EXHIBIT 10.7

                            NINTH AMENDMENT TO LEASE

      This Ninth  Amendment  to Lease  Agreement is entered into as of April 26,
2004 ("Reference  Date"), by and between JANE CROCKER,  FORMERLY JANE C. JACOBS,
AS  TRUSTEE  UNDER THE JANE C.  JACOBS  TRUST  AGREEMENT  DATED  OCTOBER 5, 1990
("Crocker")  and NORMAN E. MACK AY  ("MacKay")  (Crocker and MacKay  hereinafter
collectively  referred  to as  "Landlord")  and TEGAL  CORPORATION,  A  DELAWARE
CORPORATION ("Tenant"), with reference to the following facts:

                                    RECITALS:

      A. WHEREAS,  the Premises as defined below are currently  leased to Tenant
by Landlord pursuant to that certain Lease Agreement dated as of August 15, 1986
("Original  Lease") as the Original Lease was amended numerous times through and
including the last amendment  entitled Eighth Amendment to Lease Agreement dated
as of January 12, 2004. The  Amendments and the Original Lease are  collectively
referred to as the "Lease."

      B.  WHEREAS,  the Premises  consist of an  approximate  47,464 square feet
portion of an  approximately  120,000 square feet building located at 2201 South
McDowell Boulevard in Petaluma, California ("Premises").

      C.  WHEREAS,  Tenant  desires to add  approximately  9,954  square feet of
additional  space  to the  Premises  under  Lease  for  such  area  known as the
"Additional Expansion Space" ("Additional Expansion Space").

      D. WHEREAS, Landlord approves of Tenant's request to occupy and lease such
Additional Space as of May 1, 2004 and thereafter as hereinafter set forth..

      E.  WHEREAS,  Landlord  and  Tenant  desire  to modify  and amend  certain
provisions of the Lease as hereinafter set forth. NOW,  THEREFORE,  for good and
valuable  consideration,  receipt of which is hereby  acknowledged,  the parties
agree, as follows:

      1.  RECITALS.  The  Recitals  set forth above are  incorporated  herein by
reference  into this  Ninth  Amendment  to Lease as  though  set forth at length
herein.

      2.  PREMISES.  The  Premises  shall  be  modified  and  increased  to  add
approximately  9,954 square feet of area  cross-hatched on EXHIBIT A hereto (the
content of which is incorporated herein by reference) bringing the total area of
the Premises under the Lease, as hereby amended, to approximately  57,418 square
feet and  hereinafter  all  references  to the Premises  shall be to said 57,418
square feet.  The effective  date of the addition of such  Additional  Expansion
Space to the area of the Premises for all purposes  under the Lease shall be May
1, 2004.

      3. BASIC  RENT.* As a result of the  addition of said 9,954 square feet of
Additional Expansion Space to the Premises, Basic Rent commencing on May 1, 2004
for the Premises shall be, as follows:

                                   MONTHLY           ANNUAL
              PERIOD               BASIC RENT        BASIC RENT
              ------               ----------        ----------
     5-1-2004 thru 12-31-2004      $72,174.43        $577,395.44 (8 months)
     1-1-2005 thru 12-31-2005      $74,339.66        $892,075.92
     1-1-2006 thru 12-31-2006      $76,569.85        $918,838.20
     1-1-2007 thru 12-31-2007      $78,866.95        $946,403.40
     1-1-2008 thru 12-31-2008      $81,232.96        $974,795.52
     1-1-2009 thru 12-31-2009      $83,669.95      $1,004,039.40

      *NOTE:  Section 3 of the Eighth  Amendment to Lease is hereby  deleted and
      superseded by the new Basic rent Schedule set forth above.


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<PAGE>

      4. TENANT'S  SHARE.  Section 4 of the Eighth  Amendment to Lease is hereby
modified by deleting "39.55%" and inserting in its place "47.85%."

