# Patent

## Title
Immersion catadioptric projection objective having two intermediate images

## Abstract

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1<10 holds.

## Background
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a continuation of U.S. application Ser. No. 13/470,956, filed May 14, 2012, which is a continuation of U.S. application Ser. No. 11/653,366, filed Jan. 16, 2007, now U.S. Pat. No. 8,208,198 issued on Jun. 26, 2012, which is a continuation-in-part of International Application PCT/EP2005/007431, filed Jul. 8, 2005, which claims benefit of U.S. Provisional Applications 60/587,504, filed Jul. 14, 2004, 60/591,775, filed Jul. 27, 2004, 60/612,823, filed Sep. 24, 2004, 60/617,674, filed Oct. 13, 2004, 60/654,950, filed Feb. 23, 2005, and is further a continuation-in-part of U.S. application Ser. No. 11/035,103, filed Jan. 14, 2005, now U.S. Pat. No. 7,385,756, issued on Jun. 10, 2008. U.S. application Ser. No. 11/035,103 claims benefit of U.S. Provisional Applications 60/536,248, filed Jan. 14, 2004, 60/587,504, filed Jul. 14, 2004, 60/591,775, filed Jul. 27, 2004, 60/612,823, filed Sep. 24, 2003, and 60/617,674, filed Oct. 13, 2004. The disclosures of each of these related applications are hereby incorporated by reference into the present continuation application.


BACKGROUND OF THE INVENTION
1. Field of the Invention
The invention relates to a catadioptric projection objective for imaging a pattern arranged in an object surface onto an image surface.
2. Description of the Related Art
Projection objectives of that type are employed on projection exposure systems, in particular wafer scanners or wafer steppers, used for fabricating semiconductor devices and other types of microdevices and serve to project patterns on photomasks or reticles, hereinafter referred to generically as “masks” or “reticles,” onto an object having a photosensitive coating with ultrahigh resolution on a reduced scale. In order create even finer structures, it is sought to both increase the image-end numerical aperture (NA) of the projection objective to be involved and employ shorter wavelengths, preferably ultraviolet light with wavelengths less than about 260 nm.
However, there are very few materials, in particular, synthetic quartz glass and crystalline fluorides, that are sufficiently transparent in that wavelength region available for fabricating the optical elements required. Since the Abbé numbers of those materials that are available lie rather close to one another, it is difficult to provide purely refractive systems that are sufficiently well color-corrected (corrected for chromatic aberrations).
In lithography, a flat (planar) image is essential to expose planar substrates, such as semiconductor wafers. However, generally the image surface of an optical system is curved, and the degree of curvature is determined by the Petzval sum. The correction of the Petzval sum is becoming more important in view of the increasing demands to project large object fields on planar surfaces with increased resolution.
One approach for obtaining a flat image surface and good color-correction is the use of catadioptric systems, which combine both refracting elements, such as lenses, and reflecting elements, such as mirror, preferably including at least one concave mirror. While the contributions of positive-powered and negative-powered lenses in an optical system to overall power, surface curvature and chromatic aberrations are opposite to each other, a concave mirror has positive power like a positive-powered lens, but the opposite effect on surface curvature without contributing to chromatic aberrations.
Further, the high prices of the materials involved and limited availability of crystalline calcium fluoride in sizes large enough for fabricating large lenses represent problems. Measures that will allow reducing the number and sizes of lenses and simultaneously contribute to maintaining, or even improving, imaging fidelity are thus desired.
Catadioptric projection objectives having at least two concave mirrors have been proposed to provide systems with good color correction and moderate lens mass requirements. The U.S. Pat. No. 6,600,608 B1 discloses a catadioptric projection objective having a first, purely refractive objective part for imaging a pattern arranged in the object plane of the projection objective into a first intermediate image, a second objective part for imaging the first intermediate image into a second intermediate image and a third objective part for imaging the second intermediate image directly, that is without a further intermediate image, onto the image plane. The second objective part is a catadioptric objective part having a first concave mirror with a central bore and a second concave mirror with a central bore, the concave mirrors having the mirror faces facing each other and defining an intermirror space or catadioptric cavity in between. The first intermediate image is formed within the central bore of the concave mirror next to the object plane, whereas the second intermediate image is formed within the central bore of the concave mirror next to the object plane. The objective has axial symmetry and provides good color correction axially and laterally. However, since the reflecting surfaces of the concave mirrors are interrupted at the bores, the pupil of the system is obscured.
The Patent EP 1 069 448 B1 discloses another catadioptric projection objective having two concave mirrors facing each other. The concave mirrors are part of a first catadioptric objective part imaging the object onto an intermediate image positioned adjacent to a concave mirror. This is the only intermediate image, which is imaged to the image plane by a second, purely refractive objective part. The object as well as the image of the catadioptric imaging system are positioned outside the intermirror space defined by the mirrors facing each other. Similar systems having two concave mirrors, a common straight optical axis and one intermediate image formed by a catadioptric imaging system and positioned besides one of the concave mirrors are disclosed in Japanese patent application JP 2002208551 A and US patent application US 2002/00241 A1.
European patent application EP 1 336 887 (corresponding to US 2004/0130806 A1) discloses catadioptric projection objectives having one common straight optical axis and, in that sequence, a first catadioptric objective part for creating a first intermediate image, a second catadioptric objective part for creating a second intermediate image from the first intermediate image, and a refractive third objective part forming the image from the second intermediate image. Each catadioptric system has two concave mirrors facing each other. The intermediate images lie outside the intermirror spaces defined by the concave mirrors. Concave mirrors are positioned optically near to pupil surfaces closer to pupil surfaces than to the intermediate images of the projection objectives.
International Patent application WO 2004/107011 A1 discloses catadioptric projection objectives having one common straight optical axis and two or more intermediate images and suitable for immersion lithography with numerical apertures up to NA=1.2. At least one concave mirror is positioned optically near to a pupil surface closer to that pupil surface than to an intermediate image of the projection objective.
In the article “Nikon Projection Lens Update” by T. Matsuyama, T. Ishiyama and Y. Ohmura, presented by B. W. Smith in: Optical Microlithography XVII, Proc. of SPIE 5377.65 (2004) a design example of a catadioptric projection lens is shown, which is a combination of a conventional dioptric DUV system and a 6-mirror EUV catoptric system inserted between lens groups of the DUV system. A first intermediate image is formed behind the third mirror of the catoptric (purely reflective) group upstream of a convex mirror. The second intermediate image is formed by a purely reflective (catoptric) second objective part. The third objective part is purely refractive featuring negative refractive power at a waist of minimum beam diameter within the third objective part for Petzval sum correction.
Japanese patent application JP 2003114387 A and international patent application WO 01/55767 A disclose catadioptric projection objectives having one common straight optical axis, a first catadioptric objective part for forming an intermediate image and a second catadioptric objective part for imaging the intermediate image onto the image plane of this system. Concave and convex mirrors are used in combination.
The article “Camera view finder using tilted concave mirror erecting elements” by D. DeJager, SPIE. Vol. 237 (1980) p. 292-298 discloses camera view finders comprising two concave mirrors as elements of a 1:1 telescopic erecting relay system. The system is designed to image an object at infinity into a real image, which is erect and can be viewed through an eyepiece. Separate optical axes of refractive system parts upstream and downstream of the catoptric relay system are parallel offset to each other. In order to build a system having concave mirrors facing each other mirrors must be tilted. The authors conclude that physically realizable systems of this type have poor image quality.
International patent applications WO 92/05462 and WO 94/06047 and the article “Innovative Wide-Field Binocular Design” in OSA/SPIE Proceedings (1994) pages 389ff disclose catadioptric optical systems especially for binoculars and other viewing instruments designed as in-line system having a single, unfolded optical axis. Some embodiments have a first concave mirror having an object side mirror surface arranged on one side of the optical axis and a second concave mirror having a mirror surface facing the first mirror and arranged on the opposite side of the optical axis such that the surface curvatures of the concave mirrors define and intermirror space. A front refractive group forms a first intermediate image near the first mirror and a second intermediate image is formed outside of the space formed by the two facing mirrors. A narrow field being larger in a horizontal direction than in a vertical direction is arranged offset to the optical axis. The object side refractive group has a collimated input and the image side refractive group has a collimated output and entrance and exit pupils far from telecentric are formed. The pupil shape is semi-circular unlike pupil surfaces in lithographic projection lenses, which have to be circular and centered on the optical axis.
The PCT application WO 01/044682 A1 discloses catadioptric UV imaging systems for wafer inspection having one concave mirror designed as Mangin mirror.
Catadioptric projection objectives consisting of a catadioptric imaging subsystem having one single concave mirror and arranged between an entry side and an exit side refractive imaging subsystem (so-calles R-C-R systems) are disclosed, for example, in U.S. application with Ser. No. 60/573,533 filed on May 17, 2004 by the applicant. Other examples of R-C-R-systems are shown in US 2003/0011755, WO 03/036361 or US 2003/0197946.
US patent application with title “Catadioptric Projection Objective” filed by the applicant on Jan. 14, 2005 (based on U.S. provisional applications 60/536,248 filed on Jan. 14, 2004; U.S. 60/587,504 filed Jul. 14, 2004; 60/617,674 filed Oct. 13, 2004; 60/591,775 filed Jul. 27, 2004; and 60/612,823 filed Sep. 24, 2004) discloses catadioptric projection objectives having very high NA and suitable for immersion lithography at NA>1 with maximum values NA=1.2. The projection objectives comprise: a first objective part for imaging the pattern provided in the object plane into a first intermediate image, a second objective part for imaging the first intermediate imaging into a second intermediate image, and a third objective part for imaging the second intermediate imaging directly onto the image plane. The second objective part includes a first concave mirror having a first continuous mirror surface and a second concave mirror having a second continuous mirror surface, the concave mirror faces facing each other and defining an intermirror space. All concave mirrors are positioned optically remote from pupil surfaces. The system has potential for very high numerical apertures at moderate lens mass consumption. The full disclosure of this document and the priority documents thereof is incorporated into the present application by reference.
SUMMARY OF THE INVENTION
It is one object of the invention to provide a catadioptric projection objective suitable for use in the vacuum ultraviolet (VUV) range having potential for very high image side numerical aperture which may be extended to values allowing immersion lithography at numerical apertures NA>1. It is another object to provide catadioptric projection objectives that can be build with relatively small amounts of optical material. It is yet another object to provide compact high-aperture catadioptric projection objectives having moderate size.
As a solution to these and other objects the invention, according to one formulation, provides a catadioptric projection objective for imaging a pattern provided in an object surface of the projection objective onto an image surface of the projection objective comprising:

    a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image;
    a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image;
    a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein:
    the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein

COMP1=Dmax/(Y′·NA2)

and wherein the following condition holds:

COMP1<10



Generally, the dimensions of projection objectives tend to increase dramatically as the image side numerical aperture NA is increased. Empirically it has been found that the maximum lens diameter Dmax tends to increase stronger than linear with increase of NA according to Dmax ̃NAk, where k>1. A value k=2 is an approximation used for the purpose of this application. Further, it has been found that the maximum lens diameter Dmax increases in proportion to the image field size (represented by the image field height Y′). A linear dependency is assumed for the purpose of the application. Based on these considerations a first compactness parameter COMP1 is defined as:

COMP1=Dmax/(Y′·NA2).

It is evident that, for given values of image field height and numerical aperture, the first compaction parameter COMP1 should be as small as possible if a compact design is desired.
Considering the overall material consumption necessary for providing a projection objective, the absolute number of lenses, NL is also relevant. Typically, systems with a smaller number of lenses are preferred to systems with larger numbers of lenses. Therefore, a second compactness parameter COMP2 is defined as follows:

COMP2=COMP1·NL.

Again, small values for COMP2 are indicative of compact optical systems.
Further, projection objectives according to the invention have at least three objective parts for imaging an entry side field plane into an optically conjugate exit side field plane, where the imaging objective parts are concatenated at intermediate images. Typically, the number of lenses and the overall material necessary to build a projection objective will increase the higher the number NOP of imaging objective parts of the optical system is. It is desirable to keep the average number of lenses per objective part, NL/NOP, as small as possible. Therefore, a third compactness parameter COMP3 is defined as follows:

COMP3=COMP1·NL/NOP.

