# Patent

## Title
Method of manufacture of a PCRAM memory cell

## Abstract

The invention provides a method of forming a resistance variable memory element and the resulting element. The method includes forming an insulating layer having an opening therein; forming a metal containing layer recessed in the opening; forming a resistance variable material in the opening and over the metal containing layer; and processing the resistance variable material and metal containing layer to produce a resistance variable material containing a diffused metal within the opening.

## Background
This application is a divisional of U.S. patent application Ser. No. 10/225,190, filed Aug. 22, 2002, now U.S. Pat. No. 7,018,863 which is herein incorporated by reference in its entirety.


FIELD OF THE INVENTION
The invention relates to the field of random access memory (RAM) devices formed using a resistance variable material, and in particular to an improved method of manufacturing a resistance variable memory element.
BACKGROUND OF THE INVENTION
A well known semiconductor memory component is a random access memory (RAM). RAM permits repeated read and write operations on memory elements. Typically, RAM devices are volatile, in that stored data is lost once the power source is disconnected or removed. Non-limiting examples of RAM devices include dynamic random access memory (DRAM), synchronized dynamic random access memory (SDRAM) and static random access memory (SRAM). In addition, DRAMS and SDRAMS also typically store data in capacitors which require periodic refreshing to maintain the stored data.
Recently resistance variable memory elements, which include programmable conductor memory elements, have been investigated for suitability as semi-volatile and non-volatile random access memory elements. Generally a programmable conductor memory element includes an insulating dielectric material formed of a chalcogenide glass disposed between two electrodes. A conductive material, such as silver, is incorporated into the dielectric material. The resistance of the dielectric material can be changed between high resistance and low resistance states. The programmable conductor memory is normally in a high resistance state when at rest. A write operation to a low resistance state is performed by applying a voltage potential across the two electrodes.
When set in a low resistance state, the state of the memory element will remain intact for minutes or longer after the voltage potentials are removed. Such material can be returned to its high resistance state by applying a reverse voltage potential between the electrodes as used to write the element to the low resistance state. Again, the highly resistive state is maintained once the voltage potential is removed. This way, such a device can function, for example, as a resistance variable memory element having two resistance states, which can define two logic states.
One preferred resistance variable material comprises a chalcogenide glass, for example, a GexSe100−x glass. One method of forming a resistance variable memory element based on chalcogenide glass includes forming a lower electrode over a substrate, forming an insulating layer over the lower electrode, forming an opening in the insulating layer to expose the lower electrode, forming a metal containing chalcogenide glass in the opening, recessing the metal containing chalcogenide glass, and forming an upper electrode overlying the insulating layer and the recessed metal containing chalcogenide glass. The resistance variable memory element can be recessed using a dry etch or plasma etch. The chemistries used in the dry etch or plasma etch produce inherent sidewalls of chemical compounds on the photo resist or structure used to define the etch which are very difficult to remove.
A specific example of a metal containing chalcogenide glass is germanium-selenide (GexSe100-x) containing silver (Ag). A method of providing silver to the germanium-selenide composition is to initially form a germanium-selenide glass and then deposit a thin layer of silver upon the glass, for example by sputtering, physical vapor deposition, or other known technique in the art. The layer of silver may be irradiated, preferably with electromagnetic energy at a wavelength less than 600 nanometers, so that the energy passes through the silver and to the silver/glass interface, to break a chalcogenide bond of the chalcogenide material such that the glass is doped with silver. Silver may also be provided to the glass by processing the glass with silver, as in the case of a silver-germanium-selenide glass. Another method for providing metal to the glass is to provide a layer of silver-selenide on a germanium-selenide glass.
It would be desirable to have an improved method of fabricating a resistance variable memory element, which does not produce undesirable etch chemistry sidewalls.
BRIEF SUMMARY OF THE INVENTION
The present invention provides a method of fabricating a resistance variable memory element which inhibits production of undesirable etch chemistry sidewalls. In a first embodiment, the method includes forming an insulating layer over a first electrode; forming an opening in the insulating layer to expose a portion of the first electrode; forming a metal material in the opening; depositing a resistance variable material over the metal material and in the opening; processing the resistance variable material to diffuse metal ions from the metal material into the resistance variable material to form a metal containing resistance variable material in the opening; and forming a second electrode over the insulating layer and over the metal containing resistance variable material.
The metal material is preferably silver, the resistance variable material is preferably a germanium-selenium composition, and the resulting metal containing resistance variable material is preferably a silver-germanium-selenium composition.
In another embodiment a metal-chalcogenide layer, for example, silver selenide is formed over the metal material and a second resistance variable material, for example a second germanium-selenium composition, is formed over the metal-chalcogenide layer, prior to the formation of the second electrode.
These and other features and advantages of the invention will be more apparent from the following detailed description, which is provided in connection with the accompanying drawings and illustrate exemplary embodiments of the invention.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a cross-sectional view depicting a semiconductor substrate at an initial stage of processing towards a resistance variable memory element.
FIG. 2 is a subsequent cross-sectional view taken from FIG. 1 at a stage of processing subsequent to that shown in FIG. 1.
FIG. 3 is a subsequent cross-sectional view taken from FIG. 2 at a stage of processing subsequent to that shown in FIG. 2.
FIG. 4 is a subsequent cross-sectional view taken from FIG. 3 at a stage of processing subsequent to that shown in FIG. 3.
FIG. 5 is a subsequent cross-sectional view taken from FIG. 4 at a stage of processing subsequent to that shown in FIG. 4.
FIG. 6 is a subsequent cross-sectional view taken from FIG. 5 at a stage of processing subsequent to that shown in FIG. 5.
FIG. 7 is a subsequent cross-sectional view taken from FIG. 6 at a stage of processing subsequent to that shown in FIG. 6.
FIG. 8 is a subsequent cross-sectional view taken from FIG. 7 at a stage of processing subsequent to that shown in FIG. 7.
FIG. 9A is a subsequent cross-sectional view taken from FIG. 7 at a stage of processing subsequent to that shown in FIG. 7 in accordance with a second embodiment of the invention.
FIG. 9B is a subsequent cross-sectional view taken from FIG. 9A at a stage of processing subsequent to that shown in FIG. 9A in accordance with the second embodiment of the invention.
FIG. 9C is a subsequent cross-sectional view taken from FIG. 9B at a stage of processing subsequent to that shown in FIG. 9B in accordance with the second embodiment of the invention.
FIG. 10 illustrates a process according to an embodiment of the present invention.
FIG. 11 illustrates an exemplary construction of a resistance variable memory element in accordance with the second embodiment of the invention.
FIG. 12 is a processor based system having one or more memory devices that contains resistance variable memory elements according to the present invention.



