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MEMORANDUM - FINAL DATA CATEGORY ASSIGNMENTS FOR SUBPART I 2013 

AMENDMENTS 

To: Docket EPA-HQ-OAR-2011-0028 

From: Alexis McKittrick, EPA/Climate Change 

Date: September 18, 2013 

Subject: Final data category assignments for data reporting elements in 40 CFR part 98, 

subpart I. 

In this memorandum, we confirm the final data category assignments for data reporting elements 

in Subpart I – Electronics Manufacturing of Part 98 as referenced in the Greenhouse Gas 

Reporting Program: Final Amendments and Confidentiality Determinations for Subpart I 

(“Final Subpart I Notice”). Please note that as stated in the Final Subpart I Notice all 

confidentiality determinations have been finalized as proposed in Greenhouse Gas Reporting 

Program: Proposed Amendments and Confidentiality Determinations for Subpart I [77 FR 

63538]. The table below shows the final assignment of each data reporting element into one of 

10 data categories (excluding inputs to emission equations). The table also shows the final 

confidentiality determination for data elements in the two data categories for which a categorical 

confidentiality determination was not made. 

In the final rule, the proposed 98.96(q) was split into 98.96(q)(1)-(4). The text of 98.96(q)(1) is 

identical to 98.96(q) as proposed; thus, the proposed data category assignment for 98.96(q) has 

been applied to 98.96(q)(1). Because we did not propose a confidentiality determination for 

98.96(q)(2)-(4), there are no final confidentiality determinations for those data elements. 

For descriptions of the direct emitter data categories and the categorical confidentiality 

determinations made for eight of these categories, see the preambles to the proposed and final 

rulemakings: Proposed Confidentiality Determinations for Data Required Under the Mandatory

Greenhouse Gas Reporting Rule and Proposed Amendment to Special Rules Governing Certain 

Information Obtained Under the Clean Air Act published on July 7, 2010 (75 FR 39094); and

Confidentiality Determinations for Data Required under the Mandatory Greenhouse Gas 

Reporting Rule and Amendment to Special Rules Governing Certain Information Obtained under 

the Clean Air Act published on May 26, 2011 (76 FR 30782). 

Copies of the proposed and final rules are available on EPA’s website: 

http://www.epa.gov/climatechange/emissions/CBI.html, at the following links: 

http://www.gpo.gov/fdsys/pkg/FR-2010-07-07/pdf/2010-16317.pdf and 

http://www.gpo.gov/fdsys/pkg/FR-2011-05-26/pdf/2011-12930.pdf. 

 
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Appendix A 

Final Data Category Assignments for Subpart I 201

List of Final Data Category Assignments Note: In the May 26, 2011, Final CBI rule (76 FR 30782), the EPA issued categorical confidentiality determinations fo(“Unit/Process ‘Static’ Characteristics That are Not Inputs to Emission Equations” and “Unit/Process ‘Operating

not have categorical confidentiality determinations, and these CBI determinations are made on an element-by-eledata elements to data categories for which EPA issued categorical confidentiality determinations. The EPA is ass

‘Static’ Characteristics That are Not Inputs to Emission Equations” and “Unit/Process Operating Characteristics making confidentially determinations for these reporting elements individually. The table below identifies the da

revised data elements in the final subpart I amendments.

Final Rule Citation for Data 

Reporting Element Data Element Description New or revised? Final 

98.96(c)(1) On a fab basis, each fluorinated GHG emitted from 

each process type for which your fab is required to calculate emissions as calculated in Equations I–6 and I–7. 

Revised so reporting is on a fab-basis instead of a facility-basis. 

Emissions 

98.96(c)(2) On a fab basis, each fluorinated GHG emitted from 

each process type or process sub-type as calculated in Equations I–8 and I–9. 

Revised to remove references to “recipe-specific” and revise to fabbasis. 

