<PAGE>

                                                                   EXHIBIT 10.44

CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY BRACKETS,
HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

                     PATENT ASSIGNMENT AND CROSS-LICENSE AND
                           TRADEMARK LICENSE AGREEMENT

         This Patent Assignment and Cross-License and Trademark License
Agreement ("Agreement") is entered into as of February 11, 2003 ("Effective
Date") by and between the Parties,

                  Entegris, Inc., a Minnesota corporation having corporate
         offices at 3500 Lyman Boulevard, Chaska, Minnesota 55318 ("Entegris"),
         and

                  Entegris Cayman Ltd., a Cayman Island corporation and
         wholly-owned subsidiary of Entegris, Inc. ("Entegris Cayman"), and

                  Asyst Technologies, Inc., a California corporation having a
         principal place of business at 48761 Kato Road, Fremont, California
         94538 ("Asyst").

         WHEREAS, Asyst is the owner of patents relating to wafer and/or reticle
containers, including SMIF Pods and Front Opening Unified Pods ("FOUPs"), load
ports for interfacing with wafer and/or reticle containers ("Ports"), material
handling systems for transporting, storing, delivering and loading SMIF Pods,
FOUPs and individual wafers, and systems used to track, identify, manage,
control and route lots, carriers, wafers and/or reticles during the manufacture
of semiconductor devices ("Tracking Systems").

         WHEREAS, Entegris and Entegris Cayman are the owners of patents
relating to wafer and/or reticle carriers and containers, Ports, and/or Tracking
Systems.

         WHEREAS, Entegris, Entegris Cayman, and Asyst are parties to that
certain Asset Purchase Agreement, dated as of February 11, 2003 (the "Asset
Purchase Agreement") under which the Parties have agreed to transfer and to
license certain patents relating to wafer and/or reticle containers, Ports,
material handling systems and/or Tracking Systems.

         In consideration of the above, Entegris, Entegris Cayman, and Asyst
agree as follows:

                                A R T I C L E 1

                                   DEFINITIONS

         1.1      "POD AND CARRIER PATENTS" means United States and foreign
patents issued on or before the seventh anniversary of the Effective Date having
claims directed to sealable, transportable containers, wafer and/or reticle
carriers and containers, or components of wafer and/or reticle carriers and
containers, including, but not limited to, the patents identified in Exhibit I
to this Agreement. By way of example, components of wafer and/or reticle
carriers and containers may include, without limitation, purging components,
valves, manifolds, filters, cartridges, sensors embedded in or residing in the
interior of wafer and/or reticle carriers and

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[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

containers, and vapor drains. Pod and Carrier Patents do not include Combined
Pod and Port Patents, Environmental Control Patents, MHS Patents, or AutoID/Lot
Tracking Patents as defined below.

         1.2      "COMBINED POD AND PORT PATENTS" means United States and
foreign patents issued on or before the seventh anniversary of the Effective
Date having claims directed to (a) the combined structure of a wafer or reticle
container and a Port or (b) the operation of a wafer or reticle container and a
Port, including, but not limited to, the patents identified in Exhibit II to
this Agreement.

         1.3      "PORT PATENTS" means United States and foreign patents issued
on or before the seventh anniversary of the Effective Date having claims
directed to the structure and/or operation of a Port.

         1.4      "MHS PATENTS" means United States and foreign patents issued
on or before the seventh anniversary of the Effective Date having claims
directed to the structure and/or operation of a material handling system for
transporting, storing, delivering and/or loading wafer and/or reticle containers
or individual wafers in the manufacture of semiconductor devices, or components
of such a system.

         1.5      "ENVIRONMENTAL CONTROL PATENTS" means United States and
foreign patents issued on or before the seventh anniversary of the Effective
Date having claims directed to environmental control features of Ports for
controlling the environment inside of wafer and/or reticle containers, including
purging systems, including, but not limited to, the patents identified in
Exhibit III to this Agreement; provided, however, that Environmental Control
Patents do not include patents with claims principally directed to environmental
control features within wafer and/or reticle containers.

         1.6      "AUTOID/LOT TRACKING PATENTS" means United States and foreign
patents issued on or before the seventh anniversary of the Effective Date having
claims principally directed to systems or components of systems used to track,
identify, manage, control and route lots, carriers, wafers and/or reticles
during the manufacture of semiconductors or semiconductor wafers, including, but
not limited to, the patents identified in Exhibit IV to this Agreement.

         1.7      "LICENSED PATENTS" means Pod and Carrier Patents, Port
Patents, Combined Pod and Port Patents, MHS Patents, Environmental Control
Patents, and AutoID/Lot Tracking Patents.

         1.8      "EXCLUSIVE RIGHTS PATENTS" means the Patents and Applications
identified in Schedules 1b and 1c of Exhibit I to this Agreement and all foreign
equivalents and counterparts, divisions, continuations, continuations-in-part,
reexaminations, and reissues of such Patents and Applications.

         1.9      "ACQUIRED PRODUCTS" means sealable transportable containers
made primarily of plastic, wafer and/or reticle carriers and containers
specifically adapted for use in the manufacture, storage, transport of
semiconductor wafers and plastic flat panel carriers and

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[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>


containers specifically adapted for use in the manufacture, storage, and
transport of flat panel displays.

         1.10     "RETICLE POD" means containers for holding reticles comprising
a base, a machine operable latch mechanism, a top cover, and a seal. Reticle
Pod does not include containers used solely for shipment of reticles between
facilities.

         1.11     "NON-PLASTIC FLAT PANEL DISPLAY PRODUCTS" means non-plastic
carriers and containers specifically adapted for use in the manufacture, storage
and transport of flat panel displays.

         1.12     "LICENSED TRADEMARKS" means the marks ASYST(R),
A SYST(R), and A(R).

         1.13     "SUBSIDIARIES" means any corporation, company or other legal
entity, in which more than fifty percent (50%) of the shares entitled to vote
for the election of directors or persons performing similar functions are, now
or hereafter, owned or controlled, directly or indirectly by a Party hereto, or
jointly by the Parties hereto; provided, however, that any corporation, company
or other legal entity shall be a Subsidiary only for as long as such ownership
or control exists.

