EXHIBIT 10.17
 NONQUALIFIED SUPPLEMENTAL  DEFERRED COMPENSATION PLAN  ADOPTION AGREEMENT
 ADOPTION OF PLAN   [Select one]
 o
    
    Adoption  The undersigned Ultratech, Inc. (the Employer) hereby adopts as a
Nonqualified Deferred Compensation Plan for the individuals identified in Item 5 herein the
form of Plan known as the Nonqualified Supplemental Deferred Compensation Plan.þ
    
    Amendment of Previous Nonqualified Deferred
Compensation Plan  With
Grandfathered Amounts  Ultratech, Inc. (the Employer) previously has adopted a
Nonqualified Deferred Compensation Plan, known as the Ultratech, Inc. Non-Qualified
Supplemental Deferred Compensation Plan,and the execution of this Adoption Agreement
constitutes an amendment to that Plan, effective only for Deferrals and, Contributions made
to the Plan on or after the Effective Date listed in Section 2 below or otherwise unvested
as of that date (together with the earnings, gains, losses, depreciation and appreciation
vested and credited thereto or debited therefrom), with respect to Plan provisions required
under Section 409A of the Internal Revenue Code and the regulations thereunder. All other
amounts in the plan shall be subject to the provisions of the previous plan document. This
option is appropriate if the previous plan contains grandfathered amounts not subject to
Section 409A of the Internal Revenue Code. Grandfathered amounts were contributed to the
plan prior to January 1, 2005 under the terms of the plan in effect prior to October 4,
2004, and those plan terms have not since been materially modified. Grandfathered amounts
and earnings will be administered under the terms of the prior plan document.o
    
    Restatement of Previous Nonqualified Deferred
Compensation Plan  Ultratech, Inc.
(the Employer) previously has adopted a Nonqualified Deferred Compensation Plan, known as
the Non-Qualified Supplemental Deferred Compensation Plan,and the execution of this
Adoption Agreement constitutes a restatement of that Plan, effective as of the Effective
Date listed in Section 2 below for all funds under the Plan. This option is appropriate if
the previous plan does not contain grandfathered amounts (see description above), or if
Employer wishes to apply Section 409A rules to all amounts in the plan (even pre-2005
amounts), or if previous plan has been materially modified and thus become subject to
Section 409A.
 NAME OF PLAN
 [enter name of Plan] Ultratech, Inc. Non
Qualified Supplemental Deferred Compensation Plan
 INDIVIDUALIZED PLAN INFORMATION
  1.
    
    Adopting Entity.The Employer adopts the Plan as:
 -1-




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List type of business entity (corporation, partnership, controlled group of corporations,
etc.) CorporationList each Employer adopting the Plan and Employer Identification Number (EIN):
 Name of Employer:
    
    Ultratech, Inc.
    
    EIN: 943169580Name of Employer:
    
    
    
    EIN:Name of Employer:
    
    
    
    EIN:Name of Employer:
    
    
    
    EIN:Name of Employer:
    
    
    
    EIN:(attach additional lists as necessary)
 The adopting Employers and the Employer are referred to herein collectively as the
Employer.Select state of controlling law (see Section 10.7 of Plan Document):
 o
    
    State of incorporation;þ
    
    State of domicile            CA
 2.
    
    Effective Date. The Effective Date of the adoption of this Plan, this Plan
amendment or this Plan restatement is [enter date] January 1, 2005,           .3.
    
    Plan Year. The Plan year of the Plan shall be [select one]:
 þ
    
    the calendar year.o
    
    the fiscal year or other 12- month period ending on the last
day of       [specify
month].o
    
    a short Plan year beginning on      ,       and ending on      ,       ; and
thereafter the Plan year shall be as indicated in (a) or (b) above.
 4.
    
    Plan Administrator. The Administrator of the Plan is the Employer or its designated agent.[fill in the name(s) of the individual(s) or job title(s) or entity (such as a
committee) that is (are) responsible for administration of the Plan], and such other
person(s) or entity as the Employer shall appoint from time to time.
 5.
    
