# Patent

## Title
MEMS device automatic-gain control loop for mechanical amplitude drive

## Abstract

This document discusses, among other things, apparatus and methods for digital automatic gain control for driving a MEMS device, such as a proof mass. In an example, an apparatus can include a driver configured to oscillate a proof mass of a MEMS device, a charge-to-voltage (C2V) converter configured to provide oscillation information of the proof mass, an analog-to-digital converter (ADC) configured to provide a digital representation of the oscillation information, and a digital, automatic gain control circuit to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information.

## Background
CLAIM OF PRIORITY
This application claims the benefit of priority to U.S. Provisional Patent Application Ser. No. 61/620,641, filed Apr. 5, 2012, hereby incorporated by reference herein in its entirety.


OVERVIEW
This document discusses, among other things, apparatus and methods for digital automatic gain control for driving a MEMS device, such as a proof mass. In an example, an apparatus can include a driver configured to oscillate a proof mass of a MEMS device, a charge-to-voltage (C2V) converter configured to provide oscillation information of the proof mass, an analog-to-digital converter (ADC) configured to provide a digital representation of the oscillation information, and a digital, automatic gain control circuit to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information.
This overview is intended to provide a general overview of subject matter of the present patent application. It is not intended to provide an exclusive or exhaustive explanation of the invention. The detailed description is included to provide further information about the present patent application.



BRIEF DESCRIPTION OF THE DRAWINGS
In the drawings, which are not necessarily drawn to scale, like numerals may describe similar components in different views. Like numerals having different letter suffixes may represent different instances of similar components. The drawings illustrate generally, by way of example, but not by way of limitation, various embodiments discussed in the present document.
FIG. 1 illustrates an analog control circuit coupled to a MEMS gyroscope.
FIG. 2 illustrates generally a block diagram of an example MEMS gyroscope system.
FIG. 3 illustrates generally an example MEMS control circuit including an example digital automatic gain control (AGC) circuit.



