# Patent

## Title
Chip package and fabrication method thereof

## Abstract

A chip package and a fabrication method thereof are provided. The chip package includes a semiconductor substrate, having a first surface and an opposing second surface. A spacer is disposed under the second surface of the semiconductor substrate and a cover plate is disposed under the spacer. A recessed portion is formed adjacent to a sidewall of the semiconductor substrate, extending from the first surface of the semiconductor substrate to at least the spacer. Then, a protection layer is disposed over the first surface of the semiconductor substrate and in the recessed portion.

## Background
CROSS REFERENCE TO RELATED APPLICATIONS
This application is a Continuation-In-Part of U.S. patent application Ser. No. 12/687,093, filed Jan. 13, 2010 now U.S. Pat. No. 8,432,032 and entitled “CHIP PACKAGE AND FABRICATION METHOD THEREOF”


BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a chip package, and in particular relates to a chip package with a through-silicon via and a fabrication method thereof.
2. Description of the Related Art
To enable electronic equipment to become smaller, chip packages contained therein have been becoming smaller. One approach for reducing the size of chip packages includes using through-silicon vias in the packaged chips. However, in some situations, a redistribution layer in the through-silicon vias is easily delaminated from the sidewall of the vias during a thermal cycle test. Accordingly, the through-silicon vias also reduce the reliability of the packaged chips.
Thus, a new chip package design and a fabrication method thereof are thus desired.
BRIEF SUMMARY OF THE INVENTION
According to an illustrative embodiment, a chip package is provided. The chip package comprises a semiconductor substrate, having a first surface and an opposing second surface. A through hole is disposed on the first surface, extending from the first surface to the second surface. A conductive trace layer is disposed over the first surface and extends to the through hole. Then, a buffer plug is disposed over the conductive trace layer in the through hole and a protection layer is disposed to cover the entire first surface of the semiconductor substrate.
According to an illustrative embodiment, a method for fabricating a chip package is provided. The method comprises providing a semiconductor substrate, having a first surface and an opposing second surface. Through holes are formed on the first surface, extending from the first surface to the second surface. A conductive trace layer is conformally formed over the first surface and extends to the through holes. Then, a buffer plug is formed over the conductive trace layer in the through holes and a protection layer is formed to cover the entire first surface of the semiconductor substrate.
According to another illustrative embodiment, a chip package is provided. The chip package comprises a semiconductor substrate, having a first surface and an opposing second surface. A spacer is disposed under the second surface of the semiconductor substrate and a cover plate is disposed under the spacer. A recessed portion is formed adjacent to a sidewall of the semiconductor substrate, extending from the first surface of the semiconductor substrate to at least the spacer. Then, a protection layer is disposed over the first surface of the semiconductor substrate and in the recessed portion.
According to another illustrative embodiment, a method for fabricating a chip package is provided. The method comprises providing a semiconductor substrate, having a first surface and an opposing second surface. A spacer is formed under the second surface of the semiconductor substrate. A cover plate is attached to the underside of the spacer. Trench openings are formed on the first surface of the semiconductor substrate along a scribe line, extending from the first surface to at least the spacer. A protection layer is formed over the first surface of the semiconductor substrate and in the trench openings. Then, the semiconductor substrate is diced along the scribe line to form chip packages, wherein each chip package includes at least a recessed portion adjacent to a sidewall of the semiconductor substrate, extending from the first surface of the semiconductor substrate to at least the spacer, and covered with the protection layer.
A detailed description is given in the following embodiments with reference to the accompanying drawings.



BRIEF DESCRIPTION OF THE DRAWINGS
The present invention can be more fully understood by reading the subsequent detailed description and examples with references made to the accompanying drawings, wherein:
FIG. 1 shows an illustrative cross section of a chip package according to an embodiment of the invention;
FIGS. 2A-2H are illustrative cross sections showing the steps for fabricating the chip package of FIG. 1 according to an embodiment of the invention;
FIG. 3 shows an illustrative cross section of a chip package according to an embodiment of the invention; and
FIGS. 4A-4I are illustrative cross sections showing the steps for fabricating the chip package of FIG. 3 according to an embodiment of the invention.