    Eligible Individuals. The following shall be eligible to participate in the Plan: [select
all that apply  do not list individual names]:
 -2-




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þ
    
    A select group of management or highly-compensated Employees as designated by the
Employer in separate resolutions or agreements;þ
    
    Employee Board Members;þ
    
    Non-Employee Board Members;o
    
    Other Service Providers (i.e., independent contractors, consultants, etc.)o
    
    Employees or other Service Providers above the following Compensation threshold:
[enter dollar amount]$  ;o
    
    Employees with the following job titles: [enter job title(s); for example, Vice
President and above]o
    
    Other: [enter description]
 6.
    
    Eligibility Timing.Eligibility timing selected below shall apply uniformly to all
Participant Deferrals (including Performance-Based Bonus Deferrals), as well as Employer
Matching Contributions and Other Employer Contributions, unless otherwise indicated. If the
Employer wishes to provide for separate eligibility rules for different types of Compensation
(for example, Salary vs. Bonus), or for types of Contributions (for example, Employer Matching
Contributions vs. Participant Deferrals), mark Other below and attach exhibits as necessary
[select one]:
 þ
    
    Eligible immediately upon properly completed designation by the Plan administrator
or Employer;o
    
    Eligible after the following period of employment, Board service, etc. [enter number
of days, months or years, for example, 90 days] ;o
    
    Other [enter description]:
 7.
    
    Types and Amounts of Participant Deferrals [select all that apply and enter minimum and
maximum percentages in increments of one percent (for example, Salary minimum 0% maximum
100%). Note that no Deferral election can reduce a Participants Compensation below the
amount necessary to satisfy required withholding for FICA/Medicare/income taxes, required
Participant Contributions into another Employer-sponsored benefit plan such as medical
insurance,401(k)loan repayments, etc.]:
 -3-




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þ
    
    Salary [select one]:
 þ
    
    percentage [enter minimum 1%% and maximum 100%%]oro
    
    fixed dollar amount [enter minimum $___].
 þ
    
    Non-Performance-Based Bonus [select one]:
 o
    
    percentage [enter minimum 1%% and maximum 100%%]oro
    
    fixed dollar amount [enter minimum $].
 þ
    
    Performance-Based Bonus [select one and enter performance period (for example,
12-month period ending each March 31 ]: performance period from January 1  to December 31 each year.
 þ
    
    percentage [enter minimum 1%% and maximum 100%%]oro
    
    fixed dollar amount [enter minimum $].
 þ
    
    Commissions [select one]:
 þ
    
    percentage [enter minimum 1%% and, maximum 100%%]oro
    
    fixed dollar amount [enter minimum $].
 o
    
    Board of Directors Fees/Retainer (note  should not include expense reimbursements):
 o
    
    percentage [enter minimum% and, maximum%]oro
    
    fixed dollar amount [enter minimum $].
 o
    
    Other Service Provider Fees or other earned income from the Employer:
 o
    
    percentage [enter minimum% and, maximum%]oro
    
    fixed dollar amount [enter minimum $].
 o
    
    401(k) Refund (amount deferred from Participants regular Compensation equal in
value to any refund paid to Participant in that year resulting from excess deferrals
in Employers401(k)plan  see Subsection 2.9 of Plan document for definition.)Other [enter description]:
 8.
    
    Definition of Compensation for Purposes of Making Plan Contributions[select one]:
 -4-




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##### 



o
    
    Same definition of Compensation as in Employers 401(k) or other applicable
qualified retirement plan, earned while the Participant is an Eligible Individual,
as determined by the Employer.þ
    
    Participants total cash wages, salary, commissions, overtime, bonus, etc. for a
given year which the Employer is required to report on Form W-2 or other appropriate
form, (or, in the case of Board members, Board fees and retainer only, but not
including expense reimbursements)(or, in the case of Other Service Providers, the
Participants total cash remuneration from the Employer for a given year pursuant to
the agreement to provide services to the Employer), earned while the Participant is
an Eligible Individual as determined by the Employer.o
    
    Other [enter description]:
 9.
    