DETAILED DESCRIPTION
MEMS gyroscopes provide motion detection and measurement signals using deflections of a vibrating proof mass. The deflections are caused by a combination of movement of the vibrating proof mass, for example a proof mass of a gyroscope, and resulting Coriolis forces. Robust performance of a MEMS gyroscope can depend on the stability of the proof mass oscillations. The present inventors have recognized automatic gain control (AGC) apparatus and methods for driving a proof mass to oscillate with a stable amplitude at a resonant frequency of the proof mass. In certain examples an AGC loop can adjust an electrostatic force pumping into a MEMS gyroscope through drive electrodes such that the mechanical oscillation amplitude of the proof mass of the gyroscope is observed and maintained at a programmable target value. In some examples, the AGC loop can include an architecture that allows sensing the oscillation of the proof mass with very low noise and processing of the loop operations can be completed in a noise-less, digital environment.
FIG. 1 illustrates an analog control circuit 104 coupled to a MEMS gyroscope 102. The MEMS gyroscope 102 can include drive electrodes (gdp, gdn) and drive sense electrodes (gp, gn) for coupling the analog control circuit 104 to the MEMS gyroscope 102. The analog control circuit 104 can drive a proof mass of the MEMS gyroscope into oscillation using a driver circuit 107 coupled to the drive electrodes (gdp, gdn) of the MEMS gyroscope 102. The analog control circuit 104 can receive proof mass position information using the drive sense electrodes (gp, gn) of the MEMS gyroscope and a drive sense charge-to-voltage (C2V) converter 105 of the analog control circuit 104. A phase shifter 106 can provide phase shifted position information of the proof mass to a duty cycle generator 140 of the analog control circuit 104 to generate a command signal for the driver circuit 107. In certain examples, the phase shifter 106 can provide phase shift to sustained oscillation of the proof mass of the MEMS gyroscope 102. An analog peak detector 141 can also receive the proof mass position information and can provide amplitude information about the proof mass oscillations. An analog comparator 142 can compare the amplitude information to a desired amplitude reference (AREF), and can provide an amplitude error signal including amplitude error information, or oscillation amplitude error information. In some examples, the analog comparator 142 can include a gain setting to scale the amplitude error signal. A feedback loop 143 of the analog control circuit 104 can use a loop compensation module 144 to further compensate the amplitude error information to assist the duty cycle generator 140 in generating a control signal for the driver circuit 107. In response to the control signal, the driver circuit 107 can drive the proof mass of the MEMS gyroscope 102 into oscillation at a resonant frequency and with stable oscillation amplitude.
FIG. 2 illustrates generally a block diagram of an MEMS gyroscope system 200 including an example digital, automatic gain control (AGC) circuit 201. The MEMS gyroscope system 200 can include a MEMS gyroscope 202 including a proof mass 203 such as a suspended proof mass, and a MEMS control circuit 204. In certain examples, the MEMS control circuit 204 can include a sense charge-to-voltage (C2V) converter 205, a phase shift circuit 206, a drive circuit 207, and the AGC circuit 201. The AGC circuit 201 can provide a command signal to the drive circuit 207 to drive the proof mass 203 of the MEMS gyroscope 202 into oscillation at a resonant frequency of the proof mass 203. In certain examples, the proof mass 203 can have a resonant frequency at about 20 kHz. It is understood that a proof mass can have a resonant frequency other than about 20 kHz without departing from the scope of the present subject matter. The drive sense C2V 205 can be couple to drive sense electrodes (gp. gn) of the proof mass 203 of the MEMS gyroscope 202. The drive sense electrodes (gp. gn) can provide a differential capacitive charge signal indicative of the actual oscillation of the proof mass 203. The differential capacitive charge signal can be used to provide phase and amplitude feedback to the drive circuit 207. It is understood that a proof mass can include a single sense signal to provide a non-differential capacitive charge signal without departing from the scope of the present subject matter. In certain examples, the drive circuit 207 can provide a power control signal to vibrate the proof mass of the MEMS gyroscope. In some examples, the drive circuit 207 can provide a power control signal to one or more proof mass drive electrodes (gdp. gdn) to vibrate the proof mass at a resonant frequency. In some examples, the drive circuit 207 can provide a power control signal to one or more proof mass drive electrodes (gdp. gdn) to vibrate the proof mass using electrostatic actuation. In certain examples, the drive sense C2V converter 205 can provide capacitive sensed position information of the proof mass 203 as the proof mass 203 vibrates. In an example, a phase shift circuit 206 can introduce a phase shift of (90) degrees to the output of the drive sense C2V converter 205 to ensure oscillation (or vibration) of the proof mass 203. Accordingly, the drive circuit 207 can receive the phase shifted output from phase shift circuit 206 to drive the proof mass 203. In certain examples, a phase shift of 360 degrees can be achieve through a loop of the MEMS gyroscope system 200 to ensure oscillation of the proof mass 203. In an example, drive sense C2V converter 205 can provide 90 degrees of phase shift, the phase shift circuit 206 can introduce a phase shift of 90 degrees, and the drive circuit can provide an inversion to ensure oscillation of proof mass 203. In certain examples, the output of the drive sense C2V 205 can be used by the AGC circuit 201 to monitor and control the amplitude of the proof mass oscillations.