         1.14     "THIRD PARTY" means any person or entity other than Asyst,
Entegris, Entegris Cayman, Asyst's Subsidiaries, and Entegris' Subsidiaries.

         Unless otherwise defined herein all capitalized terms shall have the
same meaning and effect as set forth in the Asset Purchase Agreement.

                                A R T I C L E 2

                      PATENT ASSIGNMENT AND LICENSE GRANTS

         2.1      Asyst hereby sells, assigns, transfers and otherwise conveys
to Entegris Cayman the entire right, title and interest in and to the specific
Patents and Applications identified in Exhibit I and any foreign counterparts,
and all other patents or applications that now or in the future claim priority
to any Patent or Application identified in Exhibit I.

                  2.1.1    Asyst shall execute assignments in the form of
         Exhibit V to this Agreement and Asyst shall execute any and all other
         documents necessary and sufficient to permit Entegris Cayman to effect
         the transfer of all right, title and interest in the Patents of Exhibit
         I to Entegris Cayman and to record the assignment of the Patents or
         Applications identified in Exhibit I to Entegris Cayman in the United
         States Patent and Trademark Office and in the Patent Offices of other
         relevant jurisdictions.

                  2.1.2    Notwithstanding the provisions of Articles 2.1 and
         2.1.1, Asyst shall sell, assign, transfer and otherwise convey only
         Asyst's undivided fifty percent ownership of the right, title and
         interest in Application USSN 10/161,436 identified in Schedule 1c of
         Exhibit I.

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[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

         2.2      Entegris and Entegris Cayman grant to Asyst and Asyst's
Subsidiaries a world-wide, fully-paid, exclusive, non-transferable (except as
provided in Article 7.2) license, including the right to grant sublicenses,
under all Exclusive Rights Patents owned or licensable by Entegris Cayman or
Entegris to make, have made, use, sell, offer to sell, import, export, and
otherwise dispose of, anywhere in the world, all products except Acquired
Products.

                  2.2.1    Asyst, as exclusive licensee for all products except
         Acquired Products, shall have the power to institute and prosecute, at
         Asyst's own expense, suits for infringement of the Exclusive Rights
         Patents by any products except Acquired Products, and, if required by
         law, Entegris Cayman and/or Entegris will join as party plaintiff in
         such suits.

                  2.2.2    All expenses in such suits, including Entegris
         Cayman's and Entegris' attorneys' fees, will be paid entirely by Asyst.

                  2.2.3    Asyst shall have the sole right to collect all
         damages, profits and awards of any nature resulting from such suits.

                  2.2.4    Asyst is empowered to settle any claim or suit for
         infringement of the Exclusive Rights Patents by any products except
         Acquired Products by granting the infringing party a sublicense.

                  2.2.5    Asyst, Entegris Cayman and Entegris shall reasonably
         assist and cooperate with one another with regard to litigation
         procedures such as producing documents, making inventors available for
         deposition, and providing information at the other's reasonable
         request.

         2.3      Asyst grants to Entegris Cayman a world-wide, royalty-bearing,
exclusive, non-transferable (except as provided in Article 7.2) license,
including the right to grant sublicenses, under all Combined Pod and Port
Patents owned or licensable by Asyst to make, have made, use, sell, offer to
sell, import, export, and otherwise dispose of, anywhere in the world, Acquired
Products.

                  2.3.1    Entegris Cayman, as exclusive licensee for Acquired
         Products, shall have the power to institute and prosecute, at Entegris
         Cayman's own expense, suits for infringement of the Combined Pod and
         Port Patents by Acquired Products, and, if required by law, Asyst will
         join as party plaintiff in such suits.

                  2.3.2    All expenses in such suits, including Asyst's
         attorneys' fees, will be paid entirely by Entegris Cayman.

                  2.3.3    Entegris Cayman shall have the sole right to collect
         all damages, profits and awards of any nature resulting from such
         suits.

                  2.3.4    Entegris Cayman is empowered to settle any claim or
         suit for infringement of the Combined Pod and Port Patents by Acquired
         Products by granting the infringing party a sublicense.

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[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

                  2.3.5    Asyst, Entegris Cayman, and Entegris shall reasonably
         assist and cooperate with one another with regard to litigation
         procedures such as producing documents, making inventors available for
         deposition, and providing information at the other's reasonable
         request.

         2.4      Entegris Cayman and Entegris grant to Asyst and Asyst's
Subsidiaries a worldwide, fully-paid, nonexclusive, nontransferable (except as
provided in Article 7.2) license under Pod and Carrier Patents owned or
licensable by Entegris Cayman or Entegris to (a) conduct development, research,
testing, or demonstration of Acquired Products, provided that Asyst does not
transfer Acquired Products to third parties for purposes other than development,
research, testing, or demonstration, and (b) to make, have made, use, sell,
offer to sell, import, export, and otherwise dispose of, anywhere in the world,
Non-Plastic Flat Panel Display Products.

         2.5      Entegris Cayman and Entegris grant to Asyst and Asyst's
Subsidiaries a world-wide, fully-paid, non-exclusive, non-transferable (except
as provided in Article 7.2) license under all Port Patents, MHS Patents,
Environmental Control Patents, and AutoID/Lot Tracking Patents owned or
licensable by Entegris Cayman or Entegris to make, have made, use, sell, offer
to sell, import, export, and otherwise dispose of, anywhere in the world, all
products except Acquired Products.

         2.6      Asyst grants to Entegris Cayman a world-wide, royalty-bearing,
non-exclusive, non-transferable (except as provided in Article 7.2) license
under Pod and Carrier Patents, MHS Patents, Environmental Control Patents, and
AutoID/Lot Tracking Patents owned or licensable by Asyst to make, have made,
use, sell, offer to sell, import, export, and otherwise dispose of, anywhere in
the world, Acquired Products.

         2.7      The licenses granted in this Article 2 shall extend for the
life of the Licensed Patents and the Exclusive Rights Patents.

         2.8      The rights and licenses granted under Articles 2.4, 2.5, and
2.6 of this Agreement exclude the right to grant sublicenses.

         2.9      No right or license is granted by Asyst to Entegris Cayman or
Entegris or by Entegris Cayman or Entegris to Asyst under this Agreement, by
implication or by estoppel, or otherwise to any patents, inventions, patent
application, know-how, technology, trademark, copyright, trade secret, or other
property right, other than the rights and licenses expressly granted in Article
2 of this Agreement.

