the description of the example of the method for manufacturing the transistor illustrated in FIG. 5A can be referred to as appropriate.
As described with reference to FIGS. 5A and 5B, FIGS. 6A to 6E, FIGS. 7A to 7C, FIGS. 8A to 8C, and FIGS. 9A to 9E, the transistor exemplified in this embodiment includes a conductive layer functioning as a gate; an insulating layer functioning as a gate insulating layer; an oxide semiconductor layer which overlaps with the conductive layer functioning as the gate with the insulating layer functioning as the gate insulating layer placed therebetween and in which a channel is formed; a conductive layer which is electrically connected to the oxide semiconductor layer and functions as one of a source and a drain; and a conductive layer which is electrically connected to the oxide semiconductor layer and functions as the other of the source and the drain.
Further, in the transistor exemplified in this embodiment, the carrier concentration of the oxide semiconductor layer can be lower than 1×1014/cm3, preferably lower than 1×1012/cm3, more preferably lower than 1×1012/cm3.
When an oxide semiconductor is used for the transistor, the carrier density is preferably 1×1018/cm3 or lower. The carrier density of an oxide semiconductor film containing In or Zn can be set to 1×1018/cm3 or lower when the oxide semiconductor film is not only made to contain Ga or Sn as a component but also highly purified (a removal of hydrogen and the like) and subjected to heat treatment after the film formation.
When heat treatment is performed during and/or after formation of the oxide semiconductor film, the threshold voltage of the transistor can be positively shifted. Further, the transistor can be normally off.
The off-state current per micrometer in channel width can be 10 aA (1×10−17 A) or less, 1 aA (1×10−18 A) or less, 10 zA (1×10−2° A) or less, further 1 zA (1×10−21 A) or less, and furthermore 100 yA (1×10−22 A) or less. When the off-state current of each of the first transistor, the third transistor, and the fourth transistor falls within the above range, the problem of leakage current of the logic circuit can be solved. Further, the logic circuit can be dynamically reconfigured.
It is preferable that the off-state current of the transistor be as low as possible; however, the lower limit of the off-state current of the transistor in this embodiment is estimated at approximately 10−3° A/μm.
The field-effect mobility of the transistor formed using an oxide semiconductor can be relatively high regardless of whether the oxide semiconductor is amorphous or crystalline. Such an improvement in field-effect mobility is presumed to be achieved not only by a removal of impurities by dehydration or dehydrogenation but also by a reduction in interatomic distance due to an increase in density. The oxide semiconductor film can be crystallized by removing impurities from the oxide semiconductor for the sake of highly purification. For example, the field-effect mobility of an In—Sn—Zn-based oxide semiconductor can be higher than 31 cm2/V·s, preferably higher than 39 cm2/V·s, more preferably higher than 60 cm2V·s. Further, it is suggested that the field-effect mobility of a highly-purified non-single-crystal oxide semiconductor can be ideally higher than 100 cm2/V·s. It is suggested that the field-effect mobility of the transistor exemplified in this embodiment is higher as the defect density of the oxide semiconductor layer is lower. The reason thereof will be given below.
The actually measured field-effect mobility of a field-effect transistor can be lower than its original field-effect mobility because of a variety of reasons; this phenomenon occurs not only in the case of using a field-effect transistor including an oxide semiconductor layer. One of the reasons that reduce the field-effect mobility is a defect inside a semiconductor layer or a defect at the interface between the semiconductor layer and an insulating layer. When a Levinson model is used, the field-effect mobility on the assumption that no defect exists in an oxide semiconductor layer can be calculated theoretically.
Assuming that the original field-effect mobility and the measured field-effect mobility of a semiconductor layer are μ0 and μ, respectively, and a potential barrier (such as a grain boundary) exists in the semiconductor layer, the measured field-effect mobility μ can be expressed in Formula 3.




  
    
      
        μ
        =
        
          
            μ
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          ⁢
          
            exp
            ⁡
            
              (
              
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        [
        
          FORMULA
          ⁢
          
            
          
          ⁢
          3
        
        ]
      
    
  




In Formula 3, E represents the height of the potential barrier, k represents the Boltzmann constant, and T represents the absolute temperature. When the potential barrier is assumed to be attributed to a defect, the height of the potential barrier E can be expressed in Formula 4, according to the Levinson model.




  
    
      
        E
        =
        
          
            
              
                e
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          FORMULA
          ⁢
          
            
          
          ⁢
          4
        
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In Formula 4, e represents the elementary charge, N represents the average defect density per unit area in a channel, ε represents the permittivity of the semiconductor, n represents the surface density of carriers in the channel, Cox represents the capacitance per unit area, Vg represents the gate voltage, and t represents the thickness of the channel. In the case where the thickness of the semiconductor layer is less than or equal to 30 nm, the thickness of the channel may be regarded as being the same as the thickness of the semiconductor layer. The drain current Id in a linear region can be expressed in Formula 5.