DETAILED DESCRIPTION OF THE INVENTION
In the following detailed description, reference is made to various specific structural and process embodiments of the invention. These embodiments are described with sufficient detail to enable those skilled in the art to practice the invention. It is to be understood that other embodiments may be employed, and that various structural, logical and electrical changes may be made without departing from the spirit or scope of the invention.
The term “substrate” used in the following description may include any supporting structure including, but not limited to, a plastic or a semiconductor substrate that has an exposed substrate surface. Semiconductor substrates should be understood to include silicon, silicon-on-insulator (SOI), silicon-on-sapphire (SOS), doped and undoped semiconductors, epitaxial layers of silicon supported by a base semiconductor foundation, and other semiconductor structures. When reference is made to a substrate or wafer in the following description, previous process steps may have been utilized to form regions or junctions in or over the base semiconductor or foundation.
The term “silver” is intended to include not only elemental silver, but silver with other trace metals or in various alloyed combinations with other metals as known in the semiconductor industry, as long as such silver alloy is conductive, and as long as the physical and electrical properties of the silver remain unchanged.
The term “silver-selenide” is intended to include various species of silver-selenide, including some species which have a slight excess or deficit of silver, for instance, Ag2Se, Ag2+xSe, and Ag2−xSe.
The term “semi-volatile memory device” is intended to include any memory device which is capable of maintaining its memory state after power is removed from the device for a prolonged period of time. Thus, semi-volatile memory devices are capable of retaining stored data after the power source is disconnected or removed. The term “semi-volatile memory device” as used herein includes not only semi-volatile memory devices, but also non-volatile memory devices.
The term “resistance variable memory element” is intended to include any memory element, including programmable conductor memory elements, semi-volatile memory elements, and non-volatile memory elements which exhibit a resistance change in response to an applied voltage.
The present invention relates to a process for forming a resistance variable memory element. The invention will now be explained with reference to FIGS. 1-10, which illustrate exemplary embodiments of a resistance variable memory element 100 in accordance with the invention. FIG. 10 shows an exemplary processing sequence for forming a resistance variable memory element in an exemplary embodiment of the invention.
Referring to FIGS. 1 and 10, a semiconductor substrate 10, such as a silicon wafer, is prepared for the processing steps of the present invention. A resistance variable memory element may be implemented in various different technologies. One such application is in memory devices. Insulating material 11, such as silicon dioxide, is formed over substrate 10 in process segment 108. Next and as shown at process segment 110, a first electrode 12, is formed over the insulating material 11. The material used to form the electrode can be selected from a variety of conductive materials, for example, tungsten, nickel, tantalum, titanium, titanium nitride, aluminum, platinum, or silver, among many others. Next and as shown at process segment 120, an insulating layer 13, preferably formed of silicon nitride, is formed over the first electrode 12. This and any other subsequently formed insulating layers may be formed of a conventional insulating nitride or oxide, among others. The present invention is not limited, however, to the above-listed materials and other insulating and/or dielectric materials known in the industry may be used. The insulating layer may be formed by any known deposition methods, for example, by sputtering, chemical vapor deposition (CVD), plasma enhanced CVD (PECVD) or physical vapor deposition (PVD), among others.
Referring now to FIG. 2 and processing segment 130 of FIG. 10, the insulating layer 13 is etched to form an opening 22, which exposes the first electrode 12. This is done by patterning a masking material 21 and etching to remove unmasked portions of the insulating layer 13, with the etch stopping once it reaches the first electrode 12.
Referring now to FIG. 3 and processing segment 140, the masking material 21 of FIG. 2 is stripped and a metal containing layer 31, such as silver is formed to substantially fill the opening 22 and contact the first electrode 12. Silver-selenide may also be used as the metal containing layer 31.
Referring now to FIG. 4 and processing segment 150 of FIG. 10, the metal containing layer 31 is then planarized down to expose the surface of insulating layer 13, by using an abrasive planarization etching technique, such as chemical mechanical planarization (CMP). Thus, the metal containing layer 31 is left only in the opening 22.