Again, projection objectives with low optical material consumption will be characterized by small values of COMP3.
A value COMP1<10 indicates a very compact design. Even values of COMP1<9.6 are obtained in some embodiments. In some embodiments the low compactness is obtained although the numerical aperture is larger than 1.2 (i.e. NA>1.2). Embodiments with NA=1.3 or NA=1.35 are possible and allow ultra-high resolution immersion lithography.
In some embodiments, low values for the second compactness parameter can be obtained. In some embodiments COMP2<260 and/or COMP2<240 is obtained. Embodiments with COMP2<220 are possible.
Alternatively, or in addition, low values for the third compactness parameter COMP3 are possible. In some embodiments COMP3<80, and lower values of COMP3<70 are also possible.
In preferred embodiments, a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged in the second objective part; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface.
In these embodiments a circular pupil centered around the optical axis is be provided in a centered optical system. Two or more concave mirrors in the system parts contributing to forming the second intermediate image are provided, where the used area of the concave mirrors deviates significantly from an axial symmetric illumination. In preferred embodiments exactly two concave mirrors are provided and are sufficient for obtaining excellent imaging quality and very high numerical aperture. Systems having one common unfolded (straight) optical axis can be provided which facilitate manufacturing, adjustment and integration into photolithographic exposure systems. No planar folding mirrors are necessary. However, one or more planar folding mirrors could be utilized to obtain more compact designs.
All concave mirrors are arranged “optically remote” from pupil surfaces which means that they are arranged outside an optical vicinity of a pupil surface. They may be arranged optically nearer to field surfaces than to pupil surfaces. Preferred positions optically remote from a pupil surface (i.e. outside an optical vicinity of a pupil surface) may be characterized by the ray height ratio H=hC/hM>1, where hC is the height of a chief ray and hM is the height of a marginal ray of the imaging process. The marginal ray height hM is the height of a marginal ray running from an inner field point (closest to the optical axis) to the edge of an aperture stop, whereas the chief ray height hC is the height of a chief ray running from an outermost field point (farthest away from the optical axis) parallel to or at small angle with respect to the optical axis and intersecting the optical axis at a pupil surface position where an aperture stop may be positioned. With other words: all concave mirrors are in positions where the chief ray height exceeds the marginal ray height.
A position “optically remote” from a pupil surface is a position where the cross sectional shape of the light beam deviates significantly from the circular shape found in a pupil surface or in an immediate vicinity thereto. The term “light beam” as used here describes the bundle of all rays running from the object surface to the image surface. Mirror positions optically remote from a pupil surface may be defined as positions where the beam diameters of the light beam in mutually perpendicular directions orthogonal to the propagation direction of the light beam deviate by more than 50% or 100% from each other. In other words, illuminated areas on the concave mirrors may have a shape having a form strongly deviating from a circle and similar to a high aspect ratio rectangle corresponding to a preferred field shape in lithographic projection objectives for wafer scanners. Therefore, small concave mirrors having a compact rectangular or near rectangular shape significantly smaller in one direction than in the other may be used. A high aperture light beam can therefore be guided through the system without vignetting at mirror edges.
Throughout the specification, the term “objective part” designates an imaging subsystem of the projection objective capable of imaging an object in an object surface of that subsystem into an image surface of the subsystem optically conjugated to the object surface of the subsystem. The object imaged by a subsystem (or objective part) may be the object in the object surface of the projection objective, or an intermediate image.
Wherever the terms “upstream” or “downstream” are used in this specification these terms refer to relative positions along the optical path of a light beam running from the object plane to the image plane of the projection objective. Therefore, a position upstream of the second intermediate image is a position optically between the object plane and the second intermediate image.
The term “intermediate image” generally refers to a “paraxial intermediate image” formed by a perfect optical system and located in a surface optically conjugated to the object surface. Therefore, wherever reference is made to a location or position of an intermediate image, the axial location of this surface optically conjugated to the object surface is meant.
According to another aspect of the invention, a catadioptric projection objective for imaging a pattern provided in an object surface of the projection objective onto an image surface of the projection objective comprises:

    a first, refractive objective part for imaging the pattern provided in the object surface into a first intermediate image;
    a second objective part for imaging the first intermediate image into a second intermediate image;
    a third, refractive objective part for imaging the second intermediate image onto the image surface;
    wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image;
    pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane;
    all concave mirrors are arranged optically remote from a pupil surface;
    the first objective part has a first number N1AS of aspheric lenses;
    the third objective part has a second number N3AS of aspheric lenses;
    an aspheric lens ratio ASR=N1AS/N3AS is smaller than 1; and
    an image side numerical aperture NA is larger than 1.2.


Although it would be desired from a manufacturing point of view to have lenses with spherical lens surfaces only, it appears that a certain number of aspheric lenses are required to obtain sufficient correction of image aberrations. It has been found that in designs where the third objective part has more aspheric lenses than the first objective part have potential for obtaining a good correction status without increasing the overall number, NAS, of aspheric lenses in the projection objective above a critical limit where the manufacturing of aspheric lenses becomes a critical issue due to the high number of aspheric lenses to be manufactured.
In some embodiments the first objective part has spherical lenses only such that N1AS=0. All-spherical refractive objective parts are particularly easy to manufacture. An all-spherical first objective part may be combined with a third objective part having one or more aspheric lenses, for example 1 or 2 or 3 or 4 or 5 lenses. Preferably the condition 1≦N3AS≦7 is fulfilled.
Preferably, the first objective part has no more than 4 aspheric lenses, i.e. N1AS≦4.
It has been found that the first objective part can be built in many cases with a small number of lenses, thereby optimizing lens material consumption and a compact size of the first objective part particularly in axial direction. In some embodiments, the first objective part includes no more than 5 lenses such that the number N1L of lenses in the first objective part fulfills the condition N1L<5. Embodiments with N1L=4 are possible. It appears, however, that N1L=5 may be preferable in many cases.
In some embodiments, the first objective part has positive lenses only, whereby formation of the first intermediate image can be obtained with small maximum lens diameters in the first objective part. In other embodiments, at least one negative lens may be useful, particularly for improving correction within the first objective part. Exactly one negative lens is often preferred for that purpose. The negative lens may have a concave lens surface on the image side and may be placed between the pupil surface of the first objective part and the first intermediate image.
It is known that aspheric surfaces provided on optical elements, such as lenses, mirrors and/or essentially planar faces of plates, prisms or the like can be utilized to improve both the correction status and the overall size and material consumption of optical systems. In some embodiments, the projection objective includes at least one “double asphere” comprising a first aspheric surface and a second aspheric surface immediately adjacent to the first aspheric surface, thereby allowing a transmitted beam to pass two subsequent aspheric surfaces without passing an intermediate spheric or planar surface. Double aspheres have proven to be a very powerful correction means in some embodiments.
A double asphere may take the structure of a biaspherical lens having an aspheric entrance surface and an aspheric exit surface. In some preferred embodiments the double asphere is formed by facing adjacent aspheric surfaces of two subsequent lenses. Thereby, an “air space” bounded by aspheric surfaces on both the entry and exit side can be obtained. The “air space” can be filled with air of another gas having refractive index n≈1. Where aspheric surfaces of a double asphere are distributed on facing lens surfaces of subsequent lenses, the aspheric surfaces can be positioned very close together if desired. An optical distance, measured along the optical axis, between the first and second aspheric surface of the double asphere may therefore be smaller than the thickness (measured along the optical axis) of the thinner one of consecutive lenses forming the double asphere. A complex radial distribution of refractive power can thereby be obtained at a defined position in an axially narrow region along the optical axis.
In some embodiments, the third objective part includes at least one double asphere. Preferably, that double asphere is positioned optically between the second intermediate image and the pupil surface of the third objective part, thereby preferably influencing the ray angles in a region of generally diverging beams. A second double asphere may be provided in that objective part.
Alternatively, or in combination, the first objective part may include at least one double asphere. Where a double asphere is provided within the first objective part, it has been found beneficial when the double asphere in the first objective part is positioned optically close to or at a pupil surface of the first objective part.
As pointed out earlier, avoiding large numbers of aspheric surfaces on lenses may contribute to facilitating manufacturing of the projection objective. Under certain conditions, the correcting action of a single aspheric surface can be approximated by one or more spherical surfaces where large angles of incidence of rays occur on that surface. In some embodiments, the first objective part includes at least one lens having a lens surface where incidence angles of rays transiting that lens surface include incidence angles larger than 60°. Preferably, that surface may be optically close to the pupil surface The angle of incidence (incidence angle) in this case is defined as the angle enclosed by a ray and the surface normal of the lens surface at the point of impingement of that ray on the lens surface. High incidence angle surfaces of that kind may be employed to reduce the number of aspheres.
The previous and other properties can be seen not only in the claims but also in the description and the drawings, wherein individual characteristics may be used either alone or in sub-combinations as an embodiment of the invention and in other areas and may individually represent advantageous and patentable embodiments.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a longitudinally sectioned view of a first embodiment of a projection objective according to the invention;
FIG. 2 is a longitudinally sectioned view of a second embodiment of a projection objective according to the invention;
FIG. 3 is a longitudinally sectioned view of a third embodiment of a projection objective according to the invention;
FIG. 4 is a longitudinally sectioned view of a fourth embodiment of a projection objective according to the invention;
FIG. 5 is a longitudinally sectioned view of a fifth embodiment of a projection objective according to the invention;
FIG. 6 is a longitudinally sectioned view of a sixth embodiment of a projection objective according to the invention;
FIG. 7 is a longitudinally sectioned view of a seventh embodiment of a projection objective according to the invention;
FIG. 8 is a longitudinally sectioned view of a eighth embodiment of a projection objective according to the invention;
FIG. 9 is a longitudinally sectioned view of a ninth embodiment of a projection objective according to the invention;
FIG. 10 is a longitudinally sectioned view of a tenth embodiment of a projection objective according to the invention;
FIG. 11 is a longitudinally sectioned view of a eleventh embodiment of a projection objective according to the invention;
FIG. 12 is a longitudinally sectioned view of a twelfth embodiment of a projection objective according to the invention;
FIG. 13 is a longitudinally sectioned view of a thirteenth embodiment of a projection objective according to the invention;
FIG. 14 is a longitudinally sectioned view of a fourteenth embodiment of a projection objective according to the invention;
FIG. 15 is a longitudinally sectioned view of a fifteenth embodiment of a projection objective according to the invention;
FIG. 16 is a longitudinally sectioned view of a sixteenth embodiment of a projection objective according to the invention.



DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
In the following description of preferred embodiments of the invention, the term “optical axis” shall refer to a straight line or sequence of straight-line segments passing through the centers of curvature of the optical elements involved. The optical axis is folded by folding mirrors (deflecting mirrors) or other reflective surfaces. In the case of those examples presented here, the object involved is either a mask (reticle) bearing the pattern of an integrated circuit or some other pattern, for example, a grating pattern. In the examples presented here, the image of the object is projected onto a wafer serving as a substrate that is coated with a layer of photoresist, although other types of substrate, such as components of liquid-crystal displays or substrates for optical gratings, are also feasible.
Where tables are provided to disclose the specification of a design shown in a figure, the table or tables are designated by the same numbers as the respective figures. Corresponding features in the figures are designated with like or identical reference identifications to facilitate understanding. Where lenses are designated, an identification L3-2 denotes the second lens in the third objective part (when viewed in the light propagation direction).
FIG. 1 shows a first embodiment of a catadioptric projection lens 100 according to the invention designed for ca. 193 nm UV working wavelength. It is designed to project an image of a pattern on a reticle arranged in the planar object surface OS (object plane) into the planar image surface IS (image plane) on a reduced scale, for example, 4:1, while creating exactly two real intermediate images IMI1, IMI2. A first refractive objective part OP1 is designed for imaging the pattern in the object surface into the first intermediate image IMI1 at an enlarged scale. A second, catoptric (purely reflective) objective part OP2 images the first intermediate image IMI1 into the second intermediate image IMI2 at a magnification close to 1:1. A third, refractive objective part OP3 images the second intermediate image IMI2 onto the image surface IS with a strong reduction ratio. The second objective part OP2 comprises a first concave mirror CM1 having the concave mirror surface facing the object side, and a second concave mirror CM2 having the concave mirror surface facing the image side. The mirror surfaces are both continuous or unbroken, i.e. they do not have a hole or bore. The mirror surfaces facing each other define a catadioptric cavity, which is also denoted intermirror space, enclosed by the curved surfaces defined by the concave mirrors. The intermediate images IMI1, IMI2 are both situated inside the catadioptric cavity well apart from the mirror surfaces.
Each mirror surface of a concave mirror defines a “curvature surface” or “surface of curvature” which is a mathematical surface extending beyond the edges of the physical mirror surface and containing the mirror surface. The first and second concave mirrors are parts of rotationally symmetric curvature surfaces having a common axis of rotational symmetry.
The objective 100 is rotational symmetric and has one straight optical axis AX common to all refractive and reflective optical components. There are no folding mirrors. The concave mirrors have small diameters allowing to bring them close together and rather close to the intermediate images lying in between. The concave mirrors are both constructed and illuminated as off-axis sections of axial symmetric surfaces. The light beam passes by the edges of the concave mirrors facing the optical axis without vignetting.
The projection objective 100 is designed as an immersion objective for λ=193 nm having an image side numerical aperture NA=1.2 when used in conjunction with the high index immersion fluid, e.g. pure water, between the exit surface of the objective closest to the image surface IS, and the image surface IS. The refractive first objective part OP1 has spherical lenses only. Both concave mirrors CM1, CM2 are aspherical mirrors. The third objective part OP3 has one aspheric surface (entrance surface of lens L3-9) near the position of the pupil surface P3 of that objective part (where the chief ray CR of the imaging intersects the optical axis AX) and a second aspheric surface on the exit side of the penultimate lens L3-12 immediately upstream of the last, image side piano-convex lens L3-13. The last lens, which will be in contact with an immersion fluid during operation of the projection objective, is also denoted “immersion lens” in this specification. Although the projection objective is not fully corrected for all aberrations, it shows that an imaging is possible with a small number of aspheric lenses (NAS=2) all placed in the third objective part.
FIG. 2 shows a second embodiment of a projection objective 200 having an all-spheric first objective part OP1 and only one aspheric lens L3-4 in third objective part OP3. An aperture stop AS is placed in the third objective part in the region of the pupil surface PS3 thereof. There is no need for a well-corrected position for an aperture stop in the first objective part OP1, which, in this case, consists of only four lenses, all lenses being spherical positive lenses. Thereby, a very simple and compact construction of the first objective part is obtained.
The projection objective 200 is designed as an immersion lens for λ=193 nm having an image side numerical aperture NA=1.20 when used in conjunction with a high index immersion fluid, e.g. pure water, between the exit surface of the objective and the image surface. The specification for this design is summarized in Table 2. The leftmost column lists the number of the refractive, reflective, or otherwise designated surface, the second column lists the radius, r, of that surface [mm], the third column lists the distance, d [mm], between that surface and the next surface, a parameter that is referred to as the “thickness” of the optical element, the fourth column lists the material employed for fabricating that optical element, and the fifth column lists the refractive index of the material employed for its fabrication. The sixth column lists the optically utilizable, clear, semi diameter [mm] of the optical component. A radius r=0 in a table designates a planar surface (having infinite radius).
In the case of this particular embodiment, three surfaces (surfaces 9, 10, 18) are aspherical surfaces. Table 2A lists the associated data for those aspherical surfaces, from which the sagitta or rising height p(h) of their surface figures as a function of the height h may be computed employing the following equation:

p(h)=[((1/r)h2)/(1+SQRT(1−(1+K)(1/r)2h2))]+C1·h4+C2·h6+ . . . ,

where the reciprocal value (1/r) of the radius is the curvature of the surface in question at the surface vertex and h is the distance of a point thereon from the optical axis. The sagitta or rising height p(h) thus represents the distance of that point from the vertex of the surface in question, measured along the z-direction, i.e., along the optical axis. The constants K, C1, C2, etc., are listed in Table 2A.