  
    
      
        
          I
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        [
        
          FORMULA
          ⁢
          
            
          
          ⁢
          5
        
        ]
      
    
  




In Formula 5, L represents the channel length and W represents the channel width, and L and W are each 10 μm here. In addition, Vd represents the drain voltage. When dividing both sides of the above formula by Vg and then taking logarithms of both sides, Formula 5 can be transformed into Formula 6.




  
    
      
        
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          FORMULA
          ⁢
          
            
          
          ⁢
          6
        
        ]
      
    
  




The right side of Formula 6 is a function of Vg. From Formula 6, it is found that the defect density N can be obtained from the slope of a line in a graph which is obtained by plotting actual measured values with In(Id/Vg) as the ordinate and 1/Vg as the abscissa. That is, the defect density can be evaluated from the Id-Vg characteristics of the transistor. For example, the defect density N of an oxide semiconductor film in which the ratio of indium (In), gallium (Ga), and zinc (Zn) is 1:1:1 [atomic ratio] is approximately 1×1012/cm2.
On the basis of the defect density obtained by the above method, or the like, the original field-effect mobility of a semiconductor layer μ0 can be calculated to be 120 cm2/V·s from Formula 5 and Formula 6. The field-effect mobility of an In—Ga—Zn-based oxide having a defect is usually approximately 35 cm2/V·s. In contrast, assuming that no defect exists inside a semiconductor layer and at the interface between the semiconductor layer and an insulating film, the mobility μ0 of the oxide semiconductor is expected to be 120 cm2/V·s. Thus, it can be understood that as the defects are reduced, the mobility of an oxide semiconductor and even the field-effect mobility of a transistor are increased. For example, the defect density of an oxide semiconductor layer such as a CAAC oxide semiconductor layer is low.
Note that even when no defect exists inside a semiconductor layer, scattering at the interface between a channel and a gate insulating layer affects the transport property of the transistor. In other words, the mobility μ1 at a position that is distance x away from the interface between the channel and the gate insulating layer can be expressed in Formula 7.




  
    
      
        
          1
          
            μ
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        =
        
          
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          +
          
            
              D
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              exp
              ⁡
              
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        [
        
          FORMULA
          ⁢
          
            
          
          ⁢
          7
        
        ]
      
    
  