Referring now to FIG. 5 and processing segment 160 of FIG. 10, a partial etchback, preferably a wet etch, is performed to remove a portion of the metal containing layer from the opening 22. An exemplary wet etch would incorporate HNO3 and H2O. Regardless of the type of etch used, it is desirable that the metal containing layer 31 is recessed within the opening 22 approximately 50% or less of the depth of opening 22 and preferably is recessed by about 40 to about 50% of the depth, the importance of which will become apparent later in the description of the process. Wet etching is preferred to alleviate the problem of a sidewall forming from etch chemicals. Also, as wet etching is performed down an opening, the isotropic nature of wet etching is not a constraint and the etching is self-aligned to the opening.
Referring now to FIG. 6 and processing segments 170 and 180, a first resistance variable material 41 is formed over the insulating layer 13 and recessed metal containing layer 31. The first resistance variable material 41 is deposited in such a manner so as to contact the recessed metal containing layer 31. In an exemplary embodiment, the first resistance variable material 41 is a chalcogenide glass and is preferably a germanium-selenide glass. The germanium-selenide glass composition is preferably one having a GexSe100−x stoichiometry of from about Ge20Se80 to about Ge33Se67, and is more preferably about Ge25Se75. The first resistance variable material 41 may be deposited by any known deposition methods, for example, by sputtering, chemical vapor deposition (CVD), plasma enhanced CVD (PECVD) or physical vapor deposition (PVD).
In accordance with processing segment 180 shown in FIG. 10, and as indicated by arrows in FIG. 6, the substrate 10 is either irradiated with light or thermally treated in combination with light irradiation to cause sufficient diffusion of metal ions from recessed metal containing layer 31 into the first resistance variable material 41. For example, the first resistance variable material 41 may be irradiated for about 5 to 30 minutes at between about 1 mW/cm2 to about 10 mW/cm2 with light at from about 200 nm to about 600 nm wavelength. Additionally, the irradiation may be used in combination with a thermal process using a temperature of from about 50° C. to about 300° C. (depending upon the glass stoichiometry)and preferably about 110° C. for about 5 to about 15 minutes and preferably 10 minutes. The irradiation process is sufficient to cause the desired diffusion of metal ions from metal containing layer 31 into layer 41; however, the thermal process by itself is not used, but is only used in combination with the irradiation process.
Because of the confinement of the metal containing layer 31, metal ions are only incorporated into the resistance variable material within the opening 22. By recessing the metal containing layer 31 within the opening 22 by about 40% to about 50% in processing segment 160, a sufficient amount of the metal containing layer 31 is available for diffusion of metal ions into the resistance variable material 41.
Referring now to FIG. 7, processing the substrate with light irradiation, results in a metal containing resistance variable material 51 being formed in the opening 22. Any residual resistance variable material over layer 13 is removed by a dry etch process in processing segment 190 shown in FIG. 10. By removing the residual resistance variable material, further metal doping of the memory element will not occur during subsequent processing and volume expansion stress is reduced. The dry etch process is preferably a chemistry containing a gas which is selective between the resistance variable material 41 and the metal containing resistance variable material 51. For example, an exemplary selective dry etch process would include CF4 gas and/or SF6 gas which are selective between Ge25Se75 and Agx(Ge25Se75)1−x. If, by chance, metal is doped into the resistance variable material above or to the side of the opening 22, the dry etch will not remove it, however, the stress of confining the doped area of the element is relieved through the top of the element resulting in an element that is mushroom shaped at the top of the opening 22. However, the mushroom shape is not a detriment to electrical performance.
Referring now to FIG. 8 and processing segment 200, a second conductive electrode 61 is formed over the insulating layer 13 and metal containing resistance variable material 51 to complete the formation of the resistance variable memory element. The second electrode is preferably formed of tungsten, however any suitable conductive materials may be used to form the second electrode 61. The resulting structure forms a resistance variable memory element comprising a metal containing resistance variable material (i.e., such as a silver containing chalcogenide glass layer) and at least two conductive electrodes, namely electrodes 12 and 61. Conventional processing steps can then be carried out to electrically couple the second electrode 61 to various circuits of memory arrays.
