# Patent

## Title
Magnetic recording medium, magnetic recording and reproducing apparatus, and method for manufacturing magnetic recording medium

## Abstract

The magnetic recording medium includes a substrate and a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer. Surface steps are formed in an outer area including a radially outermost portion of a recording area. Each surface step is formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element. The surface steps are formed such that the recording area can be sectioned into an annular area adjoining the outer area and the outer area where height of the surface steps is larger than that in the annular area.

## Background
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a magnetic recording medium in which a recording layer is formed in a predetermined concavo-convex pattern and recording elements are each formed as a convex portion of the concavo-convex pattern. The present invention also relates to a magnetic recording and reproducing apparatus provided with such a magnetic recording medium and a method for manufacturing the magnetic recording medium.
2. Description of the Related Art
A significant improvement in the areal density of conventional magnetic recording media such as hard disks has been achieved by, for example, reducing the size of magnetic particles constituting a recording layer, changing materials, and improving the precision of head processing. A further improvement in the areal density is expected in the future. However, problems due to limitations with respect to head processing technology and the broadening of the magnetic field from a magnetic head have become apparent, resulting in issues such as incorrect recording of information on a track adjoining a target recording track and crosstalk during reproduction. The improvement of the areal density by conventional improvement techniques has therefore reached its limit.
Hence, discrete track media and patterned media have been proposed as candidates for magnetic recording media in which a further improvement in the areal density can be achieved (see, for example, Japanese Patent Application Laid-Open No. H09-97419). In the discrete track media and patterned media, a recording layer in a data area is formed in a concavo-convex pattern, and recording elements are each formed as a convex portion of the concavo-convex pattern.
In order to obtain excellent recording-reproducing characteristics, it is considered that, preferably, the flying height of a magnetic head is kept constant so that the magnetic gap between the magnetic head and the upper surface of each recording element is held constant. Hence, it has been proposed to flatten the surface of a magnetic recording medium by filling concave portions between recording elements with a filling material such as a non-magnetic material.
However, in a disk-shaped magnetic recording medium such as a hard disk, the circumferential speed of the medium relative to a magnetic head is lower on the radially inner side and is higher on the radially outer side. When the outer diameter of a magnetic recording medium is relatively large or when the rotation speed thereof is relatively high, the relative speed between the magnetic recording medium and a magnetic head can be extremely large in the radially outer area of the magnetic recording medium. Hence, even when the surface of the magnetic recording medium is flat, the flying height of the magnetic head can be larger in the radially outer area of the magnetic recording medium than in other areas. Therefore, the recording-reproducing characteristics may deteriorate.
In addition, a technique is known in which a magnetic head is urged toward a magnetic recording medium by the utilization of negative pressure. However, when the relative speed between a magnetic recording medium and a magnetic head is extremely high, an increase in the flying height of the magnetic head may not be suppressed sufficiently in the radially outer area of the magnetic recording medium even when the technique for urging the magnetic head toward the magnetic recording medium utilizing negative pressure is used.
SUMMARY OF THE INVENTION
In view of the foregoing problems, various exemplary embodiments of this invention provide a high areal density and high reliability magnetic recording medium in which recording elements are each formed as a convex portion of a concavo-convex pattern and in which an increase in the flying height of a magnetic head can be suppressed sufficiently in the radially outer area. Various exemplary embodiments of this invention also provide a magnetic recording-reproducing apparatus provided with such a magnetic recording medium and a method for manufacturing the magnetic recording medium.
In various exemplary embodiments of the present invention, the above object is achieved by a magnetic recording medium comprising a substrate and a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer, wherein surface steps are formed in an annular outer area including a radially outermost portion of a recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and wherein the surface steps are formed such that the recording area can be sectioned into an annular area adjoining the outer area and the outer area where height of the surface steps therein is larger than that in the annular area.
Moreover, the above object is achieved by a magnetic recording medium comprising a substrate and a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer, wherein surface steps are formed in an annular outer area including a radially outermost portion of a recording area and in an inner area including a radially innermost portion of the recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and wherein the surface steps are formed such that the recording area can be sectioned into: an annular intermediate area disposed between the outer area and the inner area so as to be adjoining the outer area; the outer area where height of the surface steps therein is larger than that in the intermediate area; and the inner area where height of the surface steps therein is larger than that in the intermediate area.
Furthermore, the above object is achieved by a magnetic recording medium comprising a substrate and a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer, wherein surface step are formed in a recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and wherein the surface steps are formed such that an area including at least a radially outermost portion of the recording area is provided where height of the surface steps increases in a radially outward direction.
The flying height of a magnetic head tends to decrease as the height of surface steps on a magnetic recording medium increases. Therefore, the height of the surface steps in the outer area of a magnetic recording medium is made larger than that in an area adjoining the outer area. In this manner, the effect where the flying height of the magnetic head is increased in the outer area of a magnetic recording medium because of a high relative speed with the magnetic head is cancelled out by the effect where the flying height of a magnetic recording head is decreased because of a high surface step height. Accordingly, any increase in the flying height of the magnetic head can be suppressed in the radially outer area.
As described above, in the present invention, the height of the surface steps in the outer area is made larger than that in the area adjoining the outer area, whereby the flying height of a magnetic head is kept constant. Therefore, the present invention has been developed based on a concept that is totally different from that of a conventional technology in which an attempt is always made to flatten the surface of magnetic recording media for keeping the flying height of a magnetic head constant.
Accordingly, various exemplary embodiments of this invention provide a magnetic recording medium comprising: a substrate; and a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer, wherein surface steps are formed in an annular outer area including a radially outermost portion of a recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and wherein the surface steps are formed such that the recording area can be sectioned into an annular area adjoining the outer area and the outer area where height of the surface steps therein is larger than that in the annular area.
Moreover, various exemplary embodiments of this invention provide a magnetic recording medium comprising: a substrate; and a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer, wherein surface steps are formed in an annular outer area including a radially outermost portion of a recording area and in an inner area including a radially innermost portion of the recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and wherein the surface steps are formed such that the recording area can be sectioned into: an annular intermediate area disposed between the outer area and the inner area so as to be adjoining the outer area; the outer area where height of the surface steps therein is larger than that in the intermediate area; and the inner area where height of the surface steps therein is larger than that in the intermediate area.
Furthermore, various exemplary embodiments of this invention provide a magnetic recording medium comprising: a substrate; and a recording layer formed in a predetermined concavo-convex pattern on the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer, wherein surface step are formed in a recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and wherein the surface steps are formed such that an area including at least a radially outermost portion of the recording area is provided where height of the surface steps increases in a radially outward direction.