In Formula 7, D represents the electric field in the gate direction, and B and G are constants. B and G can be obtained from actual measurement results; according to the above measurement results, B is 2.38×107 cm/s and G is 10 nm (the depth to which the influence of interface scattering reaches). In Formula 7, when D is increased (i.e., when the gate voltage Vg is increased), the second term of Formula 7 is increased and accordingly the mobility μ1 is decreased.
Calculation results of the mobility μ2 of a transistor in which a channel includes an ideal oxide semiconductor layer without a defect inside the semiconductor layer are shown in FIG. 10. For the calculation, device simulation software Sentaurus Device manufactured by Synopsys, Inc. was used. The bandgap, the electron affinity, the relative permittivity, and the thickness of the oxide semiconductor layer were assumed to be 2.8 eV, 4.7 eV, 15, and 15 nm, respectively. Further, the work functions of a gate, a source, and a drain of the transistor were assumed to be 5.5 eV, 4.6 eV, and 4.6 eV, respectively. The thickness of the gate insulating layer is 100 nm, and the relative permittivity thereof is 4.1. The channel length and the channel width of the transistor were each assumed to be 10 μm, and the drain voltage Vd was assumed to be 0.1 V.
As shown in FIG. 10, the field-effect mobility is as high as more than 100 cm2/V·s when the gate voltage Vg is around 1 V and is decreased as the gate voltage Vg becomes higher because the influence of interface scattering is increased. Note that in order to reduce interface scattering, it is preferable that a surface of the semiconductor layer be flat at the atomic level (also referred to as atomic layer flatness).
In addition, calculation results of electric characteristics of minute transistors which are manufactured using an oxide semiconductor layer having such a high field-effect mobility will be described below.
First, FIGS. 11A and 11B illustrate cross-sectional structures of the transistors used for the calculation. The transistors illustrated in FIGS. 11A and 11B each include a semiconductor region 653a and a semiconductor region 653b which have n-type conductivity in an oxide semiconductor layer. The resistivities of the semiconductor region 653a and the semiconductor region 653b are 2×10−3 Ωcm.
The transistor in FIG. 11A is provided over a base insulator 651 provided with an embedded insulator 652. The embedded insulator 652 is formed using aluminum oxide so as to be embedded in the base insulator 651.
Further, the transistor in FIG. 11A includes the semiconductor region 653a, the semiconductor region 653b, the semiconductor region 653c, a gate insulating layer 654, a gate electrode 655, a sidewall insulator 656a, a sidewall insulator 656b, an insulator 657, a source electrode 658a, and a drain electrode 658b. 
The semiconductor region 653c is provided between the semiconductor region 653a and the semiconductor region 653b. The semiconductor region 653c is an intrinsic semiconductor region serving as a channel formation region.
The gate electrode 655 is provided over the gate insulating layer 654. Note that the width of the gate electrode 655 is 33 nm.
The sidewall insulator 656a and the sidewall insulator 656b are provided in contact with side surfaces of the gate electrode 655. In the transistor in FIG. 11A, the semiconductor regions under the sidewall insulator 656a and the sidewall insulator 656b are part of the semiconductor region 653a having n-type conductivity and part of the semiconductor region 653b having n-type conductivity, respectively. Note that the widths of the sidewall insulator 656a and the sidewall insulator 656b are each 5 nm.
The insulating layer 657 is provided over the gate electrode 655. The insulating layer 657 has a function of preventing a short circuit between the gate electrode 655 and another wiring.
The source electrode 658a is in contact with the semiconductor region 653a. 
The drain electrode 658b is in contact with the semiconductor region 653b. 
Note that the channel width of the transistor in FIG. 11A is 40 nm.
The transistor illustrated in FIG. 11B is different from the transistor illustrated in FIG. 11A in the conductivity type of semiconductor regions under the sidewall insulator 656a and the sidewall insulator 656b. In the transistor in FIG. 11B, the semiconductor regions under the sidewall insulator 656a and the sidewall insulator 656b are part of the intrinsic semiconductor region 653c. In other words, in the transistor in FIG. 11B, a region where the semiconductor region 653a does not overlap with the gate electrode 655 and a region where the semiconductor region 653b does not overlap with the gate electrode 655 are provided. These regions are called offset regions, and the widths thereof are called offset lengths (also referred to as Loff). In FIG. 11B, the offset length is equal to the width of each of the sidewall insulator 656a and the sidewall insulator 656b. 
The other parameters used in calculation are as described above. For the calculation, device simulation software Sentaurus Device manufactured by Synopsys, Inc. was used.
FIGS. 12A to 12C show the gate voltage (Vg: a potential difference between the gate and the source) dependence of the drain current (Id, solid line) and the field-effect mobility (μ, dotted line) of the transistor having the structure illustrated in FIG. 11A. The drain current Id is obtained by calculation under the assumption that the drain voltage (a potential difference between the drain and the source) is +1 V and the mobility μ is obtained by calculation under the assumption that the drain voltage is +0.1 V.
FIG. 12A shows the case of the transistor in which the thickness of the gate insulating layer 654 is 15 nm, FIG. 12B shows the case of the transistor in which the thickness of the gate insulating layer 654 is 10 nm, and FIG. 12C shows the case of the transistor in which the thickness of the gate insulating layer 654 is 5 nm. As shown in FIGS. 12A to 12C, as the gate insulating layer 654 is thinner, the drain current Id (off-state current) particularly in an off state is significantly decreased. In contrast, there is no noticeable change in the peak value of the field-effect mobility μ and the drain current Id in an on state (on-state current). Further, the drain current exceeds 10 μA at a gate voltage of around 1 V.
