# Patent

## Title
Resist composition and resist pattern forming method

## Abstract

A resist composition which generates an acid upon exposure and exhibits changed solubility in a developing solution by the action of the acid contains a high-molecular weight compound (A1) having a constituent unit (a0) represented by a general formula (a0-1) and a constituent unit (a1-1) including a monocyclic group-containing acid decomposable group whose polarity increases by the action of an acid. In the formula (a0-1), R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms; Ya01 represents a single bond or a divalent linking group; X01 represents a sulfur atom or an oxygen atom; and Ra01 represents an optionally substituted cyclic group, chain alkyl group, or chain alkenyl group.

## Background
CROSS-REFERENCE TO RELATED APPLICATIONS
Priority is claimed on Japanese Patent Application No. 2013-062866, filed Mar. 25, 2013, the content of which is incorporated herein by reference.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a resist composition and a resist pattern forming method.
2. Background Art
In lithography techniques, for example, a process including forming a resist film formed of a resist material on a substrate, performing selective exposure on the resist film, and performing a development treatment, thereby forming a resist pattern having a predetermined shape on the resist film is performed. A resist material whose characteristics are changed so that the exposed areas of the resist film are dissolved in a developing solution is referred to as a positive type, and a resist material whose characteristics are changed so that the exposed areas are not dissolved in a developing solution is referred to as a negative type.
In recent years, in the manufacturing of semiconductor elements and liquid crystal display elements, advances in lithography technologies have led to rapid progress in the field of pattern miniaturization. In general, these miniaturization techniques involve shortening of the wavelength (increasing the energy) of the exposure light source. Specifically, ultraviolet rays represented by g-line or i-line have hitherto been used. But nowadays, KrF excimer lasers and ArF excimer lasers are starting to be introduced in mass production of semiconductors. In addition, investigations are also being conducted on EUV (extreme ultraviolet radiation), EB (electron beams), X-rays, and the like, which have a shorter wavelength (higher energy) than these excimer lasers.
The resist material is required to have lithography properties such as sensitivity to the exposure light source and resolution capable of reproducing patterns of minute dimensions.
As the resist material that satisfies such requirements, a chemically amplified resist composition containing a base material component which exhibits changed solubility in a developing solution by the action of an acid and an acid generator component that generates an acid upon exposure has been used.
For example, in the case where the developing solution is an alkali developing solution (alkali development process), a composition containing a resin component (base resin) exhibiting increased solubility in the alkali developing solution by the action of an acid and an acid generator component is generally used as a positive-type chemically amplified resist composition. When a resist film formed using such a resist composition is selectively exposed during the formation of a resist pattern, an acid is generated from the acid generator component in the exposed areas, the polarity of the base resin increases by the action of the acid, and thus the exposed areas become soluble in the alkali developing solution. Therefore, alkali development is performed to form a positive type pattern in which the unexposed areas remain as a pattern.
When such a chemically amplified resist composition is applied to a solvent development process using a developing solution (organic developing solution) containing an organic solvent, the solubility in an organic developing solution relatively decreases as the polarity of the base resin increases. Thus, the unexposed areas of the resist film are dissolved and removed by the organic developing solution and a negative type resist pattern in which the exposed areas remain as a pattern is formed. The solvent development process adapted to form a negative type resist pattern as described above is sometimes referred to as a negative type development process (see, for example, JP-A-2009-025723).
In general, the base resin used in the chemically amplified resist composition has plural kinds of constituent units for the purpose of enhancing lithography properties and the like.
For example, in the case of a resin component which exhibits increased solubility in an alkali developing solution by the action of an acid, a constituent unit including an acid decomposable group which is decomposed by the action of an acid generated from an acid generator to increase its polarity is used. In addition, a constituent unit including a lactone-containing cyclic group, a constituent unit including a polar group such as a hydroxyl group, and the like are used in combination (see, for example, JP-A-2003-241365).
Recently, a demand for a high-molecular weight compound which is useful as a base resin for a resist composition has increased with gradual progress in the field of pattern miniaturization.
For example, in order to improve roughness, a resist composition using a high-molecular weight compound having a constituent unit including a monocyclic group-containing acid decomposable group as the above-described acid decomposable group is proposed (see JP-A-2008-003381).
SUMMARY OF THE INVENTION
While lithography techniques advance and application fields thereof are expanded, enhancements of various lithography properties such as an increase of sensitivity and an improvement of roughness in the formation of a resist pattern are required. However, for example, in the case of the resist composition described in JP-A-2008-003381, it was difficult to secure a sufficient thickness (pattern height) of a resist film after development.
The invention is contrived in view of the circumstances, and an object thereof is to provide a resist composition which can form a resist pattern which is excellent in various lithography properties.
According to a first aspect of the invention, there is provided a resist composition which generates an acid upon exposure and exhibits changed solubility in a developing solution by the action of the acid, including a base material component (A) which exhibits changed solubility in a developing solution by the action of an acid, in which the base material component (A) contains a high-molecular weight compound (A1) having a constituent unit (a0) represented by the following general formula (a0-1) and a constituent unit (a1-1) including a monocyclic group-containing acid decomposable group whose polarity increases by the action of an acid.




In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms; Ya01 a single bond or a divalent linking group; X01 represents a sulfur atom or an oxygen atom; and Ra01 represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group.
According to a second aspect of the invention, there is provided a resist pattern forming method including: forming a resist film on a support using the resist composition of the first aspect of the invention; exposing the resist film; and developing the resist film after the exposure to form a resist pattern.
According to a resist composition and a resist pattern forming method of the invention, it is possible to form a resist pattern which is excellent in various lithography properties.


DETAILED DESCRIPTION OF THE INVENTION
In the present specification and claims, the term “aliphatic” is a relative concept used in relation to the term “aromatic” and defines a group or a compound each having no aromaticity.
The term “alkyl group” includes a linear, branched or cyclic, monovalent saturated hydrocarbon group, unless otherwise specified. The same applies for the alkyl group within an alkoxy group.
The term “alkylene group” includes a linear, branched or cyclic, divalent saturated hydrocarbon group, unless otherwise specified.
The term “halogenated alkyl group” refers to a group in which some or all hydrogen atoms of an alkyl group are substituted with a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
The term “fluorinated alkyl group” or “fluorinated alkylene group” refers to a group in which some or all hydrogen atoms of an alkyl group or an alkylene group are substituted with a fluorine atom.
The term “constituent unit” means a monomer unit constituting a high-molecular weight compound (for example, a resin, a polymer, or a copolymer).
The case of describing “may have a substituent” or “optionally substituted” includes both of the case where the hydrogen atom (—H) is substituted with a monovalent group and the case where the methylene group (—CH2—) is substituted with a divalent group.
The term “exposure” is a concept including irradiation with any form of radiation.
The term “constituent unit derived from an acrylic ester” means a constituent unit constituted upon cleavage of an ethylenic double bond of an acrylic ester.
The term “acrylic ester” refers to a compound in which a terminal hydrogen atom of a carboxy group of acrylic acid (CH2═CH—COOH) is substituted with an organic group.
In the acrylic ester, a hydrogen atom bonded to a carbon atom at the α-position may be substituted with a substituent. The substituent (Rα0) with which the hydrogen atom bonded to the carbon atom at the α-position is substituted is an atom other than the hydrogen atom or a group, and examples thereof include an alkyl group having 1 to 5 carbon atoms and a halogenated alkyl group having 1 to 5 carbon atoms. In addition, examples of the acrylic ester also include an itaconic acid diester in which the substituent (Rα0) is substituted with an ester bond-containing substituent and an α-hydroxyacrylic ester in which the substituent (Rα0) is substituted with a hydroxyalkyl group or a group in which the hydroxyl group of the hydroxyalkyl group is modified. It is to be noted that the carbon atom at the α-position of the acrylic ester refers to a carbon atom to which the carbonyl group of acrylic acid is bonded, unless otherwise specified.
The acrylic ester in which the hydrogen atom bonded to the carbon atom at the α-position is substituted with a substituent is hereinafter sometimes referred to as “α-substituted acrylic ester”. In addition, the acrylic ester and the α-substituted acrylic ester are sometimes referred to comprehensively as “(α-substituted) acrylic ester”.
The term “constituent unit derived from acrylamide” means a constituent unit constituted upon cleavage of an ethylenic double bond of acrylamide.
In the acrylamide, the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent, and either one or both of the hydrogen atoms of the amino group of the acrylamide may be substituted with a substituent. It is to be noted that the carbon atom at the α-position of the acrylamide refers to a carbon atom to which the carbonyl group of the acrylamide is bonded, unless otherwise specified.
Examples of the substituent with which the hydrogen atom bonded to the carbon atom at the α-position of the acrylamide is substituted include those exemplified above as the substituent at the α-position (substituent) (Rα0)) for the α-substituted acrylic ester.
The term “constituent unit derived from hydroxystyrene or a hydroxystyrene derivative” means a constituent unit constituted upon cleavage of an ethylenic double bond of hydroxystyrene or a hydroxystyrene derivative.
The term “hydroxystyrene derivative” is a concept including compounds in which the hydrogen atom at the α-position of hydroxystyrene is substituted with other substituent such as an alkyl group and a halogenated alkyl group, and derivatives thereof. Examples of such derivatives include those in which the hydrogen atom of the hydroxyl group of hydroxystyrene in which the hydrogen atom at the α-position may be substituted with a substituent is substituted with an organic group; and those in which a substituent other than the hydroxyl group is bonded to the benzene ring of hydroxystyrene in which the hydrogen atom at the α-position may be substituted with a substituent. It is to be noted that the term “α-position (carbon atom at the α-position)” refers to a carbon atom to which the benzene ring is bonded, unless otherwise specified.
Examples of the substituent with which the hydrogen atom at the α-position of hydroxystyrene is substituted include those exemplified above as the substituent at the α-position for the α-substituted acrylic ester.
The term “constituent unit derived from vinylbenzoic acid or a vinylbenzoic acid derivative” means a constituent unit constituted upon cleavage of an ethylenic double bond of vinylbenzoic acid or a vinylbenzoic acid derivative.
The term “vinylbenzoic acid derivative” is a concept including compounds in which the hydrogen atom at the α-position of vinylbenzoic acid is substituted with other substituent such as an alkyl group and a halogenated alkyl group, and derivatives thereof. Examples of such derivatives include those in which the hydrogen atom of the carboxy group of vinylbenzoic acid in which the hydrogen atom at the α-position may be substituted with a substituent is substituted with an organic group; and those in which a substituent other than a hydroxyl group and a carboxy group is bonded to the benzene ring of vinylbenzoic acid in which the hydrogen atom at the α-position may be substituted with a substituent. It is to be noted that the term “α-position (carbon atom at the α-position)” refers to a carbon atom to which the benzene ring is bonded, unless otherwise specified.
The term “styrene” is a concept including styrene and compounds in which the hydrogen atom at the α-position of styrene is substituted with other substituent such as an alkyl group and a halogenated alkyl group.
The term “constituent unit derived from styrene” or “constituent unit derived from a styrene derivative” means a constituent unit constituted upon cleavage of an ethylenic double bond of styrene or a styrene derivative.
The alkyl group as the substituent at the α-position is preferably a linear or branched alkyl group. Specifically, examples thereof include an alkyl group having 1 to 5 carbon atoms (for example, a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, or a neopentyl group).
In addition, specifically, examples of the halogenated alkyl group as the substituent at the α-position include a group in which some or all hydrogen atoms of the above-described “alkyl group as the substituent at the α-position” are substituted with a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being especially preferable.
In addition, specifically, examples of the hydroxyalkyl group as the substituent at the α-position include a group in which some or all hydrogen atoms of the above-described “alkyl group as the substituent at the α-position” are substituted with a hydroxyl group. The number of the hydroxyl group in the hydroxyalkyl group is preferably 1 to 5, and most preferably 1.
Resist Composition
A resist composition of a first aspect of the invention is a resist composition which generates an acid upon exposure and exhibits changed solubility in a developing solution by the action of the acid, and contains a base material component (A) (hereinafter, also referred to as “component (A)”) which exhibits changed solubility in a developing solution by the action of an acid.
When a resist film is formed using such a resist composition and is selectively exposed, an acid is generated in the exposed areas and the solubility of the component (A) in the developing solution changes by the action of the acid, whereas the solubility of the component (A) in the developing solution does not change in the unexposed areas. Thus, a difference is caused between the exposed areas and the unexposed areas in solubility in the developing solution. Therefore, when the resist film is developed, the exposed areas are dissolved and removed and a positive type resist pattern is formed in the case where the resist composition is a positive type. In the case where the resist composition is a negative type, the unexposed areas are dissolved and removed and a negative type resist pattern is formed.
In the present specification, the resist composition which is used to form a positive type resist pattern by dissolving and removing exposed areas is referred to as a positive type resist composition, and the resist composition which is used to form a negative type resist pattern by dissolving and removing unexposed areas is referred to as a negative type resist composition.
The resist composition of this aspect may be a positive type resist composition, or a negative type resist composition.
In addition, the resist composition of this aspect may be for use in an alkali development process using an alkali developing solution in a development treatment for the case where a resist pattern is formed, or in a solvent development process using a developing solution containing an organic solvent (organic developing solution) in the development treatment.
The resist composition of this aspect has acid generating ability to generate an acid upon exposure, and the acid may be generated upon exposure from the component (A) or an additive component blended separately from the component (A).
Specifically, the resist composition of this aspect may be:
(1) a composition which contains an acid generator component (B) which generates an acid upon exposure (hereinafter, referred to as “component (B)”);
(2) a composition in which the component (A) generates an acid upon exposure; or
(3) a composition in which the component (A) generates an acid upon exposure, and which further contains a component (B).
That is, in the cases of the above-described (2) and (3), the component (A) is a “base material component which generates an acid upon exposure and exhibits changed solubility in a developing solution by the action of the acid”. When the component (A) is a base material component which generates an acid upon exposure and exhibits changed solubility in a developing solution by the action of the acid, a component (A1) to be described later is preferably a high-molecular weight compound which generates an acid upon exposure and exhibits changed solubility in a developing solution by the action of the acid. As such a high-molecular weight compound, a resin having a constituent unit which generates an acid upon exposure can be used. A known constituent unit can be used as the constituent unit which generates an acid upon exposure.
The resist composition of this aspect is preferably the composition described in (1).
Component (A)
In the invention, the term “base material component” refers to an organic compound having film-forming ability and an organic compound preferably having a molecular weight of 500 or more is used. When the molecular weight of the organic compound is 500 or more, the film-forming ability is improved and a nano-level resist pattern is easily formed.
The organic compound which is used as the base material component is roughly classified into a non-polymerized material and a polymer.
In general, the non-polymerized material has a molecular weight of 500 to less than 4,000. Hereinafter, the term “low-molecular weight compound” refers to a non-polymerized material having a molecular weight of 500 to less than 4,000.
In general, the polymer has a molecular weight of 1,000 or more. Hereinafter, the term “resin” or “high-molecular weight compound” refers to a polymer having a molecular weight of 1,000 or more.
A mass average molecular weight as converted into polystyrene by means of gel permeation chromatography (GPC) is employed for the molecular weight of the polymer.
The component (A) which is used in the resist composition of this aspect contains a high-molecular weight compound (A1) (hereinafter, referred to as “component (A1)”) having a constituent unit (a0) represented by a general formula (a0-1) and a constituent unit (a1-1) including a monocyclic group-containing acid decomposable group whose polarity increases by the action of an acid.
At least the component (A1) is used as the component (A), and with the component (A1), other high-molecular weight compounds and/or low-molecular weight compounds may be used in combination.
Component (A1)
The component (A1) is a high-molecular weight compound having a constituent unit (a0) represented by a general formula (a0-1) and a constituent unit (a1-1) including a monocyclic group-containing acid decomposable group whose polarity increases by the action of an acid.
When a resist film formed using the resist composition of this aspect is exposed, at least a part of the bond in the structure of the constituent unit (a1-1) is cleaved by the action of an acid and the polarity of the constituent unit increases. Therefore, the resist composition of this aspect becomes a positive type in an alkali development process, and becomes a negative type in a solvent development process. The polarity of the component (A1) changes before and after exposure, and thus a good development contrast can be obtained using the component (A1) not only in the alkali development process, but also in the solvent development process.
That is, in the case of applying an alkali development process, the component (A1) is sparingly soluble in an alkali developing solution before exposure, but when an acid is generated upon exposure, the action of the acid causes an increase in polarity, thereby increasing the solubility in the alkali developing solution. Therefore, in the formation of a resist pattern, by performing selective exposure of a resist film obtained by applying the resist composition to a support, the exposed areas change to have soluble properties from sparingly soluble properties in the alkali developing solution, whereas the unexposed areas do not change in the state where they are still sparingly alkali-soluble, and hence, a positive type resist pattern can be formed by alkali developing.
Meanwhile, in the case of applying a solvent development process, the component (A1) exhibits high solubility in an organic developing solution before exposure, and when an acid is generated upon exposure, the polarity increases by the action of the acid, thereby decreasing the solubility in the organic developing solution. Therefore, in the formation of a resist pattern, by performing selective exposure of a resist film obtained by applying the resist composition to a support, the exposed areas change to have sparingly soluble properties from soluble properties in the organic developing solution, whereas the unexposed areas do not change in the state where they are still soluble. Thus, a contrast can be made between the exposed areas and unexposed areas by performing developing with the organic developing solution, and thus a negative type resist pattern can be formed.
Constituent Unit (a0)
The constituent unit (a0) is a constituent unit represented by the following general formula (a0-1).




