# Patent

## Title
Method of fabricating nano-imprint mold for a light emitting diode

## Abstract

A method of manufacturing a light emitting diode, includes a process of forming an n-type nitride semiconductor layer, a light emitting layer, and a p-type nitride semiconductor layer on a temporary substrate, a process of forming a p-type electrode on the p-type nitride semiconductor layer, a process of forming a conductive substrate on the p-type electrode, a process of removing the temporary substrate to expose the n-type nitride semiconductor layer, a process of forming a nanoimprint resist layer on the n-type nitride semiconductor layer, a process of pressing the nanoimprint mold on the nanoimprint resist layer to transfer the nano-pattern onto the nanoimprint resist layer, and a process of separating the nanoimprint mold from the nanoimprint resist layer having the nano-pattern and etching a portion of the nanoimprint resist layer having the nano-pattern to form an n-type electrode.

## Background
CROSS REFERENCE TO PRIOR APPLICATIONS
This application is a Continuation Application of PCT International Patent Application No. PCT/KR2011/008158, filed on Oct. 28, 2011, under 35 U.S.C. §120 and §365, which claims priority to Korean Patent Application No. 10-2010-0139057, filed on Dec. 30, 2010, which are all hereby incorporated by reference in their entirety.


BACKGROUND
The present invention relates to a method of manufacturing a nanoimprint mold, a method of manufacturing a light emitting diode using the nanoimprint mold manufactured thereby, and the light emitting diode manufactured thereby.
Gallium nitride-based (GaN-based) white light emitting diodes (LEDs) have high energy conversion efficiency, long life time, strong directionality of emitted light, low operating voltage, short warm-up time, and simple operating circuit. Also, GaN-based white LEDs have durability against external shocks and vibration in order to realize high-grade light systems having various kinds of packages. Thus, GaN-based white LEDs may change outdoor light sources to solid-state lighting such as incandescent lamps, fluorescent lamps, and mercury lamps in the near future. To utilize GaN-based LEDs as a white light source that replaces outdoor fluorescent lamps and mercury lamps, the GaN-based LEDs should emit a high efficiency of output light at a low level of consumed power and also have excellent thermal stability. Lateral types GaN-based LEDs that are widely used have a relatively low manufacturing cost and simple manufacturing process. However, they are not adapted for use as an outdoor light source because they have a high applied current and a low light output. A vertical type LEDs may solve the limitations of the lateral type LED and be easily applied to a high performance LED having a high light output in a large area. Vertical type LEDs have many advantages compared to outdoor lateral type devices. Vertical type LEDs have a low operating voltage and a high light output because they have a low current diffused resistor and obtain a uniform current spreading. Vertical type LEDs may have a long life time and a high light output that are significantly improved because heat is easily transfer to outside through a metal or semiconductor substrate having superior thermal conductivity. Vertical type LEDs may be widely used as a white light source for lighting because they have a maximum applied current of about three or four times that of lateral type LEDs. Research and development is being actively carried out on GaN based vertical type LED for commercialization and improved performance by leading LED companies such as NICHIA CHEMICAL CO., LTD, JAPAN, PHILIPS LUMILEDS LIGHTING COMPANY, USA, and OSRAM, GERMANY such as SEOUL SEMICONDUCTOR CO., LTD, SAMSUNG ELECTRO-MECHANICS CO., LTD, and LG INNOTEK CO., LTD, Korea.
The light output of a device may be significantly improved by an n-type semiconductor layer which is placed on the top layer on the device in the manufacturing of GaN-based vertical type LEDs. In the case where the semiconductor layer has a smooth surface, total reflection occurs at the interface between the atmosphere and the semiconductor layer by means of the refractive index difference between the semiconductor and the atmosphere (the refractive index of the n-type semiconductor layer is 2.4 or less, and the refractive index of the atmosphere is 1). The device may not have a highly extracted light output because light is emitted from an active layer—i.e., the light emitting layer does not emit to the outside. Thus, minimizing loss from light guiding on semiconductor inside is required by preventing total reflection by artificially changing the semiconductor surface. To this end, a nano structure having a pyramid shape is formed on the n-type semiconductor surface by etching the n-type semiconductor surface through wet etching using a basic solution such as KOH, NaOH.