                                A R T I C L E 3

                                   WARRANTIES

         3.1      Asyst represents and warrants that Asyst has the full right,
power, and authority to enter into and perform its obligations under this
Agreement and grant to Entegris Cayman and Entegris the licenses and other
rights as set forth herein, and there are no outstanding

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[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

agreements, grants, licenses, encumbrances, liens, or agreements, either written
or implied, inconsistent therewith or pursuant to which this Agreement or the
parties' performance hereunder would violate, breach, or cause a default.

         3.2      The execution, delivery, and performance of this Agreement
have been duly authorized by all necessary corporate actions on the part of
Asyst.

         3.3      Entegris Cayman represents and warrants that Entegris Cayman
has the full right, power, and authority to enter into and perform Entegris
Cayman's obligations under this Agreement, and there are no outstanding
agreements, grants, licenses, encumbrances, liens, or agreements, either written
or implied, inconsistent therewith or pursuant to which this Agreement or the
parties' performance hereunder would violate, breach, or cause a default.

         3.4      The execution, delivery, and performance of this Agreement
have been duly authorized by all necessary corporate actions on the part of
Entegris Cayman.

         3.5      Entegris represents and warrants that Entegris has the full
right, power, and authority to enter into and perform Entegris's obligations
under this Agreement, and there are no outstanding agreements, grants, licenses,
encumbrances, liens, or agreements, either written or implied, inconsistent
therewith or pursuant to which this Agreement or the parties' performance
hereunder would violate, breach, or cause a default.

         3.6      The execution, delivery, and performance of this Agreement
have been duly authorized by all necessary corporate actions on the part of
Entegris.

         3.7      DISCLAIMER OF WARRANTIES. EXCEPT AS EXPRESSLY SET FORTH
HEREIN, EACH PARTY EXPRESSLY DISCLAIMS, TO THE EXTENT ALLOWED BY APPLICABLE LAW,
ANY AND ALL WARRANTIES OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING WITHOUT
LIMITATION THE WARRANTIES OF DESIGN, MERCHANTABILITY, FITNESS FOR A PARTICULAR
PURPOSE (EVEN IF INFORMED OF SUCH PURPOSE), NONINFRINGEMENT OF THE INTELLECTUAL
PROPERTY RIGHTS OF THIRD PARTIES, OR ARISING FROM A COURSE OF DEALING, USAGE OR
TRADE PRACTICES, IN ALL CASES WITH RESPECT THERETO.

         3.8      Nothing in this Agreement shall be construed as:

                  3.8.1    a representation or warranty by Asyst or Entegris
         Cayman or Entegris of the validity, enforceability or scope of any of
         the Licensed Patents; or

                  3.8.2    a requirement that Asyst or Entegris Cayman or
         Entegris shall file any patent application or secure any patent, except
         that Asyst will maintain all applications being transferred to Entegris
         Cayman until said files are physically transferred; or

                  3.8.3    a representation or warranty that any product made,
         used, sold, or otherwise disposed of by Asyst or Entegris Cayman or
         Entegris is free from infringement of patents of Third Parties.

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[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

         3.9      Asyst agrees that if Asyst intends not to maintain any
Licensed Patents owned by Asyst, Asyst will provide Entegris Cayman reasonable
notice of at least 45 days of said intention not to pay said maintenance fees or
annuities and Asyst will offer to transfer any of such patents to Entegris
Cayman for sole consideration of Entegris Cayman paying said maintenance fee or
annuity. Entegris Cayman will then provide a nonexclusive license back to Asyst
to make, use and sell products covered by any of said patents.

         3.10     Asyst will not in the future disparage the patents of Exhibit
I.

         3.11     Entegris Cayman agrees that if Entegris Cayman intends not to
maintain any Combined Pod and Port Patents, Port Patents, Environmental Control
Patents, or Auto ID/Lot Tracking Patents owned by Entegris Cayman, Entegris
Cayman will provide Asyst reasonable notice of at least 45 days of said
intention not to pay said maintenance fees or annuities and Entegris Cayman will
offer to transfer any of such patents to Asyst for sole consideration of Asyst
paying said maintenance fee or annuity. Asyst will then provide a nonexclusive
license back to Entegris Cayman to make, use and sell products covered by any of
said patents.

         3.12     Entegris agrees that if Entegris intends not to maintain any
Combined Pod and Port Patents, Port Patents, Environmental Control Patents, or
Auto ID/Lot Tracking Patents owned by Entegris, Entegris will provide Asyst
reasonable notice of at least 45 days of said intention not to pay said
maintenance fees or annuities and Entegris will offer to transfer any of such
patents to Asyst for sole consideration of Asyst paying said maintenance fee or
annuity. Asyst will then provide a nonexclusive license back to Entegris and
Entegris Cayman to make, use and sell products covered by any of said patents.

         3.13     Asyst warrants that Asyst has disclosed to Entegris all other
licenses and all pending litigation involving Pod and Carrier Patents, Combined
Pod and Port Patents, Environmental Control Patents, and Auto ID/Lot Tracking
Patents owned by Asyst.

         3.14     Entegris warrants that Entegris has disclosed to Asyst all
other licenses and all pending litigation involving Pod and Carrier Patents,
Combined Pod and Port Patents, Environmental Control Patents, and Auto ID/Lot
Tracking Patents owned by Entegris.

                                A R T I C L E 4

                                    ROYALTIES

         4.1      See Exhibit VI.

         4.2      Entegris hereby guarantees the payment of the royalties due by
Entegris Cayman under this agreement.

                                A R T I C L E 5

                           TRADEMARK LICENSE AGREEMENT

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[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

         5.1      Asyst grants Entegris Cayman a royalty-bearing, non-exclusive,
non-transferable (except as provided in Article 7.2) license under the Licensed
Trademarks to use the Licensed Trademarks in conjunction with marketing and
selling Acquired Products.

                  5.1.1    Use of the Licensed Trademarks by Entegris Cayman
         shall inure to the benefit of Asyst.

                  5.1.2    Entegris Cayman shall use the Licensed Trademarks in
         a form which is in accordance with sound trademark practice so as not
         to weaken the value of the Licensed Trademarks.

