Entegris, Inc. 2010 RSU Unit Award Agreement



 Exhibit 10.1 

ENTEGRIS, INC. 

2010 RSU Unit Award Agreement 

In consideration of services rendered by Employee to Entegris, Inc. (the “Company”) the undersigned Employee:
(i) acknowledges that Employee has received an equity incentive award (the “Award”) under the Entegris, Inc. 2001 Equity Incentive Plan or the Entegris, Inc. 2010 Stock Plan (in either case, the “Plan”), consisting of
restricted stock units with respect to the Company’s Common Stock $0.01 par value (“Stock”) subject to the terms set forth under Article I below; (ii) further acknowledges receipt of a copy of the Plan as in effect on the
effective date hereof; and (iii) agrees with the Company that, to the extent that this Award is made under the 2010 Stock Plan, it is contingent on approval of the 2010 Stock Plan by the Company’s stockholders and that the Award is
subject to the terms of the Plan and to the following terms and conditions: 
 ARTICLE I – RSU AWARD 

  

	1.1.	Effective Date. This Agreement shall take effect as of January 4, 2010, which is the date of grant of the Award. 


 

	1.2.	Restricted Stock Units Subject to Award. The Award consists of that number of restricted stock units (the “RSU”) with respect to the Stock that
has been approved for the Award to Employee by the Plan Administrator. Each RSU is equivalent to one share of the Stock. The undersigned’s rights to the RSU are subject to the restrictions described in this Agreement and in the Plan (which is
incorporated herein by reference with the same effect as if set forth herein in full) in addition to such other restrictions, if any, as may be imposed by law. 


 

	1.3.	Meaning of Certain Terms. The term “vest” as used herein with respect to any RSU means the lapsing of the restrictions described
herein with respect to such RSU. 

  

	1.4.	Nontransferability of RSUs. The RSU acquired by the undersigned pursuant to this Agreement shall not be sold, transferred, pledged, assigned
or otherwise encumbered or disposed of except as provided below and in the Plan. 

  

	1.5.	Forfeiture Risk. If the undersigned ceases to be employed by the Company and/or its subsidiaries for any reason any then outstanding and
unvested RSU acquired by the undersigned hereunder shall be automatically and immediately forfeited. The undersigned hereby: (i) appoints the Company as the attorney-in-fact of the undersigned to take such actions as may be necessary or
appropriate to effectuate the cancellation of a forfeited RSU. 

  

	1.6.	Vesting of RSUs. The RSU acquired hereunder shall vest in accordance with the provisions of this Article I, Section 1.6 and applicable
provisions of the Plan, as follows: 

  

	 	•	 	 25% of the RSUs vest on and after February 19, 2011; 



 

	 	•	 	 an additional 25% of the RSUs vest on and after February 19, 2012; 



 

	 	•	 	 an additional 25% of the RSUs vest on and after February 19, 2013; and 



 

	 	•	 	 the final 25% of the RSUs vest on and after February 19, 2014. 



Notwithstanding the foregoing, no RSU shall vest on any vesting date specified above unless: (A) the undersigned is then, and
since the date of award has continuously been, employed by the Company or its subsidiaries; and (B) the undersigned has fulfilled the obligations specified in Section 1.9 below. Upon vesting each RSU shall entitle Employee to
receive one share of Stock. 








	1.7.	No Dividends, etc. The undersigned shall NOT be entitled: (i) to receive any dividends or other
distributions paid with respect to the Stock to which the RSU relates, or (ii) to vote any Stock with respect to which the RSU relates. 

  

	1.8.	Sale of Vested Shares. The undersigned understands that Employee will be free to sell any Stock with respect to which the RSU relates once
the RSU has vested, subject to (i) satisfaction of any applicable tax withholding requirements with respect to the vesting of such RSU; (ii) the completion of any administrative steps (for example, but without limitation, the transfer of
certificates) that the Company may reasonably impose; and (iii) applicable requirements of federal and state securities laws. 

  

	1.9.	Certain Tax Matters. The undersigned expressly acknowledges that the award or vesting of the RSU acquired hereunder, may give rise to
“wages” subject to withholding. The undersigned expressly acknowledges and agrees that Employee’s rights hereunder are subject to Employee promptly paying to the Company in cash (or by such other means as may be acceptable to the
Company in its discretion, including, if the Administrator so determines, by the delivery of previously acquired Stock or shares of Stock acquired hereunder in accordance with the Plan or by the withholding of amounts from any payment hereunder) all
taxes required to be withheld in connection with such award, vesting or payment. 

