Summary description of Short-Term Incentive Program



 Exhibit 10.2 

Cymer Inc. 

Short-Term Incentive Program 

Summary Description 

Establishment: The following is a summary of the terms of the Short-Term Incentive Program (“STIP”) approved by the Compensation
Committee of Cymer’s Board of Directors. 
 Eligibility: Generally, all supervisory and management level employees and
certain individual contributor employees are eligible to participate in the STIP, unless otherwise determined by the Compensation Committee. The Compensation Committee determines in its discretion which Cymer employees shall be participants.
Participants must be employed on the payout date to be eligible to receive a bonus payment under the STIP. 
 Plan Funding: The STIP
bonus pool is the aggregate of the bonus targets for all participants and is subject to increase or decrease based upon Cymer’s level of achievement against the performance metrics approved by the Compensation Committee for the performance
period, which is typically the fiscal year. 
 Individual Bonus Targets: Individual employee bonus targets are expressed as a percentage
of annual base salary and are based upon the participant’s employment level. All bonuses under the STIP are based on the participant’s actual earned base salary for Cymer’s fiscal year, which does not include bonuses,
commissions, overtime, shift premiums, equity compensation or any other form of additional compensation. The Compensation Committee approves all STIP bonus targets that are intended to be exempt from application of the deduction limitations of
Section 162(m) of the Internal Revenue Code (“Section 162(m)”). The Compensation Committee has the authority to approve supplemental awards under the STIP to selected participants. 

Performance-Based Compensation: The Compensation Committee determines what portion of the STIP bonus for each employment level is based on
corporate performance and what portion is based on the achievement of functional goals or individual goals. Any portion of an STIP bonus that is intended to comply with the requirements for the performance-based compensation exemption to the
Section 162(m) deduction limits will be subject to the achievement of corporate performance or functional goals in accordance with the terms of the Equity Plan. 

Approval and Process: Cymer’s actual performance against the corporate performance measures for the applicable performance period is approved
and certified in writing by the Compensation Committee. All determinations of performance against functional or individual goals are subject to approval by executive management and/or the Compensation Committee; provided that for any portion of the
STIP bonus that is intended to be exempt from the Section 162(m) deduction limits, the performance against actual goals will be approved and certified in writing by the Compensation Committee. The Compensation Committee has the authority to
alter any portion of the bonus payable to any participant under the STIP; provided, however, that for STIP bonuses that are intended to comply with the requirements for the performance-based compensation exemption to the Section 162(m)
deduction limits, the Compensation Committee only has the authority to reduce, and not to increase, such awards. 
 Annual Maximum: The
aggregate STIP bonus pool and awards under Cymer’s Profit Sharing Plan for a fiscal year together may not exceed 18% of such fiscal year’s adjusted EBITDA (earnings before interest, taxes, depreciation, amortization, stock-based
compensation expense and cash bonus expenses). If the aggregate annual amount under both plans exceeds the cap, the STIP bonus pool for such fiscal year will be adjusted downward proportional to 18% of Cymer’s adjusted EBITDA for the fiscal
year. 
 Disclaimer: Cymer reserves the right to modify the STIP at any time. Cymer also retains the right to award additional incentive
compensation outside the STIP.