FIG. 3 illustrates generally an example MEMS control circuit 304 including an example digital AGC circuit 301. In certain examples, the MEMS control circuit 204 can be coupled to a MEMS device, such as a MEMS gyroscope (not shown). In certain examples, the MEMS gyroscope can include a proof mass, drive electrodes, drive sense electrodes and sense electrodes (not shown). In certain examples, the MEMS control circuit 304 can include an analog section 311 and a digital AGC circuit 301. In certain examples, the analog section 311 can include, a drive sense C2V converter 305, an input analog-to-digital converter (ADC) 312, an output digital-to-analog converter (DAC) 313, a drive circuit 307 and a phase shift circuit 306 coupled between the drive circuit 307 and the output of the drive sense C2V converter 305.
In certain examples, the drive sense C2V converter 305 can receive a capacitive signal from drive sense electrodes of the MEMS gyroscope and provide a voltage signal indicative of the capacitive signal. The voltage signal can be used to provide position information of the proof mass, such as phase and amplitude feedback, to the drive circuit 307. In certain examples, the drive circuit 307 can provide a power signal to vibrate the proof mass of the MEMS gyroscope. In some examples, the drive circuit 307 can vibrate the proof mass at a resonant frequency. In some examples, the drive circuit can provide a power signal to vibrate the proof mass using electrostatic actuation. In certain examples, the drive sense C2V converter 305 can provide capacitive sensed position information of the proof mass as the proof mass vibrates. In an example, a phase shift circuit 306 can introduce a phase shift of 90 degrees to the output of the drive sense C2V converter 305 to ensure oscillation (or vibration) of the proof mass. Accordingly, the drive circuit 307 can receive the phase shifted output from phase shift circuit 306 to drive the proof mass. In such an example, the phase shift circuit 306 can introduce a phase shift of 90 degrees relative to the motion of proof mass to provide a 180 degree shift to the drive circuit 307 needed to ensure oscillation of proof mass. In certain examples, the output of the drive sense C2V 305 can be used by the digital AGC circuit 301 to monitor and control the amplitude of the proof mass oscillations.
In certain examples, the digital AGC 301 of the MEMS control circuit 304 can include an input section 316, an output section 317, and a control section 318.
In certain examples, the input section 316 can include the drive sense ADC 312 and various lifters 319, 320 for providing a digitized drive sense signal. In an example, the drive sense ADC 312 can include a band-pass delta-sigma ADC. It is understood that other types of ADC converters are possible without departing from the scope of the pr ent subject matter. In certain examples, a band-pass sigma-delta ADC can provide simple digital conversion of a drive sense signal while avoiding 1/f noise. In certain examples, the input section 316 can include a sin c5 filter 319 to down-sample a single-bit data stream output of the drive sense ADC 312 and provide a multi-bit representation of the single-bit data stream output of the drive sense ADC 312, and a band-pass filter 320 to remove much of the out-of-band noise of the band pass filtered input signal. In an example, the sin c5 filter 319 can receive a single-bit data stream operating at a data rate of about 972 kHz. In an example, the band-pass filter 320 can operate at a lower data rate than the sin c5 filter 319. In certain examples, the band-pass filter 320 can operate at a data rate that is about an eighth of the data rate of the sin c5 filter 319. In some examples, the band-pass filter 320 can have a bandwidth of about 500 Hz. In certain examples, the input section 316 can include a digital amplitude detector 321 to detect a representation of the oscillation amplitude of the output signal of the band-pass filter 320. In some examples, the digital amplitude detector 321 can include an absolute value (|x|) amplitude detector. In an example, the digital amplitude detector 321 can include an x2 digital amplitude detector that can be immune to non-idealities in sampling instant time (e.g. timing jitter) and, thus, reduce phase noise.