                  5.1.3    Entegris Cayman shall not engage in any act or
         omission which may diminish or impair the goodwill or reputation
         associated with the Licensed Trademarks.

         5.2      TRADEMARK QUALITY CONTROL.

                  5.2.1    In order to promote the goodwill symbolized by each
         of the Licensed Trademarks, Entegris Cayman will insure that the goods
         with which the Licensed Trademarks are associated are continuously of
         the same high quality as the goods marketed under the Licensed
         Trademarks by Asyst.

                  5.2.2    All uses of the Licensed Trademarks on Acquired
         Products and packaging for Acquired Products shall be approved by Asyst
         prior to use; provided, however, that such approval shall not be
         unreasonably withheld.

                  5.2.3    Upon reasonable notice from Asyst that the standards
         specified in Article 5.1 are not satisfied or discovery by Entegris
         Cayman or Entegris that the standards specified in Article 5.1 are not
         satisfied, Asyst shall have the right to inspect the Acquired Products
         manufactured by Entegris Cayman or Entegris, and the methods of
         manufacture of the Acquired Products on the premises of Entegris Cayman
         or Entegris, on the premises of third-party manufacturers, and
         elsewhere, as part of appropriate quality control.

                  5.2.4    Entegris Cayman shall, when requested by Asyst, make
         available to Asyst, at a time and place mutually agreed upon by
         Entegris Cayman and Asyst, a sample of each Acquired Product marketed
         by Entegris Cayman in association with the Licensed Trademarks at the
         time of such a request for the purpose of inspecting the Acquired
         Products.

                  5.2.5    Upon notice from Asyst or discovery by Entegris
         Cayman that the standards specified in Article 5.1 are not satisfied,
         Entegris Cayman shall, at Entegris Caymans' expense, promptly take any
         corrective action or destroy any Acquired Product or the packaging for
         any Acquired Product that does not satisfy the standards of Article
         5.1.

                  5.2.6    In order to promote the goodwill symbolized by each
         of the Licensed Trademarks, Entegris will insure that the goods with
         which the Licensed Trademarks are

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BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

         associated are continuously of the same high quality as the goods
         marketed under the Licensed Trademarks by Asyst.

                  5.2.7    Entegris shall, when requested by Asyst, make
         available to Asyst, at a time and place mutually agreed upon by
         Entegris and Asyst, a sample of each Acquired Product marketed by
         Entegris in association with the Licensed Trademarks at the time of
         such a request for the purpose of inspecting the Acquired Products.

                  5.2.8    Upon notice from Asyst or discovery by Entegris that
         the standards specified in Article 5.1 are not satisfied, Entegris
         shall, at Entegris' expense, promptly take any corrective action or
         destroy any Acquired Product or the packaging for any Acquired Product
         that does not satisfy the standards of Article 5.1.

                                A R T I C L E 6

                                ENTIRE AGREEMENT

         6.1      This Agreement along with the Exhibits to this Agreement and
the Asset Purchase Agreement constitute the entire agreement and understanding
of Asyst, Entegris Cayman, and Entegris and supersedes all prior understandings
and representations (oral or written) between the parties with respect to the
subject matter hereof. Neither this Agreement nor any subsequent agreement
amending, supplementing, or terminating this Agreement shall be binding on the
parties unless and until it has been signed by duly authorized representatives
of the Parties.

                                A R T I C L E 7

                                  MISCELLANEOUS

         7.1      DISPUTE RESOLUTION. The dispute resolution procedures of the
Asset Purchase Agreement are applicable to all disputes arising under this
Assignment.

         7.2      TRANSFERABILITY.

                  7.2.1    Entegris shall not transfer this Agreement or the
         licenses and rights granted to Entegris under this Agreement to any
         third party, by agreement, assignment, merger, asset sale,
         consolidation, operation of law, or otherwise, without the prior
         written consent of Asyst; provided, however, that Entegris may transfer
         this Agreement to a successor in ownership of all or substantially all
         of the assets of Entegris, if the successor expressly assumes in
         writing Entegris' obligations under this Agreement.

                  7.2.2    Entegris Cayman shall not transfer (a) any of the
         patents and applications assigned from Asyst to Entegris Cayman, or (b)
         this Agreement, or (c) any licenses or rights granted to Entegris
         Cayman under this Agreement to any Third Party, by agreement,
         assignment, merger, asset sale, consolidation, operation of law, or
         otherwise, without the prior written consent of Asyst; provided,
         however, that Entegris Cayman may

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[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

         transfer (a) the patents and applications assigned from Asyst to
         Entegris Cayman, or (b) this Agreement, or (c) any licenses or rights
         granted to Entegris Cayman under this Agreement to Entegris or a
         Subsidiary of Entegris, if Entegris or the Subsidiary expressly assumes
         in writing Entegris Cayman's obligations under this Agreement.

                  7.2.3    Entegris shall not permit any Entegris Subsidiary to
         transfer (a) any of the patents and applications assigned from Asyst to
         Entegris Cayman, or (b) this Agreement, or (c) any licenses or rights
         granted to Entegris Cayman under this Agreement to any Third Party, by
         agreement, assignment, merger, asset sale, consolidation, operation of
         law, or otherwise, without the prior written consent of Asyst;
         provided, however, that Entegris Subsidiaries may transfer (a) the
         patents and applications assigned from Asyst to Entegris Cayman, or (b)
         this Agreement, or (c) any licenses or rights granted to under this
         Agreement to Entegris or a Subsidiary of Entegris, if Entegris or the
         Subsidiary expressly assumes in writing the obligations under this
         Agreement.

                  7.2.4    Asyst shall not transfer this Agreement or the
         licenses and rights granted to Asyst under this Agreement to any third
         party, by agreement, assignment, merger, asset sale, consolidation,
         operation of law, or otherwise, without the prior written consent of
         Entegris; provided, however, that Asyst may transfer this Agreement to
         a successor in ownership of all or substantially all of the assets of
         Asyst, if the successor expressly assumes in writing Asyst's
         obligations under this Agreement.