In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms; Ya01 represents a single bond or a divalent linking group; X01 represents a sulfur atom or an oxygen atom; and Ra01 represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group.
In the formula (a0-1), the alkyl group having 1 to 5 carbon atoms in R is preferably a linear or branched alkyl group having 1 to 5 carbon atoms. Specifically, examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group.
The halogenated alkyl group having 1 to 5 carbon atoms is a group in which some or all the hydrogen atoms of the above-described “alkyl group having 1 to 5 carbon atoms in R” are substituted with halogen atoms. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is especially preferable.
R is preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms, and is especially preferably a hydrogen atom or a methyl group in terms of easiness in industrial availability.
In the formula (a0-1), Ya01 represents a single bond or a divalent linking group.
The divalent linking group in Ya01 is not particularly limited, and preferred examples thereof include an optionally substituted divalent hydrocarbon group and a hetero atom-containing divalent linking group.
Optionally Substituted Divalent Hydrocarbon Group:
When Ya01 represents an optionally substituted divalent hydrocarbon group, the hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group.
Aliphatic Hydrocarbon Group in Ya01 
The aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity. The aliphatic hydrocarbon group may be either saturated or unsaturated, and in general, it is preferably saturated.
Examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group, and an aliphatic hydrocarbon group containing a ring in a structure thereof.
Linear or Branched Aliphatic Hydrocarbon Group
The linear or branched aliphatic hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and most preferably 1 to 3 carbon atoms.
The linear aliphatic hydrocarbon group is preferably a linear alkylene group, and specifically, examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
The branched aliphatic hydrocarbon group is preferably a branched alkylene group, and specifically, examples thereof include alkylalkylene groups, including alkylmethylene groups such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; alkylethylene groups such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; alkyltrimethylene groups such as —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; and alkyltetramethylene groups such as —CH(CH)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—. As the alkyl group in the alkylalkylene group, a linear alkyl group having 1 to 5 carbon atoms is preferable.
The linear or branched aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include a fluorine atom, a fluorinated alkyl group having 1 to 5 carbon atoms, which is substituted with a fluorine atom, and a carbonyl group.
Aliphatic Hydrocarbon Group Containing Ring in Structure Thereof
Examples of the aliphatic hydrocarbon group containing a ring in a structure thereof include an optionally substituted cyclic aliphatic hydrocarbon group containing a hetero atom in a ring structure thereof (a group in which two hydrogen atoms are eliminated from an aliphatic hydrocarbon ring), a group in which the cyclic aliphatic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which the cyclic aliphatic hydrocarbon group intervenes on the way of a linear or branched aliphatic hydrocarbon group. Examples of the linear or branched aliphatic hydrocarbon group include the same groups as those described above.
The cyclic aliphatic hydrocarbon group has preferably 3 to 20 carbon atoms, and more preferably 3 to 12 carbon atoms.
The cyclic aliphatic hydrocarbon group may be either a polycyclic group or a monocyclic group. The monocyclic alicyclic hydrocarbon group is preferably a group in which two hydrogen atoms are eliminated from a monocycloalkane. The monocycloalkane is preferably one having 3 to 6 carbon atoms. Specifically, examples thereof include cyclopentane and cyclohexane. The polycyclic alicyclic hydrocarbon group is preferably a group in which two hydrogen atoms are eliminated from a polycycloalkane. The polycycloalkane is preferably one having 7 to 12 carbon atoms. Specifically, examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
The cyclic aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, and a carbonyl group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, or a tert-butoxy group, and most preferably a methoxy group or an ethoxy group.
Examples of the halogen atom as the substituent include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being preferable.
Examples of the halogenated alkyl group as the substituent include a group in which some or all the hydrogen atoms of the above-described alkyl group are substituted with the above-described halogen atom.
In the cyclic aliphatic hydrocarbon group, some of the carbon atoms constituting the ring structure thereof may be substituted with a substituent containing a hetero atom. The substituent containing a hetero atom is preferably —O—, —C(═O)—O—, —S—, —S(═O)2—, or —S(═C)2—O—.
Aromatic Hydrocarbon Group in Ya01 
The aromatic hydrocarbon group is a hydrocarbon group having at least one aromatic ring.
This aromatic ring is not particularly limited so long as it is a cyclic conjugated system having (4n+2) π electrons, and it may be either monocyclic or polycyclic. The number of carbon atoms of the aromatic ring is preferably 5 to 30, more preferably 5 to 20, still more preferably 6 to 15, and especially preferably 6 to 12. However, the number of carbon atoms does not include the number of carbon atoms in the substituent. Specifically, examples of the aromatic ring include an aromatic hydrocarbon ring such as benzene, naphthalene, anthracene, and phenanthrene; and an aromatic heterocyclic ring in which some of the carbon atoms constituting the above-described aromatic hydrocarbon ring are substituted with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic ring include an oxygen atom, a sulfur atom, and a nitrogen atom. Specifically, examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specifically, examples of the aromatic hydrocarbon group include a group in which two hydrogen atoms are eliminated from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (an arylene group or a heteroarylene group); a group in which two hydrogen atoms are eliminated from an aromatic compound containing two or more aromatic rings (for example, biphenyl or fluorene); and a group in which one hydrogen atom of a group in which one hydrogen atom is eliminated from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (an aryl group or a heteroaryl group) is substituted with an alkylene group (for example, a group in which one hydrogen atom is further eliminated from an aryl group in an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, and a 2-naphthylethyl group). The number of carbon atoms of the alkylene group bonded to the above-described aryl group or heteroaryl group is preferably 1 to 4, more preferably 1 to 2, and especially preferably 1.
In the above-described aromatic hydrocarbon group, the hydrogen atom(s) which the aromatic hydrocarbon group has may be substituted with a substituent. For example, the hydrogen atom(s) bonded to the aromatic ring in the aromatic hydrocarbon group may be substituted with a substituent. Examples of the substituent include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, and a hydroxyl group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms. The alkyl group is most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
Examples of the alkoxy group, the halogen atom, and the halogenated alkyl group as the substituent include those exemplified above for the substituent with which the hydrogen atom(s) which the cyclic aliphatic hydrocarbon group has is substituted.
Hetero Atom-Containing Divalent Linking Group:
When Ya01 represents a hetero atom-containing divalent linking group, preferred examples of the linking group include —O—, —C(═O)—O—, —C(═O)—, —O—C(═O)—O—, —C(═O)—NH—, —NH—, —NH—C(═NH)— (H may be substituted with a substituent such as an alkyl group and an acyl group), —S—, —S(═O)2—, —S(═O)2—O—, and a group represented by a general formula: —Y21—O—Y22—, —Y21—O—, —Y21—C(═O)—O—, —C(═O)—O—Y21—, —[Y21C(═O)—O]m′′—Y22—, —Y21—O—C(═O)—Y22—, or —Y21—S(═O)2—O—Y22—. In the formulae, each of Y21 and Y22 independently represents an optionally substituted divalent hydrocarbon group, O represents an oxygen atom, and m′′ represents an integer of 0 to 3.
When the hetero atom-containing divalent linking group is —C(═O)—NH—, —C(═O)—NH—C(═O)—, —NH—, or —NH—C(═NH)—, H may be substituted with a substituent such as an alkyl group and an acyl group. The number of carbon atoms of the substituent (such as an alkyl group and an acyl group) is preferably 1 to 10, more preferably 1 to 8, and especially preferably 1 to 5.
In the general formula: —Y21—O—Y22—, —Y21—O—, —Y21—C(═O)—O—, —C(═O)—O—Y21—, —[Y21—C(═O)—O]m′′—Y22—, —Y21—O—C(═O)—Y22—, or —Y21—S(═O)2—O—Y22—, each of Y21 and Y22 independently represents an optionally substituted divalent hydrocarbon group. Examples of the divalent hydrocarbon group include the same divalent hydrocarbon groups as those exemplified above for the divalent linking group (optionally substituted divalent hydrocarbon group).
Y21 is preferably a linear aliphatic hydrocarbon group, more preferably a linear alkylene group, still more preferably a linear alkylene group having 1 to 5 carbon atoms, and especially preferably a methylene group or an ethylene group.
Y22 is preferably a linear or branched aliphatic hydrocarbon group, and more preferably a methylene group, an ethylene group, or an alkylmethylene group. The alkyl group in the alkylmethylene group is preferably a linear alkyl group having 1 to 5 carbon atoms, more preferably a linear alkyl group having 1 to 3 carbon atoms, and most preferably a methyl group.
In the group represented by the formula: —[Y21—C(═O)—O]m′′—Y22—, m′′ represents an integer of 0 to 3, preferably an integer of 0 to 2, more preferably 0 or 1, and especially preferably 1. Namely, the group represented by the formula: —[Y21—C(═O)—O]m′′—Y22— is especially preferably a group represented by the formula: —Y21—C(═O)—O—Y22—. Above all, a group represented by the formula: —(CH2)a′—C(═O)—O—(CH2)b′— is preferable. In the foregoing formula, a′ represents an integer of 1 to 10, preferably an integer of 1 to 8, more preferably an integer of 1 to 5, still more preferably 1 or 2, and most preferably 1. b′ represents an integer of 1 to 10, preferably 1 to 8, more preferably 1 to 5, still more preferably 1 or 2, and most preferably 1.
Ya01 is preferably a single bond, an ester bond [—C(═O)—O—], an ether bond (—O—), a linear or branched alkylene group, or a combination thereof. Of these, Ya01 is more preferably a single bond.
In the formula (a0-1), X01 is a sulfur atom or an oxygen atom, and an oxygen atom is preferable.
In the formula (a0-1), Ra01 is an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group.
Optionally Substituted Cyclic Group:
The cyclic group is preferably a cyclic hydrocarbon group. The cyclic hydrocarbon group may be an aromatic hydrocarbon group or a cyclic aliphatic hydrocarbon group. The aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity. In addition, the aliphatic hydrocarbon group may be either saturated or unsaturated, and in general, it is preferably saturated.
The aromatic hydrocarbon group in Ra01 is a hydrocarbon group having at least one aromatic ring.
This aromatic ring is not particularly limited so long as it is a cyclic conjugated system having (4n+2) π electrons, and it may be either monocyclic or polycyclic. The number of carbon atoms of the aromatic ring is preferably 5 to 30, more preferably 5 to 20, still more preferably 6 to 15, and especially preferably 6 to 12. However, the number of carbon atoms does not include the number of carbon atoms in the substituent. Specifically, examples of the aromatic ring include an aromatic hydrocarbon ring such as benzene, naphthalene, anthracene, and phenanthrene; and an aromatic heterocyclic ring in which some of the carbon atoms constituting the above-described aromatic hydrocarbon ring are substituted with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic ring include an oxygen atom, a sulfur atom, and a nitrogen atom. Specifically, examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specifically, examples of the aromatic hydrocarbon group in Ra01 include a group in which one hydrogen atom is eliminated from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (an aryl group or a heteroaryl group); a group in which one hydrogen atom is eliminated from an aromatic compound containing two or more aromatic rings (for example, biphenyl or fluorene); and a group in which one hydrogen atom of the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring is substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, and a 2-naphthylethyl group). The number of carbon atoms of the alkylene group bonded to the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring is preferably 1 to 4, more preferably 1 to 2, and especially preferably 1.
Examples of the cyclic aliphatic hydrocarbon group in Ra01 include an aliphatic hydrocarbon group containing a ring in a structure thereof.
Examples of the aliphatic hydrocarbon group containing a ring in a structure thereof include an alicyclic hydrocarbon group (a group in which one hydrogen atom is eliminated from an aliphatic hydrocarbon ring), a group in which an alicyclic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which an alicyclic hydrocarbon group intervenes on the way of a linear or branched aliphatic hydrocarbon group.
The number of carbon atoms of the above-described alicyclic hydrocarbon group is preferably 3 to 20, and more preferably 3 to 12.
The above-described alicyclic hydrocarbon group may be either a polycyclic group or a monocyclic group. The monocyclic alicyclic hydrocarbon group is preferably a group in which one or more hydrogen atoms are eliminated from a monocycloalkane. The monocycloalkane is preferably one having 3 to 6 carbon atoms, and specifically, examples thereof include cyclopentane and cyclohexane. The polycyclic alicyclic hydrocarbon group is preferably a group in which one or more hydrogen atoms are eliminated from a polycycloalkane. The polycycloalkane is preferably one having 7 to 12 carbon atoms, and specifically, examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
Above all, the alicyclic hydrocarbon group in Ra01 is preferably a polycyclic group, more preferably a group in which one hydrogen atom is eliminated from a polycycloalkane, especially preferably an adamantyl group or a norbornyl group, and most preferably an adamantyl group.
The number of carbon atoms of the linear or branched aliphatic hydrocarbon group which may be bonded to an alicyclic hydrocarbon group is preferably 1 to 10, more preferably 1 to 6, still more preferably 1 to 4, and most preferably 1 to 3.
The linear aliphatic hydrocarbon group is preferably a linear alkylene group. Specifically, examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
The branched aliphatic hydrocarbon group is preferably a branched alkylene group. Specifically, examples thereof include an alkylalkylene group such as an alkylmethylene group, for example, —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; an alkylethylene group, for example, —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; an alkyltrimethylene group, for example, —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; and an alkyltetramethylene group, for example, —CH(CH3)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—. The alkyl group in the alkylalkylene group is preferably a linear alkyl group having 1 to 5 carbon atoms.
In addition, the cyclic hydrocarbon group in Ra01 may contain a hetero atom as in a heterocyclic ring or the like. Specifically, examples thereof include lactone-containing cyclic groups represented by general formulae (a2-r-1) to (a2-r-7) to be described later, respectively, and —SO2-containing cyclic groups represented by general formulae (a5-r-1) to (a5-r-4) to be described later, respectively, and besides, heterocyclic groups which will be exemplified below. Of these, lactone-containing cyclic groups represented by the general formulae (a2-r-1) to (a2-r-7), respectively, and —SO2-containing cyclic groups represented by the general formulae (a5-r-1) to (a5-r-4), respectively are especially preferable. In the formulae, * represents a bond (and has the same usage below).







Examples of the substituent which the cyclic group represented by Ra01 may have include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group (—C(═O)—), an ether bond (—O—), an ester bond (—C(═O)—O—), and a nitro group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, or a tert-butoxy group, and most preferably a methoxy group or an ethoxy group.
Examples of the halogen atom as the substituent include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being preferable.
Examples of the halogenated alkyl group as the substituent include a group in which some or all the hydrogen atoms of an alkyl group having 1 to 5 carbon atoms, for example, a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group, are substituted with the above-described halogen atom.
The carbonyl group (—C(═O)—), the ether bond (—O—), and the ester bond (—C(═O)—O—) as the substituent are groups with which a methylene group (—CH2—) constituting the cyclic group is substituted.
Optionally Substituted Chain Alkyl Group:
The chain alkyl group in Ra01 may be either linear or branched.
The number of carbon atoms of the linear alkyl group is preferably 1 to 20, more preferably 1 to 15, still more preferably 1 to 10, and especially preferably 1 to 5. Specifically, examples thereof include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decanyl group, an undecyl group, a dodecyl group, a tridecyl group, an isotridecyl group, a tetradecyl group, a pentadecyl group, a hexadecyl group, an isohexadecyl group, a heptadecyl group, an octadecyl group, a nonadecyl group, an eicosyl group, a heneicosyl group, and a docosyl group.
The number of carbon atoms of the branched alkyl group is preferably 3 to 20, more preferably 3 to 15, and still more preferably 3 to 10. Specifically, examples thereof include a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a 4-methylpentyl group.
Optionally Substituted Chain Alkenyl Group
The chain alkenyl group in Ra01 may be either linear or branched. The number of carbon atoms of the chain alkenyl group is preferably 2 to 10, more preferably 2 to 5, still more preferably 2 to 4, and especially preferably 3. Examples of the linear alkenyl group include a vinyl group, a propenyl group (allyl group), and a butynyl group. Examples of the branched alkenyl group include a 1-methylvinyl group, a 2-methylvinyl group, a 1-methylpropenyl group, and a 2-methylpropenyl group.
Above all, the chain alkenyl group is more preferably a vinyl group or a propenyl group, and especially preferably a vinyl group.
Examples of the substituent which the chain alkyl group or chain alkenyl group in Ra01 may have include an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group (—C(═O)—), an ether bond (—O—), an ester bond (—C(═O)—O—), a nitro group, an amino group, and the cyclic groups in the above-described Ra01.
The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, or a tert-butoxy group, and most preferably a methoxy group or an ethoxy group.
Examples of the halogen atom as the substituent include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being preferable.
Examples of the halogenated alkyl group as the substituent include a group in which some or all the hydrogen atoms of an alkyl group having 1 to 5 carbon atoms, for example, a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group, are substituted with the above-described halogen atom.
The carbonyl group (—C(═O)—), the ether bond (—O—), and the ester bond (—C(═O)—O—) as the substituent are groups with which a methylene group (—CH2—) constituting the chain alkyl group or chain alkenyl group is substituted.
Of the foregoing, Ra01 is preferably an optionally substituted cyclic group, and more preferably an optionally substituted cyclic hydrocarbon group in view of the fact that sensitivity further increases in the formation of a resist pattern. Above all, Ra01 is especially preferably an aromatic hydrocarbon group or an aliphatic hydrocarbon group containing a polycyclic group in a structure thereof (a carbon atom or a hydrogen atom of the aromatic hydrocarbon group or the aliphatic hydrocarbon group may be substituted with a substituent), and most preferably an aliphatic hydrocarbon group containing a polycyclic group in a structure thereof (a carbon atom or a hydrogen atom of the aliphatic hydrocarbon group may be substituted with a substituent), since good sensitivity is maintained, roughness is further decreased, and the thickness (pattern height) of a resist film hardly varies before and after development.
Preferred examples of the constituent unit (a0) include constituent units represented by the following general formula (a0-1-1), (a0-1-2), or (a0-1-3) in view of the fact that sensitivity, resolution, and lithography properties are further enhanced.