    Expiration of Participants Deferral Elections[select all that apply]:
 þ
    
    Renewed Each Year:Participants Deferral Elections must be renewed each year
during the open enrollment period ending no later than December 31 prior to the
effective Plan year (or, in the case of Performance-Based Bonuses, no less than 6
months prior to the end of the applicable performance period).
 þ
    
    For all types of Compensation Deferrals.o
    
    For Salary Deferrals only  other types of Deferrals are evergreen.o
    
    For Performance-Based Bonus only  other types of Deferrals are
evergreen.o
    
    Other: [specify]
 o
    
    Evergreen:Participants Deferral Elections will be evergreen (i.e., will
continue indefinitely until the Participants Termination Date unless changed by the
Participant  so each year the Participant will be deemed to have the same election
in place as the prior year unless actively changed by the Participant during the
open enrollment period ending no later than December 31 prior to the effective Plan
year or, in the case of Performance-Based Bonuses, no less than 6 months prior to
the end of the applicable performance period).
 o
    
    For all types of Compensation Deferrals.o
    
    For Salary Deferrals only  other types of Deferrals are renewed
each year.o
    
    For Performance-Based Bonus only  other types of Deferrals are
renewed each year.o
    
    Other: [specify]
 -5-




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10.
    
    Employer Contributions[select all that apply]:.
 þ
    
    (a) No Employer Contributions.o
    
    (b) Matching Contributions on all Participant Compensation Deferrals [also complete
Items 11 through 14 ].o
    
    (c) Matching Contributions on certain types of Compensation Deferrals (for example,
Matching Contributions on Participant Performance-Based Bonus Deferrals, etc.)
[attach explanation describing which types of deferrals will be matched and also
complete Items 11 through 14]o
    
    (d) Employer Contributions other than Matching Contributions [complete Item 15]
(amount or formula for determining and allocating such contributions should be
documented in writing when determined, and such writings will form part of the
Plan).
 11.
    
    Amount of Matching Contribution on Participant Compensation Deferrals. If the Employer has
specified in Item 10(b) or (c) that it will make Matching Contributions on behalf of
Participants based on their Compensation Deferrals, such Matching Contributions will be in an
amount determined as follows for the applicable period selected in Item 13 below: [Select
(a), (b), (c), (d) or (e) below  if Employer has indicated in10(c)above that Matching
Contributions will be made on certain types of Participant Compensation Deferrals and if
Employer wishes for different Matching formulas to be used for different types of Participant
Compensation Deferrals, Employer should attach additional copies of this Item 11 completed for
each type of Participant Compensation Deferral that is matched. ]
 o
    
    (a)  % of the Compensation Deferrals made by each
Participant during the applicable period.o
    
    (b) At a percentage determined from time to time in the discretion
of the Employer of each Participants Compensation Deferrals for the applicable
period (percentage should be documented in writing when determined, and such
writings will form part of the plan).[Optional: If 11(a) or (b) above is selected, the Employer may also specify here that it
will not match Compensation Deferrals in excess of $ or  % of
each Participants Compensation during the applicable period specify either a
dollar amount or a whole percentage. If no limit is entered here, the assumption is that
100% of the Participants Compensation Deferrals will be matched at the applicable
percentage.]o
    
    (c)  % of the portion of each Participants
Compensation Deferral Contributions during the applicable period which does not
exceed  % of the Participants Compensation for such period; plus
 % of the portion, if any, of each Participants Compensation
Deferral Contributions during the applicable period which exceeds  %
but does not exceed  % of the Participants Compensation for
such period.
 -6-




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[Note: Example for 11(c) above  select this option if Employer wants to match different
percentages and different levels of deferral  for example, 100% of the first 3% of
compensation deferred, and 50% of the next 2%]o
    
    (d) % of the Compensation of each Participant who made
Compensation Deferral Contributions during the applicable period of at least
% of Compensation.o
    
    (e) Other: [describe]
 12.
    
