##### 



Exhibit 10.22
 ASYST TECHNOLOGIES, INC.
 2003 EQUITY INCENTIVE PLAN
 RESTRICTED STOCK AWARD AGREEMENT
 Restricted Stock Award [insert date] [insert name] ___
  Vesting Schedule
 Number of Shares
    
    Vesting Date
 Holding and Other Restrictions on Delivery
  Acceleration in the event of Death, Disability or Termination of Service
  1




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##### 



Taxes
  Restrictions on Issuance
 Termination of Continuous Service
 2




---



##### 



Transferability of Award
 Refusal to Transfer
 Tax Consultation
 Entire Agreement: Governing Law
 Headings
 Notices
 3




---



##### 



Rights as Shareholder
 Mandatory Arbitration to Resolve Disputes
 Waiver of Right to Jury Trial
 Nature of the Restricted Stock Award
      4




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##### 



e.g.
  Data Privacy The Grantee hereby explicitly and unambiguously consents to the
collection, use and transfer, in electronic or other form, of his or her personal data as described
in this document by and among, as applicable, the Company and its subsidiaries and Affiliates
 5




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##### 



for the exclusive purpose of implementing, administering and managing the Grantees
participation in the Plan.
 The Grantee understands that the Company may hold certain personal information about him or
her, including, but not limited to, the Grantees name, home address and telephone number, date of
birth, social security or insurance number or other identification number, salary, nationality, job
title, any shares of stock or directorships held in the Company, details of the Restricted Stock
Award or any other entitlement to shares, canceled, exercised, vested, unvested or outstanding in
the Grantees favor, for the purpose of implementing, administering and managing the Plan (Data).
The Grantee understands that Data may be transferred to any third parties assisting in the
implementation, administration and management of the Plan, that these recipients may be located in
the Grantees country or elsewhere, and that the recipients country may have different data
privacy laws and protections than the Grantees country. The Grantee understands that he or she
may request a list with the names and addresses of any potential recipients of the Data by
contacting his or her local human resources representative. The Grantee authorizes the recipients
to receive, possess, use, retain and transfer the Data, in electronic or other form, for the
purposes of implementing, administering and managing the Grantees participation in the Plan,
including any requisite transfer of such Data as may be required to a broker or other third party
with whom the Grantee may elect to deposit any shares acquired upon vesting of the Restricted Stock
Award. The Grantee understands that Data will be held as long as is reasonably necessary to
implement, administer and manage the Grantees participation in the Plan. The Grantee understands
that he or she may, at any time, view Data, request additional information about the storage and
processing of Data, require any necessary amendments to Data or refuse or withdraw the consents
herein, in any case without cost, by contacting in writing the Grantees local human resources
representative. The Grantee understands, however, that refusing or withdrawing his or her consent
may affect the Grantees ability to participate in the Plan. For more information on the
consequences of refusal to consent or withdrawal of consent, the Grantee understands that he or she
may contact his or her local human resources representative.
 Language
 Electronic Delivery
  6




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##### 



Submitted by:
    
    Accepted by:GRANTEE:
    
    ASYST TECHNOLOGIES, INC.By:Title: Vice President, General Counsel & Secretary(Signature)Address:
    
    Address:46897 Bayside ParkwayFremont, CA 94538
 7




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##### 



ASYST TECHNOLOGIES, INC.
 2003 EQUITY INCENTIVE PLAN
 RESTRICTED STOCK AWARD AGREEMENT
 Restricted Stock Award [insert date] [insert name] [insert
shares]
  Vesting Schedule
 Number of RSUs
    
    Vesting Date
 Holding and Other Restrictions on Delivery
  Acceleration in the event of Death, Disability or Termination of Service
 8




---



##### 



Taxes
  9




---



##### 



Restrictions on Issuance
 Delivery of Shares
 Termination of Continuous Service
 Transferability of Award
 Refusal to Transfer
 Tax Consultation
 Entire Agreement: Governing Law
 10




---



##### 



Headings
 Notices
 Rights as Shareholder
 Deferral of Compensation
 Nature of the RSU Award
      11




