##### 



Exhibit 10.42
  
 CREDIT AGREEMENT
   ASYST TECHNOLOGIES, INC.   ASYST JAPAN, INC.,
 BANK OF AMERICA, N.A.,
   
 BANC OF AMERICA SECURITIES LLC,
  KEYBANK NATIONAL ASSOCIATION
  COMERICA BANK,




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##### 



TABLE OF CONTENTS
 PageARTICLE I
 DEFINITIONS AND ACCOUNTING TERMS
    
    
    11.01 Defined Terms
    
    
    11.02 Other Interpretive Provisions
    
    
    341.03 Accounting Terms
    
    
    351.04 Rounding
    
    
    361.05 Exchange Rates; Currency Equivalents
    
    
    361.06 Change of Currency
    
    
    361.07 Times of Day
    
    
    361.08 Letter of Credit Amounts
    
    
    36ARTICLE II  THE COMMITMENTS AND CREDIT EXTENSIONS
    
    
    372.01 The Loans
    
    
    372.02 Borrowings, Conversions and Continuations of Loans
    
    
    372.03 Letters of Credit
    
    
    392.04 Swing Line Loans
    
    
    502.05 Prepayments
    
    
    532.06 Termination or Reduction of Commitments
    
    
    552.07 Repayment of Loans
    
    
    552.08 Interest
    
    
    562.09 Fees
    
    
    572.10 Computation of Interest and Fees
    
    
    572.11 Evidence of Debt
    
    
    582.12 Payments Generally; Administrative Agents Clawback
    
    
    582.13 Sharing of Payments by Lenders
    
    
    602.14 Designated Borrowers; Relationship among Borrowers
    
    
    612.15 Increase in Revolving Credit Commitments
    
    
    63ARTICLE III TAXES, YIELD PROTECTION AND ILLEGALITY
    
    
    643.01 Taxes
    
    
    643.02 Illegality
    
    
    663.03 Inability to Determine Rates
    
    
    673.04 Increased Costs; Reserves on Eurodollar Rate Loans
    
    
    67
 i




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##### 



TABLE OF CONTENTS
 Page3.05 Compensation for Losses
    
    
    693.06 Mitigation Obligations; Replacement of Lenders
    
    
    703.07 Survival
    
    
    70ARTICLE IV  CONDITIONS PRECEDENT TO CREDIT EXTENSIONS
    
    
    704.01 Conditions of Initial Credit Extension
    
    
    704.02 Conditions to all Credit Extensions
    
    
    74ARTICLE V  REPRESENTATIONS AND WARRANTIES
    
    
    755.01 Existence, Qualification and Power
    
    
    755.02 Authorization; No Contravention
    
    
    765.03 Governmental Authorization; Other Consents
    
    
    765.04 Binding Effect
    
    
    765.05 Financial Statements; No Material Adverse Effect; No Internal Control Event
    
    
    775.06 Litigation
    
    
    785.07 Material Contracts
    
    
    785.08 Ownership of Property; Liens; Investments
    
    
    785.09 Environmental Compliance
    
    
    805.10 Insurance
    
    
    815.11 Taxes
    
    
    815.12 ERISA Compliance
    
    
    815.13 Subsidiaries; Equity Interests; Loan Parties
    
    
    825.14 Margin Regulations; Investment Company Act; Public Utility Holding Company Act
    
    
    835.15 Disclosure
    
    
    835.16 Compliance with Laws
    
    
    835.17 Intellectual Property; Licenses, Etc.
    
    
    835.18 Solvency
    
    
    845.19 Casualty, Etc.
    
    
    845.20 Labor Matters
    
    
    845.21 Collateral Documents
    
    
    845.22 Representations as to Foreign Obligors
    
    
    84
 ii




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##### 



TABLE OF CONTENTS
 Page5.23 Issuance of Subordinated Debt; Status of
Obligations as Senior Indebtedness, etc.
    
