EXHIBIT 21

ESI Subsidiaries

As of June 3, 2006



|                                                 |  |                               |  |                                    |  
|------------------------------------------------ |  | ----------------------------- |  | ---------------------------------- | -
|Name                                             |  | State/Country ofIncorporation |  | Percentageof VotingSecuritiesOwned |  
|ESI F.S.C. (dormant)                             |  | Guam                          |  | 100                                | %
|                                                 |  |                              
|Electro Scientific Industries GmbH               |  | Germany                       |  | 100                                | %
|                                                 |  |                              
|ESI International Corp.                          |  | Oregon                        |  | 100                                | %
|                                                 |  |                              
|Electro Scientific Industries Japan Co., Ltd.    |  | Japan                         |  | 100                                | %
|                                                 |  |                              
|ESI Korea Co. Ltd.                               |  | Korea                         |  | 100                                | %
|                                                 |  |                              
|Electro Scientific Industries Europe Ltd.        |  | United Kingdom                |  | 100                                | %
|                                                 |  |                              
|Electro Scientific Industries, SARL              |  | France                        |  | 100                                | %
|                                                 |  |                              
|ESI SRL (dormant)                                |  | Italy                         |  | 100                                | %
|                                                 |  |                              
|Electro Scientific Industries Singapore PTE Ltd. |  | Singapore                     |  | 100                                | %
|                                                 |  |                              
|ESI China, Inc.                                  |  | Oregon                        |  | 100                                | %
|                                                 |  |                              
|ESI Electronic Equipment (Shanghai) Co., Ltd.    |  | China                         |  | 100                                | %
|                                                 |  |                              
|ESI (Beijing) R&D Center Co., Ltd.               |  | China                         |  | 100                                | %
|                                                 |  |                              
|ESI Technology Development, Pte. Ltd.            |  | Singapore                     |  | 100                                | %
|                                                 |  |                              
|ESI China R&D Investment, Pte. Ltd.              |  | Singapore                     |  | 100                                | %
|                                                 |  |                              
|ESI Taiwan (Branch Office)                       |  | Taiwan                        |  | 100                                | %