DETAILED DESCRIPTION OF THE INVENTION
The following description is of the best-contemplated mode of carrying out the invention. This description is made for the purpose of illustrating the general principles of the invention and should not be taken in a limiting sense. The scope of the invention is best determined by reference to the appended claims.
The embodiments of chip packages of the invention and fabrication methods thereof are illustrated by embodiments of fabricating image sensor chip packages in the following description. However, it should be appreciated that the invention may also be applied to forming other semiconductor chips. Therefore, the packages of the embodiments of the invention may be applied to active or passive devices, or electronic components with digital or analog circuits, such as opto electronic devices, micro electro mechanical systems (MEMS), micro fluidic systems, and physical sensors for detecting heat, light, or pressure. Particularly, a wafer level chip scale package (WLCSP) process may be applied to package semiconductor chips, such as image sensor devices, solar cells, RF circuits, accelerators, gyroscopes, micro actuators, surface acoustic wave devices, pressure sensors, and ink printer heads.
The wafer level chip scale package process mentioned above mainly means that after the package process is accomplished during the wafer stage, the wafer with chips is cut to obtain separate independent chip packages. However, in an embodiment of the invention, separate independent chips may be redistributed overlying a supporting wafer and then be packaged, which may also be referred to as a wafer level chip scale package (WLCSP) process. In addition, the above mentioned wafer level chip scale package process may also be adapted to form chip packages of multi-layered integrated circuit devices by stacking a plurality of wafers having integrated circuits.
Referring to FIG. 1, a cross section of a portion of a chip package according to an embodiment of the invention is shown, which can be fabricated by a wafer level chip scale package process. First, a chip 10 with a semiconductor substrate 100 is provided. The semiconductor substrate 100 has a first surface 100a and an opposing second surface 100b. A semiconductor device 102, such as a CMOS image sensor and/or micro lens, is formed on the second surface 100b serving as an active surface. At least a through hole 114 is formed on the first surface 100a, extending from the first surface 100a toward the second surface 100b. At least a conductive pad 102a is exposed by the through hole 114, which is electrically connected to the semiconductor device 102, for example, through an interconnection. In another embodiment, at least a recessed portion 116 may be further formed adjacent to a sidewall of the semiconductor substrate 100, extending from the first surface 100a toward the second surface 100b, wherein the recessed portion 116 is formed by cutting a trench opening at a scribe line SL. The scribe line SL is disposed between any two adjacent chips.
A patterned insulating layer 118 is formed on the first surface 100a and extends to the sidewalls of the through hole 114 and the recessed portion 116. In another embodiment, the portions of the insulating layer 118 on the bottom sides of the through holes 114 are removed. Examples of materials for forming the insulating layer 118 include, but are not limited to an inorganic material such as silicon dioxide or a photosensitive insulating material such as an insulating photo-resist. A patterned conductive trace layer 120 is then conformally formed on the insulating layer 118 over the first surface 100a and extends to the through holes 114. In an embodiment, the conductive trace layer 120 can be a redistribution layer. The conductive trace layer 120 may be a metal layer made of material such as a copper, aluminum, silver, or nickel layer or alloys thereof. In another embodiment, the patterned conductive trace layer 120 may be further conformally formed within the recessed portion 116, wherein a gap for isolation is formed between the conductive trace layer 120 in the through hole 114 and the recessed portion 116.
Note that a buffer plug 124 is formed in the through hole 114 and then a protection layer 126 is formed to cover the first surface 100a and fill the through hole 114 and the recessed portion 116. In the through hole 114, the filled buffer plug 124 is used to separate the conductive trace layer 120 and the later filled protection layer 126. In the recessed portion 116, the conductive trace layer 120 is used to separate the protection layer 126 and the later formed spacer 106. In the embodiments of the invention, the buffer plug 124 may be formed of one or more than one layers of softer materials. The protection layer 126 may be a harder material, such as solder mask.
In one embodiment, to enhance the reliability of the chip package, the material of the buffer plug 124 is not completely cured, such that the adhesion between the buffer plug 124 and the protection layer 126 within the through hole 114 is reduced. For example, a curable buffer plug 124 may be cured under its Glass Transition Temperature (Tg) or for a shorter time, to thereby obtain a soft cured product with poor adhesion. A curing method is arbitrary, and a method of curing by heat, light, electron beam, or the like may be employed. When a thermal cycle test is performed to the chip package, the protection layer 126, a harder material, may shrink and a pull up force is then produced from the protection layer 126. However, the soft buffer plug 124 can be deformed to offset the pull up force from the protection layer 126 and prevent the conductive trace layer 120 from delaminating. That is, most of the buffer plugs 124 in through holes 114 in shape or size are different after the above mentioned curing process.