However, a method that directly forms the pyramid structure on the n-type semiconductor layer using an existing wet etching process must be additionally performed in the form of a protective film forming process to protect the n-type electrode, the conductive substrate, and the mesa structure of the LEDs. Also, it is difficult to form a uniform nano structure in a large area.
SUMMARY OF THE INVENTION
The present invention provides a method of manufacturing a nanoimprint mold that may be efficiently and economically formed for enhancing the light extraction efficiency of a light emitting diode, a method of manufacturing a light emitting diode, and a light emitting diode using the nanoimprint module.
Also, the present invention provides a method of manufacturing a nanoimprinted light emitting diode structure that can efficiently and precisely form a nano-pattern for enhancing light extraction efficiency without using an additional wet etching and dry etching process.
Also, the present invention provides a method of manufacturing a nanoimprinted light emitting diode system that can efficiently form a nano-pattern having a large area, thereby reducing costs and simplifying the process.
According to an aspect of the present invention, there is provided a method of manufacturing a nanoimprint mold, the method including: forming a support substrate supporting a nitride semiconductor substrate on one surface of the nitride semiconductor substrate; forming a nano-pattern having a pyramid shape on the other surface of the nitride semiconductor substrate through wet etching in which the nitride semiconductor substrate including the support substrate is immersed into one etchant selected from a calcium hydroxide solution and a sodium hydroxide solution to irradiate ultraviolet rays onto the nitride semiconductor substrate; transferring the pyramid-shaped nano-pattern formed on the other surface of the nitride semiconductor substrate onto the nanoimprint mold in a commonly nanoimprint method; and separating the nanoimprint mold, on which the pyramid-shaped nano-pattern is formed, from the nitride semiconductor substrate.
The nano-pattern of the nanoimprint mold may be controlled by adjusting at least one of a molarity of the etchant and a wet etching time.
The etchant may have a molarity of about 1 M to about 8 M, and the wet etching time may range from about 1 minute to about 60 minutes.
According to another aspect of the present invention, there is provided a method of manufacturing a light emitting diode, the method including: forming an n-type nitride semiconductor layer, a light emitting layer, and a p-type nitride semiconductor layer on a temporary substrate; forming a p-type electrode on the p-type nitride semiconductor layer; forming a conductive substrate on the p-type electrode; removing the temporary substrate to expose the n-type nitride semiconductor layer; forming a nanoimprint resist layer on the n-type nitride semiconductor layer; pressing the nanoimprint mold manufactured by the method according to the present invention on the nanoimprint resist layer to transfer the pyramid-shaped nano-pattern formed on the nanoimprint mold onto the nanoimprint resist layer; separating the nanoimprint mold from the nanoimprint resist layer having the nano-pattern; and etching a portion of the nanoimprint resist layer having the nano-pattern to form an n-type electrode.
The method may further include forming a refractive index adjustment layer between the n-type nitride semiconductor layer and the nanoimprint resist layer, and the refractive index adjustment layer may have a refractive index less than that of the n-type nitride semiconductor layer and greater than that of the nanoimprint resist layer.
The refractive index adjustment layer may be formed by sequentially stacking a first refractive index adjustment layer and a second refractive index adjustment layer which refracts light emitted from the light emitting layer by refractive indexes different from each other.
The first refractive index adjustment layer may be formed on the n-type nitride semiconductor layer and have a refractive index less than that of the n-type nitride semiconductor layer, and the second refractive index adjustment layer may be formed on the first refractive index adjustment layer and have a refractive index less than that of the first refractive index adjustment layer and greater than that of the nanoimprint resist layer.