         7.3      GUARANTEE. Entegris guarantees the performance and obligations
of Entegris Cayman under this agreement.

         7.4      CONFIDENTIALITY. The terms of this Agreement are deemed
confidential and shall not be disclosed to third parties or publicly unless
authorized in writing by all parties; except upon written agreement of the
parties or by operation of law or as required by SEC regulations. Any
information disclosed to one of the parties during the transfer and licensing of
the patents identified herein may be designated in writing by any party to be
confidential and where there is such designation said information will not be
publicly disclosed or disclosed to third parties except upon written agreement
of the parties or by operation of law or as required by SEC regulations.

         7.5      NO STRICT CONSTRUCTION. The normal rule of construction to the
effect that any ambiguities are to be resolved against the drafting Party shall
not be employed in the interpretation of this Agreement. Unless the context
clearly requires a different interpretation, words denoting the singular will
include the plural and vice versa; words denoting any gender will include all
genders; words denoting persons will include corporations, partnerships, joint
ventures, proprietorships and other business entities.

         7.6      CHOICE OF LAW. This Agreement shall be construed under, and
interpreted in accordance with, the laws of the State of Minnesota.

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 10 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

                  [REMAINDER OF PAGE INTENTIONALLY LEFT BLANK]

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 11 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

         7.7      EXECUTION. This Agreement may be executed in counterparts by
the Parties, each of which shall be deemed an original, and which together shall
constitute one and the same instrument, having the same force and effect as if a
single original had been executed by all the Parties.

IN WITNESS THEREOF, each of the Parties has caused this Agreement to be executed
by its duly authorized representative.

Dated: February 11, 2003           Asyst Technologies, Inc.

                                   By: /s/ Geoffrey Ribar
                                       ----------------------------
                                   Name: Geoffrey Ribar
                                   Title: Senior Vice President and
                                          Chief Financial Officer

Dated: February 11, 2003           Entegris Cayman Ltd.

                                   By: /s/ John D. Villas
                                       ----------------------------
                                   Name: John D. Villas
                                   Title: Director

Dated: February 11, 2003           Entegris, Inc.

                                   By: /s/ Michael Wright
                                       -----------------------------
                                   Name: Michael Wright
                                   Title: Chief Operating Officer

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 12 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

                                    EXHIBIT I

SCHEDULE Ia

<TABLE>
<CAPTION>
------------------------------------------------------------------------------------------------------
PATENT
NUMBERS                              TITLE                                      ISSUE DATE/FILING DATE
------------------------------------------------------------------------------------------------------
<S>            <C>                                                              <C>
4,739,882      Container Having Disposable Liner                                    April 26, 1988
------------------------------------------------------------------------------------------------------
4,815,912      Box Door Actuated Retainer                                           March 28, 1989
               - Corresponding Patents in EP, DE, JP
------------------------------------------------------------------------------------------------------
4,995,430      Sealable Transportable Container Latch Mechanism                     February 26, 1991
               - Corresponding Patents in EP, DE, JP, SG, TW
------------------------------------------------------------------------------------------------------
5,469,963      Sealable Transportable Container Improved Liner                      November 28, 1995
               - Corresponding Patent in TW
------------------------------------------------------------------------------------------------------
5,611,452      Sealable Transportable Container Improved Liner                      March 18, 1997
------------------------------------------------------------------------------------------------------
6,042,651      Molecular Contamination Control System                               March 28, 2000
------------------------------------------------------------------------------------------------------
6,216,873      SMIF Container Including a Reticle Support Structure                 April 17, 2001
               - Foreign application pending in TW
------------------------------------------------------------------------------------------------------
6,221,163      Molecular Contamination Control System                               April 24, 2001
------------------------------------------------------------------------------------------------------
6,223,396      Pivoting Side Handles                                                May 1, 2001
------------------------------------------------------------------------------------------------------
6,319,297      Modular SMIF Pod Breather, Adsorbent, and Purge Cartridges           November 20, 2001
------------------------------------------------------------------------------------------------------
6,368,411      Molecular Contamination Control System                               April 9, 2002
------------------------------------------------------------------------------------------------------
6,398,032      SMIF Pod Including Independently Support Wafer Cassette              June 4, 2002
               - Foreign applications pending in EP, HK, JP, KR
------------------------------------------------------------------------------------------------------
               SMIF Container Including an Electrostatic Dissipative Reticle
6,513,654      Support Structure                                                    February 4, 2003
               - Corresponding PCT Application pending
------------------------------------------------------------------------------------------------------
USSN           System for Preventing Improper Insertion of FOUP Door                December 13, 2001
10/020,761     Into FOUP
------------------------------------------------------------------------------------------------------
</TABLE>

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 13 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

                              EXHIBIT I, CONTINUED

SCHEDULE Ib

<TABLE>
--------------------------------------------------------------------------------------------------
<S>            <C>                                                              <C>
5,740,845      Sealable Transportable Container Having Breather Assembly        April 2, 1998
--------------------------------------------------------------------------------------------------
5,785,186      Substrate Housing and Docketing System                           July 28, 1998
               - Corresponding Patents in EP, CN, AU, JP
--------------------------------------------------------------------------------------------------
5,810,062      Two Stage Valve for Charging and/or Vacuum Relief of Pods        September 22, 1998
--------------------------------------------------------------------------------------------------
5,823,361      Substrate Support Apparatus for a Substrate Housing              October 20, 1998
--------------------------------------------------------------------------------------------------
5,853,214      Aligner for a Substrate Carrier                                  December 29, 1998
               - Corresponding Patents in JP, DE, CN, AU
--------------------------------------------------------------------------------------------------
5,984,116      Substrate Support Apparatus for a Substrate Housing              November 16, 1999
               - Corresponding Patents in AU, CN, JP, DE
--------------------------------------------------------------------------------------------------
6,187,182      Filter Cartridge Assembly for a Gas Purging System (Joint        February 13, 2001
               Ownership with Entegris)
               - Corresponding Patent in TW
               - Foreign applications pending in CA, CN, EP, JP, KR
--------------------------------------------------------------------------------------------------
</TABLE>