---



##### 



e.g.
  12




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##### 



. Data Privacy The Grantee hereby explicitly and unambiguously consents to the
collection, use and transfer, in electronic or other form, of his or her personal data as described
in this document by and among, as applicable, the Company and its subsidiaries and Affiliates for
the exclusive purpose of implementing, administering and managing the Grantees participation in
the Plan.
 The Grantee understands that the Company may hold certain personal information about him or
her, including, but not limited to, the Grantees name, home address and telephone number, date of
birth, social security or insurance number or other identification number, salary, nationality, job
title, any shares of stock or directorships held in the Company, details of the RSU or any other
entitlement to shares, canceled, exercised, vested, unvested or outstanding in the Grantees favor,
for the purpose of implementing, administering and managing the Plan (Data). The Grantee
understands that Data may be transferred to any third parties assisting in the implementation,
administration and management of the Plan, that these recipients may be located in the Grantees
country or elsewhere, and that the recipients country may have different data privacy laws and
protections than the Grantees country. The Grantee understands that he or she may request a list
with the names and addresses of any potential recipients of the Data by contacting his or her local
human resources representative. The Grantee authorizes the recipients to receive, possess, use,
retain and transfer the Data, in electronic or other form, for the purposes of implementing,
administering and managing the Grantees participation in the Plan, including any requisite
transfer of such Data as may be required to a broker or other third party with whom the Grantee may
elect to deposit any shares acquired upon vesting of the RSU. The Grantee understands that Data
will be held as long as is reasonably necessary to implement, administer and manage the Grantees
participation in the Plan. The Grantee understands that he or she may, at any time, view Data,
request additional information about the storage and processing of Data, require any necessary
amendments to Data or refuse or withdraw the consents herein, in any case without cost, by
contacting in writing the Grantees local human resources representative. The Grantee understands,
however, that refusing or withdrawing his or her consent may affect the Grantees ability to
participate in the Plan. For more information on the consequences of refusal to consent or
withdrawal of consent, the Grantee understands that he or she may contact his or her local human
resources representative.
 Language
 Mandatory Arbitration to Resolve Disputes
 13




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##### 



Waiver of Right to Jury Trial
 Electronic Delivery
   Submitted by:
    
    Accepted by:GRANTEE:
    
    ASYST TECHNOLOGIES, INC.By:Title:
    
    Vice President, General Counsel
&
Secretary(Signature)Address:
    
    Address:46897 Bayside ParkwayFremont, CA 94538
 14




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##### 



ASYST TECHNOLOGIES, INC.
 2003 EQUITY INCENTIVE PLAN
 RESTRICTED STOCK AWARD AGREEMENT
 Restricted Stock Award [insert name] [insert shares]
  Vesting Schedule
 Number of Shares
    
    Vesting Date
 Holding and Other Restrictions on Delivery
  Acceleration in the event of Death, Disability or Termination of Service
  Taxes
 15




---



##### 



Restrictions on Issuance
 Termination of Continuous Service
 Transferability of Award
 16




---



##### 



Refusal to Transfer
 Tax Consultation
 Entire Agreement: Governing Law
 Headings
 Notices
 Rights as Shareholder
 17




---



##### 



Mandatory Arbitration to Resolve Disputes
 Waiver of Right to Jury Trial
 Nature of the Restricted Stock Award
        18




---



##### 



e.g.
  Data Privacy The Grantee hereby explicitly and unambiguously consents to the
collection, use and transfer, in electronic or other form, of his or her personal data as described
in this document by and among, as applicable, the Company and its subsidiaries and Affiliates for
the exclusive purpose of implementing, administering and managing the Grantees participation in
the Plan.
 The Grantee understands that the Company may hold certain personal information about him or
her, including, but not limited to, the Grantees name, home address and telephone number, date of
birth, social security or insurance number or other identification number, salary, nationality, job
title, any shares of stock or directorships held in the Company, details of the Restricted Stock
Award or any other entitlement to shares, canceled, exercised, vested, unvested or outstanding in
the Grantees favor, for the purpose of implementing, 19
       administering and managing the Plan (Data). The Grantee understands that Data may be
transferred to any third parties assisting in the implementation, administration and management of
the Plan, that these recipients may be located in the Grantees country or elsewhere, and that the
recipients country may have different data privacy laws and protections than the Grantees
country. The Grantee understands that he or she may request a list with the names and addresses of
any potential recipients of the Data by contacting his or her local human resources representative.
The Grantee authorizes the recipients to receive, possess, use, retain and transfer the Data, in
electronic or other form, for the purposes of implementing, administering and managing the
Grantees participation in the Plan, including any requisite transfer of such Data as may be
required to a broker or other third party with whom the Grantee may elect to deposit any shares
acquired upon vesting of the Restricted Stock Award. The Grantee understands that Data will be
held as long as is reasonably necessary to implement, administer and manage the Grantees
participation in the Plan. The Grantee understands that he or she may, at any time, view Data,
request additional information about the storage and processing of Data, require any necessary
amendments to Data or refuse or withdraw the consents herein, in any case without cost, by
contacting in writing the Grantees local human resources representative. The Grantee understands,
however, that refusing or withdrawing his or her consent may affect the Grantees ability to
participate in the Plan. For more information on the consequences of refusal to consent or
withdrawal of consent, the Grantee understands that he or she may contact his or her local human
resources representative.
 Language
 AT WILL RELATIONSHIP . THE GRANTEE ACKNOWLEDGES AND AGREES THAT THE VESTING OF
SHARES PURSUANT TO THE RESTRICTED STOCK AWARD RESULTS ONLY BY CONTINUING SERVICES OR EMPLOYMENT AT
THE WILL OF THE COMPANY (NOT THROUGH THE ACT OF BEING HIRED, BEING AWARDED THIS RESTRICTED STOCK
AWARD OR ACQUIRING SHARES HEREUNDER). THE GRANTEE FURTHER ACKNOWLEDGES AND AGREES THAT THIS
OPTION, THE TERMS AND CONDITIONS WHICH ARE INCORPORATED HEREIN AND MADE A PART HEREOF BY REFERENCE,
THE TRANSACTIONS CONTEMPLATED HEREUNDER AND THE VESTING SCHEDULE SET FORTH HEREIN DO NOT CONSTITUTE
AN EXPRESS OR IMPLIED PROMISE OF CONTINUED EMPLOYMENT OR ENGAGEMENT AS AN EMPLOYEE, CONSULTANT OR
OTHERWISE WITH OR BY THE COMPANY, OR ANY OF ITS SUBSIDIARIES OR AFFILIATES, FOR THE VESTING PERIOD
OR FOR ANY PERIOD OR AT ALL, AND SHALL NOT INTERFERE WITH GRANTEES RIGHT OR THE COMPANYS RIGHT TO
TERMINATE GRANTEES EMPLOYMENT OR CONSULTANT OR OTHER RELATIONSHIP AT ANY TIME, FOR ANY REASON,
WITH OR WITHOUT CAUSE.
 Electronic Delivery
 20