In certain examples, the control section 318 can receive a target amplitude set point (target), and can include a summing junction 322, an averaging filter 323, gain multiplier 324, and startup control logic 325. In certain examples, the control section 318 can include a set point multiplier 326 to scale the target amplitude set point (target) for summing with the output of the digital amplitude detector 321 of the input section 316. In certain examples, the summing junction 322 can provide an error signal, such as an amplitude error signal or an oscillation amplitude error signal, indicative of a difference between the output of the digital amplitude detector 321 and the target amplitude set point (target). In certain examples, the averaging filter 323 can be used to filter high frequency noise from the error signal. In some examples, the averaging filter 323 can include a finite impulse response (FIR) filter that can filter, or average, or smooth, the error signal over a given number of samples or sample periods. In certain examples, the averaging filter 323 can include a bit shift module 327 to scale the output of the averaging filter 323. In certain examples, the error signal can be multiplied, or amplified, by a gain (dig. gain) to provide a command signal for the proof mass drive circuit 307. In some examples, the control section 318 can include an integral error gain module (not shown). In some example, the control section 318 does not include an integral error gain module to allow a simpler implementation. In certain examples that do not include an integral gain module, low frequency doublets that can take hundreds of ms to seconds to settle to its final value can be avoided.
In some examples, startup control logic 325 can be used to drive the proof mass during start-up, for example, when the error signal can be quite large. In certain examples, the startup control logic 325 can include a comparator 328 to compare the command signal to a AGC enable threshold (ST). In an example, when the command signal exceeds the AGC threshold (ST), the comparator 328 provides a control signal (start_en) to have the drive circuit 307 drive the proof mass using a predetermined drive signal, such as a predetermined drive signal waveform. In an example, the control signal (start_en) of the start-up control logic 325 can be received by the drive circuit 307 such that the drive circuit 307 drives the proof mass using the predetermined drive signal. In certain examples, the predetermined drive signal can include a square wave waveform at a predetermined frequency. In certain examples, the phase shift circuit 306 can provide one or more template waveforms to the drive circuit 307, such as a sinusoidal waveform for AGC enabled amplitude control and the square waveform for start-up mode control. When the command signal shrinks such that it does not exceed the AGC enable threshold (ST), the control signal (start_en) of the start-up control logic 325 can transition to a second state. In certain examples, the drive circuit can drive the proof mass responsive to the command signal when the control signal (start_en) is in the second state. In certain examples, the drive circuit 307 can drive the proof mass using a sinusoidal waveform when the start signal (start_en) is in the second state. In some examples, absence of an integral error gain component to the command signal can avoid bang-bang oscillatory behavior that can appear when the system is slewing, and can allow smooth transition between start-up mode type drive control and AGC amplitude drive control mode that is responsive to the command signal.
In certain examples, the output section 317 can split the command signal into a coarse gain output signal (coarse gain) using a coarse gain stage and a fine gain output signal using a fine gain stage. The fine gain stage can include a digital limiter 329, one or more digital up-samplers 330, 331, and a drive digital to analog converter (DAC), such as a sigma-delta (ΣΔ) (DAC) 313 to provide a basic unit change of the command signal. In certain examples, the coarse gain stage can include a low pass filter 332 to receive the limited command signal and a gain control counter 333 that can increment and decrement when the truncated, filtered, command signal overshoots or under shoots the fine gain registers, respectively. In certain examples, the coarse gain stage can include a feedback or correction loop 334 that can increment/decrement the non-limited command signal by a predetermined value after a change in the coarse gain output, such that the truncated command signal is not left at a maximum or minimum transition edge after a coarse gain change. In certain examples, the coarse gain output (coarse gain) can be updated at a slower rate than the fine gain output. In certain examples, a drive circuit 307 can receive the coarse gain output (coarse gain) and the fine gain output and can adjust a drive signal coupled to the proof mass in response to the received coarse and fine gain output signals.
In various examples, the digital AGC circuit 301 can be implemented on a single integrated circuit. In some examples, the digital AGC circuit 301 can be implemented on a single integrated circuit and can include one or more of the ΔΣ ADC and the ΣΔ DAC. In an example, the digital AGC circuit 301 can reduce noise in the output gain signals by executing a significant portion of the input stage, output stage and control stage in a digital environment.
ADDITIONAL NOTES
In Example 1, an apparatus can include a driver configured to oscillate a proof mass of a MEMS gyroscope, a charge-to-voltage (C2V) converter configured to receive a sense signal from a MEMS gyroscope and to provide oscillation information of the proof mass, an analog-to-digital converter (ADC) configured to receive the oscillation information of the proof mass and to provide a digital representation of the oscillation information, and a digital, automatic gain control circuit configured to receive the digital representation of the oscillation information, to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information.