    Applicable Period for Matching Contributions. Employer Matching Contributions elected under
Item 10(b) or (c) shall be allocated and credited to eligible Participants Accounts as soon
as administratively feasible after the end of each Applicable Period after the amounts have
been determined by the Employer. For purposes of determining a Participants share of
Matching Contributions under Item 10, the Applicable Period shall be [Selectone]:
 o
    
    the Plan Year.o
    
    the payroll period.o
    
    other (specify calendar month, Plan year quarter, etc.) .
 13.
    
    Employees Eligible to Receive Employer Matching Contributions.Matching Contributions made
for each Plan Year (if applicable) shall be allocated and credited to the Accounts of the
following Participants: [Select one if applicable]
 o
    
    Participants who were employed by the Employer (or, in the case of non-Employee
Board Members, served on the Board) during that Plan Year, or, in the case of Other
Service Providers, who provided services to the Employer during that Plan Year.o
    
    Participants who were employed by the Employer (or, in the case of non-Employee
Board Members, served on the Board) on the last day of the Plan Year, or, in the
case of Other Service Providers, who provided services to the Employer on the last
day of the Plan Year.o
    
    Participants who were employed by the Employer (or, in the case of non-Employee
Board Members, served on the Board) on the last day of the Plan Year or who retired,
died or were Disabled during the Plan Year, or, in the case of Other Service
Providers, who provided services to the Employer on the last day of the Plan Year or
who died or were Disabled during the Plan Year. [If this option is selected,
complete Item 30  definition of Disability.]
 14.
    
    Vesting Schedule of Employer Matching Contributions.If Matching Contributions are made to the
Plan, select the rate at which such Contributions will vest [select one]:
 o
    
    Immediate 100% vesting for all Participants.o
    
    Cliff vesting (0% up to cliff; 100% after cliff) [select one]:
 -7-




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##### 



o 1 year cliff (less than 1 year 0%; 1 or more years 100%)o 2 year cliff (less than 2 years 0%; 2 or more years 100%)o Other cliff (enter number of years: less than  years  0%;
or more years 100%)o
    
    Graded vesting [enter vesting percentages]:1 year
 %
      6 years %       11 years %2 years
%
      7 years %       12 years %3 years
%
      8 years %       13 years %4 years
%
      9 years %       14 years %5 years
%
      10 years %     15 years %o
    
    Other vesting schedule: [describe schedule  subject to approval]
 15.
    
    Vesting Schedule of Employer Contributions (Other Than Matching Contributions).If Employer
Contributions (other than Matching Contributions) are made to the Plan, select the rate at
which such Contributions will vest [select one]:
 o
    
    Immediate 100% vesting for all Participants.o
    
    Cliff vesting (0%  up to cliff; 100% after cliff) [select one]:o 1 year cliff (less than 1 year 0%; 1 or more years 100%)o 2 year cliff (less than 2 years 0%; 2 or more years 100%)o Other cliff (enter number of years:less than        years 0%;        or more  years 100%)o
    
    Graded vesting  [enter vesting percentages]:1 year
 %
      6 years %       11 years %2 years
%
      7 years %       12 years %3 years
%
      8 years %       13 years %4 years
%
      9 years %       14 years %5 years
%
      10 years
%     15 years %o
    
    Other vesting schedule: [describe schedule  subject to approval]
 -8-




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##### 



16.
    
    Vesting Years. A Vesting Year described above for purposes of determining vesting under
the Plan shall be computed in accordance with: [select one  if this is an amendment or
restatement of a prior plan, definition from prior plan will override this definition.]
 o
    
    Years of service (12-consecutive-month periods) with the Employer since date of hire (or date of commencement of
Board service).o
    
    Years of participation in the Plan (12-consecutive-month period between date Participant enters Plan and anniversary
of such date) (if this is an amendment or restatement of a prior Plan, years of participation in prior plan will be
included) (additional fees will apply if this item is selected).o
    
    Plan Years since each Plan Years total Contributions were made (rolling vesting) (additional fees will apply if
this item is selected). [If this option is selected, select either (a) or (b) below:]o (a) Vesting will be credited/updated on the last day of the Plan year.o (b) Vesting will be credited/updated on the anniversary of the date the Contribution is credited.
 17.
    