SCHEDULE Ic

<TABLE>
--------------------------------------------------------------------------------------------------
<S>            <C>                                                              <C>
USSN           SMIF Container with Latch Lock Mechanism                         July 10, 2001
09/902,195     - Corresponding PCT Application pending
--------------------------------------------------------------------------------------------------
USSN           Laterally Floating Latch Hub Assembly                            December 13, 2001
10/022,309     - Corresponding PCT and Taiwan Application pending
--------------------------------------------------------------------------------------------------
USSN           System for Providing Electrical Ground Path Through a            June 3, 2002
10/161,436     Port Door
--------------------------------------------------------------------------------------------------
USSN           Transportable Container Including Internal Environment           January 24, 2002
10/042,849     Monitor
               - Corresponding PCT and Taiwan Application pending
--------------------------------------------------------------------------------------------------
</TABLE>

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 14 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>


                                   EXHIBIT II

<TABLE>
<CAPTION>
-------------------------------------------------------------------------------------------------
PATENT
NUMBERS                            TITLE                                        ISSUE DATE
-------------------------------------------------------------------------------------------------
<S>            <C>                                                              <C>
4,674,939      Sealed Standard Interface Apparatus                              June 23, 1987
               - Corresponding patents in EP, DE, JP, KR
-------------------------------------------------------------------------------------------------
5,169,272      Method and Apparatus for Transferring Articles Between Two       December 8, 1992
               Controlled Environments
               - Corresponding patents in EP, JP
-------------------------------------------------------------------------------------------------
5,370,491      Method and Apparatus for Transferring Articles Between Two       December 6, 1994
               Controlled Environments
-------------------------------------------------------------------------------------------------
5,547,328      Method and Apparatus for Transferring Articles Between Two       August 20, 1996
               Controlled Environments
-------------------------------------------------------------------------------------------------
5,834,915      Substrate Housing and Docking System                             November 10, 1998
-------------------------------------------------------------------------------------------------
5,895,191      Sealable, Transportable Container Adapted for Horizontal         April 20, 1999
               Loading and Unloading
-------------------------------------------------------------------------------------------------
</TABLE>

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 15 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

                                   EXHIBIT III

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------
PATENT
NUMBERS                               TITLE                                         ISSUE DATE
-----------------------------------------------------------------------------------------------------
<S>            <C>                                                                 <C>
4,724,874      Sealable Transportable Container Having a Particle Filtering        February 16, 1988
               System
               - Corresponding Patents in EP, DE, JP, SG
-----------------------------------------------------------------------------------------------------
5,848,933      Docking and Environmental Purging System for Integrated Circuit     December 15, 1998
               Wafer Transport Assemblies
-----------------------------------------------------------------------------------------------------
5,879,458      Molecular Contamination Control System                              March 9, 1999
               - Corresponding Patent in SG
               - Foreign applications pending in EP, JP, KR
-----------------------------------------------------------------------------------------------------
5,988,233      Evacuation-Driven SMIF Pod Purge System                             November 23, 1999
               - Corresponding patents in EP, HK, JP, KR
-----------------------------------------------------------------------------------------------------
6,056,026      Passively Activated Valve for Carrier Purging                       May 2, 2002
               - Corresponding Patent in TW
               - Foreign applications pending in CN, EP, JP, KR
-----------------------------------------------------------------------------------------------------
6,120,371      Docking and Environmental Purging System for Integrated Circuit     September 19, 2000
               Wafer Transport Assemblies
-----------------------------------------------------------------------------------------------------
6,164,664      Kinematic Coupling Compatible Passive Interface Seal                December 26, 2000
-----------------------------------------------------------------------------------------------------
6,368,411      Molecular Contamination Control System                              April 9, 2002
-----------------------------------------------------------------------------------------------------
</TABLE>

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 16 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>

                                   EXHIBIT IV

<TABLE>
<CAPTION>
-----------------------------------------------------------------------------------------------------
PATENT
NUMBERS                                TITLE                                        ISSUE DATE
-----------------------------------------------------------------------------------------------------
<S>            <C>                                                                 <C>
4,827,110      Method and Apparatus for Monitoring the Location of Wafer Disks     May 2, 1989
-----------------------------------------------------------------------------------------------------
4,833,306      Bar Code Remote Recognition System for Process Carriers of          May 23, 1989
               Wafer Disks
               - Corresponding Patents in CA, EP, DE, KR, TW
-----------------------------------------------------------------------------------------------------
4,888,473      Wafer Disk Location Monitoring System and Tagged Process            December 19, 1989
               Carriers for Use Therewith
-----------------------------------------------------------------------------------------------------
4,974,166      Processing Systems with Intelligent Article Tracking                November 27, 1990
               - Corresponding Patents in EP, DE, JP, KR, TW
-----------------------------------------------------------------------------------------------------
5,097,421*     Intelligent Wafer Carrier                                           March 17, 1992
               - Corresponding Patents in EP, DE, JP, SG
-----------------------------------------------------------------------------------------------------
5,166,884      Intelligent System for Processing and Storing Articles              November 24, 1992
               - Corresponding Patents in JP
-----------------------------------------------------------------------------------------------------
5,339,074      Very Low Frequency Tracing System                                   August 16, 1994
               - Corresponding Patents in FR, DE, IT, JP, KR
-----------------------------------------------------------------------------------------------------
5,831,738      Apparatus and Methods for Viewing Identification Marks on           November 3, 1998
               Semiconductor Wafers
               - Corresponding Patents in KR
               - Foreign application pending in JP
-----------------------------------------------------------------------------------------------------
6,473,668      Intelligent Minienvironment                                         October 29, 2002
-----------------------------------------------------------------------------------------------------
</TABLE>

* Currently in litigation with Jenoptik

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 17 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>


                                    Exhibit V

                                   ASSIGNMENT

         WHEREAS, Asyst Technologies, Inc., has rights and interest to a certain
patents and patent applications described as follows:

<TABLE>
<CAPTION>
--------------------------------------------------------------------------------------------------------
PATENT NUMBER /                                                                       ISSUE DATE/FILING
SERIAL NUMBER                              TITLE                                           DATE
--------------------------------------------------------------------------------------------------------
<S>                <C>                                                                <C>
  4,739,882        Container Having Disposable Liner                                  April 26, 1988
--------------------------------------------------------------------------------------------------------
  4,815,912        Box Door Actuated Retainer                                         March 28, 1989
--------------------------------------------------------------------------------------------------------
  4,995,430        Sealable Transportable Container Latch Mechanism                   February 26, 1991
--------------------------------------------------------------------------------------------------------
  5,469,963        Sealable Transportable Container Improved Liner                    November 28, 1995
--------------------------------------------------------------------------------------------------------
  5,611,452        Sealable Transportable Container Improved Liner                    March 18, 1997
--------------------------------------------------------------------------------------------------------
  6,042,651        Molecular Contamination Control System                             March 28, 2000
--------------------------------------------------------------------------------------------------------
  6,216,873        SMIF Container Including a Reticle Support Structure               April 17, 2001
--------------------------------------------------------------------------------------------------------
  6,221,163        Molecular Contamination Control System                             April 24, 2001
--------------------------------------------------------------------------------------------------------
  6,223,396        Pivoting Side Handles                                              May 1, 2001
--------------------------------------------------------------------------------------------------------
  6,319,297        Modular SMIF Pod Breather, Adsorbent, and Purge Cartridges         November 20, 2001
--------------------------------------------------------------------------------------------------------
  6,368,411        Modular Contamination Control System                               April 9, 2002
--------------------------------------------------------------------------------------------------------
  6,398,032        SMIF Pod Including Independently Support Wafer Cassette            June 4, 2002
--------------------------------------------------------------------------------------------------------
  6,513,654        SMIF Container Including an Electrostatic Dissipative Reticle      February 4, 2003
                   Support Structure
--------------------------------------------------------------------------------------------------------
  USSN             System for Preventing Improper Insertion of FOUP Door              December 13, 2001
  10/020,761       Into FOUP
--------------------------------------------------------------------------------------------------------
  5,740,845        Sealable Transportable Container Having Breather Assembly          April 2, 1998
--------------------------------------------------------------------------------------------------------
  5,785,186        Substrate Housing and Docketing System                             July 28, 1998
--------------------------------------------------------------------------------------------------------
  5,810,062        Two Stage Valve for Charging and/or Vacuum Relief of Pods          September 22, 1998
--------------------------------------------------------------------------------------------------------
  5,823,361        Substrate Support Apparatus for a Substrate Housing                October 20, 1998
--------------------------------------------------------------------------------------------------------
  5,853,214        Aligner for a Substrate Carrier                                    December 29, 1998
--------------------------------------------------------------------------------------------------------
  5,984,116        Substrate Support Apparatus for a Substrate Housing                November 16, 1999
--------------------------------------------------------------------------------------------------------
  6,187,182        Filter Cartridge Assembly for a Gas Purging System                 February 13, 2001
                   (Joint Ownership with Entegris)
--------------------------------------------------------------------------------------------------------
  USSN             SMIF Container with Latch Lock Mechanism                           July 10, 2001
  09/902,195
--------------------------------------------------------------------------------------------------------
  USSN             Laterally Floating Latch Hub Assembly                              December 13, 2001
  10/022,309
--------------------------------------------------------------------------------------------------------
  USSN             Transportable Container Including Internal Environment             January 24, 2002
  10/042,849       Monitor
--------------------------------------------------------------------------------------------------------
</TABLE>

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 18 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>


An undivided fifty percent ownership interest in Application USSN 10/161,436
titled "System for Providing Electrical Ground Path Through a Port Door" filed
on June 3, 2002.

                  WHEREAS, ENTEGRIS CAYMAN LTD. is desirous of acquiring any and
all such interest in and to said patents and applications.

                  NOW, THEREFORE, Be It Known, that for good and valuable
consideration, the receipt of which is hereby acknowledged by the undersigned,
the entire rights, title and interest of said above identified patents and
applications, the inventions disclosed and claimed therein, and any renewals,
continuations, divisionals, continuation-in-parts, reissues, extensions,
substitutions, foreign or domestic counterparts thereof, including any and all
rights to apply for and obtain patents therefore in all foreign countries, is
hereby sold, assigned and transferred to ENTEGRIS CAYMAN LTD.

                  The undersigned agrees to sign such papers, testify orally and
do other things at the expense of ENTEGRIS CAYMAN LTD. or its successors or
assigns, as may be reasonably necessary for the purpose of obtaining and
enforcing the patents.

                          Signed at this 11th day of February, 2003.

                                 ASYST TECHNOLOGIES, INC.

                                 By: /s/ Geoffrey Ribar
                                     -----------------------------

                                 Printed Name: Geoffrey Ribar

                                 Its: Senior Vice President and Chief Financial
                                      Officer

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 19 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>


                                   Exhibit VI

                                    ROYALTIES

Asyst shall be entitled to receive certain royalties on the Net Revenues (as
defined below) as set forth below:

         VI.2(a)        The sum equal to [*]% of all Net Revenues generated in
                        the semiconductor industry by Entegris, Entegris Cayman
                        or Entegris' Subsidiaries during each year with respect
                        to (i) [*] (iii) spare and replacement parts in respect
                        of the products described in (i) and (ii) of this
                        subsection VI.2(a), for a period of five (5) years after
                        the Closing Date stated in the Asset Purchase Agreement;
                        and

         VI.2(b)        a portion of all Net Revenues generated in the
                        semiconductor industry by Entegris or Entegris'
                        Subsidiaries during each year with respect to (i) 300mm
                        FOUPs or wafer carriers or containers having
                        substantially the same structure as a 300mm FOUP and
                        used in production of semiconductors or wafers, (ii) the
                        300mm FOUPS purchased by Entegris from Asyst in the
                        semiconductor industry; and (iii) spare and replacement
                        parts in respect of the products described in (i) and
                        (ii) of this subsection VI.2(b) for a period of five (5)
                        years after the Closing Date as set forth below:

                        (i)    The sum equal to [*]% of such Net Revenues up to
                               $[*] million per annum;

                        (ii)   [*]% of such Net Revenues between $[*] million
                               and $[*] million per annum; and

                        (iii)  [*]% of such Net Revenues over $[*] million per
                               annum.

         For purposes hereof, the 300mm FOUPS and wafer carriers or containers
having substantially the same structure as a 300mm FOUP and used in production
of semiconductors or wafers for which Asyst is entitled to the above royalties
shall not include any of Entegris' current products or containers which are used
to ship wafers between facilities. [*]

         Notwithstanding the above, [*].