 ARTICLE II – GENERAL
PROVISIONS 
  

	2.1.	Definitions. Except as otherwise expressly provided, all terms used herein shall have the same meaning as in the Plan. The term “Administrator”
means the Management Development & Compensation Committee of the Company’s Board of Directors. 

  

	2.2.	Mergers, etc. In the event of any of (i) a consolidation or merger in which the Company is not the surviving corporation or which results in
the acquisition of all or substantially all of the Company’s then outstanding common stock by a single person or entity or by a group of persons and/or entities acting in concert, (ii) a sale or transfer of all or substantially all
the Company’s assets, or (iii) a dissolution or liquidation of the Company (a “Covered Transaction”), all outstanding Awards pursuant to Article I above shall vest and if relevant become exercisable and all deferrals,
other than deferrals of amounts that are neither measured by reference to nor payable in shares of Stock, shall be accelerated, immediately prior to the Covered Transaction and upon consummation of such Covered Transaction all Awards then
outstanding and requiring exercise shall be forfeited unless assumed by an acquiring or surviving entity or its affiliate as provided in the following sentence. In the event of a Covered Transaction, unless otherwise determined by the Administrator,
all Awards that are payable in shares of Stock and that have not been exercised, exchanged or converted, as applicable, shall be converted into and represent the right to receive the consideration to be paid in such Covered Transaction for each
share of Stock into which such Award is exercisable, exchangeable or convertible, less the applicable exercise price or purchase price for such Award. In connection with any Covered Transaction in which there is an acquiring or surviving entity, the
Administrator may provide for substitute or replacement Awards from, or the assumption of Awards by, the acquiring or surviving entity or its affiliates, any such substitution, replacement or assumption to be on such terms as the Administrator
determines, provided that no such replacement or substitution shall diminish in any way the acceleration of Awards provided for in this section. 

  

	2.3.	 Retirement, etc. If Employee ceases to be an employee due to retirement with the consent of the Administrator, Employee will be
entitled to immediate Vesting of all unvested RSUs awarded pursuant to this Agreement. As used herein the term “retirement with the consent of the Administrator” means that Employee’s retirement must be with the consent of the
Administrator, which consent may be granted or withheld in the discretion of the Administrator. In the event 



 

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that Employee ceases to be an employee under circumstances that would otherwise qualify for retirement but the consent of the Administrator has not been granted, then Employee shall not be
entitled to the benefits of this Section 2.3. 
  

	2.4.	No Understandings as to Employment. The undersigned Employee further expressly acknowledges that nothing in the Plan or any modification
thereto, in the Award or in this Agreement shall constitute or be evidence of any understanding, express or implied, on the part of the Company to employ the Employee for any period or with respect to the terms of the undersigned’s employment
or to give rise to any right to remain in the service of the Company or of any subsidiary or affiliate of the Company, and the undersigned shall remain subject to discharge to the same extent as if the Plan had never been adopted or the Award had
never been made. 

  

	2.5.	Data Protection Waiver. Employee understands and agrees that in order to process and administer the Award and the Plan, the Company and the Administrator
may process personal data and/or sensitive personal information concerning the Employee. Such data and information includes, but is not limited to, the information provided in the Award grant package and any changes thereto, other appropriate
personal and financial data about Employee, and information about Employee’s participation in the Plan and transactions under the Plan from time to time. Employee hereby gives his or her explicit consent to the Company and the Administrator to
process any such personal data and/or sensitive personal information. Employee also hereby gives his or her explicit consent to the Company and the Administrator to transfer any such personal data and/or sensitive personal data outside the country,
in which Employee works or is employed, and to the United States. The legal persons granted access to such Employee personal data are intended to include the Company, the Administrator, the outside plan administrator as selected by the Company from
time to time, and any other compensation consultant or person that the Company or the Administrator may deem appropriate for the administration of the Plan or the Award. Employee has been informed of his or her right of access and correction to
Employee’s personal data by contacting the Company. Employee also understands that the transfer of the information outlined herein is important to the administration of the Award and the Plan and failure to consent to the transmission of such
information may limit or prohibit Employee’s participation under the Plan and/or void the Award. 

  

	2.6.	Savings Clause. In the event that Employee is employed in a jurisdiction where the performance of any term or provision of this Agreement by the Company:
(i) will result in a breach or violation of any statute, law, ordinance, regulation, rule, judgment, decree, order or statement of public policy of any court or governmental agency, board, bureau, body, department or authority, or
(ii) will result in the creation or imposition of any penalty, charge, restriction, or material adverse effect upon the Company, then any such term or provision shall be null, void and of no effect. 


 

	2.7.	Amendment. This Agreement may be amended only by an instrument in writing executed and delivered by the Employee and the Company.


  

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