FIGS. 13A to 13C show the gate voltage Vg dependence of the drain current Id (solid line) and the field-effect mobility μ (dotted line) of the transistor having the structure in FIG. 11B in which the offset length (Loff) of 5 nm. Here, the drain current Id is calculated under the assumption that the drain voltage is +1 V and the field-effect mobility μ is calculated under the assumption that the drain voltage is +0.1 V. FIG. 13A shows the case where the thickness of the gate insulating layer 654 is 15 nm, FIG. 13B shows the case where the thickness of the gate insulating layer 654 is 10 nm, and FIG. 13C shows the case where the thickness of the gate insulating layer 654 is 5 nm.
FIGS. 14A to 14C show the gate voltage dependence of the drain current Id (solid line) and the mobility μ (dotted line) of the transistor having the structure in FIG. 11B in which the offset length Loff is 15 nm. Here, the drain current Id is obtained by calculation under the assumption that the drain voltage is +1 V and the field-effect mobility μ is obtained by calculation under the assumption that the drain voltage is +0.1 V. FIG. 14A shows the case where the thickness of the gate insulating layer 654 is 15 nm, FIG. 14B shows the case where the thickness of the gate insulating layer 654 is 10 nm, and FIG. 14C shows the case where the thickness of the gate insulating layer 654 is 5 nm.
FIGS. 12A to 12C, FIGS. 13A to 13C, and FIGS. 14A to 14C show that in any of the structures, as the gate insulating layer 654 is thinner, the off-state current of the transistor is significantly decreased, whereas no remarkable change occurs in the peak value of the field-effect mobility μ and the on-state current of the transistor.
Note that the peak of the field-effect mobility μ is approximately 80 cm2/V·s in FIGS. 12A to 12C, approximately 60 cm2/V·s in FIGS. 13A to 13C, and approximately 40 cm2V·s in FIGS. 14A to 14C; thus, the peak of the field-effect mobility p is decreased as the offset length (Loff) is increased. Further, the same applies to the off-state current of the transistor. The on-state current of the transistor is also decreased as the offset length (Loff) is increased; however, the decrease in the on-state current of the transistor is much more gradual than the decrease in the off-state current of the transistor. In any of the transistors, the drain current exceeds 10 μA at a gate voltage of around 1 V.
The transistor exemplified in this embodiment and another transistor (e.g., a transistor including a semiconductor layer containing a semiconductor that belongs to Group 14 in the periodic table (e.g., silicon)) can be stacked. Thus, it is possible to form both the transistor including an oxide semiconductor layer and the another transistor over one substrate while achieving a reduction in circuit area. Further, the field-effect mobility of the transistor including an oxide semiconductor layer can be increased, leading to operation without any trouble of the logic circuit according to the above embodiment.
When the transistor including an oxide semiconductor layer according to this embodiment is applied to the first transistor, or the third transistor and the fourth transistor in the logic circuit according to the above embodiment, data in the logic circuit can be held reliably.
Further, examples of transistors each including an oxide semiconductor layer containing In, Sn, and Zn as a channel formation layer will be described as the transistor exemplified above.
For example, FIGS. 15A to 15C each show characteristics of a transistor that includes an oxide semiconductor layer including In, Sn, and Zn as main components and having a channel length L of 3 μm and a channel width W of 10 μm, and a gate insulating layer with a thickness of 100 nm. Note that Vds is 10 V.
FIG. 15A shows characteristics of a transistor whose oxide semiconductor layer was formed in such a manner that an oxide semiconductor film containing In, Sn, and Zn as main components was formed by a sputtering method without heating an element formation layer intentionally and then was etched. In FIG. 15A, the field-effect mobility is 18.8 cm2/V·s. FIG. 15B shows characteristics of a transistor whose oxide semiconductor layer was formed in such a manner that an oxide semiconductor film containing In, Sn, and Zn as main components was formed after heating a substrate at 200° C. and then was etched. In FIG. 15B, the field-effect mobility is 32.2 cm2/V·s. These results suggest that intentional heating improved the field-effect mobility of the transistor.
FIG. 15C shows characteristics of a transistor whose oxide semiconductor layer was subjected to heat treatment at 650° C. after being formed in such a manner that an oxide semiconductor film containing In, Sn, and Zn as main components was formed at 200° C. by a sputtering method and then was etched. In FIG. 15C, the field-effect mobility is 34.5 cm2/V·s. This result suggests that heat treatment performed after the formation of the oxide semiconductor film improved the field-effect mobility.
Note that oxygen ions may be implanted into the oxide semiconductor layer containing In, Sn, and Zn as main components, an impurity such as hydrogen, water, a hydroxyl group, or hydride contained in the oxide semiconductor layer may be released by heat treatment, and the oxide semiconductor layer may be crystallized through the heat treatment or by another heat treatment performed later. By such crystallization treatment or recrystallization treatment, a non-single-crystal oxide semiconductor layer having favorable crystallinity can be obtained.
In the transistor including an oxide semiconductor layer containing In, Sn, and Zn as main components, which was formed without heating the element formation layer intentionally, the threshold voltage tends to be negatively shifted as shown in FIG. 15A, for example. In contrast, when the oxide semiconductor layer foamed while intentionally heating the element formation layer is used, the threshold voltage is positively shifted relatively as shown in FIG. 15B, for example. Therefore, there is a possibility that a transistor can be normally off by heat treatment during and/or after formation of an oxide semiconductor film.
