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MEMORANDUM - FINAL DATA CATEGORY ASSIGNMENTS FOR SU BPART I 2013

AMENDMENTS

To: Docket EPA-HQ-OAR-2011-0028

From: Alexis McKittrick, EPA/Climate Change

Date: September 18, 2013

Subject: Final data category assignments for data reporting eleme nts in 40 CFR part 98,

subpart I.

In this memorandum, we confirm the final data category as signments for data reporting elements

in Subpart I – Electronics Manufacturing of Part 98 as r eferenced in the Greenhouse Gas

Reporting Program: Final Amendments and Confidentiality Determinations for Subpar t I

(“Final Subpart I Notice”). Please note that as stated in the Final Subpart I Notic e all

confidentiality determinations have been finalized as propo sed in Greenhouse Gas Reporting

Program: Proposed Amendments and Confidentiality Determinations for Subpart I [77 FR

63538]. The table below shows the final assignment of each da ta reporting element into one of

10 data categories (excluding inputs to emission equations). Th e table also shows the final

confidentiality determination for data elements in the t wo data categories for which a categorical

confidentiality determination was not made.

In the final rule, the proposed 98.96(q) was split into 98.96(q) (1)-(4). The text of 98.96(q)(1) is

identical to 98.96(q) as proposed; thus, the proposed data cate gory assignment for 98.96(q) has

been applied to 98.96(q)(1). Because we did not propose a c onfidentiality determination for

98.96(q)(2)-(4), there are no final confidentiality determinati ons for those data elements.

For descriptions of the direct emitter data categories and the categorical confidentiality

determinations made for eight of these categories, see the preambles to the proposed and final

rulemakings: Proposed Confidentiality Determinations for Data Required Under the Mandatory

Greenhouse Gas Reporting Rule and Proposed Amendment to Special Rules Governi ng Certain

Information Obtained Under the Clean Air Act published on July 7, 2010 (75 FR 39094); and

Confi 

# dentiality Determinations for Data Required under the Mandatory Greenhouse G as

Reporting Rule and Amendment to Special Rules Governing Certain Information O btained under

the Clean Air Act

published on May 26, 2011 (76 FR 30782).

Copies of the proposed and final rules are available on E PA’s website:

http://www.epa.gov/climatechange/emissions/CBI.html , at the following links:

http://www.gpo.gov/fdsys/pkg/FR-2010-07-07/pdf/2010-16317.pdf and

http://www.gpo.gov/fdsys/pkg/FR-2011-05-26/pdf/2011-12930.pdf

.2Appendix AFinal Data Category Assignments for Subpart I 2013 AmendmentsList of Final Data Category AssignmentsNote:In the May 26, 2011, Final CBI rule (76 FR 30782), the EPA issued categorical confidentiality determinations for eight direct emitter categories. Two of the data categories(“Unit/Process ‘Static’ Characteristics That are NotInputs to Emission Equations” and “Unit/Process ‘Operating’ Characteristics That are Not Inputs to Emission Equations”)donot have categorical confidentiality determinations, and these CBI determinations are made on an element-by-element basis. In this action, the EPA is assigning 13 new or reviseddata elements to data categories for which EPA issued categorical confidentiality determinations. The EPA is assigning 12 new or revised data elements to the “Unit/Process‘Static’ Characteristics That are Not Inputs to Emission Equations” and “Unit/Process Operating CharacteristicsThat are Not Inputs to Emission Equations” data categoriesandmaking confidentially determinations for these reporting elements individually. The table below identifies the datacategories and the confidentiality determination for thenew orrevised data elements in the final subpart I amendments.FinalRule Citation forDataReporting ElementData Element DescriptionNew or revised?Final Data Category Assignment1FinalCategoricalor IndividualDetermination298.96(c)(1)On a fab basis, each fluorinated GHG emitted fromeach process type for which your fab is required tocalculate emissions as calculated in Equations I–6and I–7.Revisedsoreporting is on afab-basis instead ofa facility-basis.EmissionsEmission data (not CBI)98.96(c)(2)On a fab basis, each fluorinated GHG emitted fromeach process type or process sub-type as calculatedin Equations I–8 and I–9.Revisedtoremovereferences to“recipe-specific”and revise to fabbasis.EmissionsEmission data (not CBI)1Data category assignments for the existing data elements that are being revised were finalized on August 13, 2012; see Final Confidentiality Determinations for Regulations Under the Mandatory Reporting ofGreenhouse Gases Rule (77 FR 48072, August 13, 2012). The assignmentsfor individual data elements are in the memorandum “Final Data Category Assignments and Confidentiality Determinations for the 2012Final CBI Rule’’ (see Docket EPA–HQ–OAR–2011–0028 and the Web site, http://www.epa.gov/climatechange/emissions/CBI.html).2Confidentiality determinations for the existing data elements that are being revised were finalized on August 13, 2012;see Final Confidentiality Determinations for Regulations Under the Mandatory Reporting ofGreenhouse Gases Rule (77 FR 48072, August 13, 2012). The determinations for individual data elements are in the memorandum“Final Data Category Assignments and Confidentiality Determinations for the 2012Final CBI Rule’’ (see Docket EPA–HQ–OAR–2011–0028 and the Web site, http://www.epa.gov/climatechange/emissions/CBI.html).3FinalRule Citation forDataReporting ElementData Element DescriptionNew or revised?Final Data Category Assignment1FinalCategoricalor IndividualDetermination298.96(c)(3)On a fab basis,N2O emitted fromallchemical vapordeposition processes and N2O emitted from all otherN2O-using manufacturing processes as calculated inEquation I–10.Revised soreporting is on afab-basis instead ofa facility-basis.EmissionsEmission data (not CBI)98.96(c)(5)When you use the procedures specified in §98.93(i)of this subpart, annual emissions of each fluorinatedGHG on a fab basis.NewEmissionsEmission data (not CBI)98.96(m)(1)Identificationof the quantifiable metric used in yourfab-specific engineering model to apportion gasconsumption for each fab.Revisedtoapportion gas foreach fab.Unit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination;nodetermination98.96(m)(3)Certification that the gas(es) you selected under§98.94(c)(2)(ii) for each fab corresponds to thelargest quantity(ies) consumed, on a mass basis, offluorinated GHG used at your fab during thereporting year for which you are required toapportion.Revisedto a fabbasis and to removereporting byprocess type.Test & Calibration MethodsNot emission data and not CBI98.96(m)(4)The result of the calculation comparing the actualand modeled gas consumption under§98.94(c)(2)(iii) and (iv), as applicable.Revisedto includecomparison resultsfrom stack testmethod.Test & Calibration MethodsNot emission data and not CBI98.96(m)(5)Ifrequired to apportion fluorinated GHGconsumption between fabs as required by§98.94(c)(2)(v), certification that the gas(es) youselected under §98.94(c)(2)(ii) corresponds to thelargest quantity(ies) consumed on a mass basis, offluorinated GHG used at your facility during thereporting year for which you are required toapportion.NewTest & Calibration MethodsNot emission data and not CBI98.96(p)Inventory of all abatement systems through whichfluorinated GHGs or N2O flow at your facility andfor which you are claiming destruction or removalefficiency.Revisedto clarifyapplicability toabatement systemsfor which youclaim destruction orremovalefficiencies.Unit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination;CBI4FinalRule Citation forDataReporting ElementData Element DescriptionNew or revised?Final Data Category Assignment1FinalCategoricalor IndividualDetermination298.96(p)Description of all abatement systemsthrough whichfluorinated GHGs or N2O flow at your facility andfor which you are claiming destruction or removalefficiency.Revisedto clarifyapplicability toabatement systemsfor which youclaim destruction orremovalefficiencies.Unit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination; notCBI98.96(p)(1)The number of abatement systems controllingemissions for each process sub-type, or process type,as applicable, for each gas used in the process subtype or process type.Revisedto bereported on a gasand processtype/subtype basis.Unit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination;CBI98.96(p)(2)The basis of the destruction orremoval efficiencybeing used (default or site specific measurementaccording to §98.94(f)(4)(i)) for each process subtype or process type and for each gas.NewUnit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categoricaldetermination; notCBI98.96(q)(1)(proposed as 