The first refractive index adjustment layer may include at least one selected from the group consisting of ZnO, Al-doped ZnO, In-doped ZnO, Ga-doped ZnO, ZrO2, TiO2, SiO2, SiO, Al2O3, CuOX, and ITO.
The second refractive index adjustment layer may include MgO-based oxide.
The MgO-based oxide forming the second refractive index adjustment layer may be a multinary-compound formed by adding the other elements in MgO.
The n-type electrode may be formed by depositing a conductive material on an etched area after a portion of the nanoimprint resist layer having the nano-pattern is etched to expose the n-type nitride semiconductor layer.
According to another aspect of the present invention, there is provided a light emitting diode manufactured according to another aspect of the present invention.
According to another aspect of the present invention, there is provided a method of manufacturing a light emitting diode, the method including: forming an n-type nitride semiconductor layer, a light emitting layer, and a p-type nitride semiconductor layer on a substrate on which a pattern scattering and reflecting incident light is formed; mesa-etching portions of the p-type nitride semiconductor layer, the light emitting layer, and the n-type nitride semiconductor layer to expose a portion of the n-type nitride semiconductor layer; forming a transparent electrode on the p-type nitride semiconductor layer; forming the nanoimprint resist layer on the transparent electrode; pressing the nanoimprint mold manufactured by the method according to the present invention on the nanoimprint resist layer to transfer the pyramid-shaped nano-pattern formed on the nanoimprint mold onto the nanoimprint resist layer; separating the nanoimprint mold from the nanoimprint resist layer having the nano-pattern; and etching a portion of the nanoimprint resist layer having the nano-pattern to form a p-type electrode and an n-type electrode on the n-type nitride semiconductor layer.
The transparent electrode may include indium tin oxide (ITO).
The p-type electrode may be formed by depositing a conductive material on an etched area after a portion of the nanoimprint resist layer having the nano-pattern is etched to expose the transparent electrode.
According to another aspect of the present invention, there is provided a light emitting diode manufactured according to an aspect of the present invention.
According to the present invention, a method of manufacturing a nanoimprint mold that can be efficiently and economically formed for enhancing the light extraction efficiency of a light emitting diode, a method of manufacturing a light emitting diode, and a light emitting diode using the nanoimprint module are made possible.
Also, the present invention allows for a method of manufacturing a nanoimprint module that can efficiently and precisely form a nano-pattern for enhancing light extraction efficiency without performing additional wet and dry etching processes.
Also, the present invention allows for a method of manufacturing a nanoimprint module that can efficiently form the nano-pattern having a large area, thereby reducing costs and simplifying the process.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematic view illustrating light extraction efficiency decreased by the total internal reflection generated at an interface, due to different refractive indexes between a nitride semiconductor layer and the atmosphere, in a related art light emitting diode.
FIG. 2 is a schematic view illustrating the improvement of the light extraction efficiency of a light emitting diode according to an embodiment of the present invention by forming a nano-pattern having a pyramid shape in a path of light.
FIGS. 3 to 7 are schematic views illustrating a method of manufacturing a nanoimprint mold according to an embodiment of the present invention.
FIG. 8 is a view illustrating a photograph taken of a nano-pattern having a pyramid shape formed on a nanoimprint mold by a method of manufacturing a nanoimprint mold according to an embodiment of the present invention.
FIG. 9 is a view illustrating a photograph taken of size changes of a pyramid nano-pattern of a nanoimprint mold according to the molarity of an etchant and wet etching time in a method of manufacturing a nanoimprint mold according to an embodiment of the present invention.
FIGS. 10 to 18 are views illustrating a method of manufacturing a light emitting diode according to a first embodiment of the present invention.
FIGS. 19 to 25 are views illustrating a method of manufacturing a light emitting diode according to a second embodiment of the present invention.