    Full Vesting Upon Occurrence of Specific Event.[select all that apply]
 o
    
    100% vesting upon Normal Retirement [describe criteria such as age (can be partial year), years of service with the
Employer (must be whole years of service), or years of participation in the Plan (must be whole years of participation)]o
    
    100% vesting upon Early Retirement [describe criteria such as age (must be whole years), years of service with the
Employer (must be whole years of service), or years of participation in the Plan (must be whole years of participation)]o
    
    100% vesting upon Death.o
    
    100% vesting upon Disability [complete Item 30  definition of Disability].o
    
    100% vesting upon Change in Control of the Employer [complete Items 28 and29  definition of Change in Control]o
    
    100% vesting upon occurrence of other event: [describe event]
 18.
    
    Service Before Plans Establishment Excluded. Years of service earned prior to establishment
of the Plan shall be disregarded for purposes of determining vesting under the Plan:
 o
    
    Yes (this may be elected only if this is the establishment of a new Plan).
 No.
 -9-




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19.
    
    Forfeitures for Misconduct or Violation of Non-Compete. Participants terminating employment
prior to becoming 100% vested will forfeit the forfeitable percentage of their Accounts as
indicated in accordance with the vesting schedule selected in Items 14 and/or 15.
Participants may also forfeit 100% of their Matching and Employer Contribution Accounts (if
applicable) under the following circumstances: [select any that apply]:
 o
    
    Misconduct (termination for Cause). [if selected, the definition of Misconduct or Cause
should be documented in writing, and such writings will form part of the Plan]o
    
    Engaging in competition with the Employer. [if selected, the definition of engaging
in competition should be documented in writing, and such writing will form part of
the Plan]
 20.
    
    Employer Stock as Deemed Investment Option.If Employer stock will be a deemed investment
option, indicate below how shares are to be tracked: [select one]
 o
    
    Partial and whole shares.o
    
    Unitized fund.
 21.
    
    In-Service Distributions.If the Employer elects below, the Plan will allow distributions of
Participant Deferral Contributions to be made to Participants while they are still employed
(In-Service Distributions), if they elect a fixed distribution date during the regular
election period. [Selectone  note that In-Service Distributions of Employer
Contributions is not permitted]
 o
    
    No, In-Service Distributions will not be permitted.þ
    
    Yes, In-Service Distributions will be permitted. [select one ].þ For All Participant Deferral Contributionso For Participant Compensation Deferral Contributions (other than
Performance-Based Bonus) only.o For Participant Performance-Based Bonus Deferral Contributions.Please indicate the number of years a Participant must defer payment(s) until In-Service
Distribution(s) may begin:o 2 Years after the Calendar Year for which the deferral is effectiveþ 1  Year after the Calendar Year for which the deferral is
effectivePlease indicate if separate In-Service Distribution Dates are allowed for each Type of
Participant Deferral selected in Item 7:o No (single distribution date allowed per Plan Year)
 -10-




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þ Yes (requires additional tracked sources per Plan Year)[Note  if Yes is elected above and the Plan will allow In-Service Distributions, please
indicate if Participant will be permitted to make a pushback subsequent election to defer
the original distribution date at least five years in accordance with Plan provisions (see
subsection 9.1 of Plan document  note that election must be made 12 months prior to
original distribution date and election will not take effect for
12 months) þ Yes
o No ]
 22.
    
