# Patent

## Title
Antireflective film and exposure method

## Abstract

An antireflective film is provided between a resist layer and a silicon oxide layer formed on a surface of a silicon substrate, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93 to 1.2. Assuming that the complex refractive indexes of upper and lower layers constituting the antireflective film are N1 (=n1−k1i) and N2 (=n2−k2i), respectively, and the thicknesses of both layers are d1 and d2, when a predetermined combination of values of [n10, k10, d10, n20, k20, d20] is selected, n1, k1, d1, n2, k2, and d2 satisfy the relational expression

{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1.

## Background
CROSS REFERENCES TO RELATED APPLICATIONS
The present invention contains subject matter related to Japanese Patent Application JP 2005-257626 filed in the Japanese Patent Office on Sep. 6, 2005 and Japanese Patent Application JP 2006-092240 filed in the Japanese Patent Office on Feb. 15, 2006, the entire contents of which are incorporated herein by reference.
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an antireflective film used for exposure of a resist layer in a process for manufacturing a semiconductor device, and an exposure method using the antireflective film.
2. Description of the Related Art
In the field of semiconductor devices, it has been urgent to establish a new process technique permitting processing of submicron patterns of, for example, 65 nm or less. A so-called photolithographic technique may be required for processing submicron patterns, and an argon-fluoride (ArF) excimer laser at a wavelength of 193 nm is currently used as an exposure light source in order to improve optical resolution and comply with submicron processing by shortening the wavelength of exposure light (illuminating light).
A silicon semiconductor substrate is patterned using a photosensitive resist layer which is formed by applying on a surface of the silicon semiconductor substrate coated with an oxide film. However, when exposure light (illuminating light) has high reflectance at an interface between the resist layer and the silicon oxide film used as an underlying layer, a stationary wave is significantly induced in the resist layer. As a result, the sides of the resist layer patterned by development have irregularity according to the shape of the stationary wave, thereby causing the problem of failing to form a satisfactory rectangular pattern in the resist layer. The pattern formed in the resist layer may be referred to as a “resist pattern”. For example, when a resist layer having a refractive index of 1.70 is provided on a silicon oxide film of 100 nm in thickness formed on a surface of a silicon semiconductor substrate, the reflectance of exposure light at a wavelength of 193 nm is as high as about 70% in vertical incidence of the exposure light.
In order to resolve the above-mentioned problem, in a photolithographic technique using usual exposure light at a wavelength of 193 nm, a single-layer antireflective film is formed between a silicon semiconductor substrate and a resist layer. For example, when a resist layer having a refractive index of 1.70 is formed on an antireflective film having a thickness of 100 nm and a complex refractive index N0 (=no−k0i wherein no=1.75 and k0=0.30), which is formed on a silicon oxide film of 100 nm in thickness formed on a surface of a silicon semiconductor substrate, the reflectance at the interface between the resist layer and the antireflective film is greatly decreased to about 1% in vertical incidence of exposure light.
SUMMARY OF THE INVENTION
The limiting resolution of a photolithographic technique is about 0.3 times the wavelength of exposure light. Therefore, in a photolithographic technique using an ArF excimer laser at a wavelength of 193 nm as an exposure light source, the limiting resolution is about 60 nm.
As a technique for forming a finer pattern of less than about 60 nm on a silicon semiconductor substrate, there has been advanced the development of an immersion lithographic technique in which a space between an exposure system (illumination system) and a resist layer is filled with a medium (e.g., an aqueous immersion light) having a higher refractive index than that of air to realize higher resolution.
Exposure through an immersion liquid is capable of achieving higher resolving performance because the effective wavelength of exposure light is a value obtained by dividing the wavelength of exposure light in a vacuum by the refractive index of the immersion liquid. For example, in the use of an ArF excimer laser at a wavelength of 193 nm as a exposure light source and water (refractive index of 1.44 at 193 nm) as the immersion liquid, the effective wavelength is about 134 nm, and the limiting resolution is 0.3 times the effective wavelength, i.e., about 40 nm. In other words, the immersion lithographic technique using water is capable of forming a micro pattern of less than about 60 nm on a silicon semiconductor substrate.
A focus tolerance (DOF) in exposure is given by the following equation:

DOF=nLiq·K2·λ/NA2 

wherein nLiq is the refractive index of the immersion liquid, K2 is a constant depending on the process, λ is the wavelength of exposure light (illuminating light) in a vacuum, and NA is the numerical aperture of an exposure system (illumination system).

Therefore, when the numerical aperture NA is constant, the focus tolerance DOF in immersion lithography is nLiq times as large as in usual lithography by exposure in the air. Namely, immersion lithography using water as the immersion liquid has a focus tolerance DOF of 1.44 times and thus permits the construction of a mass production process with a higher tolerance.
However, such an immersion lithographic technique has the problem that a general single-layer antireflective film does not effectively function.
Exposure light is transmitted through an incident medium, incident on a resist layer, and further incident on an antireflective film. The exposure light satisfies the equation below in which θin is the angle of incidence of the exposure light from the incident medium to the resist layer, nin is the refractive index of the incident medium, θIF is the angle of incidence of the exposure light from the resist layer to the silicon semiconductor substrate or the antireflective film, and nRes is the refractive index of a resist material constituting the resist layer. Since, in a usual photolithographic technique, the incident medium is air, nin=1, while in an immersion lithographic technique using, for example, water as the immersion liquid, nin=1.44 because the incident medium is water.

NA=nin·sin (θin)=nRes·sin (θIF)

This equation indicates that at constant θin, the numerical aperture NA in the immersion lithographic technique is nLiq times as large as in a general photolithographic technique (θin=1.0). That is, when the refractive index nRes of the resist material constituting the resist layer is constant, sin(θIF) is increased. This means that in the immersion lithographic technique, θIF is increased. In other words, in the immersion lithographic technique, the exposure light is incident more obliquely, as compared with a general photolithographic technique.
On the other hand, the use of a single-layer antireflective film may sufficiently decrease the reflectance of exposure light in vertical incidence but has the problem of failing to sufficiently decrease the reflectance in oblique incidence.
When an antireflective film having a thickness of 100 nm and a complex refractive index N0 in which n0 and k0 values are 1.75 and 0.30, respectively is formed on a silicon oxide film of 100 nm in thickness formed on a surface of a silicon semiconductor substrate, and a resist layer having a refractive index of 1.70 is formed on the antireflective film, the reflectance at the interface between the resist layer and the antireflective film is greatly decreased to about 1% in vertical incidence of the exposure light (i.e., incidence angle θIF=0°). However, the reflectance of s waves is greatly increased to about 6% at an incidence angle θIF of about 65°.
On the other hand, the maximum permissible value of reflectance at the interface between a resist layer and a silicon oxide film formed on a surface of a silicon semiconductor substrate yearly decreases with development of micronization. In particular, the maximum permissible value of reflectance in the micron generation to which the immersion lithographic technique is applied is as very small as 0.4% in a line-and-space pattern (Boontarika, Ozawa, Someya, Extended Abstracts of the 65th meeting of the Japan Society of Applied Physics, 2p-R-9).
In the 45-nm generation to which immersion lithography may be applied, the size of contact holes to be formed is assumed to be about 90 nm (pitch 140 nm). FIG. 1 shows the results of computation, under this condition, of the reflectance dependency of variation in the diameter of contact holes relative to the shape of a stationary wave using optical profile computing software Prolith Ver. 8.1 manufactured by KLA-Tencor Corp. on the assumption that the numerical aperture NA was 1.05 corresponding to immersion lithography.
It is desirable to suppress the variation in diameter of 90 nm contact holes to 5 nm or less. FIG. 1 indicates that the reflectance is preferably controlled to about 0.4% or less for controlling the variation to 5 nm or less.
Namely, in both a line-and-space pattern and a contact hole pattern, the reflectance is preferably suppressed to 0.4% or less.
However, in the immersion lithographic technique, exposure light may be incident obliquely on a single-layer antireflective film used in a general photolithographic technique, thereby failing to sufficiently decrease reflectance. Since the reflectance is not sufficiently decreased, a stationary wave significantly appears in the resist layer, and thus it may be impossible to resolve the problem of failing to form a satisfactory rectangular pattern in the resist layer.
Accordingly, it is desirable to provide an antireflective film capable of sufficiently decreasing the reflectance at an interface between a resist layer and a silicon oxide film formed on a surface of a silicon semiconductor substrate even in more oblique incidence of exposure light (illuminating light) on the resist layer in a photolithographic technique for achieving a higher focus tolerance by increasing the numerical aperture of an exposure system, for example, in an immersion lithographic technique, and also provide an exposure method using the antireflective film.
In accordance with a first embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93≦NA≦1.0. In accordance with the first embodiment of the invention, an exposure method is used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93≦NA≦1.0.
The antireflective film or the antireflective film used in the exposure method according to the first embodiment of the invention includes an upper layer having a complex refractive index N1 and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the following equations:

N1=n1−k1i 

N2=n2−k2i 

Assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm), when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the following relational expression:

{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1

However, a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20. In the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m=”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”; in the line of “When d1≧d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m=” each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d20−d2m”.












0.93 ≦ NA ≦ 1.0


2 ≦ T ≦ 15







1/35














Case
1-01
1-02
1-03
1-04
1-05







n10
2.0730
1.8547
1.8612
1.8596
1.7706



k10
0.1156
0.1676
0.1279
0.0953
0.0916



d10 (nm)
23.93
29.84
20.21
19.98
91.02



n20
2.6749
2.1886
1.8193
1.8569
1.9614



k20
1.5696
0.6118
0.4029
0.3274
0.4555



d20 (nm)
9.886
59.76
139.99
190.30
69.22



When n1 ≧ n10, n1m =
0.0910
0.0882
0.0964
0.0950
0.0763



When n1 < n10, n1m =
0.0872
0.0704
0.0762
0.0765
0.0467



When k1 ≧ k10, k1m =
0.0819
0.0750
0.0869
0.0875
0.0772



When k1 < k10, k1m =
0.0960
0.0840
0.0907
0.0915
0.0546



When d1 ≧ d10, d1m (nm) =
4.108
7.919
8.786
9.587
17.28



When d1 < d10, d1m (nm) =
3.280
5.652
6.074
6.698
8.396



When n2 ≧ n20, n2m =
0.2209
0.1796
0.1515
0.1552
0.1445



When n2 < n20, n2m =
0.2126
0.1920
0.1780
0.1777
0.1565



When k2 ≧ k20, k2m =
0.2324
0.2171
0.1921
0.1983
0.1809



When k2 < k20, k2m =
0.1960
0.1512
0.1220
0.1107
0.1235



When d2 ≧ d20, d2m (nm) =
1.715
13.99
∞
∞
9.907



When d2 < d20, d2m (nm) =
1.606
9.166
63.12
76.29
9.171











0.93 < NA ≦ 1.0


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.7660
1.7540
1.7206
1.7312
1.7318


k10
0.0861
0.0810
0.0766
0.0743
0.0746


d10 (nm)
89.67
89.26
163.7
158.4
156.0


n20
1.8683
1.7976
2.0073
1.9328
1.8226


k20
0.3142
0.2441
0.9100
0.4029
0.2736


d20 (nm)
129.4
193.6
15.11
69.39
132.3


When n1 ≧ n10, n1m =
0.0725061
0.0712122
0.0876196
0.0743347
0.0699963


When n1 < n10, n1m =
0.0454077
0.0429834
0.0318030
0.0375427
0.0339148


When k1 ≧ k10, k1m =
0.0772620
0.0743579
0.0711646
0.0773767
0.0733899


When k1 < k10, k1m =
0.0551843
0.0575049
0.0410327
0.0412244
0.0408972


When d1 ≧ d10, d1m (nm) =
18.782
23.348
40.469
35.317
38.161


When d1 < d10, d1m (nm) =
8.456
8.860
9.958
10.432
9.052


When n2 ≧ n20, n2m =
0.1498401
0.1584961
0.1682336
0.1348816
0.1376196


When n2 < n20, n2m =
0.1510144
0.1511060
0.2304688
0.1582874
0.1516028


When k2 ≧ k20, k2m =
0.2049341
0.2252979
0.1710974
0.1537598
0.1868274


When k2 < k20, k2m =
0.0962390
0.0820935
0.1771240
0.1169067
0.0881860


When d2 ≧ d20, d2m (nm) =
∞
∞
3.180
8.501
∞


When d2 < d20, d2m (nm) =
17.963
68.303
3.157
8.798
14.016





















0.93 ≦ NA ≦ 1.0


2 ≦ T ≦ 15







2/35












Case
1-11
1-12
1-13
1-14
1-15





n10
1.7235310
1.7093992
1.7192548
1.7183512
1.7097773


k10
0.0712769
0.0595462
0.0668813
0.0690717
0.0638868


d10 (nm)
155.759
237.275
223.222
220.755
221.916


n20
1.7500411
5.0249130
1.9244861
1.7884626
1.7175992


k20
0.2147794
2.4786958
0.3767470
0.2530536
0.2031308


d20 (nm)
197.972
1.776
68.925
134.430
199.649


When n1 ≧ n10, n1m =
0.0687000
0.1022864
0.0758325
0.0727087
0.0697119


When n1 < n10, n1m =
0.0322229
0.0397070
0.0389722
0.0346118
0.0564209


When k1 ≧ k10, k1m =
0.0698975
0.0795508
0.0762329
0.0700171
0.0722595


When k1 < k10, k1m =
0.0415723
0.0393457
0.0338635
0.0308765
0.0321350


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
9.616
78.998
12.815
10.464
72.402


When n2 ≧ n20, n2m =
0.1855957
0.5207629
0.1343335
0.1358569
0.2333704


When n2 < n20, n2m =
0.1501331
0.6523560
0.1703552
0.1672083
0.1693542


When k2 ≧ k20, k2m =
0.2047339
0.5424048
0.1363831
0.1710950
0.1947412


When k2 < k20, k2m =
0.0758948
0.5487781
0.1192529
0.0892212
0.0778406


When d2 ≧ d20, d2m (nm) =
∞
0.325
8.509
∞
∞


When d2 < d20, d2m (nm) =
29.087
0.351
7.511
11.451
31.610










0.93 ≦ NA ≦ 1.0


15 < T ≦ 25












Case
2-01
2-02
2-03
2-04
2-05





n10
1.8890717
1.8040788
1.8569330
1.8246631
1.8713633


k10
0.2231211
0.2224671
0.1887211
0.1852786
0.1359350


d10 (nm)
31.297
38.783
31.358
29.866
20.765


n20
2.2536461
3.4285504
2.3482559
2.0267942
1.8449284


k20
1.9138327
0.7115044
0.7139401
0.6589875
0.4410677


d20 (nm)
8.426
30.090
49.395
61.419
129.533


When n1 ≧ n10, n1m =
0.0874390
0.0895227
0.0867871
0.0862964
0.0944556


When n1 < n10, n1m =
0.0734485
0.0679480
0.0711365
0.0665735
0.0748743


When k1 ≧ k10, k1m =
0.0762256
0.0781921
0.0754639
0.0735010
0.0845789


When k1 < k10, k1m =
0.0847852
0.0785486
0.0835657
0.0812061
0.0905493


When d1 ≧ d10, d1m (nm) =
5.734
7.070
7.156
8.156
8.180


When d1 < d10, d1m (nm) =
4.509
5.331
5.325
5.713
5.655


When n2 ≧ n20, n2m =
0.3151672
0.1904419
0.1878015
0.1893945
0.1561475


When n2 < n20, n2m =
0.3095313
0.2189575
0.2044202
0.1933459
0.1801416


When k2 ≧ k20, k2m =
0.3390149
0.2463513
0.2322900
0.2311047
0.2037732


When k2 < k20, k2m =
0.3041187
0.1774133
0.1676416
0.1568945
0.1265381


When d2 ≧ d20, d2m (nm) =
1.987
2.182
8.431
∞
∞


When d2 < d20, d2m (nm) =
1.727
2.068
6.571
10.427
56.577





















0.93 ≦ NA ≦ 1.0


15 < T ≦ 25







3/35












Case
2-06
2-07
2-08
2-09
2-10





n10
1.8537764
1.8773918
1.7913209
1.7961812
1.7719309


k10
0.1095380
0.0811836
0.1069315
0.0967122
0.0907051


d10 (nm)
19.190
15.072
93.104
91.592
89.644


n20
1.8083352
1.7885130
2.1120296
2.2985234
1.8982310


k20
0.3385915
0.2812935
1.5705728
0.5621108
0.3437292


d20 (nm)
190.096
250.952
8.709
49.876
119.550


When n1 ≧ n10, n1m =
0.0970691
0.1116003
0.0785193
0.0746387
0.0710254


When n1 < n10, n1m =
0.0765894
0.0899463
0.0387744
0.0446472
0.0434424


When k1 ≧ k10, k1m =
0.0900769
0.1037891
0.0704041
0.0743225
0.0753088


When k1 < k10, k1m =
0.0922754
0.0811836
0.0518481
0.0540869
0.0544885


When d1 ≧ d10, d1m (nm) =
9.442
8.843
12.610
13.182
16.111


When d1 < d10, d1m (nm) =
6.479
6.242
5.884
6.895
7.619


When n2 ≧ n20, n2m =
0.1545007
0.1511414
0.2353479
0.1499768
0.1563330


When n2 < n20, n2m =
0.1780847
0.1773486
0.2901843
0.1659082
0.1527185


When k2 ≧ k20, k2m =
0.1867920
0.1671802
0.2909924
0.1840894
0.2027185


When k2 < k20, k2m =
0.1126624
0.1034778
0.2557275
0.1387183
0.1013330


When d2 ≧ d20, d2m (nm) =
∞
∞
1.972
5.095
∞


When d2 < d20, d2m (nm) =
76.056
121.855
1.716
4.880
15.622










0.93 ≦ NA ≦ 1.0


15 < T ≦ 25












Case
2-11
2-12
2-13
2-14
2-15





n10
1.7573553
1.7321027
1.7251448
1.7347815
1.7337052


k10
0.0844391
0.0771807
0.0782108
0.0789970
0.0782079


d10 (nm)
89.273
89.432
166.474
158.854
156.164


n20
1.8090385
1.7181480
2.6560327
2.0166404
1.8413069


k20
0.2599016
0.2108133
2.0752579
0.4697089
0.2975845


d20 (nm)
184.203
254.601
4.495
58.957
122.955


When n1 ≧ n10, n1m =
0.0699780
0.0690137
0.0832959
0.0721558
0.0683105


When n1 < n10, n1m =
0.0410315
0.0429553
0.0305981
0.0341260
0.0308228


When k1 ≧ k10, k1m =
0.0723608
0.0738831
0.0729456
0.0742798
0.0703467


When k1 < k10, k1m =
0.0569189
0.0588879
0.0382764
0.0397253
0.0396069


When d1 ≧ d10, d1m (nm) =
21.648
30.736
32.939
31.041
34.229


When d1 < d10, d1m (nm) =
8.068
11.084
9.096
8.972
7.917


When n2 ≧ n20, n2m =
0.1631897
0.1805151
0.3419739
0.1438672
0.1358447


When n2 < n20, n2m =
0.1518018
0.1480249
0.4228455
0.1667273
0.1539514


When k2 ≧ k20, k2m =
0.2316443
0.1895435
0.3584204
0.1604712
0.1864905


When k2 < k20, k2m =
0.0850049
0.0772852
0.3668774
0.1323413
0.0930493


When d2 ≧ d20, d2m (nm) =
∞
∞
0.935
6.683
16.067


When d2 < d20, d2m (nm) =
28.321
80.547
0.940
6.845
12.170





















0.93 ≦ NA ≦ 1.0


15 < T ≦ 25







4/35












Case
2-16
2-17
2-18
2-19
2-20





n10
1.7245076
1.7100620
1.7130788
1.7208745
1.7192161


k10
0.0739010
0.0639207
0.0658962
0.0708686
0.0720786


d10 (nm)
155.712
155.553
233.281
223.560
220.745


n20
1.7533528
1.6863114
3.3653368
1.9877972
1.7983405


k20
0.2275719
0.1891021
2.7431658
0.4366658
0.2740582


d20 (nm)
189.273
256.528
2.501
59.393
125.643


When n1 ≧ n10, n1m =
0.0671997
0.0648059
0.0864783
0.0735278
0.0707983


When n1 < n10, n1m =
0.0293323
0.0484583
0.0327734
0.0316724
0.0279663


When k1 ≧ k10, k1m =
0.0671045
0.0758130
0.0759729
0.0721252
0.0662109


When k1 < k10, k1m =
0.0403235
0.0462146
0.0340283
0.0320007
0.0290771


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
8.393
77.190
14.014
10.040
8.344


When n2 ≧ n20, n2m =
0.1922314
0.2150586
0.5377722
0.1455798
0.1365283


When n2 < n20, n2m =
0.1495129
0.1388159
0.5848816
0.1787549
0.1689587


When k2 ≧ k20, k2m =
0.2035803
0.1600281
0.4555420
0.1361926
0.1635962


When k2 < k20, k2m =
0.0785095
0.0698242
0.5466174
0.1332434
0.0942200


When d2 ≧ d20, d2m (nm) =
∞
∞
0.540
6.979
∞


When d2 < d20, d2m (nm) =
26.645
77.267
0.568
6.255
9.480










0.93 ≦ NA ≦ 1.0


15 < T ≦ 25











Case
2-21
2-22







n10
1.7100814
1.7028062



k10
0.0661341
0.0572529



d10 (nm)
221.783
219.613



n20
1.7179584
1.6741304



k20
0.2146738
0.1784680



d20 (nm)
191.114
256.090



When n1 ≧ n10, n1m =
0.0687488
0.0693079



When n1 < n10, n1m =
0.0502954
0.0688196



When k1 ≧ k10, k1m =
0.0691418
0.0820508



When k1 < k10, k1m =
0.0305945
0.0409924



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
70.999
88.114



When n2 ≧ n20, n2m =
0.2426611
0.2482605



When n2 < n20, n2m =
0.1649829
0.1563098



When k2 ≧ k20, k2m =
0.1903906
0.1488330



When k2 < k20, k2m =
0.0805981
0.0682654



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
28.403
77.092






















0.93 ≦ NA ≦ 1.0


25 < T ≦ 35







5/35












Case
3-01
3-02
3-03
3-04
3-05





n10
1.7462297
1.7852920
1.8064124
1.8761841
1.8732427


k10
0.2650661
0.2379686
0.2063789
0.1465026
0.1107685


d10 (nm)
38.584
38.995
31.400
22.050
18.888


n20
1.8811342
3.2453891
2.0415396
1.8871554
1.8328297


k20
2.5474890
0.8215227
0.7493942
0.4863835
0.3644393


d20 (nm)
6.719
29.990
55.163
118.487
179.928


When n1 ≧ n10, n1m =
0.0769434
0.0851318
0.0833228
0.0906799
0.0968079


When n1 < n10, n1m =
0.0572766
0.0631555
0.0636389
0.0722144
0.0767554


When k1 ≧ k10, k1m =
0.0723669
0.0784412
0.0735730
0.0819336
0.0896667


When k1 < k10, k1m =
0.0683887
0.0725391
0.0776208
0.0882788
0.0940442


When d1 ≧ d10, d1m (nm) =
6.007
6.642
7.652
7.684
8.502


When d1 < d10, d1m (nm) =
4.614
4.982
5.411
5.323
5.843


When n2 ≧ n20, n2m =
0.4302271
0.2240894
0.2116187
0.1663196
0.1573621


When n2 < n20, n2m =
0.3679468
0.2518726
0.2012903
0.1828064
0.1779138


When k2 ≧ k20, k2m =
0.4458606
0.2938757
0.2488452
0.2239661
0.1924353


When k2 < k20, k2m =
0.4071558
0.2090601
0.1700916
0.1317957
0.1155774


When d2 ≧ d20, d2m (nm) =
1.849
2.793
∞
∞
∞


When d2 < d20, d2m (nm) =
1.467
2.486
8.980
27.259
71.144










0.93 ≦ NA ≦ 1.0


25 < T ≦ 35












Case
3-06
3-07
3-08
3-09
3-10





n10
1.8809997
1.8353407
1.8107063
1.7800259
1.7589519


k10
0.0844859
0.1336488
0.1074834
0.0966903
0.0885227


d10 (nm)
15.636
86.851
91.200
89.638
89.033


n20
1.8003278
1.6000470
2.5616901
1.9474319
1.8081258


k20
0.2965881
1.7695220
0.6655713
0.3779800
0.2753975


d20 (nm)
241.202
10.059
40.111
109.424
177.335


When n1 ≧ n10, n1m =
0.1079370
0.0607556
0.0690979
0.0686230
0.0682776


When n1 < n10, n1m =
0.0864404
0.0389355
0.0418872
0.0404956
0.0386047


When k1 ≧ k10, k1m =
0.0999365
0.0690637
0.0736157
0.0727942
0.0702844


When k1 < k10, k1m =
0.0844859
0.0492517
0.0507898
0.0531238
0.0559766


When d1 ≧ d10, d1m (nm) =
8.565
8.192
11.124
13.835
18.997


When d1 < d10, d1m (nm) =
5.996
4.465
5.820
6.603
7.278


When n2 ≧ n20, n2m =
0.1541260
0.2930249
0.1702905
0.1595251
0.1700037


When n2 < n20, n2m =
0.1764270
0.2694421
0.1785315
0.1557800
0.1515491


When k2 ≧ k20, k2m =
0.1720203
0.3061462
0.2081555
0.2039343
0.2313416


When k2 < k20, k2m =
0.1058716
0.3107410
0.1597290
0.1070007
0.0874585


When d2 ≧ d20, d2m (nm) =
∞
2.242
3.729
17.032
∞


When d2 < d20, d2m (nm) =
115.662
2.067
3.416
13.482
26.550





















0.93 ≦ NA ≦ 1.0


25 < T ≦ 35







6/35












Case
3-11
3-12
3-13
3-14
3-15





n10
1.7385561
1.7392392
1.7355979
1.7252169
1.7185486


k10
0.0961686
0.0859424
0.0828161
0.0770491
0.0788457


d10 (nm)
161.111
158.474
155.982
155.656
229.847


n20
1.8448216
2.1008270
1.8545146
1.7550901
3.2610273


k20
2.2148249
0.5469970
0.3232472
0.2413910
4.4183916


d20 (nm)
5.861
50.862
115.179
181.353
1.558


When n1 ≧ n10, n1m =
0.0629041
0.0674426
0.0657153
0.0649670
0.0703149


When n1 < n10, n1m =
0.0253882
0.0295728
0.0268335
0.0256165
0.0220850


When k1 ≧ k10, k1m =
0.0668323
0.0703247
0.0663293
0.0632434
0.0659778


When k1 < k10, k1m =
0.0332373
0.0369910
0.0375085
0.0384131
0.0277441


When d1 ≧ d10, d1m (nm) =
20.469
26.314
30.753
47.147
42.683


When d1 < d10, d1m (nm) =
5.969
7.197
6.584
7.042
7.213


When n2 ≧ n20, n2m =
0.3836914
0.1608313
0.1425024
0.2021899
0.7624707


When n2 < n20, n2m =
0.3601526
0.1749219
0.1554919
0.1482849
0.7156897


When k2 ≧ k20, k2m =
0.3156946
0.1638635
0.1816882
0.2013940
0.5159863


When k2 < k20, k2m =
0.4014783
0.1464551
0.0974072
0.0811682
0.8313574


When d2 ≧ d20, d2m (nm) =
1.291
5.616
13.990
∞
0.296


When d2 < d20, d2m (nm) =
1.319
5.535
10.236
24.868
0.387










0.93 ≦ NA ≦ 1.0


25 < T ≦ 35












Case
3-16
3-17
3-18







n10
1.7228369
1.7199449
1.7101979



k10
0.0769315
0.0760859
0.0687675



d10 (nm)
222.858
220.491
221.639



n20
2.0210736
1.8037789
1.7165312



k20
0.5011654
0.2965908
0.2274377



d20 (nm)
52.892
118.134
183.246



When n1 ≧ n10, n1m =
0.0694470
0.0680798
0.0669543



When n1 < n10, n1m =
0.0241309
0.0211279
0.0442908



When k1 ≧ k10, k1m =
0.0659106
0.0606384
0.0650562



When k1 < k10, k1m =
0.0287354
0.0259912
0.0284460



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
7.193
6.146
69.475



When n2 ≧ n20, n2m =
0.1641553
0.1445947
0.2568982



When n2 < n20, n2m =
0.1866541
0.1696143
0.1583826



When k2 ≧ k20, k2m =
0.1286877
0.1503394
0.1843665



When k2 < k20, k2m =
0.1457922
0.0990405
0.0813123



When d2 ≧ d20, d2m (nm) =
6.290
17.763
∞



When d2 < d20, d2m (nm) =
5.002
7.323
26.072






















0.93 ≦ NA ≦ 1.0


35 < T ≦ 45







7/35












Case
4-01
4-02
4-03
4-04
4-05





n10
1.8047095
1.8098021
1.8915289
1.8869810
1.8679863


k10
0.2694194
0.2379756
0.1677232
0.1583242
0.1633407


d10 (nm)
36.421
31.711
26.420
22.598
22.571


n20
2.9911125
2.1295160
2.1348336
1.9270572
1.8682373


k20
1.0218786
0.9059492
0.5678980
0.5352831
0.5190358


d20 (nm)
30.087
46.199
93.459
108.068
112.596


When n1 ≧ n10, n1m =
0.0783740
0.0796436
0.0844666
0.0882751
0.0886218


When n1 < n10, n1m =
0.0596716
0.0601453
0.0678638
0.0698572
0.0685303


When k1 ≧ k10, k1m =
0.0745129
0.0734180
0.0774060
0.0809473
0.0815564


When k1 < k10, k1m =
0.0737073
0.0756104
0.0846094
0.0871533
0.0855286


When d1 ≧ d10, d1m (nm) =
5.498
6.440
6.660
7.044
7.454


When d1 < d10, d1m (nm) =
4.112
4.536
4.657
4.822
5.013


When n2 ≧ n20, n2m =
0.2827258
0.2488782
0.2107483
0.1777197
0.1733423


When n2 < n20, n2m =
0.2979187
0.2268945
0.2048547
0.1904834
0.1888538


When k2 ≧ k20, k2m =
0.3686462
0.2854443
0.2568164
0.2416882
0.2270508


When k2 < k20, k2m =
0.2566187
0.1919458
0.1493335
0.1371973
0.1348743


When d2 ≧ d20, d2m (nm) =
4.536
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
3.441
7.549
17.368
24.447
26.666










0.93 ≦ NA ≦ 1.0


35 < T ≦ 45












Case
4-06
4-07
4-08
4-09
4-10





n10
1.8894047
1.9013640
1.7974174
1.7778270
1.7589001


k10
0.1134244
0.0821095
0.1211843
0.1038067
0.0931193


d10 (nm)
18.623
14.880
88.331
88.747
88.775


n20
1.8513003
1.8106171
2.0615819
1.9023003
1.8006679


k20
0.3877744
0.3102506
0.7049601
0.4013081
0.2880356


d20 (nm)
170.528
232.433
48.141
106.512
170.885


When n1 ≧ n10, n1m =
0.0963379
0.1102368
0.0634644
0.0662390
0.0666211


When n1 < n10, n1m =
0.0760864
0.0881848
0.0372961
0.0368457
0.0352515


When k1 ≧ k10, k1m =
0.0891541
0.1015222
0.0717737
0.0709473
0.0673779


When k1 < k10, k1m =
0.0954272
0.0821095
0.0478455
0.0509119
0.0546045


When d1 ≧ d10, d1m (nm) =
7.796
7.721
10.517
12.746
16.898


When d1 < d10, d1m (nm) =
5.302
5.383
5.078
5.794
6.421


When n2 ≧ n20, n2m =
0.1607617
0.1549121
0.2063647
0.1805920
0.1791541


When n2 < n20, n2m =
0.1802881
0.1767310
0.1869873
0.1622900
0.1552356


When k2 ≧ k20, k2m =
0.1971570
0.1718066
0.1998254
0.2205994
0.2284485


When k2 < k20, k2m =
0.1177856
0.1071863
0.1537903
0.1082654
0.0890710


When d2 ≧ d20, d2m (nm) =
∞
∞
7.208
∞
∞


When d2 < d20, d2m (nm) =
68.041
110.260
5.967
13.288
26.909





















0.93 ≦ NA ≦ 1.0


35 < T ≦ 45







8/35












Case
4-11
4-12
4-13
4-14
4-15





n10
1.7310401
1.7404520
1.7353985
1.7244370
1.7094852


k10
0.0827558
0.0960720
0.0882239
0.0802890
0.0677575


d10 (nm)
89.146
155.339
154.960
155.397
155.056


n20
1.7041670
1.9461112
1.8293633
1.7457172
1.6751093


k20
0.2282102
0.5942640
0.3421815
0.2519901
0.2044537


d20 (nm)
240.157
50.887
110.529
174.646
241.084


When n1 ≧ n10, n1m =
0.0658081
0.0609131
0.0631018
0.0626184
0.0606677


When n1 < n10, n1m =
0.0392627
0.0232361
0.0219373
0.0213806
0.0433704


When k1 ≧ k10, k1m =
0.0703406
0.0642554
0.0612463
0.0585852
0.0715100


When k1 < k10, k1m =
0.0569983
0.0328662
0.0342212
0.0355737
0.0444800


When d1 ≧ d10, d1m (nm) =
25.085
16.735
27.723
38.964
∞


When d1 < d10, d1m (nm) =
9.551
5.135
5.136
5.707
18.661


When n2 ≧ n20, n2m =
0.1952173
0.1934106
0.1684375
0.2170105
0.2364917


When n2 < n20, n2m =
0.1461670
0.1873682
0.1611987
0.1494055
0.1341663


When k2 ≧ k20, k2m =
0.1811243
0.1365161
0.1602917
0.1917432
0.1477625


When k2 < k20, k2m =
0.0805774
0.1412585
0.0980115
0.0826819
0.0722742


When d2 ≧ d20, d2m (nm) =
∞
6.877
15.552
∞
∞


When d2 < d20, d2m (nm) =
77.061
5.982
8.340
24.666
73.559










0.93 ≦ NA ≦ 1.0


35 < T ≦ 45












Case
4-16
4-17
4-18
4-19
4-20





n10
1.7305468
1.7234847
1.7196555
1.7094719
1.7026367


k10
0.1083688
0.0859582
0.0809985
0.0713058
0.0605694


d10 (nm)
224.105
219.529
219.492
221.454
219.016


n20
3.7612310
1.8940064
1.7865237
1.7085534
1.6670562


k20
9.7520181
0.5381566
0.3130643
0.2375210
0.1929642


d20 (nm)
0.557
52.122
112.555
175.858
239.742


When n1 ≧ n10, n1m =
0.0498926
0.0642505
0.0656738
0.0636218
0.0649512


When n1 < n10, n1m =
0.0031824
0.0153259
0.0138647
0.0294287
0.0615662


When k1 ≧ k10, k1m =
0.0271924
0.0553479
0.0526111
0.0605078
0.0781384


When k1 < k10, k1m =
0.0108813
0.0230212
0.0207922
0.0257751
0.0395862


When d1 ≧ d10, d1m (nm) =
12.324
42.526
∞
∞
∞


When d1 < d10, d1m (nm) =
0.823
4.181
3.891
14.979
80.387


When n2 ≧ n20, n2m =
0.4580664
0.1955493
0.1665735
0.2757410
0.2666089


When n2 < n20, n2m =
1.0705701
0.1254541
0.1755249
0.1566431
0.1466138


When k2 ≧ k20, k2m =
0.1823242
0.0953308
0.1233594
0.1752612
0.1390967


When k2 < k20, k2m =
1.8675439
0.1410535
0.1010315
0.0760974
0.0711597


When d2 ≧ d20, d2m (nm) =
0.019
7.428
∞
∞
∞


When d2 < d20, d2m (nm) =
0.155
3.724
4.890
25.232
73.082





















0.93 ≦ NA ≦ 1.0


45 < T ≦ 55







9/35












Case
5-01
5-02
5-03
5-04
5-05





n10
1.7952075
1.8907711
1.9054716
1.9347861
1.9562331


k10
0.2631488
0.1709411
0.1139096
0.0660701
0.1018371


d10 (nm)
28.407
22.060
18.051
14.149
10.504


n20
1.7975159
1.9054700
1.8637077
1.8512928
1.7371318


k20
0.9080589
0.5625340
0.4032117
0.3248351
0.3049135


d20 (nm)
49.215
101.512
161.182
218.499
238.789


When n1 ≧ n10, n1m =
0.0796008
0.0882104
0.0968323
0.1120276
0.1430420


When n1 < n10, n1m =
0.0558337
0.0676855
0.0756775
0.0900916
0.1115369


When k1 ≧ k10, k1m =
0.0737183
0.0824512
0.0899622
0.1015723
0.1322839


When k1 < k10, k1m =
0.0714771
0.0859058
0.0970459
0.0660701
0.1018371


When d1 ≧ d10, d1m (nm) =
6.136
6.696
7.231
6.738
5.941


When d1 < d10, d1m (nm) =
3.959
4.421
4.830
4.663
4.082


When n2 ≧ n20, n2m =
0.2206628
0.1836475
0.1640088
0.1560229
0.1493176


When n2 < n20, n2m =
0.2514893
0.2026611
0.1850330
0.1781982
0.1793958


When k2 ≧ k20, k2m =
0.2648120
0.2363086
0.1980701
0.1765576
0.1456726


When k2 < k20, k2m =
0.1661694
0.1390979
0.1188672
0.1083618
0.1075342


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
11.142
25.966
67.131
101.947
116.324










0.93 ≦ NA ≦ 1.0


45 < T ≦ 55












Case
5-06
5-07
5-08
5-09
5-10





n10
1.7844085
1.7702622
1.7541370
1.7279592
1.7375980


k10
0.1367381
0.1105738
0.0973387
0.0846136
0.1054836


d10 (nm)
84.299
87.211
88.132
88.943
150.710


n20
1.7096132
1.8115599
1.7670571
1.6883751
1.7055974


k20
0.6495191
0.4022198
0.2903421
0.2308596
0.5608974


d20 (nm)
54.242
106.122
167.020
233.281
53.799


When n1 ≧ n10, n1m =
0.0647021
0.0659351
0.0664050
0.0646069
0.0607947


When n1 < n10, n1m =
0.0336169
0.0333887
0.0319458
0.0381165
0.0178674


When k1 ≧ k10, k1m =
0.0728796
0.0707520
0.0653967
0.0692603
0.0616235


When k1 < k10, k1m =
0.0421851
0.0477087
0.0524451
0.0553516
0.0270422


When d1 ≧ d10, d1m (nm) =
9.564
12.156
16.406
23.344
13.595


When d1 < d10, d1m (nm) =
4.227
5.119
5.747
9.303
3.589


When n2 ≧ n20, n2m =
0.2254211
0.1928967
0.1889099
0.2061182
0.2563867


When n2 < n20, n2m =
0.1907227
0.1764453
0.1616943
0.1463477
0.1201587


When k2 ≧ k20, k2m =
0.1398059
0.1815479
0.2086975
0.1714539
0.0974426


When k2 < k20, k2m =
0.1320325
0.1038733
0.0888391
0.0812170
0.1216650


When d2 ≧ d20, d2m (nm) =
14.246
∞
∞
∞
10.184


When d2 < d20, d2m (nm) =
7.856
11.965
30.548
77.806
4.856





















0.93 ≦ NA ≦ 1.0


45 < T ≦ 55







10/35












Case
5-11
5-12
5-13
5-14
5-15





n10
1.7329681
1.7221048
1.7083331
1.7220084
1.7182277


k10
0.0932680
0.0829100
0.0687145
0.0940320
0.0857940


d10 (nm)
153.145
154.966
154.712
214.741
217.589


n20
1.7707311
1.7249696
1.6656993
1.7051250
1.7452872


k20
0.3436851
0.2554267
0.2071468
0.5097600
0.3145186


d20 (nm)
107.979
168.643
233.037
53.504
108.615


When n1 ≧ n10, n1m =
0.0625659
0.0612402
0.0592444
0.0643567
0.0658276


When n1 < n10, n1m =
0.0170984
0.0172632
0.0416833
0.0078064
0.0068054


When k1 ≧ k10, k1m =
0.0565161
0.0540405
0.0705188
0.0454688
0.0426636


When k1 < k10, k1m =
0.0297095
0.0318542
0.0432507
0.0149841
0.0129956


When d1 ≧ d10, d1m (nm) =
26.425
34.880
∞
35.694
∞


When d1 < d10, d1m (nm) =
3.834
4.536
17.051
1.969
1.835


When n2 ≧ n20, n2m =
0.2299866
0.2362512
0.2473572
0.2585364
0.2705701


When n2 < n20, n2m =
0.1752441
0.1521826
0.1336328
0.0467419
0.0530518


When k2 ≧ k20, k2m =
0.1260229
0.1759094
0.1395569
0.0560938
0.0808508


When k2 < k20, k2m =
0.0941040
0.0829492
0.0726111
0.1239917
0.0993604


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
10.256
∞


When d2 < d20, d2m (nm) =
6.312
26.413
73.432
2.024
2.346










0.93 ≦ NA ≦ 1.0


45 < T ≦ 55











Case
5-16
5-17







n10
1.7079026
1.7021324



k10
0.0731017
0.0613637



d10 (nm)
221.285
218.642



n20
1.6934483
1.6620357



k20
0.2412999
0.1957858



d20 (nm)
168.585
230.920



When n1 ≧ n10, n1m =
0.0611572
0.0632739



When n1 < n10, n1m =
0.0235156
0.0581824



When k1 ≧ k10, k1m =
0.0566406
0.0776050



When k1 < k10, k1m =
0.0230566
0.0386719



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
8.641
78.699



When n2 ≧ n20, n2m =
0.2946387
0.2760742



When n2 < n20, n2m =
0.1554272
0.1463647



When k2 ≧ k20, k2m =
0.1654895
0.1344739



When k2 < k20, k2m =
0.0676013
0.0719324



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
26.199
53.085






















0.93 ≦ NA ≦ 1.0


55 < T ≦ 65







11/35












Case
6-01
6-02
6-03
6-04
6-05





n10
1.7605068
1.8816347
1.9020430
1.9458467
1.9584022


k10
0.2771672
0.1829378
0.1268282
0.0703715
0.1032605


d10 (nm)
28.706
20.725
16.538
13.048
10.534


n20
1.6786286
1.8151288
1.7976518
1.8275971
1.7382432


k20
0.9008770
0.5496963
0.3935708
0.3251874
0.3086817


d20 (nm)
43.735
99.755
160.685
213.311
229.129


When n1 ≧ n10, n1m =
0.0840430
0.0931677
0.1035986
0.1192371
0.1431311


When n1 < n10, n1m =
0.0576428
0.0681458
0.0779578
0.0939172
0.1097058


When k1 ≧ k10, k1m =
0.0662097
0.0857654
0.0958630
0.1068726
0.1305750


When k1 < k10, k1m =
0.0706262
0.0861902
0.1004041
0.0703715
0.1032605


When d1 ≧ d10, d1m (nm) =
6.461
6.864
7.218
6.428
5.908


When d1 < d10, d1m (nm) =
4.241
4.337
4.665
4.365
3.988


When n2 ≧ n20, n2m =
0.2053870
0.1760388
0.1592407
0.1556714
0.1505713


When n2 < n20, n2m =
0.2197400
0.2099182
0.1887061
0.1809558
0.1813904


When k2 ≧ k20, k2m =
0.2532373
0.2078381
0.1779785
0.1687073
0.1458105


When k2 < k20, k2m =
0.1729968
0.1382983
0.1186841
0.1101477
0.1094250


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
9.750
24.367
71.258
104.445
116.852










0.93 ≦ NA ≦ 1.0


55 < T ≦ 65












Case
6-06
6-07
6-08
6-09
6-10





n10
1.7915017
1.7682864
1.7517777
1.7257399
1.7391311


k10
0.1460711
0.1152280
0.1000283
0.0854213
0.1111219


d10 (nm)
82.108
86.246
87.803
88.823
148.271


n20
1.6599684
1.7730752
1.7495420
1.6774661
1.6415570


k20
0.6598461
0.3999868
0.2902721
0.2313191
0.5493559


d20 (nm)
47.036
100.473
159.986
224.881
47.977


When n1 ≧ n10, n1m =
0.0707507
0.0678174
0.0671436
0.0642444
0.0613611


When n1 < n10, n1m =
0.0347034
0.0316797
0.0297241
0.0379114
0.0170081


When k1 ≧ k10, k1m =
0.0716638
0.0707349
0.0637610
0.0688733
0.0614063


When k1 < k10, k1m =
0.0419373
0.0459045
0.0509448
0.0544250
0.0258569


When d1 ≧ d10, d1m (nm) =
8.814
11.596
15.946
22.736
12.264


When d1 < d10, d1m (nm) =
3.999
4.706
5.289
9.347
3.219


When n2 ≧ n20, n2m =
0.2110352
0.2040027
0.1980566
0.2150256
0.2303101


When n2 < n20, n2m =
0.1684949
0.1890479
0.1666223
0.1461719
0.0970691


When k2 ≧ k20, k2m =
0.1438293
0.1667627
0.2003491
0.1648621
0.0994629


When k2 < k20, k2m =
0.1447302
0.1052173
0.0896777
0.0819421
0.1292871


When d2 ≧ d20, d2m (nm) =
15.339
∞
∞
∞
12.574


When d2 < d20, d2m (nm) =
6.489
10.552
32.474
78.570
4.088





















0.93 ≦ NA ≦ 1.0


55 < T ≦ 65







12/35












Case
6-11
6-12
6-13
6-14
6-15





n10
1.7320844
1.7076855
1.7203924
1.7223192
1.7173463


k10
0.0968192
0.0689521
0.0842770
0.0985051
0.0890019


d10 (nm)
152.055
154.586
154.911
212.081
216.420


n20
1.7411899
1.6612710
1.7118542
1.6387426
1.7205682


k20
0.3409343
0.2081961
0.2561923
0.4904233
0.3116849


d20 (nm)
101.751
223.547
160.544
48.284
102.035


When n1 ≧ n10, n1m =
0.0640808
0.0590295
0.0609424
0.0598975
0.0677930


When n1 < n10, n1m =
0.0141614
0.0412158
0.0147046
0.0053711
0.0022900


When k1 ≧ k10, k1m =
0.0532275
0.0702893
0.0510400
0.0410706
0.0340332


When k1 < k10, k1m =
0.0265625
0.0427490
0.0291602
0.0117297
0.0056226


When d1 ≧ d10, d1m (nm) =
25.992
∞
33.192
33.998
50.996


When d1 < d10, d1m (nm) =
3.082
16.525
3.853
1.301
0.604


When n2 ≧ n20, n2m =
0.2268713
0.2531177
0.2476831
0.2556775
0.2704236


When n2 < n20, n2m =
0.1878772
0.1338721
0.1536694
0.0287537
0.0146338


When k2 ≧ k20, k2m =
0.1099695
0.1355603
0.1692993
0.0485706
0.0433569


When k2 < k20, k2m =
0.0948242
0.0734631
0.0770691
0.1286780
0.0774121


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
12.209
∞


When d2 < d20, d2m (nm) =
4.972
56.744
27.273
1.327
0.772










0.93 ≦ NA ≦ 1.0


55 < T ≦ 65











Case
6-16
6-17







n10
1.7068337
1.7019545



k10
0.0738736
0.0615388



d10 (nm)
221.446
218.498



n20
1.6845656
1.6606500



k20
0.2425094
0.1970435



d20 (nm)
159.621
220.941



When n1 ≧ n10, n1m =
0.0603540
0.0631677



When n1 < n10, n1m =
0.0209692
0.0568018



When k1 ≧ k10, k1m =
0.0545837
0.0777637



When k1 < k10, k1m =
0.0216589
0.0384106



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
7.750
78.234



When n2 ≧ n20, n2m =
0.3057288
0.2826660



When n2 < n20, n2m =
0.1553943
0.1472412



When k2 ≧ k20, k2m =
0.1625220
0.1326501



When k2 < k20, k2m =
0.0624280
0.0731104



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
26.805
48.201






















0.93 ≦ NA ≦ 1.0


65 < T ≦ 75







13/35












Case
7-01
7-02
7-03
7-04
7-05





n10
1.7659038
1.8645399
1.8986420
1.9431410
1.8260230


k10
0.3040912
0.1945245
0.1330684
0.1068639
0.1610409


d10 (nm)
29.683
22.504
17.099
11.420
82.141


n20
1.6951746
1.8232494
1.7981378
1.7406778
1.8123655


k20
1.0159152
0.5745287
0.4053118
0.3159076
0.8416018


d20 (nm)
32.660
88.735
150.314
217.432
29.750


When n1 ≧ n10, n1m =
0.0851306
0.0913562
0.1021387
0.1343896
0.0697156


When n1 < n10, n1m =
0.0579541
0.0649255
0.0759912
0.1029980
0.0329614


When k1 ≧ k10, k1m =
0.0588293
0.0796277
0.0923560
0.1221460
0.0674365


When k1 < k10, k1m =
0.0718896
0.0854541
0.0996875
0.1068639
0.0435559


When d1 ≧ d10, d1m (nm) =
5.966
7.118
7.275
6.222
7.298


When d1 < d10, d1m (nm) =
4.222
4.395
4.641
4.200
3.443


When n2 ≧ n20, n2m =
0.2227673
0.1853540
0.1622253
0.1538269
0.2762463


When n2 < n20, n2m =
0.2074731
0.2178162
0.1908838
0.1813525
0.2757544


When k2 ≧ k20, k2m =
0.3106860
0.2340100
0.1838708
0.1497839
0.2030774


When k2 < k20, k2m =
0.2037939
0.1485229
0.1235767
0.1116138
0.1923645


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
12.449


When d2 < d20, d2m (nm) =
7.750
24.931
70.207
113.565
5.408










0.93 ≦ NA ≦ 1.0


65 < T ≦ 75












Case
7-06
7-07
7-08
7-09
7-10





n10
1.7771488
1.7544343
1.7270080
1.7474077
1.7344421


k10
0.1183021
0.1010010
0.0859818
0.1187907
0.0986199


d10 (nm)
86.874
88.257
88.900
148.872
153.031


n20
1.8193233
1.7618403
1.6808707
1.6925268
1.7617910


k20
0.4301648
0.3008540
0.2360835
0.6251022
0.3597954


d20 (nm)
86.325
147.888
214.142
34.244
89.143


When n1 ≧ n10, n1m =
0.0673694
0.0664294
0.0644080
0.0590649
0.0632410


When n1 < n10, n1m =
0.0307617
0.0294727
0.0379211
0.0149548
0.0133545


When k1 ≧ k10, k1m =
0.0672144
0.0623938
0.0685620
0.0548840
0.0510083


When k1 < k10, k1m =
0.0467444
0.0514600
0.0549805
0.0255261
0.0262878


When d1 ≧ d10, d1m (nm) =
10.761
15.121
22.543
10.466
24.985


When d1 < d10, d1m (nm) =
4.433
5.189
9.219
2.761
2.901


When n2 ≧ n20, n2m =
0.2196216
0.2049475
0.2147473
0.2786914
0.2464575


When n2 < n20, n2m =
0.1907739
0.1643323
0.1459814
0.1244519
0.1858276


When k2 ≧ k20, k2m =
0.1969482
0.2144763
0.1668457
0.1106995
0.1237866


When k2 < k20, k2m =
0.1161511
0.0943396
0.0836194
0.1556311
0.1032104


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
9.505
∞


When d2 < d20, d2m (nm) =
10.265
27.730
76.727
3.667
4.914



















0.93 ≦ NA ≦ 1.0


65 < T ≦ 75







14/35













Case
7-11
7-12
7-13
7-14
7-15
7-16
















n10
1.7082851
1.7212227
1.7256274
1.7180408
1.7074443
1.7023147


k10
0.0693971
0.0845898
0.1038247
0.0895343
0.0742263
0.0619030


d10 (nm)
154.668
155.411
212.824
218.202
221.707
218.598


n20
1.6632564
1.7183974
1.6530934
1.7315716
1.6896767
1.6620389


k20
0.2120421
0.2642962
0.5317369
0.3280557
0.2496384
0.2005572


d20 (nm)
213.175
149.129
36.133
89.506
148.627
210.752


When n1 ≧ n10, n1m =
0.0593945
0.0606384
0.0541980
0.0647742
0.0609387
0.0637036


When n1 < n10, n1m =
0.0413879
0.0149182
0.0029968
0.0021960
0.0208508
0.0577161


When k1 ≧ k10, k1m =
0.0699487
0.0507495
0.0335364
0.0342871
0.0542102
0.0772327


When k1 < k10, k1m =
0.0433142
0.0298535
0.0082080
0.0055542
0.0221802
0.0389124


When d1 ≧ d10, d1m (nm) =
∞
32.689
15.980
48.365
∞
∞


When d1 < d10, d1m (nm) =
16.649
3.913
0.723
0.594
7.641
78.427


When n2 ≧ n20, n2m =
0.2553577
0.2564221
0.2715186
0.1988367
0.3137769
0.2845728


When n2 < n20, n2m =
0.1341199
0.1522119
0.0214917
0.0208643
0.1570667
0.1478259


When k2 ≧ k20, k2m =
0.1361841
0.1775061
0.0327844
0.0526038
0.1632751
0.1321912


When k2 < k20, k2m =
0.0749841
0.0809204
0.1462024
0.0801404
0.0667383
0.0745581


When d2 ≧ d20, d2m (nm) =
∞
∞
9.604
∞
∞
∞


When d2 < d20, d2m (nm) =
57.367
24.447
0.813
0.826
24.310
48.632





















0.93 ≦ NA ≦ 1.0


75 < T ≦ 85







15/35












Case
8-01
8-02
8-03
8-04
8-05





n10
1.7563588
1.8511230
1.8843188
1.9287462
1.8353218


k10
0.3324096
0.2092311
0.1443736
0.1105115
0.1759033


d10 (nm)
35.374
25.991
18.736
12.655
87.389


n20
1.9274523
1.9063465
1.8018968
1.7494498
2.1171648


k20
1.4642575
0.6506745
0.4300566
0.3311673
1.3140425


d20 (nm)
17.251
73.686
139.851
205.772
13.979


When n1 ≧ n10, n1m =
0.0785156
0.0867322
0.0972815
0.1243994
0.0679163


When n1 < n10, n1m =
0.0545728
0.0619702
0.0719873
0.0956885
0.0326843


When k1 ≧ k10, k1m =
0.0474365
0.0710938
0.0861206
0.1128003
0.0573657


When k1 < k10, k1m =
0.0515906
0.0859790
0.0958850
0.1105115
0.0462488


When d1 ≧ d10, d1m (nm) =
5.195
7.048
7.475
6.554
6.786


When d1 < d10, d1m (nm) =
4.054
4.401
4.771
4.433
3.439


When n2 ≧ n20, n2m =
0.3717346
0.2089124
0.1658667
0.1550732
0.3935315


When n2 < n20, n2m =
0.2566504
0.2226855
0.1899609
0.1803442
0.3930750


When k2 ≧ k20, k2m =
0.3327271
0.2900549
0.1962512
0.1555261
0.4058423


When k2 < k20, k2m =
0.2814465
0.1644043
0.1285254
0.1140686
0.2980408


When d2 ≧ d20, d2m (nm) =
7.242
∞
∞
∞
4.246


When d2 < d20, d2m (nm) =
5.453
18.064
63.635
86.244
4.110










0.93 ≦ NA ≦ 1.0


75 < T ≦ 85












Case
8-06
8-07
8-08
8-09
8-10





n10
1.7950810
1.7627960
1.7313791
1.7608801
1.7394221


k10
0.1221034
0.1022278
0.0877850
0.1266208
0.0996664


d10 (nm)
88.670
88.862
88.999
153.509
155.305


n20
1.9787137
1.8048095
1.6945552
1.9275665
1.8479873


k20
0.5126318
0.3274205
0.2478313
0.9887124
0.4176577


d20 (nm)
67.257
133.479
202.902
15.987
72.839


When n1 ≧ n10, n1m =
0.0661450
0.0654504
0.0644836
0.0595581
0.0618579


When n1 < n10, n1m =
0.0313049
0.0305920
0.0369946
0.0131787
0.0145801


When k1 ≧ k10, k1m =
0.0629285
0.0615845
0.0676172
0.0466980
0.0504663


When k1 < k10, k1m =
0.0495715
0.0531104
0.0563220
0.0260303
0.0287866


When d1 ≧ d10, d1m (nm) =
9.764
13.747
21.746
9.118
15.633


When d1 < d10, d1m (nm) =
4.261
5.184
8.521
2.425
3.180


When n2 ≧ n20, n2m =
0.1949426
0.2017102
0.2072998
0.3193018
0.1671875


When n2 < n20, n2m =
0.1905188
0.1606116
0.1458716
0.3499829
0.1826196


When k2 ≧ k20, k2m =
0.2324365
0.2397180
0.1749133
0.1658679
0.1587329


When k2 < k20, k2m =
0.1375964
0.1005615
0.0861584
0.2502869
0.1212964


When d2 ≧ d20, d2m (nm) =
11.495
∞
∞
4.383
10.247


When d2 < d20, d2m (nm) =
10.836
22.009
72.908
4.573
5.928



















0.93 ≦ NA ≦ 1.0


75 < T ≦ 85







16/35













Case
8-11
8-12
8-13
8-14
8-15
8-16
















n10
1.7245671
1.7098549
1.7314445
1.7204815
1.7093097
1.7029357


k10
0.0857616
0.0711157
0.1087664
0.0894136
0.0755678
0.0634027


d10 (nm)
155.774
154.844
218.242
220.453
221.580
218.717


n20
1.7414131
1.6689951
1.7862714
1.7885409
1.7021793
1.6626290


k20
0.2835597
0.2212317
0.7962122
0.3769446
0.2655853
0.2083407


d20 (nm)
136.971
203.148
18.394
74.763
137.968
201.624


When n1 ≧ n10, n1m =
0.0606116
0.0594177
0.0511572
0.0630383
0.0616895
0.0636414


When n1 < n10, n1m =
0.0160718
0.0405298
0.0015906
0.0046008
0.0190027
0.0583008


When k1 ≧ k10, k1m =
0.0512000
0.0681555
0.0265222
0.0380334
0.0531970
0.0748706


When k1 < k10, k1m =
0.0318042
0.0441748
0.0055811
0.0106726
0.0222839
0.0393835


When d1 ≧ d10, d1m (nm) =
31.466
∞
12.528
43.958
∞
∞


When d1 < d10, d1m (nm) =
4.121
15.106
0.395
1.266
6.425
77.927


When n2 ≧ n20, n2m =
0.2472620
0.2537585
0.2927209
0.1651587
0.3131763
0.2855005


When n2 < n20, n2m =
0.1515137
0.1338916
0.0324463
0.1927209
0.1573535
0.1457190


When k2 ≧ k20, k2m =
0.1857507
0.1391650
0.0225110
0.0800281
0.1575110
0.1308728


When k2 < k20, k2m =
0.0929626
0.0771277
0.2211072
0.1242517
0.0780078
0.0761951


When d2 ≧ d20, d2m (nm) =
∞
∞
5.339
11.602
∞
∞


When d2 < d20, d2m (nm) =
20.462
30.027
0.679
1.920
20.783
30.691





















0.93 ≦ NA ≦ 1.0


85 < T ≦ 95







17/35












Case
9-01
9-02
9-03
9-04
9-05





n10
1.7289685
1.8452520
1.8988873
1.8877112
1.9267904


k10
0.3314086
0.2255929
0.1475831
0.1535471
0.0947520


d10 (nm)
44.247
26.855
20.944
19.669
15.612


n20
5.1412592
1.9037614
1.8997324
1.8220692
1.8437835


k20
5.4454539
0.7221490
0.4893775
0.4687151
0.3693724


d20 (nm)
1.484
66.898
122.094
129.650
183.529


When n1 ≧ n10, n1m =
0.0720642
0.0846375
0.0908557
0.0941199
0.1057788


When n1 < n10, n1m =
0.0586633
0.0599194
0.0695422
0.0700256
0.0833301


When k1 ≧ k10, k1m =
0.0476758
0.0671912
0.0784241
0.0821533
0.0936853


When k1 < k10, k1m =
0.0453955
0.0846301
0.0932227
0.0950391
0.0947520


When d1 ≧ d10, d1m (nm) =
4.793
6.632
6.977
7.158
6.784


When d1 < d10, d1m (nm) =
4.550
4.181
4.538
4.591
4.595


When n2 ≧ n20, n2m =
1.1337476
0.2089880
0.1771472
0.1681067
0.1597327


When n2 < n20, n2m =
1.1352368
0.2210583
0.1914734
0.1898022
0.1792920


When k2 ≧ k20, k2m =
0.8630298
0.2922070
0.2387195
0.2089600
0.1845532


When k2 < k20, k2m =
1.0641260
0.1706519
0.1365454
0.1328516
0.1184924


When d2 ≧ d20, d2m (nm) =
0.527
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
0.379
14.827
35.595
55.475
73.593










0.93 ≦ NA ≦ 1.0


85 < T ≦ 95












Case
9-06
9-07
9-08
9-09
9-10





n10
1.9311024
1.9377300
1.8321358
1.8340055
1.7711711


k10
0.1132645
0.0882760
0.1783607
0.1409526
0.1059247


d10 (nm)
13.318
11.094
92.959
90.549
89.053


n20
1.7624681
1.7478213
3.8484718
2.7003837
1.8505388


k20
0.3523973
0.2927773
3.7040697
0.6754163
0.3612112


d20 (nm)
195.472
252.908
2.442
40.010
121.432


When n1 ≧ n10, n1m =
0.1192212
0.1370740
0.0646143
0.0640906
0.0642236


When n1 < n10, n1m =
0.0917322
0.1105750
0.0342749
0.0314893
0.0302832


When k1 ≧ k10, k1m =
0.1074902
0.1261145
0.0537451
0.0578040
0.0599036


When k1 < k10, k1m =
0.1132645
0.0882760
0.0424707
0.0518921
0.0535962


When d1 ≧ d10, d1m (nm) =
6.457
6.373
6.914
7.622
12.267


When d1 < d10, d1m (nm) =
4.357
4.610
3.684
3.553
4.848


When n2 ≧ n20, n2m =
0.1546643
0.1575439
0.8768713
0.1918994
0.1964832


When n2 < n20, n2m =
0.1796094
0.1753381
0.8006409
0.2240674
0.1600745


When k2 ≧ k20, k2m =
0.1600171
0.1481116
0.9241052
0.2582642
0.2396375


When k2 < k20, k2m =
0.1162842
0.1079150
0.8229163
0.1769763
0.1063232


When d2 ≧ d20, d2m (nm) =
∞
∞
0.854
4.088
∞


When d2 < d20, d2m (nm) =
79.416
123.401
0.636
4.130
18.235





















0.93 ≦ NA ≦ 1.0


85 < T ≦ 95







18/35












Case
9-11
9-12
9-13
9-14
9-15





n10
1.7360863
1.7197908
1.7660895
1.7439719
1.7279356


k10
0.0911204
0.0799131
0.1278221
0.1032091
0.0888807


d10 (nm)
88.900
88.028
159.319
156.425
155.640


n20
1.7067614
1.6618119
4.3535883
1.9650733
1.7635448


k20
0.2637604
0.2120965
4.0919379
0.4980866
0.3088945


d20 (nm)
192.941
257.777
1.526
59.654
126.749


When n1 ≧ n10, n1m =
0.0638330
0.0656592
0.0584094
0.0605725
0.0597937


When n1 < n10, n1m =
0.0350525
0.0511377
0.0141675
0.0144019
0.0151697


When k1 ≧ k10, k1m =
0.0655725
0.0796582
0.0444238
0.0479309
0.0488806


When k1 < k10, k1m =
0.0571082
0.0562439
0.0291333
0.0298792
0.0316455


When d1 ≧ d10, d1m (nm) =
20.203
29.484
8.864
13.240
29.427


When d1 < d10, d1m (nm) =
7.546
13.995
2.626
3.070
3.728


When n2 ≧ n20, n2m =
0.2021118
0.1991125
0.8787561
0.1681836
0.2119507


When n2 < n20, n2m =
0.1462866
0.1442920
0.9231299
0.1869897
0.1520459


When k2 ≧ k20, k2m =
0.1808130
0.1431189
0.6934375
0.1601843
0.1789355


When k2 < k20, k2m =
0.0887085
0.0763562
1.0372803
0.1399158
0.0974194


When d2 ≧ d20, d2m (nm) =
∞
∞
0.372
7.404
∞


When d2 < d20, d2m (nm) =
33.573
81.452
0.412
5.841
17.631










0.93 ≦ NA ≦ 1.0


85 < T ≦ 95












Case
9-16
9-17
9-18
9-19
9-20





n10
1.7114085
1.7070625
1.7347333
1.7230132
1.7111302


k10
0.0740744
0.0641745
0.1100034
0.0920219
0.0786417


d10 (nm)
154.740
153.245
225.621
220.898
221.002


n20
1.6716288
1.6634512
4.2666617
1.8597675
1.7127614


k20
0.2338686
0.1921909
4.0109081
0.4430799
0.2870105


d20 (nm)
194.347
254.410
1.346
63.229
128.848


When n1 ≧ n10, n1m =
0.0584460
0.0617004
0.0476050
0.0625842
0.0612109


When n1 < n10, n1m =
0.0344641
0.0580713
0.0023816
0.0042908
0.0142651


When k1 ≧ k10, k1m =
0.0648608
0.0822974
0.0260010
0.0346094
0.0487000


When k1 < k10, k1m =
0.0443103
0.0454309
0.0085535
0.0110950
0.0198962


When d1 ≧ d10, d1m (nm) =
∞
∞
11.896
40.249
∞


When d1 < d10, d1m (nm) =
12.619
28.388
0.607
1.162
4.464


When n2 ≧ n20, n2m =
0.2496582
0.2459351
0.6243091
0.1726245
0.1878369


When n2 < n20, n2m =
0.1333875
0.1351294
0.9687061
0.0992944
0.1569519


When k2 ≧ k20, k2m =
0.1378833
0.1234607
0.1299146
0.0597583
0.1385217


When k2 < k20, k2m =
0.0791492
0.0682422
1.1651697
0.1405090
0.0853906


When d2 ≧ d20, d2m (nm) =
∞
∞
0.085
8.765
∞


When d2 < d20, d2m (nm) =
27.415
76.157
0.398
1.778
18.221





















0.93 ≦ NA ≦ 1.0


85 < T ≦ 95







19/35












Case
9-21
9-22
9-23







n10
1.7035342
1.7027484
1.7001226



k10
0.0659797
0.0572097
0.0542621



d10 (nm)
218.617
216.627
277.695



n20
1.6615801
1.6695991
1.6762439



k20
0.2195726
0.1821496
0.1770375



d20 (nm)
193.289
251.116
248.521



When n1 ≧ n10, n1m =
0.0623376
0.0678125
0.0799658



When n1 < n10, n1m =
0.0535010
0.0686682
0.1014282



When k1 ≧ k10, k1m =
0.0710327
0.0861914
0.0881311



When k1 < k10, k1m =
0.0393738
0.0410693
0.0390344



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
76.543
86.880
145.024



When n2 ≧ n20, n2m =
0.2919910
0.2682678
0.2949561



When n2 < n20, n2m =
0.1427539
0.1485803
0.2037488



When k2 ≧ k20, k2m =
0.1267480
0.1253760
0.1874854



When k2 < k20, k2m =
0.0781458
0.0670801
0.0719922



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
27.736
75.187
78.004











0.93 ≦ NA ≦ 1.0


95 < T ≦ 105












Case
10-01
10-02
10-03
10-04
10-05





n10
1.8593145
1.9010800
1.9204218
1.9438629
1.8201241


k10
0.2496127
0.1636004
0.1149718
0.1088618
0.1437532


d10 (nm)
26.535
19.815
15.218
10.610
89.353


n20
1.9155767
1.8411706
1.7975616
1.7190727
2.3681639


k20
0.8329906
0.5121692
0.3794158
0.2999844
0.7410526


d20 (nm)
59.684
120.535
182.059
250.015
43.212


When n1 ≧ n10, n1m =
0.0816284
0.0922021
0.1074707
0.1413159
0.0582056


When n1 < n10, n1m =
0.0571204
0.0681042
0.0820581
0.1125684
0.0261719


When k1 ≧ k10, k1m =
0.0635767
0.0796045
0.0956897
0.1313098
0.0522705


When k1 < k10, k1m =
0.0810986
0.0930249
0.1101465
0.1088618
0.0503638


When d1 ≧ d10, d1m (nm) =
5.728
6.581
6.674
6.005
7.527


When d1 < d10, d1m (nm) =
3.587
4.159
4.431
4.306
3.047


When n2 ≧ n20, n2m =
0.2110999
0.1699976
0.1589343
0.1579346
0.2155920


When n2 < n20, n2m =
0.2273865
0.1928259
0.1800378
0.1714307
0.2110571


When k2 ≧ k20, k2m =
0.3068860
0.2171289
0.1741077
0.1426062
0.2751843


When k2 < k20, k2m =
0.1756396
0.1352295
0.1186548
0.1082129
0.1794531


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
5.764


When d2 < d20, d2m (nm) =
12.732
34.057
73.872
121.675
5.150





















0.93 ≦ NA ≦ 1.0


95 < T ≦ 105







20/35












Case
10-06
10-07
10-08
10-09
10-10





n10
1.7719135
1.7372876
1.7204595
1.7445424
1.7286821


k10
0.1119845
0.0953951
0.0830085
0.1106490
0.0936244


d10 (nm)
88.526
88.555
87.798
155.347
154.936


n20
1.8420973
1.7021944
1.6574450
1.9643384
1.7602486


k20
0.3885265
0.2779787
0.2209480
0.5665503
0.3317476


d20 (nm)
115.256
185.353
249.744
53.939
119.649


When n1 ≧ n10, n1m =
0.0621143
0.0621887
0.0641711
0.0553430
0.0576575


When n1 < n10, n1m =
0.0270313
0.0323645
0.0489441
0.0092163
0.0110840


When k1 ≧ k10, k1m =
0.0562158
0.0627490
0.0779517
0.0376074
0.0417603


When k1 < k10, k1m =
0.0520581
0.0564075
0.0555945
0.0251758
0.0276855


When d1 ≧ d10, d1m (nm) =
11.132
18.518
24.475
10.852
25.311


When d1 < d10, d1m (nm) =
4.165
6.637
12.657
1.885
2.611


When n2 ≧ n20, n2m =
0.1959729
0.2028772
0.1967151
0.1949902
0.2380078


When n2 < n20, n2m =
0.1629126
0.1469397
0.1441541
0.1889697
0.1549414


When k2 ≧ k20, k2m =
0.2347974
0.1750098
0.1399744
0.1001758
0.1456445


When k2 < k20, k2m =
0.1074329
0.0897974
0.0774023
0.1436816
0.0981848


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
7.077
∞


When d2 < d20, d2m (nm) =
17.579
32.188
79.555
4.014
9.652










0.93 ≦ NA ≦ 1.0


95 < T ≦ 105












Case
10-11
10-12
10-13
10-14
10-15





n10
1.7117780
1.7072616
1.7114074
1.7035514
1.7027912


k10
0.0773392
0.0664543
0.0830146
0.0688006
0.0591414


d10 (nm)
154.355
152.987
220.011
218.183
216.340


n20
1.6664488
1.6597858
1.7075466
1.6565327
1.6669294


k20
0.2460450
0.2000883
0.3068810
0.2307053
0.1896158


d20 (nm)
186.501
246.239
121.613
185.316
242.803


When n1 ≧ n10, n1m =
0.0563684
0.0596582
0.0593091
0.0598755
0.0652673


When n1 < n10, n1m =
0.0298474
0.0556995
0.0074023
0.0481897
0.0654077


When k1 ≧ k10, k1m =
0.0607349
0.0799170
0.0390686
0.0670154
0.0838220


When k1 < k10, k1m =
0.0430676
0.0448303
0.0134863
0.0384473
0.0405530


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
9.756
23.688
2.192
28.661
83.384


When n2 ≧ n20, n2m =
0.2552490
0.2502368
0.2301306
0.3057727
0.2764221


When n2 < n20, n2m =
0.1325989
0.1345728
0.1592334
0.1419543
0.1480603


When k2 ≧ k20, k2m =
0.1285986
0.1190894
0.0974548
0.1182935
0.1218213


When k2 < k20, k2m =
0.0799036
0.0691528
0.0735474
0.0793201
0.0682898


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
26.413
74.134
17.074
26.587
73.152





















0.93 ≦ NA ≦ 1.0


105 < T ≦ 115







21/35












Case
11-01
11-02
11-03
11-04
11-05





n10
1.8881577
1.9218914
1.9458883
1.9409291
1.7882093


k10
0.2795127
0.1797398
0.1322078
0.1179060
0.1515662


d10 (nm)
22.871
17.442
13.080
10.849
85.800


n20
1.7550786
1.7746647
1.7478516
1.7108849
1.7933752


k20
0.8705815
0.5227186
0.3833699
0.3088835
0.6703287


d20 (nm)
60.032
119.813
181.809
241.776
55.966


When n1 ≧ n10, n1m =
0.0826208
0.0977563
0.1186780
0.1376917
0.0543359


When n1 < n10, n1m =
0.0520789
0.0682861
0.0872974
0.1088391
0.0162500


When k1 ≧ k10, k1m =
0.0630823
0.0841675
0.1052368
0.1278345
0.0453015


When k1 < k10, k1m =
0.0771240
0.0966394
0.1209399
0.1179060
0.0399414


When d1 ≧ d10, d1m (nm) =
4.844
5.864
5.837
5.925
7.044


When d1 < d10, d1m (nm) =
2.746
3.528
3.770
4.232
1.998


When n2 ≧ n20, n2m =
0.1779102
0.1610864
0.1553113
0.1599890
0.1976709


When n2 < n20, n2m =
0.2409973
0.1978687
0.1825439
0.1715320
0.2140332


When k2 ≧ k20, k2m =
0.2513745
0.1848108
0.1557214
0.1414282
0.1190186


When k2 < k20, k2m =
0.1529724
0.1289783
0.1162878
0.1089014
0.1251477


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
22.520


When d2 < d20, d2m (nm) =
14.459
47.581
76.951
118.169
7.215










0.93 ≦ NA ≦ 1.0


105 < T ≦ 115












Case
11-06
11-07
11-08
11-09
11-10





n10
1.7649059
1.7337710
1.7199633
1.7259527
1.7103936


k10
0.1193411
0.0996522
0.0855558
0.0989978
0.0800216


d10 (nm)
87.339
88.039
87.477
153.714
153.726


n20
1.7745734
1.6760618
1.6497564
1.7204930
1.6497935


k20
0.3964773
0.2847568
0.2267213
0.3415865
0.2528816


d20 (nm)
113.800
179.842
241.489
115.571
179.482


When n1 ≧ n10, n1m =
0.0601648
0.0599890
0.0628394
0.0551172
0.0538281


When n1 < n10, n1m =
0.0211145
0.0296448
0.0487646
0.0042871
0.0282654


When k1 ≧ k10, k1m =
0.0504663
0.0599475
0.0772742
0.0278052
0.0572974


When k1 < k10, k1m =
0.0475183
0.0544922
0.0541711
0.0166541
0.0416528


When d1 ≧ d10, d1m (nm) =
10.266
16.506
22.112
22.094
29.214


When d1 < d10, d1m (nm) =
3.195
5.968
12.188
0.978
9.029


When n2 ≧ n20, n2m =
0.1995813
0.2097351
0.1798193
0.2563574
0.2736133


When n2 < n20, n2m =
0.1736548
0.1494116
0.1464758
0.1632507
0.1337610


When k2 ≧ k20, k2m =
0.1791345
0.1568970
0.1341675
0.0805750
0.1130872


When k2 < k20, k2m =
0.1012146
0.0889111
0.0780908
0.0849402
0.0789160


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
14.312
35.616
79.447
3.314
27.322





















0.93 ≦ NA ≦ 1.0


105 < T ≦ 115







22/35












Case
11-11
11-12
11-13







n10
1.7070930
1.7028018
1.7027432



k10
0.0681638
0.0710148
0.0605235



d10 (nm)
152.585
217.506
215.929



n20
1.6551703
1.6456663
1.6646615



k20
0.2055639
0.2376270
0.1950188



d20 (nm)
237.501
177.429
233.713



When n1 ≧ n10, n1m =
0.0578955
0.0572009
0.0625354



When n1 < n10, n1m =
0.0537671
0.0422668
0.0608704



When k1 ≧ k10, k1m =
0.0790588
0.0645129
0.0827734



When k1 < k10, k1m =
0.0435974
0.0363208
0.0394031



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
20.858
18.787
80.567



When n2 ≧ n20, n2m =
0.1279260
0.3212610
0.2872583



When n2 < n20, n2m =
0.1371912
0.1436340
0.1515588



When k2 ≧ k20, k2m =
0.1138037
0.1091870
0.1188855



When k2 < k20, k2m =
0.0699854
0.0793604
0.0696228



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
73.529
27.402
72.558











0.93 ≦ NA ≦ 1.0


115 < T ≦ 125












Case
12-01
12-02
12-03
12-04
12-05





n10
1.8909431
1.9524263
1.9741784
1.9011191
1.7812655


k10
0.3085424
0.1909748
0.1389140
0.1449022
0.1647646


d10 (nm)
20.418
15.444
11.832
11.795
82.868


n20
1.5964478
1.7414925
1.7353816
1.6673230
1.6154117


k20
0.8353138
0.5288169
0.3892797
0.3043383
0.6141968


d20 (nm)
60.909
116.361
176.360
237.538
58.066


When n1 ≧ n10, n1m =
0.0896326
0.1058130
0.1273743
0.1294861
0.0526233


When n1 < n10, n1m =
0.0482068
0.0693359
0.0898755
0.1018958
0.0089111


When k1 ≧ k10, k1m =
0.0687769
0.0897180
0.1101831
0.1230750
0.0397290


When k1 < k10, k1m =
0.0788684
0.1029199
0.1292102
0.1244238
0.0264612


When d1 ≧ d10, d1m (nm) =
4.348
5.029
5.176
6.485
6.077


When d1 < d10, d1m (nm) =
2.275
2.981
3.260
4.641
1.033


When n2 ≧ n20, n2m =
0.1653235
0.1570801
0.1545581
0.1637158
0.2122083


When n2 < n20, n2m =
0.1924231
0.2075879
0.1868823
0.1636792
0.1151331


When k2 ≧ k20, k2m =
0.1706042
0.1628406
0.1476868
0.1368591
0.0534973


When k2 < k20, k2m =
0.1411853
0.1262378
0.1172034
0.1087061
0.1078625


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
22.263


When d2 < d20, d2m (nm) =
15.932
41.005
77.327
119.056
3.631





















0.93 ≦ NA ≦ 1.0


115 < T ≦ 125







23/35












Case
12-06
12-07
12-08
12-09
12-10





n10
1.7599364
1.7294022
1.7193592
1.7088052
1.7070991


k10
0.1268761
0.1028924
0.0869972
0.0815889
0.0689994


d10 (nm)
86.158
87.627
87.259
153.347
152.325


n20
1.7200975
1.6470339
1.6442041
1.6346844
1.6535493


k20
0.3928633
0.2862372
0.2301394
0.2563356
0.2091466


d20 (nm)
111.244
173.600
231.990
171.193
227.454


When n1 ≧ n10, n1m =
0.0606738
0.0583850
0.0624988
0.0517444
0.0574902


When n1 < n10, n1m =
0.0144922
0.0280688
0.0507288
0.0284387
0.0507019


When k1 ≧ k10, k1m =
0.0425989
0.0573376
0.0776721
0.0554700
0.0798230


When k1 < k10, k1m =
0.0406250
0.0512256
0.0527991
0.0388428
0.0424304


When d1 ≧ d10, d1m (nm) =
9.315
15.226
20.570
23.760
∞


When d1 < d10, d1m (nm) =
2.129
5.657
12.499
8.630
19.101


When n2 ≧ n20, n2m =
0.2113904
0.2168030
0.1303113
0.0779236
0.1123853


When n2 < n20, n2m =
0.1965198
0.1502832
0.1490173
0.1347925
0.1407104


When k2 ≧ k20, k2m =
0.1312354
0.1404419
0.1299280
0.1034583
0.1115356


When k2 < k20, k2m =
0.0975891
0.0892358
0.0798267
0.0797656
0.0721289


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
8.212
56.813
80.756
28.524
74.263










0.93 ≦ NA ≦ 1.0


115 < T ≦ 125











Case
12-11
12-12







n10
1.7021164
1.7030336



k10
0.0722203
0.0611451



d10 (nm)
217.158
215.722



n20
1.6379690
1.6657846



k20
0.2419462
0.1987136



d20 (nm)
168.107
223.276



When n1 ≧ n10, n1m =
0.0559460
0.0616492



When n1 < n10, n1m =
0.0369629
0.0571216



When k1 ≧ k10, k1m =
0.0643591
0.0831226



When k1 < k10, k1m =
0.0338867
0.0383716



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
15.623
78.766



When n2 ≧ n20, n2m =
0.1071765
0.1574146



When n2 < n20, n2m =
0.1467676
0.1563452



When k2 ≧ k20, k2m =
0.1072412
0.1188721



When k2 < k20, k2m =
0.0815015
0.0722400



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
28.758
73.194






















0.93 ≦ NA ≦ 1.0


125 < T ≦ 135







24/35












Case
13-01
13-02
13-03
13-04
13-05





n10
1.8737564
1.9697383
1.9916260
1.9141720
1.7868889


k10
0.3367363
0.2020294
0.1477036
0.1461879
0.1795709


d10 (nm)
20.276
14.764
11.315
11.459
80.605


n20
1.5133470
1.7299638
1.7257470
1.6683491
1.5409994


k20
0.8454522
0.5429087
0.3987910
0.3122132
0.6011754


d20 (nm)
55.480
109.268
168.578
226.037
53.925


When n1 ≧ n10, n1m =
0.0919055
0.1108435
0.1324426
0.1321936
0.0477332


When n1 < n10, n1m =
0.0465112
0.0677783
0.0890894
0.1050525
0.0054248


When k1 ≧ k10, k1m =
0.0634827
0.0913306
0.1103125
0.1242993
0.0376343


When k1 < k10, k1m =
0.0777942
0.1046863
0.1330994
0.1263855
0.0172180


When d1 ≧ d10, d1m (nm) =
4.127
4.585
4.757
6.157
5.240


When d1 < d10, d1m (nm) =
2.100
2.651
2.937
4.469
0.576


When n2 ≧ n20, n2m =
0.1485144
0.1609766
0.1572363
0.1614685
0.1647119


When n2 < n20, n2m =
0.1669641
0.2206506
0.1915698
0.1618420
0.0427734


When k2 ≧ k20, k2m =
0.1498572
0.1556653
0.1444165
0.1361792
0.0323462


When k2 < k20, k2m =
0.1523499
0.1322424
0.1219958
0.1118262
0.1188306


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
20.169


When d2 < d20, d2m (nm) =
11.040
31.054
70.606
112.796
1.698










0.93 ≦ NA ≦ 1.0


125 < T ≦ 135












Case
13-06
13-07
13-08
13-09
13-10





n10
1.7600620
1.7276490
1.7199953
1.7084320
1.7077870


k10
0.1342170
0.1044918
0.0874837
0.0820944
0.0691595


d10 (nm)
85.615
87.663
87.278
153.448
152.438


n20
1.6974715
1.6338870
1.6452183
1.6304269
1.6574806


k20
0.3980869
0.2915200
0.2346970
0.2625567
0.2137196


d20 (nm)
104.529
164.129
221.092
160.685
216.250


When n1 ≧ n10, n1m =
0.0556421
0.0573047
0.0630432
0.0509070
0.0582422


When n1 < n10, n1m =
0.0086938
0.0280566
0.0524658
0.0272729
0.0496997


When k1 ≧ k10, k1m =
0.0327625
0.0552051
0.0782056
0.0552515
0.0808813


When k1 < k10, k1m =
0.0328357
0.0492957
0.0525903
0.0375085
0.0423645


When d1 ≧ d10, d1m (nm) =
8.316
14.598
20.258
22.646
∞


When d1 < d10, d1m (nm) =
1.229
5.725
12.785
8.439
18.783


When n2 ≧ n20, n2m =
0.2312317
0.1156555
0.1151941
0.0670740
0.1089307


When n2 < n20, n2m =
0.2128992
0.1481116
0.1498755
0.1344946
0.1425024


When k2 ≧ k20, k2m =
0.1020886
0.1348413
0.1299255
0.1027795
0.1131628


When k2 < k20, k2m =
0.1027185
0.0927148
0.0827966
0.0840479
0.0754407


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
4.085
34.120
79.786
26.736
37.465





















0.93 ≦ NA ≦ 1.0


125 < T ≦ 135







25/35











Case
13-11
13-12







n10
1.7022055
1.7036940



k10
0.0725208
0.0612465



d10 (nm)
217.368
215.927



n20
1.6389178
1.6705104



k20
0.2487144
0.2029113



d20 (nm)
157.041
212.129



When n1 ≧ n10, n1m =
0.0559827
0.0624561



When n1 < n10, n1m =
0.0346814
0.0563831



When k1 ≧ k10, k1m =
0.0655139
0.0838672



When k1 < k10, k1m =
0.0329700
0.0384436



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
14.691
78.542



When n2 ≧ n20, n2m =
0.0987000
0.1459375



When n2 < n20, n2m =
0.1477222
0.1585510



When k2 ≧ k20, k2m =
0.1107947
0.1206909



When k2 < k20, k2m =
0.0868396
0.0754724



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
26.886
30.205











0.93 ≦ NA ≦ 1.0


135 < T ≦ 145












Case
14-01
14-02
14-03
14-04
14-05





n10
1.8402862
1.9646387
1.9624104
1.9059084
1.8166660


k10
0.3700261
0.2123233
0.1584699
0.1473615
0.1977639


d10 (nm)
23.403
16.447
12.893
12.089
79.798


n20
1.4966418
1.7618069
1.7211612
1.6694213
1.5572201


k20
1.0039549
0.5971846
0.4176484
0.3203376
0.7204992


d20 (nm)
41.463
94.995
156.173
216.011
40.224


When n1 ≧ n10, n1m =
0.0906067
0.1022083
0.1191650
0.1272498
0.0481567


When n1 < n10, n1m =
0.0460486
0.0622925
0.0801978
0.1004968
0.0053052


When k1 ≧ k10, k1m =
0.0548682
0.0821582
0.0987952
0.1188953
0.0360181


When k1 < k10, k1m =
0.0585999
0.0953162
0.1207214
0.1220581
0.0169287


When d1 ≧ d10, d1m (nm) =
4.196
4.611
5.209
6.343
4.539


When d1 < d10, d1m (nm) =
2.216
2.591
3.134
4.582
0.509


When n2 ≧ n20, n2m =
0.1766626
0.1806128
0.1668896
0.1603455
0.2142871


When n2 < n20, n2m =
0.1712292
0.2330798
0.1905432
0.1645447
0.0564514


When k2 ≧ k20, k2m =
0.2110498
0.1844238
0.1540930
0.1380908
0.0433691


When k2 < k20, k2m =
0.1916614
0.1446765
0.1279346
0.1140405
0.1534607


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
18.289


When d2 < d20, d2m (nm) =
8.143
21.467
66.145
96.079
1.264





















0.93 ≦ NA ≦ 1.0


135 < T ≦ 145







26/35












Case
14-06
14-07
14-08
14-09
14-10





n10
1.7655719
1.7293285
1.7214396
1.7092770
1.7085071


k10
0.1384976
0.1055583
0.0882507
0.0826318
0.0697446


d10 (nm)
86.596
87.952
87.451
153.805
152.663


n20
1.7129955
1.6364176
1.6482275
1.6322979
1.6592624


k20
0.4320226
0.3040668
0.2416232
0.2733763
0.2197085


d20 (nm)
91.539
153.339
210.993
150.296
206.543


When n1 ≧ n10, n1m =
0.0570667
0.0566760
0.0630505
0.0509021
0.0584448


When n1 < n10, n1m =
0.0070447
0.0278870
0.0524426
0.0272241
0.0508081


When k1 ≧ k10, k1m =
0.0284875
0.0544165
0.0773682
0.0546399
0.0801599


When k1 < k10, k1m =
0.0304980
0.0499133
0.0532507
0.0383374
0.0431470


When d1 ≧ d10, d1m (nm) =
7.855
14.249
20.142
22.873
∞


When d1 < d10, d1m (nm) =
0.972
5.625
12.498
8.268
18.904


When n2 ≧ n20, n2m =
0.2760107
0.1009705
0.1137622
0.0657813
0.1088953


When n2 < n20, n2m =
0.1995349
0.1448511
0.1471863
0.1316589
0.1395239


When k2 ≧ k20, k2m =
0.1305078
0.1378174
0.1321667
0.1037769
0.1143506


When k2 < k20, k2m =
0.1154834
0.0970654
0.0846460
0.0880420
0.0769495


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
3.137
27.699
76.164
22.775
33.816










0.93 ≦ NA ≦ 1.0


135 < T ≦ 145











Case
14-11
14-12







n10
1.7027802
1.7041709



k10
0.0728517
0.0617202



d10 (nm)
217.779
216.194



n20
1.6405373
1.6719897



k20
0.2588103
0.2085423



d20 (nm)
146.936
202.593



When n1 ≧ n10, n1m =
0.0566504
0.0631152



When n1 < n10, n1m =
0.0353162
0.0583606



When k1 ≧ k10, k1m =
0.0649280
0.0832544



When k1 < k10, k1m =
0.0337988
0.0392310



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
15.495
79.231



When n2 ≧ n20, n2m =
0.0962402
0.1448450



When n2 < n20, n2m =
0.1459131
0.1542615



When k2 ≧ k20, k2m =
0.1100769
0.1205054



When k2 < k20, k2m =
0.0901184
0.0767920



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
22.790
28.928






















0.93 ≦ NA ≦ 1.0


145 < T ≦ 155







27/35












Case
15-01
15-02
15-03
15-04
15-05





n10
1.8199816
1.9318464
1.9476580
1.9400781
1.9152409


k10
0.4068444
0.2280177
0.1546474
0.1580344
0.1421080


d10 (nm)
29.022
20.237
15.042
15.180
12.506


n20
1.5974175
1.8212470
1.7660961
1.7558824
1.6892699


k20
1.4701111
0.6871951
0.4559575
0.4525330
0.3391765


d20 (nm)
24.558
79.181
140.877
141.749
204.998


When n1 ≧ n10, n1m =
0.0783313
0.0902905
0.1062402
0.1057410
0.1233240


When n1 < n10, n1m =
0.0485986
0.0576099
0.0737439
0.0730676
0.0958533


When k1 ≧ k10, k1m =
0.0424463
0.0706348
0.0877539
0.0877856
0.1136047


When k1 < k10, k1m =
0.0340247
0.0852002
0.1066162
0.1062646
0.1201245


When d1 ≧ d10, d1m (nm) =
3.673
5.078
5.535
5.630
6.208


When d1 < d10, d1m (nm) =
2.651
2.819
3.357
3.413
4.390


When n2 ≧ n20, n2m =
0.2911646
0.2069556
0.1703650
0.1705981
0.1609875


When n2 < n20, n2m =
0.1897607
0.2328674
0.1899780
0.1895239
0.1746619


When k2 ≧ k20, k2m =
0.2661255
0.2545776
0.1755676
0.1739502
0.1429504


When k2 < k20, k2m =
0.2599438
0.1612646
0.1333740
0.1331494
0.1167700


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
5.427
21.100
63.576
64.042
84.536










0.93 ≦ NA ≦ 1.0


145 < T ≦ 155












Case
15-06
15-07
15-08
15-09
15-10





n10
1.8773964
1.7792899
1.7347668
1.7234258
1.7112569


k10
0.2151408
0.1408151
0.1082989
0.0907869
0.0850611


d10 (nm)
81.211
87.880
88.119
87.442
153.930


n20
1.7568637
1.7944868
1.6522930
1.6482492
1.6361524


k20
1.2210655
0.5090378
0.3260600
0.2516544
0.2898839


d20 (nm)
20.666
75.457
142.664
202.556
141.116


When n1 ≧ n10, n1m =
0.0535974
0.0567944
0.0566736
0.0621204
0.0507385


When n1 < n10, n1m =
0.0100415
0.0103674
0.0259888
0.0480981
0.0259363


When k1 ≧ k10, k1m =
0.0386597
0.0332520
0.0534692
0.0749170
0.0514124


When k1 < k10, k1m =
0.0268323
0.0369287
0.0521716
0.0541968
0.0401160


When d1 ≧ d10, d1m (nm) =
4.095
7.577
13.934
19.192
22.547


When d1 < d10, d1m (nm) =
0.855
1.369
4.946
11.117
7.637


When n2 ≧ n20, n2m =
0.4215723
0.2684375
0.1205920
0.1204028
0.0675806


When n2 < n20, n2m =
0.3791321
0.1854980
0.1442749
0.1439111
0.1298389


When k2 ≧ k20, k2m =
0.1639099
0.2106580
0.1452100
0.1328479
0.0998340


When k2 < k20, k2m =
0.2423328
0.1335254
0.1007751
0.0850952
0.0900806


When d2 ≧ d20, d2m (nm) =
5.052
14.783
∞
∞
∞


When d2 < d20, d2m (nm) =
1.977
4.929
23.591
72.330
19.479





















0.93 ≦ NA ≦ 1.0


145 < T ≦ 155







28/35












Case
15-11
15-12
15-13







n10
1.7092054
1.7036310
1.7042855



k10
0.0717413
0.0749476
0.0635030



d10 (nm)
152.725
217.788
216.233



n20
1.6572540
1.6384900
1.6687346



k20
0.2283199
0.2727185
0.2164860



d20 (nm)
198.410
138.609
194.709



When n1 ≧ n10, n1m =
0.0574158
0.0563904
0.0624048



When n1 < n10, n1m =
0.0505359
0.0361853
0.0601721



When k1 ≧ k10, k1m =
0.0766162
0.0604248
0.0800598



When k1 < k10, k1m =
0.0439771
0.0350879
0.0400427



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
17.754
14.415
78.936



When n2 ≧ n20, n2m =
0.1103052
0.0951196
0.1487622



When n2 < n20, n2m =
0.1349475
0.1401550
0.1481909



When k2 ≧ k20, k2m =
0.1121790
0.1001306
0.1166199



When k2 < k20, k2m =
0.0769556
0.0916321
0.0768066



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
28.953
19.518
28.644











0.93 ≦ NA ≦ 1.0


155 < T ≦ 165












Case
16-01
16-02
16-03
16-04
16-05





n10
1.8175791
1.9193642
1.9516445
1.9419697
1.9282358


k10
0.4385823
0.2501320
0.1607715
0.1648951
0.1504554


d10 (nm)
37.187
21.908
15.944
16.094
12.282


n20
2.9488620
1.8321620
1.7911399
1.7764317
1.6857745


k20
3.6605721
0.7789298
0.4964603
0.4910919
0.3551730


d20 (nm)
5.671
69.456
129.934
131.139
198.143


When n1 ≧ n10, n1m =
0.0604736
0.0852295
0.1013757
0.1010083
0.1240356


When n1 < n10, n1m =
0.0333899
0.0547046
0.0713342
0.0704993
0.0944006


When k1 ≧ k10, k1m =
0.0318896
0.0632361
0.0833032
0.0834521
0.1140308


When k1 < k10, k1m =
0.0127527
0.0803174
0.1011133
0.1007434
0.1227710


When d1 ≧ d10, d1m (nm) =
2.684
4.937
5.403
5.524
5.825


When d1 < d10, d1m (nm) =
1.056
2.746
3.284
3.349
4.015


When n2 ≧ n20, n2m =
0.8885571
0.1992395
0.1663013
0.1663708
0.1592810


When n2 < n20, n2m =
0.4338977
0.2305408
0.1904468
0.1899951
0.1750964


When k2 ≧ k20, k2m =
0.2239417
0.2871423
0.1858569
0.1831470
0.1419360


When k2 < k20, k2m =
0.5593811
0.1675525
0.1346912
0.1341003
0.1171777


When d2 ≧ d20, d2m (nm) =
2.121
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
1.497
16.789
53.787
54.606
81.510





















0.93 ≦ NA ≦ 1.0


155 < T ≦ 165







29/35












Case
16-06
16-07
16-08
16-09
16-10





n10
1.8704725
1.7960814
1.7418606
1.7257176
1.7136245


k10
0.2299368
0.1479091
0.1134159
0.0948039
0.0896483


d10 (nm)
88.746
88.347
87.888
87.264
153.565


n20
2.8158519
1.9330235
1.6717189
1.6472351
1.6392609


k20
3.0739838
0.6225271
0.3550776
0.2650084
0.3111392


d20 (nm)
4.992
60.492
132.384
194.269
132.434


When n1 ≧ n10, n1m =
0.0496790
0.0539771
0.0559290
0.0605103
0.0493213


When n1 < n10, n1m =
0.0158618
0.0116589
0.0229565
0.0427002
0.0176343


When k1 ≧ k10, k1m =
0.0339600
0.0324597
0.0502661
0.0714246
0.0448999


When k1 < k10, k1m =
0.0196045
0.0413477
0.0524426
0.0547058
0.0377209


When d1 ≧ d10, d1m (nm) =
4.203
6.741
12.890
17.512
20.755


When d1 < d10, d1m (nm) =
1.412
1.425
4.045
9.285
4.775


When n2 ≧ n20, n2m =
0.7568213
0.2080432
0.1385022
0.1276587
0.0653149


When n2 < n20, n2m =
0.6339124
0.1864246
0.1456726
0.1431897
0.1296729


When k2 ≧ k20, k2m =
0.5784314
0.2482080
0.1472144
0.1310840
0.0863611


When k2 < k20, k2m =
0.6241199
0.1496924
0.1027478
0.0854395
0.0904016


When d2 ≧ d20, d2m (nm) =
1.695
9.818
∞
∞
∞


When d2 < d20, d2m (nm) =
1.276
6.130
21.225
35.287
17.454










0.93 ≦ NA ≦ 1.0


155 < T ≦ 165













Case
16-11
16-12
16-13
16-14







n10
1.7097149
1.7044725
1.7041849
1.7061658



k10
0.0750113
0.0790614
0.0664191
0.0592006



d10 (nm)
152.537
217.265
215.910
215.675



n20
1.6527377
1.6350180
1.6625759
1.6951633



k20
0.2392317
0.2903973
0.2261823
0.1893046



d20 (nm)
190.639
130.687
187.261
240.772



When n1 ≧ n10, n1m =
0.0553772
0.0545740
0.0600366
0.0676270



When n1 < n10, n1m =
0.0477368
0.0344788
0.0568494
0.0690149



When k1 ≧ k10, k1m =
0.0715491
0.0525977
0.0752148
0.0835681



When k1 < k10, k1m =
0.0443665
0.0337817
0.0404053
0.0425281



When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞



When d1 < d10, d1m (nm) =
16.235
12.121
77.039
86.324



When n2 ≧ n20, n2m =
0.1116882
0.0916113
0.1582788
0.1718628



When n2 < n20, n2m =
0.1331189
0.1411133
0.1443433
0.1614490



When k2 ≧ k20, k2m =
0.1061816
0.0827698
0.1097974
0.1248706



When k2 < k20, k2m =
0.0766345
0.0918372
0.0766272
0.0699548



When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞



When d2 < d20, d2m (nm) =
27.428
17.505
27.098
73.085






















0.93 ≦ NA ≦ 1.0


165 < T ≦ 175







30/35












Case
17-01
17-02
17-03
17-04
17-05





n10
1.9650460
1.9384951
1.9139584
1.7857662
1.7433983


k10
0.1748342
0.1550287
0.1299465
0.1574086
0.1202381


d10 (nm)
15.368
12.323
11.343
86.539
87.036


n20
1.7719438
1.6895811
1.6883766
1.7907030
1.6559011


k20
0.5219218
0.3734128
0.3007198
0.6497694
0.3733381


d20 (nm)
124.100
189.293
246.427
59.718
125.629


When n1 ≧ n10, n1m =
0.1023816
0.1220520
0.1341687
0.0495288
0.0535669


When n1 < n10, n1m =
0.0697961
0.0912976
0.1083984
0.0051111
0.0188965


When k1 ≧ k10, k1m =
0.0830420
0.1112122
0.1288184
0.0186707
0.0452673


When k1 < k10, k1m =
0.1016052
0.1222986
0.1299465
0.0330212
0.0491577


When d1 ≧ d10, d1m (nm) =
5.001
5.526
6.413
5.954
11.233


When d1 < d10, d1m (nm) =
2.956
3.739
4.697
0.624
3.144


When n2 ≧ n20, n2m =
0.1581653
0.1572925
0.1540161
0.0858301
0.1199121


When n2 < n20, n2m =
0.1927075
0.1754407
0.1685632
0.1889197
0.1519067


When k2 ≧ k20, k2m =
0.1753381
0.1419458
0.1368945
0.0730774
0.1241467


When k2 < k20, k2m =
0.1306897
0.1171997
0.1067334
0.1258240
0.0983862


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
51.895
79.651
119.351
3.741
21.467










0.93 ≦ NA ≦ 1.0


165 < T ≦ 175












Case
17-06
17-07
17-08
17-09
17-10





n10
1.7262549
1.7236673
1.7140199
1.7096017
1.7107217


k10
0.0993784
0.0842645
0.0949670
0.0783956
0.0680252


d10 (nm)
86.812
87.109
152.601
152.026
152.100


n20
1.6373093
1.6685549
1.6238426
1.6437329
1.6799600


k20
0.2753256
0.2274459
0.3258368
0.2483227
0.2063397


d20 (nm)
186.729
241.120
125.450
182.921
236.403


When n1 ≧ n10, n1m =
0.0583655
0.0638147
0.0459595
0.0526709
0.0601990


When n1 < n10, n1m =
0.0389001
0.0503784
0.0111768
0.0448047
0.0600891


When k1 ≧ k10, k1m =
0.0685583
0.0805896
0.0359302
0.0672742
0.0800940


When k1 < k10, k1m =
0.0538513
0.0560901
0.0310425
0.0434424
0.0457349


When d1 ≧ d10, d1m (nm) =
15.725
22.939
17.229
∞
∞


When d1 < d10, d1m (nm) =
8.012
11.976
2.824
14.351
24.120


When n2 ≧ n20, n2m =
0.1242969
0.1275708
0.0486890
0.1084961
0.1263135


When n2 < n20, n2m =
0.1456055
0.1521838
0.1337903
0.1356079
0.1464233


When k2 ≧ k20, k2m =
0.1234131
0.1338855
0.0591821
0.0969312
0.1151416


When k2 < k20, k2m =
0.0846008
0.0776428
0.0858325
0.0756372
0.0703125


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
66.105
78.842
17.102
28.470
72.561





















0.93 ≦ NA ≦ 1.0


165 < T ≦ 175







31/35












Case
17-11
17-12
17-13







n10
1.7042582
1.7037677
1.7056779



k10
0.0836625
0.0692974
0.0609868



d10 (nm)
216.186
215.313
215.198



n20
1.6202806
1.6544674
1.6903958



k20
0.3033538
0.2346728
0.1952987



d20 (nm)
123.599
179.446
232.683



When n1 ≧ n10, n1m =
0.0501758
0.0567249
0.0651611



When n1 < n10, n1m =
0.0271130
0.0522852
0.0658081



When k1 ≧ k10, k1m =
0.0439600
0.0710352
0.0811584



When k1 < k10, k1m =
0.0300366
0.0394434
0.0413635



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
9.341
23.552
82.870



When n2 ≧ n20, n2m =
0.0785254
0.1613647
0.1758447



When n2 < n20, n2m =
0.1457166
0.1478357
0.1648547



When k2 ≧ k20, k2m =
0.0611975
0.1025415
0.1200317



When k2 < k20, k2m =
0.0887231
0.0762732
0.0707166



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
17.421
28.206
71.908











0.93 ≦ NA ≦ 1.0


175 < T ≦ 185












Case
18-01
18-02
18-03
18-04
18-05





n10
1.9750220
1.9943589
1.9365478
1.8874503
1.7406539


k10
0.3055970
0.1905841
0.1715491
0.1503402
0.1271964


d10 (nm)
17.312
13.627
12.200
12.006
86.109


n20
1.6357631
1.7309349
1.6649916
1.6561886
1.6157675


k20
0.8207912
0.5263943
0.3790440
0.2991899
0.3771605


d20 (nm)
66.973
122.033
183.216
242.151
120.682


When n1 ≧ n10, n1m =
0.0935791
0.1114148
0.1215747
0.1285913
0.0513330


When n1 < n10, n1m =
0.0459473
0.0702148
0.0894250
0.1026367
0.0144434


When k1 ≧ k10, k1m =
0.0590857
0.0871582
0.1112146
0.1261365
0.0386914


When k1 < k10, k1m =
0.0823853
0.1098083
0.1208740
0.1243677
0.0453528


When d1 ≧ d10, d1m (nm) =
3.436
4.283
5.306
6.728
10.132


When d1 < d10, d1m (nm) =
1.707
2.491
3.559
4.870
2.323


When n2 ≧ n20, n2m =
0.1368286
0.1494128
0.1559277
0.1523608
0.0829712


When n2 < n20, n2m =
0.2106677
0.1994727
0.1768091
0.1649011
0.1612537


When k2 ≧ k20, k2m =
0.1566431
0.1521973
0.1368372
0.1332068
0.0933081


When k2 < k20, k2m =
0.1361353
0.1253687
0.1152344
0.1052795
0.0942554


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
18.814
47.829
81.274
118.000
24.527





















0.93 ≦ NA ≦ 1.0


175 < T ≦ 185







32/35












Case
18-06
18-07
18-08
18-09
18-10





n10
1.7253418
1.7237735
1.7126639
1.7091592
1.7108527


k10
0.1032843
0.0864157
0.0996282
0.0809109
0.0696108


d10 (nm)
86.339
86.885
151.701
151.551
151.827


n20
1.6224018
1.6650124
1.5953952
1.6344497
1.6784072


k20
0.2809650
0.2327133
0.3310599
0.2545275
0.2111338


d20 (nm)
178.956
231.784
118.977
174.271
226.839


When n1 ≧ n10, n1m =
0.0565039
0.0626416
0.0424548
0.0505127
0.0583557


When n1 < n10, n1m =
0.0377893
0.0495728
0.0068591
0.0425964
0.0570093


When k1 ≧ k10, k1m =
0.0671277
0.0801477
0.0264331
0.0654321
0.0790332


When k1 < k10, k1m =
0.0514600
0.0546265
0.0262610
0.0409290
0.0440662


When d1 ≧ d10, d1m (nm) =
14.314
20.851
14.034
22.266
∞


When d1 < d10, d1m (nm) =
7.519
11.390
1.678
12.457
21.354


When n2 ≧ n20, n2m =
0.1133289
0.1230408
0.0286230
0.1046033
0.1258447


When n2 < n20, n2m =
0.1506311
0.1572058
0.1416589
0.1413440
0.1529517


When k2 ≧ k20, k2m =
0.1148096
0.1304126
0.0346130
0.0907129
0.1118689


When k2 < k20, k2m =
0.0848999
0.0792493
0.0817810
0.0764514
0.0721448


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
64.642
80.544
18.599
31.028
73.232










0.93 ≦ NA ≦ 1.0


175 < T ≦ 185












Case
18-11
18-12
18-13







n10
1.7032995
1.7035257
1.7058486



k10
0.0874338
0.0712651
0.0623526



d10 (nm)
215.388
214.888
214.924



n20
1.6000078
1.6490638
1.6902455



k20
0.3100603
0.2413259
0.1999123



d20 (nm)
116.088
170.219
222.958



When n1 ≧ n10, n1m =
0.0459119
0.0540906
0.0637158



When n1 < n10, n1m =
0.0201135
0.0472498
0.0624988



When k1 ≧ k10, k1m =
0.0380823
0.0692078
0.0795654



When k1 < k10, k1m =
0.0261584
0.0371997
0.0400098



When d1 ≧ d10, d1m (nm) =
25.691
∞
∞



When d1 < d10, d1m (nm) =
6.401
18.086
80.109



When n2 ≧ n20, n2m =
0.0666833
0.1564661
0.1701733



When n2 < n20, n2m =
0.1555847
0.1549194
0.1734229



When k2 ≧ k20, k2m =
0.0497668
0.0999182
0.1182764



When k2 < k20, k2m =
0.0866650
0.0781360
0.0731396



When d2 ≧ d20, d2m (nm) =
13.606
∞
∞



When d2 < d20, d2m (nm) =
18.924
29.474
72.740






















0.93 ≦ NA ≦ 1.0


185 < T ≦ 195







33/35












Case
19-01
19-02
19-03
19-04
19-05





n10
2.0157422
1.9298641
1.9158213
1.9035507
1.7387191


k10
0.3310994
0.1874025
0.1413868
0.0919796
0.1333266


d10 (nm)
15.233
12.335
11.496
11.593
85.772


n20
1.5732193
1.6401635
1.6782430
1.7330388
1.5838112


k20
0.8191417
0.3856200
0.3150440
0.2716233
0.3839989


d20 (nm)
66.313
174.874
226.685
274.138
113.170


When n1 ≧ n10, n1m =
0.0908862
0.1198010
0.1318933
0.1353418
0.0494861


When n1 < n10, n1m =
0.0435144
0.0881482
0.1071143
0.1119397
0.0110315


When k1 ≧ k10, k1m =
0.0607654
0.1097412
0.1276587
0.1301843
0.0306482


When k1 < k10, k1m =
0.0886279
0.1159265
0.1266907
0.0919796
0.0445325


When d1 ≧ d10, d1m (nm) =
2.825
5.183
6.173
7.339
9.205


When d1 < d10, d1m (nm) =
1.353
3.517
4.556
5.508
1.748


When n2 ≧ n20, n2m =
0.1250940
0.1513354
0.1454334
0.1421106
0.0499280


When n2 < n20, n2m =
0.1772742
0.1779919
0.1691821
0.1744556
0.1654175


When k2 ≧ k20, k2m =
0.1164954
0.1335864
0.1351135
0.1421582
0.0743848


When k2 < k20, k2m =
0.1392041
0.1184119
0.1117639
0.1051697
0.0978845


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
17.571
78.501
112.763
138.595
25.987










0.93 ≦ NA ≦ 1.0


185 < T ≦ 195












Case
19-06
19-07
19-08
19-09
19-10





n10
1.7256246
1.7253546
1.7287042
1.7096582
1.7121643


k10
0.1055723
0.0874820
0.0760165
0.0821714
0.0705329


d10 (nm)
86.279
86.928
87.515
151.624
152.001


n20
1.6177137
1.6696157
1.7081188
1.6358848
1.6853812


k20
0.2895611
0.2389730
0.2041866
0.2635969
0.2167566


d20 (nm)
168.375
220.361
272.150
162.984
215.233


When n1 ≧ n10, n1m =
0.0562903
0.0628687
0.0679712
0.0505103
0.0586621


When n1 < n10, n1m =
0.0396094
0.0498669
0.0509912
0.0389160
0.0543164


When k1 ≧ k10, k1m =
0.0670349
0.0806128
0.0832776
0.0662488
0.0789514


When k1 < k10, k1m =
0.0491772
0.0538904
0.0576746
0.0390271
0.0434973


When d1 ≧ d10, d1m (nm) =
13.425
20.169
39.294
20.568
∞


When d1 < d10, d1m (nm) =
7.774
11.144
12.836
11.141
20.056


When n2 ≧ n20, n2m =
0.1053076
0.1213562
0.1287134
0.1062195
0.1257849


When n2 < n20, n2m =
0.1536951
0.1604126
0.1670996
0.1450281
0.1574817


When k2 ≧ k20, k2m =
0.1136377
0.1320007
0.1531152
0.0931067
0.1145862


When k2 < k20, k2m =
0.0898669
0.0840454
0.0776611
0.0825256
0.0770361


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
45.429
80.918
110.597
30.017
74.310





















0.93 ≦ NA ≦ 1.0


185 < T ≦ 195







34/35












Case
19-11
19-12
19-13
19-14
19-15





n10
1.7151566
1.7029318
1.7041956
1.7070069
1.7080920


k10
0.0645755
0.0900998
0.0721897
0.0633145
0.0595697


d10 (nm)
152.412
215.656
215.114
215.207
215.250


n20
1.7135234
1.5920483
1.6533659
1.6971996
1.7125257


k20
0.1842756
0.3226491
0.2502000
0.2048445
0.1741269


d20 (nm)
268.692
105.543
158.704
211.558
267.229


When n1 ≧ n10, n1m =
0.0656799
0.0437866
0.0537561
0.0639758
0.0752185


When n1 < n10, n1m =
0.0585193
0.0130481
0.0437659
0.0602637
0.0712415


When k1 ≧ k10, k1m =
0.0803796
0.0379236
0.0696973
0.0785339
0.0793298


When k1 < k10, k1m =
0.0475867
0.0209644
0.0354407
0.0397900
0.0383728


When d1 ≧ d10, d1m (nm) =
∞
20.412
∞
∞
∞


When d1 < d10, d1m (nm) =
76.169
3.912
15.725
78.897
136.900


When n2 ≧ n20, n2m =
0.1359851
0.0436487
0.1238757
0.1440674
0.1618445


When n2 < n20, n2m =
0.1709363
0.1590417
0.1491174
0.1814563
0.2117529


When k2 ≧ k20, k2m =
0.1377368
0.0580493
0.1037561
0.1202234
0.1371057


When k2 < k20, k2m =
0.0711096
0.0823193
0.0849219
0.0779297
0.0717078


When d2 ≧ d20, d2m (nm) =
∞
9.984
∞
∞
∞


When d2 < d20, d2m (nm) =
82.771
19.617
23.813
73.684
77.607










0.93 ≦ NA ≦ 1.0


195 < T ≦ 205












Case
20-01
20-02
20-03
20-04
20-05





n10
1.9115074
1.9153788
1.8712999
1.7275221
1.7279210


k10
0.1960527
0.1490337
0.0897979
0.1065695
0.0881248


d10 (nm)
13.258
11.515
14.536
86.590
87.122


n20
1.6255021
1.6682692
1.7614462
1.6227655
1.6778177


k20
0.3984556
0.3197853
0.2821612
0.3041284
0.2471127


d20 (nm)
164.068
218.507
257.799
156.467
209.069


When n1 ≧ n10, n1m =
0.1142444
0.1325989
0.1158582
0.0562817
0.0637024


When n1 < n10, n1m =
0.0852515
0.1080505
0.0942114
0.0426550
0.0501379


When k1 ≧ k10, k1m =
0.1044482
0.1295020
0.1096521
0.0681348
0.0804810


When k1 < k10, k1m =
0.1084790
0.1269031
0.0897979
0.0488770
0.0543994


When d1 ≧ d10, d1m (nm) =
5.346
6.134
8.659
13.270
20.006


When d1 < d10, d1m (nm) =
3.730
4.524
6.443
8.305
10.905


When n2 ≧ n20, n2m =
0.1424097
0.1416443
0.1412390
0.1051294
0.1236353


When n2 < n20, n2m =
0.1779224
0.1667200
0.1823743
0.1526196
0.1593042


When k2 ≧ k20, k2m =
0.1351575
0.1341370
0.1542419
0.1188623
0.1364233


When k2 < k20, k2m =
0.1244714
0.1144324
0.1102271
0.0976929
0.0887854


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
70.107
105.511
128.903
31.502
77.053





















0.93 ≦ NA ≦ 1.0


195 < T ≦ 205







35/35












Case
20-06
20-07
20-08
20-09
20-10





n10
1.7316602
1.7109076
1.7140510
1.7169074
1.7034522


k10
0.0769958
0.0825870
0.0712311
0.0659464
0.0912009


d10 (nm)
87.563
152.078
152.368
152.739
216.873


n20
1.7153560
1.6429824
1.6947912
1.7201685
1.5969711


k20
0.2092703
0.2767726
0.2239389
0.1888883
0.3506487


d20 (nm)
261.518
151.325
204.003
258.117
92.838


When n1 ≧ n10, n1m =
0.0685693
0.0512622
0.0601404
0.0671716
0.0436548


When n1 < n10, n1m =
0.0495715
0.0375720
0.0532251
0.0484131
0.0089709


When k1 ≧ k10, k1m =
0.0827515
0.0683850
0.0790723
0.0783716
0.0369128


When k1 < k10, k1m =
0.0588892
0.0391077
0.0446033
0.0456335
0.0165588


When d1 ≧ d10, d1m (nm) =
35.460
20.848
∞
∞
19.781


When d1 < d10, d1m (nm) =
11.967
10.711
16.311
17.445
2.680


When n2 ≧ n20, n2m =
0.1321082
0.1010400
0.1225134
0.1362366
0.0345703


When n2 < n20, n2m =
0.1646814
0.1448950
0.1569727
0.1688831
0.1562476


When k2 ≧ k20, k2m =
0.1585754
0.0998694
0.1194824
0.1443347
0.0797021


When k2 < k20, k2m =
0.0798230
0.0905042
0.0814771
0.0735376
0.0638440


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
10.032


When d2 < d20, d2m (nm) =
87.011
25.146
1.899
78.182
16.775










0.93 ≦ NA ≦ 1.0


195 < T ≦ 205












Case
20-11
20-12
20-13







n10
1.7053294
1.7084550
1.7088490



k10
0.0723641
0.0642090
0.0611230



d10 (nm)
215.802
215.782
215.750



n20
1.6624125
1.7063284
1.7155496



k20
0.2625944
0.2112603
0.1784523



d20 (nm)
147.133
200.541
257.296



When n1 ≧ n10, n1m =
0.0548254
0.0651489
0.0765845



When n1 < n10, n1m =
0.0418201
0.0593726
0.0732715



When k1 ≧ k10, k1m =
0.0710583
0.0775024
0.0765796



When k1 < k10, k1m =
0.0355750
0.0411511
0.0355579



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
15.640
79.525
76.637



When n2 ≧ n20, n2m =
0.1192065
0.1417981
0.1626379



When n2 < n20, n2m =
0.1432642
0.1798657
0.2073511



When k2 ≧ k20, k2m =
0.1091699
0.1229614
0.1404065



When k2 < k20, k2m =
0.0923608
0.0791760
0.0746033



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
19.545
71.258
73.210










In accordance with a third embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.0<NA≦1.1 In accordance with the third embodiment of the invention, an exposure method is used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.0<NA≦1.1
The antireflective film or the antireflective film used in the exposure method according to the third embodiment of the invention includes an upper layer having a complex refractive index N1 , and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the following equations:

N1=n1−k1i 

N2=n2−k2i

Assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm), when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the following relational expression:

{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1

However, a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20. In the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m=”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”; in the line of “When d1≧d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d20−d2m”.