Various exemplary embodiments of this invention provide a method for manufacturing a magnetic recording medium, comprising at least one of the following steps: a recording layer processing step of forming recording elements as convex portions by irradiating a disk-shaped workpiece with a processing gas by means of one of an ion beam etching in which a divergence state of an ion beam can be controlled and reactive ion etching in which a bias voltage to be applied to the workpiece can be controlled, the workpiece including a continuous recording layer and a mask layer formed in a concavo-convex pattern corresponding to a predetermined concavo-convex pattern over the recording layer, the workpiece being irradiated with the processing gas such that an etching rate is larger in an annular outer area including a radially outermost portion of a recording area than in an annular area adjoining the outer area, whereby the recording layer is processed into the predetermined concavo-convex pattern; a filling material deposition step of depositing a filling material over a workpiece by means of bias sputtering in which a bias voltage to be applied to the workpiece can be controlled, the workpiece including a recording elements formed as convex portions of the recording layer formed in a predetermined concavo-convex pattern over a substrate, the filling material being deposited such that a deposition rate is lower in an annular outer area including a radially outermost portion of a recording area than in an annular area adjoining the outer area; and a flattening step of removing an excess portion of a filling material above the recording elements by irradiating a workpiece with a processing gas by means of one of ion beam etching in which a divergence state of an ion beam can be controlled and reactive ion etching in which a bias voltage to be applied to the workpiece can be controlled, the workpiece including the recording elements which are formed as convex portions of a recording layer formed in a predetermined concavo-convex pattern over a substrate and the filling material which is deposited over the recording elements and which fills into each concave portion between the recording elements, the workpiece being irradiated with the processing gas such that an etching rate is larger in an annular outer area including a radially outermost portion of a recording area than in an annular area adjoining the outer area, wherein surface steps are formed in the outer area, each surface step being formed in such a manner that portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and the surface steps are formed such that the recording area can be sectioned into the annular area adjoining the outer area and the outer area where height of the surface steps therein is larger than that in the annular area.
In the present application, the expression “a recording layer formed in a predetermined concave-convex pattern over a substrate” is used to include, in addition to a recording layer formed by dividing a continuous recording layer into a large number of recording elements forming a predetermined pattern, for example: a recording layer including track-shaped recording elements which are continuous at their end portions; a recording layer including recording elements partially formed over a substrate, e.g., a recording layer including spiral-shaped recording elements; a recording layer in which concave portions are formed to a halfway depth thereof in the thickness direction so that the surface on the substrate side is continuous; a continuous recording layer formed so as to follow the surface of a layer therebelow or a substrate formed in a concavo-convex pattern; and a recording layer formed separately on the upper surfaces of the convex portions of a layer therebelow or of a substrate formed in a concavo-convex pattern and on the bottom surfaces of the concave portions of the layer therebelow or of the substrate.
Furthermore, in the present application, the expression “recording area” is used to refer to an area composed of an area in which a track pattern for data recording is formed and an area in which a servo pattern corresponding to the track pattern is formed.
Moreover, in the present application, the expression “a portion over the recording element” is used to refer to the upper surface of the uppermost layer over the corresponding recording element when the upper surface (being the surface opposite to a substrate) of the corresponding recording element is covered entirely with a different layer. When a part of the upper surface of the corresponding recording element is exposed and the other portion is covered with a different layer, the expression is used to refer to an exposed portion of the upper surface of the corresponding recording element and the upper surface of the uppermost layer. Also, when the entire upper surface of the corresponding recording element is exposed, the expression is used to refer to the upper surface of the corresponding recording element.
Furthermore, in the present application, the expression “a portion over a concave portion” is used to refer to the upper surface of the uppermost layer over a filling material when the concave portion is filled with the filling material and the upper surface (being the surface opposite to a substrate) of the filling material is covered entirely with a different layer. When a part of the upper surface of the filling material is exposed and the other portion is covered with a different layer, the expression is used to refer to an exposed portion of the upper surface of the filling material and the upper surface of the uppermost layer. When the entire upper surface of the filling material is exposed, the expression is used to refer to the upper surface of the filling material. When the concave portion is not filled with the filling material and the entire bottom surface of the concave portion is covered with a different layer, the expression is used to refer to the upper surface of the uppermost layer on the bottom surface of the concave portion. When a part of the bottom surface of the concave portion is exposed and the other portion is covered with a different layer, the expression is used to refer to an exposed portion of the bottom surface of the concave portion and the upper surface of the uppermost layer. In addition, when the entire bottom surface of the concave portion is exposed, the expression is used to refer to the bottom surface of the concave portion.
Moreover, in the present application, the expression “height of the surface steps” is used to refer to the distance in the thickness direction between the lowest portion (being the closest portion to a substrate) of a portion over a corresponding concave portion and the highest portion (being the farthest portion from the substrate) of the portion over the corresponding recording element adjacent to the corresponding concave portion.
Furthermore, in the present application, the expression “magnetic recording media” is not limited to media, such as hard disks and floppy (registered trademark) disks, in which magnetism alone is used for recording and reading information. This expression is also used to refer to magneto-optical recording media, such as MO disks, in which both magnetism and light are used and to heat assisted type recording media in which both magnetism and heat are used.
Further to this, in the present application, the expression “each step between the upper surface of the filling material and the upper surface of the recording element is reflected in a corresponding surface step” is not limited to the case in which the height of the step between the upper surface of the filling material and the upper surface of the recording element is the same as the height of the corresponding surface step thereover. The expression is also used to include the case in which the large/small relationship in step height between the steps located between the upper surface of the filling material and the upper surface of the recording elements agrees with the large/small relationship in step height between the surface steps, e.g., the case in which each surface step has a height which is equivalent to a value obtained by increasing or decreasing by a constant factor, the height of the corresponding step between the upper surface of the filling material and the upper surface of the recording element therebelow.
Moreover, in the present application, the term “etching rate” is used to refer to the amount etched in the thickness direction of a substrate per unit time.
Furthermore, in the present application, the term “deposition rate” is used to refer to the amount deposited in the thickness direction of a substrate per unit time.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a perspective view schematically illustrating the general structure of the main part of a magnetic recording and reproducing apparatus according to a first exemplary embodiment of the present invention;
FIG. 2 is a cross-sectional view in the radial direction, schematically illustrating the structure of a magnetic recording medium of the magnetic recording and reproducing apparatus;
FIG. 3 is an enlarged cross-sectional view in the radial direction, schematically illustrating the structure near the surface of the magnetic recording and reproducing apparatus;
FIG. 4 is a flowchart showing the outline of the manufacturing steps of the magnetic recording medium;
FIG. 5 is a cross-sectional view in the radial direction, illustrating a workpiece in which a recording layer is processed into a concavo-convex pattern during the manufacturing steps of the magnetic recording medium;
FIG. 6 is a cross-sectional view in the radial direction, illustrating the workpiece in which a filling material is deposited over the recording layer formed into the concavo-convex patter;
FIG. 7 is a cross-sectional view in the radial direction, illustrating the workpiece in which an excess part of the filling material is removed in a flattening step;
FIG. 8 is a cross-sectional view in the radial direction, schematically illustrating the structure of a magnetic recording medium according to a second exemplary embodiment of the present invention;
FIG. 9 is an enlarged cross-sectional view in the radial direction, schematically illustrating the structure near the surface of the magnetic recording medium;
FIG. 10 is a flowchart showing the outline of another example of the manufacturing steps of the magnetic recording medium;
FIG. 11 is a cross-sectional view in the radial direction, schematically illustrating the structure of a magnetic recording medium according to a third exemplary embodiment of the present invention;
FIG. 12 is a cross-sectional view in the radial direction, schematically illustrating the structure of a magnetic recording medium according to a fourth exemplary embodiment of the present invention;
FIG. 13 is a cross-sectional view in the radial direction, schematically illustrating the structure of a magnetic recording medium according to a fifth exemplary embodiment of the present invention;
FIG. 14 is a cross-sectional view in the radial direction, schematically illustrating the structure of a magnetic recording medium according to a sixth exemplary embodiment of the present invention;
FIG. 15 is a cross-sectional view in the radial direction, schematically illustrating the structure of a magnetic recording medium according to a seventh exemplary embodiment of the present invention;
FIG. 16 is a cross-sectional view in the radial direction, schematically illustrating the structure of a magnetic recording medium according to an eighth exemplary embodiment of the present invention;
FIG. 17 is a graph showing the relationship between the deposition rate of a filling material and the radial position on the magnetic recording media of Working Example of the present invention and Comparative Example and the relationship between the etching rate in a flattening step and the radial position of the magnetic recording media; and
FIG. 18 is a graph showing the relationship between the S/N ratio of a reproduction signal and the radial position on the magnetic recording media of Working Example of the present invention and Comparative Example.



DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Hereinafter, preferred exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
As shown in FIG. 1, a magnetic recording and reproducing apparatus 10 according to a first exemplary embodiment of the present invention includes: a magnetic recording medium 12; and a flying type magnetic head 14 disposed so as to be capable of flying above the surface of the magnetic recording medium 12 in order to record/reproduce data on/from the magnetic recording medium 12. The magnetic recording and reproducing apparatus 10 is characterized by the structure of the magnetic recording medium 12. The description of the configuration of other components is omitted as appropriate because they does not seem to be essential for gaining an understanding of the first exemplary embodiment.
The magnetic recording medium 12 has a center hole 12A and is secured to a chuck 16 through the center hole 12A. The magnetic recording medium 12 is configured so as to be rotatable together with the chuck 16. The magnetic head 14 is attached near the end of an arm 18, and the arm 18 is rotatably attached to a base 20. Hence, the magnetic head 14 can move through an arc-shaped trajectory in the radial direction of the magnetic recording medium 12 while flying and is located in close proximity to the surface of the magnetic recording medium 12.
The magnetic recording medium 12 is a disk-shaped discrete track medium of a perpendicular recording type. As shown in FIG. 2, the magnetic recording medium 12 includes: recording elements 26 formed as convex portions of a recording layer 24 formed in a predetermined concavo-convex pattern over a substrate 22; and a non-magnetic filling material 30 filled into concave portions 28 between the recording elements 26. As shown in the enlarged view shown in FIG. 3, an upper surface 30A of the filling material 30 is recessed toward the substrate 22 to a level below an upper surface 26A of the recording element 26. In an annular outer area Ao including the outermost portion (in a radial direction Dr) of a recording area Ar, a step on a surface 32 is formed such that a step between the upper surface 30A of the filling material 30 and the upper surface 26A of the adjacent recording element 26 is reflected in a corresponding step on the surface 32. The steps on the surface 32 are formed such that the recording area Ar can be sectioned into an annular area adjoining the outer area Ao and the outer area Ao where the height of the steps on the surface 32 is greater than that in the annular area.
The expression “the height of the steps on the surface 32 is greater than that in the annular area” is not limited to the case in which the height of the steps on the surface 32 is greater in all the positions in the outer area Ao than in all the positions in the annular area adjoining the outer area Ao.
For example, the expression is used to include the case in which, although the above relationship is not satisfied at a small number of positions, the height of steps in most (for example, 90% or more) of the positions in the outer area Ao is greater than the height of steps in most (for example, 90% or more) of the positions in the annular area adjoining the outer area Ao. Whether or not the height of steps in most (for example, 90% or more) of the positions in the outer area Ao is greater than the height of steps in most (for example, 90% or more) of the positions in the annular area adjoining the outer area Ao can be determined by, for example, examining whether or not the height of steps at 90% or more of several tens to several hundreds of arbitrary selected measurement points in the outer area Ao is greater than the height of steps at 90% or more of several tens to several hundreds of arbitrary selected measurement points in the annular area adjoining the outer area Ao.
Moreover, the expression is used to include the case in which the arithmetic mean value of the height of the steps on the surface 32 in the outer area Ao is greater than the arithmetic mean value of the height of the steps on the surface 32 in the annular area adjoining the outer area Ao. Whether or not the arithmetic mean value of the height of the steps on the surface 32 in the outer area Ao is greater than the arithmetic mean value of the height of the steps on the surface 32 in the annular area adjoining the outer area Ao can be determined by, for example, examining whether or not the arithmetic mean value of the height of steps of several tens to several hundreds of arbitrary selected measurement points in the outer area Ao is greater than the arithmetic mean value of the height of steps of several tens to several hundreds of arbitrary selected measurement points in the annular area adjoining the outer area Ao.
In the first exemplary embodiment, in the outer area Ao, each step between the upper surface 30A of the filling material 30 and the upper surface 26A of an adjacent recording element 26 is reflected in the corresponding step on the surface 32 thereover. Such a step on the surface 32 is also formed in the annular area adjoining the outer area Ao. In addition, the height of the steps on the surface 32 continuously increases outwardly in the radial direction Dr.
The expression “the height of the steps on the surface 32 continuously increases outwardly in the radial direction Dr” is not limited to the case in which the height of the steps on the surface 32 in the recording area Ar continuously increases outwardly in the radial direction Dr in all the positions.
For example, the expression is used to include the case in which, although the above relationship is not satisfied in a small number of positions, the height of steps in most (for example, 90% or more) of the positions in the recording area Ar satisfies the above relationship. Whether or not the height of steps in most (for example, 90% or more) of the positions in the recording area Ar satisfies the above relationship can be determined by, for example, examining whether or not the height of steps in 90% or more of several tens to several hundreds of arbitrary selected measurement points in the recording area Ar continuously increases outwardly in the radial direction Dr.
In FIGS. 2 and 3, for ease of understanding, the recording layer 24 is drawn thicker than the actual layer, in contrast to the other layers. In addition to this, the height of the steps on the surface 32 is more exaggerated than the actual height of steps. This is also the case in FIGS. 5 to 9 and FIGS. 11 to 16 described later.
The substrate 22 is mirror polished on the recording layer 24 side. A non-magnetic material such as glass, an Al alloy coated with NiP, Si, or Al2O3 may be used as the material for the substrate 22.
The recording layer 24 has a thickness of 5 to 30 nm. A CoCr-based alloy such as a CoCrPt alloy, an FePt-based alloy, a stacked body thereof, a material formed of an oxide material, such as SiO2, and ferromagnetic particles, such as CoPt particles, contained in the oxide material in a matrix form, or the like may be used as the material for the recording layer 24.
In a data area in the recording area Ar, the recording elements 26 are each formed in a concentric track shape and are formed at small intervals in the radial direction Dr. FIGS. 2 and 3 illustrate the configuration described above. In a servo area in the recording area Ar, the recording elements 26 are formed in a predetermined servo pattern (not shown).
An oxide such as SiO2, Al2O3, TiO2, or ferrite, a nitride such as AlN, a carbide such as SiC, C (carbon), a non-magnetic metal such as Cu or Cr, a resin material, or the like may be used as the material for the filling material 30.
The upper surface 30A of the filling material 30 is recessed toward the substrate 22 to a level below the upper surface 26A of each of the adjacent recording elements 26. Furthermore, the height of the step between the upper surface 26A of the recording elements 26 and the upper surface 30A of the filling material 30 increases outwardly in the radial direction Dr.
A protection layer 34 and a lubrication layer 36 are formed in this order over the recording elements 26 and the filling material 30. When the protection layer 34 is covered entirely with the lubrication layer 36, the upper surface of the lubrication layer 36 serves as the surface 32. When the protection layer 34 is partially covered with the lubrication layer 36, the upper surface of the lubrication layer 36 and the upper surface of the protection layer 34 exposed from the lubrication layer 36 serve as the surface 32. The protection layer 34 and the lubrication layer 36 are formed such that each step between the upper surface 26A of the recording element 26 and the upper surface 30A of the filling material 30 is reflected in a corresponding step on their upper surfaces. Hence, each step between the upper surface 26A of the recording element 26 and the upper surface 30A of the filling material 30 is reflected in the corresponding step on the surface 32, and the height of the steps on the surface 32 increases outwardly in the radial direction Dr.
The protection layer 34 has a thickness of 1 to 5 nm. For example, a hard carbon film, so-called diamond-like carbon, may be used as the material for the protection layer 34. In the present application, the term “diamond-like carbon (hereinafter referred to as “DLC”)” is used to refer to a material formed mainly of carbon, having an amorphous structure, and having a hardness of approximately 2×109 to approximately 8×1010 Pa as measured by Vickers hardness test. Moreover, the lubrication layer 36 has a thickness of 1 to 2 nm. PFPE (perfluoro polyether) or the like may be used as the material for the lubrication layer 36.
A soft magnetic layer 38 and a seed layer 40 are formed between the substrate 22 and the recording layer 24. The seed layer 40 can impart magnetic anisotropy in a thickness direction (a direction perpendicular to the surface) to the recording layer 24. The soft magnetic layer 38 has a thickness of 50 to 300 nm. An Fe alloy, a Co amorphous alloy, ferrite, or the like may be used as the material for the soft magnetic layer 38. The soft magnetic layer 38 may have a stacked structure of a soft magnetic layer and a non-magnetic layer. The seed layer 40 has a thickness of 2 to 40 nm. A nonmagnetic material such as a CoCr alloy, Ti, Ru, a stacked body of Ru and Ta, MgO, or the like may be used as the material for the seed layer 40.
A description will now be given of the action of the magnetic recording and reproducing apparatus 10 provided with the magnetic recording medium 12.
In the magnetic recording medium 12, since the height of the steps on the surface 32 is greater in the outer area Ao than in the area adjoining the outer area Ao, the effect that the flying height of the magnetic head 14 is increased because of a high relative speed with the magnetic head 14 is cancelled out in the outer area Ao by the effect where the flying height of the magnetic head 14 is decreased because of the steps on the surface 32. Accordingly, an increase of the flying height of the magnetic head 14 can be suppressed in the outer area Ao.