    
    855.24 Other Representations and Warranties
    
    
    86ARTICLE VI AFFIRMATIVE COVENANTS
    
    
    866.01 Financial Statements
    
    
    866.02 Certificates; Other Information
    
    
    876.03 Notices
    
    
    906.04 Payment of Obligations
    
    
    916.05 Preservation of Existence, Etc.
    
    
    916.06 Maintenance of Properties
    
    
    916.07 Maintenance of Insurance
    
    
    926.08 Compliance with Laws
    
    
    926.09 Books and Records
    
    
    926.10 Inspection Rights
    
    
    926.11 Use of Proceeds
    
    
    926.12 ASI as Loan Party and Equity Interests of ASI
    
    
    926.13 Covenant to Guarantee Obligations and Give Security
    
    
    936.14 Compliance with Environmental Laws
    
    
    976.15 Preparation of Environmental Reports
    
    
    986.16 Further Assurances
    
    
    986.17 Compliance with Terms of Leaseholds
    
    
    996.18 Foreign Government Scheme or Arrangement; Foreign Plan
    
    
    996.19 Lien Searches
    
    
    1006.20 Material Contracts
    
    
    1006.21 Designation as Senior Debt
    
    
    1006.22
Security Interests in Accounts, Etc.
    
    
    1006.23 Approvals and Authorizations
    
    
    1006.24 Taxpayer Identification Number
    
    
    1006.25 Lost AJI Stock Certificates
    
    
    1016.26 Post Closing Deliverables
    
    
    101
 iii




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##### 



TABLE OF CONTENTS
 PageARTICLE VII NEGATIVE COVENANTS
    
    
    1017.01 Liens
    
    
    1027.02 Indebtedness
    
    
    1037.03 Investments
    
    
    1047.04 Fundamental Changes
    
    
    1077.05 Dispositions
    
    
    1087.06 Restricted Payments
    
    
    1097.07 Change in Nature of Business
    
    
    1097.08 Transactions with Affiliates
    
    
    1097.09 Burdensome Agreements
    
    
    1107.10 Use of Proceeds
    
    
    1107.11 Financial Covenants
    
    
    1107.12 Capital Expenditures
    
    
    1117.13 Amendments of Organization Documents
    
    
    1117.14 Accounting Changes
    
    
    1117.15 Prepayments, Etc. of Indebtedness
    
    
    1117.16 Amendment, Etc. of Acquisition Agreement,
Related Documents and Debt Documents
    
    
    1117.17 Designation of Senior Debt
    
    
    1127.18 Lease Obligations
    
    
    112ARTICLE VIII EVENTS OF DEFAULT AND REMEDIES
    
    
    1128.01 Events of Default
    
    
    1128.02 Remedies Upon Event of Default
    
    
    1158.03 Application of Funds
    
    
    116ARTICLE IX ADMINISTRATIVE AGENT
    
    
    1179.01 Appointment and Authority
    
    
    1179.02 Rights as a Lender
    
    
    1179.03 Exculpatory Provisions
    
    
    1189.04 Reliance by Administrative Agent
    
    
    1199.05 Delegation of Duties
    
    
    119
 iv




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##### 



TABLE OF CONTENTS
 Page9.06 Resignation of Administrative Agent
    
    
    1199.07 Non-Reliance on Administrative Agent and Other Lenders
    
    
    1209.08 No
Other Duties, Etc.
    
    
    1209.09 Administrative Agent May File Proofs of Claim
    
    
    1209.10 Collateral and Guaranty Matters
    
    
    121ARTICLE X MISCELLANEOUS
    
    
    12210.01 Amendments, Etc.
    
    
    12210.02 Notices; Effectiveness; Electronic Communications
    
    
    12310.03 No Waiver; Cumulative Remedies
    
    
    12510.04 Expenses; Indemnity; Damage Waiver
    
    
    12510.05 Payments Set Aside
    
    
    12710.06 Successors and Assigns
    
    
    12810.07 Treatment of Certain Information; Confidentiality
    
    
    13310.08 Right of Setoff
    
    
    13410.09 Interest Rate Limitation
    
    
    13410.10 Counterparts; Integration; Effectiveness
    
    
    13410.11 Survival of Representations and Warranties
    
    
    13510.12 Severability
    
    
    13510.13 Replacement of Lenders
    
    
    13510.14 Governing Law; Jurisdiction; Etc.
    
    
    13610.15 Waiver of Jury Trial
    
    
    13710.16 California Judicial Reference
    
    
    13710.17 No Advisory or Fiduciary Responsibility
    
    
    13710.18 USA PATRIOT Act Notice
    
    
    13810.19 Time of the Essence
    
    
    13810.20 Judgment Currency
    
    
    13810.21 Appointment and Authority of the Company
    
    
    13910.22 ENTIRE AGREEMENT
    
    
    13910.23 Lenders Joint and Several Rights with Respect to Taiwanese Collateral
    
    
    139
 v




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##### 



SCHEDULES2.01
    
    Commitments and Applicable Percentages5.03
    
    Certain Authorizations5.05
    
    Existing Indebtedness5.06
    
    Litigation5.07
    
    Material Contracts5.08(b)
    
    Existing Liens5.08(c)
    
    Owned Real Property5.08(d)(i)
    
    Leased Real Property (Lessee)5.08(d)(ii)
    
    Leased Real Property (Lessor)5.08(e)
    
    Existing Investments5.08(f)
    
    Material Personal Property5.08(g)
    
    Accounts5.12(d)(ii)
    
    Foreign Plans5.13
    
    Subsidiaries and Other Equity Investments; Loan Parties5.17
    
    Intellectual Property Matters5.21
    
    Perfection Filings5.22
    
    Taxes, Etc.6.02(f)
    
    Certain Other Information6.13
    
    Guarantors7.02
    
    Continuing Indebtedness7.09
    
    Burdensome Agreements10.02
    
    Administrative Agents Office, Certain Addresses for Notices10.06
    
    Processing and Recordation Fees
 vi




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##### 



EXHIBITSForm ofA
    
    Committed Loan NoticeB
    
    Swing Line Loan NoticeC-1
    
    Term NoteC-2
    
    Revolving Credit NoteD
    
    Compliance CertificateE
    
    Assignment and AssumptionF-1
    
    Company GuarantyF-2
    
    US Subsidiary GuarantyF-3
    
    Japanese GuarantyF-4
    
    UK Subsidiary GuarantyF-5
    
    Taiwanese Subsidiary GuarantyG-1
    
    US Security AgreementG-2
    
    Japanese Security AgreementsG-3
    
    UK Security AgreementsG-4
    
    Taiwanese Security AgreementsH
    
    Designated Borrower Request and Assumption AgreementI
    
    Designated Borrower NoticeJ
    
    Closing Date CertificateK
    
    Solvency Certificate
 vii




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##### 



Company AJI Section 2.14 Designated Borrower Borrowers Lenders Lender
 Acquisition
Agreement Shinko ASI Acquisition
   
 Defined Terms
 Accounts
 Acquisition
 Acquisition Agreement
 Administrative Agent
 Administrative Agents Office Schedule 10.02
 Administrative Questionnaire
 1




---



##### 



Affiliate
 Aggregate Commitments
 Agreement
 AJI
 AJI Japanese Security Agreement Exhibit G-2A
 Applicable Foreign Obligor Documents Section
5.22
 Applicable Percentage Section 8.02 Schedule 2.01
 Applicable Rate Section 6.02(b) Section 6.02(b)
 2




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##### 



Applicable RateRevolving Credit Facility
    
    Term Loan FacilityConsolidated
    
    
    
    
    
    EurodollarPricing
    
    Total Leverage
    
    Commitment
    
    Rate & Letters
    
    
    
    
    
    EurodollarLevel
    
    Ratio
    
    Fee
    
    of Credit
    
    Base Rate
    
    Rate
    
    Base Rate1
    
    
    less than or equal
to 2.0:1
    
    
    0.375
    %
    
    
    2.00
    %
    
    
    1.00
    %
    
    
    1.85
    %
    
    
    0.85
    %2
    
    
    greater than 2.0:1
but less than or
equal to 2.5:1
    
    
    0.375
    %
    
    
    2.25
    %
    
    
    1.25
    %
    
    
    2.10
    %
    
    
    1.10
    %3
    
    
    greater than 2.5:1
but less than or
equal to 3.0:1
    
    
    0.50
    %
    
    
    2.50
    %
    
    
    1.50
    %
    
    
    2.35
    %
    
    
    1.35
    %4
    
    
    greater than 3.0:1
    
    
    0.50
    %
    
    
    2.75
    %
    
    
    1.75
    %
    
    
    2.60
    %
    
    
    1.60
    %
 Section 6.02(b) provided provided further plus plus
 Applicable Revolving Credit Percentage
 Applicable Time
 Applicant Borrower Section 2.14
 Appropriate Lender
 3




---



##### 



Section 2.03(a) Section 2.04(a)
 Approved Fund
 Arranger
 ASI
 Asset Trigger Event
 Assignee Group
 Assignment and Assumption Section 10.06(b) Exhibit E
 ATI Japanese Security Agreement Exhibit G-2B
 Attributable Indebtedness
 Audited Financial Statements
 Availability Period Section 2.06 Section 8.02
 4




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##### 



Bank of America
 Base Rate
 Base Rate Loan
 Borrowers
 Borrower Account Section 2.05(d)
 Borrower Materials Section 6.02
 Borrowing
 Business Day
    5




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##### 



Capital Expenditures
 Capitalized Leases
 Cash Collateral Account
 Cash Collateralize Section 2.03(g)
 Cash Equivalents
  clause (c)
  clauses (a) (b) (c)
 Cash Management Agreement
 6




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##### 



Cash Management Bank
 CERCLA
 CERCLIS
 CFC
 Change in Law
 Change of Control
 option right
 clause (i) clauses (i) (ii) clause (ii) clause
(iii)
 7




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##### 



Closing Date Section
4.01 Section 10.01
 Closing Date Certificate Exhibit J
 Code
 Collateral
 Collateral Documents
 Commitment
 Committed Loan Notice Section 2.02(a) Exhibit A
 Company
 Company Guaranty Exhibit F-1
 Compliance Certificate Exhibit
D
 Consolidated EBITDA
 8




---



##### 



plus minus
 Consolidated Fixed Charge Coverage Ratio Section 7.02
 Consolidated Funded Indebtedness
 Consolidated Interest Charges
 Consolidated Net Income provided clause (b)
 9