Note that the threshold voltage of a transistor can also be controlled by changing the ratio of In, Sn, and Zn. For example, when the composition ratio of In, Sn, and Zn is 2:1:3, a normally-off transistor can be easily formed.
Further, for example, when a gate bias-temperature stress test (also referred to as a BT test) is performed with an electric field intensity of 2 MV/cm at 150° C. for one hour, drift of the threshold voltage is less than ±1.5 V, preferably less than ±1.0 V. Thus, it is understood that heat treatment during and/or after formation of an oxide semiconductor film increases the stability against a gate-bias stress. FIGS. 16A and 16B and FIGS. 17A and 17B show results of BT tests performed on the following two transistors: Sample 1 on which heat treatment was not performed after formation of an oxide semiconductor film, and Sample 2 on which heat treatment at 650° C. was performed after, formation of an oxide semiconductor film. Note that as the BT test, a positive BT test and a negative BT test were performed.
In the positive BT test, first, the Vgs-Ids characteristics of the transistors were measured under the condition that the temperature of the element formation layer (substrate) was 25° C. and Vds was 10 V. Then, the temperature of the element formation layer (substrate) was set to 150° C. and Vds was set to 0.1 V. After that, Vgs of 20 V was applied so that the intensity of an electric field applied to gate insulating layers was 2 MV/cm, and the condition was kept for one hour. Next, Vgs was set to 0 V and the Vgs-Ids characteristics of the transistors were measured under the condition that the temperature of the element formation layer (substrate) was 25° C. and Vds was 10V.
In the negative BT test, first, Vgs-Ids characteristics of the transistors were measured under the condition that the temperature of the element formation layer (substrate) was 25° C. and Vds was 10 V. Then, the temperature of the element formation layer (substrate) was set to 150° C. and Vds was set to 0.1 V. After that, Vgs of −20 V was applied so that the intensity of an electric field applied to gate insulating layers was −2 MV/cm, and the condition was kept for one hour. Next, Vgs was set to 0 V and the Vgs-Ids characteristics of the transistors were measured under the condition that the temperature of the element formation layer (substrate) was 25° C. and Vds was 10 V.
FIGS. 16A and 16B show a result of the positive BT test of Sample 1 and a result of the negative BT test of Sample 1, respectively. FIGS. 17A and 17B show a result of the positive BT test of Sample 2 and a result of the negative BT test of Sample 2, respectively.
As shown in FIGS. 16A and 16B, the amount of shift in the threshold voltage of the transistor of Sample 1 due to the positive BT test and that due to the negative BT test were 1.80 V and −0.42 V, respectively. As shown in FIGS. 17A and 17B, the amount of shift in the threshold voltage of the transistor of Sample 2 due to the positive BT test and that due to the negative BT test were 0.79 V and 0.76 V, respectively. Thus, it is found that, in each of the transistors of Sample 1 and Sample 2, the amount of shift in the threshold voltage between before and after the BT tests is small and the reliability is high.
When an oxide semiconductor film which is formed by a sputtering method using a metal oxide target having a composition ratio of In:Sn:Zn=1:1:1 without heating an element formation layer intentionally is analyzed by X-ray diffraction (XRD), a halo pattern is observed. However, the oxide semiconductor film can be crystallized by being subjected to heat treatment. The temperature of the heat treatment can be set as appropriate; when the heat treatment is performed at 650° C., for example, a clear diffraction peak can be observed in an X-ray diffraction analysis.
Here, results of an XRD analysis of In—Sn—Zn—O films will be described below. The XRD analysis was conducted using an X-ray diffiactometer D8 ADVANCE manufactured by Bruker AXS, and measurement was performed by an out-of-plane method.
Sample A and Sample B were prepared and the XRD analysis was performed thereon. Methods for forming Sample A and Sample B will be described below.
An In—Sn—Zn—O film with a thickness of 100 nm was formed over a quartz substrate subjected to dehydrogenation treatment. The In—Sn—Zn—O film was formed with a sputtering apparatus with a power of 100 W (DC) in an oxygen atmosphere. An In—Sn—Zn—O target with an atomic ratio of In:Sn:Zn=1:1:1 was used as a target. Note that the heating temperature in film formation was set to 200° C. A sample formed through the above steps was used as Sample A.
Next, a sample manufactured by a method similar to that of Sample A was subjected to heat treatment at 650° C. Here, heat treatment in a nitrogen atmosphere was first performed for one hour and heat treatment in an oxygen atmosphere was further performed for one hour without lowering the temperature. A sample formed through the above steps was used as Sample B.
FIG. 18 shows XRD spectra of Sample A and Sample B. No peak derived from crystal was observed in Sample A, whereas peaks derived from crystal were observed when 2θ was around 35 deg. and at 37 deg. to 38 deg. in Sample B. Thus, it is found that heat treatment during and/or after formation of an oxide semiconductor film containing In, Sn, and Zn as main components improves crystallinity of an oxide semiconductor layer.
As shown in FIG. 19, for example, the off-state current per micrometer of a channel width of the transistor formed with heat treatment during and/or after formation of the oxide semiconductor film was 0.1 aA (1×10−19 A) or smaller and 10 zA (1×10−2° A) or smaller when the temperature of the element formation layer (substrate) was 125° C. and 85° C., respectively. The proportional relation between the logarithm of the off-state current and the inverse of the temperature suggests that the off-state current at room temperature (27° C.) is 0.1 zA (1×10−22 A) or smaller. Hence, the off-state current per micrometer of a channel width of the transistor can be 1 aA (1×10−18 A) or smaller, 100 zA (1×10−19 A) or smaller, and 1 zA (1×10−21 A) or smaller at 125° C., 85° C., and room temperature, respectively. When the off-state current of each of the first transistor, the third transistor, and the fourth transistor falls within the above range, the problem of leakage current of the logic circuit can be solved. Further, the logic circuit can be dynamically reconfigured.