      5. NO  LANDLORD'  WORK.  Landlord  shall  not be  obligated  to  make  any
alterations  to the  Additional  Expansion  Space in connection  with this Ninth
Amendment.  Tenant hereby takes the Additional  Expansion  Space in its "AS IS,"
"WHERE IS"  condition.  Tenant  shall be allowed  to use the  cubicles,  tables,
chairs,  furniture and other personal  property  located in the said  Additional
Expansion Space with the  understanding  that such personal  property belongs to
Landlord  pursuant to the terms of  paragraph  10 to that  Seventh  Amendment to
Lease and the Bill of Sale which is EXHIBIT B to such Seventh Amendment to Lease
between  the  parties  and that at the  termination  of the  Lease,  or  earlier
surrender of the  Additional  Expansion  Space to Landlord,  that such  personal
property shall remain in such space or be removed by Tenant at the sole election
of Landlord without cost to Landlord.

      6. BROKERAGE COMMISSIONS. Tenant warrants that it has not had any dealings
with  any real  estate  brokers,  leasing  agents,  salesmen,  or  incurred  any
obligations  for the payment of real estate  brokerage  commissions  or finder's
fees which would be earned or due and payable by reason of the execution of this
Ninth  Amendment.  Landlord  warrants  that it has not had any dealings with any
real estate brokers,  leasing agents,  salesmen, or incurred any obligations for
the payment of real estate brokerage commissions or finder's fees which would be
earned or due and payable by reason of the execution of this Ninth Amendment

      In the event that any person or broker makes a claim for such a commission
based upon any contact,  dealings or  communication,  the party whose conduct is
the basis for the making of such claim shall indemnify, defend and hold harmless
the other party against and from any commission,  fee,  liability,  damage, cost
and expense,  including,  without limitation,  attorney's fees arising out of or
resulting from any such claim.

      7. FULL FORCE AND EFFECT.  Except as supplemented  and/or modified by this
Ninth Amendment, to the best of Landlord's and Tenant's knowledge, this Lease is
in full force and effect and neither  party has any defenses to the  enforcement
of this Lease.

      8. ENTIRETY. Except as provided in this Ninth Amendment, this Lease is the
entire   agreement   between  the  parties  and  there  are  no   agreements  or
representations  between the parties except as expressed  herein.  Moreover,  no
subsequent  change or modification  of this Lease, as amended,  shall be binding
unless in writing and fully  executed by Landlord and Tenant.  In the event of a
conflict  between the terms,  conditions,  and provisions of this Lease and this
Ninth Amendment, the terms,  conditions,  and provisions of this Ninth Amendment
shall control.

      9. MISCELLANEOUS.  Any breach or default under any provision of this Ninth
Amendment  shall be a breach or  default  under  this  Lease  and any  breach or
default  under  this  Lease  shall be a  breach  or  default  under  this  Ninth
Amendment.  All capitalized  terms not defined herein shall have the meaning set
forth in the Lease.

      10.  COUNTERPARTS.  This Ninth  Amendment  may be  executed in one or more
counterparts, each of which shall be deemed an original, and all of which, taken
together, shall constitute one and the same instrument.  Furthermore, this Ninth
Amendment may be executed and delivered by the exchange of electronic  facsimile
copies of  counterparts  of the  signed  documents,  which  facsimile  copies or
counterparts  shall be binding on the parties and such  execution  and  delivery
shall have the same force and effect as any other delivery of a manually  signed
original of this Ninth Amendment.

      11.  EFFECTIVE  DATE. This Ninth Amendment shall be effective only when it
has been  executed  in writing  by all of the  parties  hereto,  when such Ninth
Amendment  has been  delivered  by Landlord and Tenant to each other and on such
date when the last  signatory  necessary to execute this Ninth  Amendment  shall
have executed it.


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IN WITNESS THEREOF, Landlord and Tenant have executed this Ninth Amendment to
Lease as of the Effective Date.

         TENANT:                                                LANDLORD:

         TEGAL CORPORATION,                        JANE C. CROCKER, TRUSTEE AND
         INC., A DELAWARE CORPORATION              NORMAN E. MAC KAY

         By: /s/ Mike Parodi                 By:  /s/  Jane C. Crocker, Trustee
            ---------------------               ---------------------
         Its:  President & CEO             Its: Owner
            ---------------------               ---------------------
         Dated: April 30, 2004           Dated: April 29,  2004
            ---------------------               ---------------------

                                            By:
                                                ---------------------
                                            By: /s/  Norman E. MacKay
                                                ---------------------
                                           Its: Owner
                                                ---------------------
                                         Dated: April 29, 2004
                                                ----------------------

(Crocker, Tegal 9th Amend. to Lease 4/22/04)


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