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                                                                    Exhibit 10.9

                      1995 EMPLOYEE STOCK PURCHASE PLAN OF
                               SPEEDFAM-IPEC, INC.
                        AS AMENDED AS OF JANUARY 1, 2002

         Section 1. Purpose. The purpose of the Plan is to provide employees of
the Company and its Designated Subsidiaries with an opportunity to purchase
Common Stock of the Company. It is the intention of the Company to have the Plan
qualify as an "Employee Stock Purchase Plan" under Section 423 of the Internal
Revenue Code of 1986, as amended. The provisions of the Plan shall, accordingly,
be construed so as to extend and limit participation in a manner consistent with
the requirements of that section of the Code.

         Section 2. Definitions.

         (a)      "Board" shall mean the Board of Directors of the Company.

         (b)      "Code" shall mean the Internal Revenue Code of 1986, as
amended.

         (c)      "Common Stock" shall mean the Common Stock, no par value, of
the Company.

         (d)      "Company" shall mean SpeedFam-IPEC, Inc., an Illinois
corporation.

         (e)      "Compensation" shall mean gross earnings, including payments
for overtime, incentive payments, bonuses and commissions.

         (f)      "Continuous Status as an Employee" shall mean the absence of
any interruption or termination of service as an Employee. Continuous Status as
an Employee shall not be considered interrupted in the case of a leave of
absence agreed to in writing by the Company, provided that such leave is for a
period of not more than ninety (90) days or reemployment upon the expiration of
such leave is guaranteed by contract or statute.

         (g)      "Designated Subsidiaries" shall mean the Subsidiaries which
have been designated by the Board from time to time in its sole discretion as
eligible to participate in the Plan.

         (h)      "Employee" shall mean any person, including an officer, who is
customarily employed for at least twenty (20) hours per week and more than five
(5) months in a calendar year by the Company or one of its Designated
Subsidiaries.

         (i)      "Exercise Date" shall mean the last day of each offering
period of the Plan.

         (j)      "Offering Date" shall mean the first day of each offering
period of the Plan.

         (k)      "Plan" shall mean this 1995 Employee Stock Purchase Plan of
SpeedFam-IPEC, Inc.

         (l)      "Subsidiary" shall mean a corporation, domestic or foreign, of
which not less than fifty percent (50%) of the voting shares are held by the
Company or a Subsidiary, whether or not
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such corporation now exists or is hereafter organized or acquired by the Company
or a Subsidiary.

         Section 3. Eligibility. (a) Any person who is an Employee as of the
Offering Date of the first offering period shall be eligible to participate in
such offering period under the Plan; thereafter, any person who is an Employee
fifteen (15) days prior to the Offering Date of a given offering period shall be
eligible to participate in such offering period under the Plan. The eligibility
criteria set forth in this paragraph 3(a) is subject to the requirements of the
paragraph 5 and the limitations imposed by Section 423(b) of the Code.

         (a)      Any provisions of the Plan to the contrary notwithstanding, no
Employee shall be granted an option under the Plan (i) if, immediately after the
grant, such Employee (or any other person whose stock would be attributed to
such Employee pursuant to Section 424(d) of the Code) would own stock and/or
hold outstanding options to purchase stock possessing five percent (5%) or more
of the total combined voting power or value of all classes of stock of the
Company or of any subsidiary of the Company, or (ii) which permits his rights to
purchase stock under all employee stock purchase plans (described in Section 423
of the Code) of the Company and its subsidiaries to accrue at a rate which
exceeds Twenty Five Thousand Dollars ($25,000) of fair market value of such
stock (determined at the time such option is granted) for each calendar year in
which such option is outstanding at any time.

         Section 4. Offering Periods. The Plan shall be implemented by one
offering during each six month period of the Plan. The first offering period
shall commence on the effective date of the Company's initial public offering
pursuant to a Registration Statement filed with the Securities and Exchange
Commission and shall terminate on December 31, 1995. Subsequent offering periods
shall continue until the Plan is terminated in accordance with paragraph 19
hereof. The Board of Directors of the Company shall have the power to change the
duration of offering periods with respect to future offerings without
shareholder approval if such change is announced at least fifteen (15) days
prior to the scheduled beginning of the first offering period to be affected.

         Section 5. Participation. An eligible Employee may become a participant
in the Plan by completing a subscription agreement on the form provided by the
Company and filing it with the Company fifteen (15) days prior to the applicable
Offering Date, unless a later time for filing the subscription agreement is set
by the Board for all eligible Employees with respect to a given offering.

         Section 6. Grant of Option. (a) On the Offering Date of each offering
period, each eligible Employee participating in the Plan shall be granted an
option to purchase (at the per share option price) up to a number of shares of
the Company's Common Stock determined by dividing the subscription amount to be
designated on the Employee's subscription agreement (not to exceed an amount
equal to fifteen percent (15%) of his Compensation earned during the applicable
offering period, determined as of the date of the commencement of such offering)
by eighty-five percent (85%) of the fair market value of a share of the
Company's Common Stock on the Offering Date, subject to the limitations set
forth in Sections 3(b) and 10 hereof. Fair market value of a share of the
Company's Common Stock shall be determined as provided in Section 6(b) herein.