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##### 



Submitted by:
    
    Accepted by:GRANTEE:
    
    ASYST TECHNOLOGIES, INC.By:Title: Vice President, General Counsel & Secretary(Signature)Address:
    
    Address:46897 Bayside ParkwayFremont, CA 94538
 21




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##### 



ASYST TECHNOLOGIES, INC.
 2003 EQUITY INCENTIVE PLAN
 RESTRICTED STOCK AWARD AGREEMENT
 Restricted Stock Award [insert date] [insert name] [insert
shares]
  Vesting Schedule
 Number of RSUs
    
    Vesting Date
 Holding and Other Restrictions on Delivery
  Acceleration in the event of Death, Disability or Termination of Service
  22




---



##### 



Taxes
  Restrictions on Issuance
 23




---



##### 



Delivery of Shares
 Termination of Continuous Service
 Transferability of Award
 Refusal to Transfer
 Tax Consultation
 Entire Agreement: Governing Law
 Headings
 24




---



##### 



Notices
 Rights as Shareholder
 Deferral Election
 Deferral of Compensation
 Nature of the RSU Award
    25




---



##### 



e.g.
  26




---



##### 



Data Privacy The Grantee hereby explicitly and unambiguously consents to the
collection, use and transfer, in electronic or other form, of his or her personal data as described
in this document by and among, as applicable, the Company and its subsidiaries and Affiliates for
the exclusive purpose of implementing, administering and managing the Grantees participation in
the Plan.
 The Grantee understands that the Company may hold certain personal information about him or
her, including, but not limited to, the Grantees name, home address and telephone number, date of
birth, social security or insurance number or other identification number, salary, nationality, job
title, any shares of stock or directorships held in the Company, details of the RSU or any other
entitlement to shares, canceled, exercised, vested, unvested or outstanding in the Grantees favor,
for the purpose of implementing, administering and managing the Plan (Data). The Grantee
understands that Data may be transferred to any third parties assisting in the implementation,
administration and management of the Plan, that these recipients may be located in the Grantees
country or elsewhere, and that the recipients country may have different data privacy laws and
protections than the Grantees country. The Grantee understands that he or she may request a list
with the names and addresses of any potential recipients of the Data by contacting his or her local
human resources representative. The Grantee authorizes the recipients to receive, possess, use,
retain and transfer the Data, in electronic or other form, for the purposes of implementing,
administering and managing the Grantees participation in the Plan, including any requisite
transfer of such Data as may be required to a broker or other third party with whom the Grantee may
elect to deposit any shares acquired upon vesting of the RSU. The Grantee understands that Data
will be held as long as is reasonably necessary to implement, administer and manage the Grantees
participation in the Plan. The Grantee understands that he or she may, at any time, view Data,
request additional information about the storage and processing of Data, require any necessary
amendments to Data or refuse or withdraw the consents herein, in any case without cost, by
contacting in writing the Grantees local human resources representative. The Grantee understands,
however, that refusing or withdrawing his or her consent may affect the Grantees ability to
participate in the Plan. For more information on the consequences of refusal to consent or
withdrawal of consent, the Grantee understands that he or she may contact his or her local human
resources representative.
 Language
 Mandatory Arbitration to Resolve Disputes
 27




---



##### 



Waiver of Right to Jury Trial
 AT WILL RELATIONSHIP
 Electronic Delivery
   28




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##### 



Submitted by:
    
    Accepted by:GRANTEE:
    
    ASYST TECHNOLOGIES, INC.By:Title: Vice President, General Counsel & Secretary(Signature)Address:
    
    Address:46897 Bayside ParkwayFremont, CA 94538
 29