1.0 < NA ≦ 1.1


2 ≦ T ≦ 15







1/34












Case
1-01
1-02
1-03
1-04
1-05





n10
2.1002530
1.9014716
1.8817545
1.8713707
1.8894555


k10
0.0458360
0.1897321
0.1528631
0.1131033
0.1025295


d10 (nm)
25.245
35.107
29.787
20.680
13.808


n20
3.6613926
3.6832791
2.2496615
1.8471360
1.7319643


k20
2.0917723
0.6232721
0.5909670
0.3799287
0.2879285


d20 (nm)
4.980
30.030
58.673
139.609
214.126


When n1 ≧ n10, n1m =
0.0805884
0.0768188
0.0754700
0.0824719
0.1060120


When n1 < n10, n1m =
0.0800293
0.0653833
0.0584985
0.0566113
0.0706006


When k1 ≧ k10, k1m =
0.0719092
0.0582312
0.0563574
0.0660449
0.0898218


When k1 < k10, k1m =
0.0458360
0.0865906
0.0835730
0.0866101
0.1025295


When d1 ≧ d10, d1m (nm) =
3.502
5.628
6.909
7.972
7.080


When d1 < d10, d1m (nm) =
2.843
4.121
4.441
4.574
4.198


When n2 ≧ n20, n2m =
0.2511194
0.1375208
0.1500757
0.1234998
0.1256079


When n2 < n20, n2m =
0.2478674
0.1642285
0.1673572
0.1560254
0.1556494


When k2 ≧ k20, k2m =
0.2675171
0.1813342
0.1899841
0.1681030
0.1175488


When k2 < k20, k2m =
0.2241895
0.1363525
0.1337048
0.1033130
0.0926782


When d2 ≧ d20, d2m (nm) =
0.668
1.453
8.618
∞
∞


When d2 < d20, d2m (nm) =
0.632
1.466
7.778
59.745
82.499










1.0 < NA ≦ 1.1


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.8919474
1.8730447
1.7734811
1.7581396
1.7209511


k10
0.0886250
0.0995044
0.0942049
0.0894114
0.0778149


d10 (nm)
14.825
12.107
96.210
94.485
94.005


n20
1.7713589
1.6971361
2.0242448
1.8216770
1.6746822


k20
0.2959415
0.2384266
0.4293783
0.2841737
0.2144041


d20 (nm)
207.437
276.341
66.416
135.446
211.729


When n1 ≧ n10, n1m =
0.1001855
0.1196069
0.0579333
0.0504431
0.0487988


When n1 < n10, n1m =
0.0678418
0.0862451
0.0202832
0.0122217
0.0195996


When k1 ≧ k10, k1m =
0.0828455
0.1086084
0.0429993
0.0327991
0.0449207


When k1 < k10, k1m =
0.0886250
0.0995044
0.0440173
0.0383289
0.0441089


When d1 ≧ d10, d1m (nm) =
7.253
7.622
12.574
14.854
20.756


When d1 < d10, d1m (nm) =
4.294
5.017
3.736
2.430
5.594


When n2 ≧ n20, n2m =
0.1250818
0.1274023
0.1038489
0.1178979
0.0654700


When n2 < n20, n2m =
0.1542432
0.1390320
0.1236121
0.1075012
0.0984851


When k2 ≧ k20, k2m =
0.1281506
0.1059973
0.1023560
0.1052271
0.0726978


When k2 < k20, k2m =
0.0937659
0.0853320
0.1026587
0.0735156
0.0618335


When d2 ≧ d20, d2m (nm) =
∞
∞
5.946
13.526
∞


When d2 < d20, d2m (nm) =
79.532
130.356
6.729
7.895
26.663





















1.0 < NA ≦ 1.1


2 ≦ T ≦ 15







2/34












Case
1-11
1-12
1-13
1-14
1-15





n10
1.7166765
1.7166130
1.7322234
1.7049421
1.7064564


k10
0.0677623
0.0755230
0.0835200
0.0655754
0.0573750


d10 (nm)
92.667
182.689
166.765
163.194
160.636


n20
1.6766991
6.5634515
1.9262925
1.6664527
1.6879767


k20
0.1797231
3.2079655
0.3700807
0.1954874
0.1655431


d20 (nm)
270.198
1.017
69.546
208.736
264.028


When n1 ≧ n10, n1m =
0.0538269
0.0791455
0.0502930
0.0463574
0.0530786


When n1 < n10, n1m =
0.0365198
0.0150903
0.0019495
0.0298389
0.0507080


When k1 ≧ k10, k1m =
0.0633020
0.0382202
0.0176428
0.0426367
0.0606909


When k1 < k10, k1m =
0.0490027
0.0352063
0.0101367
0.0363086
0.0412036


When d1 ≧ d10, d1m (nm) =
∞
44.970
29.513
∞
∞


When d1 < d10, d1m (nm) =
11.921
5.503
0.534
14.465
82.763


When n2 ≧ n20, n2m =
0.0746594
0.3760779
0.0943127
0.0451807
0.0846008


When n2 < n20, n2m =
0.1088159
0.6761377
0.0252344
0.0894604
0.1080103


When k2 ≧ k20, k2m =
0.0728833
0.4281982
0.0109839
0.0413684
0.0543652


When k2 < k20, k2m =
0.0561267
0.6156824
0.0921399
0.0546765
0.0510388


When d2 ≧ d20, d2m (nm) =
∞
0.095
5.760
∞
∞


When d2 < d20, d2m (nm) =
76.266
0.159
0.905
22.049
32.675










1.0 < NA ≦ 1.1


2 ≦ T ≦ 15












Case
1-16
1-17
1-18
1-19
1-20





n10
1.6929499
1.6905856
1.6919500
1.6995270
1.6946661


k10
0.0758677
0.0724871
0.0673580
0.0541447
0.0598692


d10 (nm)
218.538
210.998
207.119
221.890
292.769


n20
1.7888879
1.7113381
1.6973679
1.6914313
5.7902895


k20
0.3373861
0.2424201
0.1951159
0.1602785
2.6464640


d20 (nm)
83.914
155.877
222.394
261.841
1.370


When n1 ≧ n10, n1m =
0.0154590
0.0284326
0.0459937
0.0695007
0.0688428


When n1 < n10, n1m =
0.0644519
0.0618115
0.0647253
0.0614612
0.0576074


When k1 ≧ k10, k1m =
0.0296802
0.0451062
0.0571143
0.0607031
0.0650110


When k1 < k10, k1m =
0.0222290
0.0323779
0.0391223
0.0380823
0.0345483


When d1 ≧ d10, d1m (nm) =
8.212
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
25.706
29.733
39.073
91.262
43.839


When n2 ≧ n20, n2m =
0.1222742
0.1267554
0.1643848
0.2245898
0.7013342


When n2 < n20, n2m =
0.0248633
0.0660693
0.1720679
0.1025806
0.7193848


When k2 ≧ k20, k2m =
0.0580225
0.0965234
0.1267737
0.1053369
0.5239075


When k2 < k20, k2m =
0.0934216
0.0846191
0.0756384
0.0566919
0.6531299


When d2 ≧ d20, d2m (nm) =
16.998
∞
∞
∞
0.304


When d2 < d20, d2m (nm) =
2.716
12.405
72.248
75.278
0.354





















1.0 < NA ≦ 1.1


2 ≦ T ≦ 15







3/34













Case
1-21
1-22
1-23
1-24







n10
1.6927273
1.6938682
1.6959215
1.6965163



k10
0.0641185
0.0632641
0.0601626
0.0560943



d10 (nm)
275.960
269.814
266.236
263.874



n20
1.7993913
1.7248410
1.7076727
1.6984359



k20
0.3510467
0.2487428
0.2009217
0.1709410



d20 (nm)
81.101
150.052
214.823
277.894



When n1 ≧ n10, n1m =
0.0462292
0.0536658
0.0656104
0.0800903



When n1 < n10, n1m =
0.0484851
0.0418225
0.0432129
0.0552332



When k1 ≧ k10, k1m =
0.0620630
0.0619458
0.0615613
0.0629382



When k1 < k10, k1m =
0.0362708
0.0377515
0.0406262
0.0422571



When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞



When d1 < d10, d1m (nm) =
29.467
27.448
97.485
175.134



When n2 ≧ n20, n2m =
0.1596558
0.1810303
0.3970593
0.3365332



When n2 < n20, n2m =
0.1100391
0.2908167
0.2424414
0.2178503



When k2 ≧ k20, k2m =
0.1557141
0.1886804
0.2145630
0.2194727



When k2 < k20, k2m =
0.1210901
0.1012720
0.0897449
0.0805957



When d2 ≧ d20, d2m (nm) =
25.591
∞
∞
∞



When d2 < d20, d2m (nm) =
9.432
27.332
78.495
131.894











1.0 < NA ≦ 1.1


15 ≦ T ≦ 25












Case
2-01
2-02
2-03
2-04
2-05





n10
1.8588603
1.8671897
1.8793061
1.8953035
1.8743725


k10
0.2152026
0.2000001
0.1213485
0.0980077
0.1084578


d10 (nm)
37.726
35.681
21.414
14.908
12.201


n20
5.0977045
3.0932325
1.8727645
1.7635602
1.6884757


k20
0.6974562
0.7063642
0.4149520
0.3109442
0.2470663


d20 (nm)
19.647
34.687
129.308
200.446
269.437


When n1 ≧ n10, n1m =
0.0758728
0.0747766
0.0798340
0.0988049
0.1178149


When n1 < n10, n1m =
0.0592542
0.0589661
0.0549634
0.0658325
0.0841418


When k1 ≧ k10, k1m =
0.0598401
0.0578650
0.0632202
0.0814417
0.1076917


When k1 < k10, k1m =
0.0788342
0.0811694
0.0865027
0.0980077
0.1084578


When d1 ≧ d10, d1m (nm) =
5.593
5.891
7.449
6.933
7.359


When d1 < d10, d1m (nm) =
4.233
4.238
4.249
4.053
4.794


When n2 ≧ n20, n2m =
0.1534875
0.1581152
0.1275403
0.1254932
0.1262524


When n2 < n20, n2m =
0.1697559
0.1894849
0.1565967
0.1540796
0.1389709


When k2 ≧ k20, k2m =
0.1955396
0.2168408
0.1812842
0.1267053
0.1044556


When k2 < k20, k2m =
0.1505579
0.1602844
0.1066724
0.0950110
0.0860864


When d2 ≧ d20, d2m (nm) =
0.659
2.512
∞
∞
∞


When d2 < d20, d2m (nm) =
0.674
2.526
26.047
76.118
126.536





















1.0 < NA ≦ 1.1


15 < T ≦ 25







4/34












Case
2-06
2-07
2-08
2-09
2-10





n10
1.7693190
1.8089249
1.7628339
1.7223442
1.7176215


k10
0.1013402
0.1064114
0.0939832
0.0810686
0.0701007


d10 (nm)
103.520
98.052
94.416
93.840
92.613


n20
3.2583829
3.5132584
1.8414170
1.6728089
1.6759231


k20
2.5781374
0.5501157
0.3092618
0.2260423
0.1876577


d20 (nm)
3.121
29.615
125.923
203.086
261.422


When n1 ≧ n10, n1m =
0.0673926
0.0573926
0.0482458
0.0469287
0.0525317


When n1 < n10, n1m =
0.0182031
0.0185083
0.0097595
0.0170142
0.0338733


When k1 ≧ k10, k1m =
0.0401636
0.0390552
0.0281750
0.0413513
0.0608655


When k1 < k10, k1m =
0.0427917
0.0434326
0.0360242
0.0422778
0.0485864


When d1 ≧ d10, d1m (nm) =
13.610
8.991
12.525
18.295
32.066


When d1 < d10, d1m (nm) =
3.396
2.738
1.840
4.621
10.547


When n2 ≧ n20, n2m =
0.2210974
0.0961951
0.1120178
0.0558118
0.0724255


When n2 < n20, n2m =
0.3992041
0.1262915
0.1064856
0.0968689
0.1070728


When k2 ≧ k20, k2m =
0.3438342
0.0862598
0.0939502
0.0666077
0.0700989


When k2 < k20, k2m =
0.3502100
0.1067542
0.0758923
0.0625208
0.0568274


When d2 ≧ d20, d2m (nm) =
0.375
0.986
11.083
∞
∞


When d2 < d20, d2m (nm) =
0.497
1.167
5.972
24.056
73.630










1.0 < NA ≦ 1.1


15 < T ≦ 25












Case
2-11
2-12
2-13
2-14
2-15





n10
1.7053748
1.7067869
1.7234396
1.7309823
1.6924662


k10
0.0681661
0.0592936
0.0819972
0.0887627
0.0804140


d10 (nm)
163.030
160.569
177.819
175.110
219.254


n20
1.6640911
1.6873274
5.0800961
9.5526510
1.8031504


k20
0.2056957
0.1726858
4.2173316
0.4602806
0.3794202


d20 (nm)
200.113
255.377
1.054
10.232
74.951


When n1 ≧ n10, n1m =
0.0438354
0.0515637
0.0646301
0.0589197
0.0054749


When n1 < n10, n1m =
0.0254907
0.0493457
0.0095056
0.0049573
0.0624841


When k1 ≧ k10, k1m =
0.0375134
0.0575159
0.0321326
0.0226172
0.0163196


When k1 < k10, k1m =
0.0331799
0.0410168
0.0264954
0.0199707
0.0128040


When d1 ≧ d10, d1m (nm) =
∞
∞
31.849
25.868
2.747


When d1 < d10, d1m (nm) =
12.067
30.487
3.026
1.416
23.308


When n2 ≧ n20, n2m =
0.0383606
0.0825500
0.3294275
0.0929846
0.1306152


When n2 < n20, n2m =
0.0871460
0.1052795
0.6618042
0.0695691
0.0087109


When k2 ≧ k20, k2m =
0.0339417
0.0505530
0.2910742
0.0198328
0.0299487


When k2 < k20, k2m =
0.0549512
0.0515552
0.6908167
0.0870068
0.0872510


When d2 ≧ d20, d2m (nm) =
∞
∞
0.079
0.102
14.451


When d2 < d20, d2m (nm) =
19.637
29.589
0.186
0.076
0.824





















1.0 < NA ≦ 1.1


15 < T ≦ 25







5/34












Case
2-16
2-17
2-18
2-19
2-20





n10
1.6899914
1.6915311
1.6993450
1.6920076
1.6934597


k10
0.0755734
0.0696615
0.0558443
0.0677866
0.0658489


d10 (nm)
211.286
207.258
221.722
276.645
270.093


n20
1.7113670
1.6964473
1.6905618
1.8143335
1.7261499


k20
0.2592681
0.2049428
0.1670525
0.3967808
0.2668883


d20 (nm)
147.090
213.635
253.347
72.378
141.360


When n1 ≧ n10, n1m =
0.0235022
0.0424463
0.0685596
0.0429663
0.0523279


When n1 < n10, n1m =
0.0594971
0.0645703
0.0572424
0.0479932
0.0410938


When k1 ≧ k10, k1m =
0.0403162
0.0547461
0.0583691
0.0593103
0.0600049


When k1 < k10, k1m =
0.0289734
0.0380127
0.0376013
0.0355176
0.0379749


When d1 ≧ d10, d1m (nm) =
18.036
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
26.582
37.673
84.779
28.006
25.642


When n2 ≧ n20, n2m =
0.1259094
0.1555469
0.2302234
0.1717712
0.1831995


When n2 < n20, n2m =
0.0501526
0.1747144
0.0944592
0.1059167
0.2850769


When k2 ≧ k20, k2m =
0.0866736
0.1221960
0.1032471
0.1537634
0.1870032


When k2 < k20, k2m =
0.0848877
0.0779785
0.0578296
0.1330688
0.1069617


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.935
∞


When d2 < d20, d2m (nm) =
9.771
69.780
73.090
7.607
20.837










1.0 < NA ≦ 1.1


15 < T ≦ 25











Case
2-21
2-22







n10
1.6956703
1.6963391



k10
0.0621151
0.0576411



d10 (nm)
266.327
263.935



n20
1.7069279
1.6975975



k20
0.2113995
0.1780179



d20 (nm)
206.262
269.259



When n1 ≧ n10, n1m =
0.0646936
0.0790869



When n1 < n10, n1m =
0.0423181
0.0536755



When k1 ≧ k10, k1m =
0.0600012
0.0616785



When k1 < k10, k1m =
0.0403015
0.0417126



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
96.199
173.391



When n2 ≧ n20, n2m =
0.4184778
0.3488293



When n2 < n20, n2m =
0.2491736
0.2216455



When k2 ≧ k20, k2m =
0.2142920
0.2197681



When k2 < k20, k2m =
0.0934741
0.0831250



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
76.168
129.228






















1.0 < NA ≦ 1.1


25 < T ≦ 35







6/34












Case
3-01
3-02
3-03
3-04
3-05





n10
1.8231304
1.8934062
1.9014262
1.8787814
1.8198973


k10
0.2426967
0.1289044
0.1029443
0.1135143
0.1197953


d10 (nm)
38.982
22.067
15.306
12.334
96.975


n20
4.7825941
1.9169501
1.7714781
1.6867670
4.7572984


k20
0.7852430
0.4577317
0.3309508
0.2583639
0.6218490


d20 (nm)
19.992
118.684
191.572
261.269
20.274


When n1 ≧ n10, n1m =
0.0699695
0.0767236
0.0951282
0.1154443
0.0479663


When n1 < n10, n1m =
0.0498486
0.0532642
0.0626563
0.0817676
0.0146021


When k1 ≧ k10, k1m =
0.0588489
0.0605774
0.0772998
0.1052600
0.0370215


When k1 < k10, k1m =
0.0707385
0.0857886
0.1011462
0.1135143
0.0364331


When d1 ≧ d10, d1m (nm) =
5.137
6.730
6.574
7.047
7.725


When d1 < d10, d1m (nm) =
3.775
3.826
3.782
4.562
2.005


When n2 ≧ n20, n2m =
0.1872302
0.1343799
0.1259058
0.1236719
0.1156909


When n2 < n20, n2m =
0.2029309
0.1567590
0.1523523
0.1408569
0.1282800


When k2 ≧ k20, k2m =
0.2449841
0.2003137
0.1294177
0.1036865
0.0748242


When k2 < k20, k2m =
0.1832959
0.1099609
0.0962476
0.0870068
0.1199268


When d2 ≧ d20, d2m (nm) =
0.864
∞
∞
∞
0.532


When d2 < d20, d2m (nm) =
0.839
21.916
71.881
121.487
0.552










1.0 < NA ≦ 1.1


25 < T ≦ 35












Case
3-06
3-07
3-08
3-09
3-10





n10
1.7669399
1.7235821
1.7188964
1.7058208
1.7073313


k10
0.0997580
0.0847397
0.0726255
0.0710513
0.0613671


d10 (nm)
94.208
93.618
92.505
162.764
160.462


n20
1.8558060
1.6692590
1.6760484
1.6616172
1.6880654


k20
0.3364471
0.2394056
0.1967286
0.2176394
0.1807904


d20 (nm)
117.969
195.006
252.779
191.801
246.769


When n1 ≧ n10, n1m =
0.0449036
0.0442456
0.0506409
0.0405530
0.0497949


When n1 < n10, n1m =
0.0058435
0.0142969
0.0314514
0.0176917
0.0472620


When k1 ≧ k10, k1m =
0.0200403
0.0369336
0.0583228
0.0316150
0.0541370


When k1 < k10, k1m =
0.0309863
0.0404504
0.0477759
0.0303076
0.0405200


When d1 ≧ d10, d1m (nm) =
10.713
16.167
24.298
∞
∞


When d1 < d10, d1m (nm) =
1.043
3.709
9.337
7.078
23.845


When n2 ≧ n20, n2m =
0.1063135
0.0450122
0.0699963
0.0309314
0.0781641


When n2 < n20, n2m =
0.1037158
0.0932996
0.1043005
0.0818408
0.1014221


When k2 ≧ k20, k2m =
0.0686243
0.0581018
0.0668628
0.0258777
0.0465137


When k2 < k20, k2m =
0.0768091
0.0625977
0.0574854
0.0546838
0.0521045


When d2 ≧ d20, d2m (nm) =
9.637
∞
∞
13.452
∞


When d2 < d20, d2m (nm) =
3.465
21.705
32.653
17.168
25.940



















1.0 < NA ≦ 1.1


25 < T ≦ 35







7/34













Case
3-11
3-12
3-13
3-14
3-15
3-16
















n10
1.6893950
1.6912149
1.6993872
1.6931110
1.6955537
1.6962507


k10
0.0792587
0.0722082
0.0576769
0.0689939
0.0643335
0.0593120


d10 (nm)
211.356
207.241
221.603
270.168
266.333
263.960


n20
1.7121469
1.6964479
1.6911809
1.7281714
1.7074500
1.6977843


k20
0.2795726
0.2163033
0.1749036
0.2885226
0.2235939
0.1860709


d20 (nm)
139.203
205.754
244.825
133.446
198.195
261.024


When n1 ≧ n10, n1m =
0.0187524
0.0389221
0.0673108
0.0502356
0.0624109
0.0782690


When n1 < n10, n1m =
0.0561719
0.0620898
0.0525073
0.0397852
0.0411060
0.0522693


When k1 ≧ k10, k1m =
0.0323267
0.0510889
0.0557678
0.0576538
0.0581616
0.0602515


When k1 < k10, k1m =
0.0242261
0.0363989
0.0368542
0.0366370
0.0397400
0.0408899


When d1 ≧ d10, d1m (nm) =
9.539
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
23.792
36.062
80.743
23.618
94.755
119.700


When n2 ≧ n20, n2m =
0.1258521
0.1531580
0.2394678
0.1860962
0.4430444
0.3636609


When n2 < n20, n2m =
0.0334863
0.1783936
0.0871167
0.1489648
0.2583777
0.2256018


When k2 ≧ k20, k2m =
0.0734656
0.1167761
0.1010718
0.1855286
0.2138647
0.2198901


When k2 < k20, k2m =
0.0783704
0.0804089
0.0594067
0.1140149
0.0979895
0.0864600


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
6.823
66.025
33.786
17.363
72.201
97.445





















1.0 < NA ≦ 1.1


35 < T ≦ 45







8/34












Case
4-01
4-02
4-03
4-04
4-05





n10
1.8741027
1.9162345
1.9099224
1.8839284
1.7973698


k10
0.2292405
0.1358555
0.1141224
0.1193744
0.1226911


d10 (nm)
31.502
21.455
14.789
12.268
93.176


n20
2.4589695
1.9418040
1.7536831
1.6821215
2.1323779


k20
0.9273915
0.4998799
0.3442834
0.2672652
0.6525391


d20 (nm)
39.688
110.373
186.067
253.238
46.828


When n1 ≧ n10, n1m =
0.0646472
0.0749023
0.0953894
0.1145032
0.0393335


When n1 < n10, n1m =
0.0466125
0.0512402
0.0611060
0.0810242
0.0058411


When k1 ≧ k10, k1m =
0.0535095
0.0588599
0.0769971
0.1049219
0.0222083


When k1 < k10, k1m =
0.0782300
0.0839917
0.1022253
0.1138464
0.0267273


When d1 ≧ d10, d1m (nm) =
4.763
5.873
6.052
6.690
7.237


When d1 < d10, d1m (nm) =
3.092
3.244
3.414
4.349
0.847


When n2 ≧ n20, n2m =
0.2061353
0.1383777
0.1254065
0.1201538
0.0908765


When n2 < n20, n2m =
0.1985669
0.1593604
0.1521448
0.1405737
0.1202173


When k2 ≧ k20, k2m =
0.2506677
0.2047961
0.1231897
0.1019714
0.0402307


When k2 < k20, k2m =
0.1792896
0.1103943
0.0960205
0.0872583
0.1042542


When d2 ≧ d20, d2m (nm) =
6.142
∞
∞
∞
4.028


When d2 < d20, d2m (nm) =
4.657
20.982
70.019
92.164
2.915










1.0 < NA ≦ 1.1


35 < T ≦ 45












Case
4-06
4-07
4-08
4-09
4-10





n10
1.7231751
1.7198225
1.7057007
1.7079030
1.6886446


k10
0.0881939
0.0748307
0.0735111
0.0631371
0.0826816


d10 (nm)
93.194
92.273
162.218
160.241
210.810


n20
1.6583398
1.6753837
1.6560667
1.6895692
1.7077667


k20
0.2493789
0.2040438
0.2270715
0.1875698
0.2975930


d20 (nm)
187.627
244.025
183.673
237.741
132.542


When n1 ≧ n10, n1m =
0.0413782
0.0488660
0.0374475
0.0482141
0.0106323


When n1 < n10, n1m =
0.0123999
0.0300476
0.0153528
0.0446057
0.0519153


When k1 ≧ k10, k1m =
0.0333630
0.0568799
0.0277051
0.0515784
0.0235608


When k1 < k10, k1m =
0.0393298
0.0467004
0.0300195
0.0397412
0.0190234


When d1 ≧ d10, d1m (nm) =
13.894
20.818
24.657
∞
6.948


When d1 < d10, d1m (nm) =
3.123
8.547
5.758
21.149
21.403


When n2 ≧ n20, n2m =
0.0360730
0.0689490
0.0276392
0.0753564
0.1220337


When n2 < n20, n2m =
0.0901636
0.1032593
0.0781885
0.0941541
0.0190320


When k2 ≧ k20, k2m =
0.0474146
0.0634253
0.0205627
0.0433423
0.0612073


When k2 < k20, k2m =
0.0610718
0.0577832
0.0533984
0.0526196
0.0606079


When d2 ≧ d20, d2m (nm) =
∞
∞
8.473
∞
∞


When d2 < d20, d2m (nm) =
20.321
31.703
15.881
21.519
3.543





















1.0 < NA ≦ 1.1


35 < T ≦ 45







9/34













Case
4-11
4-12
4-13
4-14







n10
1.6995870
1.6927517
1.6954892
1.6961809



k10
0.0592337
0.0720967
0.0662812
0.0606151



d10 (nm)
221.497
269.568
265.955
263.663



n20
1.6927290
1.7225076
1.7055518
1.6966094



k20
0.1818275
0.3075740
0.2340649
0.1927366



d20 (nm)
235.781
126.653
190.864
253.572



When n1 ≧ n10, n1m =
0.0661182
0.0430298
0.0571948
0.0777271



When n1 < n10, n1m =
0.0480371
0.0376990
0.0396948
0.0514954



When k1 ≧ k10, k1m =
0.0532056
0.0552930
0.0563965
0.0590613



When k1 < k10, k1m =
0.0358557
0.0353455
0.0387683
0.0400696



When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞



When d1 < d10, d1m (nm) =
78.174
21.398
89.629
112.221



When n2 ≧ n20, n2m =
0.2507446
0.1898645
0.4617859
0.3498169



When n2 < n20, n2m =
0.0793469
0.1193628
0.2673291
0.2271130



When k2 ≧ k20, k2m =
0.0998633
0.1866309
0.2129163
0.2195020



When k2 < k20, k2m =
0.0613184
0.1217163
0.1026648
0.0902368



When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞



When d2 < d20, d2m (nm) =
33.021
15.026
69.134
84.327











1.0 < NA ≦ 1.1


45 < T ≦ 55












Case
5-01
5-02
5-03
5-04
5-05





n10
1.8808544
1.9316654
1.9082705
1.8785232
1.7211644


k10
0.2454152
0.1473610
0.1322705
0.1271526
0.0906139


d10 (nm)
24.855
18.765
14.189
12.435
92.694


n20
1.8495394
1.8569906
1.7144055
1.6714546
1.6423304


k20
0.8565648
0.5034890
0.3458924
0.2699971
0.2528050


d20 (nm)
51.788
110.667
182.182
245.412
180.257


When n1 ≧ n10, n1m =
0.0633093
0.0784436
0.0967798
0.1127563
0.0394434


When n1 < n10, n1m =
0.0379272
0.0483252
0.0593640
0.0800098
0.0123450


When k1 ≧ k10, k1m =
0.0520349
0.0606396
0.0782654
0.1046387
0.0323718


When k1 < k10, k1m =
0.0704724
0.0844775
0.1016626
0.1111450
0.0404236


When d1 ≧ d10, d1m (nm) =
4.463
5.359
5.721
6.653
12.460


When d1 < d10, d1m (nm) =
2.319
2.677
3.157
4.357
3.091


When n2 ≧ n20, n2m =
0.1530676
0.1305420
0.1246069
0.1153186
0.0322009


When n2 < n20, n2m =
0.1897241
0.1692273
0.1526025
0.1380359
0.0893225


When k2 ≧ k20, k2m =
0.1919946
0.1591870
0.1122729
0.0997217
0.0401709


When k2 < k20, k2m =
0.1170728
0.1032434
0.0948108
0.0869653
0.0592017


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
9.182
23.164
70.833
93.569
20.376





















1.0 < NA ≦ 1.1


45 < T ≦ 55







10/34












Case
5-06
5-07
5-08
5-09
5-10





n10
1.7204079
1.7050622
1.7085349
.6878153
1.6980473


k10
0.0761160
0.0748972
0.0642166
0.0847734
0.0703784


d10 (nm)
92.018
161.630
160.005
209.683
224.445


n20
1.6751968
1.6489715
1.6919631
1.6959203
1.6616204


k20
0.2080809
0.2315625
0.1914882
0.3070669
0.2238826


d20 (nm)
234.537
175.108
227.913
127.092
171.370


When n1 ≧ n10, n1m =
0.0481116
0.0356750
0.0469714
0.0053320
0.0535730


When n1 < n10, n1m =
0.0302478
0.0193359
0.0419556
0.0458972
0.0248047


When k1 ≧ k10, k1m =
0.0572302
0.0287097
0.0507117
0.0169995
0.0427319


When k1 < k10, k1m =
0.0456555
0.0334753
0.0389539
0.0159290
0.0235608


When d1 ≧ d10, d1m (nm) =
19.317
21.414
∞
2.347
∞


When d1 < d10, d1m (nm) =
8.336
7.128
19.272
19.688
12.738


When n2 ≧ n20, n2m =
0.0703723
0.0326379
0.0750854
0.1108911
0.0566052


When n2 < n20, n2m =
0.1049292
0.0778333
0.0787329
0.0108118
0.0780139


When k2 ≧ k20, k2m =
0.0616284
0.0216638
0.0424329
0.0606311
0.0720593


When k2 < k20, k2m =
0.0584753
0.0525964
0.0537231
0.0383350
0.0623987


When d2 ≧ d20, d2m (nm) =
∞
8.070
∞
32.807
∞


When d2 < d20, d2m (nm) =
32.758
15.758
17.351
1.915
21.521










1.0 < NA ≦ 1.1


45 < T ≦ 55













Case
5-11
5-12
5-13
5-14







n10
1.6999707
1.6924126
1.6955002
1.6961000



k10
0.0601951
0.0742318
0.0674212
0.0611797



d10 (nm)
221.512
268.357
265.225
263.146



n20
1.6952970
1.7068352
1.7004174
1.6940899



k20
0.1862586
0.3173492
0.2397614
0.1962440



d20 (nm)
225.852
120.697
183.997
246.462



When n1 ≧ n10, n1m =
0.0654663
0.0386316
0.0536462
0.0776611



When n1 < n10, n1m =
0.0445935
0.0350720
0.0381848
0.0515515



When k1 ≧ k10, k1m =
0.0509546
0.0537524
0.0551721
0.0583948



When k1 < k10, k1m =
0.0349414
0.0344934
0.0383105
0.0394385



When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞



When d1 < d10, d1m (nm) =
76.496
19.128
37.283
109.648



When n2 ≧ n20, n2m =
0.1168579
0.1905981
0.3934021
0.3400916



When n2 < n20, n2m =
0.0700696
0.1027393
0.2743970
0.2283606



When k2 ≧ k20, k2m =
0.1002319
0.1933838
0.2120459
0.2188281



When k2 < k20, k2m =
0.0624707
0.1168652
0.1050110
0.0926550



When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞



When d2 < d20, d2m (nm) =
28.597
13.909
67.541
81.764






















1.0 < NA ≦ 1.1


55 < T ≦ 65







11/34












Case
6-01
6-02
6-03
6-04
6-05





n10
1.8609133
1.9462238
1.9002376
1.8750233
1.8816918


k10
0.2699154
0.1588548
0.1498745
0.1302055
0.0811209


d10 (nm)
23.275
16.938
13.880
12.592
12.084


n20
1.6780954
1.8061043
1.6764313
1.6672162
1.7277101


k20
0.8091000
0.4989592
0.3420875
0.2718902
0.2394028


d20 (nm)
51.309
107.791
176.900
235.718
282.393


When n1 ≧ n10, n1m =
0.0700366
0.0847327
0.0979871
0.1121912
0.1205115


When n1 < n10, n1m =
0.0352271
0.0459912
0.0579346
0.0799817
0.0890784


When k1 ≧ k10, k1m =
0.0520923
0.0625745
0.0794043
0.1043726
0.1106958


When k1 < k10, k1m =
0.0664282
0.0874719
0.0997217
0.1093811
0.0811209


When d1 ≧ d10, d1m (nm) =
4.496
4.952
5.583
6.704
7.616


When d1 < d10, d1m (nm) =
2.084
2.260
3.039
4.426
5.147


When n2 ≧ n20, n2m =
0.1454468
0.1290356
0.1219507
0.1104688
0.1083423


When n2 < n20, n2m =
0.1338672
0.1849402
0.1524817
0.1364417
0.1532007


When k2 ≧ k20, k2m =
0.1326758
0.1316541
0.1033948
0.0988464
0.1079004


When k2 < k20, k2m =
0.1106470
0.1010791
0.0949341
0.0882678
0.0854614


When d2 ≧ d20, d2m (nm) =
18.182
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
8.638
17.532
68.073
94.482
130.723










1.0 < NA ≦ 1.1


55 < T ≦ 65












Case
6-06
6-07
6-08
6-09
6-10





n10
1.7196449
1.7211216
1.7282121
1.7047574
1.7094298


k10
0.0916508
0.0765241
0.0683348
0.0753118
0.0647325


d10 (nm)
92.440
91.942
92.298
161.355
159.970


n20
1.6323282
1.6777604
1.7222619
1.6462273
1.6962571


k20
0.2539653
0.2105462
0.1825246
0.2341241
0.1938378


d20 (nm)
171.320
223.941
274.062
165.232
217.150


When n1 ≧ n10, n1m =
0.0390417
0.0485681
0.0546460
0.0358069
0.0474683


When n1 < n10, n1m =
0.0139282
0.0313391
0.0292078
0.0174304
0.0407373


When k1 ≧ k10, k1m =
0.0333240
0.0585132
0.0578357
0.0324670
0.0508789


When k1 < k10, k1m =
0.0406140
0.0454041
0.0481470
0.0321411
0.0389600


When d1 ≧ d10, d1m (nm) =
12.043
19.132
42.010
19.174
∞


When d1 < d10, d1m (nm) =
3.525
8.472
8.190
6.358
18.590


When n2 ≧ n20, n2m =
0.0324304
0.0734375
0.0906226
0.0327905
0.0764417


When n2 < n20, n2m =
0.0896448
0.1073743
0.1223853
0.0797839
0.0702637


When k2 ≧ k20, k2m =
0.0391357
0.0623755
0.0817871
0.0268372
0.0433899


When k2 < k20, k2m =
0.0597375
0.0603992
0.0593811
0.0545007
0.0559253


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
9.153
∞


When d2 < d20, d2m (nm) =
20.788
29.764
77.892
16.109
14.325



















1.0 < NA ≦ 1.1


55 < T ≦ 65







12/34













Case
6-11
6-12
6-13
6-14
6-15
6-16
















n10
1.6870964
1.6986314
1.7003667
1.6951156
1.6955653
1.6958377


k10
0.0858972
0.0705958
0.0607285
0.0571177
0.0680298
0.0528303


d10 (nm)
208.556
224.893
221.557
215.781
264.644
274.984


n20
1.6830399
1.6622291
1.6983916
1.6957463
1.6953987
1.6882898


k20
0.3090553
0.2274423
0.1887213
0.1617780
0.2417239
0.1657751


d20 (nm)
121.249
160.831
215.383
277.216
176.078
275.044


When n1 ≧ n10, n1m =
0.0051123
0.0520032
0.0662122
0.0842517
0.0515662
0.0590991


When n1 < n10, n1m =
0.0418372
0.0227649
0.0435059
0.0645801
0.0369092
0.0581189


When k1 ≧ k10, k1m =
0.0150793
0.0436267
0.0489954
0.0563855
0.0542810
0.0684131


When k1 < k10, k1m =
0.0179541
0.0228833
0.0348535
0.0371240
0.0381006
0.0375098


When d1 ≧ d10, d1m (nm) =
2.247
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
18.385
11.933
75.920
58.822
33.649
113.219


When n2 ≧ n20, n2m =
0.1010083
0.0477234
0.1065527
0.2254480
0.3829150
0.2789856


When n2 < n20, n2m =
0.0100110
0.0759302
0.0611096
0.1540564
0.2775842
0.2219617


When k2 ≧ k20, k2m =
0.0726611
0.0766821
0.1015344
0.1236780
0.2119995
0.1981201


When k2 < k20, k2m =
0.0309253
0.0590527
0.0616418
0.0602039
0.1044287
0.0735400


When d2 ≧ d20, d2m (nm) =
25.845
22.079
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
1.717
20.127
24.695
81.257
67.124
97.500





















1.0 < NA ≦ 1.1


65 < T ≦ 75







13/34












Case
7-01
7-02
7-03
7-04
7-05





n10
1.8339628
1.9445237
1.8939902
1.8811858
1.7203230


k10
0.2973905
0.1726202
0.1563846
0.0833966
0.0922740


d10 (nm)
24.925
17.287
14.253
12.228
92.527


n20
1.6419965
1.7953047
1.6659458
1.7269957
1.6328842


k20
0.8698975
0.5162004
0.3485215
0.2426363
0.2599948


d20 (nm)
41.723
98.907
167.112
272.914
160.703


When n1 ≧ n10, n1m =
0.0734924
0.0853552
0.0964307
0.1197986
0.0394055


When n1 < n10, n1m =
0.0377722
0.0427490
0.0559692
0.0877673
0.0144592


When k1 ≧ k10, k1m =
0.0448938
0.0589941
0.0770850
0.1096667
0.0331616


When k1 < k10, k1m =
0.0453357
0.0848169
0.0975195
0.0833966
0.0410388


When d1 ≧ d10, d1m (nm) =
4.571
4.784
5.590
7.648
12.091


When d1 < d10, d1m (nm) =
2.315
2.092
3.027
5.109
3.655


When n2 ≧ n20, n2m =
0.1366638
0.1348682
0.1167786
0.1080664
0.0326196


When n2 < n20, n2m =
0.1076978
0.1944104
0.1524536
0.1545313
0.0900854


When k2 ≧ k20, k2m =
0.1648022
0.1338904
0.1021130
0.1080652
0.0396484


When k2 < k20, k2m =
0.1324670
0.1078918
0.0977759
0.0865271
0.0625085


When d2 ≧ d20, d2m (nm) =
12.499
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
5.747
14.376
64.164
128.680
19.557










1.0 < NA ≦ 1.1


65 < T ≦ 75












Case
7-06
7-07
7-08
7-09
7-10





n10
1.7224265
1.7294779
1.7053201
1.7102741
1.7133466


k10
0.0770592
0.0692299
0.0757255
0.0654045
0.0629386


d10 (nm)
92.053
92.385
161.452
160.136
160.381


n20
1.6819841
1.7252879
1.6485370
1.7000507
1.7220503


k20
0.2150120
0.1858377
0.2399747
0.1977447
0.1698335


d20 (nm)
213.162
263.723
154.588
206.614
260.757


When n1 ≧ n10, n1m =
0.0490625
0.0548535
0.0366443
0.0483020
0.0569666


When n1 < n10, n1m =
0.0311902
0.0280200
0.0173645
0.0416309
0.0190027


When k1 ≧ k10, k1m =
0.0581604
0.0565332
0.0330920
0.0498926
0.0402344


When k1 < k10, k1m =
0.0461389
0.0475879
0.0324707
0.0390747
0.0240051


When d1 ≧ d10, d1m (nm) =
19.214
40.761
19.902
∞
∞


When d1 < d10, d1m (nm) =
8.328
7.705
6.285
18.989
5.694


When n2 ≧ n20, n2m =
0.0747375
0.0917908
0.0322156
0.0769946
0.1011584


When n2 < n20, n2m =
0.1078540
0.1217822
0.0813562
0.0689685
0.1343567


When k2 ≧ k20, k2m =
0.0634705
0.0827625
0.0283752
0.0430542
0.0435730


When k2 < k20, k2m =
0.0623401
0.0604163
0.0573535
0.0576453
0.0570081


When d2 ≧ d20, d2m (nm) =
∞
∞
9.136
38.239
∞


When d2 < d20, d2m (nm) =
27.810
75.918
15.379
13.085
10.847



















1.0 < NA ≦ 1.1


65 < T ≦ 75







14/34













Case
7-11
7-12
7-13
7-14
7-15
7-16
















n10
1.6861768
1.6990769
1.7003759
1.6946436
1.6954303
1.6957423


k10
0.0881028
0.0709373
0.0613969
0.0577579
0.0690806
0.0532811


d10 (nm)
208.148
225.005
221.468
215.315
264.876
274.848


n20
1.6733849
1.6647354
1.6998938
1.6946016
1.6937197
1.6878755


k20
0.3136681
0.2329033
0.1918751
0.1634050
0.2458138
0.1674492


d20 (nm)
112.385
150.349
205.497
268.128
165.269
265.685


When n1 ≧ n10, n1m =
0.0025806
0.0529590
0.0676086
0.0859229
0.0516138
0.0588110


When n1 < n10, n1m =
0.0409998
0.0231177
0.0444312
0.0666504
0.0367175
0.0575696


When k1 ≧ k10, k1m =
0.0094263
0.0435510
0.0474890
0.0560022
0.0529260
0.0681641


When k1 < k10, k1m =
0.0156848
0.0234912
0.0355322
0.0372656
0.0371912
0.0379443


When d1 ≧ d10, d1m (nm) =
1.037
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
17.094
12.289
76.126
56.280
33.058
112.076


When n2 ≧ n20, n2m =
0.1039172
0.0468506
0.1077234
0.2240735
0.4022729
0.2806909


When n2 < n20, n2m =
0.0058093
0.0753308
0.0576575
0.1556287
0.2760486
0.2229114


When k2 ≧ k20, k2m =
0.0664124
0.0758972
0.1012000
0.1249744
0.2123950
0.1986609


When k2 < k20, k2m =
0.0178174
0.0630115
0.0645288
0.0620288
0.1063135
0.0745801


When d2 ≧ d20, d2m (nm) =
26.367
19.187
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
1.017
18.602
23.769
80.847
66.469
89.270





















1.0 < NA ≦ 1.1


75 < T ≦ 85







15/34












Case
8-01
8-02
8-03
8-04
8-05





n10
1.9187259
1.8967518
1.8757876
1.8806788
1.7234296


k10
0.1881900
0.1527475
0.1318014
0.0899399
0.0945092


d10 (nm)
20.509
15.221
13.247
12.412
92.722


n20
1.8283337
1.6893708
1.6726776
1.7211162
1.6393014


k20
0.5739613
0.3734166
0.2883472
0.2492460
0.2743485


d20 (nm)
84.746
154.221
215.129
265.394
150.270


When n1 ≧ n10, n1m =
0.0766943
0.0922229
0.1080322
0.1177502
0.0391516


When n1 < n10, n1m =
0.0399988
0.0530884
0.0750195
0.0852625
0.0112524


When k1 ≧ k10, k1m =
0.0507166
0.0712622
0.0980225
0.1073047
0.0289392


When k1 < k10, k1m =
0.0771802
0.0964258
0.1069458
0.0899399
0.0412610


When d1 ≧ d10, d1m (nm) =
5.195
5.640
6.681
7.548
11.825


When d1 < d10, d1m (nm) =
2.249
2.987
4.301
4.972
2.719


When n2 ≧ n20, n2m =
0.1444995
0.1155615
0.1091333
0.1093396
0.0288635


When n2 < n20, n2m =
0.1897876
0.1532776
0.1435217
0.1541382
0.0890479


When k2 ≧ k20, k2m =
0.1811243
0.1099194
0.1006726
0.1075403
0.0356238


When k2 < k20, k2m =
0.1194946
0.1025110
0.0922131
0.0871228
0.0649683


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
15.313
64.664
82.555
124.472
16.892










1.0 < NA ≦ 1.1


75 < T ≦ 85












Case
8-06
8-07
8-08
8-09
8-10





n10
1.7235983
1.7294254
1.7064538
1.7103862
1.7133072


k10
0.0790587
0.0706491
0.0777504
0.0670250
0.0637197


d10 (nm)
92.129
92.482
161.668
160.278
160.467


n20
1.6815454
1.7233644
1.6498826
1.6983722
1.7219131


k20
0.2228770
0.1918670
0.2514894
0.2047961
0.1752501


d20 (nm)
204.187
255.172
145.038
197.922
251.781


When n1 ≧ n10, n1m =
0.0481958
0.0539050
0.0362122
0.0474792
0.0556775


When n1 < n10, n1m =
0.0281580
0.0270288
0.0158582
0.0428101
0.0187244


When k1 ≧ k10, k1m =
0.0546558
0.0547986
0.0255066
0.0459753
0.0391089


When k1 < k10, k1m =
0.0470496
0.0476624
0.0330371
0.0375122
0.0244470


When d1 ≧ d10, d1m (nm) =
18.433
40.484
19.881
∞
∞


When d1 < d10, d1m (nm) =
7.376
7.380
6.011
13.737
5.649


When n2 ≧ n20, n2m =
0.0719336
0.0903259
0.0311267
0.0755847
0.1032422


When n2 < n20, n2m =
0.1049182
0.1183936
0.0789893
0.0715295
0.1268079


When k2 ≧ k20, k2m =
0.0610889
0.0802148
0.0194653
0.0384314
0.0401990


When k2 < k20, k2m =
0.0626282
0.0606787
0.0584229
0.0575549
0.0569128


When d2 ≧ d20, d2m (nm) =
∞
∞
6.414
35.522
∞


When d2 < d20, d2m (nm) =
26.455
72.823
13.152
13.515
11.677





















1.0 < NA ≦ 1.1


75 < T ≦ 85







16/34












Case
8-11
8-12
8-13
8-14
8-15





n10
1.6987335
1.6895310
1.6997408
1.6947661
1.6915645


k10
0.0728489
0.0798395
0.0628030
0.0583146
0.0796327


d10 (nm)
224.384
207.056
221.189
215.749
269.434


n20
1.6635130
1.6873868
1.6972371
1.6943199
1.7013553


k20
0.2423517
0.2464201
0.1976117
0.1671130
0.3520060


d20 (nm)
141.699
160.447
197.186
258.789
90.540


When n1 ≧ n10, n1m =
0.0550525
0.0211743
0.0680066
0.0840710
0.0339661


When n1 < n10, n1m =
0.0214722
0.0563281
0.0446484
0.0653711
0.0319580


When k1 ≧ k10, k1m =
0.0399634
0.0394690
0.0462439
0.0552136
0.0498462


When k1 < k10, k1m =
0.0230286
0.0247534
0.0358582
0.0373328
0.0319092


When d1 ≧ d10, d1m (nm) =
∞
18.382
∞
∞
29.764


When d1 < d10, d1m (nm) =
12.181
26.345
75.416
56.560
16.533


When n2 ≧ n20, n2m =
0.0460742
0.1451038
0.1164050
0.2251794
0.2068530


When n2 < n20, n2m =
0.0736353
0.0531665
0.0615222
0.1544678
0.0982214


When k2 ≧ k20, k2m =
0.0651685
0.0979858
0.0980493
0.1211584
0.1840808


When k2 < k20, k2m =
0.0709375
0.0696692
0.0675049
0.0632251
0.1287793


When d2 ≧ d20, d2m (nm) =
17.326
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
17.676
13.280
25.586
81.223
11.833










1.0 < NA ≦ 1.1


75 < T ≦ 85











Case
8-16
8-17







n10
1.6950499
1.6956172



k10
0.0706693
0.0541668



d10 (nm)
266.123
274.905



n20
1.6983222
1.6860233



k20
0.2573177
0.1712439



d20 (nm)
152.851
257.337



When n1 ≧ n10, n1m =
0.0524487
0.0590308



When n1 < n10, n1m =
0.0375452
0.0580872



When k1 ≧ k10, k1m =
0.0517285
0.0672278



When k1 < k10, k1m =
0.0352881
0.0380591



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
33.771
112.404



When n2 ≧ n20, n2m =
0.2704944
0.2806836



When n2 < n20, n2m =
0.2755872
0.2222266



When k2 ≧ k20, k2m =
0.2121143
0.1985229



When k2 < k20, k2m =
0.1128918
0.0743774



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
65.292
85.089






















1.0 < NA ≦ 1.1


85 < T ≦ 95







17/34












Case
9-01
9-02
9-03
9-04
9-05





n10
1.8980776
1.9078109
1.8887573
1.8863613
1.7283563


k10
0.2063094
0.1489982
0.1336370
0.0963846
0.0991844


d10 (nm)
23.234
16.351
13.295
12.395
92.796


n20
1.8542997
1.7325536
1.6803356
1.7165602
1.6494143


k20
0.6486453
0.4126982
0.3065809
0.2596921
0.2975623


d20 (nm)
73.732
141.036
205.639
258.147
140.358


When n1 ≧ n10, n1m =
0.0711987
0.0870154
0.1059106
0.1162891
0.0375220


When n1 < n10, n1m =
0.0384509
0.0501709
0.0716760
0.0832544
0.0056213


When k1 ≧ k10, k1m =
0.0445569
0.0643555
0.0939661
0.1053198
0.0189441


When k1 < k10, k1m =
0.0730103
0.0941223
0.1072681
0.0963846
0.0324854


When d1 ≧ d10, d1m (nm) =
5.225
5.526
6.240
7.169
10.895


When d1 < d10, d1m (nm) =
2.347
2.839
3.908
4.670
1.261


When n2 ≧ n20, n2m =
0.1402551
0.1159338
0.1109766
0.1105359
0.0179150


When n2 < n20, n2m =
0.1828406
0.1543176
0.1513220
0.1539343
0.0865198


When k2 ≧ k20, k2m =
0.2259802
0.1235034
0.1018750
0.1065100
0.0230737


When k2 < k20, k2m =
0.1284644
0.1059631
0.0936096
0.0878577
0.0660486


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
14.635


When d2 < d20, d2m (nm) =
14.747
31.656
77.584
118.336
14.252










1.0 < NA ≦ 1.1


85 < T ≦ 95












Case
9-06
9-07
9-08
9-09
9-10





n10
1.7247011
1.7288637
1.7100270
1.7129082
1.6894084


k10
0.0825295
0.0727638
0.0697395
0.0648353
0.0825836


d10 (nm)
92.134
92.409
160.277
160.281
208.412


n20
1.6784446
1.7181265
1.6932584
1.7202855
1.6911413


k20
0.2345042
0.1997137
0.2147807
0.1822190
0.2636300


d20 (nm)
196.220
247.866
190.362
243.795
148.443


When n1 ≧ n10, n1m =
0.0458069
0.0520715
0.0445874
0.0530676
0.0168896


When n1 < n10, n1m =
0.0231628
0.0254517
0.0291443
0.0189783
0.0564331


When k1 ≧ k10, k1m =
0.0487341
0.0524194
0.0390308
0.0374463
0.0317554


When k1 < k10, k1m =
0.0471680
0.0474573
0.0341357
0.0249304
0.0174866


When d1 ≧ d10, d1m (nm) =
16.768
28.342
∞
∞
8.653


When d1 < d10, d1m (nm) =
5.875
6.859
8.481
5.666
22.933


When n2 ≧ n20, n2m =
0.0654785
0.0851550
0.0721350
0.0992358
0.1489941


When n2 < n20, n2m =
0.0999084
0.1129846
0.0702051
0.1184961
0.0323828


When k2 ≧ k20, k2m =
0.0550916
0.0742688
0.0299036
0.0348145
0.0701428


When k2 < k20, k2m =
0.0621350
0.0605774
0.0564990
0.0562878
0.0653857


When d2 ≧ d20, d2m (nm) =
∞
∞
30.126
∞
∞


When d2 < d20, d2m (nm) =
23.369
34.214
13.997
12.255
9.630





















1.0 < NA ≦ 1.1


85 < T ≦ 95







18/34












Case
9-11
9-12
9-13
9-14
9-15





n10
1.6987536
1.6951804
1.6947043
1.6953534
1.6955317


k10
0.0651428
0.0592977
0.0728049
0.0654850
0.0555447


d10 (nm)
220.679
216.421
267.049
264.587
274.968


n20
1.6918669
1.6944812
1.7045529
1.6939885
1.6840742


k20
0.2062686
0.1733276
0.2758626
0.2171518
0.1777252


d20 (nm)
189.869
249.686
142.407
204.731
249.243


When n1 ≧ n10, n1m =
0.0676538
0.0804553
0.0514111
0.0772083
0.0594299


When n1 < n10, n1m =
0.0423462
0.0620581
0.0375159
0.0498364
0.0587244


When k1 ≧ k10, k1m =
0.0442505
0.0538220
0.0506982
0.0550830
0.0658191


When k1 < k10, k1m =
0.0341040
0.0375916
0.0340894
0.0384644
0.0372644


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
72.990
57.440
26.805
108.871
112.765


When n2 ≧ n20, n2m =
0.1307581
0.2319055
0.2365918
0.3979211
0.2850439


When n2 < n20, n2m =
0.0673376
0.1520984
0.2827087
0.2359326
0.2177148


When k2 ≧ k20, k2m =
0.0940100
0.1156787
0.2079443
0.2187415
0.1980774


When k2 < k20, k2m =
0.0673755
0.0629675
0.1183691
0.0982336
0.0755945


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
25.557
76.954
64.091
75.273
81.971










1.0 < NA ≦ 1.1


95 < T ≦ 105












Case
10-01
10-02
10-03
10-04
10-05





n10
1.9059589
1.9224042
1.8961620
1.8922593
1.7254583


k10
0.2274286
0.1550778
0.1385328
0.1041345
0.0865833


d10 (nm)
23.462
16.599
13.501
12.282
91.876


n20
1.8553331
1.7510181
1.6829419
1.7097147
1.6727903


k20
0.7355051
0.4490690
0.3248659
0.2697702
0.2465542


d20 (nm)
66.090
131.424
196.767
251.116
188.519


When n1 ≧ n10, n1m =
0.0671912
0.0841919
0.1023767
0.1153796
0.0426331


When n1 < n10, n1m =
0.0345654
0.0474304
0.0675305
0.0814563
0.0184045


When k1 ≧ k10, k1m =
0.0380615
0.0598425
0.0894568
0.1045068
0.0426917


When k1 < k10, k1m =
0.0683374
0.0902014
0.1054456
0.1041345
0.0441687


When d1 ≧ d10, d1m (nm) =
4.558
5.118
5.874
6.783
14.297


When d1 < d10, d1m (nm) =
1.985
2.531
3.589
4.355
4.476


When n2 ≧ n20, n2m =
0.1216980
0.1117603
0.1100940
0.1104114
0.0579919


When n2 < n20, n2m =
0.1802991
0.1554016
0.1498889
0.1534180
0.0956348


When k2 ≧ k20, k2m =
0.2165979
0.1264526
0.1015808
0.1042908
0.0462366


When k2 < k20, k2m =
0.1276270
0.1054065
0.0937561
0.0879675
0.0605090


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
11.858
29.189
73.755
91.689
21.669





















1.0 < NA ≦ 1.1


95 < T ≦ 105







19/34












Case
10-06
10-07
10-08
10-09
10-10





n10
1.7286512
1.7096319
1.7125109
1.6891198
1.6979687


k10
0.0752622
0.0728333
0.0665034
0.0853163
0.0677690


d10 (nm)
92.185
159.923
159.852
208.173
220.140


n20
1.7137581
1.6877059
1.7181911
1.6918411
1.6871092


k20
0.2076205
0.2252670
0.1890952
0.2826173
0.2165239


d20 (nm)
240.302
182.766
235.934
141.112
182.186


When n1 ≧ n10, n1m =
0.0500330
0.0406897
0.0503772
0.0132690
0.0644641


When n1 < n10, n1m =
0.0231873
0.0169287
0.0155139
0.0507471
0.0375525


When k1 ≧ k10, k1m =
0.0495398
0.0307520
0.0335327
0.0250305
0.0414893


When k1 < k10, k1m =
0.0465039
0.0291895
0.0230286
0.0142859
0.0317957


When d1 ≧ d10, d1m (nm) =
22.149
∞
∞
5.803
∞


When d1 < d10, d1m (nm) =
6.093
5.010
4.544
20.171
66.095


When n2 ≧ n20, n2m =
0.0807422
0.0673730
0.0968713
0.1414526
0.1231934


When n2 < n20, n2m =
0.1109875
0.0569836
0.1140344
0.0176575
0.0690576


When k2 ≧ k20, k2m =
0.0671313
0.0201965
0.0272949
0.0516113
0.0909106


When k2 < k20, k2m =
0.0601733
0.0546924
0.0555640
0.0644128
0.0681702


When d2 ≧ d20, d2m (nm) =
∞
22.678
∞
∞
∞


When d2 < d20, d2m (nm) =
33.234
12.401
9.751
3.545
24.752










1.0 < NA ≦ 1.1


95 < T ≦ 105












Case
10-11
10-12
10-13







n10
1.6953920
1.6945041
1.6957904



k10
0.0607310
0.0754015
0.0613078



d10 (nm)
216.694
266.879
263.111



n20
1.6943518
1.7053190
1.6921380



k20
0.1805507
0.2962459
0.1886276



d20 (nm)
240.824
134.581
257.166



When n1 ≧ n10, n1m =
0.0773376
0.0489661
0.0744116



When n1 < n10, n1m =
0.0532397
0.0362244
0.0544775



When k1 ≧ k10, k1m =
0.0520667
0.0490686
0.0595886



When k1 < k10, k1m =
0.0373279
0.0329797
0.0399255



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
56.748
22.698
144.280



When n2 ≧ n20, n2m =
0.2401196
0.2258960
0.3617542



When n2 < n20, n2m =
0.1505750
0.2863916
0.2146826



When k2 ≧ k20, k2m =
0.1118237
0.2042285
0.2258594



When k2 < k20, k2m =
0.0641272
0.1247363
0.0874829



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
74.466
22.579
121.018






















1.0 < NA ≦ 1.1


105 < T ≦ 115







20/34












Case
11-01
11-02
11-03
11-04
11-05





n10
1.9374125
1.9018997
1.8965439
1.7253637
1.7289764


k10
0.1704110
0.1487976
0.1142225
0.0900184
0.0775142


d10 (nm)
15.669
13.285
11.973
91.432
91.877


n20
1.7248980
1.6713435
1.6970963
1.6651786
1.7120256


k20
0.4663738
0.3352808
0.2748315
0.2549499
0.2134557


d20 (nm)
126.299
189.496
244.759
180.505
231.728


When n1 ≧ n10, n1m =
0.0844495
0.1011877
0.1161206
0.0397363
0.0483887


When n1 < n10, n1m =
0.0440234
0.0656897
0.0810999
0.0155029
0.0208545


When k1 ≧ k10, k1m =
0.0577478
0.0888123
0.1065247
0.0388269
0.0469031


When k1 < k10, k1m =
0.0914417
0.1045447
0.1142225
0.0417639
0.0449243


When d1 ≧ d10, d1m (nm) =
4.564
5.473
6.423
12.314
18.889


When d1 < d10, d1m (nm) =
2.111
3.313
4.088
3.639
5.309


When n2 ≧ n20, n2m =
0.1026855
0.1066711
0.1092859
0.0538538
0.0798657


When n2 < n20, n2m =
0.1573315
0.1496814
0.1507874
0.0957056
0.1124231


When k2 ≧ k20, k2m =
0.1109265
0.0973877
0.1006897
0.0382251
0.0609106


When k2 < k20, k2m =
0.0995313
0.0917126
0.0869214
0.0582397
0.0599487


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
32.204
71.551
94.669
21.979
35.901










1.0 < NA ≦ 1.1


105 < T ≦ 115












Case
11-06
11-07
11-08
11-09
11-10





n10
1.7092919
1.7124011
1.6891266
1.6977739
1.6952347


k10
0.0753499
0.0683625
0.0867081
0.0698574
0.0623107


d10 (nm)
159.318
159.365
206.818
219.869
216.627


n20
1.6830351
1.7169838
1.6858604
1.6842611
1.6937881


k20
0.2331189
0.1941891
0.2953498
0.2258219
0.1869159


d20 (nm)
174.468
227.412
138.155
173.345
231.738


When n1 ≧ n10, n1m =
0.0373157
0.0484546
0.0121899
0.0603870
0.0758545


When n1 < n10, n1m =
0.0105005
0.0089343
0.0409204
0.0315625
0.0474512


When k1 ≧ k10, k1m =
0.0240833
0.0270752
0.0251843
0.0382471
0.0501941


When k1 < k10, k1m =
0.0246826
0.0176978
0.0193188
0.0296948
0.0358765


When d1 ≧ d10, d1m (nm) =
22.059
∞
5.261
∞
∞


When d1 < d10, d1m (nm) =
3.023
2.568
16.255
17.363
54.608


When n2 ≧ n20, n2m =
0.0659399
0.0944360
0.1154346
0.0831506
0.2493335


When n2 < n20, n2m =
0.0371252
0.1164661
0.0185925
0.0632410
0.1310596


When k2 ≧ k20, k2m =
0.0133044
0.0180847
0.0609753
0.0891687
0.1103210


When k2 < k20, k2m =
0.0529578
0.0555518
0.0785950
0.0680151
0.0652307


When d2 ≧ d20, d2m (nm) =
18.030
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
8.732
5.378
3.627
23.361
52.894





















1.0 < NA ≦ 1.1


105 < T ≦ 115







21/34











Case
11-11
11-12







n10
1.6944699
1.6958800



k10
0.0775933
0.0528961



d10 (nm)
265.762
273.317



n20
1.6967397
1.6915993



k20
0.3115846
0.1649138



d20 (nm)
129.093
288.010



When n1 ≧ n10, n1m =
0.0466345
0.0703040



When n1 < n10, n1m =
0.0341467
0.0549121



When k1 ≧ k10, k1m =
0.0473621
0.0679175



When k1 < k10, k1m =
0.0320862
0.0389246



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
20.031
180.011



When n2 ≧ n20, n2m =
0.2202100
0.2749866



When n2 < n20, n2m =
0.1339246
0.2056653



When k2 ≧ k20, k2m =
0.2018127
0.2031665



When k2 < k20, k2m =
0.1244751
0.0729272



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
18.618
105.982











1.0 < NA ≦ 1.1


115 < T ≦ 125












Case
12-01
12-02
12-03
12-04
12-05





n10
1.9729972
1.9456051
1.9005953
1.8972956
1.7255330


k10
0.2768129
0.1915481
0.1591490
0.1121564
0.0922673


d10 (nm)
17.524
14.612
13.217
12.290
91.102


n20
1.6663342
1.6781309
1.6561276
1.7051607
1.6614760


k20
0.7544777
0.4665054
0.3399716
0.2822449
0.2607016


d20 (nm)
64.842
122.845
181.593
233.141
171.070


When n1 ≧ n10, n1m =
0.0730835
0.0862573
0.1002148
0.1132361
0.0385791


When n1 < n10, n1m =
0.0179053
0.0397437
0.0650696
0.0790137
0.0152405


When k1 ≧ k10, k1m =
0.0247314
0.0556897
0.0891748
0.1035071
0.0386047


When k1 < k10, k1m =
0.0592480
0.0960681
0.1016016
0.1121564
0.0414185


When d1 ≧ d10, d1m (nm) =
2.961
4.145
5.266
6.373
11.328


When d1 < d10, d1m (nm) =
0.729
1.739
3.220
4.072
3.483


When n2 ≧ n20, n2m =
0.0585083
0.0918945
0.1020654
0.1070825
0.0573608


When n2 < n20, n2m =
0.1382239
0.1611719
0.1504858
0.1560303
0.0993860


When k2 ≧ k20, k2m =
0.0616943
0.0914514
0.0935474
0.1016602
0.0359058


When k2 < k20, k2m =
0.0899731
0.0957678
0.0910632
0.0886353
0.0590588


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
11.368
38.474
71.143
98.322
22.477





















1.0 < NA ≦ 1.1


115 < T ≦ 125







22/34












Case
12-06
12-07
12-08
12-09
12-10





n10
1.7304964
1.7097843
1.7129025
1.7059734
1.6983193


k10
0.0792452
0.0770210
0.0702809
0.0642321
0.0712405


d10 (nm)
91.709
159.025
159.249
159.600
220.143


n20
1.7154952
1.6841289
1.7178163
1.6898319
1.6860819


k20
0.2175998
0.2392980
0.1978132
0.1677546
0.2336364


d20 (nm)
221.560
164.463
217.770
279.371
162.903


When n1 ≧ n10, n1m =
0.0478430
0.0358972
0.0479553
0.0552173
0.0579871


When n1 < n10, n1m =
0.0188013
0.0078589
0.0015247
0.0299426
0.0264917


When k1 ≧ k10, k1m =
0.0447290
0.0214099
0.0152087
0.0363110
0.0340515


When k1 < k10, k1m =
0.0430518
0.0224402
0.0060950
0.0278772
0.0279150


When d1 ≧ d10, d1m (nm) =
17.323
17.500
∞
∞
∞


When d1 < d10, d1m (nm) =
4.626
2.208
0.436
70.406
11.462


When n2 ≧ n20, n2m =
0.0842468
0.0631323
0.0959070
0.1382263
0.0682983


When n2 < n20, n2m =
0.1172522
0.0247583
0.0076807
0.1296057
0.0493762


When k2 ≧ k20, k2m =
0.0583887
0.0111536
0.0046545
0.0357849
0.0882227


When k2 < k20, k2m =
0.0618323
0.0547961
0.0579968
0.0540967
0.0613330


When d2 ≧ d20, d2m (nm) =
∞
18.428
∞
∞
∞


When d2 < d20, d2m (nm) =
65.102
5.436
0.894
57.180
18.177










1.0 < NA ≦ 1.1


115 < T ≦ 125












Case
12-11
12-12
12-13







n10
1.6946755
1.6955425
1.6956989



k10
0.0639503
0.0535782
0.0539885



d10 (nm)
216.344
213.248
272.929



n20
1.6931001
1.6937343
1.6917939



k20
0.1919118
0.1415462
0.1683287



d20 (nm)
222.331
338.947
278.327



When n1 ≧ n10, n1m =
0.0359900
0.0869177
0.0714185



When n1 < n10, n1m =
0.0437024
0.0750378
0.0538635



When k1 ≧ k10, k1m =
0.0485352
0.0653857
0.0669263



When k1 < k10, k1m =
0.0346851
0.0370959
0.0388916



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
51.791
132.178
120.018



When n2 ≧ n20, n2m =
0.1409949
0.2291467
0.2819873



When n2 < n20, n2m =
0.1060889
0.1273120
0.2087952



When k2 ≧ k20, k2m =
0.1109827
0.1363989
0.2069556



When k2 < k20, k2m =
0.0639978
0.0571204
0.0743250



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
35.182
107.512
95.030






















1.0 < NA ≦ 1.1


125 < T ≦ 135







23/34












Case
13-01
13-02
13-03
13-04
13-05





n10
1.8993435
1.9080238
1.7276770
1.7338076
1.7236449


k10
0.1093669
0.0778133
0.0934541
0.0808022
0.0736298


d10 (nm)
12.638
11.189
91.210
91.869
92.640


n20
1.7156529
1.7380285
1.6689251
1.7256843
1.7007078


k20
0.2903108
0.2474831
0.2700133
0.2232282
0.1887087


d20 (nm)
220.942
275.866
159.348
209.944
271.148


When n1 ≧ n10, n1m =
0.1116663
0.1266492
0.0395422
0.0484558
0.0522583


When n1 < n10, n1m =
0.0773999
0.0872168
0.0167297
0.0166711
0.0180103


When k1 ≧ k10, k1m =
0.1011877
0.1103088
0.0409973
0.0422058
0.0417761


When k1 < k10, k1m =
0.1093669
0.0778133
0.0410583
0.0409119
0.0443518


When d1 ≧ d10, d1m (nm) =
6.392
6.737
11.272
16.895
38.105


When d1 < d10, d1m (nm) =
4.063
4.214
3.733
3.952
5.177


When n2 ≧ n20, n2m =
0.1069678
0.1140796
0.0675769
0.0924780
0.1134937


When n2 < n20, n2m =
0.1606714
0.1563965
0.1033667
0.1197949
0.1230200


When k2 ≧ k20, k2m =
0.1040991
0.1083496
0.0397278
0.0600330
0.0739392


When k2 < k20, k2m =
0.0926990
0.0882825
0.0652539
0.0659766
0.0617065


When d2 ≧ d20, d2m (nm) =
∞
∞
29.488
∞
∞


When d2 < d20, d2m (nm) =
90.398
130.978
17.688
16.714
72.265










1.0 < NA ≦ 1.1


125 < T ≦ 135












Case
13-06
13-07
13-08
13-09
13-10





n10
1.7117973
1.7052523
1.6990979
1.6936455
1.6937228


k10
0.0782334
0.0648564
0.0723627
0.0657466
0.0602088


d10 (nm)
159.412
160.141
220.761
215.539
212.854


n20
1.6949465
1.6847092
1.6931390
1.6916565
1.6917935


k20
0.2480962
0.1699839
0.2421156
0.1962143
0.1651159


d20 (nm)
152.577
269.827
151.650
213.597
273.449


When n1 ≧ n10, n1m =
0.0367346
0.0551233
0.0594092
0.0311401
0.0698511


When n1 < n10, n1m =
0.0058984
0.0239478
0.0244397
0.0431714
0.0693030


When k1 ≧ k10, k1m =
0.0206287
0.0370862
0.0278687
0.0476123
0.0598901


When k1 < k10, k1m =
0.0197803
0.0307031
0.0272107
0.0341650
0.0364880


When d1 ≧ d10, d1m (nm) =
17.175
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
1.642
10.322
10.135
48.593
59.568


When n2 ≧ n20, n2m =
0.0634509
0.0441370
0.0646301
0.1417163
0.2349500


When n2 < n20, n2m =
0.0185107
0.1268359
0.0304773
0.0878235
0.1413928


When k2 ≧ k20, k2m =
0.0106982
0.0374109
0.0871985
0.1142444
0.1311609


When k2 < k20, k2m =
0.0614368
0.0554883
0.0573535
0.0648792
0.0616370


When d2 ≧ d20, d2m (nm) =
20.867
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
3.236
51.950
7.977
23.183
75.250





















1.0 < NA ≦ 1.1


125 < T ≦ 135







24/34










Case
13-11







n10
1.6954835



k10
0.0549286



d10 (nm)
272.481



n20
1.6920522



k20
0.1709440



d20 (nm)
269.018



When n1 ≧ n10, n1m =
0.0732507



When n1 < n10, n1m =
0.0527002



When k1 ≧ k10, k1m =
0.0659570



When k1 < k10, k1m =
0.0396948



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
115.848



When n2 ≧ n20, n2m =
0.2876270



When n2 < n20, n2m =
0.2123071



When k2 ≧ k20, k2m =
0.2114355



When k2 < k20, k2m =
0.0767078



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
91.957











1.0 < NA ≦ 1.1


135 < T ≦ 145












Case
14-01
14-02
14-03
14-04
14-05





n10
1.9117383
1.8981283
1.9112943
1.7312914
1.7377087


k10
0.2302052
0.1070787
0.0649623
0.0945058
0.0827928


d10 (nm)
15.980
13.384
12.163
91.544
92.151


n20
1.5953517
1.7296497
1.7710787
1.6819509
1.7372931


k20
0.4940730
0.3022759
0.2605013
0.2846338
0.2321492


d20 (nm)
105.368
209.053
259.824
147.702
198.983


When n1 ≧ n10, n1m =
0.0781360
0.1075745
0.1181738
0.0408386
0.0487402


When n1 < n10, n1m =
0.0319177
0.0739868
0.0809961
0.0177930
0.0144653


When k1 ≧ k10, k1m =
0.0436902
0.0964282
0.0995044
0.0430859
0.0389966


When k1 < k10, k1m =
0.0819202
0.1070787
0.0649623
0.0421533
0.0388171


When d1 ≧ d10, d1m (nm) =
3.898
6.524
6.747
11.475
16.758


When d1 < d10, d1m (nm) =
1.590
4.095
4.185
3.862
3.299


When n2 ≧ n20, n2m =
0.0627563
0.1085400
0.1152271
0.0712305
0.0983997


When n2 < n20, n2m =
0.1565955
0.1599133
0.1627686
0.1038867
0.1174939


When k2 ≧ k20, k2m =
0.0810010
0.1085132
0.1160754
0.0447900
0.0617737


When k2 < k20, k2m =
0.1061572
0.0966113
0.0915161
0.0720264
0.0692358


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
26.800
∞


When d2 < d20, d2m (nm) =
27.538
81.885
123.147
14.572
12.208





















1.0 < NA ≦ 1.1


135 < T ≦ 145







25/34












Case
14-06
14-07
14-08
14-09
14-10





n10
1.7228203
1.7144911
1.7050797
1.6925663
1.6991742


k10
0.0749158
0.0796518
0.0657099
0.0675694
0.0739382


d10 (nm)
92.874
160.015
160.534
214.049
220.936


n20
1.6951594
1.7090445
1.6817729
1.6900690
1.6992675


k20
0.1935801
0.2610315
0.1743389
0.2005073
0.2525134


d20 (nm)
262.590
141.223
260.739
206.287
141.832


When n1 ≧ n10, n1m =
0.0517419
0.0380176
0.0550000
0.0300269
0.0099573


When n1 < n10, n1m =
0.0171826
0.0033435
0.0205762
0.0461255
0.0255640


When k1 ≧ k10, k1m =
0.0402747
0.0176941
0.0369080
0.0452966
0.0196790


When k1 < k10, k1m =
0.0440662
0.0145313
0.0289917
0.0339844
0.0188269


When d1 ≧ d10, d1m (nm) =
34.339
18.702
∞
∞
∞


When d1 < d10, d1m (nm) =
4.946
0.924
8.433
45.536
10.412


When n2 ≧ n20, n2m =
0.1089246
0.0638684
0.0364478
0.1628357
0.0605127


When n2 < n20, n2m =
0.1178552
0.0117664
0.1214197
0.0809363
0.0143933


When k2 ≧ k20, k2m =
0.0721460
0.0078210
0.0372485
0.1200403
0.0864673


When k2 < k20, k2m =
0.0629919
0.0624194
0.0562036
0.0635217
0.0436145


When d2 ≧ d20, d2m (nm) =
∞
21.562
∞
∞
25.612


When d2 < d20, d2m (nm) =
67.089
1.645
48.128
21.535
3.107










1.0 < NA ≦ 1.1


135 < T ≦ 145











Case
14-11
14-12







n10
1.6955775
1.6953573



k10
0.0548747
0.0556511



d10 (nm)
213.500
272.231



n20
1.6934763
1.6917841



k20
0.1457299
0.1736649



d20 (nm)
319.743
260.476



When n1 ≧ n10, n1m =
0.0884082
0.0714819



When n1 < n10, n1m =
0.0760022
0.0518335



When k1 ≧ k10, k1m =
0.0634009
0.0652063



When k1 < k10, k1m =
0.0349133
0.0395740



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
128.996
113.518



When n2 ≧ n20, n2m =
0.2359680
0.2895325



When n2 < n20, n2m =
0.1212769
0.2158911



When k2 ≧ k20, k2m =
0.1345789
0.2124060



When k2 < k20, k2m =
0.0582837
0.0793396



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
94.216
91.728






















1.0 < NA ≦ 1.1


145 < T ≦ 155







26/34












Case
15-01
15-02
15-03
15-04
15-05





n10
1.8842999
1.9020060
1.9176161
1.7347347
1.7402087


k10
0.1660082
0.1078045
0.0733974
0.0970436
0.0854812


d10 (nm)
15.542
13.884
11.927
91.613
92.221


n20
1.6642092
1.7406676
1.7608162
1.6897518
1.7427648


k20
0.3881866
0.3180988
0.2687301
0.3028107
0.2437105


d20 (nm)
148.595
199.025
254.127
138.166
190.058


When n1 ≧ n10, n1m =
0.0902356
0.1039673
0.1191321
0.0403284
0.0477295


When n1 < n10, n1m =
0.0608057
0.0712415
0.0806982
0.0168616
0.0123145


When k1 ≧ k10, k1m =
0.0796985
0.0922314
0.1003394
0.0414099
0.0352649


When k1 < k10, k1m =
0.0913672
0.1040308
0.0733974
0.0415906
0.0369519


When d1 ≧ d10, d1m (nm) =
5.569
6.401
6.478
11.141
16.036


When d1 < d10, d1m (nm) =
3.524
3.984
3.954
3.546
2.715


When n2 ≧ n20, n2m =
0.0975891
0.1093347
0.1166919
0.0721533
0.0993201


When n2 < n20, n2m =
0.1510022
0.1570532
0.1613013
0.0996582
0.1116626


When k2 ≧ k20, k2m =
0.1021082
0.1115308
0.1139111
0.0446167
0.0576575


When k2 < k20, k2m =
0.1042151
0.0981909
0.0922217
0.0735095
0.0699536


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
23.089
∞


When d2 < d20, d2m (nm) =
36.178
75.817
118.717
13.060
9.872










1.0 < NA ≦ 1.1


145 < T ≦ 155












Case
15-06
15-07
15-08
15-09
15-10





n10
1.7232674
1.7163169
1.7052425
1.6979604
1.6919325


k10
0.0768076
0.0822242
0.0670983
0.0765182
0.0693101


d10 (nm)
92.842
160.121
160.367
219.964
212.895


n20
1.6931409
1.7162208
1.6808978
1.6978817
1.6886216


k20
0.2010537
0.2770503
0.1806066
0.2641846
0.2063377


d20 (nm)
254.319
132.120
252.327
134.431
199.162


When n1 ≧ n10, n1m =
0.0505859
0.0375513
0.0535669
0.0055981
0.0297021


When n1 < n10, n1m =
0.0155139
0.0002051
0.0181250
0.0232141
0.0494775


When k1 ≧ k10, k1m =
0.0378564
0.0051208
0.0335376
0.0146118
0.0441443


When k1 < k10, k1m =
0.0427637
0.0032507
0.0275378
0.0178613
0.0327478


When d1 ≧ d10, d1m (nm) =
33.581
19.229
∞
4.817
∞


When d1 < d10, d1m (nm) =
4.347
0.056
6.999
10.286
43.553


When n2 ≧ n20, n2m =
0.0760803
0.0599353
0.0299109
0.0539575
0.2378027


When n2 < n20, n2m =
0.1135510
0.0008435
0.1135376
0.0106042
0.0839368


When k2 ≧ k20, k2m =
0.0671289
0.0005420
0.0313745
0.0886438
0.1159473


When k2 < k20, k2m =
0.0634387
0.0680176
0.0561853
0.0306653
0.0671289


When d2 ≧ d20, d2m (nm) =
∞
12.405
∞
21.650
∞


When d2 < d20, d2m (nm) =
64.219
0.105
32.640
2.145
24.441





















1.0 < NA ≦ 1.1


145 < T ≦ 155







27/34











Case
15-11
15-12







n10
1.6933082
1.6953110



k10
0.0619759
0.0563706



d10 (nm)
212.839
272.392



n20
1.6904544
1.6905212



k20
0.1723582
0.1778331



d20 (nm)
255.647
252.170



When n1 ≧ n10, n1m =
0.0645605
0.0686462



When n1 < n10, n1m =
0.0718213
0.0516125



When k1 ≧ k10, k1m =
0.0578125
0.0646021



When k1 < k10, k1m =
0.0349402
0.0400220



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
54.857
112.777



When n2 ≧ n20, n2m =
0.2345605
0.2885852



When n2 < n20, n2m =
0.1388916
0.2180322



When k2 ≧ k20, k2m =
0.1280078
0.2117786



When k2 < k20, k2m =
0.0658081
0.0782971



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
73.297
86.154











1.0 < NA ≦ 1.1


155 < T ≦ 165












Case
16-01
16-02
16-03
16-04
16-05





n10
1.9162825
1.8960663
1.9085468
1.9232010
1.7368663


k10
0.2485644
0.1719364
0.1144956
0.0848488
0.1019026


d10 (nm)
18.297
15.704
13.923
11.624
91.322


n20
1.6104232
1.6708316
1.7385514
1.7455678
1.6869885


k20
0.6165991
0.4169686
0.3337318
0.2771185
0.3224919


d20 (nm)
83.442
139.520
191.444
248.983
130.342


When n1 ≧ n10, n1m =
0.0684412
0.0871606
0.1018298
0.1200745
0.0372510


When n1 < n10, n1m =
0.0186816
0.0568530
0.0690649
0.0803638
0.0125696


When k1 ≧ k10, k1m =
0.0233801
0.0734265
0.0893420
0.1020142
0.0332275


When k1 < k10, k1m =
0.0710925
0.0921472
0.1049048
0.0848488
0.0396851


When d1 ≧ d10, d1m (nm) =
3.544
5.170
6.051
6.159
10.019


When d1 < d10, d1m (nm) =
0.960
3.162
3.726
3.719
2.554


When n2 ≧ n20, n2m =
0.0392468
0.0938416
0.1080847
0.1165613
0.0639832


When n2 < n20, n2m =
0.1557959
0.1481714
0.1540210
0.1601440
0.0923059


When k2 ≧ k20, k2m =
0.0796021
0.1023108
0.1103064
0.1095667
0.0344885


When k2 < k20, k2m =
0.1143958
0.1026965
0.0973987
0.0917590
0.0690210


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
16.255


When d2 < d20, d2m (nm) =
16.079
31.215
71.737
92.392
12.361





















1.0 < NA ≦ 1.1


155 < T ≦ 165







28/34












Case
16-06
16-07
16-08
16-09
16-10





n10
1.7401611
1.7243481
1.7054586
1.6959475
1.6918299


k10
0.0886217
0.0791015
0.0688139
0.0801582
0.0707672


d10 (nm)
92.017
92.538
159.721
218.084
213.401


n20
1.7381402
1.6930588
1.6812702
1.6891859
1.6865968


k20
0.2555882
0.2092609
0.1871719
0.2763746
0.2143676


d20 (nm)
182.755
245.988
244.029
128.431
190.286


When n1 ≧ n10, n1m =
0.0455261
0.0488196
0.0509851
0.0098682
0.0278625


When n1 < n10, n1m =
0.0098901
0.0131677
0.0163489
0.0140930
0.0421411


When k1 ≧ k10, k1m =
0.0306140
0.0345203
0.0271167
0.0171570
0.0425635


When k1 < k10, k1m =
0.0347180
0.0404199
0.0257288
0.0171082
0.0318542


When d1 ≧ d10, d1m (nm) =
14.632
33.648
∞
8.318
∞


When d1 < d10, d1m (nm) =
2.133
3.535
5.969
6.525
43.306


When n2 ≧ n20, n2m =
0.0895227
0.0573254
0.0211304
0.0441309
0.2430603


When n2 < n20, n2m =
0.1067090
0.1098926
0.1107275
0.0233423
0.0869226


When k2 ≧ k20, k2m =
0.0460217
0.0587354
0.0210486
0.0642297
0.1089050


When k2 < k20, k2m =
0.0680432
0.0628845
0.0551514
0.0464880
0.0738831


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.572
∞


When d2 < d20, d2m (nm) =
8.553
37.425
30.745
5.059
27.273










1.0 < NA ≦ 1.1


155 < T ≦ 165











Case
16-11
16-12







n10
1.6935501
1.6953216



k10
0.0625258
0.0573372



d10 (nm)
213.666
272.694



n20
1.6897170
1.6885432



k20
0.1780108
0.1839003



d20 (nm)
246.097
243.579



When n1 ≧ n10, n1m =
0.0658508
0.0696008



When n1 < n10, n1m =
0.0609790
0.0519751



When k1 ≧ k10, k1m =
0.0564087
0.0639087



When k1 < k10, k1m =
0.0340259
0.0390979



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
55.431
113.126



When n2 ≧ n20, n2m =
0.2425122
0.2917029



When n2 < n20, n2m =
0.1355713
0.2189172



When k2 ≧ k20, k2m =
0.1230981
0.2089771



When k2 < k20, k2m =
0.0647131
0.0785583



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
74.519
83.205






















1.0 < NA ≦ 1.1


165 < T ≦ 175







29/34












Case
17-01
17-02
17-03
17-04
17-05





n10
1.9620125
1.9138120
1.9194872
1.9263431
1.7366416


k10
0.2671830
0.1838008
0.1265886
0.0918160
0.1083929


d10 (nm)
17.281
15.160
13.286
11.575
90.600


n20
1.6251877
1.6631095
1.7204546
1.7389610
1.6676220


k20
0.6875073
0.4399257
0.3440475
0.2853240
0.3363185


d20 (nm)
75.420
132.541
186.036
241.421
124.136


When n1 ≧ n10, n1m =
0.0681287
0.0852625
0.1025696
0.1184741
0.0323010


When n1 < n10, n1m =
0.0103625
0.0516760
0.0678894
0.0788623
0.0048279


When k1 ≧ k10, k1m =
0.0130603
0.0684912
0.0894849
0.1012756
0.0174634


When k1 < k10, k1m =
0.0671069
0.0945691
0.1086621
0.0918160
0.0305151


When d1 ≧ d10, d1m (nm) =
3.029
4.576
5.503
5.915
7.890


When d1 < d10, d1m (nm) =
0.441
2.597
3.327
3.560
0.944


When n2 ≧ n20, n2m =
0.0235046
0.0887256
0.1055566
0.1147229
0.0355994


When n2 < n20, n2m =
0.1565857
0.1459790
0.1532703
0.1591589
0.0840686


When k2 ≧ k20, k2m =
0.0495569
0.0950366
0.1036096
0.1065601
0.0135376


When k2 < k20, k2m =
0.1038318
0.0972864
0.0941003
0.0904578
0.0586487


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
9.834


When d2 < d20, d2m (nm) =
13.490
32.564
69.289
94.292
9.844










1.0 < NA ≦ 1.1


165 < T ≦ 175












Case
17-06
17-07
17-08
17-09
17-10





n10
1.7377165
1.7250070
1.7054487
1.6921136
1.6937452


k10
0.0918810
0.0812670
0.0704565
0.0719896
0.0634118


d10 (nm)
91.516
92.096
158.889
214.506
214.086


n20
1.7225143
1.6922454
1.6815182
1.6833735
1.6893106


k20
0.2640565
0.2155950
0.1921887
0.2231205
0.1840166


d20 (nm)
176.484
237.445
235.428
180.418
236.602


When n1 ≧ n10, n1m =
0.0420569
0.0467627
0.0482849
0.0256970
0.0615491


When n1 < n10, n1m =
0.0067480
0.0110010
0.0145544
0.0346619
0.0533179


When k1 ≧ k10, k1m =
0.0242395
0.0311426
0.0191064
0.0402332
0.0548975


When k1 < k10, k1m =
0.0306030
0.0379785
0.0179834
0.0315259
0.0339990


When d1 ≧ d10, d1m (nm) =
13.053
20.074
∞
∞
∞


When d1 < d10, d1m (nm) =
1.437
2.846
5.076
44.014
52.355


When n2 ≧ n20, n2m =
0.0699756
0.0474695
0.0119531
0.2616345
0.2513293


When n2 < n20, n2m =
0.1027979
0.1100684
0.1104504
0.0766565
0.1353430


When k2 ≧ k20, k2m =
0.0294397
0.0490112
0.0106458
0.1033704
0.1166565


When k2 < k20, k2m =
0.0637073
0.0613086
0.0537012
0.0738440
0.0656140


When d2 ≧ d20, d2m (nm) =
∞
∞
5.139
∞
∞


When d2 < d20, d2m (nm) =
7.091
63.320
32.177
24.892
75.277





















1.0 < NA ≦ 1.1


165 < T ≦ 175







30/34











Case
17-11
17-12







n10
1.6937402
1.6958036



k10
0.0634247
0.0530688



d10 (nm)
214.067
271.703



n20
1.6892020
1.6918593



k20
0.1839903
0.1637010



d20 (nm)
236.644
291.452



When n1 ≧ n10, n1m =
0.0614392
0.0799048



When n1 < n10, n1m =
0.0533545
0.0613391



When k1 ≧ k10, k1m =
0.0548865
0.0657874



When k1 < k10, k1m =
0.0340295
0.0406555



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
52.349
186.337



When n2 ≧ n20, n2m =
0.2512048
0.2852795



When n2 < n20, n2m =
0.1353552
0.2060364



When k2 ≧ k20, k2m =
0.1167688
0.2088965



When k2 < k20, k2m =
0.0656104
0.0720715



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
75.294
119.308











1.0 < NA ≦ 1.1


175 < T ≦ 185












Case
18-01
18-02
18-03
18-04
18-05





n10
2.0247974
1.9282935
1.9213955
1.9262173
1.7355101


k10
0.2830183
0.1992550
0.1387890
0.1063571
0.0947091


d10 (nm)
15.097
14.428
13.062
11.253
91.033


n20
1.6266898
1.6428403
1.7027750
1.7173021
1.7079959


k20
0.7191283
0.4517072
0.3507816
0.2869739
0.2693832


d20 (nm)
71.681
126.823
179.475
236.027
169.192


When n1 ≧ n10, n1m =
0.0749963
0.0847278
0.1010168
0.1197595
0.0387598


When n1 < n10, n1m =
0.0029248
0.0471021
0.0652051
0.0785376
0.0037976


When k1 ≧ k10, k1m =
0.0038599
0.0655127
0.0884351
0.1039075
0.0170227


When k1 < k10, k1m =
0.0706714
0.0951611
0.1067810
0.1063571
0.0250378


When d1 ≧ d10, d1m (nm) =
2.365
4.047
5.170
5.710
10.979


When d1 < d10, d1m (nm) =
0.098
2.142
3.074
3.403
0.799


When n2 ≧ n20, n2m =
0.0068848
0.0841113
0.1036328
0.1139966
0.0477551


When n2 < n20, n2m =
0.1606787
0.1462891
0.1534180
0.1596240
0.1042908


When k2 ≧ k20, k2m =
0.0111658
0.0845300
0.0979260
0.1010864
0.0158423


When k2 < k20, k2m =
0.0939917
0.0914209
0.0916113
0.0894141
0.0611707


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
3.000
39.175
67.597
105.537
4.807





















1.0 < NA ≦ 1.1


175 < T ≦ 185







31/34












Case
18-06
18-07
18-08
18-09
18-10





n10
1.7251933
1.7054174
1.6937830
1.6952847
1.6957027


k10
0.0829804
0.0718367
0.0647049
0.0582261
0.0542195


d10 (nm)
91.728
158.389
214.330
213.359
271.586


n20
1.6903561
1.6812041
1.6889835
1.6934588
1.6918383


k20
0.2192539
0.1954390
0.1894046
0.1611341
0.1679902


d20 (nm)
228.367
226.084
226.812
284.005
281.728


When n1 ≧ n10, n1m =
0.0450793
0.0463184
0.0575061
0.0820801
0.0778577


When n1 < n10, n1m =
0.0094861
0.0044336
0.0478479
0.0612256
0.0602185


When k1 ≧ k10, k1m =
0.0283801
0.0117395
0.0529968
0.0602039
0.0649841


When k1 < k10, k1m =
0.0362878
0.0115625
0.0337854
0.0347266
0.0400525


When d1 ≧ d10, d1m (nm) =
16.774
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
2.397
1.386
50.875
126.709
185.173


When n2 ≧ n20, n2m =
0.0407971
0.0052539
0.2620386
0.2460583
0.2888794


When n2 < n20, n2m =
0.1134692
0.1157361
0.1359692
0.1267810
0.2086084


When k2 ≧ k20, k2m =
0.0417627
0.0042761
0.1123547
0.1276489
0.2100842


When k2 < k20, k2m =
0.0604272
0.0538147
0.0667053
0.0613220
0.0762817


When d2 ≧ d20, d2m (nm) =
∞
1.973
∞
∞
∞


When d2 < d20, d2m (nm) =
63.259
35.408
73.536
81.916
101.090










1.0 < NA ≦ 1.1


185 < T ≦ 195












Case
19-01
19-02
19-03
19-04
19-05





n10
1.9316549
1.9193011
1.9209840
1.9114684
1.7364379


k10
0.2158025
0.1476126
0.1061325
0.1024475
0.0969838


d10 (nm)
14.297
13.272
11.842
10.224
91.033


n20
1.6202378
1.6935029
1.7241227
1.6976483
1.7085420


k20
0.4645248
0.3598725
0.2946413
0.2438294
0.2774318


d20 (nm)
119.165
170.049
224.030
285.021
158.680


When n1 ≧ n10, n1m =
0.0819873
0.0986853
0.1146375
0.1344971
0.0375342


When n1 < n10, n1m =
0.0431250
0.0625305
0.0746716
0.0933276
0.0023010


When k1 ≧ k10, k1m =
0.0616553
0.0860156
0.0981763
0.1190894
0.0118958


When k1 < k10, k1m =
0.0896899
0.1016528
0.1061325
0.1024475
0.0218677


When d1 ≧ d10, d1m (nm) =
3.700
5.023
5.787
6.264
9.942


When d1 < d10, d1m (nm) =
1.892
2.963
3.440
3.984
0.476


When n2 ≧ n20, n2m =
0.0797485
0.1030664
0.1135645
0.1221387
0.0340320


When n2 < n20, n2m =
0.1493750
0.1566296
0.1631348
0.1387097
0.1094446


When k2 ≧ k20, k2m =
0.0775891
0.0962708
0.1030847
0.0998328
0.0100928


When k2 < k20, k2m =
0.0909656
0.0941418
0.0920776
0.0860498
0.0649939


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
42.778


When d2 < d20, d2m (nm) =
39.461
66.761
95.735
134.721
2.964





















1.0 < NA ≦ 1.1


185 < T ≦ 195







32/34












Case
19-06
19-07
19-08
19-09
19-10





n10
1.7258494
1.7176246
1.7057732
1.7053832
1.6928552


k10
0.0843222
0.0727056
0.0731106
0.0633918
0.0748243


d10 (nm)
91.766
91.617
158.709
158.181
216.444


n20
1.6907525
1.6784161
1.6805392
1.6859880
1.6825267


k20
0.2229229
0.1842107
0.1989479
0.1669818
0.2415835


d20 (nm)
218.067
277.206
215.842
272.384
158.548


When n1 ≧ n10, n1m =
0.0445569
0.0497937
0.0455957
0.0532361
0.0209436


When n1 < n10, n1m =
0.0086951
0.0298450
0.0022034
0.0367859
0.0248157


When k1 ≧ k10, k1m =
0.0263611
0.0534119
0.0080444
0.0507507
0.0311414


When k1 < k10, k1m =
0.0359253
0.0504663
0.0097656
0.0393250
0.0256995


When d1 ≧ d10, d1m (nm) =
15.734
41.766
∞
∞
12.676


When d1 < d10, d1m (nm) =
2.168
9.272
0.695
75.025
12.180


When n2 ≧ n20, n2m =
0.0361047
0.0638184
0.0029834
0.0794446
0.0872498


When n2 < n20, n2m =
0.1156152
0.1202979
0.1187366
0.1037524
0.0413367


When k2 ≧ k20, k2m =
0.0400842
0.0626270
0.0025122
0.0450354
0.0876147


When k2 < k20, k2m =
0.0626514
0.0561853
0.0563074
0.0506238
0.0672510


When d2 ≧ d20, d2m (nm) =
∞
∞
1.098
∞
∞


When d2 < d20, d2m (nm) =
62.415
80.313
33.556
35.245
14.500










1.0 < NA ≦ 1.1


185 < T ≦ 195












Case
19-11
19-12
19-13







n10
1.6935473
1.6950516
1.6954923



k10
0.0663823
0.0596605
0.0554795



d10 (nm)
214.407
213.429
271.226



n20
1.6888366
1.6925794
1.6917166



k20
0.1945007
0.1643538
0.1716832



d20 (nm)
217.060
274.430
272.356



When n1 ≧ n10, n1m =
0.0539099
0.0837012
0.0771448



When n1 < n10, n1m =
0.0450378
0.0604199
0.0593555



When k1 ≧ k10, k1m =
0.0507373
0.0587012
0.0639185



When k1 < k10, k1m =
0.0306738
0.0334839
0.0392737



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
49.334
125.965
183.474



When n2 ≧ n20, n2m =
0.1392200
0.1753748
0.2943286



When n2 < n20, n2m =
0.1378223
0.1262683
0.2110303



When k2 ≧ k20, k2m =
0.1089429
0.1267468
0.2119958



When k2 < k20, k2m =
0.0654358
0.0611353
0.0788904



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
37.875
75.613
93.291






















1.0 < NA ≦ 1.1


195 < T ≦ 205







33/34












Case
20-01
20-02
20-03
20-04
20-05





n10
1.9124203
1.9240615
1.9069086
1.7409810
1.7270720


k10
0.1489422
0.1092971
0.1015424
0.0988730
0.0857435


d10 (nm)
14.330
12.001
10.748
91.533
92.142


n20
1.7039618
1.7245262
1.7018591
1.7256420
1.6923707


k20
0.3787231
0.3026113
0.2499950
0.2922591
0.2292874


d20 (nm)
157.291
214.201
273.963
146.253
207.814


When n1 ≧ n10, n1m =
0.0947424
0.1140125
0.1293140
0.0383984
0.0447009


When n1 < n10, n1m =
0.0592273
0.0732715
0.0895557
0.0020898
0.0081226


When k1 ≧ k10, k1m =
0.0804358
0.0961365
0.1132190
0.0106335
0.0246362


When k1 < k10, k1m =
0.0954272
0.1092971
0.1015424
0.0220923
0.0359277


When d1 ≧ d10, d1m (nm) =
5.168
5.724
6.406
9.801
15.595


When d1 < d10, d1m (nm) =
3.029
3.355
4.072
0.420
2.001


When n2 ≧ n20, n2m =
0.1047864
0.1153137
0.1226477
0.0347485
0.0318494


When n2 < n20, n2m =
0.1598962
0.1638757
0.1417261
0.1115564
0.1129541


When k2 ≧ k20, k2m =
0.1020288
0.1044775
0.1018286
0.0106042
0.0415295


When k2 < k20, k2m =
0.1029260
0.0959216
0.0891724
0.0737659
0.0663513


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
37.674
∞


When d2 < d20, d2m (nm) =
61.016
86.078
130.875
2.293
32.252










1.0 < NA ≦ 1.1


195 < T ≦ 205












Case
20-06
20-07
20-08
20-09
20-10





n10
1.7180387
1.7063746
1.7058520
1.6924739
1.6928977


k10
0.0734703
0.0744769
0.0640895
0.0767908
0.0684401


d10 (nm)
91.877
159.624
158.885
216.680
213.761


n20
1.6777924
1.6791348
1.6855365
1.6850078
1.6885850


k20
0.1881130
0.2047799
0.1710983
0.2520629
0.1999527


d20 (nm)
267.481
205.830
262.479
148.712
208.689


When n1 ≧ n10, n1m =
0.0499475
0.0454993
0.0542188
0.0126501
0.0501160


When n1 < n10, n1m =
0.0300122
0.0018469
0.0331775
0.0226819
0.0449377


When k1 ≧ k10, k1m =
0.0534277
0.0070447
0.0503931
0.0235315
0.0487341


When k1 < k10, k1m =
0.0493896
0.0111902
0.0386401
0.0180737
0.0270740


When d1 ≧ d10, d1m (nm) =
33.063
∞
∞
10.064
∞


When d1 < d10, d1m (nm) =
9.229
0.603
19.062
10.036
46.531


When n2 ≧ n20, n2m =
0.0633008
0.0027478
0.0774658
0.0675293
0.1390137


When n2 < n20, n2m =
0.1171533
0.1127539
0.1100610
0.0218616
0.1442749


When k2 ≧ k20, k2m =
0.0639148
0.0025830
0.0457581
0.0823975
0.1098364


When k2 < k20, k2m =
0.0580542
0.0529590
0.0524817
0.0502942
0.0628650


When d2 ≧ d20, d2m (nm) =
∞
1.007
∞
∞
∞


When d2 < d20, d2m (nm) =
77.001
28.132
32.836
6.408
22.345



















1.0 < NA ≦ 1.1


195 < T ≦ 205







34/34











Case
20-11
20-12















n10
1.6947635
1.6952371



k10
0.0610999
0.0566636



d10 (nm)
213.366
270.653



n20
1.6918971
1.6914186



k20
0.1679521
0.1751623



d20 (nm)
265.366
263.994



When n1 ≧ n10, n1m =
0.0863086
0.0772644



When n1 < n10, n1m =
0.0626501
0.0586890



When k1 ≧ k10, k1m =
0.0572302
0.0627917



When k1 < k10, k1m =
0.0322180
0.0382104



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
124.819
121.330



When n2 ≧ n20, n2m =
0.1702917
0.3021582



When n2 < n20, n2m =
0.1249365
0.2142798



When k2 ≧ k20, k2m =
0.1249064
0.2136462



When k2 < k20, k2m =
0.0643469
0.0826477



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
66.113
91.025










In accordance with a third embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.1<NA≦1.2. In accordance with the third embodiment of the invention, an exposure method is used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.1<NA≦1.2.
The antireflective film or the antireflective film used in the exposure method according to the third embodiment of the invention includes an upper layer having a complex refractive index N1 , and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the following equations:

N1=n1−k1i 

N2=n2−k2i 

Assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm), when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the following relational expression:

{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1

However, a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20. In the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m=”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”; in the line of “When d1≧d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d20−d2m”.












1.1 < NA ≦ 1.2


2 ≦ T ≦ 15







1/27












Case
1-01
1-02
1-03
1-04
1-05





n10
2.0940641
1.9168406
1.8970115
1.8805879
1.8778358


k10
0.0325844
0.1807255
0.1529573
0.1098415
0.1082679


d10 (nm)
26.090
35.662
31.182
13.577
19.930


n20
4.2290158
5.4932306
2.4318401
1.7032895
1.8340760


k20
2.3935124
0.6123354
0.5958382
0.2751108
0.3677230


d20 (nm)
3.632
19.087
52.406
218.193
142.226


When n1 ≧ n10, n1m =
0.0779846
0.0720874
0.0701013
0.1012354
0.0784314


When n1 < n10, n1m =
0.0750281
0.0636047
0.0555591
0.0635571
0.0497058


When k1 ≧ k10, k1m =
0.0672229
0.0527649
0.0494641
0.0853247
0.0590771


When k1 < k10, k1m =
0.0325844
0.0849731
0.0840393
0.1029980
0.0867822


When d1 ≧ d10, d1m (nm) =
3.416
5.199
6.198
6.716
7.382


When d1 < d10, d1m (nm) =
2.721
3.845
3.923
3.853
3.873


When n2 ≧ n20, n2m =
0.2775293
0.1187439
0.1333862
0.1147803
0.1115393


When n2 < n20, n2m =
0.2711597
0.1202087
0.1603455
0.1449023
0.1457849


When k2 ≧ k20, k2m =
0.2845105
0.1470557
0.1794812
0.0967163
0.1467151


When k2 < k20, k2m =
0.2499512
0.1180896
0.1302063
0.0855334
0.0954285


When d2 ≧ d20, d2m (nm) =
0.458
0.467
5.440
∞
∞


When d2 < d20, d2m (nm) =
0.433
0.450
5.242
81.747
30.656










1.1 < NA ≦ 1.2


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.8663312
1.7888608
1.7735009
1.7175310
1.7199475


k10
0.0978132
0.1060865
0.0957437
0.0751352
0.0655065


d10 (nm)
12.232
103.503
98.181
95.409
94.621


n20
1.6938400
4.4234099
2.0208865
1.6658936
1.6963762


k20
0.2288643
0.4526804
0.4158741
0.2054797
0.1762614


d20 (nm)
277.705
24.164
66.693
212.937
266.043


When n1 ≧ n10, n1m =
0.1143909
0.0588428
0.0489270
0.0419214
0.0484180


When n1 < n10, n1m =
0.0786536
0.0104822
0.0094507
0.0157727
0.0265735


When k1 ≧ k10, k1m =
0.1033447
0.0215918
0.0249109
0.0382361
0.0520056


When k1 < k10, k1m =
0.0978132
0.0439624
0.0358655
0.0399121
0.0459387


When d1 ≧ d10, d1m (nm) =
7.609
9.370
10.912
18.272
51.841


When d1 < d10, d1m (nm) =
4.794
1.739
1.766
4.805
8.596


When n2 ≧ n20, n2m =
0.1069236
0.0468066
0.0740674
0.0384924
0.0631091


When n2 < n20, n2m =
0.1302808
0.1036670
0.1052673
0.0829468
0.0987561


When k2 ≧ k20, k2m =
0.0918579
0.0409717
0.0495154
0.0385596
0.0522119


When k2 < k20, k2m =
0.0786169
0.0807788
0.0903577
0.0528296
0.0515430


When d2 ≧ d20, d2m (nm) =
∞
0.296
4.999
∞
∞


When d2 < d20, d2m (nm) =
128.233
0.621
5.371
23.038
34.154





















1.1 < NA ≦ 1.2


2 ≦ T ≦ 15







2/27












Case
1-11
1-12
1-13
1-14
1-15





n10
1.7156729
1.7043499
1.7082412
1.6926126
1.6890888


k10
0.0770168
0.0644952
0.0577629
0.0683906
0.0745003


d10 (nm)
188.315
165.315
163.169
237.184
217.718


n20
6.9620048
1.6731418
1.7075031
6.7859369
1.7770504


k20
3.4231449
0.1899705
0.1626792
2.9992529
0.3401503


d20 (nm)
0.879
207.250
259.766
0.993
84.925


When n1 ≧ n10, n1m =
0.0649841
0.0417419
0.0509473
0.0348376
0.0194055


When n1 < n10, n1m =
0.0083154
0.0317078
0.0477380
0.0764368
0.0607605


When k1 ≧ k10, k1m =
0.0257251
0.0333704
0.0433435
0.0403589
0.0329480


When k1 < k10, k1m =
0.0275232
0.0338538
0.0333484
0.0319214
0.0242554


When d1 ≧ d10, d1m (nm) =
38.959
∞
∞
19.483
9.981


When d1 < d10, d1m (nm) =
3.134
16.146
77.216
43.463
24.681


When n2 ≧ n20, n2m =
0.2971887
0.0474377
0.0745630
0.5633252
0.1177502


When n2 < n20, n2m =
0.6091602
0.0721411
0.0651379
0.4300269
0.0317639


When k2 ≧ k20, k2m =
0.2827808
0.0222888
0.0325830
0.2436438
0.0560791


When k2 < k20, k2m =
0.6937878
0.0478259
0.0479700
0.5647217
0.0980969


When d2 ≧ d20, d2m (nm) =
0.055
16.772
∞
0.120
16.691


When d2 < d20, d2m (nm) =
0.135
19.208
16.504
0.176
3.670










1.1 < NA ≦ 1.2


2 ≦ T ≦ 15











Case
1-16
1-17
1-18
1-19





n10
1.6903292
1.6921355
1.6951475
1.7004017


k10
0.0721915
0.0670288
0.0546351
0.0599028


d10 (nm)
210.963
207.063
219.259
265.986


n20
1.7111030
1.6978167
1.6889102
1.7029410


k20
0.2426612
0.1954345
0.1606659
0.1992607


d20 (nm)
155.846
222.387
263.728
214.965


When n1 ≧ n10, n1m =
0.0284180
0.0456091
0.0773694
0.0612244


When n1 < n10, n1m =
0.0510327
0.0467078
0.0619885
0.0410486


When k1 ≧ k10, k1m =
0.0455554
0.0511133
0.0524768
0.0499927


When k1 < k10, k1m =
0.0320984
0.0388074
0.0353687
0.0377380


When d1 ≧ d10, d1m (nm) =
23.770
∞
∞
∞


When d1 < d10, d1m (nm) =
28.472
31.416
128.164
94.534


When n2 ≧ n20, n2m =
0.1260327
0.1631665
0.2120154
0.2674829


When n2 < n20, n2m =
0.0663647
0.1722144
0.1079456
0.2316101


When k2 ≧ k20, k2m =
0.0960291
0.1259009
0.1121619
0.2074023


When k2 < k20, k2m =
0.0846741
0.0757690
0.0591858
0.0894751


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
12.288
72.281
78.597
77.855





















1.1 < NA ≦ 1.2


15 < T ≦ 25







3/27












Case
2-01
2-02
2-03
2-04
2-05





n10
1.8738578
1.8839217
1.8842367
1.8705650
1.7997475


k10
0.2051029
0.1169859
0.1130268
0.1010320
0.1076402


d10 (nm)
37.506
20.540
14.059
12.433
101.817


n20
6.9151921
1.8488520
1.7087850
1.6946915
5.7702673


k20
0.6847654
0.3990514
0.2917115
0.2394813
0.5312541


d20 (nm)
14.288
132.865
208.377
268.610
17.283


When n1 ≧ n10, n1m =
0.0713965
0.0757019
0.0971472
0.1115784
0.0520068


When n1 < n10, n1m =
0.0555054
0.0476453
0.0599609
0.0759399
0.0098120


When k1 ≧ k10, k1m =
0.0541125
0.0561304
0.0804553
0.1002258
0.0237036


When k1 < k10, k1m =
0.0773486
0.0843945
0.1004919
0.1010320
0.0377808


When d1 ≧ d10, d1m (nm) =
5.211
6.923
6.482
7.316
8.566


When d1 < d10, d1m (nm) =
3.920
3.580
3.648
4.569
1.552


When n2 ≧ n20, n2m =
0.1375024
0.1133521
0.1126624
0.1051160
0.0578821


When n2 < n20, n2m =
0.1468335
0.1457764
0.1432654
0.1327966
0.1020337


When k2 ≧ k20, k2m =
0.1698267
0.1546228
0.0978870
0.0916199
0.0398865


When k2 < k20, k2m =
0.1355151
0.0979541
0.0869165
0.0797766
0.0850256


When d2 ≧ d20, d2m (nm) =
0.302
∞
∞
∞
0.186


When d2 < d20, d2m (nm) =
0.308
25.359
77.278
123.573
0.315










1.1 < NA ≦ 1.2


15 < T ≦ 25












Case
2-06
2-07
2-08
2-09
2-10





n10
1.7189014
1.7208712
1.7236639
1.7047019
1.7084293


k10
0.0782837
0.0678223
0.0843652
0.0670962
0.0597123


d10 (nm)
95.289
94.558
181.922
165.192
163.108


n20
1.6643388
1.6960341
5.6387216
1.6715149
1.7074208


k20
0.2165956
0.1841027
4.7363270
0.1999125
0.1697699


d20 (nm)
204.139
257.386
0.821
198.564
251.199


When n1 ≧ n10, n1m =
0.0400110
0.0468091
0.0526855
0.0398865
0.0490320


When n1 < n10, n1m =
0.0126721
0.0238684
0.0001306
0.0279565
0.0460034


When k1 ≧ k10, k1m =
0.0335376
0.0489734
0.0020081
0.0268384
0.0389331


When k1 < k10, k1m =
0.0373218
0.0446973
0.0057251
0.0295178
0.0306982


When d1 ≧ d10, d1m (nm) =
16.137
28.984
27.528
∞
∞


When d1 < d10, d1m (nm) =
3.682
7.422
0.042
13.795
27.544


When n2 ≧ n20, n2m =
0.0331177
0.0610901
0.0075977
0.0397839
0.0734460


When n2 < n20, n2m =
0.0802783
0.0961804
0.6135461
0.0646704
0.0518091


When k2 ≧ k20, k2m =
0.0326062
0.0485974
0.0047754
0.0159570
0.0275537


When k2 < k20, k2m =
0.0528589
0.0519092
0.7998767
0.0474854
0.0482410


When d2 ≧ d20, d2m (nm) =
∞
∞
0.001
11.667
∞


When d2 < d20, d2m (nm) =
20.507
30.742
0.141
16.953
13.761





















1.1 < NA ≦ 1.2


15 < T ≦ 25







4/27












Case
2-11
2-12
2-13
2-14
2-15





n10
1.6912240
1.6881032
1.6896993
1.6917374
1.6948846


k10
0.0750717
0.0788193
0.0752193
0.0692921
0.0562662


d10 (nm)
235.933
218.423
211.247
207.206
219.172


n20
5.6089359
1.7881557
1.7110684
1.6970724
1.6877325


k20
4.1789938
0.3823123
0.2595743
0.2053429
0.1673191


d20 (nm)
0.921
76.059
147.061
213.576
255.276


When n1 ≧ n10, n1m =
0.0197583
0.0081677
0.0235974
0.0421069
0.0510120


When n1 < n10, n1m =
0.0774451
0.0583032
0.0505896
0.0462817
0.0590515


When k1 ≧ k10, k1m =
0.0246448
0.0223682
0.0406641
0.0495398
0.0510083


When k1 < k10, k1m =
0.0218396
0.0175671
0.0286658
0.0376331
0.0343799


When d1 ≧ d10, d1m (nm) =
6.504
3.634
18.131
∞
∞


When d1 < d10, d1m (nm) =
42.587
22.206
26.432
29.901
81.491


When n2 ≧ n20, n2m =
0.6544434
0.1247424
0.1252808
0.1545593
0.2162573


When n2 < n20, n2m =
0.2325012
0.0171619
0.0503735
0.1749207
0.1048962


When k2 ≧ k20, k2m =
0.1484387
0.0366235
0.0860120
0.1212268
0.1092822


When k2 < k20, k2m =
0.6595715
0.1036670
0.0844458
0.0781323
0.0604700


When d2 ≧ d20, d2m (nm) =
0.071
14.060
∞
∞
∞


When d2 < d20, d2m (nm) =
0.195
1.711
9.636
69.774
76.197










1.1 < NA ≦ 1.2


15 < T ≦ 25











Case
2-16
2-17







n10
1.7002883
1.6987256



k10
0.0618224
0.0572006



d10 (nm)
266.113
264.952



n20
1.7025341
1.6934905



k20
0.2096252
0.1744162



d20 (nm)
206.193
266.771



When n1 ≧ n10, n1m =
0.0602454
0.0764587



When n1 < n10, n1m =
0.0381921
0.0594568



When k1 ≧ k10, k1m =
0.0482422
0.0536096



When k1 < k10, k1m =
0.0371497
0.0384741



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
92.805
173.726



When n2 ≧ n20, n2m =
0.2779004
0.2751611



When n2 < n20, n2m =
0.2377234
0.2053577



When k2 ≧ k20, k2m =
0.2066309
0.2211816



When k2 < k20, k2m =
0.0931018
0.0797998



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
73.805
125.295






















1.1 < NA ≦ 1.2


25 < T ≦ 35







5/27












Case
3-01
3-02
3-03
3-04
3-05





n10
1.8384852
1.8997218
1.8867733
1.8774399
1.8168537


k10
0.2367471
0.1227276
0.1201944
0.1030917
0.1206742


d10 (nm)
38.632
21.226
14.426
12.555
98.976


n20
4.7928214
1.8945709
1.7066853
1.6978346
5.6725781


k20
0.7766058
0.4412749
0.3085187
0.2515853
0.5943855


d20 (nm)
20.034
121.762
200.277
259.495
16.950


When n1 ≧ n10, n1m =
0.0640527
0.0719128
0.0931812
0.1089819
0.0387244


When n1 < n10, n1m =
0.0455762
0.0458093
0.0565320
0.0737622
0.0048828


When k1 ≧ k10, k1m =
0.0510876
0.0524744
0.0764050
0.0973877
0.0168860


When k1 < k10, k1m =
0.0717981
0.0817957
0.0981750
0.1030917
0.0269836


When d1 ≧ d10, d1m (nm) =
4.733
6.228
6.172
6.944
6.776


When d1 < d10, d1m (nm) =
3.444
3.186
3.418
4.320
0.695


When n2 ≧ n20, n2m =
0.1712317
0.1175342
0.1094324
0.1025208
0.0610400


When n2 < n20, n2m =
0.1852917
0.1447205
0.1408899
0.1358679
0.1030127


When k2 ≧ k20, k2m =
0.2079944
0.1727771
0.0971545
0.0913745
0.0239368


When k2 < k20, k2m =
0.1709546
0.1005322
0.0873328
0.0807227
0.0995679


When d2 ≧ d20, d2m (nm) =
0.789
∞
∞
∞
0.191


When d2 < d20, d2m (nm) =
0.773
21.526
73.345
89.127
0.308










1.1 < NA ≦ 1.2


25 < T ≦ 35












Case
3-06
3-07
3-08
3-09
3-10





n10
1.7203847
1.7222308
1.7051744
1.7089344
1.6891179


k10
0.0818178
0.0703272
0.0699535
0.0618729
0.0788518


d10 (nm)
95.097
94.450
164.924
162.999
211.328


n20
1.6625491
1.6972414
1.6707295
1.7091982
1.7121044


k20
0.2295920
0.1929579
0.2115581
0.1777196
0.2799946


d20 (nm)
195.706
248.789
190.095
242.642
139.125


When n1 ≧ n10, n1m =
0.0370166
0.0449036
0.0362634
0.0468103
0.0189148


When n1 < n10, n1m =
0.0096326
0.0211206
0.0148706
0.0438916
0.0495532


When k1 ≧ k10, k1m =
0.0279895
0.0455884
0.0190686
0.0333899
0.0327563


When k1 < k10, k1m =
0.0346558
0.0433374
0.0247266
0.0269507
0.0238696


When d1 ≧ d10, d1m (nm) =
14.187
22.312
∞
∞
9.561


When d1 < d10, d1m (nm) =
2.673
6.291
5.065
24.312
23.646


When n2 ≧ n20, n2m =
0.0267200
0.0590454
0.0307410
0.0721521
0.1253455


When n2 < n20, n2m =
0.0766724
0.0932019
0.0523315
0.0386328
0.0336450


When k2 ≧ k20, k2m =
0.0255017
0.0445288
0.0095300
0.0215259
0.0725635


When k2 < k20, k2m =
0.0521814
0.0521948
0.0465356
0.0485632
0.0779358


When d2 ≧ d20, d2m (nm) =
∞
∞
7.007
43.167
∞


When d2 < d20, d2m (nm) =
18.077
28.239
14.543
10.181
6.908





















1.1 < NA ≦ 1.2


25 < T ≦ 35







6/27













Case
3-11
3-12
3-13
3-14







n10
1.6914863
1.6947006
1.7002933
1.6987290



k10
0.0717884
0.0580661
0.0640004
0.0588877



d10 (nm)
207.154
219.137
266.055
264.992



n20
1.6970451
1.6875442
1.7022941
1.6933668



k20
0.2167627
0.1751428
0.2216801
0.1822428



d20 (nm)
205.768
246.865
198.139
258.415



When n1 ≧ n10, n1m =
0.0385889
0.0449475
0.0561011
0.0760583



When n1 < n10, n1m =
0.0454712
0.0531458
0.0356934
0.0583093



When k1 ≧ k10, k1m =
0.0478943
0.0493811
0.0460974
0.0520996



When k1 < k10, k1m =
0.0361658
0.0330811
0.0363293
0.0375061



When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞



When d1 < d10, d1m (nm) =
28.219
77.448
91.180
121.680



When n2 ≧ n20, n2m =
0.1522107
0.2230298
0.2904858
0.2858545



When n2 < n20, n2m =
0.1781921
0.1009351
0.2457825
0.2068896



When k2 ≧ k20, k2m =
0.1157642
0.1063892
0.2056812
0.2216101



When k2 < k20, k2m =
0.0805957
0.0617065
0.0977039
0.0829004



When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞



When d2 < d20, d2m (nm) =
66.127
48.464
70.211
121.644











1.1 < NA ≦ 1.2


35 < T ≦ 45












Case
4-01
4-02
4-03
4-04
4-05





n10
1.8909619
1.9211597
1.8908364
1.8788634
1.7209142


k10
0.2198688
0.1299283
0.1293290
0.1089981
0.0850231


d10 (nm)
30.886
20.325
14.409
12.666
94.685


n20
2.4457650
1.8999891
1.6971949
1.6934061
1.6569532


k20
0.9042920
0.4762728
0.3219355
0.2597468
0.2398462


d20 (nm)
40.480
114.977
192.850
251.595
187.582


When n1 ≧ n10, n1m =
0.0581348
0.0702795
0.0908240
0.1067529
0.0340771


When n1 < n10, n1m =
0.0408777
0.0430811
0.0541882
0.0719214
0.0077319


When k1 ≧ k10, k1m =
0.0449243
0.0499243
0.0741248
0.0961597
0.0239465


When k1 < k10, k1m =
0.0797229
0.0798120
0.0963696
0.1066907
0.0329150


When d1 ≧ d10, d1m (nm) =
4.322
5.448
5.786
6.719
11.856


When d1 < d10, d1m (nm) =
2.642
2.634
3.166
4.161
2.071


When n2 ≧ n20, n2m =
0.1853430
0.1162805
0.1041772
0.0995618
0.0224622


When n2 < n20, n2m =
0.1757385
0.1461218
0.1390881
0.1365247
0.0731372


When k2 ≧ k20, k2m =
0.2033411
0.1671118
0.0936316
0.0897620
0.0193579


When k2 < k20, k2m =
0.1615027
0.0988000
0.0865493
0.0806287
0.0502966


When d2 ≧ d20, d2m (nm) =
5.473
∞
∞
∞
13.590


When d2 < d20, d2m (nm) =
4.339
20.871
70.442
87.096
16.661





















1.1 < NA ≦ 1.2


35 < T ≦ 45







7/27












Case
4-06
4-07
4-08
4-09
4-10





n10
1.7236493
1.7053690
1.7096103
1.6884398
1.6913141


k10
0.0725136
0.0723352
0.0638708
0.0822671
0.0737244


d10 (nm)
94.253
164.385
162.799
210.788
206.649


n20
1.6994520
1.6690598
1.7121782
1.7077650
1.6954335


k20
0.2004026
0.2212238
0.1844639
0.2979850
0.2262249


d20 (nm)
239.752
181.544
233.616
132.459
199.430


When n1 ≧ n10, n1m =
0.0432617
0.0328076
0.0449390
0.0103259
0.0357813


When n1 < n10, n1m =
0.0189111
0.0081836
0.0418201
0.0476318
0.0441882


When k1 ≧ k10, k1m =
0.0428613
0.0134167
0.0270105
0.0240100
0.0467419


When k1 < k10, k1m =
0.0419373
0.0221985
0.0217126
0.0186353
0.0353625


When d1 ≧ d10, d1m (nm) =
19.395
21.834
∞
7.013
∞


When d1 < d10, d1m (nm) =
5.406
2.666
6.246
21.283
26.527


When n2 ≧ n20, n2m =
0.0587073
0.0279724
0.0684412
0.1217639
0.1437500


When n2 < n20, n2m =
0.0913135
0.0359949
0.0242969
0.0190967
0.1057874


When k2 ≧ k20, k2m =
0.0407703
0.0058350
0.0150317
0.0602039
0.1122632


When k2 < k20, k2m =
0.0523291
0.0449670
0.0490210
0.0601965
0.0826379


When d2 ≧ d20, d2m (nm) =
∞
4.683
36.767
∞
∞


When d2 < d20, d2m (nm) =
25.916
13.275
6.151
3.566
25.291










1.1 < NA ≦ 1.2


35 < T ≦ 45












Case
4-11
4-12
4-13







n10
1.6945163
1.7002615
1.6987767



k10
0.0596605
0.0658973
0.0602453



d10 (nm)
219.093
265.562
264.538



n20
1.6879518
1.6991117
1.6924357



k20
0.1823501
0.2320843
0.1888152



d20 (nm)
237.943
190.875
250.808



When n1 ≧ n10, n1m =
0.0400159
0.0514929
0.0760449



When n1 < n10, n1m =
0.0454590
0.0339758
0.0578162



When k1 ≧ k10, k1m =
0.0478894
0.0439832
0.0508728



When k1 < k10, k1m =
0.0318921
0.0347144
0.0365662



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
53.950
89.870
117.603



When n2 ≧ n20, n2m =
0.2316992
0.3028357
0.2948633



When n2 < n20, n2m =
0.0956519
0.2532336
0.2085193



When k2 ≧ k20, k2m =
0.1045911
0.2056006
0.2209802



When k2 < k20, k2m =
0.0612427
0.1002246
0.0860327



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
40.957
67.613
80.377






















1.1 < NA ≦ 1.2


45 < T ≦ 55







8/27












Case
5-01
5-02
5-03
5-04
5-05





n10
1.9413239
1.8877645
1.8798429
1.7202563
1.7249517


k10
0.1405566
0.1445306
0.1135692
0.0870823
0.0739360


d10 (nm)
18.043
14.095
12.637
94.214
94.041


n20
1.8442891
1.6688638
1.6888514
1.6489031
1.7027050


k20
0.4845639
0.3235014
0.2638544
0.2445724
0.2047377


d20 (nm)
113.109
187.292
243.053
179.182
229.905


When n1 ≧ n10, n1m =
0.0724768
0.0904346
0.1062329
0.0324084
0.0425623


When n1 < n10, n1m =
0.0387427
0.0534119
0.0716968
0.0082080
0.0177209


When k1 ≧ k10, k1m =
0.0483630
0.0753357
0.0968298
0.0243140
0.0418030


When k1 < k10, k1m =
0.0803040
0.0945715
0.1060376
0.0343469
0.0406653


When d1 ≧ d10, d1m (nm) =
4.823
5.486
6.573
10.670
17.560


When d1 < d10, d1m (nm) =
2.042
3.025
4.077
2.161
4.892


When n2 ≧ n20, n2m =
0.1074292
0.0972339
0.0967822
0.0242322
0.0621313


When n2 < n20, n2m =
0.1555688
0.1383643
0.1358411
0.0727905
0.0930249


When k2 ≧ k20, k2m =
0.1308459
0.0862097
0.0881348
0.0180859
0.0388489


When k2 < k20, k2m =
0.0911877
0.0843787
0.0806641
0.0488940
0.0530957


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
10.287
∞


When d2 < d20, d2m (nm) =
20.712
69.838
88.098
16.560
20.064










1.1 < NA ≦ 1.2


45 < T ≦ 55












Case
5-06
5-07
5-08
5-09
5-10





n10
1.7053831
1.7104785
1.6877471
1.6915115
1.6941672


k10
0.0736370
0.0654156
0.0844092
0.0739491
0.0608347


d10 (nm)
163.843
162.671
209.661
205.513
218.889


n20
1.6671854
1.7160090
1.6959640
1.6904122
1.6879018


k20
0.2267475
0.1885946
0.3073448
0.2298496
0.1872431


d20 (nm)
172.382
223.774
127.018
196.556
228.501


When n1 ≧ n10, n1m =
0.0309619
0.0440515
0.0051978
0.0335425
0.0357227


When n1 < n10, n1m =
0.0112268
0.0078247
0.0453333
0.0430493
0.0410388


When k1 ≧ k10, k1m =
0.0149072
0.0196375
0.0173291
0.0473206
0.0467871


When k1 < k10, k1m =
0.0262830
0.0141846
0.0154602
0.0372058
0.0305029


When d1 ≧ d10, d1m (nm) =
19.247
∞
2.276
∞
∞


When d1 < d10, d1m (nm) =
3.447
2.046
19.587
24.997
50.391


When n2 ≧ n20, n2m =
0.0348413
0.0672729
0.1107800
0.1391333
0.2394653


When n2 < n20, n2m =
0.0292676
0.0106921
0.0107263
0.0732312
0.0890649


When k2 ≧ k20, k2m =
0.0073389
0.0081616
0.0597644
0.1152246
0.1047815


When k2 < k20, k2m =
0.0445459
0.0504346
0.0379138
0.0797473
0.0602527


When d2 ≧ d20, d2m (nm) =
6.326
35.781
32.689
∞
∞


When d2 < d20, d2m (nm) =
11.802
2.505
1.901
20.558
36.515





















1.1 < NA ≦ 1.2


45 < T ≦ 55







9/27












Case
5-11
5-12
5-13







n10
1.6941096
1.7000691
1.6987341



k10
0.0560046
0.0669711
0.0608862



d10 (nm)
215.482
264.757
263.855



n20
1.6938988
1.6924460
1.6911373



k20
0.1599964
0.2378630
0.1924284



d20 (nm)
287.470
184.028
243.250



When n1 ≧ n10, n1m =
0.0468335
0.0484424
0.0766663



When n1 < n10, n1m =
0.0625427
0.0333350
0.0582520



When k1 ≧ k10, k1m =
0.0574133
0.0424146
0.0503235



When k1 < k10, k1m =
0.0373425
0.0336023
0.0357239



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
47.031
45.336
115.043



When n2 ≧ n20, n2m =
0.2184277
0.3156848
0.3032751



When n2 < n20, n2m =
0.1528296
0.2586377
0.2107019



When k2 ≧ k20, k2m =
0.1238171
0.2073083
0.2191870



When k2 < k20, k2m =
0.0588196
0.0981323
0.0862329



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
85.352
66.135
78.131











1.1 < NA ≦ 1.2


55 < T ≦ 65












Case
6-01
6-02
6-03
6-04
6-05





n10
1.8998120
1.9599431
1.8792360
1.8920036
1.7198405


k10
0.2622743
0.1538418
0.1119058
0.0671877
0.0878543


d10 (nm)
21.573
15.993
12.895
11.926
93.971


n20
1.6944131
1.7907917
1.6940206
1.7462722
1.6452515


k20
0.7809017
0.4780154
0.2681658
0.2347435
0.2473168


d20 (nm)
53.320
111.028
231.714
280.522
169.419


When n1 ≧ n10, n1m =
0.0603137
0.0799158
0.1051331
0.1164221
0.0325574


When n1 < n10, n1m =
0.0246228
0.0339001
0.0713818
0.0790796
0.0109656


When k1 ≧ k10, k1m =
0.0436731
0.0463733
0.0957117
0.1011499
0.0282458


When k1 < k10, k1m =
0.0527222
0.0842969
0.1045093
0.0671877
0.0383301


When d1 ≧ d10, d1m (nm) =
3.630
4.315
6.630
7.111
10.486


When d1 < d10, d1m (nm) =
1.338
1.548
4.149
4.416
2.879


When n2 ≧ n20, n2m =
0.1220337
0.0996899
0.0944202
0.0992114
0.0312585


When n2 < n20, n2m =
0.0963342
0.1728088
0.1384424
0.1517053
0.0751245


When k2 ≧ k20, k2m =
0.0896167
0.0986731
0.0889478
0.0981226
0.0215662


When k2 < k20, k2m =
0.0868945
0.0892566
0.0826782
0.0802551
0.0503503


When d2 ≧ d20, d2m (nm) =
14.581
∞
∞
∞
10.833


When d2 < d20, d2m (nm) =
7.202
14.530
88.193
126.095
17.275





















1.1 < NA ≦ 1.2


55 < T ≦ 65







10/27












Case
6-06
6-07
6-08
6-09
6-10





n10
1.7267515
1.7286377
1.7058235
1.6871196
1.6936372


k10
0.0746914
0.0697592
0.0740364
0.0856014
0.0616799


d10 (nm)
93.982
94.711
163.674
208.540
218.466


n20
1.7088385
1.7257237
1.6690540
1.6832134
1.6877720


k20
0.2076415
0.1796886
0.2306007
0.3092532
0.1900717


d20 (nm)
218.911
273.487
161.946
121.170
218.772


When n1 ≧ n10, n1m =
0.0431396
0.0483069
0.0312061
0.0049573
0.0327710


When n1 < n10, n1m =
0.0172424
0.0116125
0.0175793
0.0417786
0.0401648


When k1 ≧ k10, k1m =
0.0418896
0.0318958
0.0202844
0.0152393
0.0462805


When k1 < k10, k1m =
0.0396252
0.0362695
0.0328467
0.0174036
0.0298352


When d1 ≧ d10, d1m (nm) =
17.247
40.127
17.394
2.172
∞


When d1 < d10, d1m (nm) =
4.621
3.300
5.870
18.309
47.643


When n2 ≧ n20, n2m =
0.0684570
0.0868091
0.0312744
0.1009155
0.2431030


When n2 < n20, n2m =
0.0962207
0.1095422
0.0318677
0.0098169
0.0838513


When k2 ≧ k20, k2m =
0.0394080
0.0515259
0.0123767
0.0719922
0.1060815


When k2 < k20, k2m =
0.0553357
0.0549243
0.0471436
0.0304236
0.0607056


When d2 ≧ d20, d2m (nm) =
∞
∞
9.995
25.676
∞


When d2 < d20, d2m (nm) =
15.791
73.815
10.017
1.682
28.435










1.1 < NA ≦ 1.2


55 < T ≦ 65











Case
6-11
6-12







n10
1.6996002
1.6985143



k10
0.0674630
0.0611760



d10 (nm)
264.231
263.586



n20
1.6851097
1.6903246



k20
0.2396601
0.1936289



d20 (nm)
175.944
234.054



When n1 ≧ n10, n1m =
0.0469604
0.0772302



When n1 < n10, n1m =
0.0345850
0.0600415



When k1 ≧ k10, k1m =
0.0413989
0.0503625



When k1 < k10, k1m =
0.0326746
0.0352795



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
35.789
113.370



When n2 ≧ n20, n2m =
0.3361853
0.3175012



When n2 < n20, n2m =
0.2595898
0.2115027



When k2 ≧ k20, k2m =
0.2087170
0.2189661



When k2 < k20, k2m =
0.0954248
0.0859949



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
64.780
74.733






















1.1 < NA ≦ 1.2


65 < T ≦ 75







11/27












Case
7-01
7-02
7-03
7-04
7-05





n10
1.8814830
1.9657443
1.8787154
1.8913468
1.7209187


k10
0.2936564
0.1688741
0.1109169
0.0695388
0.0883668


d10 (nm)
22.098
15.852
13.263
12.162
94.055


n20
1.6321609
1.7726563
1.6996278
1.7469121
1.6482914


k20
0.8097385
0.4923001
0.2745566
0.2387131
0.2540527


d20 (nm)
46.190
103.170
220.404
270.807
158.511


When n1 ≧ n10, n1m =
0.0656360
0.0817346
0.1037085
0.1149512
0.0333252


When n1 < n10, n1m =
0.0241089
0.0282544
0.0702112
0.0769897
0.0127490


When k1 ≧ k10, k1m =
0.0378577
0.0400220
0.0934888
0.0991272
0.0301257


When k1 < k10, k1m =
0.0323035
0.0824512
0.1025916
0.0695388
0.0388867


When d1 ≧ d10, d1m (nm) =
3.610
3.980
6.711
7.159
10.691


When d1 < d10, d1m (nm) =
1.297
1.237
4.191
4.366
3.330


When n2 ≧ n20, n2m =
0.1024585
0.0947095
0.0935791
0.1004138
0.0355066


When n2 < n20, n2m =
0.0645630
0.1828857
0.1422339
0.1540833
0.0767798


When k2 ≧ k20, k2m =
0.0898303
0.0894482
0.0904114
0.0989551
0.0244946


When k2 < k20, k2m =
0.1003796
0.0949036
0.0851941
0.0816284
0.0535193


When d2 ≧ d20, d2m (nm) =
11.613
∞
∞
∞
11.010


When d2 < d20, d2m (nm) =
4.416
10.112
84.053
124.915
16.505










1.1 < NA ≦ 1.2


65 < T ≦ 75












Case
7-06
7-07
7-08
7-09
7-10





n10
1.7288665
1.7286370
1.7068032
1.6862856
1.6931399


k10
0.0756184
0.0709992
0.0744994
0.0878163
0.0624918


d10 (nm)
94.090
94.923
163.814
208.124
217.968


n20
1.7153723
1.7241262
1.6739446
1.6736237
1.6872372


k20
0.2125971
0.1831189
0.2371534
0.3138657
0.1926334


d20 (nm)
207.924
263.961
151.052
112.320
209.546


When n1 ≧ n10, n1m =
0.0437573
0.0483350
0.0322754
0.0025049
0.0316833


When n1 < n10, n1m =
0.0164966
0.0099878
0.0175537
0.0409570
0.0419177


When k1 ≧ k10, k1m =
0.0410425
0.0291785
0.0221094
0.0095605
0.0459827


When k1 < k10, k1m =
0.0388428
0.0344531
0.0333215
0.0151172
0.0300720


When d1 ≧ d10, d1m (nm) =
17.329
38.775
18.851
1.009
∞


When d1 < d10, d1m (nm) =
4.318
2.813
6.154
17.032
45.887


When n2 ≧ n20, n2m =
0.0710437
0.0893457
0.0302136
0.1037878
0.2406421


When n2 < n20, n2m =
0.0969080
0.1083484
0.0331750
0.0056763
0.0830054


When k2 ≧ k20, k2m =
0.0400586
0.0500842
0.0147241
0.0658289
0.1059290


When k2 < k20, k2m =
0.0574512
0.0562378
0.0506323
0.0175342
0.0630762


When d2 ≧ d20, d2m (nm) =
∞
∞
10.293
26.205
∞


When d2 < d20, d2m (nm) =
13.701
72.849
8.984
0.992
28.220





















1.1 < NA ≦ 1.2


65 < T ≦ 75







12/27












Case
7-11
7-12
7-13







n10
1.6935780
1.6987845
1.6982075



k10
0.0575917
0.0682876
0.0620058



d10 (nm)
214.501
264.829
264.409



n20
1.6927449
1.6826884
1.6907687



k20
0.1631490
0.2430960
0.1959423



d20 (nm)
269.036
164.540
222.065



When n1 ≧ n10, n1m =
0.0479456
0.0478223
0.0756042



When n1 < n10, n1m =
0.0597888
0.0375256
0.0523840



When k1 ≧ k10, k1m =
0.0567029
0.0406042
0.0502747



When k1 < k10, k1m =
0.0379382
0.0306238
0.0354358



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
42.775
36.115
105.289



When n2 ≧ n20, n2m =
0.2180396
0.3702002
0.3412915



When n2 < n20, n2m =
0.1575122
0.2565369
0.2093115



When k2 ≧ k20, k2m =
0.1278589
0.2070850
0.2215063



When k2 < k20, k2m =
0.0614197
0.0951270
0.0864294



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
81.766
63.144
76.945











1.1 < NA ≦ 1.2


75 < T ≦ 85












Case
8-01
8-02
8-03
8-04
8-05





n10
1.8508920
1.9432602
1.8788012
1.8809660
1.8914032


k10
0.3299462
0.1828608
0.1571474
0.1122948
0.0691945


d10 (nm)
26.713
18.534
15.200
13.670
12.762


n20
1.6561984
1.7922587
1.6553949
1.7045069
1.7559855


k20
1.0215947
0.5435792
0.3498651
0.2862016
0.2487147


d20 (nm)
31.481
89.452
157.519
210.391
259.753


When n1 ≧ n10, n1m =
0.0584900
0.0721143
0.0859290
0.1006885
0.1098987


When n1 < n10, n1m =
0.0118384
0.0258594
0.0490076
0.0672168
0.0736646


When k1 ≧ k10, k1m =
0.0281628
0.0341772
0.0681653
0.0888281
0.0935315


When k1 < k10, k1m =
0.0027112
0.0735254
0.0892920
0.1016174
0.0691945


When d1 ≧ d10, d1m (nm) =
3.227
4.317
5.436
6.605
7.111


When d1 < d10, d1m (nm) =
0.304
1.291
2.967
4.063
4.341


When n2 ≧ n20, n2m =
0.1267358
0.0961279
0.0835156
0.0933350
0.1000793


When n2 < n20, n2m =
0.0093018
0.1747852
0.1389221
0.1466003
0.1520386


When k2 ≧ k20, k2m =
0.0170300
0.1198535
0.0846472
0.0918018
0.1012305


When k2 < k20, k2m =
0.1219019
0.1040369
0.0912122
0.0867468
0.0829492


When d2 ≧ d20, d2m (nm) =
8.195
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
0.369
9.559
36.990
78.480
119.640





















1.1 < NA ≦ 1.2


75 < T ≦ 85







13/27












Case
8-06
8-07
8-08
8-09
8-10





n10
1.7233184
1.7297992
1.7292921
1.7076375
1.6902915


k10
0.0905387
0.0774990
0.0722395
0.0765186
0.0790058


d10 (nm)
94.254
94.232
94.957
163.992
206.654


n20
1.6520214
1.7157415
1.7247476
1.6752795
1.6879680


k20
0.2670378
0.2209454
0.1892941
0.2482558
0.2475793


d20 (nm)
148.504
198.899
254.857
141.650
161.284


When n1 ≧ n10, n1m =
0.0327246
0.0427734
0.0473462
0.0318115
0.0212964


When n1 < n10, n1m =
0.0093958
0.0147302
0.0094299
0.0087695
0.0407813


When k1 ≧ k10, k1m =
0.0245129
0.0376636
0.0278931
0.0137170
0.0408545


When k1 < k10, k1m =
0.0384680
0.0381934
0.0341284
0.0285461
0.0259851


When d1 ≧ d10, d1m (nm) =
10.366
16.607
38.446
19.131
18.064


When d1 < d10, d1m (nm) =
2.389
3.804
2.614
2.661
24.299


When n2 ≧ n20, n2m =
0.0285376
0.0673352
0.0815320
0.0313904
0.1426208


When n2 < n20, n2m =
0.0743250
0.0929968
0.1051160
0.0237683
0.0535938


When k2 ≧ k20, k2m =
0.0198962
0.0371387
0.0465576
0.0076379
0.0976270


When k2 < k20, k2m =
0.0547290
0.0576892
0.0565930
0.0508740
0.0749768


When d2 ≧ d20, d2m (nm) =
8.585
∞
∞
6.981
∞


When d2 < d20, d2m (nm) =
13.959
13.822
33.284
7.469
13.904










1.1 < NA ≦ 1.2


75 < T ≦ 85












Case
8-11
8-12
8-13
8-14
8-15





n10
1.6929156
1.6935338
1.6984313
1.6980068
1.6970347


k10
0.0637318
0.0581307
0.0697413
0.0633264
0.0530849


d10 (nm)
217.693
214.870
266.256
265.782
275.682


n20
1.6856131
1.6920922
1.6871666
1.6912942
1.6884244


k20
0.1973081
0.1667488
0.2538157
0.2022310
0.1714348


d20 (nm)
201.188
259.776
152.235
210.360
256.304


When n1 ≧ n10, n1m =
0.0321716
0.0471802
0.0486719
0.0738318
0.0569543


When n1 < n10, n1m =
0.0414331
0.0603931
0.0363989
0.0470300
0.0427893


When k1 ≧ k10, k1m =
0.0451428
0.0559961
0.0398804
0.0494763
0.0598206


When k1 < k10, k1m =
0.0289417
0.0378210
0.0291638
0.0345105
0.0376172


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
45.410
42.667
37.515
100.900
104.445


When n2 ≧ n20, n2m =
0.2377576
0.2179382
0.2594739
0.3590393
0.2768311


When n2 < n20, n2m =
0.0859351
0.1565027
0.2556433
0.2089795
0.2197266


When k2 ≧ k20, k2m =
0.1024292
0.1246008
0.1994592
0.2211169
0.1929004


When k2 < k20, k2m =
0.0656946
0.0632471
0.1014087
0.0895886
0.0738538


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
33.167
82.155
62.366
73.160
83.598





















1.1 < NA ≦ 1.2


85 < T ≦ 95







14/27












Case
9-01
9-02
9-03
9-04
9-05





n10
1.9192397
1.8910111
1.8874292
1.8928956
1.7266669


k10
0.1987767
0.1570861
0.1170062
0.0800147
0.0953661


d10 (nm)
21.654
15.844
13.907
12.695
94.323


n20
1.8264016
1.6782576
1.7063011
1.7424852
1.6542284


k20
0.6189774
0.3828036
0.3024107
0.2571531
0.2869718


d20 (nm)
76.882
146.288
201.867
254.323
139.595


When n1 ≧ n10, n1m =
0.0649170
0.0821021
0.0973254
0.1089844
0.0299609


When n1 < n10, n1m =
0.0262927
0.0442981
0.0631677
0.0721631
0.0018164


When k1 ≧ k10, k1m =
0.0313647
0.0611023
0.0836865
0.0928955
0.0075598


When k1 < k10, k1m =
0.0678699
0.0898816
0.1010254
0.0800147
0.0251917


When d1 ≧ d10, d1m (nm) =
4.482
5.181
6.239
6.859
9.178


When d1 < d10, d1m (nm) =
1.480
2.625
3.732
4.138
0.436


When n2 ≧ n20, n2m =
0.0987671
0.0845752
0.0932324
0.0997229
0.0068860


When n2 < n20, n2m =
0.1650610
0.1381567
0.1431714
0.1501294
0.0677319


When k2 ≧ k20, k2m =
0.1657446
0.0892700
0.0918542
0.0980688
0.0046692


When k2 < k20, k2m =
0.1121045
0.0937854
0.0873950
0.0830798
0.0530042


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
2.101


When d2 < d20, d2m (nm) =
12.789
29.518
73.873
87.951
11.267










1.1 < NA ≦ 1.2


85 < T ≦ 95












Case
9-06
9-07
9-08
9-09
9-10





n10
1.7296393
1.7299249
1.6899362
1.6928826
1.6935628


k10
0.0805906
0.0737621
0.0817785
0.0657282
0.0590519


d10 (nm)
94.242
94.784
208.164
217.665
215.464


n20
1.7097783
1.7252153
1.6924320
1.6832004
1.6914497


k20
0.2319224
0.1970612
0.2651701
0.2055611
0.1728158


d20 (nm)
191.543
246.491
148.618
193.166
250.826


When n1 ≧ n10, n1m =
0.0403186
0.0454016
0.0167883
0.0332178
0.0456592


When n1 < n10, n1m =
0.0112720
0.0089185
0.0424597
0.0374463
0.0611377


When k1 ≧ k10, k1m =
0.0312561
0.0265295
0.0332300
0.0436560
0.0547620


When k1 < k10, k1m =
0.0359937
0.0340186
0.0176221
0.0271997
0.0369495


When d1 ≧ d10, d1m (nm) =
14.915
25.988
8.734
∞
∞


When d1 < d10, d1m (nm) =
2.867
2.423
22.681
45.245
43.081


When n2 ≧ n20, n2m =
0.0542737
0.0673303
0.1469031
0.2426758
0.2225391


When n2 < n20, n2m =
0.0873267
0.0993994
0.0330542
0.0887622
0.1544177


When k2 ≧ k20, k2m =
0.0292090
0.0400476
0.0700159
0.0962317
0.1187769


When k2 < k20, k2m =
0.0563428
0.0561450
0.0687061
0.0675110
0.0629883


When d2 ≧ d20, d2m (nm) =
39.648
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
14.552
29.955
9.727
29.747
77.934





















1.1 < NA ≦ 1.2


85 < T ≦ 95







15/27












Case
9-11
9-12
9-13







n10
1.6988269
1.6981501
1.6968464



k10
0.0719884
0.0650380
0.0544760



d10 (nm)
266.949
266.102
275.663



n20
1.6930572
1.6910453
1.6860880



k20
0.2717519
0.2123559
0.1778694



d20 (nm)
142.233
201.439
248.323



When n1 ≧ n10, n1m =
0.0467688
0.0728052
0.0574890



When n1 < n10, n1m =
0.0315735
0.0440601
0.0431165



When k1 ≧ k10, k1m =
0.0383911
0.0476294
0.0587781



When k1 < k10, k1m =
0.0284839
0.0337549
0.0370691



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
35.571
98.568
104.018



When n2 ≧ n20, n2m =
0.2475818
0.3536121
0.2819006



When n2 < n20, n2m =
0.2616077
0.2147424
0.2120007



When k2 ≧ k20, k2m =
0.1929529
0.2177991
0.1925061



When k2 < k20, k2m =
0.1103821
0.0937061
0.0749585



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
61.377
69.390
80.535











1.1 < NA ≦ 1.2


95 < T ≦ 105












Case
10-01
10-02
10-03
10-04
10-05





n10
1.9207610
1.9093240
1.8948938
1.8966282
1.7293323


k10
0.2195112
0.1610220
0.1257399
0.0900141
0.0843251


d10 (nm)
22.312
16.027
13.855
12.530
93.974


n20
1.8258536
1.6981498
1.7003095
1.7305926
1.7018671


k20
0.6986358
0.4189775
0.3177305
0.2658040
0.2432029


d20 (nm)
66.737
136.163
194.613
248.346
184.391


When n1 ≧ n10, n1m =
0.0601465
0.0788086
0.0949231
0.1082007
0.0364734


When n1 < n10, n1m =
0.0227283
0.0400269
0.0595679
0.0706311
0.0069092


When k1 ≧ k10, k1m =
0.0253723
0.0545032
0.0804407
0.0926099
0.0227478


When k1 < k10, k1m =
0.0628345
0.0889185
0.1005603
0.0900141
0.0311768


When d1 ≧ d10, d1m (nm) =
3.994
4.715
5.765
6.514
12.891


When d1 < d10, d1m (nm) =
1.248
2.209
3.348
3.879
1.711


When n2 ≧ n20, n2m =
0.0792419
0.0821826
0.0922205
0.0989185
0.0380920


When n2 < n20, n2m =
0.1602795
0.1375000
0.1411267
0.1492065
0.0806519


When k2 ≧ k20, k2m =
0.1589185
0.0905359
0.0891418
0.0944934
0.0182117


When k2 < k20, k2m =
0.1093127
0.0931641
0.0864453
0.0826196
0.0535706


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
26.631


When d2 < d20, d2m (nm) =
11.170
27.297
70.361
86.529
13.056





















1.1 < NA ≦ 1.2


95 < T ≦ 105







16/27












Case
10-06
10-07
10-08
10-09
10-10





n10
1.7301568
1.6896128
1.6928686
1.6935394
1.6995193


k10
0.0757850
0.0845530
0.0680057
0.0604311
0.0747728


d10 (nm)
94.458
207.994
217.789
215.751
266.467


n20
1.7237225
1.6930315
1.6806392
1.6908086
1.6953349


k20
0.2045935
0.2839311
0.2160083
0.1799717
0.2921202


d20 (nm)
238.500
141.193
184.741
242.024
134.479


When n1 ≧ n10, n1m =
0.0430542
0.0132361
0.0331689
0.0442139
0.0436938


When n1 < n10, n1m =
0.0073706
0.0419458
0.0316418
0.0535156
0.0268311


When k1 ≧ k10, k1m =
0.0232617
0.0264368
0.0418604
0.0531323
0.0358801


When k1 < k10, k1m =
0.0323706
0.0142944
0.0250220
0.0355676
0.0274768


When d1 ≧ d10, d1m (nm) =
19.826
5.860
∞
∞
∞


When d1 < d10, d1m (nm) =
1.955
19.840
44.604
42.829
18.631


When n2 ≧ n20, n2m =
0.0534583
0.1398230
0.2538293
0.2308789
0.2386206


When n2 < n20, n2m =
0.0961475
0.0183801
0.0879700
0.1305579
0.2731067


When k2 ≧ k20, k2m =
0.0309888
0.0515918
0.0900964
0.1145776
0.1883105


When k2 < k20, k2m =
0.0550842
0.0676599
0.0668372
0.0642163
0.1153723


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
28.701
3.697
28.484
75.626
22.552










1.1 < NA ≦ 1.2


95 < T ≦ 105











Case
10-11
10-12







n10
1.6986281
1.6967467



k10
0.0669339
0.0559821



d10 (nm)
265.290
275.562



n20
1.6902923
1.6844237



k20
0.2238725
0.1853984



d20 (nm)
194.429
239.846



When n1 ≧ n10, n1m =
0.0728162
0.0573596



When n1 < n10, n1m =
0.0413391
0.0430261



When k1 ≧ k10, k1m =
0.0452283
0.0576135



When k1 < k10, k1m =
0.0327722
0.0361206



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
90.187
103.212



When n2 ≧ n20, n2m =
0.3400000
0.2868152



When n2 < n20, n2m =
0.2235767
0.2105566



When k2 ≧ k20, k2m =
0.2178235
0.1919788



When k2 < k20, k2m =
0.0973718
0.0774072



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
66.928
79.000






















1.1 < NA ≦ 1.2


105 < T ≦ 115







17/27












Case
11-01
11-02
11-03
11-04
11-05





n10
1.9214172
1.9009993
1.8999222
1.7289797
1.7301397


k10
0.1753360
0.1351301
0.0954510
0.0876375
0.0779683


d10 (nm)
15.452
13.611
12.469
93.472
94.062


n20
1.6804411
1.6899586
1.7262130
1.6943958
1.7208177


k20
0.4367098
0.3280314
0.2728992
0.2513033
0.2098777


d20 (nm)
129.893
187.370
240.318
176.630
230.281


When n1 ≧ n10, n1m =
0.0769006
0.0933704
0.1067993
0.0330078
0.0410352


When n1 < n10, n1m =
0.0358716
0.0572852
0.0688867
0.0032751
0.0048413


When k1 ≧ k10, k1m =
0.0508276
0.0793042
0.0916321
0.0140979
0.0177686


When k1 < k10, k1m =
0.0888501
0.0996167
0.0954510
0.0244348
0.0282959


When d1 ≧ d10, d1m (nm) =
4.190
5.335
6.248
10.623
16.723


When d1 < d10, d1m (nm) =
1.818
3.051
3.681
0.787
1.251


When n2 ≧ n20, n2m =
0.0746777
0.0897961
0.0977148
0.0241113
0.0398962


When n2 < n20, n2m =
0.1378662
0.1400989
0.1490454
0.0784241
0.0968872


When k2 ≧ k20, k2m =
0.0793188
0.0846436
0.0920837
0.0085193
0.0207715


When k2 < k20, k2m =
0.0870862
0.0841199
0.0819739
0.0504102
0.0538818


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
17.196
∞


When d2 < d20, d2m (nm) =
28.725
67.570
87.835
8.245
10.621










1.1 < NA ≦ 1.2


105 < T ≦ 115













Case
11-06
11-07
11-08
11-09







n10
1.6897075
1.6928599
1.6933895
1.6967442



k10
0.0859154
0.0698704
0.0619572
0.0572224



d10 (nm)
206.600
218.100
215.832
275.439



n20
1.6860653
1.6784557
1.6904996
1.6838077



k20
0.2958058
0.2260347
0.1864736
0.1920294



d20 (nm)
138.770
175.355
232.785
230.401



When n1 ≧ n10, n1m =
0.0125659
0.0312329
0.0432227
0.0564172



When n1 < n10, n1m =
0.0403125
0.0252893
0.0462402
0.0423401



When k1 ≧ k10, k1m =
0.0275024
0.0399890
0.0513623
0.0566272



When k1 < k10, k1m =
0.0207617
0.0230298
0.0339783
0.0347253



When d1 ≧ d10, d1m (nm) =
5.565
∞
∞
∞



When d1 < d10, d1m (nm) =
15.751
15.335
41.797
102.062



When n2 ≧ n20, n2m =
0.1134778
0.0778406
0.2416541
0.2945471



When n2 < n20, n2m =
0.0212585
0.0821313
0.1144373
0.2197937



When k2 ≧ k20, k2m =
0.0640356
0.0874658
0.1126599
0.1918506



When k2 < k20, k2m =
0.0823962
0.0630994
0.0642725
0.0810107



When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞



When d2 < d20, d2m (nm) =
4.190
25.396
50.058
79.342






















1.1 < NA ≦ 1.2


115 < T ≦ 125







18/27












Case
12-01
12-02
12-03
12-04
12-05





n10
1.9907624
1.9229056
1.9003143
1.9049048
1.7296380


k10
0.2658843
0.1943367
0.1434936
0.0972823
0.0899801


d10 (nm)
16.877
14.896
13.590
12.362
93.128


n20
1.6777634
1.6435696
1.6791032
1.7269066
1.6935089


k20
0.7245088
0.4392836
0.3336019
0.2779612
0.2572784


d20 (nm)
66.041
124.711
179.139
230.763
167.093


When n1 ≧ n10, n1m =
0.0641870
0.0750415
0.0917773
0.1066382
0.0315833


When n1 < n10, n1m =
0.0020520
0.0319995
0.0559583
0.0680188
0.0015344


When k1 ≧ k10, k1m =
0.0028235
0.0481201
0.0790771
0.0912170
0.0085083


When k1 < k10, k1m =
0.0445386
0.0882983
0.0964502
0.0972823
0.0192114


When d1 ≧ d10, d1m (nm) =
2.498
3.792
5.133
6.031
9.518


When d1 < d10, d1m (nm) =
0.080
1.544
2.939
3.522
0.359


When n2 ≧ n20, n2m =
0.0064478
0.0655054
0.0877441
0.0975110
0.0182434


When n2 < n20, n2m =
0.1131567
0.1382288
0.1415613
0.1512451
0.0817859


When k2 ≧ k20, k2m =
0.0073132
0.0658899
0.0812854
0.0911096
0.0040100


When k2 < k20, k2m =
0.0730591
0.0825134
0.0835315
0.0828308
0.0509155


When d2 ≧ d20, d2m (nm) =
10.610
∞
∞
∞
14.228


When d2 < d20, d2m (nm) =
2.901
33.267
66.014
90.382
3.593










1.1 < NA ≦ 1.2


115 < T ≦ 125












Case
12-06
12-07
12-08
12-09
12-10





n10
1.7305285
1.6927568
1.6930586
1.6939267
1.6970265


k10
0.0799609
0.0712762
0.0635805
0.0583165
0.0526106


d10 (nm)
93.907
218.499
215.646
213.162
273.430


n20
1.7196209
1.6781695
1.6903056
1.6934648
1.6908020


k20
0.2133806
0.2348207
0.1916344
0.1626221
0.1682270


d20 (nm)
220.978
164.929
223.237
282.414
277.869


When n1 ≧ n10, n1m =
0.0401038
0.0280627
0.0367090
0.0617249
0.0695837


When n1 < n10, n1m =
0.0020569
0.0197937
0.0422595
0.0578455
0.0506836


When k1 ≧ k10, k1m =
0.0099243
0.0365027
0.0497717
0.0551318
0.0584485


When k1 < k10, k1m =
0.0219006
0.0215491
0.0327808
0.0369946
0.0381665


When d1 ≧ d10, d1m (nm) =
15.192
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
0.519
8.747
40.119
117.750
120.098