It is remarkable that in this embodiment many aberrations are corrected to a high degree with a small number of lenses (NL=13) and only one aspheric lens (L3-4) in addition to the aspheric concave mirrors CM1, CM2. Particularly, all third-order and fifth-order aberrations are zero. The variation in telecentricity is corrected over the field. Higher-order (seventh-order and higher) distortion is corrected over the field. Pupil aberration on the image side is corrected so that the image side numerical aperture NA=1.2 is constant over the field. Two real rays are corrected on-axis and four aperture rays are corrected at an intermediate field point. Higher-order (seventh-order and higher) astigmatism is corrected at the edge of the field and at an intermediate field point. This correction status is obtained with an objective where the lens diameters of the third objective part (acting as a focusing lens group) are quite small, with 218 mm diameter for the largest lens. The first lens L3-1 of the third objective part has a relatively large geometrical distance to the vertex of the geometrically nearest mirror (first concave mirror CM1), where that axial mirror-lens-distance MLD is 90 mm. This is about 7.5% of the axial distance between object surface OS and image surface IS, this object-image distance also being denoted as “track length”. A large geometrical distance MLD between the image side first concave mirror CM1 and the first lens of the third objective part contributes to small lens diameters in the third objective part.
The last lens L3-9 on the image side (immersion lens) has a short radius (50 mm) of the spherical entrance surface, whereby small incidence angles are obtained at that surface.
The design can be optimized with regard to residual aberrations, where higher order Petzval curvature and higher order sagitta oblique spherical aberration appears to dominate. Adding one lens to the first objective part and/or providing one or more further aspheric surfaces can contribute to reduce the residual aberrations. An example of a further development of the design of FIG. 2 is shown in FIG. 3, where an additional negative lens L1-4 designed as a meniscus lens having an image side concave surface is added in the first objective part between the pupil surface P1 thereof and the first intermediate image. This modification allows to correct the mentioned residual aberrations. This example exemplifies, amongst others, that the basic design allows high flexibility for correcting imaging errors within overall simple construction with small number of lenses and a small number of aspherical lenses.
A fourth embodiment of a projection objective 400 is shown in FIG. 4, the specification thereof is given in tables 4 and 4A. Similar to the embodiments of FIGS. 2 and 3, there is only one aspheric lens, namely positive meniscus lens L3-4 having an aspheric exit surface, in that system, placed in the third objective part OP3 in the region of largest beam diameter upstream of the aperture stop AS optically close to the pupil surface P3 of that objective part. The first objective part OP1 is all-spherical, having only one negative lens L1-4 in a sequence P-P-P-N-P, where “P” denotes a positive lens and “N” denotes a negative lens. From a construction point of view, a large axial distance between the vertex of the image side concave mirror CM1 and the first lens L3-1 of the third objective part OP3 is apparent, this distance MLD being more than 10% of the track length.
FIG. 5 shows a variant of the systems of FIGS. 3 and 4, where slight modifications predominantly in the first objective part OP1 were applied to a improve correction. The resulting design of FIG. 5 has two field points that are corrected for both astigmatism and Petzval curvature, and the field zone with no astigmatism is in focus.
In preferred designs of the invention, distortion, astigmatism, Petzval curvature and telecentricity variation over the field can all be corrected to very high orders with a similar construction of the first objective part OP1 (serving as a relay system to form the first intermediate image IMI1) and only a few spherical lenses in addition to the aspheric mirrors.
It appears that two aspheric concave mirrors CM1, CM2 are important for obtaining good correction with a small number of aspheric lenses. Two aspheric mirrors generally allow to make a design that is corrected for two chief ray aberrations, like distortion and telecentricity variation, to very high orders. It appears that those two aberrations can be exactly corrected by the two aspheric mirrors if the aspheric deformations of that mirrors are set correctly. It is one remarkable aspect, that, in addition, the astigmatism and Petzval curvature can also be corrected to a high degree with an all-spherical first objective part OP1.
It appears that there are at least three characteristics, which, singly or in combination, can contribute to the positive properties of the design type with regard to aberration corrections. One aspect is that the concave mirrors may preferably be quite unequal in radius, compared to other embodiments where the concave mirrors CM1, CM2 are identical or almost identical. Further, it appears that quite a lot of coma at the intermediate images IMI1 and/or IMI2 facilitates correction with a small number of aspheric lenses. Also, the remarkably large air space (mirror-lens-distance MLD) between the vertex of the image side concave mirror CM1 and the first lens of the third objective part appears to contribute to that beneficial properties.
It appears that the object side and the image side and/or the projection objective, i.e. the first objective part OP1 and the third objective part OP3, can almost be designed independently. In particular, the third objective part (focusing lens group) can be designed for aperture aberrations without much concern for field aberrations, and then a first objective part being relatively simple in construction can be designed to compensate for field aberration, wherein that compensation might be obtained without aspheric lenses or with only a small number of aspheric lens, e.g. only one aspheric lens.
The previous embodiments show that designs are available having a fairly simple first objective part with only four or five lenses, where all lenses may be spherical. Such rather simple relay lens group can give correction for field aberrations to an extremely high order. Aperture aberrations are preferably corrected in the third objective part, which may also have a fairly simple construction with just a few aspherics, the number of aspheric lenses in third objective part preferably being higher than the number of aspheric lenses in the first objective part.
FIGS. 6 and 7 show closely related embodiments 600, 700, where the number of aspheric lenses in the refractive first and third objective part is increased when compared to the previous embodiments. The specification of objective 700 is given in tables 7 and 7A. An improvement with respect to aperture aberrations is obtained. Particularly, seven aspheric lenses are used, where N1AS=2 and N3AS=5, such that the aspheric lens ratio ASR=0.4. The design of FIG. 6 having two aspheric lenses L1-2 and L1-5 in the first objective part OP1 has an wavefront aberration of 5 milliwaves over the field.
One double asphere DA is provided in the third objective part OP3 optically between a second intermediate image IMI2 and the pupil surface P3 of that objective part in a region of significantly increasing beam diameter. The double asphere is formed by the aspheric exit surface of positive lens L3-6 and the subsequent aspheric entry surface of the following positive meniscus lens L3-7 immediately adjacent thereto. The axial separation of the two aspheric surfaces is smaller than the thickness of the thinner lens L3-7 adjacent to the double asphere such that the aspheres are in close proximity. A complex radial distribution of refractive power is thereby obtained in a specific region of the beam, thereby contributing strongly to image correction.
FIGS. 8 and 9 show embodiments 800, 900 very similar in design. The specification of projection objective 900 is given in tables 9, 9A. An image-side numerical aperture NA=1.2 and wavefront error of about 6 milliwaves is obtained with only six aspheric lenses, where one aspheric lens (positive meniscus L1-5 having image side concave surface placed near the pupil surface P1) is provided in the first objective part and the remainder of five aspheric lenses are distributed within the third objective part OP3. These aspheric lenses include a biconcave negative meniscus L3-2, a double asphere DA formed by a lens pair L3-5, L3-6 with facing aspheric surfaces, a biconvex positive lens L3-9 close to the aperture stop AS, and a positive lens L3-10 between the aperture stop and the image surface IS. As indicated by the ray distribution in FIG. 8, the front pupil in the relay section formed by first objective part OP1 is pretty well corrected. A focus region with little or no coma aberrations (low-coma intermediate image) for both intermediate images IMI1 and IMI2 is apparent. The low-coma intermediate image IMI2 is refocused onto the image surface with refractive objective part OP3 having a thick positive lens L3-1 on the entry side and a significant waist W (i.e. a region of beam diameter constriction) between the first lens L3-1 and the region of largest beam diameter shortly upstream of the aperture stop AS. Double asphere DA is placed in the divergent beam between the waist and the aperture stop AS.
The projection objective 1000 in FIG. 10 may in some respects be considered as a variant of the embodiments shown in FIGS. 8 and 9. A specification thereof is given in tables 10, 10A. Whereas the third objective part OP3 has five aspheric lenses relatively similar in design and positioning when compared to the embodiments 800 and 900, there is no aspheric lens in the first objective part OP1, such that NAS=5. Remarkably, an all-spherical doublett consisting of an image-side biconvex positive lens L1-6 and a negative meniscus lens L1-7 having an object side concave surface immediately downstream of the positive lens is positioned near the pupil surface P1. High angles of incidence of rays exiting the positive lens L1-6 and entering the subsequent negative lens L1-7 are found in that region, where the angles of incidence include angles larger than 60°. It appears that the optical effect of the aspheric lens L1-5 of embodiments 800, 900 having a difficult to manufacture aspheric surface with rapid slope changes can at least partly be simulated by using some fairly high incidence angles (in the range of 60°-65°) in a similar region near the pupil surface of the first objective part OP1. Since the spherical surfaces of the doublett lenses L1-6, L1-7 are easier to manufacture, manufacturability can be improved in some cases by replacing an aspheric lens by one or more spherical lens surfaces where high incidence angles occur.
When replacement of an aspheric surface by spherical surfaces is considered, it appears that what most matters is the base spherical curvature. A spherical doublett may therefore be able to replace an aspheric surface—even a very high order aspheric.
The correction status of variants of embodiment 1000 ranges between 4, 5 and 6 milliwaves over the field. This indicates that this correction can be obtained with an all-spherical first objective part OP1 and that the complete design does not need many aspheric lenses (only 5 lens aspherics here) to obtain a good performance.
The specification of the catadioptric projection objective 1100 is given in tables 11, 11A. The embodiment is a good example to show that “double aspheres” having two pretty strong aspheric lens surfaces very close to each other may be a very powerful design component. Here, a double asphere DA formed by lenses L3-4 and L3-5 is found in the region of increasing beam diameter within the third objective part OP3, similar to the embodiments shown in FIGS. 8, 9, and 10, for example. In addition, a second double asphere DA formed by the facing surfaces of lenses L1-5 and L1-6 is present optically near the front pupil, i.e. the pupil surface P1 of the first objective part OP1. In this embodiment, NAS=8, N1AS=3 and N3AS=5. The correction is about 2.5 milliwaves only at NA=1.2, with the largest lens diameter of 220 mm found in the third objective part close to the aperture stop AS. This exemplifies the potential of this design for obtaining good optical performance with a small number of aspheric lenses.
FIG. 12 shows an immersion objective for λ=193 nm having NA=1.3 (instead of NA=1.2 in the previous examples). The largest lens diameter (found shortly upstream of the aperture stop AS within the third objective part OP3) is 270 mm. There are just eight aspheric lenses with N1AS=2 and N3AS=6. These include one double asphere DA formed by lenses L3-4 and L3-5 and positioned in a region of diverging beam between a waist W in the third objective part and the aperture stop AS. The field radius is 66 mm. The correction is about 4 to 6 milliwaves over the field. The design assumes exactly telecentric input. It is evident that from the ray configuration at the intermediate images that there is a large amount of coma at the intermediate images.
A further embodiment of a catadioptric immersion objective 1300 with NA=1.3 is shown in FIG. 13. The specification is given in tables 13, 13A. NAS=10, N1AS=4 and N3AS=6. Although the image-side numerical aperture NA=1.3 corresponds to that of objective 1200, the largest lens diameter is only 250 mm (instead of 270 mm in embodiment 1200). Still, the wavefront error is about 4 milliwaves over the field only. Again, the design is characterized by the absence of a real stop so that a telecentric input is required. Again a large amount of coma is found at the intermediate images.
The catadioptric immersion objective 1400 in FIG. 14 (specification given in tables 14 and 14A) is another example of a high NA catadioptric immersion objective with NA=1.3 and a relatively small maximum lens diameter, that lens diameter of the largest lens being only 250 mm. Four out of eleven aspheric lenses are found in the first objective part OP1, the remainder of seven aspheric lenses is distributed in the third objective part OP3. When compared to previous designs, manufacturability of the aspheric lenses is improved by observing the requirement that all of the aspheric lens surfaces have less than 1.0 mm deformation from a spheric surface and have local aspheric radii being greater than 150 mm for each aspheric surface. Three double aspheres are provided. One double asphere DA formed by lenses L1-6 and L1-7 positioned at the pupil surface P1 within the first objective part OP1 is designed to have fairly high incidence angles which appears to have a similar effect as short local aspheric radii (which are more difficult to manufacture). There are two double aspheres DA in the third objective part OP3, namely one double asphere formed by facing surfaces of negative lenses L3-1, L3-2 in the region of minimum lens diameter within the third objective part, and a subsequent double aspheric formed by facing surfaces of lenses L3-3 and L3-4 in the region of largest beam diameter increase between the second intermediate image IMI2 and the aperture stop AS, which is positioned between the region of largest beam diameter and the image surface IS. Like the embodiments of FIGS. 11 to 13, large amount of coma is present in the intermediate images IMI1, IMI2.
The catadioptric immersion objective 1500 in FIG. 15 (specification in tables 15 and 15A) is a variant of the embodiment shown in FIG. 14, where sizes and types of lenses present in the objective 1500 are essentially the same. A difference lies in the fact that an additional biconvex positive lens L3-1 is introduced immediately after the second intermediate image IMI2, thereby providing positive refractive power on the entry side of third objective part OP3. Good performance at NA=1.3 is obtained.