Although it is possible to remove hydrogen from an oxide semiconductor film containing In, Sn, and Zn as main components by heat treatment, a film which does not contain any impurity originally is preferably formed because moisture is released from the oxide semiconductor film containing In, Sn, and Zn as main components at a higher temperature than from an oxide semiconductor film containing In, Ga, and Zn as main components.
The relation between the temperature of the element formation layer (substrate) and electric characteristics of the transistor of Sample B, on which heat treatment at 650° C. was performed after formation of the oxide semiconductor film, was evaluated.
The transistor used for the measurement has a channel length L of 3 μm, a channel width W of 10 μm, Lov of 0 and dW of 0 μm. Note that Vds was set to 10 V. The evaluation was performed under six conditions: the temperature of the element formation layer (substrate) was −40° C., −25° C., 25° C., 75° C., 125° C., and 150° C. Note that Lov refers to the width of a portion where a gate electrode overlaps with one of a pair of electrodes, and dW refers to the width of a portion of the pair of electrodes, which does not overlap with an oxide semiconductor film.
FIG. 20 shows the Vgs dependence of Ids (solid line) and field-effect mobility (dotted line). FIG. 21A shows the relation between the temperature of the element formation layer (substrate) and the threshold voltage, and FIG. 21B shows the relation between the temperature of the element formation layer (substrate) and the field-effect mobility.
From FIG. 20 and FIG. 21A, it is found that the threshold voltage gets lower as the temperature of the element formation layer (substrate) increases: Note that the threshold voltage is decreased from 1.09 V to −0.23 V in the range from −40° C. to 150° C.
From FIG. 20 and FIG. 21B, it is found that the field-effect mobility gets lower as the temperature of the element formation layer (substrate) increases. Note that the mobility is decreased from 36 cm2/V·s to 32 cm2/V·s in the range from −40° C. to 150° C. Thus, it is found that variation in electric characteristics is small in the above temperature range.
The above is description of the transistors including oxide semiconductor layers containing In, Sn, and Zn.
In the transistor including the oxide semiconductor layer containing In, Sn, and Zn as main components, a field-effect mobility of 30 cm2/V·s or higher, preferably 40 cm2V/·s or higher, more preferably 60 cm2/V·s or higher can be obtained with the off-state current maintained at 1 aA/μm or lower (per micrometer in channel width), which makes it possible to achieve on-state current needed for an LSI. For example, in a transistor where L/W is 33 nm/40 nm, an on-state current of 12 μA or higher can flow when the gate voltage is 2.7 V and the drain voltage is 1.0 V. In addition, sufficient electric characteristics can be ensured in a temperature range needed for operation of a transistor. When such characteristics are ensured, the transistor including the oxide semiconductor layer can be applied to the first transistor, the third transistor, and the fourth transistor, and a transistor including a semiconductor layer containing a semiconductor belonging to Group 14 of the periodic table can be applied to the second transistor. That is to say, a logic circuit having a novel property of, for example, being dynamically reconfigurable can be provided without decreasing the operation speed even when the transistor including the oxide semiconductor layer is also provided in a circuit including a transistor including a semiconductor layer containing a semiconductor belonging to Group 14 of the periodic table (e.g., silicon).
Embodiment 6
In this embodiment, description will be given of an example of a CPU (arithmetic processing unit) provided with the logic circuits according to one embodiment of the present invention.
An example of the arithmetic processing unit in this embodiment will be described with reference to FIG. 22.
The arithmetic processing unit illustrated in FIG. 22 includes a bus interface (also referred to as an IF) 801, a control unit (also referred to as a CTL) 802, a cache memory (also referred to as a CACH) 803, an instruction decoder (also referred to as an Decoder) 805, and an arithmetic logic unit (also referred to as an ALU) 806.
The bus interface 801 has a function of transmitting and receiving signals to and from the outside of the arithmetic processing unit and a function of transmitting and receiving signals to and from circuits in the arithmetic processing unit, for example.
The control unit 802 has a function of controlling operations of the circuits in the arithmetic processing unit.
For example, the control unit 802 can be formed using the logic circuit according to the above embodiment.
The cache memory 803 is controlled by the control unit 802 and has a function of temporarily storing data at the time of operation of the arithmetic processing unit. Note that the arithmetic processing unit may include a plurality of cache memories 803 as a first cache and a second cache, for example.
The instruction decoder 805 has a function of translating a read command signal. The translated command signal is input to the control unit 802, and the control unit 802 outputs a control signal in accordance with the command signal to the arithmetic logic unit 806.
For example, the instruction decoder 805 can be fondled using the logic circuit according to the above embodiment.
The arithmetic logic unit 806 is controlled by the control unit 802 and has a function of performing logic operation in accordance with the input command signal.
For example, the arithmetic logic unit 806 can be formed using the logic circuit according to the above embodiment.