Since the steps are formed on the surface 32, the flying height of the magnetic head 14 is reduced by about one half of the height of the steps on the surface 32 when compared with the case in which the surface is flat. Since the assumed average flying height of the magnetic head 14 is in the range of 5 to 20 nm, the maximum value of the height of the steps on the surface 32 is preferably approximately 3 nm, in order to reliably avoid collision of the magnetic head 14 with the magnetic recording medium 12.
Preferably, the height of the steps on the surface 32 satisfies the above relationship at as many different positions as possible. However, even when the above relationship is not satisfied at a small number of positions, an increase in the flying height of the magnetic head 14 can be suppressed sufficiently in the outer area Ao when the height of steps in most (for example, 90% or more) of the positions in the outer area Ao are greater than the height of step in most (for example, 90% or more) of the positions in the area adjoining the outer area Ao.
Moreover, when the arithmetic mean value of the height of the steps on the surface 32 in the outer area Ao is larger than that in the area adjoining the outer area Ao, an increase in the flying height of the magnetic head 14 can be suppressed sufficiently in the outer area Ao.
Preferably, the steps on the surface 32 are formed such that the recording area Ar can be sectioned into the outer area Ao and an annular area having a width in the radial direction Dr that is the same as that of the outer area Ao.
Preferably, when the recording area Ar is composed only of the outer area Ao and the annular area, the steps on the surface 32 are formed such that the recording area Ar can be sectioned into the outer area Ao and the annular area so as to be bisected at the midpoint in the radial direction Dr.
A description will now be given of a method for manufacturing the magnetic recording medium 12 with reference to the flowchart shown in FIG. 4.
First, a soft magnetic layer 38, a seed layer 40, a continuous recording layer (an unprocessed recording layer 24), a first mask layer, and a second mask layer are formed over the substrate 22 in that order by means of a sputtering method, and then a resin layer is applied thereto by means of a spin coating method, whereby a starting body for a workpiece is prepared (S102). TaSi, for example, may be used as the material forming the first mask layer. Ni, for example, may be used as the material forming the second mask layer. Furthermore, a resist material or an acrylic resin, for example, may be used as the material forming the resin layer.
A concavo-convex pattern corresponding to a track pattern in the data area and to a servo pattern in the servo area is transferred to the resin layer by means of a nano imprint method using a transferring device (not shown) (S104). In this instance, the resin layer on the bottom surface of the concave portions is removed by means of RIE (reactive ion etching) using O2 gas.
Subsequently, the second mask layer of the bottom surface of the concave portions is removed by means of IBE (ion beam etching) using Ar gas (S106). Furthermore, the first mask layer of the bottom surface of the concave portions is removed by means of RIE using SF6 gas (S108).
Subsequently, as shown in FIG. 5, the continuous recording layer of the bottom surface of the concave portions is removed by means of RIE using CO gas and NH3 gas, so that the continuous recording layer is divided into a large number of recording elements 26, whereby the recording layer 24 is formed into the concavo-convex pattern (S110).
Subsequently, as shown in FIG. 6, the filling material 30 is deposited over a workpiece 50 by means of a bias sputtering method, whereby the concave portions 28 between the recording elements 26 are filled with the filling material 30 (S112). Preferably, a material having an amorphous structure or a material in a microcrystalline state is used as the material for the filling material 30, since the use of such a material prevents the formation of gaps in the side surfaces and bottom surfaces of the concave portions 28. In the present application, the expression “a material in a microcrystalline state” is used to refer to a material which does not exhibit crystalline peaks in an X-ray diffraction pattern. Silicon oxide composed mainly of SiO2 is a microcrystal in which grain growth is suppressed and which an amorphous structure can be obtained by selecting certain deposition conditions. Hence, it is preferable to use silicon oxide which is composed mainly of SiO2 as the filling material 30.
During bias sputtering, the deposition of the filling material 30 and the etching of the upper surface of the deposited filling material 30 proceed simultaneously by applying a bias voltage to the workpiece 50. Since deposition proceeds faster than etching, the filling material 30 is deposited. During etching, protruding portions are selectively removed, i.e., the end portions of the protruding portions are removed at a faster rate than non-protruding portions therearound. Therefore, the filling material 30 is deposited over the workpiece 50 so as to cover the recording elements 26 with concavo-convex shape on the surface being suppressed to a certain degree.
In this step, the bias voltage is controlled such that the deposition rate (being the combined rate of deposition and etching) continuously decreases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. Specifically, for example, by placing an electrode for applying the bias voltage near the outer periphery of the workpiece 50, the bias voltage in the workpiece 50 continuously increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. Hence, etching during bias sputtering continuously increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr, whereby the combined deposition rate of the deposition and etching continuously decreases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. Therefore, as shown in FIG. 6, the thickness of the deposited filling material 30 decreases outwardly in the radial direction Dr.
When the outermost concave portion 28 in the radial direction Dr is filled with the filling material 30 to a level near the upper surface of the recording element 26, the deposition of the filling material 30 is stopped.
Subsequently, as shown in FIG. 7, while the workpiece 50 is rotated, an excess portion of the filling material 30 above the recording elements 26 is removed by means of IBE using an inert gas such as Ar to flatten the surface (S114). During IBE, the incident angle of the processing gas is inclined with respect to a direction perpendicular to the surface of the workpiece 50, as indicated by the arrows shown in FIG. 7. In this manner, the tendency of the etching rate on the protruding portions to be higher than that on the recessed portions becomes pronounced. In particular, when an inert gas such as Ar is used as the processing gas, the anisotropic etching effect is enhanced, and therefore the tendency of the etching rate on the protruding portions to be higher than that on the recessed portions becomes more pronounced.
In this step, the divergence state of the ion beam is controlled, whereby the processing gas is projected such that the etching rate continuously increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. The ion gun used in the IBE is designed such that the divergence of ions caused by accelerating the ions is suppressed by controlling a suppressor voltage applied to the suppressor in a grid, so that, for example, the ion beam can converge so as to be projected uniformly onto the surface to be processed. In other words, by controlling voltage for accelerating ions, the divergence state of the ion beam can be adjusted. Furthermore, by controlling the suppressor voltage, the divergence state of the ion beam can be adjusted. Hence, by controlling the voltage for accelerating ions and/or the suppressor voltage, the divergence (and convergence) of the ion beam can be adjusted. In this manner, the velocity and density of the ion beam projected onto the workpiece can be continuously increased from the inner side of the recording area Ar toward the outer side in the radial direction Dr, whereby the etching rate can be continuously increased from the inner side of the recording area Ar toward the outer side in the radial direction Dr.
In the present step, it is also preferable that the etching rate for the filling material 30 be higher than the etching rate for the recording elements 26. When the recording elements 26 are formed of an alloy containing Co and Cr and the filling material 30 is formed of silicon oxide, the etching rate for the filling material 30 can be made higher than the etching rate for the recording elements 26 by restricting the incident angle of the ion beam within the range of −2 to 300. As used herein, the incident angle of the ion beam is the angle formed by the principal projection direction of the ion beam and the surface of the workpiece 50. When the principal projection direction of the ion beam is parallel to the surface of the workpiece, the incident angle is 0°.
As shown in FIG. 7, when the filling material 30 deposited above the recording layer 24 is completely removed in the innermost portion (in the radial direction Dr) of the workpiece 50, the projection of the ion beam is stopped.
As described above, in the filling material deposition step (S112), the filling material 30 is deposited such that the thickness thereof decreases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. In addition to this, in the flattening step (S114), while the excess portion of the filling material 30 is removed, the etching rate is controlled so as to continuously increase from the inner side of the recording area Ar toward the outer side in the radial direction Dr. In this manner, the height of the steps between the upper surface of the recording element 26 and the upper surface of the filling material 30 increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr.
Subsequently, the protection layer 34 is formed on the upper surfaces of the recording elements 26 and the filling material 30 by means of a CVD method (S116). Furthermore, the lubrication layer 36 is applied to the protection layer 34 by means of a dipping method (S118). Thus, the magnetic recording medium 12 is completed. The protection layer 34 and the lubrication layer 36 are deposited such that each step between the upper surface 26A of a recording element 26 and the upper surface 30A of the filling material 30 is reflected in the corresponding step on the upper surface of each of the protection layer 34 and the lubrication layer 36. Therefore, a magnetic recording medium 12 is obtained in which the height of the steps on the surface 32 increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr, as shown in FIGS. 2 and 3.
A description will now be given of a second exemplary embodiment of the present invention.