         VI.2(c)        The term "Net Revenues" shall mean the total sales price
                        of the particular product(s) for which customers are
                        billed or otherwise charged (including the lease or
                        consignment of product) for by Entegris in the usual
                        course of business during each fiscal year of Entegris,
                        excluding: (i) revenues received from services related
                        to the particular product(s) (including without
                        limitation cleaning services); (ii) sales taxes, excise
                        taxes and other taxes levied in respect of such sales;
                        (iii) return sales; (iv) transportation and insurance
                        costs incurred by Entegris with respect to such
                        product(s). Royalties on products

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 20 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>


                        discounted below [*]% of the average selling price of a
                        product on a quarterly basis will be based upon [*]% of
                        the average selling price of that product on a quarterly
                        basis. Any out-of-payment-period credit adjustments for
                        return sales or other bona fide price adjustments which
                        exceed royalties payable for any period will be accrued
                        and offset against royalties which accrue to Asyst in
                        subsequent payment periods. With respect to product(s)
                        leased or consigned by Entegris, or if the pricing of a
                        royalty-bearing product hereunder is otherwise
                        commingled with the pricing of other products and
                        services of Entegris or a wholly-owned subsidiary of
                        Entegris, then the price of the royalty-bearing products
                        for the purposes of calculating royalties shall be equal
                        to the average net sales price of all equivalent
                        products sold by the Entegris for the fiscal quarter in
                        question, without giving effect in the calculation of
                        such average to any products given away or commingled
                        with other goods and services; provided, however, that
                        the bundling of multiple royalty-bearing products
                        together without the commingling of non-royalty-bearing
                        products or services is treated as a single aggregate
                        sale and royalty is calculated based upon the aggregate
                        sale price for such products (i.e. not the average net
                        sales price of equivalent products).

         VI.2(d)        Entegris shall keep records, with respect to the sale of
                        all the products subject to royalties under this Section
                        V.2 and the selling prices thereof. Asyst shall at its
                        own expense have a right, through an independent
                        certified public accountant selected by Asyst, to
                        examine and audit, not more than once each fiscal year,
                        and during normal business hours and upon prior
                        reasonable notice, all such records and accounts as may,
                        under recognized accounting practices, contain
                        information bearing upon the amount of royalty payment
                        due to Asyst from Entegris under this Agreement.

                        If Asyst's calculation of royalties differs from
                        Entegris' calculation, Asyst may, at its option, deliver
                        a notice to Entegris disputing Entegris' calculation (a
                        "Challenge Notice") at any time, but in no event more
                        than ninety (90) days after the close of a calendar year
                        with respect to royalties accrued during that calendar
                        year. If a Challenge Notice is delivered to Entegris
                        pursuant to the preceding sentence, Asyst and Entegris
                        shall, during the thirty (30) days following such
                        delivery, use all commercially reasonable efforts to
                        reach agreement. If during such period Asyst and
                        Entegris are unable to agree regarding the disputed
                        calculation, Asyst and Entegris shall promptly
                        thereafter select an Accounting Referee (as hereinafter
                        defined) and cause such Accounting Referee to promptly
                        review this Agreement, any related agreements, all such
                        records and accounts as may, under recognized accounting
                        practices, contain information bearing upon the amount
                        of royalty payment due to Asyst from Entegris under this
                        Agreement and the respective parties' disputed
                        calculations. The Accounting Referee shall deliver to
                        Asyst and Entegris as promptly as practicable a report
                        setting forth the Accounting Referee's calculation. Such
                        report shall be final and binding upon Asyst and


PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 21 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.

<PAGE>


                        Entegris. The cost of such report shall be borne by (i)
                        Asyst if the Accounting Referee's calculation changes
                        royalties by less than [*] percent ([*]%) of the
                        royalties stated in the disputed Royalty Statement(s);
                        or (ii) the Entegris if the Accounting Referee's
                        calculation changes royalties by greater than [*]
                        percent ([*]%) of the royalties stated in the disputed
                        Royalty Statement(s). The "Accounting Referee" shall
                        mean a reputable firm of independent auditors of
                        national standing other than the auditors of the
                        Entegris, at or prior to the Closing Date. In any event,
                        adjustment shall be made to compensate for any errors or
                        omission disclosed by Accounting Referee's report.

         VI.2(e)        The thresholds for determining the amount of royalties
                        to be paid hereunder shall be based on a calendar year.
                        Royalties hereunder shall be remitted to Asyst quarterly
                        for royalties accrued during each preceding quarter,
                        based on Net Revenues to date for the current calendar
                        year. The Net Revenue thresholds in Section VI.2(b)
                        shall be prorated for partial years at the beginning and
                        end of the royalty term.

         VI.2(f)        Within forty-five (45) days after the end of each fiscal
                        quarter of Entegris, commencing upon the close of the
                        first fiscal quarter after the Closing Date and
                        continuing thereafter until all of the royalties payable
                        hereunder shall have been reported and paid, Entegris
                        shall furnish Asyst a statement signed by a duly
                        authorized officer of Entegris showing all products
                        subject to royalties which were sold during such quarter
                        and the prices at which they were sold, and the amount
                        of the royalty payable thereon (the "Royalty
                        Statement"). If no products subject to royalty have been
                        sold, that fact shall be set forth in such a statement.
                        The royalties stated to be payable to Asyst in the
                        Royalty Statement shall be paid within forty-five (45)
                        days after the end of that quarter in which they accrue.

         VI.2(g)        A bonus royalty of [*] percent ([*]%) on revenues
                        generated by Entegris and Entegris' Subsidiaries in
                        excess of $[*] from Entegris' current and future SMIF
                        Pods and all royalty bearing products for combined
                        calendar years 2003, 2004 and 2005. The maximum payment
                        under this section shall not exceed $[*]. For purposes
                        hereof, Asyst shall be entitled to credit for Asyst and
                        Entegris' respective sales for 2003 prior to the
                        Effective Date for the products identified in Sections
                        VI.2(a) and VI.2(b).

PATENT ASSIGNMENT AND CROSS-LICENSE AND TRADEMARK LICENSE AGREEMENT  Page - 22 -

[] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT, MARKED BY
BRACKETS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE SECURITIES AND EXCHANGE
COMMISSION PURSUANT TO RULE 24b-2 OF THE SECURITIES EXCHANGE ACT OF 1934, AS
AMENDED.