In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a halogenated alkyl group having 1 to 5 carbon atoms; X01 represents a sulfur atom or an oxygen atom; Ra011 represents an aromatic hydrocarbon group (a carbon atom or a hydrogen atom of the aromatic hydrocarbon group may be substituted with a substituent); Ra012 represents an aliphatic hydrocarbon group containing a polycyclic group (a carbon atom or a hydrogen atom of the aliphatic hydrocarbon group may be substituted with a substituent); Ra013 represents an aliphatic hydrocarbon group other than the group represented by Ra012 (a carbon atom or a hydrogen atom of the aliphatic hydrocarbon group may be substituted with a substituent); each of d1, d2, and d3 represents 0 or 1; and each of e1, e2, and e3 represents an integer of 1 to 5.
In the formula (a0-1-1), (a0-1-2), or (a0-1-3), R is the same as R in the formula (a0-1).
X01 is a sulfur atom or an oxygen atom, and is preferably an oxygen atom.
In the formula (a0-1-1), the aromatic hydrocarbon group in Ra011 is the same as the aromatic hydrocarbon group in Ra01 in the formula (a0-1). Ra011 is preferably a group in which one hydrogen atom is eliminated from an aromatic ring (aromatic hydrocarbon ring), and especially preferably a phenyl group or a naphthyl group. The substituent with which the aromatic hydrocarbon group in Ra011 is substituted is the same as that in the description of the substituent which the above-described cyclic group represented by Ra01 may have.
The hydrogen atom of the aromatic hydrocarbon group in Ra011 is preferably substituted with a substituent, and is more preferably substituted with a halogen atom. The halogen atom is preferably a fluorine atom or a bromine atom.
In the formula (a0-1-2), the aliphatic hydrocarbon group containing a polycyclic group in Ra012 is the same as the aliphatic hydrocarbon group containing a polycyclic group in the description of the cyclic aliphatic hydrocarbon group in Ra01 in the formula (a0-1). Ra012 is preferably an alicyclic hydrocarbon group which is a polycyclic group or a heterocyclic group which is a polycyclic group, and more preferably a group in which one hydrogen atom is eliminated from a polycycloalkane or a lactone-containing cyclic group.
The substituent with which the aliphatic hydrocarbon group containing a polycyclic group in Ra012 is substituted is the same as that in the description of the substituent which the above-described cyclic group in Ra01 may have.
In the formula (a0-1-3), Ra013 is the same as the group other than the aliphatic hydrocarbon group containing a polycyclic group (an aliphatic hydrocarbon group containing a monocyclic group), the optionally substituted chain alkyl group, and the optionally substituted chain alkenyl group in the description of the cyclic aliphatic hydrocarbon group in Ra01 in the formula (a0-1).
Specific examples of the constituent unit (a0) are given below. In the following formulae, Rα represents a hydrogen atom, a methyl group, or a trifluoromethyl group.






















The constituent unit (a0) is preferably at least one kind selected from the group consisting of constituent units represented by the general formulae (a0-1-1), (a0-1-2), and (a0-1-3), respectively. It is more preferably at least one kind selected from the group consisting of constituent units represented by the general formulae (a0-1-1) and (a0-1-2), respectively, and especially preferably a constituent unit represented by the general formula (a0-1-2), since a roughness decreasing effect and an effect of securing the thickness (pattern height) of a resist film after development are more easily obtained.
Specifically, constituent units represented by the formulae (a0-1-212), (a0-1-214), (a0-1-219), (a0-1-220), and (a0-1-221), respectively, are preferable. Of these, constituent units represented by the formulae (a0-1-212) and (a0-1-214), respectively, are especially preferable.
The constituent unit (a0) which the component (A1) has may be either one kind or two or more kinds.
A proportion of the constituent unit (a0) in the component (A1) is preferably 35 mol % or less, more preferably 30 mol % or less, still more preferably 5 mol % to 30 mol %, and especially preferably 10 mol % to 30 mol % relative to a total sum of all of the constituent units constituting the component (A1).
When the proportion of the constituent unit (a0) is not more than the preferred upper limit value, high sensitivity is maintained and a resist pattern having a good shape with decreased roughness is easily obtained. On the other hand, when the proportion of the constituent unit (a0) is the preferred lower limit value or more, sensitivity increases, and resolution and lithography properties are also enhanced.
Constituent Unit (a1-1)
The constituent unit (a1-1) is a constituent unit including a monocyclic group-containing acid decomposable group whose polarity increases by the action of an acid.
The term “acid decomposable group” refers to a group having acid decomposability, in which at least a part of the bond in the structure of the acid decomposable group may be cleaved by the action of an acid.
Examples of the acid decomposable group whose polarity increases by the action of an acid include a group which is decomposed by the action of an acid to form a polar group.
Examples of the polar group include a carboxy group, a hydroxyl group, an amino group, and a sulfo group (—SO3H). Of these, a polar group containing —OH in a structure thereof (hereinafter, sometimes referred to as “OH-containing polar group”) is preferable, a carboxy group or a hydroxyl group is more preferable, and a carboxy group is especially preferable.
More specifically, examples of the acid decomposable group include a group in which the above-described polar group is protected by an acid dissociable group (for example, a group in which the hydrogen atom of the OH-containing polar group is protected by an acid dissociable group).
Here, the term “acid dissociable group” refers to either one or both of the following groups: (i) a group having such acid dissociation properties that the bond between the acid dissociable group and the atom adjacent to the acid dissociable group may be cleaved by the action of an acid, and (ii) a group in which after a part of the bond is cleaved by the action of an acid, a decarboxylation reaction is further caused, whereby the bond between the acid dissociable group and the atom adjacent to the acid dissociable group may be cleaved.
It is necessary that the acid dissociable group constituting the acid decomposable group is a group with lower polarity than a polar group formed upon dissociation of the acid dissociable group. According to this, on the occasion of dissociation of the acid dissociable group by the action of an acid, a polar group having higher polarity than the acid dissociable group is formed, whereby the polarity increases. As a result, the polarity of the whole of the component (A1) increases. When the polarity increases, the solubility in a developing solution relatively changes. In the case where the developing solution is an alkali developing solution, the solubility increases, and in the case where the developing solution is an organic developing solution, the solubility decreases.
Examples of the acid dissociable group include those which have been so far proposed as an acid dissociable group of a base resin for a chemically amplified resist.
Specific examples of those proposed as an acid dissociable group of a base resin for a chemically amplified resist include an “acetal type acid dissociable group” a “tertiary alkyl ester type acid dissociable group”, and a “tertiary alkyloxycarbonyl acid dissociable group” to be described as follows.
Acetal-Type Acid Dissociable Group:
Examples of the acid dissociable group which protects a carboxy group or a hydroxyl group among the above-described polar groups include an acid dissociable group represented by the following general formula (a1-r-1) (hereinafter, sometimes referred to as “acetal type acid dissociable group”).




In the formula, each of Ra′1 and Ra′2 represents a hydrogen atom or an alkyl group; Ra′3 represents a hydrocarbon group; and Ra′3 may be bonded to either Ra′1 or Ra′2 to form a ring.
In the formula (a1-r-1), it is preferable that at least one of Ra′1 and Ra′2 is a hydrogen atom, and it is more preferable that both of Ra′1 and Ra′2 are a hydrogen atom.
In the case where Ra′1 or Ra′2 is an alkyl group, examples of the alkyl group include the same alkyl groups as those exemplified as the substituent which may be bonded to the carbon atom at the α-position in the description of the α-substituted acrylic ester, and an alkyl group having 1 to 5 carbon atoms is preferable. Specifically, there is preferably exemplified a linear or branched alkyl group. More specifically, examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. A methyl group or an ethyl group is more preferable, and a methyl group is especially preferable.
In the formula (a1-r-1), examples of the hydrocarbon group represented by Ra′3 include a linear or branched alkyl group and a cyclic hydrocarbon group.
The number of carbon atoms of the linear alkyl group is preferably 1 to 5, more preferably 1 to 4, and still more preferably 1 or 2. Specifically, examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. Of these, a methyl group, an ethyl group, or an n-butyl group is preferable, and a methyl group or an ethyl group is more preferable.
The number of carbon atoms of the branched alkyl group is preferably 3 to 10, and more preferably 3 to 5. Specifically, examples thereof include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group, a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group, with an isopropyl group being preferable.
In the case where Ra′3 is a cyclic hydrocarbon group, the hydrocarbon group may be either aliphatic or aromatic, and it may be either a polycyclic group or a monocyclic group.
The monocyclic aliphatic hydrocarbon group is preferably a group in which one hydrogen atom is eliminated from a monocycloalkane. The monocycloalkane is preferably one having 3 to 6 carbon atoms. Specifically, examples thereof include cyclopropane, cyclopentane and cyclohexane, and cyclopentane and cyclohexane are preferable.
The polycyclic aliphatic hydrocarbon group is preferably a group in which one hydrogen atom is eliminated from a polycycloalkane. The polycycloalkane is preferably one having 7 to 12 carbon atoms, and specifically, examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
In the case where the cyclic hydrocarbon group represented by Ra′3 is an aromatic hydrocarbon group, the aromatic hydrocarbon group is a hydrocarbon group having at least one aromatic ring.
This aromatic ring is not particularly limited so long as it is a cyclic conjugated system having (4n+2) π electrons, and it may be either monocyclic or polycyclic. The number of carbon atoms of the aromatic ring is preferably 5 to 30, more preferably 5 to 20, still more preferably 6 to 15, and especially preferably 6 to 12. Specifically, examples of the aromatic ring include an aromatic hydrocarbon ring such as benzene, naphthalene, anthracene, and phenanthrene; and an aromatic heterocyclic ring in which some of the carbon atoms constituting the above-described aromatic hydrocarbon ring are substituted with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic ring include an oxygen atom, a sulfur atom, and a nitrogen atom. Specifically, examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specifically, examples of the aromatic hydrocarbon group in Ra′3 include a group in which one hydrogen atom is eliminated from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (an aryl group or a heteroaryl group); a group in which one hydrogen atom is eliminated from an aromatic compound containing two or more aromatic rings (for example, biphenyl or fluorene); and a group in which one hydrogen atom of the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring is substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, and a 2-naphthylethyl group). The number of carbon atoms of the alkylene group bonded to the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring is preferably 1 to 4, more preferably 1 to 2, and especially preferably 1.
In the case where Ra′3 is bonded to either Ra′1 or Ra′2 to form a ring, the cyclic group is preferably a 4-membered to 7-membered ring, and more preferably a 4-membered to 6-membered ring. Specific examples of the cyclic group include a tetrahydropyranyl group and a tetrahydrofuranyl group.
Tertiary Alkyl Ester Type Acid Dissociable Group:
Examples of the acid dissociable group which protects a carboxy group among the above-described polar groups include an acid dissociable group represented by the following general formula (a1-r-2). It is to be noted that among the acid dissociable groups represented by the following formula (a1-r-2), a group constituted of an alkyl group is hereinafter sometimes referred to as “tertiary alkyl ester type acid dissociable group” for the sake of convenience.




In the formula, each of Ra′4 to Ra′6 represents a hydrocarbon group, and Ra′5 and Ra′6 may be bonded to each other to form a ring.
Examples of the hydrocarbon group represented by Ra′4 to Ra′6 include the same hydrocarbon groups as those exemplified above for Ra′3.
Ra′4 is preferably an alkyl group having 1 to 5 carbon atoms. In the case where Ra′5 and Ra′6 are bonded to each other to form a ring, a group represented by the following general formula (a1-r-1) is exemplified. On the other hand, in the case where Ra′4 to Ra′6 are not bonded to each other and are each an independent hydrocarbon group, a group represented by the following general formula (a1-r-2) is exemplified.




In the formulae, Ra′10 represents an alkyl group having 1 to 10 carbon atoms; Ra′11 represents a group for forming an aliphatic cyclic group together with the carbon atom to which Ra′10 is bonded; and each of Ra′12 to Ra′14 independently represents a hydrocarbon group.
In the formula (a1-r2-1), the alkyl group having 1 to 10 carbon atoms represented by Ra′10 is preferably the group exemplified as the linear or branched alkyl group represented by Ra′3 in the formula (a1-r-1). In the formula (a1-r-1), as the aliphatic cyclic group which Ra′11 forms together with the carbon atom to which Ra′10 is bonded, the groups exemplified as the aliphatic hydrocarbon group represented by Ra′3 in the formula (a1-r-1), which is either a monocyclic group or a polycyclic group, are preferable.
In the formula (a1-r2-2), each of Ra′12 and Ra′14 is preferably independently an alkyl group having 1 to 10 carbon atoms. The alkyl group is more preferably the group exemplified as the linear or branched alkyl group represented by Ra′3 in the formula (a1-r-1), still more preferably a linear alkyl group having 1 to 5 carbon atoms, and especially preferably a methyl group or an ethyl group.
In the formula (a1-r2-2), Ra′13 is preferably the linear or branched alkyl group exemplified as the hydrocarbon group represented by Ra′3 in the formula (a1-r-1), or an aliphatic hydrocarbon group which is either a monocyclic group or a polycyclic group. Of these, Ra′13 is more preferably the group exemplified as the aliphatic hydrocarbon group represented by Ra′3, which is either a monocyclic group or a polycyclic group.
Specific examples of the group represented by the formula (a1-r2-1) are given below.













Specific examples of each of the groups represented by the formula (a1-r2-2) are given below.










Tertiary Alkyloxycarbonyl Acid Dissociable Group:

Examples of the acid dissociable group which protects a hydroxyl group among the above-described polar groups include an acid dissociable group represented by the following general formula (a1-r-3) (hereinafter, sometimes referred to as “tertiary alkyloxycarbonyl acid dissociable group” for the sake of convenience).




In the formula, each of Ra′7 to Ra′9 represents an alkyl group.
In the formula (a1-r-3), each of Ra′7 to Ra′9 is preferably an alkyl group having 1 to 5 carbon atoms, and more preferably an alkyl group having 1 to 3 carbon atoms.
In addition, the total number of carbon atoms of the respective alkyl groups is preferably 3 to 7, more preferably 3 to 5, and most preferably 3 to 4.
Examples of the acid dissociable group in the constituent unit (a1-1) include the acid dissociable groups having a monocyclic group among the above-exemplified “acetal type acid dissociable group”, “tertiary alkyl ester type acid dissociable group”, and “tertiary alkyloxycarbonyl acid dissociable group”, and any of these can be used. Above all, the tertiary alkyl ester type acid dissociable group is preferable.
Examples of the constituent unit (a1-1) include a constituent unit derived from an acrylic ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent, a constituent unit derived from acrylamide, a constituent unit in which at least some of the hydrogen atoms of the hydroxyl group of a constituent unit derived from hydroxystyrene or a hydroxystyrene derivative are protected by a substituent containing a monocyclic group-containing acid decomposable group, and a constituent unit in which at least some of the hydrogen atoms in —C(═O)—OH of a constituent unit derived from vinylbenzoic acid or a vinylbenzoic acid derivative are protected by a substituent containing a monocyclic group-containing acid decomposable group.
Of the foregoing, the constituent unit (a1-1) is preferably a constituent unit derived from an acrylic ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent.
Preferred specific examples of the constituent unit (a1-1) include a constituent unit represented by the following general formula (a1-1-1) or (a1-1-2).




In the formulae, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms; Va1 represents a divalent hydrocarbon group which may have an ether bond; na1 is 0 to 2; Ra1 represents an acid dissociable group represented by the formula (a1-r-1) or (a1-r-2) and represents a monocyclic group-containing acid dissociable group; Wa1 represents an (na2+1)-valent hydrocarbon group; na2 is 1 to 3; and Ra2 represents an acid dissociable group represented by the formula (a1-r-1) or (a1-r-3) and represents a monocyclic group-containing acid dissociable group.
In the formula (a1-1-1), the alkyl group having 1 to 5 carbon atoms represented by R is preferably a linear or branched alkyl group having 1 to 5 carbon atoms. Specifically, examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. The halogenated alkyl group having 1 to 5 carbon atoms is a group in which some or all hydrogen atoms of the alkyl group having 1 to 5 carbon atoms are substituted with a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being especially preferable.
R is preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms, and is most preferably a hydrogen atom or a methyl group in terms of easiness in industrial availability.
The hydrocarbon group represented by Va1 may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. The aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity. The aliphatic hydrocarbon group as a divalent hydrocarbon group in Va1 may be either saturated or unsaturated, and in general, it is preferably saturated.
More specifically, examples of the aliphatic hydrocarbon group in Va1 include a linear or branched aliphatic hydrocarbon group, and an aliphatic hydrocarbon group containing a ring in a structure thereof.
In addition, Va1 may have an ether bond (—O—) between carbon atoms of the divalent hydrocarbon group. One or two or more ether bonds may be present in Va1.
The number of carbon atoms of the linear or branched aliphatic hydrocarbon group is preferably 1 to 10, more preferably 1 to 6, still more preferably 1 to 4, and most preferably 1 to 3.
The linear aliphatic hydrocarbon group is preferably a linear alkylene group. Specifically, examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
The branched aliphatic hydrocarbon group is preferably a branched alkylene group. Specifically, examples thereof include an alkylalkylene group such as an alkylmethylene group, for example, —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; an alkylethylene group, for example, —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; an alkyltrimethylene group, for example, —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; and an alkyltetramethylene group, for example, —CH(CH3)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—. The alkyl group in the alkylalkylene group is preferably a linear alkyl group having 1 to 5 carbon atoms.
Examples of the aliphatic hydrocarbon group containing a ring in a structure thereof include an alicyclic hydrocarbon group (a group in which two hydrogen atoms are eliminated from an aliphatic hydrocarbon ring), a group in which an alicyclic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which an alicyclic hydrocarbon group intervenes on the way of a linear or branched aliphatic hydrocarbon group. Examples of the linear or branched aliphatic hydrocarbon group include the same groups as those described above.
The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms, and more preferably 3 to 12 carbon atoms.
The alicyclic hydrocarbon group may be either a polycyclic group or a monocyclic group. The monocyclic alicyclic hydrocarbon group is preferably a group in which two hydrogen atoms are eliminated from a monocycloalkane. The monocycloalkane is preferably one having 3 to 6 carbon atoms. Specifically, examples thereof include cyclopentane and cyclohexane.
The polycyclic alicyclic hydrocarbon group is preferably a group in which two hydrogen atoms are eliminated from a polycycloalkane. The polycycloalkane is preferably one having 7 to 12 carbon atoms. Specifically, examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
The aromatic hydrocarbon group in Va1 is a hydrocarbon group having at least one aromatic ring. This aromatic ring is not particularly limited so long as it is a cyclic conjugated system having (4n+2) π electrons, and it may be either monocyclic or polycyclic. The number of carbon atoms of the aromatic ring is preferably 5 to 30, more preferably 5 to 20, still more preferably 6 to 15, and especially preferably 6 to 12. Specifically, examples of the aromatic ring include an aromatic hydrocarbon ring such as benzene, naphthalene, anthracene, and phenanthrene; and an aromatic heterocyclic ring in which some of the carbon atoms constituting the above-described aromatic hydrocarbon ring are substituted with a hetero atom. Examples of the hetero atom in the aromatic heterocyclic ring include an oxygen atom, a sulfur atom, and a nitrogen atom. Specifically, examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specifically, examples of the aromatic hydrocarbon group include a group in which two hydrogen atoms are eliminated from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (an arylene group or a heteroarylene group); a group in which two hydrogen atoms are eliminated from an aromatic compound containing two or more aromatic rings (for example, biphenyl or fluorene); and a group in which one hydrogen atom of a group in which one hydrogen atom is eliminated from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (an aryl group or a heteroaryl group) is substituted with an alkylene group (for example, a group in which one hydrogen atom is further eliminated from an aryl group in an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, and a 2-naphthylethyl group). The number of carbon atoms of the alkylene group bonded to the above-described aryl group or heteroaryl group is preferably 1 to 4, more preferably 1 to 2, and especially preferably 1.
In the formula (a1-1-2), the (na2+1)-valent hydrocarbon group in Wa1 may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group. The aliphatic hydrocarbon group means a hydrocarbon group having no aromaticity. The aliphatic hydrocarbon group may be either saturated or unsaturated, and in general, it is preferably saturated. Examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group, an aliphatic hydrocarbon group containing a ring in a structure thereof, and a group in which a linear or branched aliphatic hydrocarbon group and an aliphatic hydrocarbon group containing a ring in a structure thereof are combined.
The valence of (na2+1) is preferably divalent to tetravalent, and more preferably divalent or trivalent.
Specific examples of the constituent unit (a1-1) are given below. In each of the following formulae, Rα represents a hydrogen atom, a methyl group, or a trifluoromethyl group.










