**EXHIBIT 21**

 

ESISubsidiaries

Asof May 28, 2005

 
| **Name**                                         | ** ** | **State/Country of Incorporation** | ** ** | **Percentage of Voting Securities  Owned** | ** ** |
|--------------------------------------------------|------------|------------------------------------|------------|--------------------------------------------|------------|
|                                             |       |                               |       |                                       |       |
| ESI F.S.C. (dormant)                             |       | Guam                               |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| Electro Scientific Industries GmbH               |       | Germany                            |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| ESI International Corporation                    |       | Oregon                             |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| ESI Japan KK                                     |       | Japan                              |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| ESI Korea Co. Ltd.                               |       | Korea                              |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| Electro Scientific Industries Ltd.               |       | England                            |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| ESI SARL                                         |       | France                             |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| ESI SRL (dormant)                                |       | Italy                              |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| Electro Scientific Industries Singapore PTE Ltd. |       | Singapore                          |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| ESI China, Inc.                             |       | Oregon                             |       | 100                                        | %          |
|                                             |       |                               |       |                                       |       |
| ESI Electronic Equipment (Shanghai) Co., Ltd.    |       | China                              |       | 100                                        | %          |

 

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