98.96(q))For all abatement systems through which fluorinatedGHGs or N2O flow at your facility for which you arereporting controlled emissions, a certification that allabatement systems at the facility have been installed,maintained, and operated in accordance with the sitemaintenance plan for abatement systems that isdeveloped and maintained in your records asspecified in §98.97(d)(9).Revisedtoaddreference to sitemaintenance plan.Unit/Process'Operating' Characteristics That are NotInputs to Emission EquationsNo categorical determination; notCBI98.96(r)Effective facility-wide destruction or removalefficiency value calculated using Equations I-26, I27, and I-28.NewUnit/Process 'Operating' Characteristics That are NotInputs to Emission EquationsNo categorical determination; notCBI98.96(w)(1)If you elect to calculate fab-level emissions offluorinated GHG using the stack testing proceduresspecified in §98.93(i), the date of any stack testingconducted during the reporting year.NewTest & Calibration MethodsNot emission data and not CBI98.96(w)(1)If you elect to calculate fab-level emissions offluorinated GHG using the stack testing proceduresspecified in §98.93(i), the identity of the stack tested.NewFacility and Unit Identifier InformationEmission data (not CBI)98.96(w)(2)If you elect to calculate fab-level emissions offluorinated GHG using the stack testing proceduresspecified in §98.93(i), an inventory of all stacksfrom which process fluorinated GHG are emitted.NewFacility and Unit Identifier InformationEmission data (not CBI)5FinalRule Citation forDataReporting ElementData Element DescriptionNew or revised?Final Data Category Assignment1FinalCategoricalor IndividualDetermination298.96(w)(2)If you elect to calculate fab-level emissions offluorinated GHG using the stack testing proceduresspecified in §98.93(i), for each stack system,indicate whether the stack is among those for whichstack testing was performed as per §98.93(i)(3) ornot performed as per §98.93(i)(2) (for exempt lowemitting stacks).NewCalculation Methodology & Method, TierEmission data (not CBI)98.96(x)If the emissions reported under paragraphs (c)include emissions from research and developmentactivities, report the approximate percentage of totalGHG emissions that are attributable to research anddevelopment activities, using the following ranges:less than 5 percent, 5 percent to less than 10 percent,10 percent to less than 25 percent, 25 percent to lessthan 50 percent, 50 percent and higher.NewCalculation Methodology & Method, TierEmission data (not CBI)98.96(y)(2)(i)If your semiconductor manufacturing facility emitsin 2015 more than 40,000 mtCO2e of GHGemissions from the electronics manufacturingprocesses subject to reporting, a triennial (every 3years) technology assessment report including adescription of how the gases and technologies usedin semiconductor manufacturing using 200 mm and300 mm wafers in the United States have changed inthe past 3 years and whether any of the identifiedchanges are likely to have affected the emissionscharacteristics of semiconductor manufacturingprocesses in such a way that the default utilizationand byproduct formation rates or default DRE valuesmay need to be updated.NewUnit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination;CBI6FinalRule Citation forDataReporting ElementData Element DescriptionNew or revised?Final Data Category Assignment1FinalCategoricalor IndividualDetermination298.96(y)(2)(ii)If your semiconductor manufacturing facility emitsin 2015 more than 40,000 mtCO2e of GHGemissions from the electronics manufacturingprocesses subject to reporting, a triennial (every 3years) technology assessment report including adescription of the effect of the implementation ofnew process technologies and/or finer line widthprocesses in 200 mm and 300 mm technologies, theintroduction of new tool platforms, and theintroduction of new processes on previously testedplatforms.NewUnit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination;CBI98.96(y)(2)(iii)If your semiconductor manufacturing facility emitsin 2015 more than 40,000 mtCO2e of GHGemissions from the electronics manufacturingprocesses subject to reporting, a triennial (every 3years) technology assessment report including adescription of the status of implementing 450 mmwafer technology and the potential need to create orupdate emission factors compared to 300 mmtechnology.NewUnit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination;CBI98.96(y)(2)(iv)If your semiconductor manufacturingfacility emitsin 2015 more than 40,000 mtCO2e of GHGemissions from the electronics manufacturingprocesses subject to reporting, a triennial (every 3years) technology assessment report including anyutilization and by-product formation rates or DREdata that have been collected in the previous 3 yearsthat support the changes or continuities insemiconductor manufacturing processes described inthe report.NewEmissionsEmission data (not CBI)98.96(y)(2)(v)If your semiconductor manufacturingfacility emitsin 2015 more than 40,000 mtCO2e of GHGemissions from the electronics manufacturingprocesses subject to reporting, a triennial (every 3years) technology assessment report including adescription of the use of a new gas, use of anexisting gas in a new process type or sub-type, or afundamental change in process technology.NewUnit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination;CBI7FinalRule Citation forDataReporting ElementData Element DescriptionNew or revised?Final Data Category Assignment1FinalCategoricalor IndividualDetermination298.96(y)(3)If, on the basis of the information reported inparagraph (y)(2), the triennial report indicates thatGHG emissions from semiconductor manufacturingmay have changed from those represented by thedefault emission factors in Tables I-3, I-4, or I-5, orthe default DRE values in Table I-13, the reportmust lay out a data gathering and analysis plan thatincludes the testing of tools to determine thepotential effect on current emission factors and DREvalues under the new conditions, and a plannedanalysis of the effect on overall facility emissionsusing a representative gas-use profile for a 200 mm,300 mm, or 450 mm fab (depending on whichtechnology is under consideration).NewUnit/Process 'Static' Characteristics That are Not Inputsto Emission EquationsNo categorical determination; CBI