When n2 ≧ n20, n2m =
0.0185596
0.0673242
0.2516089
0.2302490
0.2819116


When n2 < n20, n2m =
0.1000403
0.0715613
0.0981323
0.1425830
0.2021863


When k2 ≧ k20, k2m =
0.0105981
0.0901270
0.1132849
0.1293579
0.1967712


When k2 < k20, k2m =
0.0546692
0.0589612
0.0634204
0.0595032
0.0741577


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
3.602
19.014
34.397
79.670
93.763





















1.1 < NA ≦ 1.2


125 < T ≦ 135







19/27












Case
13-01
13-02
13-03
13-04
13-05





n10
1.8968086
1.9070303
1.9016797
1.7329805
1.7161015


k10
0.1457981
0.0954881
0.0905797
0.0916823
0.0708259


d10 (nm)
14.128
12.717
10.946
93.296
94.224


n20
1.6815336
1.7369802
1.7110902
1.7056329
1.6780965


k20
0.3444919
0.2856144
0.2381911
0.2670261
0.1788543


d20 (nm)
167.613
218.968
280.601
155.076
274.399


When n1 ≧ n10, n1m =
0.0900439
0.1048657
0.1226746
0.0324280
0.0442737


When n1 < n10, n1m =
0.0549670
0.0656934
0.0785547
0.0012561
0.0190796


When k1 ≧ k10, k1m =
0.0772925
0.0877979
0.1031616
0.0075342
0.0396033


When k1 < k10, k1m =
0.0920227
0.0954881
0.0905797
0.0177710
0.0448962


When d1 ≧ d10, d1m (nm) =
5.183
6.019
6.438
9.368
34.945


When d1 < d10, d1m (nm) =
2.993
3.453
3.787
0.285
6.328


When n2 ≧ n20, n2m =
0.0877783
0.0991382
0.1111206
0.0250049
0.0400305


When n2 < n20, n2m =
0.1446509
0.1532288
0.1362280
0.0542139
0.1016638


When k2 ≧ k20, k2m =
0.0828516
0.0936658
0.0912720
0.0036011
0.0409863


When k2 < k20, k2m =
0.0884485
0.0865161
0.0819922
0.0570435
0.0508105


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
16.698
∞


When d2 < d20, d2m (nm) =
63.831
86.162
129.598
1.884
53.218










1.1 < NA ≦ 1.2


125 < T ≦ 135













Case
13-06
13-07
13-08
13-09







n10
1.6922053
1.6924923
1.6935584
1.6967916



k10
0.0726320
0.0653867
0.0598502
0.0533770



d10 (nm)
218.650
214.871
212.072
273.133



n20
1.6800076
1.6897434
1.6927128
1.6904661



k20
0.2436881
0.1959626
0.1654173
0.1709158



d20 (nm)
154.426
214.392
274.211
268.389



When n1 ≧ n10, n1m =
0.0253528
0.0324316
0.0605591
0.0715686



When n1 < n10, n1m =
0.0165808
0.0420508
0.0560315
0.0516870



When k1 ≧ k10, k1m =
0.0318250
0.0487207
0.0537805
0.0575159



When k1 < k10, k1m =
0.0192969
0.0323987
0.0370093
0.0369739



When d1 ≧ d10, d1m (nm) =
16.057
∞
∞
∞



When d1 < d10, d1m (nm) =
7.067
37.738
59.298
116.516



When n2 ≧ n20, n2m =
0.0399280
0.1505237
0.2298792
0.2878638



When n2 < n20, n2m =
0.0570007
0.0843848
0.1463525
0.2044592



When k2 ≧ k20, k2m =
0.0949915
0.1174060
0.1308350
0.1989417



When k2 < k20, k2m =
0.0566089
0.0642029
0.0608850
0.0765625



When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞



When d2 < d20, d2m (nm) =
13.778
24.202
76.110
90.681






















1.1 < NA ≦ 1.2


135 < T ≦ 145







20/27












Case
14-01
14-02
14-03
14-04
14-05





n10
1.8931613
1.9086798
1.8957546
1.7383088
1.7163304


k10
0.1437464
0.0925277
0.1021679
0.0935643
0.0717315


d10 (nm)
15.228
13.463
11.154
93.735
94.330


n20
1.6981871
1.7547782
1.6965397
1.7255584
1.6763108


k20
0.3648670
0.2987738
0.2414267
0.2828024
0.1832109


d20 (nm)
154.635
206.696
273.752
142.972
265.207


When n1 ≧ n10, n1m =
0.0870447
0.1008179
0.1206177
0.0337476
0.0440930


When n1 < n10, n1m =
0.0533362
0.0620862
0.0768750
0.0007715
0.0201111


When k1 ≧ k10, k1m =
0.0736633
0.0819543
0.1022961
0.0054871
0.0403162


When k1 < k10, k1m =
0.0884546
0.0925277
0.1021679
0.0149585
0.0433484


When d1 ≧ d10, d1m (nm) =
5.366
6.051
6.474
9.539
32.676


When d1 < d10, d1m (nm) =
3.110
3.392
3.792
0.168
6.615


When n2 ≧ n20, n2m =
0.0905371
0.1017932
0.1131152
0.0305115
0.0401709


When n2 < n20, n2m =
0.1457471
0.1521191
0.1323865
0.0291541
0.0974780


When k2 ≧ k20, k2m =
0.0891467
0.0990112
0.0895691
0.0025757
0.0411877


When k2 < k20, k2m =
0.0964551
0.0905688
0.0826367
0.0641370
0.0518066


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
18.295
∞


When d2 < d20, d2m (nm) =
52.833
78.923
127.644
0.825
36.894










1.1 < NA ≦ 1.2


135 < T ≦ 145












Case
14-06
14-07
14-08
14-09
14-10





n10
1.7036586
1.6919166
1.6911838
1.6942185
1.6965335


k10
0.0640636
0.0672926
0.0743991
0.0545821
0.0539924


d10 (nm)
161.836
213.353
218.060
211.644
273.036


n20
1.6842842
1.6889376
1.6805827
1.6930391
1.6894839


k20
0.1670348
0.2002175
0.2524809
0.1466022
0.1738185


d20 (nm)
260.021
207.074
145.761
321.654
259.712


When n1 ≧ n10, n1m =
0.0516992
0.0312610
0.0190637
0.0570044
0.0731799


When n1 < n10, n1m =
0.0203174
0.0465454
0.0159326
0.0625537
0.0527673


When k1 ≧ k10, k1m =
0.0380640
0.0462256
0.0279297
0.0552405
0.0568201


When k1 < k10, k1m =
0.0285486
0.0325867
0.0168274
0.0356702
0.0362610


When d1 ≧ d10, d1m (nm) =
∞
∞
14.138
∞
∞


When d1 < d10, d1m (nm) =
9.049
34.771
6.640
127.140
114.401


When n2 ≧ n20, n2m =
0.0375000
0.2427722
0.0321863
0.2263916
0.2897119


When n2 < n20, n2m =
0.0655225
0.0802039
0.0495178
0.1240515
0.2069202


When k2 ≧ k20, k2m =
0.0303979
0.1193311
0.0877856
0.1337305
0.1994678


When k2 < k20, k2m =
0.0483228
0.0645337
0.0566711
0.0596594
0.0781824


When d2 ≧ d20, d2m (nm) =
29.338
∞
15.130
∞
∞


When d2 < d20, d2m (nm) =
27.139
22.617
11.351
93.024
88.496





















1.1 < NA ≦ 1.2


145 < T ≦ 155







21/27












Case
15-01
15-02
15-03
15-04
15-05





n10
1.8962402
1.9162756
1.8972293
1.7171631
1.7039366


k10
0.1446868
0.0920008
0.1039493
0.0735355
0.0654419


d10 (nm)
16.058
13.917
11.503
94.241
161.496


n20
1.7149739
1.7705409
1.6986687
1.6756859
1.6849902


k20
0.3909951
0.3160160
0.2516185
0.1901883
0.1728826


d20 (nm)
143.691
196.340
264.437
256.660
251.490


When n1 ≧ n10, n1m =
0.0837915
0.0974329
0.1166235
0.0430017
0.0505029


When n1 < n10, n1m =
0.0514441
0.0592371
0.0737268
0.0188135
0.0178369


When k1 ≧ k10, k1m =
0.0700403
0.0772290
0.0977893
0.0384546
0.0357764


When k1 < k10, k1m =
0.0875134
0.0920008
0.1039493
0.0432324
0.0268848


When d1 ≧ d10, d1m (nm) =
5.323
5.852
6.362
32.246
∞


When d1 < d10, d1m (nm) =
3.062
3.205
3.699
5.981
7.380


When n2 ≧ n20, n2m =
0.0928162
0.1031079
0.1115686
0.0381177
0.0304712


When n2 < n20, n2m =
0.1435938
0.1490808
0.1351062
0.0929431
0.0597266


When k2 ≧ k20, k2m =
0.0944385
0.1027820
0.0897864
0.0382104
0.0277966


When k2 < k20, k2m =
0.0995911
0.0924023
0.0838245
0.0518921
0.0482678


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
23.493


When d2 < d20, d2m (nm) =
30.912
72.930
96.188
31.536
23.876










1.1 < NA ≦ 1.2


145 < T ≦ 155













Case
15-06
15-07
15-08
15-09







n10
1.6903081
1.6915399
1.6931731
1.6963857



k10
0.0771344
0.0690906
0.0615887
0.0546855



d10 (nm)
216.305
212.338
211.917
273.170



n20
1.6786590
1.6881028
1.6918937
1.6879125



k20
0.2613948
0.2062149
0.1729009
0.1780863



d20 (nm)
139.207
199.770
256.415
251.444



When n1 ≧ n10, n1m =
0.0195569
0.0307166
0.0591064
0.0699243



When n1 < n10, n1m =
0.0132800
0.0523120
0.0554614
0.0530347



When k1 ≧ k10, k1m =
0.0269897
0.0450159
0.0517236
0.0562524



When k1 < k10, k1m =
0.0101050
0.0313696
0.0355261
0.0367395



When d1 ≧ d10, d1m (nm) =
14.222
∞
∞
∞



When d1 < d10, d1m (nm) =
6.108
32.462
54.157
113.606



When n2 ≧ n20, n2m =
0.0246814
0.2330432
0.2286047
0.2890198



When n2 < n20, n2m =
0.0598340
0.0841870
0.1451465
0.2088098



When k2 ≧ k20, k2m =
0.0678235
0.1160620
0.1277832
0.1979041



When k2 < k20, k2m =
0.0514465
0.0682922
0.0664624
0.0771411



When d2 ≧ d20, d2m (nm) =
11.437
∞
∞
∞



When d2 < d20, d2m (nm) =
12.498
26.275
74.226
84.013






















1.1 < NA ≦ 1.2


155 < T ≦ 165







22/27












Case
16-01
16-02
16-03
16-04
16-05





n10
1.9078860
1.9270939
1.9009914
1.7182026
1.7037276


k10
0.1508452
0.0963716
0.1079582
0.0759211
0.0670447


d10 (nm)
16.208
13.863
11.657
93.910
160.452


n20
1.7232027
1.7738090
1.6981472
1.6754262
1.6860603


k20
0.4201511
0.3331580
0.2622250
0.1979303
0.1785858


d20 (nm)
134.826
188.374
256.036
248.261
243.357


When n1 ≧ n10, n1m =
0.0807556
0.0955676
0.1136938
0.0410315
0.0482739


When n1 < n10, n1m =
0.0492212
0.0570374
0.0706995
0.0157471
0.0155554


When k1 ≧ k10, k1m =
0.0660083
0.0745215
0.0946643
0.0342603
0.0302344


When k1 < k10, k1m =
0.0885791
0.0963716
0.1079582
0.0433301
0.0248120


When d1 ≧ d10, d1m (nm) =
4.938
5.477
6.133
23.554
∞


When d1 < d10, d1m (nm) =
2.790
2.920
3.507
4.784
6.051


When n2 ≧ n20, n2m =
0.0912793
0.1022461
0.1087073
0.0334387
0.0216223


When n2 < n20, n2m =
0.1401233
0.1468384
0.1373413
0.0900842
0.0519312


When k2 ≧ k20, k2m =
0.0948535
0.1014905
0.0883215
0.0321790
0.0239026


When k2 < k20, k2m =
0.0976477
0.0917578
0.0837280
0.0507922
0.0474658


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
19.461


When d2 < d20, d2m (nm) =
27.641
68.596
90.537
29.710
21.259










1.1 < NA ≦ 1.2


155 < T ≦ 165













Case
16-06
16-07
16-08
16-09







n10
1.6914048
1.6932944
1.6971949
1.6963748



k10
0.0705280
0.0619823
0.0758678
0.0557064



d10 (nm)
212.904
213.027
268.193
273.316



n20
1.6862460
1.6912789
1.6840809
1.6860970



k20
0.2142065
0.1784688
0.2789945
0.1841499



d20 (nm)
190.804
246.475
135.240
242.973



When n1 ≧ n10, n1m =
0.0288806
0.0598267
0.0616260
0.0706445



When n1 < n10, n1m =
0.0419739
0.0573401
0.0320642
0.0521814



When k1 ≧ k10, k1m =
0.0434460
0.0510059
0.0409424
0.0555554



When k1 < k10, k1m =
0.0304883
0.0343054
0.0217456
0.0379871



When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞



When d1 < d10, d1m (nm) =
31.951
51.898
19.489
113.780



When n2 ≧ n20, n2m =
0.2364844
0.2370337
0.2474512
0.2927136



When n2 < n20, n2m =
0.0869409
0.1403040
0.2270129
0.2100537



When k2 ≧ k20, k2m =
0.1087354
0.1223047
0.1872974
0.1959326



When k2 < k20, k2m =
0.0726953
0.0652295
0.1039441
0.0773071



When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞



When d2 < d20, d2m (nm) =
34.355
75.037
36.050
81.214






















1.1 < NA ≦ 1.2


165 < T ≦ 175







23/27












Case
17-01
17-02
17-03
17-04
17-05





n10
1.9345747
1.9100928
1.9218874
1.7188695
1.7031385


k10
0.1082213
0.1149883
0.1634556
0.0782891
0.0685384


d10 (nm)
13.373
11.317
15.608
93.463
159.293


n20
1.7554016
1.6916658
1.7091703
1.6745648
1.6866422


k20
0.3434593
0.2694423
0.4402763
0.2040549
0.1829170


d20 (nm)
183.042
248.707
128.647
239.614
234.977


When n1 ≧ n10, n1m =
0.0953882
0.1140894
0.0784595
0.0386694
0.0460681


When n1 < n10, n1m =
0.0550098
0.0698865
0.0459766
0.0121814
0.0133398


When k1 ≧ k10, k1m =
0.0742224
0.0954895
0.0620923
0.0290149
0.0227319


When k1 < k10, k1m =
0.1051392
0.1149883
0.0878528
0.0413110
0.0203333


When d1 ≧ d10, d1m (nm) =
5.105
5.733
4.388
16.599
∞


When d1 < d10, d1m (nm) =
2.628
3.226
2.376
3.551
4.956


When n2 ≧ n20, n2m =
0.0995532
0.1061743
0.0849316
0.0275488
0.0132971


When n2 < n20, n2m =
0.1453674
0.1364294
0.1372107
0.0877344
0.0449780


When k2 ≧ k20, k2m =
0.0936926
0.0848206
0.0864539
0.0249731
0.0152673


When k2 < k20, k2m =
0.0884937
0.0821777
0.0909717
0.0487439
0.0459656


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
6.034


When d2 < d20, d2m (nm) =
65.841
91.823
28.009
30.737
19.612










1.1 < NA ≦ 1.2


165 < T ≦ 175













Case
17-06
17-07
17-08
17-09







n10
1.6934237
1.6934242
1.6985617
1.6963947



k10
0.0627890
0.0627998
0.0777714
0.0569261



d10 (nm)
213.592
213.572
264.836
273.344



n20
1.6908665
1.6907829
1.6854326
1.6845211



k20
0.1844160
0.1843934
0.2962369
0.1907955



d20 (nm)
236.853
236.891
131.733
233.824



When n1 ≧ n10, n1m =
0.0574976
0.0574353
0.0522168
0.0698511



When n1 < n10, n1m =
0.0521313
0.0521704
0.0296216
0.0506372



When k1 ≧ k10, k1m =
0.0502954
0.0502856
0.0369763
0.0547412



When k1 < k10, k1m =
0.0341577
0.0341846
0.0234509
0.0368408



When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞



When d1 < d10, d1m (nm) =
50.284
50.272
18.034
113.943



When n2 ≧ n20, n2m =
0.2442261
0.2441003
0.2108032
0.3045251



When n2 < n20, n2m =
0.1394958
0.1395251
0.2567761
0.2115186



When k2 ≧ k20, k2m =
0.1187415
0.1187610
0.1954675
0.1950378



When k2 < k20, k2m =
0.0660913
0.0660889
0.1128296
0.0795361



When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞



When d2 < d20, d2m (nm) =
75.634
75.652
33.470
80.767






















1.1 < NA ≦ 1.2


175 < T ≦ 185







24/27












Case
18-01
18-02
18-03
18-04
18-05





n10
1.9329388
1.9368237
1.9141366
1.7191879
1.7029035


k10
0.1795701
0.1224596
0.1196035
0.0801581
0.0699625


d10 (nm)
14.789
12.921
11.206
93.133
158.805


n20
1.6812994
1.7305084
1.6882344
1.6734445
1.6865116


k20
0.4483886
0.3477304
0.2744889
0.2077092
0.1862225


d20 (nm)
123.825
177.704
240.000
230.286
225.674


When n1 ≧ n10, n1m =
0.0768433
0.0949634
0.1131592
0.0367419
0.0441357


When n1 < n10, n1m =
0.0412451
0.0529919
0.0684998
0.0095679
0.0109912


When k1 ≧ k10, k1m =
0.0578772
0.0744714
0.0949390
0.0247339
0.0167639


When k1 < k10, k1m =
0.0896887
0.1065430
0.1185388
0.0386743
0.0152380


When d1 ≧ d10, d1m (nm) =
3.840
4.794
5.495
14.453
∞


When d1 < d10, d1m (nm) =
1.946
2.409
3.066
2.710
3.941


When n2 ≧ n20, n2m =
0.0764294
0.0962097
0.1038733
0.0230908
0.0081592


When n2 < n20, n2m =
0.1359412
0.1466211
0.1367029
0.0895520
0.0398572


When k2 ≧ k20, k2m =
0.0734753
0.0852112
0.0825085
0.0197388
0.0086536


When k2 < k20, k2m =
0.0828125
0.0854419
0.0815332
0.0475061
0.0463342


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
20.793
3.280


When d2 < d20, d2m (nm) =
32.854
63.574
95.894
33.693
18.574










1.1 < NA ≦ 1.2


175 < T ≦ 185












Case
18-06
18-07
18-08







n10
1.6933701
1.6939475
1.6969386



k10
0.0640425
0.0576888
0.0533290



d10 (nm)
213.864
212.435
271.986



n20
1.6904005
1.6925921
1.6924288



k20
0.1898312
0.1618810
0.1673219



d20 (nm)
227.117
285.048
281.091



When n1 ≧ n10, n1m =
0.0547229
0.0510974
0.0676453



When n1 < n10, n1m =
0.0462109
0.0603149
0.0497070



When k1 ≧ k10, k1m =
0.0493457
0.0532312
0.0592920



When k1 < k10, k1m =
0.0339734
0.0351465
0.0390295



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
49.384
120.643
177.975



When n2 ≧ n20, n2m =
0.2555811
0.2373071
0.2892273



When n2 < n20, n2m =
0.1402515
0.1279663
0.2010315



When k2 ≧ k20, k2m =
0.1146326
0.1254919
0.2051270



When k2 < k20, k2m =
0.0655762
0.0607678
0.0750598



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
70.972
82.029
98.942






















1.1 < NA ≦ 1.2


185 < T ≦ 195







25/27












Case
19-01
19-02
19-03
19-04
19-05





n10
1.9315873
1.9153217
1.8972445
1.7198506
1.7209927


k10
0.1333486
0.1206110
0.1001874
0.0813984
0.0705203


d10 (nm)
13.169
11.351
10.604
93.215
93.408


n20
1.7169625
1.6899751
1.6952918
1.6740113
1.6975541


k20
0.3552140
0.2797802
0.2334251
0.2110946
0.1793898


d20 (nm)
168.729
229.265
285.679
219.867
273.456


When n1 ≧ n10, n1m =
0.0918945
0.1114490
0.1257397
0.0361377
0.0445178


When n1 < n10, n1m =
0.0499878
0.0671436
0.0846338
0.0086279
0.0205615


When k1 ≧ k10, k1m =
0.0714844
0.0926733
0.1116675
0.0228809
0.0433899


When k1 < k10, k1m =
0.1000085
0.1179578
0.1001874
0.0379150
0.0444836


When d1 ≧ d10, d1m (nm) =
4.647
5.413
6.402
13.674
40.701


When d1 < d10, d1m (nm) =
2.318
3.021
3.978
2.409
6.133


When n2 ≧ n20, n2m =
0.0938611
0.1021985
0.1009766
0.0217163
0.0601978


When n2 < n20, n2m =
0.1488745
0.1392834
0.1303809
0.0916943
0.1077124


When k2 ≧ k20, k2m =
0.0821570
0.0826257
0.0865845
0.0185046
0.0416394


When k2 < k20, k2m =
0.0869946
0.0832629
0.0782239
0.0491125
0.0501843


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.431
∞


When d2 < d20, d2m (nm) =
61.773
92.529
127.146
32.148
73.073










1.1 < NA ≦ 1.2


185 < T ≦ 195












Case
19-06
19-07
19-08
19-09
19-10





n10
1.7035608
1.6916743
1.6930483
1.6936984
1.6968810


k10
0.0713918
0.0742011
0.0657083
0.0591625
0.0544417


d10 (nm)
159.462
216.137
213.861
212.273
271.786


n20
1.6857491
1.6815589
1.6902271
1.6918699
1.6922876


k20
0.1901066
0.2413942
0.1951191
0.1652801
0.1708476


d20 (nm)
215.251
158.897
217.477
275.792
271.501


When n1 ≧ n10, n1m =
0.0427405
0.0223779
0.0519324
0.0514441
0.0684033


When n1 < n10, n1m =
0.0090222
0.0227649
0.0431079
0.0594763
0.0491284


When k1 ≧ k10, k1m =
0.0150232
0.0325586
0.0481873
0.0521765
0.0581763


When k1 < k10, k1m =
0.0160400
0.0253345
0.0315527
0.0340894
0.0370996


When d1 ≧ d10, d1m (nm) =
∞
13.469
∞
∞
∞


When d1 < d10, d1m (nm) =
3.174
10.839
47.894
119.682
177.263


When n2 ≧ n20, n2m =
0.0074805
0.0854517
0.1377869
0.2440918
0.2955884


When n2 < n20, n2m =
0.0361890
0.0461035
0.1429895
0.1282532
0.2018481


When k2 ≧ k20, k2m =
0.0083386
0.0888440
0.1120801
0.1247546
0.2080872


When k2 < k20, k2m =
0.0485754
0.0635596
0.0642932
0.0606433
0.0779761


When d2 ≧ d20, d2m (nm) =
3.092
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
17.439
14.439
35.904
75.946
92.429





















1.1 < NA ≦ 1.2


195 < T ≦ 205







26/27












Case
20-01
20-02
20-03
20-04
20-05





n10
1.9249373
1.9134695
1.8970797
1.7208445
1.7215107


k10
0.1361664
0.1202777
0.0999072
0.0825059
0.0711590


d10 (nm)
14.155
11.822
10.899
93.633
93.747


n20
1.7251855
1.6947701
1.6978665
1.6746972
1.6977852


k20
0.3723543
0.2878755
0.2388400
0.2167421
0.1834377


d20 (nm)
156.237
218.180
275.054
209.700
263.540


When n1 ≧ n10, n1m =
0.0879163
0.1083789
0.1230811
0.0362378
0.0448303


When n1 < n10, n1m =
0.0472876
0.0648938
0.0826709
0.0083032
0.0200745


When k1 ≧ k10, k1m =
0.0660645
0.0884607
0.1084424
0.0221863
0.0429114


When k1 < k10, k1m =
0.0933167
0.1148511
0.0999072
0.0377161
0.0440771


When d1 ≧ d10, d1m (nm) =
4.725
5.477
6.424
13.579
31.897


When d1 < d10, d1m (nm) =
2.353
3.040
3.984
2.294
5.957


When n2 ≧ n20, n2m =
0.0937048
0.1017651
0.1009302
0.0215295
0.0601208


When n2 < n20, n2m =
0.1501685
0.1443250
0.1325146
0.0892346
0.1044958


When k2 ≧ k20, k2m =
0.0870276
0.0848474
0.0878162
0.0191504
0.0424573


When k2 < k20, k2m =
0.0940491
0.0866907
0.0808813
0.0520386
0.0521252


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
59.976
84.859
127.060
27.072
71.102










1.1 < NA ≦ 1.2


195 < T ≦ 205












Case
20-06
20-07
20-08
20-09
20-10





n10
1.7046380
1.7071945
1.6911424
1.6924731
1.6944113


k10
0.0728087
0.0643745
0.0761042
0.0678273
0.0547711


d10 (nm)
160.840
160.796
216.237
212.933
211.610


n20
1.6842748
1.7036838
1.6835271
1.6899027
1.6931553


k20
0.1961079
0.1674255
0.2518702
0.2006809
0.1468072


d20 (nm)
204.946
259.158
149.208
209.434
323.528


When n1 ≧ n10, n1m =
0.0417468
0.0534717
0.0144385
0.0489441
0.0528149


When n1 < n10, n1m =
0.0080798
0.0311902
0.0202490
0.0431433
0.0592456


When k1 ≧ k10, k1m =
0.0160498
0.0272644
0.0259192
0.0470654
0.0582300


When k1 < k10, k1m =
0.0189954
0.0257520
0.0204919
0.0289844
0.0354419


When d1 ≧ d10, d1m (nm) =
∞
∞
11.042
∞
∞


When d1 < d10, d1m (nm) =
2.830
21.473
8.826
44.978
116.569


When n2 ≧ n20, n2m =
0.0092676
0.0660242
0.0583154
0.1383105
0.2397107


When n2 < n20, n2m =
0.0345349
0.0284167
0.0279346
0.1133557
0.1358362


When k2 ≧ k20, k2m =
0.0098743
0.0192883
0.0839758
0.1160754
0.1327747


When k2 < k20, k2m =
0.0439319
0.0493506
0.0539001
0.0650562
0.0582056


When d2 ≧ d20, d2m (nm) =
4.069
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
16.537
9.202
10.084
22.297
94.005



















1.1 < NA ≦ 1.2


195 < T ≦ 205







27/27










Case
20-11














n10
1.6967389



k10
0.0554960



d10 (nm)
271.524



n20
1.6919127



k20
0.1743507



d20 (nm)
262.739



When n1 ≧ n10, n1m =
0.0690857



When n1 < n10, n1m =
0.0487012



When k1 ≧ k10, k1m =
0.0571155



When k1 < k10, k1m =
0.0354016



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
122.531



When n2 ≧ n20, n2m =
0.3042639



When n2 < n20, n2m =
0.2009363



When k2 ≧ k20, k2m =
0.2111316



When k2 < k20, k2m =
0.0800171



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
82.974










In accordance with a fourth embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.2<NA≦1.3. In accordance with the fourth embodiment of the invention, an exposure method is used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.2<NA≦1.3.
The antireflective film or the antireflective film used in the exposure method according to the fourth embodiment of the invention includes an upper layer having a complex refractive index N1 and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the following equations:

N1=n1−k1i 

N2=n2−k2i 

Assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm), when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the following relational expression:

{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1

However, a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20. In the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m=”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”; in the line of “When d1≧d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d20−d2m”.












1.2 < NA ≦ 1.3


2 ≦ T ≦ 15







1/21












Case
1-01
1-02
1-03
1-04
1-05





n10
2.070
1.955
1.895
1.875
1.870


k10
0.020
0.138
0.133
0.110
0.101


d10 (nm)
27.974
34.826
29.218
17.990
13.959


n20
5.553
9.284
2.177
1.753
1.700


k20
3.053
0.606
0.543
0.330
0.255


d20 (nm)
2.024
10.907
63.407
152.930
218.765


When n1 ≧ n10, n1m =
2.141
2.017
1.952
1.943
1.957


When n1 < n10, n1m =
2.006
1.896
1.854
1.843
1.821


When k1 ≧ k10, k1m =
0.075
0.180
0.166
0.155
0.171


When k1 < k10, k1m =
0.000
0.061
0.055
0.028
0.009


When d1 ≧ d10, d1m
31.254
39.247
35.017
23.926
20.211


(nm) =


When d1 < d10, d1m
25.519
31.618
26.178
15.560
10.679


(nm) =


When n2 ≧ n20, n2m =
5.876
9.377
2.281
1.832
1.773


When n2 < n20, n2m =
5.233
9.207
2.051
1.635
1.577


When k2 ≧ k20, k2m =
3.362
0.715
0.699
0.412
0.320


When k2 < k20, k2m =
2.751
0.513
0.439
0.253
0.185


When d2 ≧ d20, d2m
2.251
11.023
70.023
∞
∞


(nm) =


When d2 < d20, d2m
1.807
10.812
58.076
125.396
142.606


(nm) =










1.2 < NA ≦ 1.3


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.867
1.699
1.693
1.692
1.694


k10
0.070
0.063
0.058
0.069
0.074


d10 (nm)
13.235
165.016
157.920
236.756
217.672


n20
1.732
1.698
1.698
6.942
1.788


k20
0.221
0.180
0.154
3.076
0.339


d20 (nm)
270.745
204.222
265.886
0.950
84.006


When n1 ≧ n10, n1m =
1.964
1.701
1.708
1.727
1.710


When n1 < n10, n1m =
1.810
1.683
1.664
1.662
1.674


When k1 ≧ k10, k1m =
0.149
0.068
0.084
0.108
0.106


When k1 < k10, k1m =
0.000
0.043
0.031
0.039
0.053


When d1 ≧ d10, d1m
20.519
166.410
170.845
255.389
226.062


(nm) =


When d1 < d10, d1m
9.259
155.941
111.504
217.630
206.257


(nm) =


When n2 ≧ n20, n2m =
1.809
1.721
1.754
7.503
1.909


When n2 < n20, n2m =
1.603
1.694
1.667
6.491
1.763


When k2 ≧ k20, k2m =
0.293
0.188
0.194
3.321
0.395


When k2 < k20, k2m =
0.152
0.139
0.113
2.487
0.243


When d2 ≧ d20, d2m
∞
217.552
∞
1.062
100.609


(nm) =


When d2 < d20, d2m
182.495
202.082
249.694
0.781
81.237


(nm) =



















1.2 < NA ≦ 1.3


2 ≦ T ≦ 15







2/21












Case
1-11
1-12
1-13
















n10
1.699
1.698
1.695



k10
0.071
0.065
0.054



d10 (nm)
210.274
207.280
219.181



n20
1.718
1.695
1.688



k20
0.242
0.194
0.161



d20 (nm)
154.667
219.490
263.755



When n1 ≧ n10, n1m =
1.720
1.737
1.738



When n1 < n10, n1m =
1.683
1.675
1.660



When k1 ≧ k10, k1m =
0.099
0.097
0.100



When k1 < k10, k1m =
0.045
0.035
0.019



When d1 ≧ d10, d1m (nm) =
229.005
∞
∞



When d1 < d10, d1m (nm) =
200.369
189.200
189.609



When n2 ≧ n20, n2m =
1.849
1.855
1.900



When n2 < n20, n2m =
1.670
1.540
1.583



When k2 ≧ k20, k2m =
0.332
0.307
0.271



When k2 < k20, k2m =
0.164
0.122
0.102



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
143.819
154.002
185.363






















1.2 < NA ≦ 1.3


15 < T ≦ 25







3/21












Case
2-01
2-02
2-03
2-04
2-05





n10
1.894
1.881
1.874
1.872
1.693


k10
0.182
0.116
0.105
0.074
0.060


d10 (nm)
37.493
18.625
14.298
13.408
158.097


n20
9.246
1.766
1.701
1.733
1.697


k20
0.662
0.358
0.269
0.231
0.160


d20 (nm)
10.628
142.939
209.610
261.989
257.142


When n1 ≧ n10, n1m =
1.954
1.946
1.957
1.966
1.703


When n1 < n10, n1m =
1.847
1.852
1.828
1.817
1.667


When k1 ≧ k10, k1m =
0.222
0.156
0.171
0.149
0.081


When k1 < k10, k1m =
0.111
0.037
0.015
0.000
0.035


When d1 ≧ d10, d1m
41.975
24.164
20.222
20.345
165.590


(nm) =


When d1 < d10, d1m
34.168
16.466
11.264
9.664
137.726


(nm) =


When n2 ≧ n20, n2m =
9.356
1.841
1.772
1.809
1.744


When n2 < n20, n2m =
9.153
1.650
1.579
1.602
1.674


When k2 ≧ k20, k2m =
0.784
0.442
0.334
0.302
0.195


When k2 < k20, k2m =
0.549
0.280
0.198
0.162
0.120


When d2 ≧ d20, d2m
10.759
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
10.519
119.178
137.341
178.243
243.996


(nm) =










1.2 < NA ≦ 1.3


15 < T ≦ 25












Case
2-06
2-07
2-08
2-09
2-10





n10
1.690
1.693
1.699
1.698
1.695


k10
0.074
0.078
0.074
0.067
0.055


d10 (nm)
235.203
218.334
210.503
207.468
219.130


n20
5.632
1.803
1.719
1.694
1.687


k20
4.204
0.382
0.259
0.203
0.167


d20 (nm)
0.919
74.994
145.797
210.546
255.274


When n1 ≧ n10, n1m =
1.708
1.699
1.715
1.733
1.737


When n1 < n10, n1m =
1.661
1.675
1.684
1.676
1.661


When k1 ≧ k10, k1m =
0.102
0.098
0.100
0.097
0.100


When k1 < k10, k1m =
0.051
0.067
0.052
0.039
0.022


When d1 ≧ d10, d1m
241.533
220.890
225.049
∞
∞


(nm) =


When d1 < d10, d1m
217.317
207.766
201.595
191.244
190.979


(nm) =


When n2 ≧ n20, n2m =
6.262
1.931
1.852
1.853
1.902


When n2 < n20, n2m =
5.366
1.793
1.684
1.538
1.584


When k2 ≧ k20, k2m =
4.338
0.416
0.339
0.310
0.275


When k2 < k20, k2m =
3.555
0.288
0.182
0.132
0.107


When d2 ≧ d20, d2m
0.986
89.025
∞
∞
∞


(nm) =


When d2 < d20, d2m
0.720
74.083
139.178
147.776
179.334


(nm) =





















1.2 < NA ≦ 1.3


25 < T ≦ 35







4/21












Case
3-01
3-02
3-03
3-04
3-05





n10
1.855
1.894
1.879
1.879
1.692


k10
0.222
0.121
0.110
0.076
0.062


d10 (nm)
38.795
19.092
14.598
13.458
158.198


n20
9.554
1.787
1.702
1.736
1.697


k20
0.714
0.392
0.285
0.242
0.168


d20 (nm)
10.003
133.195
201.011
253.439
248.709


When n1 ≧ n10, n1m =
1.905
1.955
1.958
1.971
1.699


When n1 < n10, n1m =
1.821
1.868
1.836
1.826
1.670


When k1 ≧ k10, k1m =
0.258
0.156
0.172
0.149
0.078


When k1 < k10, k1m =
0.159
0.047
0.022
0.000
0.041


When d1 ≧ d10, d1m
42.560
24.067
20.129
19.949
161.711


(nm) =


When d1 < d10, d1m
36.125
17.295
11.822
9.987
144.941


(nm) =


When n2 ≧ n20, n2m =
9.681
1.856
1.769
1.811
1.737


When n2 < n20, n2m =
9.446
1.674
1.584
1.608
1.683


When k2 ≧ k20, k2m =
0.829
0.479
0.348
0.313
0.196


When k2 < k20, k2m =
0.587
0.314
0.215
0.173
0.129


When d2 ≧ d20, d2m
10.138
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
9.892
112.716
132.762
173.492
239.168


(nm) =










1.2 < NA ≦ 1.3


25 < T ≦ 35












Case
3-06
3-07
3-08







n10
1.699
1.698
1.695



k10
0.078
0.070
0.057



d10 (nm)
210.437
207.381
219.158



n20
1.720
1.693
1.687



k20
0.280
0.215
0.175



d20 (nm)
137.855
202.487
246.765



When n1 ≧ n10, n1m =
1.710
1.730
1.737



When n1 < n10, n1m =
1.686
1.678
1.661



When k1 ≧ k10, k1m =
0.100
0.097
0.101



When k1 < k10, k1m =
0.063
0.046
0.025



When d1 ≧ d10, d1m (nm) =
216.379
∞
∞



When d1 < d10, d1m (nm) =
202.875
193.042
192.539



When n2 ≧ n20, n2m =
1.855
1.841
1.910



When n2 < n20, n2m =
1.702
1.535
1.588



When k2 ≧ k20, k2m =
0.336
0.312
0.280



When k2 < k20, k2m =
0.208
0.146
0.114



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
134.716
142.289
200.270






















1.2 < NA ≦ 1.3


35 < T ≦ 45







5/21












Case
4-01
4-02
4-03
4-04
4-05





n10
1.921
1.907
1.883
1.885
1.692


k10
0.198
0.132
0.117
0.078
0.064


d10 (nm)
29.852
18.597
14.666
13.425
158.019


n20
2.410
1.779
1.698
1.738
1.697


k20
0.850
0.418
0.298
0.251
0.174


d20 (nm)
42.336
126.566
192.788
244.904
240.368


When n1 ≧ n10, n1m =
1.964
1.964
1.959
1.975
1.694


When n1 < n10, n1m =
1.894
1.886
1.843
1.834
1.673


When k1 ≧ k10, k1m =
0.224
0.160
0.175
0.149
0.073


When k1 < k10, k1m =
0.152
0.061
0.031
0.000
0.048


When d1 ≧ d10, d1m
33.127
22.917
19.812
19.537
159.270


(nm) =


When d1 < d10, d1m
28.245
17.267
12.114
10.202
147.983


(nm) =


When n2 ≧ n20, n2m =
2.530
1.833
1.762
1.812
1.732


When n2 < n20, n2m =
2.288
1.667
1.583
1.611
1.691


When k2 ≧ k20, k2m =
0.928
0.492
0.359
0.320
0.195


When k2 < k20, k2m =
0.730
0.344
0.229
0.182
0.145


When d2 ≧ d20, d2m
46.411
∞
∞
∞
274.107


(nm) =


When d2 < d20, d2m
39.931
107.536
154.271
167.375
234.670


(nm) =










1.2 < NA ≦ 1.3


35 < T ≦ 45











Case
4-06
4-07
4-08
4-09





n10
1.700
1.698
1.695
1.705


k10
0.081
0.072
0.059
0.053


d10 (nm)
209.560
206.609
219.174
283.412


n20
1.716
1.692
1.688
1.691


k20
0.298
0.225
0.183
0.185


d20 (nm)
131.419
195.862
237.750
233.362


When n1 ≧ n10, n1m =
1.701
1.721
1.734
1.751


When n1 < n10, n1m =
1.689
1.680
1.662
1.675


When k1 ≧ k10, k1m =
0.099
0.097
0.101
0.092


When k1 < k10, k1m =
0.076
0.050
0.027
0.024


When d1 ≧ d10, d1m (nm) =
210.753
∞
∞
∞


When d1 < d10, d1m (nm) =
203.620
194.085
194.045
189.814


When n2 ≧ n20, n2m =
1.846
1.812
1.920
1.889


When n2 < n20, n2m =
1.712
1.528
1.594
1.515


When k2 ≧ k20, k2m =
0.319
0.315
0.285
0.358


When k2 < k20, k2m =
0.257
0.159
0.121
0.115


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
130.894
179.580
197.417
162.566





















1.2 < NA ≦ 1.3


45 < T ≦ 55







6/21












Case
5-01
5-02
5-03
5-04
5-05





n10
1.943
1.907
1.884
1.891
1.691


k10
0.213
0.153
0.123
0.078
0.066


d10 (nm)
22.907
17.372
14.585
13.392
157.377


n20
1.902
1.716
1.691
1.743
1.696


k20
0.785
0.418
0.305
0.257
0.178


d20 (nm)
53.731
124.143
184.536
235.129
232.195


When n1 ≧ n10, n1m =
1.979
1.963
1.959
1.980
1.692


When n1 < n10, n1m =
1.934
1.892
1.845
1.841
1.676


When k1 ≧ k10, k1m =
0.223
0.175
0.181
0.148
0.067


When k1 < k10, k1m =
0.198
0.080
0.039
0.000
0.057


When d1 ≧ d10, d1m
25.447
21.108
19.487
19.257
157.441


(nm) =


When d1 < d10, d1m
22.431
16.482
12.133
10.346
149.670


(nm) =


When n2 ≧ n20, n2m =
1.937
1.752
1.753
1.817
1.727


When n2 < n20, n2m =
1.871
1.605
1.576
1.616
1.695


When k2 ≧ k20, k2m =
0.813
0.464
0.362
0.326
0.187


When k2 < k20, k2m =
0.724
0.351
0.237
0.188
0.173


When d2 ≧ d20, d2m
58.954
∞
∞
∞
254.885


(nm) =


When d2 < d20, d2m
51.905
103.951
122.545
158.102
231.812


(nm) =










1.2 < NA ≦ 1.3


45 < T ≦ 55












Case
5-06
5-07
5-08







n10
1.699
1.695
1.704



k10
0.072
0.060
0.054



d10 (nm)
204.994
219.095
283.255



n20
1.688
1.689
1.689



k20
0.231
0.188
0.189



d20 (nm)
192.230
228.102
224.255



When n1 ≧ n10, n1m =
1.718
1.729
1.749



When n1 < n10, n1m =
1.682
1.663
1.676



When k1 ≧ k10, k1m =
0.096
0.102
0.091



When k1 < k10, k1m =
0.048
0.030
0.025



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
194.149
195.371
190.682



When n2 ≧ n20, n2m =
1.788
1.929
1.898



When n2 < n20, n2m =
1.641
1.601
1.530



When k2 ≧ k20, k2m =
0.326
0.290
0.362



When k2 < k20, k2m =
0.165
0.127
0.117



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
176.978
195.845
153.544






















1.2 < NA ≦ 1.3


55 < T ≦ 65







7/21












Case
6-01
6-02
6-03
6-04
6-05





n10
1.895
1.882
1.690
1.701
1.693


k10
0.076
0.126
0.068
0.084
0.070


d10 (nm)
13.537
14.752
155.845
206.275
221.382


n20
1.753
1.688
1.693
1.686
1.667


k20
0.262
0.309
0.181
0.310
0.231


d20 (nm)
223.848
174.672
224.616
122.505
161.928


When n1 ≧ n10, n1m =
1.983
1.956
1.691
1.703
1.726


When n1 < n10, n1m =
1.846
1.842
1.680
1.695
1.686


When k1 ≧ k10, k1m =
0.143
0.185
0.071
0.096
0.105


When k1 < k10, k1m =
0.000
0.045
0.054
0.076
0.063


When d1 ≧ d10, d1m
19.333
19.661
156.188
207.561
253.974


(nm) =


When d1 < d10, d1m
10.604
12.234
149.873
203.306
217.847


(nm) =


When n2 ≧ n20, n2m =
1.828
1.751
1.713
1.791
1.691


When n2 < n20, n2m =
1.623
1.571
1.692
1.682
1.585


When k2 ≧ k20, k2m =
0.332
0.365
0.184
0.352
0.284


When k2 < k20, k2m =
0.191
0.239
0.171
0.280
0.201


When d2 ≧ d20, d2m
∞
∞
244.114
149.549
170.132


(nm) =


When d2 < d20, d2m
146.194
124.203
224.269
121.948
139.231


(nm) =










1.2 < NA ≦ 1.3


55 < T ≦ 65












Case
6-06
6-07
6-08







n10
1.695
1.695
1.703



k10
0.060
0.055
0.049



d10 (nm)
218.851
215.764
278.302



n20
1.689
1.693
1.691



k20
0.190
0.162
0.159



d20 (nm)
218.129
277.062
273.241



When n1 ≧ n10, n1m =
1.726
1.740
1.751



When n1 < n10, n1m =
1.665
1.662
1.653



When k1 ≧ k10, k1m =
0.102
0.097
0.092



When k1 < k10, k1m =
0.031
0.021
0.015



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
196.531
170.235
166.884



When n2 ≧ n20, n2m =
1.935
1.919
1.925



When n2 < n20, n2m =
1.606
1.543
1.498



When k2 ≧ k20, k2m =
0.294
0.280
0.278



When k2 < k20, k2m =
0.130
0.102
0.095



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
191.652
197.142
190.724






















1.2 < NA ≦ 1.3


65 < T ≦ 75







8/21












Case
7-01
7-02
7-03
7-04
7-05





n10
1.881
1.879
1.898
1.873
1.715


k10
0.189
0.125
0.073
0.092
0.067


d10 (nm)
17.242
15.444
14.029
12.003
99.925


n20
1.617
1.697
1.767
1.696
1.686


k20
0.409
0.320
0.271
0.218
0.167


d20 (nm)
111.921
162.536
211.582
280.785
269.056


When n1 ≧ n10, n1m =
1.933
1.953
1.985
1.975
1.746


When n1 < n10, n1m =
1.873
1.839
1.852
1.816
1.710


When k1 ≧ k10, k1m =
0.202
0.184
0.136
0.174
0.081


When k1 < k10, k1m =
0.122
0.046
0.000
0.000
0.037


When d1 ≧ d10, d1m
20.550
20.523
19.818
18.551
136.285


(nm) =


When d1 < d10, d1m
16.700
12.791
11.204
8.554
98.008


(nm) =


When n2 ≧ n20, n2m =
1.633
1.761
1.845
1.780
1.699


When n2 < n20, n2m =
1.511
1.579
1.638
1.585
1.620


When k2 ≧ k20, k2m =
0.430
0.380
0.344
0.283
0.175


When k2 < k20, k2m =
0.344
0.246
0.196
0.150
0.131


When d2 ≧ d20, d2m
∞
∞
∞
∞
278.211


(nm) =


When d2 < d20, d2m
91.266
127.980
136.666
158.294
243.285


(nm) =










1.2 < NA ≦ 1.3


65 < T ≦ 75












Case
7-06
7-07
7-08







n10
1.693
1.695
1.695



k10
0.070
0.061
0.055



d10 (nm)
221.230
218.569
215.552



n20
1.668
1.689
1.692



k20
0.236
0.193
0.164



d20 (nm)
151.884
208.598
267.637



When n1 ≧ n10, n1m =
1.724
1.724
1.741



When n1 < n10, n1m =
1.686
1.666
1.661



When k1 ≧ k10, k1m =
0.105
0.101
0.097



When k1 < k10, k1m =
0.064
0.031
0.021



When d1 ≧ d10, d1m (nm) =
247.645
∞
∞



When d1 < d10, d1m (nm) =
218.101
197.493
171.385



When n2 ≧ n20, n2m =
1.689
1.934
1.918



When n2 < n20, n2m =
1.586
1.609
1.542



When k2 ≧ k20, k2m =
0.286
0.296
0.281



When k2 < k20, k2m =
0.205
0.130
0.101



When d2 ≧ d20, d2m (nm) =
159.193
∞
∞



When d2 < d20, d2m (nm) =
130.698
183.027
188.504






















1.2 < NA ≦ 1.3


75 < T ≦ 85







9/21












Case
8-01
8-02
8-03
8-04
8-05





n10
1.880
1.901
1.874
1.716
1.692


k10
0.126
0.074
0.095
0.068
0.072


d10 (nm)
16.279
14.624
12.218
99.848
220.366


n20
1.709
1.778
1.694
1.687
1.668


k20
0.340
0.284
0.225
0.173
0.244


d20 (nm)
151.148
201.087
271.916
259.863
143.647


When n1 ≧ n10, n1m =
1.951
1.984
1.974
1.746
1.725


When n1 < n10, n1m =
1.842
1.857
1.818
1.712
1.688


When k1 ≧ k10, k1m =
0.181
0.134
0.175
0.079
0.106


When k1 < k10, k1m =
0.048
0.000
0.000
0.042
0.068


When d1 ≧ d10, d1m
21.358
20.311
18.650
135.917
245.491


(nm) =


When d1 < d10, d1m
13.627
11.922
8.869
98.660
218.637


(nm) =


When n2 ≧ n20, n2m =
1.774
1.856
1.776
1.696
1.688


When n2 < n20, n2m =
1.592
1.651
1.582
1.624
1.581


When k2 ≧ k20, k2m =
0.403
0.360
0.289
0.178
0.280


When k2 < k20, k2m =
0.263
0.208
0.157
0.137
0.214


When d2 ≧ d20, d2m
∞
∞
∞
265.927
149.336


(nm) =


When d2 < d20, d2m
123.537
130.884
183.486
237.438
121.404


(nm) =










1.2 < NA ≦ 1.3


75 < T ≦ 85











Case
8-06
8-07







n10
1.695
1.695



k10
0.062
0.056



d10 (nm)
218.447
215.754



n20
1.688
1.691



k20
0.198
0.167



d20 (nm)
200.044
258.621



When n1 ≧ n10, n1m =
1.724
1.740



When n1 < n10, n1m =
1.667
1.661



When k1 ≧ k10, k1m =
0.102
0.097



When k1 < k10, k1m =
0.033
0.022



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
198.178
171.868



When n2 ≧ n20, n2m =
1.931
1.916



When n2 < n20, n2m =
1.605
1.542



When k2 ≧ k20, k2m =
0.296
0.282



When k2 < k20, k2m =
0.132
0.105



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
172.147
178.623






















1.2 < NA ≦ 1.3


85 < T ≦ 95







10/21












Case
9-01
9-02
9-03
9-04
9-05





n10
1.888
1.903
1.880
1.693
1.695


k10
0.130
0.081
0.095
0.063
0.064


d10 (nm)
16.763
14.911
12.432
156.037
218.418


n20
1.718
1.775
1.700
1.696
1.685


k20
0.366
0.299
0.236
0.165
0.207


d20 (nm)
141.793
193.492
262.434
252.531
192.031


When n1 ≧ n10, n1m =
1.955
1.983
1.976
1.693
1.725


When n1 < n10, n1m =
1.853
1.862
1.827
1.659
1.667


When k1 ≧ k10, k1m =
0.178
0.137
0.171
0.071
0.102


When k1 < k10, k1m =
0.053
0.000
0.000
0.062
0.036


When d1 ≧ d10, d1m
21.482
20.338
18.582
156.116
252.664


(nm) =


When d1 < d10, d1m
14.427
12.369
9.315
108.678
198.579


(nm) =


When n2 ≧ n20, n2m =
1.777
1.851
1.779
1.766
1.934


When n2 < n20, n2m =
1.605
1.653
1.583
1.688
1.600


When k2 ≧ k20, k2m =
0.429
0.373
0.299
0.166
0.298


When k2 < k20, k2m =
0.289
0.223
0.167
0.129
0.138


When d2 ≧ d20, d2m 
∞
∞
∞
252.906
∞


(nm) =


When d2 < d20, d2m
118.585
127.262
178.673
249.872
164.058


(nm) =










1.2 < NA ≦ 1.3


85 < T ≦ 95











Case
9-06
9-07







n10
1.695
1.704



k10
0.057
0.051



d10 (nm)
216.093
278.289



n20
1.691
1.691



k20
0.173
0.173



d20 (nm)
249.945
246.105



When n1 ≧ n10, n1m =
1.738
1.752



When n1 < n10, n1m =
1.662
1.653



When k1 ≧ k10, k1m =
0.098
0.092



When k1 < k10, k1m =
0.022
0.016



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
175.267
172.533



When n2 ≧ n20, n2m =
1.919
1.830



When n2 < n20, n2m =
1.543
1.507



When k2 ≧ k20, k2m =
0.284
0.291



When k2 < k20, k2m =
0.111
0.108



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
173.633
172.262




















1.2 < NA ≦ 1.3


95 < T ≦ 105







11/21













Case
10-01
10-02
10-03
10-04
10-05
10-06
















n10
1.902
1.906
1.888
1.694
1.695
1.704


k10
0.140
0.093
0.096
0.066
0.059
0.052


d10 (nm)
16.621
14.821
12.503
218.392
216.276
278.098


n20
1.717
1.761
1.706
1.682
1.691
1.689


k20
0.393
0.312
0.247
0.217
0.180
0.180


d20 (nm)
134.110
187.587
253.021
183.765
241.184
237.690


When n1 ≧ n10, n1m =
1.964
1.983
1.982
1.725
1.737
1.752


When n1 < n10, n1m =
1.874
1.867
1.838
1.666
1.663
1.658


When k1 ≧ k10, k1m =
0.179
0.146
0.168
0.103
0.098
0.091


When k1 < k10, k1m =
0.062
0.004
0.000
0.041
0.024
0.019


When d1 ≧ d10, d1m (nm) =
20.729
19.885
18.297
250.100
∞
∞


When d1 < d10, d1m (nm) =
14.862
12.520
9.652
198.830
185.832
180.136


When n2 ≧ n20, n2m =
1.767
1.831
1.783
1.944
1.927
1.847


When n2 < n20, n2m =
1.609
1.641
1.584
1.598
1.559
1.512


When k2 ≧ k20, k2m =
0.449
0.380
0.309
0.303
0.288
0.296


When k2 < k20, k2m =
0.320
0.238
0.178
0.149
0.117
0.113


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
113.506
124.690
172.558
157.077
167.184
165.978





















1.2 < NA ≦ 1.3


105 < T ≦ 115







12/21












Case
11-01
11-02
11-03
11-04
11-05





n10
1.915
1.908
1.895
1.692
1.694


k10
0.153
0.105
0.097
0.060
0.068


d10 (nm)
15.972
14.452
12.386
153.833
218.491


n20
1.700
1.741
1.708
1.696
1.679


k20
0.410
0.319
0.254
0.152
0.227


d20 (nm)
128.035
181.864
244.026
294.292
174.638


When n1 ≧ n10, n1m =
1.973
1.983
1.987
1.719
1.723


When n1 < n10, n1m =
1.893
1.872
1.847
1.655
1.669


When k1 ≧ k10, k1m =
0.185
0.156
0.167
0.093
0.104


When k1 < k10, k1m =
0.078
0.017
0.000
0.039
0.045


When d1 ≧ d10, d1m
19.455
19.144
17.845
∞
247.764


(nm) =


When d1 < d10, d1m
14.744
12.421
9.756
107.765
205.861


(nm) =


When n2 ≧ n20, n2m =
1.741
1.806
1.782
1.782
1.753


When n2 < n20, n2m =
1.596
1.623
1.583
1.640
1.603


When k2 ≧ k20, k2m =
0.453
0.379
0.315
0.185
0.311


When k2 < k20, k2m =
0.345
0.249
0.187
0.106
0.163


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
107.965
122.284
164.682
240.729
150.727


(nm) =










1.2 < NA ≦ 1.3


105 < T ≦ 115











Case
11-06
11-07







n10
1.695
1.705



k10
0.060
0.054



d10 (nm)
216.291
277.828



n20
1.691
1.688



k20
0.187
0.185



d20 (nm)
231.949
228.622



When n1 ≧ n10, n1m =
1.736
1.751



When n1 < n10, n1m =
1.664
1.660



When k1 ≧ k10, k1m =
0.099
0.091



When k1 < k10, k1m =
0.026
0.021



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
188.964
182.620



When n2 ≧ n20, n2m =
1.938
1.860



When n2 < n20, n2m =
1.577
1.505



When k2 ≧ k20, k2m =
0.293
0.298



When k2 < k20, k2m =
0.122
0.117



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
190.206
157.223






















1.2 < NA ≦ 1.3


115 < T ≦ 125







13/21












Case
12-01
12-02
12-03
12-04
12-05





n10
1.919
1.909
1.897
1.692
1.694


k10
0.168
0.114
0.102
0.061
0.069


d10 (nm)
15.470
14.219
12.252
153.490
218.807


n20
1.675
1.728
1.703
1.695
1.679


k20
0.416
0.323
0.257
0.154
0.236


d20 (nm)
121.998
174.431
235.332
285.775
164.294


When n1 ≧ n10, n1m =
1.974
1.983
1.989
1.719
1.720


When n1 < n10, n1m =
1.903
1.876
1.851
1.657
1.674


When k1 ≧ k10, k1m =
0.194
0.163
0.171
0.093
0.104


When k1 < k10, k1m =
0.095
0.028
0.000
0.043
0.048


When d1 ≧ d10, d1m
18.537
18.641
17.506
176.125
245.819


(nm) =


When d1 < d10, d1m
14.577
12.379
9.747
108.056
210.037


(nm) =


When n2 ≧ n20, n2m =
1.708
1.790
1.776
1.773
1.745


When n2 < n20, n2m =
1.572
1.608
1.579
1.640
1.616


When k2 ≧ k20, k2m =
0.448
0.378
0.316
0.184
0.323


When k2 < k20, k2m =
0.357
0.255
0.190
0.115
0.176


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
99.374
118.240
154.295
239.447
146.164


(nm) =










1.2 < NA ≦ 1.3


115 < T ≦ 125












Case
12-06
12-07
12-08







n10
1.695
1.696
1.706



k10
0.061
0.056
0.051



d10 (nm)
216.166
214.076
276.333



n20
1.690
1.694
1.706



k20
0.192
0.163
0.162



d20 (nm)
222.296
280.805
273.925



When n1 ≧ n10, n1m =
1.728
1.750
1.770



When n1 < n10, n1m =
1.664
1.664
1.647



When k1 ≧ k10, k1m =
0.099
0.099
0.090



When k1 < k10, k1m =
0.029
0.023
0.020



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
190.492
185.642
181.694



When n2 ≧ n20, n2m =
1.826
1.931
1.851



When n2 < n20, n2m =
1.594
1.560
1.519



When k2 ≧ k20, k2m =
0.297
0.283
0.279



When k2 < k20, k2m =
0.128
0.103
0.095



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
188.671
203.385
188.718






















1.2 < NA ≦ 1.3


125 < T ≦ 135







14/21












Case
13-01
13-02
13-03
13-04
13-05





n10
1.909
1.895
1.879
1.694
1.695


k10
0.116
0.106
0.083
0.071
0.063


d10 (nm)
14.671
12.483
11.828
219.020
215.746


n20
1.733
1.700
1.710
1.682
1.690


k20
0.334
0.261
0.220
0.245
0.197


d20 (nm)
163.102
225.249
280.433
153.670
212.983


When n1 ≧ n10, n1m =
1.981
1.985
1.982
1.717
1.723


When n1 < n10, n1m =
1.878
1.850
1.819
1.677
1.665


When k1 ≧ k10, k1m =
0.162
0.173
0.169
0.103
0.099


When k1 < k10, k1m =
0.035
0.004
0.000
0.051
0.034


When d1 ≧ d10, d1m
19.040
17.738
18.242
233.783
∞


(nm) =


When d1 < d10, d1m
12.910
9.987
8.329
211.731
191.269


(nm) =


When n2 ≧ n20, n2m =
1.795
1.771
1.785
1.724
1.797


When n2 < n20, n2m =
1.610
1.575
1.592
1.634
1.609


When k2 ≧ k20, k2m =
0.389
0.319
0.285
0.337
0.302


When k2 < k20, k2m =
0.261
0.192
0.153
0.187
0.133


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
109.327
144.773
164.318
140.585
192.523


(nm) =










1.2 < NA ≦ 1.3


125 < T ≦ 135











Case
13-06
13-07







n10
1.696
1.706



k10
0.057
0.052



d10 (nm)
213.723
276.363



n20
1.693
1.706



k20
0.165
0.164



d20 (nm)
271.596
264.087



When n1 ≧ n10, n1m =
1.749
1.772



When n1 < n10, n1m =
1.664
1.645



When k1 ≧ k10, k1m =
0.099
0.090



When k1 < k10, k1m =
0.026
0.022



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
186.782
182.830



When n2 ≧ n20, n2m =
1.934
1.851



When n2 < n20, n2m =
1.561
1.521



When k2 ≧ k20, k2m =
0.285
0.282



When k2 < k20, k2m =
0.104
0.097



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
198.444
183.298






















1.2 < NA ≦ 1.3


135 < T ≦ 145







15/21












Case
14-01
14-02
14-03
14-04
14-05





n10
1.910
1.892
1.879
1.694
1.694


k10
0.115
0.109
0.084
0.072
0.064


d10 (nm)
15.725
12.960
12.187
218.706
215.091


n20
1.755
1.698
1.712
1.684
1.689


k20
0.355
0.268
0.226
0.254
0.201


d20 (nm)
150.207
215.505
270.397
144.577
204.614


When n1 ≧ n10, n1m =
1.980
1.980
1.979
1.708
1.720


When n1 < n10, n1m =
1.881
1.848
1.820
1.676
1.666


When k1 ≧ k10, k1m =
0.157
0.174
0.167
0.100
0.099


When k1 < k10, k1m =
0.036
0.011
0.000
0.054
0.038


When d1 ≧ d10, d1m
20.158
18.254
18.627
231.071
∞


(nm) =


When d1 < d10, d1m
14.003
10.450
8.694
211.497
191.698


(nm) =


When n2 ≧ n20, n2m =
1.818
1.767
1.787
1.721
1.802


When n2 < n20, n2m =
1.632
1.571
1.592
1.649
1.619


When k2 ≧ k20, k2m =
0.415
0.327
0.291
0.345
0.308


When k2 < k20, k2m =
0.275
0.197
0.157
0.200
0.145


When d2 ≧ d20, d2m
∞
∞
∞
160.527
∞


(nm) =


When d2 < d20, d2m
119.641
139.482
181.534
134.106
186.758


(nm) =










1.2 < NA ≦ 1.3


135 < T ≦ 145











Case
14-06
14-07







n10
1.696
1.706



k10
0.058
0.052



d10 (nm)
213.482
276.472



n20
1.692
1.707



k20
0.169
0.168



d20 (nm)
262.678
254.823



When n1 ≧ n10, n1m =
1.748
1.771



When n1 < n10, n1m =
1.665
1.644



When k1 ≧ k10, k1m =
0.100
0.090



When k1 < k10, k1m =
0.028
0.024



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
188.144
184.314



When n2 ≧ n20, n2m =
1.933
1.854



When n2 < n20, n2m =
1.561
1.522



When k2 ≧ k20, k2m =
0.288
0.286



When k2 < k20, k2m =
0.109
0.100



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
191.540
174.816






















1.2 < NA ≦ 1.3


145 < T ≦ 155







16/21












Case
15-01
15-02
15-03
15-04
15-05





n10
1.919
1.893
1.882
1.694
1.694


k10
0.115
0.113
0.085
0.074
0.065


d10 (nm)
16.638
13.413
12.438
217.741
214.737


n20
1.785
1.697
1.715
1.683
1.687


k20
0.385
0.281
0.235
0.264
0.207


d20 (nm)
138.580
206.656
261.237
137.032
196.488


When n1 ≧ n10, n1m =
1.986
1.976
1.980
1.705
1.718


When n1 < n10, n1m =
1.892
1.851
1.826
1.676
1.666


When k1 ≧ k10, k1m =
0.151
0.174
0.165
0.099
0.100


When k1 < k10, k1m =
0.037
0.018
0.000
0.060
0.040


When d1 ≧ d10, d1m
20.946
18.588
18.692
227.547
∞


(nm) =


When d1 < d10, d1m
15.073
10.996
9.087
210.480
192.120


(nm) =


When n2 ≧ n20, n2m =
1.846
1.763
1.789
1.722
1.834


When n2 < n20, n2m =
1.665
1.571
1.591
1.652
1.629


When k2 ≧ k20, k2m =
0.451
0.339
0.301
0.337
0.312


When k2 < k20, k2m =
0.301
0.209
0.166
0.217
0.151


When d2 ≧ d20, d2m
∞
∞
∞
149.574
∞


(nm) =


When d2 < d20, d2m
113.921
135.398
177.745
128.876
178.069


(nm) =










1.2 < NA ≦ 1.3


145 < T ≦ 155











Case
15-06
15-07







n10
1.695
1.707



k10
0.059
0.053



d10 (nm)
213.710
276.548



n20
1.692
1.707



k20
0.173
0.174



d20 (nm)
253.675
246.168



When n1 ≧ n10, n1m =
1.747
1.770



When n1 < n10, n1m =
1.665
1.645



When k1 ≧ k10, k1m =
0.100
0.089



When k1 < k10, k1m =
0.029
0.025



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
189.864
185.926



When n2 ≧ n20, n2m =
1.910
1.858



When n2 < n20, n2m =
1.562
1.520



When k2 ≧ k20, k2m =
0.289
0.291



When k2 < k20, k2m =
0.109
0.103



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
189.584
169.414






















1.2 < NA ≦ 1.3


155 < T ≦ 165







17/21












Case
16-01
16-02
16-03
16-04
16-05





n10
1.937
1.898
1.890
1.694
1.694


k10
0.118
0.119
0.087
0.077
0.067


d10 (nm)
16.771
13.576
12.460
216.630
214.866


n20
1.806
1.695
1.718
1.679
1.684


k20
0.418
0.295
0.246
0.277
0.215


d20 (nm)
129.251
198.434
252.589
129.875
188.027


When n1 ≧ n10, n1m =
2.001
1.978
1.985
1.707
1.716


When n1 < n10, n1m =
1.914
1.859
1.836
1.685
1.666


When k1 ≧ k10, k1m =
0.148
0.176
0.164
0.101
0.100


When k1 < k10, k1m =
0.045
0.025
0.000
0.067
0.040


When d1 ≧ d10, d1m
20.691
18.424
18.356
225.238
231.093


(nm) =


When d1 < d10, d1m
15.556
11.376
9.363
212.673
192.697


(nm) =


When n2 ≧ n20, n2m =
1.861
1.756
1.791
1.715
1.840


When n2 < n20, n2m =
1.690
1.574
1.591
1.643
1.628


When k2 ≧ k20, k2m =
0.481
0.351
0.310
0.328
0.314


When k2 < k20, k2m =
0.336
0.225
0.176
0.223
0.151


When d2 ≧ d20, d2m
∞
∞
∞
139.199
∞


(nm) =


When d2 < d20, d2m
109.768
131.712
172.718
120.241
167.595


(nm) =










1.2 < NA ≦ 1.3


155 < T ≦ 165











Case
16-06
16-07







n10
1.695
1.707



k10
0.060
0.054



d10 (nm)
214.034
276.376



n20
1.692
1.707



k20
0.179
0.181



d20 (nm)
244.657
237.806



When n1 ≧ n10, n1m =
1.745
1.770



When n1 < n10, n1m =
1.666
1.653



When k1 ≧ k10, k1m =
0.101
0.089



When k1 < k10, k1m =
0.030
0.027



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
191.630
187.468



When n2 ≧ n20, n2m =
1.889
1.864



When n2 < n20, n2m =
1.562
1.515



When k2 ≧ k20, k2m =
0.290
0.295



When k2 < k20, k2m =
0.115
0.110



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
179.119
164.223






















1.2 < NA ≦ 1.3


165 < T ≦ 175







18/21












Case
17-01
17-02
17-03
17-04
17-05





n10
1.958
1.903
1.898
1.694
1.694


k10
0.128
0.127
0.090
0.080
0.068


d10 (nm)
15.815
13.420
12.296
215.821
215.165


n20
1.794
1.688
1.719
1.668
1.681


k20
0.439
0.307
0.254
0.290
0.224


d20 (nm)
123.830
190.984
244.231
122.663
179.093


When n1 ≧ n10, n1m =
2.020
1.981
1.991
1.707
1.716


When n1 < n10, n1m =
1.942
1.867
1.846
1.692
1.665


When k1 ≧ k10, k1m =
0.150
0.182
0.165
0.103
0.101


When k1 < k10, k1m =
0.058
0.033
0.000
0.077
0.041


When d1 ≧ d10, d1m
19.257
17.848
17.802
223.701
230.268


(nm) =


When d1 < d10, d1m
15.087
11.461
9.465
215.120
195.890


(nm) =


When n2 ≧ n20, n2m =
1.832
1.743
1.790
1.677
1.826


When n2 < n20, n2m =
1.680
1.570
1.590
1.625
1.625


When k2 ≧ k20, k2m =
0.483
0.357
0.316
0.321
0.315


When k2 < k20, k2m =
0.365
0.239
0.186
0.252
0.151


When d2 ≧ d20, d2m
∞
∞
∞
127.631
∞


(nm) =


When d2 < d20, d2m
111.992
128.672
166.465
109.461
158.121


(nm) =










1.2 < NA ≦ 1.3


165 < T ≦ 175











Case
17-06
17-07







n10
1.696
1.707



k10
0.061
0.056



d10 (nm)
214.210
275.996



n20
1.692
1.705



k20
0.185
0.187



d20 (nm)
235.479
229.352



When n1 ≧ n10, n1m =
1.744
1.770



When n1 < n10, n1m =
1.667
1.657



When k1 ≧ k10, k1m =
0.101
0.088



When k1 < k10, k1m =
0.031
0.030



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
193.216
188.863



When n2 ≧ n20, n2m =
1.887
1.872



When n2 < n20, n2m =
1.561
1.509



When k2 ≧ k20, k2m =
0.292
0.295



When k2 < k20, k2m =
0.120
0.115



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
161.210
156.975




















1.2 < NA ≦ 1.3


175 < T ≦ 185







19/21












Case
18-01
18-02
18-03
18-04
18-05















n10
1.907
1.904
1.694
1.696
21.704


k10
0.135
0.092
0.070
0.062
0.051


d10 (nm)
13.188
12.121
215.718
214.371
274.345


n20
1.679
1.720
1.679
1.692
1.687


k20
0.313
0.260
0.233
0.190
0.159


d20 (nm)
183.151
235.214
169.072
225.802
280.556


When n1 ≧ n10, n1m =
1.982
1.997
1.715
1.743
1.760


When n1 < n10, n1m =
1.873
1.854
1.666
1.668
1.658


When k1 ≧ k10, k1m =
0.188
0.166
0.102
0.102
0.090


When k1 < k10, k1m =
0.044
0.000
0.044
0.032
0.018


When d1 ≧ d10, d1m
17.244
17.308
229.740
∞
∞


(nm) =


When d1 < d10, d1m
11.395
9.486
201.461
194.630
174.558


(nm) =


When n2 ≧ n20, n2m =
1.730
1.790
1.771
1.836
1.900


When n2 < n20, n2m =
1.562
1.589
1.630
1.559
1.518


When k2 ≧ k20, k2m =
0.359
0.319
0.318
0.293
0.259


When k2 < k20, k2m =
0.249
0.193
0.159
0.124
0.097


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
128.127
156.903
151.088
157.464
192.992


(nm) =





















1.2 < NA ≦ 1.3


185 < T ≦ 195







20/21












Case
19-01
19-02
19-03
19-04
19-05





n10
1.908
1.906
1.889
1.693
1.696


k10
0.140
0.092
0.087
0.071
0.064


d10 (nm)
13.288
12.370
11.418
216.427
214.510


n20
1.676
1.726
1.707
1.681
1.692


k20
0.321
0.266
0.223
0.243
0.195


d20 (nm)
172.696
223.910
283.898
158.126
215.938


When n1 ≧ n10, n1m =
1.981
1.996
1.994
1.713
1.742


When n1 < n10, n1m =
1.875
1.857
1.834
1.670
1.669


When k1 ≧ k10, k1m =
0.190
0.163
0.168
0.103
0.102


When k1 < k10, k1m =
0.055
0.000
0.000
0.051
0.037


When d1 ≧ d10, d1m
17.148
17.446
17.407
228.093
∞


(nm) =


When d1 < d10, d1m
11.532
9.791
8.458
205.012
195.805


(nm) =


When n2 ≧ n20, n2m =
1.725
1.797
1.791
1.767
1.825


When n2 < n20, n2m =
1.558
1.592
1.590
1.647
1.558


When k2 ≧ k20, k2m =
0.365
0.327
0.286
0.323
0.294


When k2 < k20, k2m =
0.256
0.198
0.157
0.178
0.130


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
125.060
143.864
171.207
144.997
180.034


(nm) =










1.2 < NA ≦ 1.3


185 < T ≦ 195











Case
19-06
19-07







n10
1.696
1.704



k10
0.057
0.052



d10 (nm)
213.492
274.677



n20
1.691
1.687



k20
0.166
0.162



d20 (nm)
273.809
270.432



When n1 ≧ n10, n1m =
1.742
1.760



When n1 < n10, n1m =
1.666
1.659



When k1 ≧ k10, k1m =
0.097
0.090



When k1 < k10, k1m =
0.026
0.022



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
178.602
175.003



When n2 ≧ n20, n2m =
1.857
1.904



When n2 < n20, n2m =
1.570
1.518



When k2 ≧ k20, k2m =
0.281
0.262



When k2 < k20, k2m =
0.104
0.096



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
199.693
186.949






















1.2 < NA ≦ 1.3


195 < T ≦ 205







21/21












Case
20-01
20-02
20-03
20-04
20-05





n10
1.907
1.904
1.887
1.693
1.696


k10
0.139
0.091
0.088
0.073
0.065


d10 (nm)
13.915
13.010
11.752
216.656
214.259


n20
1.684
1.734
1.707
1.683
1.692


k20
0.334
0.275
0.227
0.253
0.201


d20 (nm)
160.500
212.141
273.737
148.279
206.980


When n1 ≧ n10, n1m =
1.978
1.992
1.990
1.700
1.743


When n1 < n10, n1m =
1.874
1.857
1.833
1.671
1.670


When k1 ≧ k10, k1m =
0.186
0.158
0.167
0.098
0.102


When k1 < k10, k1m =
0.059
0.000
0.000
0.062
0.044


When d1 ≧ d10, d1m
17.817
18.151
17.811
226.068
265.367


(nm) =


When d1 < d10, d1m
12.124
10.391
8.783
207.088
196.420


(nm) =


When n2 ≧ n20, n2m =
1.731
1.806
1.791
1.746
1.815


When n2 < n20, n2m =
1.564
1.602
1.588
1.669
1.556


When k2 ≧ k20, k2m =
0.381
0.338
0.291
0.321
0.294


When k2 < k20, k2m =
0.265
0.202
0.159
0.212
0.142


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
125.465
136.447
180.411
144.423
187.001


(nm) =










1.2 < NA ≦ 1.3


195 < T ≦ 205











Case
20-06
20-07







n10
1.696
1.704



k10
0.058
0.053



d10 (nm)
213.637
275.120



n20
1.690
1.687



k20
0.169
0.165



d20 (nm)
264.528
260.887



When n1 ≧ n10, n1m =
1.742
1.760



When n1 < n10, n1m =
1.666
1.661



When k1 ≧ k10, k1m =
0.097
0.090



When k1 < k10, k1m =
0.030
0.025



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
183.526
175.348



When n2 ≧ n20, n2m =
1.856
1.912



When n2 < n20, n2m =
1.571
1.519



When k2 ≧ k20, k2m =
0.282
0.268



When k2 < k20, k2m =
0.108
0.102



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
202.896
181.779










In accordance with a fifth embodiment of the invention, an antireflective film has a two-layer structure and is used in a process for manufacturing a semiconductor device by being provided between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, for exposure of the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.3<NA≦1.4. In accordance with the fifth embodiment of the invention, an exposure method used in a process for manufacturing a semiconductor device and includes providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below, and exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.3<NA≦1.4.
The antireflective film or the antireflective film used in the exposure method according to the fifth embodiment of the invention includes an upper layer having a complex refractive index N, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the following equations:

N1=n1−k1i 

N2=n2−k2i 

Assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm), when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the following relational expression:

{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1

However, a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20. In the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m=”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”; in the line of “When d1≧d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm)=”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm)=”, each value (unit: nm) in the right columns is “d20−d2m”.












1.3 < NA ≦ 1.4


2 ≦ T ≦ 15







1/20












Case
1-01
1-02
1-03
1-04
1-05





n10
2.047
1.887
1.871
1.868
1.862


k10
0.012
0.120
0.106
0.075
0.065


d10 (nm)
29.751
26.980
17.106
15.339
13.830


n20
6.274
1.973
1.713
1.738
1.730


k20
3.305
0.477
0.298
0.245
0.208


d20 (nm)
1.566
76.285
158.161
212.612
271.884


When n1 ≧ n10, n1m =
2.109
1.929
1.924
1.935
1.940


When n1 < n10, n1m =
1.990
1.877
1.852
1.835
1.823


When k1 ≧ k10, k1m =
0.055
0.138
0.136
0.123
0.124


When k1 < k10, k1m =
0.000
0.089
0.036
0.000
0.000


When d1 ≧ d10, d1m
32.767
31.708
21.551
20.868
20.183


(nm) =


When d1 < d10, d1m
27.509
26.309
15.640
12.771
10.913


(nm) =


When n2 ≧ n20, n2m =
6.594
2.028
1.750
1.789
1.793


When n2 < n20, n2m =
5.978
1.933
1.627
1.639
1.618


When k2 ≧ k20, k2m =
3.556
0.507
0.335
0.292
0.258


When k2 < k20, k2m =
3.013
0.403
0.242
0.188
0.152


When d2 ≧ d20, d2m
1.715
83.056
∞
∞
∞


(nm) =


When d2 < d20, d2m
1.418
75.266
136.202
175.723
191.206


(nm) =










1.3 < NA ≦ 1.4


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.691
1.692
1.711
1.704
1.705


k10
0.062
0.057
0.070
0.057
0.050


d10 (nm)
161.852
157.460
239.891
226.155
221.451


n20
1.688
1.697
7.420
1.689
1.695


k20
0.179
0.154
3.291
0.187
0.158


d20 (nm)
207.262
266.043
0.810
202.908
261.182


When n1 ≧ n10, n1m =
1.703
1.707
1.725
1.738
1.736


When n1 < n10, n1m =
1.685
1.664
1.704
1.690
1.688


When k1 ≧ k10, k1m =
0.080
0.084
0.082
0.082
0.079


When k1 < k10, k1m =
0.051
0.029
0.049
0.029
0.022


When d1 ≧ d10, d1m 
169.125
171.143
250.745
∞
∞


(nm) =


When d1 < d10, d1m
157.974
129.944
235.697
215.124
204.319


(nm) =


When n2 ≧ n20, n2m =
1.696
1.748
7.849
1.818
1.809


When n2 < n20, n2m =
1.666
1.665
7.185
1.613
1.611


When k2 ≧ k20, k2m =
0.202
0.195
3.465
0.264
0.246


When k2 < k20, k2m =
0.150
0.115
2.625
0.129
0.105


When d2 ≧ d20, d2m
213.501
∞
0.893
∞
∞


(nm) =


When d2 < d20, d2m
194.001
249.665
0.721
179.167
225.188


(nm) =



















1.3 < NA ≦ 1.4


2 ≦ T ≦ 15







2/20










Case
1-11














n10
1.695



k10
0.054



d10 (nm)
267.286



n20
1.705



k20
0.184



d20 (nm)
212.751



When n1 ≧ n10, n1m =
1.731



When n1 < n10, n1m =
1.655



When k1 ≧ k10, k1m =
0.080



When k1 < k10, k1m =
0.025



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
220.771



When n2 ≧ n20, n2m =
1.808



When n2 < n20, n2m =
1.623



When k2 ≧ k20, k2m =
0.237



When k2 < k20, k2m =
0.115



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
175.645






















1.3 < NA ≦ 1.4


15 < T ≦ 25







3/20












Case
2-01
2-02
2-03
2-04
2-05





n10
1.943
1.876
1.873
1.866
1.691


k10
0.121
0.112
0.080
0.068
0.064


d10 (nm)
34.905
17.699
15.588
14.042
161.844


n20
6.149
1.719
1.739
1.732
1.687


k20
4.965
0.321
0.258
0.217
0.188


d20 (nm)
1.046
148.502
203.950
262.757
198.716


When n1 ≧ n10, n1m =
1.997
1.925
1.936
1.942
1.700


When n1 < n10, n1m =
1.902
1.861
1.842
1.830
1.690


When k1 ≧ k10, k1m =
0.155
0.135
0.124
0.122
0.079


When k1 < k10, k1m =
0.064
0.044
0.004
0.000
0.061


When d1 ≧ d10, d1m
38.478
21.745
20.735
20.064
166.973


(nm) =


When d1 < d10, d1m
32.365
16.569
13.305
11.354
161.165


(nm) =


When n2 ≧ n20, n2m =
6.640
1.749
1.787
1.793
1.688


When n2 < n20, n2m =
5.695
1.636
1.643
1.623
1.668


When k2 ≧ k20, k2m =
5.267
0.354
0.304
0.266
0.197


When k2 < k20, k2m =
4.500
0.266
0.202
0.162
0.165


When d2 ≧ d20, d2m
1.189
∞
∞
∞
199.493


(nm) =


When d2 < d20, d2m
0.912
129.925
173.046
186.094
188.055


(nm) =










1.3 < NA ≦ 1.4


15 < T ≦ 25












Case
2-06
2-07
2-08
2-09
2-10





n10
1.692
1.706
1.711
1.704
1.695


k10
0.059
0.052
0.075
0.059
0.056


d10 (nm)
157.652
221.303
235.815
225.762
267.452


n20
1.696
1.695
6.235
1.687
1.705


k20
0.161
0.165
4.691
0.197
0.194


d20 (nm)
257.279
252.591
0.724
194.502
204.028


When n1 ≧ n10, n1m =
1.703
1.736
1.711
1.737
1.730


When n1 < n10, n1m =
1.667
1.690
1.709
1.692
1.658


When k1 ≧ k10, k1m =
0.082
0.079
0.079
0.082
0.080


When k1 < k10, k1m =
0.033
0.024
0.074
0.033
0.029


When d1 ≧ d10, d1m
165.499
∞
235.852
∞
∞


(nm) =


When d1 < d10, d1m
138.474
207.206
234.721
216.211
222.458


(nm) =


When n2 ≧ n20, n2m =
1.740
1.797
6.407
1.814
1.798


When n2 < n20, n2m =
1.670
1.616
6.233
1.613
1.629


When k2 ≧ k20, k2m =
0.196
0.249
4.693
0.270
0.240


When k2 < k20, k2m =
0.121
0.111
3.940
0.138
0.122


When d2 ≧ d20, d2m
∞
∞
0.732
∞
∞


(nm) =


When d2 < d20, d2m
244.077
220.690
0.720
173.495
171.776


(nm) =



















1.3 < NA ≦ 1.4


25 < T ≦ 35







4/20













Case
3-01
3-02
3-03
3-04
3-05
3-06
















n10
1.883
1.879
1.872
1.692
1.705
1.706


k10
0.119
0.084
0.069
0.061
0.061
0.054


d10 (nm)
18.157
15.746
14.214
157.790
225.478
221.123


n20
1.723
1.741
1.737
1.697
1.687
1.695


k20
0.349
0.274
0.228
0.168
0.209
0.173


d20 (nm)
139.788
195.542
253.893
248.784
186.105
244.149


When n1 ≧ n10, n1m =
1.927
1.939
1.945
1.699
1.735
1.735


When n1 < n10, n1m =
1.873
1.852
1.839
1.671
1.694
1.692


When k1 ≧ k10, k1m =
0.135
0.123
0.119
0.079
0.082
0.078


When k1 < k10, k1m =
0.055
0.011
0.000
0.039
0.038
0.026


When d1 ≧ d10, d1m (nm) =
21.683
20.446
19.836
161.921
270.295
∞


When d1 < d10, d1m (nm) =
17.423
13.775
11.786
145.560
217.505
209.346


When n2 ≧ n20, n2m =
1.744
1.786
1.794
1.735
1.754
1.781


When n2 < n20, n2m =
1.647
1.650
1.632
1.679
1.615
1.622


When k2 ≧ k20, k2m =
0.374
0.316
0.276
0.196
0.276
0.252


When k2 < k20, k2m =
0.295
0.218
0.173
0.130
0.149
0.118


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
124.317
167.810
181.193
239.270
167.329
214.946





















1.3 < NA ≦ 1.4


35 < T ≦ 45







5/20












Case
4-01
4-02
4-03
4-04
4-05





n10
1.890
1.886
1.877
1.692
1.705


k10
0.130
0.088
0.073
0.062
0.063


d10 (nm)
18.083
15.723
14.196
157.690
225.284


n20
1.714
1.743
1.736
1.697
1.687


k20
0.371
0.287
0.236
0.175
0.220


d20 (nm)
132.495
187.112
245.779
240.328
177.345


When n1 ≧ n10, n1m =
1.928
1.943
1.947
1.695
1.732


When n1 < n10, n1m =
1.886
1.862
1.846
1.674
1.696


When k1 ≧ k10, k1m =
0.137
0.123
0.120
0.075
0.081


When k1 < k10, k1m =
0.069
0.018
0.000
0.046
0.042


When d1 ≧ d10, d1m
21.026
19.960
19.411
159.493
266.580


(nm) =


When d1 < d10, d1m
17.768
14.046
12.019
148.447
218.746


(nm) =


When n2 ≧ n20, n2m =
1.723
1.784
1.789
1.731
1.745


When n2 < n20, n2m =
1.643
1.655
1.634
1.687
1.620


When k2 ≧ k20, k2m =
0.382
0.326
0.281
0.195
0.283


When k2 < k20, k2m =
0.323
0.234
0.182
0.141
0.159


When d2 ≧ d20, d2m
∞
∞
∞
273.632
∞


(nm) =


When d2 < d20, d2m
119.322
160.895
176.028
234.699
160.070


(nm) =










1.3 < NA ≦ 1.4


35 < T ≦ 45











Case
4-06
4-07







n10
1.706
1.695



k10
0.055
0.055



d10 (nm)
220.863
262.917



n20
1.695
1.705



k20
0.180
0.178



d20 (nm)
235.453
255.408



When n1 ≧ n10, n1m =
1.734
1.723



When n1 < n10, n1m =
1.693
1.660



When k1 ≧ k10, k1m =
0.078
0.082



When k1 < k10, k1m =
0.027
0.031



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
210.617
221.552



When n2 ≧ n20, n2m =
1.767
1.832



When n2 < n20, n2m =
1.630
1.613



When k2 ≧ k20, k2m =
0.252
0.241



When k2 < k20, k2m =
0.123
0.108



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
206.982
177.439






















1.3 < NA ≦ 1.4


45 < T ≦ 55







6/20












Case
5-01
5-02
5-03
5-04
5-05





n10
1.891
1.892
1.878
1.691
1.705


k10
0.144
0.091
0.079
0.064
0.064


d10 (nm)
17.530
15.545
14.050
157.168
225.395


n20
1.686
1.744
1.728
1.696
1.686


k20
0.376
0.296
0.240
0.179
0.227


d20 (nm)
126.586
178.253
238.151
231.953
167.881


When n1 ≧ n10, n1m =
1.925
1.947
1.947
1.692
1.729


When n1 < n10, n1m =
1.891
1.870
1.849
1.677
1.698


When k1 ≧ k10, k1m =
0.144
0.124
0.124
0.069
0.080


When k1 < k10, k1m =
0.087
0.024
0.000
0.054
0.044


When d1 ≧ d10, d1m
19.955
19.462
18.998
157.553
251.532


(nm) =


When d1 < d10, d1m
17.523
14.081
12.045
150.032
219.912


(nm) =


When n2 ≧ n20, n2m =
1.686
1.783
1.778
1.727
1.728


When n2 < n20, n2m =
1.619
1.656
1.625
1.693
1.628


When k2 ≧ k20, k2m =
0.377
0.330
0.281
0.190
0.292


When k2 < k20, k2m =
0.336
0.244
0.186
0.164
0.167


When d2 ≧ d20, d2m
127.104
∞
∞
253.769
∞


(nm) =


When d2 < d20, d2m
114.397
150.903
169.614
229.862
150.571


(nm) =










1.3 < NA ≦ 1.4


45 < T ≦ 55











Case
5-06
5-07







n10
1.706
1.697



k10
0.056
0.047



d10 (nm)
220.607
278.691



n20
1.694
1.700



k20
0.184
0.152



d20 (nm)
226.210
281.986



When n1 ≧ n10, n1m =
1.728
1.753



When n1 < n10, n1m =
1.694
1.654



When k1 ≧ k10, k1m =
0.077
0.078



When k1 < k10, k1m =
0.029
0.021



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
210.961
211.857



When n2 ≧ n20, n2m =
1.757
1.912



When n2 < n20, n2m =
1.639
1.611



When k2 ≧ k20, k2m =
0.250
0.220



When k2 < k20, k2m =
0.125
0.096



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
199.775
202.106




















1.3 < NA ≦ 1.4


55 < T ≦ 65







7/20













Case
6-01
6-02
6-03
6-04
6-05
6-06
















n10
1.896
1.875
1.705
1.705
1.708
1.697


k10
0.091
0.087
0.064
0.057
0.053
0.047


d10 (nm)
15.652
14.019
225.606
220.354
218.289
278.413


n20
1.752
1.715
1.687
1.694
1.707
1.701


k20
0.303
0.239
0.232
0.186
0.158
0.154


d20 (nm)
167.408
230.256
157.678
216.433
272.538
271.867


When n1 ≧ n10, n1m =
1.950
1.943
1.724
1.723
1.740
1.750


When n1 < n10, n1m =
1.875
1.846
1.699
1.693
1.693
1.656


When k1 ≧ k10, k1m =
0.122
0.132
0.079
0.077
0.077
0.078


When k1 < k10, k1m =
0.025
0.004
0.045
0.033
0.030
0.022


When d1 ≧ d10, d1m (nm) =
19.494
18.898
247.964
∞
∞
∞


When d1 < d10, d1m (nm) =
14.295
12.042
221.101
210.599
206.669
213.947


When n2 ≧ n20, n2m =
1.792
1.763
1.721
1.752
1.799
1.923


When n2 < n20, n2m =
1.662
1.612
1.638
1.648
1.579
1.614


When k2 ≧ k20, k2m =
0.337
0.279
0.301
0.247
0.230
0.223


When k2 < k20, k2m =
0.249
0.186
0.176
0.128
0.106
0.097


When d2 ≧ d20, d2m (nm) =
∞
∞
172.085
∞
∞
∞


When d2 < d20, d2m (nm) =
138.575
161.008
143.974
199.200
203.487
191.019





















1.3 < NA ≦ 1.4


65 < T ≦ 75







8/20












Case
7-01
7-02
7-03
7-04
7-05





n10
1.901
1.871
1.866
1.706
1.705


k10
0.088
0.093
0.067
0.065
0.057


d10 (nm)
16.388
14.267
13.172
225.317
220.112


n20
1.774
1.706
1.724
1.687
1.694


k20
0.318
0.241
0.206
0.238
0.188


d20 (nm)
154.194
221.319
275.098
147.740
206.685


When n1 ≧ n10, n1m =
1.955
1.937
1.947
1.721
1.721


When n1 < n10, n1m =
1.881
1.842
1.823
1.701
1.693


When k1 ≧ k10, k1m =
0.116
0.138
0.131
0.077
0.077


When k1 < k10, k1m =
0.024
0.011
0.000
0.045
0.035


When d1 ≧ d10, d1m
20.279
19.161
19.228
239.263
245.793


(nm) =


When d1 < d10, d1m
15.118
12.240
10.142
222.197
210.312


(nm) =


When n2 ≧ n20, n2m =
1.816
1.751
1.783
1.720
1.752


When n2 < n20, n2m =
1.683
1.603
1.616
1.644
1.651


When k2 ≧ k20, k2m =
0.355
0.280
0.254
0.305
0.246


When k2 < k20, k2m =
0.259
0.188
0.151
0.177
0.133


When d2 ≧ d20, d2m
∞
∞
∞
161.062
∞


(nm) =


When d2 < d20, d2m
132.898
152.054
192.936
136.808
191.952


(nm) =










1.3 < NA ≦ 1.4


65 < T ≦ 75











Case
7-06
7-07







n10
1.708
1.697



k10
0.053
0.047



d10 (nm)
218.342
278.070



n20
1.707
1.702



k20
0.161
0.156



d20 (nm)
262.805
262.294



When n1 ≧ n10, n1m =
1.740
1.735



When n1 < n10, n1m =
1.695
1.657



When k1 ≧ k10, k1m =
0.077
0.077



When k1 < k10, k1m =
0.032
0.024



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
208.328
215.902



When n2 ≧ n20, n2m =
1.805
1.806



When n2 < n20, n2m =
1.580
1.618



When k2 ≧ k20, k2m =
0.232
0.224



When k2 < k20, k2m =
0.108
0.097



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
195.570
182.960






















1.3 < NA ≦ 1.4


75 < T ≦ 85







9/20












Case
8-01
8-02
8-03
8-04
8-05





n10
1.908
1.871
1.869
1.706
1.705


k10
0.087
0.097
0.067
0.067
0.058


d10 (nm)
17.362
14.654
13.479
224.641
220.026


n20
1.802
1.704
1.729
1.684
1.694


k20
0.342
0.250
0.214
0.248
0.194


d20 (nm)
141.959
212.121
265.153
139.263
197.616


When n1 ≧ n10, n1m =
1.960
1.935
1.947
1.720
1.721


When n1 < n10, n1m =
1.891
1.843
1.828
1.704
1.694


When k1 ≧ k10, k1m =
0.111
0.140
0.128
0.074
0.078


When k1 < k10, k1m =
0.023
0.016
0.000
0.049
0.035


When d1 ≧ d10, d1m
21.165
19.437
19.380
236.042
243.446


(nm) =


When d1 < d10, d1m
16.261
12.685
10.599
223.100
210.844


(nm) =


When n2 ≧ n20, n2m =
1.843
1.746
1.787
1.711
1.754


When n2 < n20, n2m =
1.713
1.604
1.618
1.641
1.649


When k2 ≧ k20, k2m =
0.382
0.288
0.262
0.299
0.249


When k2 < k20, k2m =
0.279
0.196
0.159
0.184
0.134


When d2 ≧ d20, d2m
∞
∞
∞
151.104
∞


(nm) =


When d2 < d20, d2m
126.652
177.678
187.664
128.169
181.064


(nm) =










1.3 < NA ≦ 1.4


75 < T ≦ 85











Case
8-06
8-07







n10
1.708
1.697



k10
0.054
0.048



d10 (nm)
218.429
277.999



n20
1.707
1.702



k20
0.165
0.160



d20 (nm)
253.768
253.663



When n1 ≧ n10, n1m =
1.739
1.730



When n1 < n10, n1m =
1.697
1.656



When k1 ≧ k10, k1m =
0.076
0.076



When k1 < k10, k1m =
0.032
0.027



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
209.931
217.650



When n2 ≧ n20, n2m =
1.810
1.804



When n2 < n20, n2m =
1.580
1.625



When k2 ≧ k20, k2m =
0.235
0.225



When k2 < k20, k2m =
0.109
0.100



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
216.664
177.272




















1.3 < NA ≦ 1.4


85 < T ≦ 95







10/20













Case
9-01
9-02
9-03
9-04
9-05
9-06
















n10
1.918
1.876
1.874
1.706
1.709
1.697


k10
0.092
0.100
0.069
0.060
0.055
0.050


d10 (nm)
17.977
14.944
13.674
219.996
218.382
278.074


n20
1.822
1.706
1.733
1.694
1.707
1.701


k20
0.371
0.265
0.224
0.203
0.172
0.166


d20 (nm)
132.466
203.140
256.300
189.146
245.309
245.468


When n1 ≧ n10, n1m =
1.966
1.936
1.950
1.723
1.738
1.728


When n1 < n10, n1m =
1.905
1.851
1.836
1.696
1.699
1.655


When k1 ≧ k10, k1m =
0.109
0.138
0.126
0.078
0.075
0.075


When k1 < k10, k1m =
0.028
0.021
0.000
0.035
0.032
0.029


When d1 ≧ d10, d1m (nm) =
21.461
19.418
19.237
242.566
∞
∞


When d1 < d10, d1m (nm) =
17.167
13.206
11.040
212.120
211.373
219.101


When n2 ≧ n20, n2m =
1.855
1.745
1.789
1.754
1.811
1.805


When n2 < n20, n2m =
1.737
1.611
1.626
1.644
1.579
1.636


When k2 ≧ k20, k2m =
0.407
0.300
0.271
0.255
0.237
0.226


When k2 < k20, k2m =
0.308
0.211
0.169
0.143
0.115
0.106


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
121.537
173.052
183.002
168.954
213.072
172.052



















1.3 < NA ≦ 1.4


95 < T ≦ 105







11/20













Case
10-01
10-02
10-03
10-04
10-05
10-06
















n10
1.929
1.883
1.880
1.707
1.709
1.697


k10
0.101
0.103
0.071
0.062
0.057
0.047


d10 (nm)
17.864
14.973
13.709
219.774
218.071
275.083


n20
1.821
1.709
1.736
1.693
1.706
1.700


k20
0.398
0.279
0.234
0.214
0.179
0.148


d20 (nm)
125.532
194.479
247.823
180.753
237.020
295.680


When n1 ≧ n10, n1m =
1.973
1.940
1.953
1.724
1.737
1.768


When n1 < n10, n1m =
1.922
1.863
1.845
1.698
1.701
1.650


When k1 ≧ k10, k1m =
0.111
0.136
0.124
0.077
0.074
0.079


When k1 < k10, k1m =
0.042
0.027
0.000
0.035
0.034
0.023


When d1 ≧ d10, d1m (nm) =
20.839
19.023
18.857
241.722
∞
∞


When d1 < d10, d1m (nm) =
17.465
13.566
11.352
213.515
212.546
200.276


When n2 ≧ n20, n2m =
1.840
1.742
1.789
1.751
1.807
1.849


When n2 < n20, n2m =
1.743
1.619
1.632
1.642
1.577
1.604


When k2 ≧ k20, k2m =
0.418
0.310
0.278
0.260
0.236
0.227


When k2 < k20, k2m =
0.340
0.227
0.180
0.155
0.122
0.093


When d2 ≧ d20, d2m (nm) =
161.544
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
119.422
166.497
178.361
161.067
205.891
212.971



















1.3 < NA ≦ 1.4


105 < T ≦ 115







12/20












Case
11-01
11-02
11-03
11-04
11-05















n10
1.891
1.885
1.707
1.709
1.697


k10
0.108
0.074
0.064
0.058
0.048


d10 (nm)
14.702
13.594
219.485
217.678
275.043


n20
1.707
1.735
1.692
1.705
1.701


k20
0.289
0.241
0.223
0.184
0.152


d20 (nm)
186.368
239.426
171.867
228.411
286.426


When n1 ≧ n10, n1m =
1.944
1.955
1.723
1.736
1.767


When n1 < n10, n1m =
1.874
1.853
1.700
1.703
1.650


When k1 ≧ k10, k1m =
0.135
0.124
0.077
0.073
0.078


When k1 < k10, k1m =
0.035
0.000
0.037
0.036
0.023


When d1 ≧ d10, d1m
18.320
18.363
240.271
∞
∞


(nm) =


When d1 < d10, d1m
13.618
11.476
214.658
213.396
201.239


(nm) =


When n2 ≧ n20, n2m =
1.733
1.786
1.744
1.797
1.850


When n2 < n20, n2m =
1.620
1.632
1.646
1.574
1.606


When k2 ≧ k20, k2m =
0.314
0.282
0.261
0.232
0.229


When k2 < k20, k2m =
0.241
0.188
0.163
0.126
0.094


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
157.397
173.024
156.390
195.169
202.551


(nm) =





















1.3 < NA ≦ 1.4


115 < T ≦ 125







13/20












Case
12-01
12-02
12-03
12-04
12-05





n10
1.896
1.887
1.692
1.707
1.709


k10
0.113
0.078
0.059
0.065
0.059


d10 (nm)
14.435
13.577
153.772
219.581
217.561


n20
1.703
1.733
1.694
1.692
1.702


k20
0.295
0.244
0.154
0.231
0.188


d20 (nm)
177.615
230.253
284.837
161.904
219.131


When n1 ≧ n10, n1m =
1.947
1.955
1.718
1.720
1.728


When n1 < n10, n1m =
1.882
1.856
1.664
1.701
1.703


When k1 ≧ k10, k1m =
0.136
0.126
0.090
0.076
0.072


When k1 < k10, k1m =
0.044
0.000
0.044
0.041
0.040


When d1 ≧ d10, d1m
17.718
18.125
175.199
231.299
∞


(nm) =


When d1 < d10, d1m
13.578
11.595
128.388
215.799
214.049


(nm) =


When n2 ≧ n20, n2m =
1.725
1.783
1.772
1.738
1.784


When n2 < n20, n2m =
1.617
1.629
1.642
1.658
1.629


When k2 ≧ k20, k2m =
0.315
0.284
0.182
0.262
0.229


When k2 < k20, k2m =
0.249
0.192
0.119
0.174
0.128


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
145.196
165.335
240.440
152.266
193.496


(nm) =










1.3 < NA ≦ 1.4


115 < T ≦ 125











Case
12-06
12-07







n10
1.707
1.697



k10
0.053
0.048



d10 (nm)
216.484
274.812



n20
1.695
1.701



k20
0.157
0.154



d20 (nm)
278.062
276.656



When n1 ≧ n10, n1m =
1.748
1.768



When n1 < n10, n1m =
1.689
1.651



When k1 ≧ k10, k1m =
0.077
0.078



When k1 < k10, k1m =
0.030
0.024



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
199.849
201.932



When n2 ≧ n20, n2m =
1.761
1.850



When n2 < n20, n2m =
1.583
1.607



When k2 ≧ k20, k2m =
0.215
0.229



When k2 < k20, k2m =
0.104
0.098



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
212.463
192.106






















1.3 < NA ≦ 1.4


125 < T ≦ 135







14/20












Case
13-01
13-02
13-03
13-04
13-05





n10
1.898
1.885
1.868
1.707
1.708


k10
0.115
0.081
0.075
0.067
0.060


d10 (nm)
14.632
13.917
12.752
219.938
217.756


n20
1.705
1.732
1.713
1.695
1.701


k20
0.303
0.248
0.206
0.239
0.192


d20 (nm)
166.646
219.851
279.921
151.390
209.457


When n1 ≧ n10, n1m =
1.949
1.951
1.949
1.716
1.721


When n1 < n10, n1m =
1.886
1.855
1.830
1.703
1.704


When k1 ≧ k10, k1m =
0.135
0.127
0.135
0.075
0.072


When k1 < k10, k1m =
0.050
0.002
0.000
0.050
0.045


When d1 ≧ d10, d1m
17.809
18.468
18.469
226.140
∞


(nm) =


When d1 < d10, d1m
13.869
11.960
10.161
217.246
214.692


(nm) =


When n2 ≧ n20, n2m =
1.725
1.781
1.771
1.731
1.769


When n2 < n20, n2m =
1.618
1.628
1.611
1.678
1.659


When k2 ≧ k20, k2m =
0.322
0.288
0.250
0.263
0.228


When k2 < k20, k2m =
0.256
0.194
0.153
0.185
0.138


When d2 ≧ d20, d2m
∞
∞
∞
179.041
∞


(nm) =


When d2 < d20, d2m
136.370
153.796
194.427
147.510
199.403


(nm) =










1.3 < NA ≦ 1.4


125 < T ≦ 135











Case
13-06
13-07







n10
1.706
1.696



k10
0.054
0.049



d10 (nm)
217.065
274.075



n20
1.694
1.702



k20
0.160
0.157



d20 (nm)
268.021
267.366



When n1 ≧ n10, n1m =
1.746
1.770



When n1 < n10, n1m =
1.690
1.651



When k1 ≧ k10, k1m =
0.077
0.078



When k1 < k10, k1m =
0.033
0.026



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
202.380
202.716



When n2 ≧ n20, n2m =
1.761
1.853



When n2 < n20, n2m =
1.586
1.608



When k2 ≧ k20, k2m =
0.219
0.227



When k2 < k20, k2m =
0.106
0.099



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
208.129
186.947




















1.3 < NA ≦ 1.4


135 < T ≦ 145







15/20













Case
14-01
14-02
14-03
14-04
14-05
14-06
















n10
1.899
1.882
1.870
1.708
1.707
1.696


k10
0.115
0.083
0.074
0.062
0.055
0.050


d10 (nm)
15.367
14.477
13.063
217.887
217.378
273.384


n20
1.714
1.732
1.717
1.700
1.693
1.702


k20
0.318
0.256
0.212
0.197
0.164
0.160


d20 (nm)
155.141
209.893
269.637
200.272
258.646
258.714


When n1 ≧ n10, n1m =
1.949
1.947
1.949
1.716
1.744
1.741


When n1 < n10, n1m =
1.888
1.854
1.833
1.704
1.691
1.652


When k1 ≧ k10, k1m =
0.132
0.127
0.132
0.071
0.077
0.078


When k1 < k10, k1m =
0.051
0.006
0.000
0.050
0.036
0.028


When d1 ≧ d10, d1m (nm) =
18.581
19.085
18.767
∞
∞
∞


When d1 < d10, d1m (nm) =
14.660
12.539
10.533
215.374
204.778
209.881


When n2 ≧ n20, n2m =
1.733
1.780
1.774
1.754
1.760
1.859


When n2 < n20, n2m =
1.627
1.630
1.611
1.677
1.592
1.608


When k2 ≧ k20, k2m =
0.337
0.296
0.256
0.228
0.223
0.226


When k2 < k20, k2m =
0.266
0.200
0.157
0.152
0.109
0.098


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
131.038
171.650
189.575
195.166
202.001
178.700



















1.3 < NA ≦ 1.4


145 < T ≦ 155







16/20













Case
15-01
15-02
15-03
15-04
15-05
15-06
















n10
1.903
1.884
1.874
1.708
1.707
1.696


k10
0.118
0.087
0.075
0.063
0.056
0.051


d10 (nm)
16.130
14.896
13.357
217.693
217.044
273.493


n20
1.723
1.733
1.722
1.700
1.694
1.702


k20
0.340
0.268
0.221
0.205
0.169
0.165


d20 (nm)
145.164
201.113
260.240
191.744
250.083
250.180


When n1 ≧ n10, n1m =
1.950
1.946
1.951
1.714
1.742
1.738


When n1 < n10, n1m =
1.895
1.858
1.839
1.706
1.694
1.652


When k1 ≧ k10, k1m =
0.130
0.127
0.128
0.070
0.076
0.078


When k1 < k10, k1m =
0.053
0.010
0.000
0.053
0.038
0.031


When d1 ≧ d10, d1m (nm) =
19.240
19.361
18.857
222.035
∞
∞


When d1 < d10, d1m (nm) =
15.619
13.105
10.992
216.109
206.771
213.326


When n2 ≧ n20, n2m =
1.737
1.779
1.777
1.735
1.755
1.839


When n2 < n20, n2m =
1.641
1.636
1.612
1.682
1.595
1.609


When k2 ≧ k20, k2m =
0.356
0.307
0.265
0.225
0.223
0.227


When k2 < k20, k2m =
0.286
0.211
0.166
0.161
0.114
0.102


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
126.286
170.199
185.156
187.971
215.684
171.738



















1.3 < NA ≦ 1.4


155 < T ≦ 165







17/20













Case
16-01
16-02
16-03
16-04
16-05
16-06
















n10
1.913
1.891
1.879
1.709
1.708
1.696


k10
0.125
0.091
0.077
0.064
0.057
0.052


d10 (nm)
16.406
14.954
13.440
217.197
216.333
274.035


n20
1.727
1.734
1.724
1.700
1.694
1.700


k20
0.366
0.282
0.231
0.214
0.175
0.171


d20 (nm)
136.777
193.024
251.802
183.446
241.739
241.498


When n1 ≧ n10, n1m =
1.955
1.950
1.953
1.714
1.742
1.735


When n1 < n10, n1m =
1.910
1.868
1.847
1.708
1.697
1.651


When k1 ≧ k10, k1m =
0.129
0.127
0.127
0.066
0.075
0.077


When k1 < k10, k1m =
0.064
0.016
0.000
0.055
0.039
0.034


When d1 ≧ d10, d1m (nm) =
19.185
19.061
18.574
220.596
∞
∞


When d1 < d10, d1m (nm) =
16.268
13.452
11.329
216.874
208.223
215.451


When n2 ≧ n20, n2m =
1.731
1.774
1.776
1.707
1.748
1.840


When n2 < n20, n2m =
1.651
1.642
1.618
1.678
1.595
1.612


When k2 ≧ k20, k2m =
0.371
0.317
0.273
0.218
0.220
0.229


When k2 < k20, k2m =
0.314
0.227
0.177
0.165
0.120
0.108


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
121.662
164.818
180.821
179.468
209.260
166.208





















1.3 < NA ≦ 1.4


165 < T ≦ 175







18/20











Case
17-01
17-02
17-03
17-04





n10
1.900
1.885
1.708
1.697


k10
0.097
0.082
0.058
0.048


d10 (nm)
14.674
13.311
215.615
273.453


n20
1.732
1.722
1.694
1.699


k20
0.294
0.239
0.180
0.151


d20 (nm)
185.336
243.911
233.152
289.720


When n1 ≧ n10, n1m =
1.955
1.956
1.741
1.736


When n1 < n10, n1m =
1.881
1.856
1.699
1.650


When k1 ≧ k10, k1m =
0.126
0.128
0.074
0.080


When k1 < k10, k1m =
0.023
0.000
0.039
0.020


When d1 ≧ d10, d1m (nm) =
18.346
18.029
∞
∞


When d1 < d10, d1m (nm) =
13.519
11.467
209.091
211.222


When n2 ≧ n20, n2m =
1.767
1.769
1.740
1.868


When n2 < n20, n2m =
1.645
1.618
1.591
1.614


When k2 ≧ k20, k2m =
0.322
0.277
0.217
0.224


When k2 < k20, k2m =
0.243
0.187
0.126
0.094


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
156.774
176.585
198.961
204.980










1.3 < NA ≦ 1.4


175 < T ≦ 185












Case
18-01
18-02
18-03
18-04
18-05





n10
1.908
1.888
1.708
1.709
1.697


k10
0.102
0.088
0.059
0.054
0.049


d10 (nm)
14.316
13.163
215.377
215.137
273.522


n20
1.730
1.716
1.693
1.702
1.700


k20
0.303
0.243
0.185
0.158
0.154


d20 (nm)
177.238
235.819
223.802
279.418
279.960


When n1 ≧ n10, n1m =
1.960
1.956
1.740
1.745
1.734


When n1 < n10, n1m =
1.893
1.861
1.700
1.696
1.657


When k1 ≧ k10, k1m =
0.126
0.131
0.073
0.075
0.079


When k1 < k10, k1m =
0.031
0.002
0.041
0.028
0.020


When d1 ≧ d10, d1m
17.569
17.540
∞
∞
∞


(nm) =


When d1 < d10, d1m
13.467
11.504
209.546
205.939
213.387


(nm) =


When n2 ≧ n20, n2m =
1.759
1.759
1.736
1.790
1.874


When n2 < n20, n2m =
1.644
1.611
1.587
1.604
1.617


When k2 ≧ k20, k2m =
0.325
0.278
0.217
0.211
0.226


When k2 < k20, k2m =
0.256
0.193
0.129
0.105
0.095


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
143.259
171.381
185.714
201.921
193.505


(nm) =





















1.3 < NA ≦ 1.4


185 < T ≦ 195







19/20












Case
19-01
19-02
19-03
19-04
19-05





n10
1.914
1.886
1.873
1.692
1.708


k10
0.104
0.093
0.070
0.060
0.060


d10 (nm)
14.390
13.299
12.581
152.854
215.913


n20
1.735
1.710
1.721
1.693
1.692


k20
0.314
0.247
0.208
0.157
0.189


d20 (nm)
166.400
226.131
280.628
278.359
213.567


When n1 ≧ n10, n1m =
1.964
1.952
1.955
1.709
1.739


When n1 < n10, n1m =
1.903
1.860
1.833
1.664
1.699


When k1 ≧ k10, k1m =
0.123
0.135
0.133
0.092
0.074


When k1 < k10, k1m =
0.040
0.012
0.000
0.042
0.044


When d1 ≧ d10, d1m
17.353
17.539
18.087
163.046
∞


(nm) =


When d1 < d10, d1m
13.759
11.668
9.947
129.659
210.046


(nm) =


When n2 ≧ n20, n2m =
1.759
1.750
1.778
1.784
1.739


When n2 < n20, n2m =
1.648
1.604
1.614
1.659
1.586


When k2 ≧ k20, k2m =
0.331
0.280
0.252
0.196
0.222


When k2 < k20, k2m =
0.267
0.196
0.156
0.120
0.129


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
144.756
162.922
193.262
243.485
177.669


(nm) =










1.3 < NA ≦ 1.4


185 < T ≦ 195











Case
19-06
19-07







n10
1.708
1.697



k10
0.054
0.050



d10 (nm)
215.905
273.350



n20
1.701
1.701



k20
0.161
0.157



d20 (nm)
269.362
270.178



When n1 ≧ n10, n1m =
1.744
1.732



When n1 < n10, n1m =
1.697
1.658



When k1 ≧ k10, k1m =
0.075
0.078



When k1 < k10, k1m =
0.029
0.021



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
207.633
215.326



When n2 ≧ n20, n2m =
1.795
1.877



When n2 < n20, n2m =
1.605
1.619



When k2 ≧ k20, k2m =
0.216
0.228



When k2 < k20, k2m =
0.105
0.098



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
205.481
189.945




















1.3 < NA ≦ 1.4


195 < T ≦ 205







20/20













Case
20-01
20-02
20-03
20-04
20-05
20-06
















n10
1.918
1.883
1.874
1.707
1.708
1.697


k10
0.103
0.095
0.068
0.061
0.055
0.050


d10 (nm)
15.177
13.742
12.955
216.749
216.874
272.522


n20
1.753
1.708
1.728
1.693
1.699
1.701


k20
0.331
0.252
0.214
0.194
0.165
0.160


d20 (nm)
153.467
215.835
269.400
203.628
259.716
261.468


When n1 ≧ n10, n1m =
1.966
1.948
1.955
1.739
1.743
1.731


When n1 < n10, n1m =
1.909
1.857
1.835
1.699
1.698
1.652


When k1 ≧ k10, k1m =
0.117
0.137
0.128
0.075
0.075
0.078


When k1 < k10, k1m =
0.043
0.016
0.000
0.048
0.030
0.022


When d1 ≧ d10, d1m (nm) =
18.089
18.051
18.523
256.743
∞
∞


When d1 < d10, d1m (nm) =
14.663
12.041
10.348
210.937
209.294
217.122


When n2 ≧ n20, n2m =
1.773
1.748
1.785
1.744
1.800
1.874


When n2 < n20, n2m =
1.665
1.604
1.616
1.589
1.608
1.620


When k2 ≧ k20, k2m =
0.348
0.285
0.259
0.230
0.223
0.227


When k2 < k20, k2m =
0.278
0.199
0.159
0.145
0.109
0.100


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
140.260
150.984
188.160
180.549
200.943
184.530









The exposure method according to any one of the first to fifth embodiments of the invention is applied to, for example, submicron patterning in a semiconductor device. Specifically, the exposure method includes the steps of forming the antireflective film according to any one of the embodiments of the invention on a silicon oxide film formed on a surface of the silicon semiconductor substrate, applying a resist layer having a sensitive function on the antireflective film, selectively exposing the resist layer to exposure light (ultraviolet light), and developing the resist layer to form a predetermined resist pattern.
In the antireflective film or the exposure method according to any one of the first to fifth embodiments of the invention (may be simply generically named “the invention” hereinafter), the exposure light (ultraviolet light) has a wavelength of 190 nm to 195 nm and preferably 192 nm to 194 nm. More specifically, an ArF excimer laser at a wavelength of 193 nm is more preferably used as an exposure light source.
Furthermore, the relations d1≦250 and d2≦250 are satisfied. In other words, the thicknesses of the upper and lower layers of the antireflective film preferably are smaller than 250 nm. When the thickness of the upper layer or the lower layer exceeds 250 nm, in the step of etching the silicon semiconductor substrate using the resist layer as an etching mask after the exposure of the resist layer to the exposure light and the development thereof, a so-called processing conversion difference (referred to as a “dimensional conversion amount” or “dimensional shift”) which represents a difference between the resist pattern dimensions of the resist layer and the actual etching dimensions of the silicon semiconductor substrate is excessively increased, thereby failing to obtain a pattern having a desired shape or size on the silicon semiconductor substrate.
In addition, the refractive index of the resist layer is preferably 1.60 to 1.80. In the use of the resist layer composed of a resist material having a refractive index outside this range, even when the antireflective film satisfies any one of the above-described conditions of the combination (n1, k1, d1, n2, k2, d2), it is difficult to control the reflectance at the interface between the resist layer and the silicon oxide film formed on a surface of the silicon semiconductor substrate to 0.4% or less over the entire region from the incidence angle (maximum incidence angle θin-max) of exposure light corresponding to a corresponding numerical aperture to vertical incidence (minimum incidence angle θin-min, specifically 0°), thereby failing to obtain an excellent resist pattern.
Furthermore, the space between the resist layer and the exposure system is preferably filled with a medium having a refractive index of 1.44±0.02. Namely, the medium having a refractive index of 1.44±0.02 is preferably used as an immersion liquid, and water is more preferably used as the medium. When the refractive index greatly deviates from this value, even if the antireflective index satisfies any one of the conditions of the combination (n1, k1, d1, n2, k2, d2), it is difficult to control the reflectance at the interface between the resist layer and the silicon oxide film formed on a surface of the silicon semiconductor substrate to 0.4% or less over the entire region from the incidence angle (maximum incidence angle θin-max) of exposure light corresponding to the corresponding numerical aperture to vertical incidence (minimum incidence angle θin-min, specifically 0°), thereby failing to obtain an excellent resist pattern.
Furthermore, in the exposure method according to any one of the first to fifth embodiments of the invention, a topcoat layer is preferably formed on the resist layer (specifically, on the upper layer). Without the topcoat layer, it may be impossible to suppress the occurrence of an interaction between the resist layer and the immersion liquid (for example, the phenomenon of producing defects in the resist layer due to contact between the resist layer and the immersion liquid), thereby failing to obtain a desirable resist pattern. The topcoat layer may be composed of a material, such as an organic or inorganic material, e.g., polyvinyl alcohol, amorphous fluoropolymer, or NaCl.
In the present invention, the entire region from the incidence angle (maximum incidence angle θin-max) of exposure light corresponding to a corresponding numerical aperture to vertical incidence (minimum incidence angle θin-min, specifically 0°) may be referred to as the “entire incidence angle region corresponding to the numerical aperture NA of the corresponding exposure system” or simply referred to as the “entire incidence angle region”.
The thickness of the resist layer is preferably 2 times to 5 times as large as the minimum size of the resist pattern to be formed. When the thickness of the resist layer is less than 2 times as large as the minimum size of the resist pattern, it may be possible to pattern the resist layer to a predetermined pattern, but the silicon semiconductor substrate is not satisfactorily etched after patterning of the resist layer. In addition, the number of defects in the resist layer may be increased. On the other hand, when the thickness of the resist layer exceeds 5 times as large as the minimum size of the resist pattern, the patterned resist layer may be broken, thereby failing to satisfactorily pattern the silicon semiconductor substrate.
As the material constituting the upper and lower layers of the antireflective film, any material satisfying any one of the conditions of the combination (n1, k1, d1, n2, k2, d2) may be used. Examples of the material constituting the upper and lower layers of the antireflective film include polymer materials, inorganic oxide materials, metal materials, and hybrid materials thereof. Specific examples of the material include polyimide, SiCH films, SiCHN films, SiCOH films, epoxy thermosetting resins, acrylic thermosetting resins, epoxy ultraviolet curable resins, and acrylic ultraviolet curable resins.
In order to improve the adhesion between the antireflective film and the resist layer formed on the antireflective film, the surface of the upper layer constituting the antireflective film may be subjected to surface medication treatment such as silane coupling treatment or the like.
In the use of a single-layer antireflective film, even when the thickness and complex refractive index are changed to any values, it may be generally impossible to control the reflectance to 0.4% or less over the entire incidence angle region corresponding to the numerical aperture NA of the corresponding exposure system. When the antireflective film has an excessively large thickness, the problem of a processing conversion difference occurs in the step of etching the silicon semiconductor substrate after exposure of the resist layer to the exposure light and the development thereof.
On the other hand, in the present invention, the two-layer structure antireflective film having a thickness and complex refractive index in the respective predetermined ranges is formed between the resist and the silicon oxide film formed on a surface of the silicon semiconductor substrate. Therefore, it may be possible to control the reflectance to 0.4% or less over the entire incidence angle region corresponding to the numerical aperture NA of the corresponding exposure system and obtain a resist pattern having a more excellent shape, thereby permitting more submicron processing. In other words, when the numerical aperture NA of the exposure system is each of 0.93≦NA≦1.0, 1.0<NA≦1.1, 1.1<NA≦1.2, 1.2<NA≦1.3, and 1.3<NA≦1.4, by using the two-layer structure antireflective film satisfying the above-described conditions of the thickness and the complex refractive index, it may be possible to control the reflectance to 0.4% or less over the entire region from the incidence angle of exposure light corresponding to the corresponding numerical aperture NA to vertical incidence, thereby obtaining an excellent resist pattern and minimizing the processing conversion difference.



BRIEF DESCRIPTION OF THE DRAWINGS
FIGURE is a graph showing the result of computation of the reflectance dependence of variation in the diameter of contact holes.



DESCRIPTION OF THE PREFERRED EMBODIMENTS
Although embodiments of the present invention will be described with reference to the drawings, description will be first made of the reasons why the reflectance is 0.4% or less over the entire incidence angle region corresponding to the numerical aperture NA of a corresponding exposure system (the entire region from the incidence angle of exposure light corresponding to the numerical aperture of a corresponding exposure system to vertical incidence) according to the embodiments of the invention.
First, a simulation of optimizing the complex refractive indexes N1 and N2 of upper and lower layer of an antireflective film was carried out for minimizing the reflectance over the region from the incidence angle (maximum incidence angle θin-max) of most oblique incidence corresponding to a numerical aperture NA to vertical incidence (minimum incidence angle θin-min), i.e., the entire incidence angle region. In this simulation, the thicknesses d1 and d2 of the upper and lower layer of the antireflective film were changed from 10 nm to 200 nm in 10 nm increments, and the simulation was carried out in each combination of the thicknesses d1 and d2 using a silicon oxide film having a thickness of 2 nm to 205 nm. Furthermore, the numerical aperture NA of an exposure system was set to each of 0.93≦NA≦1.0 (specifically, 1.0), 1.0<NA≦1.1 (specifically, 1.1), 1.1<NA≦1.2 (specifically, 1.2), 1.2<NA≦1.3 (specifically, 1.3), and 1.3<NA≦1.4 (specifically, 1.4).
In this computation, the reflectance of the two-layer antireflective film was calculated by a calculation method for the Fresnel coefficient of each layer (refer to “Basic Theory of Optical Thin Film” written by Mitsunobu Kobiyama, 2003, issued by Optronics Inc.). The complex refractive indexes of the upper and lower layers were optimized by the Fletcher-Reeves optimization method (refer to “Nonlinear Optimization Problems” written by J. Kowalik, M. R. Osborn, translated by Yoshiyuki Yamamoto and Takeo Koyama, 1970, issued by Baifukan).
In the optimization, when the numerical aperture NA was 1.0, the entire incident angle region was divided into 20 equal parts; when the numerical aperture NA was 1.1, the entire incidence angle region was divided into 22 equal parts; when the numerical aperture NA was 1.2, the entire incidence angle region was divided into 24 equal parts; when the numerical aperture NA was 1.3, the entire incidence angle region was divided into 26 equal parts; and when the numerical aperture NA was 1.4, the entire incidence angle region was divided into 28 equal parts. The reflectance at each incidence angle was calculated, and the square sum of the reflectances at the incidence angles was minimized.
In this way, the numerical aperture NA of the exposure system was set to each of 1.0, 1.1, 1.2, 1.3, and 1.4, and the thicknesses d1 and d2 of the upper and lower layers were changed from 10 nm to 250 nm in 10 nm increments. In each of the cases, the complex refractive indexes of the upper and lower layers were optimized by the above-described method to obtain the optimum complex refractive indexes N1 and N2 of the upper and lower layers.
The reason why computation was not carried out for a thickness above 250 nm was that with a thickness over this value, a processing conversion difference in the etching step is increased, thereby failing to satisfactorily process the silicon semiconductor substrate.
Then, in each of the cases in which the numerical aperture NA of the exposure system was set to each of 1.0, 1.1, 1.2, 1.3, and 1.4, and the thicknesses d1 and d2 of the upper and lower layers were changed from 10 nm to 250 nm in 10 nm increments, the thickness conditions for minimizing the square sum of the reflectances, which was an evaluation function for optimization after the optimization of the complex refractive indexes of the upper and lower layers, were determined on the basis of the results of the above-described computation.
Each of the thicknesses d1 and d2 of the upper and lower layers was further finely divided on the basis of the thickness conditions, and the most preferable complex refractive indexes of the upper and lower layers corresponding to the thickness conditions were determined in detail.
As a result, the most preferable combinations of complex refractive indexes and thicknesses were obtained. Namely, assuming that the complex refractive index N1 of the upper layer (disposed far from the surface of the silicon semiconductor substrate having the silicon oxide film formed on the surface thereof) in the two-layer antireflective film, and the complex refractive index N2 of the lower layer (disposed nearer to the surface of the silicon semiconductor substrate having the silicon oxide film formed on the surface thereof) are defined as follows:

N1=n10−k10i 

N2=n20−k20i 

and assuming that d10 is the thickness (unit: nm) of the upper layer, and d20 is the thickness (unit: nm) of the lower layer, the more preferred combinations of [n10, n20, k10, k20, d10, d20] are shown in Tables 1-A to 1-T (numerical aperture NA: 0.93≦NA≦1.0), Tables 2-A to 2-T (numerical aperture NA: 1.0<NA≦1.1), Tables 3-A to 3-T (numerical aperture NA: 1.1<NA≦1.2), Tables 4-A to 4-T (numerical aperture NA: 1.2<NA≦1.3), and Tables 5-A to 5-T (numerical aperture NA: 1.3<NA≦1.4). In other words, with these combinations, the minimum reflectance is achieved.

In Case A-01 to Case A-15 of Table 1-A or Table 11-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-22 of Table 1-B or Table 11-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-18 of Table 1-C or Table 11-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-20 of Table 1-D or Table 11-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-17 of Table 1-E or Table 11-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-17 of Table 1-F or Table 11-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-16 of Table 1-G or Table 11-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-16 of Table 1-H or Table 11-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-23 of Table 1-I or Table 11-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-15 of Table 1-J or Table 11-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-13 of Table 1-K or Table 11-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-12 of Table 1-L or Table 11-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-12 of Table 1-M or Table 11-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-12 of Table 1-N or Table 11-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-13 of Table 1-O or Table 11-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-14 of Table 1-P or Table 11-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-13 of Table 1-Q or Table 11-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-13 of Table 1-R or Table 11-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-15 of Table 1-S or Table 11-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-13 of Table 1-T or Table 11-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
In Case A-01 to Case A-24 of Table 2-A or Table 12-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-22 of Table 2-B or Table 12-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-16 of Table 2-C or Table 12-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-14 of Table 2-D or Table 12-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-14 of Table 2-E or Table 12-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-16 of Table 2-F or Table 12-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-16 of Table 2-G or Table 12-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-17 of Table 2-H or Table 12-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-15 of Table 2-I or Table 12-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-13 of Table 2-J or Table 12-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-12 of Table 2-K or Table 12-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-13 of Table 2-L or Table 12-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-11 of Table 2-M or Table 12-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-12 of Table 2-N or Table 12-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-12 of Table 2-O or Table 12-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-12 of Table 2-P or Table 12-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-12 of Table 2-Q or Table 12-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-10 of Table 2-R or Table 12-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-13 of Table 2-S or Table 12-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-12 of Table 2-T or Table 12-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
In Case A-01 to Case A-19 of Table 3-A or Table 13-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-17 of Table 3-B or Table 13-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-14 of Table 3-C or Table 13-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-13 of Table 3-D or Table 13-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-13 of Table 3-E or Table 13-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-12 of Table 3-F or Table 13-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-13 of Table 3-G or Table 13-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-15 of Table 3-H or Table 13-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-13 of Table 3-I or Table 13-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-12 of Table 3-J or Table 13-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-09 of Table 3-K or Table 13-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-10 of Table 3-L or Table 13-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-09 of Table 3-M or Table 13-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-10 of Table 3-N or Table 13-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-09 of Table 3-O or Table 13-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-09 of Table 3-P or Table 13-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-09 of Table 3-Q or Table 13-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-08 of Table 3-R or Table 13-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-10 of Table 3-S or Table 13-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-11 of Table 3-T or Table 13-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
In Case A-01 to Case A-13 of Table 4-A or Table 14-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-10 of Table 4-B or Table 14-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-08 of Table 4-C or Table 14-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-09 of Table 4-D or Table 14-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-08 of Table 4-E or Table 14-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-08 of Table 4-F or Table 14-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-08 of Table 4-G or Table 14-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-07 of Table 4-H or Table 14-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-07 of Table 4-I or Table 14-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-06 of Table 4-J or Table 14-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-07 of Table 4-K or Table 14-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-08 of Table 4-L or Table 14-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-07 of Table 4-M or Table 14-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-07 of Table 4-N or Table 14-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-07 of Table 4-O or Table 14-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-07 of Table 4-P or Table 14-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-07 of Table 4-Q or Table 14-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-05 of Table 4-R or Table 14-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-07 of Table 4-S or Table 14-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-07 of Table 4-T or Table 14-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
In Case A-01 to Case A-11 of Table 5-A or Table 15-A which will be described below, each value was obtained with the silicon oxide film having a thickness of 2 nm to 15 nm. In Case B-01 to Case B-10 of Table 5-B or Table 15-B which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 15 nm to 25 nm. In Case C-01 to Case C-06 of Table 5-C or Table 15-C which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 25 nm to 35 nm. In Case D-01 to Case D-07 of Table 5-D or Table 15-D which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 35 nm to 45 nm. In Case E-01 to Case E-07 of Table 5-E or Table 15-E which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 45 nm to 55 nm. In Case F-01 to Case F-06 of Table 5-F or Table 15-F which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 55 nm to 65 nm. In Case G-01 to Case G-07 of Table 5-G or Table 15-G which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 65 nm to 75 nm. In Case H-01 to Case H-07 of Table 5-H or Table 15-H which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 75 nm to 85 nm. In Case I-01 to Case I-06 of Table 5-I or Table 15-I which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 85 nm to 95 nm. In Case J-01 to Case J-06 of Table 5-J or Table 15-J which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 95 nm to 105 nm. In Case K-01 to Case K-05 of Table 5-K or Table 15-K which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 105 nm to 115 nm. In Case L-01 to Case L-07 of Table 5-L or Table 15-L which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 115 nm to 125 nm. In Case M-01 to Case M-07 of Table 5-M or Table 15-M which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 125 nm to 135 nm. In Case N-01 to Case N-06 of Table 5-N or Table 15-N which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 135 nm to 145 nm. In Case O-01 to Case O-06 of Table 5-O or Table 15-O which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 145 nm to 155 nm. In Case P-01 to Case P-06 of Table 5-P or Table 15-P which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 155 nm to 165 nm. In Case Q-01 to Case Q-04 of Table 5-Q or Table 15-Q which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 165 nm to 175 nm. In Case R-01 to Case R-05 of Table 5-R or Table 15-R which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 175 nm to 185 nm. In Case S-01 to Case S-07 of Table 5-S or Table 15-S which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 185 nm to 195 nm. In Case T-01 to Case T-06 of Table 5-T or Table 15-T which will be described below, each value was obtained with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
In other words, under the above-mentioned conditions, when the numerical aperture NA is 0.93≦NA≦1.0, the minimum reflectance can be obtained at 15 points (15 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 22 points (22 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 18 points (18 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 20 points (20 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 17 points (17 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 17 points (17 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 16 points (16 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 16 points (15 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 23 points (23 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 15 points (15 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 14 points (14 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 15 points (15 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
Furthermore, under the above-mentioned conditions, when the numerical aperture NA is 1.0<NA≦1.1, the minimum reflectance can be obtained at 24 points (24 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 22 points (22 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 16 points (16 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 14 points (14 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 14 points (14 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 16 points (16 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 16 points (16 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 17 points (17 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 15 points (15 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 11 points (11 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
Furthermore, under the above-mentioned conditions, when the numerical aperture NA is 1.1<NA≦1.2, the minimum reflectance can be obtained at 19 points (19 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 17 points (17 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 14 points (14 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 15 points (15 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 12 points (12 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 11 points (11 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
In addition, under the above-mentioned conditions, when the numerical aperture NA is 1.2<NA≦1.3, the minimum reflectance can be obtained at 13 points (13 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 9 points (9 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 8 points (8 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 5 points (5 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.
Furthermore, under the above-mentioned conditions, when the numerical aperture NA is 1.3<NA≦1.4, the minimum reflectance can be obtained at 11 points (11 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of 2 nm to 15 nm; the minimum reflectance can be obtained at 10 points (10 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 15 nm to 25 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 25 nm to 35 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 35 nm to 45 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 45 nm to 55 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 55 nm to 65 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 65 nm to 75 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 75 nm to 85 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 85 nm to 95 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 95 nm to 105 nm; the minimum reflectance can be obtained at 5 points (5 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 105 nm to 115 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 115 nm to 125 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 125 nm to 135 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 135 nm to 145 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 145 nm to 155 nm; the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 155 nm to 165 nm; the minimum reflectance can be obtained at 4 points (4 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 165 nm to 175 nm; the minimum reflectance can be obtained at 5 points (5 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 175 nm to 185 nm; the minimum reflectance can be obtained at 7 points (7 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 185 nm to 195 nm; and the minimum reflectance can be obtained at 6 points (6 combinations of [n10, n20, k10, k20, d10, d20]) with the silicon oxide film having a thickness of more than 195 nm to 205 nm.