---



##### 



Consolidated Senior Indebtedness
 Consolidated Senior Leverage Ratio
 Consolidated Total Leverage Ratio
 Continuing Debt Section 7.02(d)
 Contractual Obligation
 Control Controlling Controlled
 Control Agreement
 Copyright Security Agreement
 Credit Extension
 Debtor Relief Laws
 Default
 10




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##### 



Default Rate plus plus provided plus
 Defaulting Lender
 Designated Borrower
 Designated Borrower Notice Section 2.14
 Designated Borrower Request and Assumption Agreement Section 2.14
 Disclosed Litigation Section 5.06
 Disposition Dispose
 Dollar $
 Dollar Equivalent
 Eligible Assignee Section 10.06(b)(iii) (v) (vi) Section 10.06(b)(iii)
 Environmental Laws
 11




---



##### 



Environmental Liability
 Environmental Permit
 Equity Interests
 ERISA
 ERISA Affiliate
 ERISA Event
 12




---



##### 



Eurodollar Rate BBA LIBOR
 Eurodollar Rate Loan Section 2.02(c)
 Event of Default Section 8.01
 Excluded Accounts
 Excluded Taxes Section 10.13 Section 3.01(e) Section 3.01(a)
 13




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##### 



provided Section 3.01(e)
 Existing Indebtedness Section 5.05(b)
 Facility
 Federal Funds Rate provided
 Fee Letter
 Filing System Section 6.16
 Forbearance Letter
 Foreign Government Scheme or Arrangement Section
5.12(d)
 Foreign Lender
 Foreign Obligor
 Foreign Plan Section 5.12(d)
 Foreign Plan Event
 14




---



##### 



Foreign Subsidiary
 FRB
 Fund
 Funded Indebtedness clauses (a) (e) clauses (a) (f)
 GAAP
 Governmental Authority
 Granting Lender Section 10.06(h)
 Guarantee
 15




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##### 



Guaranties
 Hazardous Materials
 Hedge Bank
 Honor Date Section 2.03(c)
 Indebtedness
     16




---



##### 



plus
   Indemnified Taxes
 Indemnitees Section 10.04(b)
 Information Section 10.07
 Interest Payment Date provided
 Interest Period provided
  17




---



##### 



Internal Control Event
 Investment
 IP Rights Section 5.18
 IP Security Agreements
 IRS
 ISP
 Issuer Documents
 Japanese Borrowers
 Japanese Collateral
 18




---



##### 



Japanese Collateral Documents Section 6.13
 Japanese Guaranty Exhibit F-3
 Japanese Loan Party
 Japanese Mortgages
 Japanese Security Agreement Section 6.13
 Japanese Subsidiary
 Japanese Subsidiary Guarantors Schedule 6.13 Section 6.13
 Laws
 L/C Advance
 L/C Borrowing
 19




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##### 



L/C Credit Extension
 L/C Issuer
 L/C Obligations plus Section 1.08
 Lender
 Lending Office
 Letter of Credit
 Letter of Credit Application
 Letter of Credit Expiration Date
 Letter of Credit Fee Section 2.03(i)
 Letter of Credit Sublimit
 Lien
 Loan Article II
 20




---



##### 



Loan Documents provided Articles IV IX
 Loan Parties
 Lost AJI Stock Certificates Section
4.01(a)(iv)(A)
 Material Adverse Effect
 Material Contract provided
 Material Personal Property provided
 21




---



##### 



Material Property
 Material Real Property
 Maturity Date clause (a)
 Measurement Period
 Moodys
 Mortgage
 Multiemployer Plan
 Note
 NPL
 Obligations
 Organization Documents
 22




---



##### 



Other AJI Equity Interests
 Other Foreign Collateral
 Other Foreign Collateral Documents Section 6.13
 Other Foreign Loan Party
 Other Foreign Mortgages
 Other Foreign Security Agreements Section 6.13
 Other Foreign Subsidiary
 Other Foreign Subsidiary Guarantors Section 6.13
 Other Foreign Subsidiary Guaranty Section 6.13
 Other Taxes
 23




---



##### 



Outstanding Amount
 Overnight Rate
 Participant Section 10.06(d)
 Patent Security Agreement
 PBGC
 PCAOB
 Pension Plan
 Person
 Plan
 Platform Section 6.02
 Pledged Debt
 24




---



##### 



Pledged Equity
 Prepayment Amount Section 2.05(a)
 Prepayment Date Section 2.05(a)
 Prepayment Notice Section 2.05(a)
 Quarterly Payment Date
 Refinancings provided provided
 Register Section 10.06(c)
 Registered Public Accounting Firm
 Related Documents
 Related Parties
 Reportable Event
 Request for Credit Extension
 25




---



##### 



Required Lenders provided
 Required Revolving Lenders provided
 Required Term Lenders
 Responsible Officer
 Restricted Payment
 Revaluation Date Section 2.02
 26




---



##### 



Revolving Credit Borrowing Section 2.01(b)
 Revolving Credit Commitment Section 2.01(b) Schedule 2.01
 Revolving Credit Facility
 Revolving Credit Lender
 Revolving Credit Loan Section 2.01(b)
 Revolving Credit Note Exhibit C-2
 S&P
 Same Day Funds
 Sarbanes-Oxley
 SEC
 Secured Cash Management Agreement
 27




---



##### 



Secured Hedge Agreement Section 7.02(a)
 Secured Parties Section 9.05
 Securities Laws
 Security Agreements
 Shinko
 Solvent Solvency
 SPC Section 10.06(h)
 Spot Rate provided provided further
 28




---



##### 



Sub Debt Documents
 Subordinated Debt
 Subordinated Notes
 Subordinated Notes Documents
 Subordination Provisions Section 8.01(m)
 Subsidiary
 Subsidiary Guarantors
 Swap Contract
 29




---



##### 



Master Agreement
 Swap Termination Value clause (a)
 Swing Line Section 2.04
 Swing Line Borrowing Section
2.04
 Swing Line Lender
 Swing Line Loan Section 2.04(a)
 Swing Line Loan Notice Section 2.04(b) Exhibit
B
 Swing Line Sublimit
 Synthetic Debt Indebtedness
 Synthetic Lease Obligation
 Taiwanese Collateral
 30




---



##### 



Taiwanese Collateral Documents Section 6.13
 Taiwanese Loan Party
 Taiwanese Mortgages
 Taiwanese Security Agreements Exhibit G-4A G-4B G-4C G-4D G-4E Section 6.13
 Taiwanese Subsidiary
 Taiwanese Subsidiary Guarantors Schedule 6.13 Section 6.13
 Taiwanese Subsidiary Guaranty Exhibit F-5
 Taxes
 Term Lender
 Term Loan
 Term Loan Borrowing Section 2.01(a)
 31




---



##### 



Term Loan Commitment Section 2.01(a) Schedule 2.01
 Term Loan Facility
 Term Note Exhibit C-1
 Threshold Amount .
 Total Outstandings
 Total Revolving Credit Outstandings
 Transaction
 Trademark Security Agreement
 Type
 UCC provided
 UK Collateral
 32




---



##### 



UK Collateral Documents Section 6.13
 UK Loan Party
 UK Mortgages
 UK Security Agreements Exhibit G-3A Exhibit G-3B Section 6.13
 UK Subsidiary
 UK Subsidiary Guarantors Schedule 6.13 Section 6.13
 UK Subsidiary Guaranty Exhibit
F-4
 Unfunded Pension Liability
 United Kingdom U.K.
 United States US
 Unreimbursed Amount Section 2.03(c)(i)
 US Collateral
 33