DETAILED DESCRIPTION
An effect of improving light extraction efficiency according to the present invention will be described with reference to FIGS. 1 and 2 in comparison with the related art.
FIG. 1 is a schematic view illustrating light extraction efficiency decreased by the total internal reflection generated at an interface, due to the different refractive indexes between a nitride semiconductor layer and the atmosphere, in a related art light emitting diode.
Referring to FIG. 1, in the case where a semiconductor substrate has a smooth surface, because the refractive index of a gallium nitride semiconductor substrate is about 2.5 and the refractive index of the atmosphere is 1, a critical angle with respect to the total reflection is only 23.5 degrees because of a large refractive index difference between two layers. Thus, light emitted within a semiconductor is not emitted to the outside and is dissipated therein to decrease the light extraction efficiency.
FIG. 2 is a schematic view illustrating the improvement of the light extraction efficiency of a light emitting diode according to an embodiment of the present invention by forming a nano-pattern having a pyramid shape in a path of light.
Referring to FIG. 2, when a nanostructure having a pyramid shape is formed on a semiconductor surface, a light extraction efficiency of a light emitting diode may be substantially improved because the possibility that the light is emitted to the outside is greatly increased.
Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings.
FIGS. 3 to 7 are schematic views illustrating a method of manufacturing a nanoimprint mold according to an embodiment of the present invention.
Referring to FIGS. 3 to 7, a method of manufacturing the nanoimprint mold according to an embodiment of the present invention includes a process of forming a support substrate 10 on one surface of a nitride semiconductor substrate 20, a process of forming a nano-pattern having a pyramid shape on the other surface of the nitride semiconductor substrate 20, a process of transferring the nano-pattern having the pyramid shape to a nanoimprint mold 30 using the nanoimprint method, and a process of separating the nanoimprint mold 30 having the pyramid-shaped nano-pattern from the nitride semiconductor substrate 20.
Referring to FIG. 3, the support substrate 10 is formed on one surface of the nitride semiconductor substrate 20 for structurally supporting the nitride semiconductor substrate 20. For example, the nitride semiconductor substrate 20 used is gallium nitride (GaN).
Referring to FIG. 4, the nitride semiconductor substrate 20 having the supporting substrate 10 immersed therein is selected from one etchant from among an aqueous solution of potassium hydride and an aqueous solution of sodium hydroxide, and then a pattern having the pyramid shape is formed on the other surface by a wet etching using an ultraviolet irradiation.
In the case where the nitride semiconductor substrate 20 is GaN, the GaN having a wurtzite crystal structure is an isotropically etched due to a change in etching rate along a crystal face. Particularly, since the etching is hardly performed along a (000-1) crystal plane, the pyramid structure is formed as shown in FIG. 8. A nano-pattern size of the nanoimprint mold 30 is adjusted to control at least one of etchant molarity and wet etching time. For example, the molarity of the etchant may be 1 M or more to 8 M or less, and the wet etching time may be about one minute to about 60 minutes. FIG. 9 is a comparative picture taken by an electron microscope of size changes of a nano-pattern according to the molarity of an etchant and wet etching time. Referring to FIG. 9, the size of a pyramid nano-pattern formed is easily adjusted to control etchant molarity and wet etching time.
Although described hereinafter, the polymer mold for the nanoimprint—i.e., the nanoimprint mold 30 is formed using the nitride semiconductor substrate 20 having the pyramid nano-pattern by means of a master template.
Referring to FIGS. 5 and 6, the nano-pattern having the pyramid shape formed on the other surface of the nitride semiconductor substrate 20 transfers the nanoimprint mold 30.
Referring to FIG. 7, the nanoimprint mold 30 having a pyramid-shaped nano-pattern is separated from the nitride semiconductor substrate 20. FIG. 8 is a picture taken by an electron microscope of a portion of symbol A in FIG. 7.
Through the process, the nanoimprint mold 30 ultimately having a pyramid-shaped nano-pattern is formed. The nanoimprint mold 30 is used as a master template for forming a nano-pattern in a manufacturing process of a light emitting diode described below.
FIGS. 10 to 18 are views illustrating a method of manufacturing a light emitting diode according to a first embodiment of the present invention.