Alternatively. to offset the great difference between the coefficient of thermal expansion (CTE) of the protection layer 126 and that of the insulating layer 118, according to an embodiment of the invention, the buffer plug 124 has a CTE between a CTE of the protection layer 126 and a CTE of the insulating layer 118, such that the difference between the CTEs of the protection layer 126 and the insulating layer 118 can be adjusted by the buffer plug 124 to prevent the chip package from delaminating during the thermal cycle test. In one embodiment, the protection layer 126 may have a CTE of about 159 ppm/° C. and the insulating layer 118 may have a CTE of about 54 ppm/° C. Accordingly, the buffer plug 124 may have a CTE between 159 ppm/° C. and 54 ppm/° C. Moreover, in one example, the buffer plug 124 may be formed of more than one layers of photo-resist with more than one kind of material. Accordingly, the buffer plug 124 may have CTEs which gradually changed from 54 ppm/° C. to 159 ppm/° C.
Referring again to FIG. 1, a cover plate 110 may be attached to the underside of the second surface 100b of the semiconductor substrate 100. The cover plate 110 or the cover plate may be a transparent substrate or a semiconductor substrate. In an embodiment of the invention, a spacer 106 can be disposed between the cover plate 110 and the semiconductor substrate 100 to form a cavity 112 between the cover plate 110 and the semiconductor device 102, wherein the cavity 112 is surrounded by the spacer 106. In another embodiment, the spacer 106 can fill up the space between the cover plate 110 and the semiconductor substrate 100 and no cavity would be produced. The spacer 106 may be formed from materials such as epoxy resin, solder mask or any other suitable supporting materials. In addition, an adhesive layer 104 can be used to attach the spacer 106 and the semiconductor substrate 100, while the spacer 106 is formed on the cover plate 110. Alternatively, the adhesive layer can be added between the spacer 106 and the cover plate 110, while the spacer 106 is formed on the semiconductor substrate 100. The adhesive layer may be a polymer film, or one or more than one of an adhesive such as an epoxy or polyurethane adhesive.
A conductive bump 128 is disposed in an opening of the protection layer 126 on the first surface 100a to electrically connect with the conductive trace layer 120. The conductive bump 128 may be a solder ball or a solder paste.
The conductive trace layer 120 formed in the recessed portion 116 has several advantages. First, as shown in FIG. 1, the conductive trace layer 120 in the recessed portion 116 is extended to the scribe line SL and covers the sidewall of the semiconductor substrate 100, such that it can prevent the chip package from being permeated by moisture. Second, the spacer 106 may be formed from the same material of the protection layer 126 such as a solder mask. Meanwhile, if the protection layer is connected with the spacer, the stress produced in the protection layer and the spacer is great. However, according to an embodiment of the invention, the protection layer 126 is separated from the spacer 106 by the conductive trace layer 120 and the adhesive layer 104, such that the stress produced in the protection layer 126 and the spacer 106 is reduced.
FIGS. 2A-2H show cross sections of parts of the steps for fabricating a chip package according to an embodiment of the invention. Referring to FIG. 2A, during a foundry stage, a semiconductor substrate 100 such as a wafer with chips is provided first, having a first surface 100a and an opposing second surface 100b. A plurality of semiconductor devices 102 is formed on the second surface 100b. A plurality of conductive pads 102a is formed on the second surface 100b to electrically connect with each semiconductor device 102.
Next, a packaging stage is performed. In one embodiment, the second surface 100b of the wafer 100 is attached to a cover plate 110 serving as a carrier. The cover plate 110 may be formed from glass, quartz, opal, plastic, or other transparent substrates to provide light emission in and out thereto and therefrom. Note that a filter and/or an anti-reflective layer may be selectively formed on the cover plate 110. In one example, a spacer 106 may be formed on the cover plate 110 or the wafer 100 and then attach one to another, such that a cavity 112 is formed between the cover plate 110 and the wafer 100, as shown in FIG. 2A. The cavity 112 is surrounded by the spacer 106, and the material of the spacer 106 may be epoxy resin, solder mask or any other suitable supporting materials, such as an inorganic material or an organic material of polyimide (PI). In order to increase the hermetic seal of the package, an adhesive layer 104 may be added between the spacer 106 and the wafer 100, while the spacer 106 is formed on the cover plate 110. Alternatively, the adhesive layer can be added between the spacer 106 and the cover plate 110, while the spacer 106 is formed on the semiconductor substrate 100. Next, a step of thinning the wafer 100 at the first surface 100a can be selectively performed. The thinning process may be an etching, milling, grinding or polishing process.