FIGS. 1-8 depict a first exemplary embodiment of the invention. The structure depicted in FIG. 7 can also form the base of a second embodiment of the invention. The second embodiment is now described with reference to FIGS. 9A-9C and process segments 300-320 of FIG. 10. As shown in FIG. 9A and process segment 300 of FIG. 10 a metal containing layer 71, such as silver-selenide, may be deposited over the metal containing resistance variable material 51. Any suitable metal containing layer 71 may be used. For instance, other suitable metal containing layers include silver-chalcogenide layers. Silver sulfide, silver oxide, and silver telluride are all suitable silver-chalcogenides that may be used in combination with any suitable metal containing resistance variable material 51. A variety of processes can be used to form the metal containing layer 71. For instance, physical vapor deposition techniques such as evaporative deposition and sputtering may be used. Other processes such as chemical vapor deposition, co-evaporation or depositing a layer of selenium above a layer of silver to form silver-selenide can also be used.
Referring now to FIG. 9B and process segment 310, a second resistance variable material 81, preferably a chalcogenide glass and more preferably a germanium-selenide glass is deposited over the metal containing layer 71. The second germanium-selenide glass composition is preferably one having a GexSe100−x stoichiometry between about Ge20Se80 to about Ge43Se57 and is more preferably about Ge40Se60. The second resistance variable material 41 may be deposited by any known deposition methods, for example, by sputtering, chemical vapor deposition (CVD), plasma enhanced CVD (PECVD) or physical vapor deposition (PVD).
Referring now to FIG. 9C and process segment 320 of FIG. 10, a second conductive electrode 61 is formed over the second resistance variable material 81 to complete the formation of a resistance variable memory element in accordance with the second embodiment of the invention. The second electrode is preferably formed of tungsten, however any suitable conductive materials may be used to form the second electrode 61.
The resulting structure forms a resistance variable memory element comprising a metal containing resistance variable material 51 (such as a silver-germanium-selenium glass layer), a metal containing layer 71 (such as silver-selenide), a resistance variable material layer 81 (such as a germanium-selenium glass layer), and at least two conductive electrodes, namely electrodes 12 and 61. Conventional processing steps can then be carried out to electrically couple the first and second electrode 12, 61 to various circuits of memory arrays. Providing a metal containing layer 71, such as silver-selenide, over the metal containing resistance variable material 51 and then providing a second resistance variable material 81 over the metal containing layer 71 allows the metal in the metal containing layer 71 to be more readily available for switching.
FIG. 11 illustrates an exemplary construction of a resistance variable memory element 100 employing the first embodiment of the invention. A resistance variable memory element 100 in accordance with the first embodiment of the invention is generally fabricated over a semiconductor substrate 10 and comprises a first insulating layer 11 formed over a substrate 10. An access transistor 83 for accessing the memory element is illustrated as having source/drain regions 84, 85 and a gate stack 86. Access circuitry for operating a resistance variable memory cell may be fabricated in substrate 10. The insulating layer 11 is provided over the circuitry, including transistor 83 and contains a conductive plug 161. In accordance with process segment 110, a first metal electrode 12 is formed within a second insulating layer 8 provided over the insulating layer 11 and plug 161. In accordance with process segment 120, a third insulating layer 13 is formed over the first electrode 12 and second insulating layer 8. In accordance with process segment 130, an etched opening is provided. A metal material and a resistance variable material are deposited in the opening and processed via light irradiation in accordance with process segments 140-190 to form a metal containing resistance variable material 51 in the opening of the third insulating layer 13. As described, the metal containing resistance variable material 51 may be a silver-germanium-selenide glass.
In accordance with process segment 200 a second metal electrode 54 is formed in contact with the silver-germanium-selenide glass 51.
The third insulating layer 13 may be formed, for example, between the first electrode 12 and the second electrode 54 of any suitable insulator, for example a nitride, an oxide, or other insulator. The third insulating layer 13 may be formed by any known deposition method, for example, by sputtering, chemical vapor deposition (CVD), plasma enhanced CVD (PECVD) or physical vapor deposition (PVD), among others. A preferred insulating material is silicon nitride, but those skilled in the art will appreciate that there are other numerous suitable insulating materials for this purpose.
The first electrode 12 is electrically connected through conductive plug 161 to a source/drain region 84 of access transistor 83. Source/drain region 85 is connected by another conductive plug 87 to other circuitry of a memory array. The gate of the transistor 83 may be part of a word line which is connected to a plurality of resistance variable memory elements 100 just as a bit line of a memory array may be coupled to a plurality of resistance variable memory elements through plug 87.