Referring to FIGS. 10 to 18, a method of manufacturing a light emitting diode according to a first embodiment of the present invention includes a process of forming an n-type nitride semiconductor layer 110, a light-emitting layer 120, and a p-type nitride semiconductor layer 130 on a temporary substrate 100, a process of forming a p-type electrode 140 on the p-type nitride semiconductor layer 130, a process of forming a conductive substrate 150 on the p-type electrode 140, a process of exposing the n-type nitride semiconductor layer 110 by removing the n-type nitride semiconductor layer 110, a process of forming a nanoimprint resist layer 160 on the n-type nitride semiconductor layer 110, a process for transferring a nano-pattern transferred onto the nanoimprint resist layer 160 by pressing a nanoimprint mold 30 that is formed by the method of manufacturing a nanoimprint mold according to the present invention on the nanoimprint resist layer 160, a process of separating the nanoimprint mold 30 from the nanoimprint resist layer 160 having the nano-pattern, and a process of forming an n-type electrode 170 by etching a portion of the nanoimprint resist layer 160 having the nano-pattern.
Referring to FIG. 10, the n-type nitride semiconductor layer 110, the light-emitting layer 120, and the p-type nitride semiconductor layer 130 are sequentially formed on the n-type nitride semiconductor layer 110.
Referring to FIG. 11, the p-type electrode 140 is formed on the p-type nitride semiconductor layer 130, and the conductive substrate 150 is formed in the p-type electrode 140. The p-type electrode 140 also performs a function that reflects light from the light-emitting layer 120.
Referring to FIG. 12, the n-type nitride semiconductor layer 110 is exposed to the outside by removing the temporary substrate 100.
Referring to FIG. 13, the nanoimprint resist layer 160 is formed on the n-type nitride semiconductor layer 110 by the method of spin coating, for example.
Referring to FIGS. 14 and 15, a nano-pattern is transferred onto the nanoimprint resist layer 160 by pressing the nanoimprint mold 30 that is formed by the method of manufacturing the nanoimprint module according to the present invention as described above on the nanoimprint resist layer 160.
Referring to FIG. 16, the nanoimprint mold 30 is separated from the nanoimprint resist layer 160 having a pyramid-shaped nano-pattern, and then the nanoimprint resist layer 160 is heated by UV rays and heat to cure the nanoimprint resist layer 160 having a pyramid-shaped nano-pattern.
Referring to FIG. 17, a portion of the nanoimprint resist layer 160 having a pyramid-shaped nano-pattern is etched for exposing the n-type nitride semiconductor layer 110, and then the n-type electrode 170 is formed. For example, the n-type electrode 170 etches a portion of the nanoimprint resist layer 160 having a pyramid-shaped nano-pattern to expose the n-type nitride semiconductor layer 110, and may then be formed on an etched region by removing a conductive material.
Also, the first embodiment of the present invention may include a process of additionally forming a refractive index adjustment layer 180 for enhancing the light extraction efficiency.
That is, referring to FIG. 18, the refractive index adjustment layer 180 is formed having a lower refractive index than the refractive index of the n-type nitride semiconductor layer 110 and higher than the refractive index of the nanoimprint resist layer 160 between the n-type nitride semiconductor layer 110 and nanoimprint resist layer 160 before forming the nanoimprint resist layer 160.
The refractive index adjustment layer 180 is sequentially formed by stacking the first refractive index adjustment layer 181 and the second refractive index adjustment layer 182 which reflect emitted light from the light-emitting layer 120 and having the same refractive index.
The first refractive index adjustment layer 181 is formed on the n-type nitride semiconductor layer 110 such that the refractive index of the first refractive index adjustment layer 181 is lower than the refractive index of the n-type nitride semiconductor layer 110, the second refractive index adjustment layer 182 is formed on the first refractive index adjustment layer 181 such that the refractive index of the second refractive index adjustment layer 182 is lower than the refractive index of the first refractive index adjustment layer 181 and is higher than the refractive index of the nanoimprint resist layer 160. The first refractive index adjustment layer 181 and the second refractive index adjustment layer 182 have an intermediate refractive index between those of the n-type nitride semiconductor layer 110 and the nanoimprint resist layer 160 to perform the function of a buffer layer, thereby further enhancing light extraction efficiency.
For example, the first refractive index adjustment layer 181 may include at least one selected from the group consisting of ZnO, Al-doped ZnO, In-doped ZnO, Ga-doped ZnO, ZrO2, TiO2, SiO2, SiO, Al2O3, CuOX, and ITO, and the second refractive index adjustment layer 182 may include MgO-based oxide. The MgO-based oxide forming the second refractive index adjustment layer 182 may be a multinary compound formed by adding the other elements in MgO. All of the materials have a refractive index between the refractive index of the n-type nitride semiconductor layer 110 and the refractive index of the nanoimprint resist layer 160 selected from the first refractive index adjustment layer 181 and the second refractive index adjustment layer 182.
As described in detail above, the present invention allows for a method of manufacturing a nanoimprint mold that can be efficiently and economically formed for enhancing the light extraction efficiency of a light emitting diode, a method of manufacturing a light emitting diode, and a light emitting diode using the nanoimprint module.