In Example 2, the ADC of Example 1 optionally is configured to provide the digital representation of the sense signal using a single-bit data stream.
In Example 3, the digital, automatic gain control circuit of any one or more of Examples 1-2 optionally includes a down-sample module to receive the single-bit data stream and provide a second digital representation of the sense signal using a first multi-bit data stream.
In Example 4, the digital, automatic gain control circuit of any one or more of Examples 1-3 optionally includes a band pass filter configured to receive the first multi-bit data stream and provide a third digital representation of the sense signal using a second multi-bit data stream.
In Example 5, the digital, automatic gain control circuit of any one or more of Examples 1-4 optionally includes an amplitude detector configured to perform a square operation of the third digital representation of the sense signal to provide amplitude information of the sense signal.
In Example 6, the digital, automatic gain control circuit of any one or more of Examples 1-5 optionally includes a digital comparator configured to receive amplitude information and the target information and to provide the oscillation amplitude error information.
In Example 7, the digital, automatic gain control circuit of any one or more of Examples 1-6 optionally includes a finite impulse response filter configured to average the oscillation amplitude error information over a plurality of sample periods to provide a smoothed error signal.
In Example 8, the ADC of any one or more of Examples 1-7 optionally includes a band-pass, delta-sigma ADC.
In Example 9, the apparatus of any one or more of Examples 1-8 optionally includes a digital-to-analog converter configured to receive at least a portion of the digital drive command signal and to provide an analog command signal to the driver.
In Example 10, the digital, automatic gain control circuit of any one or more of Examples 1-9 optionally includes an output stage, the output stage including a fine gain register configured to provide a basic unit of change of the digital drive command signal, a low pass filter, and a coarse gain counter configured to increment on overshoot of the fine gain register, to decrement on undershoot of the fine gain register, and to provide a correction to the amplified representation of the oscillation amplitude error information.
In Example 11, a method can include oscillating a proof mass of a MEMS gyroscope using a driver, receiving oscillation information of the proof mass using a charge-to-voltage converter, providing a digital representation of the oscillation information using an analog to digital converter, providing oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and a digital automatic gain control circuit, and providing a digital drive command signal using the oscillation amplitude error information and the digital automatic gain control circuit.
In Example 12, the providing a digital representation of any one or more of Examples 1-11 optionally includes providing a digital representation of the oscillation information using a using a single-bit data stream.
In Example 13, the method of any one or more of Examples 1-12 optionally includes down-sampling the single-bit data stream to provide a second digital representation of the oscillation information using a multi-bit data stream.
In Example 14, the method of any one or more of Examples 1-13 optionally includes processing the first multi-bit data stream using a band-pass filter to provide a third digital representation of the oscillation information.
In Example 15, the method of any one or more of Examples 1-14 optionally includes receiving the third digital representation of the oscillation information at a amplitude detector of the digital automatic gain control circuit, and providing amplitude information of the oscillation information using the amplitude detector.
In Example 16, the method of any one or more of Examples 1-15 optionally includes comparing the amplitude information to the target information to provide the oscillation amplitude error information using a digital comparator of the digital automatic gain control circuit.
In Example 17, the method of any one or more of Examples 1-16 optionally includes averaging the oscillation amplitude error information over a predetermined number of samples using a finite impulse response filter to provide a smoothed error signal.
In Example 18, the method of any one or more of Examples 1-17 optionally includes converting the digital, drive command signal to an analog, drive command signal using an digital-to-analog converter, and receiving the analog command signal at the driver.
In Example 19, the method of any one or more of Examples 1-18 optionally includes receiving the amplified representation of the oscillation amplitude error information at an output stage of the digital automatic gain control circuit; processing the amplified representation of the oscillation amplitude error information using a digital limiter and one or more digital up-samplers to provide a fine portion of the digital drive command signal, and processing the amplified representation of the oscillation amplitude error information using a low pass filter and a gain control counter to provide a coarse portion of the digital drive command signal.