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         (b) The option price per share of the shares offered in a given
offering period shall be the lower of: (i) eighty five percent (85%) of the fair
market value of a share of the Common Stock of the Company on the Offering Date;
or (ii) eighty five percent (85%) of the fair market value of a share of the
Common Stock of the Company on the Exercise Date. The fair market value of the
Company's Common Stock on a given date shall be determined by the Board in its
discretion; provided, however, that where there is a public market for the
Common Stock, the fair market value per Share shall be the mean of the bid and
asked prices of the Common Stock for such date, as reported in the Wall Street
Journal (or, if not so reported, as otherwise reported by the National
Association of Securities Dealers Automated Quotation (NASDAQ) System) or, in
the event the Common Stock is listed on a stock exchange, the fair market value
per Share shall be the closing price on such exchange on such date, as reported
in the Wall Street Journal.

         Section 7. Exercise of Option. Unless a participant withdraws from the
Plan as provided in paragraph 9, his option for the purchase of shares will be
exercised automatically on the Exercise Date of the offering period, and the
maximum number of full shares subject to option will be purchased for him at the
applicable option price. The shares purchased upon exercise of an option
hereunder shall be deemed to be transferred to the participant on the Exercise
Date. During his lifetime, a participant's option to purchase shares hereunder
is exercisable only by him.

         Section 8. Delivery. Within 30 days after the Exercise Date of each
offering period, the Company shall arrange the delivery to each participant, as
appropriate, of a certificate representing the shares purchased upon exercise of
his option in exchange for payment in full by the Employee, on or before such
date as shall be determined by the Board or it committee, of the option price
for all shares so purchased.

         Section 9. Withdrawal; Termination of Employment. (a) A participant may
withdraw from participation in the Plan by giving written notice to the Company
within fifteen (15) days prior to the Exercise Date, whereupon his option for
the current period will be automatically terminated.

         (b)      Upon termination of the participant's Continuous Status as an
Employee prior to the Exercise Date of the offering period for any reason,
including retirement or death, his option will be automatically terminated.

         (c)      In the event an Employee fails to remain in Continuous Status
as an Employee of the Company for at least twenty (20) hours per week during the
offering period in which the employee is a participant, he will be deemed to
have elected to withdraw from the Plan and his option terminated.

         (d)      A participant's withdrawal from an offering will not have any
effect upon his eligibility to participate in a succeeding offering or in any
similar plan which may hereafter be adopted by the Company.

         Section 10. Stock. (a) The maximum number of shares of the Company's
Common Stock which shall be made available for sale under the Plan shall be (a)
1,300,000 shares plus (b) an annual increase to be added on June 1 of each year
(beginning June 1, 2001) equal to the


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lesser of (i) 1,000,000 shares, (ii) 1% of the outstanding shares of the
Company, or (iii) a number of shares determined by the Board of Directors of the
Company, subject to adjustment upon changes in capitalization of the Company as
provided in paragraph 14. If the total number of shares which would otherwise be
subject to options granted pursuant to Section 6 hereof on the Offering Date of
an offering period exceeds the number of shares then available under the Plan
(after deduction of all shares for which options have been exercised or are then
outstanding), the Company shall make a pro rata allocation of the shares
remaining available for option grant in as uniform a manner as shall be
practicable and as it shall determine to be equitable. In such event, the
Company shall give written notice of such reduction of the number of shares
subject to the option to each Employee affected thereby.

         (b)      The participant will have no interest or voting right in
shares covered by his option until such option has been exercised.

         (c)      Shares to be delivered to a participant under the Plan will be
registered in the name of the participant or in the name of the participant and
his spouse.

         Section 11. Administration. The Plan shall be administered by the Board
of the Company or a committee of members of the Board appointed by the Board.
The administration, interpretation or application of the Plan by the Board or
its committee shall be final, conclusive and binding upon all participants.
Members of the Board who are eligible Employees are permitted to participate in
the Plan, provided that:

                  (a)      Members of the Board who are eligible to participate
         in the Plan may not vote on any matter affecting the administration of
         the Plan or the grant of any option pursuant to the Plan.

                  (b)      If a Committee is established to administer the Plan,
         no member of the Board who is eligible to participate in the Plan may
         be a member of the Committee.

         Section 12. Transferability. No rights with regard to the exercise of
an option or to receive shares under the Plan may be assigned, transferred,
pledged or otherwise disposed of in any way (other than by will or the laws of
descent and distribution) by the participant. Any such attempt at assignment,
transfer, pledge or other disposition shall be without effect, except that the
Company may treat such act as an election to withdraw from the Plan in
accordance with paragraph 9.

         Section 13. Reports. Individual accounts will be maintained for each
participant in the Plan. Statements of account will be given to participating
Employees promptly following the Exercise Date, which statements will set forth
the per share purchase price, the number of shares purchased and the amount due
the Company in payment of the option shares pursuant to paragraph 8.