Referring to FIG. 2B, a plurality of through holes 114 and/or trench openings 116 are formed in the wafer 100, extending along a direction form the first surface 100a to the second surface 100b by a removing process such as drilling or etching. The conductive pads 102a are exposed by the through holes 114. Each trench opening 116 is formed at the scribe line SL between two adjacent chips 10a and 10b. In an embodiment, the through holes 114 and the trench openings 116 can be formed simultaneously by the same etching process. Alternatively, the trench openings 116 may be notches at the scribe line SL formed by a pre-cutting process from a cutter.
Then, referring to FIG. 2C, in order to isolate the semiconductor substrate 100 and subsequently form conductive trace layers, an insulating material can be conformally formed to cover the first surface 100a of the semiconductor substrate 100 and extend to sidewalls and bottom sides of the through holes 114 and the trench openings 116. Then, the insulating material can be patterned to remove the portions of the insulating material at the bottom sides of the through holes 114 and the bottom sides of the trench openings 116 to form the patterned insulating layer 118. The conductive pads 102a at the bottom sides of the through holes 114 are also exposed by the patterned insulating layer 118. In one embodiment, the insulating layer 118 may be formed from a photosensitive insulating material. In this embodiment, the photosensitive insulating material can be selected from photosensitive organic polymer materials. The compositions of the photosensitive organic polymer materials may include, but is not limited to, a polyimide (PI), butylcyclobutene (BCB), parylene, polynaphthalenes, fluorocarbons, and accrylates material etc. The photosensitive organic polymer materials can be formed by a coating process, such as a spin coating, a spray coating, or a curtain coating process, or other suitable deposition methods.
Referring to FIG. 2D, a conductive material is formed on the entire insulating layer 118. The conductive material is conformally formed over the first surfaces 100a of the wafer 100 and extended to the sidewalls and the bottom sides of the through holes 114 and the trench openings 116. In one embodiment, the conductive material may be a copper, aluminum, silver, or nickel layer or alloys thereof, which can be conformally deposited by a physical vapor deposition (PVD) or a sputtering process. Then, the conductive material is patterned by a photolithography and etching process to form the conductive trace layer 120. The conductive trace layer 120 is extended from the first surface 100a of the wafer 100 to the sidewalls and the bottom sides of the through holes 114 to electrically connect with the conductive pads at the bottom sides of the through holes 114. The conductive trace layer 120 may be also formed on the sidewalls and the bottom sides of the trench openings 116, but a gap for isolation is formed between the conductive trace layer 120 in the through holes 114 and in the trench openings 116 and thus they are not continuous.
Referring to FIG. 2E, a buffer material 122 is then formed to cover the entire first surface 100a of the wafer 100 and fill the through holes 114 and the trench openings 116 by a coating process, such as a spin coating, a spray coating, or a curtain coating process. In an embodiment, the buffer material 122 may be a photosensitive material such as an epoxy based photo resist without fillers. Then, referring to FIG. 2F, the buffer material 122 is patterned by an exposure and a development process to leave a portion of the buffer material 122 in the through holes 114 to form a buffer plug 124. The buffer plug 124 may be a plug in each through hole 114. Then, the buffer plug 124 in the through holes 114 is cured, but not completely, to reduce the adhesion between the buffer plug 124 and subsequently formed protection layer. Therefore, the buffer plug 124 can resist a pull up force from the protection layer during the thermal cycle test and prevent the conductive trace layer 120 in the through holes 114 from delaminating. In addition, because the buffer plug 124 is not completely cured, the buffer plug 124 formed in at least two of the through holes 114 have different shapes at a cross section, for example, one buffer plug 124 in a through hole 114 is different from the other buffer plug 124 in another through hole 114. Moreover, the buffer plug 124 may be formed of one or more than one layers of photosensitive materials.
Referring to FIG. 2G, a protection layer 126 is formed on the conductive trace layer 120, covering the first surface 100a of the wafer 100 and filling the through holes 114 and the trench openings 116. The protection layer 126 may be a solder mask with fillers such as silicon carbide, silicon oxide, or aluminum oxide. Note that the buffer plug 124 has a CTE between a CTE of the protection layer 126 and a CTE of the insulating layer 118 or the conductive trace layer 120, such that the difference between the CTEs of the protection layer 126 and the insulating layer 118 or the conductive trace layer 120 can be adjusted by the buffer plug 124 to prevent the chip package from delaminating during the thermal cycle test. In one embodiment, the protection layer 126 may have a CTE of about 159 ppm/° C. and the insulating layer 118 may have a CTE of about 54 ppm/° C. Accordingly, the buffer plug 124 may have a CTE between 159 ppm/° C. and 54 ppm/° C.
Then, referring to FIG. 2H, a conductive bump 128 is formed through the protection layer 126 to electrically connect to the conductive trace layer 120. In an embodiment, after forming the protection layer 126, an opening to expose a portion of the conductive trace layer 120 can be formed by patterning the protection layer 126. Next, a solder is filled into the above mentioned opening by an electroplating or a screen printing method. A re-flow process is performed to form the conductive bump 128 such as a solder ball or a solder paste. Then, the above mentioned wafer scale package is diced along the scribe line SL to separate each chip to form a plurality of the chip packages of FIG. 1.