The constituent unit (a1-1) which the component (A1) has may be either one kind or two or more kinds.
A proportion of the constituent unit (a1-1) in the component (A1) is preferably 1 mol % to 50 mol %, more preferably 5 mol % to 45 mol %, and still more preferably 5 mol % to 40 mol % relative to a total sum of all of the constituent units constituting the component (A1).
When the proportion of the constituent unit (a1-1) is the preferred lower limit value or more, lithography properties such as an improvement of roughness are enhanced. On the other hand, when the proportion of the constituent unit (a1-1) is not more than the preferred upper limit value, the thickness (pattern height) of a resist film hardly varies before and after development.
Other Constituent Units
The component (A1) may further have, in addition to the constituent unit (a0) and the constituent unit (a1-1), other constituent units which do not fall under the definitions of the constituent unit (a0) and the constituent unit (a1-1).
The foregoing constituent units are not particularly limited so long as they are a constituent unit which is not classified into the above-described constituent units. A large number of constituent units which have been conventionally known to be used for resins for resist such as those for ArF excimer lasers and KrF excimer lasers (preferably those for ArF excimer lasers) can be used. Examples thereof include constituent units (a1-2) and (a2) to (a4) as described below and constituent units which generate an acid upon exposure.
Constituent Unit (a1-2):
The constituent unit (a1-2) is a constituent unit including an acid decomposable group whose polarity increases by the action of an acid, exclusive of the constituent unit (a1-1).
Examples of the acid dissociable group in the constituent unit (a1-2) include groups other than the acid dissociable groups having a monocyclic group among the above-exemplified “acetal type acid dissociable group”, “tertiary alkyl ester type acid dissociable group”, and “tertiary alkyloxycarbonyl acid dissociable group”. Above all, the tertiary alkyl ester type acid dissociable group is preferable.
Examples of the constituent unit (a1-2) include a constituent unit derived from an acrylic ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent, a constituent unit derived from acrylamide, a constituent unit in which at least some of the hydrogen atoms of the hydroxyl group of a constituent unit derived from hydroxystyrene or a hydroxystyrene derivative are protected by a substituent containing an acid decomposable group (exclusive of a monocyclic group-containing acid decomposable group), and a constituent unit in which at least some of the hydrogen atoms in —C(═O)—OH of a constituent unit derived from vinylbenzoic acid or a vinylbenzoic acid derivative are protected by a substituent containing an acid decomposable group (exclusive of a monocyclic group-containing acid decomposable group).
Of the foregoing, the constituent unit (a1-2) is preferably a constituent unit derived from an acrylic ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent.
Preferred specific examples of the constituent unit (a1-2) include a constituent unit in which Ra1 is an acid dissociable group (exclusive of a monocyclic group-containing acid dissociable group) represented by the formula (a1-r-1) or (a1-r-2) in the constituent unit represented by the general formula (a1-1-1), and a constituent unit in which Ra2 is an acid dissociable group (exclusive of a monocyclic group-containing acid dissociable group) represented by the formula (a1-r-1) or (a1-r-3) in the constituent unit represented by the general formula (a1-1-2).
Specific examples of the constituent unit (a1-2) are given below. In each of the following formulae, Rα represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
















The constituent unit (a1-2) which the component (A1) has may be either one kind or two or more kinds.
When the component (A1) has the constituent unit (a1-2), a proportion of the constituent unit (a1-2) in the component (A1) is preferably 1 mol % to 50 mol %, more preferably 5 mol % to 45 mol %, and still more preferably 5 mol % to 40 mol % relative to a total sum of all of the constituent units constituting the component (A1).
When the proportion of the constituent unit (a1-2) is the preferred lower limit value or more, etching resistance, depth of focus (DOF) characteristics, and the like are further improved. On the other hand, when the proportion of the constituent unit (a1-2) is not more than the preferred upper limit value, sensitivity is easily maintained and lithography properties such as an improvement of roughness are also further enhanced.
Constituent Unit (a2):
The constituent unit (a2) is a constituent unit containing a lactone-containing cyclic group, an —SO2-containing cyclic group, or a carbonate-containing cyclic group.
In the case of using the component (A1) for the formation of a resist film, the lactone-containing cyclic group, the —SO2-containing cyclic group, or the carbonate-containing cyclic group of the constituent unit (a2) is effective for increasing the adhesion of the resist film to a substrate.
The term “lactone-containing cyclic group” refers to a cyclic group containing a ring (lactone ring) containing —O—C(═O)— in a ring skeleton thereof. When the lactone ring is counted as the first ring, a lactone-containing cyclic group in which the only ring structure is the lactone ring is called a monocyclic group, whereas a lactone-containing cyclic group containing other ring structure is called a polycyclic group regardless of the structure of the other rings. The lactone-containing cyclic group may be either a monocyclic group or a polycyclic group.
The lactone-containing cyclic group in the constituent unit (a2) is not particularly limited, and any optional lactone-containing cyclic group can be used. Specifically, examples thereof include groups represented by the following general formulae (a2-r-1) to (a2-r-7), respectively.




In the formulae, each Ra′21 independently represents a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR′′, —OC(═O)R′′, a hydroxyalkyl group, or a cyano group; R′′ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a SO2-containing cyclic group; A′′ represents an alkylene group having 1 to 5 carbon atoms, which may contain an oxygen atom (—O—) or a sulfur atom (—S—), an oxygen atom, or a sulfur atom; n′ represents an integer of 0 to 2; and m′ represents 0 or 1.
In the general formulae (a2-r-1) to (a2-r-7), the alkyl group in Ra′21 is preferably an alkyl group having 1 to 6 carbon atoms. The alkyl group is preferably linear or branched. Specifically, examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, a neopentyl group, and a hexyl group. Of these, a methyl group or an ethyl group is preferable, with a methyl group being especially preferable.
The alkoxy group in Ra′21 is preferably an alkoxy group having 1 to 6 carbon atoms. The alkoxy group is preferably linear or branched. Specifically, examples thereof include a group in which the alkyl group exemplified above as the alkyl group in Ra′21 and an oxygen atom (—O—) are connected to each other.
Examples of the halogen atom in Ra′21 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being preferable.
Examples of the halogenated alkyl group in Ra′21 include a group in which some or all hydrogen atoms of the alkyl group in Ra′21 are substituted with a halogen atom. The halogenated alkyl group is preferably a fluorinated alkyl group, and especially preferably a perfluoroalkyl group.
In —COOR′′ and —OC(═O)R′′ in Ra′21, each R′′ is a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2-containing cyclic group.
The alkyl group in R′′ may be linear, branched, or cyclic, and the number of carbon atoms thereof is preferably 1 to 15.
In the case where R′′ is a linear or branched alkyl group, the number of carbon atoms thereof is preferably 1 to 10, and more preferably 1 to 5. Above all, R′′ is especially preferably a methyl group or an ethyl group.
In the case where R′′ is a cyclic alkyl group, the number of carbon atoms thereof is preferably 3 to 15, more preferably 4 to 12, and most preferably 5 to 10. Specifically, examples thereof include a group in which one or more hydrogen atoms are eliminated from a monocycloalkane, which may or may not be substituted with a fluorine atom or a fluorinated alkyl group; and a group in which one or more hydrogen atoms are eliminated from a polycycloalkane such as a bicycloalkane, a tricycloalkane, and a tetracycloalkane. More specifically, examples thereof include a group in which one or more hydrogen atoms are eliminated from a monocycloalkane such as cyclopentane and cyclohexane; and a group in which one or more hydrogen atoms are eliminated from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
Examples of the lactone-containing cyclic group in R′′ include the same groups as those represented by the general formulae (a2-r-1) to (a2-r-7), respectively.
The carbonate-containing cyclic group in R′′ is the same as a carbonate-containing cyclic group to be described later. Specifically, examples thereof include groups represented by general formulae (ax3-r-1) to (ax3-r-3), respectively.
The —SO2-containing cyclic group in R′′ is the same as a —SO2-containing cyclic group to be described later. Specifically, examples thereof include groups represented by general formulae (a5-r-1) to (a5-r-4), respectively.
The hydroxyalkyl group in Ra′21 is preferably one having 1 to 6 carbon atoms. Specifically, examples thereof include a group in which at least one hydrogen atom of the alkyl group in Ra′21 is substituted with a hydroxyl group.
In the formulae (a2-r-2), (a2-r-3), and (a2-r-5), the alkylene group having 1 to 5 carbon atoms in A′′ is preferably a linear or branched alkylene group, and examples thereof include a methylene group, an ethylene group, an n-propylene group, and an isopropylene group. In the case where the alkylene group contains an oxygen atom or a sulfur atom, specific examples thereof include a group in which —O— or —S— intervenes at the terminal or between the carbon atoms of the above-described alkylene group. Examples thereof include —O—CH2—, —CH2—O—CH2—, —S—CH2—, and —CH2—S—CH2—. A′′ is preferably an alkylene group having 1 to 5 carbon atoms or —O—, more preferably an alkylene group having 1 to 5 carbon atoms, and most preferably a methylene group.
Specific examples of each of the groups represented by the general formulae (a2-r-1) to (a2-r-7) are given below.






















The term “—SO2-containing cyclic group” refers to a cyclic group containing a ring containing —SO2— in a ring skeleton thereof, and specifically, it is a cyclic group in which the sulfur atom (S) in —SO2— forms a part of the ring skeleton of the cyclic group. When the ring containing —SO2— in the ring skeleton thereof is counted as the first ring, an —SO2-containing cyclic group in which the only ring structure is the —SO2-containing ring is called a monocyclic group, whereas an —SO2-containing cyclic group containing other ring structure is called a polycyclic group regardless of the structure of the other rings. The —SO2-containing cyclic group may be either a monocyclic group or a polycyclic group.
The —SO2-containing cyclic group is especially preferably a cyclic group containing —O—SO2— in a ring skeleton thereof, namely a cyclic group containing a sultone ring in which —O—S— in —O—SO2— forms a part of the ring skeleton.
More specifically, examples of the —SO2-containing cyclic group include groups represented by the following general formulae (a5-r-1) to (a5-r-4), respectively.




In the formulae, each Ra′51 independently represents a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR′′, —OC(═O)R′′, a hydroxyalkyl group, or a cyano group; R′′ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2-containing cyclic group; A′′ represents an alkylene group having 1 to 5 carbon atoms, which may contain an oxygen atom or a sulfur atom, an oxygen atom, or a sulfur atom; and n′ represents an integer of 0 to 2.
In the general formulae (a5-r-1) to (a5-r-4), A′′ is the same as A′′ in the general formulae (a2-r-2), (a2-r-3), and (a2-r-5).
The alkyl group, the alkoxy group, the halogen atom, the halogenated alkyl group, —COOR′′, —OC(═O)R′′, and the hydroxyalkyl group in Ra′51 are the same as those exemplified in the description of Ra′21 in the general formulae (a2-r-1) to (a2-r-7), respectively.
Specific examples of each of the groups represented by the general formulae (a5-r-1) to (a5-r-4) are given below. In the following formulae, “Ac” represents an acetyl group.



















The term “carbonate-containing cyclic group” refers to a cyclic group containing a ring containing —O—C(═O)—O— in a ring skeleton thereof (carbonate ring). When the carbonate ring is counted as the first ring, a carbonate-containing cyclic group in which the only ring structure is the carbonate ring is called a monocyclic group, whereas a carbonate-containing cyclic group containing other ring structure is called a polycyclic group regardless of the structure of the other rings. The carbonate-containing cyclic group may be either a monocyclic group or a polycyclic group.
The carbonate ring-containing cyclic group is not particularly limited, and any optional carbonate ring-containing cyclic group can be used. Specifically, examples thereof include groups represented by the following general formulae (ax3-r-1) to (ax3-r-3), respectively.




In the formulae, each Ra′x31 independently represents a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR′′, —OC(═O)R′′, a hydroxyalkyl group, or a cyano group; R′′ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2-containing cyclic group; A′′ represents an alkylene group having 1 to 5 carbon atoms, which may contain an oxygen atom or a sulfur atom, an oxygen atom, or a sulfur atom; p′ represents an integer of 0 to 3; and q′ represents 0 or 1.
A′′ in the general formulae (ax3-r-1) to (ax3-r-3) is the same as A′′ in the general formulae (a2-r-2), (a2-r-3), and (a2-r-5).
The alkyl group, the alkoxy group, the halogen atom, the halogenated alkyl group, —COOR′′, —OC(═O)R′′, and the hydroxyalkyl group in Ra′x31 are the same as those exemplified in the description of Ra′21 in the general formulae (a2-r-1) to (a2-r-7), respectively.
Specific examples of each of the groups represented by the general formulae (ax3-r-1) to (ax3-r-3) are given below.










Of the foregoing, the constituent unit (a2) is preferably a constituent unit derived from an acrylic ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent.
Such a constituent unit (a2) is preferably a constituent unit represented by the following general formula (a2-1).




In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms; Ya21 represents a single bond or a divalent linking group; La21 represents —O—, —COO—, —CON(R′)—, —OCO—, —CONHCO—, or —CONHCS—; R′ represents a hydrogen atom or a methyl group, provided that in the case where La21 is —O—, Ya21 is not —CO—; and Ra21 represents a lactone-containing cyclic group, a carbonate-containing cyclic group, or an —SO2-containing cyclic group.
In the formula (a2-1), R is the same as that described above.
Though the divalent linking group represented by Ya21 is not particularly limited, preferred examples thereof include an optionally substituted divalent hydrocarbon group and a divalent linking group containing a hetero atom.
Examples of the optionally substituted divalent hydrocarbon group in Ya21 include the same optionally substituted divalent hydrocarbon group as that in Ya01 in the formula (a0-1).
Examples of the divalent linking group containing a hetero atom in Ya21 include the same divalent linking group containing a hetero atom as that in Ya01 in the formula (a0-1).
Ya21 is preferably a single bond, an ester bond [—C(═O)—O—], an ether bond (—O—), a linear or branched alkylene group, or a combination thereof.
In the formula (a2-1), Ra21 is a lactone-containing cyclic group, a —SO2-containing cyclic group, or a carbonate-containing cyclic group.
Preferred examples of the lactone-containing cyclic group, the —SO2-containing cyclic group, and the carbonate-containing cyclic group in Ra21 include the groups represented by the general formulae (a2-r-1) to (a2-r-7), the groups represented by the general formulae (a5-r-1) to (a5-r-4), and the groups represented by the general formulae (ax3-r-1) to (ax3-r-3), respectively.
Above all, the lactone-containing cyclic group or the —SO2-containing cyclic group is preferable, and the groups represented by each of the general formulae (a2-r-1), (a2-r-2), and (a5-r-1), respectively, are more preferable. Specifically, any one of the groups represented by the chemical formulae (r-lc-1-1) to (r-lc-1-7), (r-lc-2-1) to (r-lc-2-18), (r-sl-1-1), and (r-sl-1-18) is more preferable.
The constituent unit (a2) which the component (A1) has may be either one kind or two or more kinds.
When the component (A1) has the constituent unit (a2), a proportion of the constituent unit (a2) is preferably 1 mol % to 80 mol %, more preferably 10 mol % to 70 mol %, still more preferably 10 mol % to 65 mol %, and especially preferably 10 mol % to 60 mol % relative to a total sum of all of the constituent units constituting the component (A1).
When the proportion of the constituent unit (a2) is the preferred lower limit value or more, the effects due to the fact that the constituent unit (a2) is contained are sufficiently obtained. When the proportion of the constituent unit (a2) is not more than the preferred upper limit value, a balance with other constituent units can be taken, and various lithography properties and the pattern shape are enhanced.
Constituent Unit (a3):
The constituent unit (a3) is a constituent unit containing a polar group-containing aliphatic hydrocarbon group (exclusive of those which fall within the definition of the constituent unit (a0), (a1-1), (a1-2), or (a2)).
In view of the fact that the component (A1) has the constituent unit (a3), the hydrophilicity of the component (A) increases, resulting in contribution to an enhancement of resolution.
Examples of the polar group include a hydroxyl group, a cyano group, a carboxy group, and a hydroxyalkyl group in which some of hydrogen atoms of an alkyl group are substituted with a fluorine atom, with a hydroxyl group being especially preferable.
Examples of the aliphatic hydrocarbon group include a linear or branched hydrocarbon group having 1 to 10 carbon atoms (preferably an alkylene group) and a cyclic aliphatic hydrocarbon group (cyclic group). The cyclic group may be either a monocyclic group or a polycyclic group, and for example, it can be properly selected and used among a large number of groups proposed in resins for resist compositions for ArF excimer lasers. The cyclic group is preferably a polycyclic group, and more preferably a polycyclic group having 7 to 30 carbon atoms.
Above all, a constituent unit derived from an acrylic ester containing an aliphatic polycyclic group containing a hydroxyl group, a cyano group, a carboxy group, or a hydroxyalkyl group in which some of hydrogen atoms of an alkyl group are substituted with a fluorine atom is more preferable. Examples of the polycyclic group include a group in which two or more hydrogen atoms are eliminated from a bicycloalkane, a tricycloalkane, a tetracycloalkane, or the like. Specifically, examples thereof include a group in which two or more hydrogen atoms are eliminated from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane. Among these polycyclic groups, a group in which two or more hydrogen atoms are eliminated from adamantane, a group in which two or more hydrogen atoms are eliminated from norbornane, or a group in which two or more hydrogen atoms are eliminated from tetracyclododecane is preferable from the industrial standpoint.
As the constituent unit (a3), an arbitrary constituent unit can be used without particular limitations so long as it contains a polar group-containing aliphatic hydrocarbon group.
The constituent unit (a3) is preferably a constituent unit derived from an acrylic ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent, the constituent unit containing a polar group-containing aliphatic hydrocarbon group.
When the hydrocarbon group in the polar group-containing aliphatic hydrocarbon group is a linear or branched hydrocarbon group having 1 to 10 carbon atoms, the constituent unit (a3) is preferably a constituent unit derived from a hydroxyethyl ester of acrylic acid, and when the hydrocarbon group is a polycyclic group, the constituent unit (a3) is preferably a constituent unit represented by the following formula (a3-1), a constituent unit represented by the following formula (a3-2), or a constituent unit represented by the following formula (a3-3).




