<TABLE> <S> <C>

<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM ULTRATECH
STEPPER INC., FORM 10-Q  AND IS QUALIFIED IN ITS ENTIRETY BY REFERENCE TO SUCH
FINANCIAL STATEMENTS.
</LEGEND>
<RESTATED> 
<MULTIPLIER> 1,000
       
<S>                             <C>                     <C>                     <C>
<PERIOD-TYPE>                   3-MOS                   3-MOS                   3-MOS
<FISCAL-YEAR-END>                          DEC-31-1997             DEC-31-1997             DEC-31-1997
<PERIOD-START>                             JAN-01-1997             APR-01-1997             JUL-01-1997
<PERIOD-END>                               MAR-31-1997             JUN-30-1997             SEP-30-1997
<CASH>                                          30,156                  48,294                  35,625
<SECURITIES>                                   136,080                 121,838                 128,703
<RECEIVABLES>                                   42,770                  42,553                  43,412
<ALLOWANCES>                                     1,176                   1,706                   1,706
<INVENTORY>                                     32,580                  30,757                  32,014
<CURRENT-ASSETS>                               251,939                 255,174                 253,293
<PP&E>                                          28,828                  30,460                  32,982
<DEPRECIATION>                                  10,769                  11,878                  13,369
<TOTAL-ASSETS>                                 282,605                 290,168                 296,332
<CURRENT-LIABILITIES>                           36,569                  37,542                  34,519
<BONDS>                                              0                       0                       0
<PREFERRED-MANDATORY>                                0                       0                       0
<PREFERRED>                                          0                       0                       0
<COMMON>                                            20                      20                      20
<OTHER-SE>                                     244,789                 251,487                 260,736
<TOTAL-LIABILITY-AND-EQUITY>                   282,605                 290,168                 296,332
<SALES>                                         36,251                  35,617                  33,827
<TOTAL-REVENUES>                                38,733                  38,054                  36,752
<CGS>                                           16,008                  16,507                  15,850
<TOTAL-COSTS>                                   17,700                  18,075                  17,524
<OTHER-EXPENSES>                                 9,839                   6,793                   7,092
<LOSS-PROVISION>                                    25                     980                       0
<INTEREST-EXPENSE>                                  42                      43                      58
<INCOME-PRETAX>                                  6,570                   8,299                   7,510
<INCOME-TAX>                                     2,037                   2,572                   2,105
<INCOME-CONTINUING>                              4,533                   5,727                   5,405
<DISCONTINUED>                                       0                       0                       0
<EXTRAORDINARY>                                      0                       0                       0
<CHANGES>                                            0                       0                       0
<NET-INCOME>                                     4,533                   5,727                   5,405
<EPS-PRIMARY>                                     0.22                    0.28                    0.26
<EPS-DILUTED>                                     0.21                    0.27                    0.25
        

</TABLE>