As shown in FIGS. 8 and 9, in contrast to the magnetic recording medium 12 according to the first exemplary embodiment, a magnetic recording medium 60 according to the second exemplary embodiment is characterized in that the depth of the concave portions 28 increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. Since other components are the same as those of the magnetic recording medium 12, the same numerals as those used in FIGS. 1 to 4 are used for the same components, and the description thereof will be omitted.
In addition to this, since the action of the magnetic recording medium 60 is the same as that of the magnetic recording medium 12 except for the action in the manufacturing steps, the description of the action except for the action in the manufacturing steps will be omitted.
A description will now be given of a method for manufacturing the magnetic recording medium 60.
In the method for manufacturing the magnetic recording medium 60, the recording layer processing step (S110) is different from that in the method for manufacturing the magnetic recording medium 12. Since the other steps are the same as those in the first exemplary embodiment, the description thereof will be omitted.
Specifically, in the recording layer processing step (S110), the bias voltage applied to the workpiece 50 is controlled, whereby the processing gas is projected such that the etching rate continuously increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. For example, by placing an electrode for applying the bias voltage near the outer periphery of the workpiece 50, the distribution of the bias voltage in the workpiece 50 continuously increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. In this manner, the velocity and density of the processing gas projected onto the workpiece 50 continuously increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr, and therefore the etching rate continuously increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. Hence, the depth of the concave portions 28 between the recording elements 26 increases from the inner side of the recording area Ar toward the outer side in the radial direction Dr. In FIGS. 8 and 9, etching reaches halfway depth of the seed layer 40 in the thickness direction, but etching may be continued to halfway depth of the soft magnetic layer 38 in the thickness direction. Furthermore, in part of or all of the concave portions 28, etching may be terminated at halfway depth of the recording layer 24 in the thickness direction, whereby a recording layer having a continuous bottom surface may be formed.
As described above, by allowing the depth of the concave portions 28 to increase from the inner side of the recording area Ar toward the outer side in the radial direction Dr, the height of the steps on the surface 32 is allowed to increase outwardly in the radial direction Dr.
Furthermore, even when the filling material 30 is deposited to a uniform thickness in the filling material deposition step (S112) or even when the filling material 30 is etched at a uniform etching rate in the flattening step (S114), the height of the steps on the surface 32 is allowed to increase outwardly in the radial direction Dr.
As shown in the flowchart of FIG. 10, in the recording layer processing step (S110), the recording layer 24 may be processed by means of IBE using an inert gas such as Ar, as in the flattening step (S114). When the recording layer 24 is processed by means of IBE, the ion beam is perpendicularly projected onto the surface of the workpiece 50. In IBE, the divergence (convergence) of the ion beam is adjusted by controlling the voltage for accelerating ions and/or the suppressor voltage, whereby the velocity and density of the ion beam projected onto the workpiece can be continuously increased from the inner side of the recording area Ar toward the outer side in the radial direction Dr, as described in the flattening step (S114). Therefore, the etching rate can be continuously increased from the inner side of the recording area Ar toward the outer side in the radial direction Dr, and the depth of the concave portions 28 is allowed to increase from the inner side of the recording area Ar toward the outer side in the radial direction Dr.
Even when the etching rate or the deposition rate is uniform in one or two of the recording layer processing step (S110), the filling material deposition step (S112), and the flattening step (S114), the height of the steps on the surface 32 is allowed to increase outwardly in the radial direction Dr by changing the etching rate and/or the deposition rate depending on a position in the radial direction Dr in the other one or two steps as described above.
A description will now be given of a third exemplary embodiment of the present invention.
In the magnetic recording medium 12 according to the first exemplary embodiment, the height of the steps on the surface 32 continuously increases outwardly in the radial direction Dr. However, as shown in FIG. 11, a magnetic recording medium 70 according to the third exemplary embodiment is characterized in that the height of the steps on the surface 32 increases stepwise from the inner side toward the outer side in the radial direction Dr. Since other components are the same as those of the magnetic recording medium 12, the same numerals as those used in FIGS. 1 to 3 are used for the same components, and the description thereof will be omitted.
Specifically, in the magnetic recording medium 70, the height of steps on the surface 32 is largest in the outer area Ao and is smallest in an annular inner area Ai including the innermost portion (in the radial direction Dr) of the recording area Ar. In an annular intermediate area Am disposed between the inner area Ai and the outer area Ao so as to be adjoining the outer area Ao, the height of the steps is an intermediate value of the height of steps in the areas on both sides of the intermediate area Am. Note that the height of steps is substantially constant within each of the areas.
Even when the height of the steps on the surface 32 increases stepwise from the inner side toward the outer side in the radial direction Dr as described above, an increase in the flying height of the magnetic head 14 can be suppressed sufficiently in the outer area Ao.
As a method for manufacturing the magnetic recording medium 70 in which the height of the steps on the surface 32 increases stepwise from the inner side toward the outer side in the radial direction Dr as described above, for example, the following methods may be used: a method in which, in the filling material deposition step (S112), an electrode for applying the bias voltage is provided independently for each of the outer area Ao, the intermediate area Am, and the inner area Ai, so that a voltage is applied to each electrode such that the voltage is higher on an electrode disposed nearer to the outer side in the radial direction Dr; and a method in which RIE is employed in the recording layer processing step (S110) and/or the flattening step (S114) and an electrode for applying the bias voltage is provided independently for each of the outer area Ao, the intermediate area Am, and the inner area Ai as in the case of the filling material deposition step (S112), so that a voltage is applied to each electrode such that the voltage is higher on an electrode disposed nearer to the outer side in the radial direction Dr.
In the third embodiment, the height of the steps on the surface 32 increases stepwise, i.e., by three steps, from the inner side toward the outer side in the radial direction Dr. The increase may be achieved by two steps or four or more steps.
Next, a description is given of a fourth embodiment of the present invention.
In the magnetic recording medium 12 according to the first exemplary embodiment, the steps on the surface 32 are formed over the entire recording area Ar. However, as shown in FIG. 12, a magnetic recording medium 80 according to the fourth exemplary embodiment is characterized in that the steps on the surface 32 are formed only in the outer area Ao and that the surface 32 is substantially flat in the intermediate area Am and in the inner area Ai. Since other components are the same as those of the magnetic recording medium 12, the same numerals as those used in FIGS. 1 to 3 are used for the same components, and the description thereof will be omitted.
The height of the steps on the surface 32 may be constant in the outer area Ao or may increase continuously in the outer area Ao from the inner side toward the outer side in the radial direction Dr.
Even when the steps on the surface 32 is formed only in the outer area Ao as described above, any increase in the flying height of the magnetic head 14 can be sufficiently suppressed in the outer area Ao.
As a method for manufacturing the magnetic recording medium 80 in which the steps on the surface 32 are formed only in the outer area Ao, for example, the following methods may be used: a method in which, in the filling material deposition step (S112), an electrode for applying the bias voltage is provided independently for each of the outer area Ao and other areas, so that a voltage is applied to each electrode such that the voltage applied to the outer area Ao is higher than that applied to the other areas; and a method in which RIE is employed in the recording layer processing step (S110) and/or in the flattening step (S114) and an electrode for applying the bias voltage is provided independently for each of the outer area Ao and the other areas as in the case of the filling material deposition step (S112), so that a voltage is applied to each electrode such that the voltage applied to the outer area Ao is higher than that applied to the other areas. Moreover, as a method for forming the steps on the surface 32 in the outer area Ao only such that the height of the steps increases continuously from the inner side toward the outer side in the radial direction Dr, for example, the following method may be used: a method in which, in contrast to the manufacturing method in the first exemplary embodiment, in the filling material deposition step (S112), an electrode for correcting the deposition rate such that the deposition rate is constant in the intermediate area Am and in the inner area Ai is provided in portions corresponding to the intermediate area Am and the inner area Ai.
Fine protrusions and recesses may be formed in a substantially flat portion of the surface 32 of the magnetic recording medium 80 in order to prevent adhesion of the magnetic head 14 to the surface 32.
A description will now be given of a fifth exemplary embodiment of the present invention.
In the magnetic recording medium 12 according to the first exemplary embodiment, the height of the steps on the surface 32 increases continuously outwardly in the radial direction Dr. However, as shown in FIG. 13, a magnetic recording medium 90 according to the fifth exemplary embodiment is characterized in that the height of the steps on the surface 32 is larger in the outer area Ao and the inner area Ai than in the intermediate area Am which is placed between the outer area Ao and the inner area Ai so as to be adjoining the outer area Ao. Note that the height of the steps on the surface 32 increases continuously from the midpoint of the intermediate area Am in the radial direction Dr toward the outer side in the radial direction Dr and increases continuously from the midpoint of the intermediate area Am toward the inner side in the radial direction Dr. Since, in the present exemplary embodiment, other components is the same as those of the magnetic recording medium 12, the same numerals as those used in FIGS. 1 to 3 are used for the same components, and a description thereof will be omitted.