The resistance variable memory element 100 of the invention may be used in a random access memory device. FIG. 12 illustrates an exemplary processing system 900 which utilizes a resistance variable memory random access device 101 containing an array of resistance variable memory elements 100 constructed as described above with reference to FIGS. 1-10. The processing system 900 includes one or more processors 901 coupled to a local bus 904. A memory controller 902 and a primary bus bridge 903 are also coupled the local bus 904. The processing system 900 may include multiple memory controllers 902 and/or multiple primary bus bridges 903. The memory controller 902 and the primary bus bridge 903 may be integrated as a single device 906.
The memory controller 902 is also coupled to one or more memory buses 907. Each memory bus accepts memory components 908, which include at least one memory device 101 of the invention. Alternatively, in a simplified system, the memory controller 902 may be omitted and the memory components directly coupled to one or more processors 901. The memory components 908 may be a memory card or a memory module. The memory components 908 may include one or more additional devices 909. For example, the additional device 909 might be a configuration memory. The memory controller 902 may also be coupled to a cache memory 905. The cache memory 905 may be the only cache memory in the processing system. Alternatively, other devices, for example, processors 901 may also include cache memories, which may form a cache hierarchy with cache memory 905. If the processing system 900 include peripherals or controllers which are bus masters or which support direct memory access (DMA), the memory controller 902 may implement a cache coherency protocol. If the memory controller 902 is coupled to a plurality of memory buses 907, each memory bus 907 may be operated in parallel, or different address ranges may be mapped to different memory buses 907.
The primary bus bridge 903 is coupled to at least one peripheral bus 910. Various devices, such as peripherals or additional bus bridges may be coupled to the peripheral bus 910. These devices may include a storage controller 911, an miscellaneous I/O device 914, a secondary bus bridge 915, a multimedia processor 918, and an legacy device interface 920. The primary bus bridge 903 may also coupled to one or more special purpose high speed ports 922. In a personal computer, for example, the special purpose port might be the Accelerated Graphics Port (AGP), used to couple a high performance video card to the processing system 900.
The storage controller 911 couples one or more storage devices 913, via a storage bus 912, to the peripheral bus 910. For example, the storage controller 911 may be a SCSI controller and storage devices 913 may be SCSI discs. The I/O device 914 may be any sort of peripheral. For example, the I/O device 914 may be an local area network interface, such as an Ethernet card. The secondary bus bridge may be used to interface additional devices via another bus to the processing system. For example, the secondary bus bridge may be an universal serial port (USB) controller used to couple USB devices 917 via to the processing system 900. The multimedia processor 918 may be a sound card, a video capture card, or any other type of media interface, which may also be coupled to one additional devices such as speakers 919. The legacy device interface 920 is used to couple legacy devices, for example, older styled keyboards and mice, to the processing system 900.
The processing system 900 illustrated in FIG. 12 is only an exemplary processing system with which the invention may be used. While FIG. 12 illustrates a processing architecture especially suitable for a general purpose computer, such as a personal computer or a workstation, it should be recognized that well known modifications can be made to configure the processing system 900 to become more suitable for use in a variety of applications. For example, many electronic devices which require processing may be implemented using a simpler architecture which relies on a CPU 901 coupled to memory components 908 and/or memory elements 100. These electronic devices may include, but are not limited to audio/video processors and recorders, gaming consoles, digital television sets, wired or wireless telephones, navigation devices (including system based on the global positioning system (GPS) and/or inertial navigation), and digital cameras and/or recorders. The modifications may include, for example, elimination of unnecessary components, addition of specialized devices or circuits, and/or integration of a plurality of devices.
The above description and drawings are only to be considered illustrative of exemplary embodiments, which achieve the features and advantages of the present invention. Modification and substitutions to specific process conditions and structures can be made without departing from the spirit and scope of the present invention. Accordingly, the invention is not to be considered as being limited by the foregoing description and drawings, but is only limited by the scope of the appended claims.