Also, the present invention allows for a method of manufacturing a nanoimprint module that can efficiently and precisely form a nano-pattern for enhancing light extraction efficiency without using an additional wet etching and dry etching process.
Also, the present invention allows for a method of manufacturing a nanoimprint module that can efficiently form a nano-pattern having a large area, thereby reducing costs and simplifying the process.
In more detail, the technique of the present invention, as a process for forming a pyramid nanostructure using a method of nanoimprinting a large area, may be immediately applicable to a manufacturing process of the light emitting diode. Moreover, the technique of the present invention may be applicable to a vertical or lateral type light emitting diode. According to the technique of the present invention, a manufacturing process may become simpler, and the light output of a light emitting diode may be drastically improved. The present invention relates to an energy saving eco friendly technique that welcomes a solid-state lighting age using white light GaN-based LEDs.
As described above, although the preferred embodiments of the present invention are described with reference to the accompanying drawings, the present invention is not limited to specific embodiments. Also, it will be understood by those skilled in the art that various changes and imitation in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
FIGS. 19 to 25 are views illustrating a method of manufacturing a light emitting diode according to a second embodiment of the present invention.
Referring to FIGS. 19 to 25, a method of manufacturing a light emitting diode according to a second embodiment includes a process of forming an n-type nitride semiconductor layer 210, a light-emitting layer 220, and a p-type nitride semiconductor layer 230 on a semiconductor substrate 200 having a pattern for reflecting light through scattering, a process of exposing a portion of the n-type nitride semiconductor layer 210 by mesa-etching a portion of the p-type nitride semiconductor layer 230, the light-emitting layer 220, and the p-type nitride semiconductor layer 230, a process of forming a transparent electrode layer 240 on the p-type nitride semiconductor layer 230, a process of forming a nanoimprint resist layer 250 on the transparent electrode layer 240, a process of transferring a nano-pattern transferred onto a nanoimprint resist layer 250 by pressing the nanoimprint resist layer 250 that is formed by the method of manufacturing a nanoimprint module according to the present invention on the nanoimprint resist layer 250, a process of separating the nanoimprint mold 30 from the nanoimprint resist layer 250 having the nano-pattern, and a process of forming a p-type electrode 260 by etching a portion of the nanoimprint resist layer 250 having the nano-pattern and forming an n-type electrode 270 on the n-type nitride semiconductor layer 210.
Referring to FIG. 19, the n-type nitride semiconductor layer 210, the light-emitting layer 220, and the p-type nitride semiconductor layer 230 are sequentially formed on a substrate 200 having a nano-pattern for reflecting incident light. The substrate 200 may be a substrate formed of sapphire (Al2O3), and the nano-pattern formed on the substrate 200 performs a function for reflecting emitting light through scattering from the light-emitting layer 220.
Referring to FIG. 20, a portion of the n-type nitride semiconductor layer 210 is exposed by mesa-etching a portion of the p-type nitride semiconductor layer 230, the light-emitting layer 220, and the n-type nitride semiconductor layer 210.
Referring to FIG. 21, the transparent electrode layer 240 is formed on the p-type nitride semiconductor layer 230 etched by the mesa-etching, and the nanoimprint resist layer 250 is formed on the transparent electrode layer 240 through a method of spin coating, for example. The transparent electrode layer 240 may include Indium Tin Oxide (ITO).
Referring to FIGS. 23 and 23, a nano-pattern is transferred onto the nanoimprint resist layer 250 by pressing the nanoimprint mold 30 that is formed by the method of manufacturing the nanoimprint module according to the present invention as described above on the nanoimprint resist layer 250.
Referring to FIG. 24, the nanoimprint mold 30 is separated from the nanoimprint resist layer 250 having a pyramid-shaped nano-pattern, and then the nanoimprint resist layer 250 is heated by UV rays and heat to cure the nanoimprint resist layer 250 having a pyramid-shaped nano-pattern.
Referring to FIG. 25, a portion of the nanoimprint resist layer 250 having a pyramid-shaped nano-pattern is etched for exposing the n-type nitride semiconductor layer 210, and then, the p-type electrode 260 is formed on the portion of the p-type electrode 260, and the n-type electrode 270 is formed on the n-type nitride semiconductor layer 210. For example, the n-type electrode 270 etches a portion of the nanoimprint resist layer 250 having a pyramid-shaped nano-pattern to expose the transparent electrode layer 240, and may then be formed on an etched region by removing a conductive material, and the n-type electrode 270 is formed on the n-type nitride semiconductor layer 210 remained after the mesa-etching.