Even when the height of the steps on the surface 32 is larger in the outer area Ao and the inner area Ai than in the intermediate area Am as described above, any increase in the flying height of the magnetic head 14 can be sufficiently suppressed in the outer area Ao.
Moreover, the recording elements 26 are formed in a predetermined servo pattern in a servo area in the recording area Ar as described above. Servo information is recorded as a servo pattern such that binary information, being a “0” or a “1,” is recorded in each magnetic domain corresponding to one bit of information. In order to obtain a servo signal with a high S/N ratio, it is preferable that the direction of magnetization be clearly reversed across the boundary between a magnetic domain storing information of “0” and a magnetic domain storing information of “1”.
However, in practice, a magnetic transition region in which recorded information is recognized as neither “0” nor “1” is present around the boundary between magnetic domains. Such a magnetic transition region can be a source of noise. The circumferential length of the magnetic transition region is nearly constant irrespective of the circumferential length of the adjacent magnetic domains.
Meanwhile, when the areal density is high, the circumferential length of magnetic domains is small. Therefore, the ratio of the circumferential length of the magnetic transition region relative to the circumferential length of the magnetic domains is high, and the S/N ratio of the servo signal is likely to decrease correspondingly.
Moreover, in a disk-shaped magnetic recording medium, its circumferential speed relative to a magnetic head is higher on the outer side in the radial direction and is lower on the inner side in the radial direction. However, the frequency corresponding to the number of information recording-reproduction processes per unit time is constant in the servo area irrespective of the position on the magnetic recording medium. Therefore, the circumferential length of magnetic domains, each corresponding to one bit of information, is larger on the outer side of the magnetic recording medium and is smaller on the inner side. Hence, the S/N ratio of a servo signal is likely to decrease, particularly in an inner area of a magnetic recording medium.
In view of the foregoing, in the magnetic recording medium 90, the height of the steps on the surface 32 is larger in the inner area Ai than in the intermediate area Am, and the relative speed between the magnetic recording medium 90 and the magnetic head 14 is slow in the inner area Ai. Hence, the flying height of the magnetic head 14 is lower in the inner area Ai than in the intermediate area Am. Therefore, the magnetic gap between the magnetic head 14 and the upper surface of each recording element 26 is smaller in the inner area Ai than in the intermediate area Am. Accordingly, the output level of the servo signal is larger in the inner area Ai than in the intermediate area Am.
Meanwhile, the term “noise” includes that caused by, for example, an electrical circuit and the sliding motion of the arm of a magnetic head. The magnitude of such noise does not largely increase or decrease with an increase or decrease in the magnetic gap between the upper surface of each recording element 26 and the magnetic head 14. Even if the magnitude of the noise increases or decreases, the amount of the increase or decrease is small relative to the amount of increase or decrease in the output level of the servo signal.
Hence, in the inner area Ai, the magnitude of the noise produced is small relative to the output level of the servo signal, and therefore the S/N ratio is improved.
When the height of the steps on the surface 32 is larger in the outer area Ao and the inner area Ai than in the intermediate area Am, it is preferable that the steps on the surface 32 be formed such that the recording area Ar can be sectioned into the outer area Ao, the intermediate area Am having a width in the radial direction Dr the same as that of the outer area Ao, and the inner area Ai having a width in the radial direction Dr the same as that of the outer area Ao.
When the recording area Ar is composed only of the outer area Ao, the intermediate area, and the inner area Ai, it is preferable that the steps on the surface 32 be formed such that the recording area Ar is trisected in the radial direction Dr so as to be sectioned into the outer area Ao, the intermediate area, and the inner area Ai.
As a method for manufacturing the magnetic recording medium 90 in which the height of the steps on the surface 32 is larger in the outer area Ao and the inner area Ai than in the intermediate area Am as described above, for example, the following methods may be used: a method in which, in the filling material deposition step (S112), an electrode for applying the bias voltage is provided in portions on the outer and inner sides (in the radial direction Dr) of the workpiece 50; and a method in which, in the recording layer processing step (S110) and/or in the flattening step (S114), RIE is used and an electrode for applying the bias voltage is provided in portions on the outer and inner sides (in the radial direction Dr) of the workpiece 50 as in the case of the filling material deposition step (S112).
A description will now be given of a sixth embodiment of the present invention.
In the magnetic recording medium 90 according to the fifth exemplary embodiment, the height of the steps on the surface 32 increases continuously from the midpoint of the intermediate area Am located in the middle in the radial direction Dr toward the outer side in the radial direction Dr and also increases continuously from the midpoint of the intermediate area Am toward the inner side in the radial direction Dr. However, as shown in FIG. 14, a magnetic recording medium 100 according to the sixth exemplary embodiment is characterized in that the steps on the surface 32 are formed in the outer area Ao and the inner area Ai and that the surface 32 is substantially flat in the intermediate area Am located in the middle in the radial direction Dr. Since other components are the same as those of the magnetic recording medium 90, the same numerals as those used in FIG. 13 are used for the same components, and a description thereof will be omitted herein.
When the steps on the surface 32 are formed in the outer area Ao and the inner area Ai and the surface 32 is substantially flat in the intermediate area Am as described above, any increase in the flying height of the magnetic head 14 can be suppressed sufficiently in the outer area Ao.
Moreover, since the flying height of the magnetic head 14 is lower in the inner area Ai than in the intermediate area Am, the magnetic gap between the magnetic head 14 and the upper surface of each recording element 26 is smaller in the inner area Ai than in the intermediate area Am. Therefore, the output level of the servo signal is larger in the inner area Ai than in the intermediate area Am. Hence, in the inner area Ai, the magnitude of the noise is small relative to the output level of the servo signal, and therefore the S/N ratio is improved.
In FIG. 14, the height of the steps on the surface 32 is constant in the outer area Ao. However, another configuration can be used in which, in the outer area Ao, the height of the steps on the surface 32 increases from the inner side toward the outer side in the radial direction Dr. Similarly, in FIG. 14, the height of the steps on the surface 32 is constant in the inner area Ai. However, still another configuration can be used in which, in the inner area Ai, the height of the steps on the surface 32 increases from the outer side toward the inner side in the radial direction Dr.
As a method for manufacturing the magnetic recording medium 100 in which the steps on the surface 32 are formed in the outer area Ao and in the inner area Ai and the surface 32 is substantially flat in the intermediate area Am as described above, for example, the following methods may be used: a method in which, in the filling material deposition step (S112), an electrode for applying the bias voltage is provided independently for each of the outer area Ao, the intermediate area Am, and the inner area Ai, so that a voltage is applied to each electrode such that the voltages applied to the outer area Ao and the inner area Ai are higher than the voltage applied to the intermediate area Am; and a method in which RIE is employed in the recording layer processing step (S110) and/or in the flattening step (S114) and an electrode for applying the bias voltage is provided independently for each of the outer area Ao, the intermediate area Am, and the inner area Ai as in the case of the filling material deposition step (S112), so that a voltage is applied to each electrode such that the voltages applied to the outer area Ao and the inner area Ai are higher than the voltage applied to the intermediate area Am. In addition to this, a method can be used in which, in the flattening step (S114), IBE is employed to control the divergence and convergence of the ion beam.
A description will now be given of a seventh exemplary embodiment of the present invention.
In the first to sixth exemplary embodiments, the concave portions 28 between the recording elements 26 are at least partially filled with the filling material 30, and the steps on the surface 32 are formed such that the each step between the upper surface 30A of the filling material 30 and the upper surface 26A of the adjacent recording element 26 is reflected in the corresponding step on the surface 32 thereover. In addition to this, the height of the steps on the surface 32 in the outer area Ao is larger than that in the annular area adjoining the outer area Ao. However, as shown in FIG. 15, a magnetic recording medium 110 according to the seventh exemplary embodiment is characterized in that the steps on the surface 32 are formed in the outer area Ao by allowing the depth of the concave portions 28 to increase outwardly in the radial direction Dr without filling the concave portions 28 with the filling material, and that the height of the steps on the surface 32 is larger in the outer area Ao than in the annular area adjoining the outer area Ao. Since other components in the present exemplary embodiment are the same as those in the first to sixth exemplary embodiments, the same numerals as those used in FIGS. 1 to 14 are used for the same components, and a description thereof will be omitted.
Also in this case, any increase in the flying height of the magnetic head 14 can be suppressed sufficiently in the outer area Ao.
As a method for manufacturing the magnetic recording medium 110, a method similar to any of the methods exemplified in the second exemplary embodiment may be used. It is noted that, the filling material deposition step (S112) and the flattening step (S114) is omitted.