According to an embodiment of the invention, the trench openings 116 at the scribe line SL is formed by the etching process, such that there is no micro-crack produced in the sidewalls of the semiconductor substrate 100. In addition, after the dicing process, the recessed portion 116 is thus formed and the conductive trace layer 120 in the recessed portion 116 is extended to the scribe line SL and covers the sidewalls of the semiconductor substrate 100. Accordingly, the conductive trace layer 120 can effectively prevent the chip package from being permeated by moisture.
Moreover, in an embodiment of the invention, there is no buffer plug in the recessed portion 116, such that the adhesion of the protection layer 126 in the recessed portion 116 is better than that in the through hole 114 to avoid the delamination of the protection layer 126 in the recessed portion 116.
Next, referring to FIG. 3, a cross section of a portion of a chip package according to an embodiment of the invention is shown, which can be fabricated by a wafer level chip scale package process. First, a chip 10 with a semiconductor substrate 100 is provided. The semiconductor substrate 100 has a first surface 100a and an opposing second surface 100b. A semiconductor device 102, such as a CMOS image sensor and/or micro lens, is formed on the second surface 100b serving as an active surface. At least a through hole 114 is formed on the first surface 100a, extending from the first surface 100a toward the second surface 100b. At least a conductive pad 102a is exposed by the through hole 114, which is electrically connected to the semiconductor device 102, for example, through an interconnection.
A cover plate 110 is attached to the underside of the second surface 100b of the semiconductor substrate 100. The cover plate 110 may be a transparent substrate or a semiconductor substrate. In an embodiment, a spacer 106 is disposed between the cover plate 110 and the semiconductor substrate 100 to form a cavity 112 between the cover plate 110 and the semiconductor device 102, wherein the cavity 112 is surrounded by the spacer 106. In another embodiment, the spacer 106 can fill up the space between the cover plate 110 and the semiconductor substrate 100 so that no cavity is produced. The spacer 106 may be formed from materials such as epoxy resin, a solder mask or any other suitable supporting materials. In addition, an adhesive layer 104 can be used to attach the spacer 106 with the semiconductor substrate 100, wherein the spacer 106 is formed on the cover plate 110. Alternatively, the adhesive layer can be added between the spacer 106 and the cover plate 110, wherein the spacer 106 is formed on the semiconductor substrate 100. The adhesive layer may be a polymer film, or one or more than one of an adhesive such as an epoxy or polyurethane adhesive additive.
At least a recessed portion 130 may be formed adjacent to a sidewall of the semiconductor substrate 100, extending from the first surface 100a to the spacer 106 or further to the cover plate 110, wherein the recessed portion 130 is formed by cutting a trench opening at a scribe line SL. The scribe line SL is disposed between any two adjacent chips.
An insulating layer 118 is formed on the first surface 100a and extends to the sidewalls of the through holes 114. The portions of the insulating layer 118 on the bottom sides of the through holes 114 are removed to expose the conductive pad 102a. Examples of materials for forming the insulating layer 118 include, but are not limited to an inorganic material such as silicon dioxide or a photosensitive insulating material such as an insulating photo-resist. A patterned conductive trace layer 120 is then conformally formed on the insulating layer 118 over the first surface 100a and extends to the through holes 114, but does not extend to the recessed portion 130. In an embodiment, the conductive trace layer 120 can be a redistribution layer. The conductive trace layer 120 may be a metal layer made of material such as a copper, aluminum, silver, or nickel layer or alloys thereof.
A buffer plug 124 is formed in the through hole 114 over the conductive trace layer 120 and then a protection layer 126 is formed to cover the first surface 100a and fill the through hole 114 and the recessed portion 130. In the through hole 114, the filled buffer plug 124 is used to separate the conductive trace layer 120 with the later filled protection layer 126. In the recessed portion 130, the protection layer 126 directly covers the sidewalls of the semiconductor substrate 100 and the spacer 106 or further covers the sidewall of the cover plate 110. In the embodiments, the buffer plug 124 may be formed of one or more than one layer of softer materials. The protection layer 126 may be a harder material, such as a solder mask.