---



##### 



US Collateral Documents Section 6.13
 US Loan Party
 US Mortgages
 US Security Agreement Exhibit G-1 Section 6.13
 US Subsidiary
 US Subsidiary Guarantors Schedule 6.13 Section 6.13
 US Subsidiary Guaranty Exhibit
F-2
 Yen ¥
 Yen Equivalent
 Other Interpretive Provisions
 include includes including will shall
 34




---



##### 



herein hereof hereunder asset property
 from from and including to until to but excluding through to and including
  Accounting Terms Generally except
 Changes in GAAP provided that
 Consolidation of Variable Interest Entities
 35




---



##### 



Rounding
 Exchange Rates; Currency Equivalents
  Change of Currency
 Times of Day
 Letter of Credit Amounts provided
 36




---



##### 



The Loans
 The Term Loan Borrowing Section 2.01(a) Section 2.02(c)
 The Revolving Credit Borrowings Revolving Credit Loan provided plus plus Section
2.01(b) Section 2.05 Section
2.01(b)
 Borrowings, Conversions and Continuations of Loans  Section 2.02(a) Sections 2.03(c) 2.04(c)
 37




---



##### 



provided
 Section 4.02 Section
4.01
 38




---



##### 



provided first second
    Letters of Credit The Letter of Credit Commitment Section 2.03 Section 2.03(b) provided
 39




---



##### 



plus
  Section 2.03(b)(iii)
      40




---



##### 



Section
2.03(c)
   Article IX Article IX
 Procedures for Issuance and Amendment of Letters of Credit; Auto-Extension
Letters of Credit
 41




---



##### 



Article IV times
 Auto-Extension Letter
of Credit provided Non-Extension Notice Date provided clause (ii) (iii) Section 2.03(a)
 42




---



##### 



Section 4.02
 Auto-Reinstatement Letter
of Credit Non-Reinstatement
Deadline Section 4.02
  Drawings and Reimbursements; Funding of Participations
 43




---



##### 



Honor Date Unreimbursed Amount Section 2.02 Section 4.02 Section 2.03(c)(i) provided
 Section
2.03(c)(i) Section 2.03(c)(iii)
 Section 4.02 Section 2.03(c)(ii) Section
2.03
 44




---



##### 



Section 2.03(c)
 Section 2.03(c) provided Section 2.03(c) Section 4.02
 Section
2.03(c) Section 2.03(c)(ii) clause
(vi)
 Repayment of Participations Section
2.03(c)
 45




---



##### 



Section 2.03(c)(i) Section 10.05
 Obligations Absolute
     46




---



##### 



Role of L/C Issuer provided clauses (i) (v) Section
2.03(e) provided
 47




---



##### 



Cash Collateral
 pro rata
  Sections 2.05 8.02(c) Section
2.03 Section 2.05 Section 8.02(c) Cash
Collateralize
 48




---



##### 



provided
 Applicability of ISP
 Letter of Credit Fees Letter of Credit Fee times Section 1.08
 Fronting Fee and Documentary and Processing Charges Payable to L/C Issuer Section 1.08
 49




---



##### 



Conflict with Issuer Documents
 Letters of Credit Issued for Subsidiaries
 Swing Line Loans The Swing Line Section 2.04 Swing Line Loan provided plus plus provided further Section 2.04 Section 2.05 Section 2.04 times
 Borrowing Procedures
 50




---



##### 



Section 2.04(a) Article IV
 Refinancing of Swing Line Loans Section
2.02 Section 4.02 Section 2.04(c)(ii)
 Section 2.04(c)(i) Section 2.04(c)(i)
 Section
2.04(c) Section 2.04(c)(i)
 51




---



##### 



clause (iii)
 Section 2.04(c) provided Section
2.04(c) Section 4.02
 Repayment of Participations
 Section 10.05
 Interest for Account of Swing Line Lender
 52




---



##### 



Section 2.04
 Payments Directly to Swing Line Lender
 Prepayments Prepayment Notice provided Prepayment
Date Prepayment Amount clause (y) Declining Lender Notice
 53




---



##### 



Section 3.05 Section 2.05(a)
 provided
 Mandatory
 pro rata pro rata provided Section 2.03(g)(ii) Section 2.05(c)
 Section 2.05(c) first second third
 54




---



##### 



Borrower Account Section 2.05(d)
 Termination or Reduction of Commitments provided
 Section 2.06
 Repayment of Loans Term Loans
 55




---



##### 



Date
    
    PercentageSeptember 1, 2006 through (and including) June 30, 2007
    
    
    5.0
    %September 1, 2007 through (and including) December 31, 2008
    
    
    10.0
    %March 31, 2009
    
    
    10.0
    %June 30, 2009
    
    
    0.0
    %
 provided
 Revolving Credit Loans
 Swing Line Loans
 Interest Section 2.08(b) (i) plus plus plus
    56




---



##### 



Fees Sections 2.03(i) (j)
 Commitment Fee times Article IV
 Other Fees
  Computation of Interest and Fees provided
 57




---



##### 



Section 2.12(a)
 Evidence of Debt
 Section 2.11(a)
 Payments Generally; Administrative Agents Clawback General
 58




---



##### 



Funding by Lenders; Presumption by Administrative Agent Section 2.02 Section
2.02
 Payments by Borrowers; Presumptions by Administrative Agent
 59




---



##### 



clause (b)
 Failure to Satisfy Conditions Precedent Article II Article IV
 Obligations of Lenders Several Section 10.04(c) Section 10.04(c) Section 10.04(c)
 Funding Source
 Insufficient Funds first second
 Sharing of Payments by Lenders
 60




---



##### 



provided
    Designated Borrowers; Relationship among Borrowers Applicant Borrower Exhibit H Designated Borrower Request and Assumption
Agreement
 61




---



##### 



Exhibit
I Designated Borrower Notice provided provided further Section 6.13 Section 2.14
  Section 2.14
  62




---



##### 



Increase in Revolving Credit Commitments Request for Increase provided
 Lender Elections to Increase
 Notification by Administrative Agent; Additional Lenders
 Effective Date and Allocations Revolving Credit Increase Effective Date
 Conditions to Effectiveness of Increase Article V Section 2.15 clauses (a) (b) Section 5.05 clauses (a) (b) Section 6.01
 63




---



##### 



Section 3.05
 Conflicting Provisions Section 2.13 10.01
 
 Taxes Payments Free of Taxes provided
 Payment of Other Taxes by the Borrowers clause (a)
 Indemnification by the Borrowers
 Evidence of Payments
 64




---



##### 



Status of Lenders
       65




---



##### 



Treatment of Certain Refunds provided
 Illegality Section 3.06
 66




---



##### 



Inability to Determine Rates
 Increased Costs; Reserves on Eurodollar Rate Loans Increased Costs
Generally
 Section 3.04(e)
 Section 3.01
 67




---



##### 



Capital Requirements
 Certificates for Reimbursement clause (a) (b)
 Delay in Requests provided
 68




---



##### 



Additional Reserve Requirements provided
 Compensation for Losses
    Section
10.13
 69