In the formulae, R is the same as that described above; j represents an integer of 1 to 3; k represents an integer of 1 to 3; t′ represents an integer of 1 to 3; l represents an integer of 1 to 5; and s represents an integer of 1 to 3.
In the formula (a3-1), j is preferably 1 or 2, and more preferably 1. In the case where j is 2, a constituent unit in which the hydroxyl group is bonded to the 3-position and 5-position of the adamantyl group is preferable. In the case where j is 1, a constituent unit in which the hydroxyl group is bonded to the 3-position of the adamantyl group is preferable.
j is preferably 1, and a constituent unit in which the hydroxyl group is bonded to the 3-position of the adamantyl group is especially preferable.
In the formula (a3-2), k is preferably 1. The cyano group is preferably bonded to the 5-position or 6-position of the norbornyl group.
In the formula (a3-3), t′ is preferably 1. l is preferably 1. s is preferably 1. In these, it is preferable that the 2-norbornyl group or the 3-norbornyl group is bonded to the terminal of the carboxy group of acrylic acid. The fluorinated alkyl alcohol is preferably bonded to the 5- or 6-position of the norbornyl group.
The constituent unit (a3) which the component (A1) has may be either one kind or two or more kinds.
In the case where the component (A1) has the constituent unit (a3), a proportion of the constituent unit (a3) is preferably 5 mol % to 50 mol %, more preferably 5 mol % to 40 mol %, and still more preferably 5 mol % to 35 mol % relative to a total sum of all of the constituent units constituting the component (A1).
When the proportion of the constituent unit (a3) is the preferred lower limit value or more, the effects due to the fact that the constituent unit (a3) is contained are sufficiently obtained. When the proportion of the constituent unit (a3) is not more than the preferred upper limit value, a balance with other constituent units is easily taken.
Constituent Unit (a4):
The constituent unit (a4) is a constituent unit containing an acid-nondissociable aliphatic cyclic group.
In view of the fact that the component (A1) has the constituent unit (a4), dry etching resistance of the formed resist pattern is enhanced. In addition, hydrophobicity of the component (A) increases. In particular, in the case of a solvent development process, it is thought that the enhancement of hydrophobicity contributes to enhancements in resolution, resist pattern shape, and the like.
The “acid-nondissociable cyclic group” in the constituent unit (a4) is a cyclic group which on the occasion of generation of an acid in the resist composition upon exposure (for example, on the occasion of generation of an acid from the component (B) to be described later), even when the acid acts, remains in the constituent unit as it is without being dissociated.
The constituent unit (a4) is, for example, preferably a constituent unit derived from an acrylic ester containing an acid-nondissociable aliphatic cyclic group, or the like. As the cyclic group, a large number of constituent units which have been conventionally known to be used in resin components of resist compositions such as those for ArF excimer lasers and KrF excimer lasers (preferably those for ArF excimer lasers), and the like can be used.
In particular, from the standpoint of easiness in industrial availability or the like, the constituent unit (a4) is preferably at least one kind selected from a tricyclodecyl group, an adamantyl group, a tetracyclododecyl group, an isobornyl group, and a norbornyl group. Such a polycyclic group may have a linear or branched alkyl group having 1 to 5 carbon atoms as a substituent.
Specifically, examples of the constituent unit (a4) include constituent units represented by the following general formulae (a4-1) to (a4-7), respectively.







In the formula, Rα is the same as that described above.
The constituent unit (a4) which the component (A1) has may be either one kind or two or more kinds.
In the case where the component (A1) has the constituent unit (a4), a proportion of the constituent unit (a4) is preferably 1 mol % to 30 mol %, and more preferably 3 mol % to 20 mol % relative to a total sum of all of the constituent units constituting the component (A1).
When the proportion of the constituent unit (a4) is the preferred lower limit value or more, the effects due to the fact that the constituent unit (a4) is contained are sufficiently obtained, and when the proportion of the constituent unit (a4) is not more than the preferred upper limit value, a balance with other constituent units is easily taken.
In the resist composition of this aspect, the component (A) contains the high-molecular weight compound (A1) having the constituent unit (a0) and the constituent unit (a1-1).
Specifically, examples of the component (A1) include a high-molecular weight compound composed of a repeating structure of the constituent unit (a0), the constituent unit (a1-1), and the constituent unit (a2), and a high-molecular weight compound composed of a repeating structure of the constituent unit (a0), the constituent unit (a1-1), the constituent unit (a1-2), and the constituent unit (a2).
A mass average molecular weight (Mw) (as converted into polystyrene by means of gel permeation chromatography (GPC)) of the component (A1) is not particularly limited, but it is preferably 1,000 to 50,000, more preferably 1,500 to 30,000, and most preferably 2,000 to 20,000.
When the Mw of the component (A1) is not more than the preferred upper limit value of the foregoing range, sufficient solubility in a resist solvent for the use as a resist is exhibited, and when it is the preferred lower limit value of the foregoing range or more, good dry etching resistance is obtained and the resist pattern has a good cross-sectional shape.
A degree of dispersion (Mw/Mn) of the component (A1) is not particularly limited, and is preferably 1.0 to 5.0, more preferably 1.0 to 4.0, and most preferably 1.0 to 3.0. It is to be noted that Mn represents a number average molecular weight.
The component (A1) may be used alone, or in combination of two or more kinds thereof.
A proportion of the component (A1) in the component (A) is preferably 25 mass % or more, more preferably 50 mass % or more, and still more preferably 75 mass % or more relative to a total mass of the component (A), and it may even be 100 mass %. When the proportion is 25 mass % or more, a resist pattern which is excellent in various lithography properties such as an increase of sensitivity and an improvement of roughness is easily formed.
In the resist composition of this aspect, regarding the component (A), a base material component (hereinafter, referred to as “component (A2)”) which does not fall under the definition of the component (A1) and exhibits changed solubility in a developing solution by the action of an acid may be used in combination.
The component (A2) is not particularly limited, and may be arbitrarily selected and used among a large number of components which have been conventionally known as a base material component for a chemically amplified resist composition (for example, base resins such as those for ArF excimer lasers and KrF excimer lasers (preferably those for ArF excimer lasers)). The component (A2) may be used alone, or in combination of two or more kinds thereof.
In the resist composition of this aspect, the component (A) may be used alone, or in combination of two or more kinds thereof.
In the resist composition of this aspect, the content of the component (A) may be adjusted in conformity with the thickness of the resist film to be formed, or the like.
Other Components
The resist composition of this aspect preferably further contains an acid generator component (B) which generates an acid upon exposure (hereinafter, referred to as “component (B)”), in addition to the above-described component (A).
Component (B)
The component (B) is not particularly limited, and those which have been so far proposed as the acid generator for a chemically amplified resist can be used.
Examples of such an acid generator include a variety of acid generators such as an onium salt-based acid generator, for example, an iodonium salt and a sulfonium salt; an oxime sulfonate-based acid generator; a diazomethane-based acid generator, for example, a bisalkyl or bisaryl sulfonyl diazomethane and a poly(bissulfonyl)diazomethane; a nitrobenzylsulfonate-based acid generator; an iminosulfonate-based acid generator; and a disulfone-based acid generator. Above all, it is preferable to use an onium salt-based acid generator.
As the onium salt-based acid generator, for example, a compound represented by the following general formula (b-1) (hereinafter, also referred to as “component (b-1)”), a compound represented by a general formula (b-2) (hereinafter, also referred to as “component (b-2)”), or a compound represented by a general formula (b-3) (hereinafter, also referred to as “component (b-3)”) can be used.




In the formulae, each of R101 and R104 to R108 independently represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group; R104 and R105 may be bonded to each other to form a ring; R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms; Y101 represents a single bond or a divalent linking group containing an oxygen atom; each of V101 to V103 independently represents a single bond, an alkylene group, or a fluorinated alkylene group; each of L101 and L102 independently represents a single bond or an oxygen atom; each of L103 to L105 independently represents a single bond, —CO—, or —SO2—; m represents an integer of 1 or more; and M′m+ represents an m-valent onium cation.
Anion Moiety
Anion Moiety of Component (b-1)
In the formula (b-1), R101 represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group.
Examples of R101 include the same groups as the optionally substituted cyclic group, the optionally substituted chain alkyl group, or the optionally substituted chain alkenyl group in Ra01 in the formula (a0-1).
Above all, R101 is preferably an optionally substituted cyclic group, and more preferably an optionally substituted cyclic hydrocarbon group. More specifically, a group in which one or more hydrogen atoms are eliminated from a phenyl group, a naphthyl group, or a polycycloalkane, the lactone-containing cyclic groups represented by the formulae (a2-r-1) to (a2-r-7), respectively, and the —SO2-containing cyclic groups represented by the general formulae (a5-r-1) to (a5-r-4), respectively are preferable.
In the formula (b-1), Y101 represents a single bond or an oxygen atom-containing divalent linking group.
In the case where Y101 is an oxygen atom-containing divalent linking group, Y101 may contain an atom other than an oxygen atom. Examples of the atom other than an oxygen atom include a carbon atom, a hydrogen atom, a sulfur atom, and a nitrogen atom.
Examples of the oxygen atom-containing divalent linking group include a non-hydrocarbon-based oxygen atom-containing linking group such as an oxygen atom (ether bond: —O—), an ester bond (—C(═O)—O—), an oxycarbonyl group (—O—C(═O)—), an amide bond (—C(═O)—NH—), a carbonyl group (—C(═O)—), and a carbonate bond (—O—C(═O)—O—); and a combination of the non-hydrocarbon-based oxygen atom-containing linking group with an alkylene group. A sulfonyl group (—SO2—) may be further connected to the combination. Examples of the combination include linking groups represented by the following formulae (y-al-1) to (y-al-7), respectively.




In the formulae, V′101 represents a single bond or an alkylene group having 1 to 5 carbon atoms; and V′102 represents a divalent saturated hydrocarbon group having 1 to 30 carbon atoms.
The divalent saturated hydrocarbon group in V′102 is preferably an alkylene group having 1 to 30 carbon atoms.
The alkylene group in V′101 and V′102 may be a linear alkylene group, or may be a branched alkylene group, and it is preferably a linear alkylene group.
Specifically, examples of the alkylene group in V′101 and V′102 include a methylene group [—CH2—]; an alkylmethylene group such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; an ethylene group [—CH2CH2—]; an alkylethylene group such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, and —CH(CH2CH3)CH2—; a trimethylene group (n-propylene group) [—CH2CH2CH2—]; an alkyltrimethylene group such as —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; a tetramethylene group [—CH2CH2CH2CH2—]; an alkyltetramethylene group such as —CH(CH3)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—; and a pentamethylene group [—CH2CH2CH2CH2CH2—].
In addition, some of the methylene groups in the above-described alkylene group in V′101 or V′102 may be substituted with a divalent aliphatic cyclic group having 5 to 10 carbon atoms. The aliphatic cyclic group is preferably a divalent group in which one hydrogen atom is further eliminated from the monocyclic or polycyclic aliphatic hydrocarbon group in Ra′3 in the formula (a1-r-1), and more preferably a cyclohexylene group, a 1,5-adamantylene group, or a 2,6-adamantylene group.
Y101 is preferably a divalent linking group containing an ester bond or an ether bond, and the linking groups represented by the formulae (y-al-1) to (y-al-5), respectively are preferable.
In the formula (b-1), V101 represents a single bond, an alkylene group, or a fluorinated alkylene group. The number of carbon atoms of each of the alkylene group and the fluorinated alkylene group in V101 is preferably 1 to 4. Examples of the fluorinated alkylene group in V101 include a group in which some or all the hydrogen atoms of the alkylene group in V101 are substituted with a fluorine atom. Above all, V101 is preferably a single bond or a fluorinated alkylene group having 1 to 4 carbon atoms.
In the formula (b-1), R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. R102 is preferably a fluorine atom or a perfluoroalkyl group having 1 to 5 carbon atoms, and more preferably a fluorine atom.
As for specific examples of the anion moiety of the component (b-1), in the case where Y101 is a single bond, examples thereof include a fluorinated alkyl sulfonate anion such as a trifluoromethane sulfonate anion and a perfluorobutane sulfonate anion; and in the case where Y101 is an oxygen atom-containing divalent linking group, examples thereof include any of anions represented by the following formulae (an-1) to (an-3).




In the formulae, R′′101 represents an optionally substituted aliphatic cyclic group, a group represented by each of the formulae (r-hr-1) to (r-hr-6), or an optionally substituted chain alkyl group; R′′102 represents an optionally substituted aliphatic cyclic group, a lactone-containing cyclic group represented by each of the formulae (a2-r-1) to (a2-r-7), or an —SO2-containing cyclic group represented by each of the formulae (a5-r-1) to (a5-r-4); R′′103 represents an optionally substituted aromatic cyclic group, an optionally substituted aliphatic cyclic group, or an optionally substituted chain alkenyl group; each v′′ independently represents an integer of 0 to 3; each q′′ independently represents an integer of 1 to 20; t′′ represents an integer of 1 to 3; and n′′ represents 0 or 1.
The optionally substituted aliphatic cyclic group represented by each of R′′101, R′′102, and R′′103 is preferably the group exemplified above for the cyclic aliphatic hydrocarbon group in Ra01. Examples of the substituent include the same substituents as those with which the cyclic aliphatic hydrocarbon group in Ra01 may be substituted.
The optionally substituted aromatic cyclic group in R′′103 is preferably the group exemplified above for the aromatic hydrocarbon group in the cyclic hydrocarbon group in Ra01 Examples of the substituent include the same substituents as those with which the aromatic hydrocarbon group in Ra01 may be substituted.
The optionally substituted chain alkyl group in R′′101 is preferably the group exemplified above for the chain alkyl group in Ra01. The optionally substituted chain alkenyl group in R′′103 is preferably the group exemplified above for the chain alkenyl group in Ra01.
Anion Moiety of Component (b-2)
In the formula (b-2), each of R104 and R105 independently represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group, and examples thereof include the same groups as those in R101 in the formula (b-1). However, R104 and R105 may be bonded to each other to form a ring.
Each of R104 and R105 is preferably an optionally substituted chain alkyl group, and more preferably a linear or branched alkyl group or a linear or branched fluorinated alkyl group.
The number of carbon atoms of the chain alkyl group is preferably 1 to 10, more preferably 1 to 7, and still more preferably 1 to 3. The number of carbon atoms of the chain alkyl group represented by each of R104 and R105 is preferably smaller within the above-described range of the number of carbon atoms for reasons such as good solubility in a resist solvent. In addition, in the chain alkyl group represented by each of R104 and R105, the number of the hydrogen atoms substituted with a fluorine atom is preferably larger because the strength of the acid increases, and the transparency to a high energy light or electron beams of not more than 200 nm is enhanced. A proportion of the fluorine atom in the chain alkyl group, namely a fluorination rate, is preferably 70% to 100%, and more preferably 90% to 100%. A perfluoroalkyl group in which all of the hydrogen atoms are substituted with a fluorine atom is the most preferable.
In the formula (b-2), each of V102 and V103 independently represents a single bond, an alkylene group, or a fluorinated alkylene group, and examples thereof include the same groups as those in V101 in the formula (b-1).
In the formula (b-2), each of L101 and L102 independently represents a single bond or an oxygen atom.
Anion Moiety of Component (b-3)
In the formula (b-3), each of R106 to R108 independently represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group, and examples thereof include the same groups as those in R101 in the formula (b-1).
Each of L103 to L105 independently represents a single bond, —CO—, or —SO2—.
Cation Moiety
In the formulae (b-1), (b-2), and (b-3), M′m+ represents an m-valent onium cation, and preferred examples thereof include a sulfonium cation and an iodonium cation. Specifically, preferred examples of (M′m+)1/m include organic cations represented by the following general formulae (ca-1) to (ca-4), respectively.