In one embodiment, to enhance the reliability of the chip package, the material of the buffer plug 124 is not completely cured, such that the adhesion between the buffer plug 124 and the protection layer 126 within the through hole 114 is reduced. For example, a curable buffer plug 124 may be cured under its Glass Transition Temperature (Tg) or by a shorter time, to thereby obtain a soft cured product with poor adhesion. The curing method is arbitrarily chosen, and a method for curing by using heat, light, electron beam, or the like may be employed. When a thermal cycle test is performed to the chip package, the protection layer 126, a harder material, may shrink and a pull up force is then produced from the protection layer 126. However, the soft buffer plug 124 can be deformed to offset the pull up force from the protection layer 126 and prevent the conductive trace layer 120 in the through hole 114 from delaminating. That is, most of the shapes or sizes of the buffer plugs 124 in the through holes 114 are different after the above mentioned curing process.
Alternatively. to offset the great difference between the coefficient of thermal expansion (CTE) of the protection layer 126 and that of the insulating layer 118, according to an embodiment of the invention, the buffer plug 124 has a CTE between a CTE of the protection layer 126 and a CTE of the insulating layer 118, such that the difference between the CTEs of the protection layer 126 and the insulating layer 118 can be adjusted by the buffer plug 124 to prevent the chip package from delaminating during the thermal cycle test. In one embodiment, the protection layer 126 may have a CTE of about 159 ppm/° C. and the insulating layer 118 may have a CTE of about 54 ppm/° C. Accordingly, the buffer plug 124 may have a CTE between 159 ppm/° C. and 54 ppm/° C. Moreover, in one example, the buffer plug 124 may be formed of more than one layers of photo-resist with more than one kind of material. Accordingly, the buffer plug 124 may have CTEs which gradually change from 54 ppm/° C. to 159 ppm/° C.
Then, a conductive bump 128 is disposed in an opening of the protection layer 126 on the first surface 100a to electrically connect with the conductive trace layer 120. The conductive bump 128 may be a solder ball or a solder paste.
The protection layer 126 in the recessed portion 130 covers at least the sidewalls of the semiconductor substrate 100 and the spacer 106 and may further cover the sidewall of the cover plate 110, such that the interfaces between the semiconductor substrate 100, the spacer 106 and the cover plate 110, exposed to an ambient environment, are eliminated. Therefore, preventing the chip package from being permeated by moisture.
FIGS. 4A-4I show cross sections of parts of the steps for fabricating a chip package according to an embodiment of the invention. Referring to FIG. 4A, during a foundry stage, a semiconductor substrate 100 such as a wafer with chips is provided first, having a first surface 100a and an opposing second surface 100b. A plurality of semiconductor devices 102 is formed on the second surface 100b. A plurality of conductive pads 102a is formed on the second surface 100b to electrically connect with each semiconductor device 102.
Next, a packaging stage is performed. In one embodiment, the second surface 100b of the wafer 100 is attached to a cover plate 110 serving as a carrier. The cover plate 110 may be formed from glass, quartz, opal, plastic, or other transparent substrates to provide light emission in and out thereto and therefrom. A filter and/or an anti-reflective layer may be selectively formed on the cover plate 110. In one example, a spacer 106 may be formed on the cover plate 110 or the wafer 100 and then attached to one another, such that a cavity 112 is formed between the cover plate 110 and the wafer 100, as shown in FIG. 4A. The cavity 112 is surrounded by the spacer 106, and the material of the spacer 106 may be epoxy resin, solder mask or any other suitable supporting materials, such as an inorganic material or an organic material of polyimide (PI). In order to increase the hermetic seal of the package, an adhesive layer 104 may be added between the spacer 106 and the wafer 100, wherein the spacer 106 is formed on the cover plate 110. Alternatively, the adhesive layer can be added between the spacer 106 and the cover plate 110, wherein the spacer 106 is formed on the semiconductor substrate 100. Next, a step of thinning the wafer 100 at the first surface 100a can be selectively performed. The thinning process may be an etching, milling, grinding or polishing process.
Then, referring to FIG. 4B, a plurality of through holes 114 is formed in the wafer 100, extending along a direction from the first surface 100a to the second surface 100b by a removing process such as drilling or etching process. The conductive pads 102a are exposed by the through holes 114.
Referring to FIG. 4C, in order to isolate the semiconductor substrate 100 and subsequently form conductive trace layers, an insulating material can be conformally formed to cover the first surface 100a of the semiconductor substrate 100 and extend to sidewalls and bottom sides of the through holes 114. Then, the insulating material can be patterned to remove the portions of the insulating material at the bottom sides of the through holes 114 to form the patterned insulating layer 118. The conductive pads 102a at the bottom sides of the through holes 114 are exposed by the patterned insulating layer 118. In one embodiment, the insulating layer 118 may be formed from a photosensitive insulating material. In this embodiment, the photosensitive insulating material can be selected from photosensitive organic polymer materials. The compositions of the photosensitive organic polymer materials may include, but is not limited to, a polyimide (PI), butylcyclobutene (BCB), parylene, polynaphthalenes, fluorocarbons, and accrylates material etc. The photosensitive organic polymer materials can be formed by a coating process, such as a spin coating, a spray coating, or a curtain coating process, or other suitable deposition processes.