In Example 20, the processing the amplified representation of the oscillation amplitude error information using a low pass filter and a gain control counter of any one or more of Examples 1-18 optionally includes incrementing the gain control counter when the low pass filter overshoots; and decrementing the gain control counter when the low pass filter undershoots.
In Example 21, the processing the amplified representation of the oscillation amplitude error information using a low pass filter and a gain control counter of any one or more of Examples 1-20 optionally includes feeding back a correction to the amplified representation of the oscillation amplitude error information when a value of the gain control counter changes.
Example 22 can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1 through 21 to include, subject matter that can include means for performing any one or more of the functions of Examples 1 through 21, or a machine-readable medium including instructions that, when performed by a machine, cause the machine to perform any one or more of the functions of Examples 1 through 21.
The above detailed description includes references to the accompanying drawings, which form a part of the detailed description. The drawings show, by way of illustration, specific embodiments in which the invention can be practiced. These embodiments are also referred to herein as “examples.” Such examples can include elements in addition to those shown or described. However, the present inventors also contemplate examples in which only those elements shown or described are provided. Moreover, the present inventors also contemplate examples using any combination or permutation of those elements shown or described (or one or more aspects thereof), either with respect to a particular example (or one or more aspects thereof), or with respect to other examples (or one or more aspects thereof) shown or described herein.
All publications, patents, and patent documents referred to in this document are incorporated by reference herein in their entirety, as though individually incorporated by reference. In the event of inconsistent usages between this document and those documents so incorporated by reference, the usage in the incorporated reference(s) should be considered supplementary to that of this document; for irreconcilable inconsistencies, the usage in this document controls.
In this document, the terms “a” or “an” are used, as is common in patent documents, to include one or more than one, independent of any other instances or usages of “at least one” or “one or more.” In this document, the term “or” is used to refer to a nonexclusive or, such that “A or B” includes “A but not B,” “B but not A,” and “A and B,” unless otherwise indicated. In this document, the terms “including” and “in which” are used as the plain-English equivalents of the respective terms “comprising” and “wherein.” Also, in the following claims, the terms “including” and “comprising” are open-ended, that is, a system, device, article, or process that includes elements in addition to those listed after such a term in a claim are still deemed to fall within the scope of that claim. Moreover, in the following claims, the terms “first,” “second,” and “third,” etc. are used merely as labels, and are not intended to impose numerical requirements on their objects.
Method examples described herein can be machine or computer-implemented at least in part. Some examples can include a computer-readable medium or machine-readable medium encoded with instructions operable to configure an electronic device to perform methods as described in the above examples. An implementation of such methods can include code, such as microcode, assembly language code, a higher-level language code, or the like. Such code can include computer readable instructions for performing various methods. The code may form portions of computer program products. Further, in an example, the code can be tangibly stored on one or more volatile, non-transitory, or non-volatile tangible computer-readable media, such as during execution or at other times. Examples of these tangible computer-readable media can include, but are not limited to, hard disks, removable magnetic disks, removable optical disks (e.g., compact disks and digital video disks), magnetic cassettes, memory cards or sticks, random access memories (RAMs), read only memories (ROMs), and the like.
The above description is intended to be illustrative, and not restrictive. For example, the above-described examples (or one or more aspects thereof) may be used in combination with each other. Other embodiments can be used, such as by one of ordinary skill in the art upon reviewing the above description. The Abstract is provided to comply with 37 C.F.R. §1.72(b), to allow the reader to quickly ascertain the nature of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. Also, in the above Detailed Description, various features may be grouped together to streamline the disclosure. This should not be interpreted as intending that an unclaimed disclosed feature is essential to any claim. Rather, inventive subject matter may lie in less than all features of a particular disclosed embodiment. Thus, the following claims are hereby incorporated into the Detailed Description, with each claim standing on its own as a separate embodiment, and it is contemplated that such embodiments can be combined with each other in various combinations or permutations. The scope of the invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.