The basic design has potential for even higher image side numerical apertures with NA>1.3. The catadioptric immersion objective 1600 in FIG. 16 (specification in tables 16 and 16A) is based on the design of FIG. 15, but optimized to obtain NA=1.35. Like in that embodiment, there are ten lenses in the first objective part (including 4 aspheric lenses), and twelve lenses in the third objective part (including 7aspheric lenses). Although the basic types of lenses are the same, lens thickness, surface radii and lens positions differ slightly. As the numerical aperture increases, it appears beneficial to place the aperture stop AS in the third objective part OP3 between the region of maximum beam diameter (at biconvex lens L3-8) and the image surface IS in the region of strongly converging beam. Here, only three positive lenses are placed between the aperture stop and the image surface.
It may be beneficial to place the second objective part OP2 geometrically closer to the image surface the higher the desired numerical aperture is. For convenience, the second objective part OP2, preferably consisting of two aspheric concave mirrors CM1, CM2 only, is also denoted “mirror group” in the following. In order to demonstrate this feature, a first optical axis length OAL1 is defined between the object surface OS and the vertex of the concave mirror CM2 geometrically closest to the object surface, and a third optical axis length OAL3 is defined between the vertex of the concave mirror (CM1) geometrically closest to the image surface and the image surface (see FIG. 16). Based on this definition, a mirror group position parameter MG =OAL1/OAL3 is defined, where this value tends to be larger the further the mirror group tends to be positioned on the image side of the projection objective. In table 17, the values of OAL1, OAL3 and MG are summarized for all embodiments described here. Based on these data, a mirror group position parameter MG>0.7 appears to be desirable in order to obtain high image side numerical apertures. Preferably, MG≧0.8. More preferably, MG≧0.9.
Each projection objective described here has a high NA image side end where projection radiation exits the projection objective at an exit surface ES, which is preferably planar in order to allow a uniform distance between the exit surface and a planar substrate surface arranged at the image surface IS. The lens closest to the image surface and forming the exit surface ES, is denoted “last lens” LL here. Preferably, the last lens is a piano-convex positive lens having a curved entry surface ENS, which is spherically curved in most embodiments, and the planar exit surface ES. In order to obtain high NA it has been found useful to design the last lens such that large refractive power provided by the curved entry surface ENS is arranged as close as possible to the image surface. Further, strong curvatures, i.e. small curvature radii of the entry surface ENS of the last lens LL appear desirable. If TLL is the thickness of the last lens on the optical axis (i.e. the axial distance between the entry surface ENS and the exit surface ES measured along the optical axis), RLL is the object side vertex radius of the last lens (i.e. the radius of the entry surface ENS), and DIALL is the optically free diameter of the entry surface of the last lens, then the parameters LL1=TLL/RLL and LL2=DIALL/RLL should preferably fall within certain limits. Particularly, it has been found useful if the conditions 1.1<LL1<2.2 holds for LL1. Preferably, the upper limit may be even smaller, such as 1.8 or 1.7 or 1.6. As parameter LL1 becomes unity for a hemispherical lens, where the center of curvature or the entry surface coincides with the exit surface, the condition regarding LL1 shows that non-hemispherical last lenses are preferred, where the center of curvature of the curved entry surface lies outside the last lens, particularly beyond the image surface.
Alternatively, or in addition, the condition 2.1<LL2<2.6 should preferably hold for LL2. The upper limit could be smaller, e.g. 2.5 or 2.4 or 2.3. The respective values for LL1 and LL2 are presented in table 18. If at least one of the above condition holds, strong positive power provided by the curved entry surface of the last lens is provided close to the image surface, thereby allowing a large image side numerical aperture NA to be obtained, particularly with NA>1.1 or NA>1.2, such as NA=1.3 or NA=1.35.
With regard to the correction status of the intermediate images IMI1, IMI2 it is found that in some embodiments both intermediate images are essentially focused (i.e. many aberrations are corrected to a high degree), whereas in other embodiments significant aberrations occur, particularly coma (compare FIG. 11-16) A significant coma aberration for the second intermediate image IMI2 may be beneficial with respect to overall correction of the objective. Since the catoptric second objective part consisting of the concave mirrors CM1 and CM2 is effective to image the first intermediate image into the second intermediate image in an essentially symmetric manner, only little coma is usually introduced by the catoptric second objective part. Therefore, the correction status with respect to coma for both intermediate images tends to be similar. For some embodiments, a significant amount of coma at least for the second intermediate image appears to contribute significantly to the overall correction. The following observations are notable in that respect.
The correction of the sine condition of the entire objective is challenging particularly for objectives having very high image side NA. The correction of sine condition may be facilitated by coma in the intermediate image. If the imaging from the high NA image surface to the low NA object surface (i.e. in reverse direction when compared to the intended use of projection objectives in lithography) is considered, the third objective part (where radiation enters) provides an intermediate image having a certain correction status. Assuming that the spherical aberration of that imaging is corrected, then the intermediate image will be essentially free of coma, if the sine condition of that imaging would be corrected. In contrast, if the sine condition is not corrected, that intermediate image would have a significant amount of coma. If the intermediate image has a considerable amount of coma, correction of the sine condition in the third objective part is facilitated.
Now, imaging of the second intermediate image into the image surface in the intended direction (towards the high NA end) is considered. If the second intermediate image would have a good correction status, particularly without coma, then the entire correction of the sine condition would have to be effected by the third objective part imaging the second intermediate image onto the image surface. If, in contrast, a certain amount of coma is present in the second intermediate image, then the third objective part can be designed in a more relaxed manner since the correction of the sine condition can at least partly be effected by the objective parts optically upstream of the third objective part, i.e. the refractive relay system OP1 forming the first intermediate image, and the catoptric second objective part OP2. Therefore, it appears that designs where the correction of coma is distributed between the first refractive objective part OP1 and the third objective part OP3 may be beneficial when compared to objectives where each of that refractive objective part is independently corrected for coma.
As mentioned earlier, the invention allows to build high NA projection objectives suitable for immersion lithography at NA>1 with compact size.
Table 19 summarizes the values necessary to calculate the compactness parameters COMP1, COMP2, COMP3 and the respective values for these parameters for each of the systems presented with a specification table (the table number (corresponding to the same number of a figure) is given in column 1 of table 19). Further, the respective values for N1AS, N3AS, and ASR are shown.
Table 19 shows that preferred embodiments according to the invention generally observe at least one of the conditions given earlier indicating that compact designs with moderate material consumption are obtained according to the design rules laid out in this specification. Further, the particular values characterizing the aspheric lens number and distribution are shown.
In the following, further characteristic features of projection objectives according to the invention are summarized, where one or more of those features may be present in an embodiment of the invention. Parameters summarized in tables 20 and 21 are used to demonstrate these features.
In some embodiments, the chief ray of the imaging process takes a characteristic course. For demonstration purposes, a chief ray CR running from an outermost field point (furthest away from the optical axis AX) essentially parallel to the optical axis and intersecting the optical axis at three consecutive pupil surface positions P1, P2, P3, each within on of the imaging objective parts OP1, OP2, OP3, is drawn in bold line in FIG. 16 to facilitate understanding. The angle included between the optical axis AX and the chief ray CR at each position along the chief ray is denoted “chief ray angle” CRA in the following. The chief ray CR is divergent (chief ray height increasing in light propagation direction) at the position of the first intermediate image IMI1 and converging at the position of the second intermediate image IMI2. Strongly converging chief rays appear to be beneficial to obtain high image side NA and a sufficient correction.
In the region between the two concave mirrors CM1, CM2, the chief ray crosses the optical axis at a high chief ray angle CRA (M), that angle preferably falling in the region between 58° and 75°, particularly between 60° and 72°. (see table 20).
With regard to the magnification provided by the imaging objective parts OP1, OP2, OP3 it appears that it is beneficial if the magnification β3 of the third objective part OP 3 imaging the second intermediate image IMI2 at high reduction ratio onto the image surface should preferably fall within a range 0.11≦β3≦0.17. In order to obtain a desired overall reduction ratio (e.g. 1:4 or 1:5) the second objective part OP2 may contribute to the overall reduction by having a magnification ratio β2<1. Preferably, the mirror group forming the second objective part OP2 may be designed to have a moderate reducing effect characterized by 0.85≦β2<1. If the second objective part contributes to some extent to the overall reduction, the third objective part responsible for the major part of reduction can be designed in a more relaxed manner.
It appears that the refractive power (characterized by the focal length f) provided by the first two or three lenses on the entry side of the third objective part OP3 immediately after the second concave mirror CM2 may contribute to good performance by designing this entry group such that the overall refractive power of that entry group is negative. In the embodiments of FIGS. 2, 4, 14, 15, 16, the entry group is formed by the first two lenses of the third objective part, providing an entry group focal length f3 (L1 . . . 2). In the embodiments of FIGS. 7, 9, 10, 11, 12, 13, the entry group is formed by three consecutive lenses, thereby providing a focal length f3 (L1 . . . 3) of the entry group. Values are given in table 20.
On the other hand, it appears that not many negative lenses should be present in the third objective part following the second concave mirror CM2, where that number N3NL of negative lenses is three or less than three in all embodiments (parameter K7a=YES in table 21), and is smaller than three in the embodiments of FIGS. 2, 4, 14, 15, 16 (parameter K7=YES in table 21).
Further, it appears to be beneficial if the optically free diameter DIA31 of the first lens L3-1 of the third objective part OP3 is significantly smaller than the diameter DIAAS of the aperture stop. Preferably, the diameter ratio DR=DIA31/DIAAS should be smaller than 0.9. More preferably, an upper value of 0.8, even more preferably an upper value of 0.7 should not be exceeded. Values for the diameter ratio DR are given in table 21.
Further, it has been found that it may be beneficial if more than 50% of all lenses after the second concave mirror (i.e. lenses of the third objective part) have an optically free diameter smaller than the diameter of the second intermediate image IMI2 following the second concave mirror CM2.
This condition is fulfilled for all embodiments, as shown by parameter K10 in table 21.
Also, all lenses of the first, refractive objective part OP1 should preferably be smaller than the paraxial size of the first intermediate image. If this condition is fulfilled, parameter K9 in table 20 is fulfilled.
In order to provide strong positive refractive power for obtaining strong beam convergence at the high NA image end it is preferable if at least one of 8 and 9 consecutive lenses upstream of the image surface should have positive refractive power. This is exemplified by parameter K11 in table 21, which is “YES”=Y if the condition is fulfilled and “NO”=N if the condition is not fulfilled.
In this context it is worth to note that it appears beneficial for obtaining high NA, if the position of the aperture stop AS is in the region of convergent beam between the position of largest beam diameter within the third objective part OP3, and the image surface. This property is exemplified by the ratio AS-IS/TT shown in table 20, where AS-IS is the geometrical distance between the position of the aperture stop AS and the image surface IS, and TT is the “track length” of the objective, i.e. the geometrical distance between object surface and image surface. The ratio AS-IS/TT may fall in a range between 0.09 and 0.18 (see table 20).
This feature is particularly pronounced in embodiments of FIGS. 12 to 16.
Further characteristic features are evident from the course of the coma beam. Here, a “coma beam” refers to a beam emerging from an object field point furthest remote from the optical axis and transiting the aperture stop at the edge of the aperture. The coma beam therefore contributes to determining which lens diameters must be used. The angle included by this coma beam and the optical axis is denoted in “coma beam angle CBA” in the following. The angle of that beam after refraction at the last lens of the first objective part (upstream of the first intermediate image IMI1) is denoted CBA1, whereas the angle of the coma beam immediately upstream of the refraction at the first lens of the image side third objective part OP3 is denoted CBA3. The values of these angles are given in table 21. It appears that for both coma beam angles values of less than 5° may be beneficial (table 21).
As noted above, the chief ray intersects the optical axis at pupil surfaces P1, P2, P3 in the concatenated objective parts OP1, OP2, OP3. As the pupil surfaces within the first and third objective parts are accessible for setting an aperture stop, these positions are also denoted aperture positions. The beam diameter at the aperture stop, DIAAS and the beam diameter DIAP1 at the pupil surface P1 in the first objective part, conjugated to the position of the aperture stop, should fall within certain limits. The ratio DIAAS/DIAP1 should be larger than 1. Preferably the condition DIAAS/DIAP1>2 should be satisfied. (see table 21).
It is to be understood that all systems described above may be complete systems for forming a real image (e.g. on a wafer) from a real object. However, the systems may be used as partial systems of larger systems. For example, the “object” for a system mentioned above may be an image formed by an imaging system (relay system) upstream of the object plane. Likewise, the image formed by a system mentioned above may be used as the object for a system (relay system) downstream of the image plane.
The above description of the preferred embodiments has been given by way of example. From the disclosure given, those skilled in the art will not only understand the present invention and its attendant advantages, but will also find apparent various changes and modifications to the structures and methods disclosed. It is sought, therefore, to cover all changes and modifications as fall within the spirit and scope of the invention, as defined by the appended claims, and equivalents thereof.
The contents of all the claims is made part of this description by reference.