Referring to FIG. 4D, a conductive material is formed on the entire insulating layer 118. The conductive material is conformally formed over the first surfaces 100a of the wafer 100 and extending to the sidewalls and the bottom sides of the through holes 114. In one embodiment, the conductive material may be a copper, aluminum, silver, or nickel layer or alloys thereof, which can be conformally deposited by a physical vapor deposition (PVD) or a sputtering process. Then, the conductive material is patterned by a photolithography and etching process to form the patterned conductive trace layer 120. The patterned conductive trace layer 120 is extended from the first surface 100a of the wafer 100 to the sidewalls and the bottom sides of the through holes 114 to electrically connect to the conductive pads at the bottom sides of the through holes 114. There is a gap between the patterned conductive trace layers 120 of the two adjacent chips 10a and 10b for electrical isolation.
Referring to FIG. 4E, a buffer material 122 is formed to cover the entire first surface 100a of the wafer 100 and fill the through holes 114 by a coating process, such as a spin coating, a spray coating, or a curtain coating process. In an embodiment, the buffer material 122 may be a photosensitive material such as an epoxy based photo resist without fillers. Then, referring to FIG. 4F, the buffer material 122 is patterned by an exposure process and a development process to leave a portion of the buffer material 122 in the through holes 114 to form a buffer plug 124. The buffer plug 124 may be a plug in each through hole 114. Then, the buffer plugs 124 in the through holes 114 are cured, but not completely, to reduce the adhesion between the buffer plug 124 and a subsequently formed protection layer. Therefore, the buffer plug 124 can resist a pull up force from the protection layer during the thermal cycle test and prevent the conductive trace layer 120 in the through holes 114 from delaminating. In addition, because the buffer plug 124 is not completely cured, the buffer plugs 124 formed in at least two of the through holes 114 have different shapes at a cross section, for example, one buffer plug 124 in a through hole 114 is different from the other buffer plug 124 in another through hole 114.
Next, referring to FIG. 4G, a trench opening 130 is formed along a scribe line SL between two adjacent chips 10a and 10b. The trench opening 130 may be formed by a pre-cutting process from a cutter, such that the trench opening 130 has an inclined plane on the sidewalls of the semiconductor substrate 100 and the spacer 106 and may be further formed on the sidewall of the cover plate 110. Moreover, the trench opening 130 has a curved shape at a cross section. In one embodiment, the trench opening 130 may be formed extending from the first surface 100a of the semiconductor substrate 100 to any depth of the spacer 106. In another embodiment, the trench opening 116 may be formed extending from the first surface 100a of the semiconductor substrate 100 to any depth of the cover plate 110.
Then, referring to FIG. 4H, a protection layer 126 is formed covering the first surface 100a of the semiconductor substrate 100 and filling the through holes 114 and the trench openings 130. The buffer plugs 124 in the through holes 114 are covered with the protection layer 126, and the sidewalls of the semiconductor substrate 100, the spacer 106 and the cover plate 110 are also covered with the protection layer 126. The protection layer 126 may be a solder mask with fillers such as silicon carbide, silicon oxide, or aluminum oxide.
Next, referring to FIG. 4I, a conductive bump 128 is formed passing through the protection layer 126 to electrically connect to the conductive trace layer 120. In an embodiment, after forming the protection layer 126, an opening to expose a portion of the conductive trace layer 120 can be formed by patterning the protection layer 126. Next, a solder is filled into the above mentioned opening by an electroplating or a screen printing method. A re-flow process is performed to form the conductive bump 128 such as a solder ball or a solder paste. Then, the above mentioned wafer level chip scale package is diced along the scribe line SL to separate each chip to form a plurality of the chip packages of FIG. 3.
According to an embodiment of the invention, the trench openings 130 at the scribe line SL is formed by the pre-cutting process, such that the trench openings 130 can extend from the first surface 100a of the semiconductor substrate 100 to the spacer 106 or further to the cover plate 110. In addition, after the dicing process, the recessed portion 130 of the chip package is formed and covered with the protection layer 126. Accordingly, the protection layer 126 in the recessed portion 130 can effectively prevent the chip package from being permeated by moisture.
Moreover, in an embodiment of the invention, there is no buffer plug in the recessed portion 130, such that the adhesion of the protection layer 126 in the recessed portion 130 is better than that in the through hole 114 to avoid delamination of the protection layer 126 in the recessed portion 130.
While the invention has been described by way of example and in terms of the preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. To the contrary, it is intended to cover various modifications and similar arrangements (as would be apparent to those skilled in the art). Therefore, the scope of the appended claims should be accorded the broadest interpretation so as to encompass all such modifications and similar arrangements.