TABLE 1-A





Case
n10
k10
d10
n20
k20
d20





















A-01
2.0730313
0.1156327
23.933
2.6749484
1.5695754
9.886


A-02
1.8546637
0.1676093
29.838
2.1886012
0.6118019
59.764


A-03
1.8612247
0.1278895
20.208
1.8193379
0.4029416
139.994


A-04
1.8595613
0.0953387
19.978
1.8569207
0.3273808
190.296


A-05
1.7706199
0.0916054
91.022
1.9614270
0.4555299
69.218


A-06
1.7659509
0.0861113
89.673
1.8683083
0.3142437
129.384


A-07
1.7540284
0.0810034
89.258
1.7976000
0.2440877
193.603


A-08
1.7206295
0.0765846
163.688
2.0072987
0.9099501
15.109


A-09
1.7312076
0.0743303
158.443
1.9328063
0.4029485
69.389


A-10
1.7317652
0.0746087
156.047
1.8225538
0.2736014
132.296


A-11
1.7235310
0.0712769
155.759
1.7500411
0.2147794
197.972


A-12
1.7093992
0.0595462
237.275
5.0249130
2.4786958
1.776


A-13
1.7192548
0.0668813
223.222
1.9244861
0.3767470
68.925


A-14
1.7183512
0.0690717
220.755
1.7884626
0.2530536
134.430


A-15
1.7097773
0.0638868
221.916
1.7175992
0.2031308
199.649






















TABLE 1-B





Case
n10
k10
d10
n20
k20
d20





















B-01
1.8890717
0.2231211
31.297
2.2536461
1.9138327
8.426


B-02
1.8040788
0.2224671
38.783
3.4285504
0.7115044
30.090


B-03
1.8569330
0.1887211
31.358
2.3482559
0.7139401
49.395


B-04
1.8246631
0.1852786
29.866
2.0267942
0.6589875
61.419


B-05
1.8713633
0.1359350
20.765
1.8449284
0.4410677
129.533


B-06
1.8537764
0.1095380
19.190
1.8083352
0.3385915
190.096


B-07
1.8773918
0.0811836
15.072
1.7885130
0.2812935
250.952


B-08
1.7913209
0.1069315
93.104
2.1120296
1.5705728
8.709


B-09
1.7961812
0.0967122
91.592
2.2985234
0.5621108
49.876


B-10
1.7719309
0.0907051
89.644
1.8982310
0.3437292
119.550


B-11
1.7573553
0.0844391
89.273
1.8090385
0.2599016
184.203


B-12
1.7321027
0.0771807
89.432
1.7181480
0.2108133
254.601


B-13
1.7251448
0.0782108
166.474
2.6560327
2.0752579
4.495


B-14
1.7347815
0.0789970
158.854
2.0166404
0.4697089
58.957


B-15
1.7337052
0.0782079
156.164
1.8413069
0.2975845
122.955


B-16
1.7245076
0.0739010
155.712
1.7533528
0.2275719
189.273


B-17
1.7100620
0.0639207
155.553
1.6863114
0.1891021
256.528


B-18
1.7130788
0.0658962
233.281
3.3653368
2.7431658
2.501


B-19
1.7208745
0.0708686
223.560
1.9877972
0.4366658
59.393


B-20
1.7192161
0.0720786
220.745
1.7983405
0.2740582
125.643


B-21
1.7100814
0.0661341
221.783
1.7179584
0.2146738
191.114


B-22
1.7028062
0.0572529
219.613
1.6741304
0.1784680
256.090






















TABLE 1-C





Case
n10
k10
d10
n20
k20
d20





















C-01
1.7462297
0.2650661
38.584
1.8811342
2.5474890
6.719


C-02
1.7852920
0.2379686
38.995
3.2453891
0.8215227
29.990


C-03
1.8064124
0.2063789
31.400
2.0415396
0.7493942
55.163


C-04
1.8761841
0.1465026
22.050
1.8871554
0.4863835
118.487


C-05
1.8732427
0.1107685
18.888
1.8328297
0.3644393
179.928


C-06
1.8809997
0.0844859
15.636
1.8003278
0.2965881
241.202


C-07
1.8353407
0.1336488
86.851
1.6000470
1.7695220
10.059


C-08
1.8107063
0.1074834
91.200
2.5616901
0.6655713
40.111


C-09
1.7800259
0.0966903
89.638
1.9474319
0.3779800
109.424


C-10
1.7589519
0.0885227
89.033
1.8081258
0.2753975
177.335


C-11
1.7385561
0.0961686
161.111
1.8448216
2.2148249
5.861


C-12
1.7392392
0.0859424
158.474
2.1008270
0.5469970
50.862


C-13
1.7355979
0.0828161
155.982
1.8545146
0.3232472
115.179


C-14
1.7252169
0.0770491
155.656
1.7550901
0.2413910
181.353


C-15
1.7185486
0.0788457
229.847
3.2610273
4.4183916
1.558


C-16
1.7228369
0.0769315
222.858
2.0210736
0.5011654
62.892


C-17
1.7199449
0.0760859
220.491
1.8037789
0.2965908
118.134


C-18
1.7101979
0.0687675
221.639
1.7165312
0.2274377
183.246






















TABLE 1-D





Case
n10
k10
d10
n20
k20
d20





















D-01
1.8047095
0.2694194
36.421
2.9911125
1.0218786
30.087


D-02
1.8098021
0.2379756
31.711
2.1295160
0.9059492
46.199


D-03
1.8915289
0.1677232
26.420
2.1348336
0.5678980
93.459


D-04
1.8869810
0.1583242
22.598
1.9270572
0.5352831
108.068


D-05
1.8679863
0.1633407
22.571
1.8682373
0.5190358
112.596


D-06
1.8894047
0.1134244
18.623
1.8513003
0.3877744
170.528


D-07
1.9013640
0.0821095
14.880
1.8106171
0.3102506
232.433


D-08
1.7974174
0.1211843
88.331
2.0615819
0.7049601
48.141


D-09
1.7778270
0.1038067
88.747
1.9023003
0.4013081
106.512


D-10
1.7589001
0.0931193
88.775
1.8006679
0.2880356
170.885


D-11
1.7310401
0.0827558
89.146
1.7041670
0.2282102
240.157


D-12
1.7404520
0.0960720
155.339
1.9461112
0.5942640
50.887


D-13
1.7353985
0.0882239
154.960
1.8293633
0.3421815
110.529


D-14
1.7244370
0.0802890
155.397
1.7457172
0.2519901
174.646


D-15
1.7094852
0.0677575
155.056
1.6751093
0.2044537
241.084


D-16
1.7305468
0.1083688
224.105
3.7612310
9.7520181
0.557


D-17
1.7234847
0.0859582
219.529
1.8940064
0.5381566
52.122


D-18
1.7196555
0.0809985
219.492
1.7865237
0.3130643
112.555


D-19
1.7094719
0.0713058
221.454
1.7085534
0.2375210
175.858


D-20
1.7026367
0.0605694
219.016
1.6670562
0.1929642
239.742






















TABLE 1-E





Case
n10
k10
d10
n20
k20
d20





















E-01
1.7952075
0.2631488
28.407
1.7975159
0.9080589
49.215


E-02
1.8907711
0.1709411
22.060
1.9054700
0.5625340
101.512


E-03
1.9054716
0.1139096
18.051
1.8637077
0.4032117
161.182


E-04
1.9347861
0.0660701
14.149
1.8512928
0.3248351
218.499


E-05
1.9562331
0.1018371
10.504
1.7371318
0.3049135
238.789


E-06
1.7844085
0.1367381
84.299
1.7096132
0.6495191
54.242


E-07
1.7702622
0.1105738
87.211
1.8115599
0.4022198
106.122


E-08
1.7541370
0.0973387
88.132
1.7670571
0.2903421
167.020


E-09
1.7279592
0.0846136
88.943
1.6883751
0.2308596
233.281


E-10
1.7375980
0.1054836
150.710
1.7055974
0.5608974
53.799


E-11
1.7329681
0.0932680
153.145
1.7707311
0.3436851
107.979


E-12
1.7221048
0.0829100
154.966
1.7249696
0.2554267
168.643


E-13
1.7083331
0.0687145
154.712
1.6656993
0.2071468
233.037


E-14
1.7220084
0.0940320
214.741
1.7051250
0.5097600
53.504


E-15
1.7182277
0.0857940
217.589
1.7452872
0.3145186
108.615


E-16
1.7079026
0.0731017
221.285
1.6934483
0.2412999
168.585


E-17
1.7021324
0.0613637
218.642
1.6620357
0.1957858
230.920






















TABLE 1-F





Case
n10
k10
d10
n20
k20
d20





















F-01
1.7605068
0.2771672
28.706
1.6786286
0.9008770
43.735


F-02
1.8816347
0.1829378
20.725
1.8151288
0.5496963
99.755


F-03
1.9020430
0.1268282
16.538
1.7976518
0.3935708
160.685


F-04
1.9458467
0.0703715
13.048
1.8275971
0.3251874
213.311


F-05
1.9584022
0.1032605
10.534
1.7382432
0.3086817
229.129


F-06
1.7915017
0.1460711
82.108
1.6599684
0.6598461
47.036


F-07
1.7682864
0.1152280
86.246
1.7730752
0.3999868
100.473


F-08
1.7517777
0.1000283
87.803
1.7495420
0.2902721
159.986


F-09
1.7257399
0.0854213
88.823
1.6774661
0.2313191
224.881


F-10
1.7391311
0.1111219
148.271
1.6415570
0.5493559
47.977


F-11
1.7320844
0.0968192
152.055
1.7411899
0.3409343
101.751


F-12
1.7076855
0.0689521
154.586
1.6612710
0.2081961
223.547


F-13
1.7203924
0.0842770
154.911
1.7118542
0.2561923
160.544


F-14
1.7223192
0.0985051
212.081
1.6387426
0.4904233
48.284


F-15
1.7173463
0.0890019
216.420
1.7205682
0.3116849
102.035


F-16
1.7068337
0.0738736
221.446
1.6845656
0.2425094
159.621


F-17
1.7019545
0.0615388
218.498
1.6606500
0.1970435
220.941






















TABLE 1-G





Case
n10
k10
d10
n20
k20
d20





















G-01
1.7659038
0.3040912
29.683
1.6951746
1.0159152
32.660


G-02
1.8645399
0.1945245
22.504
1.8232494
0.5745287
88.735


G-03
1.8986420
0.1330684
17.099
1.7981378
0.4053118
150.314


G-04
1.9431410
0.1068639
11.420
1.7406778
0.3159076
217.432


G-05
1.8260230
0.1610409
82.141
1.8123655
0.8416018
29.750


G-06
1.7771488
0.1183021
86.874
1.8193233
0.4301648
86.325


G-07
1.7544343
0.1010010
88.257
1.7618403
0.3008540
147.888


G-08
1.7270080
0.0859818
88.900
1.6808707
0.2360835
214.142


G-09
1.7474077
0.1187907
148.872
1.6925268
0.6251022
34.244


G-10
1.7344421
0.0986199
153.031
1.7617910
0.3597954
89.143


G-11
1.7082851
0.0693971
154.668
1.6632564
0.2120421
213.175


G-12
1.7212227
0.0845898
155.411
1.7183974
0.2642962
149.129


G-13
1.7256274
0.1038247
212.824
1.6530934
0.5317369
36.133


G-14
1.7180408
0.0895343
218.202
1.7315716
0.3280557
89.506


G-15
1.7074443
0.0742263
221.707
1.6896767
0.2496384
148.627


G-16
1.7023147
0.0619030
218.598
1.6620389
0.2005572
210.752






















TABLE 1-H





Case
n10
k10
d10
n20
k20
d20





















H-01
1.7563588
0.3324096
35.374
1.9274523
1.4642575
17.251


H-02
1.8511230
0.2092311
25.991
1.9063465
0.6506745
73.686


H-03
1.8843188
0.1443736
18.736
1.8018968
0.4300566
139.851


H-04
1.9287462
0.1105115
12.655
1.7494498
0.3311673
205.772


H-05
1.8353218
0.1759033
87.389
2.1171648
1.3140425
13.979


H-06
1.7950810
0.1221034
88.670
1.9787137
0.5126318
67.257


H-07
1.7627960
0.1022278
88.862
1.8048095
0.3274205
133.479


H-08
1.7313791
0.0877850
88.999
1.6945552
0.2478313
202.902


H-09
1.7608801
0.1266208
153.509
1.9275665
0.9887124
15.987


H-10
1.7394221
0.0996664
155.305
1.8479873
0.4176577
72.839


H-11
1.7245671
0.0857616
155.774
1.7414131
0.2835597
136.971


H-12
1.7098549
0.0711157
154.844
1.6689951
0.2212317
203.148


H-13
1.7314445
0.1087664
218.242
1.7862714
0.7962122
18.394


H-14
1.7204815
0.0894136
220.453
1.7885409
0.3769446
74.763


H-15
1.7093097
0.0755678
221.580
1.7021793
0.2655853
137.968


H-16
1.7029357
0.0634027
218.717
1.6626290
0.2083407
201.624






















TABLE 1-I





Case
n10
k10
d10
n20
k20
d20





















I-01
1.7289685
0.3314086
44.247
5.1412592
5.4454539
1.484


I-02
1.8452520
0.2255929
26.855
1.9037614
0.7221490
66.898


I-03
1.8988873
0.1475831
20.944
1.8997324
0.4893775
122.094


I-04
1.8877112
0.1535471
19.669
1.8220692
0.4687151
129.650


I-05
1.9267904
0.0947520
15.612
1.8437835
0.3693724
183.529


I-06
1.9311024
0.1132645
13.318
1.7624681
0.3523973
195.472


I-07
1.9377300
0.0882760
11.094
1.7478213
0.2927773
252.908


I-08
1.8321358
0.1783607
92.959
3.8484718
3.7040697
2.442


I-09
1.8340055
0.1409526
90.549
2.7003837
0.6754163
40.010


I-10
1.7711711
0.1059247
89.053
1.8505388
0.3612112
121.432


I-11
1.7360863
0.0911204
88.900
1.7067614
0.2637604
192.941


I-12
1.7197908
0.0799131
88.028
1.6618119
0.2120965
257.777


I-13
1.7660895
0.1278221
159.319
4.3535883
4.0919379
1.526


I-14
1.7439719
0.1032091
156.425
1.9650733
0.4980866
59.654


I-15
1.7279356
0.0888807
155.640
1.7635448
0.3088945
126.749


I-16
1.7114085
0.0740744
154.740
1.6716288
0.2338686
194.347


I-17
1.7070625
0.0641745
153.245
1.6634512
0.1921909
254.410


I-18
1.7347333
0.1100034
225.621
4.2666617
4.0109081
1.346


I-19
1.7230132
0.0920219
220.898
1.8597675
0.4430799
63.229


I-20
1.7111302
0.0786417
221.002
1.7127614
0.2870105
128.848


I-21
1.7035342
0.0659797
218.617
1.6615801
0.2195726
193.289


I-22
1.7027484
0.0572097
216.627
1.6695991
0.1821496
251.116


I-23
1.7001226
0.0542621
277.695
1.6762439
0.1770375
248.521






















TABLE 1-J





Case
n10
k10
d10
n20
k20
d20





















J-01
1.8593145
0.2496127
26.535
1.9155767
0.8329906
59.684


J-02
1.9010800
0.1636004
19.815
1.8411706
0.5121692
120.535


J-03
1.9204218
0.1149718
15.218
1.7975616
0.3794158
182.059


J-04
1.9438629
0.1088618
10.610
1.7190727
0.2999844
250.015


J-05
1.8201241
0.1437532
89.353
2.3681639
0.7410526
43.212


J-06
1.7719135
0.1119845
88.526
1.8420973
0.3885265
115.256


J-07
1.7372876
0.0953951
88.555
1.7021944
0.2779787
185.353


J-08
1.7204595
0.0830085
87.798
1.6574450
0.2209480
249.744


J-09
1.7445424
0.1106490
155.347
1.9643384
0.5665503
53.939


J-10
1.7286821
0.0936244
154.936
1.7602486
0.3317476
119.649


J-11
1.7117780
0.0773392
154.355
1.6664488
0.2460450
186.501


J-12
1.7072616
0.0664543
152.987
1.6597858
0.2000883
246.239


J-13
1.7114074
0.0830146
220.011
1.7075466
0.3068810
121.613


J-14
1.7035514
0.0688006
218.183
1.6565327
0.2307053
185.316


J-15
1.7027912
0.0591414
216.340
1.6669294
0.1896158
242.803






















TABLE 1-K 





Case
n10
k10
d10
n20 
k20
d20 





















K-01
1.8881577
0.2795127
22.871
1.7550786
0.8705815
60.032


K-02
1.9218914
0.1797398
17.442
1.7746647
0.5227186
119.813


K-03
1.9458883
0.1322078
13.080
1.7478516
0.3833699
181.809


K-04
1.9409291
0.1179060
10.849
1.7108849
0.3088835
241.776


K-05
1.7882093
0.1515662
85.800
1.7933752
0.6703287
55.966


K-06
1.7649059
0.1193411
87.339
1.7745734
0.3964773
113.800


K-07
1.7337710
0.0996522
88.039
1.6760618
0.2847568
179.842


K-08
1.7199633
0.0855558
87.477
1.6497564
0.2267213
241.489


K-09
1.7259527
0.0989978
153.714
1.7204930
0.3415865
115.571


K-10
1.7103936
0.0800216
153.726
1.6497935
0.2528816
179.482


K-11
1.7070930
0.0681638
152.585
1.6551703
0.2055639
237.501


K-12
1.7028018
0.0710148
217.506
1.64S6663
0.2376270
177.429


K-13
1.7027432
0.0605235
215.929
1.6646615
0.1950188
233.713






















TABLE 1-L





Case
n10
k10
d10
n20
k20
d20





















L-01
1.8909431
0.3085424
20.418
1.5964478
0.8353138
60.909


L-02
1.9524263
0.1909748
15.444
1.7414925
0.5288169
116.361


L-03
1.9741784
0.1389140
11.832
1.7353816
0.3892797
176.360


L-04
1.9011191
0.1449022
11.795
1.6673230
0.3043383
237.538


L-05
1.7812655
0.1647646
82.868
1.6154117
0.6141968
58.066


L-06
1.7599364
0.1268761
86.158
1.7200975
0.3928633
111.244


L-07
1.7294022
0.1028924
87.627
1.6470339
0.2862372
173.600


L-08
1.7193592
0.0869972
87.259
1.6442041
0.2301394
231.990


L-09
1.7088052
0.0815889
153.347
1.6346844
0.2563356
171.193


L-10
1.7070991
0.0689994
152.325
1.6535493
0.2091466
227.454


L-11
1.7021164
0.0722203
217.158
1.6379690
0.2419462
168.107


L-12
1.7030336
0.0611451
215.722
1.6657846
0.1987136
223.276






















TABLE 1-M





Case
n10
k10
d10
n20
k20 
d20





















M-01
1.8737564
0.3367363
20.276
1.5133470
0.8454522
55.480


M-02
1.9697383
0.2020294
14.764
1.7299638
0.5429087
109.268


M-03
1.9916260
0.1477036
11.315
1.7257470
0.3987910
168.578


M-04
1.9141720
0.1461879
11.459
1.6683491
0.3122132
226.037


M-05
1.7868889
0.1795709
80.605
1.5409994
0.6011754
53.925


M-06
1.7600620
0.1342170
85.615
1.6974715
0.3980869
104.529


M-07
1.7276490
0.1044918
87.663
1.6338870
0.2915200
164.129


M-08
1.7199953
0.0874837
87.278
1.6452183
0.2346970
221.092


M-09
1.7084320
0.0820944
153.448
1.6304269
0.2625567
160.685


M-10
1.7077870
0.0691595
152.438
1.6574806
0.2137196
216.250


M-11
1.7022055
0.0725208
217.368
1.6389178
0.2487144
157.041


M-12
1.7036940
0.0612465
215.927
1.6705104
0.2029113
212.129






















TABLE 1-N





Case
n10
k10
d10
n20
k20
d20





















N-01
1.8402862
0.3700261
23.403
1.4966418
1.0039549
41.463


N-02
1.9646387
0.2123233
16.447
1.7618069
0.5971846
94.995


N-03
1.9624104
0.1584699
12.893
1.7211612
0.4176484
156.173


N-04
1.9059084
0.1473615
12.089
1.6694213
0.3203376
216.011


N-05
1.8166660
0.1977639
79.798
1.5572201
0.7204992
40.224


N-06
1.7655719
0.1384976
86.596
1.7129955
0.4320226
91.539


N-07
1.7293285
0.1055583
87.952
1.6364176
0.3040668
153.339


N-08
1.7214396
0.0882507
87.451
1.6482275
0.2416232
210.993


N-09
1.7092770
0.0826318
153.805
1.6322979
0.2733763
150.296


N-10
1.7085071
0.0697446
152.663
1.6592624
0.2197085
206.543


N-11
1.7027802
0.0728517
217.779
1.6405373
0.2588103
146.936


N-12
1.7041709
0.0617202
216.194
1.6719897
0.2085423
202.593






















TABLE 1-O





Case
n10
k10
d10
n20
k20
d20





















O-01
1.8199816
0.4068444
29.022
1.5974175
1.4701111
24.558


O-02
1.9318464
0.2280177
20.237
1.8212470
0.6871951
79.181


O-03
1.9476580
0.1546474
15.042
1.7660961
0.4559575
140.877


O-04
1.9400781
0.1580344
15.180
1.7558824
0.4525330
141.749


O-05
1.9152409
0.1421080
12.506
1.6892699
0.3391765
204.998


O-06
1.8773964
0.2151408
81.211
1.7568637
1.2210655
20.666


O-07
1.7792899
0.1408151
87.880
1.7944868
0.5090378
75.457


O-08
1.7347668
0.1082989
88.119
1.6522930
0.3260600
142.664


O-09
1.7234258
0.0907869
87.442
1.6482492
0.2516544
202.556


O-10
1.7112569
0.0850611
153.930
1.6361524
0.2898839
141.116


O-11
1.7092054
0.0717413
152.725
1.6572540
0.2283199
198.410


O-12
1.7036310
0.0749476
217.788
1.6384900
0.2727185
138.609


O-13
1.7042855
0.0635030
216.233
1.6687346
0.2164860
194.709






















TABLE 1-P





Case
n10
k10
d10
n20
k20
d20





















P-01
1.8175791
0.4385823
37.187
2.9488620
3.6605721
5.671


P-02
1.9193642
0.2501320
21.908
1.8321620
0.7789298
69.456


P-03
1.9516445
0.1607715
15.944
1.7911399
0.4964603
129.934


P-04
1.9419697
0.1648951
16.094
1.7764317
0.4910919
131.139


P-05
1.9282358
0.1504554
12.282
1.6857745
0.3551730
198.143


P-06
1.8704725
0.2299368
88.746
2.8158519
3.0739838
4.992


P-07
1.7960814
0.1479091
88.347
1.9330235
0.6225271
60.492


P-08
1.7418606
0.1134159
87.888
1.6717189
0.3550776
132.384


P-09
1.7257176
0.0948039
87.264
1.6472351
0.2650084
194.269


P-10
1.7136245
0.0896483
153.565
1.6392609
0.3111392
132.434


P-11
1.7097149
0.0750113
152.537
1.6527377
0.2392317
190.639


P-12
1.7044725
0.0790614
217.265
1.6350180
0.2903973
130.687


P-13
1.7041849
0.0664191
215.910
1.6625759
0.2261823
187.261


P-14
1.7061658
0.0592006
215.675
1.6951633
0.1893046
240.772






















TABLE 1-Q





Case
n10
k10
d10
n20
k20
d20





















Q-01
1.9650460
0.1748342
15.368
1.7719438
0.5219218
124.100


Q-02
1.9384951
0.1550287
12.323
1.6895811
0.3734128
189.293


Q-03
1.9139584
0.1299465
11.343
1.6883766
0.3007198
246.427


Q-04
1.7857662
0.1574086
86.539
1.7907030
0.6497694
59.718


Q-05
1.7433983
0.1202381
87.036
1.6559011
0.3733381
125.629


Q-06
1.7262549
0.0993784
86.812
1.6373093
0.2753256
186.729


Q-07
1.7236673
0.0842645
87.109
1.6685549
0.2274459
241.120


Q-08
1.7140199
0.0949670
152.601
1.6238426
0.3258368
125.450


Q-09
1.7096017
0.0783956
152.026
1.6437329
0.2483227
182.921


Q-10
1.7107217
0.0680252
152.100
1.6799600
0.2063397
236.403


Q-11
1.7042582
0.0836625
216.186
1.6202806
0.3033538
123.599


Q-12
1.7037677
0.0692974
215.313
1.6544674
0.2346728
179.446


Q-13
1.7056779
0.0609868
215.198
1.6903958
0.1952987
232.683






















TABLE 1-R





Case
n10
k10
d10
n20
k20
d20





















R-01
1.9750220
0.3055970
17.312
1.6357631
0.8207912
66.973


R-02
1.9943589
0.1905841
13.627
1.7309349
0.5263943
122.033


R-03
1.9365478
0.1715491
12.200
1.6649916
0.3790440
183.216


R-04
1.8874503
0.1503402
12.006
1.6561886
0.2991899
242.151


R-05
1.7406539
0.1271964
86.109
1.6157675
0.3771605
120.682


R-06
1.7253418
0.1032843
86.339
1.6224018
0.2809650
178.956


R-07
1.7237735
0.0864157
86.885
1.6650124
0.2327133
231.784


R-08
1.7126639
0.0996282
151.701
1.5953952
0.3310599
118.977


R-09
1.7091592
0.0809109
151.551
1.6344497
0.2545275
174.271


R-10
1.7108527
0.0696108
151.827
1.6784072
0.2111338
226.839


R-11
1.7032995
0.0874338
215.388
1.6000078
0.3100603
116.088


R-12
1.7035257
0.0712651
214.888
1.6490638
0.2413259
170.219


R-13
1.7058486
0.0623526
214.924
1.6902455
0.1999123
222.958






















TABLE 1-S





Case
n10
k10
d10
n20
k20
d20





















S-01
2.0157422
0.3310994
15.233
1.5732193
0.8191417
66.313


S-02
1.9298641
0.1874025
12.335
1.6401635
0.3856200
174.874


S-03
1.9158213
0.1413868
11.496
1.6782430
0.3150440
226.685


S-04
1.9035507
0.0919796
11.593
1.7330388
0.2716233
274.138


S-05
1.7387191
0.1333266
85.772
1.5838112
0.3839989
113.170


S-06
1.7256246
0.1055723
86.279
1.6177137
0.2895611
168.375


S-07
1.7253546
0.0874820
86.928
1.6696157
0.2389730
220.361


S-08
1.7287042
0.0760165
87.515
1.7081188
0.2041866
272.150


S-09
1.7096582
0.0821714
151.624
1.6358848
0.2635969
162.984


S-10
1.7121643
0.0705329
152.001
1.6853812
0.2167566
215.233


S-11
1.7151566
0.0645755
152.412
1.7135234
0.1842756
268.692


S-12
1.7029318
0.0900998
215.656
1.5920483
0.3226491
105.543


S-13
1.7041956
0.0721897
215.114
1.6533659
0.2502000
158.704


S-14
1.7070069
0.0633145
215.207
1.6971996
0.2048445
211.558


S-15
1.7080920
0.0595697
215.250
1.7125257
0.1741269
267.229






















TABLE 1-T





Case
n10
k10
d10
n20
k20
d20





















T-01
1.9115074
0.1960527
13.258
1.6255021
0.3984556
164.068


T-02
1.9153788
0.1490337
11.515
1.6682692
0.3197853
218.507


T-03
1.8712999
0.0897979
14.536
1.7614462
0.2821612
257.799


T-04
1.7275221
0.1065695
86.590
1.6227655
0.3041284
156.467


T-05
1.7279210
0.0881248
87.122
1.6778177
0.2471127
209.069


T-06
1.7316602
0.0769958
87.563
1.7153560
0.2092703
261.518


T-07
1.7109076
0.0825870
152.078
1.6429824
0.2767726
151.325


T-08
1.7140510
0.0712311
152.368
1.6947912
0.2239389
204.003


T-09
1.7169074
0.0659464
152.739
1.7201685
0.1888883
258.117


T-10
1.7034522
0.0912009
216.873
1.5969711
0.3506487
92.838


T-11
1.7053294
0.0723641
215.802
1.6624125
0.2625944
147.133


T-12
1.7084550
0.0642090
215.782
1.7063284
0.2112603
200.541


T-13
1.7088490
0.0611230
215.750
1.7155496
0.1784523
257.296






















TABLE 2-A





Case
n10
k10
d10
n20
k20
d20





















A-01
2.1002530
0.0458360
25.245
3.6613926
2.0917723
4.980


A-02
1.9014716
0.1897321
35.107
3.6832791
0.6232721
30.030


A-03
1.8817545
0.1528631
29.787
2.2496615
0.5909670
58.673


A-04
1.8713707
0.1131033
20.680
1.8471360
0.3799287
139.609


A-05
1.8894555
0.1025295
13.808
1.7319643
0.2879285
214.126


A-06
1.8919474
0.0886250
14.825
1.7713589
0.2959415
207.437


A-07
1.8730447
0.0995044
12.107
1.6971361
0.2384266
276.341


A-08
1.7734811
0.0942049
96.210
2.0242448
0.4293783
66.416


A-09
1.7581396
0.0894114
94.485
1.8216770
0.2841737
135.446


A-10
1.7209511
0.0778149
94.005
1.6746822
0.2144041
211.729


A-11
1.7166765
0.0677623
92.667
1.6766991
0.1797231
270.198


A-12
1.7166130
0.0755230
182.689
6.5634515
3.2079655
1.017


A-13
1.7322234
0.0835200
166.765
1.9262925
0.3700807
69.546


A-14
1.7049421
0.0655754
163.194
1.6664527
0.1954874
208.736


A-15
1.7064564
0.0573750
160.636
1.6879767
0.1655431
264.028


A-16
1.6929499
0.0758677
218.538
1.7888879
0.3373861
83.914


A-17
1.6905856
0.0724871
210.998
1.7113381
0.2424201
155.877


A-18
1.6919500
0.0673580
207.119
1.6973679
0.1951159
222.394


A-19
1.6995270
0.0541447
221.890
1.6914313
0.1602785
261.841


A-20
1.6946661
0.0598692
292.769
5.7902895
2.6464640
1.370


A-21
1.6927273
0.0641185
275.960
1.7993913
0.3510467
81.101


A-22
1.6938682
0.0632641
269.814
1.7248410
0.2487428
150.052


A-23
1.6959215
0.0601626
266.236
1.7076727
0.2009217
214.823


A-24
1.6965163
0.0560943
263.874
1.6984359
0.1709410
277.894






















TABLE 2-B





Case
n10
k10
d10
n20
k20
d20





















B-01
1.8588603
0.2152026
37.726
5.0977045
0.6974562
19.647


B-02
1.8671897
0.2000001
35.681
3.0932325
0.7063642
34.687


B-03
1.8793061
0.1213485
21.414
1.8727645
0.4149520
129.308


B-04
1.8953035
0.0980077
14.908
1.7635602
0.3109442
200.446


B-05
1.8743725
0.1084578
12.201
1.6884757
0.2470663
269.437


B-06
1.7693190
0.1013402
103.520
3.2583829
2.5781374
3.121


B-07
1.8089249
0.1064114
98.052
3.5132584
0.5501157
29.615


B-08
1.7628339
0.0939832
94.416
1.8414170
0.3092618
125.923


B-09
1.7223442
0.0810686
93.840
1.6728089
0.2260423
203.086


B-10
1.7176215
0.0701007
92.613
1.6759231
0.1876577
261.422


B-11
1.7053748
0.0681661
163.030
1.6640911
0.2056957
200.113


B-12
1.7067869
0.0592936
160.569
1.6873274
0.1726858
255.377


B-13
1.7234396
0.0819972
177.819
5.0800961
4.2173316
1.054


B-14
1.7309823
0.0887627
175.110
9.5526510
0.4602806
10.232


B-15
1.6924662
0.0804140
219.254
1.8031504
0.3794202
74.951


B-16
1.6899914
0.0755734
211.286
1.7113670
0.2592681
147.090


B-17
1.6915311
0.0696615
207.258
1.6964473
0.2049428
213.635


B-18
1.6993450
0.0558443
221.722
1.6905618
0.1670525
253.347


B-19
1.6920076
0.0677866
276.645
1.8143335
0.3967808
72.378


B-20
1.6934597
0.0658489
270.093
1.7261499
0.2668883
141.360


B-21
1.6956703
0.0621151
266.327
1.7069279
0.2113995
206.262


B-22
1.6963391
0.0576411
263.935
1.6975975
0.1780179
269.259






















TABLE 2-C





Case
n10
k10
d10
n20
k20
d20





















C-01
1.8231304
0.2426967
38.982
4.7825941
0.7852430
19.992


C-02
1.8934062
0.1289044
22.067
1.9169501
0.4577317
118.684


C-03
1.9014262
0.1029443
15.306
1.7714781
0.3309508
191.572


C-04
1.8787814
0.1135143
12.334
1.6867670
0.2583639
261.269


C-05
1.8198973
0.1197953
96.975
4.7572984
0.6218490
20.274


C-06
1.7669399
0.0997580
94.208
1.8558060
0.3364471
117.969


C-07
1.7235821
0.0847397
93.618
1.6692590
0.2394056
195.006


C-08
1.7188964
0.0726255
92.505
1.6760484
0.1967286
252.779


C-09
1.7058208
0.0710513
162.764
1.6616172
0.2176394
191.801


C-10
1.7073313
0.0613671
160.462
1.6880654
0.1807904
246.769


C-11
1.6893950
0.0792587
211.356
1.7121469
0.2795726
139.203


C-12
1.6912149
0.0722082
207.241
1.6964479
0.2163033
205.754


C-13
1.6993872
0.0576769
221.603
1.6911809
0.1749036
244.825


C-14
1.6931110
0.0689939
270.168
1.7281714
0.2885226
133.446


C-15
1.6955537
0.0643335
266.333
1.7074500
0.2235939
198.195


C-16
1.6962507
0.0593120
263.960
1.6977843
0.1860709
261.024






















TABLE 2-D





Case
n10
k10
d10
n20
k20
d20





















D-01
1.8741027
0.2292405
31.502
2.4589695
0.9273915
39.688


D-02
1.9162345
0.1358555
21.455
1.9418040
0.4998799
110.373


D-03
1.9099224
0.1141224
14.789
1.7536831
0.3442834
186.067


D-04
1.8839284
0.1193744
12.268
1.6821215
0.2672652
253.238


D-05
1.7973698
0.1226911
93.176
2.1323779
0.6525391
46.828


D-06
1.7231751
0.0881939
93.194
1.6583398
0.2493789
187.627


D-07
1.7198225
0.0748307
92.273
1.6753837
0.2040438
244.025


D-08
1.7057007
0.0735111
162.218
1.6560667
0.2270715
183.673


D-09
1.7079030
0.0631371
160.241
1.6895692
0.1875698
237.741


D-10
1.6886446
0.0826816
210.810
1.7077667
0.2975930
132.542


D-11
1.6995870
0.0592337
221.497
1.6927290
0.1818275
235.781


D-12
1.6927517
0.0720967
269.568
1.7225076
0.3075740
126.653


D-13
1.6954892
0.0662812
265.955
1.7055518
0.2340649
190.864


D-14
1.6961809
0.0606151
263.663
1.6966094
0.1927366
253.572






















TABLE 2-E





Case
n10
k10
d10
n20
k20
d20





















E-01
1.8808544
0.2454152
24.855
1.8495394
0.8565648
51.788


E-02
1.9316654
0.1473610
18.765
1.8569906
0.5034890
110.667


E-03
1.9082705
0.1322705
14.189
1.7144055
0.3458924
182.182


E-04
1.8785232
0.1271526
12.435
1.6714546
0.2699971
245.412


E-05
1.7211644
0.0906139
92.694
1.6423304
0.2528050
180.257


E-06
1.7204079
0.0761160
92.018
1.6751968
0.2080809
234.537


E-07
1.7050622
0.0748972
161.630
1.6489715
0.2315625
175.108


E-08
1.7085349
0.0642166
160.005
1.6919631
0.1914882
227.913


E-09
1.6878153
0.0847734
209.683
1.6959203
0.3070669
127.092


E-10
1.6980473
0.0703784
224.445
1.6616204
0.2238826
171.370


E-11
1.6999707
0.0601951
221.512
1.6952970
0.1862586
225.852


E-12
1.6924126
0.0742318
268.357
1.7068352
0.3173492
120.697


E-13
1.6955002
0.0674212
265.225
1.7004174
0.2397614
183.997


E-14
1.6961000
0.0611797
263.146
1.6940899
0.1962440
246.462






















TABLE 2-F





Case
n10
k10
d10
n20
k20
d20





















F-01
1.8609133
0.2699154
23.275
1.6780954
0.8091000
51.309


F-02
1.9462238
0.1588548
16.938
1.8061043
0.4989592
107.791


F-03
1.9002376
0.1498745
13.880
1.6764313
0.3420875
176.900


F-04
1.8750233
0.1302055
12.592
1.6672162
0.2718902
235.718


F-05
1.8816918
0.0811209
12.084
1.7277101
0.2394028
282.393


F-06
1.7196449
0.0916508
92.440
1.6323282
0.2539653
171.320


F-07
1.7211216
0.0765241
91.942
1.6777604
0.2105462
223.941


F-08
1.7282121
0.0683348
92.298
1.7222619
0.1825246
274.062


F-09
1.7047574
0.0753118
161.355
1.6462273
0.2341241
165.232


F-10
1.7094298
0.0647325
159.970
1.6962571
0.1938378
217.150


F-11
1.6870964
0.0858972
208.556
1.6830399
0.3090553
121.249


F-12
1.6986314
0.0705958
224.893
1.6622291
0.2274423
160.831


F-13
1.7003667
0.0607285
221.557
1.6983916
0.1887213
215.383


F-14
1.6951156
0.0571177
215.781
1.6957463
0.1617780
277.216


F-15
1.6955653
0.0680298
264.644
1.6953987
0.2417239
176.078


F-16
1.6958377
0.0528303
274.984
1.6882898
0.1657751
275.044






















TABLE 2-G





Case
n10
k10
d10
n20
k20
d20





















.G-01
1.8339628
0.2973905
24.925
1.6419965
0.8698975
41.723


G-02
1.9445237
0.1726202
17.287
1.7953047
0.5162004
98.907


G-03
1.8939902
0.1563846
14.253
1.6659458
0.3485215
167.112


G-04
1.8811858
0.0833966
12.228
1.7269957
0.2426363
272.914


G-05
1.7203230
0.0922740
92.527
1.6328842
0.2599948
160.703


G-06
1.7224265
0.0770592
92.053
1.6819841
0.2150120
213.162


G-07
1.7294779
0.0692299
92.385
1.7252879
0.1858377
263.723


G-08
1.7053201
0.0757255
161.452
1.6485370
0.2399747
154.588


G-09
1.7102741
0.0654045
160.136
1.7000507
0.1977447
206.614


G-10
1.7133466
0.0629386
160.381
1.7220503
0.1698335
260.757


G-11
1.6861768
0.0881028
208.148
1.6733849
0.3136681
112.385


G-12
1.6990769
0.0709373
225.005
1.6647354
0.2329033
150.349


G-13
1.7003759
0.0613969
221.468
1.6998938
0.1918751
205.497


G-14
1.6946436
0.0577579
215.315
1.6946016
0.1634050
268.128


G-15
1.6954303
0.0690806
264.876
1.6937197
0.2458138
165.269


G-16
1.6957423
0.0532811
274.848
1.6878755
0.1674492
265.685






















TABLE 2-H





Case
n10
k10
d10
n20
k20
d20





















H-01
1.9187259
0.1881900
20.509
1.8283337
0.5739613
84.746


H-02
1.8967518
0.1527475
15.221
1.6893708
0.3734166
154.221


H-03
1.8757876
0.1318014
13.247
1.6726776
0.2883472
215.129


H-04
1.8806788
0.0899399
12.412
1.7211162
0.2492460
265.394


H-05
1.7234296
0.0945092
92.722
1.6393014
0.2743485
150.270


H-06
1.7235983
0.0790587
92.129
1.6815454
0.2228770
204.187


H-07
1.7294254
0.0706491
92.482
1.7233644
0.1918670
255.172


H-08
1.7064538
0.0777504
161.668
1.6498826
0.2514894
145.038


H-09
1.7103862
0.0670250
160.278
1.6983722
0.2047961
197.922


H-10
1.7133072
0.0637197
160.467
1.7219131
0.1752501
251.781


H-11
1.6987335
0.0728489
224.384
1.6635130
0.2423517
141.699


H-12
1.6895310
0.0798395
207.056
1.6873868
0.2464201
160.447


H-13
1.6997408
0.0628030
221.189
1.6972371
0.1976117
197.186


H-14
1.6947661
0.0583146
215.749
1.6943199
0.1671130
258.789


H-15
1.6915645
0.0796327
269.434
1.7013553
0.3520060
90.540


H-16
1.6950499
0.0706693
266.123
1.6983222
0.2573177
152.851


H-17
1.6956172
0.0541668
274.905
1.6860233
0.1712439
257.337






















TABLE 2-I





Case
n10
k10
d10
n20
k20
d20





















I-01
1.8980776
0.2063094
23.234
1.8542997
0.6486453
73.732


I-02
1.9078109
0.1489982
16.351
1.7325536
0.4126982
141.036


I-03
1.8887573
0.1336370
13.295
1.6803356
0.3065809
205.639


I-04
1.8863613
0.0963846
12.395
1.7165602
0.2596921
258.147


I-05
1.7283563
0.0991844
92.796
1.6494143
0.2975623
140.358


I-06
1.7247011
0.0825295
92.134
1.6784446
0.2345042
196.220


I-07
1.7288637
0.0727638
92.409
1.7181265
0.1997137
247.866


I-08
1.7100270
0.0697395
160.277
1.6932584
0.2147807
190.362


I-09
1.7129082
0.0648353
160.281
1.7202855
0.1822190
243.795


I-10
1.6894084
0.0825836
208.412
1.6911413
0.2636300
148.443


I-11
1.6987536
0.0651428
220.679
1.6918669
0.2062686
189.869


I-12
1.6951804
0.0592977
216.421
1.6944812
0.1733276
249.686


I-13
1.6947043
0.0728049
267.049
1.7045529
0.2758626
142.407


I-14
1.6953534
0.0654850
264.587
1.6939885
0.2171518
204.731


I-15
1.6955317
0.0555447
274.968
1.6840742
0.1777252
249.243






















TABLE 2-J





Case
n10
k10
d10
n20
k20
d20





















J-01
1.9059589
0.2274286
23.462
1.8553331
0.7355051
66.090


J-02
1.9224042
0.1550778
16.599
1.7510181
0.4490690
131.424


J-03
1.8961620
0.1385328
13.501
1.6829419
0.3248659
196.767


J-04
1.8922593
0.1041345
12.282
1.7097147
0.2697702
251.116


J-05
1.7254583
0.0865833
91.876
1.6727903
0.2465542
188.519


J-06
1.7286512
0.0752622
92.185
1.7137581
0.2076205
240.302


J-07
1.7096319
0.0728333
159.923
1.6877059
0.2252670
182.766


J-08
1.7125109
0.0665034
159.852
1.7181911
0.1890952
235.934


J-09
1.6891198
0.0853163
208.173
1.6918411
0.2826173
141.112


J-10
1.6979687
0.0677690
220.140
1.6871092
0.2165239
182.186


J-11
1.6953920
0.0607310
216.694
1.6943518
0.1805507
240.824


J-12
1.6945041
0.0754015
266.879
1.7053190
0.2962459
134.581


J-13
1.6957904
0.0613078
263.111
1.6921380
0.1886276
257.166






















TABLE 2-K





Case
n10
k10
d10
n20
k20
d20





















K-01
1.9374125
0.1704110
15.669
1.7248980
0.4663738
126.299


K-02
1.9018997
0.1487976
13.285
1.6713435
0.3352808
189.496


K-03
1.8965439
0.1142225
11.973
1.6970963
0.2748315
244.759


K-04
1.7253637
0.0900184
91.432
1.6651786
0.2549499
180.505


K-05
1.7289764
0.0775142
91.877
1.7120256
0.2134557
231.728


K-06
1.7092919
0.0753499
159.318
1.6830351
0.2331189
174.468


K-07
1.7124011
0.0683625
159.365
1.7169838
0.1941891
227.412


K-08
1.6891266
0.0867081
206.818
1.6858604
0.2953498
138.155


K-09
1.6977739
0.0698574
219.869
1.6842611
0.2258219
173.345


K-10
1.6952347
0.0623107
216.627
1.6937881
0.1869159
231.738


K-11
1.6944699
0.0775933
265.762
1.6967397
0.3115846
129.093


K-12
1.6958800
0.0528961
273.317
1.6915993
0.1649138
288.010






















TABLE 2-L





Case
n10
k10
d10
n20
k20
d20





















L-01
1.9729972
0.2768129
17.524
1.6663342
0.7544777
64.842


L-02
1.9456051
0.1915481
14.612
1.6781309
0.4665054
122.845


L-03
1.9005953
0.1591490
13.217
1.6561276
0.3399716
181.593


L-04
1.8972956
0.1121564
12.290
1.7051607
0.2822449
233.141


L-05
1.7255330
0.0922673
91.102
1.6614760
0.2607016
171.070


L-06
1.7304964
0.0792452
91.709
1.7154952
0.2175998
221.560


L-07
1.7097843
0.0770210
159.025
1.6841289
0.2392980
164.463


L-08
1.7129025
0.0702809
159.249
1.7178163
0.1978132
217.770


L-09
1.7059734
0.0642321
159.600
1.6898319
0.1677546
279.371


L-10
1.6983193
0.0712405
220.143
1.6860819
0.2336364
162.903


L-11
1.6946755
0.0639503
216.344
1.6931001
0.1919118
222.331


L-12
1.6955425
0.0535782
213.248
1.6937343
0.1415462
338.947


L-13
1.6956989
0.0539885
272.929
1.6917939
0.1683287
278.327






















TABLE 2-M





Case
n10
k10
d10
n20
k20
d20





















M-01
1.8993435
0.1093669
12.638
1.7156529
0.2903108
220.942


M-02
1.9080238
0.0778133
11.189
1.7380285
0.2474831
275.866


M-03
1.7276770
0.0934541
91.210
1.6689251
0.2700133
159.348


M-04
1.7338076
0.0808022
91.869
1.7256843
0.2232282
209.944


M-05
1.7236449
0.0736298
92.640
1.7007078
0.1887087
271.148


M-06
1.7117973
0.0782334
159.412
1.6949465
0.2480962
152.577


M-07
1.7052523
0.0648564
160.141
1.6847092
0.1699839
269.827


M-08
1.6990979
0.0723627
220.761
1.6931390
0.2421156
151.650


M-09
1.6936455
0.0657466
215.539
1.6916565
0.1962143
213.597


M-10
1.6937228
0.0602088
212.854
1.6917935
0.1651159
273.449


M-11
1.6954835
0.0549286
272.481
1.6920522
0.1709440
269.018






















TABLE 2-N





Case
n10
k10
d10
n20
k20
d20





















N-01
1.9117383
0.2302052
15.980
1.5953517
0.4940730
105.368


N-02
1.8981283
0.1070787
13.384
1.7296497
0.3022759
209.053


N-03
1.9112943
0.0649623
12.163
1.7710787
0.2605013
259.824


N-04
1.7312914
0.0945058
91.544
1.6819509
0.2846338
147.702


N-05
1.7377087
0.0827928
92.151
1.7372931
0.2321492
198.983


N-06
1.7228203
0.0749158
92.874
1.6951594
0.1935801
262.590


N-07
1.7144911
0.0796518
160.015
1.7090445
0.2610315
141.223


N-08
1.7050797
0.0657099
160.534
1.6817729
0.1743389
260.739


N-09
1.6925663
0.0675694
214.049
1.6900690
0.2005073
206.287


N-10
1.6991742
0.0739382
220.936
1.6992675
0.2525134
141.832


N-11
1.6955775
0.0548747
213.500
1.6934763
0.1457299
319.743


N-12
1.6953573
0.0556511
272.231
1.6917841
0.1736649
260.476






















TABLE 2-O





Case
n10
k10
d10
n20
k20
d20





















O-01
1.8842999
0.1660082
15.542
1.6642092
0.3881866
148.595


O-02
1.9020060
0.1078045
13.884
1.7406676
0.3180988
199.025


O-03
1.9176161
0.0733974
11.927
1.7608162
0.2687301
254.127


O-04
1.7347347
0.0970436
91.613
1.6897518
0.3028107
138.166


O-05
1.7402087
0.0854812
92.221
1.7427648
0.2437105
190.058


O-06
1.7232674
0.0768076
92.842
1.6931409
0.2010537
254.319


O-07
1.7163169
0.0822242
160.121
1.7162208
0.2770503
132.120


O-08
1.7052425
0.0670983
160.367
1.6808978
0.1806066
252.327


O-09
1.6979604
0.0765182
219.964
1.6978817
0.2641846
134.431


O-10
1.6919325
0.0693101
212.895
1.6886216
0.2063377
199.162


O-11
1.6933082
0.0619759
212.839
1.6904544
0.1723582
255.647


O-12
1.6953110
0.0563706
272.392
1.6905212
0.1778331
252.170






















TABLE 2-P





Case
n10
k10
d10
n20
k20
d20





















P-01
1.9162825
0.2485644
18.297
1.6104232
0.6165991
83.442


P-02
1.8960663
0.1719364
15.704
1.6708316
0.4169686
139.520


P-03
1.9085468
0.1144956
13.923
1.7385514
0.3337318
191.444


P-04
1.9232010
0.0848488
11.624
1.7455678
0.2771185
248.983


P-05
1.7368663
0.1019026
91.322
1.6869885
0.3224919
130.342


P-06
1.7401611
0.0886217
92.017
1.7381402
0.2555882
182.755


P-07
1.7243481
0.0791015
92.538
1.6930588
0.2092609
245.988


P-08
1.7054586
0.0688139
159.721
1.6812702
0.1871719
244.029


P-09
1.6959475
0.0801582
218.084
1.6891859
0.2763746
128.431


P-10
1.6918299
0.0707672
213.401
1.6865968
0.2143676
190.286


P-11
1.6935501
0.0625258
213.666
1.6897170
0.1780108
246.097


P-12
1.6953216
0.0573372
272.694
1.6885432
0.1839003
243.579






















TABLE 2-Q





Case
n10
k10
d10
n20
k20
d20





















Q-01
1.9620125
0.2671830
17.281
1.6251877
0.6875073
75.420


Q-02
1.9138120
0.1838008
15.160
1.6631095
0.4399257
132.541


Q-03
1.9194872
0.1265886
13.286
1.7204546
0.3440475
186.036


Q-04
1.9263431
0.0918160
11.575
1.7389610
0.2853240
241.421


Q-05
1.7366416
0.1083929
90.600
1.6676220
0.3363185
124.136


Q-06
1.7377165
0.0918810
91.516
1.7225143
0.2640565
176.484


Q-07
1.7250070
0.0812670
92.096
1.6922454
0.2155950
237.445


Q-08
1.7054487
0.0704565
158.889
1.6815182
0.1921887
235.428


Q-09
1.6921136
0.0719896
214.506
1.6833735
0.2231205
180.418


Q-10
1.6937452
0.0634118
214.086
1.6893106
0.1840166
236.602


Q-11
1.6937402
0.0634247
214.067
1.6892020
0.1839903
236.644


Q-12
1.6958036
0.0530688
271.703
1.6918593
0.1637010
291.452






















TABLE 2-R





Case
n10
k10
d10
n20
k20
d20





















R-01
2.0247974
0.2830183
15.097
1.6266898
0.7191283
71.681


R-02
1.9282935
0.1992550
14.428
1.6428403
0.4517072
126.823


R-03
1.9213955
0.1387890
13.062
1.7027750
0.3507816
179.475


R-04
1.9262173
0.1063571
11.253
1.7173021
0.2869739
236.027


R-05
1.7355101
0.0947091
91.033
1.7079959
0.2693832
169.192


R-06
1.7251933
0.0829804
91.728
1.6903561
0.2192539
228.367


R-07
1.7054174
0.0718367
158.389
1.6812041
0.1954390
226.084


R-08
1.6937830
0.0647049
214.330
1.6889835
0.1894046
226.812


R-09
1.6952847
0.0582261
213.359
1.6934588
0.1611341
284.005


R-10
1.6957027
0.0542195
271.586
1.6918383
0.1679902
281.728






















TABLE 2-S





Case
n10
k10
d10
n20
k20
d20





















S-01
1.9316549
0.2158025
14.297
1.6202378
0.4645248
119.165


S-02
1.9193011
0.1476126
13.272
1.6935029
0.3598725
170.049


S-03
1.9209840
0.1061325
11.842
1.7241227
0.2946413
224.030


S-04
1.9114684
0.1024475
10.224
1.6976483
0.2438294
285.021


S-05
1.7364379
0.0969838
91.033
1.7085420
0.2774318
158.680


S-06
1.7258494
0.0843222
91.766
1.6907525
0.2229229
218.067


S-07
1.7176246
0.0727056
91.617
1.6784161
0.1842107
277.206


S-08
1.7057732
0.0731106
158.709
1.6805392
0.1989479
215.842


S-09
1.7053832
0.0633918
158.181
1.6859880
0.1669818
272.384


S-10
1.6928552
0.0748243
216.444
1.6825267
0.2415835
158.548


S-11
1.6935473
0.0663823
214.407
1.6888366
0.1945007
217.060


S-12
1.6950516
0.0596605
213.429
1.6925794
0.1643538
274.430


S-13
1.6954923
0.0554795
271.226
1.6917166
0.1716832
272.356






















TABLE 2-T





Case
n10
k10
d10
n20
k20
d20





















T-01
1.9124203
0.1489422
14.330
1.7039618
0.3787231
157.291


T-02
1.9240615
0.1092971
12.001
1.7245262
0.3026113
214.201


T-03
1.9069086
0.1015424
10.748
1.7018591
0.2499950
273.963


T-04
1.7409810
0.0988730
91.533
1.7256420
0.2922591
146.253


T-05
1.7270720
0.0857435
92.142
1.6923707
0.2292874
207.814


T-06
1.7180387
0.0734703
91.877
1.6777924
0.1881130
267.481


T-07
1.7063746
0.0744769
159.624
1.6791348
0.2047799
205.830


T-08
1.7058520
0.0640895
158.885
1.6855365
0.1710983
262.479


T-09
1.6924739
0.0767908
216.680
1.6850078
0.2520629
148.712


T-10
1.6928977
0.0684401
213.761
1.6885850
0.1999527
208.689


T-11
1.6947635
0.0610999
213.366
1.6918971
0.1679521
265.388


T-12
1.6952371
0.0566636
270.653
1.6914186
0.1751623
263.994






















TABLE 3-A





Case
n10
k10
d10
n20
k20
d20





















A-01
2.0940641
0.0325844
26.090
4.2290158
2.3935124
3.632


A-02
1.9168406
0.1807255
35.662
5.4932306
0.6123354
19.087


A-03
1.8970115
0.1529573
31.182
2.4318401
0.5958382
52.406


A-04
1.8805879
0.1098415
13.577
1.7032895
0.2751108
218.193


A-05
1.8778358
0.1082679
19.930
1.8340760
0.3677230
142.226


A-06
1.8663312
0.0978132
12.232
1.6938400
0.2288643
277.705


A-07
1.7888608
0.1060865
103.503
4.4234099
0.4526804
24.164


A-08
1.7735009
0.0957437
98.181
2.0208865
0.4158741
66.693


A-09
1.7175310
0.0751352
95.409
1.6658936
0.2054797
212.937


A-10
1.7199475
0.0655065
94.621
1.6963762
0.1762614
266.043


A-11
1.7156729
0.0770168
188.315
6.9620048
3.4231449
0.879


A-12
1.7043499
0.0644952
165.315
1.6731418
0.1899705
207.250


A-13
1.7082412
0.0577629
163.169
1.7075031
0.1626792
259.766


A-14
1.6926126
0.0683906
237.184
6.7859369
2.9992529
0.993


A-15
1.6890888
0.0745003
217.718
1.7770504
0.3401503
84.925


A-16
1.6903292
0.0721915
210.963
1.7111030
0.2426612
155.846


A-17
1.6921355
0.0670288
207.063
1.6978167
0.1954345
222.387


A-18
1.6951475
0.0546351
219.259
1.6889102
0.1606659
263.728


A-19
1.7004017
0.0599028
265.986
1.7029410
0.1992607
214.965






















TABLE 3-B





Case
n10
k10
d10
n20
k20
d20





















B-01
1.8738578
0.2051029
37.506
6.9151921
0.6847654
14.288


B-02
1.8839217
0.1169859
20.540
1.8488520
0.3990514
132.865


B-03
1.8842367
0.1130268
14.059
1.7087850
0.2917115
208.377


B-04
1.8705650
0.1010320
12.433
1.6946915
0.2394813
268.610


B-05
1.7997475
0.1076402
101.817
5.7702673
0.5312541
17.283


B-06
1.7189014
0.0782837
95.289
1.6643388
0.2165956
204.139


B-07
1.7208712
0.0678223
94.558
1.6960341
0.1841027
257.386


B-08
1.7236639
0.0843652
181.922
5.6387216
4.7363270
0.821


B-09
1.7047019
0.0670962
165.192
1.6715149
0.1999125
198.564


B-10
1.7084293
0.0597123
163.108
1.7074208
0.1697699
251.199


B-11
1.6912240
0.0750717
235.933
5.6089359
4.1789938
0.921


B-12
1.6881032
0.0788193
218.423
1.7881557
0.3823123
76.059


B-13
1.6896993
0.0752193
211.247
1.7110684
0.2595743
147.061


B-14
1.6917374
0.0692921
207.206
1.6970724
0.2053429
213.576


B-15
1.6948846
0.0562662
219.172
1.6877325
0.1673191
255.276


B-16
1.7002883
0.0618224
266.113
1.7025341
0.2096252
206.193


B-17
1.6987256
0.0572006
264.952
1.6934905
0.1744162
266.771






















TABLE 3-C





Case
n10
k10
d10
n20
k20
d20





















C-01
1.8384852
0.2367471
38.632
4.7928214
0.7766058
20.034


C-02
1.8997218
0.1227276
21.226
1.8945709
0.4412749
121.762


C-03
1.8867733
0.1201944
14.426
1.7066853
0.3085187
200.277


C-04
1.8774399
0.1030917
12.555
1.6978346
0.2515853
259.495


C-05
1.8168537
0.1206742
98.976
5.6725781
0.5943855
16.950


C-06
1.7203847
0.0818178
95.097
1.6625491
0.2295920
195.706


C-07
1.7222308
0.0703272
94.450
1.6972414
0.1929579
248.789


C-08
1.7051744
0.0699535
164.924
1.6707295
0.2115581
190.095


C-09
1.7089344
0.0618729
162.999
1.7091982
0.1777196
242.642


C-10
1.6891179
0.0788518
211.328
1.7121044
0.2799946
139.125


C-11
1.6914863
0.0717884
207.154
1.6970451
0.2167627
205.768


C-12
1.6947006
0.0580661
219.137
1.6875442
0.1751428
246.865


C-13
1.7002933
0.0640004
266.055
1.7022941
0.2216801
198.139


C-14
1.6987290
0.0588877
264.992
1.6933668
0.1822428
258.415






















TABLE 3-D





Case
n10
k10
d10
n20
k20
d20





















D-01
1.8909619
0.2198688
30.886
2.4457650
0.9042920
40.480


D-02
1.9211597
0.1299283
20.325
1.8999891
0.4762728
114.977


D-03
1.8908364
0.1293290
14.409
1.6971949
0.3219355
192.850


D-04
1.8788634
0.1089981
12.666
1.6934061
0.2597468
251.595


D-05
1.7209142
0.0850231
94.685
1.6569532
0.2398462
187.582


D-06
1.7236493
0.0725136
94.253
1.6994520
0.2004026
239.752


D-07
1.7053690
0.0723352
164.385
1.6690598
0.2212238
181.544


D-08
1.7096103
0.0638708
162.799
1.7121782
0.1844639
233.616


D-09
1.6884398
0.0822671
210.788
1.7077650
0.2979850
132.459


D-10
1.6913141
0.0737244
206.649
1.6954335
0.2262249
199.430


D-11
1.6945163
0.0596605
219.093
1.6879518
0.1823501
237.943


D-12
1.7002615
0.0658973
265.562
1.6991117
0.2320843
190.875


D-13
1.6987767
0.0602453
264.538
1.6924357
0.1888152
250.808






















TABLE 3-E





Case
n10
k10
d10
n20
k20
d20





















E-01
1.9413239
0.1405566
18.043
1.8442891
0.4845639
113.109


E-02
1.8877645
0.1445306
14.095
1.6688638
0.3235014
187.292


E-03
1.8798429
0.1135692
12.637
1.6888514
0.2638544
243.053


E-04
1.7202563
0.0870823
94.214
1.6489031
0.2445724
179.182


E-05
1.7249517
0.0739360
94.041
1.7027050
0.2047377
229.905


E-06
1.7053831
0.0736370
163.843
1.6671854
0.2267475
172.382


E-07
1.7104785
0.0654156
162.671
1.7160090
0.1885946
223.774


E-08
1.6877471
0.0844092
209.661
1.6959640
0.3073448
127.018


E-09
1.6915115
0.0739491
205.513
1.6904122
0.2298496
196.556


E-10
1.6941672
0.0608347
218.889
1.6879018
0.1872431
228.501


E-11
1.6941096
0.0560046
215.482
1.6938988
0.1599964
287.470


E-12
1.7000691
0.0669711
264.757
1.6924460
0.2378630
184.028


E-13
1.6987341
0.0608862
263.855
1.6911373
0.1924284
243.250






















TABLE 3-F





Case
n10
k10
d10
n20
k20
d20





















F-01
1.8998120
0.2622743
21.573
1.6944131
0.7809017
53.320


F-02
1.9599431
0.1538418
15.993
1.7907917
0.4780154
111.028


F-03
1.8792360
0.1119058
12.895
1.6940206
0.2681658
231.714


F-04
1.8920036
0.0671877
11.926
1.7462722
0.2347435
280.522


F-05
1.7198405
0.0878543
93.971
1.6452515
0.2473168
169.419


F-06
1.7267515
0.0746914
93.982
1.7088385
0.2076415
218.911


F-07
1.7286377
0.0697592
94.711
1.7257237
0.1796886
273.487


F-08
1.7058235
0.0740364
163.674
1.6690540
0.2306007
161.946


F-09
1.6871196
0.0856014
208.540
1.6832134
0.3092532
121.170


F-10
1.6936372
0.0616799
218.466
1.6877720
0.1900717
218.772


F-11
1.6996002
0.0674630
264.231
1.6851097
0.2396601
175.944


F-12
1.6985143
0.0611760
263.586
1.6903246
0.1936289
234.054






















TABLE 3-G





Case
n10
k10
d10
n20
k20
d20





















G-01
1.8814830
0.2936564
22.098
1.6321609
0.8097385
46.190


G-02
1.9657443
0.1688741
15.852
1.7726563
0.4923001
103.170


G-03
1.8787154
0.1109169
13.263
1.6996278
0.2745566
220.404


G-04
1.8913468
0.0695388
12.162
1.7469121
0.2387131
270.807


G-05
1.7209187
0.0883668
94.055
1.6482914
0.2540527
158.511


G-06
1.7288665
0.0756184
94.090
1.7153723
0.2125971
207.924


G-07
1.7286370
0.0709992
94.923
1.7241262
0.1831189
263.961


G-08
1.7068032
0.0744994
163.814
1.6739446
0.2371534
151.052


G-09
1.6862856
0.0878163
208.124
1.6736237
0.3138657
112.320


G-10
1.6931399
0.0624918
217.968
1.6872372
0.1926334
209.546


G-11
1.6935780
0.0575917
214.501
1.6927449
0.1631490
269.036


G-12
1.6987845
0.0682876
264.829
1.6826884
0.2430960
164.540


G-13
1.6982075
0.0620058
264.409
1.6907687
0.1959423
222.065






















TABLE 3-H





Case
n10
k10
d10
n20
k20
d20





















H-01
1.8508920
0.3299462
26.713
1.6561984
1.0215947
31.481


H-02
1.9432602
0.1828608
18.534
1.7922587
0.5435792
89.452


H-03
1.8788012
0.1571474
15.200
1.6553949
0.3498651
157.519


H-04
1.8809660
0.1122948
13.670
1.7045069
0.2862016
210.391


H-05
1.8914032
0.0691945
12.762
1.7559855
0.2487147
259.753


H-06
1.7233184
0.0905387
94.254
1.6520214
0.2670378
148.504


H-07
1.7297992
0.0774990
94.232
1.7157415
0.2209454
198.899


H-08
1.7292921
0.0722395
94.957
1.7247476
0.1892941
254.857


H-09
1.7076375
0.0765186
163.992
1.6752795
0.2482558
141.650


H-10
1.6902915
0.0790058
206.654
1.6879680
0.2475793
161.284


H-11
1.6929156
0.0637318
217.693
1.6856131
0.1973081
201.188


H-12
1.6935338
0.0581307
214.870
1.6920922
0.1667488
259.776


H-13
1.6984313
0.0697413
266.256
1.6871666
0.2538157
152.235


H-14
1.6980068
0.0633264
265.782
1.6912942
0.2022310
210.360


H-15
1.6970347
0.0530849
275.682
1.6884244
0.1714348
256.304






















TABLE 3-I





Case
n10
k10
d10
n20
k20
d20





















I-01
1.9192397
0.1987767
21.654
1.8264016
0.6189774
76.882


I-02
1.8910111
0.1570861
15.844
1.6782576
0.3828036
146.288


I-03
1.8874292
0.1170062
13.907
1.7063011
0.3024107
201.867


I-04
1.8928956
0.0800147
12.695
1.7424852
0.2571531
254.323


I-05
1.7266669
0.0953661
94.323
1.6542284
0.2869718
139.595


I-06
1.7296393
0.0805906
94.242
1.7097783
0.2319224
191.543


I-07
1.7299249
0.0737621
94.784
1.7252153
0.1970612
246.491


I-08
1.6899362
0.0817785
208.164
1.6924320
0.2651701
148.618


I-09
1.6928826
0.0657282
217.665
1.6832004
0.2055611
193.166


I-10
1.6935628
0.0590519
215.464
1.6914497
0.1728158
250.826


I-11
1.6988269
0.0719884
266.949
1.6930572
0.2717519
142.233


I-12
1.6981501
0.0650380
266.102
1.6910453
0.2123559
201.439


I-13
1.6968464
0.0544760
275.663
1.6860880
0.1778694
248.323






















TABLE 3-J





Case
n10
k10
d10
n20
k20
d20





















J-01
1.9207610
0.2195112
22.312
1.8258536
0.6986358
68.737


J-02
1.9093240
0.1610220
16.027
1.6981498
0.4189775
136.163


J-03
1.8948938
0.1257399
13.855
1.7003095
0.3177305
194.613


J-04
1.8966282
0.0900141
12.530
1.7305926
0.2658040
248.346


J-05
1.7293323
0.0843251
93.974
1.7018671
0.2432029
184.391


J-06
1.7301568
0.0757850
94.458
1.7237225
0.2045935
238.500


J-07
1.6896128
0.0845530
207.994
1.6930315
0.2839311
141.193


J-08
1.6928686
0.0680057
217.789
1.6806392
0.2160083
184.741


J-09
1.6935394
0.0604311
215.751
1.6908086
0.1799717
242.024


J-10
1.6995193
0.0747728
266.467
1.6953349
0.2921202
134.479


J-11
1.6986281
0.0669339
265.290
1.6902923
0.2238725
194.429


J-12
1.6967467
0.0559821
275.562
1.6844237
0.1853984
239.846






















TABLE 3-K





Case
n10
k10
d10
n20
k20
d20





















K-01
1.9214172
0.1753360
15.452
1.6804411
0.4367098
129.893


K-02
1.9009993
0.1351301
13.611
1.6899586
0.3280314
187.370


K-03
1.8999222
0.0954510
12.469
1.7262130
0.2728992
240.318


K-04
1.7289797
0.0876375
93.472
1.6943958
0.2513033
176.630


K-05
1.7301397
0.0779683
94.062
1.7208177
0.2098777
230.281


K-06
1.6897075
0.0859154
206.600
1.6860653
0.2958058
138.770


K-07
1.6928599
0.0698704
218.100
1.6784557
0.2260347
175.355


K-08
1.6933895
0.0619572
215.832
1.6904996
0.1864736
232.785


K-09
1.6967442
0.0572224
275.439
1.6838077
0.1920294
230.401






















TABLE 3-L





Case
n10
k10
d10
n20
k20
d20





















L-01
1.9907624
0.2658843
16.877
1.6777634
0.7245088
66.041


L-02
1.9229056
0.1943367
14.896
1.6435696
0.4392836
124.711


L-03
1.9003143
0.1434936
13.590
1.6791032
0.3336019
179.139


L-04
1.9049048
0.0972823
12.362
1.7269066
0.2779612
230.763


L-05
1.7296380
0.0899801
93.128
1.6935089
0.2572784
167.093


L-06
1.7305285
0.0799609
93.907
1.7196209
0.2133806
220.978


L-07
1.6927568
0.0712762
218.499
1.6781695
0.2348207
164.929


L-08
1.6930586
0.0635805
215.646
1.6903056
0.1916344
223.237


L-09
1.6939267
0.0583165
213.162
1.6934648
0.1626221
282.414


L-10
1.6970265
0.0526106
273.430
1.6908020
0.1682270
277.869






















TABLE 3-M





Case
n10
k10
d10
n20
k20
d20





















M-01
1.8968086
0.1457981
14.128
1.6815336
0.3444919
167.613


M-02
1.9070303
0.0954881
12.717
1.7369802
0.2856144
218.968


M-03
1.9016797
0.0905797
10.946
1.7110902
0.2381911
280.601


M-04
1.7329805
0.0916823
93.296
1.7056329
0.2670261
155.076


M-05
1.7161015
0.0708259
94.224
1.6780965
0.1788543
274.399


M-06
1.6922053
0.0726320
218.650
1.6800076
0.2436881
154.426


M-07
1.6924923
0.0653867
214.871
1.6897434
0.1959626
214.392


M-08
1.6935584
0.0598502
212.072
1.6927128
0.1654173
274.211


M-09
1.6967916
0.0533770
273.133
1.6904661
0.1709158
268.389






















TABLE 3-N





Case
n10
k10
d10
n20
k20
d20





















N-01
1.8931613
0.1437464
15.228
1.6981871
0.3648670
154.635


N-02
1.9086798
0.0925277
13.463
1.7547782
0.2987738
206.696


N-03
1.8957546
0.1021679
11.154
1.6965397
0.2414267
273.752


N-04
1.7383088
0.0935643
93.735
1.7255584
0.2828024
142.972


N-05
1.7163304
0.0717315
94.330
1.6763108
0.1832109
265.207


N-06
1.7036586
0.0640636
161.836
1.6842842
0.1670348
260.021


N-07
1.6919166
0.0672926
213.353
1.6889376
0.2002175
207.074


N-08
1.6911838
0.0743991
218.060
1.6805827
0.2524809
145.761


N-09
1.6942185
0.0545821
211.644
1.6930391
0.1466022
321.654


N-10
1.6965335
0.0539924
273.036
1.6894839
0.1738185
259.712






















TABLE 3-O





Case
n10
k10
d10
n20
k20
d20





















O-01
1.8962402
0.1446868
16.058
1.7149739
0.3909951
143.691


O-02
1.9162756
0.0920008
13.917
1.7705409
0.3160160
196.340


O-03
1.8972293
0.1039493
11.503
1.6986687
0.2516185
264.437


O-04
1.7171631
0.0735355
94.241
1.6756859
0.1901883
256.660


O-05
1.7039366
0.0654419
161.496
1.6849902
0.1728826
251.490


O-06
1.6903081
0.0771344
216.305
1.6786590
0.2613948
139.207


O-07
1.6915399
0.0690906
212.338
1.6881028
0.2062149
199.770


O-08
1.6931731
0.0615887
211.917
1.6918937
0.1729009
256.415


O-09
1.6963857
0.0546855
273.170
1.6879125
0.1780863
251.444






















TABLE 3-P





Case
n10
k10
d10
n20
k20
d20





















P-01
1.9078860
0.1508452
16.208
1.7232027
0.4201511
134.826


P-02
1.9270939
0.0963716
13.863
1.7738090
0.3331580
188.374


P-03
1.9009914
0.1079582
11.657
1.6981472
0.2622250
256.036


P-04
1.7182026
0.0759211
93.910
1.6754262
0.1979303
248.261


P-05
1.7037276
0.0670447
160.452
1.6860603
0.1785858
243.357


P-06
1.6914048
0.0705280
212.904
1.6862460
0.2142065
190.804


P-07
1.6932944
0.0619823
213.027
1.6912789
0.1784688
246.475


P-08
1.6971949
0.0758678
268.193
1.6840809
0.2789945
135.240


P-09
1.6963748
0.0557064
273.316
1.6860970
0.1841499
242.973






















TABLE 3-Q





Case
n10
k10
d10
n20
k20
d20





















Q-01
1.9345747
0.1082213
13.373
1.7554016
0.3434593
183.042


Q-02
1.9100928
0.1149883
11.317
1.6916658
0.2694423
248.707


Q-03
1.9218874
0.1634556
15.608
1.7091703
0.4402763
128.647


Q-04
1.7188695
0.0782891
93.463
1.6745648
0.2040549
239.614


Q-05
1.7031385
0.0685384
159.293
1.6866422
0.1829170
234.977


Q-06
1.6934237
0.0627890
213.592
1.6908665
0.1844160
236.853


Q-07
1.6934242
0.0627998
213.572
1.6907829
0.1843934
236.891


Q-08
1.6985617
0.0777714
264.836
1.6854326
0.2962369
131.733


Q-09
1.6963947
0.0569261
273.344
1.6845211
0.1907955
233.824






















TABLE 3-R





Case
n10
k10
d10
n20
k20
d20





















R-01
1.9329388
0.1795701
14.789
1.6812994
0.4483886
123.825


R-02
1.9368237
0.1224596
12.921
1.7305084
0.3477304
177.704


R-03
1.9141366
0.1196035
11.206
1.6882344
0.2744889
240.000


R-04
1.7191879
0.0801581
93.133
1.6734445
0.2077092
230.286


R-05
1.7029035
0.0699625
158.805
1.6865116
0.1862225
225.674


R-06
1.6933701
0.0640425
213.864
1.6904005
0.1898312
227.117


R-07
1.6939475
0.0576888
212.435
1.6925921
0.1618810
285.048


R-08
1.6969386
0.0533290
271.986
1.6924288
0.1673219
281.091






















TABLE 3-S





Case
n10
k10
d10
n20
k20
d20





















S-01
1.9315873
0.1333486
13.169
1.7169625
0.3552140
168.729


S-02
1.9153217
0.1206110
11.351
1.6899751
0.2797802
229.265


S-03
1.8972445
0.1001874
10.604
1.6952918
0.2334251
285.679


S-04
1.7198506
0.0813984
93.215
1.6740113
0.2110946
219.867


S-05
1.7209927
0.0705203
93.408
1.6975541
0.1793898
273.456


S-06
1.7035608
0.0713918
159.462
1.6857491
0.1901066
215.251


S-07
1.6916743
0.0742011
216.137
1.6815589
0.2413942
158.897


S-08
1.6930483
0.0657083
213.861
1.6902271
0.1951191
217.477


S-09
1.6936984
0.0591625
212.273
1.6918699
0.1652801
275.792


S-10
1.6968810
0.0544417
271.786
1.6922876
0.1708476
271.501






















TABLE 3-T





Case
n10
k10
d10
n20
k20
d20





















T-01
1.9249373
0.1361664
14.155
1.7251855
0.3723543
156.237


T-02
1.9134695
0.1202777
11.822
1.6947701
0.2878755
218.180


T-03
1.8970797
0.0999072
10.899
1.6978665
0.2388400
275.054


T-04
1.7208445
0.0825059
93.633
1.6746972
0.2167421
209.700


T-05
1.7215107
0.0711590
93.747
1.6977852
0.1834377
263.540


T-06
1.7046380
0.0728087
160.840
1.6842748
0.1961079
204.946


T-07
1.7071945
0.0643745
160.796
1.7036838
0.1674255
259.158


T-08
1.6911424
0.0761042
216.237
1.6835271
0.2518702
149.208


T-09
1.6924731
0.0678273
212.933
1.6899027
0.2006809
209.434


T-10
1.6944113
0.0547711
211.610
1.6931553
0.1468072
323.528


T-11
1.6967389
0.0554960
271.524
1.6919127
0.1743507
262.739






















TABLE 4-A





Case
n10
k10
d10
n20
k20
d20





















A-01
2.070
0.020
27.974
5.553
3.053
2.024


A-02
1.955
0.138
34.826
9.284
0.606
10.907


A-03
1.895
0.133
29.218
2.177
0.543
63.407


A-04
1.875
0.110
17.990
1.753
0.330
152.930


A-05
1.870
0.101
13.959
1.700
0.255
218.765


A-06
1.867
0.070
13.235
1.732
0.221
270.745


A-07
1.699
0.063
165.016
1.698
0.180
204.222


A-08
1.693
0.058
157.920
1.698
0.154
265.886


A-09
1.692
0.069
236.756
6.942
3.076
0.950


A-10
1.694
0.074
217.672
1.788
0.339
84.006


A-11
1.699
0.071
210.274
1.718
0.242
154.667


A-12
1.698
0.065
207.280
1.695
0.194
219.490


A-13
1.695
0.054
219.181
1.688
0.161
263.755






















TABLE 4-B





Case
n10
k10
d10
n20
k20
d20





















B-01
1.894
0.182
37.493
9.246
0.662
10.628


B-02
1.881
0.116
18.625
1.766
0.358
142.939


B-03
1.874
0.105
14.298
1.701
0.269
209.610


B-04
1.872
0.074
13.408
1.733
0.231
261.989


B-05
1.693
0.060
158.097
1.697
0.160
257.142


B-06
1.690
0.074
235.203
5.632
4.204
0.919


B-07
1.693
0.078
218.334
1.803
0.382
74.994


B-08
1.699
0.074
210.503
1.719
0.259
145.797


B-09
1.698
0.067
207.468
1.694
0.203
210.546


B-10
1.695
0.055
219.130
1.687
0.167
255.274






















TABLE 4-C





Case
n10
k10
d10
n20
k20
d20





















C-01
1.855
0.222
38.795
9.554
0.714
10.003


C-02
1.894
0.121
19.092
1.787
0.392
133.195


C-03
1.879
0.110
14.598
1.702
0.285
201.011


C-04
1.879
0.076
13.458
1.736
0.242
253.439


C-05
1.692
0.062
158.198
1.697
0.168
248.709


C-06
1.699
0.078
210.437
1.720
0.280
137.855


C-07
1.698
0.070
207.381
1.693
0.215
202.487


C-08
1.695
0.057
219.158
1.687
0.175
246.765






















TABLE 4-D





Case
n10
k10
d10
n20
k20
d20





















D-01
1.921
0.198
29.852
2.410
0.850
42.336


D-02
1.907
0.132
18.597
1.779
0.418
126.566


D-03
1.883
0.117
14.666
1.698
0.298
192.788


D-04
1.885
0.078
13.425
1.738
0.251
244.904


D-05
1.692
0.064
158.019
1.697
0.174
240.368


D-06
1.700
0.081
209.560
1.716
0.298
131.419


D-07
1.698
0.072
206.609
1.692
0.225
195.862


D-08
1.695
0.059
219.174
1.688
0.183
237.750


D-09
1.705
0.053
283.412
1.691
0.185
233.362






















TABLE 4-E





Case
n10
k10
d10
n20
k20
d20





















E-01
1.943
0.213
22.907
1.902
0.785
53.731


E-02
1.907
0.153
17.372
1.716
0.418
124.143


E-03
1.884
0.123
14.585
1.691
0.305
184.536


E-04
1.891
0.078
13.392
1.743
0.257
235.129


E-05
1.691
0.066
157.377
1.696
0.178
232.195


E-06
1.699
0.072
204.994
1.688
0.231
192.230


E-07
1.695
0.060
219.095
1.689
0.188
228.102


E-08
1.704
0.054
283.255
1.689
0.189
224.255






















TABLE 4-F





Case
n10
k10
d10
n20
k20
d20





















F-01
1.895
0.076
13.537
1.753
0.262
223.848


F-02
1.882
0.126
14.752
1.688
0.309
174.672


F-03
1.690
0.068
155.845
1.693
0.181
224.616


F-04
1.701
0.084
206.275
1.686
0.310
122.505


F-05
1.693
0.070
221.382
1.667
0.231
161.928


F-06
1.695
0.060
218.851
1.689
0.190
218.129


F-07
1.695
0.055
215.764
1.693
0.162
277.062


F-08
1.703
0.049
278.302
1.691
0.159
273.241






















TABLE 4-G





Case
n10
k10
d10
n20
k20
d20





















G-01
1.881
0.189
17.242
1.617
0.409
111.921


G-02
1.879
0.125
15.444
1.697
0.320
162.536


G-03
1.898
0.073
14.029
1.767
0.271
211.582


G-04
1.873
0.092
12.003
1.696
0.218
280.785


G-05
1.715
0.067
99.925
1.686
0.167
269.056


G-06
1.693
0.070
221.230
1.668
0.236
151.884


G-07
1.695
0.061
218.569
1.689
0.193
208.598


G-08
1.695
0.055
215.552
1.692
0.164
267.637






















TABLE 4-H





Case
n10
k10
d10
n20
k20
d20





















H-01
1.880
0.126
16.279
1.709
0.340
151.148


H-02
1.901
0.074
14.624
1.778
0.284
201.087


H-03
1.874
0.095
12.218
1.694
0.225
271.916


H-04
1.716
0.068
99.848
1.687
0.173
259.863


H-05
1.692
0.072
220.366
1.668
0.244
143.647


H-06
1.695
0.062
218.447
1.688
0.198
200.044


H-07
1.695
0.056
215.754
1.691
0.167
258.621






















TABLE 4-I





Case
n10
k10
d10
n20
k20
d20





















I-01
1.888
0.130
16.763
1.718
0.366
141.793


I-02
1.903
0.081
14.911
1.775
0.299
193.492


I-03
1.880
0.095
12.432
1.700
0.236
262.434


I-04
1.693
0.063
156.037
1.696
0.165
252.531


I-05
1.695
0.064
218.418
1.685
0.207
192.031


I-06
1.695
0.057
216.093
1.691
0.173
249.945


I-07
1.704
0.051
278.289
1.691
0.173
246.105






















TABLE 4-J





Case
n10
k10
d10
n20
k20
d20





















J-01
1.902
0.140
16.621
1.717
0.393
134.110


J-02
1.906
0.093
14.821
1.761
0.312
187.587


J-03
1.888
0.096
12.503
1.706
0.247
253.021


J-04
1.694
0.066
218.392
1.682
0.217
183.765


J-05
1.695
0.059
216.276
1.691
0.180
241.184


J-06
1.704
0.052
278.098
1.689
0.180
237.690






















TABLE 4-K





Case
n10
k10
d10
n20
k20
d20





















K-01
1.915
0.153
15.972
1.700
0.410
128.035


K-02
1.908
0.105
14.452
1.741
0.319
181.864


K-03
1.895
0.097
12.386
1.708
0.254
244.026


K-04
1.692
0.060
153.833
1.696
0.152
294.292


K-05
1.694
0.068
218.491
1.679
0.227
174.638


K-06
1.695
0.060
216.291
1.691
0.187
231.949


K-07
1.705
0.054
277.828
1.688
0.185
228.622






















TABLE 4-L





Case
n10
k10
d10
n20
k20
d20





















L-01
1.919
0.168
15.470
1.675
0.416
121.998


L-02
1.909
0.114
14.219
1.728
0.323
174.431


L-03
1.897
0.102
12.252
1.703
0.257
235.332


L-04
1.692
0.061
153.490
1.695
0.154
285.775


L-05
1.694
0.069
218.807
1.679
0.236
164.294


L-06
1.695
0.061
216.166
1.690
0.192
222.296


L-07
1.696
0.056
214.076
1.694
0.163
280.805


L-08
1.706
0.051
276.333
1.706
0.162
273.925






















TABLE 4-M





Case
n10
k10
d10
n20
k20
d20





















M-01
1.909
0.116
14.671
1.733
0.334
163.102


M-02
1.895
0.106
12.483
1.700
0.261
225.249


M-03
1.879
0.083
11.828
1.710
0.220
280.433


M-04
1.694
0.071
219.020
1.682
0.245
153.670


M-05
1.695
0.063
215.746
1.690
0.197
212.983


M-06
1.696
0.057
213.723
1.693
0.165
271.596


M-07
1.706
0.052
276.363
1.706
0.164
264.087






















TABLE 4-N





Case
n10
k10
d10
n20
k20
d20





















N-01
1.910
0.115
15.725
1.755
0.355
150.207


N-02
1.892
0.109
12.960
1.698
0.268
215.505


N-03
1.879
0.084
12.187
1.712
0.226
270.397


N-04
1.694
0.072
218.706
1.684
0.254
144.577


N-05
1.694
0.064
215.091
1.689
0.201
204.614


N-06
1.696
0.058
213.482
1.692
0.169
262.678


N-07
1.706
0.052
276.472
1.707
0.168
254.823






















TABLE 4-O





Case
n10
k10
d10
n20
k20
d20





















O-01
1.919
0.115
16.638
1.785
0.385
138.580


O-02
1.893
0.113
13.413
1.697
0.281
206.656


O-03
1.882
0.085
12.438
1.715
0.235
261.237


O-04
1.694
0.074
217.741
1.683
0.264
137.032


O-05
1.694
0.065
214.737
1.687
0.207
196.488


O-06
1.695
0.059
213.710
1.692
0.173
253.675


O-07
1.707
0.053
276.548
1.707
0.174
246.168






















TABLE 4-P





Case
n10
k10
d10
n20
k20
d20





















P-01
1.937
0.118
16.771
1.806
0.418
129.251


P-02
1.898
0.119
13.576
1.695
0.295
198.434


P-03
1.890
0.087
12.460
1.718
0.246
252.589


P-04
1.694
0.077
216.630
1.679
0.277
129.875


P-05
1.694
0.067
214.866
1.684
0.215
188.027


P-06
1.695
0.060
214.034
1.692
0.179
244.657


P-07
1.707
0.054
276.376
1.707
0.181
237.806






















TABLE 4-Q





Case
n10
k10
d10
n20
k20
d20





















Q-01
1.958
0.128
15.815
1.794
0.439
123.830


Q-02
1.903
0.127
13.420
1.688
0.307
190.984


Q-03
1.898
0.090
12.296
1.719
0.254
244.231


Q-04
1.694
0.080
215.821
1.668
0.290
122.663


Q-05
1.694
0.068
215.165
1.681
0.224
179.093


Q-06
1.696
0.061
214.210
1.692
0.185
235.479


Q-07
1.707
0.056
275.996
1.705
0.187
229.352






















TABLE 4-R





Case
n10
k10
d10
n20
k20
d20





















R-01
1.907
0.135
13.188
1.679
0.313
183.151


R-02
1.904
0.092
12.121
1.720
0.260
235.214


R-03
1.694
0.070
215.718
1.679
0.233
169.072


R-04
1.696
0.062
214.371
1.692
0.190
225.802


R-05
1.704
0.051
274.345
1.687
0.159
280.556






















TABLE 4-S





Case
n10
k10
d10
n20
k20
d20





















S-01
1.908
0.140
13.288
1.676
0.321
172.696


S-02
1.906
0.092
12.370
1.726
0.266
223.910


S-03
1.889
0.087
11.418
1.707
0.223
283.898


S-04
1.693
0.071
216.427
1.681
0.243
158.126


S-05
1.696
0.064
214.510
1.692
0.195
215.938


S-06
1.696
0.057
213.492
1.691
0.166
273.809


S-07
1.704
0.052
274.677
1.687
0.162
270.432






















TABLE 4-T





Case
n10
k10
d10
n20
k20
d20





















T-01
1.907
0.139
13.915
1.684
0.334
160.500


T-02
1.904
0.091
13.010
1.734
0.275
212.141


T-03
1.887
0.088
11.752
1.707
0.227
273.737


T-04
1.693
0.073
216.656
1.683
0.253
148.279


T-05
1.696
0.065
214.259
1.692
0.201
206.980


T-06
1.696
0.058
213.637
1.690
0.169
264.528


T-07
1.704
0.053
275.120
1.687
0.165
260.887






















TABLE 5-A





Case
n10
k10
d10
n20
k20
d20





















A-01
2.047
0.012
29.751
6.274
3.305
1.566


A-02
1.887
0.120
26.980
1.973
0.477
76.285


A-03
1.871
0.106
17.106
1.713
0.298
158.161


A-04
1.868
0.075
15.339
1.738
0.245
212.612


A-05
1.862
0.065
13.830
1.730
0.208
271.884


A-06
1.691
0.062
161.852
1.688
0.179
207.262


A-07
1.692
0.057
157.460
1.697
0.154
266.043


A-08
1.711
0.070
239.891
7.420
3.291
0.810


A-09
1.704
0.057
226.155
1.689
0.187
202.908


A-10
1.705
0.050
221.451
1.695
0.158
261.182


A-11
1.695
0.054
267.286
1.705
0.184
212.751






















TABLE 5-B





Case
n10
k10
d10
n20
k20
d20





















B-01
1.943
0.121
34.905
6.149
4.965
1.046


B-02
1.876
0.112
17.699
1.719
0.321
148.502


B-03
1.873
0.080
15.588
1.739
0.258
203.950


B-04
1.866
0.068
14.042
1.732
0.217
262.757


B-05
1.691
0.064
161.844
1.687
0.188
198.716


B-06
1.692
0.059
157.652
1.696
0.161
257.279


B-07
1.706
0.052
221.303
1.695
0.165
252.591


B-08
1.711
0.075
235.815
6.235
4.691
0.724


B-09
1.704
0.059
225.762
1.687
0.197
194.502


B-10
1.695
0.056
267.452
1.705
0.194
204.028






















TABLE 5-C





Case
n10
k10
d10
n20
k20
d20





















C-01
1.883
0.119
18.157
1.723
0.349
139.788


C-02
1.879
0.084
15.746
1.741
0.274
195.542


C-03
1.872
0.069
14.214
1.737
0.228
253.893


C-04
1.692
0.061
157.790
1.697
0.168
248.784


C-05
1.705
0.061
225.478
1.687
0.209
186.105


C-06
1.706
0.054
221.123
1.695
0.173
244.149






















TABLE 5-D





Case
n10
k10
d10
n20
k20
d20





















D-01
1.890
0.130
18.083
1.714
0.371
132.495


D-02
1.886
0.088
15.723
1.743
0.287
187.112


D-03
1.877
0.073
14.196
1.736
0.236
245.779


D-04
1.692
0.062
157.690
1.697
0.175
240.328


D-05
1.705
0.063
225.284
1.687
0.220
177.345


D-06
1.706
0.055
220.863
1.695
0.180
235.453


D-07
1.695
0.055
262.917
1.705
0.178
255.408






















TABLE 5-E





Case
n10
k10
d10
n20
k20
d20





















E-01
1.891
0.144
17.530
1.686
0.376
126.586


E-02
1.892
0.091
15.545
1.744
0.296
178.253


E-03
1.878
0.079
14.050
1.728
0.240
238.151


E-04
1.691
0.064
157.168
1.696
0.179
231.953


E-05
1.705
0.064
225.395
1.686
0.227
167.881


E-06
1.706
0.056
220.607
1.694
0.184
226.210


E-07
1.697
0.047
278.691
1.700
0.152
281.986






















TABLE 5-F





Case
n10
k10
d10
n20
k20
d20





















F-01
1.896
0.091
15.652
1.752
0.303
167.408


F-02
1.875
0.087
14.019
1.715
0.239
230.256


F-03
1.705
0.064
225.606
1.687
0.232
157.678


F-04
1.705
0.057
220.354
1.694
0.186
216.433


F-05
1.708
0.053
218.289
1.707
0.158
272.538


F-06
1.697
0.047
278.413
1.701
0.154
271.867






















TABLE 5-G





Case
n10
k10
d10
n20
k20
d20





















G-01
1.901
0.088
16.388
1.774
0.318
154.194


G-02
1.871
0.093
14.267
1.706
0.241
221.319


G-03
1.866
0.067
13.172
1.724
0.206
275.098


G-04
1.706
0.065
225.317
1.687
0.238
147.740


G-05
1.705
0.057
220.112
1.694
0.188
206.685


G-06
1.708
0.053
218.342
1.707
0.161
262.805


G-07
1.697
0.047
278.070
1.702
0.156
262.294






















TABLE 5-H





Case
n10
k10
d10
n20
k20
d20





















H-01
1.908
0.087
17.362
1.802
0.342
141.959


H-02
1.871
0.097
14.654
1.704
0.250
212.121


H-03
1.869
0.067
13.479
1.729
0.214
265.153


H-04
1.706
0.067
224.641
1.684
0.248
139.263


H-05
1.705
0.058
220.026
1.694
0.194
197.616


H-06
1.708
0.054
218.429
1.707
0.165
253.768


H-07
1.697
0.048
277.999
1.702
0.160
253.663






















TABLE 5-I





Case
n10
k10
d10
n20
k20
d20





















I-01
1.918
0.092
17.977
1.822
0.371
132.466


I-02
1.876
0.100
14.944
1.706
0.265
203.140


I-03
1.874
0.069
13.674
1.733
0.224
256.300


I-04
1.706
0.060
219.996
1.694
0.203
189.146


I-05
1.709
0.055
218.382
1.707
0.172
245.309


I-06
1.697
0.050
278.074
1.701
0.166
245.468






















TABLE 5-J





Case
n10
k10
d10
n20
k20
d20





















J-01
1.929
0.101
17.864
1.821
0.398
125.532


J-02
1.883
0.103
14.973
1.709
0.279
194.479


J-03
1.880
0.071
13.709
1.736
0.234
247.823


J-04
1.707
0.062
219.774
1.693
0.214
180.753


J-05
1.709
0.057
218.071
1.706
0.179
237.020


J-06
1.697
0.047
275.083
1.700
0.148
295.680






















TABLE 5-K





Case
n10
k10
d10
n20
k20
d20





















K-01
1.891
0.108
14.702
1.707
0.289
186.368


K-02
1.885
0.074
13.594
1.735
0.241
239.426


K-03
1.707
0.064
219.485
1.692
0.223
171.867


K-04
1.709
0.058
217.678
1.705
0.184
228.411


K-05
1.697
0.048
275.043
1.701
0.152
286.426






















TABLE 5-L





Case
n10
k10
d10
n20
k20
d20





















L-01
1.896
0.113
14.435
1.703
0.295
177.615


L-02
1.887
0.078
13.577
1.733
0.244
230.253


L-03
1.692
0.059
153.772
1.694
0.154
284.837


L-04
1.707
0.065
219.581
1.692
0.231
161.904


L-05
1.709
0.059
217.561
1.702
0.188
219.131


L-06
1.707
0.053
216.484
1.695
0.157
278.062


L-07
1.697
0.048
274.812
1.701
0.154
276.656






















TABLE 5-M





Case
n10
k10
d10
n20
k20
d20





















M-01
1.898
0.115
14.632
1.705
0.303
166.646


M-02
1.885
0.081
13.917
1.732
0.248
219.851


M-03
1.868
0.075
12.752
1.713
0.206
279.921


M-04
1.707
0.067
219.938
1.695
0.239
151.390


M-05
1.708
0.060
217.756
1.701
0.192
209.457


M-06
1.706
0.054
217.065
1.694
0.160
268.021


M-07
1.696
0.049
274.075
1.702
0.157
267.366






















TABLE 5-N





Case
n10
k10
d10
n20
k20
d20





















N-01
1.899
0.115
15.367
1.714
0.318
155.141


N-02
1.882
0.083
14.477
1.732
0.256
209.893


N-03
1.870
0.074
13.063
1.717
0.212
269.637


N-04
1.708
0.062
217.887
1.700
0.197
200.272


N-05
1.707
0.055
217.378
1.693
0.164
258.646


N-06
1.696
0.050
273.384
1.702
0.160
258.714






















TABLE 5-O





Case
n10
k10
d10
n20
k20
d20





















O-01
1.903
0.118
16.130
1.723
0.340
145.164


O-02
1.884
0.087
14.896
1.733
0.268
201.113


O-03
1.874
0.075
13.357
1.722
0.221
260.240


O-04
1.708
0.063
217.693
1.700
0.205
191.744


O-05
1.707
0.056
217.044
1.694
0.169
250.083


O-06
1.696
0.051
273.493
1.702
0.165
250.180






















TABLE 5-P





Case
n10
k10
d10
n20
k20
d20





















P-01
1.913
0.125
16.406
1.727
0.366
136.777


P-02
1.891
0.091
14.954
1.734
0.282
193.024


P-03
1.879
0.077
13.440
1.724
0.231
251.802


P-04
1.709
0.064
217.197
1.700
0.214
183.446


P-05
1.708
0.057
216.333
1.694
0.175
241.739


P-06
1.696
0.052
274.035
1.700
0.171
241.498






















TABLE 5-Q





Case
n10
k10
d10
n20
k20
d20





















Q-01
1.900
0.097
14.674
1.732
0.294
185.336


Q-02
1.885
0.082
13.311
1.722
0.239
243.911


Q-03
1.708
0.058
215.615
1.694
0.180
233.152


Q-04
1.697
0.048
273.453
1.699
0.151
289.720






















TABLE 5-R





Case
n10
k10
d10
n20
k20
d20





















R-01
1.908
0.102
14.316
1.730
0.303
177.238


R-02
1.888
0.088
13.163
1.716
0.243
235.819


R-03
1.708
0.059
215.377
1.693
0.185
223.802


R-04
1.709
0.054
215.137
1.702
0.158
279.418


R-05
1.697
0.049
273.522
1.700
0.154
279.960






















TABLE 5-S





Case
n10
k10
d10
n20
k20
d20





















S-01
1.914
0.104
14.390
1.735
0.314
166.400


S-02
1.886
0.093
13.299
1.710
0.247
226.131


S-03
1.873
0.070
12.581
1.721
0.208
280.628


S-04
1.692
0.060
152.854
1.693
0.157
278.359


S-05
1.708
0.060
215.913
1.692
0.189
213.567


S-06
1.708
0.054
215.905
1.701
0.161
269.362


S-07
1.697
0.050
273.350
1.701
0.157
270.178






















TABLE 5-T





Case
n10
k10
d10
n20
k20
d20





















T-01
1.918
0.103
15.177
1.753
0.331
153.467


T-02
1.883
0.095
13.742
1.708
0.252
215.835


T-03
1.874
0.068
12.955
1.728
0.214
269.400


T-04
1.707
0.061
216.749
1.693
0.194
203.628


T-05
1.708
0.055
216.874
1.699
0.165
259.716


T-06
1.697
0.050
272.522
1.701
0.160
261.468









By using the combinations of values of [n10, n20, k10, k20, d10, d20 with which the minimum reflectance is obtained, it may be possible to control the reflectance to 0.4% or less over the entire incidence angle region corresponding to the numerical aperture NA of a corresponding exposure system with each of the above-described silicon thicknesses. In other words, each of the combinations is effective from the viewpoint that the reflectance is controlled to 0.4% or less even when the numerical aperture NA is smaller than the corresponding numerical aperture NA.
A simulation was also carried out for determining how far one of the six variables in each of the combinations of values of [n10, n20, k10, k20, d10, d20] varies to produce a reflectance over 0.4%, with the other variables being fixed. The obtained permissible variation ranges are shown in Tables 11-A to 11-T (numerical aperture NA: 0.93≦NA≦1.0), Table 12-A to 12-T (numerical aperture NA: 1.0<NA≦1.1), Tables 13-A to 13-T (numerical aperture NA: 1.1<NA≦1.2), Tables 14-A to 14-T (numerical aperture NA: 1.2<NA≦1.3), and Tables 15-A to 15-T (numerical aperture NA: 1.3<NA≦1.4).
In the tables below,
n1-min: minimum n10 when the reflectance does not exceed 0.4%
n1-max: maximum n10 when the reflectance does not exceed 0.4%
k1-min: minimum k10 when the reflectance does not exceed 0.4%
k1-max: maximum k10 when the reflectance does not exceed 0.4%
d1-min: minimum d10 when the reflectance does not exceed 0.4%
d1-max: maximum d10 when the reflectance does not exceed 0.4%
n2-min: minimum n20 when the reflectance does not exceed 0.4%
n2-max: maximum n20 when the reflectance does not exceed 0.4%
k2-min: minimum k20 when the reflectance does not exceed 0.4%
k2-max: maximum k20 when the reflectance does not exceed 0.4%
d2-min: minimum d20 when the reflectance does not exceed 0.4%
d2-max: maximum d20 when the reflectance does not exceed 0.4%



















TABLE 11-A





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























A-01
2.1640640
1.9857913
0.1974881
0.0196744
28.041
20.653
2.8958371
2.4623117
1.8020253
1.3735951
11.601
8.280


A-02
1.9428363
1.7842939
0.2426142
0.0835896
37.757
24.186
2.3681593
1.9966090
0.8289455
0.4606508
73.757
50.598


A-03
1.9576297
1.7850259
0.2148133
0.0371729
28.994
14.134
1.9707991
1.6413265
0.5950778
0.2809702
∞
76.872


A-04
1.9545833
1.7830354
0.1828680
0.0038055
29.564
13.280
2.0120708
1.6792059
0.5256718
0.2166960
∞
114.006


A-05
1.8469211
1.7238950
0.1688100
0.0370107
108.304
82.625
2.1059290
1.8049561
0.6364527
0.3320741
79.125
60.047


A-06
1.8384570
1.7205432
0.1633733
0.0309270
108.455
81.217
2.0181484
1.7172939
0.5191778
0.2180047
∞
111.420


A-07
1.8252406
1.7110450
0.1553613
0.0234985
112.606
80.398
1.9560961
1.6464941
0.4693856
0.1619942
∞
125.300


A-08
1.8082491
1.6888265
0.1477492
0.0355519
204.157
153.730
2.1755323
1.7768299
1.0810475
0.7328260
18.289
11.953


A-09
1.8055423
1.6936649
0.1517070
0.0331059
193.760
148.011
2.0676879
1.7745190
0.5567082
0.2860417
77.890
60.591


A-10
1.8017615
1.6978504
0.1479986
0.0337115
194.207
146.995
1.9601734
1.6709510
0.4604288
0.1854154
∞
118.281


A-11
1.7922310
1.6913081
0.1411744
0.0297047
∞
146.144
1.9356368
1.5999081
0.4195133
0.1388846
∞
168.885


A-12
1.8116856
1.6696922
0.1390970
0.0202005
∞
158.277
5.5456759
4.3725570
3.0211006
1.9299177
 2.102
1.426


A-13
1.7950873
1.6802826
0.1431143
0.0330178
∞
210.408
2.0588196
1.7541309
0.5131301
0.2574941
77.434
61.414


A-14
1.7910600
1.6837394
0.1390888
0.0381952
∞
210.291
1.9243195
1.6212543
0.4241486
0.1638324
∞
122.979


A-15
1.7794892
1.6533564
0.1361463
0.0317518
∞
149.513
1.9509696
1.5482450
0.3978720
0.1252902
∞
168.040




























TABLE 11-B





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























B-01
1.9765106
1.8156232
0.2993467
0.1383360
37.031
26.788
2.5688133
1.9441148
2.2528476
1.6097141
10.412
6.699


B-02
1.8936015
1.7361308
0.3006593
0.1439186
45.853
33.452
3.6189923
3.2095929
0.9578557
0.5340910
32.272
28.022


B-03
1.9437201
1.7857966
0.2641850
0.1051554
38.514
26.033
2.5360575
2.1438358
0.9462301
0.5462985
57.826
42.823


B-04
1.9109595
1.7580896
0.2587795
0.1040725
38.022
24.153
2.2161888
1.8334483
0.8900922
0.5020930
∞
50.992


B-05
1.9658189
1.7964891
0.2205139
0.0453857
28.945
15.110
2.0010759
1.6647868
0.6448409
0.3145296
∞
72.956


B-06
1.9508455
1.7771870
0.1996149
0.0172626
28.632
12.711
1.9628359
1.6302505
0.5253835
0.2259292
∞
114.040


B-07
1.9889922
1.7874455
0.1849726
0.0000000
23.915
8.830
1.9396544
1.6111644
0.4484736
0.1778157
∞
129.097


B-08
1.8698402
1.7525465
0.1773355
0.0550833
105.714
87.220
2.3473775
1.8218453
1.8615652
1.3148452
10.681
6.993


B-09
1.8708198
1.7515339
0.1710347
0.0426253
104.773
84.697
2.4485002
2.1326152
0.7462001
0.4233925
54.972
44.997


B-10
1.8429563
1.7284885
0.1660140
0.0362166
105.755
82.025
2.0545640
1.7455125
0.5464477
0.2423962
∞
103.928


B-11
1.8273334
1.7163238
0.1568000
0.0275202
110.921
81.205
1.9722282
1.6572367
0.4915459
0.1748967
∞
155.882


B-12
1.8011164
1.6891474
0.1510638
0.0182928
120.168
78.348
1.8986632
1.5701231
0.4003568
0.1335282
∞
174.053


B-13
1.8084407
1.6945466
0.1511564
0.0399344
199.413
157.378
2.9980065
2.2331872
2.4336783
1.7083805
5.430
3.555


B-14
1.8069373
1.7006556
0.1532768
0.0392717
189.895
149.881
2.1605076
1.8499131
0.6301800
0.3373675
65.640
52.112


B-15
1.8020158
1.7028825
0.1485546
0.0386010
190.393
148.247
1.9771516
1.6873554
0.4840750
0.2045352
139.021
110.784


B-16
1.7917073
1.6951753
0.1410054
0.0335775
∞
147.319
1.9455843
1.6038399
0.4311522
0.1490624
∞
162.629


B-17
1.7748680
1.6616038
0.1397337
0.0177061
∞
78.362
1.9013700
1.5474955
0.3491302
0.1192779
∞
179.261


B-18
1.7995571
1.6803054
0.1418691
0.0318679
∞
219.267
3.9031090
2.7804552
3.1987078
2.1965484
3.041
1.933


B-19
1.7944023
1.6892021
0.1429939
0.0388679
∞
213.520
2.1333770
1.8090423
0.5728584
0.3034224
66.373
53.138


B-20
1.7900144
1.6912498
0.1382895
0.0430014
∞
212.401
1.9348689
1.6293818
0.4376544
0.1798382
∞
116.162


B-21
1.7788302
1.6597860
0.1352760
0.0355396
∞
150.783
1.9606195
1.5529755
0.4050644
0.1340756
∞
162.711


B-22
1.7721141
1.6339867
0.1393037
0.0162605
∞
131.499
1.9223909
1.5178206
0.3273010
0.1102026
∞
178.998




























TABLE 11-C





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























C-01
1.8231731
1.6889531
0.3374331
0.1966774
44.591
33.970
2.3113613
1.5131875
2.9933496
2.1403332
8.568
5.252


C-02
1.8704238
1.7221365
0.3164098
0.1654295
45.636
34.013
3.4694784
2.9935165
1.1153984
0.6124627
32.783
27.503


C-03
1.8897351
1.7427735
0.2799519
0.1287580
39.053
25.989
2.2531582
1.8402493
0.9982394
0.5793026
∞
46.183


C-04
1.9668640
1.8039697
0.2284362
0.0582238
29.734
16.727
2.0534750
1.7043490
0.7103495
0.3545878
∞
91.228


C-05
1.9700505
1.7964873
0.2004352
0.0167243
27.390
13.045
1.9901918
1.6549159
0.5568746
0.2488619
∞
108.784


C-06
1.9889367
1.7945592
0.1844224
0.0000000
24.201
9.640
1.9544538
1.6239008
0.4686083
0.1907165
∞
125.539


C-07
1.8960963
1.7964051
0.2027126
0.0843971
95.043
82.386
1.8930719
1.3306048
2.0756683
1.4587811
12.301
7.991


C-08
1.8798042
1.7688191
0.1810991
0.0566936
102.324
85.380
2.7319807
2.3831586
0.8737269
0.5058423
43.841
36.695


C-09
1.8486490
1.7395303
0.1694845
0.0435666
103.473
83.035
2.1069571
1.7916519
0.5819143
0.2709792
126.455
95.942


C-10
1.8272295
1.7203471
0.1588071
0.0325461
108.030
81.756
1.9781294
1.6565767
0.5067391
0.1879390
∞
150.786


C-11
1.8014602
1.7131679
0.1630009
0.0629313
181.579
155.142
2.2285130
1.4846690
2.5305195
1.8133466
7.152
4.542


C-12
1.8066818
1.7096664
0.1562671
0.0489514
184.788
151.277
2.2616583
1.9259051
0.7108605
0.4005419
56.477
45.327


C-13
1.8013132
1.7087644
0.1491455
0.0453076
186.735
149.398
1.9970170
1.6990226
0.5049354
0.2258400
129.169
104.943


C-14
1.7901840
1.6996005
0.1402926
0.0386361
202.803
148.613
1.9572801
1.6068052
0.4427851
0.1602228
∞
156.485


C-15
1.7888636
1.6964637
0.1448234
0.0511015
272.529
222.634
4.0234980
2.5453376
4.9343779
3.5870341
1.854
1.171


C-16
1.7922839
1.6987061
0.1428421
0.0481961
∞
215.666
2.1852289
1.8344195
0.6298531
0.3553731
59.183
47.891


C-17
1.7880248
1.6988170
0.1367243
0.0500947
∞
214.345
1.9483736
1.6341647
0.4469301
0.1975503
135.897
110.811


C-18
1.7771523
1.6659072
0.1338236
0.0403214
∞
152.164
1.9734293
1.5581486
0.4118041
0.1461254
∞
157.174




























TABLE 11-D





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























D-01
1.8830836
1.7450379
0.3439324
0.1957122
41.919
32.309
3.2738383
2.6931938
1.3905248
0.7652599
34.624
26.646


D-02
1.8894456
1.7496568
0.3113935
0.1623652
38.151
27.175
2.3783942
1.9026215
1.1913935
0.7140034
∞
38.650


D-03
1.9759954
1.8236651
0.2451292
0.0831138
33.080
21.762
2.3455819
1.9299789
0.8247144
0.4185645
∞
76.091


D-04
1.9752561
1.8171238
0.2392715
0.0711709
29.642
17.776
2.1047769
1.7365738
0.7769713
0.3980858
∞
83.621


D-05
1.9566081
1.7994560
0.2448971
0.0778121
30.025
17.558
2.0415795
1.6793835
0.7460866
0.3841615
∞
85.930


D-06
1.9857426
1.8133183
0.2025784
0.0179971
26.419
13.320
2.0120620
1.6710122
0.5849314
0.2699888
∞
102.487


D-07
2.0116008
1.8131792
0.1836318
0.0000000
22.601
9.497
1.9655292
1.6338862
0.4820573
0.2030644
∞
122.172


D-08
1.8608817
1.7601212
0.1929580
0.0733389
98.847
83.253
2.2679467
1.8745946
0.9047855
0.5511698
55.349
42.174


D-09
1.8440660
1.7409813
0.1747540
0.0528949
101.494
82.953
2.0828924
1.7400103
0.6219074
0.2930427
∞
93.224


D-10
1.8255212
1.7236487
0.1604973
0.0385149
105.673
82.354
1.9798220
1.6454324
0.5164841
0.1989646
∞
143.976


D-11
1.7968482
1.6917774
0.1530963
0.0257575
114.232
79.595
1.8993843
1.5580000
0.4093345
0.1476328
∞
163.096


D-12
1.8013651
1.7172159
0.1603274
0.0632058
172.074
150.204
2.1395219
1.7587431
0.7307801
0.4530054
57.764
44.905


D-13
1.7985003
1.7134612
0.1494702
0.0540027
182.684
149.824
1.9978008
1.6681646
0.5024732
0.2441700
126.081
102.188


D-14
1.7870554
1.7030564
0.1388742
0.0447152
194.361
149.689
1.9627277
1.5963116
0.4437332
0.1693082
∞
149.980


D-15
1.7701529
1.6661148
0.1392675
0.0232775
∞
136.395
1.9116010
1.5409431
0.3522162
0.1321796
∞
167.525


D-16
1.7804394
1.7273645
0.1355612
0.0974874
236.430
223.282
4.2192974
2.6906610
9.9343423
7.8844741
0.575
0.402


D-17
1.7877352
1.7081588
0.1413061
0.0629369
262.055
215.348
2.0895557
1.7685523
0.6334874
0.3971031
59.549
48.398


D-18
1.7853294
1.7057908
0.1336096
0.0602063
∞
215.600
1.9530972
1.6109988
0.4364237
0.2120328
∞
107.664


D-19
1.7730937
1.6800431
0.1318136
0.0455306
∞
206.475
1.9842943
1.5519103
0.4127823
0.1614236
∞
150.626


D-20
1.7675878
1.6410705
0.1387078
0.0209832
∞
138.629
1.9336651
1.5204424
0.3320609
0.1218046
∞
166.659




























TABLE 11-E





Case
n1−max
n1−min
k1−max
k1−min
d1−max
dd1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























E-01
1.8748083
1.7393738
0.3368671
0.1916718
34.542
24.447
2.0181788
1.5460267
1.1728709
0.7418895
∞
38.073


E-02
1.9789816
1.8230856
0.2533923
0.0850353
28.756
17.639
2.0891174
1.7028088
0.7988426
0.4234361
∞
75.545


E-03
2.0023038
1.8297941
0.2038717
0.0168637
25.282
13.221
2.0277165
1.6786747
0.6012817
0.2843445
∞
94.052


E-04
2.0468137
1.8446945
0.1676424
0.0000000
20.887
9.486
2.0073158
1.6730946
0.5013927
0.2164733
∞
116.551


E-05
2.0992751
1.8446962
0.2341211
0.0000000
16.445
6.421
1.8864494
1.5577361
0.4505861
0.1973793
∞
122.465


E-06
1.8491106
1.7507915
0.2096178
0.0945531
93.863
80.071
1.9350344
1.5188906
0.7893250
0.5174866
68.488
46.386


E-07
1.8361972
1.7368735
0.1813258
0.0628651
99.367
82.092
2.0044566
1.6351146
0.5837677
0.2983466
∞
94.158


E-08
1.8205420
1.7221912
0.1627354
0.0448936
104.538
82.385
1.9559670
1.6053627
0.4990396
0.2015030
∞
136.472


E-09
1.7925661
1.6898427
0.1538738
0.0292620
112.287
79.640
1.8944932
1.5420274
0.4023134
0.1496426
∞
155.476


E-10
1.7983926
1.7197305
0.1671071
0.0784414
164.305
147.121
1.9619841
1.5854387
0.6583400
0.4392323
63.983
48.943


E-11
1.7955340
1.7158697
0.1497842
0.0635586
179.571
149.311
2.0007177
1.5954870
0.4697081
0.2495811
∞
101.667


E-12
1.7833451
1.7048416
0.1369505
0.0510557
189.846
150.429
1.9612209
1.5727870
0.4313362
0.1724775
∞
142.230


E-13
1.7675774
1.6666497
0.1392333
0.0254638
∞
137.661
1.9130565
1.5320665
0.3467037
0.1345357
∞
159.605


E-14
1.7863651
1.7142020
0.1395008
0.0790479
250.434
212.771
1.9636614
1.6583831
0.5658537
0.3857683
63.760
51.480


E-15
1.7840553
1.7114223
0.1284575
0.0727984
∞
215.754
2.0158573
1.6922355
0.3953694
0.2151582
∞
106.269


E-16
1.7690598
1.6843869
0.1297423
0.0500450
∞
212.645
1.9880870
1.5380211
0.4067894
0.1736986
∞
142.387


E-17
1.7654064
1.6439501
0.1389686
0.0226918
∞
139.944
1.9381099
1.5156709
0.3302597
0.1238534
∞
177.835




























TABLE 11-F





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























F-01
1.8445498
1.7028640
0.3433769
0.2065410
35.166
24.465
1.8840155
1.4588886
1.1541143
0.7278801
∞
33.984


F-02
1.9748025
1.8134890
0.2687031
0.0967476
27.589
16.388
1.9911676
1.6052106
0.7575345
0.4113980
∞
75.388


F-03
2.0056416
1.8240852
0.2226912
0.0264241
23.756
11.873
1.9568925
1.6089457
0.5715493
0.2748867
∞
89.427


F-04
2.0650838
1.8519295
0.1772441
0.0000000
19.476
8.682
1.9832685
1.6466413
0.4938946
0.2150397
∞
108.866


F-05
2.1015333
1.8486964
0.2338354
0.0000000
16.441
6.545
1.8888145
1.5568528
0.4544922
0.1992566
∞
112.277


F-06
1.8622524
1.7567983
0.2177349
0.1041338
90.922
78.110
1.8710036
1.4914735
0.8036755
0.5151159
62.376
40.547


F-07
1.8361037
1.7366067
0.1859629
0.0693234
97.842
81.540
1.9770779
1.5840274
0.5667495
0.2947696
∞
89.920


F-08
1.8189212
1.7220536
0.1637893
0.0490835
103.750
82.514
1.9475986
1.5829197
0.4906212
0.2005944
∞
127.512


F-09
1.7899842
1.6878285
0.1542946
0.0309962
111.559
79.477
1.8924917
1.5312942
0.3961812
0.1493770
∞
146.311


F-10
1.8004922
1.7221231
0.1725282
0.0852650
160.535
145.052
1.8718671
1.5444879
0.6488188
0.4200688
60.551
43.890


F-11
1.7961652
1.7179231
0.1500467
0.0702567
178.047
148.974
1.9680612
1.5533127
0.4509038
0.2461101
∞
96.779


F-12
1.7667150
1.6664697
0.1392414
0.0262031
∞
138.061
1.9143886
1.5273989
0.3437564
0.1347329
∞
166.803


F-13
1.7813348
1.7056878
0.1353170
0.0551168
188.103
151.058
1.9595373
1.5581847
0.4254916
0.1791232
∞
133.271


F-14
1.7822166
1.7169481
0.1395756
0.0867753
246.078
210.779
1.8944201
1.6099890
0.5389938
0.3617453
60.493
46.957


F-15
1.7851393
1.7150563
0.1230351
0.0833794
267.416
215.816
1.9909918
1.7059344
0.3550419
0.2342728
∞
101.263


F-16
1.7671877
1.6858645
0.1284573
0.0522146
∞
213.696
1.9902944
1.5291713
0.4050314
0.1800814
∞
132.816


F-17
1.7651222
1.6451528
0.1393025
0.0231282
∞
140.264
1.9433160
1.5134088
0.3296937
0.1239332
∞
172.741




























TABLE 11-G





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























G-01
1.8510344
1.7079497
0.3629205
0.2322015
35.649
25.461
1.9179419
1.4877015
1.3266012
0.8121213
∞
24.910


G-02
1.9558961
1.7996144
0.2741522
0.1090704
29.623
18.109
2.0086034
1.6054333
0.8085387
0.4260057
∞
63.805


G-03
2.0007807
1.8226508
0.2254244
0.0333809
24.374
12.458
1.9603631
1.6072540
0.5891826
0.2817351
∞
80.107


G-04
2.0775306
1.8401429
0.2290099
0.0000000
17.643
7.220
1.8945047
1.5593252
0.4656915
0.2042938
∞
103.866


G-05
1.8957386
1.7930616
0.2284775
0.1174850
89.439
78.698
2.0886119
1.5366111
1.0446792
0.6492373
42.199
24.342


G-06
1.8445182
1.7463871
0.1855165
0.0715577
97.635
82.441
2.0389449
1.6285494
0.6271130
0.3140137
∞
76.060


G-07
1.8208637
1.7249616
0.1633948
0.0495411
103.378
83.068
1.9667878
1.5975080
0.5153303
0.2065144
∞
120.158


G-08
1.7914160
1.6890869
0.1545438
0.0310014
111.442
79.681
1.8956181
1.5348893
0.4029292
0.1524641
∞
137.415


G-09
1.8064727
1.7324529
0.1736747
0.0932645
159.337
146.111
1.9712182
1.5680749
0.7358016
0.4694711
43.749
30.577


G-10
1.7976831
1.7210876
0.1496282
0.0723320
178.016
150.130
2.0082485
1.5759633
0.4835820
0.2565849
∞
84.229


G-11
1.7676796
1.6668971
0.1393459
0.0260829
∞
138.020
1.9186141
1.5291365
0.3482262
0.1370580
∞
155.808


G-12
1.7818611
1.7063045
0.1353393
0.0547363
188.100
151.498
1.9748195
1.5661855
0.4418024
0.1833758
∞
124.682


G-13
1.7798254
1.7226306
0.1373611
0.0956167
228.804
212.101
1.9246120
1.6316017
0.5645213
0.3855345
45.737
35.320


G-14
1.7828150
1.7158448
0.1238214
0.0839801
266.567
217.609
1.9304083
1.7107074
0.3806594
0.2479153
∞
88.680


G-15
1.7683830
1.6865935
0.1284365
0.0520461
∞
214.066
2.0034536
1.5326101
0.4129136
0.1829001
∞
124.317


G-16
1.7660183
1.6445986
0.1391357
0.0229907
∞
140.172
1.9466117
1.5142130
0.3327484
0.1259991
∞
162.119




























TABLE 11-H





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























H-01
1.8348744
1.7017860
0.3798462
0.2808191
40.569
31.320
2.2991869
1.6708019
1.7969846
1.1828110
24.492
11.798


H-02
1.9378552
1.7891528
0.2803248
0.1232521
33.039
21.589
2.1152589
1.6836610
0.9407294
0.4862702
∞
55.622


H-03
1.9816003
1.8123315
0.2304942
0.0484886
26.210
13.965
1.9677635
1.6119358
0.6263078
0.3015312
∞
76.216


H-04
2.0531456
1.8330577
0.2233118
0.0000000
19.209
8.222
1.9045230
1.5691056
0.4866935
0.2170987
∞
119.528


H-05
1.9032381
1.8026375
0.2332691
0.1296546
94.176
83.950
2.5106963
1.7240899
1.7198847
1.0160017
18.225
9.869


H-06
1.8612260
1.7637761
0.1850318
0.0725318
98.433
84.409
2.1736563
1.7881949
0.7450683
0.3750354
78.752
56.421


H-07
1.8282464
1.7322039
0.1638123
0.0491174
102.610
83.678
2.0065197
1.6441979
0.5671385
0.2268590
∞
111.470


H-08
1.7958627
1.6943845
0.1554022
0.0314630
110.744
80.478
1.9018550
1.5486836
0.4227446
0.1616729
∞
129.994


H-09
1.8204382
1.7477014
0.1733188
0.1005906
162.626
151.084
2.2468682
1.5775835
1.1545804
0.7384256
20.369
11.413


H-10
1.8012800
1.7248420
0.1501327
0.0708798
170.938
152.125
2.0151748
1.6653676
0.5763906
0.2963613
83.086
66.911


H-11
1.7851787
1.7084953
0.1369615
0.0539574
187.241
151.653
1.9886751
1.5898995
0.4693105
0.1905971
∞
116.509


H-12
1.7692727
1.6693251
0.1392713
0.0269409
∞
139.738
1.9227537
1.5351035
0.3603968
0.1441040
∞
173.121


H-13
1.7826017
1.7298539
0.1352886
0.1031853
230.770
217.847
2.0789924
1.7538251
0.8187232
0.5751050
23.733
17.715


H-14
1.7835199
1.7158807
0.1274471
0.0787410
264.411
219.187
1.9536996
1.5958199
0.4569726
0.2526929
86.365
72.843


H-15
1.7709992
1.6903070
0.1287648
0.0532839
∞
215.155
2.0153556
1.5448258
0.4230963
0.1875775
∞
117.185


H-16
1.7665771
1.6446349
0.1382733
0.0240191
∞
140.790
1.9481295
1.5169100
0.3392135
0.1321456
∞
170.934




























TABLE 11-I





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























I-01
1.8010327
1.6703051
0.3790844
0.2860131
49.040
39.697
6.2750068
4.0060224
6.3084837
4.3813279
2.011
1.105


I-02
1.9298895
1.7853326
0.2927841
0.1409628
33.486
22.674
2.1127495
1.6827031
1.0143560
0.5514972
∞
52.072


I-03
1.9897430
1.8293451
0.2260071
0.0543604
27.922
16.406
2.0768797
1.7082590
0.7280970
0.3528321
∞
86.499


I-04
1.9818310
1.8176855
0.2357004
0.0585080
26.827
15.078
1.9901759
1.6322669
0.6776751
0.3358636
∞
74.175


I-05
2.0325692
1.8434603
0.1884373
0.0000000
22.396
11.017
2.0035162
1.6644915
0.5539257
0.2508800
∞
109.936


I-06
2.0503236
1.8393702
0.2207547
0.0000000
19.774
8.961
1.9171324
1.5828588
0.5124144
0.2361131
∞
116.056


I-07
2.0748040
1.8271550
0.2143905
0.0000000
17.468
6.484
1.9053653
1.5724832
0.4408889
0.1848623
∞
129.507


I-08
1.8967501
1.7978609
0.2321058
0.1358900
99.873
89.276
4.7253432
3.0478309
4.6281749
2.8811534
3.296
1.805


I-09
1.8980961
1.8025163
0.1987565
0.0890605
98.171
86.996
2.8922831
2.4763163
0.9336804
0.4984400
44.099
35.880


I-10
1.8353948
1.7408879
0.1658283
0.0523285
101.320
84.205
2.0470219
1.6904643
0.6008487
0.2548880
∞
103.196


I-11
1.7999193
1.7010338
0.1566929
0.0340123
109.103
81.354
1.9088732
1.5604748
0.4445734
0.1750519
∞
159.368


I-12
1.7854499
1.6686531
0.1595713
0.0236692
117.512
74.034
1.8609244
1.5175199
0.3552154
0.1357403
∞
176.325


I-13
1.8244989
1.7519220
0.1722459
0.0986888
168.183
156.692
5.2323444
3.4304584
4.7853754
3.0546576
1.899
1.115


I-14
1.8045445
1.7295701
0.1511401
0.0733300
169.665
153.355
2.1332569
1.7780836
0.6582710
0.3581709
67.058
53.813


I-15
1.7877293
1.7127660
0.1377613
0.0572352
185.067
151.912
1.9754955
1.6114989
0.4878301
0.2114751
∞
109.119


I-16
1.7698545
1.6769443
0.1389352
0.0297641
∞
142.121
1.9212870
1.5382413
0.3717519
0.1547194
∞
166.932


I-17
1.7687629
1.6489912
0.1464718
0.0187435
∞
124.857
1.9093862
1.5283218
0.3156516
0.1239487
∞
178.253


I-18
1.7823383
1.7323517
0.1360043
0.1014499
237.517
225.014
4.8909707
3.2979556
4.1408226
2.8457384
1.432
0.948


I-19
1.7855975
1.7187225
0.1266313
0.0809270
261.147
219.736
2.0323920
1.7604730
0.5028382
0.3025708
71.994
61.451


I-20
1.7723412
1.6968651
0.1273417
0.0587455
∞
216.538
1.9005983
1.5558095
0.4255322
0.2016199
∞
110.627


I-21
1.7658718
1.6500332
0.1370124
0.0266059
∞
142.074
1.9535710
1.5188262
0.3463206
0.1414268
∞
165.553


I-22
1.7705609
1.6340802
0.1434011
0.0161403
∞
129.746
1.9378669
1.5210188
0.3075256
0.1150696
∞
175.929


I-23
1.7800884
1.5986944
0.1423932
0.0152277
∞
132.671
1.9711999
1.4724951
0.3645229
0.1050453
∞
170.517




























TABLE 11-J





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























J-01
1.9409429
1.8021941
0.3131894
0.1685141
32.263
22.948
2.1266765
1.6861902
1.1398766
0.6573509
∞
46.952


J-02
1.9932822
1.8329758
0.2432049
0.0705755
26.396
15.656
2.0111682
1.6483447
0.7292981
0.3769397
∞
86.478


J-03
2.0278925
1.8383637
0.2106615
0.0048254
21.892
10.787
1.9564959
1.6175237
0.5535235
0.2607610
∞
108.187


J-04
2.0851788
1.8312945
0.2401716
0.0000000
16.615
6.305
1.8770072
1.5476420
0.4425906
0.1917715
∞
128.340


J-05
1.8783297
1.7939522
0.1960237
0.0933894
96.880
86.306
2.5837560
2.1571068
1.0162369
0.5615995
48.975
38.062


J-06
1.8340278
1.7448822
0.1682003
0.0599264
99.658
84.361
2.0380702
1.6791847
0.6233239
0.2810937
∞
97.676


J-07
1.7994764
1.7049231
0.1581441
0.0389876
107.073
81.918
1.9050716
1.5552547
0.4529885
0.1881814
∞
153.165


J-08
1.7846306
1.6715154
0.1609601
0.0274140
112.273
75.140
1.8541601
1.5132909
0.3609224
0.1435457
∞
170.190


J-09
1.7998854
1.7353261
0.1482564
0.0854732
166.198
153.461
2.1593286
1.7753687
0.6667261
0.4228687
61.016
49.925


J-10
1.7863396
1.7175981
0.1353847
0.0659389
180.247
152.325
1.9982564
1.6053072
0.4773921
0.2335628
∞
109.997


J-11
1.7681464
1.6819305
0.1380740
0.0342715
∞
144.598
1.9216978
1.5338499
0.3746436
0.1661414
∞
160.089


J-12
1.7669198
1.6515622
0.1463713
0.0216239
∞
129.299
1.9100226
1.5252131
0.3191776
0.1309355
∞
172.105


J-13
1.7707165
1.7040051
0.1220832
0.0695282
∞
217.819
1.9376772
1.5483132
0.4043358
0.2333336
∞
104.539


J-14
1.7634269
1.6553617
0.1358159
0.0303533
∞
189.521
1.9623054
1.5145784
0.3489988
0.1513852
∞
158.729


J-15
1.7680585
1.6373835
0.1429634
0.0185884
∞
132.956
1.9433515
1.5188691
0.3114371
0.1213260
∞
169.651




























TABLE 11-K





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























K-01
1.9707785
1.8360788
0.3425950
0.2023887
27.715
20.125
1.9329888
1.5140813
1.1219560
0.7176091
∞
45.573


K-02
2.0196477
1.8536052
0.2639073
0.0831004
23.306
13.914
1.9357511
1.5767961
0.7075294
0.3937403
∞
72.232


K-03
2.0645663
1.8585909
0.2374446
0.0112678
18.917
9.310
1.9031629
1.5653077
0.5390913
0.2670820
∞
104.858


K-04
2.0786207
1.8320900
0.2457404
0.0000000
16.773
6.617
1.8708739
1.5393529
0.4503117
0.1999821
∞
123.607


K-05
1.8425452
1.7719593
0.1968678
0.1116248
92.844
83.802
1.9910461
1.5793420
0.7893473
0.5451810
78.485
48.751


K-06
1.8250707
1.7437914
0.1698075
0.0718228
97.605
84.143
1.9741547
1.6009187
0.5756118
0.2952627
∞
99.488


K-07
1.7937600
1.7041262
0.1595997
0.0451600
104.545
82.071
1.8857969
1.5266501
0.4416537
0.1958456
∞
144.226


K-08
1.7828027
1.6711987
0.1628300
0.0313846
109.589
75.289
1.8295758
1.5032806
0.3608888
0.1486305
∞
162.042


K-09
1.7810699
1.7216656
0.1268030
0.0823438
175.807
152.735
1.9768505
1.5572423
0.4221615
0.2566463
∞
112.257


K-10
1.7642217
1.6821282
0.1373190
0.0383688
182.940
144.697
1.9234068
1.5160325
0.3659687
0.1739655
∞
152.160


K-11
1.7649885
1.6533259
0.1472226
0.0245664
∞
131.728
1.7830963
1.5179791
0.3193676
0.1355785
∞
163.972


K-12
1.7600028
1.6605350
0.1355277
0.0346940
∞
198.719
1.9669273
1.5020323
0.3468141
0.1582667
∞
150.027


K-13
1.7652786
1.6418728
0.1432970
0.0211204
∞
135.362
1.9519198
1.5131027
0.3139043
0.1253960
∞
161.156




























TABLE 11-L





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























L-01
1.9805757
1.8427363
0.3773193
0.2296740
24.766
18.143
1.7617713
1.4040247
1.0059180
0.6941285
∞
44.977


L-02
2.0582393
1.8830904
0.2806928
0.0880549
20.473
12.463
1.8985725
1.5339046
0.6916574
0.4025791
∞
75.356


L-03
2.1015526
1.8843029
0.2490971
0.0097038
17.008
8.572
1.8899397
1.5484993
0.5369665
0.2720763
∞
99.033


L-04
2.0306052
1.7992233
0.2679772
0.0204784
18.280
7.154
1.8310388
1.5036438
0.4411974
0.1956323
∞
118.483


L-05
1.8338888
1.7723544
0.2044936
0.1383034
88.945
81.835
1.8276199
1.5002786
0.6676941
0.5063342
80.329
54.435


L-06
1.8206102
1.7454442
0.1694749
0.0862511
95.473
84.029
1.9314879
1.5235777
0.5240986
0.2952742
∞
103.032


L-07
1.7877872
1.7013333
0.1602300
0.0516668
102.853
81.969
1.8638369
1.4967507
0.4266791
0.1970013
∞
116.786


L-08
1.7818580
1.6686304
0.1646693
0.0341982
107.829
74.760
1.7745154
1.4951867
0.3600673
0.1503127
∞
151.233


L-09
1.7605496
1.6803665
0.1370589
0.0427461
177.108
144.718
1.7126080
1.4998919
0.3597939
0.1765700
∞
142.669


L-10
1.7645893
1.6563972
0.1488224
0.0265689
∞
133.224
1.7659346
1.5128389
0.3206823
0.1370177
∞
153.192


L-11
1.7580624
1.6651535
0.1365795
0.0383336
∞
201.534
1.7451455
1.4912014
0.3491875
0.1604448
∞
139.349


L-12
1.7646827
1.6459120
0.1442677
0.0227735
∞
136.956
1.8231992
1.5094394
0.3175857
0.1264736
∞
150.082




























TABLE 11-M





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























M-01
1.9656620
1.8272452
0.4002190
0.2589422
24.403
18.176
1.6618614
1.3463629
0.9953093
0.6931023
∞
44.440


M-02
2.0805818
1.9019600
0.2933600
0.0973432
19.349
12.113
1.8909403
1.5093131
0.6985739
0.4106662
∞
78.214


M-03
2.1240686
1.9025366
0.2580161
0.0146042
16.072
8.378
1.8829834
1.5341772
0.5432075
0.2767952
∞
97.972


M-04
2.0463656
1.8091195
0.2704872
0.0198024
17.616
6.990
1.8298176
1.5065070
0.4483924
0.2003870
∞
113.241


M-05
1.8346221
1.7814641
0.2172051
0.1623528
85.845
80.029
1.7057113
1.4982260
0.6335216
0.4823449
74.094
52.226


M-06
1.8157041
1.7513682
0.1669795
0.1013813
93.932
84.386
1.9287032
1.4845723
0.5001755
0.2953684
∞
100.444


M-07
1.7849537
1.6995924
0.1596969
0.0551962
102.261
81.938
1.7495426
1.4857755
0.4263613
0.1988052
∞
130.009


M-08
1.7830385
1.6675295
0.1656893
0.0348934
107.536
74.493
1.7604124
1.4953428
0.3646225
0.1519004
∞
141.305


M-09
1.7593389
1.6811590
0.1373458
0.0445858
176.094
145.009
1.6975009
1.4959323
0.3653363
0.1785089
∞
133.949


M-10
1.7660292
1.6580873
0.1500408
0.0267950
∞
133.655
1.7664113
1.5149782
0.3268824
0.1382789
∞
178.785


M-11
1.7581881
1.6675241
0.1380347
0.0395508
∞
202.677
1.7376177
1.4911956
0.3595090
0.1618748
∞
130.155


M-12
1.7661501
1.6473109
0.1451137
0.0228029
∞
137.385
1.8164479
1.5119594
0.3236023
0.1274389
∞
181.924




























TABLE 11-N





Case
n1−max
n1−min
k1−max
k1−min
d1−max 
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max 
d2−min



