## Claims

1. A method of manufacturing a nanoimprint mold, the method comprising:
forming a support substrate supporting a nitride semiconductor substrate on one surface of the nitride semiconductor substrate;
forming a nano-pattern having a pyramid shape on the other surface of the nitride semiconductor substrate through wet etching in which the nitride semiconductor substrate comprising the support substrate is immersed into one etchant selected from a calcium hydroxide solution and a sodium hydroxide solution to irradiate ultraviolet rays onto the nitride semiconductor substrate;
transferring the pyramid-shaped nano-pattern formed on the other surface of the nitride semiconductor substrate onto the nanoimprint mold in an nanoimprinting manner; and
separating the nanoimprint mold, on which the pyramid-shaped nano-pattern is formed, from the nitride semiconductor substrate.

2. The method of claim 1, wherein the nano-pattern of the nanoimprint mold is controlled by adjusting at least one of a molarity of the etchant and a wet etching time.

3. The method of claim 2, wherein the etchant has a molarity of about 1 M to about 8 M, and the wet etching time ranges from about 1 minute to about 60 minutes.

4. A method of manufacturing a light emitting diode, the method comprising:
forming an n-type nitride semiconductor layer, a light emitting layer, and a p-type nitride semiconductor layer on a temporary substrate;
forming a p-type electrode on the p-type nitride semiconductor layer;
forming a conductive substrate on the p-type electrode;
removing the temporary substrate to expose the n-type nitride semiconductor layer;
forming a nanoimprint resist layer on the n-type nitride semiconductor layer;
pressing the nanoimprint mold manufactured by the method of claim 1 on the nanoimprint resist layer to transfer the pyramid-shaped nano-pattern formed on the nanoimprint mold onto the nanoimprint resist layer;
separating the nanoimprint mold from the nanoimprint resist layer having the pyramid-shaped nano-pattern; and
etching a portion of the nanoimprint resist layer having the pyramid-shaped nano-pattern to form an n-type electrode.

5. The method of claim 4, further comprising forming a refractive index adjustment layer between the n-type nitride semiconductor layer and the nanoimprint resist layer, wherein the refractive index adjustment layer has a refractive index less than that of the n-type nitride semiconductor layer and greater than that of the nanoimprint resist layer.

6. The method of claim 5, wherein the refractive index adjustment layer is formed by sequentially stacking a first refractive index adjustment layer and a second refractive index adjustment layer which refract light emitted from the light emitting layer by refractive indexes different from each other.

7. The method of claim 6, wherein the first refractive index adjustment layer is formed on the n-type nitride semiconductor layer and has a refractive index less than that of the n-type nitride semiconductor layer, and
the second refractive index adjustment layer is formed on the first refractive index adjustment layer and has a refractive index less than that of the first refractive index adjustment layer and greater than that of the nanoimprint resist layer.

8. The method of claim 7, wherein the first refractive index adjustment layer comprises at least one selected from the group consisting of ZnO, Al-doped ZnO, In-doped ZnO, Ga-doped ZnO, ZrO2, TiO2, SiO2, SiO, Al2O3, CuOX, and ITO.

9. The method of claim 6, wherein the second refractive index adjustment layer comprises MgO-based oxide.

10. The method of claim 9, wherein the MgO-based oxide forming the second refractive index adjustment layer is a multinary-compound formed by adding the other elements in MgO.

11. The method of claim 4, wherein the n-type electrode is formed by depositing a conductive material on an etched area after a portion of the nanoimprint resist layer having the nano-pattern is etched to expose the n-type nitride semiconductor layer.

12. A light emitting diode manufactured by the method of claim 4.

13. A method of manufacturing a light emitting diode, the method comprising:
forming an n-type nitride semiconductor layer, a light emitting layer, and a p-type nitride semiconductor layer on a substrate on which a pattern scattering and reflecting incident light is formed;
mesa-etching portions of the p-type nitride semiconductor layer, the light emitting layer, and the n-type nitride semiconductor layer to expose a portion of the n-type nitride semiconductor layer;
forming a transparent electrode on the p-type nitride semiconductor layer;
forming the nanoimprint resist layer on the transparent electrode;
pressing the nanoimprint mold manufactured by the method of claim 1 on the nanoimprint resist layer to transfer the pyramid-shaped nano-pattern formed on the nanoimprint mold onto the nanoimprint resist layer;
separating the nanoimprint mold from the nanoimprint resist layer having the nano-pattern; and
etching a portion of the nanoimprint resist layer having the nano-pattern to form a p-type electrode and form an n-type electrode on the n-type nitride semiconductor layer.

14. The method of claim 13, wherein the transparent electrode comprises indium tin oxide (ITO).

15. The method of claim 13, wherein the p-type electrode is formed by depositing a conductive material on an etched area after a portion of the nanoimprint resist layer having the nano-pattern is etched to expose the transparent electrode.

16. A light emitting diode manufactured by the method of claim 13.