A description will now be given of an eighth exemplary embodiment of the present invention.
In the first to seventh exemplary embodiments, the recording elements 26 come in direct contact with the protection layer 34. However, as shown in FIG. 16, a magnetic recording medium 120 according to the eighth exemplary embodiment is characterized in that a barrier film 122 for protecting the recording layer from being etched in the flattening step (S114) is formed on the recording elements 26. Since other components are the same as those in the first to seventh exemplary embodiments, the same numerals as those used in FIGS. 1 to 15 are used for the same components, and a description thereof will be omitted. The barrier film 122 is formed also on the side surfaces of the recording elements 26 and on the bottom surfaces of the concave portions 28. In the eighth exemplary embodiment, a portion on the surface 32 above the barrier film 122 on the side surface of the recording element 26 is included in “a portion over the recording element.” Alternatively, the barrier film 122 may be formed only on the recording elements 26.
In the first to eighth exemplary embodiments, the protection layer 34 and the lubrication layer 36 are formed over the recording elements 26. However, one or both of the protection layer 34 and the lubrication layer 36 may be omitted in accordance with the required performance.
In the first exemplary embodiment, the first mask layer, the second mask layer, and the resin layer are formed over the continuous recording layer, and the recording layer is processed into a concavo-convex pattern by means of three-step dry etching. However, no particular limitation is imposed on the materials for the resin layer and the mask layers, the number of stacking of these layers, the thickness of these layers, the type of dry etching, and the like, so long as the recording layer can be processed at high accuracy.
In the first to sixth and eighth exemplary embodiments, the continuous recording layer is processed into a concavo-convex pattern by means of dry etching, and the filling material 30 is deposited over the recording layer 24 formed in the concavo-convex pattern to fill the concave portions 28 with the filling material 30. Then, an excess portion of the filling material 30 is removed by dry etching to flatten the surface. However, a magnetic recording medium may be manufactured differently. Specifically, a continuous filling material is processed into a concavo-convex pattern by means of dry etching, and the recording layer is deposited over the filling material formed in the concavo-convex pattern to fill the concave portions with the recording layer. Then, an excess portion of the recording layer is removed by means of dry etching to flatten the surface. In this manner, a magnetic recording medium is manufactured which includes: the recording elements formed as the convex portions of the recording layer formed in the concavo-convex pattern over the substrate; and the filling material filled into the concave portions between the recording elements.
In this case, a dry etching method is used in which the etching rate for the filling material is higher than the etching rate for the recording layer in the flattening step of removing the excess portion of the recording layer, and the flattening step is carried out such that the etching rate for the filling material is higher in the outer area Ao than in the annular area adjoining the outer area Ao. In this manner, a magnetic recording medium can be manufactured in which the height of the steps on the surface 32 is larger in the outer area Ao than in the annular area adjoining the outer area Ao.
In the first to eighth exemplary embodiments, the recording layer 24 is completely separated into parts. However, the recording layer may be processed to halfway depth thereof in the thickness direction to form a recording layer in concavo-convex pattern, which is continuous in the lower portions of the concave portions between the recording elements.
Furthermore, the surface of the substrate may be processed into a concavo-convex pattern in which the depth of the concave portions is larger in the outer area Ao than in the annular area adjoining the outer area Ao, and the recording layer and other layers may be formed so as to follow this concavo-convex pattern. Also in this manner, a magnetic recording medium may be manufactured in which the height of the steps on the surface is larger in the outer area than in the annular area adjoining the outer area. In this case, the recording layer is a continuous film having the concavo-convex pattern on the upper and lower surfaces thereof.
In the first to eighth exemplary embodiments, the soft magnetic layer 38 and the seed layer 40 are formed between the recording layer 24 and the substrate 22. However, the configuration of the layers between the recording layer 24 and the substrate 22 may be appropriately changed according to the type of a magnetic recording medium. For example, an antiferromagnetic layer and/or an under layer may be formed between the soft magnetic layer 38 and the substrate 22. Furthermore, one of the soft magnetic layer 38 and the seed layer 40 may be omitted. In addition, the recording layer 24 may be formed directly on the substrate 22.
In the first to eighth exemplary embodiments, each of the magnetic recording media 12, 60, 70, 80, 90, 100, 110, and 120 is a magnetic disk of a perpendicular recording type. However, various exemplary embodiments of the present invention is also applicable to a magnetic disk of a longitudinal recording type.
In the first to eighth exemplary embodiments, each of the magnetic recording media 12, 60, 70, 80, 90, 100, 110, and 120 has the recording layer 24 formed on one side of the substrate 22. However, various exemplary embodiments of the present invention is also applicable to a magnetic recording medium in which the recording layer and other layers are formed on both sides of a substrate.
In the first to eighth exemplary embodiments, each of the magnetic recording media 12, 60, 70, 80, 90, 100, 110, and 120 has the center hole 12A. However, various exemplary embodiments of the present invention is also applicable to a magnetic recording medium which does not have the center hole.
In the first to eighth exemplary embodiments, each of the magnetic recording media 12, 60, 70, 80, 90, 100, 110, and 120 is a discrete track medium. Various exemplary embodiments of the present invention is also applicable to, for example, patterned media and magnetic disks having spiral-shaped tracks. Moreover, various exemplary embodiments of the present invention is also applicable to magneto-optical disks such as MO disks and heat assisted type magnetic disks in which both magnetism and heat are used.
WORKING EXAMPLE
The magnetic recording medium 12 having the same configuration as that in the first exemplary embodiment (see FIGS. 2 and 3) was manufactured. The principal configuration of the manufactured magnetic recording medium 12 was as follows.
The substrate 22 had a diameter of approximately 48 mm (approximately 1.89 inches), and was made of glass. The recording layer 24 had a thickness of approximately 20 nm, and was made of a CoCrPt alloy. The material for the filling material 30 was silicon oxide composed mainly of SiO2. The protection layer 34 had a thickness of approximately 2 nm, and was made of DLC. The lubrication layer 36 had a thickness of approximately 1 nm, and was made of PFPE. The recording area Ar extended in the radial range of 8 mm to 23.4 mm from the center. The track pitch (being the pitch between the recording elements 26 in the radial direction Dr) in the data area in the recording area Ar was approximately 200 nm, and the width (being the width in the radial direction Dr) of the upper surface 26A of each recording elements 26 was approximately 100 nm.
The first mask layer had a thickness of approximately 25 nm, and was made of TaSi. The second mask layer had a thickness of approximately 10 nm, and was made of Ni. The resin layer had a thickness of approximately 100 nm, and was made of a negative type resist (NEB22A: product of Sumitomo Chemical Co., Ltd.).
In the recording layer processing step (S110), the etching rate was made substantially constant over the entire recording area Ar.
In the filling material deposition step (S112), the filling material 30 was deposited to a thickness of approximately 20 nm such that the deposition rate was substantially constant over the entire recording area Ar. The deposition conditions were set as follows.
Deposition power (electrical power supplied to a target): 500 W.
Chamber pressure: 0.3 Pa.
Bias power (electrical power supplied to a workpiece): 290 W.
In FIG. 17, a curve labeled with a symbol A shows the relationship between the deposition rate of the filling material 30 and the position in the radial direction Dr on a workpiece obtained by depositing the filling material 30 on another sample having a flat surface under the same conditions as the above deposition conditions. The deposition rate represented by the curve labeled with the symbol A was normalized by setting the arithmetic mean value of the data (the measurement values of the deposition rate) corresponding to thirteen points plotted on the curve to 1.
Furthermore, a coating material composed of Mo was further deposited to approximately 3 nm on the filling material 30 by means of a sputtering method such that the deposition rate was substantially constant irrespective of the position in the radial direction Dr. The deposition conditions were set as follows.
Deposition power (electrical power supplied to a target): 500 W.
Chamber pressure: 0.3 Pa.
Bias power (electrical power supplied to a workpiece): 0 W.
In the flattening step (S114), Ar was used as the processing gas. The etching conditions were set as follows.
Incident angle: 2°.
Beam voltage: 700 V.
Beam current: 1100 mA.
Suppressor voltage: 400 V.
In FIG. 17, a curve labeled with a symbol B shows the relationship between the etching rate and the position in the radial direction Dr on a workpiece obtained by etching another sample having a flat surface under the same conditions as the above etching conditions. The etching rate represented by the curve labeled with the symbol B was normalized by setting the arithmetic mean value of the data (the measurement values of the etching rate) corresponding to thirteen points plotted on the curve to 1. Subsequently, the protection layer 34 and the lubrication layer 36 were deposited, whereby the magnetic recording medium 12 was manufactured.
The height of each step between the portion over the recording element 26 and the portion over the filling material 30 on the surface 32 of the obtained magnetic recording medium 12 was measured. Specifically, by means of an AFM (atomic force microscope), the height of the step on the surface 32 was measured at three positions away from the center by 16 mm, 19.5 mm, and 23 mm in the radial direction Dr in the data area. The measurement results are shown in Table 1.