N-01
1.9308929
1.7942376
0.4248943
0.3114263
27.599
21.187
1.6733044
1.3254125
1.2150047
0.8122935
∞
33.320


N-02
2.0668469
1.9023462
0.2944815
0.1170071
21.058
13.856
1.9424197
1.5287271
0.7816085
0.4525081
∞
73.527


N-03
2.0815755
1.8822127
0.2572651
0.0377485
18.101
9.759
1.8880509
1.5306180
0.5717414
0.2897138
∞
90.028


N-04
2.0331581
1.8054116
0.2662567
0.0253034
18.433
7.508
1.8297667
1.5048766
0.4584284
0.2062971
∞
119.932


N-05
1.8646227
1.8113608
0.2337820
0.1808352
84.337
79.289
1.7715072
1.5007687
0.7638684
0.5670385
58.513
38.960


N-06
1.8226386
1.7585272
0.1669851
0.1079995
94.451
85.625
1.9890062
1.5134605
0.5625304
0.3165392
∞
88.401


N-07
1.7860045
1.7014415
0.1599748
0.0556450
102.201
82.327
1.7373881
1.4915665
0.4418842
0.2070014
∞
125.640


N-08
1.7844901
1.6689970
0.1656189
0.0350000
107.593
74.953
1.7619897
1.5010412
0.3737899
0.1569772
∞
134.829


N-09
1.7601791
1.6820529
0.1372717
0.0442944
176.678
145.537
1.6980791
1.5006390
0.3771531
0.1853343
∞
127.521


N-10
1.7669520
1.6576990
0.1499045
0.0265976
∞
133.759
1.7681577
1.5197385
0.3340591
0.1427591
∞
172.727


N-11
1.7594305
1.6674640
0.1377797
0.0390528
∞
202.284
1.7367775
1.4946242
0.3688872
0.1686918
∞
124.146


N-12
1.7672862
1.6458103
0.1449746
0.0224892
∞
136.963
1.8168346
1.5177282
0.3290477
0.1317503
∞
173.664




























TABLE 11-O





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























O-01
1.8983129
1.7713829
0.4492907
0.3728197
32.695
26.370
1.8885821
1.4076568
1.7362366
1.2101672
∞
19.131


O-02
2.0221369
1.8742366
0.2986525
0.1428175
25.315
17.418
2.0282026
1.5883796
0.9417727
0.5259305
∞
58.081


O-03
2.0538982
1.8739141
0.2424013
0.0480312
20.577
11.685
1.9364611
1.5761180
0.6315251
0.3225835
∞
77.301


O-04
2.0458191
1.8670105
0.2458201
0.0517698
20.811
11.767
1.9264805
1.5663584
0.6264832
0.3193835
∞
77.707


O-05
2.0385649
1.8193877
0.2557128
0.0219835
18.714
8.116
1.8502574
1.5146080
0.4821269
0.2224065
∞
120.462


O-06
1.9309938
1.8673549
0.2538005
0.1883086
85.306
80.356
2.1784360
1.3777316
1.3849754
0.9787327
25.718
18.689


O-07
1.8360843
1.7689224
0.1740671
0.1038864
95.456
86.511
2.0629243
1.6089888
0.7196957
0.3755124
90.240
70.528


O-08
1.7914404
1.7087781
0.1617681
0.0561273
102.053
83.173
1.7728850
1.5080181
0.4712700
0.2252849
∞
119.073


O-09
1.7855461
1.6753276
0.1657039
0.0365901
106.634
76.325
1.7686520
1.5043380
0.3845023
0.1665592
∞
130.226


O-10
1.7619954
1.6853206
0.1364735
0.0449452
176.477
146.293
1.7037330
1.5063136
0.3897179
0.1998033
∞
121.636


O-11
1.7666212
1.6586696
0.1483575
0.0277643
∞
134.971
1.7675592
1.5223065
0.3404988
0.1513643
∞
169.458


O-12
1.7600214
1.6674457
0.1353724
0.0398598
∞
203.372
1.7336096
1.4983350
0.3728491
0.1810864
∞
119.091


O-13
1.7666902
1.6441133
0.1435628
0.0234603
∞
137.297
1.8174968
1.5205437
0.3331058
0.1396793
∞
166.065




























TABLE 11-P





Case 
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























P-01
1.8780527
1.7841892
0.4704720
0.4258296
39.871
36.131
3.8374192
2.5149643
3.8845138
3.1011910
7.792
4.175


P-02
2.0045937
1.8646596
0.3133681
0.1698146
26.845
19.161
2.0314015
1.6016212
1.0660721
0.6113773
∞
52.667


P-03
2.0530202
1.8803103
0.2440748
0.0596583
21.347
12.660
1.9574412
1.6006931
0.6823172
0.3617691
∞
76.147


P-04
2.0429780
1.8714704
0.2483473
0.0641517
21.618
12.745
1.9428026
1.5864366
0.6742389
0.3569916
∞
76.533


P-05
2.0522715
1.8338352
0.2644862
0.0276844
18.107
8.267
1.8450555
1.5106780
0.4971090
0.2379952
∞
116.633


P-06
1.9201515
1.8546107
0.2638968
0.2103323
92.949
87.333
3.5726732
2.1819396
3.6524152
2.4498639
6.687
3.716


P-07
1.8500584
1.7844224
0.1803688
0.1065614
95.088
86.922
2.1410667
1.7465989
0.8707351
0.4728347
70.310
54.362


P-08
1.7977896
1.7189041
0.1636820
0.0609733
100.778
83.843
1.8102211
1.5260463
0.5022919
0.2523298
∞
111.159


P-09
1.7862279
1.6830174
0.1662284
0.0400981
104.776
77.979
1.7748938
1.5040454
0.3960924
0.1795690
∞
158.982


P-10
1.7629458
1.6959903
0.1345482
0.0519274
174.320
148.790
1.7045759
1.5095881
0.3975003
0.2207376
∞
114.980


P-11
1.7650921
1.6619781
0.1465604
0.0306449
∞
136.303
1.7644259
1.5196188
0.3454133
0.1625972
∞
163.210


P-12
1.7590465
1.6699937
0.1316590
0.0452796
∞
205.144
1.7266293
1.4939047
0.3731671
0.1985602
∞
113.183


P-13
1.7642216
1.6473356
0.1416339
0.0260138
∞
138.871
1.8208547
1.5182326
0.3359797
0.1495551
∞
160.163


P-14
1.7737928
1.6371509
0.1427687
0.0166726
∞
129.351
1.8670261
1.5337143
0.3141753
0.1193498
∞
167.687




























TABLE 11-Q





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























Q-01
2.0674276
1.8952498
0.2578761
0.0732289
20.370
12.412
1.9301091
1.5792363
0.6972600
0.3912321
∞
72.205


Q-02
2.0605471
1.8471975
0.2662409
0.0327302
17.849
8.584
1.8468736
1.5141404
0.5153586
0.2562131
∞
109.642


Q-03
2.0481271
1.8055599
0.2587648
0.0000000
17.756
6.646
1.8423927
1.5198133
0.4376143
0.1939864
∞
127.076


Q-04
1.8352950
1.7806551
0.1760792
0.1243874
92.494
85.916
1.8765331
1.6017833
0.7228468
0.5239454
∞
55.977


Q-05
1.7969652
1.7245018
0.1655054
0.0710804
98.269
83.892
1.7758132
1.5039943
0.4974848
0.2749519
∞
104.163


Q-06
1.7846203
1.6873547
0.1679367
0.0455271
102.537
78.800
1.7616062
1.4917039
0.3987387
0.1907248
∞
120.624


Q-07
1.7874820
1.6732889
0.1648541
0.0281745
110.048
75.133
1.7961257
1.5163711
0.3613314
0.1498031
∞
162.278


Q-08
1.7599794
1.7028432
0.1308972
0.0639246
169.831
149.777
1.6725316
1.4900523
0.3850189
0.2400043
∞
108.348


Q-09
1.7622726
1.6647970
0.1456698
0.0349532
∞
137.674
1.7522289
1.5081249
0.3452538
0.1726854
∞
154.451


Q-10
1.7709206
1.6506325
0.1481192
0.0222904
∞
127.980
1.8062734
1.5335366
0.3214813
0.1360272
∞
163.843


Q-11
1.7544340
1.6771452
0.1276225
0.0536259
∞
206.845
1.6988060
1.4745640
0.3645513
0.2146306
∞
106.178


Q-12
1.7604926
1.6514825
0.1403326
0.0298540
∞
191.762
1.8158322
1.5066317
0.3372143
0.1583996
∞
151.240


Q-13
1.7708390
1.6398698
0.1421452
0.0196232
∞
132.328
1.8662406
1.5255411
0.3153304
0.1245821
∞
160.775




























TABLE 11-R





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























R-01
2.0686011
1.9290747
0.3646827
0.2232118
20.748
15.605
1.7725917
1.4250954
0.9774342
0.6846559
∞
48.159


R-02
2.1057737
1.9241441
0.2777423
0.0807757
17.910
11.136
1.8803477
1.5314622
0.6785916
0.4010256
∞
74.204


R-03
2.0581225
1.8471227
0.2827637
0.0506751
17.506
8.641
1.8209194
1.4881826
0.5158812
0.2638096
∞
101.942


R-04
2.0160417
1.7848136
0.2764766
0.0259725
18.735
7.136
1.8085495
1.4912875
0.4323967
0.1939104
∞
124.151


R-05
1.7919869
1.7262105
0.1658878
0.0818436
96.241
83.786
1.6987387
1.4545139
0.4704686
0.2829052
∞
96.155


R-06
1.7818457
1.6875524
0.1704119
0.0518243
100.653
78.821
1.7357307
1.4717707
0.3957746
0.1960651
∞
114.313


R-07
1.7864151
1.6742008
0.1665634
0.0317893
107.735
75.495
1.7880532
1.5078066
0.3631259
0.1534641
∞
151.241


R-08
1.7551187
1.7058048
0.1260613
0.0733672
165.735
150.023
1.6240183
1.4537363
0.3656730
0.2492789
∞
100.378


R-09
1.7596719
1.6665628
0.1463430
0.0399819
173.817
139.094
1.7390530
1.4931057
0.3452404
0.1780760
∞
143.243


R-10
1.7692084
1.6538434
0.1486440
0.0255447
∞
130.472
1.8042519
1.5254556
0.3230027
0.1389890
∞
153.607


R-11
1.7492113
1.6831859
0.1255161
0.0612754
241.079
208.986
1.6666911
1.4444231
0.3598271
0.2233952
129.694
97.164


R-12
1.7576163
1.6562759
0.1404728
0.0340654
∞
196.802
1.8055298
1.4941443
0.3412442
0.1631900
∞
140.744


R-13
1.7695645
1.6433499
0.1419181
0.0223429
∞
134.816
1.8604189
1.5168227
0.3181887
0.1267727
∞
150.217




























TABLE 11-S





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























S-01
2.1066284
1.9722278
0.3918647
0.2424714
18.058
13.880
1.6983133
1.3959451
0.9356371
0.6799376
∞
48.742


S-02
2.0496651
1.8417159
0.2971437
0.0714760
17.518
8.817
1.7914989
1.4621715
0.5192064
0.2672081
∞
96.374


S-03
2.0477146
1.8087071
0.2690455
0.0146962
17.668
6.939
1.8236763
1.5090608
0.4501576
0.2032801
∞
113.921


S-04
2.0388925
1.7916110
0.2221639
0.0000000
18.932
6.085
1.8751494
1.5585832
0.4137815
0.1664536
∞
135.543


S-05
1.7882051
1.7276876
0.1639748
0.0887941
94.977
84.024
1.6337392
1.4183937
0.4583837
0.2861144
∞
87.183


S-06
1.7819149
1.6860152
0.1726072
0.0563951
99.704
78.505
1.7230213
1.4640186
0.4031988
0.1996941
∞
122.946


S-07
1.7882233
1.6754877
0.1680948
0.0335916
107.097
75.784
1.7909719
1.5092031
0.3709737
0.1549276
∞
139.443


S-08
1.7966754
1.6777130
0.1592941
0.0183420
126.810
74.679
1.8368322
1.5410192
0.3573019
0.1265255
∞
161.553


S-09
1.7601684
1.6707422
0.1484202
0.0431443
172.192
140.483
1.7421043
1.4908567
0.3567036
0.1810713
∞
132.966


S-10
1.7708264
1.6578479
0.1494843
0.0270356
∞
131.945
1.8111661
1.5278995
0.3313428
0.1397205
∞
140.924


S-11
1.7808365
1.6566373
0.1449551
0.0169888
∞
76.243
1.8495085
1.5425871
0.3220124
0.1131660
∞
185.922


S-12
1.7467185
1.6898837
0.1280234
0.0691355
236.068
211.744
1.6356970
1.4330066
0.3806984
0.2403298
115.527
85.926


S-13
1.7579517
1.6604298
0.1418869
0.0367490
∞
199.389
1.7772417
1.5042485
0.3539561
0.1652781
∞
134.892


S-14
1.7709827
1.6467432
0.1418484
0.0235245
∞
136.309
1.8412669
1.5157433
0.3250679
0.1269148
∞
137.874


S-15
1.7833105
1.6368506
0.1388995
0.0211969
∞
78.351
1.8743702
1.5007728
0.3112326
0.1024191
∞
189.621




























TABLE 11-T





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























T-01
2.0257518
1.8262559
0.3005010
0.0875737
18.604
9.528
1.7679118
1.4475798
0.5336131
0.2739842
∞
93.961


T-02
2.0479777
1.8073282
0.2785357
0.0221307
17.649
6.991
1.8099135
1.5015492
0.4539223
0.2053530
∞
112.996


T-03
1.9871581
1.7770885
0.1994500
0.0000000
23.196
8.093
1.9026852
1.5790720
0.4364031
0.1719341
∞
128.896


T-04
1.7838038
1.6848670
0.1747043
0.0576925
99.860
78.285
1.7278949
1.4701458
0.4229907
0.2064355
∞
124.965


T-05
1.7916234
1.6777831
0.1686057
0.0337253
107.128
76.217
1.8014530
1.5185135
0.3835360
0.1583273
∞
132.016


T-06
1.8002296
1.6820887
0.1597473
0.0181067
123.024
75.596
1.8474642
1.5506746
0.3678457
0.1294473
∞
174.507


T-07
1.7621698
1.6733356
0.1509720
0.0434793
172.927
141.368
1.7440225
1.4980874
0.3766420
0.1862685
∞
126.179


T-08
1.7741914
1.6608259
0.1503034
0.0266278
∞
136.057
1.8173046
1.5378185
0.3434213
0.1424618
∞
132.104


T-09
1.7840790
1.6684943
0.1443180
0.0203129
∞
135.294
1.8564051
1.5512855
0.3332231
0.1153507
∞
179.935


T-10
1.7471069
1.6944812
0.1281138
0.0746421
236.653
214.192
1.6315414
1.4407236
0.4303508
0.2868047
102.870
76.063


T-11
1.7601548
1.6635093
0.1434224
0.0367891
∞
200.162
1.7816191
1.5191484
0.3717643
0.1702335
∞
127.588


T-12
1.7736039
1.6490824
0.1417115
0.0230579
∞
136.257
1.8481265
1.5264627
0.3342218
0.1320843
∞
129.282


T-13
1.7854335
1.6355775
0.1377026
0.0255652
∞
139.113
1.8781876
1.5081985
0.3188588
0.1038490
∞
184.086




























TABLE 12-A





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























A-01
2.1808414
2.0202237
0.1177452
0.0000000
28.747
22.402
3.9125119
3.4135251
2.3592894
1.8675829
5.648
4.347


A-02
1.9782905
1.8360883
0.2479634
0.1031416
40.736
30.986
3.8207998
3.5190505
0.8046063
0.4869196
31.482
28.563


A-03
1.9572245
1.8232560
0.2092205
0.0692901
36.696
25.347
2.3997372
2.0823043
0.7809511
0.4572622
67.290
50.894


A-04
1.9538426
1.8147593
0.1791482
0.0264932
28.651
16.106
1.9706358
1.6911106
0.5480317
0.2766157
∞
79.863


A-05
1.9954675
1.8188549
0.1923512
0.0000000
20.889
9.610
1.8575722
1.5763149
0.4054773
0.1952503
∞
131.627


A-06
1.9921329
1.8241056
0.1714705
0.0000000
22.078
10.531
1.8964406
1.6171157
0.4240922
0.2021757
∞
127.905


A-07
1.9926516
1.7867996
0.2081128
0.0000000
19.729
7.090
1.8245385
1.5581041
0.3444239
0.1530946
∞
145.985


A-08
1.8314145
1.7531979
0.1372041
0.0501875
108.784
92.474
2.1280936
1.9006327
0.5317342
0.3267196
72.362
59.687


A-09
1.8085827
1.7459179
0.1222105
0.0510825
109.339
92.055
1.9395749
1.7141758
0.3894007
0.2106581
148.972
127.551


A-10
1.7697499
1.7013515
0.1227356
0.0337061
114.760
88.411
1.7401521
1.5761971
0.2871018
0.1525706
∞
185.066


A-11
1.7705034
1.6801567
0.1310643
0.0187597
∞
80.747
1.7513585
1.5678832
0.2526064
0.1235964
∞
193.932


A-12
1.7957585
1.7015227
0.1137432
0.0403167
227.660
177.186
6.9395294
5.8873138
3.6361637
2.5922831
1.111
0.858


A-13
1.7825164
1.7302739
0.1011628
0.0733832
196.277
166.231
2.0206052
1.9010581
0.3810646
0.2779408
75.306
68.640


A-14
1.7512995
1.6751032
0.1082121
0.0292668
∞
148.729
1.7116334
1.5769923
0.2368558
0.1408109
∞
186.687


A-15
1.7595350
1.6557484
0.1180659
0.0161714
∞
77.873
1.7725776
1.5799665
0.2199083
0.1145043
∞
231.353


A-16
1.7084088
1.6284980
0.1055479
0.0536387
226.749
192.832
1.9111620
1.7640246
0.3954086
0.2439645
100.912
81.198


A-17
1.7190182
1.6287740
0.1175933
0.0401091
∞
181.265
1.8380935
1.6452688
0.3389435
0.1578009
∞
143.472


A-18
1.7379437
1.6272247
0.1244722
0.0282357
∞
168.046
1.8617526
1.5253000
0.3218896
0.1194775
∞
150.146


A-19
1.7690277
1.6380658
0.1148478
0.0160624
∞
130.628
1.9160211
1.5888507
0.2656154
0.1035866
∞
186.563


A-20
1.7635089
1.6370587
0.1248802
0.0253209
∞
248.930
6.4916237
5.0709047
3.1703715
1.9933341
1.674
1.017


A-21
1.7389565
1.6442422
0.1261815
0.0278478
∞
246.493
1.9590470
1.6893522
0.5067608
0.2299566
106.692
71.669


A-22
1.7475340
1.6520457
0.1252099
0.0255127
∞
242.366
1.9058713
1.4340244
0.4374233
0.1474709
∞
122.720


A-23
1.7615318
1.6527086
0.1217239
0.0195364
∞
168.752
2.1047320
1.4652313
0.4154847
0.1111768
∞
136.328


A-24
1.7766067
1.6412832
0.1190326
0.0138373
∞
88.740
2.0349691
1.4805855
0.3904136
0.0903453
∞
146.000




























TABLE 12-B





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























B-01
1.9347331
1.7996062
0.2750426
0.1363683
43.318
33.493
5.2511921
4.9279487
0.8929957
0.5468983
20.307
18.973


B-02
1.9419663
1.8082237
0.2578651
0.1188306
41.573
31.444
3.2513477
2.9037476
0.9232051
0.5460798
37.199
32.161


B-03
1.9591401
1.8243427
0.1845688
0.0348459
28.863
17.166
2.0003048
1.7161678
0.5962361
0.3082796
∞
103.261


B-04
1.9941085
1.8294710
0.1794493
0.0000000
21.841
10.855
1.8890534
1.6094807
0.4376496
0.2159333
∞
124.328


B-05
1.9921874
1.7902306
0.2161495
0.0000000
19.560
7.407
1.8147281
1.5495047
0.3515218
0.1609798
∞
142.900


B-06
1.8367116
1.7511159
0.1415038
0.0585485
117.130
100.124
3.4794803
2.8591788
2.9219716
2.2279274
3.496
2.624


B-07
1.8663175
1.7904166
0.1454666
0.0629788
107.043
95.314
3.6094535
3.3869669
0.6363755
0.4433616
30.601
28.448


B-08
1.8110797
1.7530743
0.1221582
0.0579590
106.940
92.576
1.9534348
1.7349314
0.4032119
0.2333694
137.006
119.951


B-09
1.7692729
1.7053300
0.1224199
0.0387908
112.135
89.219
1.7286207
1.5759400
0.2926499
0.1635215
∞
179.030


B-10
1.7701533
1.6837482
0.1309662
0.0215143
124.678
82.066
1.7483486
1.5688503
0.2577566
0.1308303
∞
187.792


B-11
1.7492102
1.6798841
0.1056795
0.0349862
∞
150.963
1.7024517
1.5769451
0.2396374
0.1507445
∞
180.475


B-12
1.7583506
1.6574412
0.1168094
0.0182767
∞
130.082
1.7698774
1.5820478
0.2232388
0.1211306
∞
225.787


B-13
1.7880698
1.7139340
0.1141298
0.0555018
209.668
174.793
5.4095236
4.4182919
4.5084058
3.5265150
1.134
0.868


B-14
1.7899020
1.7260251
0.1113799
0.0687920
200.978
173.694
9.6456356
9.4830819
0.4801134
0.3732738
10.334
10.156


B-15
1.6979410
1.6299820
0.0967336
0.0676101
222.002
195.947
1.9337656
1.7944394
0.4093689
0.2921692
89.401
74.126


B-16
1.7134936
1.6304943
0.1158895
0.0466000
229.322
184.704
1.8372765
1.6612144
0.3459416
0.1743804
∞
137.319


B-17
1.7339774
1.6269608
0.1244076
0.0316488
∞
169.585
1.8519942
1.5217329
0.3271389
0.1269643
∞
143.855


B-18
1.7679045
1.6421025
0.1142134
0.0182430
∞
136.942
1.9207852
1.5961025
0.2702996
0.1092229
∞
180.258


B-19
1.7349739
1.6440145
0.1270969
0.0322690
∞
248.639
1.9861047
1.7084167
0.5505443
0.2637120
92.313
64.771


B-20
1.7457875
1.6523659
0.1258538
0.0278741
∞
244.451
1.9093494
1.4410730
0.4538915
0.1599267
∞
120.523


B-21
1.7603639
1.6533522
0.1221163
0.0218136
∞
170.127
2.1254057
1.4577543
0.4256915
0.1179254
∞
130.094


B-22
1.7754260
1.6426635
0.1193196
0.0159285
∞
90.544
2.0464268
1.4759519
0.3977860
0.0948929
∞
140.032




























TABLE 12-C





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























C-01
1.8930999
1.7732818
0.3015456
0.1719582
44.120
35.207
4.9698244
4.5796632
1.0302271
0.6019471
20.856
19.154


C-02
1.9701299
1.8401421
0.1894818
0.0431159
28.796
18.240
2.0513300
1.7601911
0.6580454
0.3477707
∞
96.767


C-03
1.9965543
1.8387699
0.1802441
0.0017981
21.880
11.525
1.8973838
1.6191258
0.4603685
0.2347033
∞
119.691


C-04
1.9942257
1.7970138
0.2187743
0.0000000
19.381
7.773
1.8104389
1.5459101
0.3620504
0.1713571
∞
139.782


C-05
1.8678636
1.8052953
0.1568168
0.0833622
104.700
94.970
4.8729893
4.6290184
0.6966732
0.5019222
20.806
19.723


C-06
1.8118435
1.7610964
0.1197983
0.0687717
104.921
93.165
1.9621194
1.7520901
0.4050714
0.2596380
127.606
114.505


C-07
1.7678278
1.7092853
0.1216732
0.0442892
109.785
89.909
1.7142712
1.5759594
0.2975075
0.1768080
∞
173.302


C-08
1.7695373
1.6874450
0.1309482
0.0248496
116.803
83.168
1.7460448
1.5717479
0.2635914
0.1392432
∞
220.126


C-09
1.7463738
1.6881292
0.1026663
0.0407437
∞
155.686
1.6925486
1.5797764
0.2435170
0.1629555
205.253
174.633


C-10
1.7571263
1.6600694
0.1155040
0.0208471
∞
136.617
1.7662295
1.5866433
0.2273041
0.1286859
∞
220.829


C-11
1.7081474
1.6332231
0.1115853
0.0550326
220.895
187.564
1.8379989
1.6786605
0.3530382
0.2012022
∞
132.380


C-12
1.7301370
1.6291250
0.1232971
0.0358093
∞
171.179
1.8496058
1.5180543
0.3330794
0.1358944
∞
139.728


C-13
1.7666980
1.6468799
0.1134447
0.0208227
∞
140.860
1.9306487
1.6040642
0.2759754
0.1154969
∞
211.039


C-14
1.7433466
1.6533259
0.1266477
0.0323570
∞
246.551
1.9142676
1.5792065
0.4740512
0.1745078
∞
116.083


C-15
1.7579646
1.6544478
0.1224951
0.0245935
∞
171.578
2.1504945
1.4490724
0.4374587
0.1256044
∞
125.994


C-16
1.7745198
1.6439814
0.1195634
0.0184221
∞
144.260
2.0614452
1.4721825
0.4059610
0.0996109
∞
163.579




























TABLE 12-D





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























D-01
1.9387499
1.8274901
0.2827500
0.1510105
36.265
28.410
2.6651047
2.2604026
1.1780592
0.7481019
45.830
35.031


D-02
1.9911368
1.8649942
0.1947154
0.0518638
27.328
18.211
2.0801817
1.7824437
0.7046761
0.3894856
∞
89.391


D-03
2.0053118
1.8488164
0.1911195
0.0118971
20.841
11.375
1.8790896
1.6015383
0.4674731
0.2482629
∞
116.048


D-04
1.9984316
1.8029042
0.2242962
0.0055279
18.958
7.919
1.8022754
1.5415478
0.3692367
0.1800069
∞
161.074


D-05
1.8367033
1.7915287
0.1448993
0.0959638
100.413
92.330
2.2232544
2.0121606
0.6927698
0.5482850
50.856
43.913


D-06
1.7645533
1.7107752
0.1215570
0.0488641
107.088
90.071
1.6944128
1.5681762
0.2967935
0.1883071
∞
167.306


D-07
1.7686885
1.6897749
0.1317105
0.0281302
113.091
83.726
1.7443327
1.5721245
0.2674691
0.1462606
∞
212.321


D-08
1.7431482
1.6903479
0.1012162
0.0434916
186.875
156.460
1.6837059
1.5778783
0.2476342
0.1736730
192.146
167.792


D-09
1.7561171
1.6632973
0.1147154
0.0233959
∞
139.092
1.7649256
1.5954151
0.2309121
0.1349502
∞
216.222


D-10
1.6992769
1.6367293
0.1062424
0.0636582
217.758
189.407
1.8298004
1.6887347
0.3588003
0.2369851
∞
129.000


D-11
1.7657052
1.6515499
0.1124392
0.0233779
∞
143.323
1.9434736
1.6133820
0.2816908
0.1205092
∞
202.760


D-12
1.7357815
1.6550527
0.1273897
0.0367512
∞
248.170
1.9123721
1.6031448
0.4942049
0.1858577
∞
111.627


D-13
1.7526840
1.6557943
0.1226776
0.0275128
∞
176.326
2.1673377
1.4382227
0.4469812
0.1314001
∞
121.730


D-14
1.7739079
1.6446855
0.1196764
0.0205456
∞
151.443
2.0464263
1.4694964
0.4122386
0.1024998
∞
169.246




























TABLE 12-E





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























E-01
1.9441637
1.8429272
0.2974501
0.1749428
29.318
22.537
2.0026070
1.6598153
1.0485594
0.7394921
∞
42.606


E-02
2.0101090
1.8833402
0.2080006
0.0628834
24.123
16.088
1.9875326
1.6877633
0.6626760
0.4002456
∞
87.502


E-03
2.0050503
1.8489065
0.2105359
0.0306079
19.910
11.032
1.8390125
1.5618030
0.4581653
0.2510816
∞
111.349


E-04
1.9912795
1.7985134
0.2317913
0.0160076
19.088
8.078
1.7867732
1.5334187
0.3697187
0.1830317
∞
151.843


E-05
1.7606078
1.7088194
0.1229858
0.0501904
105.154
89.603
1.6745313
1.5530078
0.2929759
0.1936033
∞
159.881


E-06
1.7685195
1.6901601
0.1333463
0.0304605
111.335
83.682
1.7455691
1.5702676
0.2697093
0.1496056
∞
201.778


E-07
1.7407373
1.6857263
0.1036069
0.0414218
183.044
154.502
1.6816095
1.5711383
0.2532263
0.1789661
183.178
159.350


E-08
1.7555063
1.6665793
0.1149283
0.0252627
∞
140.733
1.7670485
1.6132301
0.2339211
0.1377651
∞
210.561


E-09
1.6931474
1.6419181
0.1017729
0.0688444
212.031
189.996
1.8068114
1.6851085
0.3676980
0.2687320
159.899
125.176


E-10
1.7516203
1.6732426
0.1131103
0.0468176
∞
211.707
1.7182256
1.5836064
0.2959419
0.1614839
∞
149.849


E-11
1.7654370
1.6553771
0.1111497
0.0252537
∞
145.016
1.8121549
1.6252275
0.2864905
0.1237879
∞
197.255


E-12
1.7310442
1.6573405
0.1279842
0.0397384
∞
249.228
1.8974334
1.6040960
0.5107330
0.2004839
∞
106.788


E-13
1.7491464
1.6573153
0.1225933
0.0291107
∞
227.942
2.0938195
1.4260205
0.4518073
0.1347504
∞
116.457


E-14
1.7737611
1.6445485
0.1195745
0.0217412
∞
153.499
2.0341814
1.4657293
0.4150721
0.1035889
∞
164.698




























TABLE 12-F





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























F-01
1.9309499
1.8256862
0.3220077
0.2034871
27.771
21.191
1.8235422
1.5442282
0.9417758
0.6984530
69.490
42.671


F-02
2.0309565
1.9002326
0.2214292
0.0713829
21.890
14.677
1.9351400
1.6211642
0.6306132
0.3978801
∞
90.258


F-03
1.9982247
1.8423031
0.2292788
0.0501528
19.464
10.841
1.7983820
1.5239496
0.4454823
0.2471535
∞
108.827


F-04
1.9872145
1.7950417
0.2345780
0.0208244
19.296
8.166
1.7776850
1.5307746
0.3707366
0.1836223
∞
141.236


F-05
2.0022033
1.7926135
0.1918167
0.0000000
19.700
6.937
1.8360524
1.5745095
0.3473032
0.1539414
∞
151.670


F-06
1.7586867
1.7057167
0.1249748
0.0510368
104.484
88.915
1.6647586
1.5426834
0.2931011
0.1942278
∞
150.532


F-07
1.7696897
1.6897824
0.1350373
0.0311201
111.074
83.470
1.7511979
1.5703862
0.2729217
0.1501470
∞
194.177


F-08
1.7828581
1.6990044
0.1261705
0.0201879
134.309
84.108
1.8128845
1.5998767
0.2643117
0.1231435
∞
196.169


F-09
1.7405643
1.6873270
0.1077789
0.0431707
180.529
154.997
1.6790179
1.5664434
0.2609613
0.1796234
174.384
149.123


F-10
1.7568981
1.6686925
0.1156114
0.0257725
∞
141.380
1.7726988
1.6259935
0.2372277
0.1379125
∞
202.825


F-11
1.6922087
1.6452593
0.1009766
0.0679431
210.803
190.171
1.7840482
1.6730289
0.3817165
0.2781301
147.094
119.532


F-12
1.7506346
1.6758665
0.1142225
0.0477125
∞
212.960
1.7099525
1.5862989
0.3041244
0.1683896
182.910
140.704


F-13
1.7665789
1.6568609
0.1097239
0.0258750
∞
145.637
1.8049443
1.6372819
0.2902557
0.1270794
∞
190.688


F-14
1.7793673
1.6305355
0.1135032
0.0199937
∞
156.959
1.9211943
1.5416899
0.2854559
0.1015741
∞
195.958


F-15
1.7471315
1.6586561
0.1223108
0.0299292
∞
230.996
2.0783137
1.4178145
0.4537234
0.1372952
∞
108.954


F-16
1.7549368
1.6377188
0.1212434
0.0153205
∞
161.765
1.9672754
1.4663281
0.3638952
0.0922351
∞
177.545




























TABLE 12-G





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























G-01
1.9074552
1.7961906
0.3422843
0.2520548
29.495
22.610
1.7786603
1.5342987
1.0346998
0.7374305
54.222
35.976


G-02
2.0298789
1.9017747
0.2316143
0.0878033
22.071
15.195
1.9301729
1.6008943
0.6500908
0.4083086
∞
84.531


G-03
1.9904209
1.8380210
0.2334696
0.0588651
19.842
11.226
1.7827243
1.5134922
0.4506346
0.2507456
∞
102.949


G-04
2.0009844
1.7934185
0.1930633
0.0000000
19.876
7.119
1.8350621
1.5724645
0.3507015
0.1561092
∞
144.234


G-05
1.7597286
1.7058638
0.1254356
0.0512351
104.617
88.871
1.6655039
1.5427988
0.2996432
0.1974863
∞
141.145


G-06
1.7714890
1.6912364
0.1352196
0.0309203
111.267
83.725
1.7567216
1.5741301
0.2784825
0.1526719
∞
185.351


G-07
1.7843314
1.7014579
0.1257631
0.0216420
133.146
84.680
1.8170787
1.6035057
0.2686002
0.1254215
∞
187.805


G-08
1.7419644
1.6879556
0.1088176
0.0432548
181.354
155.167
1.6807525
1.5671808
0.2683500
0.1826212
163.724
139.209


G-09
1.7585761
1.6686432
0.1152971
0.0263298
∞
141.147
1.7770454
1.6310822
0.2407989
0.1400994
244.852
193.529


G-10
1.7703131
1.6943439
0.1031730
0.0389335
∞
154.687
1.8232087
1.5876936
0.2134065
0.1128255
∞
249.911


G-11
1.6887573
1.6451770
0.0975290
0.0724180
209.185
191.053
1.7773022
1.6675756
0.3800804
0.2958507
138.752
111.368


G-12
1.7520358
1.6759592
0.1144883
0.0474461
∞
212.716
1.7115860
1.5894046
0.3088005
0.1698918
169.537
131.748


G-13
1.7679846
1.6559448
0.1088859
0.0258647
∞
145.342
1.8076172
1.6422363
0.2930750
0.1273462
∞
181.729


G-14
1.7805664
1.6279932
0.1137601
0.0204922
∞
159.035
1.9186750
1.5389729
0.2883794
0.1013762
∞
187.281


G-15
1.7470441
1.6587128
0.1220067
0.0318895
∞
231.817
2.0959926
1.4176711
0.4582089
0.1395004
∞
98.800


G-16
1.7545533
1.6381727
0.1214452
0.0153368
∞
162.772
1.9685664
1.4649641
0.3661101
0.0928691
∞
176.415




























TABLE 12-H





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























H-01
1.9954203
1.8787272
0.2389065
0.1110098
25.704
18.260
1.9728332
1.6385461
0.7550855
0.4544666
∞
69.433


H-02
1.9889747
1.8436634
0.2240097
0.0563217
20.861
12.234
1.8049323
1.5360932
0.4833361
0.2709057
∞
89.557


H-03
1.9838198
1.8007681
0.2298239
0.0248556
19.928
8.947
1.7818109
1.5291559
0.3890198
0.1961341
∞
132.574


H-04
1.9984290
1.7954163
0.1972446
0.0000000
19.960
7.439
1.8304558
1.5669780
0.3567863
0.1621232
∞
140.921


H-05
1.7625812
1.7121771
0.1234484
0.0532482
104.547
90.003
1.6681649
1.5502535
0.3099723
0.2093803
∞
133.379


H-06
1.7717941
1.6954404
0.1337145
0.0320092
110.562
84.753
1.7534790
1.5766272
0.2839659
0.1602488
∞
177.732


H-07
1.7833304
1.7023965
0.1254477
0.0229868
132.965
85.102
1.8136903
1.6049709
0.2720818
0.1311882
∞
182.349


H-08
1.7426659
1.6905956
0.1032570
0.0447133
181.549
155.657
1.6810093
1.5708933
0.2709547
0.1930666
151.452
131.886


H-09
1.7578654
1.6675761
0.1130004
0.0295128
∞
146.541
1.7739569
1.6268427
0.2432275
0.1472412
233.444
184.408


H-10
1.7689847
1.6945828
0.1028286
0.0392727
∞
154.818
1.8251553
1.5951052
0.2154490
0.1183372
∞
240.104


H-11
1.7537859
1.6772613
0.1128123
0.0498203
∞
212.202
1.7095872
1.5898778
0.3075202
0.1714142
159.026
124.023


H-12
1.7107053
1.6332028
0.1193085
0.0550861
225.437
180.711
1.8324906
1.6342203
0.3444059
0.1767509
∞
147.166


H-13
1.7677474
1.6550924
0.1090469
0.0269449
∞
145.773
1.8136422
1.6357149
0.2956611
0.1301069
∞
171.600


H-14
1.7788371
1.6293950
0.1135283
0.0209819
∞
159.189
1.9194994
1.5398521
0.2882715
0.1038879
∞
177.565


H-15
1.7255306
1.6596065
0.1294789
0.0477235
299.198
252.902
1.9082083
1.6031338
0.5360868
0.2232267
∞
78.707


H-16
1.7474986
1.6575047
0.1223978
0.0353812
∞
232.352
1.9688166
1.4227350
0.4694319
0.1444258
∞
87.559


H-17
1.7546479
1.6375300
0.1213946
0.0161077
∞
162.500
1.9667069
1.4637968
0.3697669
0.0968665
∞
172.248




























TABLE 12-I





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























I-01
1.9692763
1.8596266
0.2508663
0.1332991
28.459
20.886
1.9945549
1.6714592
0.8746255
0.5201810
∞
58.984


I-02
1.9948263
1.8576400
0.2133537
0.0548759
21.878
13.513
1.8484874
1.5782359
0.5362016
0.3067351
∞
109.380


I-03
1.9946679
1.8170813
0.2276031
0.0263690
19.535
9.387
1.7913122
1.5290136
0.4084559
0.2129713
∞
128.054


I-04
2.0026503
1.8031069
0.2017044
0.0000000
19.564
7.726
1.8270961
1.5626259
0.3662021
0.1718345
∞
139.811


I-05
1.7658783
1.7227350
0.1181285
0.0666990
103.691
91.535
1.6673294
1.5628945
0.3206361
0.2315138
154.993
126.106


I-06
1.7705080
1.7015382
0.1312636
0.0353615
108.903
86.260
1.7439231
1.5785362
0.2895958
0.1723692
∞
172.850


I-07
1.7809352
1.7034120
0.1251832
0.0253065
120.751
85.550
1.8032815
1.6051419
0.2739825
0.1391363
∞
213.651


I-08
1.7546144
1.6808827
0.1087703
0.0356038
∞
151.796
1.7653934
1.6230533
0.2446842
0.1582816
220.487
176.365


I-09
1.7659758
1.6939299
0.1022816
0.0399049
∞
154.614
1.8195213
1.6017894
0.2170334
0.1259311
∞
231.541


I-10
1.7062981
1.6329753
0.1143390
0.0650970
217.064
185.478
1.8401354
1.6587585
0.3337728
0.1982443
∞
138.813


I-11
1.7664075
1.6564075
0.1093932
0.0310388
∞
147.689
1.8226250
1.6245293
0.3002786
0.1388931
∞
164.311


I-12
1.7756357
1.6331223
0.1131198
0.0217062
∞
158.981
1.9263867
1.5423828
0.2890063
0.1103601
∞
172.733


I-13
1.7461154
1.6571884
0.1235032
0.0387156
∞
240.244
1.9411447
1.4218442
0.4838070
0.1574935
∞
78.316


I-14
1.7725616
1.6455170
0.1205680
0.0270206
∞
155.716
2.0919097
1.4580559
0.4358933
0.1189182
∞
129.458


I-15
1.7549616
1.6368073
0.1213638
0.0182803
∞
162.204
1.9691181
1.4663593
0.3758026
0.1021307
∞
167.272




























TABLE 12-J





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























J-01
1.9731500
1.8713934
0.2654901
0.1590912
28.020
21.477
1.9770311
1.6750340
0.9521030
0.6078782
∞
54.233


J-02
2.0065961
1.8749738
0.2149204
0.0648764
21.717
14.068
1.8627784
1.5956165
0.5755217
0.3436625
∞
102.235


J-03
1.9985387
1.8286315
0.2279896
0.0330873
19.375
9.912
1.7930359
1.5330530
0.4264467
0.2311098
∞
123.013


J-04
2.0076389
1.8108030
0.2086414
0.0000000
19.065
7.927
1.8201261
1.5562968
0.3740609
0.1818026
∞
159.427


J-05
1.7680914
1.7070538
0.1292749
0.0424146
106.173
87.400
1.7307823
1.5771556
0.2927908
0.1860452
∞
166.850


J-06
1.7786842
1.7054640
0.1248020
0.0287583
114.334
86.092
1.7945003
1.6027705
0.2747519
0.1474472
∞
207.069


J-07
1.7503216
1.6927032
0.1035853
0.0436439
∞
154.913
1.7550789
1.6307222
0.2454636
0.1705746
205.444
170.365


J-08
1.7628881
1.6969970
0.1000361
0.0434748
∞
155.309
1.8150625
1.6041567
0.2163902
0.1335313
∞
226.183


J-09
1.7023888
1.6383727
0.1103469
0.0710305
213.976
188.002
1.8332938
1.6741837
0.3342286
0.2182044
∞
137.568


J-10
1.7624328
1.6604162
0.1092583
0.0359734
∞
154.045
1.8103025
1.6180515
0.3074345
0.1483537
∞
157.434


J-11
1.7727296
1.6421522
0.1127977
0.0234031
∞
159.947
1.9344715
1.5437769
0.2923744
0.1164235
∞
166.359


J-12
1.7434701
1.6582797
0.1244701
0.0424218
∞
244.182
1.9312150
1.4189274
0.5004744
0.1715095
∞
112.002


J-13
1.7702020
1.6413129
0.1208964
0.0213823
∞
118.831
2.0538922
1.4774554
0.4144870
0.1011447
∞
136.148




























TABLE 12-K





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























K-01
2.0218619
1.8933890
0.2281588
0.0789693
20.232
13.558
1.8275836
1.5675665
0.5773003
0.3668426
∞
94.095


K-02
2.0030875
1.8362100
0.2376098
0.0442529
18.757
9.972
1.7780147
1.5216621
0.4326685
0.2435681
∞
117.945


K-03
2.0126645
1.8154441
0.2207471
0.0000000
18.396
7.885
1.8063822
1.5463090
0.3755212
0.1879101
∞
150.090


K-04
1.7651000
1.7098608
0.1288453
0.0482545
103.746
87.793
1.7190324
1.5694731
0.2931750
0.1967102
∞
158.526


K-05
1.7773651
1.7081219
0.1244173
0.0325899
110.766
86.568
1.7918913
1.5996025
0.2743664
0.1535070
∞
195.827


K-06
1.7466075
1.6987914
0.0994331
0.0506673
181.377
156.295
1.7489751
1.6459099
0.2464233
0.1801611
192.498
165.736


K-07
1.7608557
1.7034668
0.0954377
0.0506647
∞
156.797
1.8114198
1.6005177
0.2122738
0.1386373
∞
222.034


K-08
1.7013165
1.6482062
0.1118924
0.0673893
212.079
190.563
1.8012950
1.6672679
0.3563252
0.2167549
∞
134.528


K-09
1.7581609
1.6662114
0.1081045
0.0401626
∞
202.507
1.7674118
1.6210202
0.3149906
0.1578068
∞
149.985


K-10
1.7710892
1.6477835
0.1125048
0.0264342
∞
162.019
1.9431216
1.5627285
0.2972370
0.1216852
∞
178.844


K-11
1.7411044
1.6603232
0.1249554
0.0455071
∞
245.731
1.9169497
1.5628151
0.5133974
0.1871095
∞
110.475


K-12
1.7661840
1.6409679
0.1208136
0.0139715
∞
93.306
1.9665859
1.4859340
0.3680603
0.0919865
∞
182.028




























TABLE 12-L





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























L-01
2.0460807
1.9550919
0.3015443
0.2175648
20.485
16.796
1.7248425
1.5281103
0.8161721
0.6645046
∞
53.473


L-02
2.0318624
1.9058614
0.2472378
0.0954800
18.757
12.872
1.7700254
1.5169590
0.5579569
0.3707376
∞
84.372


L-03
2.0008101
1.8355257
0.2483238
0.0575474
18.482
9.997
1.7581930
1.5056417
0.4335189
0.2489083
∞
110.450


L-04
2.0105317
1.8182819
0.2156634
0.0000000
18.663
8.218
1.8122432
1.5491304
0.3839051
0.1936096
∞
134.819


L-05
1.7641121
1.7102925
0.1308720
0.0508488
102.429
87.618
1.7188369
1.5620900
0.2966073
0.2016427
∞
148.593


L-06
1.7783394
1.7116952
0.1239742
0.0361934
109.032
87.083
1.7997420
1.5982430
0.2759885
0.1557675
∞
156.457


L-07
1.7456815
1.7019254
0.0984309
0.0545808
176.526
156.817
1.7472612
1.6593706
0.2504515
0.1845018
182.891
159.027


L-08
1.7608578
1.7113778
0.0854896
0.0641859
∞
158.813
1.8137233
1.7101357
0.2024677
0.1398163
∞
216.875


L-09
1.7611906
1.6760307
0.1005431
0.0363549
∞
89.194
1.8280582
1.5602262
0.2035395
0.1136579
∞
222.191


L-10
1.7563064
1.6718276
0.1052920
0.0433254
∞
208.681
1.7543803
1.6367057
0.3218591
0.1723034
∞
144.725


L-11
1.7306655
1.6509731
0.1124854
0.0292652
∞
164.553
1.8340950
1.5870113
0.3028945
0.1279140
∞
187.149


L-12
1.7824602
1.6205047
0.1189640
0.0164823
∞
81.070
1.9228810
1.5664223
0.2779451
0.0844258
∞
231.434


L-13
1.7671173
1.6418353
0.1209148
0.0150969
∞
152.912
1.9737812
1.4829987
0.3752843
0.0940037
∞
183.297




























TABLE 12-M





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























M-01
2.0110098
1.8219436
0.2105546
0.0000000
19.030
8.575
1.8226207
1.5549815
0.3944100
0.1976119
∞
130.545


M-02
2.0346730
1.8208070
0.1881221
0.0000000
17.927
6.976
1.8521081
1.5816320
0.3558327
0.1592007
∞
144.889


M-03
1.7672192
1.7109472
0.1344514
0.0523958
102.482
87.478
1.7365020
1.5655584
0.3097410
0.2047594
188.837
141.660


M-04
1.7822635
1.7171365
0.1230080
0.0398903
108.764
87.918
1.8181624
1.6058894
0.2832612
0.1572517
∞
193.231


M-05
1.7759032
1.7056346
0.1154059
0.0292780
130.745
87.463
1.8142014
1.5776878
0.2626479
0.1270021
∞
198.882


M-06
1.7485319
1.7058988
0.0988620
0.0584531
176.587
157.770
1.7583974
1.6764358
0.2587944
0.1866594
173.444
149.341


M-07
1.7603756
1.6813045
0.1019426
0.0341533
∞
149.820
1.7288461
1.5578732
0.2073948
0.1144956
∞
217.877


M-08
1.7585071
1.6746582
0.1002314
0.0451520
∞
210.626
1.7577692
1.6626617
0.3293141
0.1847620
∞
143.673


M-09
1.7247856
1.6504741
0.1133589
0.0315816
∞
166.946
1.8333728
1.6038330
0.3104587
0.1313352
∞
190.414


M-10
1.7635739
1.6244198
0.1200989
0.0237208
∞
153.287
1.9267434
1.5504007
0.2962768
0.1034789
∞
198.199


M-11
1.7687343
1.6427834
0.1208856
0.0152338
∞
156.634
1.9796792
1.4797451
0.3823795
0.0942362
∞
177.061




























TABLE 12-N





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























N-01
1.9898743
1.8798206
0.2738954
0.1482851
19.878
14.390
1.6581080
1.4387562
0.5750740
0.3879157
∞
77.830


N-02
2.0057028
1.8241415
0.2035070
0.0000000
19.908
9.289
1.8381897
1.5697363
0.4107890
0.2056645
∞
127.168


N-03
2.0294681
1.8302982
0.1644667
0.0000000
18.910
7.978
1.8863058
1.6083102
0.3765767
0.1689852
∞
136.677


N-04
1.7721301
1.7134985
0.1375917
0.0523525
103.018
87.682
1.7531814
1.5780642
0.3294239
0.2126075
174.502
133.130


N-05
1.7864489
1.7232433
0.1217894
0.0439756
108.908
88.852
1.8356927
1.6197992
0.2939229
0.1629134
∞
186.775


N-06
1.7745623
1.7056377
0.1151904
0.0308496
127.213
87.928
1.8040840
1.5773042
0.2657261
0.1305882
∞
195.501


N-07
1.7525086
1.7111476
0.0973459
0.0651206
178.717
159.090
1.7729129
1.6972781
0.2688526
0.1986121
162.784
139.577


N-08
1.7600797
1.6845035
0.1026179
0.0367182
∞
152.101
1.7182206
1.5603532
0.2115874
0.1181353
∞
212.611


N-09
1.7225932
1.6464408
0.1128660
0.0335850
∞
168.513
1.8529047
1.6091327
0.3205476
0.1369856
∞
184.752


N-10
1.7091315
1.6736102
0.0936172
0.0551113
∞
210.524
1.7597802
1.6848742
0.3389807
0.2088989
167.444
138.726


N-11
1.7839857
1.6195753
0.1182756
0.0199614
∞
84.504
1.9294443
1.5721994
0.2803088
0.0874462
∞
225.527


N-12
1.7668392
1.6435238
0.1208574
0.0160771
∞
158.712
1.9813165
1.4758930
0.3860709
0.0943253
∞
168.748




























TABLE 12-O





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























O-01
1.9745355
1.8234942
0.2457067
0.0746410
 21.112
12.018
1.7617983
1.5132070
0.4902947
0.2839715
∞
112.417


O-02
2.0059733
1.8307645
0.2000360
0.0037738
 20.285
9.900
1.8500023
1.5836144
0.4296295
0.2199079
∞
123.209


O-03
2.0367482
1.8369179
0.1737368
0.0000000
 18.405
7.972
1.8775081
1.5995149
0.3826412
0.1765084
∞
135.410


O-04
1.7750631
1.7178732
0.1384535
0.0554530
102.755
88.068
1.7619051
1.5900936
0.3474274
0.2293012
161.256
125.106


O-05
1.7879382
1.7278942
0.1207460
0.0485292
108.257
89.506
1.8420848
1.6311022
0.3013680
0.1737569
∞
180.186


O-06
1.7738533
1.7077535
0.1146640
0.0340439
126.423
88.494
1.7692212
1.5795898
0.2681826
0.1376150
∞
190.100


O-07
1.7538681
1.7161118
0.0873451
0.0789735
179.349
160.065
1.7761562
1.7153773
0.2775923
0.2090328
144.525
132.014


O-08
1.7588094
1.6871175
0.1006359
0.0395605
∞
153.368
1.7108087
1.5673602
0.2119811
0.1244213
∞
219.687


O-09
1.7035585
1.6747463
0.0911300
0.0586569
224.781
209.678
1.7518392
1.6872775
0.3528284
0.2335193
156.082
132.286


O-10
1.7216346
1.6424549
0.1134544
0.0365623
∞
169.343
1.9264243
1.6046848
0.3222850
0.1392088
∞
174.721


O-11
1.7578687
1.6214869
0.1197884
0.0270357
∞
157.982
1.9250150
1.5515628
0.3003661
0.1065501
∞
182.350


O-12
1.7639572
1.6436984
0.1209727
0.0163487
∞
159.615
1.9791064
1.4724890
0.3896116
0.0995359
∞
166.016




























TABLE 12-P





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























P-01
1.9847236
1.8976008
0.2719445
0.1774719
 21.840
17.336
1.6496701
1.4546273
0.6962012
0.5022034
∞
67.364


P-02
1.9832269
1.8392132
0.2453629
0.0797892
 20.874
12.542
1.7646732
1.5226603
0.5192793
0.3142720
∞
108.306


P-03
2.0103767
1.8394819
0.2038377
0.0095908
 19.974
10.197
1.8466362
1.5845304
0.4440382
0.2363331
∞
119.706


P-04
2.0432754
1.8428372
0.1868630
0.0000000
 17.783
7.906
1.8621291
1.5854238
0.3866851
0.1853595
∞
156.590


P-05
1.7741173
1.7242967
0.1351302
0.0622176
101.341
88.768
1.7509717
1.5946826
0.3569804
0.2534709
146.597
117.981


P-06
1.7856872
1.7302709
0.1192358
0.0539037
106.649
89.884
1.8276629
1.6314312
0.3016099
0.1875450
∞
174.202


P-07
1.7731677
1.7111804
0.1136218
0.0386816
126.186
89.003
1.7503842
1.5831662
0.2679962
0.1463764
∞
208.563


P-08
1.7564437
1.6891097
0.0959306
0.0430851
∞
153.752
1.7024006
1.5705427
0.2082205
0.1320206
∞
213.283


P-09
1.7058157
1.6818545
0.0973152
0.0630500
226.401
211.558
1.7333167
1.6658436
0.3406044
0.2298866
148.002
123.372


P-10
1.7196925
1.6496888
0.1133306
0.0389129
∞
170.096
1.9296571
1.5996742
0.3232726
0.1404846
∞
163.013


P-11
1.7594009
1.6325711
0.1189345
0.0285000
∞
158.234
1.9322292
1.5541457
0.3011090
0.1132977
∞
171.578


P-12
1.7649224
1.6433465
0.1212459
0.0182393
∞
159.568
1.9802461
1.4696260
0.3928773
0.1053419
∞
160.374




























TABLE 12-Q





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























Q-01
2.0301412
1.9516500
0.2802433
0.2000761
20.310
16.839
1.6486923
1.4686020
0.7370642
0.5836755
∞
61.930


Q-02
1.9990744
1.8621359
0.2522920
0.0892317
19.736
12.562
1.7518351
1.5171305
0.5349623
0.3426393
∞
99.977


Q-03
2.0220568
1.8515978
0.2160734
0.0179265
18.790
9.959
1.8260112
1.5671843
0.4476571
0.2499471
∞
116.748


Q-04
2.0448172
1.8474808
0.1930916
0.0000000
17.491
8.015
1.8536839
1.5798021
0.3918840
0.1948662
∞
147.129


Q-05
1.7689426
1.7318137
0.1258563
0.0778778
98.490
89.656
1.7032214
1.5835534
0.3498561
0.2776698
133.970
114.292


Q-06
1.7797734
1.7309685
0.1161205
0.0612780
104.569 
90.079
1.7924899
1.6197165
0.2934962
0.2003493
∞
169.394


Q-07
1.7717697
1.7140060
0.1124096
0.0432885
112.170 
89.250
1.7397149
1.5821770
0.2646063
0.1542864
∞
174.125


Q-08
1.7537336
1.6908943
0.0895630
0.0524731
∞
153.813
1.6934713
1.5710677
0.2028344
0.1384875
240.566
203.250


Q-09
1.7178106
1.6574518
0.1122228
0.0404637
∞
170.492
1.9450080
1.6067170
0.3264909
0.1492765
∞
155.526


Q-10
1.7552943
1.6404274
0.1183093
0.0294128
∞
161.731
1.9406400
1.5539676
0.3006731
0.1184026
∞
161.325


Q-11
1.7551794
1.6403857
0.1183112
0.0293952
∞
161.718
1.9404069
1.5538468
0.3007591
0.1183799
∞
161.350


Q-12
1.7757084
1.6344645
0.1188561
0.0124133
∞
85.367
1.9771388
1.4858229
0.3725975
0.0916295
∞
172.144




























TABLE 12-R





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























R-01
2.0997937
2.0218726
0.2868782
0.2123469
17.462
15.000
1.6335746
1.4660111
0.7302940
0.6251366
∞
68.681


R-02
2.0130213
1.8811914
0.2647677
0.1040938
18.475
12.286
1.7269517
1.4965513
0.5362372
0.3602863
∞
87.647


R-03
2.0224123
1.8561904
0.2272240
0.0320080
18.232
9.988
1.8064078
1.5493570
0.4487076
0.2591703
∞
111.879


R-04
2.0459768
1.8476797
0.2102645
0.0000000
16.964
7.851
1.8312987
1.5576781
0.3880603
0.1975598
∞
130.490


R-05
1.7742699
1.7317125
0.1117318
0.0696713
102.013 
90.234
1.7557510
1.6037051
0.2852255
0.2082125
∞
164.384


R-06
1.7702726
1.7157072
0.1113605
0.0466925
108.502 
89.331
1.7311532
1.5768868
0.2610166
0.1588267
∞
165.108


R-07
1.7517357
1.7009838
0.0835762
0.0602742
∞
157.002
1.6864580
1.5654680
0.1997152
0.1416243
228.056
190.676


R-08
1.7512891
1.6459351
0.1177017
0.0309195
∞
163.455
1.9510221
1.5530143
0.3017594
0.1226993
∞
153.276


R-09
1.7773648
1.6340591
0.1184300
0.0234996
∞
86.650
1.9395171
1.5666778
0.2887830
0.0998121
∞
202.089


R-10
1.7735603
1.6354841
0.1192036
0.0141670
∞
86.412
1.9807177
1.4832299
0.3780744
0.0917085
∞
180.638




























TABLE 12-S





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























S-01
2.0136422
1.8885299
0.2774577
0.1261125
17.997
 12.405
1.6999863
1.4708628
0.5421139
0.3735593
∞
79.704


S-02
2.0179864
1.8567706
0.2336282
0.0459598
 18.296
10.310
1.7965693
1.5368732
0.4561433
0.2657307
∞
103.288


S-03
2.0356214
1.8463124
0.2043087
0.0000000
 17.630
8.402
1.8376872
1.5609879
0.3977260
0.2025636
∞
128.295


S-04
2.0459655
1.8181408
0.2215369
0.0000000
 16.489
6.240
1.8197869
1.5589385
0.3436622
0.1577796
∞
150.300


S-05
1.7739721
1.7341369
0.1088796
0.0751162
100.976
90.557
1.7425740
1.5990974
0.2875246
0.2124379
201.458
155.716


S-06
1.7704063
1.7171543
0.1106833
0.0483969
107.500
89.597
1.7268572
1.5751372
0.2630071
0.1602715
∞
155.652


S-07
1.7674183
1.6877796
0.1261174
0.0222393
133.384
82.345
1.7422344
1.5581182
0.2468377
0.1280254
∞
196.893


S-08
1.7513689
1.7035698
0.0811550
0.0633450
∞
158.014
1.6835226
1.5618026
0.2014601
0.1426405
216.940
182.286


S-09
1.7586193
1.6685973
0.1141426
0.0240669
∞
83.157
1.7654326
1.5822356
0.2120172
0.1163580
∞
237.139


S-10
1.7137988
1.6680395
0.1059657
0.0491249
229.119
204.263
1.7697765
1.6411901
0.3291982
0.1743325
∞
144.048


S-11
1.7474572
1.6485095
0.1171196
0.0357085
∞
165.072
1.8280566
1.5510143
0.3034436
0.1290649
∞
179.186


S-12
1.7787527
1.6346316
0.1183617
0.0261766
∞
87.463
1.8679541
1.5663111
0.2911006
0.1032185
∞
198.817


S-13
1.7726370
1.6361368
0.1193980
0.0162059
∞
87.753
1.9860452
1.4806863
0.3836791
0.0927929
∞
179.065




























TABLE 12-T





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























T-01
2.0071627
1.8531930
0.2293780
0.0535149
 19.498
11.301
1.8087482
1.5440656
0.4807519
0.2757971
∞
96.276


T-02
2.0380740
1.8507900
0.2054336
0.0000000
 17.725
8.646
1.8398399
1.5606505
0.4070889
0.2066897
∞
128.122


T-03
2.0362226
1.8173530
0.2147614
0.0000000
 17.154
6.676
1.8245068
1.5601331
0.3518237
0.1608227
∞
143.088


T-04
1.7793794
1.7388911
0.1095065
0.0767807
101.335
91.113
1.7603905
1.6140856
0.3028634
0.2184932
183.927
143.961


T-05
1.7717729
1.7189494
0.1103797
0.0498157
107.737
90.141
1.7242200
1.5794166
0.2708170
0.1629361
∞
175.561


T-06
1.7679862
1.6880265
0.1268980
0.0240806
124.939
82.648
1.7410932
1.5606391
0.2520278
0.1300588
∞
190.480


T-07
1.7518739
1.7045277
0.0815216
0.0632867
∞
159.022
1.6818826
1.5663809
0.2073629
0.1518209
206.838
177.698


T-08
1.7600708
1.6726745
0.1144826
0.0254494
∞
139.823
1.7630023
1.5754755
0.2168563
0.1186166
∞
229.643


T-09
1.7051240
1.6697920
0.1003223
0.0587171
226.744
206.645
1.7525371
1.6631462
0.3344603
0.2017687
∞
142.304


T-10
1.7430137
1.6479600
0.1171742
0.0413661
∞
167.230
1.8275987
1.5443101
0.3097891
0.1370877
∞
186.344


T-11
1.7810721
1.6321133
0.1183301
0.0288819
∞
88.546
1.8621889
1.5669606
0.2928605
0.1036052
∞
199.275


T-12
1.7725015
1.6365482
0.1194554
0.0184532
∞
149.323
1.9935768
1.4771388
0.3888085
0.0925146
∞
172.969




























TABLE 13-A





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























A-01
2.1720487
2.0190360
0.0998073
0.0000000
29.506
23.369
4.5065450
3.9578561
2.6780229
2.1435612
4.090
3.199


A-02
1.9889280
1.8532359
0.2334903
0.0957523
40.861
31.817
5.6119745
5.3730219
0.7593911
0.4942458
19.555
18.637


A-03
1.9671128
1.8414524
0.2024214
0.0689180
37.381
27.259
2.5652264
2.2714947
0.7753194
0.4656319
57.845
47.163


A-04
1.9818233
1.8170308
0.1951662
0.0068434
20.293
9.724
1.8180698
1.5583872
0.3718271
0.1895773
∞
136.446


A-05
1.9562672
1.8281300
0.1673451
0.0214857
27.313
16.058
1.9456153
1.6882910
0.5144381
0.2722945
∞
111.570


A-06
1.9807221
1.7876777
0.2011579
0.0000000
19.841
7.438
1.8007663
1.5635593
0.3207222
0.1502473
∞
149.473


A-07
1.8477035
1.7783786
0.1276783
0.0621241
112.872
101.764
4.4702166
4.3197430
0.4936521
0.3719016
24.460
23.543


A-08
1.8224279
1.7640502
0.1206546
0.0598782
109.093
96.415
2.0949539
1.9156192
0.4653894
0.3255164
71.691
61.322


A-09
1.7594524
1.7017583
0.1133712
0.0352231
113.681
90.604
1.7043860
1.5829468
0.2440392
0.1526501
∞
189.898


A-10
1.7683655
1.6933740
0.1175121
0.0195678
146.462
86.025
1.7594853
1.5976201
0.2284733
0.1247184
∞
231.889


A-11
1.7806570
1.7073575
0.1027419
0.0494937
227.274
185.181
7.2591935
6.3528446
3.7059257
2.7293571
0.934
0.744


A-12
1.7460918
1.6726421
0.0978655
0.0306414
∞
149.169
1.7205796
1.6010007
0.2122593
0.1421446
224.021
188.041


A-13
1.7591885
1.6605032
0.1011064
0.0244145
∞
85.953
1.7820661
1.6423652
0.1952622
0.1147092
∞
243.262


A-14
1.7274503
1.6161759
0.1087495
0.0364692
256.667
193.721
7.3492621
6.3559101
3.2428967
2.4345312
1.113
0.817


A-15
1.7084944
1.6283283
0.1074482
0.0502449
227.699
193.038
1.8948007
1.7452865
0.3962294
0.2420534
101.616
81.255


A-16
1.7187472
1.6392965
0.1177469
0.0400931
234.733
182.491
1.8371357
1.6447383
0.3386903
0.1579871
∞
143.559


A-17
1.7377446
1.6454277
0.1181421
0.0282214
∞
175.647
1.8609832
1.5256023
0.3213354
0.1196655
∞
150.106


A-18
1.7725168
1.6331589
0.1071119
0.0192664
∞
91.095
1.9009256
1.5809647
0.2728278
0.1014801
∞
185.131


A-19
1.7616261
1.6593531
0.1098955
0.0221647
∞
171.453
1.9704240
1.4713309
0.4066631
0.1097856
∞
137.110




























TABLE 13-B





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























B-01
1.9452543
1.8183525
0.2592155
0.1277543
42.717
33.586
7.0526945
6.7683586
0.8545920
0.5492502
14.590
13.980


B-02
1.9596236
1.8362764
0.1731162
0.0325913
27.463
16.960
1.9622040
1.7030756
0.5536742
0.3010973
∞
107.506


B-03
1.9813839
1.8242757
0.1934821
0.0125348
20.541
10.411
1.8214473
1.5655196
0.3895985
0.2047950
∞
131.100


B-04
1.9821434
1.7946251
0.2012578
0.0000000
19.749
7.864
1.7998074
1.5618948
0.3311011
0.1597047
∞
145.037


B-05
1.8517543
1.7899355
0.1313438
0.0698594
110.382
100.265
5.8281493
5.6682336
0.5711405
0.4462284
17.468
16.967


B-06
1.7589124
1.7062293
0.1118213
0.0409619
111.426
91.607
1.6974565
1.5840605
0.2492018
0.1637367
∞
183.632


B-07
1.7676802
1.6970027
0.1167957
0.0231251
123.542
87.137
1.7571242
1.5998537
0.2327001
0.1321935
∞
226.644


B-08
1.7763495
1.7235333
0.0863733
0.0786401
209.450
181.880
5.6463193
5.0251755
4.7411024
3.9364503
0.821
0.680


B-09
1.7445883
1.6767453
0.0939346
0.0375784
∞
151.396
1.7112989
1.6068445
0.2158696
0.1524272
210.231
181.611


B-10
1.7574612
1.6624258
0.0986454
0.0290140
∞
135.564
1.7808669
1.6556117
0.1973236
0.1215289
∞
237.437


B-11
1.7109823
1.6137790
0.0997165
0.0532321
242.436
193.346
6.2633792
5.3764346
4.3274325
3.5194222
0.991
0.726


B-12
1.6962709
1.6298000
0.1011874
0.0612521
222.057
196.217
1.9128981
1.7709938
0.4189358
0.2786453
90.120
74.349


B-13
1.7132967
1.6391097
0.1158834
0.0465535
229.378
184.815
1.8363492
1.6606949
0.3455863
0.1751285
∞
137.424


B-14
1.7338443
1.6454556
0.1188319
0.0316590
∞
177.305
1.8516317
1.5221517
0.3265697
0.1272105
∞
143.802


B-15
1.7458965
1.6358331
0.1072745
0.0218863
∞
137.681
1.9039898
1.5828362
0.2766013
0.1068491
∞
179.079


B-16
1.7605337
1.6620962
0.1100645
0.0246727
∞
173.308
1.9804345
1.4648107
0.4162560
0.1165234
∞
132.389


B-17
1.7751843
1.6392688
0.1108102
0.0187265
∞
91.227
1.9686516
1.4881328
0.3955979
0.0946164
∞
141.476




























TABLE 13-C





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























C-01
1.9025379
1.7929090
0.2878348
0.1649490
 43.365
35.188
4.9640531
4.6075296
0.9846002
0.6056513
 20.823
19.261


C-02
1.9716347
1.8539125
0.1752020
0.0409320
 27.454
18.040
2.0121051
1.7498504
0.6140520
0.3407427
∞
100.236


C-03
1.9799544
1.8302413
0.1965994
0.0220193
 20.598
11.008
1.8161176
1.5657954
0.4056733
0.2211860
∞
126.931


C-04
1.9864218
1.8036777
0.2004793
0.0000000
 19.499
8.235
1.8003554
1.5619667
0.3429599
0.1708627
∞
170.369


C-05
1.8555780
1.8119708
0.1375602
0.0936905
105.753
98.281
5.7336181
5.5695654
0.6183223
0.4948176
 17.141
16.642


C-06
1.7574013
1.7107521
0.1098073
0.0471621
109.284
92.424
1.6892691
1.5858767
0.2550937
0.1774106
∞
177.629


C-07
1.7671343
1.7011102
0.1159156
0.0269898
116.762
88.159
1.7562868
1.6040395
0.2374867
0.1407631
∞
220.550


C-08
1.7414378
1.6903038
0.0890222
0.0452270
∞
159.859
1.7014705
1.6183980
0.2210881
0.1650225
197.102
175.552


C-09
1.7557447
1.6650428
0.0952628
0.0349222
∞
138.687
1.7813503
1.6705654
0.1992455
0.1291564
285.808
232.461


C-10
1.7080327
1.6395647
0.1116081
0.0549822
220.890
187.682
1.8374498
1.6784593
0.3525581
0.2020588
∞
132.217


C-11
1.7300752
1.6460151
0.1196827
0.0356226
∞
178.935
1.8492558
1.5188530
0.3325269
0.1361670
∞
139.642


C-12
1.7396481
1.6415548
0.1074472
0.0249850
∞
141.690
1.9105740
1.5866092
0.2815319
0.1134362
∞
198.401


C-13
1.7563944
1.6646000
0.1100978
0.0276710
∞
174.875
1.9927799
1.4565116
0.4273612
0.1239762
∞
127.927


C-14
1.7747873
1.6404196
0.1109873
0.0213816
∞
143.313
1.9792213
1.4864771
0.4038529
0.0993424
∞
136.771




























TABLE 13-D





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























D-01
1.9490966
1.8500842
0.2647931
0.1401459
 35.207
28.244
2.6311080
2.2700265
1.1076331
0.7427894
 45.953
36.141


D-02
1.9914392
1.8780786
0.1798526
0.0501163
 25.772
17.691
2.0162696
1.7538672
0.6433846
0.3774728
∞
94.106


D-03
1.9816604
1.8366482
0.2034537
0.0329594
 20.194
11.243
1.8013721
1.5581067
0.4155671
0.2353864
∞
122.408


D-04
1.9856163
1.8069420
0.2051578
0.0023074
 19.386
8.506
1.7929679
1.5568815
0.3495088
0.1791182
∞
164.498


D-05
1.7549914
1.7131823
0.1089697
0.0521081
106.541
92.615
1.6794153
1.5838159
0.2592041
0.1895496
201.172
170.921


D-06
1.7669110
1.7047382
0.1153749
0.0305763
113.648
88.847
1.7581593
1.6081385
0.2411728
0.1480734
∞
213.836


D-07
1.7381767
1.6971854
0.0857519
0.0501367
186.218
161.719
1.6970322
1.6330649
0.2270587
0.1762567
186.228
168.269


D-08
1.7545493
1.6677902
0.0908813
0.0421582
∞
156.552
1.7806194
1.6878813
0.1994956
0.1354429
270.383
227.465


D-09
1.6987657
1.6408080
0.1062771
0.0636318
217.801
189.505
1.8295289
1.6886683
0.3581889
0.2377885
∞
128.894


D-10
1.7270953
1.6471258
0.1204663
0.0383618
∞
180.122
1.8391835
1.5896461
0.3384880
0.1435869
∞
174.139


D-11
1.7345322
1.6490573
0.1075499
0.0277684
∞
165.143
1.9196510
1.5922999
0.2869411
0.1211074
∞
196.987


D-12
1.7517544
1.6662856
0.1098805
0.0311830
∞
175.693
2.0019474
1.4458781
0.4376849
0.1318597
∞
123.262


D-13
1.7748217
1.6409606
0.1111181
0.0236791
∞
146.934
1.9872990
1.4839165
0.4097955
0.1027825
∞
170.430




























TABLE 13-E





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























E-01
2.0138007
1.9025812
0.1889196
0.0602526
 22.865
16.001
1.9517183
1.6887202
0.6154098
0.3933761
∞
92.397


E-02
1.9781991
1.8343526
0.2198663
0.0499591
 19.581
11.070
1.7660977
1.5304996
0.4097111
0.2391227
∞
117.454


E-03
1.9860758
1.8081461
0.2103990
0.0075316
 19.209
8.559
1.7856337
1.5530104
0.3519891
0.1831903
∞
154.955


E-04
1.7526647
1.7120483
0.1113963
0.0527354
104.884
92.053
1.6731353
1.5761126
0.2626584
0.1956784
189.469
162.622


E-05
1.7675140
1.7072308
0.1157390
0.0332708
111.601
89.149
1.7648363
1.6096801
0.2435865
0.1516420
∞
209.841


E-06
1.7363451
1.6941563
0.0885443
0.0473541
183.090
160.396
1.7020267
1.6379178
0.2340864
0.1822016
178.708
160.580


E-07
1.7545300
1.7026538
0.0850531
0.0512311
∞
160.625
1.7832820
1.7053169
0.1967562
0.1381600
259.555
221.269


E-08
1.6929448
1.6424138
0.1017383
0.0689490
211.936
190.074
1.8067440
1.6852377
0.3671092
0.2694310
159.707
125.117


E-09
1.7250539
1.6484621
0.1212697
0.0367433
∞
180.516
1.8295455
1.6171810
0.3450742
0.1501022
∞
175.998


E-10
1.7298898
1.6531284
0.1076218
0.0303317
∞
168.497
1.9273671
1.5988368
0.2920246
0.1269904
∞
191.986


E-11
1.7409431
1.6315669
0.1134179
0.0186621
∞
168.451
1.9123265
1.5410692
0.2838135
0.1011768
∞
202.118


E-12
1.7485114
1.6667341
0.1093856
0.0333688
∞
219.421
2.0081308
1.4338083
0.4451714
0.1397307
∞
117.893


E-13
1.7754004
1.6404821
0.1112097
0.0251624
∞
148.812
1.9944125
1.4804354
0.4116154
0.1061955
∞
165.119




























TABLE 13-F





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























F-01
1.9601257
1.8751892
0.3059474
0.2095522
 25.202
20.234
1.8164468
1.5980789
0.8705184
0.6940072
 67.900
46.117


F-02
2.0398589
1.9260429
0.2002151
0.0695450
 20.308
14.445
1.8904816
1.6179829
0.5766885
0.3887588
∞
96.498


F-03
1.9843691
1.8078542
0.2076175
0.0073966
 19.525
8.746
1.7884408
1.5555782
0.3571135
0.1854875
∞
143.521


F-04
2.0084257
1.8129240
0.1683376
0.0000000
 19.037
7.510
1.8454836
1.5945668
0.3328661
0.1544884
∞
154.427


F-05
1.7523979
1.7088750
0.1161001
0.0495242
104.457
91.092
1.6765101
1.5701270
0.2688829
0.1969664
180.251
152.144


F-06
1.7698912
1.7095091
0.1165811
0.0350662
111.229
89.360
1.7772955
1.6126178
0.2470494
0.1523058
∞
203.120


F-07
1.7769446
1.7170251
0.1016549
0.0334897
134.838
91.411
1.8125328
1.6161814
0.2312145
0.1247643
∞
199.671


F-08
1.7370295
1.6882441
0.0943208
0.0411897
181.068
157.804
1.7003284
1.6371863
0.2429774
0.1834571
171.941
151.928


F-09
1.6920769
1.6453411
0.1008406
0.0681978
210.713
190.231
1.7841289
1.6733965
0.3812454
0.2788296
146.846
119.488


F-10
1.7264082
1.6534724
0.1079804
0.0318447
∞
170.823
1.9308751
1.6039207
0.2961533
0.1293661
∞
190.337


F-11
1.7465606
1.6650152
0.1088619
0.0347884
∞
228.442
2.0212950
1.4255198
0.4483772
0.1442353
∞
111.164


F-12
1.7757445
1.6384728
0.1115386
0.0258965
∞
150.216
2.0078258
1.4788219
0.4125950
0.1076340
∞
159.321




























TABLE 13-G





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























G-01
1.9471190
1.8573741
0.3315141
0.2613530
25.708
20.801
1.7346194
1.5675979
0.8995689
0.7093589
 57.803
41.774


G-02
2.0474789
1.9374899
0.2088960
0.0864229
19.832
14.615
1.8673658
1.5897706
0.5817484
0.3973966
∞
93.058


G-03
1.9824239
1.8085042
0.2044057
0.0083254
19.974
9.072
1.7932069
1.5573939
0.3849680
0.1893626
∞
136.351


G-04
2.0062979
1.8143570
0.1686660
0.0000000
19.321
7.796
1.8473259
1.5928289
0.3376682
0.1570847
∞
145.892


G-05
1.7542439
1.7081697
0.1184925
0.0494801
104.746
90.724
1.6837980
1.5715116
0.2785474
0.2005334
169.521
142.006


G-06
1.7726238
1.7123699
0.1166609
0.0367756
111.419
89.772
1.7864160
1.6184643
0.2526557
0.1551459
∞
194.224


G-07
1.7769720
1.7186492
0.1001777
0.0365461
133.697
92.110
1.8134719
1.6157778
0.2332031
0.1268811
∞
191.112


G-08
1.7390786
1.6892495
0.0966088
0.0411779
182.665
157.660
1.7041582
1.6407695
0.2518775
0.1865211
161.346
142.069


G-09
1.6887905
1.6453286
0.0973769
0.0726992
209.133
191.092
1.7774116
1.6679475
0.3796946
0.2963316
138.525
111.328


G-10
1.7248233
1.6512222
0.1084745
0.0324198
∞
172.081
1.9278793
1.6042319
0.2985623
0.1295572
∞
181.325


G-11
1.7415236
1.6337892
0.1142946
0.0196535
∞
171.726
1.9107844
1.5352327
0.2910079
0.1017293
∞
187.270


G-12
1.7466067
1.6612588
0.1088919
0.0376638
∞
228.714
2.0528886
1.4261516
0.4501809
0.1479690
∞
101.396


G-13
1.7738118
1.6458235
0.1122805
0.0265700
∞
159.120
2.0320602
1.4814572
0.4174486
0.1095128
∞
145.121




























TABLE 13-H





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























H-01
1.9093820
1.8390537
0.3581090
0.3272350
29.940
26.410
1.7829342
1.6468966
1.0386247
0.8996928
 39.677
31.112


H-02
2.0153745
1.9174009
0.2170380
0.1093354
22.851
17.243
1.8883866
1.6174735
0.6634327
0.4395423
∞
79.893


H-03
1.9647302
1.8297937
0.2253126
0.0678554
20.636
12.234
1.7389105
1.5164728
0.4345124
0.2586530
∞
120.529


H-04
1.9816545
1.8137492
0.2011229
0.0106774
20.275
9.608
1.7978418
1.5579065
0.3780034
0.1994548
∞
131.911


H-05
2.0013018
1.8177386
0.1627260
0.0000000
19.873
8.421
1.8560649
1.6039469
0.3499451
0.1657655
∞
140.113


H-06
1.7560430
1.7139226
0.1150517
0.0520707
104.620
91.864
1.6805590
1.5776964
0.2869340
0.2123088
157.090
134.545


H-07
1.7725726
1.7150690
0.1151625
0.0393056
110.839
90.428
1.7830767
1.6227447
0.2580841
0.1632562
∞
185.077


H-08
1.7766383
1.7198621
0.1001326
0.0381111
133.403
92.343
1.8062796
1.6196317
0.2358518
0.1327011
∞
221.572


H-09
1.7394490
1.6988680
0.0902356
0.0479724
183.123
161.331
1.7066699
1.6515112
0.2558938
0.1973818
148.631
134.181


H-10
1.7115878
1.6495102
0.1198603
0.0530207
224.718
182.356
1.8305889
1.6343743
0.3452063
0.1726025
∞
147.380


H-11
1.7250872
1.6514825
0.1088747
0.0347902
∞
172.283
1.9233707
1.5996781
0.2997373
0.1316136
∞
168.021


H-12
1.7407140
1.6331408
0.1141268
0.0203096
∞
172.203
1.9100305
1.5355896
0.2913496
0.1035017
∞
177.622


H-13
1.7471031
1.6620323
0.1096216
0.0405774
∞
228.740
1.9466405
1.4315233
0.4532749
0.1524070
∞
89.869


H-14
1.7718386
1.6509768
0.1128027
0.0288169
∞
164.882
2.0603335
1.4823147
0.4233479
0.1126423
∞
137.200


H-15
1.7539891
1.6542454
0.1129054
0.0154677
∞
171.237
1.9662554
1.4686978
0.3643352
0.0975810
∞
172.706




























TABLE 13-I





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























I-01
1.9841567
1.8929470
0.2301414
0.1309068
26.135
20.174
1.9251687
1.6613405
0.7847221
0.5068730
∞
64.093


I-02
1.9731131
1.8467130
0.2181883
0.0672045
21.025
13.219
1.7628328
1.5401008
0.4720736
0.2890182
∞
116.770


I-03
1.9847546
1.8242615
0.2006927
0.0159808
20.146
10.175
1.7995335
1.5631297
0.3942650
0.2150157
∞
127.993


I-04
2.0018800
1.8207325
0.1729103
0.0000000
19.553
8.557
1.8422081
1.5923558
0.3552220
0.1740733
∞
166.372


I-05
1.7566279
1.7248505
0.1029259
0.0701745
103.501
93.887
1.6611144
1.5864965
0.2916410
0.2339676
141.696
128.328


I-06
1.7699579
1.7183673
0.1118467
0.0445969
109.157
91.375
1.7640520
1.6224517
0.2611314
0.1755796
231.191
176.991


I-07
1.7753265
1.7210064
0.1002917
0.0397436
120.772
92.361
1.7925457
1.6258159
0.2371088
0.1409162
∞
216.536


I-08
1.7067245
1.6474765
0.1150085
0.0641564
216.898
185.483
1.8393351
1.6593778
0.3351860
0.1964641
∞
138.890


I-09
1.7261004
1.6554363
0.1093842
0.0385285
∞
172.421
1.9258761
1.5944381
0.3017928
0.1380501
∞
163.419


I-10
1.7392219
1.6324251
0.1138139
0.0221025
∞
172.382
1.9139888
1.5370320
0.2915926
0.1098275
∞
172.892


I-11
1.7455957
1.6672535
0.1103795
0.0435045
∞
231.378
1.9406390
1.4314495
0.4647047
0.1613698
∞
80.857


I-12
1.7709553
1.6540901
0.1126674
0.0312832
∞
167.534
2.0446573
1.4763028
0.4301550
0.1186498
∞
132.049


I-13
1.7543354
1.6537299
0.1132541
0.0174070
∞
171.646
1.9679887
1.4740873
0.3703755
0.1029109
∞
167.788




























TABLE 13-J





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























J-01
1.9809075
1.8980328
0.2448835
0.1566767
26.306
21.064
1.9050955
1.6655740
0.8575543
0.5893231
∞
57.567


J-02
1.9881326
1.8692972
0.2155252
0.0721035
20.742
13.818
1.7803324
1.5606498
0.5095133
0.3258134
∞
108.866


J-03
1.9898169
1.8353260
0.2061805
0.0251796
19.620
10.507
1.7925299
1.5591828
0.4068723
0.2312852
∞
124.252


J-04
2.0048289
1.8259971
0.1826240
0.0000000
19.044
8.651
1.8295110
1.5813860
0.3602975
0.1831844
∞
161.817


J-05
1.7658057
1.7224231
0.1070729
0.0531483
106.864
92.263
1.7399591
1.6212152
0.2614146
0.1896323
211.022
171.335


J-06
1.7732110
1.7227862
0.0990467
0.0434144
114.284
92.503
1.7771808
1.6275751
0.2355823
0.1495093
∞
209.798


J-07
1.7028489
1.6476670
0.1109898
0.0702586
213.854
188.154
1.8328545
1.6746514
0.3355229
0.2162711
∞
137.496


J-08
1.7260375
1.6612267
0.1098660
0.0429837
∞
173.185
1.9344686
1.5926693
0.3061048
0.1491712
∞
156.257


J-09
1.7377532
1.6400237
0.1135634
0.0248634
∞
172.921
1.9216875
1.5602507
0.2945493
0.1157554
∞
166.398


J-10
1.7432131
1.6726882
0.1106529
0.0472960
∞
247.837
1.9339555
1.4222282
0.4804307
0.1767479
∞
111.927


J-11
1.7714442
1.6572890
0.1121622
0.0341617
∞
175.103
2.0302923
1.4667157
0.4416960
0.1265007
∞
127.501


J-12
1.7541063
1.6537206
0.1135956
0.0198615
∞
172.350
1.9712389
1.4738671
0.3773772
0.1079912
∞
160.845




























TABLE 13-K





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























K-01
1.9983178
1.8855456
0.2261637
0.0864859
19.642
13.634
1.7551188
1.5425749
0.5160287
0.3496236
∞
101.168


K-02
1.9943696
1.8437141
0.2144343
0.0355134
18.947
10.561
1.7797548
1.5498598
0.4126749
0.2439115
∞
119.800


K-03
2.0067215
1.8310354
0.1870831
0.0000000
18.717
8.788
1.8239278
1.5771676
0.3649829
0.1909253
∞
152.483


K-04
1.7619875
1.7257045
0.1017354
0.0632027
104.095
92.685
1.7185071
1.6159717
0.2598226
0.2008932
193.826
168.385


K-05
1.7711748
1.7252984
0.0957368
0.0496724
110.785
92.811
1.7607140
1.6239305
0.2306492
0.1559959
∞
219.660


K-06
1.7022734
1.6493950
0.1134178
0.0651537
212.165
190.849
1.7995431
1.6648067
0.3598415
0.2134096
∞
134.580


K-07
1.7240928
1.6675706
0.1098594
0.0468406
∞
202.765
1.7562963
1.5963244
0.3135005
0.1629353
∞
149.959


K-08
1.7366122
1.6471493
0.1133195
0.0279789
∞
174.035
1.9321537
1.5760624
0.2991336
0.1222012
∞
182.726


K-09
1.7531614
1.6544041
0.1138496
0.0224971
∞
173.378
1.9783548
1.4640140
0.3838800
0.1110187
∞
151.059




























TABLE 13-L





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























L-01
2.0549494
1.9887104
0.2687077
0.2213457
19.375
16.797
1.6842111
1.5646066
0.7318220
0.6514497
 76.651
63.140


L-02
1.9979471
1.8909061
0.2424568
0.1060383
18.688
13.351
1.7090749
1.5053408
0.5051735
0.3567702
∞
91.445


L-03
1.9920916
1.8443560
0.2225708
0.0470434
18.723
10.651
1.7668473
1.5375419
0.4148873
0.2500704
∞
113.125


L-04
2.0115430
1.8368860
0.1884994
0.0000000
18.392
8.839
1.8244176
1.5756615
0.3690709
0.1951304
∞
140.380


L-05
1.7612213
1.7281036
0.0984884
0.0707686
102.646
92.769
1.7117523
1.6117230
0.2612885
0.2063629
181.321
163.500


L-06
1.7706322
1.7284716
0.0898852
0.0580602
109.099
93.388
1.7381805
1.6195807
0.2239787
0.1587114
∞
217.375


L-07
1.7208195
1.6729631
0.1077789
0.0497272
∞
209.751
1.7454937
1.6066082
0.3249477
0.1758596
∞
145.915


L-08
1.7297676
1.6507991
0.1133522
0.0307998
∞
175.528
1.9419145
1.5921733
0.3049193
0.1282140
∞
188.840


L-09
1.7556516
1.6360813
0.1134484
0.0213219
∞
95.412
1.9237138
1.5508817
0.2919800
0.1031189
∞
202.744


L-10
1.7666102
1.6463429
0.1110591
0.0144441
∞
153.332
1.9727136
1.4886157
0.3649983
0.0940693
∞
184.106




























TABLE 13-M





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























M-01
1.9868525
1.8418415
0.2230906
0.0537754
19.310
11.134
1.7693119
1.5368827
0.4273434
0.2560434
∞
103.782


M-02
2.0118960
1.8413370
0.1832860
0.0000000
18.736
9.264
1.8361184
1.5837515
0.3792802
0.1990983
∞
132.806


M-03
2.0243543
1.8231250
0.1937413
0.0000000
17.384
7.159
1.8222108
1.5748622
0.3294630
0.1561989
∞
151.002


M-04
1.7654084
1.7317244
0.0992165
0.0739113
102.664
93.011
1.7306377
1.6514190
0.2706272
0.2099826
171.773
153.191


M-05
1.7603752
1.6970219
0.1104292
0.0259297
129.169
87.896
1.7181271
1.5764327
0.2198406
0.1280437
∞
221.182


M-06
1.7175581
1.6756245
0.1044570
0.0533352
234.707
211.582
1.7199356
1.6230069
0.3386796
0.1870792
∞
140.648


M-07
1.7249239
1.6504415
0.1141074
0.0329880
∞
177.133
1.8402671
1.6053586
0.3133686
0.1317597
∞
190.190


M-08
1.7541175
1.6375269
0.1136307
0.0228409
∞
152.774
1.9225920
1.5463603
0.2962522
0.1045323
∞
198.101


M-09
1.7683602
1.6451046
0.1108928
0.0164031
∞
156.618
1.9783298
1.4860068
0.3698574
0.0943533
∞
177.708




























TABLE 13-N





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























N-01
1.9802060
1.8398252
0.2174098
0.0552918
 20.594
12.118
1.7887242
1.5524401
0.4540138
0.2684120
∞
101.802


N-02
2.0094977
1.8465936
0.1744820
0.0000000
 19.514
10.070
1.8565714
1.6026591
0.3977850
0.2082049
∞
127.773


N-03
2.0163723
1.8188796
0.2044640
0.0000000
 17.628
7.361
1.8096550
1.5641533
0.3309958
0.1587900
∞
146.108


N-04
1.7720564
1.7375373
0.0990513
0.0786058
103.274
93.567
1.7560699
1.6964043
0.2853780
0.2186654
161.266
142.146


N-05
1.7604234
1.6962193
0.1120477
0.0283831
127.006
87.715
1.7164817
1.5788328
0.2243987
0.1314043
∞
228.314


N-06
1.7553578
1.6833412
0.1021275
0.0355150
∞
152.787
1.7217842
1.6187618
0.1974327
0.1187120
289.359
232.882


N-07
1.7231775
1.6453711
0.1135182
0.0347059
∞
178.582
1.9317098
1.6087338
0.3195486
0.1356838
∞
184.458


N-08
1.7102476
1.6752512
0.1023288
0.0575717
232.198
211.420
1.7127689
1.6310648
0.3402666
0.1958098
160.891
134.410


N-09
1.7512229
1.6316648
0.1098225
0.0189119
∞
84.503
1.9194307
1.5689876
0.2803327
0.0869428
∞
228.630


N-10
1.7697135
1.6437662
0.1108125
0.0177314
∞
158.635
1.9791959
1.4825638
0.3732863
0.0956362
∞
171.216




























TABLE 13-O





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























O-01
1.9800317
1.8447961
0.2147271
0.0571734
21.381
12.997
1.8077900
1.5713801
0.4854336
0.2914040
∞
112.779


O-02
2.0137085
1.8570386
0.1692298
0.0000000
19.769
10.712
1.8736488
1.6214601
0.4187980
0.2236137
∞
123.410


O-03
2.0138528
1.8235025
0.2017386
0.0000000
17.865
7.804
1.8102373
1.5635625
0.3414049
0.1677940
∞
168.248


O-04
1.7601648
1.6983496
0.1119901
0.0303031
126.487 
88.260
1.7138036
1.5827428
0.2283988
0.1382962
∞
225.124


O-05
1.7544396
1.6860997
0.1012182
0.0385571
∞
154.116
1.7154614
1.6252636
0.2006792
0.1246148
274.983
227.613


O-06
1.7098650
1.6770281
0.1041241
0.0670294
230.527 
210.197
1.7033404
1.6188250
0.3292182
0.2099482
150.644
126.709


O-07
1.7222565
1.6392279
0.1141065
0.0377210
∞
179.876
1.9211460
1.6039157
0.3222769
0.1379226
∞
173.494


O-08
1.7522796
1.6377117
0.1133124
0.0260626
∞
157.760
1.9204984
1.5467472
0.3006841
0.1064385
∞
182.190


O-09
1.7663100
1.6433510
0.1109379
0.0179460
∞
159.565
1.9769323
1.4791027
0.3759903
0.1009452
∞
167.431




























TABLE 13-P





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























P-01
1.9886417
1.8586649
0.2168535
0.0622660
21.146
13.418
1.8144820
1.5830794
0.5150047
0.3225034
∞
107.185


P-02
2.0226615
1.8700565
0.1708931
0.0000000
19.341
10.943
1.8760551
1.6269706
0.4346485
0.2414002
∞
119.778


P-03
2.0146852
1.8302919
0.2026225
0.0000000
17.790
8.150
1.8068544
1.5608059
0.3505465
0.1784969
∞
165.499


P-04
1.7592341
1.7024556
0.1101813
0.0325910
117.465 
89.126
1.7088649
1.5853419
0.2301093
0.1471381
∞
218.551


P-05
1.7520015
1.6881722
0.0972790
0.0422326
∞
154.401
1.7076826
1.6341292
0.2024884
0.1311199
262.818
222.098


P-06
1.7202854
1.6494310
0.1139740
0.0400397
∞
180.952
1.9227304
1.5993051
0.3229419
0.1415112
∞
158.449


P-07
1.7531211
1.6359543
0.1129882
0.0276769
∞
161.129
1.9283125
1.5509749
0.3007735
0.1132394
∞
171.437


P-08
1.7588209
1.6651307
0.1168101
0.0541222
∞
248.704
1.9315321
1.4570680
0.4662918
0.1750504
∞
99.190


P-09
1.7670193
1.6441934
0.1112618
0.0177193
∞
159.536
1.9788106
1.4760433
0.3800825
0.1068427
∞
161.759




























TABLE 13-Q





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























Q-01
2.0299629
1.8795650
0.1824437
0.0030821
18.478
10.745
1.8549548
1.6100341
0.4371519
0.2549656
∞
117.201


Q-02
2.0241822
1.8402063
0.2104778
0.0000000
17.050
8.091
1.7978402
1.5552364
0.3542628
0.1872645
∞
156.884


Q-03
2.0003468
1.8759108
0.2255479
0.0756028
19.996
13.232
1.7941019
1.5719596
0.5267302
0.3493046
∞
100.638


Q-04
1.7575390
1.7066881
0.1073040
0.0369781
110.062 
89.912
1.7021137
1.5868305
0.2290280
0.1553110
∞
208.877


Q-05
1.7492067
1.6897987
0.0912703
0.0482051
∞
154.337
1.6999394
1.6416642
0.1981843
0.1369514
241.011
215.366


Q-06
1.7509212
1.6412923
0.1130844
0.0286313
∞
163.308
1.9350926
1.5513707
0.3031575
0.1183247
∞
161.219


Q-07
1.7508595
1.6412538
0.1130854
0.0286152
∞
163.300
1.9348833
1.5512578
0.3031544
0.1183046
∞
161.239


Q-08
1.7507785
1.6689401
0.1147477
0.0543205
∞
246.802
1.8962359
1.4286565
0.4917045
0.1834073
∞
98.263


Q-09
1.7662458
1.6457575
0.1116673
0.0200852
∞
159.401
1.9890462
1.4730025
0.3858334
0.1112594
∞
153.058




























TABLE 13-R





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























R-01
2.0097821
1.8916937
0.2374473
0.0898814
18.630
12.843
1.7577288
1.5453582
0.5218639
0.3655761
∞
90.971


R-02
2.0317871
1.8838318
0.1969310
0.0159166
17.716
10.512
1.8267181
1.5838873
0.4329416
0.2622885
∞
114.131


R-03
2.0272958
1.8456368
0.2145425
0.0010647
16.701
8.140
1.7921077
1.5515315
0.3569974
0.1929557
∞
144.106


R-04
1.7559299
1.7096201
0.1048919
0.0414837
107.586 
90.423
1.6965353
1.5838925
0.2274480
0.1602031
251.078
196.592


R-05
1.7470392
1.6919122
0.0867264
0.0547244
∞
154.865
1.6946707
1.6466544
0.1948761
0.1398883
228.954
207.100


R-06
1.7480930
1.6471592
0.1133882
0.0300691
∞
164.480
1.9459815
1.5501490
0.3044638
0.1242550
∞
156.144


R-07
1.7450449
1.6336325
0.1109200
0.0225424
∞
91.792
1.9298992
1.5646257
0.2873729
0.1011132
∞
203.019


R-08
1.7645838
1.6472315
0.1126210
0.0142994
∞
94.011
1.9816561
1.4913973
0.3724489
0.0922621
∞
182.149




























TABLE 13-S





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























S-01
2.0234818
1.8815995
0.2048329
0.0333400
17.816
10.851
1.8108235
1.5680879
0.4373710
0.2682193
∞
106.956


S-02
2.0267707
1.8481781
0.2132843
0.0026532
16.764
8.330
1.7921736
1.5506917
0.3624059
0.1965173
∞
136.736


S-03
2.0229843
1.8126107
0.2118548
0.0000000
17.006
6.626
1.7962684
1.5649109
0.3200096
0.1552012
∞
158.532


S-04
1.7559883
1.7112226
0.1042793
0.0434834
106.889
90.807
1.6957276
1.5823169
0.2295992
0.1619821
239.298
187.719


S-05
1.7655105
1.7004311
0.1139102
0.0260367
134.109
87.275
1.7577518
1.5898417
0.2210292
0.1292055
∞
200.383


S-06
1.7463013
1.6945386
0.0864150
0.0553518
∞
156.288
1.6932296
1.6495601
0.1984453
0.1415312
218.344
197.813


S-07
1.7140522
1.6689094
0.1067597
0.0488666
229.606
205.298
1.7670106
1.6354554
0.3302382
0.1778346
∞
144.458


S-08
1.7449807
1.6499404
0.1138956
0.0341556
∞
165.967
1.8280140
1.5472376
0.3071992
0.1308259
∞
181.573


S-09
1.7451425
1.6342221
0.1113390
0.0250732
∞
92.591
1.9359617
1.5636167
0.2900348
0.1046368
∞
199.846


S-10
1.7652844
1.6477526
0.1126180
0.0173421
∞
94.523
1.9878760
1.4904395
0.3789348
0.0928715
∞
179.072




























TABLE 13-T





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























T-01
2.0128535
1.8776497
0.2022309
0.0428498
18.880
11.802
1.8188903
1.5750170
0.4593818
0.2783052
∞
96.261


T-02
2.0218484
1.8485757
0.2087384
0.0054266
17.299
8.781
1.7965353
1.5504452
0.3727229
0.2011848
∞
133.321


T-03
2.0201608
1.8144088
0.2083496
0.0000000
17.323
6.915
1.7987967
1.5653519
0.3266562
0.1579587
∞
147.994


T-04
1.7570823
1.7125413
0.1046922
0.0447898
107.213
91.339
1.6962268
1.5854626
0.2358925
0.1647035
∞
182.628


T-05
1.7663411
1.7014363
0.1140704
0.0270819
125.645
87.790
1.7579060
1.5932893
0.2258950
0.1313125
∞
192.437


T-06
1.7463849
1.6965582
0.0888585
0.0538134
∞
158.010
1.6935424
1.6497399
0.2059822
0.1521760
209.015
188.409


T-07
1.7606661
1.6760043
0.0916389
0.0386226
∞
139.323
1.7697079
1.6752670
0.1867139
0.1180749
∞
249.956


T-08
1.7055809
1.6708934
0.1020233
0.0556122
227.279
207.411
1.7418425
1.6555925
0.3358460
0.1979701
∞
139.124


T-09
1.7414172
1.6493298
0.1148927
0.0388429
∞
167.956
1.8282133
1.5765470
0.3167563
0.1356247
∞
187.138


T-10
1.7472262
1.6351657
0.1130011
0.0193292
∞
95.042
1.9328660
1.5573191
0.2795818
0.0886016
∞
229.523


T-11
1.7658246
1.6480377
0.1126115
0.0200944
∞
148.993
1.9961766
1.4909764
0.3854823
0.0943336
∞
179.765




























TABLE 14-A





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























A-01
2.141
2.006
0.075
0.000
31.254
25.519
5.876
5.233
3.362
2.751
2.251
1.807


A-02
2.017
1.896
0.180
0.061
39.247
31.618
9.377
9.207
0.715
0.513
11.023
10.812


A-03
1.952
1.854
0.166
0.055
35.017
26.178
2.281
2.051
0.699
0.439
70.023
58.076


A-04
1.943
1.843
0.155
0.028
23.926
15.560
1.832
1.635
0.412
0.253
∞
125.396


A-05
1.957
1.821
0.171
0.009
20.211
10.679
1.773
1.577
0.320
0.185
∞
142.606


A-06
1.964
1.810
0.149
0.000
20.519
9.259
1.809
1.603
0.293
0.152
∞
182.495


A-07
1.701
1.683
0.068
0.043
166.410
155.941
1.721
1.694
0.188
0.139
217.552
202.082


A-08
1.708
1.664
0.084
0.031
170.845
111.504
1.754
1.667
0.194
0.113
∞
249.694


A-09
1.727
1.662
0.108
0.039
255.389
217.630
7.503
6.491
3.321
2.487
1.062
0.781


A-10
1.710
1.674
0.106
0.053
226.062
206.257
1.909
1.763
0.395
0.243
100.609
81.237


A-11
1.720
1.683
0.099
0.045
229.005
200.369
1.849
1.670
0.332
0.164
∞
143.819


A-12
1.737
1.675
0.097
0.035
∞
189.200
1.855
1.540
0.307
0.122
∞
154.002


A-13
1.738
1.660
0.100
0.019
∞
189.609
1.900
1.583
0.271
0.102
∞
185.363




























TABLE 14-B





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























B-01
1.954
1.847
0.222
0.111
41.975
34.168
9.356
9.153
0.784
0.549
10.759
10.519


B-02
1.946
1.852
0.156
0.037
24.164
16.466
1.841
1.650
0.442
0.280
∞
119.178


B-03
1.957
1.828
0.171
0.015
20.222
11.264
1.772
1.579
0.334
0.198
∞
137.341


B-04
1.966
1.817
0.149
0.000
20.345
9.664
1.809
1.602
0.302
0.162
∞
178.243


B-05
1.703
1.667
0.081
0.035
165.590
137.726
1.744
1.674
0.195
0.120
∞
243.996


B-06
1.708
1.661
0.102
0.051
241.533
217.317
6.262
5.366
4.338
3.555
 0.986
0.720


B-07
1.699
1.675
0.098
0.067
220.890
207.766
1.931
1.793
0.416
0.288
89.025
74.083


B-08
1.715
1.684
0.100
0.052
225.049
201.595
1.852
1.684
0.339
0.182
∞
139.178


B-09
1.733
1.676
0.097
0.039
∞
191.244
1.853
1.538
0.310
0.132
∞
147.776


B-10
1.737
1.661
0.100
0.022
∞
190.979
1.902
1.584
0.275
0.107
∞
179.334




























TABLE 14-C





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























C-01
1.905
1.821
0.258
0.159
42.560
36.125
9.681
9.446
0.829
0.587
10.138
9.892


C-02
1.955
1.868
0.156
0.047
24.067
17.295
1.856
1.674
0.479
0.314
∞
112.716


C-03
1.958
1.836
0.172
0.022
20.129
11.822
1.769
1.584
0.348
0.215
∞
132.762


C-04
1.971
1.826
0.149
0.000
19.949
9.987
1.811
1.608
0.313
0.173
∞
173.492


C-05
1.699
1.670
0.078
0.041
161.711
144.941
1.737
1.683
0.196
0.129
∞
239.168


C-06
1.710
1.686
0.100
0.063
216.379
202.875
1.855
1.702
0.336
0.208
∞
134.716


C-07
1.730
1.678
0.097
0.046
∞
193.042
1.841
1.535
0.312
0.146
∞
142.289


C-08
1.737
1.661
0.101
0.025
∞
192.539
1.910
1.588
0.280
0.114
∞
200.270




























TABLE 14-D





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























D-01
1.964
1.894
0.224
0.152
33.127
28.245
2.530
2.288
0.928
0.730
 46.411
39.931


D-02
1.964
1.886
0.160
0.061
22.917
17.267
1.833
1.667
0.492
0.344
∞
107.536


D-03
1.959
1.843
0.175
0.031
19.812
12.114
1.762
1.583
0.359
0.229
∞
154.271


D-04
1.975
1.834
0.149
0.000
19.537
10.202
1.812
1.611
0.320
0.182
∞
167.375


D-05
1.694
1.673
0.073
0.048
159.270
147.983
1.732
1.691
0.195
0.145
274.107
234.670


D-06
1.701
1.689
0.099
0.076
210.753
203.620
1.846
1.712
0.319
0.257
∞
130.894


D-07
1.721
1.680
0.097
0.050
∞
194.085
1.812
1.528
0.315
0.159
∞
179.580


D-08
1.734
1.662
0.101
0.027
∞
194.045
1.920
1.594
0.285
0.121
∞
197.417


D-09
1.751
1.675
0.092
0.024
∞
189.814
1.889
1.515
0.358
0.115
∞
162.566




























TABLE 14-E





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























E-01
1.979
1.934
0.223
0.198
25.447
22.431
1.937
1.871
0.813
0.724
 58.954
51.905


E-02
1.963
1.892
0.175
0.080
21.108
16.482
1.752
1.605
0.464
0.351
∞
103.951


E-03
1.959
1.845
0.181
0.039
19.487
12.133
1.753
1.576
0.362
0.237
∞
122.545


E-04
1.980
1.841
0.148
0.000
19.257
10.346
1.817
1.616
0.326
0.188
∞
158.102


E-05
1.692
1.676
0.067
0.057
157.441
149.670
1.727
1.695
0.187
0.173
254.885
231.812


E-06
1.718
1.682
0.096
0.048
∞
194.149
1.788
1.641
0.326
0.165
∞
176.978


E-07
1.729
1.663
0.102
0.030
∞
195.371
1.929
1.601
0.290
0.127
∞
195.845


E-08
1.749
1.676
0.091
0.025
∞
190.682
1.898
1.530
0.362
0.117
∞
153.544




























TABLE 14-F





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























F-01
1.983
1.846
0.143
0.000
19.333
10.604
1.828
1.623
0.332
0.191
∞
146.194


F-02
1.956
1.842
0.185
0.045
19.661
12.234
1.751
1.571
0.365
0.239
∞
124.203


F-03
1.691
1.680
0.071
0.054
156.188
149.873
1.713
1.692
0.184
0.171
244.114
224.269


F-04
1.703
1.695
0.096
0.076
207.561
203.306
1.791
1.682
0.352
0.280
149.549
121.948


F-05
1.726
1.686
0.105
0.063
253.974
217.847
1.691
1.585
0.284
0.201
170.132
139.231


F-06
1.726
1.665
0.102
0.031
∞
196.531
1.935
1.606
0.294
0.130
∞
191.652


F-07
1.740
1.662
0.097
0.021
∞
170.235
1.919
1.543
0.280
0.102
∞
197.142


F-08
1.751
1.653
0.092
0.015
∞
166.884
1.925
1.498
0.278
0.095
∞
190.724




























TABLE 14-F





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























G-01
1.933
1.873
0.202
0.122
20.550
16.700
1.633
1.511
0.430
0.344
∞
91.266


G-02
1.953
1.839
0.184
0.046
20.523
12.791
1.761
1.579
0.380
0.246
∞
127.980


G-03
1.985
1.852
0.136
0.000
19.818
11.204
1.845
1.638
0.344
0.196
∞
136.666


G-04
1.975
1.816
0.174
0.000
18.551
8.554
1.780
1.585
0.283
0.150
∞
158.294


G-05
1.746
1.710
0.081
0.037
136.285
98.008
1.699
1.620
0.175
0.131
278.211
243.285


G-06
1.724
1.686
0.105
0.064
247.645
218.101
1.689
1.586
0.286
0.205
159.193
130.698


G-07
1.724
1.666
0.101
0.031
∞
197.493
1.934
1.609
0.296
0.130
∞
183.027


G-08
1.741
1.661
0.097
0.021
∞
171.385
1.918
1.542
0.281
0.101
∞
188.504




























TABLE 14-H





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























H-01
1.951
1.842
0.181
0.048
21.358
13.627
1.774
1.592
0.403
0.263
∞
123.537


H-02
1.984
1.857
0.134
0.000
20.311
11.922
1.856
1.651
0.360
0.208
∞
130.884


H-03
1.974
1.818
0.175
0.000
18.650
8.869
1.776
1.582
0.289
0.157
∞
183.486


H-04
1.746
1.712
0.079
0.042
135.917
98.660
1.696
1.624
0.178
0.137
265.927
237.438


H-05
1.725
1.688
0.106
0.068
245.491
218.637
1.688
1.581
0.280
0.214
149.336
121.404


H-06
1.724
1.667
0.102
0.033
∞
198.178
1.931
1.605
0.296
0.132
∞
172.147


H-07
1.740
1.661
0.097
0.022
∞
171.868
1.916
1.542
0.282
0.105
∞
178.623




























TABLE 14-I





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























I-01
1.955
1.853
0.178
0.053
21.482
14.427
1.777
1.605
0.429
0.289
∞
118.585


I-02
1.983
1.862
0.137
0.000
20.338
12.369
1.851
1.653
0.373
0.223
∞
127.262


I-03
1.976
1.827
0.171
0.000
18.582
9.315
1.779
1.583
0.299
0.167
∞
178.673


I-04
1.693
1.659
0.071
0.062
156.116
108.678
1.766
1.688
0.166
0.129
252.906
249.872


I-05
1.725
1.667
0.102
0.036
252.664
198.579
1.934
1.600
0.298
0.138
∞
164.058


I-06
1.738
1.662
0.098
0.022
∞
175.267
1.919
1.543
0.284
0.111
∞
173.633


I-07
1.752
1.653
0.092
0.016
∞
172.533
1.830
1.507
0.291
0.108
∞
172.262




























TABLE 14-J





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























J-01
1.964
1.874
0.179
0.062
20.729
14.862
1.767
1.609
0.449
0.320
∞
113.506


J-02
1.983
1.867
0.146
0.004
19.885
12.520
1.831
1.641
0.380
0.238
∞
124.690


J-03
1.982
1.838
0.168
0.000
18.297
9.652
1.783
1.584
0.309
0.178
∞
172.558


J-04
1.725
1.666
0.103
0.041
250.100
198.830
1.944
1.598
0.303
0.149
∞
157.077


J-05
1.737
1.663
0.098
0.024
∞
185.832
1.927
1.559
0.288
0.117
∞
167.184


J-06
1.752
1.658
0.091
0.019
∞
180.136
1.847
1.512
0.296
0.113
∞
165.978




























TABLE 14-K





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























K-01
1.973
1.893
0.185
0.078
19.455
14.744
1.741
1.596
0.453
0.345
∞
107.965


K-02
1.983
1.872
0.156
0.017
19.144
12.421
1.806
1.623
0.379
0.249
∞
122.284


K-03
1.987
1.847
0.167
0.000
17.845
9.756
1.782
1.583
0.315
0.187
∞
164.682


K-04
1.719
1.655
0.093
0.039
∞
107.765
1.782
1.640
0.185
0.106
∞
240.729


K-05
1.723
1.669
0.104
0.045
247.764
205.861
1.753
1.603
0.311
0.163
∞
150.727


K-06
1.736
1.664
0.099
0.026
∞
188.964
1.938
1.577
0.293
0.122
∞
190.206


K-07
1.751
1.660
0.091
0.021
∞
182.620
1.860
1.505
0.298
0.117
∞
157.223




























TABLE 14-L





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























L-01
1.974
1.903
0.194
0.095
18.537
14.577
1.708
1.572
0.448
0.357
∞
99.374


L-02
1.983
1.876
0.163
0.028
18.641
12.379
1.790
1.608
0.378
0.255
∞
118.240


L-03
1.989
1.851
0.171
0.000
17.506
9.747
1.776
1.579
0.316
0.190
∞
154.295


L-04
1.719
1.657
0.093
0.043
176.125
108.056
1.773
1.640
0.184
0.115
∞
239.447


L-05
1.720
1.674
0.104
0.048
245.819
210.037
1.745
1.616
0.323
0.176
∞
146.164


L-06
1.728
1.664
0.099
0.029
∞
190.492
1.826
1.594
0.297
0.128
∞
188.671


L-07
1.750
1.664
0.099
0.023
∞
185.642
1.931
1.560
0.283
0.103
∞
203.385


L-08
1.770
1.647
0.090
0.020
∞
181.694
1.851
1.519
0.279
0.095
∞
188.718




























TABLE 14-M





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























M-01
1.981
1.878
0.162
0.035
19.040
12.910
1.795
1.610
0.389
0.261
∞
109.327


M-02
1.985
1.850
0.173
0.004
17.738
9.987
1.771
1.575
0.319
0.192
∞
144.773


M-03
1.982
1.819
0.169
0.000
18.242
8.329
1.785
1.592
0.285
0.153
∞
164.318


M-04
1.717
1.677
0.103
0.051
233.783
211.731
1.724
1.634
0.337
0.187
∞
140.585


M-05
1.723
1.665
0.099
0.034
∞
191.269
1.797
1.609
0.302
0.133
∞
192.523


M-06
1.749
1.664
0.099
0.026
∞
186.782
1.934
1.561
0.285
0.104
∞
198.444


M-07
1.772
1.645
0.090
0.022
∞
182.830
1.851
1.521
0.282
0.097
∞
183.298




























TABLE 14-N





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























N-01
1.980
1.881
0.157
0.036
20.158
14.003
1.818
1.632
0.415
0.275
∞
119.641


N-02
1.980
1.848
0.174
0.011
18.254
10.450
1.767
1.571
0.327
0.197
∞
139.482


N-03
1.979
1.820
0.167
0.000
18.627
8.694
1.787
1.592
0.291
0.157
∞
181.534


N-04
1.708
1.676
0.100
0.054
231.071
211.497
1.721
1.649
0.345
0.200
160.527
134.106


N-05
1.720
1.666
0.099
0.038
∞
191.698
1.802
1.619
0.308
0.145
∞
186.758


N-06
1.748
1.665
0.100
0.028
∞
188.144
1.933
1.561
0.288
0.109
∞
191.540


N-07
1.771
1.644
0.090
0.024
∞
184.314
1.854
1.522
0.286
0.100
∞
174.816




























TABLE 14-O





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























O-01
1.986
1.892
0.151
0.037
20.946
15.073
1.846
1.665
0.451
0.301
∞
113.921


O-02
1.976
1.851
0.174
0.018
18.588
10.996
1.763
1.571
0.339
0.209
∞
135.398


O-03
1.980
1.826
0.165
0.000
18.692
9.087
1.789
1.591
0.301
0.166
∞
177.745


O-04
1.705
1.676
0.099
0.060
227.547
210.480
1.722
1.652
0.337
0.217
149.574
128.876


O-05
1.718
1.666
0.100
0.040
∞
192.120
1.834
1.629
0.312
0.151
∞
178.069


O-06
1.747
1.665
0.100
0.029
∞
189.864
1.910
1.562
0.289
0.109
∞
189.584


O-07
1.770
1.645
0.089
0.025
∞
185.926
1.858
1.520
0.291
0.103
∞
169.414




























TABLE 14-P





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























P-01
2.001
1.914
0.148
0.045
20.691
15.556
1.861
1.690
0.481
0.336
∞
109.768


P-02
1.978
1.859
0.176
0.025
18.424
11.376
1.756
1.574
0.351
0.225
∞
131.712


P-03
1.985
1.836
0.164
0.000
18.356
9.363
1.791
1.591
0.310
0.176
∞
172.718


P-04
1.707
1.685
0.101
0.067
225.238
212.673
1.715
1.643
0.328
0.223
139.199
120.241


P-05
1.716
1.666
0.100
0.040
231.093
192.697
1.840
1.628
0.314
0.151
∞
167.595


P-06
1.745
1.666
0.101
0.030
∞
191.630
1.889
1.562
0.290
0.115
∞
179.119


P-07
1.770
1.653
0.089
0.027
∞
187.468
1.864
1.515
0.295
0.110
∞
164.223




























TABLE 14-Q





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























Q-01
2.020
1.942
0.150
0.058
19.257
15.087
1.832
1.680
0.483
0.365
∞
111.992


Q-02
1.981
1.867
0.182
0.033
17.848
11.461
1.743
1.570
0.357
0.239
∞
128.672


Q-03
1.991
1.846
0.165
0.000
17.802
9.465
1.790
1.590
0.316
0.186
∞
166.465


Q-04
1.707
1.692
0.103
0.077
223.701
215.120
1.677
1.625
0.321
0.252
127.631
109.461


Q-05
1.716
1.665
0.101
0.041
230.268
195.890
1.826
1.625
0.315
0.151
∞
158.121


Q-06
1.744
1.667
0.101
0.031
∞
193.216
1.887
1.561
0.292
0.120
∞
161.210


Q-07
1.770
1.657
0.088
0.030
∞
188.863
1.872
1.509
0.295
0.115
∞
156.975




























TABLE 14-R





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























R-01
1.982
1.873
0.188
0.044
17.244
11.395
1.730
1.562
0.359
0.249
∞
128.127


R-02
1.997
1.854
0.166
0.000
17.308
9.486
1.790
1.589
0.319
0.193
∞
156.903


R-03
1.715
1.666
0.102
0.044
229.740
201.461
1.771
1.630
0.318
0.159
∞
151.088


R-04
1.743
1.668
0.102
0.032
∞
194.630
1.836
1.559
0.293
0.124
∞
157.464


R-05
1.760
1.658
0.090
0.018
∞
174.558
1.900
1.518
0.259
0.097
∞
192.992




























TABLE 14-S





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























S-01
1.981
1.875
0.190
0.055
17.148
11.532
1.725
1.558
0.365
0.256
∞
125.060


S-02
1.996
1.857
0.163
0.000
17.446
9.791
1.797
1.592
0.327
0.198
∞
143.864


S-03
1.994
1.834
0.168
0.000
17.407
8.458
1.791
1.590
0.286
0.157
∞
171.207


S-04
1.713
1.670
0.103
0.051
228.093
205.012
1.767
1.647
0.323
0.178
∞
144.997


S-05
1.742
1.669
0.102
0.037
∞
195.805
1.825
1.558
0.294
0.130
∞
180.034


S-06
1.742
1.666
0.097
0.026
∞
178.602
1.857
1.570
0.281
0.104
∞
199.693


S-07
1.760
1.659
0.090
0.022
∞
175.003
1.904
1.518
0.262
0.096
∞
186.949




























TABLE 14-T





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























T-01
1.978
1.874
0.186
0.059
17.817
12.124
1.731
1.564
0.381
0.265
∞
125.465


T-02
1.992
1.857
0.158
0.000
18.151
10.391
1.806
1.602
0.338
0.202
∞
136.447


T-03
1.990
1.833
0.167
0.000
17.811
8.783
1.791
1.588
0.291
0.159
∞
180.411


T-04
1.700
1.671
0.098
0.062
226.068
207.088
1.746
1.669
0.321
0.212
∞
144.423


T-05
1.743
1.670
0.102
0.044
265.367
196.420
1.815
1.556
0.294
0.142
∞
187.001


T-06
1.742
1.666
0.097
0.030
∞
183.526
1.856
1.571
0.282
0.108
∞
202.896


T-07
1.760
1.661
0.090
0.025
∞
175.348
1.912
1.519
0.268
0.102
∞
181.779




























TABLE 15-A





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























A-01
2.109
1.990
0.055
0.000
32.767
27.509
6.594
5.978
3.556
3.013
1.715
1.418


A-02
1.929
1.877
0.138
0.089
31.708
26.309
2.028
1.933
0.507
0.403
83.056
75.266


A-03
1.924
1.852
0.136
0.036
21.551
15.640
1.750
1.627
0.335
0.242
∞
136.202


A-04
1.935
1.835
0.123
0.000
20.868
12.771
1.789
1.639
0.292
0.188
∞
175.723


A-05
1.940
1.823
0.124
0.000
20.183
10.913
1.793
1.618
0.258
0.152
∞
191.206


A-06
1.703
1.685
0.080
0.051
169.125
157.974
1.696
1.666
0.202
0.150
213.501
194.001


A-07
1.707
1.664
0.084
0.029
171.143
129.944
1.748
1.665
0.195
0.115
∞
249.665


A-08
1.725
1.704
0.082
0.049
250.745
235.697
7.849
7.185
3.465
2.625
0.893
0.721


A-09
1.738
1.690
0.082
0.029
∞
215.124
1.818
1.613
0.264
0.129
∞
179.167


A-10
1.736
1.688
0.079
0.022
∞
204.319
1.809
1.611
0.246
0.105
∞
225.188


A-11
1.731
1.655
0.080
0.025
∞
220.771
1.808
1.623
0.237
0.115
∞
175.645




























TABLE 15-B





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























B-01
1.997
1.902
0.155
0.064
38.478
32.365
6.640
5.695
5.267
4.500
1.189
0.912


B-02
1.925
1.861
0.135
0.044
21.745
16.569
1.749
1.636
0.354
0.266
∞
129.925


B-03
1.936
1.842
0.124
0.004
20.735
13.305
1.787
1.643
0.304
0.202
∞
173.046


B-04
1.942
1.830
0.122
0.000
20.064
11.354
1.793
1.623
0.266
0.162
∞
186.094


B-05
1.700
1.690
0.079
0.061
166.973
161.165
1.688
1.668
0.197
0.165
199.493
188.055


B-06
1.703
1.667
0.082
0.033
165.499
138.474
1.740
1.670
0196
0.121
∞
244.077


B-07
1.736
1.690
0.079
0.024
∞
207.206
1.797
1.616
0.249
0.111
∞
220.690


B-08
1.711
1.709
0.079
0.074
235.852
234.721
6.407
6.233
4.693
3.940
0.732
0.720


B-09
1.737
1.692
0.082
0.033
∞
216.211
1.814
1.613
0.270
0.138
∞
173.495


B-10
1.730
1.658
0.080
0.029
∞
222.458
1.798
1.629
0.240
0.122
∞
171.776




























TABLE 15-C





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























C-01
1.927
1.873
0.135
0.055
21.683
17.423
1.744
1.647
0.374
0.295
∞
124.317


C-02
1.939
1.852
0.123
0.011
20.446
13.775
1.786
1.650
0.316
0.218
∞
167.810


C-03
1.945
1.839
0.119
0.000
19.836
11.786
1.794
1.632
0.276
0.173
∞
181.193


C-04
1.699
1.671
0.079
0.039
161.921
145.560
1.735
1.679
0.196
0.130
∞
239.270


C-05
1.735
1.694
0.082
0.038
270.295
217.505
1.754
1.615
0.276
0.149
∞
167.329


C-06
1.735
1.692
0.078
0.026
∞
209.346
1.781
1.622
0.252
0.118
∞
214.946




























TABLE 15-D





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























D-01
1.928
1.886
0.137
0.069
21.026
17.768
1.723
1.643
0.382
0.323
∞
119.322


D-02
1.943
1.862
0.123
0.018
19.960
14.046
1.784
1.655
0.326
0.234
∞
160.895


D-03
1.947
1.846
0.120
0.000
19.411
12.019
1.789
1.634
0.281
0.182
∞
176.028


D-04
1.695
1.674
0.075
0.046
159.493
148.447
1.731
1.687
0.195
0.141
273.632
234.699


D-05
1.732
1.696
0.081
0.042
266.580
218.746
1.745
1.620
0.283
0.159
∞
160.070


D-06
1.734
1.693
0.078
0.027
∞
210.617
1.767
1.630
0.252
0.123
∞
206.982


D-07
1.723
1.660
0.082
0.031
∞
221.552
1.832
1.613
0.241
0.108
∞
177.439




























TABLE 15-E





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























E-01
1.925
1.891
0.144
0.087
19.955
17.523
1.686
1.619
0.377
0.336
127.104
114.397


E-02
1.947
1.870
0.124
0.024
19.462
14.081
1.783
1.656
0.330
0.244
∞
150.903


E-03
1.947
1.849
0.124
0.000
18.998
12.045
1.778
1.625
0.281
0.186
∞
169.614


E-04
1.692
1.677
0.069
0.054
157.553
150.032
1.727
1.693
0.190
0.164
253.769
229.862


E-05
1.729
1.698
0.080
0.044
251.532
219.912
1.728
1.628
0.292
0.167
∞
150.571


E-06
1.728
1.694
0.077
0.029
∞
210.961
1.757
1.639
0.250
0.125
∞
199.775


E-07
1.753
1.654
0.078
0.021
∞
211.857
1.912
1.611
0.220
0.096
∞
202.106




























TABLE 15-F





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























F-01
1.950
1.875
0.122
0.025
19.494
14.295
1.792
1.662
0.337
0.249
∞
138.575


F-02
1.943
1.846
0.132
0.004
18.898
12.042
1.763
1.612
0.279
0.186
∞
161.008


F-03
1.724
1.699
0.079
0.045
247.964
221.101
1.721
1.638
0.301
0.176
172.085
143.974


F-04
1.723
1.693
0.077
0.033
∞
210.599
1.752
1.648
0.247
0.128
∞
199.200


F-05
1.740
1.693
0.077
0.030
∞
206.669
1.799
1.579
0.230
0.106
∞
203.487


F-06
1.750
1.656
0.078
0.022
∞
213.947
1.923
1.614
0.223
0.097
∞
191.019




























TABLE 15-G





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























G-01
1.955
1.881
0.116
0.024
20.279
15.118
1.816
1.683
0.355
0.259
∞
132.898


G-02
1.937
1.842
0.138
0.011
19.161
12.240
1.751
1.603
0.280
0.188
∞
152.054


G-03
1.947
1.823
0.131
0.000
19.228
10.142
1.783
1.616
0.254
0.151
∞
192.936


G-04
1.721
1.701
0.077
0.045
239.263
222.197
1.720
1.644
0.305
0.177
161.062
136.808


G-05
1.721
1.693
0.077
0.035
245.793
210.312
1.752
1.651
0.246
0.133
∞
191.952


G-06
1.740
1.695
0.077
0.032
∞
208.328
1.805
1.580
0.232
0.108
∞
195.570


G-07
1.735
1.657
0.077
0.024
∞
215.902
1.806
1.618
0.224
0.097
∞
182.960




























TABLE 15-H





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























H-01
1.960
1.891
0.111
0.023
21.165
16.261
1.843
1.713
0.382
0.279
∞
126.652


H-02
1.935
1.843
0.140
0.016
19.437
12.685
1.746
1.604
0.288
0.196
∞
177.678


H-03
1.947
1.828
0.128
0.000
19.380
10.599
1.787
1.618
0.262
0.159
∞
187.664


H-04
1.720
1.704
0.074
0.049
236.042
223.100
1.711
1.641
0.299
0.184
151.104
128.169


H-05
1.721
1.694
0.078
0.035
243.446
210.844
1.754
1.649
0.249
0.134
∞
181.064


H-06
1.739
1.697
0.076
0.032
∞
209.931
1.810
1.580
0.235
0.109
∞
216.664


H-07
1.730
1.656
0.076
0.027
∞
217.650
1.804
1.625
0.225
0.100
∞
177.272




























TABLE 15-I





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























I-01
1.966
1.905
0.109
0.028
21.461
17.167
1.855
1.737
0.407
0.308
∞
121.537


I-02
1.936
1.851
0.138
0.021
19.418
13.206
1.745
1.611
0.300
0.211
∞
173.052


I-03
1.950
1.836
0.126
0.000
19.237
11.040
1.789
1.626
0.271
0.169
∞
183.002


I-04
1.723
1.696
0.078
0.035
242.566
212.120
1.754
1.644
0.255
0.143
∞
168.954


I-05
1.738
1.699
0.075
0.032
∞
211.373
1.811
1.579
0.237
0.115
∞
213.072


I-06
1.728
1.655
0.075
0.029
∞
219.101
1.805
1.636
0.226
0.106
∞
172.052




























TABLE 15-J





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























J-01
1.973
1.922
0.111
0.042
20.839
17.465
1.840
1.743
0.418
0.340
161.544
119.422


J-02
1.940
1.863
0.136
0.027
19.023
13.566
1.742
1.619
0.310
0.227
∞
166.497


J-03
1.953
1.845
0.124
0.000
18.857
11.352
1.789
1.632
0.278
0.180
∞
178.361


J-04
1.724
1.698
0.077
0.035
241.722
213.515
1.751
1.642
0.260
0.155
∞
161.067


J-05
1.737
1.701
0.074
0.034
∞
212.546
1.807
1.577
0.236
0.122
∞
205.891


J-06
1.768
1.650
0.079
0.023
∞
200.276
1.849
1.604
0.227
0.093
∞
212.971




























TABLE 15-K





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























K-01
1.944
1.874
0.135
0.035
18.320
13.618
1.733
1.620
0.314
0.241
∞
157.397


K-02
1.955
1.853
0.124
0.000
18.363
11.476
1.786
1.632
0.282
0.188
∞
173.024


K-03
1.723
1.700
0.077
0.037
240.271
214.658
1.744
1.646
0.261
0.163
∞
156.390


K-04
1.736
1.703
0.073
0.036
∞
213.396
1.797
1.574
0.232
0.126
∞
195.169


K-05
1.767
1.650
0.078
0.023
∞
201.239
1.850
1.606
0.229
0.094
∞
202.551




























TABLE 15-L





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























L-01
1.947
1.882
0.136
0.044
17.718
13.578
1.725
1.617
0.315
0.249
∞
145.196


L-02
1.955
1.856
0.126
0.000
18.125
11.595
1.783
1.629
0.284
0.192
∞
165.335


L-03
1.718
1.664
0.090
0.044
175.199
128.388
1.772
1.642
0.182
0.119
∞
240.440


L-04
1.720
1.701
0.076
0.041
231.299
215.799
1.738
1.658
0.262
0.174
∞
152.266


L-05
1.728
1.703
0.072
0.040
∞
214.049
1.784
1.629
0.229
0.128
∞
193.496


L-06
1.748
1.689
0.077
0.030
∞
199.849
1.761
1.583
0.215
0.104
∞
212.463


L-07
1.768
1.651
0.078
0.024
∞
201.932
1.850
1.607
0.229
0.098
∞
192.106




























TABLE 15-M





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























M-01
1.949
1.886
0.135
0.050
17.809
13.869
1.725
1.618
0.322
0.256
∞
136.370


M-02
1.951
1.855
0.127
0.002
18.468
11.960
1.781
1.628
0.288
0.194
∞
153.796


M-03
1.949
1.830
0.135
0.000
18.469
10.161
1.771
1.611
0.250
0.153
∞
194.427


M-04
1.716
1.703
0.075
0.050
226.140
217.246
1.731
1.678
0.263
0.185
179.041
147.510


M-05
1.721
1.704
0.072
0.045
∞
214.692
1.769
1.659
0.228
0.138
∞
199.403


M-06
1.746
1.690
0.077
0.033
∞
202.380
1.761
1.586
0.219
0.106
∞
208.129


M-07
1.770
1.651
0.078
0.026
∞
202.716
1.853
1.608
0.227
0.099
∞
186.947




























TABLE 15-N





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























N-01
1.949
1.888
0.132
0.051
18.581
14.660
1.733
1.627
0.337
0.266
∞
131.038


N-02
1.947
1.854
0.127
0.006
19.085
12.539
1.780
1.630
0.296
0.200
∞
171.650


N-03
1.949
1.833
0.132
0.000
18.767
10.533
1.774
1.611
0.256
0.157
∞
189.575


N-04
1.716
1.704
0.071
0.050
∞
215.374
1.754
1.677
0.228
0.152
∞
195.166


N-05
1.744
1.691
0.077
0.036
∞
204.778
1.760
1.592
0.223
0.109
∞
202.001


N-06
1.741
1.652
0.078
0.028
∞
209.881
1.859
1.608
0.226
0.098
∞
178.700




























TABLE 15-O





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























O-01
1.950
1.895
0.130
0.053
19.240
15.619
1.737
1.641
0.356
0.286
∞
126.286


O-02
1.946
1.858
0.127
0.010
19.361
13.105
1.779
1.636
0.307
0.211
∞
170.199


O-03
1.951
1.839
0.128
0.000
18.857
10.992
1.777
1.612
0.265
0.166
∞
185.156


O-04
1.714
1.706
0.070
0.053
222.035
216.109
1.735
1.682
0.225
0.161
∞
187.971


O-05
1.742
1.694
0.076
0.038
∞
206.771
1.755
1.595
0.223
0.114
∞
215.684


O-06
1.738
1.652
0.078
0.031
∞
213.326
1.839
1.609
0.227
0.102
∞
171.738




























TABLE 15-P





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























P-01
1.955
1.910
0.129
0.064
19.185
16.266
1.731
1.651
0.371
0.314
∞
121.662


P-02
1.950
1.868
0.127
0.016
19.061
13.452
1.774
1.642
0.317
0.227
∞
164.818


P-03
1.953
1.847
0.127
0.000
18.574
11.329
1.776
1.618
0.273
0.177
∞
180.821


P-04
1.714
1.708
0.066
0.055
220.596
216.874
1.707
1.678
0.218
0.165
∞
179.468


P-05
1.742
1.697
0.075
0.039
∞
208.223
1.748
1.595
0.220
0.120
∞
209.260


P-06
1.735
1.651
0.077
0.034
∞
215.451
1.840
1.612
0.229
0.108
∞
166.208




























TABLE 15-Q





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























Q-01
1.955
1.881
0.126
0.023
18.346
13.519
1.767
1.645
0.322
0.243
∞
156.774


Q-02
1.956
1.856
0.128
0.000
18.029
11.467
1.769
1.618
0.277
0.187
∞
176.585


Q-03
1.741
1.699
0.074
0.039
∞
209.091
1.740
1.591
0.217
0.126
∞
198.961


Q-04
1.736
1.650
0.080
0.020
∞
211.222
1.868
1.614
0.224
0.094
∞
204.980




























TABLE 15-R





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























R-01
1.960
1.893
0.126
0.031
17.569
13.467
1.759
1.644
0.325
0.256
∞
143.259


R-02
1.956
1.861
0.131
0.002
17.540
11.504
1.759
1.611
0.278
0.193
∞
171.381


R-03
1.740
1.700
0.073
0.041
∞
209.546
1.736
1.587
0.217
0.129
∞
185.714


R-04
1.745
1.696
0.075
0.028
∞
205.939
1.790
1.604
0.211
0.105
∞
201.921


R-05
1.734
1.657
0.079
0.020
∞
213.387
1.874
1.617
0.226
0.095
∞
193.505




























TABLE 15-S





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























S-01
1.964
1.903
0.123
0.040
17.353
13.759
1.759
1.648
0.331
0.267
∞
144.756


S-02
1.952
1.860
0.135
0.012
17.539
11.668
1.750
1.604
0.280
0.196
∞
162.922


S-03
1.955
1.833
0.133
0.000
18.087
9.947
1.778
1.614
0.252
0.156
∞
193.262


S-04
1.709
1.664
0.092
0.042
163.046
129.659
1.784
1.659
0.196
0.120
∞
243.485


S-05
1.739
1.699
0.074
0.044
∞
210.046
1.739
1.586
0.222
0.129
∞
177.669


S-06
1.744
1.697
0.075
0.029
∞
207.633
1.795
1.605
0.216
0.105
∞
205.481


S-07
1.732
1.658
0.078
0.021
∞
215.326
1.877
1.619
0.228
0.098
∞
189.945




























TABLE 15-T





Case
n1−max
n1−min
k1−max
k1−min
d1−max
d1−min
n2−max
n2−min
k2−max
k2−min
d2−max
d2−min



























T-01
1.966
1.909
0.117
0.043
18.089
14.663
1.773
1.665
0.348
0.278
∞
140.260


T-02
1.948
1.857
0.137
0.016
18.051
12.041
1.748
1.604
0.285
0.199
∞
150.984


T-03
1.955
1.835
0.128
0.000
18.523
10.348
1.785
1.616
0.259
0.159
∞
188.160


T-04
1.739
1.699
0.075
0.048
256.743
210.937
1.744
1.589
0.230
0.145
∞
180.549


T-05
1.743
1.698
0.075
0.030
∞
209.294
1.800
1.608
0.223
0.109
∞
200.943


T-06
1.731
1.652
0.078
0.022
∞
217.122
1.874
1.620
0.227
0.100
∞
184.530









The combinations of values of [n10, n20, k10, k20, d10, d20] are adapted for minimizing the reflectance over the entire incidence angle region corresponding to the numerical aperture NA of a corresponding exposure system. In other words, assuming an evaluation function f for minimization, the evaluation function f is a function of n10, n20, k10, k20, d10, and d20, and the above-described combinations of values of [n10, n20, k10, k20, d10, d20] are combinations for minimizing f(n10, n20, k10, k20, d10, d20). Namely, the evaluation function f is minimized by the above-descried combinations of values of [n10, n20, k10, k20, d10, d20].
When multivariable function f(xi) (i=0, 1, 2, . . . n) is minimized at xi=x1-min, the function f(xi) near the minimum value may be expressed by the following equation (1). Namely, the function may be approximated by a quadratic function. In the equation (1), symbol “Σ” represents the sum of i=0, 1, 2, . . . n. This applies to equation (2).

f(xi)=Σai(xi−x1-min)2+b  (1)

In this case, a condition for setting f(xi) to be a certain constant c larger than b may be expressed by the elliptic function expression (2) wherein x1-c is a value of xi at f(xi)=c when only xi is varied with all other variables being fixed.

Σ(xi−x1-min)/(xi-c−xi-min)2≦1  (2)

Therefore, by using the values of ni-max, ni-min, ki-max, ki-min, di-max, di-min, n2-max, n2-min, k2-max, k2-min, d2-max, and d2-min, with each of which the reflectance is 0.4% when one of the variables is changed with the other being fixed, the reflectance may be controlled to below 0.4% by utilizing n10, n20, k10, k20, d10, and d20 satisfying the following expression (3):

{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1  (3)

However, n1m, n2m, k1m, k2m, d1m, and d2m take the following values:
n1m: n1-max when n1≧n10 and n1-min when n1<n10 
k1m: k1-max when k1≧k10 and k1-min when k1<k10 
d1m: d1-max when d1≧d10 and d1-min when d1<d10 
n2m: n2-max when n2≧n20 and n2-min when n2<n20 
k2m: k2-max when k2≧k20 and k2-min when k2<k20 
d2m: d2-max when d2≧d20 and d2-min when d2<d20 
The reason for distinguishing the values of n1m, n2m, k1m, k2m, d1m, and d2m according to the magnitude relations between n1, n2, k1, k2, d1, and d2 and n10, n20, k10, k20, d10, and d20, respectively, is that since the following conditions are not exactly satisfied,

n1-max−n10=n10−n1-min 

k1-max−k10=k10−k1-min 

d1-max−d10=d10−d1-min 

n2-max−n20=n20−n2-min 

k2-max−k20=k20−k2-min 

d2-max−d20=d20−d2-min 

definitions of the diameter of an ellipsoid specified by expression (2) are distinguished according to the magnitude relations between n1, n2, k1, k2, d1, and d2 and n10, n20, k10, k20, d10, and d20, respectively. In other words, for example, the curvature of the ellipsoid at n1≧n10 is different from that at n1<n10. This applies to k10, d10, n20, k20, and d20.