---



##### 



Section 3.05
 Mitigation Obligations; Replacement of Lenders. Designation of a
Different Lending Office Section 3.04 Section 3.01 Section 3.02 Section 3.01 3.04 Section 3.02
 Replacement of Lenders Section 3.04 Section
3.01 Section 10.13
 Survival Article III
 
 Conditions of Initial Credit Extension Section
6.26
  70




---



##### 



Lost AJI Stock Certificates
  clause (B)
  71




---



##### 



Schedule 5.08(d)(i)
       72




---



##### 



Article IV
 Exhibit K
   Section 7.11
  Section 2.05(d)
 73




---



##### 



Section 9.04 Section 4.01
 Conditions to all Credit Extensions
 Article V
 74




---



##### 



Section 4.02 Sections
5.05(a) (b) Section 6.01(a) (b)
    Section 2.14
  Sections 4.02(a) (b)
 
  Existence, Qualification and Power
 75




---



##### 



clause (b)(i) (c)
 Authorization; No Contravention
 Governmental Authorization; Other Consents Schedule 5.03
  Binding Effect
 76




---



##### 



Financial Statements; No Material Adverse Effect; No Internal Control Event
  Section 4.01 clauses (i) (ii) Schedule 5.05 Existing
Indebtedness
   Section 4.01
 77




---



##### 



Section
4.01 Section 6.01(c)
 Section 6.01
 Litigation Schedule
5.06 Disclosed Litigation Schedule 5.06
 Material Contracts Section 6.02(i) Schedule
5.07
 Ownership of Property; Liens; Investments
 Schedule 5.08(b)
 78




---



##### 



Schedule 5.08(b) Section 7.01
 Section 6.02(i) Schedule 5.08(c)
 Section 6.02(i) Schedule
5.08(d)(i)
 Section 6.02(i) Schedule 5.08(d)(ii)
 Section 6.02(i) Schedule 5.08(e)
 79




---



##### 



Section 6.02(i) Schedule 5.08(f)
 Section 6.02(i) Schedule 5.08(g)
 Environmental Compliance
   80




---



##### 



Insurance
 Taxes
 ERISA Compliance
   81




---



##### 



Foreign Government Scheme or Arrangement Foreign Plan
  Schedule 5.12(d)(ii)
  Subsidiaries; Equity Interests; Loan Parties Part (a) Schedule 5.13 Part (a) Schedule 5.13 Part(b) Schedule 5.13 Part (c) Schedule 5.13 Part (d) Schedule 5.13 Section 4.01(a)(vii)
 82




---



##### 



Margin Regulations; Investment Company Act; Public Utility Holding Company Act Section 7.01 Section 7.05 Section 8.01(e)
  Disclosure provided
 Compliance with Laws
 Intellectual Property; Licenses, Etc. IP Rights
 83




---



##### 



Section 6.02(i) Schedule 5.17
 Solvency
 Casualty, Etc.
 Labor Matters
 Collateral Documents Section 7.01 Schedule 5.21
 Representations as to Foreign Obligors
 Applicable Foreign Obligor
Documents
 84




---



##### 



Schedule 5.22
 clause (ii)
 Issuance of Subordinated Debt; Status of Obligations as Senior Indebtedness, etc
 85




---



##### 



Other Representations and Warranties
 
 Sections 6.01 6.02 6.03
 Financial Statements
  86




---



##### 



Section 6.02(d) Section 6.01(a) (b) Sections 6.01(a) (b)
 Certificates; Other Information
 Section 6.01(a)
 Sections 6.01(a) (b)
 87




---



##### 



Sections 6.01(a) (b)
 Section 6.01 Section 6.02
 Schedule
6.02(f)
   88




---



##### 



Schedule 5.07 Schedules 5.08(c) 5.08(d)(i) 5.08(d)(ii) Schedule 5.08(f) Schedule 5.08(g) Schedule 5.17 Schedules 5.08(e) 5.13
  Section 6.01(a) (b) Section 6.02(d) Schedule 10.02
 89




---



##### 



provided i.e. Section 6.02(b)
 Borrower Material Platform Public Lender Section
10.07
 Notices
 Section 8.01(g)
  90




---



##### 



Section 6.01(a)(ii)
  Section 6.03 Section 6.03(f) Section 6.03(a)
 Payment of Obligations
 Preservation of Existence, Etc. Section 7.04 7.05
 Maintenance of Properties
 91




---



##### 



Maintenance of Insurance
 Compliance with Laws
 Books and Records
 Inspection Rights provided
 Use of Proceeds
 ASI as Loan Party and Equity Interests of ASI Section 2.14 Section 6.13
 92




---



##### 



Section
6.13
 Covenant to Guarantee Obligations and Give Security
   Section 4.01(a)(iii)
 Section 6.13
 93




---



##### 



clauses
(i) (iii) (iv)
  provided clauses (i) (vi) clause (x) clauses (i) (iii) (vi)
 Section 7.02
   94




---



##### 



clauses (ii) (iii)
  Section 6.02(i) Schedules 5.07 5.08(c) 5.08(d)(i) 5.08(d)(ii) 5.08(e) 5.08(f) 5.17 Section 7.02
  95




---



##### 



clauses (ii) (iii)
 provided
 provided clauses (i) (iv) clause (x) clauses
(ii) (iv)
    96




---



##### 



Section 4.01(a)(iii)
 Section 6.13
 clauses (ii) (iii)
   Compliance with Environmental Laws
 97




---



##### 



provided
 Preparation of Environmental Reports
 Further Assurances Filing System
 98




---



##### 



Compliance with Terms of Leaseholds Section 6.01(c))
 Foreign Government Scheme or Arrangement; Foreign Plan.
  clause (b)
  99




---



##### 



Lien Searches
 Material Contracts
 Designation as Senior Debt Designated Senior
Indebtedness
 Security Interests in Accounts, Etc Subject to Section 6.26 provided
 Approvals and Authorizations
 Taxpayer Identification Number
 100




---



##### 



Lost AJI Stock Certificates
 Post Closing Deliverables
    Section 6.22
 ATTL Section 6.13
 
  101




---



##### 



Liens
  Schedule 5.08(b) provided Section 7.02(d) Section 7.02(d)
      Section 8.01(h)
 Section 7.02(f) provided
 102




---



##### 



Section 7.05(f)
 provided
 Indebtedness
 provided
 Section 7.03
  Schedule 7.02 Continuing Debt provided clause (d) Section 7.01(b)
 103




---



##### 



Section 7.01(i) provided
 Section 7.03(i)
 Section 7.18
 provided pro forma Section 7.2.11 clause (i) clause (j)
 provided pro forma Section 7.2.11 clause (j) clause
(i)
  Investments
  104




---



##### 



Section 7.02
 Section 7.03(c)(i) Schedule 5.08(e)
 Section 7.02(a)
 provided Section 7.03(h)
 Section 6.13
   105




---



##### 



Section 7.03(h)
 Section 7.11 Section 6.01(a) (b)
 clause (vi)
 Section 7.03 provided Section 7.03(i)
   106




---



##### 



Section 7.11 Section 6.01(a) (b)
  provided
  Fundamental Changes
 provided provided provided further
 provided
 107




---



##### 



provided further
  Section 7.03 provided
 provided
 Dispositions
    Section 7.04(b) provided
 Section 7.04
  108