In the formulae, each of R201 to R207, R211, and R212 independently represents an optionally substituted aryl group, alkyl group or alkenyl group, and R201 to R203, R206 to R207, or R211 to R212 may be bonded to each other to form a ring together with a sulfur atom in each formula; each of R208 and R209 independently represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms; R210 represents an optionally substituted aryl group, alkyl group or alkenyl group, or an —SO2-containing cyclic group; L201 represents —C(═O)— or —C(═O)—O—; each Y201 independently represents an arylene group, an alkylene group, or an alkenylene group; x represents 1 or 2; and W201 represents an (x+1)-valent linking group.
Examples of the aryl group in R201 to R207, R211, and R212 include an unsubstituted aryl group having 6 to 20 carbon atoms, and the aryl group is preferably a phenyl group or a naphthyl group.
The alkyl group in R201 to R207, R211, and R212 is preferably a chain or cyclic alkyl group having 1 to 30 carbon atoms.
The alkenyl group in R201 to R207, R211, and R212 is preferably an alkenyl group having 2 to 10 carbon atoms.
Examples of the substituent which each of R201 to R207 and R210 to R212 may have include an alkyl group, a halogen atom, a halogenated alkyl group, a carbonyl group, a cyano group, an amino group, an aryl group, and groups represented by the following formulae (ca-r-1) to (ca-r-7), respectively.




In the formulae, each R′201 independently represents a hydrogen atom or an optionally substituted cyclic group, chain alkyl group or chain alkenyl group.
Examples of the optionally substituted cyclic group, the optionally substituted chain alkyl group, or the optionally substituted chain alkenyl group represented by R′201 include the same groups as those in R101 in the foregoing formula (b-1). Besides, examples of the optionally substituted cyclic group or the optionally substituted chain alkyl group include the same acid dissociable group as that represented by the foregoing formula (a1-r-2).
In the case where R201 to R203, R206 to R207, or R211 to R212 may be bonded to each other to form a ring together with a sulfur atom in each formula, they may be bonded to each other via a hetero atom such as a sulfur atom, an oxygen atom, and a nitrogen atom, or a functional group such as a carbonyl group, —SO—, —SO2—, —SO3—, —COO—, —CONH—, and —N(RN)— (RN represents an alkyl group having 1 to 5 carbon atoms). As for the ring to be formed, one ring containing a sulfur atom in the formula in a ring skeleton thereof is preferably a 3- to 10-membered ring, and especially preferably a 5- to 7-membered ring including the sulfur atom. Specific examples of the ring to be formed include a thiophene ring, a thiazole ring, a benzothiophene ring, a thianthrene ring, a dibenzothiophene ring, a 9H-thioxanthene ring, a thioxanthone ring, a phenoxathiin ring, a tetrahydrothiophenium ring, and a tetrahydrothiopyranium ring.
Each of R208 and R209 independently represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. Of these, a hydrogen atom or an alkyl group having 1 to 3 carbon atoms is preferable. In the case where each of R208 and R209 is an alkyl group, they may be bonded to each other to form a ring.
R210 represents an optionally substituted aryl group, an optionally substituted alkyl group, an optionally substituted alkenyl group, or an optionally substituted —SO2-containing cyclic group.
Examples of the aryl group in R210 include an unsubstituted aryl group having 6 to 20 carbon atoms. Above all, a phenyl group or a naphthyl group is preferable.
Examples of the alkyl group in R210 preferably include a chain or cyclic alkyl group having 1 to 30 carbon atoms.
The number of carbon atoms of the alkenyl group in R210 is preferably 2 to 10.
Examples of the optionally substituted —SO2-containing cyclic group in R210 include the same —SO2-containing cyclic groups as those exemplified above for the “—SO2-containing cyclic group” represented by Ra21 in the foregoing general formula (a2-1). Above all, the group represented by the foregoing general formula (a5-r-1) is preferable.
Each Y201 independently represents an arylene group, an alkylene group, or an alkenylene group.
Examples of the arylene group in Y201 include a group in which one hydrogen atom is eliminated from an aryl group exemplified for the aromatic hydrocarbon group in R101 in the foregoing formula (b-1).
Examples of the alkylene group and the alkenylene group in Y201 include the same groups as the aliphatic hydrocarbon groups as the divalent hydrocarbon group in Va1 in the foregoing general formula (a1-1-1).
In the formula (ca-4), x is 1 or 2.
W201 represents an (x+1)-valent (i.e., divalent or trivalent) linking group.
The divalent linking group in W201 is preferably an optionally substituted divalent hydrocarbon group, and examples thereof include the same hydrocarbon groups as those exemplified for Ya21 in the foregoing general formula (a2-1). The divalent linking group in W201 may be linear, branched, or cyclic, and it is preferably cyclic. Above all, a group in which two carbonyl groups are combined at the both ends of an arylene group is preferable. Examples of the arylene group include a phenylene group and a naphthylene group, with a phenylene group being especially preferable.
Examples of the trivalent linking group in W201 include a group in which one hydrogen atom is eliminated from the above-described divalent linking group in W201 and a group in which the above-described divalent linking group is further bonded to the above-described divalent linking group. The trivalent linking group in W201 is preferably a group in which two carbonyl groups are bonded to an arylene group.
Specifically, preferred examples of the cation represented by the formula (ca-1) include cations represented by the following formulae (ca-1-1) to (ca-1-67), respectively.





































In the formulae, each of g1, g2, and g3 represents a repeating number; g1 represents an integer of 1 to 5; g2 represents an integer of 0 to 20; and g3 represents an integer of 0 to 20.













In the formulae, R′′201 represents a hydrogen atom or a substituent, and examples of the substituent include the same substituents as those exemplified above for the substituent which each of R201 to R207 and R210 to R212 may have.
Specifically, preferred examples of the cation represented by the formula (ca-2) include a diphenyl iodonium cation and a bis(4-tert-butylphenyl)iodonium cation.
Specifically, preferred examples of the cation represented by the formula (ca-3) include cations represented by the following formulae (ca-3-1) to (ca-3-6), respectively.




Specifically, preferred examples of the cation represented by the formula (ca-4) include cations represented by the following formulae (ca-4-1) and (ca-4-2), respectively.




Among the foregoing, the cation moiety [(M′m+)1/m] is preferably the organic cation represented by the general formula (ca-1), and more preferably the cation represented by each of the formulae (ca-1-1) to (ca-1-67).
As the component (B), the above-described acid generator may be used alone, or in combination of two or more kinds thereof.
Among the foregoing, as the component (B), an acid generator composed of a compound represented by the following general formula (b-1-1) is especially preferably used.




In the formula, R101′ represents an optionally substituted cyclic group; R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms; Y101′ represents a divalent linking group containing an oxygen atom; V101 represents a single bond, an alkylene group, or a fluorinated alkylene group; m represents an integer of 1 or more; and M′m+ represents an m-valent onium cation.
In the formula (b-1-1), examples of R101′ include the same one as the “optionally substituted cyclic group” in R101, and a cyclic aliphatic hydrocarbon group or a heterocyclic group is preferable. Specifically, examples of the heterocyclic group include the lactone-containing cyclic groups represented by the general formulae (a2-r-1) to (a2-r-7), respectively, the —SO2-containing cyclic groups represented by the general formulae (a5-1-1) to (a5-r-4), respectively, and the heterocyclic groups represented by the chemical formulae (r-hr-1) to (r-hr-16), respectively.
Examples of Y101′ in the formula (b-1-1) include the same one as the “oxygen atom-containing divalent linking group” in Y101 in the formula (b-1).
In the formula (b-1-1), R102, V101, m, and M′m+ are the same as R102, V101, m, and M′m+ in the formula (b-1).
When the resist composition of this aspect contains the component (B), the content of the component (B) is preferably 0.5 part by mass to 60 parts by mass, more preferably 1 part by mass to 50 parts by mass, and still more preferably 1 part by mass to 40 parts by mass based on 100 parts by mass of the component (A).
The content of the component (B) is preferably within the foregoing preferred range, because the pattern formation is sufficiently conducted, and on the occasion of dissolving the respective components of the resist composition in an organic solvent, a uniform solution is obtained and the storage stability is improved.
Component (D)
The resist composition of this aspect may further contain an acid diffusion control agent component (hereinafter, referred to as “component (D)”) in addition to the component (A), or in addition to the component (A) and the component (B).
The component (D) acts as a quencher (acid diffusion control agent) which traps an acid generated from the component (B) and the like upon exposure.
The component (D) may be a photodegradable base (D1) which is decomposed upon exposure to lose acid diffusion controlling properties (hereinafter, referred to as “component (D1)”), or a nitrogen-containing organic compound (D2) which does not fall under the definition of the component (D1) (hereinafter, referred to as “component (D2)”).
Component (D1)
When the resist composition contains the component (D1), a contrast between exposed areas and unexposed areas can be enhanced on the occasion of forming a resist pattern.
Though the component (D1) is not particularly limited so long as it is decomposed upon exposure to lose acid diffusion controlling properties, the component (D1) is preferably at least one kind of compound selected from the group consisting of a compound represented by the following general formula (d1-1) (hereinafter, referred to as “component (d1-1)”), a compound represented by the following general formula (d1-2) (hereinafter, referred to as “component (d1-2)”), and a compound represented by the following general formula (d1-3) (hereinafter, referred to as “component (d1-3)”).
Each of the components (d1-1) to (d1-3) does not act as a quencher in exposed areas because it is decomposed to lose acid diffusion controlling properties (basicity), but acts as a quencher in unexposed areas.




In the formulae, each of Rd1 to Rd4 represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group, provided that a fluorine atom is not bonded to the carbon atom adjacent to the S atom in Rd2 in the formula (d1-2); Yd1 represents a single bond or a divalent linking group; m represents an integer of 1 or more, and each Mm+ independently represents an m-valent organic cation.
Component (d1-1)
Anion Moiety of Component (d1-1):
In the formula (d1-1), Rd1 represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group, and examples thereof include the same groups as those in R101 in the formula (b-1).
Above all, Rd1 is preferably an optionally substituted aromatic hydrocarbon group, an optionally substituted aliphatic cyclic group, or an optionally substituted chain alkyl group. The substituent which each of these groups may have is preferably a hydroxyl group, a fluorine atom, or a fluorinated alkyl group.
The aromatic hydrocarbon group is more preferably a phenyl group or a naphthyl group.
The aliphatic cyclic group is more preferably a group in which one or more hydrogen atoms are eliminated from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
The chain alkyl group is preferably a chain alkyl group having 1 to 10 carbon atoms. Specifically, examples thereof include a linear alkyl group such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, and a decyl group; and a branched alkyl group such as a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a 4-methylpentyl group.
In the case where the chain alkyl group is a fluorinated alkyl group having, as a substituent, a fluorine atom, the number of carbon atoms of the fluorinated alkyl group is preferably 1 to 11, more preferably 1 to 8, and still more preferably 1 to 4. The fluorinated alkyl group may also contain an atom other than a fluorine atom. Examples of the atom other than a fluorine atom include an oxygen atom, a carbon atom, a hydrogen atom, a sulfur atom, and a nitrogen atom.
Rd1 is preferably a fluorinated alkyl group in which some or all hydrogen atoms constituting a linear alkyl group are substituted with a fluorine atom, and more preferably a fluorinated alkyl group (linear perfluoroalkyl group) in which all of hydrogen atoms constituting a linear alkyl group are substituted with a fluorine atom.
Preferred specific examples of the anion moiety of the component (d1-1) are given below.




Cation Moiety of Component (d1-1):

In the formula (d1-1), Mm+ represents an m-valent organic cation.
Preferred examples of the organic cation represented by Mm+ include the same cations as those represented by the general formulae (ca-1) to (ca-4), respectively. Specific examples thereof include cations represented by the formulae (ca-1-1) to (ca-1-67), respectively.
The component (d1-1) may be used alone, or in combination of two or more kinds thereof.
Component (d1-2)
Anion Moiety of Component (d1-2):
In the formula (d1-2), Rd2 represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group, and examples thereof include the same groups as those in R101 in the formula (b-1).
However, a fluorine atom is not bonded to (there is no fluorine-substitution at) the carbon atom adjacent to the S atom in Rd2. According to this, the anion of the component (d1-2) becomes an appropriately weak acid anion, whereby the quenching ability as the component (D) is enhanced.
Rd2 is preferably an optionally substituted aliphatic cyclic group, and more preferably a (optionally substituted) group in which one or more hydrogen atoms are eliminated from adamantane, norbornane, isobornane, tricyclodecane, tetracyclododecane, or the like; or a group in which one or more hydrogen atoms are eliminated from camphor or the like.
The hydrocarbon group represented by Rd2 may have a substituent. Examples of the substituent include the same groups as those exemplified above for the substituent which the hydrocarbon group (aromatic hydrocarbon group or aliphatic hydrocarbon group) in Rd1 in the formula (d1-1) may have.
Preferred specific examples of the anion moiety of the component (d1-2) are given below.







Cation Moiety of Component (d1-2):

In the formula (d1-2), Mm+ represents an m-valent organic cation and is the same as Mm+ in the formula (d1-1).
The component (d1-2) may be used alone, or in combination of two or more kinds thereof.
Component (d1-3)
Anion Moiety of Component (d1-3):
In the formula (d1-3), Rd3 represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group, and examples thereof include the same groups as those in R101 in the formula (b-1). Rd3 is preferably a cyclic group, a chain alkyl group, or a chain alkenyl group, each of which contains a fluorine atom. Above all, Rd3 is preferably a fluorinated alkyl group, and more preferably the same fluorinated alkyl group as that represented by Rd1 as described above.
In the formula (d1-3), Rd4 represents an optionally substituted cyclic group, an optionally substituted chain alkyl group, or an optionally substituted chain alkenyl group, and examples thereof include the same groups as those in R101 in the formula (b-1).
Above all, Rd4 is preferably an alkyl group, an alkoxy group, an alkenyl group, or a cyclic group, each of which may have a substituent.
The alkyl group in Rd4 is preferably a linear or branched alkyl group having 1 to 5 carbon atoms. Specifically, examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. Some of the hydrogen atoms of the alkyl group represented by Rd4 may be substituted with a hydroxyl group, a cyano group, or the like.
The alkoxy group in Rd4 is preferably an alkoxy group having 1 to 5 carbon atoms. Specifically, examples of the alkoxy group having 1 to 5 carbon atoms include a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, and a tert-butoxy group. Above all, a methoxy group or an ethoxy group is preferable.
Examples of the alkenyl group in Rd4 include the same groups as those in R101 in the formula (b-1). Above all, a vinyl group, a propenyl group (allyl group), a 1-methylpropenyl group, and a 2-methylpropenyl group are preferable. Each of these groups may further have, as a substituent, an alkyl group having 1 to 5 carbon atoms or a halogenated alkyl group having 1 to 5 carbon atoms.
Examples of the cyclic group in Rd4 include the same groups as those in R101 in the formula (b-1). Above all, an alicyclic group in which one or more hydrogen atoms are eliminated from a cycloalkane such as cyclopentane, cyclohexane, adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane, or an aromatic group such as a phenyl group and a naphthyl group is preferable. In the case where Rd4 is an alicyclic group, in view of the fact that the resist composition is well dissolved in an organic solvent, the lithography properties are enhanced. In addition, in the case where Rd4 is an aromatic group, in the lithography using EUV or the like as an exposure light source, the resist composition exhibits excellent light absorption efficiency, and the sensitivity and lithography properties are enhanced.
In the formula (d1-3), Yd1 represents a single bond or a divalent linking group.
Though the divalent linking group in Yd1 is not particularly limited, examples thereof include an optionally substituted divalent hydrocarbon group (aliphatic hydrocarbon group or aromatic hydrocarbon group) and a divalent linking group containing a hetero atom. Examples of each of these groups include the same groups as the optionally substituted divalent hydrocarbon group and the divalent linking group containing a hetero atom exemplified above in the description of the divalent linking group represented by Ya21 in the foregoing formula (a2-1).
Yd1 is preferably a carbonyl group, an ester bond, an amide bond, an alkylene group, or a combination thereof. The alkylene group is more preferably a linear or branched alkylene group, and still more preferably a methylene group or an ethylene group.
Preferred specific examples of the anion moiety of the component (d1-3) are given below.










