EXHIBIT 21

ESI Subsidiaries

As of March 28, 2009



|                                                   |  |                               |  |                                    |  
|-------------------------------------------------- |  | ----------------------------- |  | ---------------------------------- | -
|Name                                               |  | State/Country ofIncorporation |  | Percentageof VotingSecuritiesOwned |  
|Electro Scientific Industries GmbH                 |  | Germany                       |  | 100                                | %
|ESI International Corp.                            |  | Oregon                        |  | 100                                | %
|Electro Scientific Industries Japan Co., Ltd.      |  | Japan                         |  | 100                                | %
|ESI Korea Co. Ltd.                                 |  | Korea                         |  | 100                                | %
|Electro Scientific Industries Europe Ltd.          |  | United Kingdom                |  | 100                                | %
|Electro Scientific Industries, SARL                |  | France                        |  | 100                                | %
|Electro Scientific Industries Singapore PTE Ltd.   |  | Singapore                     |  | 100                                | %
|ESI China, Inc.                                    |  | Oregon                        |  | 100                                | %
|ESI Electronic Equipment (Shanghai) Co., Ltd.      |  | China                         |  | 100                                | %
|ESI (Beijing) R&D Center Co., Ltd.                 |  | China                         |  | 100                                | %
|ESI Technology Development, Pte. Ltd.              |  | Singapore                     |  | 100                                | %
|ESI China R&D Investment, Pte. Ltd.                |  | Singapore                     |  | 100                                | %
|ESI Taiwan (Branch Office)                         |  | Taiwan                        |  | 100                                | %
|ESI (Beijing) Electro Optic Manufacturing Co. Ltd. |  | China                         |  | 100                                | %
|New Wave Research, Inc                             |  | California                    |  | 100                                | %
|New Wave Research, Ltd (FSC)                       |  | Virgin Islands                |  | 100                                | %
|New Wave Research, K.K                             |  | Japan                         |  | 100                                | %
|New Wave Research, Ltd.                            |  | Hong Kong                     |  | 100                                | %
|New Wave Research Co., Ltd. (WOFE).                |  | China                         |  | 100                                | %
|New Wave Research Co., Ltd. (FICE)                 |  | China                         |  | 100                                | %
|New Wave Research G.C. Ltd.                        |  | Taiwan                        |  | 100                                | %
|Zirkon Merger Sub, LLC                             |  | Delaware                      |  | 100                                | %