---



##### 



provided
 Section 7.05 provided clause (g)
 provided Section 7.05(a) Section 7.05
(g)
 Restricted Payments
 clause (d)
   Section 7.16
 Change in Nature of Business
 Transactions with Affiliates provided
 109




---



##### 



Burdensome Agreements
 Use of Proceeds
 Financial Covenants
 Consolidated Total Leverage Ratio
 Consolidated Senior Leverage Ratio
 MaximumConsolidatedSenior LeverageFour Fiscal Quarters Ending
    
    RatioClosing Date through December 30, 2006
    
    
    2.25:1December 31, 2006 and each fiscal quarter
thereafter
    
    
    2.00:1
 Consolidated Fixed Charge Coverage Ratio
 110




---



##### 



MinimumConsolidatedFixed ChargeFour Fiscal Quarters Ending
    
    Coverage RatioClosing Date through December 30, 2006
    
    
    2.00:1December 31, 2006 and each fiscal quarter
thereafter
    
    
    2.50:1
 Capital Expenditures
 Fiscal Year
    
    Amount2007
    
    $
    15,000,0002008
    
    $
    10,000,0002009
    
    $
    10,000,000
 Amendments of Organization Documents
 Accounting Changes
 Prepayments, Etc. of Indebtedness Schedule 7.02 Section 7.02(d)
 Amendment, Etc. of Acquisition Agreement, Related Documents and Debt Documents
 111




---



##### 



Schedule
7.02 Section 7.02
 Designation of Senior Debt
 Lease Obligations
 
 Events of Default
 Non-Payment
 Specific Covenants Section 6.01 6.02 6.10 6.11 6.12 6.13 6.18 6.22 6.25 6.26 Article VII Article VII
 112




---



##### 



Other Defaults Section 6.03 6.05(a)(ii) (b) (c) Section 8.01(a) (b) Section 8.01(c)(i)
 Representations and Warranties
 Cross-Default
 Insolvency Proceedings, Etc.
 113




---



##### 



Inability to Pay Debts; Attachment
 Judgments
 ERISA; Foreign Government Scheme or Arrangement clauses (i) (ii)
 Invalidity of Loan Documents
 114




---



##### 



Change of Control
 Collateral Documents Section 4.01 6.13 Section 7.01
 Subordination Subordinated Provisions
 Material Contracts
 Remedies Upon Event of Default
   115




---



##### 



pro rata
  provided Section 8.01(g)(iii) (iv)
 Application of Funds Section
8.02 Section 8.02
 First Article III
 Second Article
III Second
 Third Third
 Fourth Fourth
 116




---



##### 



Fifth
 Last
 Section 2.03(c) Fifth
 
 Appointment and Authority
 Section 9.05 Article IX Article X Section 10.04(c)
 Rights as a Lender
 117




---



##### 



Exculpatory Provisions
  provided
  Sections 10.01 8.02
  118




---



##### 



Article IV
 Reliance by Administrative Agent
 Delegation of Duties
 Resignation of Administrative Agent provided
 119




---



##### 



Section 10.04
 Non-Reliance on Administrative Agent and Other Lenders
 No Other Duties, Etc.
 Administrative Agent May File Proofs of Claim
 Sections 2.03(i) (j) 2.09 10.04
 120




---



##### 



Sections 2.09 10.04
  Collateral and Guaranty Matters
 Section
10.01
  Section 7.01(i)
 Section 9.10 Section
9.10 Section 9.10
 121




---



##### 



Amendments, Etc. provided
 Section 4.01 Section
4.01(b)(i) Section 4.02
 clause (a) Section 4.02
 Section 8.02
  clause (v) Section
10.01 provided
 Section 2.13 Section 8.03
 Section 10.01 clause (ii) Section 10.01(g)
 122




---



##### 



provided further Section 10.06(h)
 Notices; Effectiveness; Electronic Communications Notices
Generally clause (b)
 Schedule 10.02
   123




---



##### 



clause (b) clause (b)
 Electronic Communications provided Article II provided
 provided clause (i)
 The Platform Agent Parties provided
 124




---



##### 



Change of Address, Etc
 Reliance by Administrative Agent, L/C Issuer and Lenders
 No Waiver; Cumulative Remedies
 Expenses; Indemnity; Damage Waiver Costs and Expenses
 125




---



##### 



Indemnification by the Company Indemnitee provided
 Reimbursement by Lenders clause (a) (b)
 126




---



##### 



provided clause (c) Section
2.12(d)
 Waiver of Consequential Damages, Etc. clause (b) clause (b)
 Payments
 Survival
 Payments Set Aside
 127




---



##### 



clause (b)
 Successors and Assigns Successors and Assigns Generally Section 10.06(b) Section 10.06(d) Section 10.06(f) Section 10.06(h) clause (d)
 Assignments by Lenders Section
10.06(b) provided
 Minimum Amounts
  clause (b)(i)(A)
 128




---



##### 



provided
 Proportionate Amounts clause (ii)
 Required Consents clause (b)(i)(B)
     129




---



##### 



Assignment and Assumption Schedule 10.06 provided
 No Assignment to Company
 No Assignment to Natural Persons
 clause (c) Sections 3.01 3.04 3.05 10.04 Section
10.06(d)
 Register Register
 Participations Participant
 130




---



##### 



provided
 provided Section 10.01 clause (e) Sections 3.01 3.04 3.05 Section 10.06(b) Section 10.08 provided Section 2.13
 Limitations upon Participant Rights Section 3.01 3.04 Section 3.01 Section 3.01(e)
 Certain Pledges provided
 Electronic Execution of Assignments
 131




---



##### 



Special Purpose Funding Vehicles Granting Lender SPC provided Section 2.12(b)(ii) Section
3.04
 Resignation as L/C Issuer or Swing Line Lender after Assignment Section 10.06(b) provided
 132




---



##### 



Section 2.03(c) Section
2.04(c)
 Treatment of Certain Information; Confidentiality
 Information provided
 133




---



##### 



Right of Setoff provided
 Interest Rate Limitation Maximum Rate
 Counterparts; Integration; Effectiveness Section 4.01
 134




---



##### 



Survival of Representations and Warranties
 Severability
 Replacement of Lenders Section
3.04 Section 3.01 Section 10.06 provided
 Section 10.06(b)
 Section 3.05
 Section 3.04 Section 3.01
 135




---



##### 



Governing Law; Jurisdiction; Etc. GOVERNING LAW
 SUBMISSION TO JURISDICTION
 WAIVER OF VENUE
 SERVICE OF PROCESS SECTION 10.02
 136




---



##### 



Waiver of Jury Trial
 California Judicial Reference provided Section 10.04
 No Advisory or Fiduciary Responsibility
 137




---



##### 



USA PATRIOT Act Notice Act
 Time of the Essence
 Judgment Currency
 138




---



##### 



Judgment Currency Agreement Currency
 Appointment and Authority of the Company
 ENTIRE AGREEMENT
 Lenders Joint and Several Rights with Respect to Taiwanese Collateral provided Section 9.01
 139




---



##### 



ASYST TECHNOLOGIES, INC.By:Name:Title:
 ASYST JAPAN, INC.By:Name:Title:
 S-1




---



##### 



BANK OF AMERICA, N.A.,
as Administrative AgentBy:Name:Title:
 S-2




---



##### 



BANK OF AMERICA, N.A.,
as a Lender, L/C Issuer and Swing Line LenderBy:Name:Title:
 S-3




---



##### 



COMERICA BANK,
as a LenderBy:Name:Title:
 S-4




---



##### 



KEYBANK NATIONAL ASSOCIATIONas a LenderBy:Name:Title:
 S-5




---



##### 



UNION BANK OF CALIFORNIA, N.A.as a LenderBy:Name:Title:
 S-6




---



##### 



DEVELOPMENT BANK OF JAPANas a LenderBy:Name:Title:
 S-7




---



##### 



EXHIBIT A
 FORM OF COMMITTED LOAN NOTICE
 
   Agreement Company AJI Borrowers
 Applicable Other Borrower
 o
    
    A Borrowing of [Revolving Credit]
[Term] Loans
    
    o
    
    A conversion or continuation of
[Revolving Credit] [Term] Loans
 1.
    