TABLE 2





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35.375532


66


1
131.949135
35.970704
SILUV
1.56038308
87.585


2
406.761557
104.80906


85.863


3
3059.843345
27.506721
SILUV
1.56038308
75.651


4
−198.500428
1.017885


74.735


5
130.040913
27.00543
SIO2V
1.5607857
63.806


6
645.092151
131.039998


59.727


7
295.611694
27.141936
SIO2V
1.5607857
73.901


8
−488.184201
269.934616


75.186


9
−168.378905
−229.757172
REFL

146.55


10
191.880744
321.03168
REFL

142.027


11
3866.479073
15
SILUV
1.56038308
84.264


12
200.296391
23.187613


81.401


13
−853.282183
12
SILUV
1.56038308
81.615


14
183.221555
40.757592


85.452


15
−260.121033
40.375633
SILUV
1.56038308
88.116


16
−119.830244
1.000373


93.697


17
377.105699
25.88629
SILUV
1.56038308
107.44


18
806.870168
6.60952


108.283


19
402.481304
53.968509
SILUV
1.56038308
109.043


20
−239.942098
30.458674


110.617


21
0
0


105.938


22
448.147113
83.062268
SILUV
1.56038308
104.924


23
−279.740357
1


97.993


24
225.5812
54.802627
SILUV
1.56038308
86.607


25
−998.977091
1


76.79


26
66.501558
33.495315
SILUV
1.56038308
57.153


27
131.610919
0.100001


48.532


28
49.614771
31.476238
SILUV
1.56038308
37.98


29
0
3
H2OV193
1.43667693
21.144


30
0
0


16.918
















TABLE 2A







Aspheric constants









SRF











9
10
18
















K
−0.452326
−0.261902
0



C1
0.00E+00
0.00E+00
9.85E−08



C2
7.69E−14
−1.44E−15
6.78E−13



C3
−1.99E−18
2.07E−19
−8.47E−17



C4
4.90E−22
−1.14E−23
−2.33E−21



C5
−2.26E−26
−5.61E−28
−3.90E−27



C6
5.71E−31
4.00E−32
0.00E+00






















TABLE 4





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35.793949


66


1
120.118526
42.934369
SIO2V
1.5607857
90.022


2
412.405523
126.645729


87.381


3
633.242338
22.659816
SIO2V
1.5607857
61.491


4
−210.086581
46.042292


60.076


5
130.137899
30.712802
SIO2V
1.5607857
61.678


6
−522.603119
34.752273


61.093


7
−1187.517919
12
SIO2V
1.5607857
59.563


8
114.106019
28.350504


59.307


9
222.108344
30.902208
SIO2V
1.5607857
68.301


10
−299.15163
256.466683


69.608


11
−150.205889
−216.466684
REFL

144.702


12
198.80711
372.659505
REFL

143.838


13
281.738211
19.28133
SIO2V
1.5607857
93.203


14
125.854932
30.787413


85.622


15
774.983336
12
SIO2V
1.5607857
86.014


16
190.931672
31.687547


88.47


17
−741.767142
42.517621
SIO2V
1.5607857
90.935


18
−141.29554
16.921402


95.293


19
161.709504
50.734927
SIO2V
1.5607857
110.341


20
256.329089
15.962417


100.811


21
231.628153
52.349429
SIO2V
1.5607857
101.677


22
−355.162157
24.394096


100.975


23
0
0


90.786


24
298.995001
34.357885
SIO2V
1.5607857
87.38


25
−413.984465
1


84.467


26
175.550604
30.458976
SIO2V
1.5607857
75.285


27
577.927994
1


68.756


28
62.317914
30.663962
SIO2V
1.5607857
53.826


29
131.702852
0.1


46.784


30
50
29.329548
SIO2V
1.5607857
36.877


31
0
3
H2OV193
1.43667693
21.061


32
0
0


17.019
















TABLE 4A







Aspheric constants









SRF











11
12
20
















K
−0.536388
−0.289717
0



C1
0.00E+00
0.00E+00
1.38E−07



C2
1.40E−13
1.67E−15
1.67E−12



C3
−1.27E−17
7.77E−21
−1.05E−16



C4
1.60E−21
1.74E−23
6.80E−21



C5
−8.54E−26
−1.14E−27
−2.06E−24



C6
2.08E−30
3.15E−32
1.25E−28






















TABLE 7





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35.099987
LUFTV193
1.00030168
66