Note that the arithmetic processing unit may be provided with a register. When the arithmetic processing unit is provided with a register, the register is controlled by the control unit 802. For example, the arithmetic processing unit may be provided with a plurality of registers one of which is used as a register for the arithmetic logic unit 806 and another of which is used as a register for the instruction decoder 805.
As described with reference to FIG. 22, in one example of the arithmetic processing unit according to this embodiment, the use of the logic circuit according to the above embodiment for each of units such as the control unit, the instruction decoder, and the arithmetic logic unit allows retention of data and an increase in processing speed in the units.
Embodiment 7
In this embodiment, examples of electronic devices each provided with the logic circuit according to any of the above embodiments will be described.
Structural examples of the electronic devices according to this embodiment will be described with reference to FIGS. 23A to 23D.
An electronic device in FIG. 23A is an example of a portable information terminal. The portable information terminal in FIG. 23A includes a housing 1001a and a display portion 1002a provided in the housing 1001a. 
Note that a side surface 1003a of the housing 1001a may be provided with a connection terminal for connecting the portable information terminal in FIG. 23A to an external device and/or a button used to operate the portable information terminal.
In the housing 1001a of the portable information terminal illustrated in FIG. 23A, a CPU, a memory circuit, an interface with which signals are transmitted and received between the external device and each of the CPU and the memory circuit, and an antenna which transmits and receives signals to/from the external device are provided.
The portable information terminal illustrated in FIG. 23A has a function of one or more of a telephone set, an electronic book, a personal computer, and a game machine.
An electronic device in FIG. 23B is an example of a folding portable information terminal. The portable information terminal illustrated in FIG. 23B includes a housing 1001b, a display portion 1002b provided in the housing 1001b, a housing 1004, a display portion 1005 provided in the housing 1004, and a hinge 1006 for connecting the housing 1001b and the housing 1004.
In the portable information terminal in FIG. 23B, the housing 1001b can be stacked on the housing 1004 by moving the housing 1001b or the housing 1004 with the hinge 1006.
Note that a side surface 1003b of the housing 1001b or a side surface 1007 of the housing 1004 may be provided with a connection terminal for connecting the portable information terminal in FIG. 23B to an external device and/or a button used to operate the portable information terminal.
The display portion 1002b and the display portion 1005 may display different images or one image. Note that the display portion 1005 is not necessarily provided, and a keyboard which is an input device may be provided instead of the display portion 1005.
The portable information terminal illustrated in FIG. 23B includes a CPU, a memory circuit, and an interface for transmitting and receiving signals between the external device and each of the CPU and the memory circuit, in the housing 1001b or the housing 1004. Note that the portable information terminal in FIG. 23B may be further provided with an antenna which transmits and receives signals to/from the external device.
The portable information terminal illustrated in FIG. 23B has a function of one or more of a telephone set, an electronic book, a personal computer, and a game machine.
The electronic device in FIG. 23C is an example of a stationary information terminal. The stationary information terminal illustrated in FIG. 23C includes a housing 1001c and a display portion 1002c provided in the housing 1001c. 
Note that the display portion 1002c may be provided on a deck portion 1008 of the housing 1001c. 
The stationary information terminal illustrated in FIG. 23C includes a CPU, a memory circuit, and an interface for transmitting and receiving signals between the external device and each of the CPU and the memory circuit, in the housing 1001c. Note that the stationary information terminal in FIG. 23C may be further provided with an antenna which transmits and receives signals to/from the external device.
Further, a side surface 1003c of the housing 1001c in the stationary information terminal in FIG. 23C may be provided with one or more parts selected from a ticket ejection portion that ejects a ticket or the like, a coin slot, and a bill slot.
The stationary information terminal in FIG. 23C serves, for examples, as an automated teller machine, an information communication terminal for ticketing or the like (also referred to as a multi-media station), or a game machine.
FIG. 23D illustrates an example of a stationary information terminal. The stationary information terminal in FIG. 23D includes a housing 1001d and a display portion 1002d provided in the housing 1001d. Note that a support for supporting the housing 1001d may also be provided.
Note that a side surface 1003d of the housing 1001d may be provided with a connection terminal for connecting the stationary information terminal in FIG. 23D to an external device and/or a button used to operate the stationary information terminal.
The stationary information terminal illustrated in FIG. 23D includes a CPU, a memory circuit, and an interface for transmitting and receiving signals between the external device and each of the CPU and the memory circuit, in the housing 1001d. Note that the stationary information terminal illustrated in FIG. 23D may be provided with an antenna which transmits and receives signals to/from the external device.
The stationary information terminal in FIG. 23D serves, for example, as a digital photo frame, a monitor, or a television set.
The logic circuit according to the above embodiment is used as each of the CPUs in the electronic devices illustrated in FIGS. 23A to 23D.
As described with reference to FIGS. 23A to 23D, the examples of the electronic devices according to this embodiment each include the logic circuit according to the above embodiment as the CPU.
This application is based on Japanese Patent Application serial no. 2011-113810 filed with the Japan Patent Office on May 20, 2011, the entire contents of which are hereby incorporated by reference.