    On
(a Business Day).2.
    
    In the amount of $.3.
    
    Comprised of .[Type of Loan requested]4.
    
    In the following currency: .5.
    
    For Eurodollar Rate Loans: with an Interest Period of months.6.
    
    On behalf of [insert name of applicable Other/Designated
Borrower].
 Section 2.01(b) 1
 Sections
4.02(a) (b) (c)
 
 1
    
    Include this sentence in the case of a
Revolving Credit Facility.




---



##### 



ASYST TECHNOLOGIES, INC.By:Name:Title:




---



##### 



EXHIBIT B
 FORM OF SWING LINE LOAN NOTICE
 
 To:
    
    Bank of America, N.A., as Swing Line LenderBank of America, N.A., as Administrative Agent
  Agreement Company
  1.
    
    On  (a Business Day).2.
    
    In the amount of $  .
 Section 2.04(b)
 Sections
4.02(a) (b) (c)
 ASYST TECHNOLOGIES, INC.By:Name:Title:




---



##### 



EXHIBIT C-1
 FORM OF TERM NOTE
 
 Borrower   Lender Agreement




---



##### 



ASYST JAPAN, INC.By:Name:Title:




---



##### 



Currency
    
    
    
    Amount of
    
    Outstandingand
    
    End of
    
    Principal or
    
    PrincipalType of
    
    Amount of
    
    Interest
    
    Interest Paid
    
    Balance This
    
    NotationDate
    
    Loan Made
    
    Loan Made
    
    Period
    
    This Date
    
    Date
    
    Made By
 C-1-3




---



##### 



EXHIBIT C-2
 FORM OF [REVOLVING CREDIT] [SWING LINE] NOTE
 
 Borrower   Lender Agreement
 Section 2.04(f)




---



##### 



[BORROWER]By:Name:Title:




---



##### 



LOANS AND PAYMENTS WITH RESPECT THERETO
 Amount ofCurrency
    
    
    
    Principal or
    
    Outstandingand
    
    End of
    
    Interest
    
    PrincipalType of
    
    Amount of
    
    Interest
    
    Paid This
    
    Balance
    
    NotationDate
    
    Loan Made
    
    Loan Made
    
    Period
    
    Date
    
    This Date
    
    Made By
 C-2-3




---



##### 



EXHIBIT D
 FORM OF COMPLIANCE CERTIFICATE
 
   Agreement Company
 2
 [Use following paragraph 1 for fiscal year-end financial
statements]
 Schedule 1 Section 6.01(a)
 [Use following paragraph 1 for fiscal quarter-end financial
statements]
 Schedule 1 Section 6.01(b)
 
 2
    
    This Certificate should be from the Chief
Executive Officer or Treasurer of the Company.




---



##### 



[select one:]
  or
  Article V clauses (a) (b) Section 5.05 clauses (a) (b) Section 6.01
 Schedules 2 3 Schedules 2 3




---



##### 



IN WITNESS WHEREOF,
 ASYST TECHNOLOGIES, INC.By:Name:Title:




---



##### 



Statement Date
 SCHEDULE 2
   I.
    

Section 7.11(a)  Consolidated Total Leverage Ratio.A.
    
    Consolidated Funded Indebtedness at Statement Date
    
    $B.
    
    Consolidated EBITDA for
Measurement Period ending on above date (Subject Period):
    
    $1.
    
    Consolidated Net Income for Subject Period:
    
    $2.
    
    Consolidated Interest Charges for Subject Period:
    
    $3.
    
    Provision for income taxes for Subject Period:
    
    $4.
    
    Depreciation expenses for Subject Period:
    
    $5.
    
    Amortization expenses for Subject Period:
    
    $6.
    
    Income Tax credits for Subject Period:
    
    $8.
    
    Consolidated EBITDA (Lines II.A.1 + 2 + 3 + 4 + 5   6):
    
    $C.
    
    Consolidated Total Leverage Ratio (Line I.A  ̧ Line I.B):
    
    ____ to 1Maximum permitted:
 Maximum Consolidated TotalFour Fiscal Quarters Ending
    
    Leverage RatioClosing Date through June 29, 2006
    
    3.75:1June 30, 2006 and each fiscal quarter thereafter
    
    3.50
 II.
    
    Section 7.11
(b)  Consolidated Senior Leverage Ratio.A.
    
    Consolidated Senior Indebtedness at Statement Date
    
    $B.
    
    Consolidated EBITDA for Subject Period (Line I.B.9 above):
    
    $C.
    
    Consolidated Senior Leverage Ratio (Line II.A  ̧ Line II.B):
    
    ____ to 1Maximum permitted:




---



##### 



Maximum Consolidated SeniorFour Fiscal Quarters Ending
    
    Leverage RatioClosing Date through December 30, 2006
    
    2.25:1December 31, 2006 and each fiscal quarter thereafter
    
    2.00:1
 III.
    

Section 7.11(c)  Consolidated Fixed Charge Coverage RatioA.
    
    Consolidated EBITDA for Subject Period (Line I.B.9 above):
    
    $B.
    
    Cash Capital Expenditures for Subject Period:
    
    $C.
    
    Federal, State, Local and Foreign Cash Income Taxes
    
    $D.
    
    Consolidated Interest Charges for Subject Period:
    
    $E.
    
    Scheduled Principal payments, etc. for Subject Period:
    
    $F.
    
    Consolidated Fixed Charge Coverage Ratio ([Line III.A  Line III.B  Line III.C]  ̧
[Line III.D +
 Line III.E]):Minimum required:
 Minimum Consolidated FixedFour Fiscal Quarters Ending
    
    Charge Coverage RatioClosing Date through December 30, 2006
    
    2.00:1December 31, 2006 and each fiscal quarter thereafter
    
    2.50:1




---



##### 



IV.
    
    Section 7.11  Capital Expenditures.A.
    
    Capital Expenditures made during fiscal year to date:
    
    $B.
    
    Maximum permitted Capital Expenditures
($_____________:
    
    $C.
    