## Claims

1. A resistance variable memory element comprising:
a first electrode;
an insulating material having an opening in communication with said first electrode;
a first germanium-selenium chalcogenide glass having silver ions diffused therein, said first chalcogenide glass with said diffused silver ions being disposed entirely within said opening and on said first electrode, and wherein no portion of chalcogenide glass is present which does not have silver ions diffused therein;
a metal containing layer having a different chemical composition than said first chalcogenide glass over said insulating material and said first chalcogenide glass;
a second chalcogenide glass over said metal containing layer; and
a second electrode over said second chalcogenide glass.

2. The element of claim 1 wherein said chalcogenide glass is a silver germanium-selenium glass having a germanium-selenium stoichiometry of from about Ge20Se80 to about Ge33Se67.

3. The element of claim 2 wherein said silver germanium-selenium glass has a germanium-selenium stoichiometry of about Ge25Se75.

4. The element of claim 1, further comprising:
a second silver-containing material formed over and in electrical communication with said chalcogenide glass; and
a chalcogenide material formed over and in electrical communication with said silver-chalcogenide material.

5. The element of claim 1, wherein at least one of said first and second silver-containing layers comprises silver-selenide.

6. The element of claim 1, wherein at least one of said first and second silver-containing layers comprises silver-sulfide.

7. The element of claim 1, wherein at least one of said first and second silver-containing layers comprises silver-telluride.

8. A resistance variable memory element comprising:
a first electrode;
an insulating material having an opening in communication with said first electrode;
a first silver-containing material in said opening and in contact with said first electrode;
a first chalcogenide glass having silver ions diffused therein, said chalcogenide glass being a different material than said first silver-containing material and disposed within said opening over and in contact with said silver-containing material, and wherein no portion of chalcogenide glass is present which does not have silver ions diffused therein;
a metal containing layer having a different chemical composition than said first chalcogenide glass over said insulating material and said first chalcogenide glass, said metal containing layer having silver ions diffused therein;
a second chalcogenide glass over said metal containing layer; and
a second electrode over and in contact with said second chalcogenide glass.