1
127.537708
53.812686
SIO2V
1.5607857
88.311


2
−1424.403792
3.183483


85.654


3
−759.069196
12
SIO2V
1.5607857
85.361


4
433.221851
0.999992
N2VP950
1.00029966
81.029


5
138.239142
29.708609
SIO2V
1.5607857
81.573


6
417.683183
28.068546
N2VP950
1.00029966
79.153


7
178.55362
36.417688
SIO2V
1.5607857
70.512


8
−494.07005
2.060781
N2VP950
1.00029966
65.044


9
155.188372
24.032084
SIO2V
1.5607857
54.381


10
599.310224
35.766015
N2VP950
1.00029966
44.737


11
−222.232519
15.518078
SIO2V
1.5607857
43.157


12
−158.540648
83.688942
N2VP950
1.00029966
48.398


13
−340.58772
31.059836
SIO2V
1.5607857
87.94


14
−151.34275
0.999997
N2VP950
1.00029966
92.472


15
−3390.668582
33.959537
SIO2V
1.5607857
99.743


16
−231.522766
249.6227
N2VP950
1.00029966
101.635


17
−184.547095
−209.6227
REFL
1.00029966
139.73


18
167.029818
249.92793
REFL
1.00029966
120.262


19
621.261771
25.224239
SIO2V
1.5607857
88.34


20
−556.892379
11.423072
N2VP950
1.00029966
87.849


21
928.352541
31.861443
SIO2V
1.5607857
84.353


22
−3894.042096
4.258076
N2VP950
1.00029966
81.388


23
−515.240387
10.001518
SIO2V
1.5607857
80.081


24
128.35306
19.188164
N2VP950
1.00029966
74.104


25
308.870114
10.000043
SIO2V
1.5607857
74.899


26
137.165863
21.160324
N2VP950
1.00029966
75.171


27
535.690303
10.000083
SIO2V
1.5607857
77.414


28
270.832047
16.021774
N2VP950
1.00029966
81.505


29
6886.310806
36.167214
SIO2V
1.5607857
84.419


30
−205.759199
3.943304
N2VP950
1.00029966
92.09


31
−673.879021
20.931667
SIO2V
1.5607857
96.507


32
−289.392079
17.53001
N2VP950
1.00029966
102.53


33
−578.552137
45.351534
SIO2V
1.5607857
114.339


34
−180.862466
0.999999
N2VP950
1.00029966
118.861


35
486.683329
67.153511
SIO2V
1.5607857
127.052


36
−560.582675
−0.510173
N2VP950
1.00029966
126.509


37
0
8.553303
N2VP950
1.00029966
124.301


38
804.757635
41.461871
SIO2V
1.5607857
124.183


39
−290.647705
1.000095
N2VP950
1.00029966
124.308


40
251.571322
46.634322
SIO2V
1.5607857
109.472


41
−989.86448
1.000042
N2VP950
1.00029966
103.95


42
86.546078
40.283002
SIO2V
1.5607857
72.678


43
219.985874
0.999974
N2VP950
1.00029966
63.421


44
87.427095
40.057397
SIO2V
1.5607857
50.39


45
0
3
H2OV193
1.43667693
21.125


46
0
0


16.5
















TABLE 7A





Aspheric constants

















SRF













4
10
17
18
22





K
0
0
−0.746204
−0.286924
0


C1
6.03E−08
4.24E−07
0.00E+00
0.00E+00
−1.62E−07


C2
7.60E−12
−3.19E−11
3.46E−14
6.73E−15
5.78E−12


C3
−2.87E−17
1.88E−14
−2.87E−19
−1.19E−18
2.80E−16


C4
−1.68E−21
−2.25E−18
1.04E−22
2.14E−22
2.70E−22


C5
1.40E−24
1.47E−21
−7.95E−27
−2.28E−26
−1.87E−24


C6
2.15E−30
4.27E−25
3.94E−31
1.46E−30
1.45E−28


C7
−1.03E−32
−5.55E−28
−1.07E−35
−5.11E−35
−5.39E−33


C8
1.22E−36
1.42E−31
1.22E−40
7.66E−40
1.42E−36













SRF















30
31
38
41







K
0
0
0
0



C1
5.31E−08
−5.32E−08
−3.90E−08
−2.16E−08



C2
1.81E−12
−1.14E−13
4.45E−15
2.47E−12



C3
1.20E−16
8.83E−17
4.67E−17
−8.51E−17



C4
−4.21E−21
−8.32E−21
−1.21E−21
3.85E−21



C5
−3.09E−25
3.44E−25
3.05E−27
−1.62E−25



C6
−6.36E−31
−3.35E−29
9.87E−32
5.85E−30



C7
−1.97E−33
1.94E−33
3.24E−38
−6.78E−35



C8
−7.59E−38
−2.07E−37
7.29E−42
−7.43E−40






















TABLE 9





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35
LUFTV193
1.00030168
66


1
167.582589
42.122596
SIO2V
1.5607857
84.14


2
−417.631156
7.351797


83.778


3
−242.658436
14.999993
SIO2V
1.5607857
83.61


4
−639.381532
1
N2VP950
1.00029966
84.261


5
118.161915
52.272937
SIO2V
1.5607857
82.935


6
−405.15896
2.506345
N2VP950
1.00029966
79.384


7
−349.632507
57.987649
SIO2V
1.5607857
78.093


8
−625.61536
0.999978
N2VP950
1.00029966
57.316


9
258.6518
13.775087
SIO2V
1.5607857
51.65


10
3309.642007
6.085525
N2VP950
1.00029966
46.297


11
2505.032734
45.485164
SIO2V
1.5607857
44.366


12
−160.280782
83.214895
N2VP950
1.00029966
43.224


13
−179.709766
28.095749
SIO2V
1.5607857
75.748


14
−113.094268
0.99999
N2VP950
1.00029966
80.728


15
−828.761389
28.910199
SIO2V
1.5607857
86.836


16
−193.020806
237.594315
N2VP950
1.00029966
88.806


17
−170.301754
−197.594315
REFL
1.00029966
137.191


18
164.75935
237.900412
REFL
1.00029966
114.069


19
213.979631
41.964013
SIO2V
1.5607857
95.394


20
−571.726494
30.907497
N2VP950
1.00029966
93.468


21
−607.905756
12.000001
SIO2V
1.5607857
81.046


22
213.467641
20.540794
N2VP950
1.00029966
75.725


23
118232.9153
10.073155
SIO2V
1.5607857
75.17


24
134.456642
11.393332
N2VP950
1.00029966
73.687


25
193.022977
12.19948
SIO2V
1.5607857
75.339


26
149.820622
39.058556
N2VP950
1.00029966
76.132


27
−473.179277
16.280318
SIO2V
1.5607857
82.022


28
−265.194438
3.071697
N2VP950
1.00029966
88.666


29
−596.281929
34.549024
SIO2V
1.5607857
89.977


30
−234.857742
2.605623
N2VP950
1.00029966
100.123


31
−681.432168
46.50367
SIO2V
1.5607857
108.764


32
−170.41214
29.245335
N2VP950
1.00029966
113.403


33
709.34663
59.972517
SIO2V
1.5607857
125.713


34
−519.598522
1.519132
N2VP950
1.00029966
126.621


35
450.108474
47.183961
SIO2V
1.5607857
123.987


36
−298.350498
−21.086597
N2VP950
1.00029966
122.98


37
0
23.537621
N2VP950
1.00029966
120.368


38
195.285408
43.215118
SIO2V
1.5607857
105.824


39
22862.90022
1.012838
N2VP950
1.00029966
100.964


40
97.777305
39.731996
SIO2V
1.5607857
76.541


41
292.58902
4.247054
N2VP950
1.00029966
67.621


42
77.06685
38.565556
SIO2V
1.5607857
47.651


43
0
3
H2OV193
1.43667693
21.068


44
0
0


16.5
















TABLE 9A





Aspheric constants

















SRF













10
17
18
22
28





K
0
−0.609408
−0.404331
0
0


C1
4.50E−07
0.00E+00
0.00E+00
−6.14E−08
1.09E−07


C2
−2.70E−11
7.78E−15
−9.34E−15
3.42E−12
3.58E−12


C3
4.11E−14
3.36E−19
−6.87E−19
2.90E−16
5.02E−16


C4
−1.48E−17
−2.72E−23
1.64E−25
−4.54E−21
−3.35E−20


C5
1.25E−20
2.59E−27
2.75E−27
−1.65E−24
−2.30E−24


C6
−3.96E−24
−1.24E−31
−6.03E−31
1.25E−27
5.00E−29


C7
4.61E−28
3.13E−36
3.69E−35
−1.97E−31
−3.03E−32


C8
5.89E−32
−3.19E−41
−8.59E−40
1.57E−35
2.67E−36












SRF













29
35
39







K
0
0
0



C1
−2.77E−08
−4.34E−08
−1.96E−08



C2
−7.08E−13
1.12E−13
2.57E−12



C3
5.74E−16
5.13E−17
−8.29E−17



C4
−4.78E−20
−1.19E−21
5.74E−21



C5
3.19E−24
−1.83E−26
−6.59E−25



C6
−2.07E−28
2.98E−31
5.81E−29



C7
6.57E−33
3.65E−35
−2.82E−33



C8
−8.15E−37
−9.28E−40
5.86E−38






















TABLE 10





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35
LUFTV193
1.00030168
66


1
287.201368
23.165416
SIO2V
1.5607857
80.746


2
9548.563984
5.351787
N2VP950
1.00029966
81.708


3
237.938727
27.034898
SIO2V
1.5607857
84.398


4
9748.474128
5.009226
N2VP950
1.00029966
83.75


5
162.029839
30.440188
SIO2V
1.5607857
81.611


6
97.700439
24.108143
N2VP950
1.00029966
71.632


7
285.67649
59.994975
SIO2V
1.5607857
72.04


8
−212.500863
1.413267
N2VP950
1.00029966
73.053


9
231.286954
59.984338
SIO2V
1.5607857
68.81


10
−272.808567
19.053716
N2VP950
1.00029966
59.332


11
470.335844
27.320605
SIO2V
1.5607857
44.739


12
−139.04097
1.780746
N2VP950
1.00029966
45.687


13
−127.442683
14.466354
SIO2V
1.5607857
45.809


14
−301.722518
29.641205
N2VP950
1.00029966
49.864


15
−87.764582
15.000004
SIO2V
1.5607857
53.623


16
−141.229355
34.507463
N2VP950
1.00029966
61.571


17
−259.685309
20.689312
SIO2V
1.5607857
75.669


18
−163.685953
1.001108
N2VP950
1.00029966
79.628


19
−425.644839
25.473178
SIO2V
1.5607857
82.933


20
−177.604049
271.436522
N2VP950
1.00029966
85.588


21
−192.411117
−231.436522
REFL
1.00029966
145.837


22
181.316474
275.635733
REFL
1.00029966
127.943


23
160.280773
39.766183
SIO2V
1.5607857
84.727


24
433.630809
1.168124
N2VP950
1.00029966
79.442


25
172.894805
12.000005
SIO2V
1.5607857
76.455


26
142.708343
25.834202
N2VP950
1.00029966
72.617


27
−522.138568
12
SIO2V
1.5607857
71.538


28
98.617841
39.707255
N2VP950
1.00029966
66.149


29
−242.043593
13.973969
SIO2V
1.5607857
67.886


30
−428.430378
1.113943
N2VP950
1.00029966
76.048


31
1395.872365
59.770439
SIO2V
1.5607857
77.227


32
−200.881136
0.999953
N2VP950
1.00029966
94.132


33
−796.373326
36.651147
SIO2V
1.5607857
101.811


34
−231.145256
0.999958
N2VP950
1.00029966
107.115


35
1394.739591
34.401193
SIO2V
1.5607857
113.699


36
−367.962973
0.999965
N2VP950
1.00029966
114.834


37
501.517244
61.420268
SIO2V
1.5607857
114.165


38
−252.939454
−26.770128
N2VP950
1.00029966
113.428


39
0
27.770123
N2VP950
1.00029966
113.395


40
219.357199
45.58316
SIO2V
1.5607857
104.413


41
−692.879408
0.999976
N2VP950
1.00029966
100.937


42
89.810973
40.252244
SIO2V
1.5607857
73.593


43
252.083859
1.000011
N2VP950
1.00029966
64.98


44
72.146642
41.286323
SIO2V
1.5607857
48.589


45
0
3
H2OV193
1.43667693
21.154


46
0
0


16.501
















TABLE 10A





Aspheric constants

















SRF













21
22
26
30
31





K
−0.459313
−0.341948
0
0
0


C1
0.00E+00
0.00E+00
−8.70E−08
1.71E−07
−5.72E−08


C2
1.02E−14
−4.95E−15
−1.61E−12
6.01E−12
−2.30E−13


C3
−5.02E−19
2.15E−19
1.90E−16
5.80E−17
1.96E−16


C4
7.89E−23
−9.13E−23
−5.76E−20
−5.21E−20
−1.01E−20


C5
−5.82E−27
1.06E−26
1.91E−23
−8.66E−24
−1.44E−23


C6
2.63E−31
−7.20E−31
−5.62E−27
−1.36E−27
2.35E−27


C7
−6.44E−36
2.52E−35
7.41E−31
6.08E−31
−1.26E−31


C8
6.64E−41
−3.58E−40
−4.73E−35
−5.19E−35
−3.01E−36













SRF













37
41







K
0
0



C1
−5.65E−08
−2.58E−08



C2
8.17E−14
3.95E−12



C3
8.43E−17
−2.50E−16



C4
−7.58E−22
2.34E−20



C5
−6.19E−26
−2.23E−24



C6
−8.89E−31
1.68E−28



C7
1.00E−34
−7.72E−33



C8
−1.44E−39
1.60E−37






















TABLE 11





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0.000000
35.000000


66.0


1
213.125261
21.214076
SIO2
1.560786
82.2


2
480.525665
1.000000


82.6


3
185.297502
31.993610
SIO2
1.560786
84.8


4
7598.261113
4.999310


83.7


5
117.345388
11.527031
SIO2
1.560786
79.0


6
90.286435
62.598487


72.4


7
309.861090
34.537793
SIO2
1.560786
74.4


8
−255.169966
1.000267


73.6


9
183.493169
25.255034
SIO2
1.560786
67.0


10
−733.608935
19.932610


63.6


11
331.584148
52.054611
SIO2
1.560786
51.0


12
−141.351439
8.662425


44.3


13
−135.694467
12.000000
SIO2
1.560786
45.2


14
−438.411699
16.902875


48.6


15
−80.203122
31.804553
SIO2
1.560786
49.3


16
−123.130978
34.208750


62.6


17
−308.561940
19.408823
SIO2
1.560786
76.5


18
−190.486221
1.000288


80.0


19
−339.277899
24.240054
SIO2
1.560786
81.9


20
−169.353619
266.539075


84.6


21
−190.594737
−226.539075
REFL

149.9


22
178.620508
266.539075
REFL

125.1


23
221.347957
30.251017
SIO2
1.560786
86.1


24
1463.195317
1.000000


83.7


25
250.202612
40.863033
SIO2
1.560786
81.0


26
143.175358
28.105820


69.5


27
−407.324144
12.000273
SIO2
1.560786
68.5


28
115.532167
36.897440


67.0


29
−221.836172
11.999999
SIO2
1.560786
68.9


30
−226.960357
1.000000


74.6


31
2492.697910
55.157108
SIO2
1.560786
78.7


32
−161.739806
1.000000


91.0


33
−695.448789
45.255799
SIO2
1.560786
97.4


34
−259.466566
1.000000


104.4


35
1602.782680
56.958100
SIO2
1.560786
107.7


36
−470.968577
1.000000


110.0


37
0.000000
0.000000


109.3


38
386.901024
44.983112
SIO2
1.560786
110.7


39
−272.274704
1.000000


111.1


40
175.872135
43.089438
SIO2
1.560786
99.5


41
−2548.763499
1.000000


95.3


42
91.643707
37.595346
SIO2
1.560786
72.4


43
255.781458
1.000000


64.0


44
67.785174
39.963844
SIO2
1.560786
47.1


45
0.000000
3.000000
H20
1.436677
21.2


46
0.000000
0.000000


16.5
















TABLE 11A





Aspheric constants

















SRF













2
10
11
21
22





K
0
0
0
−0.496553
−0.336642


C1
1.643437E−09
8.928205E−09
−8.734171E−08
0.000000E+00
0.000000E+00


C2
1.208889E−14
1.236176E−11
2.818326E−12
5.747313E−15
−6.240079E−15


C3
8.824285E−18
−1.197673E−15
−1.228572E−15
−1.412426E−19
6.784381E−20


C4
2.922597E−21
6.507491E−19
1.042260E−18
2.261574E−23
−7.158782E−23


C5
−2.369521E−25
−1.334779E−22
−3.756091E−23
−1.450149E−27
8.093083E−27


C6
3.356358E−30
2.670393E−26
−1.473570E−25
5.772350E−32
−5.720179E−31


C7
2.828477E−35
−3.381376E−30
7.050051E−29
−1.232729E−36
2.078917E−35


C8
1.430860E−38
2.797022E−34
−9.591943E−33
1.120210E−41
−3.145520E−40












SRF













26
30
31
38
41





K
0
0
0
0
0


C1
−7.826978E−08
1.171952E−07
−8.372229E−08
−4.940289E−08
−1.537092E−08


C2
1.072045E−12
5.982055E−12
1.174253E−12
4.933796E−13
3.778447E−12


C3
4.523977E−16
−1.760506E−16
−2.681026E−16
6.928288E−17
−2.017127E−16


C4
−1.271459E−19
−1.993128E−20
−1.550679E−20
−1.609487E−21
1.881073E−20


C5
3.954232E−23
−9.529811E−24
−1.593859E−24
−7.739698E−26
−2.087789E−24


C6
−1.083373E−26
1.085578E−28
−3.657276E−30
2.774226E−30
1.840295E−28


C7
1.465752E−30
2.273221E−31
2.631779E−32
−1.572253E−36
−9.812256E−33


C8
−8.520650E−35
−2.669719E−35
−7.142431E−36
−4.163468E−40
2.332003E−37





















TABLE 12





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35


66


1
251.921115
26.62683
SILUV
1.56038308
83.147


2
−989.210896
1


83.812


3
226.732024
32.025623
SILUV
1.56038308
85.26


4
1085.208221
1


83.38


5