    Excess (deficient) for covenant compliance
(Line IV.B  IV.A):
    
    $




---



##### 



Statement Date
 SCHEDULE 3
   Consolidated EBITDA
   TwelveConsolidated
    
    Quarter
    
    
    Quarter
    
    
    Quarter
    
    
    Quarter
    
    
    MonthsEBITDA
    
    Ended
    
    
    Ended
    
    
    Ended
    
    
    Ended
    
    
    EndedConsolidated
Net Income+ Consolidated
Interest Charges+ income taxes+ depreciation
expense+ amortization
expense income tax credits= Consolidated EBITDA




---



##### 



EXHIBIT E
 ASSIGNMENT AND ASSUMPTION
 Assignment and Assumption 3 Assignor 4 Assignee 5 6 Credit Agreement
 7 clause
(i) clauses (i) (ii)
 
 3
    
    For bracketed language here and elsewhere in
this form relating to the Assignor(s), if the assignment is from a single
Assignor, choose the first bracketed language. If the assignment is from
multiple Assignors, choose the second bracketed language.4
    
    For bracketed language here and elsewhere in
this form relating to the Assignee(s), if the assignment is to a single
Assignee, choose the first bracketed language. If the assignment is to
multiple Assignees, choose the second bracketed language.5
    
    Select as appropriate.6
    
    Include bracketed language if there are either
multiple Assignors or multiple Assignees.7
    
    Include all applicable subfacilities.




---



##### 



Assigned Interest
 1.
    
    Assignor[s]:2.
    
    Assignee[s]:[for each Assignee, indicate [Affiliate][Approved Fund] of [identify Lender]]3.
    
    Borrower(s): Asyst Technologies, Inc., a California corporation and Asyst Japan,
Inc., a Japanese corporation and the Designated Borrowers from time
to time party to the Credit Agreement4.
    
    Administrative Agent: Bank of America, N.A., as the administrative agent under the
Credit Agreement5.
    
    Credit Agreement: Credit Agreement, dated as of June 22, 2006 (as amended, restated,
extended, supplemented or otherwise modified in writing from time to time, the
Agreement; the terms defined therein being used herein as therein defined), among
Asyst Technologies, Inc., a California corporation (the Company) and Asyst Japan,
Inc., a Japanese corporation, the Designated Borrowers from time to time party thereto, the
Lenders from time to time party thereto, and Bank of America, N.A., as Administrative Agent,
L/C Issuer and Swing Line Lender.6.
    
    Assigned Interest[s]:
 AggregateAmount of
    
    
    
    PercentageCommitment/
    
    Amount of
    
    Assigned ofFacility
    
    Loans
    
    Commitment/Loans
    
    Commitment/
    
    CUSIPAssignor[s]
    
    Assignee[s]
    
    Assigned
    for all Lenders8
    Assigned
    Loans9
    Number$
    
    $
    
    %$
    
    $
    
    %$
    
    $
    
    %
 
 8
    
    Amounts in this column and in the column
immediately to the right to be adjusted by the counterparties to take into
account any payments or prepayments made between the Trade Date and the
Effective Date.9
    
    Set forth, to at least 9 decimals, as a
percentage of the Commitment/Loans of all Lenders thereunder.




---



##### 



[7.
    
    Trade Date: ]10
 
  ASSIGNOR
[NAME OF ASSIGNOR]By:Title:ASSIGNEE
[NAME OF ASSIGNEE]By:Title: 11
 BANK OF AMERICA, N.A., as
     Administrative AgentBy:Title:[Consented to:]12ASYST TECHNOLOGIES, INC.By:Title:
 
 10
    
    To be completed if the Assignor and the
Assignee intend that the minimum assignment amount is to be determined as of
the Trade Date.11
    
    To be added only if the consent of the
Administrative Agent is required by the terms of the Credit Agreement.12
    
    To be added only if the consent of the
Company and/or other parties (e.g. Swing Line Lender, L/C Issuer) is required
by the terms of the Credit Agreement.




---



##### 



ANNEX 1 TO ASSIGNMENT AND ASSUMPTION
 [   ] 13
 STANDARD TERMS AND CONDITIONS FOR
 ASSIGNMENT AND ASSUMPTION
  Assignor
 Assignee Section
10.06(b)(iii) (v) (vi) (vii) Section 10.06(b)(iii)
 
 13
    
    Describe Credit Agreement at option of
Administrative Agent.




---



##### 



Payments
 General Provisions  confirm that
choice of law provision parallels the Credit Agreement




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EXHIBIT F-1
 FORM OF COMPANY GUARANTY




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EXHIBIT F-2
 FORM OF US SUBSIDIARY GUARANTY




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EXHIBIT F-3
 FORM OF JAPANESE GUARANTY




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EXHIBIT F-4
 FORM OF UK SUBSIDIARY GUARANTY




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EXHIBIT F-5
 FORM OF TAIWANESE SUBSIDIARY GUARANTY




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EXHIBIT G-1
 FORM OF US SECURITY AGREEMENT




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EXHIBIT G-2 A & B
 FORM OF JAPANESE SECURITY AGREEMENTS




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EXHIBIT G-3 A & B
 FORM OF UK SECURITY AGREEMENTS




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EXHIBIT G-4 A, B, C, D & E
 FORM OF TAIWANESE SECURITY AGREEMENTS




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EXHIBIT I
 FORM OF DESIGNATED BORROWER
REQUEST AND ASSUMPTION AGREEMENT
 
   Section 2.14 Agreement Company
 Designated Borrower
 Section 2.14
 Complete if the Designated Borrower is a Domestic Subsidiary
 Complete if the Designated Borrower is a Foreign Subsidiary
 Identification Number
    
    Jurisdiction of Organization




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Section 2.14
   IN WITNESS WHEREOF
 [DESIGNATED BORROWER]By:Title:ASYST TECHNOLOGIES, INC.By:Title:




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EXHIBIT J
 FORM OF DESIGNATED BORROWER NOTICE
 
    Section 2.14 Agreement Company
 
  BANK OF AMERICA, N.A.,as Administrative AgentBy:Title:




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EXHIBIT K
 FORM OF CLOSING DATE CERTIFICATE
 
   Agreement Company
 
 Consummation of Transaction
 Delivery of Acquisition Agreement Annex I
 Payment of Outstanding Indebtedness, etc Annex II
 Financial Information, etc Annex III




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Insurance Annex IV
 Closing Fees, Expenses, etc.
 Material Adverse Effect
 Closing Conditions




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,
 ASYST TECHNOLOGIES, INC.By:Name:Title:ASYST JAPAN, INC.By:Name:Title:ASYST TECHNOLOGIES EUROPE LTD.By:Name:Title:ASYST TECH TAIWAN LTD.By:Name:Title:




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ANNEX I TO CLOSING DATE CERTIFICATE
 ACQUISITION AGREEMENT




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ANNEX II TO CLOSING DATE CERTIFICATE
 UCC TERMINATION STATEMENTS, PAYOFF LETTERS, ETC.




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ANNEX III TO CLOSING DATE CERTIFICATE
 FINANCIAL INFORMATION




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ANNEX IV TO CLOSING DATE CERTIFICATE
 INSURANCE




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EXHIBIT L
 FORM OF SOLVENCY CERTIFICATE
 
   Agreement Company
 Chief Financial Officer
   pro forma
 L-1
Form of Solvency Certificate




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ASYST TECHNOLOGIES, INC.By:Name:Title:ASYST JAPAN, INC.By:Name:Title:ASYST TECHNOLOGIES EUROPE LTD.By:Name:Title:ASYST TECH TAIWAN LTD.By:Name:Title:
 L-2
Form of Solvency Certificate