When the numerical aperture NA is 0.93≦NA≦1.0, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n10, n20, k10, k20, d10, d20]:
Case A-01 to Case A-15 with 2 (nm)≦T≦15 (nm)
Case B-01 to Case B-22 with 15 (nm)<T≦25 (nm)
Case C-01 to Case C-18 with 25 (nm)<T≦35 (nm)
Case D-01 to Case D-20 with 35 (nm)<T≦45 (nm)
Case E-01 to Case E-17 with 45 (nm)<T≦55 (nm)
Case F-01 to Case F-17 with 55 (nm)<T≦65 (nm)
Case G-01 to Case G-16 with 65 (nm)<T≦75 (nm)
Case H-01 to Case H-16 with 75 (nm)<T≦85 (nm)
Case I-01 to Case I-23 with 85 (nm)<T≦95 (nm)
Case J-01 to Case J-15 with 95 (nm)<T≦105 (nm)
Case K-01 to Case K-13 with 105 (nm)<T≦115 (nm)
Case L-01 to Case L-12 with 115 (nm)<T≦125 (nm)
Case M-01 to Case M-12 with 125 (nm)<T≦135 (nm)
Case N-01 to Case N-12 with 135 (nm)<T≦145 (nm)
Case O-01 to Case O-13 with 145 (nm)<T≦155 (nm)
Case P-01 to Case P-14 with 155 (nm)<T≦165 (nm)
Case Q-01 to Case Q-13 with 165 (nm)<T≦175 (nm)
Case R-01 to Case R-13 with 175 (nm)<T≦185 (nm)
Case S-01 to Case S-15 with 185 (nm)<T≦195 (nm)
Case T-01 to Case T-13 with 195 (nm)<T≦205 (nm)
In addition, when n1 is in the range of the maximum (n1-max) to the minimum (n1-min) of n1m in a corresponding case, k1 is in the range of the maximum (k1-max) to the minimum (k1-min) of k1m in a corresponding case, d1 is in the range of the maximum (d1-max) to the minimum (d1-min) of d1m in a corresponding case, n2 is in the range of the maximum (n2-max) to the minimum (n2-min) of n2m in a corresponding case, k2 is in the range of the maximum (k2-max) to the minimum (k2-min) of k2m in a corresponding case, and d2 is in the range of the maximum (d2-max) to the minimum (d2-min) of d2m in a corresponding case, it is secured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n1m in a corresponding case on the basis of the magnitude relation between n1 and n10, a value of k1m in a corresponding case on the basis of the magnitude relation between k1 and k10, a value of d1m in a corresponding case on the basis of the magnitude relation between d1 and d10, a value of n2m in a corresponding case on the basis of the magnitude relation between n2 and n20, a value of k2m in a corresponding case on the basis of the magnitude relation between k2 and k20, and a value of d2m in a corresponding case on the basis of the magnitude relation between d2 and d20. As a result, an excellent resist pattern is obtained.
When the numerical aperture NA is 1.0<NA≦1.1, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n10, n20, k10, k20, d10, d20]:
Case A-01 to Case A-24 with 2 (nm)≦T≦15 (nm)
Case B-01 to Case B-22 with 15 (nm)<T≦25 (nm)
Case C-01 to Case C-16 with 25 (nm)<T≦35 (nm)
Case D-01 to Case D-14 with 35 (nm)<T≦45 (nm)
Case E-01 to Case E-14 with 45 (nm)<T≦55 (nm)
Case F-01 to Case F-16 with 55 (nm)<T≦65 (nm)
Case G-01 to Case G-16 with 65 (nm)<T≦75 (nm)
Case H-01 to Case H-17 with 75 (nm)<T≦85 (nm)
Case I-01 to Case I-15 with 85 (nm)<T≦95 (nm)
Case J-01 to Case J-13 with 95 (nm)<T≦105 (nm)
Case K-01 to Case K-12 with 105 (nm)<T≦115 (nm)
Case L-01 to Case L-13 with 115 (nm)<T≦125 (nm)
Case M-01 to Case M-11 with 125 (nm)<T≦135 (nm)
Case N-01 to Case N-12 with 135 (nm)<T≦145 (nm)
Case O-01 to Case O-12 with 145 (nm)<T≦155 (nm)
Case P-01 to Case P-12 with 155 (nm)<T≦165 (nm)
Case Q-01 to Case Q-12 with 165 (nm)<T≦175 (nm)
Case R-01 to Case R-10 with 175 (nm)<T≦185 (nm)
Case S-01 to Case S-13 with 185 (nm)<T≦195 (nm)
Case T-01 to Case T-12 with 195 (nm)<T≦205 (nm)
In addition, when n1 is in the range of the maximum (n1-max) to the minimum (n1-min) of n1m in a corresponding case, k1 is in the range of the maximum (k1-max) to the minimum (k1-min) of k1m in a corresponding case, d1 is in the range of the maximum (d1-max) to the minimum (d1-min) of d1m in a corresponding case, n2 is in the range of the maximum (n2-max) to the minimum (n2-min) of n2m in a corresponding case, k2 is in the range of the maximum (k2-max) to the minimum (k2-min) of k2m in a corresponding case, and d2 is in the range of the maximum (d2-max) to the minimum (d2-min) of d2m in a corresponding case, it is secured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n1m in a corresponding case on the basis of the magnitude relation between n1 and n10, a value of k1m in a corresponding case on the basis of the magnitude relation between k1 and k10, a value of d1m in a corresponding case on the basis of the magnitude relation between d1 and d10, a value of n2m in a corresponding case on the basis of the magnitude relation between n2 and n20, a value of k2m in a corresponding case on the basis of the magnitude relation between k2 and k20, and a value of d2m in a corresponding case on the basis of the magnitude relation between d2 and d20. As a result, an excellent resist pattern is obtained.
Furthermore, when the numerical aperture NA is 1.1≦NA ≦1.2, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n10, n20, k10, k20, d10, d20]:
Case A-01 to Case A-19 with 2 (nm)≦T≦15 (nm)
Case B-01 to Case B-17 with 15 (nm)<T≦25 (nm)
Case C-01 to Case C-14 with 25 (nm)<T≦35 (nm)
Case D-01 to Case D-13 with 35 (nm)<T≦45 (nm)
Case E-01 to Case E-13 with 45 (nm)<T≦55 (nm)
Case F-01 to Case F-12 with 55 (nm)<T≦65 (nm)
Case G-01 to Case G-13 with 65 (nm)<T≦75 (nm)
Case H-01 to Case H-15 with 75 (nm)<T≦85 (nm)
Case I-01 to Case I-13 with 85 (nm)<T≦95 (nm)
Case J-01 to Case J-12 with 95 (nm)<T≦105 (nm)
Case K-01 to Case K-09 with 105 (nm)<T≦115 (nm)
Case L-01 to Case L-10 with 115 (nm)<T≦125 (nm)
Case M-01 to Case M-09 with 125 (nm)<T≦135 (nm)
Case N-01 to Case N-10 with 135 (nm)<T≦145 (nm)
Case O-01 to Case O-09 with 145 (nm)<T≦155 (nm)
Case P-01 to Case P-09 with 155 (nm)<T≦165 (nm)
Case Q-01 to Case Q-09 with 165 (nm)<T≦175 (nm)
Case R-01 to Case R-08 with 175 (nm)<T≦185 (nm)
Case S-01 to Case S-10 with 185 (nm)<T≦195 (nm)
Case T-01 to Case T-11 with 195 (nm)<T≦205 (nm)
In addition when n1 is in the range of the maximum (n1-max) to the minimum (n1-min) of n1m in a corresponding case, k1 is in the range of the maximum (k1-max) to the minimum (k1-min) of k1m in a corresponding case, d1 is in the range of the maximum (d1-max) to the minimum (d1-min) of d1m in a corresponding case, n2 is in the range of the maximum (n2-max) to the minimum (n2-min) of n2m in a corresponding case, k2 is in the range of the maximum (k2-max) to the minimum (k2-min) of k2m in a corresponding case, and d2 is in the range of the maximum (d2-max) to the minimum (d2-min) of d2m in a corresponding case, it is ensured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n1m in a corresponding case on the basis of the magnitude relation between n1 and n10, a value of k1m in a corresponding case on the basis of the magnitude relation between k1 and k10, a value of d1m in a corresponding case on the basis of the magnitude relation between d1 and d10, a value of n2m in a corresponding case on the basis of the magnitude relation between n2 and n20, a value of k2m in a corresponding case on the basis of the magnitude relation between k2 and k20, and a value of d2m in a corresponding case on the basis of the magnitude relation between d2 and d20. As a result, an excellent resist pattern is obtained.
Furthermore, when the numerical aperture NA is 1.2<NA ≦1.3, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n10, n20, k10, k20, d10, d20]:
Case A-01 to Case A-13 with 2 (nm)≦T≦15 (nm)
Case B-01 to Case B-10 with 15 (nm)<T≦25 (nm)
Case C-01 to Case C-08 with 25 (nm)<T≦35 (nm)
Case D-01 to Case D-09 with 35 (nm)<T≦45 (nm)
Case E-01 to Case E-08 with 45 (nm)<T≦55 (nm)
Case F-01 to Case F-08 with 55 (nm)<T≦65 (nm)
Case G-01 to Case G-08 with 65 (nm)<T≦75 (nm)
Case H-01 to Case H-07 with 75 (nm)<T≦85 (nm)
Case I-01 to Case I-07 with 85 (nm)<T≦95 (nm)
Case J-01 to Case J-06 with 95 (nm)<T≦105 (nm)
Case K-01 to Case K-07 with 105 (nm)<T≦115 (nm)
Case L-01 to Case L-08 with 115 (nm)<T≦125 (nm)
Case M-01 to Case M-07 with 125 (nm)<T≦135 (nm)
Case N-01 to Case N-07 with 135 (nm)<T≦145 (nm)
Case O-01 to Case O-07 with 145 (nm)<T≦155 (nm)
Case P-01 to Case P-07 with 155 (nm)<T≦165 (nm)
Case Q-01 to Case Q-07 with 165 (nm)<T≦175 (nm)
Case R-01 to Case R-05 with 175 (nm)<T≦185 (nm)
Case S-01 to Case S-07 with 185 (nm)<T≦195 (nm)
Case T-01 to Case T-07 with 195 (nm)<T≦205 (nm)
In addition, when n1 is in the range of the maximum (n1-max) to the minimum (n1-min) of n1m in a corresponding case, k1 is in the range of the maximum (k1-max) to the minimum (k1-min) of k1m in a corresponding case, d1 is in the range of the maximum (d1-max) to the minimum (d1-min) of d1m in a corresponding case, n2 is in the range of the maximum (n2-max) to the minimum (n2-min) of n2m in a corresponding case, k2 is in the range of the maximum (k2-max) to the minimum (k2-min) of k2m in a corresponding case, and d2 is in the range of the maximum (d2-max) to the minimum (d2-min) of d2m in a corresponding case, it is secured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n1m in a corresponding case on the basis of the magnitude relation between n1 and n10, a value of k1m in a corresponding case on the basis of the magnitude relation between k1 and k10, a value of d1m in a corresponding case on the basis of the magnitude relation between d1 and d10, a value of n2m in a corresponding case on the basis of the magnitude relation between n2 and n20, a value of k2m in a corresponding case on the basis of the magnitude relation between k2 and k20, and a value of d2m in a corresponding case on the basis of the magnitude relation between d2 and d20. As a result, an excellent resist pattern is obtained.
Furthermore, when the numerical aperture NA is 1.3<NA≦1.4, a reflectance below 0.4% is secured by selecting any one of the following combinations of values of [n10, n20, k10, k20, d10, d20]:
Case A-01 to Case A-11 with 2 (nm)≦T≦15 (nm)
Case B-01 to Case B-10 with 15 (nm)<T≦25 (nm)
Case C-01 to Case C-06 with 25 (nm)<T≦35 (nm)
Case D-01 to Case D-07 with 35 (nm)<T≦45 (nm)
Case E-01 to Case E-07 with 45 (nm)<T≦55 (nm)
Case F-01 to Case F-06 with 55 (nm)<T≦65 (nm)
Case G-01 to Case G-07 with 65 (nm)<T≦75 (nm)
Case H-01 to Case H-07 with 75 (nm)<T≦85 (nm)
Case I-01 to Case I-06 with 85 (nm)<T≦95 (nm)
Case J-01 to Case J-06 with 95 (nm)<T≦105 (nm)
Case K-01 to Case K-05 with 105 (nm)<T≦115 (nm)
Case L-01 to Case L-07 with 115 (nm)<T≦125 (nm)
Case M-01 to Case M-07 with 125 (nm)<T≦135 (nm)
Case N-01 to Case N-06 with 135 (nm)<T≦145 (nm)
Case O-01 to Case O-06 with 145 (nm)<T≦155 (nm)
Case P-01 to Case P-06 with 155 (nm)<T≦165 (nm)
Case Q-01 to Case Q-04 with 165 (nm)<T≦175 (nm)
Case R-01 to Case R-05 with 175 (nm)<T≦185 (nm)
Case S-01 to Case S-07 with 185 (nm)<T≦195 (nm)
Case T-01 to Case T-06 with 195 (nm)<T≦205 (nm)
In addition, when n1 is in the range of the maximum (n1-max) to the minimum (n1-min) of n1m in a corresponding case, k1 is in the range of the maximum (k1-max) to the minimum (k1-min) of k1m in a corresponding case, d1 is in the range of the maximum (d1-max) to the minimum (d1-min) of d1m in a corresponding case, n2 is in the range of the maximum (n2-max) to the minimum (n2-min) of n2m in a corresponding case, k2 is in the range of the maximum (k2-max) to the minimum (k2-min) of k2m in a corresponding case, and d2 is in the range of the maximum (d2-max) to the minimum (d2-min) of d2m in a corresponding case, it is secured that the reflectance of the antireflective film from the silicon semiconductor substrate does not exceed 0.4% using a value of n1m in a corresponding case on the basis of the magnitude relation between n1 and n10, a value of k1m in a corresponding case on the basis of the magnitude relation between k1 and k10, a value of d1m in a corresponding case on the basis of the magnitude relation between d1 and d10, a value of n2m in a corresponding case on the basis of the magnitude relation between n2 and n20, a value of k2m in a corresponding case on the basis of the magnitude relation between k2 and k20, and a value of d2m in a corresponding case on the basis of the magnitude relation between d2 and d20. As a result, an excellent resist pattern is obtained.
In other words, assuming a 6-dimensional ellipsoid having the six variables of (n1, n2, k1, k2, d1, d2) in which the centers are (n10, n20, k10, k20, d10, and d20) and the diameters are absolute values of (n1m−n10), (k1m−k10), (d1m−d10), (n2m−n20), (k2m−k20), and (d2m−d20), the reflectance of the antireflective film may be controlled to 0.4% or less by selecting a combination of any values of (n1, n2, k1, k2, d1, d2) within a range present in the ellipsoid.
EXAMPLES
A two-layer antireflective film having each of the refractive indexes and thicknesses shown in Tables 22, 23, 24, and 25 was formed on a silicon oxide film formed on a surface of a silicon semiconductor substrate by the plasma-enhanced CVD method descried in Japanese Unexamined Patent Application Publication No. 2001-242630 and Proceedings of SPIE 2003, 5039, 152 (K. Babich, et al.). The silicon oxide film was deposited on the silicon substrate by a thermal CVD method. Specifically, the CVD method was performed using SiH4 and O2 as source gases at a reaction temperature set at 400° C.
As described in the above reference documents, the plasma-enhanced CVD method is a method for forming a film in a parallel electrode reactor in which a silicon semiconductor substrate is mounted on one of electrodes. A negative bias voltage is applied to the silicon semiconductor substrate from the electrode, and the pressure in the reactor, the type of the reaction precursor introduced into the reactor (tetramethylsilane, trimethylsilane, tetramethyltetrasiloxne, tetramethylgermane, or oxygen), the flow rate, and the substrate temperature are controlled to form layers having various complex refractive indexes.
In Tables 21, 22, 23, 24, and 25, examples are antireflective films satisfying the conditions of the invention, while comparative examples are comparative antireflective films not satisfying the conditions of the invention.







TABLE 21







0.93 ≦ NA ≦ 1.0











Upper layer
Lower layer

















Complex

Complex

Thickness





refractive
Thickness
refractive
Thickness
of oxide
Section



Case
index
(nm)
index
(nm)
film (nm)
pattern


















Example 1-1
E-06
1.78-0.14i
85
1.71-0.65i
55
50
A


Comp. Example 1-1

1.90-0.21i
85
1.71-0.65i
30
50
B


Example 1-2
E-12
1.72-0.08i
155
1.73-0.25i
170
50
A


Comp. Example 1-2A

1.72-0.08i
155
1.73-0.25i
30
50
B


Comp. Example 1-2B

1.71-0.65i
155
1.90-0.21i
30
50
B


Example 1-3
J-06
1.77-0.11i
90
1.82-0.39i
115
100
A


Comp. Example 1-3

1.77-0.11i
90
1.82-0.39i
40
100
B


Example 1-4
J-10
1.73-0.09i
155
1.76-0.33i
120
100
A


Example 1-5
O-07
1.78-0.14i
90
1.79-0.50i
75
150
A


Comp. Example 1-5

1.78-0.14i
90
1.79-0.50i
15
150
B


Example 1-6
T-04
1.73-0.11i
85
1.62-0.30i
155
200
A


Comp. Example 1-6

1.73-0.11i
85
1.62-0.30i
60
200
B
















TABLE 22







1.0 < NA ≦ 1.1











Upper layer
Lower layer

















Complex

Complex

Thickness





refractive
Thickness
refractive
Thickness
of oxide
Section



Case
index
(nm)
index
(nm)
film (nm)
pattern


















Example 2-1
E-05
1.72-0.09i
90
1.64-0.25i
180
50
A


Comp. Example 2-1

1.72-0.09i
90
1.64-0.25i
40
50
B


Example 2-2
E-02
1.93-0.15i
20
1.86-0.50i
110
50
A


Comp. Example 2-2

1.93-0.15i
20
1.86-0.50i
40
50
B


Example 2-3
J-06
1.72-0.09i
90
1.64-0.25i
170
60
A


Comp. Example 2-3

1.72-0.09i
90
1.64-0.25i
30
60
B


Example 2-4
J-02
1.93-0.15i
16
1.75-0.45i
130
100
A


Comp. Example 2-4A

1.93-0.15i
16
1.75-0.45i
50
100
B


Comp. Example 2-4B

1.62-0.30i
16
1.75-0.45i
130
100
B


Example 2-5
O-04
1.73-0.10i
90
1.69-0.30i
140
150
A


Comp. Example 2-5

1.73-0.10i
90
1.69-0.30i
100
150
B


Example 2-6
T-10
1.69-0.07i
210
1.69-0.20i
210
200
A


Comp. Example 2-6

1.69-0.07i
210
1.69-0.20i
80
200
B
















TABLE 23







1.1 < NA ≦ 1.2











Upper layer
Lower layer

















Complex

Complex

Thickness





refractive
Thickness
refractive
Thickness
of oxide
Section



Case
index
(nm)
index
(nm)
film (nm)
pattern


















Example 3-1
E-04
1.72-0.09i
95
1.65-0.24i
180
50
A


Comp. Example 3-1

1.72-0.09i
95
1.65-0.24i
80
50
B


Example 3-2
E-06
1.71-0.07i
165
1.67-0.23i
170
50
A


Comp. Example 3-2

1.71-0.07i
165
1.67-0.23i
80
50
B


Example 3-3
J-05
1.73-0.08i
95
1.70-0.24i
185
100
A


Comp. Example 3-3

1.73-0.08i
95
1.70-0.24i
40
100
B


Example 3-4
O-01
1.90-0.14i
15
1.71-0.39i
150
150
A


Comp. Example 3-4

1.61-0.01i
15
1.71-0.39i
150
150
B


Example 3-5
S-04
1.72-0.08i
95
1.67-0.21i
220
190
A


Comp. Example 3-5A

1.61-0.01i
95
1.67-0.21i
220
190
B


Comp. Example 3-5B

1.72-0.08i
95
1.67-0.21i
90
190
B
















TABLE 24







1.2 < NA ≦ 1.3











Upper layer
Lower layer

















Complex

Complex

Thickness





refractive
Thickness
refractive
Thickness
of oxide
Section



Case
index
(nm)
index
(nm)
film (nm)
pattern


















Example 4-1
E-04
1.94-0.21i
23
1.90-0.79i
54
50
A


Comp. Example 4-1

1.94-0.21i
23
1.90-0.79i
40
50
B


Example 4-2
J-01
1.90-0.14i
17
1.72-0.40i
135
100
A


Comp. Example 4-2

1.90-0.14i
17
1.72-0.40i
50
100
B


Comp. Example 4-3

1.94-0.21i
17
1.72-0.40i
135
100
B


Example 4-3
T-01
1.90-0.14i
14
1.68-0.33i
160
200
A


Comp. Example 4-4

1.90-0.14i
14
1.68-0.33i
50
200
B
















TABLE 25







1.3 < NA ≦ 1.4











Upper layer
Lower layer

















Complex

Complex

Thickness





refractive
Thickness
refractive
Thickness
of oxide
Section



Case
index
(nm)
index
(nm)
film (nm)
pattern


















Example 5-1
E-01
1.90-0.14i
18
1.68-0.47i
126
50
A


Comp. Example 5-1

1.90-0.15i
18
1.68-0.47i
70
50
B


Comp. Example 5-2

1.90-0.14i
18
1.50-0.10i
126
50
B


Example 5-2
J-01
1.93-0.10i
18
1.82-0.40i
126
100
A


Comp. Example 5-3

1.93-0.10i
70
1.82-0.40i
126
100
B


Example 5-3
O-01
1.90-0.12i
16
1.72-0.34i
145
150
A


Comp. Example 5-4

1.90-0.12i
16
1.72-0.34i
100
150
B


Example 5-4
T-01
1.91-0.10i
15
1.75-0.33i
155
200
A


Comp. Example 5-5

1.91-0.10i
15
1.75-0.33i
70
200
B









In further detail, in Table 21 showing the results of evaluation with 0.93≦NA≦1.0, Examples 1-1 and 1-2 are antireflective films satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Examples 1-3 and 1-4 are antireflective films satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Example 1-5 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Example 1-6 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm). On the other hand, Comparative Examples 1-1, 1-2A, and 1-2B are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Example 1-3 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Comparative Example 1-5 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Comparative Example 1-6 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm).
Furthermore, in Table 22 showing the results of evaluation with 1.0<NA≦1.1, Examples 2-1 and 2-2 are antireflective films satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Example 2-3 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 55 (nm)<T≦65 (nm), Example 2-4 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Example 2-5 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Example 2-6 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm). On the other hand, Comparative Examples 2-1 and 2-2 are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Example 2-3 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 55 (nm)<T≦65 (nm), Comparative Examples 2-4A and 2-4B are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Comparative Example 2-5 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Comparative Example 2-6 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm).
Furthermore, in Table 23 showing the results of evaluation with 1.1<NA≦1.2, Examples 3-1 and 3-2 are antireflective films satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Example 3-3 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Example 3-4 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Example 3-5 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 185 (nm)<T≦195 (nm). On the other hand, Comparative Examples 3-1 and 3-2 are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Example 3-3 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Comparative Example 3-4 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Comparative Examples 3-5A and 3-5B are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 185 (nm)<T≦195 (nm).
Furthermore, in Table 24 showing the results of evaluation with 1.2<NA≦1.3, Example 4-1 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Example 4-2 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), and Example 4-3 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm). On the other hand, Comparative Example 4-1 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Examples 4-2 and 4-3 are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), and Comparative Example 4-4 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm).
Furthermore, in Table 25 showing the results of evaluation with 1.3<NA≦1.4, Example 5-1 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Example 5-2 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Example 5-3 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Example 5-4 is an antireflective film satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm). On the other hand, Comparative Examples 5-1 and 5-2 are antireflective films not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 45 (nm)<T≦55 (nm), Comparative Example 5-3 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 95 (nm)<T≦105 (nm), Comparative Example 5-4 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 145 (nm)<T≦155 (nm), and Comparative Example 5-5 is an antireflective film not satisfying the conditions of the invention with the silicon oxide film having a thickness (T) of 195 (nm)<T≦205 (nm).
In each of the examples and comparative examples of Tables 21, 22, 22, 23, 24, and 25, the material constituting the upper and lower layers of the antireflective film was SiCOH. The refractive index of each film was measured by an ellipsometer manufactured by SOPRA Corp.
Photoresist ARX2014J manufactured by JRS Co., Ltd. was spin-coated to a thickness of 100 nm as a resist layer on each of the two-layer antireflective films and baked at 105° C. for 60 seconds, and then a top coat material TCX001 manufactured by the same corporation was spin-coated to a thickness of 30 nm as a top coat layer. Then, the whole film was baked at 105° C. for 30 seconds.
Each of the resultant samples was exposed to light by a two-beam interference exposure device. In the two-beam interference exposure device, an ArF excimer laser was used as a light source, and a prism having a triangular or pentagonal sectional shape was disposed on the optical path of laser. Each sample was placed at a distance of 1 mm between the sample and the bottom surface of the prism. For example, when the prism with a triangular sectional shape was used, the apex of the prism was disposed at the center of the laser optical path, and the bottom surface of the prism was opposed to the apex. When laser beams are applied above the prism in the direction to the bottom surface of the prism, the laser beams incident on the two sides of the prism are refracted depending on the angle between the each side and the incident laser beam to change the optical path. The laser beams traveling in different directions are interfered with each other at the bottom surface of the prism to obtain a periodic optical intensity distribution on the sample. As a result, the resist layer is exposed to light. The reduced numerical aperture of the prism used in evaluation with 0.93≦NA≦1.0 was 0.99, the reduced numerical aperture NA of the prism used in evaluation with 1.0<NA≦1.1 was 1.05, the reduced numerical aperture NA of the prism used in evaluation with 1.1<NA≦1.2 was 1.15, the reduced numerical aperture NA of the prism used in evaluation with 1.2<NA≦1.3 was 1.25, and the reduced numerical aperture NA of the prism used in evaluation with 1.3<NA≦1.4 was 1.38.
Furthermore, water was introduced in the distance of 1 mm between each sample and the bottom surface of the prism by means of a capillary phenomenon, and immersion exposure was performed using the water as an immersion liquid.
Each of the samples after exposure was baked at 120° C. for 90 seconds and developed with a standard developer composed of 2.38% TMAH (tetramethylammonium hydroxide) to prepare a sample for resist pattern observation. The shape of the resist layer was observed by observing a section of the broken silicon semiconductor substrate through a scanning electron microscope. At the same time, the precision of the processed shape was measured by a scattered light distribution in the range of 40 μm×40 μm using an optical scattered light meter (SCD-100 manufactured by KLA-Tencor Corporation).
The results of the observation are summarized in Tables 21, 22, 23, 24, and 25 in which a resist pattern having a good rectangular section is shown by symbol A, and a resist pattern having a poor rectangular section is shown by symbol B.
As seen from Tables 21, 22, 23, 24, and 25, the two-layer antireflective film according to any one of the embodiments of the invention is capable of forming a good resist sectional shape, as compared with a two-layer antireflective film not satisfying the conditions of the invention.
As described above, according to any one of the embodiments of the invention, the two-layer antireflective film having a complex refractive index and a thickness within the respective specified ranges is formed between a resist layer and a silicon oxide film formed on a surface of a silicon semiconductor substrate. In this case, the reflectance from the silicon semiconductor substrate may be decreased for the antireflective film corresponding to a predetermined range of the numerical aperture NA of an exposure system, thereby producing a good resist pattern.
Although, in any one of the above-mentioned embodiments, the two-layer antireflective film formed by the plasma-enhanced CVD method is described as an example, the present invention is not limited to this. For example, the two-layer antireflective film may be formed by another method such as a spin coating method or the like.
A semiconductor device was manufactured using the two-layer antireflective film according to any one of the embodiments of the invention. A phase shift mask was used as an exposure mask, and an ArF excimer laser (wavelength λ: 193 nm) was used as a light source for exposure light. Furthermore, a zone illumination method was used. The surface of the resist layer was covered with a water layer, and it was confirmed whether or not a desired pattern could be formed in a resist layer without variation in the line width and shape. As a result, it was found that in any case, a desired pattern can be formed in the resist layer without variation in the line width and shape. In addition, in any case, the reflectance was 0.4% or less.
Specifically, an element separation region having a trench structure was formed. In other words, the two-layer antireflective film was formed on a silicon oxide film formed on a surface of a silicon semiconductor substrate, and a resist layer was formed on the antireflective film and subjected to exposure and development to form the patterned resist layer. Then, the silicon semiconductor substrate on which the silicon oxide film was formed on the surface was etched to a predetermined depth by a RIE method using the patterned resist layer as an etching mask, thereby forming a trench in the silicon semiconductor substrate. Then, an insulating film was formed over the entire surface of the silicon semiconductor substrate including the trench and then removed from the surface of the silicon semiconductor substrate to form an element separation region having a trench structure in which the insulating film was buried in the trench.
Although the invention is described on the basis of the preferred embodiments, the invention is not limited to these embodiments. In each of the embodiments, the constitution of the antireflective film and the thickness and complex refractive index of each layer constituting the antireflective film may be appropriately changed.

## Claims

1. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:
providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below; and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 0.93≦NA ≦1.0, the antireflective film including an upper layer having a complex refractive index N1, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm) , when any one of the combinations of values of [n10, k10, d10, n20, k20, d20]described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the relational expression


{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1;


a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20; and
in the tables below, in the line of “When n1≧n10,n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10,k1m”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”; in the line of “When d1≧d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d20−d2m”.













0.93 ≦ NA ≦ 1.0


2 ≦ T ≦ 15







1/35












Case
1-01
1-02
1-03
1-04
1-05





n10
2.0730
1.8547
1.8612
1.8596
1.7706


k10
0.1156
0.1676
0.1279
0.0953
0.0916


d10 (nm)
23.93
29.84
20.21
19.98
91.02


n20
2.6749
2.1886
1.8193
1.8569
1.9614


k20
1.5696
0.6118
0.4029
0.3274
0.4555


d20 (nm)
9.886
59.76
139.99
190.30
69.22


When n1 ≧ n10, n1m =
0.0910
0.0882
0.0964
0.0950
0.0763


When n1 < n10, n1m =
0.872
0.0704
0.0762
0.0765
0.0467


When k1 ≧ k10, k1m =
0.819
0.0750
0.0869
0.0875
0.0772


When k1 < k10, k1m =
0.0960
0.0840
0.0907
0.0915
0.0546


When d1 ≧ d10, d1m
4.108
7.919
8.786
9.587
17.28


(nm) =


When d1 < d10, d1m
3.280
5.652
6.074
6.698
8.396


(nm) =


When n2 ≧ n20, n2m =
0.2209
0.1796
0.1515
0.1552
0.1445


When n2 < n20, n2m =
0.2126
0.1920
0.1780
0.1777
0.1565


When k2 ≧ k20, k2m =
0.2324
0.2171
0.1921
0.1983
0.1809


When k2 < k20, k2m =
0.1960
0.1512
0.1220
0.1107
0.1235


When d2 ≧ d20, d2m
1.175
13.99
∞
∞
9.907


(nm) =


When d2 < d20, d2m
1.606
9.166
63.12
76.29
9.171


(nm) =










0.93 ≦ NA ≦ 1.0


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.7660
1.7540
1.7206
1.7312
1.7318


k10
0.0861
0.0810
0.0766
0.0743
0.0746


d10 (nm)
89.67
89.26
163.7
158.4
156.0


n20
1.8683
1.7976
2.0073
1.9328
1.8226


k20
0.3142
0.2441
0.9100
0.4029
0.2736


d20 (nm)
129.4
193.6
15.11
69.39
132.3


When n1 ≧
0.0725061
0.0712122
0.0876196
0.0743347
0.0699963


n10, n1m =


When n1 <
0.0454077
0.0429834
0.0318030
0.0375427
0.0339148


n10, n1m =


When k1 ≧
0.0772620
0.0743579
0.0711646
0.0773767
0.0733899


k10, k1m =


When k1 <
0.0551843
0.0575049
0.0410327
0.0412244
0.0408972


k10, k1m =


When d1 ≧
18.782
23.348
40.469
35.317
38.161


d10, d1m


(nm) =


When d1 <
8.456
8.860
9.958
10.342
9.052


d10, d1m


(nm) =


When n2 ≧
0.1498401
0.1584961
0.1682336
0.1348816
0.1376196


n20, n2m =


When n2 <
0.1510144
0.1511060
0.2304688
0.1582874
0.1516028


n20, n2m =


When k2 ≧
0.2049341
0.2252979
0.1710974
0.1537598
0.1868274


k20, k2m =


When k2 <
0.0962390
0.0820935
0.1771240
0.1169067
0.0881860


k20, k2m =


When d2 ≧
∞
∞
3.180
8.501
∞


d20, d2m


(nm) =


When d2 <
17.963
68.303
3.157
8.798
14.016


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


2 ≦ T ≦ 15







2/35












Case
1-11
1-12
1-13
1-14
1-15





n10
1.7235310
1.7093992
1.7192548
1.7183512
1.7097773


k10
0.0712769
0.0595462
0.0668813
0.0690717
0.0638868


d10 (nm)
155.759
237.275
223.222
220.755
221.916


n20
1.7500411
5.0249130
1.9244861
1.7884626
1.7175992


k20
0.2147794
2.4786958
0.3767470
0.2530536
0.2031308


d20 (nm)
197.972
1.776
68.925
134.430
199.649


When n1 ≧
0.0687000
0.1022864
0.0758325
0.0727087
0.0697119


n10, n1m =


When n1 <
0.0322229
0.0397070
0.0389722
0.0346118
0.0564209


n10, n1m =


When k1 ≧
0.0698975
0.0795508
0.0762329
0.0700171
0.0722595


k10, k1m =


When k1 <
0.0415723
0.0393457
0.0338635
0.0308765
0.0321350


k10, k1m =


When d1 ≧
∞
∞
∞
∞
∞


d10, d1m


(nm) =


When d1 <
9.616
78.998
12.815
10.464
72.402


d10, d1m


(nm) =


When n2 ≧
0.1855957
0.5207629
0.1343335
0.1358569
0.2333704


n20, n2m =


When n2 <
0.1501331
0.6523560
0.1703552
0.1672083
0.1693542


n20, n2m =


When k2 ≧
0.2047339
0.5424048
0.1363831
0.1710950
0.1947412


k20, k2m =


When k2 <
0.0758948
0.5487781
0.1192529
0.0892212
0.0778406


k20, k2m =


When d2 ≧
∞
0.325
8.509
∞
∞


d20, d2m


(nm) =


When d2 <
29.087
0.351
7.511
11.451
31.610


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


15 < T ≦ 25












Case
2-01
2-02
2-03
2-04
2-05





n10
1.8890717
1.8040788
1.8569330
1.8246631
1.8713633


k10
0.2231211
0.2224671
0.1887211
0.1852786
0.1359350


d10 (nm)
31.297
38.783
31.358
29.866
20.765


n20
2.2536461
3.4285504
2.3482559
2.0267942
1.8449284


k20
1.9138327
0.7115044
0.7139401
0.6589875
0.4410677


d20 (nm)
8.426
30.090
49.395
61.419
129.533


When n1 ≧
0.0874390
0.0895227
0.0867871
0.0862964
0.0944556


n10, n1m =


When n1 <
0.0734485
0.0679480
0.0711365
0.0665735
0.0748743


n10, n1m =


When k1 ≧
0.0762256
0.0781921
0.0754639
0.0735010
0.0845789


k10, k1m =


When k1 <
0.0847852
0.0785486
0.0835657
0.0812061
0.0905493


k10, k1m =


When d1 ≧
5.734
7.070
7.156
8.156
8.180


d10, d1m


(nm) =


When d1 <
4.509
5.331
5.325
5.713
5.655


d10, d1m


(nm) =


When n2 ≧
0.3151672
0.1904419
0.1878015
0.1893945
0.1561475


n20, n2m =


When n2 <
0.3095313
0.2189575
0.2044202
0.1933459
0.1801416


n20, n2m =


When k2 ≧
0.3390149
0.2463513
0.2322900
0.2311047
0.2037732


k20, k2m =


When k2 <
0.3041187
0.1774133
0.1676416
0.1568945
0.1265381


k20, k2m =


When d2 ≧
1.987
2.182
8.431
∞
∞


d20, d2m


(nm) =


When d2 <
1.727
2.068
6.571
10.427
56.577


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


15 < T ≦ 25







3/35












Case
2-06
2-07
2-08
2-09
2-10





n10
1.8537764
1.8773918
1.7913209
1.7961812
1.7719309


k10
0.1095380
0.0811836
0.1069315
0.0967122
0.0907051


d10 (nm)
19.190
15.072
93.104
91.592
89.644


n20
1.8083352
1.7885130
2.1120296
2.2985234
1.8982310


k20
0.3385915
0.2812935
1.5705728
0.5621108
0.3437292


d20 (nm)
190.096
250.952
8.709
49.876
119.550


When n1 ≧
0.0970691
0.1116003
0.0785193
0.0746387
0.0710254


n10, n1m =


When n1 <
0.0765894
0.0899463
0.0387744
0.0446472
0.0434424


n10, n1m =


When k1 ≧
0.0900769
0.1037891
0.0704041
0.0743225
0.0753088


k10, k1m =


When k1 <
0.0922754
0.0811836
0.0518481
0.0540869
0.0544885


k10, k1m =


When d1 ≧
9.442
8.843
12.610
13.182
16.111


d10, d1m


(nm) =


When d1 <
6.479
6.242
5.884
6.895
7.619


d10, d1m


(nm) =


When n2 ≧
0.1545007
0.1511414
0.2353479
0.1499768
0.1563330


n20, n2m =


When n2 <
0.1780847
0.1773486
0.2901843
0.1659082
0.1527185


n20, n2m =


When k2 ≧
0.1867920
0.1671802
0.2909924
0.1840894
0.2027185


k20, k2m =


When k2 <
0.1126624
0.1034778
0.2557275
0.1387183
0.1013330


k20, k2m =


When d2 ≧
∞
∞
1.972
5.095
∞


d20, d2m


(nm) =


When d2 <
76.056
121.855
1.716
4.880
15.622


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


15 < T ≦ 25












Case
2-11
2-12
2-13
2-14
2-15





n10
1.7573553
1.7321027
1.7251448
1.7347815
1.7337052


k10
0.0844391
0.0771807
0.0782108
0.0789970
0.0782079


d10 (nm)
89.273
89.432
166.474
158.854
156.164


n20
1.8090385
1.7181480
2.6560327
2.0166404
1.8413069


k20
0.2599016
0.2108133
2.0752579
0.4697089
0.2975845


d20 (nm)
184.203
254.601
4.495
58.957
122.955


When n1 ≧
0.0699780
0.0690137
0.0832959
0.0721558
0.0683105


n10, n1m =


When n1 <
0.0410315
0.0429553
0.0305981
0.0341260
0.0308228


n10, n1m =


When k1 ≧
0.0723608
0.0738831
0.0729456
0.0742798
0.0703467


k10, k1m =


When k1 <
0.0569189
0.0588879
0.0382764
0.0397253
0.0396069


k10, k1m =


When d1 ≧
21.648
30.736
32.939
31.041
34.229


d10, d1m


(nm) =


When d1 <
8.068
11.084
9.096
8.972
7.917


d10, d1m


(nm) =


When n2 ≧
0.1631897
0.1805151
0.3419739
0.1438672
0.1358447


n20, n2m =


When n2 <
0.1518018
0.1480249
0.4228455
0.1667273
0.1539514


n20, n2m =


When k2 ≧
0.2316443
0.1895435
0.3584204
0.1604712
0.1864905


k20, k2m =


When k2 <
0.0850049
0.0772852
0.3668774
0.1323413
0.0930493


k20, k2m =


When d2 ≧
∞
∞
0.935
6.683
16.067


d20, d2m


(nm) =


When d2 <
28.321
80.547
0.940
6.845
12.170


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


15 < T ≦ 25







4/35












Case
2-16
2-17
2-18
2-19
2-20





n10
1.7245076
1.7100620
1.7130788
1.7208745
1.7192161


k10
0.0739010
0.0639207
0.0658962
0.0708686
0.0720786


d10 (nm)
155.712
155.553
233.281
223.560
220.745


n20
1.7533528
1.6863114
3.3653368
1.9877972
1.7983405


k20
0.2275719
0.1891021
2.7431658
0.4366658
0.2740582


d20 (nm)
189.273
256.528
2.501
59.393
125.643


When n1 ≧
0.0671997
0.0648059
0.0864783
0.0735278
0.0707983


n10, n1m =


When n1 <
0.0293323
0.0484583
0.0327734
0.0316724
0.0279663


n10, n1m =


When k1 ≧
0.0671045
0.0758130
0.0759729
0.0721252
0.0662109


k10, k1m =


When k1 <
0.0403235
0.0462146
0.0340283
0.0320007
0.0290771


k10, k1m =


When d1 ≧
∞
∞
∞
∞
∞


d10, d1m


(nm) =


When d1 <
8.393
77.190
14.014
10.040
8.344


d10, d1m


(nm) =


When n2 ≧
0.1922314
0.2150586
0.5377722
0.1455798
0.1365283


n20, n2m =


When n2 <
0.1495129
0.1388159
0.5848816
0.1787549
0.1689587


n20, n2m =


When k2 ≧
0.2035803
0.1600281
0.4555420
0.1361926
0.1635962


k20, k2m =


When k2 <
0.0785095
0.0698242
0.5466174
0.1332434
0.0942200


k20, k2m =


When d2 ≧
∞
∞
0.540
6.979
∞


d20, d2m


(nm) =


When d2 <
26.645
77.267
0.568
6.255
9.480





d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


15 < T ≦ 25











Case
2-21
2-22







n10
1.7100814
1.7028062



k10
0.0661341
0.0572529



d10 (nm)
221.783
219.613



n20
1.7179584
1.6741304



k20
0.2146738
0.1784680



d20 (nm)
191.114
256.090



When n1 ≧ n10, n1m =
0.0687488
0.0693079



When n1 < n10, n1m =
0.0502954
0.0688196



When k1 ≧ k10, k1m =
0.0691418
0.0820508



When k1 < k10, k1m =
0.0305945
0.0409924



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
70.999
88.114



When n2 ≧ n20, n2m =
0.2426611
0.2482605



When n2 < n20, n2m =
0.1649829
0.1563098



When k2 ≧ k20, k2m =
0.1903906
0.1488330



When k2 < k20, k2m =
0.0805981
0.0682654



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
28.403
77.092






















0.93 ≦ NA ≦ 1.0


25 < T ≦ 35







5/35












Case
3-01
3-02
3-03
3-04
3-05





n10
1.7462297
1.7852920
1.8064124
1.8761841
1.8732427


k10
0.2650661
0.2379686
0.2063789
0.1465026
0.1107685


d10 (nm)
38.584
38.995
31.400
22.050
18.888


n20
1.8811342
3.2453891
2.0415396
1.8871554
1.8328297


k20
2.5474890
0.8215227
0.7493942
0.4863835
0.3644393


d20 (nm)
6.719
29.990
55.163
118.487
179.928


When n1 ≧
0.0769434
0.0851318
0.0833228
0.0906799
0.0968079


n10, n1m =


When n1 <
0.0572766
0.0631555
0.0636389
0.0722144
0.0767554


n10, n1m =


When k1 ≧
0.0723669
0.0784412
0.0735730
0.0819336
0.0896667


k10, k1m =


When k1 <
0.0683887
0.0725391
0.0776208
0.0882788
0.0940442


k10, k1m =


When d1 ≧
6.007
6.642
7.652
7.684
8.502


d10, d1m


(nm) =


When d1 <
4.614
4.982
5.411
5.323
5.843


d10, d1m


(nm) =


When n2 ≧
0.4302271
0.2240894
0.2116187
0.1663196
0.1573621


n20, n2m =


When n2 <
0.3679468
0.2518726
0.2012903
0.1828064
0.1779138


n20, n2m =


When k2 ≧
0.4458606
0.2938757
0.2488452
0.2239661
0.1924353


k20, k2m =


When k2 <
0.4071558
0.2090601
0.1700916
0.1317957
0.1155774


k20, k2m =


When d2 ≧
1.849
2.793
∞
∞
∞


d20, d2m


(nm) =


When d2 <
1.467
2.486
8.980
27.259
71.144


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


25 < T ≦ 35












Case
3-06
3-07
3-08
3-09
3-10





n10
1.8809997
1.8353407
1.8107063
1.7800259
1.7589519


k10
0.0844859
0.1336488
0.1074834
0.0966903
0.0885227


d10 (nm)
15.636
86.851
91.200
89.638
89.033


n20
1.8003278
1.6000470
2.5616901
1.9474319
1.8081258


k20
0.2965881
1.7695220
0.6655713
0.3779800
0.2753975


d20 (nm)
241.202
10.059
40.111
109.424
177.335


When n1 ≧
0.1079370
0.0607556
0.0690979
0.0686230
0.0682776


n10, n1m =


When n1 <
0.0864404
0.0389355
0.0418872
0.0404956
0.0386047


n10, n1m =


When k1 ≧
0.0999365
0.0690637
0.0736157
0.0727942
0.0702844


k10, k1m =


When k1 <
0.0844859
0.0492517
0.0507898
0.0531238
0.0559766


k10, k1m =


When d1 ≧
8.565
8.192
11.124
13.835
18.997


d10, d1m


(nm) =


When d1 <
5.996
4.465
5.820
6.603
7.278


d10, d1m


(nm) =


When n2 ≧
0.1541260
0.2930249
0.1702905
0.1595251
0.1700037


n20, n2m =


When n2 <
0.1764270
0.2694421
0.1785315
0.1557800
0.1515491


n20, n2m =


When k2 ≧
0.1720203
0.3061462
0.2081555
0.2039343
0.2313416


k20, k2m =


When k2 <
0.1058716
0.3107410
0.1597290
0.1070007
0.0874585


k20, k2m =


When d2 ≧
∞
2.242
3.729
17.032
∞


d20, d2m


(nm) =


When d2 <
115.662
2.067
3.416
13.482
26.550


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


25 < T ≦ 35







6/35












Case
3-11
3-12
3-13
3-14
3-15





n10
1.7385561
1.7392392
1.7355979
1.7252169
1.7185486


k10
0.0961686
0.0859424
0.0828161
0.0770491
0.0788457


d10 (nm)
161.111
158.474
155.982
155.656
229.847


n20
1.8448216
2.1008270
1.8545146
1.7550901
3.2610273


k20
2.2148249
0.5469970
0.3232472
0.2413910
4.4183916


d20 (nm)
5.861
50.862
115.179
181.353
1.558


When n1 ≧
0.0629041
0.0674426
0.0657153
0.0649670
0.0703149


n10, n1m =


When n1 <
0.0253882
0.0295728
0.0268335
0.0256165
0.0220850


n10, n1m =


When k1 ≧
0.0668323
0.0703247
0.0663293
0.0632434
0.0659778


k10, k1m =


When k1 <
0.0332373
0.0369910
0.0375085
0.0384131
0.0277441


k10, k1m =


When d1 ≧
20.469
26.314
30.753
47.147
42.683


d10, d1m


(nm) =


When d1 <
5.969
7.197
6.584
7.042
7.213


d10, d1m


(nm) =


When n2 ≧
0.3836914
0.1608313
0.1425024
0.2021899
0.7624707


n20, n2m =


When n2 <
0.3601526
0.1749219
0.1554919
0.1482849
0.7156897


n20, n2m =


When k2 ≧
0.3156946
0.1638635
0.1816882
0.2013940
0.5159863


k20, k2m =


When k2 <
0.4014783
0.1464551
0.0974072
0.0811682
0.8313574


k20, k2m =


When d2 ≧
1.291
5.616
13.990
∞
0.296


d20, d2m


(nm) =


When d2 <
1.319
5.535
10.236
24.868
0.387


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


25 < T ≦ 35










Case
3-16
3-17
3-18





n10
1.7228369
1.7199449
1.7101979


k10
0.0769315
0.0760859
0.0687675


d10 (nm)
222.858
220.491
221.639


n20
2.0210736
1.8037789
1.7165312


k20
0.5011654
0.2965908
0.2274377


d20 (nm)
52.892
118.134
183.246


When n1 ≧ n10, n1m =
0.0694470
0.0680798
0.0669543


When n1 < n10, n1m =
0.0241309
0.0211279
0.0442908


When k1 ≧ k10, k1m =
0.0659106
0.0606384
0.0650562


When k1 < k10, k1m =
0.0287354
0.0259912
0.0284460


When d1 ≧ d10, d1m (nm) =
∞
∞
∞


When d1 < d10, d1m (nm) =
7.193
6.146
69.475


When n2 ≧ n20, n2m =
0.1641553
0.1445947
0.2568982


When n2 < n20, n2m =
0.1866541
0.1696143
0.1583826


When k2 ≧ k20, k2m =
0.1286877
0.1503394
0.1843665


When k2 < k20, k2m =
0.1457922
0.0990405
0.0813123


When d2 ≧ d20, d2m (nm) =
6.290
17.763
∞


When d2 < d20, d2m (nm) =
5.002
7.323
26.072





















0.93 ≦ NA ≦ 1.0


35 < T ≦ 45







7/35












Case
4-01
4-02
4-03
4-04
4-05





n10
1.8047095
1.8098021
1.8915289
1.8869810
1.8679863


k10
0.2694194
0.2379756
0.1677232
0.1583242
0.1633407


d10 (nm)
36.421
31.711
26.420
22.598
22.571


n20
2.9911125
2.1295160
2.1348336
1.9270572
1.8682373


k20
1.0218786
0.9059492
0.5678980
0.5352831
0.5190358


d20 (nm)
30.087
46.199
93.459
108.068
112.596


When n1 ≧
0.0783740
0.0796436
0.0844666
0.0882751
0.0886218


n10, n1m =


When n1 <
0.0596716
0.0601453
0.0678638
0.0698572
0.0685303


n10, n1m =


When k1 ≧
0.0745129
0.0734180
0.0774060
0.0809473
0.0815564


k10, k1m =


When k1 <
0.0737073
0.0756104
0.0846094
0.0871533
0.0855286


k10, k1m =


When d1 ≧
5.498
6.440
6.660
7.044
7.454


d10, d1m


(nm) =


When d1 <
4.112
4.536
4.657
4.822
5.013


d10, d1m


(nm) =


When n2 ≧
0.2827258
0.2488782
0.2107483
0.1777197
0.1733423


n20, n2m =


When n2 <
0.2979187
0.2268945
0.2048547
0.1904834
0.1888538


n20, n2m =


When k2 ≧
0.3686462
0.2854443
0.2568164
0.2416882
0.2270508


k20, k2m =


When k2 <
0.2566187
0.1919458
0.1493335
0.1371973
0.1348743


k20, k2m =


When d2 ≧
4.536
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
3.441
7.549
17.368
24.447
26.666


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


35 < T ≦ 45












Case
4-06
4-07
4-08
4-09
4-10





n10
1.8894047
1.9013640
1.7974174
1.7778270
1.7589001


k10
0.1134244
0.0821095
0.1211843
0.1038067
0.0931193


d10 (nm)
18.623
14.880
88.331
88.747
88.775


n20
1.8513003
1.8106171
2.0615819
1.9023003
1.8006679


k20
0.3877744
0.3102506
0.7049601
0.4013081
0.2880356


d20 (nm)
170.528
232.433
48.141
106.512
170.885


When n1 ≧
0.0963379
0.1102368
0.0634644
0.0662390
0.0666211


n10, n1m =


When n1 <
0.0760864
0.0881848
0.0372961
0.0368457
0.0352515


n10, n1m =


When k1 ≧
0.0891541
0.1015222
0.0717737
0.0709473
0.0673779


k10, k1m =


When k1 <
0.0954272
0.0821095
0.0478455
0.0509119
0.0546045


k10, k1m =


When d1 ≧
7.796
7.721
10.517
12.746
16.898


d10, d1m


(nm) =


When d1 <
5.302
5.383
5.078
5.794
6.421


d10, d1m


(nm) =


When n2 ≧
0.1607617
0.1549121
0.2063647
0.1805920
0.1791541


n20, n2m =


When n2 <
0.1802881
0.1767310
0.1869873
0.1622900
0.1552356


n20, n2m =


When k2 ≧
0.1971570
0.1718066
0.1998254
0.2205994
0.2284485


k20, k2m =


When k2 <
0.1177856
0.1071863
0.1537903
0.1082654
0.0890710


k20, k2m =


When d2 ≧
∞
∞
7.208
∞
∞


d20, d2m


(nm) =


When d2 <
68.041
110.260
5.967
13.288
26.909


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


35 < T ≦ 45







8/35












Case
4-11
4-12
4-13
4-14
4-15





n10
1.7310401
1.7404520
1.7353985
1.7244370
1.7094852


k10
0.0827558
0.0960720
0.0882239
0.0802890
0.0677575


d10 (nm)
89.146
155.339
154.960
155.397
155.056


n20
1.7041670
1.9461112
1.8293633
1.7457172
1.6751093


k20
0.2282102
0.5942640
0.3421815
0.2519901
0.2044537


d20 (nm)
240.157
50.887
110.529
174.646
241.084


When n1 ≧
0.0658081
0.0609131
0.0631018
0.0626184
0.0606677


n10, n1m =


When n1 <
0.0392627
0.0232361
0.0219373
0.0213806
0.0433704


n10, n1m =


When k1 ≧
0.0703406
0.0642554
0.0612463
0.0585852
0.0715100


k10, k1m =


When k1 <
0.0569983
0.0328662
0.0342212
0.0355737
0.0444800


k10, k1m =


When d1 ≧
25.085
16.735
27.723
38.964
∞


d10, d1m


(nm) =


When d1 <
9.551
5.135
5.136
5.707
18.661


d10, d1m


(nm) =


When n2 ≧
0.1952173
0.1934106
0.1684375
0.2170105
0.2364917


n20, n2m =


When n2 <
0.1461670
0.1873682
0.1611987
0.1494055
0.1341663


n20, n2m =


When k2 ≧
0.1811243
0.1365161
0.1602917
0.1917432
0.1477625


k20, k2m =


When k2 <
0.0805774
0.1412585
0.0980115
0.0826819
0.0722742


k20, k2m =


When d2 ≧
∞
6.877
15.552
∞
∞


d20, d2m


(nm) =


When d2 <
77.061
5.982
8.340
24.666
73.559


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


35 < T ≦ 45












Case
4-16
4-17
4-18
4-19
4-20





n10
1.7305468
1.7234847
1.7196555
1.7094719
1.7026367


k10
0.1083688
0.0859582
0.0809985
0.0713058
0.0605694


d10 (nm)
224.105
219.529
219.492
221.454
219.016


n20
3.7612310
1.8940064
1.7865237
1.7085534
1.6670562


k20
9.7520181
0.5381566
0.3130643
0.2375210
0.1929642


d20 (nm)
0.557
52.122
112.555
175.858
239.742


When n1 ≧
0.0498926
0.0642505
0.0656738
0.0636218
0.0649512


n10, n1m =


When n1 <
0.0031824
0.0153259
0.0138647
0.0294287
0.0615662


n10, n1m =


When k1 ≧
0.0271924
0.0553479
0.0526111
0.0605078
0.0781384


k10, k1m =


When k1 <
0.0108813
0.0230212
0.0207922
0.0257751
0.0395862


k10, k1m =


When d1 ≧
12.324
42.526
∞
∞
∞


d10, d1m


(nm) =


When d1 <
0.823
4.181
3.891
14.979
80.387


d10, d1m


(nm) =


When n2 ≧
0.4580664
0.1955493
0.1665735
0.2757410
0.2666089


n20, n2m =


When n2 <
1.0705701
0.1254541
0.1755249
0.1566431
0.1466138


n20, n2m =


When k2 ≧
0.1823242
0.0953308
0.1233594
0.1752612
0.1390967


k20, k2m =


When k2 <
1.8675439
0.1410535
0.1010315
0.0760974
0.0711597


k20, k2m =


When d2 ≧
0.019
7.428
∞
∞
∞


d20, d2m


(nm) =


When d2 <
0.155
3.724
4.890
25.232
73.082


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


45 < T ≦ 55







9/35












Case
5-01
5-02
5-03
5-04
5-05





n10
1.7952075
1.8907711
1.9054716
1.9347861
1.9562331


k10
0.2631488
0.1709411
0.1139096
0.0660701
0.1018371


d10 (nm)
28.407
22.060
18.051
14.149
10.504


n20
1.7975159
1.9054700
1.8637077
1.8512928
1.7371318


k20
0.9080589
0.5625340
0.4032117
0.3248351
0.3049135


d20 (nm)
49.215
101.512
161.182
218.499
238.789


When n1 ≧
0.0796008
0.0882104
0.0968323
0.1120276
0.1430420


n10, n1m =


When n1 <
0.0558337
0.0676855
0.0756775
0.0900916
0.1115369


n10, n1m =


When k1 ≧
0.0737183
0.0824512
0.0899622
0.1015723
0.1322839


k10, k1m =


When k1 <
0.0714771
0.0859058
0.0970459
0.0660701
0.1018371


k10, k1m =


When d1 ≧
6.136
6.696
7.231
6.738
5.941


d10, d1m


(nm) =


When d1 <
3.959
4.421
4.830
4.663
4.082


d10, d1m


(nm) =


When n2 ≧
0.2206628
0.1836475
0.1640088
0.1560229
0.1493176


n20, n2m =


When n2 <
0.2514893
0.2026611
0.1850330
0.1781982
0.1793958


n20, n2m =


When k2 ≧
0.2648120
0.2363086
0.1980701
0.1765576
0.1456726


k20, k2m =


When k2 <
0.1661694
0.1390979
0.1188672
0.1083618
0.1075342


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
11.142
25.966
67.131
101.947
116.324


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


45 < T ≦ 55












Case
5-06
5-07
5-08
5-09
5-10





n10
1.7844085
1.7702622
1.7541370
1.7279592
1.7375980


k10
0.1367381
0.1105738
0.0973387
0.0846136
0.1054836


d10 (nm)
84.299
87.211
88.132
88.943
150.710


n20
1.7096132
1.8115599
1.7670571
1.6883751
1.7055974


k20
0.6495191
0.4022198
0.2903421
0.2308596
0.5608974


d20 (nm)
54.242
106.122
167.020
233.281
53.799


When n1 ≧
0.0647021
0.0659351
0.0664050
0.0646069
0.0607947


n10, n1m =


When n1 <
0.0336169
0.0333887
0.0319458
0.0381165
0.0178674


n10, n1m =


When k1 ≧
0.0728796
0.0707520
0.0653967
0.0692603
0.0616235


k10, k1m =


When k1 <
0.0421851
0.0477087
0.0524451
0.0553516
0.0270422


k10, k1m =


When d1 ≧
9.564
12.156
16.406
23.344
13.595


d10, d1m


(nm) =


When d1 <
4.227
5.119
5.747
9.303
3.589


d10, d1m


(nm) =


When n2 ≧
0.2254211
0.1928967
0.1889099
0.2061182
0.2563867


n20, n2m =


When n2 <
0.1907227
0.1764453
0.1616943
0.1463477
0.1201587


n20, n2m =


When k2 ≧
0.1398059
0.1815479
0.2086975
0.1714539
0.0974426


k20, k2m =


When k2 <
0.1320325
0.1038733
0.0888391
0.0812170
0.1216650


k20, k2m =


When d2 ≧
14.246
∞
∞
∞
10.184


d20, d2m


(nm) =


When d2 <
7.856
11.965
30.548
77.806
4.856


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


45 < T ≦ 55







10/35












Case
5-11
5-12
5-13
5-14
5-15





n10
1.7329681
1.7221048
1.7083331
1.7220084
1.7182277


k10
0.0932680
0.0829100
0.0687145
0.0940320
0.0857940


d10 (nm)
153.145
154.966
154.712
214.741
217.589


n20
1.7707311
1.7249696
1.6656993
1.7051250
1.7452872


k20
0.3436851
0.2554267
0.2071468
0.5097600
0.3145186


d20 (nm)
107.979
168.643
233.037
53.504
108.615


When n1 ≧
0.0625659
0.0612402
0.0592444
0.0643567
0.0658276


n10, n1m =


When n1 <
0.0170984
0.0172632
0.0416833
0.0078064
0.0068054


n10, n1m =


When k1 ≧
0.0565161
0.0540405
0.0705188
0.0454688
0.0426636


k10, k1m =


When k1 <
0.0297095
0.0318542
0.0432507
0.0149841
0.0129956


k10, k1m =


When d1 ≧
26.425
34.880
∞
35.694
∞


d10, d1m


(nm) =


When d1 <
3.834
4.536
17.051
1.969
1.835


d10, d1m


(nm) =


When n2 ≧
0.2299866
0.2362512
0.2473572
0.2585364
0.2705701


n20, n2m =


When n2 <
0.1752441
0.1521826
0.1336328
0.0467419
0.0530518


n20, n2m =


When k2 ≧
0.1260229
0.1759094
0.1395569
0.0560938
0.0808508


k20, k2m =


When k2 <
0.0941040
0.0829492
0.0726111
0.1239917
0.0993604


k20, k2m =


When d2 ≧
∞
∞
∞
10.256
∞


d20, d2m


(nm) =


When d2 <
6.312
26.413
73.432
2.024
2.346


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


45 < T ≦ 55











Case
5-16
5-17







n10
1.7079026
1.7021324



k10
0.0731017
0.0613637



d10 (nm)
221.285
218.642



n20
1.6934483
1.6620357



k20
0.2412999
0.1957858



d20 (nm)
168.585
230.920



When n1 ≧ n10, n1m =
0.0611572
0.0632739



When n1 < n10, n1m =
0.0235156
0.0581824



When k1 ≧ k10, k1m =
0.0566406
0.0776050



When k1 < k10, k1m =
0.0230566
0.0386719



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
8.641
78.699



When n2 ≧ n20, n2m =
0.2946387
0.2760742



When n2 < n20, n2m =
0.1554272
0.1463647



When k2 ≧ k20, k2m =
0.1654895
0.1344739



When k2 < k20, k2m =
0.0676013
0.0719324



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
26.199
53.085






















0.93 ≦ NA ≦ 1.0


55 < T ≦ 65







11/35












Case
6-01
6-02
6-03
6-04
6-05





n10
1.7605068
1.8816347
1.9020430
1.9458467
1.9584022


k10
0.2771672
0.1829378
0.1268282
0.0703715
0.1032605


d10 (nm)
28.706
20.725
16.538
13.048
10.534


n20
1.6786286
1.8151288
1.7976518
1.8275971
1.7382432


k20
0.9008770
0.5496963
0.3935708
0.3251874
0.3086817


d20 (nm)
43.735
99.755
160.685
213.311
229.129


When n1 ≧
0.0840430
0.0931677
0.1035986
0.1192371
0.1431311


n10, n1m =


When n1 <
0.0576428
0.0681458
0.0779578
0.0939172
0.1097058


n10, n1m =


When k1 ≧
0.0662097
0.0857654
0.0958630
0.1068726
0.1305750


k10, k1m =


When k1 <
0.0706262
0.0861902
0.1004041
0.0703715
0.1032605


k10, k1m =


When d1 ≧
6.461
6.864
7.218
6.428
5.908


d10, d1m


(nm) =


When d1 <
4.241
4.337
4.665
4.365
3.988


d10, d1m


(nm) =


When n2 ≧
0.2053870
0.1760388
0.1592407
0.1556714
0.1505713


n20, n2m =


When n2 <
0.2197400
0.2099182
0.1887061
0.1809558
0.1813904


n20, n2m =


When k2 ≧
0.2532373
0.2078381
0.1779785
0.1687073
0.1458105


k20, k2m =


When k2 <
0.1729968
0.1382983
0.1186841
0.1101477
0.1094250


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
9.750
24.367
71.258
104.445
116.852


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


55 < T ≦ 65












Case
6-06
6-07
6-08
6-09
6-10





n10
1.7915017
1.7682864
1.7517777
1.7257399
1.7391311


k10
0.1460711
0.1152280
0.1000283
0.0854213
0.1111219


d10 (nm)
82.108
86.246
87.803
88.823
148.271


n20
1.6599684
1.7730752
1.7495420
1.6774661
1.6415570


k20
0.6598461
0.3999868
0.2902721
0.2313191
0.5493559


d20 (nm)
47.036
100.473
159.986
224.881
47.977


When n1 ≧
0.0707507
0.0678174
0.0671436
0.0642444
0.0613611


n10, n1m =


When n1 <
0.0347034
0.0316797
0.0297241
0.0379114
0.0170081


n10, n1m =


When k1 ≧
0.0716638
0.0707349
0.0637610
0.0688733
0.0614063


k10, k1m =


When k1 <
0.0419373
0.0459045
0.0509448
0.0544250
0.0258569


k10, k1m =


When d1 ≧
8.814
11.596
15.946
22.736
12.264


d10, d1m


(nm) =


When d1 <
3.999
4.706
5.289
9.347
3.219


d10, d1m


(nm) =


When n2 ≧
0.2110352
0.2040027
0.1980566
0.2150256
0.2303101


n20, n2m =


When n2 <
0.1684949
0.1890479
0.1666223
0.1461719
0.0970691


n20, n2m =


When k2 ≧
0.1438293
0.1667627
0.2003491
0.1648621
0.0994629


k20, k2m =


When k2 <
0.1447302
0.1052173
0.0896777
0.0819421
0.1292871


k20, k2m =


When d2 ≧
15.339
∞
∞
∞
12.574


d20, d2m


(nm) =


When d2 <
6.489
10.552
32.474
78.570
4.088


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


55 < T ≦ 65







12/35












Case
6-11
6-12
6-13
6-14
6-15





n10
1.7320844
1.7076855
1.7203924
1.7223192
1.7173463


k10
0.0968192
0.0689521
0.0842770
0.0985051
0.0890019


d10 (nm)
152.055
154.586
154.911
212.081
216.420


n20
1.7411899
1.6612710
1.7118542
1.6387426
1.7205682


k20
0.3409343
0.2081961
0.2561923
0.4904233
0.3116849


d20 (nm)
101.751
223.547
160.544
48.284
102.035


When n1 ≧
0.0640808
0.0590295
0.0609424
0.0598975
0.0677930


n10, n1m =


When n1 <
0.0141614
0.0412158
0.0147046
0.0053711
0.0022900


n10, n1m =


When k1 ≧
0.0532275
0.0702893
0.0510400
0.0410706
0.0340332


k10, k1m =


When k1 <
0.0265625
0.0427490
0.0291602
0.0117297
0.0056226


k10, k1m =


When d1 ≧
25.992
∞
33.192
33.998
50.996


d10, d1m


(nm) =


When d1 <
3.082
16.525
3.853
1.301
0.604


d10, d1m


(nm) =


When n2 ≧
0.2268713
0.2531177
0.2476831
0.2556775
0.2704236


n20, n2m =


When n2 <
0.1878772
0.1338721
0.1536694
0.0287537
0.0146338


n20, n2m =


When k2 ≧
0.1099695
0.1355603
0.1692993
0.0485706
0.0433569


k20, k2m =


When k2 <
0.0948242
0.0734631
0.0770691
0.1286780
0.0774121


k20, k2m =


When d2 ≧
∞
∞
∞
12.209
∞


d20, d2m


(nm) =


When d2 <
4.972
56.744
27.273
1.327
0.772


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


55 < T ≦ 65











Case
6-16
6-17







n10
1.7068337
1.7019545



k10
0.0738736
0.0615388



d10 (nm)
221.446
218.498



n20
1.6845656
1.6606500



k20
0.2425094
0.1970435



d20 (nm)
159.621
220.941



When n1 ≧ n10, n1m =
0.0603540
0.0631677



When n1 < n10, n1m =
0.0209692
0.0568018



When k1 ≧ k10, k1m =
0.0545837
0.0777637



When k1 < k10, k1m =
0.0216589
0.0384106



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
7.750
78.234



When n2 ≧ n20, n2m =
0.3057288
0.2826660



When n2 < n20, n2m =
0.1553943
0.1472412



When k2 ≧ k20, k2m =
0.1625220
0.1326501



When k2 < k20, k2m =
0.0624280
0.0731104



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
26.805
48.201






















0.93 ≦ NA ≦ 1.0


65 < T ≦ 75







13/35












Case
7-01
7-02
7-03
7-04
7-05





n10
1.7659038
1.8645399
1.8986420
1.9431410
1.8260230


k10
0.3040912
0.1945245
0.1330684
0.1068639
0.1610409


d10 (nm)
29.683
22.504
17.099
11.420
82.141


n20
1.6951746
1.8232494
1.7981378
1.7406778
1.8123655


k20
1.0159152
0.5745287
0.4053118
0.3159076
0.8416018


d20 (nm)
32.660
88.735
150.314
217.432
29.750


When n1 ≧
0.0851306
0.0913562
0.1021387
0.1343896
0.0697156


n10, n1m =


When n1 <
0.0579541
0.0649255
0.0759912
0.1029980
0.0329614


n10, n1m =


When k1 ≧
0.0588293
0.0796277
0.0923560
0.1221460
0.0674365


k10, k1m =


When k1 <
0.0718896
0.0854541
0.0996875
0.1068639
0.0435559


k10, k1m =


When d1 ≧
5.966
7.118
7.275
6.222
7.298


d10, d1m


(nm) =


When d1 <
4.222
4.395
4.641
4.200
3.443


d10, d1m


(nm) =


When n2 ≧
0.2227673
0.1853540
0.1622253
0.1538269
0.2762463


n20, n2m =


When n2 <
0.2074731
0.2178162
0.1908838
0.1813525
0.2757544


n20, n2m =


When k2 ≧
0.3106860
0.2340100
0.1838708
0.1497839
0.2030774


k20, k2m =


When k2 <
0.2037939
0.1485229
0.1235767
0.1116138
0.1923645


k20, k2m =


When d2 ≧
∞
∞
∞
∞
12.449


d20, d2m


(nm) =


When d2 <
7.750
24.931
70.207
113.565
5.408


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


65 < T ≦ 75












Case
7-06
7-07
7-08
7-09
7-10





n10
1.7771488
1.7544343
1.7270080
1.7474077
1.7344421


k10
0.1183021
0.1010010
0.0859818
0.1187907
0.0986199


d10 (nm)
86.874
88.257
88.900
148.872
153.031


n20
1.8193233
1.7618403
1.6808707
1.6925268
1.7617910


k20
0.4301648
0.3008540
0.2360835
0.6251022
0.3597954


d20 (nm)
86.325
147.888
214.142
34.244
89.143


When n1 ≧
0.0673694
0.0664294
0.0644080
0.0590649
0.0632410


n10, n1m =


When n1 <
0.0307617
0.0294727
0.0379211
0.0149548
0.0133545


n10, n1m =


When k1 ≧
0.0672144
0.0623938
0.0685620
0.0548840
0.0510083


k10, k1m =


When k1 <
0.0467444
0.0514600
0.0549805
0.0255261
0.0262878


k10, k1m =


When d1 ≧
10.761
15.121
22.543
10.466
24.985


d10, d1m


(nm) =


When d1 <
4.433
5.189
9.219
2.761
2.901


d10, d1m


(nm) =


When n2 ≧
0.2196216
0.2049475
0.2147473
0.2786914
0.2464575


n20, n2m =


When n2 <
0.1907739
0.1643323
0.1459814
0.1244519
0.1858276


n20, n2m =


When k2 ≧
0.1969482
0.2144763
0.1668457
0.1106995
0.1237866


k20, k2m =


When k2 <
0.1161511
0.0943396
0.0836194
0.1556311
0.1032104


k20, k2m =


When d2 ≧
∞
∞
∞
9.505
∞


d20, d2m


(nm) =


When d2 <
10.265
27.730
76.727
3.667
4.914


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


65 < T ≦ 75







14/35












Case
7-11
7-12
7-13
7-14
7-15





n10
1.7082851
1.7212227
1.7256274
1.7180408
1.7074443


k10
0.0693971
0.0845898
0.1038247
0.0895343
0.0742263


d10 (nm)
154.668
155.411
212.824
218.202
221.707


n20
1.6632564
1.7183974
1.6530934
1.7315716
1.6896767


k20
0.2120421
0.2642962
0.5317369
0.3280557
0.2496384


d20 (nm)
213.175
149.129
36.133
89.506
148.627


When n1 ≧
0.0593945
0.0606384
0.0541980
0.0647742
0.0609387


n10, n1m =


When n1 <
0.0413879
0.0149182
0.0029968
0.0021960
0.0208508


n10, n1m =


When k1 ≧
0.0699487
0.0507495
0.0335364
0.0342871
0.0542102


k10, k1m =


When k1 <
0.0433142
0.0298535
0.0082080
0.0055542
0.0221802


k10, k1m =


When d1 ≧
∞
32.689
15.980
48.365
∞


d10, d1m


(nm) =


When d1 <
16.649
3.913
0.723
0.594
7.641


d10, d1m


(nm) =


When n2 ≧
0.2553577
0.2564221
0.2715186
0.1988367
0.3137769


n20, n2m =


When n2 <
0.1341199
0.1522119
0.0214917
0.0208643
0.1570667


n20, n2m =


When k2 ≧
0.1361841
0.1775061
0.0327844
0.0526038
0.1632751


k20, k2m =


When k2 <
0.0749841
0.0809204
0.1462024
0.0801404
0.0667383


k20, k2m =


When d2 ≧
∞
∞
9.604
∞
∞


d20, d2m


(nm) =


When d2 <
57.367
24.447
0.813
0.826
24.310


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


65 < T ≦ 75










Case
7-16







n10
1.7023147



k10
0.0619030



d10 (nm)
218.598



n20
1.6620389



k20
0.2005572



d20 (nm)
210.752



When n1 ≧ n10, n1m =
0.0637036



When n1 < n10, n1m =
0.0577161



When k1 ≧ k10, k1m =
0.0772327



When k1 < k10, k1m =
0.0389124



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
78.427



When n2 ≧ n20, n2m =
0.2845728



When n2 < n20, n2m =
0.1478259



When k2 ≧ k20, k2m =
0.1321912



When k2 < k20, k2m =
0.0745581



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
48.632






















0.93 ≦ NA ≦ 1.0


75 < T ≦ 85







15/35












Case
8-01
8-02
8-03
8-04
8-05





n10
1.7563588
1.8511230
1.8843188
1.9287462
1.8353218


k10
0.3324096
0.2092311
0.1443736
0.1105115
0.1759033


d10 (nm)
35.374
25.991
18.736
12.655
87.389


n20
1.9274523
1.9063465
1.8018968
1.7494498
2.1171648


k20
1.4642575
0.6506745
0.4300566
0.3311673
1.3140425


d20 (nm)
17.251
73.686
139.851
205.772
13.979


When n1 ≧
0.0785156
0.0867322
0.0972815
0.1243994
0.0679163


n10, n1m =


When n1 <
0.0545728
0.0619702
0.0719873
0.0956885
0.0326843


n10, n1m =


When k1 ≧
0.0474365
0.0710938
0.0861206
0.1128003
0.0573657


k10, k1m =


When k1 <
0.0515906
0.0859790
0.0958850
0.1105115
0.0462488


k10, k1m =


When d1 ≧
5.195
7.048
7.475
6.554
6.786


d10, d1m


(nm) =


When d1 <
4.054
4.401
4.771
4.433
3.439


d10, d1m


(nm) =


When n2 ≧
0.3717346
0.2089124
0.1658667
0.1550732
0.3935315


n20, n2m =


When n2 <
0.2566504
0.2226855
0.1899609
0.1803442
0.3930750


n20, n2m =


When k2 ≧
0.3327271
0.2900549
0.1962512
0.1555261
0.4058423


k20, k2m =


When k2 <
0.2814465
0.1644043
0.1285254
0.1140686
0.2980408


k20, k2m =


When d2 ≧
7.242
∞
∞
∞
4.246


d20, d2m


(nm) =


When d2 <
5.453
18.064
63.635
86.244
4.110


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


75 < T ≦ 85












Case
8-06
8-07
8-08
8-09
8-10





n10
1.7950810
1.7627960
1.7313791
1.7608801
1.7394221


k10
0.1221034
0.1022278
0.0877850
0.1266208
0.0996664


d10 (nm)
88.670
88.862
88.999
153.509
155.305


n20
1.9787137
1.8048095
1.6945552
1.9275665
1.8479873


k20
0.5126318
0.3274205
0.2478313
0.9887124
0.4176577


d20 (nm)
67.257
133.479
202.902
15.987
72.839


When n1 ≧
0.0661450
0.0654504
0.0644836
0.0595581
0.0618579


n10, n1m =


When n1 <
0.0313049
0.0305920
0.0369946
0.0131787
0.0145801


n10, n1m =


When k1 ≧
0.0629285
0.0615845
0.0676172
0.0466980
0.0504663


k10, k1m =


When k1 <
0.0495715
0.0531104
0.0563220
0.0260303
0.0287866


k10, k1m =


When d1 ≧
9.764
13.747
21.746
9.118
15.633


d10, d1m


(nm) =


When d1 <
4.261
5.184
8.521
2.425
3.180


d10, d1m


(nm) =


When n2 ≧
0.1949426
0.2017102
0.2072998
0.3193018
0.1671875


n20, n2m =


When n2 <
0.1905188
0.1606116
0.1458716
0.3499829
0.1826196


n20, n2m =


When k2 ≧
0.2324365
0.2397180
0.1749133
0.1658679
0.1587329


k20, k2m =


When k2 <
0.1375964
0.1005615
0.0861584
0.2502869
0.1212964


k20, k2m =


When d2 ≧
11.495
∞
∞
4.383
10.247


d20, d2m


(nm) =


When d2 <
10.836
22.009
72.908
4.573
5.928


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


75 < T ≦ 85







16/35












Case
8-11
8-12
8-13
8-14
8-15





n10
1.7245671
1.7098549
1.7314445
1.7204815
1.7093097


k10
0.0857616
0.0711157
0.1087664
0.0894136
0.0755678


d10 (nm)
155.774
154.844
218.242
220.453
221.580


n20
1.7414131
1.6689951
1.7862714
1.7885409
1.7021793


k20
0.2835597
0.2212317
0.7962122
0.3769446
0.2655853


d20 (nm)
136.971
203.148
18.394
74.763
137.968


When n1 ≧
0.0606116
0.0594177
0.0511572
0.0630383
0.0616895


n10, n1m =


When n1 <
0.0160718
0.0405298
0.0015906
0.0046008
0.0190027


n10, n1m =


When k1 ≧
0.0512000
0.0681555
0.0265222
0.0380334
0.0531970


k10, k1m =


When k1 <
0.0318042
0.0441748
0.0055811
0.0106726
0.0222839


k10, k1m =


When d1 ≧
31.466
∞
12.528
43.958
∞


d10, d1m


(nm) =


When d1 <
4.121
15.106
0.395
1.266
6.425


d10, d1m


(nm) =


When n2 ≧
0.2472620
0.2537585
0.2927209
0.1651587
0.3131763


n20, n2m =


When n2 <
0.1515137
0.1338916
0.0324463
0.1927209
0.1573535


n20, n2m =


When k2 ≧
0.1857507
0.1391650
0.0225110
0.0800281
0.1575110


k20, k2m =


When k2 <
0.0929626
0.0771277
0.2211072
0.1242517
0.0780078


k20, k2m =


When d2 ≧
∞
∞
5.339
11.602
∞


d20, d2m


(nm) =


When d2 <
20.462
30.027
0.679
1.920
20.783


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


75 < T ≦ 85










Case
8-16







n10
1.7029357



k10
0.0634027



d10 (nm)
218.717



n20
1.6626290



k20
0.2083407



d20 (nm)
201.624



When n1 ≧ n10, n1m =
0.0636414



When n1 < n10, n1m =
0.0583008



When k1 ≧ k10, k1m =
0.0748706



When k1 < k10, k1m =
0.0393835



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
77.927



When n2 ≧ n20, n2m =
0.2855005



When n2 < n20, n2m =
0.1457190



When k2 ≧ k20, k2m =
0.1308728



When k2 < k20, k2m =
0.0761951



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
30.691






















0.93 ≦ NA ≦ 1.0


85 < T ≦ 95







17/35












Case
9-01
9-02
9-03
9-04
9-05





n10
1.7289685
1.8452520
1.8988873
1.8877112
1.9267904


k10
0.3314086
0.2255929
0.1475831
0.1535471
0.0947520


d10 (nm)
44.247
26.855
20.944
19.669
15.612


n20
5.1412592
1.9037614
1.8997324
1.8220692
1.8437835


k20
5.4454539
0.7221490
0.4893775
0.4687151
0.3693724


d20 (nm)
1.484
66.898
122.094
129.650
183.529


When n1 ≧
0.0720642
0.0846375
0.0908557
0.0941199
0.1057788


n10, n1m =


When n1 <
0.0586633
0.0599194
0.0695422
0.0700256
0.0833301


n10, n1m =


When k1 ≧
0.0476758
0.0671912
0.0784241
0.0821533
0.0936853


k10, k1m =


When k1 <
0.0453955
0.0846301
0.0932227
0.0950391
0.0947520


k10, k1m =


When d1 ≧
4.793
6.632
6.977
7.158
6.784


d10, d1m


(nm) =


When d1 <
4.550
4.181
4.538
4.591
4.595


d10, d1m


(nm) =


When n2 ≧
1.1337476
0.2089880
0.1771472
0.1681067
0.1597327


n20, n2m =


When n2 <
1.1352368
0.2210583
0.1914734
0.1898022
0.1792920


n20, n2m =


When k2 ≧
0.8630298
0.2922070
0.2387195
0.2089600
0.1845532


k20, k2m =


When k2 <
1.0641260
0.1706519
0.1365454
0.1328516
0.1184924


k20, k2m =


When d2 ≧
0.527
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
0.379
14.827
35.595
55.475
73.593


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


85 < T ≦ 95












Case
9-06
9-07
9-08
9-09
9-10





n10
1.9311024
1.9377300
1.8321358
1.8340055
1.7711711


k10
0.1132645
0.0882760
0.1783607
0.1409526
0.1059247


d10 (nm)
13.318
11.094
92.959
90.549
89.053


n20
1.7624681
1.7478213
3.8484718
2.7003837
1.8505388


k20
0.3523973
0.2927773
3.7040697
0.6754163
0.3612112


d20 (nm)
195.472
252.908
2.442
40.010
121.432


When n1 ≧
0.1192212
0.1370740
0.0646143
0.0640906
0.0642236


n10, n1m =


When n1 <
0.0917322
0.1105750
0.0342749
0.0314893
0.0302832


n10, n1m =


When k1 ≧
0.1074902
0.1261145
0.0537451
0.0578040
0.0599036


k10, k1m =


When k1 <
0.1132645
0.0882760
0.0424707
0.0518921
0.0535962


k10, k1m =


When d1 ≧
6.457
6.373
6.914
7.622
12.267


d10, d1m


(nm) =


When d1 <
4.357
4.610
3.684
3.553
4.848


d10, d1m


(nm) =


When n2 ≧
0.1546643
0.1575439
0.8768713
0.1918994
0.1964832


n20, n2m =


When n2 <
0.1796094
0.1753381
0.8006409
0.2240674
0.1600745


n20, n2m =


When k2 ≧
0.1600171
0.1481116
0.9241052
0.2582642
0.2396375


k20, k2m =


When k2 <
0.1162842
0.1079150
0.8229163
0.1769763
0.1063232


k20, k2m =


When d2 ≧
∞
∞
0.854
4.088
∞


d20, d2m


(nm) =


When d2 <
79.416
123.401
0.636
4.130
18.235


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


85 < T ≦ 95







18/35












Case
9-11
9-12
9-13
9-14
9-15





n10
1.7360863
1.7197908
1.7660895
1.7439719
1.7279356


k10
0.0911204
0.0799131
0.1278221
0.1032091
0.0888807


d10 (nm)
88.900
88.028
159.319
156.425
155.640


n20
1.7067614
1.6618119
4.3535883
1.9650733
1.7635448


k20
0.2637604
0.2120965
4.0919379
0.4980866
0.3088945


d20 (nm)
192.941
257.777
1.526
59.654
126.749


When n1 ≧
0.0638330
0.0656592
0.0584094
0.0605725
0.0597937


n10, n1m =


When n1 <
0.0350525
0.0511377
0.0141675
0.0144019
0.0151697


n10, n1m =


When k1 ≧
0.0655725
0.0796582
0.0444238
0.0479309
0.0488806


k10, k1m =


When k1 <
0.0571082
0.0562439
0.0291333
0.0298792
0.0316455


k10, k1m =


When d1 ≧
20.203
29.484
8.864
13.240
29.427


d10, d1m


(nm) =


When d1 <
7.546
13.995
2.626
3.070
3.728


d10, d1m


(nm) =


When n2 ≧
0.2021118
0.1991125
0.8787561
0.1681836
0.2119507


n20, n2m =


When n2 <
0.1462866
0.1442920
0.9231299
0.1869897
0.1520459


n20, n2m =


When k2 ≧
0.1808130
0.1431189
0.6934375
0.1601843
0.1789355


k20, k2m =


When k2 <
0.0887085
0.0763562
1.0372803
0.1399158
0.0974194


k20, k2m =


When d2 ≧
∞
∞
0.372
7.404
∞


d20, d2m


(nm) =


When d2 <
33.573
81.452
0.412
5.841
17.631


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


85 < T ≦ 95












Case
9-16
9-17
9-18
9-19
9-20





n10
1.7114085
1.7070625
1.7347333
1.7230132
1.7111302


k10
0.0740744
0.0641745
0.1100034
0.0920219
0.0786417


d10 (nm)
154.740
153.245
225.621
220.898
221.002


n20
1.6716288
1.6634512
4.2666617
1.8597675
1.7127614


k20
0.2338686
0.1921909
4.0109081
0.4430799
0.2870105


d20 (nm)
194.347
254.410
1.346
63.229
128.848


When n1 ≧
0.0584460
0.0617004
0.0476050
0.0625842
0.0612109


n10, n1m =


When n1 <
0.0344641
0.0580713
0.0023816
0.0042908
0.0142651


n10, n1m =


When k1 ≧
0.0648608
0.0822974
0.0260010
0.0346094
0.0487000


k10, k1m =


When k1 <
0.0443103
0.0454309
0.0085535
0.0110950
0.0198962


k10, k1m =


When d1 ≧
∞
∞
11.896
40.249
∞


d10, d1m


(nm) =


When d1 <
12.619
28.388
0.607
1.162
4.464


d10, d1m


(nm) =


When n2 ≧
0.2496582
0.2459351
0.6243091
0.1726245
0.1878369


n20, n2m =


When n2 <
0.1333875
0.1351294
0.9687061
0.0992944
0.1569519


n20, n2m =


When k2 ≧
0.1378833
0.1234607
0.1299146
0.0597583
0.1385217


k20, k2m =


When k2 <
0.0791492
0.0682422
1.1651697
0.1405090
0.0853906


k20, k2m =


When d2 ≧
∞
∞
0.085
8.765
∞


d20, d2m


(nm) =


When d2 <
27.415
76.157
0.398
1.778
18.221


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


85 < T ≦ 95







19/35










Case
9-21
9-22
9-23





n10
1.7035342
1.7027484
1.7001226


k10
0.0659797
0.0572097
0.0542621


d10 (nm)
218.617
216.627
277.695


n20
1.6615801
1.6695991
1.6762439


k20
0.2195726
0.1821496
0.1770375


d20 (nm)
193.289
251.116
248.521


When n1 ≧ n10, n1m =
0.0623376
0.0678125
0.0799658


When n1 < n10, n1m =
0.0535010
0.0686682
0.1014282


When k1 ≧ k10, k1m =
0.0710327
0.0861914
0.0881311


When k1 < k10, k1m =
0.0393738
0.0410693
0.0390344


When d1 ≧ d10, d1m (nm) =
∞
∞
∞


When d1 < d10, d1m (nm) =
76.543
86.880
145.024


When n2 ≧ n20, n2m =
0.2919910
0.2682678
0.2949561


When n2 < n20, n2m =
0.1427539
0.1485803
0.2037488


When k2 ≧ k20, k2m =
0.1267480
0.1253760
0.1874854


When k2 < k20, k2m =
0.0781458
0.0670801
0.0719922


When d2 ≧ d20, d2m (nm) =
∞
∞
∞


When d2 < d20, d2m (nm) =
27.736
75.187
78.004










0.93 ≦ NA ≦ 1.0


95 < T ≦ 105












Case
10-01
10-02
10-03
10-04
10-05





n10
1.8593145
1.9010800
1.9204218
1.9438629
1.8201241


k10
0.2496127
0.1636004
0.1149718
0.1088618
0.1437532


d10 (nm)
26.535
19.815
15.218
10.610
89.353


n20
1.9155767
1.8411706
1.7975616
1.7190727
2.3681639


k20
0.8329906
0.5121692
0.3794158
0.2999844
0.7410526


d20 (nm)
59.684
120.535
182.059
250.015
43.212


When n1 ≧
0.0816284
0.0922021
0.1074707
0.1413159
0.0582056


n10, n1m =


When n1 <
0.0571204
0.0681042
0.0820581
0.1125684
0.0261719


n10, n1m =


When k1 ≧
0.0635767
0.0796045
0.0956897
0.1313098
0.0522705


k10, k1m =


When k1 <
0.0810986
0.0930249
0.1101465
0.1088618
0.0503638


k10, k1m =


When d1 ≧
5.728
6.581
6.674
6.005
7.527


d10, d1m


(nm) =


When d1 <
3.587
4.159
4.431
4.306
3.047


d10, d1m


(nm) =


When n2 ≧
0.2110999
0.1699976
0.1589343
0.1579346
0.2155920


n20, n2m =


When n2 <
0.2273865
0.1928259
0.1800378
0.1714307
0.2110571


n20, n2m =


When k2 ≧
0.3068860
0.2171289
0.1741077
0.1426062
0.2751843


k20, k2m =


When k2 <
0.1756396
0.1352295
0.1186548
0.1082129
0.1794531


k20, k2m =


When d2 ≧
∞
∞
∞
∞
5.764


d20, d2m


(nm) =


When d2 <
12.732
34.057
73.872
121.675
5.150


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


95 < T ≦ 105







20/35












Case
10-06
10-07
10-08
10-09
10-10





n10
1.7719135
1.7372876
1.7204595
1.7445424
1.7286821


k10
0.1119845
0.0953951
0.0830085
0.1106490
0.0936244


d10 (nm)
88.526
88.555
87.798
155.347
154.936


n20
1.8420973
1.7021944
1.6574450
1.9643384
1.7602486


k20
0.3885265
0.2779787
0.2209480
0.5665503
0.3317476


d20 (nm)
115.256
185.353
249.744
53.939
119.649


When n1 ≧
0.0621143
0.0621887
0.0641711
0.0553430
0.0576575


n10, n1m =


When n1 <
0.0270313
0.0323645
0.0489441
0.0092163
0.0110840


n10, n1m =


When k1 ≧
0.0562158
0.0627490
0.0779517
0.0376074
0.0417603


k10, k1m =


When k1 <
0.0520581
0.0564075
0.0555945
0.0251758
0.0276855


k10, k1m =


When d1 ≧
11.132
18.518
24.475
10.852
25.311


d10, d1m


(nm) =


When d1 <
4.165
6.637
12.657
1.885
2.611


d10, d1m


(nm) =


When n2 ≧
0.1959729
0.2028772
0.1967151
0.1949902
0.2380078


n20, n2m =


When n2 <
0.1629126
0.1469397
0.1441541
0.1889697
0.1549414


n20, n2m =


When k2 ≧
0.2347974
0.1750098
0.1399744
0.1001758
0.1456445


k20, k2m =


When k2 <
0.1074329
0.0897974
0.0774023
0.1436816
0.0981848


k20, k2m =


When d2 ≧
∞
∞
∞
7.077
∞


d20, d2m


(nm) =


When d2 <
17.579
32.188
79.555
4.014
9.652


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


95 < T ≦ 105












Case
10-11
10-12
10-13
10-14
10-15





n10
1.7117780
1.7072616
1.7114074
1.7035514
1.7027912


k10
0.0773392
0.0664543
0.0830146
0.0688006
0.0591414


d10 (nm)
154.355
152.987
220.011
218.183
216.340


n20
1.6664488
1.6597858
1.7075466
1.6565327
1.6669294


k20
0.2460450
0.2000883
0.3068810
0.2307053
0.1896158


d20 (nm)
186.501
246.239
121.613
185.316
242.803


When n1 ≧
0.0563684
0.0596582
0.0593091
0.0598755
0.0652673


n10, n1m =


When n1 <
0.0298474
0.0556995
0.0074023
0.0481897
0.0654077


n10, n1m =


When k1 ≧
0.0607349
0.0799170
0.0390686
0.0670154
0.0838220


k10, k1m =


When k1 <
0.0430676
0.0448303
0.0134863
0.0384473
0.0405530


k10, k1m =


When d1 ≧
∞
∞
∞
∞
∞


d10, d1m


(nm) =


When d1 <
9.756
23.688
2.192
28.661
83.384


d10, d1m


(nm) =


When n2 ≧
0.2552490
0.2502368
0.2301306
0.3057727
0.2764221


n20, n2m =


When n2 <
0.1325989
0.1345728
0.1592334
0.1419543
0.1480603


n20, n2m =


When k2 ≧
0.1285986
0.1190894
0.0974548
0.1182935
0.1218213


k20, k2m =


When k2 <
0.0799036
0.0691528
0.0735474
0.0793201
0.0682898


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
26.413
74.134
17.074
26.587
73.152


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


105 < T ≦ 115







21/35












Case
11-01
11-02
11-03
11-04
11-05





n10
1.8881577
1.9218914
1.9458883
1.9409291
1.7882093


k10
0.2795127
0.1797398
0.1322078
0.1179060
0.1515662


d10 (nm)
22.871
17.442
13.080
10.849
85.800


n20
1.7550786
1.7746647
1.7478516
1.7108849
1.7933752


k20
0.8705815
0.5227186
0.3833699
0.3088835
0.6703287


d20 (nm)
60.032
119.813
181.809
241.776
55.966


When n1 ≧
0.0826208
0.0977563
0.1186780
0.1376917
0.0543359


n10, n1m =


When n1 <
0.0520789
0.0682861
0.0872974
0.1088391
0.0162500


n10, n1m =


When k1 ≧
0.0630823
0.0841675
0.1052368
0.1278345
0.0453015


k10, k1m =


When k1 <
0.0771240
0.0966394
0.1209399
0.1179060
0.0399414


k10, k1m =


When d1 ≧
4.844
5.864
5.837
5.925
7.044


d10, d1m


(nm) =


When d1 <
2.746
3.528
3.770
4.232
1.998


d10, d1m


(nm) =


When n2 ≧
0.1779102
0.1610864
0.1553113
0.1599890
0.1976709


n20, n2m =


When n2 <
0.2409973
0.1978687
0.1825439
0.1715320
0.2140332


n20, n2m =


When k2 ≧
0.2513745
0.1848108
0.1557214
0.1414282
0.1190186


k20, k2m =


When k2 <
0.1529724
0.1289783
0.1162878
0.1089014
0.1251477


k20, k2m =


When d2 ≧
∞
∞
∞
∞
22.520


d20, d2m


(nm) =


When d2 <
14.459
47.581
76.951
118.169
7.215


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


105 < T ≦ 115












Case
11-06
11-07
11-08
11-09
11-10





n10
1.7649059
1.7337710
1.7199633
1.7259527
1.7103936


k10
0.1193411
0.0996522
0.0855558
0.0989978
0.0800216


d10 (nm)
87.339
88.039
87.477
153.714
153.726


n20
1.7745734
1.6760618
1.6497564
1.7204930
1.6497935


k20
0.3964773
0.2847568
0.2267213
0.3415865
0.2528816


d20 (nm)
113.800
179.842
241.489
115.571
179.482


When n1 ≧
0.0601648
0.0599890
0.0628394
0.0551172
0.0538281


n10, n1m =


When n1 <
0.0211145
0.0296448
0.0487646
0.0042871
0.0282654


n10, n1m =


When k1 ≧
0.0504663
0.0599475
0.0772742
0.0278052
0.0572974


k10, k1m =


When k1 <
0.0475183
0.0544922
0.0541711
0.0166541
0.0416528


k10, k1m =


When d1 ≧
10.266
16.506
22.112
22.094
29.214


d10, d1m


(nm) =


When d1 <
3.195
5.968
12.188
0.978
9.029


d10, d1m


(nm) =


When n2 ≧
0.1995813
0.2097351
0.1798193
0.2563574
0.2736133


n20, n2m =


When n2 <
0.1736548
0.1494116
0.1464758
0.1632507
0.1337610


n20, n2m =


When k2 ≧
0.1791345
0.1568970
0.1341675
0.0805750
0.1130872


k20, k2m =


When k2 <
0.1012146
0.0889111
0.0780908
0.0849402
0.0789160


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
14.312
35.616
79.447
3.314
27.322


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


105 < T ≦ 115







22/35










Case
11-11
11-12
11-13





n10
1.7070930
1.7028018
1.7027432


k10
0.0681638
0.0710148
0.0605235


d10 (nm)
152.585
217.506
215.929


n20
1.6551703
1.6456663
1.6646615


k20
0.2055639
0.2376270
0.1950188


d20 (nm)
237.501
177.429
233.713


When n1 ≧ n10, n1m =
0.0578955
0.0572009
0.0625354


When n1 < n10, n1m =
0.0537671
0.0422668
0.0608704


When k1 ≧ k10, k1m =
0.0790588
0.0645129
0.0827734


When k1 < k10, k1m =
0.0435974
0.0363208
0.0394031


When d1 ≧ d10, d1m (nm) =
∞
∞
∞


When d1 < d10, d1m (nm) =
20.858
18.787
80.567


When n2 ≧ n20, n2m =
0.1279260
0.3212610
0.2872583


When n2 < n20, n2m =
0.1371912
0.1436340
0.1515588


When k2 ≧ k20, k2m =
0.1138037
0.1091870
0.1188855


When k2 < k20, k2m =
0.0699854
0.0793604
0.0696228


When d2 ≧ d20, d2m (nm) =
∞
∞
∞


When d2 < d20, d2m (nm) =
73.529
27.402
72.558










0.93 ≦ NA ≦ 1.0


115 < T ≦ 125












Case
12-01
12-02
12-03
12-04
12-05





n10
1.8909431
1.9524263
1.9741784
1.9011191
1.7812655


k10
0.3085424
0.1909748
0.1389140
0.1449022
0.1647646


d10 (nm)
20.418
15.444
11.832
11.795
82.868


n20
1.5964478
1.7414925
1.7353816
1.6673230
1.6154117


k20
0.8353138
0.5288169
0.3892797
0.3043383
0.6141968


d20 (nm)
60.909
116.361
176.360
237.538
58.066


When n1 ≧
0.0896326
0.1058130
0.1273743
0.1294861
0.0526233


n10, n1m =


When n1 <
0.0482068
0.0693359
0.0898755
0.1018958
0.0089111


n10, n1m =


When k1 ≧
0.0687769
0.0897180
0.1101831
0.1230750
0.0397290


k10, k1m =


When k1 <
0.0788684
0.1029199
0.1292102
0.1244238
0.0264612


k10, k1m =


When d1 ≧
4.348
5.029
5.176
6.485
6.077


d10, d1m


(nm) =


When d1 <
2.275
2.981
3.260
4.641
1.033


d10, d1m


(nm) =


When n2 ≧
0.1653235
0.1570801
0.1545581
0.1637158
0.2122083


n20, n2m =


When n2 <
0.1924231
0.2075879
0.1868823
0.1636792
0.1151331


n20, n2m =


When k2 ≧
0.1706042
0.1628406
0.1476868
0.1368591
0.0534973


k20, k2m =


When k2 <
0.1411853
0.1262378
0.1172034
0.1087061
0.1078625


k20, k2m =


When d2 ≧
∞
∞
∞
∞
22.263


d20, d2m


(nm) =


When d2 <
15.932
41.005
77.327
119.056
3.631


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


115 < T ≦ 125







23/35












Case
12-06
12-07
12-08
12-09
12-10





n10
1.7599364
1.7294022
1.7193592
1.7088052
1.7070991


k10
0.1268761
0.1028924
0.0869972
0.0815889
0.0689994


d10 (nm)
86.158
87.627
87.259
153.347
152.325


n20
1.7200975
1.6470339
1.6442041
1.6346844
1.6535493


k20
0.3928633
0.2862372
0.2301394
0.2563356
0.2091466


d20 (nm)
111.244
173.600
231.990
171.193
227.454


When n1 ≧
0.0606738
0.0583850
0.0624988
0.0517444
0.0574902


n10, n1m =


When n1 <
0.0144922
0.0280688
0.0507288
0.0284387
0.0507019


n10, n1m =


When k1 ≧
0.0425989
0.0573376
0.0776721
0.0554700
0.0798230


k10, k1m =


When k1 <
0.0406250
0.0512256
0.0527991
0.0388428
0.0424304


k10, k1m =


When d1 ≧
9.315
15.226
20.570
23.760
∞


d10, d1m


(nm) =


When d1 <
2.129
5.657
12.499
8.630
19.101


d10, d1m


(nm) =


When n2 ≧
0.2113904
0.2168030
0.1303113
0.0779236
0.1123853


n20, n2m =


When n2 <
0.1965198
0.1502832
0.1490173
0.1347925
0.1407104


n20, n2m =


When k2 ≧
0.1312354
0.1404419
0.1299280
0.1034583
0.1115356


k20, k2m =


When k2 <
0.0975891
0.0892358
0.0798267
0.0797656
0.0721289


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
8.212
56.813
80.756
28.524
74.263


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


115 < T ≦ 125











Case
12-11
12-12







n10
1.7021164
1.7030336



k10
0.0722203
0.0611451



d10 (nm)
217.158
215.722



n20
1.6379690
1.6657846



k20
0.2419462
0.1987136



d20 (nm)
168.107
223.276



When n1 ≧ n10, n1m =
0.0559460
0.0616492



When n1 < n10, n1m =
0.0369629
0.0571216



When k1 ≧ k10, k1m =
0.0643591
0.0831226



When k1 < k10, k1m =
0.0338867
0.0383716



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
15.623
78.766



When n2 ≧ n20, n2m =
0.1071765
0.1574146



When n2 < n20, n2m =
0.1467676
0.1563452



When k2 ≧ k20, k2m =
0.1072412
0.1188721



When k2 < k20, k2m =
0.0815015
0.0722400



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
28.758
73.194






















0.93 ≦ NA ≦ 1.0


125 < T ≦ 135







24/35












Case
13-01
13-02
13-03
13-04
13-05





n10
1.8737564
1.9697383
1.9916260
1.9141720
1.7868889


k10
0.3367363
0.2020294
0.1477036
0.1461879
0.1795709


d10 (nm)
20.276
14.764
11.315
11.459
80.605


n20
1.5133470
1.7299638
1.7257470
1.6683491
1.5409994


k20
0.8454522
0.5429087
0.3987910
0.3122132
0.6011754


d20 (nm)
55.480
109.268
168.578
226.037
53.925


When n1 ≧
0.0919055
0.1108435
0.1324426
0.1321936
0.0477332


n10, n1m =


When n1 <
0.0465112
0.0677783
0.0890894
0.1050525
0.0054248


n10, n1m =


When k1 ≧
0.0634827
0.0913306
0.1103125
0.1242993
0.0376343


k10, k1m =


When k1 <
0.0777942
0.1046863
0.1330994
0.1263855
0.0172180


k10, k1m =


When d1 ≧
4.127
4.585
4.757
6.157
5.240


d10, d1m


(nm) =


When d1 <
2.100
2.651
2.937
4.469
0.576


d10, d1m


(nm) =


When n2 ≧
0.1485144
0.1609766
0.1572363
0.1614685
0.1647119


n20, n2m =


When n2 <
0.1669641
0.2206506
0.1915698
0.1618420
0.0427734


n20, n2m =


When k2 ≧
0.1498572
0.1556653
0.1444165
0.1361792
0.0323462


k20, k2m =


When k2 <
0.1523499
0.1322424
0.1219958
0.1118262
0.1188306


k20, k2m =


When d2 ≧
∞
∞
∞
∞
20.169


d20, d2m


(nm) =


When d2 <
11.040
31.054
70.606
112.796
1.698


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


125 < T ≦ 135












Case
13-06
13-07
13-08
13-09
13-10





n10
1.7600620
1.7276490
1.7199953
1.7084320
1.7077870


k10
0.1342170
0.1044918
0.0874837
0.0820944
0.0691595


d10 (nm)
85.615
87.663
87.278
153.448
152.438


n20
1.6974715
1.6338870
1.6452183
1.6304269
1.6574806


k20
0.3980869
0.2915200
0.2346970
0.2625567
0.2137196


d20 (nm)
104.529
164.129
221.092
160.685
216.250


When n1 ≧
0.0556421
0.0573047
0.0630432
0.0509070
0.0582422


n10, n1m =


When n1 <
0.0086938
0.0280566
0.0524658
0.0272729
0.0496997


n10, n1m =


When k1 ≧
0.0327625
0.0552051
0.0782056
0.0552515
0.0808813


k10, k1m =


When k1 <
0.0328357
0.0492957
0.0525903
0.0375085
0.0423645


k10, k1m =


When d1 ≧
8.316
14.598
20.258
22.646
∞


d10, d1m


(nm) =


When d1 <
1.229
5.725
12.785
8.439
18.783


d10, d1m


(nm) =


When n2 ≧
0.2312317
0.1156555
0.1151941
0.0670740
0.1089307


n20, n2m =


When n2 <
0.2128992
0.1481116
0.1498755
0.1344946
0.1425024


n20, n2m =


When k2 ≧
0.1020886
0.1348413
0.1299255
0.1027795
0.1131628


k20, k2m =


When k2 <
0.1027185
0.0927148
0.0827966
0.0840479
0.0754407


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
4.085
34.120
79.786
26.736
37.465


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


125 < T ≦ 135







25/35











Case
13-11
13-12







n10
1.7022055
1.7036940



k10
0.0725208
0.0612465



d10 (nm)
217.368
215.927



n20
1.6389178
1.6705104



k20
0.2487144
0.2029113



d20 (nm)
157.041
212.129



When n1 ≧ n10, n1m =
0.0559827
0.0624561



When n1 < n10, n1m =
0.0346814
0.0563831



When k1 ≧ k10, k1m =
0.0655139
0.0838672



When k1 < k10, k1m =
0.0329700
0.0384436



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
14.691
78.542



When n2 ≧ n20, n2m =
0.0987000
0.1459375



When n2 < n20, n2m =
0.1477222
0.1585510



When k2 ≧ k20, k2m =
0.1107947
0.1206909



When k2 < k20, k2m =
0.0868396
0.0754724



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
26.886
30.205











0.93 ≦ NA ≦ 1.0


135 < T ≦ 145












Case
14-01
14-02
14-03
14-04
14-05





n10
1.8402862
1.9646387
1.9624104
1.9059084
1.8166660


k10
0.3700261
0.2123233
0.1584699
0.1473615
0.1977639


d10 (nm)
23.403
16.447
12.893
12.089
79.798


n20
1.4966418
1.7618069
1.7211612
1.6694213
1.5572201


k20
1.0039549
0.5971846
0.4176484
0.3203376
0.7204992


d20 (nm)
41.463
94.995
156.173
216.011
40.224


When n1 ≧
0.0906067
0.1022083
0.1191650
0.1272498
0.0481567


n10, n1m =


When n1 <
0.0460486
0.0622925
0.0801978
0.1004968
0.0053052


n10, n1m =


When k1 ≧
0.0548682
0.0821582
0.0987952
0.1188953
0.0360181


k10, k1m =


When k1 <
0.0585999
0.0953162
0.1207214
0.1220581
0.0169287


k10, k1m =


When d1 ≧
4.196
4.611
5.209
6.343
4.539


d10, d1m


(nm) =


When d1 <
2.216
2.591
3.134
4.582
0.509


d10, d1m


(nm) =


When n2 ≧
0.1766626
0.1806128
0.1668896
0.1603455
0.2142871


n20, n2m =


When n2 <
0.1712292
0.2330798
0.1905432
0.1645447
0.0564514


n20, n2m =


When k2 ≧
0.2110498
0.1844238
0.1540930
0.1380908
0.0433691


k20, k2m =


When k2 <
0.1916614
0.1446765
0.1279346
0.1140405
0.1534607


k20, k2m =


When d2 ≧
∞
∞
∞
∞
18.289


d20, d2m


(nm) =


When d2 <
8.143
21.467
66.145
96.079
1.264


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


135 < T ≦ 145







26/35












Case
14-06
14-07
14-08
14-09
14-10





n10
1.7655719
1.7293285
1.7214396
1.7092770
1.7085071


k10
0.1384976
0.1055583
0.0882507
0.0826318
0.0697446


d10 (nm)
86.596
87.952
87.451
153.805
152.663


n20
1.7129955
1.6364176
1.6482275
1.6322979
1.6592624


k20
0.4320226
0.3040668
0.2416232
0.2733763
0.2197085


d20 (nm)
91.539
153.339
210.993
150.296
206.543


When n1 ≧
0.0570667
0.0566760
0.0630505
0.0509021
0.0584448


n10, n1m =


When n1 <
0.0070447
0.0278870
0.0524426
0.0272241
0.0508081


n10, n1m =


When k1 ≧
0.0284875
0.0544165
0.0773682
0.0546399
0.0801599


k10, k1m =


When k1 <
0.0304980
0.0499133
0.0532507
0.0383374
0.0431470


k10, k1m =


When d1 ≧
7.855
14.249
20.142
22.873
∞


d10, d1m


(nm) =


When d1 <
0.972
5.625
12.498
8.268
18.904


d10, d1m


(nm) =


When n2 ≧
0.2760107
0.1009705
0.1137622
0.0657813
0.1088953


n20, n2m =


When n2 <
0.1995349
0.1448511
0.1471863
0.1316589
0.1395239


n20, n2m =


When k2 ≧
0.1305078
0.1378174
0.1321667
0.1037769
0.1143506


k20, k2m =


When k2 <
0.1154834
0.0970654
0.0846460
0.0880420
0.0769495


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
3.137
27.699
76.164
22.775
33.816


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


135 < T ≦ 145











Case
14-11
14-12







n10
1.7027802
1.7041709



k10
0.0728517
0.0617202



d10 (nm)
217.779
216.194



n20
1.6405373
1.6719897



k20
0.2588103
0.2085423



d20 (nm)
146.936
202.593



When n1 ≧ n10, n1m =
0.0566504
0.0631152



When n1 < n10, n1m =
0.0353162
0.0583606



When k1 ≧ k10, k1m =
0.0649280
0.0832544



When k1 < k10, k1m =
0.0337988
0.0392310



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
15.495
79.231



When n2 ≧ n20, n2m =
0.0962402
0.1448450



When n2 < n20, n2m =
0.1459131
0.1542615



When k2 ≧ k20, k2m =
0.1100769
0.1205054



When k2 < k20, k2m =
0.0901184
0.0767920



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
22.790
28.928






















0.93 ≦ NA ≦ 1.0


145 < T ≦ 155







27/35












Case
15-01
15-02
15-03
15-04
15-05





n10
1.8199816
1.9318464
1.9476580
1.9400781
1.9152409


k10
0.4068444
0.2280177
0.1546474
0.1580344
0.1421080


d10 (nm)
29.022
20.237
15.042
15.180
12.506


n20
1.5974175
1.8212470
1.7660961
1.7558824
1.6892699


k20
1.4701111
0.6871951
0.4559575
0.4525330
0.3391765


d20 (nm)
24.558
79.181
140.877
141.749
204.998


When n1 ≧
0.0783313
0.0902905
0.1062402
0.1057410
0.1233240


n10, n1m =


When n1 <
0.0485986
0.0576099
0.0737439
0.0730676
0.0958533


n10, n1m =


When k1 ≧
0.0424463
0.0706348
0.0877539
0.0877856
0.1136047


k10, k1m =


When k1 <
0.0340247
0.0852002
0.1066162
0.1062646
0.1201245


k10, k1m =


When d1 ≧
3.673
5.078
5.535
5.630
6.208


d10, d1m


(nm) =


When d1 <
2.651
2.819
3.357
3.413
4.390


d10, d1m


(nm) =


When n2 ≧
0.2911646
0.2069556
0.1703650
0.1705981
0.1609875


n20, n2m =


When n2 <
0.1897607
0.2328674
0.1899780
0.1895239
0.1746619


n20, n2m =


When k2 ≧
0.2661255
0.2545776
0.1755676
0.1739502
0.1429504


k20, k2m =


When k2 <
0.2599438
0.1612646
0.1333740
0.1331494
0.1167700


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
5.427
21.100
63.576
64.042
84.536


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


145 < T ≦ 155












Case
15-06
15-07
15-08
15-09
15-10





n10
1.8773964
1.7792899
1.7347668
1.7234258
1.7112569


k10
0.2151408
0.1408151
0.1082989
0.0907869
0.0850611


d10 (nm)
81.211
87.880
88.119
87.442
153.930


n20
1.7568637
1.7944868
1.6522930
1.6482492
1.6361524


k20
1.2210655
0.5090378
0.3260600
0.2516544
0.2898839


d20 (nm)
20.666
75.457
142.664
202.556
141.116


When n1 ≧
0.0535974
0.0567944
0.0566736
0.0621204
0.0507385


n10, n1m =


When n1 <
0.0100415
0.0103674
0.0259888
0.0480981
0.0259363


n10, n1m =


When k1 ≧
0.0386597
0.0332520
0.0534692
0.0749170
0.0514124


k10, k1m =


When k1 <
0.0268323
0.0369287
0.0521716
0.0541968
0.0401160


k10, k1m =


When d1 ≧
4.095
7.577
13.934
19.192
22.547


d10, d1m


(nm) =


When d1 <
0.855
1.369
4.946
11.117
7.637


d10, d1m


(nm) =


When n2 ≧
0.4215723
0.2684375
0.1205920
0.1204028
0.0675806


n20, n2m =


When n2 <
0.3791321
0.1854980
0.1442749
0.1439111
0.1298389


n20, n2m =


When k2 ≧
0.1639099
0.2106580
0.1452100
0.1328479
0.0998340


k20, k2m =


When k2 <
0.2423328
0.1335254
0.1007751
0.0850952
0.0900806


k20, k2m =


When d2 ≧
5.052
14.783
∞
∞
∞


d20, d2m


(nm) =


When d2 <
1.977
4.929
23.591
72.330
19.479


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


145 < T ≦ 155







28/35










Case
15-11
15-12
15-13





n10
1.7092054
1.7036310
1.7042855


k10
0.0717413
0.0749476
0.0635030


d10 (nm)
152.725
217.788
216.233


n20
1.6572540
1.6384900
1.6687346


k20
0.2283199
0.2727185
0.2164860


d20 (nm)
198.410
138.609
194.709


When n1 ≧ n10, n1m =
0.0574158
0.0563904
0.0624048


When n1 < n10, n1m =
0.0505359
0.0361853
0.0601721


When k1 ≧ k10, k1m =
0.0766162
0.0604248
0.0800598


When k1 < k10, k1m =
0.0439771
0.0350879
0.0400427


When d1 ≧ d10, d1m (nm) =
∞
∞
∞


When d1 < d10, d1m (nm) =
17.754
14.415
78.936


When n2 ≧ n20, n2m =
0.1103052
0.0951196
0.1487622


When n2 < n20, n2m =
0.1349475
0.1401550
0.1481909


When k2 ≧ k20, k2m =
0.1121790
0.1001306
0.1166199


When k2 < k20, k2m =
0.0769556
0.0916321
0.0768066


When d2 ≧ d20, d2m (nm) =
∞
∞
∞


When d2 < d20, d2m (nm) =
28.953
19.518
28.644










0.93 ≦ NA ≦ 1.0


155 < T ≦ 165












Case
16-01
16-02
16-03
16-04
16-05





n10
1.8175791
1.9193642
1.9516445
1.9419697
1.9282358


k10
0.4385823
0.2501320
0.1607715
0.1648951
0.1504554


d10 (nm)
37.187
21.908
15.944
16.094
12.282


n20
2.9488620
1.8321620
1.7911399
1.7764317
1.6857745


k20
3.6605721
0.7789298
0.4964603
0.4910919
0.3551730


d20 (nm)
5.671
69.456
129.934
131.139
198.143


When n1 ≧
0.0604736
0.0852295
0.1013757
0.1010083
0.1240356


n10, n1m =


When n1 <
0.0333899
0.0547046
0.0713342
0.0704993
0.0944006


n10, n1m =


When k1 ≧
0.0318896
0.0632361
0.0833032
0.0834521
0.1140308


k10, k1m =


When k1 <
0.0127527
0.0803174
0.1011133
0.1007434
0.1227710


k10, k1m =


When d1 ≧
2.684
4.937
5.403
5.524
5.825


d10, d1m


(nm) =


When d1 <
1.056
2.746
3.284
3.349
4.015


d10, d1m


(nm) =


When n2 ≧
0.8885571
0.1992395
0.1663013
0.1663708
0.1592810


n20, n2m =


When n2 <
0.4338977
0.2305408
0.1904468
0.1899951
0.1750964


n20, n2m =


When k2 ≧
0.2239417
0.2871423
0.1858569
0.1831470
0.1419360


k20, k2m =


When k2 <
0.5593811
0.1675525
0.1346912
0.1341003
0.1171777


k20, k2m =


When d2 ≧
2.121
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
1.497
16.789
53.787
54.606
81.510


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


155 < T ≦ 165







29/35












Case
16-06
16-07
16-08
16-09
16-10





n10
1.8704725
1.7960814
1.7418606
1.7257176
1.7136245


k10
0.2299368
0.1479091
0.1134159
0.0948039
0.0896483


d10 (nm)
88.746
88.347
87.888
87.264
153.565


n20
2.8158519
1.9330235
1.6717189
1.6472351
1.6392609


k20
3.0739838
0.6225271
0.3550776
0.2650084
0.3111392


d20 (nm)
4.992
60.492
132.384
194.269
132.434


When n1 ≧
0.0496790
0.0539771
0.0559290
0.0605103
0.0493213


n10, n1m =


When n1 <
0.0158618
0.0116589
0.0229565
0.0427002
0.0176343


n10, n1m =


When k1 ≧
0.0339600
0.0324597
0.0502661
0.0714246
0.0448999


k10, k1m =


When k1 <
0.0196045
0.0413477
0.0524426
0.0547058
0.0377209


k10, k1m =


When d1 ≧
4.203
6.741
12.890
17.512
20.755


d10, d1m


(nm) =


When d1 <
1.412
1.425
4.045
9.285
4.775


d10, d1m


(nm) =


When n2 ≧
0.7568213
0.2080432
0.1385022
0.1276587
0.0653149


n20, n2m =


When n2 <
0.6339124
0.1864246
0.1456726
0.1431897
0.1296729


n20, n2m =


When k2 ≧
0.5784314
0.2482080
0.1472144
0.1310840
0.0863611


k20, k2m =


When k2 <
0.6241199
0.1496924
0.1027478
0.0854395
0.0904016


k20, k2m =


When d2 ≧
1.695
9.818
∞
∞
∞


d20, d2m


(nm) =


When d2 <
1.276
6.130
21.225
35.287
17.454


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


155 < T ≦ 165











Case
16-11
16-12
16-13
16-14





n10
1.7097149
1.7044725
1.7041849
1.7061658


k10
0.0750113
0.0790614
0.0664191
0.0592006


d10 (nm)
152.537
217.265
215.910
215.675


n20
1.6527377
1.6350180
1.6625759
1.6951633


k20
0.2392317
0.2903973
0.2261823
0.1893046


d20 (nm)
190.639
130.687
187.261
240.772


When n1 ≧ n10, n1m =
0.0553772
0.0545740
0.0600366
0.0676270


When n1 < n10, n1m =
0.0477368
0.0344788
0.0568494
0.0690149


When k1 ≧ k10, k1m =
0.0715491
0.0525977
0.0752148
0.0835681


When k1 < k10, k1m =
0.0443665
0.0337817
0.0404053
0.0425281


When d1 ≧ d10, d1m
∞
∞
∞
∞


(nm) =


When d1 < d10, d1m
16.235
12.121
77.039
86.324


(nm) =


When n2 ≧ n20, n2m =
0.1116882
0.0916113
0.1582788
0.1718628


When n2 < n20, n2m =
0.1331189
0.1411133
0.1443433
0.1614490


When k2 ≧ k20, k2m =
0.1061816
0.0827698
0.1097974
0.1248706


When k2 < k20, k2m =
0.0766345
0.0918372
0.0766272
0.0699548


When d2 ≧ d20, d2m
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
27.428
17.505
27.098
73.085


(nm) =





















0.93 ≦ NA ≦ 1.0


165 < T ≦ 175







30/35












Case
17-01
17-02
17-03
17-04
17-05





n10
1.9650460
1.9384951
1.9139584
1.7857662
1.7433983


k10
0.1748342
0.1550287
0.1299465
0.1574086
0.1202381


d10 (nm)
15.368
12.323
11.343
86.539
87.036


n20
1.7719438
1.6895811
1.6883766
1.7907030
1.6559011


k20
0.5219218
0.3734128
0.3007198
0.6497694
0.3733381


d20 (nm)
124.100
189.293
246.427
59.718
125.629


When n1 ≧
0.1023816
0.1220520
0.1341687
0.0495288
0.0535669


n10, n1m =


When n1 <
0.0697961
0.0912976
0.1083984
0.0051111
0.0188965


n10, n1m =


When k1 ≧
0.0830420
0.1112122
0.1288184
0.0186707
0.0452673


k10, k1m =


When k1 <
0.1016052
0.1222986
0.1299465
0.0330212
0.0491577


k10, k1m =


When d1 ≧
5.001
5.526
6.413
5.954
11.233


d10, d1m


(nm) =


When d1 <
2.956
3.739
4.697
0.624
3.144


d10, d1m


(nm) =


When n2 ≧
0.1581653
0.1572925
0.1540161
0.0858301
0.1199121


n20, n2m =


When n2 <
0.1927075
0.1754407
0.1685632
0.1889197
0.1519067


n20, n2m =


When k2 ≧
0.1753381
0.1419458
0.1368945
0.0730774
0.1241467


k20, k2m =


When k2 <
0.1306897
0.1171997
0.1067334
0.1258240
0.0983862


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
51.895
79.651
119.351
3.741
21.467


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


165 < T ≦ 175












Case
17-06
17-07
17-08
17-09
17-10





n10
1.7262549
1.7236673
1.7140199
1.7096017
1.7107217


k10
0.0993784
0.0842645
0.0949670
0.0783956
0.0680252


d10 (nm)
86.812
87.109
152.601
152.026
152.100


n20
1.6373093
1.6685549
1.6238426
1.6437329
1.6799600


k20
0.2753256
0.2274459
0.3258368
0.2483227
0.2063397


d20 (nm)
186.729
241.120
125.450
182.921
236.403


When n1 ≧
0.0583655
0.0638147
0.0459595
0.0526709
0.0601990


n10, n1m =


When n1 <
0.0389001
0.0503784
0.0111768
0.0448047
0.0600891


n10, n1m =


When k1 ≧
0.0685583
0.0805896
0.0359302
0.0672742
0.0800940


k10, k1m =


When k1 <
0.0538513
0.0560901
0.0310425
0.0434424
0.0457349


k10, k1m =


When d1 ≧
15.725
22.939
17.229
∞
∞


d10, d1m


(nm) =


When d1 <
8.012
11.976
2.824
14.351
24.120


d10, d1m


(nm) =


When n2 ≧
0.1242969
0.1275708
0.0486890
0.1084961
0.1263135


n20, n2m =


When n2 <
0.1456055
0.1521838
0.1337903
0.1356079
0.1464233


n20, n2m =


When k2 ≧
0.1234131
0.1338855
0.0591821
0.0969312
0.1151416


k20, k2m =


When k2 <
0.0846008
0.0776428
0.0858325
0.0756372
0.0703125


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
66.105
78.842
17.102
28.470
72.561


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


165 < T ≦ 175







31/35










Case
17-11
17-12
17-13





n10
1.7042582
1.7037677
1.7056779


k10
0.0836625
0.0692974
0.0609868


d10 (nm)
216.186
215.313
215.198


n20
1.6202806
1.6544674
1.6903958


k20
0.3033538
0.2346728
0.1952987


d20 (nm)
123.599
179.446
232.683


When n1 ≧ n10, n1m =
0.0501758
0.0567249
0.0651611


When n1 < n10, n1m =
0.0271130
0.0522852
0.0658081


When k1 ≧ k10, k1m =
0.0439600
0.0710352
0.0811584


When k1 < k10, k1m =
0.0300366
0.0394434
0.0413635


When d1 ≧ d10, d1m (nm) =
∞
∞
∞


When d1 < d10, d1m (nm) =
9.341
23.552
82.870


When n2 ≧ n20, n2m =
0.0785254
0.1613647
0.1758447


When n2 < n20, n2m =
0.1457166
0.1478357
0.1648547


When k2 ≧ k20, k2m =
0.0611975
0.1025415
0.1200317


When k2 < k20, k2m =
0.0887231
0.0762732
0.0707166


When d2 ≧ d20, d2m (nm) =
∞
∞
∞


When d2 < d20, d2m (nm) =
17.421
28.206
71.908










0.93 ≦ NA ≦ 1.0


175 < T ≦ 185












Case
18-01
18-02
18-03
18-04
18-05





n10
1.9750220
1.9943589
1.9365478
1.8874503
1.7406539


k10
0.3055970
0.1905841
0.1715491
0.1503402
0.1271964


d10 (nm)
17.312
13.627
12.200
12.006
86.109


n20
1.6357631
1.7309349
1.6649916
1.6561886
1.6157675


k20
0.8207912
0.5263943
0.3790440
0.2991899
0.3771605


d20 (nm)
66.973
122.033
183.216
242.151
120.682


When n1 ≧
0.0935791
0.1114148
0.1215747
0.1285913
0.0513330


n10, n1m =


When n1 <
0.0459473
0.0702148
0.0894250
0.1026367
0.0144434


n10, n1m =


When k1 ≧
0.0590857
0.0871582
0.1112146
0.1261365
0.0386914


k10, k1m =


When k1 <
0.0823853
0.1098083
0.1208740
0.1243677
0.0453528


k10, k1m =


When d1 ≧
3.436
4.283
5.306
6.728
10.132


d10, d1m


(nm) =


When d1 <
1.707
2.491
3.559
4.870
2.323


d10, d1m


(nm) =


When n2 ≧
0.1368286
0.1494128
0.1559277
0.1523608
0.0829712


n20, n2m =


When n2 <
0.2106677
0.1994727
0.1768091
0.1649011
0.1612537


n20, n2m =


When k2 ≧
0.1566431
0.1521973
0.1368372
0.1332068
0.0933081


k20, k2m =


When k2 <
0.1361353
0.1253687
0.1152344
0.1052795
0.0942554


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
18.814
47.829
81.274
118.000
24.527


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


175 < T ≦ 185







32/35












Case
18-06
18-07
18-08
18-09
18-10





n10
1.7253418
1.7237735
1.7126639
1.7091592
1.7108527


k10
0.1032843
0.0864157
0.0996282
0.0809109
0.0696108


d10 (nm)
86.339
86.885
151.701
151.551
151.827


n20
1.6224018
1.6650124
1.5953952
1.6344497
1.6784072


k20
0.2809650
0.2327133
0.3310599
0.2545275
0.2111338


d20 (nm)
178.956
231.784
118.977
174.271
226.839


When n1 ≧
0.0565039
0.0626416
0.0424548
0.0505127
0.0583557


n10, n1m =


When n1 <
0.0377893
0.0495728
0.0068591
0.0425964
0.0570093


n10, n1m =


When k1 ≧
0.0671277
0.0801477
0.0264331
0.0654321
0.0790332


k10, k1m =


When k1 <
0.0514600
0.0546265
0.0262610
0.0409290
0.0440662


k10, k1m =


When d1 ≧
14.314
20.851
14.034
22.266
∞


d10, d1m


(nm) =


When d1 <
7.519
11.390
1.678
12.457
21.354


d10, d1m


(nm) =


When n2 ≧
0.1133289
0.1230408
0.0286230
0.1046033
0.1258447


n20, n2m =


When n2 <
0.1506311
0.1572058
0.1416589
0.1413440
0.1529517


n20, n2m =


When k2 ≧
0.1148096
0.1304126
0.0346130
0.0907129
0.1118689


k20, k2m =


When k2 <
0.0848999
0.0792493
0.0817810
0.0764514
0.0721448


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
64.642
80.544
18.599
31.028
73.232


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


175 < T ≦ 185










Case
18-11
18-12
18-13





n10
1.7032995
1.7035257
1.7058486


k10
0.0874338
0.0712651
0.0623526


d10 (nm)
215.388
214.888
214.924


n20
1.6000078
1.6490638
1.6902455


k20
0.3100603
0.2413259
0.1999123


d20 (nm)
116.088
170.219
222.958


When n1 ≧ n10, n1m =
0.0459119
0.0540906
0.0637158


When n1 < n10, n1m =
0.0201135
0.0472498
0.0624988


When k1 ≧ k10, k1m =
0.0380823
0.0692078
0.0795654


When k1 < k10, k1m =
0.0261584
0.0371997
0.0400098


When d1 ≧ d10, d1m (nm) =
25.691
∞
∞


When d1 < d10, d1m (nm) =
6.401
18.086
80.109


When n2 ≧ n20, n2m =
0.0666833
0.1564661
0.1701733


When n2 < n20, n2m =
0.1555847
0.1549194
0.1734229


When k2 ≧ k20, k2m =
0.0497668
0.0999182
0.1182764


When k2 < k20, k2m =
0.0866650
0.0781360
0.0731396


When d2 ≧ d20, d2m (nm) =
13.606
∞
∞


When d2 < d20, d2m (nm) =
18.924
29.474
72.740





















0.93 ≦ NA ≦ 1.0


185 < T ≦ 195







33/35












Case
19-01
19-02
19-03
19-04
19-05





n10
2.0157422
1.9298641
1.9158213
1.9035507
1.7387191


k10
0.3310994
0.1874025
0.1413868
0.0919796
0.1333266


d10 (nm)
15.233
12.335
11.496
11.593
85.772


n20
1.5732193
1.6401635
1.6782430
1.7330388
1.5838112


k20
0.8191417
0.3856200
0.3150440
0.2716233
0.3839989


d20 (nm)
66.313
174.874
226.685
274.138
113.170


When n1 ≧
0.0908862
0.1198010
0.1318933
0.1353418
0.0494861


n10, n1m =


When n1 <
0.0435144
0.0881482
0.1071143
0.1119397
0.0110315


n10, n1m =


When k1 ≧
0.0607654
0.1097412
0.1276587
0.1301843
0.0306482


k10, k1m =


When k1 <
0.0886279
0.1159265
0.1266907
0.0919796
0.0445325


k10, k1m =


When d1 ≧
2.825
5.183
6.173
7.339
9.205


d10, d1m


(nm) =


When d1 <
1.353
3.517
4.556
5.508
1.748


d10, d1m


(nm) =


When n2 ≧
0.1250940
0.1513354
0.1454334
0.1421106
0.0499280


n20, n2m =


When n2 <
0.1772742
0.1779919
0.1691821
0.1744556
0.1654175


n20, n2m =


When k2 ≧
0.1164954
0.1335864
0.1351135
0.1421582
0.0743848


k20, k2m =


When k2 <
0.1392041
0.1184119
0.1117639
0.1051697
0.0978845


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
17.571
78.501
112.763
138.595
25.987


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


185 < T ≦ 195












Case
19-06
19-07
19-08
19-09
19-10





n10
1.7256246
1.7253546
1.7287042
1.7096582
1.7121643


k10
0.1055723
0.0874820
0.0760165
0.0821714
0.0705329


d10 (nm)
86.279
86.928
87.515
151.624
152.001


n20
1.6177137
1.6696157
1.7081188
1.6358848
1.6853812


k20
0.2895611
0.2389730
0.2041866
0.2635969
0.2167566


d20 (nm)
168.375
220.361
272.150
162.984
215.233


When n1 ≧
0.0562903
0.0628687
0.0679712
0.0505103
0.0586621


n10, n1m =


When n1 <
0.0396094
0.0498669
0.0509912
0.0389160
0.0543164


n10, n1m =


When k1 ≧
0.0670349
0.0806128
0.0832776
0.0662488
0.0789514


k10, k1m =


When k1 <
0.0491772
0.0538904
0.0576746
0.0390271
0.0434973


k10, k1m =


When d1 ≧
13.425
20.169
39.294
20.568
∞


d10, d1m


(nm) =


When d1 <
7.774
11.144
12.836
11.141
20.056


d10, d1m


(nm) =


When n2 ≧
0.1053076
0.1213562
0.1287134
0.1062195
0.1257849


n20, n2m =


When n2 <
0.1536951
0.1604126
0.1670996
0.1450281
0.1574817


n20, n2m =


When k2 ≧
0.1136377
0.1320007
0.1531152
0.0931067
0.1145862


k20, k2m =


When k2 <
0.0898669
0.0840454
0.0776611
0.0825256
0.0770361


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
45.429
80.918
110.597
30.017
74.310


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


185 < T ≦ 195







34/35












Case
19-11
19-12
19-13
19-14
19-15





n10
1.7151566
1.7029318
1.7041956
1.7070069
1.7080920


k10
0.0645755
0.0900998
0.0721897
0.0633145
0.0595697


d10 (nm)
152.412
215.656
215.114
215.207
215.250


n20
1.7135234
1.5920483
1.6533659
1.6971996
1.7125257


k20
0.1842756
0.3226491
0.2502000
0.2048445
0.1741269


d20 (nm)
268.692
105.543
158.704
211.558
267.229


When n1 ≧
0.0656799
0.0437866
0.0537561
0.0639758
0.0752185


n10, n1m =


When n1 <
0.0585193
0.0130481
0.0437659
0.0602637
0.0712415


n10, n1m =


When k1 ≧
0.0803796
0.0379236
0.0696973
0.0785339
0.0793298


k10, k1m =


When k1 <
0.0475867
0.0209644
0.0354407
0.0397900
0.0383728


k10, k1m =


When d1 ≧
∞
20.412
∞
∞
∞


d10, d1m


(nm) =


When d1 <
76.169
3.912
15.725
78.897
136.900


d10, d1m


(nm) =


When n2 ≧
0.1359851
0.0436487
0.1238757
0.1440674
0.1618445


n20, n2m =


When n2 <
0.1709363
0.1590417
0.1491174
0.1814563
0.2117529


n20, n2m =


When k2 ≧
0.1377368
0.0580493
0.1037561
0.1202234
0.1371057


k20, k2m =


When k2 <
0.0711096
0.0823193
0.0849219
0.0779297
0.0717078


k20, k2m =


When d2 ≧
∞
9.984
∞
∞
∞


d20, d2m


(nm) =


When d2 <
82.771
19.617
23.813
73.684
77.607


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


195 < T ≦ 205












Case
20-01
20-02
20-03
20-04
20-05





n10
1.9115074
1.9153788
1.8712999
1.7275221
1.7279210


k10
0.1960527
0.1490337
0.0897979
0.1065695
0.0881248


d10 (nm)
13.258
11.515
14.536
86.590
87.122


n20
1.6255021
1.6682692
1.7614462
1.6227655
1.6778177


k20
0.3984556
0.3197853
0.2821612
0.3041284
0.2471127


d20 (nm)
164.068
218.507
257.799
156.467
209.069


When n1 ≧
0.1142444
0.1325989
0.1158582
0.0562817
0.0637024


n10, n1m =


When n1 <
0.0852515
0.1080505
0.0942114
0.0426550
0.0501379


n10, n1m =


When k1 ≧
0.1044482
0.1295020
0.1096521
0.0681348
0.0804810


k10, k1m =


When k1 <
0.1084790
0.1269031
0.0897979
0.0488770
0.0543994


k10, k1m =


When d1 ≧
5.346
6.134
8.659
13.270
20.006


d10, d1m


(nm) =


When d1 <
3.730
4.524
6.443
8.305
10.905


d10, d1m


(nm) =


When n2 ≧
0.1424097
0.1416443
0.1412390
0.1051294
0.1236353


n20, n2m =


When n2 <
0.1779224
0.1667200
0.1823743
0.1526196
0.1593042


n20, n2m =


When k2 ≧
0.1351575
0.1341370
0.1542419
0.1188623
0.1364233


k20, k2m =


When k2 <
0.1244714
0.1144324
0.1102271
0.0976929
0.0887854


k20, k2m =


When d2 ≧
∞
∞
∞
∞
∞


d20, d2m


(nm) =


When d2 <
70.107
105.511
128.903
31.502
77.053


d20, d2m


(nm) =





















0.93 ≦ NA ≦ 1.0


195 < T ≦ 205







35/35












Case
20-06
20-07
20-08
20-09
20-10





n10
1.7316602
1.7109076
1.7140510
1.7169074
1.7034522


k10
0.0769958
0.0825870
0.0712311
0.0659464
0.0912009


d10 (nm)
87.563
152.078
152.368
152.739
216.873


n20
1.7153560
1.6429824
1.6947912
1.7201685
1.5969711


k20
0.2092703
0.2767726
0.2239389
0.1888883
0.3506487


d20 (nm)
261.518
151.325
204.003
258.117
92.838


When n1 ≧
0.0685693
0.0512622
0.0601404
0.0671716
0.0436548


n10, n1m =


When n1 <
0.0495715
0.0375720
0.0532251
0.0484131
0.0089709


n10, n1m =


When k1 ≧
0.0827515
0.0683850
0.0790723
0.0783716
0.0369128


k10, k1m =


When k1 <
0.0588892
0.0391077
0.0446033
0.0456335
0.0165588


k10, k1m =


When d1 ≧
35.460
20.848
∞
∞
19.781


d10, d1m


(nm) =


When d1 <
11.967
10.711
16.311
17.445
2.680


d10, d1m


(nm) =


When n2 ≧
0.1321082
0.1010400
0.1225134
0.1362366
0.0345703


n20, n2m =


When n2 <
0.1646814
0.1448950
0.1569727
0.1688831
0.1562476


n20, n2m =


When k2 ≧
0.1585754
0.0998694
0.1194824
0.1443347
0.0797021


k20, k2m =


When k2 <
0.0798230
0.0905042
0.0814771
0.0735376
0.0638440


k20, k2m =


When d2 ≧
∞
∞
∞
∞
10.032


d20, d2m


(nm) =


When d2 <
87.011
25.146
71.899
78.182
16.775


d20, d2m


(nm) =










0.93 ≦ NA ≦ 1.0


195 < T ≦ 205










Case
20-11
20-12
20-13





n10
1.7053294
1.7084550
1.7088490


k10
0.0723641
0.0642090
0.0611230


d10 (nm)
215.802
215.782
215.750


n20
1.6624125
1.7063284
1.7155496


k20
0.2625944
0.2112603
0.1784523


d20 (nm)
147.133
200.541
257.296


When n1 ≧ n10, n1m =
0.0548254
0.0651489
0.0765845


When n1 < n10, n1m =
0.0418201
0.0593726
0.0732715


When k1 ≧ k10, k1m =
0.0710583
0.0775024
0.0765796


When k1 < k10, k1m =
0.0355750
0.0411511
0.0355579


When d1 ≧ d10, d1m (nm) =
∞
∞
∞


When d1 < d10, d1m (nm) =
15.640
79.525
76.637


When n2 ≧ n20, n2m =
0.1192065
0.1417981
0.1626379


When n2 < n20, n2m =
0.1432642
0.1798657
0.2073511


When k2 ≧ k20, k2m =
0.1091699
0.1229614
0.1404065


When k2 < k20, k2m =
0.0923608
0.0791760
0.0746033


When d2 ≧ d20, d2m (nm) =
∞
∞
∞


When d2 < d20, d2m (nm) =
19.545
71.258
73.210.

2. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:
providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below; and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.0 <NA ≦1.1, the antireflective film including an upper layer having a complex refractive index N1, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm) , when any one of the combinations of values of [n10, k10, d10, n20 , k20 , d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the relational expression


{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10) }2+{(n2−n20)/(n2m−n20) }2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20) }2≦1;


a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of dim in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20;and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20; and
in the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”; in the line of “When d1≧d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is ”n20−n2m”; in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d20−d2m”.