Emissions 

1 Data category assignments for the existing data elements that are being revised were finalized on August 13, 2012; see Final ConfidenGreenhouse Gases Rule (77 FR 48072, August 13, 2012). The assignments for individual data elements are in the memorandum “Final Final CBI Rule’’ (see Docket EPA–HQ–OAR–2011–0028 and the Web site, http://www.epa.gov/climatechange/emissions/CBI.html). 2 Confidentiality determinations for the existing data elements that are being revised were finalized on August 13, 2012; see Final Conf

Greenhouse Gases Rule (77 FR 48072, August 13, 2012). The determinations for individual data elements are in the memorandum “FinFinal CBI Rule’’ (see Docket EPA–HQ–OAR–2011–0028 and the Web site, http://www.epa.gov/climatechange/emissions/CBI.html). 
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Final Rule Citation for Data 

Reporting Element Data Element Description New or revised? Final 

98.96(c)(3) On a fab basis, N2O emitted from all chemical vapor 

deposition processes and N2O emitted from all other N2O-using manufacturing processes as calculated in Equation I–10. 

Revised so reporting is on a fab-basis instead of a facility-basis. 

Emissions 

98.96(c)(5) When you use the procedures specified in §98.93(i) 

of this subpart, annual emissions of each fluorinated GHG on a fab basis. 

New Emissions 

98.96(m)(1) Identification of the quantifiable metric used in your 

fab-specific engineering model to apportion gas consumption for each fab. 

Revised to apportion gas for each fab. 

Unit/Process 'Stto Emission Equ

98.96(m)(3) Certification that the gas(es) you selected under 

§98.94(c)(2)(ii) for each fab corresponds to the largest quantity(ies) consumed, on a mass basis, of fluorinated GHG used at your fab during the reporting year for which you are required to apportion. 

Revised to a fab basis and to remove reporting by process type. 

Test & Calibrat

98.96(m)(4) The result of the calculation comparing the actual 

and modeled gas consumption under §98.94(c)(2)(iii) and (iv), as applicable. 

Revised to include comparison results from stack test method. 

Test & Calibrat

98.96(m)(5) If required to apportion fluorinated GHG 

consumption between fabs as required by §98.94(c)(2)(v), certification that the gas(es) you selected under §98.94(c)(2)(ii) corresponds to the largest quantity(ies) consumed on a mass basis, of fluorinated GHG used at your facility during the reporting year for which you are required to apportion. 

New Test & Calibrat

98.96(p) Inventory of all abatement systems through which 

fluorinated GHGs or N2O flow at your facility and for which you are claiming destruction or removal efficiency. 

Revised to clarifyapplicability to abatement systems for which you claim destruction or removal efficiencies. 

Unit/Process 'Stto Emission Equ
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Final Rule Citation for Data 

Reporting Element Data Element Description New or revised? Final 

98.96(p) Description of all abatement systems through which 

fluorinated GHGs or N2O flow at your facility and for which you are claiming destruction or removal efficiency. 

Revised to clarify applicability to abatement systems for which you claim destruction or removal efficiencies. 

Unit/Process 'Stto Emission Equ

98.96(p)(1) The number of abatement systems controlling 

emissions for each process sub-type, or process type, as applicable, for each gas used in the process subtype or process type. 

Revised to be reported on a gas and process type/subtype basis. 

Unit/Process 'Stto Emission Equ

98.96(p)(2) The basis of the destruction or removal efficiency 

being used (default or site specific measurement according to §98.94(f)(4)(i)) for each process subtype or process type and for each gas. 

New Unit/Process 'St

to Emission Equ

98.96(q)(1)

 (proposed as 98.96(q)) 

For all abatement systems through which fluorinated GHGs or N2O flow at your facility for which you are reporting controlled emissions, a certification that all abatement systems at the facility have been installed, maintained, and operated in accordance with the site maintenance plan for abatement systems that is developed and maintained in your records as specified in §98.97(d)(9). 

Revised to add reference to site maintenance plan. 

Unit/Process 'OInputs to Emiss

98.96(r) Effective facility-wide destruction or removal 

efficiency value calculated using Equations I-26, I27, and I-28. 

New Unit/Process 'O

Inputs to Emiss

98.96(w)(1) If you elect to calculate fab-level emissions of 

fluorinated GHG using the stack testing procedures specified in §98.93(i), the date of any stack testing conducted during the reporting year. 

New Test & Calibrat

98.96(w)(1) If you elect to calculate fab-level emissions of 

fluorinated GHG using the stack testing procedures specified in §98.93(i), the identity of the stack tested. 