128.283517
22.646566
SILUV
1.56038308
80.387


6
88.961725
15.545973


70.501


7
125.835208
59.877475
SILUV
1.56038308
70.846


8
−376.328333
1


65.691


9
291.512418
41.049599
SILUV
1.56038308
60.714


10
−247.107293
6.176611


50.627


11
152.969724
21.192151
SILUV
1.56038308
42.473


12
228.518434
5.482582


43.945


13
1248.660787
43.964726
SILUV
1.56038308
44.944


14
−152.706184
12.818026


54.237


15
−87.366215
15.60332
SILUV
1.56038308
54.983


16
−85.682846
3.636916


59.545


17
−86.526213
23.242695
SILUV
1.56038308
60.097


18
−108.668356
1


69.405


19
−200
16.671044
SILUV
1.56038308
72.006


20
−142.798216
250.765038


74.782


21
−166.718612
−210.765038
REFL

144.311


22
174.284123
264.180115
REFL

134.956


23
285.315103
27.076989
SILUV
1.56038308
95.88


24
1483.882926
52.740402


94.405


25
185.601922
11.999964
SILUV
1.56038308
84.907


26
111.087869
22.323131


81.119


27
1952.941696
12
SILUV
1.56038308
80.86


28
111.206342
58.54433


74.709


29
−126.687949
9.999452
SILUV
1.56038308
76.019


30
−155.19187
1


85.365


31
1585.242523
54.769473
SILUV
1.56038308
95.306


32
−154.387429
1


104.707


33
−348.074244
55.068746
SILUV
1.56038308
113.511


34
−243.634705
1


127.583


35
−1336.659415
41.515446
SILUV
1.56038308
135.024


36
−276.658598
1


137.317


37
435.341885
31.595504
SILUV
1.56038308
136.928


38
−3129.657481
1.00012


136.305


39
2105.975535
44.442342
SILUV
1.56038308
135.677


40
−300.54242
−13.727335


134.991


41
0
14.727335


128.371


42
267.42491
43.877196
SILUV
1.56038308
118.91


43
7074.847026
1


115.781


44
96.288803
41.059596
SILUV
1.56038308
80.776


45
228.69124
1


72.473


46
61.190052
42.233094
SILUV
1.56038308
49.33


47
0
3
WATER
1.437
23.01


48
0
0


16.502
















TABLE 12A





Aspheric constants

















SRF













10
19
21
22
26





K
0
0
−0.418696
−0.381372
0


C1
3.04E−07
−2.32E−08
0.00E+00
0.00E+00
−1.87E−07


C2
4.29E−11
2.52E−13
6.76E−15
−3.96E−15
−1.36E−11


C3
−1.17E−14
−8.41E−18
7.47E−20
1.19E−19
−1.96E−16


C4
4.44E−18
−1.26E−20
−4.44E−24
−6.18E−23
−5.50E−21


C5
−1.37E−21
4.90E−25
8.79E−28
5.39E−27
4.78E−24


C6
2.64E−25
−2.31E−28
−4.77E−32
−3.03E−31
−9.08E−28


C7
−4.76E−29
2.58E−32
1.37E−36
9.32E−36
7.93E−32


C8
2.93E−33
−2.18E−36
−1.19E−41
−1.19E−40
−5.07E−36












SRF













30
31
37
40
43





K
0
0
0
0
0


C1
1.24E−07
−6.86E−08
−4.46E−08
−2.05E−09
−8.05E−08


C2
9.26E−12
−4.81E−14
−5.47E−13
1.28E−13
5.05E−12


C3
4.76E−16
7.52E−17
5.21E−17
1.78E−17
−2.49E−16


C4
1.38E−20
−1.74E−20
6.91E−22
−6.14E−22
1.14E−20


C5
−7.47E−24
8.52E−25
−2.40E−26
4.48E−26
−3.40E−25


C6
5.98E−28
−2.23E−29
−2.11E−31
−1.55E−30
2.27E−30


C7
−7.73E−32
−3.06E−33
−2.39E−35
1.88E−35
2.38E−34


C8
7.38E−36
1.25E−37
5.01E−40
−4.01E−40
−5.88E−39





















TABLE 13





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35


65


1
186.586828
23.414502
SIO2V
1.5607857
83.982


2
597.259215
10.26813


84.106


3
246.448938
35.48684
SIO2V
1.5607857
87.131


4
−495.470793
0.999999


86.762


5
174.29392
12
SIO2V
1.5607857
82.318


6
105.886625
42.974925


75.746


7
298.014263
30.569503
SIO2V
1.5607857
77.754


8
−362.490174
0.999996


77.303


9
197.585289
26.9647
SIO2V
1.5607857
72.92


10
115.191376
6.433657


64.383


11
87.197031
33.092701
SIO2V
1.5607857
63.668


12
−21177.81881
11.342683


59.87


13
170.163316
22.577563
SIO2V
1.5607857
53.888


14
−397.634502
6.245625


50.153


15
−329.557796
25.65494
SIO2V
1.5607857
46.008


16
−440.379282
27.044628


48.461


17
−57.443645
14.999995
SIO2V
1.5607857
48.693


18
−75.393191
18.813359


56.902


19
−65.427115
14.999993
SIO2V
1.5607857
58.809


20
−85.530419
0.099998


69.648


21
−227.629071
32.632252
SIO2V
1.5607857
78.348


22
−113.134147
273.116577


82.743


23
−185.855248
−233.116577
REFL

152.166


24
187.338489
273.423654
REFL

143.116


25
277.370431
23.120389
SIO2V
1.5607857
85.671


26
1042.417218
0.999997


83.965


27
232.607011
22.047511
SIO2V
1.5607857
81.953


28
681.476699
7.231337


79.179


29
−4285.293249
15
SIO2V
1.5607857
78.599


30
110.856061
30.36008


72.288


31
−2955.113107
12
SIO2V
1.5607857
71.211


32
119.488431
40.054646


69.309


33
−194.926507
10
SIO2V
1.5607857
71.047


34
−199.009301
0.999987


77.318


35
7009.414576
51.207677
SIO2V
1.5607857
80.754


36
−165.020018
1


95.379


37
−367.692901
34.170188
SIO2V
1.5607857
103.911


38
−197.86104
1


110.595


39
−660.167042
61.861902
SIO2V
1.5607857
118.204


40
−205.342177
1


126.012


41
465.895739
25.776885
SIO2V
1.5607857
126.361


42
−2628.836635
0.099011


125.541


43
8527.260833
40.948445
SIO2V
1.5607857
125.078


44
−271.386413
0


124.177


45
0
0


112.927


46
243.774903
41.095341
SIO2V
1.5607857
107.874


47
−3313.940195
1


104.66


48
83.350349
42.069771
SIO2V
1.5607857
73.803


49
208.118275
1


66.123


50
55.435689
36.911372
SIO2V
1.5607857
44.754


51
0
3
H2OV193
1.43667693
22.888


52
0
0


16.254
















TABLE 13A





Aspheric constants

















SRF













2
12
13
21
23





K
0
0
0
0
−0.4498


C1
5.14E−08
2.47E−07
6.72E−08
−1.49E−08
0.00E+00


C2
−3.80E−14
3.12E−11
2.44E−11
5.94E−13
−6.07E−16


C3
−1.94E−18
−4.32E−15
1.29E−15
−3.47E−17
−1.49E−19


C4
4.21E−21
1.90E−18
3.61E−19
−4.54E−22
7.27E−24


C5
−7.98E−25
−1.98E−22
5.61E−22
−1.73E−25
−4.02E−28


C6
6.31E−29
2.16E−26
−4.89E−26
3.64E−29
9.03E−33


C7
−2.12E−34
−3.06E−31
1.03E−30
−2.29E−33
−7.65E−38


C8
−1.42E−37
4.40E−34
5.75E−34
1.51E−37
−5.25E−43












SRF













24
30
34
35
41





K
−0.304978
0
0
0
0


C1
0.00E+00
−2.20E−07
1.50E−07
−9.41E−08
−6.08E−08


C2
−4.92E−15
−1.47E−11
1.13E−11
−6.32E−13
−6.68E−14


C3
4.31E−20
−6.27E−17
5.33E−16
−4.10E−17
9.32E−17


C4
−3.35E−23
−7.88E−20
5.07E−21
−1.21E−20
1.98E−21


C5
2.63E−27
3.08E−23
−4.57E−24
−2.81E−24
−8.05E−26


C6
−1.39E−31
−5.95E−27
−2.28E−28
8.14E−29
9.24E−32


C7
3.83E−36
6.01E−31
−1.86E−32
5.30E−33
−1.69E−34


C8
−4.49E−41
−2.86E−35
1.72E−35
−2.48E−36
6.17E−39













SRF













44
47







K
0
0



C1
−7.09E−09
−6.42E−08



C2
4.04E−13
4.46E−12



C3
2.36E−17
−2.33E−16



C4
5.85E−22
1.60E−20



C5
−5.55E−26
−7.22E−25



C6
6.24E−30
1.37E−29



C7
−3.15E−34
3.59E−34



C8
5.34E−39
−9.82E−39






















TABLE 14





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35


65


1
264.155216
53.039363
SIO2V
1.5607857
81.542


2
−708.29109
15.80469


84.656


3
198.655375
49.267177
SIO2V
1.5607857
90.333


4
−296.847851
1.032629


89.02


5
188395.3333
12.000019
SIO2V
1.5607857
83.702


6
102.545536
14.972935


73.983


7
142.785896
38.44762
SIO2V
1.5607857
75.139


8
7336.068136
1


73.713


9
106.928203
12.000081
SIO2V
1.5607857
70.401


10
85.093164
1.641753


64.758


11
76.898689
64.469228
SIO2V
1.5607857
64.84


12
−453690.3967
0.494708


50.446


13
151.681366
18.484685
SIO2V
1.5607857
47.423


14
−363.490767
1.138548


43.25


15
−423.037048
10
SIO2V
1.5607857
43.525


16
513.67606
37.991004


45.761


17
−54.826872
16.135714
SIO2V
1.5607857
48.065


18
−76.475326
2.91112


59.373


19
−235.467293
87.250476
SIO2V
1.5607857
69.466


20
−123.833603
270.153968


91.586


21
−189.904942
−230.153968
REFL

154.818


22
175.052549
279.034717
REFL

138.889


23
584.131276
18.62041
SIO2V
1.5607857
71.907


24
111.389792
27.300612


68.759


25
−1516.326452
12.000002
SIO2V
1.5607857
69.364


26
147.378607
31.451574


73.254


27
−362.020208
12
SIO2V
1.5607857
76.176


28
−208.499815
1.640751


80.458


29
2551.550571
58.800655
SIO2V
1.5607857
89.721


30
−162.566587
1


102.174


31
−596.110808
30.823878
SIO2V
1.5607857
111.779


32
−242.915533
1.000004


115.425


33
−1403.743088
66.546477
SIO2V
1.5607857
119.764


34
−315.509469
1.000866


126.177


35
408.007384
50.326509
SIO2V
1.5607857
125.404


36
−350.602433
1


123.958


37
−1141.174919
18.698745
SIO2V
1.5607857
116.585


38
−446.728577
−3.536343


114.214


39
0
4.536343


109.775


40
159.383791
42.840202
SIO2V
1.5607857
100.406


41
3177.374501
1


97.192


42
78.804469
35.408881
SIO2V
1.5607857
68.008


43
170.008236
1


60.471


44
55.898462
33.213214
SIO2V
1.5607857
42.887


45
0
3
H2OV193
1.43667693
22.783


46
0
0


16.253
















TABLE 14A





Aspheric constants

















SRF













2
12
13
19
21





K
0
0
0
0
−0.447479


C1
3.78E−08
3.57E−07
−5.44E−08
3.83E−08
0.00E+00


C2
2.66E−12
1.96E−11
−2.40E−11
2.56E−13
−5.59E−16


C3
−1.97E−16
6.31E−15
8.87E−15
−2.12E−16
3.43E−19


C4
2.37E−20
−9.55E−19
−7.06E−18
5.73E−21
−3.56E−23


C5
−2.23E−24
−2.55E−22
1.67E−21
−1.00E−24
2.72E−27


C6
1.48E−28
−8.65E−26
−2.22E−25
2.39E−28
−1.16E−31


C7
−9.02E−34
2.04E−29
−1.24E−28
1.26E−32
2.72E−36


C8
−2.19E−37
−1.29E−32
8.07E−33
−1.88E−36
−2.60E−41












SRF













22
24
25
28
29





K
−0.269196
0
0
0
0


C1
0.00E+00
−1.90E−07
−1.07E−07
7.94E−08
−4.11E−08


C2
−2.35E−15
−9.95E−12
1.90E−12
3.38E−12
−9.39E−13


C3
4.59E−21
−5.46E−16
−1.31E−16
5.77E−17
−3.94E−17


C4
−1.95E−23
1.36E−20
−8.66E−20
−3.25E−20
7.40E−21


C5
2.32E−27
1.11E−23
6.80E−23
−2.17E−25
−7.50E−24


C6
−1.42E−31
−1.76E−27
−1.45E−26
4.68E−30
1.58E−27


C7
4.52E−36
1.20E−30
3.34E−30
4.57E−32
−1.55E−31


C8
−5.19E−41
−6.74E−35
−2.43E−34
1.76E−36
6.35E−36












SRF













35
38
41







K
0
0
0



C1
−5.52E−08
−1.11E−08
−2.87E−08



C2
2.65E−13
8.65E−13
2.22E−12



C3
8.42E−17
3.74E−17
−1.63E−16



C4
3.45E−21
3.35E−21
2.19E−20



C5
−2.31E−25
−4.18E−25
−1.18E−24



C6
2.28E−31
2.67E−29
−2.24E−29



C7
2.16E−35
−8.47E−34
5.71E−33



C8
2.04E−39
5.77E−39
−1.82E−37






















TABLE 15





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35


65


1
220.440206
90.193314
SIO2V
1.5607857
82.632


2
−2258.387326
0.099978


86.391


3
191.078269
45.21979
SIO2V
1.5607857
89.197


4
−346.939277
5.038291


87.936


5
−862.704276
11.999955
SIO2V
1.5607857
83.714


6
106.229194
9.360323


75.459


7
124.368852
37.350319
SIO2V
1.5607857
77.121


8
2278.621151
1


75.985


9
130.547812
11.999956
SIO2V
1.5607857
73.073


10
97.147988
1.00002


67.707


11
80.762223
48.20009
SIO2V
1.5607857
67.797


12
−836.844333
0.735286


62.235


13
146.655061
35.349711
SIO2V
1.5607857
56.269


14
−325.682663
5.303246


44.684


15
−237.715704
10
SIO2V
1.5607857
42.717


16
97614.51754
31.113387


44.942


17
−55.878516
25.725119
SIO2V
1.5607857
46.52


18
−84.463856
3.412335


61.171


19
−206.813589
73.554079
SIO2V
1.5607857
68.435


20
−122.996844
265.817443


87.048


21
−188.846432
−225.817443
REFL

158.348


22
170.512895
266.104304
REFL

131.309


23
617.040338
25.358997
SIO2V
1.5607857
77.734


24
−340.978557
1


76.849


25
−575.873317
11.999961
SIO2V
1.5607857
74.709


26
127.056764
29.486792


68.944


27
−919.909026
11.999959
SIO2V
1.5607857
69.382


28
141.247218
33.090673


73.039


29
−327.789177
14.007072
SIO2V
1.5607857
76.032


30
−187.527488
1.002508


80.888


31
1268.298268
66.023641
SIO2V
1.5607857
92.44


32
−172.960759
1


106.476


33
−551.894279
31.122194
SIO2V
1.5607857
114.794


34
−248.493705
2.656579


118.516


35
−5734.547222
50.472484
SIO2V
1.5607857
123.221


36
−350.590281
3.163294


126.143


37
402.358109
43.558538
SIO2V
1.5607857
124.07


38
−381.952357
1


122.788


39
−1074.912987
18.425846
SIO2V
1.5607857
116.413


40
−432.576165
−8.977508


114.127


41
0
9.977508


111.763


42
180.300844
40.797225
SIO2V
1.5607857
101.129


43
6426.19364
1


97.236


44
84.482776
36.262612
SIO2V
1.5607857
70.522


45
215.215262
1


63.323


46
53.879713
33.812201
SIO2V
1.5607857
42.561


47
0
3
H2OV193
1.43667693
22.774


48
0
0


16.253
















TABLE 15A





Aspheric constants

















SRF













2
12
13
19
21





K
0
0
0
0
−0.468594


C1
2.23E−08
1.88E−07
−1.64E−07
1.00E−08
0.00E+00


C2
4.33E−12
2.77E−11
−1.41E−12
−4.07E−13
1.68E−16


C3
−3.03E−16
−4.05E−15
−5.95E−15
−1.03E−16
2.66E−19


C4
2.79E−20
−2.39E−18
−2.18E−18
2.01E−20
−2.52E−23


C5
−3.36E−24
1.40E−21
6.20E−22
−6.52E−24
1.91E−27


C6
2.26E−28
−3.87E−25
−4.85E−26
1.34E−27
−8.03E−32


C7
−2.80E−33
5.49E−29
2.56E−29
−1.27E−31
1.83E−36


C8
−1.73E−37
−3.09E−33
−4.08E−33
5.46E−36
−1.72E−41












SRF













22
25
27
30
31





K
−0.258782
0
0
0
0


C1
0.00E+00
1.46E−07
−1.45E−07
6.78E−08
−4.22E−08


C2
−2.25E−15
−1.14E−11
1.44E−11
5.29E−12
−1.13E−13


C3
4.56E−19
1.33E−15
1.58E−16
2.99E−17
−2.12E−16


C4
−7.45E−23
−1.50E−19
−1.60E−19
−3.15E−20
3.70E−20


C5
7.82E−27
7.50E−24
6.20E−23
3.57E−24
−8.27E−24


C6
−4.50E−31
1.43E−28
−1.02E−26
−7.69E−28
1.28E−27


C7
1.44E−35
−1.30E−31
1.65E−30
6.47E−32
−1.13E−31


C8
−1.76E−40
1.14E−35
−1.59E−34
−4.37E−37
4.59E−36












SRF













37
40
43







K
0
0
0



C1
−5.99E−08
−1.37E−08
−2.10E−08



C2
4.92E−13
1.20E−12
1.02E−12



C3
8.41E−17
1.32E−17
−2.69E−18



C4
4.25E−21
5.28E−21
7.37E−21



C5
−2.88E−25
−5.23E−25
−3.90E−25



C6
5.24E−31
2.93E−29
−7.25E−30



C7
5.37E−35
−9.06E−34
1.51E−33



C8
1.09E−39
2.79E−39
−1.24E−38






















TABLE 16





SURF
RADIUS
THICKNESS
MATERIAL
INDEX
SEMIDIAM.




