Cation Moiety of Component (d1-3):

In the formula (d1-3), Mm+ represents an m-valent organic cation and is the same as Mm+ in the formula (d1-1).
The component (d1-3) may be used alone, or in combination of two or more kinds thereof.
As the component (D1), only one kind of the components (d1-1) to (d1-3) may be used, or a combination of two or more kinds thereof may also be used.
The content of the component (D1) is preferably 0.5 part by mass to 10 parts by mass, more preferably 0.5 part by mass to 8 parts by mass, and still more preferably 1 part by mass to 8 parts by mass based on 100 parts by mass of the component (A).
When the content of the component (D1) is the preferred lower limit value or more, particularly good lithography properties and a good resist pattern shape are obtained. On the other hand, when it is not more than the preferred upper limit value, the sensitivity can be maintained at a satisfactory level, and the throughput is also improved.
Method of Manufacturing Component (D1)
A method of manufacturing the above-described component (d1-1) and component (d1-2) is not particularly limited, and each of the component (d1-1) and the component (d1-2) can be manufactured by a known method.
In addition, a method of manufacturing the component (d1-3) is not particularly limited, and the component (d1-3) is manufactured in the same manner as in the method disclosed in, for example, US 20120149916 A1.
Component (D2)
As an acid diffusion control agent component, a nitrogen-containing organic compound component (hereinafter, referred to as “component (D2)”) which does not fall under the definition of the component (D1) may be contained.
The component (D2) is not particularly limited so long as it acts as an acid diffusion control agent and does not fall under the definition of the component (D1), and any known compound may be arbitrarily used. Above all, an aliphatic amine, in particular, a secondary aliphatic amine or a tertiary aliphatic amine, is preferable.
The aliphatic amine refers to an amine having one or more aliphatic groups, and the number of carbon atoms of the aliphatic group is preferably 1 to 12.
Examples of the aliphatic amine include an amine in which at least one of hydrogen atoms of ammonia NH3 is substituted with an alkyl group or a hydroxyalkyl group each having not more than 12 carbon atoms (i.e., an alkylamine or an alkyl alcoholamine) and a cyclic amine.
Specific examples of the alkylamine and the alkyl alcoholamine include a monoalkylamine such as n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, and n-decylamine; a dialkylamine such as diethylamine, di-n-propylamine, di-n-heptylamine, di-n-octylamine, and dicyclohexylamine; a trialkylamine such as trimethylamine, triethylamine, tri-n-propylamine, tri-n-butylamine, tri-n-pentylamine, tri-n-hexylamine, tri-n-heptylamine, tri-n-octylamine, tri-n-nonylamine, tri-n-decylamine, and tri-n-dodecylamine; and an alkyl alcoholamine such as diethanolamine, triethanolamine, diisopropanolamine, triisopropanolamine, di-n-octanolamine, and tri-n-octanolamine. Of these, a trialkylamine having 5 to 10 carbon atoms is more preferable, and tri-n-pentylamine or tri-n-octylamine is especially preferable.
Examples of the cyclic amine include a heterocyclic compound containing a nitrogen atom as a hetero atom. The heterocyclic compound may be a monocyclic compound (aliphatic monocyclic amine), or may be a polycyclic compound (aliphatic polycyclic amine).
Specifically, examples of the aliphatic monocyclic amine include piperidine and piperazine.
The aliphatic polycyclic amine is preferably an aliphatic polycyclic amine having 6 to 10 carbon atoms. Specifically, examples thereof include 1,5-diazabicyclo[4.3.0]-5-nonene, 1,8-diazabicyclo[5.4.0]-7-undecene, hexamethylenetetramine, and 1,4-diazabicyclo[2.2.2]octane.
Examples of other aliphatic amines include tris(2-methoxymethoxyethyl)amine, tris{2-(2-methoxyethoxy)ethyl}amine, tris{2-(2-methoxyethoxymethoxy)ethyl}amine, tris{2-(1-methoxyethoxy)ethyl}amine, tris{2-(1-ethoxyethoxy)ethyl}amine, tris{2-(1-ethoxypropoxy)ethyl}amine, tris[2-{2-(2-hydroxyethoxy)ethoxy}ethyl]amine, and triethanolamine triacetate, with triethanolamine triacetate being preferable.
In addition, an aromatic amine may also be used as the component (D2).
Examples of the aromatic amine include 4-dimethylaminopyridine, pyrrole, indole, pyrazole, imidazole, and derivatives thereof, as well as tribenzylamine, 2,6-diisopropylaniline, and N-tert-butoxycarbonylpyrrolidine.
The component (D2) may be used alone, or in combination of two or more kinds thereof.
The component (D2) is generally used in an amount in the range of 0.01 part by mass to 5 parts by mass based on 100 parts by mass of the component (A). When the amount of the component (D2) falls within the foregoing range, the resist pattern shape, the post-exposure temporal stability, and the like are enhanced.
When the resist composition of this aspect contains the component (D), among the foregoing, the photodegradable base (D1) which is decomposed upon exposure to lose acid diffusion controlling properties is preferably contained, and the component (d1-2) is more preferably contained.
Component (E)
For the purposes of preventing deterioration in sensitivity and enhancing the resist pattern shape, the post-exposure temporal stability, and the like, the resist composition of this aspect can contain, as an optional component, at least one kind of compound (E) (hereafter, referred to as “component (E)”) selected from the group consisting of an organic carboxylic acid and a phosphorus oxo acid and a derivative thereof.
Preferred examples of the organic carboxylic acid include acetic acid, malonic acid, citric acid, malic acid, succinic acid, benzoic acid, and salicylic acid.
Examples of the phosphorus oxo acid include phosphoric acid, phosphonic acid, and phosphinic acid, with phosphonic acid being especially preferable.
Examples of the phosphorus oxo acid derivative include an ester in which a hydrogen atom of the above-described oxo acid is substituted with a hydrocarbon group. Examples of the hydrocarbon group include an alkyl group having 1 to 5 carbon atoms and an aryl group having 6 to 15 carbon atoms.
Examples of the phosphoric acid derivative include a phosphoric acid ester such as di-n-butyl phosphate and diphenyl phosphate.
Examples of the phosphonic acid derivative include a phosphonic acid ester such as dimethyl phosphonate, di-n-butyl phosphonate, phenylphosphonic acid, diphenyl phosphonate, and dibenzyl phosphonate.
Examples of the phosphinic acid derivative include a phosphinic acid ester and phenylphosphinic acid.
The component (E) may be used alone, or in combination of two or more kinds thereof.
In general, the component (E) is used in an amount in the range of 0.01 part by mass to 5 parts by mass based on 100 parts by mass of the component (A).
Component (F)
For the purpose of imparting water repellency to the resist film, the resist composition of this aspect may contain a fluorine additive (hereinafter, referred to as “component (F)”).
As the component (F), fluorine-containing high-molecular weight compounds disclosed in, for example, JP-A-2010-002870, JP-A-2010-032994, JP-A-2010-277043, JP-A-2011-13569, and JP-A-2011-128226 can be used.
More specifically, examples of the component (F) include a polymer having a constituent unit (f1) represented by the following formula (f1-1). The polymer is preferably a polymer (homopolymer) composed of only the constituent unit (f1) represented by the following formula (f1-1); a copolymer of the constituent unit (f1) and the constituent unit (a1-1); or a copolymer of the constituent unit (f1), a constituent unit derived from acrylic acid or methacrylic acid, and the constituent unit (a1-1). Here, the constituent unit (a1-1) which is copolymerized with the constituent unit (f1) is preferably a constituent unit derived from 1-ethyl-1-cyclooctyl(meth)acrylate.




In the formula, R is the same as that described above; each of Rf102 and Rf103 independently represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, and Rf102 and Rf103 may be the same as or different from each other; nf1 represents an integer of 1 to 5; and Rf101 represents an organic group containing a fluorine atom.
In the formula (f1-1), R which is bonded to the carbon atom at the α-position is the same as that described above. R is preferably a hydrogen atom or a methyl group.
In the formula (f1-1), examples of the halogen atom represented by Rf102 and Rf103 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being especially preferable. Examples of the alkyl group having 1 to 5 carbon atoms, as represented by Rf102 and Rf103, include the same groups as those exemplified above for the alkyl group having 1 to 5 carbon atoms, as represented by R. Of these, a methyl group or an ethyl group is preferable. Specifically, examples of the halogenated alkyl group having 1 to 5 carbon atoms, as represented by Rf102 and Rf103, include a group in which some or all the hydrogen atoms of the above-described alkyl group having 1 to 5 carbon atoms are substituted with a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being especially preferable. Above all, as Rf102 and Rf103, a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 5 carbon atoms is preferable, and a hydrogen atom, a fluorine atom, a methyl group, or an ethyl group is more preferable.
In the formula (f1-1), nf1 is an integer of 1 to 5, preferably an integer of 1 to 3, and more preferably 1 or 2.
In the formula (f1-1), Rf101 represents an organic group containing a fluorine atom and is preferably a hydrocarbon group containing a fluorine atom.
The hydrocarbon group containing a fluorine atom may be linear, branched, or cyclic, and the number of carbon atoms thereof is preferably 1 to 20, more preferably 1 to 15, and especially preferably 1 to 10.
In addition, in the hydrocarbon group containing a fluorine atom, it is preferable that 25% or more of the hydrogen atoms in the hydrocarbon group are fluorinated; it is more preferable that 50% or more of the hydrogen atoms in the hydrocarbon group are fluorinated; and, it is especially preferable that 60% or more of the hydrogen atoms in the hydrocarbon group are fluorinated in view of the fact that the hydrophobicity of the resist film at the time of immersion exposure is increased.
Above all, Rf101 is especially preferably a fluorinated hydrocarbon group having 1 to 5 carbon atoms, and most preferably a trifluoromethyl group, —CH2—CF3, —CH2—CF2—CF3, —CH(CF3)2, —CH2—CH2—CF3, or —CH2—CH2—CF2—CF2—CF2—CF3.
A mass average molecular weight (Mw) (as converted into standard polystyrene by means of gel permeation chromatography) of the component (F) is preferably 1,000 to 50,000, more preferably 5,000 to 40,000, and most preferably 10,000 to 30,000. When the mass average molecular weight of the component (F) is not more than the upper limit value of this range, sufficient solubility in a resist solvent for the use as a resist is exhibited, whereas when it is the lower limit value of this range or more, good dry etching resistance is obtained and the resist pattern has a good cross-sectional shape.
A degree of dispersion (Mw/Mn) of the component (F) is preferably 1.0 to 5.0, more preferably 1.0 to 3.0, and most preferably 1.2 to 2.5.
The component (F) may be used alone, or in combination of two or more kinds thereof.
In the case where the component (F) is used, the component (F) is preferably used in a proportion of 0.5 part by mass to 10 parts by mass based on 100 parts by mass of the component (A).
In the resist composition of this aspect, if desired, miscible additives, for example, an additional resin for improving the performance of the resist film, a dissolution inhibitor, a plasticizer, a stabilizer, a coloring agent, a halation inhibitor, a dye, and the like can be properly added and contained.
Component (S)
The resist composition of this aspect can be manufactured by dissolving the resist materials in an organic solvent (hereafter, sometimes referred to as “component (S)”).
The component (S) may be any organic solvent so long as it is able to dissolve the respective components to be used to give a uniform solution, and any arbitrary one or two or more kinds of organic solvents can be appropriately selected from those which have been conventionally known as solvents for a chemically amplified resist and used.
Examples of the component (S) include a lactone such as γ-butyrolactone; a ketone such as acetone, methyl ethyl ketone (MEK), cyclohexanone, methyl-n-pentyl ketone, methyl isopentyl ketone, and 2-heptanone; a polyhydric alcohol such as ethylene glycol, diethylene glycol, propylene glycol, and dipropylene glycol; a polyhydric alcohol derivative including a compound having an ester bond, such as ethylene glycol monoacetate, diethylene glycol monoacetate, propylene glycol monoacetate, and dipropylene glycol monoacetate, and a compound having an ether bond, such as a monoalkyl ether, (for example, monomethyl ether, monoethyl ether, monopropyl ether, or monobutyl ether) or monophenyl ether of the above-described polyhydric alcohol or the above-described compound having an ester bond [of these, propylene glycol monomethyl ether acetate (PGMEA) or propylene glycol monomethyl ether (PGME) is preferable]; a cyclic ether such as dioxane; an ester such as methyl lactate, ethyl lactate (EL), methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, ethyl pyruvate, methyl methoxypropionate, and ethyl ethoxypropionate; an aromatic organic solvent such as anisole, ethyl benzyl ether, cresyl methyl ether, diphenyl ether, dibenzyl ether, phenetole, butyl phenyl ether, ethylbenzene, diethylbenzene, pentylbenzene, isopropylbenzene, toluene, xylene, cymene, and mesitylene; and dimethyl sulfoxide (DMSO).
These organic solvents may be used alone, or as a mixed solvent of two or more kinds thereof.
Above all, PGMEA, PGME, γ-butyrolactone, EL, or cyclohexanone is preferable.
In addition, a mixed solvent obtained by mixing PGMEA with a polar solvent is also preferable. Though a blending ratio (mass ratio) of the mixed solvent may be appropriately determined while taking into consideration the compatibility of PGMEA with the polar solvent or the like, it is preferable to allow the blending ratio to fall within the range of 1:9 to 9:1, and more preferably 2:8 to 8:2.
More specifically, in the case where EL or cyclohexanone is blended as the polar solvent, a mass ratio of PGMEA to EL or cyclohexanone is preferably 1:9 to 9:1, and more preferably 2:8 to 8:2. In addition, in the case where PGME is blended as the polar solvent, amass ratio of PGMEA to PGME is preferably 1:9 to 9:1, more preferably 2:8 to 8:2, and still more preferably 3:7 to 7:3. Furthermore, a mixed solvent of PGMEA, PGME, and cyclohexanone is also preferable.
In addition, as the component (S), besides, a mixed solvent of at least one kind selected from PGMEA and EL with γ-butyrolactone is also preferable. In that case, a mixing proportion is preferably 70:30 to 95:5 in terms of a mass ratio of the former to the latter.
The amount of the component (S) used is not particularly limited, and it is properly set in a concentration at which coating on a substrate or the like can be conducted, according to the thickness of the coating film. In general, the component (S) is used such that the solid content concentration of the resist composition falls within the range of 1 mass % to 20 mass %, and preferably 2 mass % to 15 mass %.
According to the resist composition of the invention, a resist pattern which is excellent in various lithography properties can be formed.
With an advance in lithography techniques, expansion of application fields thereof, and the like, enhancements of various lithography properties such as an increase of sensitivity and an improvement of roughness are required. In general, from the viewpoint of a balance in various lithography properties, plural kinds of constituent units are used in a base resin which has been used in a chemically amplified resist composition. However, for example, although introducing a monocyclic group-containing acid decomposable group to the base resin is effective to improve the roughness, the thickness (pattern height) of a resist pattern tends to easily decrease due to development, compared to that before the development, and thus a problem occurs in the formation of a fine pattern. As described above, in the formation of a fine pattern, it is difficult to balance a plurality of lithography properties with each other.
According to the invention, when the high-molecular weight compound (A1) in which the constituent unit (a0) represented by the general formula (a0-1) and the constituent unit (a1-1) including a monocyclic group-containing acid decomposable group whose polarity increases by the action of an acid are combined is used as the base resin of the resist composition, required sensitivity and lithography properties such as an improvement of roughness and a pattern height can be satisfied in a balanced manner in the formation of a resist pattern.
Resist Pattern Forming Method
A resist pattern forming method of a second aspect of the invention includes a step of forming a resist film on a support using a resist composition of the first aspect of the invention, a step of exposing the resist film, and a step of developing the resist film after the exposure to form a resist pattern.
For example, the resist pattern forming method of this aspect can be performed as follows.
First, the resist composition according to the first aspect is applied to a support using a spinner or the like, and a baking (post-apply baking (PAB)) treatment is conducted under a temperature condition of, for example, 80° C. to 150° C. for 40 to 120 seconds, and preferably 60 to 90 seconds, thereby forming a resist film.
Subsequently, using an exposure apparatus, for example, an ArF exposure apparatus, an electron beam drawing apparatus, or an EUV exposure apparatus, the resist film is exposed through a mask having a predetermined pattern formed thereon (mask pattern) or selectively exposed without using a mask pattern by drawing by means of direct irradiation with electron beams, or the like. Then, a baking (post-exposure baking (PEB)) treatment is conducted under a temperature condition of, for example, 80° C. to 150° C. for 40 to 120 seconds, and preferably 60 to 90 seconds.
Subsequently, the resist film is subjected to a development treatment. In the case of an alkali development process, an alkali developing solution is used to perform the development treatment, and in the case of a solvent development process, a developing solution containing an organic solvent (organic developing solution) is used to perform the development treatment.
After the development treatment, a rinse treatment is preferably performed. In the rinse treatment, in the case of an alkali development process, water rinsing using pure water is preferable, and in the case of a solvent development process, a rinse solution containing an organic solvent is preferably used.
In the case of the solvent development process, after the development treatment or the rinse treatment, a treatment of removing the developing solution or rinse solution deposited on the pattern with a supercritical fluid may be conducted.
After the development treatment or the rinse treatment, drying is performed. In some cases, a baking treatment (post-baking) may be conducted after the development treatment. In this manner, a resist pattern can be obtained.
The support is not particularly limited, and a conventionally known support can be used. For example, substrates for electronic components, and such substrates having a predetermined wiring pattern formed thereon can be exemplified. More specifically, examples thereof include a metal-made substrate such as silicon wafer, copper, chromium, iron, and aluminum, and a glass substrate. As a material for the wiring pattern, for example, copper, aluminum, nickel, or gold can be used.
In addition, as the support, a support in which an inorganic and/or organic film is provided on the above-described substrate may also be used. Examples of the inorganic film include an inorganic antireflection film (inorganic BARC). Examples of the organic film include an organic film such as an organic antireflection film (organic BARC) and a lower layer organic film in the multilayer resist method.
Here, the multilayer resist method is a method in which at least one layer of an organic film (lower layer organic film) and at least one layer of a resist film (upper layer resist film) are provided on a substrate, and the lower layer organic film is subjected to patterning while using, as a mask, a resist pattern formed on the upper layer resist film, and it is said that a pattern with a high aspect ratio can be formed. That is, according to the multilayer resist method, since a required thickness can be ensured by the lower layer organic film, the resist film can be made thin, so that it becomes possible to form a fine pattern with a high aspect ratio.
Basically, the multilayer resist method is classified into a method of forming a double-layer structure of an upper layer resist film and a lower layer organic film (double-layer resist method), and a method of forming a multilayer structure of three or more layers, in which one or more interlayers (for example, a thin metal film) are provided between an upper layer resist film and a lower layer organic film (triple-layer resist method).
The wavelength to be used for the exposure is not particularly limited, and the exposure can be conducted using radiation such as ArF excimer lasers, KrF excimer lasers, F2 excimer lasers, extreme ultraviolet rays (EUV), vacuum ultraviolet rays (VUV), electron beams (EB), X rays, and soft X rays. The resist composition is high in usefulness for KrF excimer lasers, ArF excimer lasers, EB, or EUV, and is especially useful for ArF excimer lasers, EB, or EUV.
The method of exposing the resist film may be conducted by means of general exposure (dry exposure) which is conducted in air or an inert gas such as nitrogen, or it may be conducted by means of liquid immersion lithography.
The liquid immersion lithography is an exposure method in which a region between a resist film and a lens located at the lowermost position of an exposure apparatus is filled in advance with a solvent (liquid immersion medium) having a refractive index larger than a refractive index of air, and the exposure (immersion exposure) is conducted in that state.
The immersion medium is preferably a solvent having a refractive index larger than a refractive index of air and smaller than a refractive index of a resist film to be exposed. The refractive index of such a solvent is not particularly limited so long as it falls within the foregoing range.
Examples of the solvent having a refractive index larger than a refractive index of air and smaller than a refractive index of the resist film include water, a fluorine-based inert liquid, a silicon-based solvent, and a hydrocarbon-based solvent.
Specific examples of the fluorine-based inert liquid include a liquid composed mainly of a fluorine-based compound such as C3HCl2F5, C4F9OCH3, C4F9OC2H5, and C5H3F7. Of these, fluorine-based inert liquids having a boiling point of 70° C. to 180° C. are preferable, and those having a boiling point of 80° C. to 160° C. are more preferable. A fluorine-based inert liquid having a boiling point falling within the foregoing range is preferable because after completion of the exposure, the removal of the medium used for the liquid immersion can be conducted by a simple method.
As the fluorine-based inert liquid, in particular, a perfluoroalkyl compound in which all of hydrogen atoms of an alkyl group are substituted with a fluorine atom is preferable. Specifically, examples of the perfluoroalkyl compound include a perfluoroalkylether compound and a perfluoroalkylamine compound.
Furthermore, specifically, examples of the perfluoroalkylether compound include perfluoro(2-butyl-tetrahydrofuran) (boiling point: 102° C.), and examples of the perfluoroalkylamine compound include perfluorotributylamine (boiling point: 174° C.).
As the liquid immersion medium, water is preferably used from the viewpoints of cost, safety, environmental issue, and versatility.
Examples of the alkali development solution used in the development treatment in the alkali development process include a 0.1 mass % to 10 mass % aqueous solution of tetramethylammonium hydroxide (TMAH).
The organic solvent which is contained in an organic developing solution used in the development treatment in the solvent development process may be an organic solvent capable of dissolving the component (A) (component (A) before the exposure) therein, and it can be properly selected among known organic solvents. Specifically, examples thereof include a hydrocarbon-based solvent and a polar solvent such as a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, a nitrile-based solvent, an amide-based solvent, and an ether-based solvent.
The ketone-based solvent is an organic solvent containing C≡C(═O)—C in a structure thereof. The ester-based solvent is an organic solvent containing C≡C(═O)—O—C in a structure thereof. The alcohol-based solvent is an organic solvent containing an alcoholic hydroxyl group in a structure thereof, and the term “alcoholic hydroxyl group” means a hydroxyl group bonded to a carbon atom of an aliphatic hydrocarbon group. The nitrile-based solvent is an organic solvent containing a nitrile group in a structure thereof. The amide-based solvent is an organic solvent containing an amide group in a structure thereof. The ether-based solvent is an organic solvent containing C—O—C in a structure thereof.
Among organic solvents, there is also present an organic solvent containing plural kinds of functional groups which characterize the above-described respective solvents, in a structure thereof. In that case, the organic solvent is thought to fall under the definition of any solvent species containing a functional group which this organic solvent has. For example, diethylene glycol monomethyl ether falls under the definition of any of the alcohol-based solvent or the ether-based solvent in the above-described classification.
The hydrocarbon-based solvent is a hydrocarbon solvent which is composed of a hydrocarbon which may be halogenated and does not have a substituent other than the halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, with a fluorine atom being preferable.
Above all, the organic solvent which is contained in an organic developing solution is preferably a polar solvent, and preferred examples thereof include a ketone-based solvent, an ester-based solvent, and a nitrile-based solvent.
Specific examples of the ketone-based solvent include 1-octanone, 2-octanone, 1-nonanone, 2-nonanone, acetone, 4-heptanone, 1-hexanone, 2-hexanone, diisobutyl ketone, cyclohexanone, methylcyclohexanone, phenylacetone, methyl ethyl ketone, methyl isobutyl ketone, acetylacetone, acetonylacetone, ionone, diacetonyl alcohol, acetyl carbinol, acetophenone, methyl naphthyl ketone, isophorone, propylene carbonate, γ-butyrolactone, and methyl amyl ketone (2-heptanone).
The ketone-based solvent is preferably methyl amyl ketone (2-heptanone).
Examples of the ester-based solvent include methyl acetate, butyl acetate, ethyl acetate, isopropyl acetate, amyl acetate, isoamyl acetate, ethyl methoxyacetate, ethyl ethoxyacetate, propylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monopropyl ether acetate, ethylene glycol monobutyl ether acetate, ethylene glycol monophenyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monopropyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monophenyl ether acetate, diethylene glycol monobutyl ether acetate, 2-methoxybutyl acetate, 3-methoxybutyl acetate, 4-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-ethyl-3-methoxybutyl acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, 2-ethoxybutyl acetate, 4-ethoxybutyl acetate, 4-propoxybutyl acetate, 2-methoxypentyl acetate, 3-methoxypentyl acetate, 4-methoxypentyl acetate, 2-methyl-3-methoxypentyl acetate, 3-methyl-3-methoxypentyl acetate, 3-methyl-4-methoxypentyl acetate, 4-methyl-4-methoxypentyl acetate, propylene glycol diacetate, methyl formate, ethyl formate, butyl formate, propyl formate, ethyl lactate, butyl lactate, propyl lactate, ethyl carbonate, propyl carbonate, butyl carbonate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, butyl pyruvate, methyl acetoacetate, ethyl acetoacetate, methyl propionate, ethyl propionate, propyl propionate, isopropyl propionate, methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, ethyl 3-ethoxypropionate, and propyl 3-methoxypropionate.
The ester-based solvent is preferably butyl acetate.
Examples of the nitrile-based solvent include acetonitrile, propionitrile, valeronitrile, and butyronitrile.
If desired, the organic developing solution can be blended with a known additive. Examples of the additive include a surfactant. Though the surfactant is not particularly limited, for example, an ionic or nonionic fluorine-based and/or silicon-based surfactant can be used. The surfactant is preferably a nonionic surfactant, and is more preferably a fluorine-based surfactant or a silicon-based surfactant.
In the case of blending the surfactant, the blending amount thereof is usually 0.001 mass % to 5 mass %, preferably 0.005 mass % to 2 mass %, and more preferably 0.01 mass % to 0.5 mass % relative to the whole amount of the organic developing solution.
It is possible to carry out the development treatment through a known development method. Examples of the development treatment include a method of immersing a support in a developing solution for a certain period of time (dip method); a method of raising a developing solution on the surface of a support due to a surface tension and making it stationary for a certain period of time (puddle method); a method of spraying a developing solution onto the surface of a support (spray method); and a method of continuously dispensing a developing solution onto a support rotating at a fixed rate while scanning a developing solution dispense nozzle at a fixed rate (dynamic dispense method).
As the organic solvent contained in the rinse solution which is used in the rinse treatment after the development treatment in the solvent development process, among the organic solvents exemplified above for the organic solvent which is used in the organic developing solution, an organic solvent which hardly dissolves the resist pattern can be properly selected and used. In general, at least one kind of solvent selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent, and an ether-based solvent is used. Of these, at least one kind selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, and an amide-based solvent is preferable; at least one kind selected from an alcohol-based solvent and an ester-based solvent is more preferable; and an alcohol-based solvent is especially preferable.
The alcohol-based solvent which is used in the rinse solution is preferably a monohydric alcohol having 6 to 8 carbon atoms, and the monohydric alcohol may be linear, branched, or cyclic. Specifically, examples thereof include 1-hexanol, 1-heptanol, 1-octanol, 2-hexanol, 2-heptanol, 2-octanol, 3-hexanol, 3-heptanol, 3-octanol, 4-octanol, and benzyl alcohol. Of these, 1-hexanol, 2-heptanol, or 2-hexanol is preferable, and 1-hexanol or 2-hexanol is more preferable.
These organic solvents may be used alone, or as a mixture of two or more kinds thereof. In addition, such an organic solvent may be mixed with an organic solvent other than the foregoing organic solvents or water and used. However, taking into consideration the development properties, an amount of water blended in the rinse solution is preferably not more than 30 mass %, more preferably not more than 10 mass %, still more preferably not more than 5 mass %, and especially preferably not more than 3 mass % relative to the whole amount of the rinse solution.
The rinse solution can be blended with a known additive, if desired. Examples of the additive include a surfactant. Examples of the surfactant include the same surfactants as those described above. Above all, a nonionic surfactant is preferable, and a fluorine-based surfactant or a silicon-based surfactant is more preferable.
In the case of blending the surfactant, the blending amount thereof is usually 0.001 mass % to 5 mass %, preferably 0.005 mass % to 2 mass %, and more preferably 0.01 mass % to 0.5 mass % relative to the whole amount of the rinse solution.
The rinse treatment (washing treatment) using a rinse solution can be carried out through a known rinse method. Examples of the method include a method of continuously dispensing a rinse solution onto a support rotating at a fixed rate (rotary coating method); a method of immersing a support in a rinse solution for a certain period of time (dip method); and a method of spraying a rinse solution onto the surface of a support (spray method).
EXAMPLES
The invention is hereunder described in more detail by reference to the following Examples, but it should not be construed that the invention is limited to these Examples.
In Examples, a compound represented by a chemical formula (1) is designated as “compound (1)”, and the same applies for compounds represented by other chemical formulae.
Examples of Manufacturing of High-Molecular Weight Compound
In Examples, to obtain a high-molecular weight compound used as a base material component, compounds as monomers represented by the following chemical formulae were used in combination in a predetermined molar ratio and copolymerized through a known radical polymerization method.