## Claims

1. An apparatus comprising:
a driver configured to oscillate a proof mass of a MEMS gyroscope;
a charge-to-voltage (C2V) converter configured to receive a sense signal from a MEMS gyroscope and to provide oscillation information of the proof mass;
an analog-to-digital converter (ADC) configured to receive the oscillation information of the proof mass and to provide a digital representation of the oscillation information; and
a digital, automatic gain control circuit configured to receive the digital representation of the oscillation information, to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information, the digital, automatic gain control circuit includes an output stage, the output stage including:
a fine gain register configured to provide a basic unit of change of the digital drive command signal;
a low pass filter; and
a coarse gain counter configured to increment on overshoot of the fine gain register, to decrement on undershoot of the fine gain register, and to provide a correction to the amplified representation of the oscillation amplitude error information.

2. The apparatus of claim 1, wherein the ADC is configured to provide the digital representation of the sense signal using a single-bit data stream.

3. The apparatus of claim 2, wherein the digital, automatic gain control circuit includes a down-sample module to receive the single-bit data stream and provide a second digital representation of the sense signal using a first multi-bit data stream.

4. The apparatus of claim 3, wherein the digital, automatic gain control circuit includes a band pass filter configured to receive the first multi-bit data stream and provide a third digital representation of the sense signal using a second multi-bit data stream.

5. The apparatus of claim 4, wherein the digital, automatic gain control circuit includes an amplitude detector configured to perform a square operation of the third digital representation of the sense signal to provide amplitude information of the sense signal.

6. The apparatus of claim 4, wherein the digital, automatic gain control circuit includes a digital comparator configured to receive amplitude information and the target information and to provide the oscillation amplitude error information.

7. The apparatus of claim 6, wherein the digital, automatic gain control circuit includes a finite impulse response filter configured to average the oscillation amplitude error information over a plurality of sample periods to provide a smoothed error signal.

8. The apparatus of claim 1, wherein the ADC includes a band-pass, delta-sigma ADC.

9. The apparatus of claim 1, including a digital-to-analog converter configured to receive at least a portion of the digital drive command signal and to provide an analog command signal to the driver.

10. A method comprising:
oscillating a proof mass of a MEMS gyroscope using a driver;
receiving oscillation information of the proof mass using a charge-to-voltage converter;
providing a digital representation of the oscillation information using an analog to digital converter;
providing oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and a digital automatic gain control circuit;
providing a digital drive command signal using the oscillation amplitude error information and the digital automatic gain control circuit;
receiving an amplified representation of the oscillation amplitude error information at an output stage of the digital automatic gain control circuit;
processing the amplified representation of the oscillation amplitude error information using a digital limiter and one or more digital up-samplers to provide a fine portion of the digital drive command signal; and
processing the amplified representation of the oscillation amplitude error information using a low pass filter and a gain control counter to provide a coarse portion of the digital drive command signal.

11. The method of claim 10, wherein providing a digital representation includes providing a digital representation of the oscillation information using a using a single-bit data stream.

12. The method of claim 11, including down-sampling the single-bit data stream to provide a second digital representation of the oscillation information using a multi-bit data stream.

13. The method of claim 12, including processing the first multi-bit data stream using a band-pass filter to provide a third digital representation of the oscillation information.

14. The method of claim 13, including:
receiving the third digital representation of the oscillation information at a amplitude detector of the digital automatic gain control circuit; and
providing amplitude information of the oscillation information using the amplitude detector.

15. The method of claim 14, including comparing the amplitude information to the target information to provide the oscillation amplitude error information using a digital comparator of the digital automatic gain control circuit.

16. The method of claim 15, including averaging the oscillation amplitude error information over a predetermined number of samples using a finite impulse response filter to provide a smoothed error signal.

17. The method of claim 10, including converting the digital, drive command signal to an analog, drive command signal using an digital-to-analog converter; and
receiving the analog command signal at the driver.

18. The method of claim 10, wherein processing the amplified representation of the oscillation amplitude error information using a low pass filter and a gain control counter includes incrementing the gain control counter when the low pass filter overshoots; and
decrementing the gain control counter when the low pass filter undershoots.

19. The method of claim 10, wherein processing the amplified representation of the oscillation amplitude error information using a low pass filter and a gain control counter includes feeding back a correction to the amplified representation of the oscillation amplitude error information when a value of the gain control counter changes.