1.0 < NA ≦ 1.1


2 ≦ T ≦ 15







1/34












Case
1-01
1-02
1-03
1-04
1-05





n10
2.1002530
1.9014716
1.8817545
1.8713707
1.8894555


k10
0.0458360
0.1897321
0.1528631
0.1131033
0.1025295


d10 (nm)
25.245
35.107
29.787
20.680
13.808


n20
3.6613926
3.6832791
2.2496615
1.8471360
1.7319643


k20
2.0917723
0.6232721
0.5909670
0.3799287
0.2879285


d20 (nm)
4.980
30.030
58.673
139.609
214.126


When n1 ≧ n10, n1m =
0.0805884
0.0768188
0.0754700
0.0824719
0.1060120


When n1 < n10, n1m =
0.0800293
0.0653833
0.0584985
0.0566113
0.0706006


When k1 ≧ k10, k1m =
0.0719092
0.0582312
0.0563574
0.0660449
0.0898218


When k1 < k10, k1m =
0.0458360
0.0865906
0.0835730
0.0866101
0.1025295


When d1 ≧ d10, d1m (nm) =
3.502
5.628
6.909
7.972
7.080


When d1 < d10, d1m (nm) =
2.843
4.121
4.441
4.574
4.198


When n2 ≧ n20, n2m =
0.2511194
0.1375208
0.1500757
0.1234998
0.1256079


When n2 < n20, n2m =
0.2478674
0.1642285
0.1673572
0.1560254
0.1556494


When k2 ≧ k20, k2m =
0.2675171
0.1813342
0.1899841
0.1681030
0.1175488


When k2 < k20, k2m =
0.2241895
0.1363525
0.1337048
0.1033130
0.0926782


When d2 ≧ d20, d2m (nm) =
0.668
1.453
8.618
∞
∞


When d2 < d20, d2m (nm) =
0.632
1.466
7.778
59.745
82.499










1.0 < NA ≦ 1.1


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.8919474
1.8730447
1.7734811
1.7581396
1.7209511


k10
0.0886250
0.0995044
0.0942049
0.0894114
0.0778149


d10 (nm)
14.825
12.107
96.210
94.485
94.005


n20
1.7713589
1.6971361
2.0242448
1.8216770
1.6746822


k20
0.2959415
0.2384266
0.4293783
0.2841737
0.2144041


d20 (nm)
207.437
276.341
66.416
135.446
211.729


When n1 ≧ n10, n1m =
0.1001855
0.1196069
0.0579333
0.0504431
0.0487988


When n1 < n10, n1m =
0.0678418
0.0862451
0.0202832
0.0122217
0.0195996


When k1 ≧ k10, k1m =
0.0828455
0.1086084
0.0429993
0.0327991
0.0449207


When k1 < k10, k1m =
0.0886250
0.0995044
0.0440173
0.0383289
0.0441089


When d1 ≧ d10, d1m (nm) =
7.253
7.622
12.574
14.854
20.756


When d1 < d10, d1m (nm) =
4.294
5.017
3.736
2.430
5.594


When n2 ≧ n20, n2m =
0.1250818
0.1274023
0.1038489
0.1178979
0.0654700


When n2 < n20, n2m =
0.1542432
0.1390320
0.1236121
0.1075012
0.0984851


When k2 ≧ k20, k2m =
0.1281506
0.1059973
0.1023560
0.1052271
0.0726978


When k2 < k20, k2m =
0.0937659
0.0853320
0.1026587
0.0735156
0.0618335


When d2 ≧ d20, d2m (nm) =
∞
∞
5.946
13.526
∞


When d2 < d20, d2m (nm) =
79.532
130.356
6.729
7.895
26.663





















1.0 < NA ≦ 1.1


2 ≦ T ≦ 15







2/34












Case
1-11
1-12
1-13
1-14
1-15





n10
1.7166765
1.7166130
1.7322234
1.7049421
1.7064564


k10
0.0677623
0.0755230
0.0835200
0.0655754
0.0573750


d10 (nm)
92.667
182.689
166.765
163.194
160.636


n20
1.6766991
6.5634515
1.9262925
1.6664527
1.6879767


k20
0.1797231
3.2079655
0.3700807
0.1954874
0.1655431


d20 (nm)
270.198
1.017
69.546
208.736
264.028


When n1 ≧ n10, n1m =
0.0538269
0.0791455
0.0502930
0.0463574
0.0530786


When n1 < n10, n1m =
0.0365198
0.0150903
0.0019495
0.0298389
0.0507080


When k1 ≧ k10, k1m =
0.0633020
0.0382202
0.0176428
0.0426367
0.0606909


When k1 < k10, k1m =
0.0490027
0.0352063
0.0101367
0.0363086
0.0412036


When d1 ≧ d10, d1m (nm) =
∞
44.970
29.513
∞
∞


When d1 < d10, d1m (nm) =
11.921
5.503
0.534
14.465
82.763


When n2 ≧ n20, n2m =
0.0746594
0.3760779
0.0943127
0.0451807
0.0846008


When n2 < n20, n2m =
0.1088159
0.6761377
0.0252344
0.0894604
0.1080103


When k2 ≧ k20, k2m =
0.0728833
0.4281982
0.0109839
0.0413684
0.0543652


When k2 < k20, k2m =
0.0561267
0.6156824
0.0921399
0.0546765
0.0510388


When d2 ≧ d20, d2m (nm) =
∞
0.095
5.760
∞
∞


When d2 < d20, d2m (nm) =
76.266
0.159
0.905
22.049
32.675










1.0 < NA ≦ 1.1


2 ≦ T ≦ 15












Case
1-16
1-17
1-18
1-19
1-20





n10
1.6929499
1.6905856
1.6919500
1.6995270
1.6946661


k10
0.0758677
0.0724871
0.0673580
0.0541447
0.0598692


d10 (nm)
218.538
210.998
207.119
221.890
292.769


n20
1.7888879
1.7113381
1.6973679
1.6914313
5.7902895


k20
0.3373861
0.2424201
0.1951159
0.1602785
2.6464640


d20 (nm)
83.914
155.877
222.394
261.841
1.370


When n1 ≧ n10, n1m =
0.0154590
0.0284326
0.0459937
0.0695007
0.0688428


When n1 < n10, n1m =
0.0644519
0.0618115
0.0647253
0.0614612
0.0576074


When k1 ≧ k10, k1m =
0.0296802
0.0451062
0.0571143
0.0607031
0.0650110


When k1 < k10, k1m =
0.0222290
0.0323779
0.0391223
0.0380823
0.0345483


When d1 ≧ d10, d1m (nm) =
8.212
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
25.706
29.733
39.073
91.262
43.839


When n2 ≧ n20, n2m =
0.1222742
0.1267554
0.1643848
0.2245898
0.7013342


When n2 < n20, n2m =
0.0248633
0.0660693
0.1720679
0.1025806
0.7193848


When k2 ≧ k20, k2m =
0.0580225
0.0965234
0.1267737
0.1053369
0.5239075


When k2 < k20, k2m =
0.0934216
0.0846191
0.0756384
0.0566919
0.6531299


When d2 ≧ d20, d2m (nm) =
16.998
∞
∞
∞
0.304


When d2 < d20, d2m (nm) =
2.716
12.405
72.248
75.278
0.354





















1.0 < NA ≦ 1.1


2 ≦ T ≦ 15







3/34











Case
1-21
1-22
1-23
1-24





n10
1.6927273
1.6938682
1.6959215
1.6965163


k10
0.0641185
0.0632641
0.0601626
0.0560943


d10 (nm)
275.960
269.814
266.236
263.874


n20
1.7993913
1.7248410
1.7076727
1.6984359


k20
0.3510467
0.2487428
0.2009217
0.1709410


d20 (nm)
81.101
150.052
214.823
277.894


When n1 ≧ n10, n1m =
0.0462292
0.0536658
0.0656104
0.0800903


When n1 < n10, n1m =
0.0484851
0.0418225
0.0432129
0.0552332


When k1 ≧ k10, k1m =
0.0620630
0.0619458
0.0615613
0.0629382


When k1 < k10, k1m =
0.0362708
0.0377515
0.0406262
0.0422571


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
29.467
27.448
97.485
175.134


When n2 ≧ n20, n2m =
0.1596558
0.1810303
0.3970593
0.3365332


When n2 < n20, n2m =
0.1100391
0.2908167
0.2424414
0.2178503


When k2 ≧ k20, k2m =
0.1557141
0.1886804
0.2145630
0.2194727


When k2 < k20, k2m =
0.1210901
0.1012720
0.0897449
0.0805957


When d2 ≧ d20, d2m (nm) =
25.591
∞
∞
∞


When d2 < d20, d2m (nm) =
9.432
27.332
78.495
131.894










1.0 < NA ≦ 1.1


15 < T ≦ 25












Case
2-01
2-02
2-03
2-04
2-05





n10
1.8588603
1.8671897
1.8793061
1.8953035
1.8743725


k10
0.2152026
0.2000001
0.1213485
0.0980077
0.1084578


d10 (nm)
37.726
35.681
21.414
14.908
12.201


n20
5.0977045
3.0932325
1.8727645
1.7635602
1.6884757


k20
0.6974562
0.7063642
0.4149520
0.3109442
0.2470663


d20 (nm)
19.647
34.687
129.308
200.446
269.437


When n1 ≧ n10, n1m =
0.0758728
0.0747766
0.0798340
0.0988049
0.1178149


When n1 < n10, n1m =
0.0592542
0.0589661
0.0549634
0.0658325
0.0841418


When k1 ≧ k10, k1m =
0.0598401
0.0578650
0.0632202
0.0814417
0.1076917


When k1 < k10, k1m =
0.0788342
0.0811694
0.0865027
0.0980077
0.1084578


When d1 ≧ d10, d1m (nm) =
5.593
5.891
7.449
6.933
7.359


When d1 < d10, d1m (nm) =
4.233
4.238
4.249
4.053
4.794


When n2 ≧ n20, n2m =
0.1534875
0.1581152
0.1275403
0.1254932
0.1262524


When n2 < n20, n2m =
0.1697559
0.1894849
0.1565967
0.1540796
0.1389709


When k2 ≧ k20, k2m =
0.1955396
0.2168408
0.1812842
0.1267053
0.1044556


When k2 < k20, k2m =
0.1505579
0.1602844
0.1066724
0.0950110
0.0860864


When d2 ≧ d20, d2m (nm) =
0.659
2.512
∞
∞
∞


When d2 < d20, d2m (nm) =
0.674
2.526
26.047
76.118
126.536





















1.0 < NA ≦ 1.1


15 < T ≦ 25







4/34












Case
2-06
2-07
2-08
2-09
2-10





n10
1.7693190
1.8089249
1.7628339
1.7223442
1.7176215


k10
0.1013402
0.1064114
0.0939832
0.0810686
0.0701007


d10 (nm)
103.520
98.052
94.416
93.840
92.613


n20
3.2583829
3.5132584
1.8414170
1.6728089
1.6759231


k20
2.5781374
0.5501157
0.3092618
0.2260423
0.1876577


d20 (nm)
3.121
29.615
125.923
203.086
261.422


When n1 ≧ n10, n1m =
0.0673926
0.0573926
0.0482458
0.0469287
0.0525317


When n1 < n10, n1m =
0.0182031
0.0185083
0.0097595
0.0170142
0.0338733


When k1 ≧ k10, k1m =
0.0401636
0.0390552
0.0281750
0.0413513
0.0608655


When k1 < k10, k1m =
0.0427917
0.0434326
0.0360242
0.0422778
0.0485864


When d1 ≧ d10, d1m (nm) =
13.610
8.991
12.525
18.295
32.066


When d1 < d10, d1m (nm) =
3.396
2.738
1.840
4.621
10.547


When n2 ≧ n20, n2m =
0.2210974
0.0961951
0.1120178
0.0558118
0.0724255


When n2 < n20, n2m =
0.3992041
0.1262915
0.1064856
0.0968689
0.1070728


When k2 ≧ k20, k2m =
0.3438342
0.0862598
0.0939502
0.0666077
0.0700989


When k2 < k20, k2m =
0.3502100
0.1067542
0.0758923
0.0625208
0.0568274


When d2 ≧ d20, d2m (nm) =
0.375
0.986
11.083
∞
∞


When d2 < d20, d2m (nm) =
0.497
1.167
5.972
24.056
73.630










1.0 < NA ≦ 1.1


15 < T ≦ 25












Case
2-11
2-12
2-13
2-14
2-15





n10
1.7053748
1.7067869
1.7234396
1.7309823
1.6924662


k10
0.0681661
0.0592936
0.0819972
0.0887627
0.0804140


d10 (nm)
163.030
160.569
177.819
175.110
219.254


n20
1.6640911
1.6873274
5.0800961
9.5526510
1.8031504


k20
0.2056957
0.1726858
4.2173316
0.4602806
0.3794202


d20 (nm)
200.113
255.377
1.054
10.232
74.951


When n1 ≧ n10, n1m =
0.0438354
0.0515637
0.0646301
0.0589197
0.0054749


When n1 < n10, n1m =
0.0254907
0.0493457
0.0095056
0.0049573
0.0624841


When k1 ≧ k10, k1m =
0.0375134
0.0575159
0.0321326
0.0226172
0.0163196


When k1 < k10, k1m =
0.0331799
0.0410168
0.0264954
0.0199707
0.0128040


When d1 ≧ d10, d1m (nm) =
∞
∞
31.849
25.868
2.747


When d1 < d10, d1m (nm) =
12.067
30.487
3.026
1.416
23.308


When n2 ≧ n20, n2m =
0.0383606
0.0825500
0.3294275
0.0929846
0.1306152


When n2 < n20, n2m =
0.0871460
0.1052795
0.6618042
0.0695691
0.0087109


When k2 ≧ k20, k2m =
0.0339417
0.0505530
0.2910742
0.0198328
0.0299487


When k2 < k20, k2m =
0.0549512
0.0515552
0.6908167
0.0870068
0.0872510


When d2 ≧ d20, d2m (nm) =
∞
∞
0.079
0.102
14.451


When d2 < d20, d2m (nm) =
19.637
29.589
0.186
0.076
0.824





















1.0 < NA ≦ 1.1


15 < T ≦ 25







5/34












Case
2-16
2-17
2-18
2-19
2-20





n10
1.6899914
1.6915311
1.6993450
1.6920076
1.6934597


k10
0.0755734
0.0696615
0.0558443
0.0677866
0.0658489


d10 (nm)
211.286
207.258
221.722
276.645
270.093


n20
1.7113670
1.6964473
1.6905618
1.8143335
1.7261499


k20
0.2592681
0.2049428
0.1670525
0.3967808
0.2668883


d20 (nm)
147.090
213.635
253.347
72.378
141.360


When n1 ≧ n10, n1m =
0.0235022
0.0424463
0.0685596
0.0429663
0.0523279


When n1 < n10, n1m =
0.0594971
0.0645703
0.0572424
0.0479932
0.0410938


When k1 ≧ k10, k1m =
0.0403162
0.0547461
0.0583691
0.0593103
0.0600049


When k1 < k10, k1m =
0.0289734
0.0380127
0.0376013
0.0355176
0.0379749


When d1 ≧ d10, d1m (nm) =
18.036
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
26.582
37.673
84.779
28.006
25.642


When n2 ≧ n20, n2m =
0.1259094
0.1555469
0.2302234
0.1717712
0.1831995


When n2 < n20, n2m =
0.0501526
0.1747144
0.0944592
0.1059167
0.2850769


When k2 ≧ k20, k2m =
0.0866736
0.1221960
0.1032471
0.1537634
0.1870032


When k2 < k20, k2m =
0.0848877
0.0779785
0.0578296
0.1330688
0.1069617


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.935
∞


When d2 < d20, d2m (nm) =
9.771
69.780
73.090
7.607
20.837










1.0 < NA ≦ 1.1


15 < T ≦ 25











Case
2-21
2-22







n10
1.6956703
1.6963391



k10
0.0621151
0.0576411



d10 (nm)
266.327
263.935



n20
1.7069279
1.6975975



k20
0.2113995
0.1780179



d20 (nm)
206.262
269.259



When n1 ≧ n10, n1m =
0.0646936
0.0790869



When n1 < n10, n1m =
0.0423181
0.0536755



When k1 ≧ k10, k1m =
0.0600012
0.0616785



When k1 < k10, k1m =
0.0403015
0.0417126



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
96.199
173.391



When n2 ≧ n20, n2m =
0.4184778
0.3488293



When n2 < n20, n2m =
0.2491736
0.2216455



When k2 ≧ k20, k2m =
0.2142920
0.2197681



When k2 < k20, k2m =
0.0934741
0.0831250



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
76.168
129.228






















1.0 < NA ≦ 1.1


25 < T ≦ 35







6/34












Case
3-01
3-02
3-03
3-04
3-05





n10
1.8231304
1.8934062
1.9014262
1.8787814
1.8198973


k10
0.2426967
0.1289044
0.1029443
0.1135143
0.1197953


d10 (nm)
38.982
22.067
15.306
12.334
96.975


n20
4.7825941
1.9169501
1.7714781
1.6867670
4.7572984


k20
0.7852430
0.4577317
0.3309508
0.2583639
0.6218490


d20 (nm)
19.992
118.684
191.572
261.269
20.274


When n1 ≧ n10, n1m =
0.0699695
0.0767236
0.0951282
0.1154443
0.0479663


When n1 < n10, n1m =
0.0498486
0.0532642
0.0626563
0.0817676
0.0146021


When k1 ≧ k10, k1m =
0.0588489
0.0605774
0.0772998
0.1052600
0.0370215


When k1 < k10, k1m =
0.0707385
0.0857886
0.1011462
0.1135143
0.0364331


When d1 ≧ d10, d1m (nm) =
5.137
6.730
6.574
7.047
7.725


When d1 < d10, d1m (nm) =
3.775
3.826
3.782
4.562
2.005


When n2 ≧ n20, n2m =
0.1872302
0.1343799
0.1259058
0.1236719
0.1156909


When n2 < n20, n2m =
0.2029309
0.1567590
0.1523523
0.1408569
0.1282800


When k2 ≧ k20, k2m =
0.2449841
0.2003137
0.1294177
0.1036865
0.0748242


When k2 < k20, k2m =
0.1832959
0.1099609
0.0962476
0.0870068
0.1199268


When d2 ≧ d20, d2m (nm) =
0.864
∞
∞
∞
0.532


When d2 < d20, d2m (nm) =
0.839
21.916
71.881
121.487
0.552










1.0 < NA ≦ 1.1


25 < T ≦ 35












Case
3-06
3-07
3-08
3-09
3-10





n10
1.7669399
1.7235821
1.7188964
1.7058208
1.7073313


k10
0.0997580
0.0847397
0.0726255
0.0710513
0.0613671


d10 (nm)
94.208
93.618
92.505
162.764
160.462


n20
1.8558060
1.6692590
1.6760484
1.6616172
1.6880654


k20
0.3364471
0.2394056
0.1967286
0.2176394
0.1807904


d20 (nm)
117.969
195.006
252.779
191.801
246.769


When n1 ≧ n10, n1m =
0.0449036
0.0442456
0.0506409
0.0405530
0.0497949


When n1 < n10, n1m =
0.0058435
0.0142969
0.0314514
0.0176917
0.0472620


When k1 ≧ k10, k1m =
0.0200403
0.0369336
0.0583228
0.0316150
0.0541370


When k1 < k10, k1m =
0.0309863
0.0404504
0.0477759
0.0303076
0.0405200


When d1 ≧ d10, d1m (nm) =
10.713
16.167
24.298
∞
∞


When d1 < d10, d1m (nm) =
1.043
3.709
9.337
7.078
23.845


When n2 ≧ n20, n2m =
0.1063135
0.0450122
0.0699963
0.0309314
0.0781641


When n2 < n20, n2m =
0.1037158
0.0932996
0.1043005
0.0818408
0.1014221


When k2 ≧ k20, k2m =
0.0686243
0.0581018
0.0668628
0.0258777
0.0465137


When k2 < k20, k2m =
0.0768091
0.0625977
0.0574854
0.0546838
0.0521045


When d2 ≧ d20, d2m (nm) =
9.637
∞
∞
13.452
∞


When d2 < d20, d2m (nm) =
3.465
21.705
32.653
17.168
25.940



















1.0 < NA ≦ 1.1


25 < T ≦ 35







7/34













Case
3-11
3-12
3-13
3-14
3-15
3-16
















n10
1.6893950
1.6912149
1.6993872
1.6931110
1.6955537
1.6962507


k10
0.0792587
0.0722082
0.0576769
0.0689939
0.0643335
0.0593120


d10 (nm)
211.356
207.241
221.603
270.168
266.333
263.960


n20
1.7121469
1.6964479
1.6911809
1.7281714
1.7074500
1.6977843


k20
0.2795726
0.2163033
0.1749036
0.2885226
0.2235939
0.1860709


d20 (nm)
139.203
205.754
244.825
133.446
198.195
261.024


When n1 ≧ n10, n1m =
0.0187524
0.0389221
0.0673108
0.0502356
0.0624109
0.0782690


When n1 < n10, n1m =
0.0561719
0.0620898
0.0525073
0.0397852
0.0411060
0.0522693


When k1 ≧ k10, k1m =
0.0323267
0.0510889
0.0557678
0.0576538
0.0581616
0.0602515


When k1 < k10, k1m =
0.0242261
0.0363989
0.0368542
0.0366370
0.0397400
0.0408899


When d1 ≧ d10, d1m (nm) =
9.539
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
23.792
36.062
80.743
23.618
94.755
119.700


When n2 ≧ n20, n2m =
0.1258521
0.1531580
0.2394678
0.1860962
0.4430444
0.3636609


When n2 < n20, n2m =
0.0334863
0.1783936
0.0871167
0.1489648
0.2583777
0.2256018


When k2 ≧ k20, k2m =
0.0734656
0.1167761
0.1010718
0.1855286
0.2138647
0.2198901


When k2 < k20, k2m =
0.0783704
0.0804089
0.0594067
0.1140149
0.0979895
0.0864600


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
6.823
66.025
33.786
17.363
72.201
97.445





















1.0 < NA ≦ 1.1


35 < T ≦ 45







8/34












Case
4-01
4-02
4-03
4-04
4-05





n10
1.8741027
1.9162345
1.9099224
1.8839284
1.7973698


k10
0.2292405
0.1358555
0.1141224
0.1193744
0.1226911


d10 (nm)
31.502
21.455
14.789
12.268
93.176


n20
2.4589695
1.9418040
1.7536831
1.6821215
2.1323779


k20
0.9273915
0.4998799
0.3442834
0.2672652
0.6525391


d20 (nm)
39.688
110.373
186.067
253.238
46.828


When n1 ≧ n10, n1m =
0.0646472
0.0749023
0.0953894
0.1145032
0.0393335


When n1 < n10, n1m =
0.0466125
0.0512402
0.0611060
0.0810242
0.0058411


When k1 ≧ k10, k1m =
0.0535095
0.0588599
0.0769971
0.1049219
0.0222083


When k1 < k10, k1m =
0.0782300
0.0839917
0.1022253
0.1138464
0.0267273


When d1 ≧ d10, d1m (nm) =
4.763
5.873
6.052
6.690
7.237


When d1 < d10, d1m (nm) =
3.092
3.244
3.414
4.349
0.847


When n2 ≧ n20, n2m =
0.2061353
0.1383777
0.1254065
0.1201538
0.0908765


When n2 < n20, n2m =
0.1985669
0.1593604
0.1521448
0.1405737
0.1202173


When k2 ≧ k20, k2m =
0.2506677
0.2047961
0.1231897
0.1019714
0.0402307


When k2 < k20, k2m =
0.1792896
0.1103943
0.0960205
0.0872583
0.1042542


When d2 ≧ d20, d2m (nm) =
6.142
∞
∞
∞
4.028


When d2 < d20, d2m (nm) =
4.657
20.982
70.019
92.164
2.915










1.0 < NA ≦ 1.1


35 < T ≦ 45












Case
4-06
4-07
4-08
4-09
4-10





n10
1.7231751
1.7198225
1.7057007
1.7079030
1.6886446


k10
0.0881939
0.0748307
0.0735111
0.0631371
0.0826816


d10 (nm)
93.194
92.273
162.218
160.241
210.810


n20
1.6583398
1.6753837
1.6560667
1.6895692
1.7077667


k20
0.2493789
0.2040438
0.2270715
0.1875698
0.2975930


d20 (nm)
187.627
244.025
183.673
237.741
132.542


When n1 ≧ n10, n1m =
0.0413782
0.0488660
0.0374475
0.0482141
0.0106323


When n1 < n10, n1m =
0.0123999
0.0300476
0.0153528
0.0446057
0.0519153


When k1 ≧ k10, k1m =
0.0333630
0.0568799
0.0277051
0.0515784
0.0235608


When k1 < k10, k1m =
0.0393298
0.0467004
0.0300195
0.0397412
0.0190234


When d1 ≧ d10, d1m (nm) =
13.894
20.818
24.657
∞
6.948


When d1 < d10, d1m (nm) =
3.123
8.547
5.758
21.149
21.403


When n2 ≧ n20, n2m =
0.0360730
0.0689490
0.0276392
0.0753564
0.1220337


When n2 < n20, n2m =
0.0901636
0.1032593
0.0781885
0.0941541
0.0190320


When k2 ≧ k20, k2m =
0.0474146
0.0634253
0.0205627
0.0433423
0.0612073


When k2 < k20, k2m =
0.0610718
0.0577832
0.0533984
0.0526196
0.0606079


When d2 ≧ d20, d2m (nm) =
∞
∞
8.473
∞
∞


When d2 < d20, d2m (nm) =
20.321
31.703
15.881
21.519
3.543





















1.0 < NA ≦ 1.1


35 < T ≦ 45







9/34











Case
4-11
4-12
4-13
4-14





n10
1.6995870
1.6927517
1.6954892
1.6961809


k10
0.0592337
0.0720967
0.0662812
0.0606151


d10 (nm)
221.497
269.568
265.955
263.663


n20
1.6927290
1.7225076
1.7055518
1.6966094


k20
0.1818275
0.3075740
0.2340649
0.1927366


d20 (nm)
235.781
126.653
190.864
253.572


When n1 ≧ n10, n1m =
0.0661182
0.0430298
0.0571948
0.0777271


When n1 < n10, n1m =
0.0480371
0.0376990
0.0396948
0.0514954


When k1 ≧ k10, k1m =
0.0532056
0.0552930
0.0563965
0.0590613


When k1 < k10, k1m =
0.0358557
0.0353455
0.0387683
0.0400696


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
78.174
21.398
89.629
112.221


When n2 ≧ n20, n2m =
0.2507446
0.1898645
0.4617859
0.3498169


When n2 < n20, n2m =
0.0793469
0.1193628
0.2673291
0.2271130


When k2 ≧ k20, k2m =
0.0998633
0.1866309
0.2129163
0.2195020


When k2 < k20, k2m =
0.0613184
0.1217163
0.1026648
0.0902368


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
33.021
15.026
69.134
84.327










1.0 < NA ≦ 1.1


45 < T ≦ 55












Case
5-01
5-02
5-03
5-04
5-05





n10
1.8808544
1.9316654
1.9082705
1.8785232
1.7211644


k10
0.2454152
0.1473610
0.1322705
0.1271526
0.0906139


d10 (nm)
24.855
18.765
14.189
12.435
92.694


n20
1.8495394
1.8569906
1.7144055
1.6714546
1.6423304


k20
0.8565648
0.5034890
0.3458924
0.2699971
0.2528050


d20 (nm)
51.788
110.667
182.182
245.412
180.257


When n1 ≧ n10, n1m =
0.0633093
0.0784436
0.0967798
0.1127563
0.0394434


When n1 < n10, n1m =
0.0379272
0.0483252
0.0593640
0.0800098
0.0123450


When k1 ≧ k10, k1m =
0.0520349
0.0606396
0.0782654
0.1046387
0.0323718


When k1 < k10, k1m =
0.0704724
0.0844775
0.1016626
0.1111450
0.0404236


When d1 ≧ d10, d1m (nm) =
4.463
5.359
5.721
6.653
12.460


When d1 < d10, d1m (nm) =
2.319
2.677
3.157
4.357
3.091


When n2 ≧ n20, n2m =
0.1530676
0.1305420
0.1246069
0.1153186
0.0322009


When n2 < n20, n2m =
0.1897241
0.1692273
0.1526025
0.1380359
0.0893225


When k2 ≧ k20, k2m =
0.1919946
0.1591870
0.1122729
0.0997217
0.0401709


When k2 < k20, k2m =
0.1170728
0.1032434
0.0948108
0.0869653
0.0592017


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
9.182
23.164
70.833
93.569
20.376





















1.0 < NA ≦ 1.1


45 < T ≦ 55







10/34












Case
5-06
5-07
5-08
5-09
5-10





n10
1.7204079
1.7050622
1.7085349
1.6878153
1.6980473


k10
0.0761160
0.0748972
0.0642166
0.0847734
0.0703784


d10 (nm)
92.018
161.630
160.005
209.683
224.445


n20
1.6751968
1.6489715
1.6919631
1.6959203
1.6616204


k20
0.2080809
0.2315625
0.1914882
0.3070669
0.2238826


d20 (nm)
234.537
175.108
227.913
127.092
171.370


When n1 ≧ n10, n1m =
0.0481116
0.0356750
0.0469714
0.0053320
0.0535730


When n1 < n10, n1m =
0.0302478
0.0193359
0.0419556
0.0458972
0.0248047


When k1 ≧ k10, k1m =
0.0572302
0.0287097
0.0507117
0.0169995
0.0427319


When k1 < k10, k1m =
0.0456555
0.0334753
0.0389539
0.0159290
0.0235608


When d1 ≧ d10, d1m (nm) =
19.317
21.414
∞
2.347
∞


When d1 < d10, d1m (nm) =
8.336
7.128
19.272
19.688
12.738


When n2 ≧ n20, n2m =
0.0703723
0.0326379
0.0750854
0.1108911
0.0566052


When n2 < n20, n2m =
0.1049292
0.0778333
0.0787329
0.0108118
0.0780139


When k2 ≧ k20, k2m =
0.0616284
0.0216638
0.0424329
0.0606311
0.0720593


When k2 < k20, k2m =
0.0584753
0.0525964
0.0537231
0.0383350
0.0623987


When d2 ≧ d20, d2m (nm) =
∞
8.070
∞
32.807
∞


When d2 < d20, d2m (nm) =
32.758
15.758
17.351
1.915
21.521










1.0 < NA ≦ 1.1


45 < T ≦ 55











Case
5-11
5-12
5-13
5-14





n10
1.6999707
1.6924126
1.6955002
1.6961000


k10
0.0601951
0.0742318
0.0674212
0.0611797


d10 (nm)
221.512
268.357
265.225
263.146


n20
1.6952970
1.7068352
1.7004174
1.6940899


k20
0.1862586
0.3173492
0.2397614
0.1962440


d20 (nm)
225.852
120.697
183.997
246.462


When n1 ≧ n10, n1m =
0.0654663
0.0386316
0.0536462
0.0776611


When n1 < n10, n1m =
0.0445935
0.0350720
0.0381848
0.0515515


When k1 ≧ k10, k1m =
0.0509546
0.0537524
0.0551721
0.0583948


When k1 < k10, k1m =
0.0349414
0.0344934
0.0383105
0.0394385


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
76.496
19.128
37.283
109.648


When n2 ≧ n20, n2m =
0.1168579
0.1905981
0.3934021
0.3400916


When n2 < n20, n2m =
0.0700696
0.1027393
0.2743970
0.2283606


When k2 ≧ k20, k2m =
0.1002319
0.1933838
0.2120459
0.2188281


When k2 < k20, k2m =
0.0624707
0.1168652
0.1050110
0.0926550


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
28.597
13.909
67.541
81.764





















1.0 < NA ≦ 1.1


55 < T ≦ 65







11/34












Case
6-01
6-02
6-03
6-04
6-05





n10
1.8609133
1.9462238
1.9002376
1.8750233
1.8816918


k10
0.2699154
0.1588548
0.1498745
0.1302055
0.0811209


d10 (nm)
23.275
16.938
13.880
12.592
12.084


n20
1.6780954
1.8061043
1.6764313
1.6672162
1.7277101


k20
0.8091000
0.4989592
0.3420875
0.2718902
0.2394028


d20 (nm)
51.309
107.791
176.900
235.718
282.393


When n1 ≧ n10, n1m =
0.0700366
0.0847327
0.0979871
0.1121912
0.1205115


When n1 < n10, n1m =
0.0352271
0.0459912
0.0579346
0.0799817
0.0890784


When k1 ≧ k10, k1m =
0.0520923
0.0625745
0.0794043
0.1043726
0.1106958


When k1 < k10, k1m =
0.0664282
0.0874719
0.0997217
0.1093811
0.0811209


When d1 ≧ d10, d1m (nm) =
4.496
4.952
5.583
6.704
7.616


When d1 < d10, d1m (nm) =
2.084
2.260
3.039
4.426
5.147


When n2 ≧ n20, n2m =
0.1454468
0.1290356
0.1219507
0.1104688
0.1083423


When n2 < n20, n2m =
0.1338672
0.1849402
0.1524817
0.1364417
0.1532007


When k2 ≧ k20, k2m =
0.1326758
0.1316541
0.1033948
0.0988464
0.1079004


When k2 < k20, k2m =
0.1106470
0.1010791
0.0949341
0.0882678
0.0854614


When d2 ≧ d20, d2m (nm) =
18.182
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
8.638
17.532
68.073
94.482
130.723










1.0 < NA ≦ 1.1


55 < T ≦ 65












Case
6-06
6-07
6-08
6-09
6-10





n10
1.7196449
1.7211216
1.7282121
1.7047574
1.7094298


k10
0.0916508
0.0765241
0.0683348
0.0753118
0.0647325


d10 (nm)
92.440
91.942
92.298
161.355
159.970


n20
1.6323282
1.6777604
1.7222619
1.6462273
1.6962571


k20
0.2539653
0.2105462
0.1825246
0.2341241
0.1938378


d20 (nm)
171.320
223.941
274.062
165.232
217.150


When n1 ≧ n10, n1m =
0.0390417
0.0485681
0.0546460
0.0358069
0.0474683


When n1 < n10, n1m =
0.0139282
0.0313391
0.0292078
0.0174304
0.0407373


When k1 ≧ k10, k1m =
0.0333240
0.0585132
0.0578357
0.0324670
0.0508789


When k1 < k10, k1m =
0.0406140
0.0454041
0.0481470
0.0321411
0.0389600


When d1 ≧ d10, d1m (nm) =
12.043
19.132
42.010
19.174
∞


When d1 < d10, d1m (nm) =
3.525
8.472
8.190
6.358
18.590


When n2 ≧ n20, n2m =
0.0324304
0.0734375
0.0906226
0.0327905
0.0764417


When n2 < n20, n2m =
0.0896448
0.1073743
0.1223853
0.0797839
0.0702637


When k2 ≧ k20, k2m =
0.0391357
0.0623755
0.0817871
0.0268372
0.0433899


When k2 < k20, k2m =
0.0597375
0.0603992
0.0593811
0.0545007
0.0559253


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
9.153
∞


When d2 < d20, d2m (nm) =
20.788
29.764
77.892
16.109
14.325



















1.0 < NA ≦ 1.1


55 < T ≦ 65







12/34













Case
6-11
6-12
6-13
6-14
6-15
6-16
















n10
1.6870964
1.6986314
1.7003667
1.6951156
1.6955653
1.6958377


k10
0.0858972
0.0705958
0.0607285
0.0571177
0.0680298
0.0528303


d10 (nm)
208.556
224.893
221.557
215.781
264.644
274.984


n20
1.6830399
1.6622291
1.6983916
1.6957463
1.6953987
1.6882898


k20
0.3090553
0.2274423
0.1887213
0.1617780
0.2417239
0.1657751


d20 (nm)
121.249
160.831
215.383
277.216
176.078
275.044


When n1 ≧ n10, n1m =
0.0051123
0.0520032
0.0662122
0.0842517
0.0515662
0.0590991


When n1 < n10, n1m =
0.0418372
0.0227649
0.0435059
0.0645801
0.0369092
0.0581189


When k1 ≧ k10, k1m =
0.0150793
0.0436267
0.0489954
0.0563855
0.0542810
0.0684131


When k1 < k10, k1m =
0.0179541
0.0228833
0.0348535
0.0371240
0.0381006
0.0375098


When d1 ≧ d10, d1m (nm) =
2.247
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
18.385
11.933
75.920
58.822
33.649
113.219


When n2 ≧ n20, n2m =
0.1010083
0.0477234
0.1065527
0.2254480
0.3829150
0.2789856


When n2 < n20, n2m =
0.0100110
0.0759302
0.0611096
0.1540564
0.2775842
0.2219617


When k2 ≧ k20, k2m =
0.0726611
0.0766821
0.1015344
0.1236780
0.2119995
0.1981201


When k2 < k20, k2m =
0.0309253
0.0590527
0.0616418
0.0602039
0.1044287
0.0735400


When d2 ≧ d20, d2m (nm) =
25.845
22.079
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
1.717
20.127
24.695
81.257
67.124
97.500





















1.0 < NA ≦ 1.1


65 < T ≦ 75







13/34












Case
7-01
7-02
7-03
7-04
7-05





n10
1.8339628
1.9445237
1.8939902
1.8811858
1.7203230


k10
0.2973905
0.1726202
0.1563846
0.0833966
0.0922740


d10 (nm)
24.925
17.287
14.253
12.228
92.527


n20
1.6419965
1.7953047
1.6659458
1.7269957
1.6328842


k20
0.8698975
0.5162004
0.3485215
0.2426363
0.2599948


d20 (nm)
41.723
98.907
167.112
272.914
160.703


When n1 ≧ n10, n1m =
0.0734924
0.0853552
0.0964307
0.1197986
0.0394055


When n1 < n10, n1m =
0.0377722
0.0427490
0.0559692
0.0877673
0.0144592


When k1 ≧ k10, k1m =
0.0448938
0.0589941
0.0770850
0.1096667
0.0331616


When k1 < k10, k1m =
0.0453357
0.0848169
0.0975195
0.0833966
0.0410388


When d1 ≧ d10, d1m (nm) =
4.571
4.784
5.590
7.648
12.091


When d1 < d10, d1m (nm) =
2.315
2.092
3.027
5.109
3.655


When n2 ≧ n20, n2m =
0.1366638
0.1348682
0.1167786
0.1080664
0.0326196


When n2 < n20, n2m =
0.1076978
0.1944104
0.1524536
0.1545313
0.0900854


When k2 ≧ k20, k2m =
0.1648022
0.1338904
0.1021130
0.1080652
0.0396484


When k2 < k20, k2m =
0.1324670
0.1078918
0.0977759
0.0865271
0.0625085


When d2 ≧ d20, d2m (nm) =
12.499
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
5.747
14.376
64.164
128.680
19.557










1.0 < NA ≦ 1.1


65 < T ≦ 75












Case
7-06
7-07
7-08
7-09
7-10





n10
1.7224265
1.7294779
1.7053201
1.7102741
1.7133466


k10
0.0770592
0.0692299
0.0757255
0.0654045
0.0629386


d10 (nm)
92.053
92.385
161.452
160.136
160.381


n20
1.6819841
1.7252879
1.6485370
1.7000507
1.7220503


k20
0.2150120
0.1858377
0.2399747
0.1977447
0.1698335


d20 (nm)
213.162
263.723
154.588
206.614
260.757


When n1 ≧ n10, n1m =
0.0490625
0.0548535
0.0366443
0.0483020
0.0569666


When n1 < n10, n1m =
0.0311902
0.0280200
0.0173645
0.0416309
0.0190027


When k1 ≧ k10, k1m =
0.0581604
0.0565332
0.0330920
0.0498926
0.0402344


When k1 < k10, k1m =
0.0461389
0.0475879
0.0324707
0.0390747
0.0240051


When d1 ≧ d10, d1m (nm) =
19.214
40.761
19.902
∞
∞


When d1 < d10, d1m (nm) =
8.328
7.705
6.285
18.989
5.694


When n2 ≧ n20, n2m =
0.0747375
0.0917908
0.0322156
0.0769946
0.1011584


When n2 < n20, n2m =
0.1078540
0.1217822
0.0813562
0.0689685
0.1343567


When k2 ≧ k20, k2m =
0.0634705
0.0827625
0.0283752
0.0430542
0.0435730


When k2 < k20, k2m =
0.0623401
0.0604163
0.0573535
0.0576453
0.0570081


When d2 ≧ d20, d2m (nm) =
∞
∞
9.136
38.239
∞


When d2 < d20, d2m (nm) =
27.810
75.918
15.379
13.085
10.847



















1.0 < NA ≦ 1.1


65 < T ≦ 75







14/34













Case
7-11
7-12
7-13
7-14
7-15
7-16
















n10
1.6861768
1.6990769
1.7003759
1.6946436
1.6954303
1.6957423


k10
0.0881028
0.0709373
0.0613969
0.0577579
0.0690806
0.0532811


d10 (nm)
208.148
225.005
221.468
215.315
264.876
274.848


n20
1.6733849
1.6647354
1.6998938
1.6946016
1.6937197
1.6878755


k20
0.3136681
0.2329033
0.1918751
0.1634050
0.2458138
0.1674492


d20 (nm)
112.385
150.349
205.497
268.128
165.269
265.685


When n1 ≧ n10, n1m =
0.0025806
0.0529590
0.0676086
0.0859229
0.0516138
0.0588110


When n1 < n10, n1m =
0.0409998
0.0231177
0.0444312
0.0666504
0.0367175
0.0575696


When k1 ≧ k10, k1m =
0.0094263
0.0435510
0.0474890
0.0560022
0.0529260
0.0681641


When k1 < k10, k1m =
0.0156848
0.0234912
0.0355322
0.0372656
0.0371912
0.0379443


When d1 ≧ d10, d1m (nm) =
1.037
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
17.094
12.289
76.126
56.280
33.058
112.076


When n2 ≧ n20, n2m =
0.1039172
0.0468506
0.1077234
0.2240735
0.4022729
0.2806909


When n2 < n20, n2m =
0.0058093
0.0753308
0.0576575
0.1556287
0.2760486
0.2229114


When k2 ≧ k20, k2m =
0.0664124
0.0758972
0.1012000
0.1249744
0.2123950
0.1986609


When k2 < k20, k2m =
0.0178174
0.0630115
0.0645288
0.0620288
0.1063135
0.0745801


When d2 ≧ d20, d2m (nm) =
26.367
19.187
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
1.017
18.602
23.769
80.847
66.469
89.270





















1.0 < NA ≦ 1.1


75 < T ≦ 85







15/34












Case
8-01
8-02
8-03
8-04
8-05





n10
1.9187259
1.8967518
1.8757876
1.8806788
1.7234296


k10
0.1881900
0.1527475
0.1318014
0.0899399
0.0945092


d10 (nm)
20.509
15.221
13.247
12.412
92.722


n20
1.8283337
1.6893708
1.6726776
1.7211162
1.6393014


k20
0.5739613
0.3734166
0.2883472
0.2492460
0.2743485


d20 (nm)
84.746
154.221
215.129
265.394
150.270


When n1 ≧ n10, n1m =
0.0766943
0.0922229
0.1080322
0.1177502
0.0391516


When n1 < n10, n1m =
0.0399988
0.0530884
0.0750195
0.0852625
0.0112524


When k1 ≧ k10, k1m =
0.0507166
0.0712622
0.0980225
0.1073047
0.0289392


When k1 < k10, k1m =
0.0771802
0.0964258
0.1069458
0.0899399
0.0412610


When d1 ≧ d10, d1m (nm) =
5.195
5.640
6.681
7.548
11.825


When d1 < d10, d1m (nm) =
2.249
2.987
4.301
4.972
2.719


When n2 ≧ n20, n2m =
0.1444995
0.1155615
0.1091333
0.1093396
0.0288635


When n2 < n20, n2m =
0.1897876
0.1532776
0.1435217
0.1541382
0.0890479


When k2 ≧ k20, k2m =
0.1811243
0.1099194
0.1006726
0.1075403
0.0356238


When k2 < k20, k2m =
0.1194946
0.1025110
0.0922131
0.0871228
0.0649683


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
15.313
64.664
82.555
124.472
16.892










1.0 < NA ≦ 1.1


75 < T ≦ 85












Case
8-06
8-07
8-08
8-09
8-10





n10
1.7235983
1.7294254
1.7064538
1.7103862
1.7133072


k10
0.0790587
0.0706491
0.0777504
0.0670250
0.0637197


d10 (nm)
92.129
92.482
161.668
160.278
160.467


n20
1.6815454
1.7233644
1.6498826
1.6983722
1.7219131


k20
0.2228770
0.1918670
0.2514894
0.2047961
0.1752501


d20 (nm)
204.187
255.172
145.038
197.922
251.781


When n1 ≧ n10, n1m =
0.0481958
0.0539050
0.0362122
0.0474792
0.0556775


When n1 < n10, n1m =
0.0281580
0.0270288
0.0158582
0.0428101
0.0187244


When k1 ≧ k10, k1m =
0.0546558
0.0547986
0.0255066
0.0459753
0.0391089


When k1 < k10, k1m =
0.0470496
0.0476624
0.0330371
0.0375122
0.0244470


When d1 ≧ d10, d1m (nm) =
18.433
40.484
19.881
∞
∞


When d1 < d10, d1m (nm) =
7.376
7.380
6.011
13.737
5.649


When n2 ≧ n20, n2m =
0.0719336
0.0903259
0.0311267
0.0755847
0.1032422


When n2 < n20, n2m =
0.1049182
0.1183936
0.0789893
0.0715295
0.1268079


When k2 ≧ k20, k2m =
0.0610889
0.0802148
0.0194653
0.0384314
0.0401990


When k2 < k20, k2m =
0.0626282
0.0606787
0.0584229
0.0575549
0.0569128


When d2 ≧ d20, d2m (nm) =
∞
∞
6.414
35.522
∞


When d2 < d20, d2m (nm) =
26.455
72.823
13.152
13.515
11.677





















1.0 < NA ≦ 1.1


75 < T ≦ 85







16/34












Case
8-11
8-12
8-13
8-14
8-15





n10
1.6987335
1.6895310
1.6997408
1.6947661
1.6915645


k10
0.0728489
0.0798395
0.0628030
0.0583146
0.0796327


d10 (nm)
224.384
207.056
221.189
215.749
269.434


n20
1.6635130
1.6873868
1.6972371
1.6943199
1.7013553


k20
0.2423517
0.2464201
0.1976117
0.1671130
0.3520060


d20 (nm)
141.699
160.447
197.186
258.789
90.540


When n1 ≧ n10, n1m =
0.0550525
0.0211743
0.0680066
0.0840710
0.0339661


When n1 < n10, n1m =
0.0214722
0.0563281
0.0446484
0.0653711
0.0319580


When k1 ≧ k10, k1m =
0.0399634
0.0394690
0.0462439
0.0552136
0.0498462


When k1 < k10, k1m =
0.0230286
0.0247534
0.0358582
0.0373328
0.0319092


When d1 ≧ d10, d1m (nm) =
∞
18.382
∞
∞
29.764


When d1 < d10, d1m (nm) =
12.181
26.345
75.416
56.560
16.533


When n2 ≧ n20, n2m =
0.0460742
0.1451038
0.1164050
0.2251794
0.2068530


When n2 < n20, n2m =
0.0736353
0.0531665
0.0615222
0.1544678
0.0982214


When k2 ≧ k20, k2m =
0.0651685
0.0979858
0.0980493
0.1211584
0.1840808


When k2 < k20, k2m =
0.0709375
0.0696692
0.0675049
0.0632251
0.1287793


When d2 ≧ d20, d2m (nm) =
17.326
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
17.676
13.280
25.586
81.223
11.833










1.0 < NA ≦ 1.1


75 < T ≦ 85











Case
8-16
8-17







n10
1.6950499
1.6956172



k10
0.0706693
0.0541668



d10 (nm)
266.123
274.905



n20
1.6983222
1.6860233



k20
0.2573177
0.1712439



d20 (nm)
152.851
257.337



When n1 ≧ n10, n1m =
0.0524487
0.0590308



When n1 < n10, n1m =
0.0375452
0.0580872



When k1 ≧ k10, k1m =
0.0517285
0.0672278



When k1 < k10, k1m =
0.0352881
0.0380591



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
33.771
112.404



When n2 ≧ n20, n2m =
0.2704944
0.2806836



When n2 < n20, n2m =
0.2755872
0.2222266



When k2 ≧ k20, k2m =
0.2121143
0.1985229



When k2 < k20, k2m =
0.1128918
0.0743774



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
65.292
85.089






















1.0 < NA ≦ 1.1


85 < T ≦ 95







17/34












Case
9-01
9-02
9-03
9-04
9-05





n10
1.8980776
1.9078109
1.8887573
1.8863613
1.7283563


k10
0.2063094
0.1489982
0.1336370
0.0963846
0.0991844


d10 (nm)
23.234
16.351
13.295
12.395
92.796


n20
1.8542997
1.7325536
1.6803356
1.7165602
1.6494143


k20
0.6486453
0.4126982
0.3065809
0.2596921
0.2975623


d20 (nm)
73.732
141.036
205.639
258.147
140.358


When n1 ≧ n10, n1m =
0.0711987
0.0870154
0.1059106
0.1162891
0.0375220


When n1 < n10, n1m =
0.0384509
0.0501709
0.0716760
0.0832544
0.0056213


When k1 ≧ k10, k1m =
0.0445569
0.0643555
0.0939661
0.1053198
0.0189441


When k1 < k10, k1m =
0.0730103
0.0941223
0.1072681
0.0963846
0.0324854


When d1 ≧ d10, d1m (nm) =
5.225
5.526
6.240
7.169
10.895


When d1 < d10, d1m (nm) =
2.347
2.839
3.908
4.670
1.261


When n2 ≧ n20, n2m =
0.1402551
0.1159338
0.1109766
0.1105359
0.0179150


When n2 < n20, n2m =
0.1828406
0.1543176
0.1513220
0.1539343
0.0865198


When k2 ≧ k20, k2m =
0.2259802
0.1235034
0.1018750
0.1065100
0.0230737


When k2 < k20, k2m =
0.1284644
0.1059631
0.0936096
0.0878577
0.0660486


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
14.635


When d2 < d20, d2m (nm) =
14.747
31.656
77.584
118.336
14.252










1.0 < NA ≦ 1.1


85 < T ≦ 95












Case
9-06
9-07
9-08
9-09
9-10





n10
1.7247011
1.7288637
1.7100270
1.7129082
1.6894084


k10
0.0825295
0.0727638
0.0697395
0.0648353
0.0825836


d10 (nm)
92.134
92.409
160.277
160.281
208.412


n20
1.6784446
1.7181265
1.6932584
1.7202855
1.6911413


k20
0.2345042
0.1997137
0.2147807
0.1822190
0.2636300


d20 (nm)
196.220
247.866
190.362
243.795
148.443


When n1 ≧ n10, n1m =
0.0458069
0.0520715
0.0445874
0.0530676
0.0168896


When n1 < n10, n1m =
0.0231628
0.0254517
0.0291443
0.0189783
0.0564331


When k1 ≧ k10, k1m =
0.0487341
0.0524194
0.0390308
0.0374463
0.0317554


When k1 < k10, k1m =
0.0471680
0.0474573
0.0341357
0.0249304
0.0174866


When d1 ≧ d10, d1m (nm) =
16.768
28.342
∞
∞
8.653


When d1 < d10, d1m (nm) =
5.875
6.859
8.481
5.666
22.933


When n2 ≧ n20, n2m =
0.0654785
0.0851550
0.0721350
0.0992358
0.1489941


When n2 < n20, n2m =
0.0999084
0.1129846
0.0702051
0.1184961
0.0323828


When k2 ≧ k20, k2m =
0.0550916
0.0742688
0.0299036
0.0348145
0.0701428


When k2 < k20, k2m =
0.0621350
0.0605774
0.0564990
0.0562878
0.0653857


When d2 ≧ d20, d2m (nm) =
∞
∞
30.126
∞
∞


When d2 < d20, d2m (nm) =
23.369
34.214
13.997
12.255
9.630





















1.0 < NA ≦ 1.1


85 < T ≦ 95







18/34












Case
9-11
9-12
9-13
9-14
9-15





n10
1.6987536
1.6951804
1.6947043
1.6953534
1.6955317


k10
0.0651428
0.0592977
0.0728049
0.0654850
0.0555447


d10 (nm)
220.679
216.421
267.049
264.587
274.968


n20
1.6918669
1.6944812
1.7045529
1.6939885
1.6840742


k20
0.2062686
0.1733276
0.2758626
0.2171518
0.1777252


d20 (nm)
189.869
249.686
142.407
204.731
249.243


When n1 ≧ n10, n1m =
0.0676538
0.0804553
0.0514111
0.0772083
0.0594299


When n1 < n10, n1m =
0.0423462
0.0620581
0.0375159
0.0498364
0.0587244


When k1 ≧ k10, k1m =
0.0442505
0.0538220
0.0506982
0.0550830
0.0658191


When k1 < k10, k1m =
0.0341040
0.0375916
0.0340894
0.0384644
0.0372644


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
72.990
57.440
26.805
108.871
112.765


When n2 ≧ n20, n2m =
0.1307581
0.2319055
0.2365918
0.3979211
0.2850439


When n2 < n20, n2m =
0.0673376
0.1520984
0.2827087
0.2359326
0.2177148


When k2 ≧ k20, k2m =
0.0940100
0.1156787
0.2079443
0.2187415
0.1980774


When k2 < k20, k2m =
0.0673755
0.0629675
0.1183691
0.0982336
0.0755945


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
25.557
76.954
64.091
75.273
81.971










1.0 < NA ≦ 1.1


95 < T ≦ 105












Case
10-01
10-02
10-03
10-04
10-05





n10
1.9059589
1.9224042
1.8961620
1.8922593
1.7254583


k10
0.2274286
0.1550778
0.1385328
0.1041345
0.0865833


d10 (nm)
23.462
16.599
13.501
12.282
91.876


n20
1.8553331
1.7510181
1.6829419
1.7097147
1.6727903


k20
0.7355051
0.4490690
0.3248659
0.2697702
0.2465542


d20 (nm)
66.090
131.424
196.767
251.116
188.519


When n1 ≧ n10, n1m =
0.0671912
0.0841919
0.1023767
0.1153796
0.0426331


When n1 < n10, n1m =
0.0345654
0.0474304
0.0675305
0.0814563
0.0184045


When k1 ≧ k10, k1m =
0.0380615
0.0598425
0.0894568
0.1045068
0.0426917


When k1 < k10, k1m =
0.0683374
0.0902014
0.1054456
0.1041345
0.0441687


When d1 ≧ d10, d1m (nm) =
4.558
5.118
5.874
6.783
14.297


When d1 < d10, d1m (nm) =
1.985
2.531
3.589
4.355
4.476


When n2 ≧ n20, n2m =
0.1216980
0.1117603
0.1100940
0.1104114
0.0579919


When n2 < n20, n2m =
0.1802991
0.1554016
0.1498889
0.1534180
0.0956348


When k2 ≧ k20, k2m =
0.2165979
0.1264526
0.1015808
0.1042908
0.0462366


When k2 < k20, k2m =
0.1276270
0.1054065
0.0937561
0.0879675
0.0605090


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
11.858
29.189
73.755
91.689
21.669





















1.0 < NA ≦ 1.1


95 < T ≦ 105







19/34












Case
10-06
10-07
10-08
10-09
10-10





n10
1.7286512
1.7096319
1.7125109
1.6891198
1.6979687


k10
0.0752622
0.0728333
0.0665034
0.0853163
0.0677690


d10 (nm)
92.185
159.923
159.852
208.173
220.140


n20
1.7137581
1.6877059
1.7181911
1.6918411
1.6871092


k20
0.2076205
0.2252670
0.1890952
0.2826173
0.2165239


d20 (nm)
240.302
182.766
235.934
141.112
182.186


When n1 ≧ n10, n1m =
0.0500330
0.0406897
0.0503772
0.0132690
0.0644641


When n1 < n10, n1m =
0.0231873
0.0169287
0.0155139
0.0507471
0.0375525


When k1 ≧ k10, k1m =
0.0495398
0.0307520
0.0335327
0.0250305
0.0414893


When k1 < k10, k1m =
0.0465039
0.0291895
0.0230286
0.0142859
0.0317957


When d1 ≧ d10, d1m (nm) =
22.149
∞
∞
5.803
∞


When d1 < d10, d1m (nm) =
6.093
5.010
4.544
20.171
66.095


When n2 ≧ n20, n2m =
0.0807422
0.0673730
0.0968713
0.1414526
0.1231934


When n2 < n20, n2m =
0.1109875
0.0569836
0.1140344
0.0176575
0.0690576


When k2 ≧ k20, k2m =
0.0671313
0.0201965
0.0272949
0.0516113
0.0909106


When k2 < k20, k2m =
0.0601733
0.0546924
0.0555640
0.0644128
0.0681702


When d2 ≧ d20, d2m (nm) =
∞
22.678
∞
∞
∞


When d2 < d20, d2m (nm) =
33.234
12.401
9.751
3.545
24.752










1.0 < NA ≦ 1.1


95 < T ≦ 105












Case
10-11
10-12
10-13







n10
1.6953920
1.6945041
1.6957904



k10
0.0607310
0.0754015
0.0613078



d10 (nm)
216.694
266.879
263.111



n20
1.6943518
1.7053190
1.6921380



k20
0.1805507
0.2962459
0.1886276



d20 (nm)
240.824
134.581
257.166



When n1 ≧ n10, n1m =
0.0773376
0.0489661
0.0744116



When n1 < n10, n1m =
0.0532397
0.0362244
0.0544775



When k1 ≧ k10, k1m =
0.0520667
0.0490686
0.0595886



When k1 < k10, k1m =
0.0373279
0.0329797
0.0399255



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
56.748
22.698
144.280



When n2 ≧ n20, n2m =
0.2401196
0.2258960
0.3617542



When n2 < n20, n2m =
0.1505750
0.2863916
0.2146826



When k2 ≧ k20, k2m =
0.1118237
0.2042285
0.2258594



When k2 < k20, k2m =
0.0641272
0.1247363
0.0874829



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
74.466
22.579
121.018






















1.0 < NA ≦ 1.1


105 < T ≦ 115







20/34












Case
11-01
11-02
11-03
11-04
11-05





n10
1.9374125
1.9018997
1.8965439
1.7253637
1.7289764


k10
0.1704110
0.1487976
0.1142225
0.0900184
0.0775142


d10 (nm)
15.669
13.285
11.973
91.432
91.877


n20
1.7248980
1.6713435
1.6970963
1.6651786
1.7120256


k20
0.4663738
0.3352808
0.2748315
0.2549499
0.2134557


d20 (nm)
126.299
189.496
244.759
180.505
231.728


When n1 ≧ n10, n1m =
0.0844495
0.1011877
0.1161206
0.0397363
0.0483887


When n1 < n10, n1m =
0.0440234
0.0656897
0.0810999
0.0155029
0.0208545


When k1 ≧ k10, k1m =
0.0577478
0.0888123
0.1065247
0.0388269
0.0469031


When k1 < k10, k1m =
0.0914417
0.1045447
0.1142225
0.0417639
0.0449243


When d1 ≧ d10, d1m (nm) =
4.564
5.473
6.423
12.314
18.889


When d1 < d10, d1m (nm) =
2.111
3.313
4.088
3.639
5.309


When n2 ≧ n20, n2m =
0.1026855
0.1066711
0.1092859
0.0538538
0.0798657


When n2 < n20, n2m =
0.1573315
0.1496814
0.1507874
0.0957056
0.1124231


When k2 ≧ k20, k2m =
0.1109265
0.0973877
0.1006897
0.0382251
0.0609106


When k2 < k20, k2m =
0.0995313
0.0917126
0.0869214
0.0582397
0.0599487


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
32.204
71.551
94.669
21.979
35.901










1.0 < NA ≦ 1.1


105 < T ≦ 115












Case
11-06
11-07
11-08
11-09
11-10





n10
1.7092919
1.7124011
1.6891266
1.6977739
1.6952347


k10
0.0753499
0.0683625
0.0867081
0.0698574
0.0623107


d10 (nm)
159.318
159.365
206.818
219.869
216.627


n20
1.6830351
1.7169838
1.6858604
1.6842611
1.6937881


k20
0.2331189
0.1941891
0.2953498
0.2258219
0.1869159


d20 (nm)
174.468
227.412
138.155
173.345
231.738


When n1 ≧ n10, n1m =
0.0373157
0.0484546
0.0121899
0.0603870
0.0758545


When n1 < n10, n1m =
0.0105005
0.0089343
0.0409204
0.0315625
0.0474512


When k1 ≧ k10, k1m =
0.0240833
0.0270752
0.0251843
0.0382471
0.0501941


When k1 < k10, k1m =
0.0246826
0.0176978
0.0193188
0.0296948
0.0358765


When d1 ≧ d10, d1m (nm) =
22.059
∞
5.261
∞
∞


When d1 < d10, d1m (nm) =
3.023
2.568
16.255
V17.363
54.608


When n2 ≧ n20, n2m =
0.0659399
0.0944360
0.1154346
0.0831506
0.2493335


When n2 < n20, n2m =
0.0371252
0.1164661
0.0185925
0.0632410
0.1310596


When k2 ≧ k20, k2m =
0.0133044
0.0180847
0.0609753
0.0891687
0.1103210


When k2 < k20, k2m =
0.0529578
0.0555518
0.0785950
0.0680151
0.0652307


When d2 ≧ d20, d2m (nm) =
18.030
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
8.732
5.378
3.627
23.361
52.894





















1.0 < NA ≦ 1.1


105 < T ≦ 115







21/34











Case
11-11
11-12







n10
1.6944699
1.6958800



k10
0.0775933
0.0528961



d10 (nm)
265.762
273.317



n20
1.6967397
1.6915993



k20
0.3115846
0.1649138



d20 (nm)
129.093
288.010



When n1 ≧ n10, n1m =
0.0466345
0.0703040



When n1 < n10, n1m =
0.0341467
0.0549121



When k1 ≧ k10, k1m =
0.0473621
0.0679175



When k1 < k10, k1m =
0.0320862
0.0389246



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
20.031
180.011



When n2 ≧ n20, n2m =
0.2202100
0.2749866



When n2 < n20, n2m =
0.1339246
0.2056653



When k2 ≧ k20, k2m =
0.2018127
0.2031665



When k2 < k20, k2m =
0.1244751
0.0729272



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
18.618
105.982











1.0 < NA ≦ 1.1


115 < T ≦ 125












Case
12-01
12-02
12-03
12-04
12-05





n10
1.9729972
1.9456051
1.9005953
1.8972956
1.7255330


k10
0.2768129
0.1915481
0.1591490
0.1121564
0.0922673


d10 (nm)
17.524
14.612
13.217
12.290
91.102


n20
1.6663342
1.6781309
1.6561276
1.7051607
1.6614760


k20
0.7544777
0.4665054
0.3399716
0.2822449
0.2607016


d20 (nm)
64.842
122.845
181.593
233.141
171.070


When n1 ≧ n10, n1m =
0.0730835
0.0862573
0.1002148
0.1132361
0.0385791


When n1 < n10, n1m =
0.0179053
0.0397437
0.0650696
0.0790137
0.0152405


When k1 ≧ k10, k1m =
0.0247314
0.0556897
0.0891748
0.1035071
0.0386047


When k1 < k10, k1m =
0.0592480
0.0960681
0.1016016
0.1121564
0.0414185


When d1 ≧ d10, d1m (nm) =
2.961
4.145
5.266
6.373
11.328


When d1 < d10, d1m (nm) =
0.729
1.739
3.220
4.072
3.483


When n2 ≧ n20, n2m =
0.0585083
0.0918945
0.1020654
0.1070825
0.0573608


When n2 < n20, n2m =
0.1382239
0.1611719
0.1504858
0.1560303
0.0993860


When k2 ≧ k20, k2m =
0.0616943
0.0914514
0.0935474
0.1016602
0.0359058


When k2 < k20, k2m =
0.0899731
0.0957678
0.0910632
0.0886353
0.0590588


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
11.368
38.474
71.143
98.322
22.477





















1.0 < NA ≦ 1.1


115 < T ≦ 125







22/34












Case
12-06
12-07
12-08
12-09
12-10





n10
1.7304964
1.7097843
1.7129025
1.7059734
1.6983193


k10
0.0792452
0.0770210
0.0702809
0.0642321
0.0712405


d10 (nm)
91.709
159.025
159.249
159.600
220.143


n20
1.7154952
1.6841289
1.7178163
1.6898319
1.6860819


k20
0.2175998
0.2392980
0.1978132
0.1677546
0.2336364


d20 (nm)
221.560
164.463
217.770
279.371
162.903


When n1 ≧ n10, n1m =
0.0478430
0.0358972
0.0479553
0.0552173
0.0579871


When n1 < n10, n1m =
0.0188013
0.0078589
0.0015247
0.0299426
0.0264917


When k1 ≧ k10, k1m =
0.0447290
0.0214099
0.0152087
0.0363110
0.0340515


When k1 < k10, k1m =
0.0430518
0.0224402
0.0060950
0.0278772
0.0279150


When d1 ≧ d10, d1m (nm) =
17.323
17.500
∞
∞
∞


When d1 < d10, d1m (nm) =
4.626
2.208
0.436
70.406
11.462


When n2 ≧ n20, n2m =
0.0842468
0.0631323
0.0959070
0.1382263
0.0682983


When n2 < n20, n2m =
0.1172522
0.0247583
0.0076807
0.1296057
0.0493762


When k2 ≧ k20, k2m =
0.0583887
0.0111536
0.0046545
0.0357849
0.0882227


When k2 < k20, k2m =
0.0618323
0.0547961
0.0579968
0.0540967
0.0613330


When d2 ≧ d20, d2m (nm) =
∞
18.428
∞
∞
∞


When d2 < d20, d2m (nm) =
65.102
5.436
0.894
57.180
18.177










1.0 < NA ≦ 1.1


115 < T ≦ 125












Case
12-11
12-12
12-13







n10
1.6946755
1.6955425
1.6956989



k10
0.0639503
0.0535782
0.0539885



d10 (nm)
216.344
213.248
272.929



n20
1.6931001
1.6937343
1.6917939



k20
0.1919118
0.1415462
0.1683287



d20 (nm)
222.331
338.947
278.327



When n1 ≧ n10, n1m =
0.0359900
0.0869177
0.0714185



When n1 < n10, n1m =
0.0437024
0.0750378
0.0538635



When k1 ≧ k10, k1m =
0.0485352
0.0653857
0.0669263



When k1 < k10, k1m =
0.0346851
0.0370959
0.0388916



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
51.791
132.178
120.018



When n2 ≧ n20, n2m =
0.1409949
0.2291467
0.2819873



When n2 < n20, n2m =
0.1060889
0.1273120
0.2087952



When k2 ≧ k20, k2m =
0.1109827
0.1363989
0.2069556



When k2 < k20, k2m =
0.0639978
0.0571204
0.0743250



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
35.182
107.512
95.030






















1.0 < NA ≦ 1.1


125 < T ≦ 135







23/34












Case
13-01
13-02
13-03
13-04
13-05





n10
1.8993435
1.9080238
1.7276770
1.7338076
1.7236449


k10
0.1093669
0.0778133
0.0934541
0.0808022
0.0736298


d10 (nm)
12.638
11.189
91.210
91.869
92.640


n20
1.7156529
1.7380285
1.6689251
1.7256843
1.7007078


k20
0.2903108
0.2474831
0.2700133
0.2232282
0.1887087


d20 (nm)
220.942
275.866
159.348
209.944
271.148


When n1 ≧ n10, n1m =
0.1116663
0.1266492
0.0395422
0.0484558
0.0522583


When n1 < n10, n1m =
0.0773999
0.0872168
0.0167297
0.0166711
0.0180103


When k1 ≧ k10, k1m =
0.1011877
0.1103088
0.0409973
0.0422058
0.0417761


When k1 < k10, k1m =
0.1093669
0.0778133
0.0410583
0.0409119
0.0443518


When d1 ≧ d10, d1m (nm) =
6.392
6.737
11.272
16.895
38.105


When d1 < d10, d1m (nm) =
4.063
4.214
3.733
3.952
5.177


When n2 ≧ n20, n2m =
0.1069678
0.1140796
0.0675769
0.0924780
0.1134937


When n2 < n20, n2m =
0.1606714
0.1563965
0.1033667
0.1197949
0.1230200


When k2 ≧ k20, k2m =
0.1040991
0.1083496
0.0397278
0.0600330
0.0739392


When k2 < k20, k2m =
0.0926990
0.0882825
0.0652539
0.0659766
0.0617065


When d2 ≧ d20, d2m (nm) =
∞
∞
29.488
∞
∞


When d2 < d20, d2m (nm) =
90.398
130.978
17.688
16.714
72.265










1.0 < NA ≦ 1.1


125 < T ≦ 135












Case
13-06
13-07
13-08
13-09
13-10





n10
1.7117973
1.7052523
1.6990979
1.6936455
1.6937228


k10
0.0782334
0.0648564
0.0723627
0.0657466
0.0602088


d10 (nm)
159.412
160.141
220.761
215.539
212.854


n20
1.6949465
1.6847092
1.6931390
1.6916565
1.6917935


k20
0.2480962
0.1699839
0.2421156
0.1962143
0.1651159


d20 (nm)
152.577
269.827
151.650
213.597
273.449


When n1 ≧ n10, n1m =
0.0367346
0.0551233
0.0594092
0.0311401
0.0698511


When n1 < n10, n1m =
0.0058984
0.0239478
0.0244397
0.0431714
0.0693030


When k1 ≧ k10, k1m =
0.0206287
0.0370862
0.0278687
0.0476123
0.0598901


When k1 < k10, k1m =
0.0197803
0.0307031
0.0272107
0.0341650
0.0364880


When d1 ≧ d10, d1m (nm) =
17.175
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
1.642
10.322
10.135
48.593
59.568


When n2 ≧ n20, n2m =
0.0634509
0.0441370
0.0646301
0.1417163
0.2349500


When n2 < n20, n2m =
0.0185107
0.1268359
0.0304773
0.0878235
0.1413928


When k2 ≧ k20, k2m =
0.0106982
0.0374109
0.0871985
0.1142444
0.1311609


When k2 < k20, k2m =
0.0614368
0.0554883
0.0573535
0.0648792
0.0616370


When d2 ≧ d20, d2m (nm) =
20.867
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
3.236
51.950
7.977
23.183
75.250





















1.0 < NA ≦ 1.1


125 < T ≦ 135







24/34










Case
13-11







n10
1.6954835



k10
0.0549286



d10 (nm)
272.481



n20
1.6920522



k20
0.1709440



d20 (nm)
269.018



When n1 ≧ n10, n1m =
0.0732507



When n1 < n10, n1m =
0.0527002



When k1 ≧ k10, k1m =
0.0659570



When k1 < k10, k1m =
0.0396948



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
115.848



When n2 ≧ n20, n2m =
0.2876270



When n2 < n20, n2m =
0.2123071



When k2 ≧ k20, k2m =
0.2114355



When k2 < k20, k2m =
0.0767078



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
91.957











1.0 < NA ≦ 1.1


135 < T ≦ 145












Case
14-01
14-02
14-03
14-04
14-05





n10
1.9117383
1.8981283
1.9112943
1.7312914
1.7377087


k10
0.2302052
0.1070787
0.0649623
0.0945058
0.0827928


d10 (nm)
15.980
13.384
12.163
91.544
92.151


n20
1.5953517
1.7296497
1.7710787
1.6819509
1.7372931


k20
0.4940730
0.3022759
0.2605013
0.2846338
0.2321492


d20 (nm)
105.368
209.053
259.824
147.702
198.983


When n1 ≧ n10, n1m =
0.0781360
0.1075745
0.1181738
0.0408386
0.0487402


When n1 < n10, n1m =
0.0319177
0.0739868
0.0809961
0.0177930
0.0144653


When k1 ≧ k10, k1m =
0.0436902
0.0964282
0.0995044
0.0430859
0.0389966


When k1 < k10, k1m =
0.0819202
0.1070787
0.0649623
0.0421533
0.0388171


When d1 ≧ d10, d1m (nm) =
3.898
6.524
6.747
11.475
16.758


When d1 < d10, d1m (nm) =
1.590
4.095
4.185
3.862
3.299


When n2 ≧ n20, n2m =
0.0627563
0.1085400
0.1152271
0.0712305
0.0983997


When n2 < n20, n2m =
0.1565955
0.1599133
0.1627686
0.1038867
0.1174939


When k2 ≧ k20, k2m =
0.0810010
0.1085132
0.1160754
0.0447900
0.0617737


When k2 < k20, k2m =
0.1061572
0.0966113
0.0915161
0.0720264
0.0692358


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
26.800
∞


When d2 < d20, d2m (nm) =
27.538
81.885
123.147
14.572
12.208





















1.0 < NA ≦ 1.1


135 < T ≦ 145







25/34












Case
14-06
14-07
14-08
14-09
14-10





n10
1.7228203
1.7144911
1.7050797
1.6925663
1.6991742


k10
0.0749158
0.0796518
0.0657099
0.0675694
0.0739382


d10 (nm)
92.874
160.015
160.534
214.049
220.936


n20
1.6951594
1.7090445
1.6817729
1.6900690
1.6992675


k20
0.1935801
0.2610315
0.1743389
0.2005073
0.2525134


d20 (nm)
262.590
141.223
260.739
206.287
141.832


When n1 ≧ n10, n1m =
0.0517419
0.0380176
0.0550000
0.0300269
0.0099573


When n1 < n10, n1m =
0.0171826
0.0033435
0.0205762
0.0461255
0.0255640


When k1 ≧ k10, k1m =
0.0402747
0.0176941
0.0369080
0.0452966
0.0196790


When k1 < k10, k1m =
0.0440662
0.0145313
0.0289917
0.0339844
0.0188269


When d1 ≧ d10, d1m (nm) =
34.339
18.702
∞
∞
∞


When d1 < d10, d1m (nm) =
4.946
0.924
8.433
45.536
10.412


When n2 ≧ n20, n2m =
0.1089246
0.0638684
0.0364478
0.1628357
0.0605127


When n2 < n20, n2m =
0.1178552
0.0117664
0.1214197
0.0809363
0.0143933


When k2 ≧ k20, k2m =
0.0721460
0.0078210
0.0372485
0.1200403
0.0864673


When k2 < k20, k2m =
0.0629919
0.0624194
0.0562036
0.0635217
0.0436145


When d2 ≧ d20, d2m (nm) =
∞
21.562
∞
∞
25.612


When d2 < d20, d2m (nm) =
67.089
1.645
48.128
21.535
3.107










1.0 < NA ≦ 1.1


135 < T ≦ 145











Case
14-11
14-12







n10
1.6955775
1.6953573



k10
0.0548747
0.0556511



d10 (nm)
213.500
272.231



n20
1.6934763
1.6917841



k20
0.1457299
0.1736649



d20 (nm)
319.743
260.476



When n1 ≧ n10, n1m =
0.0884082
0.0714819



When n1 < n10, n1m =
0.0760022
0.0518335



When k1 ≧ k10, k1m =
0.0634009
0.0652063



When k1 < k10, k1m =
0.0349133
0.0395740



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
128.996
113.518



When n2 ≧ n20, n2m =
0.2359680
0.2895325



When n2 < n20, n2m =
0.1212769
0.2158911



When k2 ≧ k20, k2m =
0.1345789
0.2124060



When k2 < k20, k2m =
0.0582837
0.0793396



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
94.216
91.728






















1.0 < NA ≦ 1.1


145 < T ≦ 155







26/34












Case
15-01
15-02
15-03
15-04
15-05





n10
1.8842999
1.9020060
1.9176161
1.7347347
1.7402087


k10
0.1660082
0.1078045
0.0733974
0.0970436
0.0854812


d10 (nm)
15.542
13.884
11.927
91.613
92.221


n20
1.6642092
1.7406676
1.7608162
1.6897518
1.7427648


k20
0.3881866
0.3180988
0.2687301
0.3028107
0.2437105


d20 (nm)
148.595
199.025
254.127
138.166
190.058


When n1 ≧ n10, n1m =
0.0902356
0.1039673
0.1191321
0.0403284
0.0477295


When n1 < n10, n1m =
0.0608057
0.0712415
0.0806982
0.0168616
0.0123145


When k1 ≧ k10, k1m =
0.0796985
0.0922314
0.1003394
0.0414099
0.0352649


When k1 < k10, k1m =
0.0913672
0.1040308
0.0733974
0.0415906
0.0369519


When d1 ≧ d10, d1m (nm) =
5.569
6.401
6.478
11.141
16.036


When d1 < d10, d1m (nm) =
3.524
3.984
3.954
3.546
2.715


When n2 ≧ n20, n2m =
0.0975891
0.1093347
0.1166919
0.0721533
0.0993201


When n2 < n20, n2m =
0.1510022
0.1570532
0.1613013
0.0996582
0.1116626


When k2 ≧ k20, k2m =
0.1021082
0.1115308
0.1139111
0.0446167
0.0576575


When k2 < k20, k2m =
0.1042151
0.0981909
0.0922217
0.0735095
0.0699536


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
23.089
∞


When d2 < d20, d2m (nm) =
36.178
75.817
118.717
13.060
9.872










1.0 < NA ≦ 1.1


145 < T ≦ 155












Case
15-06
15-07
15-08
15-09
15-10





n10
1.7232674
1.7163169
1.7052425
1.6979604
1.6919325


k10
0.0768076
0.0822242
0.0670983
0.0765182
0.0693101


d10 (nm)
92.842
160.121
160.367
219.964
212.895


n20
1.6931409
1.7162208
1.6808978
1.6978817
1.6886216


k20
0.2010537
0.2770503
0.1806066
0.2641846
0.2063377


d20 (nm)
254.319
132.120
252.327
134.431
199.162


When n1 ≧ n10, n1m =
0.0505859
0.0375513
0.0535669
0.0055981
0.0297021


When n1 < n10, n1m =
0.0155139
0.0002051
0.0181250
0.0232141
0.0494775


When k1 ≧ k10, k1m =
0.0378564
0.0051208
0.0335376
0.0146118
0.0441443


When k1 < k10, k1m =
0.0427637
0.0032507
0.0275378
0.0178613
0.0327478


When d1 ≧ d10, d1m (nm) =
33.581
19.229
∞
4.817
∞


When d1 < d10, d1m (nm) =
4.347
0.056
6.999
10.286
43.553


When n2 ≧ n20, n2m =
0.0760803
0.0599353
0.0299109
0.0539575
0.2378027


When n2 < n20, n2m =
0.1135510
0.0008435
0.1135376
0.0106042
0.0839368


When k2 ≧ k20, k2m =
0.0671289
0.0005420
0.0313745
0.0886438
0.1159473


When k2 < k20, k2m =
0.0634387
0.0680176
0.0561853
0.0306653
0.0671289


When d2 ≧ d20, d2m (nm) =
∞
12.405
∞
21.650
∞


When d2 < d20, d2m (nm) =
64.219
0.105
32.640
2.145
24.441





















1.0 < NA ≦ 1.1


145 < T ≦ 155







27/34











Case
15-11
15-12







n10
1.6933082
1.6953110



k10
0.0619759
0.0563706



d10 (nm)
212.839
272.392



n20
1.6904544
1.6905212



k20
0.1723582
0.1778331



d20 (nm)
255.647
252.170



When n1 ≧ n10, n1m =
0.0645605
0.0686462



When n1 < n10, n1m =
0.0718213
0.0516125



When k1 ≧ k10, k1m =
0.0578125
0.0646021



When k1 < k10, k1m =
0.0349402
0.0400220



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
54.857
112.777



When n2 ≧ n20, n2m =
0.2345605
0.2885852



When n2 < n20, n2m =
0.1388916
0.2180322



When k2 ≧ k20, k2m =
0.1280078
0.2117786



When k2 < k20, k2m =
0.0658081
0.0782971



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
73.297
86.154











1.0 < NA ≦ 1.1


155 < T ≦ 165












Case
16-01
16-02
16-03
16-04
16-05





n10
1.9162825
1.8960663
1.9085468
1.9232010
1.7368663


k10
0.2485644
0.1719364
0.1144956
0.0848488
0.1019026


d10 (nm)
18.297
15.704
13.923
11.624
91.322


n20
1.6104232
1.6708316
1.7385514
1.7455678
1.6869885


k20
0.6165991
0.4169686
0.3337318
0.2771185
0.3224919


d20 (nm)
83.442
139.520
191.444
248.983
130.342


When n1 ≧ n10, n1m =
0.0684412
0.0871606
0.1018298
0.1200745
0.0372510


When n1 < n10, n1m =
0.0186816
0.0568530
0.0690649
0.0803638
0.0125696


When k1 ≧ k10, k1m =
0.0233801
0.0734265
0.0893420
0.1020142
0.0332275


When k1 < k10, k1m =
0.0710925
0.0921472
0.1049048
0.0848488
0.0396851


When d1 ≧ d10, d1m (nm) =
3.544
5.170
6.051
6.159
10.019


When d1 < d10, d1m (nm) =
0.960
3.162
3.726
3.719
2.554


When n2 ≧ n20, n2m =
0.0392468
0.0938416
0.1080847
0.1165613
0.0639832


When n2 < n20, n2m =
0.1557959
0.1481714
0.1540210
0.1601440
0.0923059


When k2 ≧ k20, k2m =
0.0796021
0.1023108
0.1103064
0.1095667
0.0344885


When k2 < k20, k2m =
0.1143958
0.1026965
0.0973987
0.0917590
0.0690210


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
16.255


When d2 < d20, d2m (nm) =
16.079
31.215
71.737
92.392
12.361





















1.0 < NA ≦ 1.1


155 < T ≦ 165







28/34












Case
16-06
16-07
16-08
16-09
16-10





n10
1.7401611
1.7243481
1.7054586
1.6959475
1.6918299


k10
0.0886217
0.0791015
0.0688139
0.0801582
0.0707672


d10 (nm)
92.017
92.538
159.721
218.084
213.401


n20
1.7381402
1.6930588
1.6812702
1.6891859
1.6865968


k20
0.2555882
0.2092609
0.1871719
0.2763746
0.2143676


d20 (nm)
182.755
245.988
244.029
128.431
190.286


When n1 ≧ n10, n1m =
0.0455261
0.0488196
0.0509851
0.0098682
0.0278625


When n1 < n10, n1m =
0.0098901
0.0131677
0.0163489
0.0140930
0.0421411


When k1 ≧ k10, k1m =
0.0306140
0.0345203
0.0271167
0.0171570
0.0425635


When k1 < k10, k1m =
0.0347180
0.0404199
0.0257288
0.0171082
0.0318542


When d1 ≧ d10, d1m (nm) =
14.632
33.648
∞
8.318
∞


When d1 < d10, d1m (nm) =
2.133
3.535
5.969
6.525
43.306


When n2 ≧ n20, n2m =
0.0895227
0.0573254
0.0211304
0.0441309
0.2430603


When n2 < n20, n2m =
0.1067090
0.1098926
0.1107275
0.0233423
0.0869226


When k2 ≧ k20, k2m =
0.0460217
0.0587354
0.0210486
0.0642297
0.1089050


When k2 < k20, k2m =
0.0680432
0.0628845
0.0551514
0.0464880
0.0738831


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.572
∞


When d2 < d20, d2m (nm) =
8.553
37.425
30.745
5.059
27.273










1.0 < NA ≦ 1.1


155 < T ≦ 165











Case
16-11
16-12







n10
1.6935501
1.6953216



k10
0.0625258
0.0573372



d10 (nm)
213.666
272.694



n20
1.6897170
1.6885432



k20
0.1780108
0.1839003



d20 (nm)
246.097
243.579



When n1 ≧ n10, n1m =
0.0658508
0.0696008



When n1 < n10, n1m =
0.0609790
0.0519751



When k1 ≧ k10, k1m =
0.0564087
0.0639087



When k1 < k10, k1m =
0.0340259
0.0390979



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
55.431
113.126



When n2 ≧ n20, n2m =
0.2425122
0.2917029



When n2 < n20, n2m =
0.1355713
0.2189172



When k2 ≧ k20, k2m =
0.1230981
0.2089771



When k2 < k20, k2m =
0.0647131
0.0785583



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
74.519
83.205






















1.0 < NA ≦ 1.1


165 < T ≦ 175







29/34












Case
17-01
17-02
17-03
17-04
17-05





n10
1.9620125
1.9138120
1.9194872
1.9263431
1.7366416


k10
0.2671830
0.1838008
0.1265886
0.0918160
0.1083929


d10 (nm)
17.281
15.160
13.286
11.575
90.600


n20
1.6251877
1.6631095
1.7204546
1.7389610
1.6676220


k20
0.6875073
0.4399257
0.3440475
0.2853240
0.3363185


d20 (nm)
75.420
132.541
186.036
241.421
124.136


When n1 ≧ n10, n1m =
0.0681287
0.0852625
0.1025696
0.1184741
0.0323010


When n1 < n10, n1m =
0.0103625
0.0516760
0.0678894
0.0788623
0.0048279


When k1 ≧ k10, k1m =
0.0130603
0.0684912
0.0894849
0.1012756
0.0174634


When k1 < k10, k1m =
0.0671069
0.0945691
0.1086621
0.0918160
0.0305151


When d1 ≧ d10, d1m (nm) =
3.029
4.576
5.503
5.915
7.890


When d1 < d10, d1m (nm) =
0.441
2.597
3.327
3.560
0.944


When n2 ≧ n20, n2m =
0.0235046
0.0887256
0.1055566
0.1147229
0.0355994


When n2 < n20, n2m =
0.1565857
0.1459790
0.1532703
0.1591589
0.0840686


When k2 ≧ k20, k2m =
0.0495569
0.0950366
0.1036096
0.1065601
0.0135376


When k2 < k20, k2m =
0.1038318
0.0972864
0.0941003
0.0904578
0.0586487


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
9.834


When d2 < d20, d2m (nm) =
13.490
32.564
69.289
94.292
9.844










1.0 < NA ≦ 1.1


165 < T ≦ 175












Case
17-06
17-07
17-08
17-09
17-10





n10
1.7377165
1.7250070
1.7054487
1.6921136
1.6937452


k10
0.0918810
0.0812670
0.0704565
0.0719896
0.0634118


d10 (nm)
91.516
92.096
158.889
214.506
214.086


n20
1.7225143
1.6922454
1.6815182
1.6833735
1.6893106


k20
0.2640565
0.2155950
0.1921887
0.2231205
0.1840166


d20 (nm)
176.484
237.445
235.428
180.418
236.602


When n1 ≧ n10, n1m =
0.0420569
0.0467627
0.0482849
0.0256970
0.0615491


When n1 < n10, n1m =
0.0067480
0.0110010
0.0145544
0.0346619
0.0533179


When k1 ≧ k10, k1m =
0.0242395
0.0311426
0.0191064
0.0402332
0.0548975


When k1 < k10, k1m =
0.0306030
0.0379785
0.0179834
0.0315259
0.0339990


When d1 ≧ d10, d1m (nm) =
13.053
20.074
∞
∞
∞


When d1 < d10, d1m (nm) =
1.437
2.846
5.076
44.014
52.355


When n2 ≧ n20, n2m =
0.0699756
0.0474695
0.0119531
0.2616345
0.2513293


When n2 < n20, n2m =
0.1027979
0.1100684
0.1104504
0.0766565
0.1353430


When k2 ≧ k20, k2m =
0.0294397
0.0490112
0.0106458
0.1033704
0.1166565


When k2 < k20, k2m =
0.0637073
0.0613086
0.0537012
0.0738440
0.0656140


When d2 ≧ d20, d2m (nm) =
∞
∞
5.139
∞
∞


When d2 < d20, d2m (nm) =
7.091
63.320
32.177
24.892
75.277





















1.0 < NA ≦ 1.1


165 < T ≦ 175







30/34











Case
17-11
17-12







n10
1.6937402
1.6958036



k10
0.0634247
0.0530688



d10 (nm)
214.067
271.703



n20
1.6892020
1.6918593



k20
0.1839903
0.1637010



d20 (nm)
236.644
291.452



When n1 ≧ n10, n1m =
0.0614392
0.0799048



When n1 < n10, n1m =
0.0533545
0.0613391



When k1 ≧ k10, k1m =
0.0548865
0.0657874



When k1 < k10, k1m =
0.0340295
0.0406555



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
52.349
186.337



When n2 ≧ n20, n2m =
0.2512048
0.2852795



When n2 < n20, n2m =
0.1353552
0.2060364



When k2 ≧ k20, k2m =
0.1167688
0.2088965



When k2 < k20, k2m =
0.0656104
0.0720715



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
75.294
119.308











1.0 < NA ≦ 1.1


175 < T ≦ 185












Case
18-01
18-02
18-03
18-04
18-05





n10
2.0247974
1.9282935
1.9213955
1.9262173
1.7355101


k10
0.2830183
0.1992550
0.1387890
0.1063571
0.0947091


d10 (nm)
15.097
14.428
13.062
11.253
91.033


n20
1.6266898
1.6428403
1.7027750
1.7173021
1.7079959


k20
0.7191283
0.4517072
0.3507816
0.2869739
0.2693832


d20 (nm)
71.681
126.823
179.475
236.027
169.192


When n1 ≧ n10, n1m =
0.0749963
0.0847278
0.1010168
0.1197595
0.0387598


When n1 < n10, n1m =
0.0029248
0.0471021
0.0652051
0.0785376
0.0037976


When k1 ≧ k10, k1m =
0.0038599
0.0655127
0.0884351
0.1039075
0.0170227


When k1 < k10, k1m =
0.0706714
0.0951611
0.1067810
0.1063571
0.0250378


When d1 ≧ d10, d1m (nm) =
2.365
4.047
5.170
5.710
10.979


When d1 < d10, d1m (nm) =
0.098
2.142
3.074
3.403
0.799


When n2 ≧ n20, n2m =
0.0068848
0.0841113
0.1036328
0.1139966
0.0477551


When n2 < n20, n2m =
0.1606787
0.1462891
0.1534180
0.1596240
0.1042908


When k2 ≧ k20, k2m =
0.0111658
0.0845300
0.0979260
0.1010864
0.0158423


When k2 < k20, k2m =
0.0939917
0.0914209
0.0916113
0.0894141
0.0611707


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
3.000
39.175
67.597
105.537
4.807





















1.0 < NA ≦ 1.1


175 < T ≦ 185







31/34












Case
18-06
18-07
18-08
18-09
18-10





n10
1.7251933
1.7054174
1.6937830
1.6952847
1.6957027


k10
0.0829804
0.0718367
0.0647049
0.0582261
0.0542195


d10 (nm)
91.728
158.389
214.330
213.359
271.586


n20
1.6903561
1.6812041
1.6889835
1.6934588
1.6918383


k20
0.2192539
0.1954390
0.1894046
0.1611341
0.1679902


d20 (nm)
228.367
226.084
226.812
284.005
281.728


When n1 ≧ n10, n1m =
0.0450793
0.0463184
0.0575061
0.0820801
0.0778577


When n1 < n10, n1m =
0.0094861
0.0044336
0.0478479
0.0612256
0.0602185


When k1 ≧ k10, k1m =
0.0283801
0.0117395
0.0529968
0.0602039
0.0649841


When k1 < k10, k1m =
0.0362878
0.0115625
0.0337854
0.0347266
0.0400525


When d1 ≧ d10, d1m (nm) =
16.774
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
2.397
1.386
50.875
126.709
185.173


When n2 ≧ n20, n2m =
0.0407971
0.0052539
0.2620386
0.2460583
0.2888794


When n2 < n20, n2m =
0.1134692
0.1157361
0.1359692
0.1267810
0.2086084


When k2 ≧ k20, k2m =
0.0417627
0.0042761
0.1123547
0.1276489
0.2100842


When k2 < k20, k2m =
0.0604272
0.0538147
0.0667053
0.0613220
0.0762817


When d2 ≧ d20, d2m (nm) =
∞
1.973
∞
∞
∞


When d2 < d20, d2m (nm) =
63.259
35.408
73.536
81.916
101.090










1.0 < NA ≦ 1.1


185 < T ≦ 195












Case
19-01
19-02
19-03
19-04
19-05





n10
1.9316549
1.9193011
1.9209840
1.9114684
1.7364379


k10
0.2158025
0.1476126
0.1061325
0.1024475
0.0969838


d10 (nm)
14.297
13.272
11.842
10.224
91.033


n20
1.6202378
1.6935029
1.7241227
1.6976483
1.7085420


k20
0.4645248
0.3598725
0.2946413
0.2438294
0.2774318


d20 (nm)
119.165
170.049
224.030
285.021
158.680


When n1 ≧ n10, n1m =
0.0819873
0.0986853
0.1146375
0.1344971
0.0375342


When n1 < n10, n1m =
0.0431250
0.0625305
0.0746716
0.0933276
0.0023010


When k1 ≧ k10, k1m =
0.0616553
0.0860156
0.0981763
0.1190894
0.0118958


When k1 < k10, k1m =
0.0896899
0.1016528
0.1061325
0.1024475
0.0218677


When d1 ≧ d10, d1m (nm) =
3.700
5.023
5.787
6.264
9.942


When d1 < d10, d1m (nm) =
1.892
2.963
3.440
3.984
0.476


When n2 ≧ n20, n2m =
0.0797485
0.1030664
0.1135645
0.1221387
0.0340320


When n2 < n20, n2m =
0.1493750
0.1566296
0.1631348
0.1387097
0.1094446


When k2 ≧ k20, k2m =
0.0775891
0.0962708
0.1030847
0.0998328
0.0100928


When k2 < k20, k2m =
0.0909656
0.0941418
0.0920776
0.0860498
0.0649939


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
42.778


When d2 < d20, d2m (nm) =
39.461
66.761
95.735
134.721
2.964





















1.0 < NA ≦ 1.1


185 < T ≦ 195







32/34












Case
19-06
19-07
19-08
19-09
19-10





n10
1.7258494
1.7176246
1.7057732
1.7053832
1.6928552


k10
0.0843222
0.0727056
0.0731106
0.0633918
0.0748243


d10 (nm)
91.766
91.617
158.709
158.181
216.444


n20
1.6907525
1.6784161
1.6805392
1.6859880
1.6825267


k20
0.2229229
0.1842107
0.1989479
0.1669818
0.2415835


d20 (nm)
218.067
277.206
215.842
272.384
158.548


When n1 ≧ n10, n1m =
0.0445569
0.0497937
0.0455957
0.0532361
0.0209436


When n1 < n10, n1m =
0.0086951
0.0298450
0.0022034
0.0367859
0.0248157


When k1 ≧ k10, k1m =
0.0263611
0.0534119
0.0080444
0.0507507
0.0311414


When k1 < k10, k1m =
0.0359253
0.0504663
0.0097656
0.0393250
0.0256995


When d1 ≧ d10, d1m (nm) =
15.734
41.766
∞
∞
12.676


When d1 < d10, d1m (nm) =
2.168
9.272
0.695
75.025
12.180


When n2 ≧ n20, n2m =
0.0361047
0.0638184
0.0029834
0.0794446
0.0872498


When n2 < n20, n2m =
0.1156152
0.1202979
0.1187366
0.1037524
0.0413367


When k2 ≧ k20, k2m =
0.0400842
0.0626270
0.0025122
0.0450354
0.0876147


When k2 < k20, k2m =
0.0626514
0.0561853
0.0563074
0.0506238
0.0672510


When d2 ≧ d20, d2m (nm) =
∞
∞
1.098
∞
∞


When d2 < d20, d2m (nm) =
62.415
80.313
33.556
35.245
14.500










1.0 < NA ≦ 1.1


185 < T ≦ 195












Case
19-11
19-12
19-13







n10
1.6935473
1.6950516
1.6954923



k10
0.0663823
0.0596605
0.0554795



d10 (nm)
214.407
213.429
271.226



n20
1.6888366
1.6925794
1.6917166



k20
0.1945007
0.1643538
0.1716832



d20 (nm)
217.060
274.430
272.356



When n1 ≧ n10, n1m =
0.0539099
0.0837012
0.0771448



When n1 < n10, n1m =
0.0450378
0.0604199
0.0593555



When k1 ≧ k10, k1m =
0.0507373
0.0587012
0.0639185



When k1 < k10, k1m =
0.0306738
0.0334839
0.0392737



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
49.334
125.965
183.474



When n2 ≧ n20, n2m =
0.1392200
0.1753748
0.2943286



When n2 < n20, n2m =
0.1378223
0.1262683
0.2110303



When k2 ≧ k20, k2m =
0.1089429
0.1267468
0.2119958



When k2 < k20, k2m =
0.0654358
0.0611353
0.0788904



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
37.875
75.613
93.291






















1.0 < NA ≦ 1.1


195 < T ≦ 205







33/34












Case
20-01
20-02
20-03
20-04
20-05





n10
1.9124203
1.9240615
1.9069086
1.7409810
1.7270720


k10
0.1489422
0.1092971
0.1015424
0.0988730
0.0857435


d10 (nm)
14.330
12.001
10.748
91.533
92.142


n20
1.7039618
1.7245262
1.7018591
1.7256420
1.6923707


k20
0.3787231
0.3026113
0.2499950
0.2922591
0.2292874


d20 (nm)
157.291
214.201
273.963
146.253
207.814


When n1 ≧ n10, n1m =
0.0947424
0.1140125
0.1293140
0.0383984
0.0447009


When n1 < n10, n1m =
0.0592273
0.0732715
0.0895557
0.0020898
0.0081226


When k1 ≧ k10, k1m =
0.0804358
0.0961365
0.1132190
0.0106335
0.0246362


When k1 < k10, k1m =
0.0954272
0.1092971
0.1015424
0.0220923
0.0359277


When d1 ≧ d10, d1m (nm) =
5.168
5.724
6.406
9.801
15.595


When d1 < d10, d1m (nm) =
3.029
3.355
4.072
0.420
2.001


When n2 ≧ n20, n2m =
0.1047864
0.1153137
0.1226477
0.0347485
0.0318494


When n2 < n20, n2m =
0.1598962
0.1638757
0.1417261
0.1115564
0.1129541


When k2 ≧ k20, k2m =
0.1020288
0.1044775
0.1018286
0.0106042
0.0415295


When k2 < k20, k2m =
0.1029260
0.0959216
0.0891724
0.0737659
0.0663513


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
37.674
∞


When d2 < d20, d2m (nm) =
61.016
86.078
130.875
2.293
32.252










1.0 < NA ≦ 1.1


195 < T ≦ 205












Case
20-06
20-07
20-08
20-09
20-10





n10
1.7180387
1.7063746
1.7058520
1.6924739
1.6928977


k10
0.0734703
0.0744769
0.0640895
0.0767908
0.0684401


d10 (nm)
91.877
159.624
158.885
216.680
213.761


n20
1.6777924
1.6791348
1.6855365
1.6850078
1.6885850


k20
0.1881130
0.2047799
0.1710983
0.2520629
0.1999527


d20 (nm)
267.481
205.830
262.479
148.712
208.689


When n1 ≧ n10, n1m =
0.0499475
0.0454993
0.0542188
0.0126501
0.0501160


When n1 < n10, n1m =
0.0300122
0.0018469
0.0331775
0.0226819
0.0449377


When k1 ≧ k10, k1m =
0.0534277
0.0070447
0.0503931
0.0235315
0.0487341


When k1 < k10, k1m =
0.0493896
0.0111902
0.0386401
0.0180737
0.0270740


When d1 ≧ d10, d1m (nm) =
33.063
∞
∞
10.064
∞


When d1 < d10, d1m (nm) =
9.229
0.603
19.062
10.036
46.531


When n2 ≧ n20, n2m =
0.0633008
0.0027478
0.0774658
0.0675293
0.1390137


When n2 < n20, n2m =
0.1171533
0.1127539
0.1100610
0.0218616
0.1442749


When k2 ≧ k20, k2m =
0.0639148
0.0025830
0.0457581
0.0823975
0.1098364


When k2 < k20, k2m =
0.0580542
0.0529590
0.0524817
0.0502942
0.0628650


When d2 ≧ d20, d2m (nm) =
∞
1.007
∞
∞
∞


When d2 < d20, d2m (nm) =
77.001
28.132
32.836
6.408
22.345



















1.0 < NA ≦ 1.1


195 < T ≦ 205







34/34











Case
20-11
20-12















n10
1.6947635
1.6952371



k10
0.0610999
0.0566636



d10 (nm)
213.366
270.653



n20
1.6918971
1.6914186



k20
0.1679521
0.1751623



d20 (nm)
265.388
263.994



When n1 ≧ n10, n1m =
0.0863086
0.0772644



When n1 < n10, n1m =
0.0626501
0.0586890



When k1 ≧ k10, k1m =
0.0572302
0.0627917



When k1 < k10, k1m =
0.0322180
0.0382104



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
124.819
121.330



When n2 ≧ n20, n2m =
0.1702917
0.3021582



When n2 < n20, n2m =
0.1249365
0.2142798



When k2 ≧ k20, k2m =
0.1249084
0.2136462



When k2 < k20, k2m =
0.0643469
0.0826477



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
66.113
91.025.

3. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:
providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below; and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.1<NA ≦1.2, the antireflective film including an upper layer having a complex refractive index N1 , and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the. lower layer is d2 (unit: nm) , when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1,n2,k2, and d2 satisfy the relational expression


{(n1−n10)/(n1m−n10) }2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1;


a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10;a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20; and
in the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<N10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is ”k1m”; in the line of “When d1≧d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of 37 When d2<d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d20−d2m”.













1.1 < NA ≦ 1.2


2 ≦ T ≦ 15







1/27












Case
1-01
1-02
1-03
1-04
1-05





n10
2.0940641
1.9168406
1.8970115
1.8805879
1.8778358


k10
0.0325844
0.1807255
0.1529573
0.1098415
0.1082679


d10 (nm)
26.090
35.662
31.182
13.577
19.930


n20
4.2290158
5.4932306
2.4318401
1.7032895
1.8340760


k20
2.3935124
0.6123354
0.5958382
0.2751108
0.3677230


d20 (nm)
3.632
19.087
52.406
218.193
142.226


When n1 ≧ n10, n1m =
0.0779846
0.0720874
0.0701013
0.1012354
0.0784314


When n1 < n10, n1m =
0.0750281
0.0636047
0.0555591
0.0635571
0.0497058


When k1 ≧ k10, k1m =
0.0672229
0.0527649
0.0494641
0.0853247
0.0590771


When k1 < k10, k1m =
0.0325844
0.0849731
0.0840393
0.1029980
0.0867822


When d1 ≧ d10, d1m (nm) =
3.416
5.199
6.198
6.716
7.382


When d1 < d10, d1m (nm) =
2.721
3.845
3.923
3.853
3.873


When n2 ≧ n20, n2m =
0.2775293
0.1187439
0.1333862
0.1147803
0.1115393


When n2 < n20, n2m =
0.2711597
0.1202087
0.1603455
0.1449023
0.1457849


When k2 ≧ k20, k2m =
0.2845105
0.1470557
0.1794812
0.0967163
0.1467151


When k2 < k20, k2m =
0.2499512
0.1180896
0.1302063
0.0855334
0.0954285


When d2 ≧ d20, d2m (nm) =
0.458
0.467
5.440
∞
∞


When d2 < d20, d2m (nm) =
0.433
0.450
5.242
81.747
30.656










1.1 < NA ≦ 1.2


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.8663312
1.7888608
1.7735009
1.7175310
1.7199475


k10
0.0978132
0.1060865
0.0957437
0.0751352
0.0655065


d10 (nm)
12.232
103.503
98.181
95.409
94.621


n20
1.6938400
4.4234099
2.0208865
1.6658936
1.6963762


k20
0.2288643
0.4526804
0.4158741
0.2054797
0.1762614


d20 (nm)
277.705
24.164
66.693
212.937
266.043


When n1 ≧ n10, n1m =
0.1143909
0.0588428
0.0489270
0.0419214
0.0484180


When n1 < n10, n1m =
0.0786536
0.0104822
0.0094507
0.0157727
0.0265735


When k1 ≧ k10, k1m =
0.1033447
0.0215918
0.0249109
0.0382361
0.0520056


When k1 < k10, k1m =
0.0978132
0.0439624
0.0358655
0.0399121
0.0459387


When d1 ≧ d10, d1m (nm) =
7.609
9.370
10.912
18.272
51.841


When d1 < d10, d1m (nm) =
4.794
1.739
1.766
4.805
8.596


When n2 ≧ n20, n2m =
0.1069236
0.0468066
0.0740674
0.0384924
0.0631091


When n2 < n20, n2m =
0.1302808
0.1036670
0.1052673
0.0829468
0.0987561


When k2 ≧ k20, k2m =
0.0918579
0.0409717
0.0495154
0.0385596
0.0522119


When k2 < k20, k2m =
0.0786169
0.0807788
0.0903577
0.0528296
0.0515430


When d2 ≧ d20, d2m (nm) =
∞
0.296
4.999
∞
∞


When d2 < d20, d2m (nm) =
128.233
0.621
5.371
23.038
34.154





















1.1 < NA ≦ 1.2


2 ≦ T ≦ 15







2/27












Case
1-11
1-12
1-13
1-14
1-15





n10
1.7156729
1.7043499
1.7082412
1.6926126
1.6890888


k10
0.0770168
0.0644952
0.0577629
0.0683906
0.0745003


d10 (nm)
188.315
165.315
163.169
237.184
217.718


n20
6.9620048
1.6731418
1.7075031
6.7859369
1.7770504


k20
3.4231449
0.1899705
0.1626792
2.9992529
0.3401503


d20 (nm)
0.879
207.250
259.766
0.993
84.925


When n1 ≧ n10, n1m =
0.0649841
0.0417419
0.0509473
0.0348376
0.0194055


When n1 < n10, n1m =
0.0083154
0.0317078
0.0477380
0.0764368
0.0607605


When k1 ≧ k10, k1m =
0.0257251
0.0333704
0.0433435
0.0403589
0.0329480


When k1 < k10, k1m =
0.0275232
0.0338538
0.0333484
0.0319214
0.0242554


When d1 ≧ d10, d1m (nm) =
38.959
∞
∞
19.483
9.981


When d1 < d10, d1m (nm) =
3.134
16.146
77.216
43.463
24.681


When n2 ≧ n20, n2m =
0.2971887
0.0474377
0.0745630
0.5633252
0.1177502


When n2 < n20, n2m =
0.6091602
0.0721411
0.0651379
0.4300269
0.0317639


When k2 ≧ k20, k2m =
0.2827808
0.0222888
0.0325830
0.2436438
0.0560791


When k2 < k20, k2m =
0.6937878
0.0478259
0.0479700
0.5647217
0.0980969


When d2 ≧ d20, d2m (nm) =
0.055
16.772
∞
0.120
16.691


When d2 < d20, d2m (nm) =
0.135
19.208
16.504
0.176
3.670










1.1 < NA ≦ 1.2


2 ≦ T ≦ 15











Case
1-16
1-17
1-18
1-19





n10
1.6903292
1.6921355
1.6951475
1.7004017


k10
0.0721915
0.0670288
0.0546351
0.0599028


d10 (nm)
210.963
207.063
219.259
265.986


n20
1.7111030
1.6978167
1.6889102
1.7029410


k20
0.2426612
0.1954345
0.1606659
0.1992607


d20 (nm)
155.846
222.387
263.728
214.965


When n1 ≧ n10, n1m =
0.0284180
0.0456091
0.0773694
0.0612244


When n1 < n10, n1m =
0.0510327
0.0467078
0.0619885
0.0410486


When k1 ≧ k10, k1m =
0.0455554
0.0511133
0.0524768
0.0499927


When k1 < k10, k1m =
0.0320984
0.0388074
0.0353687
0.0377380


When d1 ≧ d10, d1m (nm) =
23.770
∞
∞
∞


When d1 < d10, d1m (nm) =
28.472
31.416
128.164
94.534


When n2 ≧ n20, n2m =
0.1260327
0.1631665
0.2120154
0.2674829


When n2 < n20, n2m =
0.0663647
0.1722144
0.1079456
0.2316101


When k2 ≧ k20, k2m =
0.0960291
0.1259009
0.1121619
0.2074023


When k2 < k20, k2m =
0.0846741
0.0757690
0.0591858
0.0894751


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
12.288
72.281
78.597
77.855





















1.1 < NA ≦ 1.2


15 < T ≦ 25







3/27












Case
2-01
2-02
2-03
2-04
2-05





n10
1.8738578
1.8839217
1.8842367
1.8705650
1.7997475


k10
0.2051029
0.1169859
0.1130268
0.1010320
0.1076402


d10 (nm)
37.506
20.540
14.059
12.433
101.817


n20
6.9151921
1.8488520
1.7087850
1.6946915
5.7702673


k20
0.6847654
0.3990514
0.2917115
0.2394813
0.5312541


d20 (nm)
14.288
132.865
208.377
268.610
17.283


When n1 ≧ n10, n1m =
0.0713965
0.0757019
0.0971472
0.1115784
0.0520068


When n1 < n10, n1m =
0.0555054
0.0476453
0.0599609
0.0759399
0.0098120


When k1 ≧ k10, k1m =
0.0541125
0.0561304
0.0804553
0.1002258
0.0237036


When k1 < k10, k1m =
0.0773486
0.0843945
0.1004919
0.1010320
0.0377808


When d1 ≧ d10, d1m (nm) =
5.211
6.923
6.482
7.316
8.566


When d1 < d10, d1m (nm) =
3.920
3.580
3.648
4.569
1.552


When n2 ≧ n20, n2m =
0.1375024
0.1133521
0.1126624
0.1051160
0.0578821


When n2 < n20, n2m =
0.1468335
0.1457764
0.1432654
0.1327966
0.1020337


When k2 ≧ k20, k2m =
0.1698267
0.1546228
0.0978870
0.0916199
0.0398865


When k2 < k20, k2m =
0.1355151
0.0979541
0.0869165
0.0797766
0.0850256


When d2 ≧ d20, d2m (nm) =
0.302
∞
∞
∞
0.186


When d2 < d20, d2m (nm) =
0.308
25.359
77.278
123.573
0.315










1.1 < NA ≦ 1.2


15 < T ≦ 25












Case
2-06
2-07
2-08
2-09
2-10





n10
1.7189014
1.7208712
1.7236639
1.7047019
1.7084293


k10
0.0782837
0.0678223
0.0843652
0.0670962
0.0597123


d10 (nm)
95.289
94.558
181.922
165.192
163.108


n20
1.6643388
1.6960341
5.6387216
1.6715149
1.7074208


k20
0.2165956
0.1841027
4.7363270
0.1999125
0.1697699


d20 (nm)
204.139
257.386
0.821
198.564
251.199


When n1 ≧ n10, n1m =
0.0400110
0.0468091
0.0526855
0.0398865
0.0490320


When n1 < n10, n1m =
0.0126721
0.0238684
0.0001306
0.0279565
0.0460034


When k1 ≧ k10, k1m =
0.0335376
0.0489734
0.0020081
0.0268384
0.0389331


When k1 < k10, k1m =
0.0373218
0.0446973
0.0057251
0.0295178
0.0306982


When d1 ≧ d10, d1m (nm) =
16.137
28.984
27.528
∞
∞


When d1 < d10, d1m (nm) =
3.682
7.422
0.042
13.795
27.544


When n2 ≧ n20, n2m =
0.0331177
0.0610901
0.0075977
0.0397839
0.0734460


When n2 < n20, n2m =
0.0802783
0.0961804
0.6135461
0.0646704
0.0518091


When k2 ≧ k20, k2m =
0.0326062
0.0485974
0.0047754
0.0159570
0.0275537


When k2 < k20, k2m =
0.0528589
0.0519092
0.7998767
0.0474854
0.0482410


When d2 ≧ d20, d2m (nm) =
∞
∞
0.001
11.667
∞


When d2 < d20, d2m (nm) =
20.507
30.742
0.141
16.953
13.761





















1.1 < NA ≦ 1.2


15 < T ≦ 25







4/27












Case
2-11
2-12
2-13
2-14
2-15





n10
1.6912240
1.6881032
1.6896993
1.6917374
1.6948846


k10
0.0750717
0.0788193
0.0752193
0.0692921
0.0562662


d10 (nm)
235.933
218.423
211.247
207.206
219.172


n20
5.6089359
1.7881557
1.7110684
1.6970724
1.6877325


k20
4.1789938
0.3823123
0.2595743
0.2053429
0.1673191


d20 (nm)
0.921
76.059
147.061
213.576
255.276


When n1 ≧ n10, n1m =
0.0197583
0.0081677
0.0235974
0.0421069
0.0510120


When n1 < n10, n1m =
0.0774451
0.0583032
0.0505896
0.0462817
0.0590515


When k1 ≧ k10, k1m =
0.0246448
0.0223682
0.0406641
0.0495398
0.0510083


When k1 < k10, k1m =
0.0218396
0.0175671
0.0286658
0.0376331
0.0343799


When d1 ≧ d10, d1m (nm) =
6.504
3.634
18.131
∞
∞


When d1 < d10, d1m (nm) =
42.587
22.206
26.432
29.901
81.491


When n2 ≧ n20, n2m =
0.6544434
0.1247424
0.1252808
0.1545593
0.2162573


When n2 < n20, n2m =
0.2325012
0.0171619
0.0503735
0.1749207
0.1048962


When k2 ≧ k20, k2m =
0.1484387
0.0366235
0.0860120
0.1212268
0.1092822


When k2 < k20, k2m =
0.6595715
0.1036670
0.0844458
0.0781323
0.0604700


When d2 ≧ d20, d2m (nm) =
0.071
14.060
∞
∞
∞


When d2 < d20, d2m (nm) =
0.195
1.711
9.636
69.774
76.197










1.1 < NA ≦ 1.2


15 < T ≦ 25











Case
2-16
2-17







n10
1.7002883
1.6987256



k10
0.0618224
0.0572006



d10 (nm)
266.113
264.952



n20
1.7025341
1.6934905



k20
0.2096252
0.1744162



d20 (nm)
206.193
266.771



When n1 ≧ n10, n1m =
0.0602454
0.0764587



When n1 < n10, n1m =
0.0381921
0.0594568



When k1 ≧ k10, k1m =
0.0482422
0.0536096



When k1 < k10, k1m =
0.0371497
0.0384741



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
92.805
173.726



When n2 ≧ n20, n2m =
0.2779004
0.2751611



When n2 < n20, n2m =
0.2377234
0.2053577



When k2 ≧ k20, k2m =
0.2066309
0.2211816



When k2 < k20, k2m =
0.0931018
0.0797998



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
73.805
125.295






















1.1 < NA ≦ 1.2


25 < T ≦ 35







5/27












Case
3-01
3-02
3-03
3-04
3-05





n10
1.8384852
1.8997218
1.8867733
1.8774399
1.8168537


k10
0.2367471
0.1227276
0.1201944
0.1030917
0.1206742


d10 (nm)
38.632
21.226
14.426
12.555
98.976


n20
4.7928214
1.8945709
1.7066853
1.6978346
5.6725781


k20
0.7766058
0.4412749
0.3085187
0.2515853
0.5943855


d20 (nm)
20.034
121.762
200.277
259.495
16.950


When n1 ≧ n10, n1m =
0.0640527
0.0719128
0.0931812
0.1089819
0.0387244


When n1 < n10, n1m =
0.0455762
0.0458093
0.0565320
0.0737622
0.0048828


When k1 ≧ k10, k1m =
0.0510876
0.0524744
0.0764050
0.0973877
0.0168860


When k1 < k10, k1m =
0.0717981
0.0817957
0.0981750
0.1030917
0.0269836


When d1 ≧ d10, d1m (nm) =
4.733
6.228
6.172
6.944
6.776


When d1 < d10, d1m (nm) =
3.444
3.186
3.418
4.320
0.695


When n2 ≧ n20, n2m =
0.1712317
0.1175342
0.1094324
0.1025208
0.0610400


When n2 < n20, n2m =
0.1852917
0.1447205
0.1408899
0.1358679
0.1030127


When k2 ≧ k20, k2m =
0.2079944
0.1727771
0.0971545
0.0913745
0.0239368


When k2 < k20, k2m =
0.1709546
0.1005322
0.0873328
0.0807227
0.0995679


When d2 ≧ d20, d2m (nm) =
0.789
∞
∞
∞
0.191


When d2 < d20, d2m (nm) =
0.773
21.526
73.345
89.127
0.308










1.1 < NA ≦ 1.2


25 < T ≦ 35












Case
3-06
3-07
3-08
3-09
3-10





n10
1.7203847
1.7222308
1.7051744
1.7089344
1.6891179


k10
0.0818178
0.0703272
0.0699535
0.0618729
0.0788518


d10 (nm)
95.097
94.450
164.924
162.999
211.328


n20
1.6625491
1.6972414
1.6707295
1.7091982
1.7121044


k20
0.2295920
0.1929579
0.2115581
0.1777196
0.2799946


d20 (nm)
195.706
248.789
190.095
242.642
139.125


When n1 ≧ n10, n1m =
0.0370166
0.0449036
0.0362634
0.0468103
0.0189148


When n1 < n10, n1m =
0.0096326
0.0211206
0.0148706
0.0438916
0.0495532


When k1 ≧ k10, k1m =
0.0279895
0.0455884
0.0190686
0.0333899
0.0327563


When k1 < k10, k1m =
0.0346558
0.0433374
0.0247266
0.0269507
0.0238696


When d1 ≧ d10, d1m (nm) =
14.187
22.312
∞
∞
9.561


When d1 < d10, d1m (nm) =
2.673
6.291
5.065
24.312
23.646


When n2 ≧ n20, n2m =
0.0267200
0.0590454
0.0307410
0.0721521
0.1253455


When n2 < n20, n2m =
0.0766724
0.0932019
0.0523315
0.0386328
0.0336450


When k2 ≧ k20, k2m =
0.0255017
0.0445288
0.0095300
0.0215259
0.0725635


When k2 < k20, k2m =
0.0521814
0.0521948
0.0465356
0.0485632
0.0779358


When d2 ≧ d20, d2m (nm) =
∞
∞
7.007
43.167
∞


When d2 < d20, d2m (nm) =
18.077
28.239
14.543
10.181
6.908





















1.1 < NA ≦ 1.2


25 < T ≦ 35







6/27











Case
3-11
3-12
3-13
3-14





n10
1.6914863
1.6947006
1.7002933
1.6987290


k10
0.0717884
0.0580661
0.0640004
0.0588877


d10 (nm)
207.154
219.137
266.055
264.992


n20
1.6970451
1.6875442
1.7022941
1.6933668


k20
0.2167627
0.1751428
0.2216801
0.1822428


d20 (nm)
205.768
246.865
198.139
258.415


When n1 ≧ n10, n1m =
0.0385889
0.0449475
0.0561011
0.0760583


When n1 < n10, n1m =
0.0454712
0.0531458
0.0356934
0.0583093


When k1 ≧ k10, k1m =
0.0478943
0.0493811
0.0460974
0.0520996


When k1 < k10, k1m =
0.0361658
0.0330811
0.0363293
0.0375061


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
28.219
77.448
91.180
121.680


When n2 ≧ n20, n2m =
0.1522107
0.2230298
0.2904858
0.2858545


When n2 < n20, n2m =
0.1781921
0.1009351
0.2457825
0.2068896


When k2 ≧ k20, k2m =
0.1157642
0.1063892
0.2056812
0.2216101


When k2 < k20, k2m =
0.0805957
0.0617065
0.0977039
0.0829004


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
66.127
48.464
70.211
121.644










1.1 < NA ≦ 1.2


35 < T ≦ 45












Case
4-01
4-02
4-03
4-04
4-05





n10
1.8909619
1.9211597
1.8908364
1.8788634
1.7209142


k10
0.2198688
0.1299283
0.1293290
0.1089981
0.0850231


d10 (nm)
30.886
20.325
14.409
12.666
94.685


n20
2.4457650
1.8999891
1.6971949
1.6934061
1.6569532


k20
0.9042920
0.4762728
0.3219355
0.2597468
0.2398462


d20 (nm)
40.480
114.977
192.850
251.595
187.582


When n1 ≧ n10, n1m =
0.0581348
0.0702795
0.0908240
0.1067529
0.0340771


When n1 < n10, n1m =
0.0408777
0.0430811
0.0541882
0.0719214
0.0077319


When k1 ≧ k10, k1m =
0.0449243
0.0499243
0.0741248
0.0961597
0.0239465


When k1 < k10, k1m =
0.0797229
0.0798120
0.0963696
0.1066907
0.0329150


When d1 ≧ d10, d1m (nm) =
4.322
5.448
5.786
6.719
11.856


When d1 < d10, d1m (nm) =
2.642
2.634
3.166
4.161
2.071


When n2 ≧ n20, n2m =
0.1853430
0.1162805
0.1041772
0.0995618
0.0224622


When n2 < n20, n2m =
0.1757385
0.1461218
0.1390881
0.1365247
0.0731372


When k2 ≧ k20, k2m =
0.2033411
0.1671118
0.0936316
0.0897620
0.0193579


When k2 < k20, k2m =
0.1615027
0.0988000
0.0865491
0.0806287
0.0502966


When d2 ≧ d20, d2m (nm) =
5.473
∞
∞
∞
13.590


When d2 < d20, d2m (nm) =
4.339
20.871
70.442
87.096
16.661





















1.1 < NA ≦ 1.2


35 < T ≦ 45







7/27












Case
4-06
4-07
4-08
4-09
4-10





n10
1.7236493
1.7053690
1.7096103
1.6884398
1.6913141


k10
0.0725136
0.0723352
0.0638708
0.0822671
0.0737244


d10 (nm)
94.253
164.385
162.799
210.788
206.649


n20
1.6994520
1.6690598
1.7121782
1.7077650
1.6954335


k20
0.2004026
0.2212238
0.1844639
0.2979850
0.2262249


d20 (nm)
239.752
181.544
233.616
132.459
199.430


When n1 ≧ n10, n1m =
0.0432617
0.0328076
0.0449390
0.0103259
0.0357813


When n1 < n10, n1m =
0.0189111
0.0081836
0.0418201
0.0476318
0.0441882


When k1 ≧ k10, k1m =
0.0428613
0.0134167
0.0270105
0.0240100
0.0467419


When k1 < k10, k1m =
0.0419373
0.0221985
0.0217126
0.0186353
0.0353625


When d1 ≧ d10, d1m (nm) =
19.395
21.834
∞
7.013
∞


When d1 < d10, d1m (nm) =
5.406
2.666
6.246
21.283
26.527


When n2 ≧ n20, n2m =
0.0587073
0.0279724
0.0684412
0.1217639
0.1437500


When n2 < n20, n2m =
0.0913135
0.0359949
0.0242969
0.0190967
0.1057874


When k2 ≧ k20, k2m =
0.0407703
0.0058350
0.0150317
0.0602039
0.1122632


When k2 < k20, k2m =
0.0523291
0.0449670
0.0490210
0.0601965
0.0826379


When d2 ≧ d20, d2m (nm) =
∞
4.683
36.767
∞
∞


When d2 < d20, d2m (nm) =
25.916
13.275
6.151
3.566
25.291










1.1 < NA ≦ 1.2


35 < T ≦ 45












Case
4-11
4-12
4-13







n10
1.6945163
1.7002615
1.6987767



k10
0.0596605
0.0658973
0.0602453



d10 (nm)
219.093
265.562
264.538



n20
1.6879518
1.6991117
1.6924357



k20
0.1823501
0.2320843
0.1888152



d20 (nm)
237.943
190.875
250.808



When n1 ≧ n10, n1m =
0.0400159
0.0514929
0.0760449



When n1 < n10, n1m =
0.0454590
0.0339758
0.0578162



When k1 ≧ k10, k1m =
0.0478894
0.0439832
0.0508728



When k1 < k10, k1m =
0.0318921
0.0347144
0.0365662



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
53.950
89.870
117.603



When n2 ≧ n20, n2m =
0.2316992
0.3028357
0.2948633



When n2 < n20, n2m =
0.0956519
0.2532336
0.2085193



When k2 ≧ k20, k2m =
0.1045911
0.2056006
0.2209802



When k2 < k20, k2m =
0.0612427
0.1002246
0.0860327



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
40.957
67.613
80.377






















1.1 < NA ≦ 1.2


45 < T ≦ 55







8/27












Case
5-01
5-02
5-03
5-04
5-05





n10
1.9413239
1.8877645
1.8798429
1.7202563
1.7249517


k10
0.1405566
0.1445306
0.1135692
0.0870823
0.0739360


d10 (nm)
18.043
14.095
12.637
94.214
94.041


n20
1.8442891
1.6688638
1.6888514
1.6489031
1.7027050


k20
0.4845639
0.3235014
0.2638544
0.2445724
0.2047377


d20 (nm)
113.109
187.292
243.053
179.182
229.905


When n1 ≧ n10, n1m =
0.0724768
0.0904346
0.1062329
0.0324084
0.0425623


When n1 < n10, n1m =
0.0387427
0.0534119
0.0716968
0.0082080
0.0177209


When k1 ≧ k10, k1m =
0.0483630
0.0753357
0.0968298
0.0243140
0.0418030


When k1 < k10, k1m =
0.0803040
0.0945715
0.1060376
0.0343469
0.0406653


When d1 ≧ d10, d1m (nm) =
4.823
5.486
6.573
10.670
17.560


When d1 < d10, d1m (nm) =
2.042
3.025
4.077
2.161
4.892


When n2 ≧ n20, n2m =
0.1074292
0.0972339
0.0967822
0.0242322
0.0621313


When n2 < n20, n2m =
0.1555688
0.1383643
0.1358411
0.0727905
0.0930249


When k2 ≧ k20, k2m =
0.1308459
0.0862097
0.0881348
0.0180859
0.0388489


When k2 < k20, k2m =
0.0911877
0.0843787
0.0806641
0.0488940
0.0530957


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
10.287
∞


When d2 < d20, d2m (nm) =
20.712
69.838
88.098
16.560
20.064










1.1 < NA ≦ 1.2


45 < T ≦ 55












Case
5-06
5-07
5-08
5-09
5-10





n10
1.7053831
1.7104785
1.6877471
1.6915115
1.6941672


k10
0.0736370
0.0654156
0.0844092
0.0739491
0.0608347


d10 (nm)
163.843
162.671
209.661
205.513
218.889


n20
1.6671854
1.7160090
1.6959640
1.6904122
1.6879018


k20
0.2267475
0.1885946
0.3073448
0.2298496
0.1872431


d20 (nm)
172.382
223.774
127.018
196.556
228.501


When n1 ≧ n10, n1m =
0.0309619
0.0440515
0.0051978
0.0335425
0.0357227


When n1 < n10, n1m =
0.0112268
0.0078247
0.0453333
0.0430493
0.0410388


When k1 ≧ k10, k1m =
0.0149072
0.0196375
0.0173291
0.0473206
0.0467871


When k1 < k10, k1m =
0.0262830
0.0141846
0.0154602
0.0372058
0.0305029


When d1 ≧ d10, d1m (nm) =
19.247
∞
2.276
∞
∞


When d1 < d10, d1m (nm) =
3.447
2.046
19.587
24.997
50.391


When n2 ≧ n20, n2m =
0.0348413
0.0672729
0.1107800
0.1391333
0.2394653


When n2 < n20, n2m =
0.0292676
0.0106921
0.0107263
0.0732312
0.0890649


When k2 ≧ k20, k2m =
0.0073389
0.0081616
0.0597644
0.1152246
0.1047815


When k2 < k20, k2m =
0.0445459
0.0504346
0.0379138
0.0797473
0.0602527


When d2 ≧ d20, d2m (nm) =
6.326
35.781
32.689
∞
∞


When d2 < d20, d2m (nm) =
11.802
2.505
1.901
20.558
36.515





















1.1 < NA ≦ 1.2


45 < T ≦ 55







9/27












Case
5-11
5-12
5-13







n10
1.6941096
1.7000691
1.6987341



k10
0.0560046
0.0669711
0.0608862



d10 (nm)
215.482
264.757
263.855



n20
1.6938988
1.6924460
1.6911373



k20
0.1599964
0.2378630
0.1924284



d20 (nm)
287.470
184.028
243.250



When n1 ≧ n10, n1m =
0.0468335
0.0484424
0.0766663



When n1 < n10, n1m =
0.0625427
0.0333350
0.0582520



When k1 ≧ k10, k1m =
0.0574133
0.0424146
0.0503235



When k1 < k10, k1m =
0.0373425
0.0336023
0.0357239



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
47.031
45.336
115.043



When n2 ≧ n20, n2m =
0.2184277
0.3156848
0.3032751



When n2 < n20, n2m =
0.1528296
0.2586377
0.2107019



When k2 ≧ k20, k2m =
0.1238171
0.2073083
0.2191870



When k2 < k20, k2m =
0.0588196
0.0981323
0.0862329



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
85.352
66.135
78.131











1.1 < NA ≦ 1.2


55 < T ≦ 65












Case
6-01
6-02
6-03
6-04
6-05





n10
1.8998120
1.9599431
1.8792360
1.8920036
1.7198405


k10
0.2622743
0.1538418
0.1119058
0.0671877
0.0878543


d10 (nm)
21.573
15.993
12.895
11.926
93.971


n20
1.6944131
1.7907917
1.6940206
1.7462722
1.6452515


k20
0.7809017
0.4780154
0.2681658
0.2347435
0.2473168


d20 (nm)
53.320
111.028
231.714
280.522
169.419


When n1 ≧ n10, n1m =
0.0603137
0.0799158
0.1051331
0.1164221
0.0325574


When n1 < n10, n1m =
0.0246228
0.0339001
0.0713818
0.0790796
0.0109656


When k1 ≧ k10, k1m =
0.0436731
0.0463733
0.0957117
0.1011499
0.0282458


When k1 < k10, k1m =
0.0527222
0.0842969
0.1045093
0.0671877
0.0383301


When d1 ≧ d10, d1m (nm) =
3.630
4.315
6.630
7.111
10.486


When d1 < d10, d1m (nm) =
1.338
1.548
4.149
4.416
2.879


When n2 ≧ n20, n2m =
0.1220337
0.0996899
0.0944202
0.0992114
0.0312585


When n2 < n20, n2m =
0.0963342
0.1728088
0.1384424
0.1517053
0.0751245


When k2 ≧ k20, k2m =
0.0896167
0.0986731
0.0889478
0.0981226
0.0215662


When k2 < k20, k2m =
0.0868945
0.0892566
0.0826782
0.0802551
0.0503503


When d2 ≧ d20, d2m (nm) =
14.581
∞
∞
∞
10.833


When d2 < d20, d2m (nm) =
7.202
14.530
88.193
126.095
17.275





















1.1 < NA ≦ 1.2


55 < T ≦ 65







10/27












Case
6-06
6-07
6-08
6-09
6-10





n10
1.7267515
1.7286377
1.7058235
1.6871196
1.6936372


k10
0.0746914
0.0697592
0.0740364
0.0856014
0.0616799


d10 (nm)
93.982
94.711
163.674
208.540
218.466


n20
1.7088385
1.7257237
1.6690540
1.6832134
1.6877720


k20
0.2076415
0.1796886
0.2306007
0.3092532
0.1900717


d20 (nm)
218.911
273.487
161.946
121.170
218.772


When n1 ≧ n10, n1m =
0.0431396
0.0483069
0.0312061
0.0049573
0.0327710


When n1 < n10, n1m =
0.0172424
0.0116125
0.0175793
0.0417786
0.0401648


When k1 ≧ k10, k1m =
0.0418896
0.0318958
0.0202844
0.0152393
0.0462805


When k1 < k10, k1m =
0.0396252
0.0362695
0.0328467
0.0174036
0.0298352


When d1 ≧ d10, d1m (nm) =
17.247
40.127
17.394
2.172
∞


When d1 < d10, d1m (nm) =
4.621
3.300
5.870
18.309
47.643


When n2 ≧ n20, n2m =
0.0684570
0.0868091
0.0312744
0.1009155
0.2431030


When n2 < n20, n2m =
0.0962207
0.1095422
0.0318677
0.0098169
0.0838513


When k2 ≧ k20, k2m =
0.0394080
0.0515259
0.0123767
0.0719922
0.1060815


When k2 < k20, k2m =
0.0553357
0.0549243
0.0471436
0.0304236
0.0607056


When d2 ≧ d20, d2m (nm) =
∞
∞
9.995
25.676
∞


When d2 < d20, d2m (nm) =
15.791
73.815
10.017
1.682
28.435










1.1 < NA ≦ 1.2


55 < T ≦ 65











Case
6-11
6-12







n10
1.6996002
1.6985143



k10
0.0674630
0.0611760



d10 (nm)
264.231
263.586



n20
1.6851097
1.6903246



k20
0.2396601
0.1936289



d20 (nm)
175.944
234.054



When n1 ≧ n10, n1m =
0.0469604
0.0772302



When n1 < n10, n1m =
0.0345850
0.0600415



When k1 ≧ k10, k1m =
0.0413989
0.0503625



When k1 < k10, k1m =
0.0326746
0.0352795



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
35.789
113.370



When n2 ≧ n20, n2m =
0.3361853
0.3175012



When n2 < n20, n2m =
0.2595898
0.2115027



When k2 ≧ k20, k2m =
0.2087170
0.2189661



When k2 < k20, k2m =
0.0954248
0.0859949



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
64.780
74.733






















1.1 < NA ≦ 1.2


65 < T ≦ 75







11/27












Case
7-01
7-02
7-03
7-04
7-05





n10
1.8814830
1.9657443
1.8787154
1.8913468
1.7209187


k10
0.2936564
0.1688741
0.1109169
0.0695388
0.0883668


d10 (nm)
22.098
15.852
13.263
12.162
94.055


n20
1.6321609
1.7726563
1.6996278
1.7469121
1.6482914


k20
0.8097385
0.4923001
0.2745566
0.2387131
0.2540527


d20 (nm)
46.190
103.170
220.404
270.807
158.511


When n1 ≧ n10, n1m =
0.0656360
0.0817346
0.1037085
0.1149512
0.0333252


When n1 < n10, n1m =
0.0241089
0.0282544
0.0702112
0.0769897
0.0127490


When k1 ≧ k10, k1m =
0.0378577
0.0400220
0.0934888
0.0991272
0.0301257


When k1 < k10, k1m =
0.0323035
0.0824512
0.1025916
0.0695388
0.0388867


When d1 ≧ d10, d1m (nm) =
3.610
3.980
6.711
7.159
10.691


When d1 < d10, d1m (nm) =
1.297
1.237
4.191
4.366
3.330


When n2 ≧ n20, n2m =
0.1024585
0.0947095
0.0935791
0.1004138
0.0355066


When n2 < n20, n2m =
0.0645630
0.1828857
0.1422339
0.1540833
0.0767798


When k2 ≧ k20, k2m =
0.0898303
0.0894482
0.0904114
0.0989551
0.0244946


When k2 < k20, k2m =
0.1003796
0.0949036
0.0851941
0.0816284
0.0535193


When d2 ≧ d20, d2m (nm) =
11.613
∞
∞
∞
11.010


When d2 < d20, d2m (nm) =
4.416
10.112
84.053
124.915
16.505










1.1 < NA ≦ 1.2


65 < T ≦ 75












Case
7-06
7-07
7-08
7-09
7-10





n10
1.7288665
1.7286370
1.7068032
1.6862856
1.6931399


k10
0.0756184
0.0709992
0.0744994
0.0878163
0.0624918


d10 (nm)
94.090
94.923
163.814
208.124
217.968


n20
1.7153723
1.7241262
1.6739446
1.6736237
1.6872372


k20
0.2125971
0.1831189
0.2371534
0.3138657
0.1926334


d20 (nm)
207.924
263.961
151.052
112.320
209.546


When n1 ≧ n10, n1m =
0.0437573
0.0483350
0.0322754
0.0025049
0.0316833


When n1 < n10, n1m =
0.0164966
0.0099878
0.0175537
0.0409570
0.0419177


When k1 ≧ k10, k1m =
0.0410425
0.0291785
0.0221094
0.0095605
0.0459827


When k1 < k10, k1m =
0.0388428
0.0344531
0.0333215
0.0151172
0.0300720


When d1 ≧ d10, d1m (nm) =
17.329
38.775
18.851
1.009
∞


When d1 < d10, d1m (nm) =
4.318
2.813
6.154
17.032
45.887


When n2 ≧ n20, n2m =
0.0710437
0.0893457
0.0302136
0.1037878
0.2406421


When n2 < n20, n2m =
0.0969080
0.1083484
0.0331750
0.0056763
0.0830054


When k2 ≧ k20, k2m =
0.0400586
0.0500842
0.0147241
0.0658289
0.1059290


When k2 < k20, k2m =
0.0574512
0.0562378
0.0506323
0.0175342
0.0630762


When d2 ≧ d20, d2m (nm) =
∞
∞
10.293
26.205
∞


When d2 < d20, d2m (nm) =
13.701
72.849
8.984
0.992
28.220





















1.1 < NA ≦ 1.2


65 < T ≦ 75







12/27












Case
7-11
7-12
7-13







n10
1.6935780
1.6987845
1.6982075



k10
0.0575917
0.0682876
0.0620058



d10 (nm)
214.501
264.829
264.409



n20
1.6927449
1.6826884
1.6907687



k20
0.1631490
0.2430960
0.1959423



d20 (nm)
269.036
164.540
222.065



When n1 ≧ n10, n1m =
0.0479456
0.0478223
0.0756042



When n1 < n10, n1m =
0.0597888
0.0375256
0.0523840



When k1 ≧ k10, k1m =
0.0567029
0.0406042
0.0502747



When k1 < k10, k1m =
0.0379382
0.0306238
0.0354358



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
42.775
36.115
105.289



When n2 ≧ n20, n2m =
0.2180396
0.3702002
0.3412915



When n2 < n20, n2m =
0.1575122
0.2565369
0.2093115



When k2 ≧ k20, k2m =
0.1278589
0.2070850
0.2215063



When k2 < k20, k2m =
0.0614197
0.0951270
0.0864294



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
81.766
63.144
76.945











1.1 < NA ≦ 1.2


75 < T ≦ 85












Case
8-01
8-02
8-03
8-04
8-05





n10
1.8508920
1.9432602
1.8788012
1.8809660
1.8914032


k10
0.3299462
0.1828608
0.1571474
0.1122948
0.0691945


d10 (nm)
26.713
18.534
15.200
13.670
12.762


n20
1.6561984
1.7922587
1.6553949
1.7045069
1.7559855


k20
1.0215947
0.5435792
0.3498651
0.2862016
0.2487147


d20 (nm)
31.481
89.452
157.519
210.391
259.753


When n1 ≧ n10, n1m =
0.0584900
0.0721143
0.0859290
0.1006885
0.1098987


When n1 < n10, n1m =
0.0118384
0.0258594
0.0490076
0.0672168
0.0736646


When k1 ≧ k10, k1m =
0.0281628
0.0341772
0.0681653
0.0888281
0.0935315


When k1 < k10, k1m =
0.0027112
0.0735254
0.0892920
0.1016174
0.0691945


When d1 ≧ d10, d1m (nm) =
3.227
4.317
5.436
6.605
7.111


When d1 < d10, d1m (nm) =
0.304
1.291
2.967
4.063
4.341


When n2 ≧ n20, n2m =
0.1267358
0.0961279
0.0835156
0.0933350
0.1000793


When n2 < n20, n2m =
0.0093018
0.1747852
0.1389221
0.1466003
0.1520386


When k2 ≧ k20, k2m =
0.0170300
0.1198535
0.0846472
0.0918018
0.1012305


When k2 < k20, k2m =
0.1219019
0.1040369
0.0912122
0.0867468
0.0829492


When d2 ≧ d20, d2m (nm) =
8.195
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
0.369
9.559
36.990
78.480
119.640





