## Claims

1. A semiconductor device comprising:
a first capacitor;
a second capacitor;
a third capacitor;
a first transistor; and
a second transistor,
wherein one electrode of each of the first to third capacitors is electrically connected to a gate of the second transistor,
wherein the gate of the second transistor is electrically connected to one of a source and a drain of the first transistor, and
wherein a channel formation region of the first transistor comprises an oxide semiconductor.

2. The semiconductor device according to claim 1, wherein the second transistor is an n-channel transistor.

3. The semiconductor device according to claim 1, wherein the second transistor is a p-channel transistor.

4. The semiconductor device according to claim 1, wherein capacitance values of the first to third capacitors are different from each other.

5. The semiconductor device according to claim 1, wherein the oxide semiconductor comprises indium.

6. A semiconductor device comprising:
a first capacitor;
a second capacitor;
a third capacitor;
a first transistor;
a second transistor;
a third transistor;
a fourth transistor; and
an inverter,
wherein one electrode of each of the first to third capacitors is electrically connected to a gate of the second transistor,
wherein the gate of the second transistor is electrically connected to one of a source and a drain of the first transistor,
wherein one of a source and a drain of the second transistor is electrically connected to one of a source and a drain of the third transistor, and
wherein the other of the source and the drain of the third transistor is electrically connected to one of a source and a drain of the fourth transistor and the inverter.

7. The semiconductor device according to claim 6, wherein the first transistor comprises an oxide semiconductor.

8. The semiconductor device according to claim 6, wherein the second transistor is an n-channel transistor.

9. The semiconductor device according to claim 6, wherein the second transistor is a p-channel transistor.

10. The semiconductor device according to claim 6, wherein capacitance values of the first to third capacitors are different from each other.

11. A method for driving a semiconductor device, the semiconductor device comprising a first capacitor, a second capacitor, a third capacitor, a first transistor, and a second transistor,
wherein one electrode of each of the first to third capacitors is electrically connected to a gate of the second transistor, and
wherein the gate of the second transistor is electrically connected to one of a source and a drain of the first transistor,
the method comprising the steps of:
turning on the first transistor;
supplying electric charge to the gate of the second transistor through the first transistor;
supplying a first signal to the gate of the second transistor through the first capacitor;
supplying a second signal to the gate of the second transistor through the second capacitor,
supplying a third signal to the gate of the second transistor through the third capacitor, turning off the first transistor; and
controlling a switching function of the second transistor by the electric charge and the first to third signals.

12. The method for driving the semiconductor device, according to claim 11, wherein the first transistor comprises an oxide semiconductor.

13. The method for driving the semiconductor device, according to claim 11, wherein the second transistor is an n-channel transistor.

14. The method for driving the semiconductor device, according to claim 11, wherein the second transistor is a p-channel transistor.

15. The method for driving the semiconductor device, according to claim 11, wherein capacitance values of the first to third capacitors are different from each other.

16. A method for driving a semiconductor device, the semiconductor device comprising a first capacitor, a second capacitor, a third capacitor, a first transistor, a second transistor, a third transistor, a fourth transistor, and an inverter,
wherein one electrode of each of the first to third capacitors is electrically connected to a gate of the second transistor,
wherein the gate of the second transistor is electrically connected to one of a source and a drain of the first transistor,
wherein one of a source and a drain of the second transistor is electrically connected to one of a source and a drain of the third transistor, and
wherein the other of the source and the drain of the third transistor is electrically connected to one of a source and a drain of the fourth transistor and the inverter,
the method comprising the steps of:
turning on the first transistor;
supplying electric charge to the gate of the second transistor through the first transistor;
supplying a first signal to the gate of the second transistor through the first capacitor;
supplying a second signal to the gate of the second transistor through the second capacitor,
supplying a third signal to the gate of the second transistor through the third capacitor, turning off the first transistor;
controlling a switching function of the second transistor by the electric charge and the first to third signals; and
outputting an output signal from the inverter.

17. The method for driving the semiconductor device, according to claim 16, wherein the first transistor comprises an oxide semiconductor.

18. The method for driving the semiconductor device, according to claim 16, wherein the second transistor is an n-channel transistor.

19. The method for driving the semiconductor device, according to claim 16, wherein the second transistor is a p-channel transistor.

20. The method for driving the semiconductor device, according to claim 16, wherein capacitance values of the first to third capacitors are different from each other.