0
0
35


65


1
203.096237
51.348217
SIO2V
1.5607857
84.153


2
−1160.222766
0.099783


85.288


3
181.493677
43.475858
SIO2V
1.5607857
86.58


4
−341.925526
1.005485


84.893


5
−403.858869
11.999746
SIO2V
1.5607857
83.592


6
109.657938
15.898981


74.771


7
164.368819
44.721199
SIO2V
1.5607857
76.185


8
77645.0807
1


75.386


9
95.919438
11.999975
SIO2V
1.5607857
73.703


10
80.656102
5.826329


67.839


11
79.189771
47.039779
SIO2V
1.5607857
68.939


12
−561.553393
0.099927


64.509


13
139.074465
29.669365
SIO2V
1.5607857
60.109


14
−351.160951
9.311808


53.957


15
−473.600856
10
SIO2V
1.5607857
43.672


16
620.385225
33.601754


45.134


17
−52.784435
14.999981
SIO2V
1.5607857
46.152


18
−74.212989
1.001764


56.339


19
−209.153453
84.778236
SIO2V
1.5607857
63.352


20
−130.926715
255.559533


85.589


21
−187.311637
−215.559533
REFL

162.9


22
158.774035
264.523552
REFL

123.289


23
534.325629
42.990891
SIO2V
1.5607857
83.598


24
−461.508523
1


82.714


25
−5934.605843
12.000066
SIO2V
1.5607857
80.886


26
119.705874
28.744512


76.197


27
1519.32587
12.058263
SIO2V
1.5607857
77.6


28
141.843628
31.894192


79.343


29
−915.926476
20.162536
SIO2V
1.5607857
82.206


30
−205.883678
1.152206


86.328


31
10322.23403
66.866508
SIO2V
1.5607857
93.09


32
−181.874156
1


109.763


33
−421.7412
53.839358
SIO2V
1.5607857
117.145


34
−248.466964
0.999941


128.448


35
−1926.967116
32.001083
SIO2V
1.5607857
134.375


36
−368.835919
1.852034


135.911


37
354.164031
52.480694
SIO2V
1.5607857
136.137


38
−368.63102
1


135.137


39
−828.73625
11.784388
SIO2V
1.5607857
126.567


40
−810.714199
2.572951


124.051


41
0
−1.572951


118.262


42
154.167114
46.690534
SIO2V
1.5607857
107.326


43
9845.921815
1


104.915


44
90.785618
33.664668
SIO2V
1.5607857
74.672


45
224.183877
1


69.281


46
52.291327
34.416469
SIO2V
1.5607857
43.665


47
0
3
H2OV193
1.43667693
24.683


48
0
0


16.256
















TABLE 16A





Aspheric constants

















SRF













2
12
13
19
21





K
0
0
0
0
−0.448249


C1
8.02E−09
2.78E−07
−1.35E−07
3.82E−08
0.00E+00


C2
4.20E−12
3.61E−11
7.65E−12
4.03E−15
−6.31E−16


C3
−3.80E−16
−3.72E−15
−3.60E−15
−2.87E−16
3.14E−19


C4
1.06E−20
−7.33E−19
−1.74E−18
−4.72E−20
−2.63E−23


C5
9.90E−25
5.93E−22
5.77E−22
4.58E−23
1.70E−27


C6
−1.56E−28
−1.48E−25
4.63E−26
−1.86E−26
−6.12E−32


C7
1.90E−32
2.05E−29
−1.32E−29
3.54E−30
1.22E−36


C8
−9.78E−37
−1.01E−33
−4.75E−35
−2.52E−34
−1.00E−41












SRF













22
25
27
30
31





K
−0.301702
0
0
0
0


C1
0.00E+00
1.70E−07
−1.21E−07
4.69E−08
−4.37E−08


C2
−1.93E−15
−1.40E−11
1.82E−11
4.01E−12
−6.80E−13


C3
−1.03E−18
1.35E−15
6.67E−16
−2.83E−17
−2.42E−16


C4
1.15E−22
−2.19E−19
8.15E−20
−6.69E−22
3.15E−20


C5
−7.31E−27
1.48E−23
3.45E−24
4.14E−24
−5.56E−24


C6
1.26E−31
−6.97E−28
3.08E−27
−1.25E−27
3.74E−28


C7
8.96E−36
−7.36E−32
−5.45E−31
1.44E−31
−9.55E−33


C8
−2.90E−40
1.12E−35
1.66E−35
−6.05E−36
−7.20E−37












SRF













37
40
43







K
0
0
0



C1
−5.26E−08
−3.16E−08
7.85E−10



C2
1.78E−13
1.40E−12
6.39E−13



C3
6.38E−17
−1.09E−17
−1.45E−17



C4
3.79E−21
6.35E−21
3.10E−21



C5
−1.89E−25
−5.33E−25
3.20E−25



C6
−3.40E−31
2.59E−29
−5.68E−29



C7
1.88E−35
−6.08E−34
3.00E−33



C8
1.27E−39
8.73E−40
−3.92E−38























TABLE 17





Fig.
λ
NA
Yobj
OAL1/mm
OAL3/mm
MG





















2
193
1.2
66
430.04
548.46
0.78


4
193
1.2
66
450.79
582.74
0.77


7
193
1.2
66
466.38
574.00
0.81


9
193
1.2
66
460.81
591.60
0.78


10
193
1.2
66
500.44
518.13
0.97


11
193
1.2
66
489.34
534.12
0.92


12
193
1.3
66
425.56
613.66
0.69


13
193
1.3
65
472.62
544.26
0.87


14
193
1.3
65
513.08
498.55
1.03


15
193
1.3
65
521.66
502.53
1.04


16
193
1.35
65
492.88
541.56
0.91
























TABLE 18









RLL/
TLL/
DIALL/




Fig.
λ
NA
Yobj
mm
mm
mm
LL1
LL2























2
193
1.2
66
49.61
31.48
75.96
0.63
1.53


4
193
1.2
66
50.00
29.33
73.75
0.59
1.48


7
193
1.2
66
87.43
40.06
100.36
0.46
1.15


9
193
1.2
66
77.07
38.57
95.24
0.50
1.24


10
193
1.2
66
72.15
41.29
96.69
0.57
1.34


11
193
1.2
66
67.79
39.96
92.98
0.59
1.37


12
193
1.3
66
61.19
42.23
98.47
0.69
1.61


13
193
1.3
65
55.44
36.91
89.08
0.67
1.61


14
193
1.3
65
55.90
33.21
85.45
0.59
1.53


15
193
1.3
65
53.88
33.81
84.84
0.63
1.57


16
193
1.35
65
52.29
34.42
87.11
0.66
1.67

























TABLE 19





Fig.
λ
NA
Yobj
COMP1
COMP2
COMP3
N1AS
N2AS
ASR
























2
193
1.2
66
9.18
138
46
0
1
0


4
193
1.2
66
9.29
149
50
0
1
0


7
193
1.2
66
10.6
244
81
2
5
0.40


9
193
1.2
66
10.6
232
77
1
5
0.20


10
193
1.2
66
9.52
219
73
0
5
0


11
193
1.2
66
9.34
215
72
3
5
0.60


12
193
1.3
66
9.70
233
78
2
6
0.33


13
193
1.3
65
9.08
236
79
4
6
0.67


14
193
1.3
65
9.03
208
69
4
7
0.57


15
193
1.3
65
8.94
214
72
4
7
0.57


16
193
1.35
65
9.11
218
73
4
7
0.57






















TABLE 20








f3(L1 . . .
f3(L1 . . .
AS-IS/



Fig.
β 2
β 3
2)/mm
2)/mm
TT
CRA(M)/°





















2
0.868
0.168
−150.018

0.172
61.23


4
0.942
0.166
−212.248

0.104
62.77


7
0.869
0.171

−441.036
0.146
61.08


9
0.969
0.168

−388.381
0.123
62.95


10
0.960
0.154

−274.736
0.128
62.27


11
1.009
0.147

−249.046
0.137
64.57


12
1.286
0.122

−247.036
0.118
70.75


13
1.190
0.117

−712.866
0.100
68.88


14
1.045
0.126
−114.534

0.097
69.2


15
1.044
0.129
−368.766

0.101
69.3


16
0.991
0.134
−430.318

0.095
71.21

























TABLE 21





Fig.
K7
K7a
DIA31/DIAAS
K9
K10
K11
CBA1/°
CBA3/°
DIAAS/DIAP1
























2
Y
Y
0.833
Y
Y
N
4.62
7.45
2.135


4
Y
Y
1.050
Y
Y
N
2.17
7.17
1.448


7
N
Y
0.709
Y
Y
Y
1.08
0.88
3.349


9
N
Y
0.792
Y
Y
Y
1.32
1.04
2.837


10
N
Y
0.746
Y
Y
N
3.49
1.68
2.539


11
N
Y
0.789
Y
Y
N
3.25
1.09
2.534


12
N
Y
0.746
Y
Y
Y
7.11
1.42
3.086


13
N
Y
0.758
Y
Y
Y
5.29
1.62
2.188


14
Y
Y
0.667
Y
Y
Y
4.04
4.75
2.007


15
Y
Y
0.695
Y
Y
Y
5.28
2.80
2.353


16
Y
Y
0.722
Y
Y
Y
6.60
2.29
1.950

## Claims

1. A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprising:
a first objective part to image the pattern provided in the object plane to a first intermediate image, wherein all of the elements in the first objective part having optical power to image the pattern provided in the object plane to the first intermediate image are refractive elements;
a second objective part that comprises at least one concave mirror to image the first intermediate image to a second intermediate image; and
a third objective part to image the second intermediate image to the image plane, wherein all of the elements in the third objective part having optical power to image the second intermediate image to the image plane are refractive elements;
wherein the third objective part comprises at least two negative lenses,
wherein two of the negative lenses each have a concave surface facing the image plane,
wherein an aperture stop is positioned in the third objective part,
wherein there are no more than four lenses in the third objective part between the aperture stop and the image plane, and
wherein the projection objective has an image-side numerical aperture NA of at least 1.2 when water is used as an immersion fluid between the third objective part and the image plane.

2. The catadioptric projection objective of claim 1, wherein all of the lenses in the third objective part between the aperture stop and the image plane are positive lenses.

3. The catadioptric projection objective of claim 1, wherein the two negative lenses each having the concave surface facing the image plane are adjacent one another.

4. The catadioptric projection objective of claim 1, wherein the third objective part comprises three negative lenses.

5. The catadioptric projection objective of claim 1, wherein there are no more than three lenses between the aperture stop and the image plane.

6. The catadioptric projection objective of claim 1, wherein the projection objective is configured for use at 193 nm.

7. The catadioptric projection objective of claim 1, wherein the third objective part comprises a double asphere formed by adjacent aspheric surfaces on consecutive lenses in the third objective part.

8. The catadioptric projection objective of claim 1, wherein the projection objective has an image-side numerical aperture NA of at least 1.3 when water is used as an immersion fluid between the third objective part and the image plane.

9. The catadioptric projection objective of claim 1, wherein the second objective part comprises two concave mirrors.

10. A catadioptric projection exposure system for microlithography comprising an illumination system and the projection objective as claimed in claim 1.

11. A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprising:
a first objective part to image the pattern provided in the object plane to a first intermediate image, wherein all of the elements in the first objective part having optical power to image the pattern provided in the object plane to the first intermediate image are refractive elements;
a second objective part that comprises at least one concave mirror to image the first intermediate image to a second intermediate image, wherein each concave mirror has a continuous surface positioned for imaging the first intermediate image to the second intermediate image without a pupil obscuration; and
a third objective part to image the second intermediate image to the image plane, wherein all of the elements in the third objective part having optical power to image the second intermediate image to the image plane are refractive elements;
wherein the catadioptric projection objective comprises a double asphere formed by adjacent aspheric surfaces on consecutive lenses, and wherein the projection objective has an image-side numerical aperture NA of at least 1.2 when water is used as an immersion fluid between the third objective part and the image plane.

12. The catadioptric projection objective according to claim 11, wherein an axial distance between the adjacent aspheric surfaces is smaller than an axial thickness of a thinner of the two consecutive lenses forming the double asphere.

13. The catadioptric projection objective according to claim 11, wherein the double asphere is in the third objective part.

14. The catadioptric projection objective of claim 13, wherein the double asphere is positioned optically between the second intermediate image and the pupil surface of the third objective part.

15. The catadioptric projection objective of claim 11, wherein the double asphere is in the first objective part.

16. The catadioptric projection objective of claim 11, further comprising a second double asphere formed by adjacent aspheric surfaces on another pair of consecutive lenses.

17. The catadioptric projection objective of claim 16, wherein the first double asphere is in the third objective part and the second double asphere is in the first objective part.

18. The catadioptric projection objective of claim 11, wherein the projection objective has an image-side numerical aperture NA of at least 1.3 when water is used as an immersion fluid between the third objective part and the image plane.

19. A catadioptric projection exposure system for microlithography comprising an illumination system and the projection objective as claimed in claim 11.

20. The catadioptric projection objective of claim 1, wherein the first and third objectives share a common optical axis.

21. The catadioptric projection objective of claim 20, wherein the concave mirror has a continuous surface positioned on one side of the common optical axis.

22. A catadioptric projection objective of claim 1, wherein each concave mirror has a continuous surface positioned for imaging the first intermediate image to the second intermediate image without a pupil obscuration.

23. A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprising:
a first objective part to image the pattern provided in the object plane to a first intermediate image, wherein all of the elements in the first objective part having optical power to image the pattern provided in the object plane to the first intermediate image are refractive elements;
a second objective part that comprises at least one concave mirror to image the first intermediate image to a second intermediate image; and
a third objective part to image the second intermediate image to the image plane, wherein all of the elements in the third objective part having optical power to image the second intermediate image to the image plane are refractive elements;
wherein the third objective part comprises at least three negative lenses, and wherein two of the negative lenses in the third objective part are adjacent one another, and
wherein the projection objective has an image-side numerical aperture NA of at least 1.2 when water is used as an immersion fluid between the third objective part and the image plane.

24. The catadioptric projection objective of claim 23, wherein the two negative lenses that are adjacent one another each have a concave surface facing the image plane.

25. The catadioptric projection objective of claim 24, wherein an aperture stop is positioned in the third objective part, and wherein there are no more than four lenses in third objective part between the aperture stop and the image plane.

26. The catadioptric projection objective of claim 25, wherein all of the lenses in the third objective part between the aperture stop and the image plane are positive lenses.

27. The catadioptric projection objective of claim 26, wherein the projection objective is configured for use at 193 nm and has an image-side numerical aperture NA of at least 1.3 at 193 nm when water is used as an immersion fluid between the third objective part and the image plane.

28. A catadioptric projection objective of claim 27, wherein each concave mirror has a continuous surface positioned for imaging the first intermediate image to the second intermediate image without a pupil obscuration.

29. The catadioptric projection objective of claim 28, wherein the first and third objectives share a common optical axis, wherein the continuous surface of each concave mirror is positioned on one side of the common optical axis for imaging the first intermediate image to the second intermediate image without a pupil obscuration.

30. A catadioptric projection exposure system for microlithography comprising an illumination system and the projection objective as claimed in claim 29.