High-Molecular Weight Compounds 1 to 19

Regarding obtained high-molecular weight compounds 1 to 19, a monomer composition ratio of the high-molecular weight compound obtained by means of 13C-NMR (a proportion (molar ratio) of each constituent unit in a structure), a mass average molecular weight (Mw) as converted into standard polystyrene obtained through GPC measurement, and a degree of molecular weight dispersion (Mw/Mn) are recorded together in Table 1.




















TABLE 1







High-
































molecular






















weight
Compound (molar ratio)






















compound
(21)
(111)
(112)
(113)
(114)
(01)
(02)
(03)
(04)
(31)
(121)
Mw
Mw/Mn























1
45
35



20





6800
1.6


2
45
35




20




6500
1.6


3
50
30



20





6600
1.6


4
50
40



10





6900
1.6


5
50
35



15





6800
1.6


6
50
35




15




6800
1.6


7
40
35



25





6800
1.6


8
45
 5



20




30
6900
1.6


9
50

40


10





6900
1.6


10
50


40

10





6900
1.6


11
50



40
10





6900
1.6


12
35
35



30





6900
1.6


13
30
35



35





6900
1.6


14
25
35



40





6900
1.6


15
45
35





20



7000
1.6


16
45
35






20


6900
1.6


17
45
35







20

6900
1.6


18
50
50









6900
1.6


19
45




20




35
6900
1.6









Preparation of Resist Composition
Examples 1 to 16 and Comparative Examples 1 to 3
A resist composition of each of Examples and Comparative Examples was prepared by mixing and dissolving the respective components shown in Table 2.













TABLE 2









Com-
Com-
Com-



Component
Component
ponent
ponent
ponent



(A)
(B)
(D)
(F)
(S)





















Example 1
(A)-1
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 2
(A)-2
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 3
(A)-3
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 4
(A)-4
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 5
(A)-5
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 6
(A)-6
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 7
(A)-7
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 8
(A)-8
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 9
(A)-9
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 10
(A)-10
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 11
(A)-11
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 12
(A)-12
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 13
(A)-13
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 14
(A)-14
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 15
(A)-15
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Example 16
(A)-16
(B)-1
(D)-1
(F)-1
(S)-1



[100]
[14.0]
[6.9]
[3.0]
[3200]


Comparative
(A)-17
(B)-1
(D)-1
(F)-1
(S)-1


Example 1
[100]
[14.0]
[6.9]
[3.0]
[3200]


Comparative
(A)-18
(B)-1
(D)-1
(F)-1
(S)-1


Example 2
[100]
[14.0]
[6.9]
[3.0]
[3200]


Comparative
(A)-19
(B)-1
(D)-1
(F)-1
(S)-1


Example 3
[100]
[14.0]
[6.9]
[3.0]
[3200]









In Table 2, the respective symbols have the following meanings. The numerical values in the square brackets represent a blending amount (parts by mass).
(A)-1 to (A)-19: The above-described high-molecular weight compounds 1 to 19.
(B)-1: An acid generator formed of a compound represented by the following chemical formula (B)-1.
(D)-1: A photodegradable base composed of a compound represented by the following chemical formula (D)-1.
(F)-1: A fluorine-containing high-molecular weight compound represented by the following chemical formula (F)-1. A mass average molecular weight (Mw) as converted into standard polystyrene obtained through GPC measurement is 25,000, and a degree of molecular weight dispersion (Mw/Mn) is 2.0.
(S)-1: A mixed solvent of propylene glycol monomethyl ether acetate/propylene glycol monomethyl ether/cyclohexanone=45/30/25 (mass ratio).




Using the obtained resist compositions, resist patterns were formed, and sensitivity, line wise roughness (LWR), and a pattern height thereof were evaluated as follows.
Formation of Resist Pattern
An organic antireflection film composition “ARC95” (product name, manufactured by Brewer Science Ltd.) was applied onto an 12-inch silicon wafer using a spinner, and the composition was then baked and dried at 205° C. for 60 seconds on a hotplate, thereby forming an organic antireflection film having a thickness of 90 nm.
Then, each of the resist compositions of Examples and Comparative Examples was applied onto the organic antireflection film using a spinner, and was then prebaked (PAB) and dried on a hotplate at a temperature of 110° C. for 60 seconds, thereby forming a resist film having a thickness of 90 nm.
Subsequently, using an ArF exposure apparatus for liquid immersion, NSR-S609B (manufactured by Nikon Corporation; numerical aperture (NA)=1.07, Dipole 0.97/0.78 with polano, liquid immersion medium: water), the resist film was selectively irradiated with ArF excimer lasers (193 nm) through a binary mask.
Thereafter, a post-exposure baking (PEB) treatment was conducted at a temperature of 95° C. for 60 seconds.
Next, alkali development was performed for 10 seconds at 23° C. in a 2.38 mass % aqueous solution of TMAH (product name: NMD-3, manufactured by Tokyo Ohka Kogyo Co., Ltd.), and then the resist film was water-rinsed for 30 seconds using pure water, followed by drying by shaking.
As a result, in each of Examples and Comparative Examples, a 1:1 line-and-space (LS) pattern having a line width of 50 nm and a pitch of 100 nm was formed.
In the formation of the resist pattern in each of Examples and Comparative Examples, an optimum exposure amount (sensitivity) Eop (mJ/cm2) at which the LS pattern was formed was determined. The results are shown in Table 3.
Evaluation of Line Wise Roughness (LWR)
In the LS pattern formed through the above-described “formation of resist pattern”, a space width was measured at 400 places in a longitudinal direction of the space using a measuring scanning electron microscope (SEM) (accelerating voltage: 300 V, product name: S-9380, manufactured by Hitachi High-Technologies Corporation). From the results thereof, a value (3 s) three times larger than a standard deviation (s) was obtained, and an average value (nm) of 3 s at 400 places was calculated as a measure of LWR. The results thereof are shown in Table 3.
The smaller the value of 3 s, the less the roughness of the line width, and it means that a LS pattern having a more uniform width is obtained.
Evaluation of Pattern Height
The height (nm) of the LS pattern formed through the above-described “formation of resist pattern” was measured using a wafer shape/characteristic measurement apparatus (product name: SCD-XT, manufactured by KLA-TENCOR Corporation).
Based on the result, a proportion (%) of the height of the LS pattern after development to the thickness (90 nm) of the resist film before development was obtained. The result is shown as “pattern height (%)” in Table 3.











TABLE 3







Eop
LWR
Pattern



(mJ/cm2)
(nm)
Height (%)





















Example 1
14
3.3
94



Example 2
14
3.2
95



Example 3
14
3.1
94



Example 4
14
3.2
93



Example 5
14
3.1
95



Example 6
14
3.3
95



Example 7
14
3.2
94



Example 8
19
3.4
94



Example 9
21
3.3
95



Example 10
12
3.3
94



Example 11
20
3.2
94



Example 12
14
3.9
93



Example 13
13
3.9
93



Example 14
12
4.0
92



Example 15
14
3.4
92



Example 16
13
3.5
90



Comparative
22
3.2
93



Example 1



Comparative
20
3.2
85



Example 2



Comparative
25
4.1
92



Example 3










From the results shown in Table 3, it is possible to confirm that the resist compositions of Examples 1 to 16 to which the invention is applied exhibits high sensitivity compared to the resist composition of Comparative Example 1, secures a pattern height compared to the resist composition of Comparative Example 2, and has decreased roughness, and thus has high sensitivity compared to the resist composition of Comparative Example 3.
That is, when the invention is applied, it is possible to form a resist pattern which is excellent in various lithography properties.
While preferred embodiments of the invention have been described and illustrated above, it should be understood that these are exemplary of the invention and are not to be considered as limiting. Additions, omissions, substitutions, and other modifications can be made without departing from the spirit or scope of the present invention. Accordingly, the invention is not to be considered as being limited by the foregoing description, and is only limited by the scope of the appended claims.

## Claims

1. A resist composition which generates an acid upon exposure and exhibits changed solubility in a developing solution by the action of the acid, comprising:
a base material component (A) which exhibits changed solubility in a developing solution by the action of an acid,
wherein the base material component (A) contains a high-molecular weight compound (A1) having a constituent unit (a0) represented by the following general formula (a0-1) and a constituent unit (a1-1) including a monocyclic group-containing acid decomposable group whose polarity increases by the action of an acid:




wherein R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms; Ya01 represents a single bond or a divalent linking group; X01 represents a sulfur atom or an oxygen atom; and Ra01 represents an optionally substituted polycyclic group, or an optionally substituted chain alkenyl group.

2. The resist composition according to claim 1,
wherein a proportion of the constituent unit (a0) is 35 mol % or less relative to a total sum of all of constituent units constituting the high-molecular weight compound (A1).

3. The resist composition according to claim 1, further comprising:
an acid generator component (B) which generates an acid upon exposure.

4. The resist composition according to claim 3, further comprising:
a photodegradable base (D1) which is decomposed upon exposure to lose acid diffusion controlling properties.

5. A resist pattern forming method comprising:
forming a resist film on a support using the resist composition according to claim 1;
exposing the resist film; and
developing the resist film after the exposure to form a resist pattern.