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                                                                    EXHIBIT 24
                                       
                                POWER OF ATTORNEY


The undersigned directors and officers of Ultratech Stepper, Inc. (the 
"Company"), a Delaware corporation, hereby constitute and appoint Arthur W. 
Zafiropoulo and William G. Leunis, III, and each of them with full power to 
act without the other, the undersigned's true and lawful attorney-in-fact, 
with full power of substitution and resubstitution, for the undersigned and 
in the undersigned's name, place and stead in the undersigned's capacity as 
an officer and/or director of the Company, to execute in the name and on 
behalf of the undersigned an annual report of the Company on Form 10-K for 
the fiscal year ended December 31, 1998 (the "Report"), under the Securities 
and Exchange Act of 1934, as amended, and to file such Report, with exhibits 
thereto and other documents in connection therewith and any and all 
amendments thereto, with the Securities and Exchange Commission, granting 
unto said attorneys-in-fact, and each of them, full power and authority to do 
and perform each and every act and thing necessary or desirable to be done 
and to take any other action of any type whatsoever in connection with the 
foregoing which, in the opinion of such attorney-in-fact, may be of benefit 
to, in the best interest of, or legally required of, the undersigned, it 
being understood that the documents executed by such attorney-in-fact on 
behalf of the undersigned pursuant to this Power of Attorney shall be in such 
form and shall contain such terms and conditions as such attorney-in-fact may 
approve in such attorney-in-fact's discretion.

        IN WITNESS WHEREOF, I have hereunto set my hand this 30th day of 
March, 1999.

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<CAPTION>
Signature                                 Title                               Date
<S>                             <C>                                      <C> 
/s/ ARTHUR W.  ZAFIROPOULO      Chairman of the Board of Directors,      March 30, 1999
------------------------------  Chief Executive Officer (Principal   
Arthur W. Zafiropoulo           Executive Officer) and President     


/s/ WILLIAM G. LEUNIS, III      Senior Vice President, Finance,          March 30, 1999
------------------------------  Chief Financial Officer, Secretary  
William G. Leunis, III          and Treasurer (Principal Financial  
                                and Accounting Officer)             


/s/ KENNETH A. LEVY             Director                                 March 30, 1999
------------------------------
Kenneth A. Levy


 /s/ GREGORY HARRISON           Director                                 March 30, 1999
------------------------------
Gregory Harrison


/s/ LARRY R. CARTER             Director                                 March 30, 1999
------------------------------
Larry R. Carter


 /s/ THOMAS D. GEORGE           Director                                 March 30, 1999
------------------------------
Thomas D. George


 /s/ JOEL GEMUNDER              Director                                 March 30, 1999
------------------------------
Joel Gemunder

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