New Facility and Un

98.96(w)(2) If you elect to calculate fab-level emissions of 

fluorinated GHG using the stack testing procedures specified in §98.93(i), an inventory of all stacks from which process fluorinated GHG are emitted. 

New Facility and Un
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Final Rule Citation for Data 

Reporting Element Data Element Description New or revised? Final 

98.96(w)(2) If you elect to calculate fab-level emissions of 

fluorinated GHG using the stack testing procedures specified in §98.93(i), for each stack system, indicate whether the stack is among those for which stack testing was performed as per §98.93(i)(3) or not performed as per §98.93(i)(2) (for exempt low emitting stacks). 

New Calculation Met

98.96(x) If the emissions reported under paragraphs (c) 

include emissions from research and development activities, report the approximate percentage of total GHG emissions that are attributable to research and development activities, using the following ranges: less than 5 percent, 5 percent to less than 10 percent, 10 percent to less than 25 percent, 25 percent to less than 50 percent, 50 percent and higher. 

New Calculation Met

98.96(y)(2)(i) If your semiconductor manufacturing facility emits 

in 2015 more than 40,000 mtCO2e of GHG 

emissions from the electronics manufacturing processes subject to reporting, a triennial (every 3 years) technology assessment report including a description of how the gases and technologies used in semiconductor manufacturing using 200 mm and 300 mm wafers in the United States have changed in the past 3 years and whether any of the identified changes are likely to have affected the emissions characteristics of semiconductor manufacturing processes in such a way that the default utilization and byproduct formation rates or default DRE values may need to be updated. 

New Unit/Process 'St

to Emission Equ
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Final Rule Citation for Data 

Reporting Element Data Element Description New or revised? Final 

98.96(y)(2)(ii) If your semiconductor manufacturing facility emits 

in 2015 more than 40,000 mtCO2e of GHG 

emissions from the electronics manufacturing processes subject to reporting, a triennial (every 3 years) technology assessment report including a description of the effect of the implementation of new process technologies and/or finer line width processes in 200 mm and 300 mm technologies, the introduction of new tool platforms, and the introduction of new processes on previously tested platforms. 

New Unit/Process 'St

to Emission Equ

98.96(y)(2)(iii) If your semiconductor manufacturing facility emits 

in 2015 more than 40,000 mtCO2e of GHG 

emissions from the electronics manufacturing processes subject to reporting, a triennial (every 3 years) technology assessment report including a description of the status of implementing 450 mm wafer technology and the potential need to create or update emission factors compared to 300 mm technology. 

New Unit/Process 'St

to Emission Equ

98.96(y)(2)(iv) If your semiconductor manufacturing facility emits 

in 2015 more than 40,000 mtCO2e of GHG 

emissions from the electronics manufacturing processes subject to reporting, a triennial (every 3 years) technology assessment report including any utilization and by-product formation rates or DRE data that have been collected in the previous 3 years that support the changes or continuities in semiconductor manufacturing processes described in the report. 

New Emissions 

98.96(y)(2)(v) If your semiconductor manufacturing facility emits 

in 2015 more than 40,000 mtCO2e of GHG 

emissions from the electronics manufacturing processes subject to reporting, a triennial (every 3 years) technology assessment report including a description of the use of a new gas, use of an existing gas in a new process type or sub-type, or a fundamental change in process technology. 

New Unit/Process 'St

to Emission Equ
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Final Rule Citation for Data 

Reporting Element Data Element Description New or revised? Final 

98.96(y)(3) If, on the basis of the information reported in 

paragraph (y)(2), the triennial report indicates that GHG emissions from semiconductor manufacturing may have changed from those represented by the default emission factors in Tables I-3, I-4, or I-5, or the default DRE values in Table I-13, the report must lay out a data gathering and analysis plan that includes the testing of tools to determine the potential effect on current emission factors and DRE values under the new conditions, and a planned analysis of the effect on overall facility emissionsusing a representative gas-use profile for a 200 mm, 300 mm, or 450 mm fab (depending on which technology is under consideration). 

New Unit/Process 'St

to Emission Equ