    Unforeseeable Emergency Distributions Dates.If the Employer elects below, the Plan will
allow distributions to be made to Participants while they are still employed if they meet the
criteria for an unforeseeable emergency financial hardship (Unforeseeable Emergency
Distributions). Both Participant Deferral Contributions and Vested Employer Contributions
can be distributed in the event of an eligible Unforeseeable Emergency Distribution event.
[Selectone]
 o
    
    No, Unforeseeable Emergency Distributions will not be permitted.þ
    
    Yes, Unforeseeable Emergency Distributions will be permitted. [select one below].o For active Participants only.o For active Participants, terminated Participants and Beneficiaries.
 23.
    
    Form of Distributions (at Termination of Employment or Death).Distributions will be made to
Participants upon Termination of Employment with the Employer or Death of the Participant as
follows [select one]
 o
    
    Lump sum only.þ
    
    Lump sum unless installments elected, but can only receive installments if
Participant meets the following criteria [select all that apply if item not
selected below, then Participants in that category will receive lump sum only]:þ Retirement [describe criteria such as age (can be partial year), years of
service with the Employer (must be whole years of service), or years of
participation in the Plan (must be whole years of participation)]Termination of employment on or after attainment of age fifty-five (55) and
completion of five (5) or more years of participation in the Plan.þ Early Retirement [describe criteria such as age (must be whole years), years of
service with the Employer (must be whole years of service), or years of
participation in the Plan (must be whole years of participation)]o Termination (other than for Misconduct, Cause or Violation of Non-Compete)o Lump sum unless installments elected, and Participant may receive installments
regardless of reason for Termination of Employment.
 -11-




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[Note  if Installments are elected above, please indicate if Participant will be permitted
to make a subsequent election to change the number of installments in accordance with Plan
provisions (see subsection 9.2 of Plan document) þ Yes o No ]
 24. Distribution Upon Disability.
 o
    
    No, distribution upon Disability will not be permitted.þ
    
    Yes, distributions upon Disability will be permitted. [complete Item 30 
definition of Disability].
 25.
    
    Expiration of Participants Distribution Elections[select one]:
 þ
    
    Renewed Each Year:Participants Distribution Election must be selected each year
during the open enrollment period for the following years contributions  if no new
election is made, that years contributions default to payment in the form of a lump
sum.o
    
    Evergreen:Participants Distribution Election will be evergreen (i.e., will
continue indefinitely for each years contributions until the Participants
Termination Date unless changed by the Participant  so each year the Participant
will be deemed to have the same distribution election in place as the prior year
unless actively changed by the Participant at open enrollment, and the change will
only be applicable to future contributions)
 26
    
    Distributions Upon Change in Control:If Employer elects below, distributions will be made
to Participants upon Change in Control of the Employer (without a termination of employment of
the Participant), as follows [select one, and complete Items 28 and 29 below (definition of
Change in Control) ]
 o
    
    No, Distributions upon Change in Control will not be permitted.þ
    
    Yes, Distributions upon Change in Control will be permitted, in a lump
sum only.o
    
    Yes, Distributions upon Change in Control will be permitted, in a lump
sum or in installments as elected by the Participant [complete Item
23].
 27.
    
    Length of Installments (if Installment Distributions permitted in Item 23 and/or Item 26
above)[indicate length below]:
 [enter minimum number of years
 must be at least 2] [enter
maximum number of years].
 -12-




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##### 



28.
    
    Change in Control  Dates of Distribution.Distributions upon a Change in Control shall
occur upon the date that [select all that apply  see Subsection 9.9 of the Plan document for
more details]:
 þ
    
    A person or group acquires more than 50% of the total fair market value
or voting power of the stock of the corporation (select definition of
corporation in Item 29 below).þ
    
    A person or group acquires ownership of stock of the corporation with
at least 35% of the total voting power of the corporation (select definition of
corporation in Item 29 below).þ
    
    A person or group acquires assets from the corporation having a total
fair market value of at least 40% of the value of all assets of the corporation
immediately prior to such acquisition. (select definition of corporation in
Item 29 below).þ
    
    A majority of the corporations board of directors is replaced during
any 12-month period by directors whose appointment or election is not endorsed
by a majority of the board as constituted prior to the appointment or election
(select definition of corporation in Item 29 below).
 29.
    