## Claims

1. A chip package, comprising:
a semiconductor substrate, having a first surface and an opposing second surface;
a spacer disposed under the second surface of the semiconductor substrate;
a cover plate disposed under the spacer;
a recessed portion adjacent to a sidewall of the semiconductor substrate, extending from the first surface of the semiconductor substrate to the spacer;
a protection layer disposed over the first surface of the semiconductor substrate and filling the recessed portion;
a through hole disposed on the first surface of the semiconductor substrate; and
a buffer material that is different from the material of the protection layer, disposed in the through hole and covered by the protection layer.

2. The chip package as claimed in claim 1, wherein the recessed portion further extends to the cover plate.

3. The chip package as claimed in claim 2, wherein the recessed portion has an inclined plane.

4. The chip package as claimed in claim 3, wherein the protection layer covers the inclined plane of the recessed portion.

5. The chip package as claimed in claim 1, further comprising:
a conductive trace layer conformally disposed over the first surface and in the through hole,
wherein the buffer material is disposed in the through hole over the conductive trace layer.

6. The chip package as claimed in claim 5, further comprising an insulating layer disposed between the semiconductor substrate and the conductive trace layer, wherein the buffer material has a coefficient of thermal expansion between a coefficient of thermal expansion of the protection layer and a coefficient of thermal expansion of the insulating layer.

7. The chip package as claimed in claim 1, wherein the buffer material is softer than the protection layer in the through hole.

8. The chip package as claimed in claim 1, wherein the buffer material comprises one or more than one layers of photosensitive material.

9. The chip package as claimed in claim 1, wherein the buffer material disposed in at least two through holes have different shapes at a cross section.

10. The chip package as claimed in claim 1, wherein no metal line is disposed under the protection layer in the recessed portion.

11. The chip device package as claimed in claim 1, wherein the buffer material does not extend to cover above the first surface of the semiconductor substrate outside of the through hole.

12. A chip device package, comprising:
a semiconductor substrate, having a first surface and an opposing second surface;
a spacer disposed under the second surface of the semiconductor substrate;
a cover plate disposed under the spacer;
a recessed portion adjacent to a sidewall of the semiconductor substrate, extending from the first surface of the semiconductor substrate to the spacer;
a protection layer disposed over the first surface of the semiconductor substrate and in the recessed portion;
a through hole disposed on the first surface of the semiconductor substrate; and
a buffer material disposed in the through hole, partially filling the through hole, wherein the protection layer covers the buffer material in the through hole and the buffer material does not extend to cover above the first surface of the semiconductor substrate outside of the through hole.

13. A chip device package, comprising:
a semiconductor substrate, having a first surface and an opposing second surface;
a spacer disposed under the second surface of the semiconductor substrate;
a cover plate disposed under the spacer;
a recessed portion adjacent to a sidewall of the semiconductor substrate, extending from the first surface of the semiconductor substrate to at least the spacer;
a protection layer disposed over the first surface of the semiconductor substrate and in the recessed portion;
a through hole disposed on the first surface of the semiconductor substrate;
a conductive trace layer conformally disposed over the first surface and in the through hole; and
a buffer material disposed in the through hole over the conductive trace layer, wherein the protection layer covers the buffer material in the through hole and the buffer material does not extend to cover above the first surface of the semiconductor substrate outside of the through hole.

14. The chip device package as claimed in claim 13, wherein the buffer material is a non-conductive material.

15. The chip device package as claimed in claim 13, wherein the buffer material is softer than the protection layer in the through hole.

16. The chip device package as claimed in claim 13, further comprising an insulating layer disposed between the semiconductor substrate and the conductive trace layer, wherein the buffer material has a coefficient of thermal expansion between a coefficient of thermal expansion of the protection layer and a coefficient of thermal expansion of the insulating layer.

17. The chip device package as claimed in claim 13, wherein the buffer material comprises one or more than one layers of photosensitive material.

18. The chip device package as claimed in claim 13, wherein the buffer material disposed in at least two through holes have different shapes at a cross section.