TABLE 1









Radial position











16 mm
19.5 mm
23 mm














Step height (Working Example)
0.3 nm
0.6 nm
0.9 nm


Step height (Comparative Example)
0.3 nm
0.3 nm
0.3 nm









In addition to this, the S/N ratio of a reproduction signal was measured at three positions away from the center by 16 mm, 19.5 mm, and 23 mm in the radial direction Dr in the data area. These positions correspond to the measurement positions for the height of the steps. Note that the rotation speed of the magnetic recording medium 12 was 5,400 rpm. The recording and reproduction were performed using a signal of a frequency of 70 MHz. The measurement results are shown by a curve labeled with a symbol X in FIG. 18.
COMPARATIVE EXAMPLE
In contrast to Working Example, the etching conditions in the flattening step (S114) were set as listed below. A magnetic recording medium was manufactured under the same other conditions as those in Working Example.
Incident angle: 2°.
Beam voltage: 700 V.
Beam current: 1100 mA.
Suppressor voltage: 520 V.
In FIG. 17, a curve labeled with a symbol C shows the relationship between the etching rate and the position in the radial direction Dr on a workpiece obtained by etching another sample having a flat surface under the same conditions as the above etching conditions. The etching rate represented by the curve labeled with the symbol C was normalized by setting the arithmetic mean value of the data (the measurement values of the etching rate) corresponding to thirteen points plotted on the curve to 1.
By means of an AFM (atomic force microscope), the height of the step between the portion over the recording element and the portion over the filling material on the surface of the obtained magnetic recording medium was measured at three positions away from the center by 16 mm, 19.5 mm, and 23 mm in the radial direction Dr in the data area, as in Working Example. The measurement results are also shown in Table 1.
In addition, the S/N ratio of a reproduction signal was measured at three positions away from the center by 16 mm, 19.5 mm, and 23 mm in the radial direction Dr in the data area, as in Working Example. These positions correspond to the measurement positions for the height of the steps. The measurement results are shown by a curve labeled with a symbol Y in FIG. 18.
As shown in FIG. 18, the tendency of the S/N ratio to decrease in an area near the outer periphery of the magnetic recording medium as the measurement position moves toward the outer side in the radial direction Dr was found in Comparative Example. This may be because, in Comparative Example, the flying height of the magnetic head was larger in the area near the outer periphery of the magnetic recording medium since the height of the step between the portion over the recording element and the portion over the filling material was constant on the surface irrespective of the position in the radial direction Dr, as shown in Table 1.
On the other hand, in Working Example, the S/N ratio was substantially constant irrespective of the position in the radial direction Dr. This may be because of the following reason. As shown in Table 1, in Working Example, since the height of the steps on the surface 32 was larger as the position on the magnetic recording medium is nearer to the outer side in the radial direction Dr, an increase in the flying height of the magnetic head 14 was suppressed sufficiently in the outer area Ao. Therefore, the flying height of the magnetic head 14 in the outer area Ao was maintained to a level similar to that in other areas.

## Claims

1. A magnetic recording medium comprising:
a substrate; and
a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer,
wherein surface steps are formed in an annular outer area including a radially outermost portion of a recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and
wherein the surface steps are formed such that the recording area is sectioned into an annular area adjoining the outer area and the outer area where height of the surface steps therein is larger than that in the annular area.

2. The magnetic recording medium according to claim 1, wherein the surface steps are formed such that the recording area is sectioned into the outer area and the annular area having a radial width that is the same as a radial width of the outer area.

3. The magnetic recording medium according to claim 1, wherein the surface steps are formed such that the recording area is sectioned into the outer area and the annular area so as to be bisected at a radial midpoint thereof.

4. The magnetic recording medium according to claim 1, further comprising a filling material filled into the concave portions, and
wherein, at least in the outer area, an upper surface of the filling material is recessed toward the substrate to a level below an upper surface of the recording element, so that each step between the upper surface of the filling material and the upper surface of the recording element is reflected in a corresponding surface step of the surface steps.

5. The magnetic recording medium according to claim 1, wherein the height of the surface steps increases in a radially outward direction.

6. A magnetic recording and reproducing apparatus, comprising:
the magnetic recording medium according to claim 1; and
a flying type magnetic head which is disposed so as to be capable of flying above a surface of the magnetic recording medium in order to record/reproduce data on/from the magnetic recording medium.

7. A magnetic recording medium comprising:
a substrate; and
a recording layer formed in a predetermined concavo-convex pattern over the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer,
wherein surface steps are formed in an annular outer area including a radially outermost portion of a recording area and in an inner area including a radially innermost portion of the recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and
wherein the surface steps are formed such that the recording area is sectioned into: an annular intermediate area disposed between the outer area and the inner area so as to be adjoining the outer area; the outer area where height of the surface steps therein is larger than that in the intermediate area; and the inner area where height of the surface steps therein is larger than that in the intermediate area.

8. The magnetic recording medium according to claim 7, wherein the surface steps are formed such that the recording area is sectioned into the outer area, the intermediate area having a radial width that is the same as a radial width of the outer area, and the inner area having a radial width that is the same as the radial width of the outer area.

9. The magnetic recording medium according to claim 7, wherein the surface steps are formed such that the recording area is trisected radially so as to be sectioned into the outer area, the intermediate area, and the inner area.

10. The magnetic recording medium according to claim 7, further comprising a filling material filled into the concave portions, and
wherein, at least in the outer area and in the inner area, an upper surface of the filling material is recessed toward the substrate to a level below an upper surface of the recording element, so that each step between the upper surface of the filling material and the upper surface of the recording element is reflected in a corresponding surface step of the surface steps.

11. A magnetic recording medium comprising:
a substrate; and
a recording layer formed in a predetermined concavo-convex pattern on the substrate, the recording layer including recording elements each formed as a convex portion of the recording layer,
wherein surface step are formed in a recording area, each surface step being formed in such a manner that a portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and
wherein the surface steps are formed such that an area including at least a radially outermost portion of the recording area is provided where height of the surface steps increases in a radially outward direction.

12. A magnetic recording and reproducing apparatus, comprising:
the magnetic recording medium according to claim 7; and
a flying type magnetic head which is disposed so as to be capable of flying above a surface of the magnetic recording medium in order to record/reproduce data on/from the magnetic recording medium.

13. A magnetic recording and reproducing apparatus, comprising:
the magnetic recording medium according to claim 11; and
a flying type magnetic head which is disposed so as to be capable of flying above a surface of the magnetic recording medium in order to record/reproduce data on/from the magnetic recording medium.

14. A method for manufacturing a magnetic recording medium, comprising at least one of the following steps:
a recording layer processing step of forming recording elements as convex portions by irradiating a disk-shaped workpiece with a processing gas by means of one of an ion beam etching in which a divergence state of an ion beam is controlled and reactive ion etching in which a bias voltage to be applied to the workpiece is controlled, the workpiece including a continuous recording layer and a mask layer formed in a concavo-convex pattern corresponding to a predetermined concavo-convex pattern over the recording layer, the workpiece being irradiated with the processing gas such that an etching rate is larger in an annular outer area including a radially outermost portion of a recording area than in an annular area adjoining the outer area, whereby the recording layer is processed into the predetermined concavo-convex pattern;
a filling material deposition step of depositing a filling material over a workpiece by means of bias sputtering in which a bias voltage to be applied to the workpiece is controlled, the workpiece including a recording elements formed as convex portions of the recording layer formed in a predetermined concavo-convex pattern over a substrate, the filling material being deposited such that a deposition rate is lower in an annular outer area including a radially outermost portion of a recording area than in an annular area adjoining the outer area; and
a flattening step of removing an excess portion of a filling material above the recording elements by irradiating a workpiece with a processing gas by means of one of ion beam etching in which a divergence state of an ion beam is controlled and reactive ion etching in which a bias voltage to be applied to the workpiece is controlled, the workpiece including the recording elements which are formed as convex portions of a recording layer formed in a predetermined concavo-convex pattern over a substrate and the filling material which is deposited over the recording elements and which fills into each concave portion between the recording elements, the workpiece being irradiated with the processing gas such that an etching rate is larger in an annular outer area including a radially outermost portion of a recording area than in an annular area adjoining the outer area,
wherein surface steps are formed in the outer area, each surface step being formed in such a manner that portion over a concave portion between the recording elements is recessed toward the substrate to a level below a portion over the recording element, and the surface steps are formed such that the recording area is sectioned into the annular area adjoining the outer area and the outer area where height of the surface steps therein is larger than that in the annular area.