         Section 14. Adjustments upon Changes in Capitalization. Subject to any
required action by the shareholders of the Company, the number of shares of
Common Stock covered by each option under the Plan which has not yet been
exercised and the number of shares of Common Stock which have been authorized
for issuance under the Plan but have not yet been placed under option
(collectively, the "Reserves"), as well as the price per share of Common


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Stock covered by each option under the Plan which has not yet been exercised,
shall be proportionately adjusted for any increase or decrease in the number of
issued shares of Common Stock resulting from a stock split, reverse stock split,
stock dividend, combination or reclassification of the Common Stock, or any
other increase or decrease in the number of shares of Common Stock effected
without receipt of consideration by the Company; provided, however, that
conversion of any convertible securities of the Company shall not be deemed to
have been "effected without receipt of consideration." Such adjustment shall be
made by the Board, whose determination in that respect shall be final, binding
and conclusive. Except as expressly provided herein, no issue by the Company of
shares of stock of any class, or securities convertible into shares of stock of
any class, shall affect, and no adjustment by reason thereof shall be made with
respect to, the number or price of shares of Common Stock subject to an option.

         In the event of the proposed dissolution or liquidation of the Company,
the offering period will terminate immediately prior to the consummation of such
proposed action, unless otherwise provided by the Board. In the event of a
proposed sale of all or substantially all of the assets of the Company, or the
merger of the Company with or into another corporation, each option under the
Plan shall be assumed or an equivalent option shall be substituted by such
successor corporation or a parent or subsidiary of such successor corporation,
unless the Board determines, in the exercise of its sole discretion and in lieu
of such assumption or substitution, that the participant shall have the right to
exercise the option as to all of the optioned stock, including shares as to
which the option would not otherwise be exercisable. If the Board makes an
option fully exercisable in lieu of assumption or substitution in the event of a
merger or sale of assets, the Board shall notify the participant that the option
shall be fully exercisable for a period of fifteen (15) days from the date of
such notice, and the option will terminate upon the expiration of such period.

         The Board may, if it so determines in the exercise of its sole
discretion, also make provision for adjusting the Reserves, as well as the price
per share of Common Stock covered by each outstanding option, in the event that
the Company effects one or more reorganizations, recapitalizations, rights
offerings or other increases or reductions of shares of its outstanding Common
Stock, and in the event of the Company being consolidated with or merged into
any other corporation.

         Section 15. Amendment or Termination. The Board of Directors of the
Company may at any time terminate or amend the Plan. Except as provided in
paragraph 14, no such termination can affect options previously granted, nor may
an amendment make any change in any option theretofore granted which adversely
affects the rights of any participant, nor may an amendment be made without
prior approval of the shareholders of the Company (obtained in the manner
described in paragraph 17) if such amendment would increase the number of shares
that may be issued under the Plan.

         Section 16. Notices. All notices or other communications by a
participant to the Company under or in connection with the Plan shall be deemed
to have been duly given when received in the form specified by the Company at
the location, or by the person, designated by the Company for the receipt
thereof.


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         Section 17. Shareholder Approval. (a) Any required approval of the
shareholders of the Company shall be solicited substantially in accordance with
Section 14(a) of the Exchange Act and the rules and regulations promulgated
thereunder.

         (b)      If any required approval by the shareholders of the Plan
itself or of any amendment to increase the number of shares reserved for
issuance under the Plan is solicited at any time other than in the manner
described in paragraph 17(a) hereof, then the Company shall, at or prior to the
first annual meeting of shareholders held subsequent to the granting of an
option hereunder to an officer or director do the following:

                  (i)      furnish in writing to the holders entitled to vote
         for the Plan substantially the same information which would be required
         (if proxies to be voted with respect to approval or disapproval of the
         Plan or amendment were then being solicited) by the rules and
         regulations in effect under Section 14(a) of the Exchange Act at the
         time such information is furnished; and

                  (ii)     file with, or mail for filing to, the Securities and
         Exchange Commission four copies of the written information referred to
         in subsection (ii) hereof not later than the date on which such
         information is first sent or given to shareholders.

         Section 18. Conditions upon Issuance of Shares. Shares shall not be
issued with respect to an option unless the exercise of such option and the
issuance and delivery of such shares pursuant thereto shall comply with all
applicable provisions of law, domestic or foreign, including without limitation,
the Securities Act of 1933, as amended, the Securities Exchange Act of 1934, as
amended, the rules and regulations promulgated thereunder, and the requirements
of any stock exchange upon which the shares may then be listed, and shall be
further subject to the approval of counsel for the Company with respect to such
compliance.

         As a condition to the exercise of an option, the Company may require
the person exercising such option to represent and warrant at the time of any
such exercise that the shares are being purchased only for investment and
without any present intention to sell or distribute such shares if, in the
opinion of counsel for the Company, such a representation is required by any of
the aforementioned applicable provisions of law.

         Section 19. Term of Plan. The Plan shall become effective upon the last
to occur of (1) its adoption by the Board of Directors and approval by the
shareholders of the Company and (2) the effective date of the Company's initial
public offering pursuant to a Registration Statement filed with the Securities
and Exchange Commission. It shall continue in effect for a term of twenty (20)
years unless sooner terminated under paragraph 15.

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