    Change in Control  Which Corporation the Change Relates.Distributions upon a Change in
Control shall be made only if the Change in Control relates to the corporation selected below:
[select all that apply]:
 þ
    
    (a) The corporation for whom the Participant is performing services at
the time of the Change In Control event.þ
    
    (b) The corporation liable for payments from the Plan to the
Participant.þ
    
    (c) A corporation that is a majority shareholder of a corporation
described in (a) or (b) above.þ
    
    (d) Any corporation in the chain of corporations in which each
corporation is a majority shareholder of another corporation in the chain,
ending in a corporation described in (a) or (b) above.
 -13-




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##### 



30.
    
    Definition of Disability. A Participant shall be considered Disabled if[select one]:
 o
    
    by reason of any medically determinable physical or mental impairment which can be
expected to result in death or can be expected to last for a continuous period of at
least 12 months, the Participant is receiving income replacement benefits for at
least 3 months under accident and health plans of the Employer;o
    
    the Participant is unable to engage in any substantial gainful activity by reason of
any medically determinable physical or mental impairment that can be expected to
result in death or can be expected to last for a continuous period of not less than
12 months;o
    
    the Participant is deemed to be totally disabled by the Social Security
Administration;þ
    
    the Participant is determined to be disabled in accordance with a disability
insurance program, provided that the definition of disability under such disability
insurance program complies with the requirements of one of the three preceding
definitions above.
 31.
    
    Distributions to Key Employees  Investment.In order to comply with Internal Revenue
Code Section 409A, distributions to key employees (see subsection 9.3 of the Plan Document
for definition) of publicly traded companies made due to employment termination cannot be made
within 6 months of the employment termination date. If distribution to a key employee must be
delayed to comply with this 6-month rule, indicate below how Account balances of such a
Participant will be invested during the period of delay [select one]:
 o
    
    Valued as of most recent Valuation Date and held at the Employer without allocation
of additional gains or losses after such Valuation Date until payment can be made.þ
    
    Remain invested as if termination date had not occurred, then valued as of most
recent Valuation Date and distributed.
 32.
    
    QDRO Distributions.The Employer may elect whether distributions from a Participants
Account shall be permitted upon receipt by the Plan Administrator of a Qualified Domestic
Relations Order relating to a marital dissolution or separation that provides for payment of
all or a portion of a Participants Accounts to an alternate payee (spouse, former spouse,
children, etc.). [Indicate below whether QDRO distributions will be permitted]:
 o
    
    No, QDRO Distributions will not be permitted.þ
    
    Yes, QDRO Distributions will be permitted.
 33.
    
    Additional Survivor Death Benefit from Life Insurance.In the event that life insurance is
utilized as a funding vehicle for the Plan, the Employer may wish to provide additional
Survivor Benefit from the following options : [select one]
 -14-




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##### 



o
    
    No additional Survivor Benefit offered, but rather Participants vested Account
balance..o
    
    Face value of life insurance policy of Participant, if any.o
    
    Greater of (a) face value of life insurance policy of Participant, if any, or (b)
Participants vested Account balance.þ
    
    Other: [enter amount or formula] The greater of the Participants account balance or
$300,000.00.
 34.
    
    Payment of Plan Expenses.Plan expenses may be paid as follows: [select one]
 þ
    
    Directly by the Employer.o
    
    Deducted from the Participant accounts and Plans trust or other custodial account (mutual fund plans only, if
applicable).
 De Minimis Small Amount Cashouts. [ select one]
 þ
    
    Yes, amounts that do not exceed a threshold dollar amount will automatically be
cashed out [enter dollar amount, not to exceed the IRS402(g)limit for a given
year ($15,500 for 2007 and 2008) [enter amount] $402(g)limit each yearo
    
    No, no de minimis small amounts will be cashed out.
 Distribution Upon Death
    -15-




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ULTRATECH, INC.EmployerBy
    
    /s/ Bruce WrightIts
    
    Chief Financial Officer
 -16-