1.1 < NA ≦ 1.2


75 < T ≦ 85







13/27












Case
8-06
8-07
8-08
8-09
8-10





n10
1.7233184
1.7297992
1.7292921
1.7076375
1.6902915


k10
0.0905387
0.0774990
0.0722395
0.0765186
0.0790058


d10 (nm)
94.254
94.232
94.957
163.992
206.654


n20
1.6520214
1.7157415
1.7247476
1.6752795
1.6879680


k20
0.2670378
0.2209454
0.1892941
0.2482558
0.2475793


d20 (nm)
148.504
198.899
254.857
141.650
161.284


When n1 ≧ n10, n1m =
0.0327246
0.0427734
0.0473462
0.0318115
0.0212964


When n1 < n10, n1m =
0.0093958
0.0147302
0.0094299
0.0087695
0.0407813


When k1 ≧ k10, k1m =
0.0245129
0.0376636
0.0278931
0.0137170
0.0408545


When k1 < k10, k1m =
0.0384680
0.0381934
0.0341284
0.0285461
0.0259851


When d1 ≧ d10, d1m (nm) =
10.366
16.607
38.446
19.131
18.064


When d1 < d10, d1m (nm) =
2.389
3.804
2.614
2.661
24.299


When n2 ≧ n20, n2m =
0.0285376
0.0673352
0.0815320
0.0313904
0.1426208


When n2 < n20, n2m =
0.0743250
0.0929968
0.1051160
0.0237683
0.0535938


When k2 ≧ k20, k2m =
0.0198962
0.0371387
0.0465576
0.0076379
0.0976270


When k2 < k20, k2m =
0.0547290
0.0576892
0.0565930
0.0508740
0.0749768


When d2 ≧ d20, d2m (nm) =
8.585
∞
∞
6.981
∞


When d2 < d20, d2m (nm) =
13.959
13.822
33.284
7.469
13.904










1.1 < NA ≦ 1.2


75 < T ≦ 85












Case
8-11
8-12
8-13
8-14
8-15





n10
1.6929156
1.6935338
1.6984313
1.6980068
1.6970347


k10
0.0637318
0.0581307
0.0697413
0.0633264
0.0530849


d10 (nm)
217.693
214.870
266.256
265.782
275.682


n20
1.6856131
1.6920922
1.6871666
1.6912942
1.6884244


k20
0.1973081
0.1667488
0.2538157
0.2022310
0.1714348


d20 (nm)
201.188
259.776
152.235
210.360
256.304


When n1 ≧ n10, n1m =
0.0321716
0.0471802
0.0486719
0.0738318
0.0569543


When n1 < n10, n1m =
0.0414331
0.0603931
0.0363989
0.0470300
0.0427893


When k1 ≧ k10, k1m =
0.0451428
0.0559961
0.0398804
0.0494763
0.0598206


When k1 < k10, k1m =
0.0289417
0.0378210
0.0291638
0.0345105
0.0376172


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
45.410
42.667
37.515
100.900
104.445


When n2 ≧ n20, n2m =
0.2377576
0.2179382
0.2594739
0.3590393
0.2768311


When n2 < n20, n2m =
0.0859351
0.1565027
0.2556433
0.2089795
0.2197266


When k2 ≧ k20, k2m =
0.1024292
0.1246008
0.1994592
0.2211169
0.1929004


When k2 < k20, k2m =
0.0656946
0.0632471
0.1014087
0.0895886
0.0738538


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
33.167
82.155
62.366
73.160
83.598





















1.1 < NA ≦ 1.2


85 < T ≦ 95







14/27












Case
9-01
9-02
9-03
9-04
9-05





n10
1.9192397
1.8910111
1.8874292
1.8928956
1.7266669


k10
0.1987767
0.1570861
0.1170062
0.0800147
0.0953661


d10 (nm)
21.654
15.844
13.907
12.695
94.323


n20
1.8264016
1.6782576
1.7063011
1.7424852
1.6542284


k20
0.6189774
0.3828036
0.3024107
0.2571531
0.2869718


d20 (nm)
76.882
146.288
201.867
254.323
139.595


When n1 ≧ n10, n1m =
0.0649170
0.0821021
0.0973254
0.1089844
0.0299609


When n1 < n10, n1m =
0.0262927
0.0442981
0.0631677
0.0721631
0.0018164


When k1 ≧ k10, k1m =
0.0313647
0.0611023
0.0836865
0.0928955
0.0075598


When k1 < k10, k1m =
0.0678699
0.0898816
0.1010254
0.0800147
0.0251917


When d1 ≧ d10, d1m (nm) =
4.482
5.181
6.239
6.859
9.178


When d1 < d10, d1m (nm) =
1.480
2.625
3.732
4.138
0.436


When n2 ≧ n20, n2m =
0.0987671
0.0845752
0.0932324
0.0997229
0.0068860


When n2 < n20, n2m =
0.1650610
0.1381567
0.1431714
0.1501294
0.0677319


When k2 ≧ k20, k2m =
0.1657446
0.0892700
0.0918542
0.0980688
0.0046692


When k2 < k20, k2m =
0.1121045
0.0937854
0.0873950
0.0830798
0.0530042


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
2.101


When d2 < d20, d2m (nm) =
12.789
29.518
73.873
87.951
11.267










1.1 < NA ≦ 1.2


85 < T ≦ 95












Case
9-06
9-07
9-08
9-09
9-10





n10
1.7296393
1.7299249
1.6899362
1.6928826
1.6935628


k10
0.0805906
0.0737621
0.0817785
0.0657282
0.0590519


d10 (nm)
94.242
94.784
208.164
217.665
215.464


n20
1.7097783
1.7252153
1.6924320
1.6832004
1.6914497


k20
0.2319224
0.1970612
0.2651701
0.2055611
0.1728158


d20 (nm)
191.543
246.491
148.618
193.166
250.826


When n1 ≧ n10, n1m =
0.0403186
0.0454016
0.0167883
0.0332178
0.0456592


When n1 < n10, n1m =
0.0112720
0.0089185
0.0424597
0.0374463
0.0611377


When k1 ≧ k10, k1m =
0.0312561
0.0265295
0.0332300
0.0436560
0.0547620


When k1 < k10, k1m =
0.0359937
0.0340186
0.0176221
0.0271997
0.0369495


When d1 ≧ d10, d1m (nm) =
14.915
25.988
8.734
∞
∞


When d1 < d10, d1m (nm) =
2.867
2.423
22.681
45.245
43.081


When n2 ≧ n20, n2m =
0.0542737
0.0673303
0.1469031
0.2426758
0.2225391


When n2 < n20, n2m =
0.0873267
0.0993994
0.0330542
0.0887622
0.1544177


When k2 ≧ k20, k2m =
0.0292090
0.0400476
0.0700159
0.0962317
0.1187769


When k2 < k20, k2m =
0.0563428
0.0561450
0.0687061
0.0675110
0.0629883


When d2 ≧ d20, d2m (nm) =
39.648
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
14.552
29.955
9.727
29.747
77.934





















1.1 < NA ≦ 1.2


85 < T ≦ 95







15/27












Case
9-11
9-12
9-13







n10
1.6988269
1.6981501
1.6968464



k10
0.0719884
0.0650380
0.0544760



d10 (nm)
266.949
266.102
275.663



n20
1.6930572
1.6910453
1.6860880



k20
0.2717519
0.2123559
0.1778694



d20 (nm)
142.233
201.439
248.323



When n1 ≧ n10, n1m =
0.0467688
0.0728052
0.0574890



When n1 < n10, n1m =
0.0315735
0.0440601
0.0431165



When k1 ≧ k10, k1m =
0.0383911
0.0476294
0.0587781



When k1 < k10, k1m =
0.0284839
0.0337549
0.0370691



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
35.571
98.568
104.018



When n2 ≧ n20, n2m =
0.2475818
0.3536121
0.2819006



When n2 < n20, n2m =
0.2616077
0.2147424
0.2120007



When k2 ≧ k20, k2m =
0.1929529
0.2177991
0.1925061



When k2 < k20, k2m =
0.1103821
0.0937061
0.0749585



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
61.377
69.390
80.535











1.1 < NA ≦ 1.2


95 < T ≦ 105












Case
10-01
10-02
10-03
10-04
10-05





n10
1.9207610
1.9093240
1.8948938
1.8966282
1.7293323


k10
0.2195112
0.1610220
0.1257399
0.0900141
0.0843251


d10 (nm)
22.312
16.027
13.855
12.530
93.974


n20
1.8258536
1.6981498
1.7003095
1.7305926
1.7018671


k20
0.6986358
0.4189775
0.3177305
0.2658040
0.2432029


d20 (nm)
68.737
136.163
194.613
248.346
184.391


When n1 ≧ n10, n1m =
0.0601465
0.0788086
0.0949231
0.1082007
0.0364734


When n1 < n10, n1m =
0.0227283
0.0400269
0.0595679
0.0706311
0.0069092


When k1 ≧ k10, k1m =
0.0253723
0.0545032
0.0804407
0.0926099
0.0227478


When k1 < k10, k1m =
0.0628345
0.0889185
0.1005603
0.0900141
0.0311768


When d1 ≧ d10, d1m (nm) =
3.994
4.715
5.765
6.514
12.891


When d1 < d10, d1m (nm) =
1.248
2.209
3.348
3.879
1.711


When n2 ≧ n20, n2m =
0.0792419
0.0821826
0.0922205
0.0989185
0.0380920


When n2 < n20, n2m =
0.1602795
0.1375000
0.1411267
0.1492065
0.0806519


When k2 ≧ k20, k2m =
0.1589185
0.0905359
0.0891418
0.0944934
0.0182117


When k2 < k20, k2m =
0.1093127
0.0931641
0.0864453
0.0826196
0.0535706


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
26.631


When d2 < d20, d2m (nm) =
11.170
27.297
70.361
86.529
13.056





















1.1 < NA ≦ 1.2


95 < T ≦ 105







16/27












Case
10-06
10-07
10-08
10-09
10-10





n10
1.7301568
1.6896128
1.6928686
1.6935394
1.6995193


k10
0.0757850
0.0845530
0.0680057
0.0604311
0.0747728


d10 (nm)
94.458
207.994
217.789
215.751
266.467


n20
1.7237225
1.6930315
1.6806392
1.6908086
1.6953349


k20
0.2045935
0.2839311
0.2160083
0.1799717
0.2921202


d20 (nm)
238.500
141.193
184.741
242.024
134.479


When n1 ≧ n10, n1m =
0.0430542
0.0132361
0.0331689
0.0442139
0.0436938


When n1 < n10, n1m =
0.0073706
0.0419458
0.0316418
0.0535156
0.0268311


When k1 ≧ k10, k1m =
0.0232617
0.0264368
0.0418604
0.0531323
0.0358801


When k1 < k10, k1m =
0.0323706
0.0142944
0.0250220
0.0355676
0.0274768


When d1 ≧ d10, d1m (nm) =
19.826
5.860
∞
∞
∞


When d1 < d10, d1m (nm) =
1.955
19.840
44.604
42.829
18.631


When n2 ≧ n20, n2m =
0.0534583
0.1398230
0.2538293
0.2308789
0.2386206


When n2 < n20, n2m =
0.0961475
0.0183801
0.0879700
0.1305579
0.2731067


When k2 ≧ k20, k2m =
0.0309888
0.0515918
0.0900964
0.1145776
0.1883105


When k2 < k20, k2m =
0.0550842
0.0676599
0.0668372
0.0642163
0.1153723


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
28.701
3.697
28.484
75.626
22.552










1.1 < NA ≦ 1.2


95 < T ≦ 105











Case
10-11
10-12







n10
1.6986281
1.6967467



k10
0.0669339
0.0559821



d10 (nm)
265.290
275.562



n20
1.6902923
1.6844237



k20
0.2238725
0.1853984



d20 (nm)
194.429
239.846



When n1 ≧ n10, n1m =
0.0728162
0.0573596



When n1 < n10, n1m =
0.0413391
0.0430261



When k1 ≧ k10, k1m =
0.0452283
0.0576135



When k1 < k10, k1m =
0.0327722
0.0361206



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
90.187
103.212



When n2 ≧ n20, n2m =
0.3400000
0.2868152



When n2 < n20, n2m =
0.2235767
0.2105566



When k2 ≧ k20, k2m =
0.2178235
0.1919788



When k2 < k20, k2m =
0.0973718
0.0774072



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
66.928
79.000






















1.1 < NA ≦ 1.2


105 < T ≦ 115







17/27












Case
11-01
11-02
11-03
11-04
11-05





n10
1.9214172
1.9009993
1.8999222
1.7289797
1.7301397


k10
0.1753360
0.1351301
0.0954510
0.0876375
0.0779683


d10 (nm)
15.452
13.611
12.469
93.472
94.062


n20
1.6804411
1.6899586
1.7262130
1.6943958
1.7208177


k20
0.4367098
0.3280314
0.2728992
0.2513033
0.2098777


d20 (nm)
129.893
187.370
240.318
176.630
230.281


When n1 ≧ n10, n1m =
0.0769006
0.0933704
0.1067993
0.0330078
0.0410352


When n1 < n10, n1m =
0.0358716
0.0572852
0.0688867
0.0032751
0.0048413


When k1 ≧ k10, k1m =
0.0508276
0.0793042
0.0916321
0.0140979
0.0177686


When k1 < k10, k1m =
0.0888501
0.0996167
0.0954510
0.0244348
0.0282959


When d1 ≧ d10, d1m (nm) =
4.190
5.335
6.248
10.623
16.723


When d1 < d10, d1m (nm) =
1.818
3.051
3.681
0.787
1.251


When n2 ≧ n20, n2m =
0.0746777
0.0897961
0.0977148
0.0241113
0.0398962


When n2 < n20, n2m =
0.1378662
0.1400989
0.1490454
0.0784241
0.0968872


When k2 ≧ k20, k2m =
0.0793188
0.0846436
0.0920837
0.0085193
0.0207715


When k2 < k20, k2m =
0.0870862
0.0841199
0.0819739
0.0504102
0.0538818


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
17.196
∞


When d2 < d20, d2m (nm) =
28.725
67.570
87.835
8.245
10.621










1.1 < NA ≦ 1.2


105 < T ≦ 115











Case
11-06
11-07
11-08
11-09





n10
1.6897075
1.6928599
1.6933895
1.6967442


k10
0.0859154
0.0698704
0.0619572
0.0572224


d10 (nm)
206.600
218.100
215.832
275.439


n20
1.6860653
1.6784557
1.6904996
1.6838077


k20
0.2958058
0.2260347
0.1864736
0.1920294


d20 (nm)
138.770
175.355
232.785
230.401


When n1 ≧ n10, n1m =
0.0125659
0.0312329
0.0432227
0.0564172


When n1 < n10, n1m =
0.0403125
0.0252893
0.0462402
0.0423401


When k1 ≧ k10, k1m =
0.0275024
0.0399890
0.0513623
0.0566272


When k1 < k10, k1m =
0.0207617
0.0230298
0.0339783
0.0347253


When d1 ≧ d10, d1m (nm) =
5.565
∞
∞
∞


When d1 < d10, d1m (nm) =
15.751
15.335
41.797
102.062


When n2 ≧ n20, n2m =
0.1134778
0.0778406
0.2416541
0.2945471


When n2 < n20, n2m =
0.0212585
0.0821313
0.1144373
0.2197937


When k2 ≧ k20, k2m =
0.0640356
0.0874658
0.1126599
0.1918506


When k2 < k20, k2m =
0.0823962
0.0630994
0.0642725
0.0810107


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
4.190
25.396
50.058
79.342





















1.1 < NA ≦ 1.2


115 < T ≦ 125







18/27












Case
12-01
12-02
12-03
12-04
12-05





n10
1.9907624
1.9229056
1.9003143
1.9049048
1.7296380


k10
0.2658843
0.1943367
0.1434936
0.0972823
0.0899801


d10 (nm)
16.877
14.896
13.590
12.362
93.128


n20
1.6777634
1.6435696
1.6791032
1.7269066
1.6935089


k20
0.7245088
0.4392836
0.3336019
0.2779612
0.2572784


d20 (nm)
66.041
124.711
179.139
230.763
167.093


When n1 ≧ n10, n1m =
0.0641870
0.0750415
0.0917773
0.1066382
0.0315833


When n1 < n10, n1m =
0.0020520
0.0319995
0.0559583
0.0680188
0.0015344


When k1 ≧ k10, k1m =
0.0028235
0.0481201
0.0790771
0.0912170
0.0085083


When k1 < k10, k1m =
0.0445386
0.0882983
0.0964502
0.0972823
0.0192114


When d1 ≧ d10, d1m (nm) =
2.498
3.792
5.133
6.031
9.518


When d1 < d10, d1m (nm) =
0.080
1.544
2.939
3.522
0.359


When n2 ≧ n20, n2m =
0.0064478
0.0655054
0.0877441
0.0975110
0.0182434


When n2 < n20, n2m =
0.1131567
0.1382288
0.1415613
0.1512451
0.0817859


When k2 ≧ k20, k2m =
0.0073132
0.0658899
0.0812854
0.0911096
0.0040100


When k2 < k20, k2m =
0.0730591
0.0825134
0.0835315
0.0828308
0.0509155


When d2 ≧ d20, d2m (nm) =
10.610
∞
∞
∞
14.228


When d2 < d20, d2m (nm) =
2.901
33.267
66.014
90.382
3.593










1.1 < NA ≦ 1.2


115 < T ≦ 125












Case
12-06
12-07
12-08
12-09
12-10





n10
1.7305285
1.6927568
1.6930586
1.6939267
1.6970265


k10
0.0799609
0.0712762
0.0635805
0.0583165
0.0526106


d10 (nm)
93.907
218.499
215.646
213.162
273.430


n20
1.7196209
1.6781695
1.6903056
1.6934648
1.6908020


k20
0.2133806
0.2348207
0.0196344
0.1626221
0.1682270


d20 (nm)
220.978
164.929
223.237
282.414
277.869


When n1 ≧ n10, n1m =
0.0401038
0.0280627
0.0367090
0.0617249
0.0695837


When n1 < n10, n1m =
0.0020569
0.0197937
0.0422595
0.0578455
0.0506836


When k1 ≧ k10, k1m =
0.0099243
0.0365027
0.0497717
0.0551318
0.0584485


When k1 < k10, k1m =
0.0219006
0.0215491
0.0327808
0.0369946
0.0381665


When d1 ≧ d10, d1m (nm) =
15.192
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
0.519
8.747
40.119
117.750
120.098


When n2 ≧ n20, n2m =
0.0185596
0.0673242
0.2516089
0.2302490
0.2819116


When n2 < n20, n2m =
0.1000403
0.0715613
0.0981323
0.1425830
0.2021863


When k2 ≧ k20, k2m =
0.0105981
0.0901270
0.1132849
0.1293579
0.1967712


When k2 < k20, k2m =
0.0546692
0.0589612
0.0634204
0.0595032
0.0741577


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
3.602
19.014
34.397
79.670
93.763





















1.1 < NA ≦ 1.2


125 < T ≦ 135







19/27












Case
13-01
13-02
13-03
13-04
13-05





n10
1.8968086
1.9070303
1.9016797
1.7329805
1.7161015


k10
0.1457981
0.0954881
0.0905797
0.0916823
0.0708259


d10 (nm)
14.128
12.717
10.946
93.296
94.224


n20
1.6815336
1.7369802
1.7110902
1.7056329
1.6780965


k20
0.3444919
0.2856144
0.2381911
0.2670261
0.1788543


d20 (nm)
167.613
218.968
280.601
155.076
274.399


When n1 ≧ n10, n1m =
0.0900439
0.1048657
0.1226746
0.0324280
0.0442737


When n1 < n10, n1m =
0.0549670
0.0656934
0.0785547
0.0012561
0.0190796


When k1 ≧ k10, k1m =
0.0772925
0.0877979
0.1031616
0.0075342
0.0396033


When k1 < k10, k1m =
0.0920227
0.0954881
0.0905767
0.0177710
0.0448962


When d1 ≧ d10, d1m (nm) =
5.183
6.019
6.438
9.368
34.945


When d1 < d10, d1m (nm) =
2.993
3.453
3.787
0.285
6.328


When n2 ≧ n20, n2m =
0.0877783
0.0991382
0.1111206
0.0250049
0.0400305


When n2 < n20, n2m =
0.1446509
0.1532288
0.1362280
0.0542139
0.1016638


When k2 ≧ k20, k2m =
0.0828516
0.0936658
0.0912720
0.0036011
0.0409863


When k2 < k20, k2m =
0.0884485
0.0865161
0.0819922
0.0570435
0.0508105


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
16.698
∞


When d2 < d20, d2m (nm) =
63.831
86.162
129.598
1.884
53.218










1.1 < NA ≦ 1.2


125 < T ≦ 135











Case
13-06
13-07
13-08
13-09





n10
1.6922053
1.6924923
1.6935584
1.6967916


k10
0.0726320
0.0653867
0.0598502
0.0533770


d10 (nm)
218.650
214.871
212.072
273.133


n20
1.6800076
1.6897434
1.6927128
1.6904661


k20
0.2436881
0.1959626
0.1654173
0.1709158


d20 (nm)
154.426
214.392
274.211
268.389


When n1 ≧ n10, n1m =
0.0253528
0.0324316
0.0605591
0.0715686


When n1 < n10, n1m =
0.0165808
0.0420508
0.0560315
0.0516870


When k1 ≧ k10, k1m =
0.0318250
0.0487207
0.0537805
0.0575159


When k1 < k10, k1m =
0.0192969
0.0323987
0.0370093
0.0369739


When d1 ≧ d10, d1m (nm) =
16.057
∞
∞
∞


When d1 < d10, d1m (nm) =
7.067
37.738
59.298
116.516


When n2 ≧ n20, n2m =
0.0399280
0.1505237
0.2298792
0.2878638


When n2 < n20, n2m =
0.0570007
0.0843848
0.1463525
0.2044592


When k2 ≧ k20, k2m =
0.0949915
0.1174060
0.1308350
0.1989417


When k2 < k20, k2m =
0.0566089
0.0642029
0.0608850
0.0765625


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
13.778
24.202
76.110
90.681





















1.1 < NA ≦ 1.2


135 < T ≦ 145







20/27












Case
14-01
14-02
14-03
14-04
14-05





n10
1.8931613
1.9086798
1.8957546
1.7383088
1.7163304


k10
0.1437464
0.0925277
0.1021679
0.0935643
0.0717315


d10 (nm)
15.228
13.463
11.154
93.735
94.330


n20
1.6981871
1.7547782
1.6965397
1.7255584
1.6763108


k20
0.3648670
0.2987738
0.2414267
0.2828024
0.1832109


d20 (nm)
154.635
206.696
273.752
142.972
265.207


When n1 ≧ n10, n1m =
0.0870447
0.1008179
0.1206177
0.0337476
0.0440930


When n1 < n10, n1m =
0.0533362
0.0620862
0.0768750
0.0007715
0.0201111


When k1 ≧ k10, k1m =
0.0736633
0.0819543
0.1022961
0.0054871
0.0403162


When k1 < k10, k1m =
0.0884546
0.0925277
0.1021679
0.0149585
0.0433484


When d1 ≧ d10, d1m (nm) =
5.366
6.051
6.474
9.539
32.676


When d1 < d10, d1m (nm) =
3.110
3.392
3.792
0.168
6.615


When n2 ≧ n20, n2m =
0.0905371
0.1017932
0.1131152
0.0305115
0.0401709


When n2 < n20, n2m =
0.1457471
0.1521191
0.1323865
0.0291541
0.0974780


When k2 ≧ k20, k2m =
0.0891467
0.0990112
0.0895691
0.0025757
0.0411877


When k2 < k20, k2m =
0.0964551
0.0905688
0.0826367
0.0641370
0.0518066


d2m (nm) =
∞
∞
∞
18.295
∞


When d2 < d20, d2m (nm) =
52.833
78.923
127.644
0.825
36.894










1.1 < NA ≦ 1.2


135 < T ≦ 145












Case
14-06
14-07
14-08
14-09
14-10





n10
1.7036586
1.6919166
1.6911838
1.6942185
1.6965335


k10
0.0640636
0.0672926
0.0743991
0.0545821
0.0539924


d10 (nm)
161.836
213.353
218.060
211.644
273.036


n20
1.6842842
1.6889376
1.6805827
1.6930391
1.6894839


k20
0.1670348
0.2002175
0.2524809
0.1466022
0.1738185


d20 (nm)
260.021
207.074
145.761
321.654
259.712


When n1 ≧ n10, n1m =
0.0516992
0.0312610
0.0190637
0.0570044
0.0731799


When n1 < n10, n1m =
0.0203174
0.0465454
0.0159326
0.0625537
0.0527673


When k1 ≧ k10, k1m =
0.0380640
0.0462256
0.0279297
0.0552405
0.0568201


When k1 < k10, k1m =
0.0285486
0.0325867
0.0168274
0.0356702
0.0362610


When d1 ≧ d10, d1m (nm) =
∞
∞
14.138
∞
∞


When d1 < d10, d1m (nm) =
9.049
34.771
6.640
127.140
114.401


When n2 ≧ n20, n2m =
0.0375000
0.2427722
0.0321863
0.2263916
0.2897119


When n2 < n20, n2m =
0.0655225
0.0802039
0.0495178
0.1240515
0.2069202


When k2 ≧ k20, k2m =
0.0303979
0.1193311
0.0877856
0.1337305
0.1994678


When k2 < k20, k2m =
0.0483228
0.0645337
0.0566711
0.0596594
0.0781824


When d2 ≧ d20, d2m (nm) =
29.338
∞
15.130
∞
∞


When d2 < d20, d2m (nm) =
27.139
22.617
11.351
93.024
88.496





















1.1 < NA ≦ 1.2


145 < T ≦ 155







21/27












Case
15-01
15-02
15-03
15-04
15-05





n10
1.8962402
1.9162756
1.8972293
1.7171631
1.7039366


k10
0.1446868
0.0920008
0.1039493
0.0735355
0.0654419


d10 (nm)
16.058
13.917
11.503
94.241
161.496


n20
1.7149739
1.7705409
1.6986687
1.6756859
1.6849902


k20
0.3909951
0.3160160
0.2516185
0.1901883
0.1728826


d20 (nm)
143.691
196.340
264.437
256.660
251.490


When n1 ≧ n10, n1m =
0.0837915
0.0974329
0.1166235
0.0430017
0.0505029


When n1 < n10, n1m =
0.0514441
0.0592371
0.0737268
0.0188135
0.0178369


When k1 ≧ k10, k1m =
0.0700403
0.0772290
0.0977893
0.0384546
0.0357764


When k1 < k10, k1m =
0.0675134
0.0920008
0.1039493
0.0432324
0.0268848


When d1 ≧ d10, d1m (nm) =
5.323
5.852
6.362
32.246
∞


When d1 < d10, d1m (nm) =
3.062
3.205
3.699
5.981
7.380


When n2 ≧ n20, n2m =
0.0928162
0.1031079
0.1115686
0.0381177
0.0304712


When n2 < n20, n2m =
0.1435938
0.1490808
0.1351062
0.0929431
0.0597266


When k2 ≧ k20, k2m =
0.0944385
0.1027820
0.0897864
0.0382104
0.0277966


When k2 < k20, k2m =
0.0995911
0.0924023
0.0838245
0.0516921
0.0462678


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
23.493


When d2 < d20, d2m (nm) =
30.912
72.930
96.188
31.536
23.876










1.1 < NA ≦ 1.2


145 < T ≦ 155











Case
15-06
15-07
15-08
15-09





n10
1.6903081
1.6915399
1.6931731
1.6963857


k10
0.0771344
0.0690906
0.0615887
0.0546865


d10 (nm)
216.305
212.338
211.917
273.170


n20
1.6786590
1.6881028
1.6918937
1.6879125


k20
0.2613948
0.2062149
0.1729009
0.1780863


d20 (nm)
139.207
199.770
256.415
251.444


When n1 ≧ n10, n1m =
0.0195569
0.0307166
0.0591064
0.0699243


When n1 < n10, n1m =
0.0132800
0.0523120
0.0554614
0.0530347


When k1 ≧ k10, k1m =
0.0269897
0.04450159
0.0517236
0.0562524


When k1 < k10, k1m =
0.0101050
0.0313696
0.0355261
0.0367395


When d1 ≧ d10, d1m (nm) =
14.222
∞
∞
∞


When d1 < d10, d1m (nm) =
6.108
32.462
54.157
113.606


When n2 ≧ n20, n2m =
0.0246814
0.2330432
0.2286047
0.2890198


When n2 < n20, n2m =
0.0598340
0.0841870
0.1451465
0.2088098


When k2 ≧ k20, k2m =
0.0678235
0.1160620
0.1277832
0.1979041


When k2 < k20, k2m =
0.0514465
0.0682922
0.0664624
0.0771411


When d2 ≧ d20, d2m (nm) =
11.437
∞
∞
∞


When d2 < d20, d2m (nm) =
12.498
26.276
74.225
84.013





















1.1 < NA ≦ 1.2


155 < T ≦ 165







22/27












Case
16-01
16-02
16-03
16-04
16-05





n10
1.9078860
1.9270939
1.9009914
1.7182026
1.7037276


k10
0.1508452
0.0963716
0.1079582
0.0759211
0.0670447


d10 (nm)
16.208
13.863
11.657
93.910
160.452


n20
1.7232027
1.7738090
1.6981472
1.6754262
1.6860603


k20
0.4201511
0.3331580
0.2622250
0.1979303
0.1785858


d20 (nm)
134.826
188.374
256.036
248.261
243.357


When n1 ≧ n10, n1m =
0.0807556
0.0955676
0.1136938
0.0410315
0.0482739


When n1 < n10, n1m =
0.0492212
0.0570374
0.0706995
0.0157471
0.0155554


When k1 ≧ k10, k1m =
0.0660083
0.0745215
0.0946643
0.0342603
0.0302344


When k1 < k10, k1m =
0.0885791
0.0963716
0.1079582
0.0433301
0.0248120


When d1 ≧ d10, d1m (nm) =
4.938
5.477
6.133
23.554
∞


When d1 < d10, d1m (nm) =
2.790
2.920
3.507
4.784
6.051


When n2 ≧ n20, n2m =
0.0912793
0.1022461
0.1087073
0.0334387
0.0216223


When n2 < n20, n2m =
0.1401233
0.1468384
0.1373413
0.0900842
0.0519312


When k2 ≧ k20, k2m =
0.0948535
0.1014905
0.0883215
0.0321790
0.0239026


When k2 < k20, k2m =
0.0976477
0.0917578
0.0837280
0.0507922
0.0474658


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
19.461


When d2 < d20, d2m (nm) =
27.641
68.596
90.537
29.710
21.259










1.1 < NA ≦ 1.2


155 < T ≦ 165











Case
16-06
16-07
16-08
16-09





n10
1.6914048
1.6932944
1.6971949
1.6963748


k10
0.0705280
0.0619823
0.0758678
0.0557064


d10 (nm)
212.904
213.027
268.193
273.316


n20
1.6862460
1.6912789
1.6840809
1.6860970


k20
0.2142065
0.1784688
0.2789945
0.1841499


d20 (nm)
190.804
246.475
135.240
242.973


When n1 ≧ n10, n1m =
0.0288806
0.0598267
0.0616260
0.0706445


When n1 < n10, n1m =
0.0419739
0.0573401
0.0320642
0.0521814


When k1 ≧ k10, k1m =
0.0434460
0.0510059
0.0409424
0.0555554


When k1 < k10, k1m =
0.0304883
0.0343054
0.0217456
0.0379871


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
31.951
51.898
19.489
113.780


When n2 ≧ n20, n2m =
0.2364844
0.2370337
0.2474512
0.2927136


When n2 < n20, n2m =
0.0869409
0.1403040
0.2270129
0.2100537


When k2 ≧ k20, k2m =
0.1067354
0.1223047
0.1872974
0.1959326


When k2 < k20, k2m =
0.0726953
0.0652295
0.1039441
0.0773071


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
34.355
75.037
36.050
81.214





















1.1 < NA ≦ 1.2


165 < T ≦ 175







23/27












Case
17-01
17-02
17-03
17-04
17-05





n10
1.9345747
1.9100928
1.9218874
1.7188695
1.7031385


k10
0.1082213
0.1149883
0.1634556
0.0782891
0.0685384


d10 (nm)
13.373
11.317
15.608
93.463
159.293


n20
1.7554016
1.6916658
1.7091703
1.6745648
1.6866422


k20
0.3434593
0.2694423
0.4402763
0.2040549
0.1829170


d20 (nm)
183.042
248.707
128.647
239.614
234.977


When n1 ≧ n10, n1m =
0.0953882
0.1140894
0.0784595
0.0386694
0.0460681


When n1 < n10, n1m =
0.0550098
0.0698865
0.0459766
0.0121814
0.0133398


When k1 ≧ k10, k1m =
0.0742224
0.0954895
0.0620923
0.0290149
0.0227319


When k1 < k10, k1m =
0.1051392
0.1149883
0.0876528
0.0413110
0.0203333


When d1 ≧ d10, d1m (nm) =
5.105
5.733
4.388
16.599
∞


When d1 < d10, d1m (nm) =
2.628
3.226
2.376
3.551
4.956


When n2 ≧ n20, n2m =
0.0995532
0.1061743
0.0849316
0.0275488
0.0132971


When n2 < n20, n2m =
0.1453674
0.1364294
0.1372107
0.0877344
0.0449780


When k2 ≧ k20, k2m =
0.0936926
0.0848206
0.0864539
0.0249731
0.0152673


When k2 < k20, k2m =
0.0884937
0.0821777
0.0909717
0.0487439
0.0459656


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
6.034


When d2 < d20, d2m (nm) =
65.841
91.823
28.009
30.737
19.612










1.1 < NA ≦ 1.2


165 < T ≦ 175











Case
17-06
17-07
17-08
17-09





n10
1.6934237
1.6934242
1.6985617
1.6963947


k10
0.0627890
0.0627998
0.0777714
0.0569261


d10 (nm)
213.592
213.572
264.836
273.344


n20
1.6908665
1.6907829
1.6854326
1.6845211


k20
0.1844160
0.1843934
0.2962369
0.1907955


d20 (nm)
236.853
236.891
131.733
233.824


When n1 ≧ n10, n1m =
0.0574976
0.0574353
0.0522168
0.0698511


When n1 < n10, n1m =
0.0521313
0.0521704
0.0296216
0.0506372


When k1 ≧ k10, k1m =
0.0502954
0.0502856
0.0369763
0.0547412


When k1 < k10, k1m =
0.0341577
0.0341846
0.0234509
0.0366406


When d1 ≧ d10, d1m (nm) =
∞
∞
∞
∞


When d1 < d10, d1m (nm) =
50.284
50.272
18.034
113.943


When n2 ≧ n20, n2m =
0.2442261
0.2441003
0.2108032
0.3045251


When n2 < n20, n2m =
0.1394958
0.1395251
0.2567761
0.2115186


When k2 ≧ k20, k2m =
0.1187415
0.1187610
0.1954675
0.1950378


When k2 < k20, k2m =
0.0660913
0.0660889
0.1128296
0.0795361


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
75.634
75.652
33.470
80.767





















1.1 < NA ≦ 1.2


175 < T ≦ 185







24/27












Case
18-01
18-02
18-03
18-04
18-05





n10
1.9329388
1.9368237
1.9141366
1.7191879
1.7029035


k10
0.1795701
0.1224596
0.1196035
0.0801581
0.0699625


d10 (nm)
14.789
12.921
11.206
93.133
158.805


n20
1.6812994
1.7305084
1.6882344
1.6734445
1.6865116


k20
0.4483886
0.3477304
0.2744889
0.2077092
0.1862225


d20 (nm)
123.825
177.704
240.000
230.286
225.674


When n1 ≧ n10, n1m =
0.0768433
0.0949634
0.1131592
0.0367419
0.0441357


When n1 < n10, n1m =
0.0412451
0.0529919
0.0684998
0.0095679
0.0109912


When k1 ≧ k10, k1m =
0.0578772
0.0744714
0.0949390
0.0247339
0.0167639


When k1 < k10, k1m =
0.0896887
0.1065430
0.1185388
0.0386743
0.0152380


When d1 ≧ d10, d1m (nm) =
3.840
4.794
5.495
14.453
∞


When d1 < d10, d1m (nm) =
1.946
2.409
3.066
2.710
3.941


When n2 ≧ n20, n2m =
0.0764294
0.0962097
0.1038733
0.0230908
0.0081592


When n2 < n20, n2m =
0.1359412
0.1466211
0.1367029
0.0895520
0.0398572


When k2 ≧ k20, k2m =
0.0734753
0.0852112
0.0825085
0.0197388
0.0086536


When k2 < k20, k2m =
0.0828125
0.0854419
0.0815332
0.0475061
0.0463342


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
20.793
3.280


When d2 < d20, d2m (nm) =
32.854
63.574
95.894
33.693
18.574










1.1 < NA ≦ 1.2


175 < T ≦ 185












Case
18-06
18-07
18-08







n10
1.6933701
1.6939475
1.6969386



k10
0.0640425
0.0576888
0.0533290



d10 (nm)
213.864
212.435
271.986



n20
1.6904005
1.6925921
1.6924288



k20
0.1898312
0.1618810
0.1673219



d20 (nm)
227.117
285.048
281.091



When n1 ≧ n10, n1m =
0.0547229
0.0510974
0.0676453



When n1 < n10, n1m =
0.0462109
0.0603149
0.0497070



When k1 ≧ k10, k1m =
0.0493457
0.0532312
0.0592920



When k1 < k10, k1m =
0.0339734
0.0351465
0.0390295



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
49.384
120.643
177.975



When n2 ≧ n20, n2m =
0.2555811
0.2373071
0.2892273



When n2 < n20, n2m =
0.1402515
0.1279663
0.2010315



When k2 ≧ k20, k2m =
0.1146326
0.1254919
0.2051270



When k2 < k20, k2m =
0.0655762
0.0607678
0.0750598



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
70.972
82.029
98.942






















1.1 < NA ≦ 1.2


185 < T ≦ 195







25/27












Case
19-01
19-02
19-03
19-04
19-05





n10
1.9315873
1.9153217
1.8972445
1.7198506
1.7209927


k10
0.1333486
0.1206110
0.1001874
0.0813984
0.0705203


d10 (nm)
13.169
11.351
10.604
93.215
93.408


n20
1.7169625
1.6899751
1.6952918
1.6740113
1.6975541


k20
0.3552140
0.2797802
0.2334251
0.2110946
0.1793898


d20 (nm)
168.729
229.265
285.679
219.867
273.456


When n1 ≧ n10, n1m =
0.0918945
0.1114490
0.1257397
0.0361377
0.0445178


When n1 < n10, n1m =
0.0499878
0.0671436
0.0846338
0.0086279
0.0205615


When k1 ≧ k10, k1m =
0.0714844
0.0926733
0.1116675
0.0228809
0.0433899


When k1 < k10, k1m =
0.1000085
0.1179578
0.1001874
0.0379150
0.0444836


When d1 ≧ d10, d1m (nm) =
4.647
5.413
6.402
13.674
40.701


When d1 < d10, d1m (nm) =
2.318
3.021
3.978
2.409
6.133


When n2 ≧ n20, n2m =
0.0938611
0.1021985
0.1009766
0.0217163
0.0601978


When n2 < n20, n2m =
0.1488745
0.1392834
0.1303809
0.0916943
0.1077124


When k2 ≧ k20, k2m =
0.0821570
0.0826257
0.0865845
0.0185046
0.0416394


When k2 < k20, k2m =
0.0869946
0.0832629
0.0782239
0.0491125
0.0501843


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
19.431
∞


When d2 < d20, d2m (nm) =
61.773
92.529
127.146
32.148
73.073










1.1 < NA ≦ 1.2


185 < T ≦ 195












Case
19-06
19-07
19-08
19-09
19-10





n10
1.7035608
1.6916743
1.6930483
1.6936984
1.6968810


k10
0.0713918
0.0742011
0.0657083
0.0591625
0.0544417


d10 (nm)
159.462
216.137
213.861
212.273
271.786


n20
1.6857491
1.6815589
1.6902271
1.6918699
1.6922876


k20
0.1901066
0.2413942
0.1951191
0.1652801
0.1708476


d20 (nm)
215.251
158.897
217.477
275.792
271.501


When n1 ≧ n10, n1m =
0.0427405
0.0223779
0.0519324
0.0514441
0.0684033


When n1 < n10, n1m =
0.0090222
0.0227649
0.0431079
0.0594763
0.0491284


When k1 ≧ k10, k1m =
0.0150232
0.0325586
0.0481873
0.0521765
0.0581763


When k1 < k10, k1m =
0.0160400
0.0253345
0.0315527
0.0340894
0.0370996


When d1 ≧ d10, d1m (nm) =
∞
13.469
∞
∞
∞


When d1 < d10, d1m (nm) =
3.174
10.839
47.894
119.682
177.263


When n2 ≧ n20, n2m =
0.0074805
0.0864617
0.1377869
0.2440918
0.2955884


When n2 < n20, n2m =
0.0361890
0.0461035
0.1429895
0.1282532
0.2018481


When k2 ≧ k20, k2m =
0.0083386
0.0888440
0.1120801
0.1247546
0.2080872


When k2 < k20, k2m =
0.0485754
0.0635596
0.0642932
0.0606433
0.0779761


When d2 ≧ d20, d2m (nm) =
3.092
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
17.439
14.439
35.904
75.946
92.429





















1.1 < NA ≦ 1.2


195 < T ≦ 205







26/27












Case
20-01
20-02
20-03
20-04
20-05





n10
1.9249373
1.9134695
1.8970797
1.7208445
1.7215107


k10
0.1361664
0.1202777
0.0999072
0.0825059
0.0711590


d10 (nm)
14.155
11.822
10.899
93.633
93.747


n20
1.7251855
1.6947701
1.6978665
1.6746972
1.6977852


k20
0.3723543
0.2878755
0.2388400
0.2167421
0.1834377


d20 (nm)
156.237
218.180
275.054
209.700
263.540


When n1 ≧ n10, n1m =
0.0879163
0.1083789
0.1230811
0.0362378
0.0448303


When n1 < n10, n1m =
0.0472876
0.0648938
0.0826709
0.0083032
0.0200745


When k1 ≧ k10, k1m =
0.0660645
0.0884607
0.1084424
0.0221863
0.0429114


When k1 < k10, k1m =
0.0933167
0.1148511
0.0999072
0.0377161
0.0440771


When d1 ≧ d10, d1m (nm) =
4.725
5.477
6.424
13.579
31.897


When d1 < d10, d1m (nm) =
2.353
3.040
3.984
2.294
5.957


When n2 ≧ n20, n2m =
0.0937048
0.1017651
0.1009302
0.0215295
0.0601208


When n2 < n20, n2m =
0.1501685
0.1443250
0.1325146
0.0892346
0.1044958


When k2 ≧ k20, k2m =
0.0870276
0.0848474
0.0878162
0.0191504
0.0424573


When k2 < k20, k2m =
0.0940491
0.0866907
0.0808813
0.0520386
0.0521252


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
59.976
84.859
127.060
27.072
71.102










1.1 < NA ≦ 1.2


195 < T ≦ 205












Case
20-06
20-07
20-08
20-09
20-10





n10
1.7046380
1.7071945
1.6911424
1.6924731
1.6944113


k10
0.0728087
0.0643745
0.0761042
0.0678273
0.0547711


d10 (nm)
160.840
160.796
216.237
212.933
211.610


n20
1.6842748
1.7036838
1.6835271
1.6899027
1.6931553


k20
0.1961079
0.1674255
0.2518702
0.2006809
0.1468072


d20 (nm)
204.946
259.158
149.208
209.434
323.528


When n1 ≧ n10, n1m =
0.0417468
0.0534717
0.0144385
0.0489441
0.0528149


When n1 < n10, n1m =
0.0080798
0.0311902
0.0202490
0.0431433
0.0592456


When k1 ≧ k10, k1m =
0.0160498
0.0272644
0.0259192
0.0470654
0.0582300


When k1 < k10, k1m =
0.0189954
0.0257520
0.0204919
0.0289844
0.0354419


When d1 ≧ d10, d1m (nm) =
∞
∞
11.042
∞
∞


When d1 < d10, d1m (nm) =
2.830
21.473
8.826
44.978
116.569


When n2 ≧ n20, n2m =
0.0092676
0.0660242
0.0583154
0.1383105
0.2397107


When n2 < n20, n2m =
0.0345349
0.0284167
0.0279346
0.1133557
0.1358362


When k2 ≧ k20, k2m =
0.0098743
0.0192883
0.0839758
0.1160754
0.1327747


When k2 < k20, k2m =
0.0439319
0.0493506
0.0539001
0.0650562
0.0582056


When d2 ≧ d20, d2m (nm) =
4.069
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
16.537
9.202
10.084
22.297
94.005



















1.1 < NA ≦ 1.2


195 < T ≦ 205







27/27










Case
20-11














n10
1.6967389



k10
0.0554960



d10 (nm)
271.524



n20
1.6919127



k20
0.1743507



d20 (nm)
262.739



When n1 ≧ n10, n1m =
0.0690857



When n1 < n10, n1m =
0.0487012



When k1 ≧ k10, k1m =
0.0571155



When k1 < k10, k1m =
0.0354016



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
122.531



When n2 ≧ n20, n2m =
0.3042639



When n2 < n20, n2m =
0.2009363



When k2 ≧ k20, k2m =
0.2111316



When k2 < k20, k2m =
0.0800171



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
82.974.

4. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:
providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate having a thickness T (unit: nm) described below; and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.2<NA≦1.3, the antireflective film including an upper layer having a complex refractive index N1, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm), when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the relational expression


{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1;


a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value Of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20; and
in the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=”, each value in the right columns is “k10−k1m”; in the line of “When d1≧d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20 , d2m (nm) =”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d20−d2m”.













1.2 < NA ≦ 1.3


2 ≦ T ≦ 15







1/21












Case
1-01
1-02
1-03
1-04
1-05





n10
2.070
1.955
1.895
1.875
1.870


k10
0.020
0.138
0.133
0.110
0.101


d10 (nm)
27.974
34.826
29.218
17.990
13.959


n20
5.553
9.284
2.177
1.753
1.700


k20
3.053
0.606
0.543
0.330
0.255


d20 (nm)
2.024
10.907
63.407
152.930
218.765


When n1 ≧ n10, n1m =
2.141
2.017
1.952
1.943
1.957


When n1 < n10, n1m =
2.006
1.896
1.854
1.843
1.821


When k1 ≧ k10, k1m =
0.075
0.180
0.166
0.155
0.171


When k1 < k10, k1m =
0.000
0.061
0.055
0.028
0.009


When d1 ≧ d10,
31.254
39.247
35.017
23.926
20.211


d1m (nm) =


When d1 < d10,
25.519
31.618
26.178
15.560
10.679


d1m (nm) =


When n2 ≧ n20, n2m =
5.876
9.377
2.281
1.832
1.773


When n2 < n20, n2m =
5.233
9.207
2.051
1.635
1.577


When k2 ≧ k20, k2m =
3.362
0.715
0.699
0.412
0.320


When k2 < k20, k2m =
2.751
0.513
0.439
0.253
0.185


When d2 ≧ d20,
2.251
11.023
70.023
∞
∞


d2m (nm) =


When d2 < d20,
1.807
10.812
58.076
125.396
142.606


d2m (nm) =










1.2 < NA ≦ 1.3


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.867
1.699
1.693
1.692
1.694


k10
0.070
0.063
0.058
0.069
0.074


d10 (nm)
13.235
165.016
157.920
236.756
217.672


n20
1.732
1.698
1.698
6.942
1.788


k20
0.221
0.180
0.154
3.076
0.339


d20 (nm)
270.745
204.222
265.886
0.950
84.006


When n1 ≧ n10, n1m =
1.964
1.701
1.708
1.727
1.710


When n1 < n10, n1m =
1.810
1.683
1.664
1.662
1.674


When k1 ≧ k10, k1m =
0.149
0.068
0.084
0.108
0.106


When k1 < k10, k1m =
0.000
0.043
0.031
0.039
0.053


When d1 ≧ d10,
20.519
166.410
170.845
255.389
226.062


d1m (nm) =


When d1 < d10,
9.259
155.941
111.504
217.630
206.257


d1m (nm) =


When n2 ≧ n20, n2m =
1.809
1.721
1.754
7.503
1.909


When n2 < n20, n2m =
1.603
1.694
1.667
6.491
1.763


When k2 ≧ k20, k2m =
0.293
0.188
0.194
3.321
0.395


When k2 < k20, k2m =
0.152
0.139
0.113
2.487
0.243


When d2 ≧ d20,
∞
217.552
∞
1.062
100.609


d2m (nm) =


When d2 < d20,
182.495
202.082
249.694
0.781
81.237


d2m (nm) =



















1.2 < NA ≦ 1.3


2 ≦ T ≦ 15







2/21












Case
1-11
1-12
1-13
















n10
1.699
1.698
1.695



k10
0.071
0.065
0.054



d10 (nm)
210.274
207.280
219.181



n20
1.718
1.695
1.688



k20
0.242
0.194
0.161



d20 (nm)
154.667
219.490
263.755



When n1 ≧ n10, n1m =
1.720
1.737
1.738



When n1 < n10, n1m =
1.683
1.675
1.660



When k1 ≧ k10, k1m =
0.099
0.097
0.100



When k1 < k10, k1m =
0.045
0.035
0.019



When d1 ≧ d10, d1m (nm) =
229.005
∞
∞



When d1 < d10, d1m (nm) =
200.369
189.200
189.609



When n2 ≧ n20, n2m =
1.849
1.855
1.900



When n2 < n20, n2m =
1.670
1.540
1.583



When k2 ≧ k20, k2m =
0.332
0.307
0.271



When k2 < k20, k2m =
0.164
0.122
0.102



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
143.819
154.002
185.363






















1.2 < NA ≦ 1.3


1 < < T ≦ 25







3/21












Case
2-01
2-02
2-03
2-04
2-05





n10
1.894
1.881
1.874
1.872
1.693


k10
0.182
0.116
0.105
0.074
0.060


d10 (nm)
37.493
18.625
14.298
13.408
158.097


n20
9.246
1.766
1.701
1.733
1.697


k20
0.662
0.358
0.269
0.231
0.160


d20 (nm)
10.628
142.939
209.610
261.989
257.142


When n1 ≧ n10, n1m =
1.954
1.946
1.957
1.966
1.703


When n1 < n10, n1m =
1.847
1.852
1.828
1.817
1.667


When k1 ≧ k10, k1m =
0.222
0.156
0.171
0.149
0.081


When k1 < k10, k1m =
0.111
0.037
0.015
0.000
0.035


When d1 ≧ d10,
41.975
24.164
20.222
20.345
165.590


d1m (nm) =


When d1 < d10,
34.168
16.466
11.264
9.664
137.726


d1m (nm) =


When n2 ≧ n20, n2m =
9.356
1.841
1.772
1.809
1.744


When n2 < n20, n2m =
9.153
1.650
1.579
1.602
1.674


When k2 ≧ k20, k2m =
0.784
0.442
0.334
0.302
0.195


When k2 < k20, k2m =
0.549
0.280
0.198
0.162
0.120


When d2 ≧ d20,
10.759
∞
∞
∞
∞


d2m (nm) =


When d2 < d20,
10.519
119.178
137.341
178.243
243.996


d2m (nm) =










1.2 < NA ≦ 1.3


1 < < T ≦ 25












Case
2-06
2-07
2-08
2-09
2-10





n10
1.690
1.693
1.699
1.698
1.695


k10
0.074
0.078
0.074
0.067
0.055


d10 (nm)
235.203
218.334
210.503
207.468
219.130


n20
5.632
1.803
1.719
1.694
1.687


k20
4.204
0.382
0.259
0.203
0.167


d20 (nm)
0.919
74.994
145.797
210.546
255.274


When n1 ≧ n10, n1m =
1.708
1.699
1.715
1.733
1.737


When n1 < n10, n1m =
1.661
1.675
1.684
1.676
1.661


When k1 ≧ k10, k1m =
0.102
0.098
0.100
0.097
0.100


When k1 < k10, k1m =
0.051
0.067
0.052
0.039
0.022


When d1 ≧ d10,
241.533
220.890
225.049
∞
∞


d1m (nm) =


When d1 < d10,
217.317
207.766
201.595
191.244
190.979


d1m (nm) =


When n2 ≧ n20, n2m =
6.262
1.931
1.852
1.853
1.902


When n2 < n20, n2m =
5.366
1.793
1.684
1.538
1.584


When k2 ≧ k20, k2m =
4.338
0.416
0.339
0.310
0.275


When k2 < k20, k2m =
3.555
0.288
0.182
0.132
0.107


When d2 ≧ d20,
0.986
89.025
∞
∞
∞


d2m (nm) =


When d2 < d20,
0.720
74.083
139.178
147.776
179.334


d2m (nm) =





















1.2 < NA ≦ 1.3


25 < T ≦ 35







4/21












Case
3-01
3-02
3-03
3-04
3-05





n10
1.855
1.894
1.879
1.879
1.692


k10
0.222
0.121
0.110
0.076
0.062


d10 (nm)
38.795
19.092
14.598
13.458
158.198


n20
9.554
1.787
1.702
1.736
1.697


k20
0.714
0.392
0.285
0.242
0.168


d20 (nm)
10.003
133.195
201.011
253.439
248.709


When n1 ≧ n10, n1m =
1.905
1.955
1.958
1.971
1.699


When n1 < n10, n1m =
1.821
1.868
1.836
1.826
1.670


When k1 ≧ k10, k1m =
0.258
0.156
0.172
0.149
0.078


When k1 < k10, k1m =
0.159
0.047
0.022
0.000
0.041


When d1 ≧ d10,
42.560
24.067
20.129
19.949
161.711


d1m (nm) =


When d1 < d10,
36.125
17.295
11.822
9.987
144.941


d1m (nm) =


When n2 ≧ n20, n2m =
9.681
1.856
1.769
1.811
1.737


When n2 < n20, n2m =
9.446
1.674
1.584
1.608
1.683


When k2 ≧ k20, k2m =
0.829
0.479
0.348
0.313
0.196


When k2 < k20, k2m =
0.587
0.314
0.215
0.173
0.129


When d2 ≧ d20,
10.138
∞
∞
∞
∞


d2m (nm) =


When d2 < d20,
9.892
112.716
132.762
173.492
239.168


d2m (nm) =










1.2 < NA ≦ 1.3


25 < T ≦ 35












Case
3-06
3-07
3-08







n10
1.699
1.698
1.695



k10
0.078
0.070
0.057



d10 (nm)
210.437
207.381
219.158



n20
1.720
1.693
1.687



k20
0.280
0.215
0.175



d20 (nm)
137.855
202.487
246.765



When n1 ≧ n10, n1m =
1.710
1.730
1.737



When n1 < n10, n1m =
1.686
1.678
1.661



When k1 ≧ k10, k1m =
0.100
0.097
0.101



When k1 < k10, k1m =
0.063
0.046
0.025



When d1 ≧ d10, d1m (nm) =
216.379
∞
∞



When d1 < d10, d1m (nm) =
202.875
193.042
192.539



When n2 ≧ n20, n2m =
1.855
1.841
1.910



When n2 < n20, n2m =
1.702
1.535
1.588



When k2 ≧ k20, k2m =
0.336
0.312
0.280



When k2 < k20, k2m =
0.208
0.146
0.114



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
134.716
142.289
200.270






















1.2 < NA ≦ 1.3


35 < T ≦ 45







5/21












Case
4-01
4-02
4-03
4-04
4-05





n10
1.921
1.907
1.883
1.885
1.692


k10
0.198
0.132
0.117
0.078
0.064


d10 (nm)
29.852
18.597
14.666
13.425
158.019


n20
2.410
1.779
1.698
1.738
1.697


k20
0.850
0.418
0.298
0.251
0.174


d20 (nm)
42.336
126.566
192.788
244.904
240.368


When n1 ≧ n10, n1m =
1.964
1.964
1.959
1.975
1.694


When n1 < n10, n1m =
1.894
1.886
1.843
1.834
1.673


When k1 ≧ k10, k1m =
0.224
0.160
0.175
0.149
0.073


When k1 < k10, k1m =
0.152
0.061
0.031
0.000
0.048


When d1 ≧ d10,
33.127
22.917
19.812
19.537
159.270


d1m (nm) =


When d1 < d10,
28.245
17.267
12.114
10.202
147.983


d1m (nm) =


When n2 ≧ n20, n2m =
2.530
1.833
1.762
1.812
1.732


When n2 < n20, n2m =
2.288
1.667
1.583
1.611
1.691


When k2 ≧ k20, k2m =
0.928
0.492
0.359
0.320
0.195


When k2 < k20, k2m =
0.730
0.344
0.229
0.182
0.145


When d2 ≧ d20,
46.411
∞
∞
∞
274.107


d2m (nm) =


When d2 < d20,
39.931
107.536
154.271
167.375
234.670


d2m (nm) =










1.2 < NA ≦ 1.3


35 < T ≦ 45











Case
4-06
4-07
4-08
4-09





n10
1.700
1.698
1.695
1.705


k10
0.081
0.072
0.059
0.053


d10 (nm)
209.560
206.609
219.174
283.412


n20
1.716
1.692
1.688
1.691


k20
0.298
0.225
0.183
0.185


d20 (nm)
131.419
195.862
237.750
233.362


When n1 ≧ n10, n1m =
1.701
1.721
1.734
1.751


When n1 < n10, n1m =
1.689
1.680
1.662
1.675


When k1 ≧ k10, k1m =
0.099
0.097
0.101
0.092


When k1 < k10, k1m =
0.076
0.050
0.027
0.024


When d1 ≧ d10, d1m (nm) =
210.753
∞
∞
∞


When d1 < d10, d1m (nm) =
203.620
194.085
194.045
189.814


When n2 ≧ n20, n2m =
1.846
1.812
1.920
1.889


When n2 < n20, n2m =
1.712
1.528
1.594
1.515


When k2 ≧ k20, k2m =
0.319
0.315
0.285
0.358


When k2 < k20, k2m =
0.257
0.159
0.121
0.115


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
130.894
179.580
197.417
162.566





















1.2 < NA ≦ 1.3


45 < T ≦ 55







6/21












Case
5-01
5-02
5-03
5-04
5-05





n10
1.943
1.907
1.884
1.891
1.691


k10
0.213
0.153
0.123
0.078
0.066


d10 (nm)
22.907
17.372
14.585
13.392
157.377


n20
1.902
1.716
1.691
1.743
1.696


k20
0.785
0.418
0.305
0.257
0.178


d20 (nm)
53.731
124.143
184.536
235.129
232.195


When n1 ≧ n10, n1m =
1.979
1.963
1.959
1.980
1.692


When n1 < n10, n1m =
1.934
1.892
1.845
1.841
1.676


When k1 ≧ k10, k1m =
0.223
0.175
0.181
0.148
0.067


When k1 < k10, k1m =
0.198
0.080
0.039
0.000
0.057


When d1 ≧ d10,
25.447
21.108
19.487
19.257
157.441


d1m (nm) =


When d1 < d10,
22.431
16.482
12.133
10.346
149.670


d1m (nm) =


When n2 ≧ n20, n2m =
1.937
1.752
1.753
1.817
1.727


When n2 < n20, n2m =
1.871
1.605
1.576
1.616
1.695


When k2 ≧ k20, k2m =
0.813
0.464
0.362
0.326
0.187


When k2 < k20, k2m =
0.724
0.351
0.237
0.188
0.173


When d2 ≧ d20,
58.954
∞
∞
∞
254.885


d2m (nm) =


When d2 < d20,
51.905
103.951
122.545
158.102
231.812


d2m (nm) =










1.2 < NA ≦ 1.3


45 < T ≦ 55












Case
5-06
5-07
5-08







n10
1.699
1.695
1.704



k10
0.072
0.060
0.054



d10 (nm)
204.994
219.095
283.255



n20
1.688
1.689
1.689



k20
0.231
0.188
0.189



d20 (nm)
192.230
228.102
224.255



When n1 ≧ n10, n1m =
1.718
1.729
1.749



When n1 < n10, n1m =
1.682
1.663
1.676



When k1 ≧ k10, k1m =
0.096
0.102
0.091



When k1 < k10, k1m =
0.048
0.030
0.025



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
194.149
195.371
190.682



When n2 ≧ n20, n2m =
1.788
1.929
1.898



When n2 < n20, n2m =
1.641
1.601
1.530



When k2 ≧ k20, k2m =
0.326
0.290
0.362



When k2 < k20, k2m =
0.165
0.127
0.117



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
176.978
195.845
153.544






















1.2 < NA ≦ 1.3


55 < T ≦ 65







7/21












Case
6-01
6-02
6-03
6-04
6-05





n10
1.895
1.882
1.690
1.701
1.693


k10
0.076
0.126
0.068
0.084
0.070


d10 (nm)
13.537
14.752
155.845
206.275
221.382


n20
1.753
1.688
1.693
1.686
1.667


k20
0.262
0.309
0.181
0.310
0.231


d20 (nm)
223.848
174.672
224.616
122.505
161.928


When n1 ≧ n10, n1m =
1.983
1.956
1.691
1.703
1.726


When n1 < n10, n1m =
1.846
1.842
1.680
1.695
1.686


When k1 ≧ k10, k1m =
0.143
0.185
0.071
0.096
0.105


When k1 < k10, k1m =
0.000
0.045
0.054
0.076
0.063


When d1 ≧ d10,
19.333
19.661
156.188
207.561
253.974


d1m (nm) =


When d1 < d10,
10.604
12.234
149.873
203.306
217.847


d1m (nm) =


When n2 ≧ n20, n2m =
1.828
1.751
1.713
1.791
1.691


When n2 < n20, n2m =
1.623
1.571
1.692
1.682
1.585


When k2 ≧ k20, k2m =
0.332
0.365
0.184
0.352
0.284


When k2 < k20, k2m =
0.191
0.239
0.171
0.280
0.201


When d2 ≧ d20,
∞
∞
244.114
149.549
170.132


d2m (nm) =


When d2 < d20,
146.194
124.203
224.269
121.948
139.231


d2m (nm) =










1.2 < NA ≦ 1.3


55 < T ≦ 65












Case
6-06
6-07
6-08







n10
1.695
1.695
1.703



k10
0.060
0.055
0.049



d10 (nm)
218.851
215.764
278.302



n20
1.689
1.693
1.691



k20
0.190
0.162
0.159



d20 (nm)
218.129
277.062
273.241



When n1 ≧ n10, n1m =
1.726
1.740
1.751



When n1 < n10, n1m =
1.665
1.662
1.653



When k1 ≧ k10, k1m =
0.102
0.097
0.092



When k1 < k10, k1m =
0.031
0.021
0.015



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
196.531
170.235
166.884



When n2 ≧ n20, n2m =
1.935
1.919
1.925



When n2 < n20, n2m =
1.606
1.543
1.498



When k2 ≧ k20, k2m =
0.294
0.280
0.278



When k2 < k20, k2m =
0.130
0.102
0.095



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
191.652
197.142
190.724






















1.2 < NA ≦ 1.3


65 < T ≦ 75







8/21












Case
7-01
7-02
7-03
7-04
7-05





n10
1.881
1.879
1.898
1.873
1.715


k10
0.189
0.125
0.073
0.092
0.067


d10 (nm)
17.242
15.444
14.029
12.003
99.925


n20
1.617
1.697
1.767
1.696
1.686


k20
0.409
0.320
0.271
0.218
0.167


d20 (nm)
111.921
162.536
211.582
280.785
269.056


When n1 ≧ n10, n1m =
1.933
1.953
1.985
1.975
1.746


When n1 < n10, n1m =
1.873
1.839
1.852
1.816
1.710


When k1 ≧ k10, k1m =
0.202
0.184
0.136
0.174
0.081


When k1 < k10, k1m =
0.122
0.046
0.000
0.000
0.037


When d1 ≧ d10,
20.550
20.523
19.818
18.551
136.285


d1m (nm) =


When d1 < d10,
16.700
12.791
11.204
8.554
98.008


d1m (nm) =


When n2 ≧ n20, n2m =
1.633
1.761
1.845
1.780
1.699


When n2 < n20, n2m =
1.511
1.579
1.638
1.585
1.620


When k2 ≧ k20, k2m =
0.430
0.380
0.344
0.283
0.175


When k2 < k20, k2m =
0.344
0.246
0.196
0.150
0.131


When d2 ≧ d20,
∞
∞
∞
∞
278.211


d2m (nm) =


When d2 < d20,
91.266
127.980
136.666
158.294
243.285


d2m (nm) =










1.2 < NA ≦ 1.3


65 < T ≦ 75












Case
7-06
7-07
7-08







n10
1.693
1.695
1.695



k10
0.070
0.061
0.055



d10 (nm)
221.230
218.569
215.552



n20
1.668
1.689
1.692



k20
0.236
0.193
0.164



d20 (nm)
151.884
208.598
267.637



When n1 ≧ n10, n1m =
1.724
1.724
1.741



When n1 < n10, n1m =
1.686
1.666
1.661



When k1 ≧ k10, k1m =
0.105
0.101
0.097



When k1 < k10, k1m =
0.064
0.031
0.021



When d1 ≧ d10, d1m (nm) =
247.645
∞
∞



When d1 < d10, d1m (nm) =
218.101
197.493
171.385



When n2 ≧ n20, n2m =
1.689
1.934
1.918



When n2 < n20, n2m =
1.586
1.609
1.542



When k2 ≧ k20, k2m =
0.286
0.296
0.281



When k2 < k20, k2m =
0.205
0.130
0.101



When d2 ≧ d20, d2m (nm) =
159.193
∞
∞



When d2 < d20, d2m (nm) =
130.698
183.027
188.504






















1.2 < NA ≦ 1.3


75 < T ≦ 85







9/21












Case
8-01
8-02
8-03
8-04
8-05





n10
1.880
1.901
1.874
1.716
1.692


k10
0.126
0.074
0.095
0.068
0.072


d10 (nm)
16.279
14.624
12.218
99.848
220.366


n20
1.709
1.778
1.694
1.687
1.668


k20
0.340
0.284
0.225
0.173
0.244


d20 (nm)
151.148
201.087
271.916
259.863
143.647


When n1 ≧ n10, n1m =
1.951
1.984
1.974
1.746
1.725


When n1 < n10, n1m =
1.842
1.857
1.818
1.712
1.688


When k1 ≧ k10, k1m =
0.181
0.134
0.175
0.079
0.106


When k1 < k10, k1m =
0.048
0.000
0.000
0.042
0.068


When d1 ≧ d10,
21.358
20.311
18.650
135.917
245.491


d1m (nm) =


When d1 < d10,
13.627
11.922
8.869
98.660
218.637


d1m (nm) =


When n2 ≧ n20, n2m =
1.774
1.856
1.776
1.696
1.688


When n2 < n20, n2m =
1.592
1.651
1.582
1.624
1.581


When k2 ≧ k20, k2m =
0.403
0.360
0.289
0.178
0.280


When k2 < k20, k2m =
0.263
0.208
0.157
0.137
0.214


When d2 ≧ d20,
∞
∞
∞
265.927
149.336


d2m (nm) =


When d2 < d20,
123.537
130.884
183.486
237.438
121.404


d2m (nm) =










1.2 < NA ≦ 1.3


75 < T ≦ 85











Case
8-06
8-07







n10
1.695
1.695



k10
0.062
0.056



d10 (nm)
218.447
215.754



n20
1.688
1.691



k20
0.198
0.167



d20 (nm)
200.044
258.621



When n1 ≧ n10, n1m =
1.724
1.740



When n1 < n10, n1m =
1.667
1.661



When k1 ≧ k10, k1m =
0.102
0.097



When k1 < k10, k1m =
0.033
0.022



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
198.178
171.868



When n2 ≧ n20, n2m =
1.931
1.916



When n2 < n20, n2m =
1.605
1.542



When k2 ≧ k20, k2m =
0.296
0.282



When k2 < k20, k2m =
0.132
0.105



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
172.147
178.623






















1.2 < NA ≦ 1.3


85 < T ≦ 95







10/21












Case
9-01
9-02
9-03
9-04
9-05





n10
1.888
1.903
1.880
1.693
1.695


k10
0.130
0.081
0.095
0.063
0.064


d10 (nm)
16.763
14.911
12.432
156.037
218.418


n20
1.718
1.775
1.700
1.696
1.685


k20
0.366
0.299
0.236
0.165
0.207


d20 (nm)
141.793
193.492
262.434
252.531
192.031


When n1 ≧ n10, n1m =
1.955
1.983
1.976
1.693
1.725


When n1 < n10, n1m =
1.853
1.862
1.827
1.659
1.667


When k1 ≧ k10, k1m =
0.178
0.137
0.171
0.071
0.102


When k1 < k10, k1m =
0.053
0.000
0.000
0.062
0.036


When d1 ≧ d10,
21.482
20.338
18.582
156.116
252.664


d1m (nm) =


When d1 < d10,
14.427
12.369
9.315
108.678
198.579


d1m (nm) =


When n2 ≧ n20, n2m =
1.777
1.851
1.779
1.766
1.934


When n2 < n20, n2m =
1.605
1.653
1.583
1.688
1.600


When k2 ≧ k20, k2m =
0.429
0.373
0.299
0.166
0.298


When k2 < k20, k2m =
0.289
0.223
0.167
0.129
0.138


When d2 ≧ d20,
∞
∞
∞
252.906
∞


d2m (nm) =


When d2 < d20,
118.585
127.262
178.673
249.872
164.058


d2m (nm) =










1.2 < NA ≦ 1.3


85 < T ≦ 95











Case
9-06
9-07







n10
1.695
1.704



k10
0.057
0.051



d10 (nm)
216.093
278.289



n20
1.691
1.691



k20
0.173
0.173



d20 (nm)
249.945
246.105



When n1 ≧ n10, n1m =
1.738
1.752



When n1 < n10, n1m =
1.662
1.653



When k1 ≧ k10, k1m =
0.098
0.092



When k1 < k10, k1m =
0.022
0.016



When d1 ≧ d10,
∞
∞



d1m (nm) =



When d1 < d10,
175.267
172.533



d1m (nm) =



When n2 ≧ n20, n2m =
1.919
1.830



When n2 < n20, n2m =
1.543
1.507



When k2 ≧ k20, k2m =
0.284
0.291



When k2 < k20, k2m =
0.111
0.108



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
173.633
172.262




















1.2 < NA ≦ 1.3


95 < T ≦ 105







11/21













Case
10-01
10-02
10-03
10-04
10-05
10-06
















n10
1.902
1.906
1.888
1.694
1.695
1.704


k10
0.140
0.093
0.096
0.066
0.059
0.052


d10 (nm)
16.621
14.821
12.503
218.392
216.276
278.098


n20
1.717
1.761
1.706
1.682
1.691
1.689


k20
0.393
0.312
0.247
0.217
0.180
0.180


d20 (nm)
134.110
187.587
253.021
183.765
241.184
237.690


When n1 ≧ n10, n1m =
1.964
1.983
1.982
1.725
1.737
1.752


When n1 < n10, n1m =
1.874
1.867
1.838
1.666
1.663
1.658


When k1 ≧ k10, k1m =
0.179
0.146
0.168
0.103
0.098
0.091


When k1 < k10, k1m =
0.062
0.004
0.000
0.041
0.024
0.019


When d1 ≧ d10, d1m (nm) =
20.729
19.885
18.297
250.100
∞
∞


When d1 < d10, d1m (nm) =
14.862
12.520
9.652
198.830
185.832
180.136


When n2 ≧ n20, n2m =
1.767
1.831
1.783
1.944
1.927
1.847


When n2 < n20, n2m =
1.609
1.641
1.584
1.598
1.559
1.512


When k2 ≧ k20, k2m =
0.449
0.380
0.309
0.303
0.288
0.296


When k2 < k20, k2m =
0.320
0.238
0.178
0.149
0.117
0.113


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
113.506
124.690
172.558
157.077
167.184
165.978





















1.2 < NA ≦ 1.3


105 < T ≦ 115







12/21












Case
11-01
11-02
11-03
11-04
11-05





n10
1.915
1.908
1.895
1.692
1.694


k10
0.153
0.105
0.097
0.060
0.068


d10 (nm)
15.972
14.452
12.386
153.833
218.491


n20
1.700
1.741
1.708
1.696
1.679


k20
0.410
0.319
0.254
0.152
0.227


d20 (nm)
128.035
181.864
244.026
294.292
174.638


When n1 ≧ n10, n1m =
1.973
1.983
1.987
1.719
1.723


When n1 < n10, n1m =
1.893
1.872
1.847
1.655
1.669


When k1 ≧ k10, k1m =
0.185
0.156
0.167
0.093
0.104


When k1 < k10, k1m =
0.078
0.017
0.000
0.039
0.045


When d1 ≧ d10,
19.455
19.144
17.845
∞
247.764


d1m (nm) =


When d1 < d10,
14.744
12.421
9.756
107.765
205.861


d1m (nm) =


When n2 ≧ n20, n2m =
1.741
1.806
1.782
1.782
1.753


When n2 < n20, n2m =
1.596
1.623
1.583
1.640
1.603


When k2 ≧ k20, k2m =
0.453
0.379
0.315
0.185
0.311


When k2 < k20, k2m =
0.345
0.249
0.187
0.106
0.163


When d2 ≧ d20,
∞
∞
∞
∞
∞


d2m (nm) =


When d2 < d20,
107.965
122.284
164.682
240.729
150.727


d2m (nm) =










1.2 < NA ≦ 1.3


105 < T ≦ 115











Case
11-06
11-07







n10
1.695
1.705



k10
0.060
0.054



d10 (nm)
216.291
277.828



n20
1.691
1.688



k20
0.187
0.185



d20 (nm)
231.949
228.622



When n1 ≧ n10, n1m =
1.736
1.751



When n1 < n10, n1m =
1.664
1.660



When k1 ≧ k10, k1m =
0.099
0.091



When k1 < k10, k1m =
0.026
0.021



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
188.964
182.620



When n2 ≧ n20, n2m =
1.938
1.860



When n2 < n20, n2m =
1.577
1.505



When k2 ≧ k20, k2m =
0.293
0.298



When k2 < k20, k2m =
0.122
0.117



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
190.206
157.223






















1.2 < NA ≦ 1.3


115 < T ≦ 125







13/21












Case
12-01
12-02
12-03
12-04
12-05





n10
1.919
1.909
1.897
1.692
1.694


k10
0.168
0.114
0.102
0.061
0.069


d10 (nm)
15.470
14.219
12.252
153.490
218.807


n20
1.675
1.728
1.703
1.695
1.679


k20
0.416
0.323
0.257
0.154
0.236


d20 (nm)
121.998
174.431
235.332
285.775
164.294


When n1 ≧ n10, n1m =
1.974
1.983
1.989
1.719
1.720


When n1 < n10, n1m =
1.903
1.876
1.851
1.657
1.674


When k1 ≧ k10, k1m =
0.194
0.163
0.171
0.093
0.104


When k1 < k10, k1m =
0.095
0.028
0.000
0.043
0.048


When d1 ≧ d10,
18.537
18.641
17.506
176.125
245.819


d1m (nm) =


When d1 < d10,
14.577
12.379
9.747
108.056
210.037


d1m (nm) =


When n2 ≧ n20, n2m =
1.708
1.790
1.776
1.773
1.745


When n2 < n20, n2m =
1.572
1.608
1.579
1.640
1.616


When k2 ≧ k20, k2m =
0.448
0.378
0.316
0.184
0.323


When k2 < k20, k2m =
0.357
0.255
0.190
0.115
0.176


When d2 ≧ d20,
∞
∞
∞
∞
∞


d2m (nm) =


When d2 < d20,
99.374
118.240
154.295
239.447
146.164


d2m (nm) =










1.2 < NA ≦ 1.3


115 < T ≦ 125












Case
12-06
12-07
12-08







n10
1.695
1.696
1.706



k10
0.061
0.056
0.051



d10 (nm)
216.166
214.076
276.333



n20
1.690
1.694
1.706



k20
0.192
0.163
0.162



d20 (nm)
222.296
280.805
273.925



When n1 ≧ n10, n1m =
1.728
1.750
1.770



When n1 < n10, n1m =
1.664
1.664
1.647



When k1 ≧ k10, k1m =
0.099
0.099
0.090



When k1 < k10, k1m =
0.029
0.023
0.020



When d1 ≧ d10, d1m (nm) =
∞
∞
∞



When d1 < d10, d1m (nm) =
190.492
185.642
181.694



When n2 ≧ n20, n2m =
1.826
1.931
1.851



When n2 < n20, n2m =
1.594
1.560
1.519



When k2 ≧ k20, k2m =
0.297
0.283
0.279



When k2 < k20, k2m =
0.128
0.103
0.095



When d2 ≧ d20, d2m (nm) =
∞
∞
∞



When d2 < d20, d2m (nm) =
188.671
203.385
188.718






















1.2 < NA ≦ 1.3


125 < T ≦ 135







14/21












Case
13-01
13-02
13-03
13-04
13-05





n10
1.909
1.895
1.879
1.694
1.695


k10
0.116
0.106
0.083
0.071
0.063


d10 (nm)
14.671
12.483
11.828
219.020
215.746


n20
1.733
1.700
1.710
1.682
1.690


k20
0.334
0.261
0.220
0.245
0.197


d20 (nm)
163.102
225.249
280.433
153.670
212.983


When n1 ≧ n10, n1m =
1.981
1.985
1.982
1.717
1.723


When n1 < n10, n1m =
1.878
1.850
1.819
1.677
1.665


When k1 ≧ k10, k1m =
0.162
0.173
0.169
0.103
0.099


When k1 < k10, k1m =
0.035
0.004
0.000
0.051
0.034


When d1 ≧ d10,
19.040
17.738
18.242
233.783
∞


d1m (nm) =


When d1 < d10,
12.910
9.987
8.329
211.731
191.269


d1m (nm) =


When n2 ≧ n20, n2m =
1.795
1.771
1.785
1.724
1.797


When n2 < n20, n2m =
1.610
1.575
1.592
1.634
1.609


When k2 ≧ k20, k2m =
0.389
0.319
0.285
0.337
0.302


When k2 < k20, k2m =
0.261
0.192
0.153
0.187
0.133


When d2 ≧ d20,
∞
∞
∞
∞
∞


d2m (nm) =


When d2 < d20,
109.327
144.773
164.318
140.585
192.523


d2m (nm) =










1.2 < NA ≦ 1.3


125 < T ≦ 135











Case
13-06
13-07







n10
1.696
1.706



k10
0.057
0.052



d10 (nm)
213.723
276.363



n20
1.693
1.706



k20
0.165
0.164



d20 (nm)
271.596
264.087



When n1 ≧ n10, n1m =
1.749
1.772



When n1 < n10, n1m =
1.664
1.645



When k1 ≧ k10, k1m =
0.099
0.090



When k1 < k10, k1m =
0.026
0.022



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
186.782
182.830



When n2 ≧ n20, n2m =
1.934
1.851



When n2 < n20, n2m =
1.561
1.521



When k2 ≧ k20, k2m =
0.285
0.282



When k2 < k20, k2m =
0.104
0.097



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
198.444
183.298






















1.2 < NA ≦ 1.3


135 < T ≦ 145







15/21












Case
14-01
14-02
14-03
14-04
14-05





n10
1.910
1.892
1.879
1.694
1.694


k10
0.115
0.109
0.084
0.072
0.064


d10 (nm)
15.725
12.960
12.187
218.706
215.091


n20
1.755
1.698
1.712
1.684
1.689


k20
0.355
0.268
0.226
0.254
0.201


d20 (nm)
150.207
215.505
270.397
144.577
204.614


When n1 ≧ n10, n1m =
1.980
1.980
1.979
1.708
1.720


When n1 < n10, n1m =
1.881
1.848
1.820
1.676
1.666


When k1 ≧ k10, k1m =
0.157
0.174
0.167
0.100
0.099


When k1 < k10, k1m =
0.036
0.011
0.000
0.054
0.038


When d1 ≧ d10,
20.158
18.254
18.627
231.071
∞


d1m (nm) =


When d1 < d10,
14.003
10.450
8.694
211.497
191.698


d1m (nm) =


When n2 ≧ n20, n2m =
1.818
1.767
1.787
1.721
1.802


When n2 < n20, n2m =
1.632
1.571
1.592
1.649
1.619


When k2 ≧ k20, k2m =
0.415
0.327
0.291
0.345
0.308


When k2 < k20, k2m =
0.275
0.197
0.157
0.200
0.145


When d2 ≧ d20,
∞
∞
∞
160.527
∞


d2m (nm) =


When d2 < d20,
119.641
139.482
181.534
134.106
186.758


d2m (nm) =










1.2 < NA ≦ 1.3


135 < T ≦ 145











Case
14-06
14-07







n10
1.696
1.706



k10
0.058
0.052



d10 (nm)
213.482
276.472



n20
1.692
1.707



k20
0.169
0.168



d20 (nm)
262.678
254.823



When n1 ≧ n10, n1m =
1.748
1.771



When n1 < n10, n1m =
1.665
1.644



When k1 ≧ k10, k1m =
0.100
0.090



When k1 < k10, k1m =
0.028
0.024



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
188.144
184.314



When n2 ≧ n20, n2m =
1.933
1.854



When n2 < n20, n2m =
1.561
1.522



When k2 ≧ k20, k2m =
0.288
0.286



When k2 < k20, k2m =
0.109
0.100



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
191.540
174.816






















1.2 < NA ≦ 1.3


145 < T ≦ 155







16/21












Case
15-01
15-02
15-03
15-04
15-05





n10
1.919
1.893
1.882
1.694
1.694


k10
0.115
0.113
0.085
0.074
0.065


d10 (nm)
16.638
13.413
12.438
217.741
214.737


n20
1.785
1.697
1.715
1.683
1.687


k20
0.385
0.281
0.235
0.264
0.207


d20 (nm)
138.580
206.656
261.237
137.032
196.488


When n1 ≧ n10, n1m =
1.986
1.976
1.980
1.705
1.718


When n1 < n10, n1m =
1.892
1.851
1.826
1.676
1.666


When k1 ≧ k10, k1m =
0.151
0.174
0.165
0.099
0.100


When k1 < k10, k1m =
0.037
0.018
0.000
0.060
0.040


When d1 ≧ d10,
20.946
18.588
18.692
227.547
∞


d1m (nm) =


When d1 < d10,
15.073
10.996
9.087
210.480
192.120


d1m (nm) =


When n2 ≧ n20, n2m =
1.846
1.763
1.789
1.722
1.834


When n2 < n20, n2m =
1.665
1.571
1.591
1.652
1.629


When k2 ≧ k20, k2m =
0.451
0.339
0.301
0.337
0.312


When k2 < k20, k2m =
0.301
0.209
0.166
0.217
0.151


When d2 ≧ d20,
∞
∞
∞
149.574
∞


d2m (nm) =


When d2 < d20,
113.921
135.398
177.745
128.876
178.069


d2m (nm) =










1.2 < NA ≦ 1.3


145 < T ≦ 155











Case
15-06
15-07







n10
1.695
1.707



k10
0.059
0.053



d10 (nm)
213.710
276.548



n20
1.692
1.707



k20
0.173
0.174



d20 (nm)
253.675
246.168



When n1 ≧ n10, n1m =
1.747
1.770



When n1 < n10, n1m =
1.665
1.645



When k1 ≧ k10, k1m =
0.100
0.089



When k1 < k10, k1m =
0.029
0.025



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
189.864
185.926



When n2 ≧ n20, n2m =
1.910
1.858



When n2 < n20, n2m =
1.562
1.520



When k2 ≧ k20, k2m =
0.289
0.291



When k2 < k20, k2m =
0.109
0.103



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
189.584
169.414






















1.2 < NA ≦ 1.3


155 < T ≦ 165







17/21












Case
16-01
16-02
16-03
16-04
16-05





n10
1.937
1.898
1.890
1.694
1.694


k10
0.118
0.119
0.087
0.077
0.067


d10 (nm)
16.771
13.576
12.460
216.630
214.866


n20
1.806
1.695
1.718
1.679
1.684


k20
0.418
0.295
0.246
0.277
0.215


d20 (nm)
129.251
198.434
252.589
129.875
188.027


When n1 ≧ n10, n1m =
2.001
1.978
1.985
1.707
1.716


When n1 < n10, n1m =
1.914
1.859
1.836
1.685
1.666


When k1 ≧ k10, k1m =
0.148
0.176
0.164
0.101
0.100


When k1 < k10, k1m =
0.045
0.025
0.000
0.067
0.040


When d1 ≧ d10,
20.691
18.424
18.356
225.238
231.093


d1m (nm) =


When d1 < d10,
15.556
11.376
9.363
212.673
192.697


d1m (nm) =


When n2 ≧ n20, n2m =
1.861
1.756
1.791
1.715
1.840


When n2 < n20, n2m =
1.690
1.574
1.591
1.643
1.628


When k2 ≧ k20, k2m =
0.481
0.351
0.310
0.328
0.314


When k2 < k20, k2m =
0.336
0.225
0.176
0.223
0.151


When d2 ≧ d20,
∞
∞
∞
139.199
∞


d2m (nm) =


When d2 < d20,
109.768
131.712
172.718
120.241
167.595


d2m (nm) =










1.2 < NA ≦ 1.3


155 < T ≦ 165











Case
16-06
16-07







n10
1.695
1.707



k10
0.060
0.054



d10 (nm)
214.034
276.376



n20
1.692
1.707



k20
0.179
0.181



d20 (nm)
244.657
237.806



When n1 ≧ n10, n1m =
1.745
1.770



When n1 < n10, n1m =
1.666
1.653



When k1 ≧ k10, k1m =
0.101
0.089



When k1 < k10, k1m =
0.030
0.027



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
191.630
187.468



When n2 ≧ n20, n2m =
1.889
1.864



When n2 < n20, n2m =
1.562
1.515



When k2 ≧ k20, k2m =
0.290
0.295



When k2 < k20, k2m =
0.115
0.110



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
179.119
164.223






















1.2 < NA ≦ 1.3


165 < T ≦ 175







18/21












Case
17-01
17-02
17-03
17-04
17-05





n10
1.958
1.903
1.898
1.694
1.694


k10
0.128
0.127
0.090
0.080
0.068


d10 (nm)
15.815
13.420
12.296
215.821
215.165


n20
1.794
1.688
1.719
1.668
1.681


k20
0.439
0.307
0.254
0.290
0.224


d20 (nm)
123.830
190.984
244.231
122.663
179.093


When n1 ≧ n10, n1m =
2.020
1.981
1.991
1.707
1.716


When n1 < n10, n1m =
1.942
1.867
1.846
1.692
1.665


When k1 ≧ k10, k1m =
0.150
0.182
0.165
0.103
0.101


When k1 < k10, k1m =
0.058
0.033
0.000
0.077
0.041


When d1 ≧ d10,
19.257
17.848
17.802
223.701
230.268


d1m (nm) =


When d1 < d10,
15.087
11.461
9.465
215.120
195.890


d1m (nm) =


When n2 ≧ n20, n2m =
1.832
1.743
1.790
1.677
1.826


When n2 < n20, n2m =
1.680
1.570
1.590
1.625
1.625


When k2 ≧ k20, k2m =
0.483
0.357
0.316
0.321
0.315


When k2 < k20, k2m =
0.365
0.239
0.186
0.252
0.151


When d2 ≧ d20,
∞
∞
∞
127.631
∞


d2m (nm) =


When d2 < d20,
111.992
128.672
166.465
109.461
158.121


d2m (nm) =










1.2 < NA ≦ 1.3


165 < T ≦ 175











Case
17-06
17-07







n10
1.696
1.707



k10
0.061
0.056



d10 (nm)
214.210
275.996



n20
1.692
1.705



k20
0.185
0.187



d20 (nm)
235.479
229.352



When n1 ≧ n10, n1m =
1.744
1.770



When n1 < n10, n1m =
1.667
1.657



When k1 ≧ k10, k1m =
0.101
0.088



When k1 < k10, k1m =
0.031
0.030



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
193.216
188.863



When n2 ≧ n20, n2m =
1.887
1.872



When n2 < n20, n2m =
1.561
1.509



When k2 ≧ k20, k2m =
0.292
0.295



When k2 < k20, k2m =
0.120
0.115



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
161.210
156.975




















1.2 < NA ≦ 1.3


175 < T ≦ 185







19/21












Case
18-01
18-02
18-03
18-04
18-05















n10
1.907
1.904
1.694
1.696
1.704


k10
0.135
0.092
0.070
0.062
0.051


d10 (nm)
13.188
12.121
215.718
214.371
274.345


n20
1.679
1.720
1.679
1.692
1.687


k20
0.313
0.260
0.233
0.190
0.159


d20 (nm)
183.151
235.214
169.072
225.802
280.556


When n1 ≧ n10, n1m =
1.982
1.997
1.715
1.743
1.760


When n1 < n10, n1m =
1.873
1.854
1.666
1.668
1.658


When k1 ≧ k10, k1m =
0.188
0.166
0.102
0.102
0.090


When k1 < k10, k1m =
0.044
0.000
0.044
0.032
0.018


When d1 ≧ d10,
17.244
17.308
229.740
∞
∞


d1m (nm) =


When d1 < d10,
11.395
9.486
201.461
194.630
174.558


d1m (nm) =


When n2 ≧ n20, n2m =
1.730
1.790
1.771
1.836
1.900


When n2 < n20, n2m =
1.562
1.589
1.630
1.559
1.518


When k2 ≧ k20, k2m =
0.359
0.319
0.318
0.293
0.259


When k2 < k20, k2m =
0.249
0.193
0.159
0.124
0.097


When d2 ≧ d20,
∞
∞
∞
∞
∞


d2m (nm) =


When d2 < d20,
128.127
156.903
151.088
157.464
192.992


d2m (nm) =





















1.2 < NA ≦ 1.3


185 < T ≦ 195







20/21












Case
19-01
19-02
19-03
19-04
19-05





n10
1.908
1.906
1.889
1.693
1.696


k10
0.140
0.092
0.087
0.071
0.064


d10 (nm)
13.288
12.370
11.418
216.427
214.510


n20
1.676
1.726
1.707
1.681
1.692


k20
0.321
0.266
0.223
0.243
0.195


d20 (nm)
172.696
223.910
283.898
158.126
215.938


When n1 ≧ n10, n1m =
1.981
1.996
1.994
1.713
1.742


When n1 < n10, n1m =
1.875
1.857
1.834
1.670
1.669


When k1 ≧ k10, k1m =
0.190
0.163
0.168
0.103
0.102


When k1 < k10, k1m =
0.055
0.000
0.000
0.051
0.037


When d1 ≧ d10,
17.148
17.446
17.407
228.093
∞


d1m (nm) =


When d1 < d10,
11.532
9.791
8.458
205.012
195.805


d1m (nm) =


When n2 ≧ n20, n2m =
1.725
1.797
1.791
1.767
1.825


When n2 < n20, n2m =
1.558
1.592
1.590
1.647
1.558


When k2 ≧ k20, k2m =
0.365
0.327
0.286
0.323
0.294


When k2 < k20, k2m =
0.256
0.198
0.157
0.178
0.130


When d2 ≧ d20,
∞
∞
∞
∞
∞


d2m (nm) =


When d2 < d20,
125.060
143.864
171.207
144.997
180.034


d2m (nm) =










1.2 < NA ≦ 1.3


185 < T ≦ 195











Case
19-06
19-07







n10
1.696
1.704



k10
0.057
0.052



d10 (nm)
213.492
274.677



n20
1.691
1.687



k20
0.166
0.162



d20 (nm)
273.809
270.432



When n1 ≧ n10, n1m =
1.742
1.760



When n1 < n10, n1m =
1.666
1.659



When k1 ≧ k10, k1m =
0.097
0.090



When k1 < k10, k1m =
0.026
0.022



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
178.602
175.003



When n2 ≧ n20, n2m =
1.857
1.904



When n2 < n20, n2m =
1.570
1.518



When k2 ≧ k20, k2m =
0.281
0.262



When k2 < k20, k2m =
0.104
0.096



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
199.693
186.949






















1.2 < NA ≦ 1.3


195 < T ≦ 205







21/21












Case
20-01
20-02
20-03
20-04
20-05





n10
1.907
1.904
1.887
1.693
1.696


k10
0.139
0.091
0.088
0.073
0.065


d10 (nm)
13.915
13.010
11.752
216.656
214.259


n20
1.684
1.734
1.707
1.683
1.692


k20
0.334
0.275
0.227
0.253
0.201


d20 (nm)
160.500
212.141
273.737
148.279
206.980


When n1 ≧ n10, n1m =
1.978
1.992
1.990
1.700
1.743


When n1 < n10, n1m =
1.874
1.857
1.833
1.671
1.670


When k1 ≧ k10, k1m =
0.186
0.158
0.167
0.098
0.102


When k1 < k10, k1m =
0.059
0.000
0.000
0.062
0.044


When d1 ≧ d10,
17.817
18.151
17.811
226.068
265.367


d1m (nm) =


When d1 < d10,
12.124
10.391
8.783
207.088
196.420


d1m (nm) =


When n2 ≧ n20, n2m =
1.731
1.806
1.791
1.746
1.815


When n2 < n20, n2m =
1.564
1.602
1.588
1.669
1.556


When k2 ≧ k20, k2m =
0.381
0.338
0.291
0.321
0.294


When k2 < k20, k2m =
0.265
0.202
0.159
0.212
0.142


When d2 ≧ d20,
∞
∞
∞
∞
∞


d2m (nm) =


When d2 < d20,
125.465
136.447
180.411
144.423
187.001


d2m (nm) =










1.2 < NA ≦ 1.3


195 < T ≦ 205











Case
20-06
20-07







n10
1.696
1.704



k10
0.058
0.053



d10 (nm)
213.637
275.120



n20
1.690
1.687



k20
0.169
0.165



d20 (nm)
264.528
260.887



When n1 ≧ n10, n1m =
1.742
1.760



When n1 < n10, n1m =
1.666
1.661



When k1 ≧ k10, k1m =
0.097
0.090



When k1 < k10, k1m =
0.030
0.025



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
183.526
175.348



When n2 ≧ n20, n2m =
1.856
1.912



When n2 < n20, n2m =
1.571
1.519



When k2 ≧ k20, k2m =
0.282
0.268



When k2 < k20, k2m =
0.108
0.102



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
202.896
181.779.

5. An exposure method used in a process for manufacturing a semiconductor device, the method comprising the steps of:
providing an antireflective film having a two-layer structure between a resist layer and a silicon oxide layer formed on a surface of a silicon semiconductor substrate and having a thickness T (unit: nm) described below; and
exposing the resist layer in an exposure system having a wavelength of 190 nm to 195 nm and a numerical aperture NA of 1.3<NA≦1.4, the antireflective film including an upper layer having a complex refractive index N1, and a lower layer having a complex refractive index N2, the complex refractive indexes N1 and N2 being represented by the equations N1=n1−k1i and N2=n2−k2i, respectively;
wherein assuming that the thickness of the upper layer is d1 (unit: nm) and the thickness of the lower layer is d2 (unit: nm) , when any one of the combinations of values of [n10, k10, d10, n20, k20, d20] described below is selected depending on the thickness T of the silicon oxide film, n1, k1, d1, n2, k2, and d2 satisfy the relational expression


{(n1−n10)/(n1m−n10)}2+{(k1−k10)/(k1m−k10)}2+{(d1−d10)/(d1m−d10)}2+{(n2−n20)/(n2m−n20)}2+{(k2−k20)/(k2m−k20)}2+{(d2−d20)/(d2m−d20)}2≦1;


a value of n1m in a corresponding case is selected on the basis of a magnitude relation between n1 and n10; a value of k1m in a corresponding case is selected on the basis of a magnitude relation between k1 and k10; a value of d1m in a corresponding case is selected on the basis of a magnitude relation between d1 and d10; a value of n2m in a corresponding case is selected on the basis of a magnitude relation between n2 and n20; a value of k2m in a corresponding case is selected on the basis of a magnitude relation between k2 and k20; and a value of d2m in a corresponding case is selected on the basis of a magnitude relation between d2 and d20; and
in the tables below, in the line of “When n1≧n10, n1m=”, each value in the right columns is “n1m−n10”; in the line of “When n1<n10, n1m=”, each value in the right columns is “n10−n1m”; in the line of “When k1≧k10, k1m=”, each value in the right columns is “k1m−k10”; in the line of “When k1<k10, k1m=” each value in the right columns is “k1m”; in the line of “When d1≧d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d1m−d10”; in the line of “When d1<d10, d1m (nm) =”, each value (unit: nm) in the right columns is “d10−d1m”; in the line of “When n2≧n20, n2m=”, each value in the right columns is “n2m−n20”; in the line of “When n2<n20, n2m=”, each value in the right columns is “n20−n2m”; in the line of “When k2≧k20, k2m=”, each value in the right columns is “k2m−k20”; in the line of “When k2<k20, k2m=”, each value in the right columns is “k20−k2m”; in the line of “When d2≧d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d2m−d20”; and in the line of “When d2<d20, d2m (nm) =”, each value (unit: nm) in the right columns is “d20−d2m”.













1.3 < NA ≦ 1.4


2 ≦ T ≦ 15







1/20












Case
1-01
1-02
1-03
1-04
1-05





n10
2.047
1.887
1.871
1.868
1.862


k10
0.012
0.120
0.106
0.075
0.065


d10 (nm)
29.751
26.980
17.106
15.339
13.830


n20
6.274
1.973
1.713
1.738
1.730


k20
3.305
0.477
0.298
0.245
0.208


d20 (nm)
1.566
76.285
158.161
212.612
271.884


When n1 ≧ n10, n1m =
2.109
1.929
1.924
1.935
1.940


When n1 < n10, n1m =
1.990
1.877
1.852
1.835
1.823


When k1 ≧ k10, k1m =
0.055
0.138
0.136
0.123
0.124


When k1 < k10, k1m =
0.000
0.089
0.036
0.000
0.000


When d1 ≧ d10,
32.767
31.708
21.551
20.868
20.183


d1m (nm) =


When d1 < d10,
27.509
26.309
15.640
12.771
10.913


d1m (nm) =


When n2 ≧ n20, n2m =
6.594
2.028
1.750
1.789
1.793


When n2 < n20, n2m =
5.978
1.933
1.627
1.639
1.618


When k2 ≧ k20, k2m =
3.556
0.507
0.335
0.292
0.258


When k2 < k20, k2m =
3.013
0.403
0.242
0.188
0.152


When d2 ≧ d20,
1.715
83.056
∞
∞
∞


d2m (nm) =


When d2 < d20,
1.418
75.266
136.202
175.723
191.206


d2m (nm) =










1.3 < NA ≦ 1.4


2 ≦ T ≦ 15












Case
1-06
1-07
1-08
1-09
1-10





n10
1.691
1.692
1.711
1.704
1.705


k10
0.062
0.057
0.070
0.057
0.050


d10 (nm)
161.852
157.460
239.891
226.155
221.451


n20
1.688
1.697
7.420
1.689
1.695


k20
0.179
0.154
3.291
0.187
0.158


d20 (nm)
207.262
266.043
0.810
202.908
261.182


When n1 ≧ n10, n1m =
1.703
1.707
1.725
1.738
1.736


When n1 < n10, n1m =
1.685
1.664
1.704
1.690
1.688


When k1 ≧ k10, k1m =
0.080
0.084
0.082
0.082
0.079


When k1 < k10, k1m =
0.051
0.029
0.049
0.029
0.022


When d1 ≧ d10,
169.125
171.143
250.745
∞
∞


d1m (nm) =


When d1 < d10,
157.974
129.944
235.697
215.124
204.319


d1m (nm) =


When n2 ≧ n20, n2m =
1.696
1.748
7.849
1.818
1.809


When n2 < n20, n2m =
1.666
1.665
7.185
1.613
1.611


When k2 ≧ k20, k2m =
0.202
0.195
3.465
0.264
0.246


When k2 < k20, k2m =
0.150
0.115
2.625
0.129
0.105


When d2 ≧ d20,
213.501
∞
0.893
∞
∞


d2m (nm) =


When d2 < d20,
194.001
249.665
0.721
179.167
225.188


d2m (nm) =



















1.3 NA ≦ 1.4


2 ≦ T ≦ 15







2/20










Case
1-11














n10
1.695



k10
0.054



d10 (nm)
267.286



n20
1.705



k20
0.184



d20 (nm)
212.751



When n1 ≧ n10, n1m =
1.731



When n1 < n10, n1m =
1.655



When k1 ≧ k10, k1m =
0.080



When k1 < k10, k1m =
0.025



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
220.771



When n2 ≧ n20, n2m =
1.808



When n2 < n20, n2m =
1.623



When k2 ≧ k20, k2m =
0.237



When k2 < k20, k2m =
0.115



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
175.645






















1.3 < NA ≦ 1.4


15 < T ≦ 25







3/20












Case
2-01
2-02
2-03
2-04
2-05





n10
1.943
1.876
1.873
1.866
1.691


k10
0.121
0.112
0.080
0.068
0.064


d10 (nm)
34.905
17.699
15.588
14.042
161.844


n20
6.149
1.719
1.739
1.732
1.687


k20
4.965
0.321
0.258
0.217
0.188


d20 (nm)
1.046
148.502
203.950
262.757
198.716


When n1 ≧ n10, n1m =
1.997
1.925
1.936
1.942
1.700


When n1 < n10, n1m =
1.902
1.861
1.842
1.830
1.690


When k1 ≧ k10, k1m =
0.155
0.135
0.124
0.122
0.079


When k1 < k10, k1m =
0.064
0.044
0.004
0.000
0.061


When d1 ≧ d10,
38.478
21.745
20.735
20.064
166.973


d1m (nm) =


When d1 < d10,
32.365
16.569
13.305
11.354
161.165


d1m (nm) =


When n2 ≧ n20, n2m =
6.640
1.749
1.787
1.793
1.688


When n2 < n20, n2m =
5.695
1.636
1.643
1.623
1.668


When k2 ≧ k20, k2m =
5.267
0.354
0.304
0.266
0.197


When k2 < k20, k2m =
4.500
0.266
0.202
0.162
0.165


When d2 ≧ d20,
1.189
∞
∞
∞
199.493


d2m (nm) =


When d2 < d20,
0.912
129.925
173.046
186.094
188.055


d2m (nm) =










1.3 < NA ≦ 1.4


15 < T ≦ 25












Case
2-06
2-07
2-08
2-09
2-10





n10
1.692
1.706
1.711
1.704
1.695


k10
0.059
0.052
0.075
0.059
0.056


d10 (nm)
157.652
221.303
235.815
225.762
267.452


n20
1.696
1.695
6.235
1.687
1.705


k20
0.161
0.165
4.691
0.197
0.194


d20 (nm)
257.279
252.591
0.724
194.502
204.028


When n1 ≧ n10, n1m =
1.703
1.736
1.711
1.737
1.730


When n1 < n10, n1m =
1.667
1.690
1.709
1.692
1.658


When k1 ≧ k10, k1m =
0.082
0.079
0.079
0.082
0.080


When k1 < k10, k1m =
0.033
0.024
0.074
0.033
0.029


When d1 ≧ d10,
165.499
∞
235.852
∞
∞


d1m (nm) =


When d1 < d10,
138.474
207.206
234.721
216.211
222.458


d1m (nm) =


When n2 ≧ n20, n2m =
1.740
1.797
6.407
1.814
1.798


When n2 < n20, n2m =
1.670
1.616
6.233
1.613
1.629


When k2 ≧ k20, k2m =
0.196
0.249
4.693
0.270
0.240


When k2 < k20, k2m =
0.121
0.111
3.940
0.138
0.122


When d2 ≧ d20,
∞
∞
0.732
∞
∞


d2m (nm) =


When d2 < d20,
244.077
220.690
0.720
173.495
171.776


d2m (nm) =



















1.3 < NA ≦ 1.4


25 < T ≦ 35







4/20













Case
3-01
3-02
3-03
3-04
3-05
3-06
















n10
1.883
1.879
1.872
1.692
1.705
1.706


k10
0.119
0.084
0.069
0.061
0.061
0.054


d10 (nm)
18.157
15.746
14.214
157.790
225.478
221.123


n20
1.723
1.741
1.737
1.697
1.687
1.695


k20
0.349
0.274
0.228
0.168
0.209
0.173


d20 (nm)
139.788
195.542
253.893
248.784
186.105
244.149


When n1 ≧ n10, n1m =
1.927
1.939
1.945
1.699
1.735
1.735


When n1 < n10, n1m =
1.873
1.852
1.839
1.671
1.694
1.692


When k1 ≧ k10, k1m =
0.135
0.123
0.119
0.079
0.082
0.078


When k1 < k10, k1m =
0.055
0.011
0.000
0.039
0.038
0.026


When d1 ≧ d10, d1m (nm) =
21.683
20.446
19.836
161.921
270.295
∞


When d1 < d10, d1m (nm) =
17.423
13.775
11.786
145.560
217.505
209.346


When n2 ≧ n20, n2m =
1.744
1.786
1.794
1.735
1.754
1.781


When n2 < n20, n2m =
1.647
1.650
1.632
1.679
1.615
1.622


When k2 ≧ k20, k2m =
0.374
0.316
0.276
0.196
0.276
0.252


When k2 < k20, k2m =
0.295
0.218
0.173
0.130
0.149
0.118


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
124.317
167.810
181.193
239.270
167.329
214.946





















1.3 < NA ≦ 1.4


35 < T ≦ 45







5/20












Case
4-01
4-02
4-03
4-04
4-05





n10
1.890
1.886
1.877
1.692
1.705


k10
0.130
0.088
0.073
0.062
0.063


d10 (nm)
18.083
15.723
14.196
157.690
225.284


n20
1.714
1.743
1.736
1.697
1.687


k20
0.371
0.287
0.236
0.175
0.220


d20 (nm)
132.495
187.112
245.779
240.328
177.345


When n1 ≧ n10, n1m =
1.928
1.943
1.947
1.695
1.732


When n1 < n10, n1m =
1.886
1.862
1.846
1.674
1.696


When k1 ≧ k10, k1m =
0.137
0.123
0.120
0.075
0.081


When k1 < k10, k1m =
0.069
0.018
0.000
0.046
0.042


When d1 ≧ d10,
21.026
19.960
19.411
159.493
266.580


d1m (nm) =


When d1 < d10,
17.768
14.046
12.019
148.447
218.746


d1m (nm) =


When n2 ≧ n20, n2m =
1.723
1.784
1.789
1.731
1.745


When n2 < n20, n2m =
1.643
1.655
1.634
1.687
1.620


When k2 ≧ k20, k2m =
0.382
0.326
0.281
0.195
0.283


When k2 < k20, k2m =
0.323
0.234
0.182
0.141
0.159


When d2 ≧ d20,
∞
∞
∞
273.632
∞


d2m (nm) =


When d2 < d20,
119.322
160.895
176.028
234.699
160.070


d2m (nm) =










1.3 < NA ≦ 1.4


35 < T ≦ 45











Case
4-06
4-07







n10
1.706
1.695



k10
0.055
0.055



d10 (nm)
220.863
262.917



n20
1.695
1.705



k20
0.180
0.178



d20 (nm)
235.453
255.408



When n1 ≧ n10, n1m =
1.734
1.723



When n1 < n10, n1m =
1.693
1.660



When k1 ≧ k10, k1m =
0.078
0.082



When k1 < k10, k1m =
0.027
0.031



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
210.617
221.552



When n2 ≧ n20, n2m =
1.767
1.832



When n2 < n20, n2m =
1.630
1.613



When k2 ≧ k20, k2m =
0.252
0.241



When k2 < k20, k2m =
0.123
0.108



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
206.982
177.439






















1.3 < NA ≦ 1.4


45 < T ≦ 55







6/20












Case
5-01
5-02
5-03
5-04
5-05





n10
1.891
1.892
1.878
1.691
1.705


k10
0.144
0.091
0.079
0.064
0.064


d10 (nm)
17.530
15.545
14.050
157.168
225.395


n20
1.686
1.744
1.728
1.696
1.686


k20
0.376
0.296
0.240
0.179
0.227


d20 (nm)
126.586
178.253
238.151
231.953
167.881


When n1 ≧ n10, n1m =
1.925
1.947
1.947
1.692
1.729


When n1 < n10, n1m =
1.891
1.870
1.849
1.677
1.698


When k1 ≧ k10, k1m =
0.144
0.124
0.124
0.069
0.080


When k1 < k10, k1m =
0.087
0.024
0.000
0.054
0.044


When d1 ≧ d10,
19.955
19.462
18.998
157.553
251.532


d1m (nm) =


When d1 < d10,
17.523
14.081
12.045
150.032
219.912


d1m (nm) =


When n2 ≧ n20, n2m =
1.686
1.783
1.778
1.727
1.728


When n2 < n20, n2m =
1.619
1.656
1.625
1.693
1.628


When k2 ≧ k20, k2m =
0.377
0.330
0.281
0.190
0.292


When k2 < k20, k2m =
0.336
0.244
0.186
0.164
0.167


When d2 ≧ d20,
127.104
∞
∞
253.769
∞


d2m (nm) =


When d2 < d20,
114.397
150.903
169.614
229.862
150.571


d2m (nm) =










1.3 < NA ≦ 1.4


45 < T ≦ 55











Case
5-06
5-07







n10
1.706
1.697



k10
0.056
0.047



d10 (nm)
220.607
278.691



n20
1.694
1.700



k20
0.184
0.152



d20 (nm)
226.210
281.986



When n1 ≧ n10, n1m =
1.728
1.753



When n1 < n10, n1m =
1.694
1.654



When k1 ≧ k10, k1m =
0.077
0.078



When k1 < k10, k1m =
0.029
0.021



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
210.961
211.857



When n2 ≧ n20, n2m =
1.757
1.912



When n2 < n20, n2m =
1.639
1.611



When k2 ≧ k20, k2m =
0.250
0.220



When k2 < k20, k2m =
0.125
0.096



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
199.775
202.106




















1.3 < NA ≦ 1.4


55 < T ≦ 65







7/20













Case
6-01
6-02
6-03
6-04
6-05
6-06
















n10
1.896
1.875
1.705
1.705
1.708
1.697


k10
0.091
0.087
0.064
0.057
0.053
0.047


d10 (nm)
15.652
14.019
225.606
220.354
218.289
278.413


n20
1.752
1.715
1.687
1.694
1.707
1.701


k20
0.303
0.239
0.232
0.186
0.158
0.154


d20 (nm)
167.408
230.256
157.678
216.433
272.538
271.867


When n1 ≧ n10, n1m =
1.950
1.943
1.724
1.723
1.740
1.750


When n1 < n10, n1m =
1.875
1.846
1.699
1.693
1.693
1.656


When k1 ≧ k10, k1m =
0.122
0.132
0.079
0.077
0.077
0.078


When k1 < k10, k1m =
0.025
0.004
0.045
0.033
0.030
0.022


When d1 ≧ d10, d1m (nm) =
19.494
18.898
247.964
∞
∞
∞


When d1 < d10, d1m (nm) =
14.295
12.042
221.101
210.599
206.669
213.947


When n2 ≧ n20, n2m =
1.792
1.763
1.721
1.752
1.799
1.923


When n2 < n20, n2m =
1.662
1.612
1.638
1.648
1.579
1.614


When k2 ≧ k20, k2m =
0.337
0.279
0.301
0.247
0.230
0.223


When k2 < k20, k2m =
0.249
0.186
0.176
0.128
0.106
0.097


When d2 ≧ d20, d2m (nm) =
∞
∞
172.085
∞
∞
∞


When d2 < d20, d2m (nm) =
138.575
161.008
143.974
199.200
203.487
191.019





















1.3 < NA ≦ 1.4


65 < T ≦ 75







8/20












Case
7-01
7-02
7-03
7-04
7-05





n10
1.901
1.871
1.866
1.706
1.705


k10
0.088
0.093
0.067
0.065
0.057


d10 (nm)
16.388
14.267
13.172
225.317
220.112


n20
1.774
1.706
1.724
1.687
1.694


k20
0.318
0.241
0.206
0.238
0.188


d20 (nm)
154.194
221.319
275.098
147.740
206.685


When n1 ≧ n10, n1m =
1.955
1.937
1.947
1.721
1.721


When n1 < n10, n1m =
1.881
1.842
1.823
1.701
1.693


When k1 ≧ k10, k1m =
0.116
0.138
0.131
0.077
0.077


When k1 < k10, k1m =
0.024
0.011
0.000
0.045
0.035


When d1 ≧ d10,
20.279
19.161
19.228
239.263
245.793


d1m (nm) =


When d1 < d10,
15.118
12.240
10.142
222.197
210.312


d1m (nm) =


When n2 ≧ n20, n2m =
1.816
1.751
1.783
1.720
1.752


When n2 < n20, n2m =
1.683
1.603
1.616
1.644
1.651


When k2 ≧ k20, k2m =
0.355
0.280
0.254
0.305
0.246


When k2 < k20, k2m =
0.259
0.188
0.151
0.177
0.133


When d2 ≧ d20,
∞
∞
∞
161.062
∞


d2m (nm) =


When d2 < d20,
132.898
152.054
192.936
136.808
191.952


d2m (nm) =










1.3 < NA ≦ 1.4


65 < T ≦ 75











Case
7-06
7-07







n10
1.708
1.697



k10
0.053
0.047



d10 (nm)
218.342
278.070



n20
1.707
1.702



k20
0.161
0.156



d20 (nm)
262.805
262.294



When n1 ≧ n10, n1m =
1.740
1.735



When n1 < n10, n1m =
1.695
1.657



When k1 ≧ k10, k1m =
0.077
0.077



When k1 < k10, k1m =
0.032
0.024



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
208.328
215.902



When n2 ≧ n20, n2m =
1.805
1.806



When n2 < n20, n2m =
1.580
1.618



When k2 ≧ k20, k2m =
0.232
0.224



When k2 < k20, k2m =
0.108
0.097



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
195.570
182.960






















1.3 < NA ≦ 1.4


75 < T ≦ 85







9/20












Case
8-01
8-02
8-03
8-04
8-05





n10
1.908
1.871
1.869
1.706
1.705


k10
0.087
0.097
0.067
0.067
0.058


d10 (nm)
17.362
14.654
13.479
224.641
220.026


n20
1.802
1.704
1.729
1.684
1.694


k20
0.342
0.250
0.214
0.248
0.194


d20 (nm)
141.959
212.121
265.153
139.263
197.616


When n1 ≧ n10, n1m =
1.960
1.935
1.947
1.720
1.721


When n1 < n10, n1m =
1.891
1.843
1.828
1.704
1.694


When k1 ≧ k10, k1m =
0.111
0.140
0.128
0.074
0.078


When k1 < k10, k1m =
0.023
0.016
0.000
0.049
0.035


When d1 ≧ d10, d1m
21.165
19.437
19.380
236.042
243.446


(nm) =


When d1 < d10, d1m
16.261
12.685
10.599
223.100
210.844


(nm) =


When n2 ≧ n20, n2m =
1.843
1.746
1.787
1.711
1.754


When n2 < n20, n2m =
1.713
1.604
1.618
1.641
1.649


When k2 ≧ k20, k2m =
0.382
0.288
0.262
0.299
0.249


When k2 < k20, k2m =
0.279
0.196
0.159
0.184
0.134


When d2 ≧ d20, d2m
∞
∞
∞
151.104
∞


(nm) =


When d2 < d20, d2m
126.652
177.678
187.664
128.169
181.064


(nm) =










1.3 < NA ≦ 1.4


75 < T ≦ 85











Case
8-06
8-07







n10
1.708
1.697



k10
0.054
0.048



d10 (nm)
218.429
277.999



n20
1.707
1.702



k20
0.165
0.160



d20 (nm)
253.768
253.663



When n1 ≧ n10, n1m =
1.739
1.730



When n1 < n10, n1m =
1.697
1.656



When k1 ≧ k10, k1m =
0.076
0.076



When k1 < k10, k1m =
0.032
0.027



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
209.931
217.650



When n2 ≧ n20, n2m =
1.810
1.804



When n2 < n20, n2m =
1.580
1.625



When k2 ≧ k20, k2m =
0.235
0.225



When k2 < k20, k2m =
0.109
0.100



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
216.664
177.272




















1.3 < NA ≦ 1.4


85 < T ≦ 95







10/20













Case
9-01
9-02
9-03
9-04
9-05
9-06
















n10
1.918
1.876
1.874
1.706
1.709
1.697


k10
0.092
0.100
0.069
0.060
0.055
0.050


d10 (nm)
17.977
14.944
13.674
219.996
218.382
278.074


n20
1.822
1.706
1.733
1.694
1.707
1.701


k20
0.371
0.265
0.224
0.203
0.172
0.166


d20 (nm)
132.466
203.140
256.300
189.146
245.309
245.468


When n1 ≧ n10, n1m =
1.966
1.936
1.950
1.723
1.738
1.728


When n1 < n10, n1m =
1.905
1.851
1.836
1.696
1.699
1.655


When k1 ≧ k10, k1m =
0.109
0.138
0.126
0.078
0.075
0.075


When k1 < k10, k1m =
0.028
0.021
0.000
0.035
0.032
0.029


When d1 ≧ d10, d1m (nm) =
21.461
19.418
19.237
242.566
∞
∞


When d1 < d10, d1m (nm) =
17.167
13.206
11.040
212.120
211.373
219.101


When n2 ≧ n20, n2m =
1.855
1.745
1.789
1.754
1.811
1.805


When n2 < n20, n2m =
1.737
1.611
1.626
1.644
1.579
1.636


When k2 ≧ k20, k2m =
0.407
0.300
0.271
0.255
0.237
0.226


When k2 < k20, k2m =
0.308
0.211
0.169
0.143
0.115
0.106


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
121.537
173.052
183.002
168.954
213.072
172.052





















1.3 < NA ≦ 1.4


95 < T ≦ 105







11/20













10-01
10-02
10-03
10-04
10-05





n10
1.929
1.883
1.880
1.707
1.709


k10
0.101
0.103
0.071
0.062
0.057


d10 (nm)
17.864
14.973
13.709
219.774
218.071


n20
1.821
1.709
1.736
1.693
1.706


k20
0.398
0.279
0.234
0.214
0.179


d20 (nm)
125.532
194.479
247.823
180.753
237.020


When n1 ≧ n10, n1m =
1.973
1.940
1.953
1.724
1.737


When n1 < n10, n1m =
1.922
1.863
1.845
1.698
1.701


When k1 ≧ k10, k1m =
0.111
0.136
0.124
0.077
0.074


When k1 < k10, k1m =
0.042
0.027
0.000
0.035
0.034


When d1 ≧ d10, d1m
20.839
19.023
18.857
241.722
∞


(nm) =


When d1 < d10, d1m
17.465
13.566
11.352
213.515
212.546


(nm) =


When n2 ≧ n20, n2m =
1.840
1.742
1.789
1.751
1.807


When n2 < n20, n2m =
1.743
1.619
1.632
1.642
1.577


When k2 ≧ k20, k2m =
0.418
0.310
0.278
0.260
0.236


When k2 < k20, k2m =
0.340
0.227
0.180
0.155
0.122


When d2 ≧ d20, d2m
161.544
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
119.422
166.497
178.361
161.067
205.891


(nm) =










1.3 < NA ≦ 1.4


95 < T ≦ 105










Case
10-06







n10
1.697



k10
0.047



d10 (nm)
275.083



n20
1.700



k20
0.148



d20 (nm)
295.680



When n1 ≧ n10, n1m =
1.768



When n1 < n10, n1m =
1.650



When k1 ≧ k10, k1m =
0.079



When k1 < k10, k1m =
0.023



When d1 ≧ d10, d1m (nm) =
∞



When d1 < d10, d1m (nm) =
200.276



When n2 ≧ n20, n2m =
1.849



When n2 < n20, n2m =
1.604



When k2 ≧ k20, k2m =
0.227



When k2 < k20, k2m =
0.093



When d2 ≧ d20, d2m (nm) =
∞



When d2 < d20, d2m (nm) =
212.971




















1.3 < NA ≦ 1.4


105 < T ≦ 115







12/20












Case
11-01
11-02
11-03
11-04
11-05















n10
1.891
1.885
1.707
1.709
1.697


k10
0.108
0.074
0.064
0.058
0.048


d10 (nm)
14.702
13.594
219.485
217.678
275.043


n20
1.707
1.735
1.692
1.705
1.701


k20
0.289
0.241
0.223
0.184
0.152


d20 (nm)
186.368
239.426
171.867
228.411
286.426


When n1 ≧ n10, n1m =
1.944
1.955
1.723
1.736
1.767


When n1 < n10, n1m =
1.874
1.853
1.700
1.703
1.650


When k1 ≧ k10, k1m =
0.135
0.124
0.077
0.073
0.078


When k1 < k10, k1m =
0.035
0.000
0.037
0.036
0.023


When d1 ≧ d10, d1m
18.320
18.363
240.271
∞
∞


(nm) =


When d1 < d10, d1m
13.618
11.476
214.658
213.396
201.239


(nm) =


When n2 ≧ n20, n2m =
1.733
1.786
1.744
1.797
1.850


When n2 < n20, n2m =
1.620
1.632
1.646
1.574
1.606


When k2 ≧ k20, k2m =
0.314
0.282
0.261
0.232
0.229


When k2 < k20, k2m =
0.241
0.188
0.163
0.126
0.094


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
157.397
173.024
156.390
195.169
202.551


(nm) =





















1.3 < NA ≦ 1.4


115 < T ≦ 125







13/20












Case
12-01
12-02
12-03
12-04
12-05





n10
1.896
1.887
1.692
1.707
1.709


k10
0.113
0.078
0.059
0.065
0.059


d10 (nm)
14.435
13.577
153.772
219.581
217.561


n20
1.703
1.733
1.694
1.692
1.702


k20
0.295
0.244
0.154
0.231
0.188


d20 (nm)
177.615
230.253
284.837
161.904
219.131


When n1 ≧ n10, n1m =
1.947
1.955
1.718
1.720
1.728


When n1 < n10, n1m =
1.882
1.856
1.664
1.701
1.703


When k1 ≧ k10, k1m =
0.136
0.126
0.090
0.076
0.072


When k1 < k10, k1m =
0.044
0.000
0.044
0.041
0.040


When d1 ≧ d10, d1m
17.718
18.125
175.199
231.299
∞


(nm) =


When d1 < d10, d1m
13.578
11.595
128.388
215.799
214.049


(nm) =


When n2 ≧ n20, n2m =
1.725
1.783
1.772
1.738
1.784


When n2 < n20, n2m =
1.617
1.629
1.642
1.658
1.629


When k2 ≧ k20, k2m =
0.315
0.284
0.182
0.262
0.229


When k2 < k20, k2m =
0.249
0.192
0.119
0.174
0.128


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
145.196
165.335
240.440
152.266
193.496


(nm) =










1.3 < NA ≦ 1.4


115 < T ≦ 125











Case
12-06
12-07







n10
1.707
1.697



k10
0.053
0.048



d10 (nm)
216.484
274.812



n20
1.695
1.701



k20
0.157
0.154



d20 (nm)
278.062
276.656



When n1 ≧ n10, n1m =
1.748
1.768



When n1 < n10, n1m =
1.689
1.651



When k1 ≧ k10, k1m =
0.077
0.078



When k1 < k10, k1m =
0.030
0.024



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
199.849
201.932



When n2 ≧ n20, n2m =
1.761
1.850



When n2 < n20, n2m =
1.583
1.607



When k2 ≧ k20, k2m =
0.215
0.229



When k2 < k20, k2m =
0.104
0.098



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
212.463
192.106






















1.3 < NA ≦ 1.4


125 < T ≦ 135







14/20












Case
13-01
13-02
13-03
13-04
13-05





n10
1.898
1.885
1.868
1.707
1.708


k10
0.115
0.081
0.075
0.067
0.060


d10 (nm)
14.632
13.917
12.752
219.938
217.756


n20
1.705
1.732
1.713
1.695
1.701


k20
0.303
0.248
0.206
0.239
0.192


d20 (nm)
166.646
219.851
279.921
151.390
209.457


When n1 ≧ n10, n1m =
1.949
1.951
1.949
1.716
1.721


When n1 < n10, n1m =
1.886
1.855
1.830
1.703
1.704


When k1 ≧ k10, k1m =
0.135
0.127
0.135
0.075
0.072


When k1 < k10, k1m =
0.050
0.002
0.000
0.050
0.045


When d1 ≧ d10, d1m
17.809
18.468
18.469
226.140
∞


(nm) =


When d1 < d10, d1m
13.869
11.960
10.161
217.246
214.692


(nm) =


When n2 ≧ n20, n2m =
1.725
1.781
1.771
1.731
1.769


When n2 < n20, n2m =
1.618
1.628
1.611
1.678
1.659


When k2 ≧ k20, k2m =
0.322
0.288
0.250
0.263
0.228


When k2 < k20, k2m =
0.256
0.194
0.153
0.185
0.138


When d2 ≧ d20, d2m
∞
∞
∞
179.041
∞


(nm) =


When d2 < d20, d2m
136.370
153.796
194.427
147.510
199.403


(nm) =










1.3 < NA ≦ 1.4


125 < T ≦ 135











Case
13-06
13-07







n10
1.706
1.696



k10
0.054
0.049



d10 (nm)
217.065
274.075



n20
1.694
1.702



k20
0.160
0.157



d20 (nm)
268.021
267.366



When n1 ≧ n10, n1m =
1.746
1.770



When n1 < n10, n1m =
1.690
1.651



When k1 ≧ k10, k1m =
0.077
0.078



When k1 < k10, k1m =
0.033
0.026



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
202.380
202.716



When n2 ≧ n20, n2m =
1.761
1.853



When n2 < n20, n2m =
1.586
1.608



When k2 ≧ k20, k2m =
0.219
0.227



When k2 < k20, k2m =
0.106
0.099



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
208.129
186.947




















1.3 < NA ≦ 1.4


135 < T ≦ 145







15/20













Case
14-01
14-02
14-03
14-04
14-05
14-06
















n10
1.899
1.882
1.870
1.708
1.707
1.696


k10
0.115
0.083
0.074
0.062
0.055
0.050


d10 (nm)
15.367
14.477
13.063
217.887
217.378
273.384


n20
1.714
1.732
1.717
1.700
1.693
1.702


k20
0.318
0.256
0.212
0.197
0.164
0.160


d20 (nm)
155.141
209.893
269.637
200.272
258.646
258.714


When n1 ≧ n10, n1m =
1.949
1.947
1.949
1.716
1.744
1.741


When n1 < n10, n1m =
1.888
1.854
1.833
1.704
1.691
1.652


When k1 ≧ k10, k1m =
0.132
0.127
0.132
0.071
0.077
0.078


When k1 < k10, k1m =
0.051
0.006
0.000
0.050
0.036
0.028


When d1 ≧ d10, d1m (nm) =
18.581
19.085
18.767
∞
∞
∞


When d1 < d10, d1m (nm) =
14.660
12.539
10.533
215.374
204.778
209.881


When n2 ≧ n20, n2m =
1.733
1.780
1.774
1.754
1.760
1.859


When n2 < n20, n2m =
1.627
1.630
1.611
1.677
1.592
1.608


When k2 ≧ k20, k2m =
0.337
0.296
0.256
0.228
0.223
0.226


When k2 < k20, k2m =
0.266
0.200
0.157
0.152
0.109
0.098


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
131.038
171.650
189.575
195.166
202.001
178.700



















1.3 < NA ≦ 1.4


145 < T ≦ 155







16/20













Case
15-01
15-02
15-03
15-04
15-05
15-06
















n10
1.903
1.884
1.874
1.708
1.707
1.696


k10
0.118
0.087
0.075
0.063
0.056
0.051


d10 (nm)
16.130
14.896
13.357
217.693
217.044
273.493


n20
1.723
1.733
1.722
1.700
1.694
1.702


k20
0.340
0.268
0.221
0.205
0.169
0.165


d20 (nm)
145.164
201.113
260.240
191.744
250.083
250.180


When n1 ≧ n10, n1m =
1.950
1.946
1.951
1.714
1.742
1.738


When n1 < n10, n1m =
1.895
1.858
1.839
1.706
1.694
1.652


When k1 ≧ k10, k1m =
0.130
0.127
0.128
0.070
0.076
0.078


When k1 < k10, k1m =
0.053
0.010
0.000
0.053
0.038
0.031


When d1 ≧ d10, d1m (nm) =
19.240
19.361
18.857
222.035
∞
∞


When d1 < d10, d1m (nm) =
15.619
13.105
10.992
216.109
206.771
213.326


When n2 ≧ n20, n2m =
1.737
1.779
1.777
1.735
1.755
1.839


When n2 < n20, n2m =
1.641
1.636
1.612
1.682
1.595
1.609


When k2 ≧ k20, k2m =
0.356
0.307
0.265
0.225
0.223
0.227


When k2 < k20, k2m =
0.286
0.211
0.166
0.161
0.114
0.102


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
126.286
170.199
185.156
187.971
215.684
171.738



















1.3 < NA ≦ 1.4


155 < T ≦ 165







17/20













Case
16-01
16-02
16-03
16-04
16-05
16-06
















n10
1.913
1.891
1.879
1.709
1.708
1.696


k10
0.125
0.091
0.077
0.064
0.057
0.052


d10 (nm)
16.406
14.954
13.440
217.197
216.333
274.035


n20
1.727
1.734
1.724
1.700
1.694
1.700


k20
0.366
0.282
0.231
0.214
0.175
0.171


d20 (nm)
136.777
193.024
251.802
183.446
241.739
241.498


When n1 ≧ n10, n1m =
1.955
1.950
1.953
1.714
1.742
1.735


When n1 < n10, n1m =
1.910
1.868
1.847
1.708
1.697
1.651


When k1 ≧ k10, k1m =
0.129
0.127
0.127
0.066
0.075
0.077


When k1 < k10, k1m =
0.064
0.016
0.000
0.055
0.039
0.034


When d1 ≧ d10, d1m (nm) =
19.185
19.061
18.574
220.596
∞
∞


When d1 < d10, d1m (nm) =
16.268
13.452
11.329
216.874
208.223
215.451


When n2 ≧ n20, n2m =
1.731
1.774
1.776
1.707
1.748
1.840


When n2 < n20, n2m =
1.651
1.642
1.618
1.678
1.595
1.612


When k2 ≧ k20, k2m =
0.371
0.317
0.273
0.218
0.220
0.229


When k2 < k20, k2m =
0.314
0.227
0.177
0.165
0.120
0.108


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
121.662
164.818
180.821
179.468
209.260
166.208





















1.3 < NA ≦ 1.4


165 < T ≦ 175







18/20











Case
17-01
17-02
17-03
17-04





n10
1.900
1.885
1.708
1.697


k10
0.097
0.082
0.058
0.048


d10 (nm)
14.674
13.311
215.615
273.453


n20
1.732
1.722
1.694
1.699


k20
0.294
0.239
0.180
0.151


d20 (nm)
185.336
243.911
233.152
289.720


When n1 ≧ n10, n1m =
1.955
1.956
1.741
1.736


When n1 < n10, n1m =
1.881
1.856
1.699
1.650


When k1 ≧ k10, k1m =
0.126
0.128
0.074
0.080


When k1 < k10, k1m =
0.023
0.000
0.039
0.020


When d1 ≧ d10, d1m (nm) =
18.346
18.029
∞
∞


When d1 < d10, d1m (nm) =
13.519
11.467
209.091
211.222


When n2 ≧ n20, n2m =
1.767
1.769
1.740
1.868


When n2 < n20, n2m =
1.645
1.618
1.591
1.614


When k2 ≧ k20, k2m =
0.322
0.277
0.217
0.224


When k2 < k20, k2m =
0.243
0.187
0.126
0.094


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
156.774
176.585
198.961
204.980










1.3 < NA ≦ 1.4


175 < T ≦ 185












Case
18-01
18-02
18-03
18-04
18-05





n10
1.908
1.888
1.708
1.709
1.697


k10
0.102
0.088
0.059
0.054
0.049


d10 (nm)
14.316
13.163
215.377
215.137
273.522


n20
1.730
1.716
1.693
1.702
1.700


k20
0.303
0.243
0.185
0.158
0.154


d20 (nm)
177.238
235.819
223.802
279.418
279.960


When n1 ≧ n10, n1m =
1.960
1.956
1.740
1.745
1.734


When n1 < n10, n1m =
1.893
1.861
1.700
1.696
1.657


When k1 ≧ k10, k1m =
0.126
0.131
0.073
0.075
0.079


When k1 < k10, k1m =
0.031
0.002
0.041
0.028
0.020


When d1 ≧ d10, d1m
17.569
17.540
∞
∞
∞


(nm) =


When d1 < d10, d1m
13.467
11.504
209.546
205.939
213.387


(nm) =


When n2 ≧ n20, n2m =
1.759
1.759
1.736
1.790
1.874


When n2 < n20, n2m =
1.644
1.611
1.587
1.604
1.617


When k2 ≧ k20, k2m =
0.325
0.278
0.217
0.211
0.226


When k2 < k20, k2m =
0.256
0.193
0.129
0.105
0.095


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
143.259
171.381
185.714
201.921
193.505


(nm) =





















1.3 < NA ≦ 1.4


185 < T ≦ 195







19/20












Case
19-01
19-02
19-03
19-04
19-05





n10
1.914
1.886
1.873
1.692
1.708


k10
0.104
0.093
0.070
0.060
0.060


d10 (nm)
14.390
13.299
12.581
152.854
215.913


n20
1.735
1.710
1.721
1.693
1.692


k20
0.314
0.247
0.208
0.157
0.189


d20 (nm)
166.400
226.131
280.628
278.359
213.567


When n1 ≧ n10, n1m =
1.964
1.952
1.955
1.709
1.739


When n1 < n10, n1m =
1.903
1.860
1.833
1.664
1.699


When k1 ≧ k10, k1m =
0.123
0.135
0.133
0.092
0.074


When k1 < k10, k1m =
0.040
0.012
0.000
0.042
0.044


When d1 ≧ d10, d1m
17.353
17.539
18.087
163.046
∞


(nm) =


When d1 < d10, d1m
13.759
11.668
9.947
129.659
210.046


(nm) =


When n2 ≧ n20, n2m =
1.759
1.750
1.778
1.784
1.739


When n2 < n20, n2m =
1.648
1.604
1.614
1.659
1.586


When k2 ≧ k20, k2m =
0.331
0.280
0.252
0.196
0.222


When k2 < k20, k2m =
0.267
0.196
0.156
0.120
0.129


When d2 ≧ d20, d2m
∞
∞
∞
∞
∞


(nm) =


When d2 < d20, d2m
144.756
162.922
193.262
243.485
177.669


(nm) =










1.3 < NA ≦ 1.4


185 < T ≦ 195











Case
19-06
19-07







n10
1.708
1.697



k10
0.054
0.050



d10 (nm)
215.905
273.350



n20
1.701
1.701



k20
0.161
0.157



d20 (nm)
269.362
270.178



When n1 ≧ n10, n1m =
1.744
1.732



When n1 < n10, n1m =
1.697
1.658



When k1 ≧ k10, k1m =
0.075
0.078



When k1 < k10, k1m =
0.029
0.021



When d1 ≧ d10, d1m (nm) =
∞
∞



When d1 < d10, d1m (nm) =
207.633
215.326



When n2 ≧ n20, n2m =
1.795
1.877



When n2 < n20, n2m =
1.605
1.619



When k2 ≧ k20, k2m =
0.216
0.228



When k2 < k20, k2m =
0.105
0.098



When d2 ≧ d20, d2m (nm) =
∞
∞



When d2 < d20, d2m (nm) =
205.481
189.945




















1.3 < NA ≦ 1.4


195 < T ≦ 205







20/20













Case
20-01
20-02
20-03
20-04
20-05
20-06
















n10
1.918
1.883
1.874
1.707
1.708
1.697


k10
0.103
0.095
0.068
0.061
0.055
0.050


d10 (nm)
15.177
13.742
12.955
216.749
216.874
272.522


n20
1.753
1.708
1.728
1.693
1.699
1.701


k20
0.331
0.252
0.214
0.194
0.165
0.160


d20 (nm)
153.467
215.835
269.400
203.628
259.716
261.468


When n1 ≧ n10, n1m =
1.966
1.948
1.955
1.739
1.743
1.731


When n1 < n10, n1m =
1.909
1.857
1.835
1.699
1.698
1.652


When k1 ≧ k10, k1m =
0.117
0.137
0.128
0.075
0.075
0.078


When k1 < k10, k1m =
0.043
0.016
0.000
0.048
0.030
0.022


When d1 ≧ d10, d1m (nm) =
18.089
18.051
18.523
256.743
∞
∞


When d1 < d10, d1m (nm) =
14.663
12.041
10.348
210.937
209.294
217.122


When n2 ≧ n20, n2m =
1.773
1.748
1.785
1.744
1.800
1.874


When n2 < n20, n2m =
1.665
1.604
1.616
1.589
1.608
1.620


When k2 ≧ k20, k2m =
0.348
0.285
0.259
0.230
0.223
0.227


When k2 < k20, k2m =
0.278
0.199
0.159
0.145
0.109
0.100


When d2 ≧ d20, d2m (nm) =
∞
∞
∞
∞
∞
∞


When d2 < d20, d2m (nm) =
140.260
150.984
188.160
180.549
200.943
184.530.

6. The exposure method according to any one of claims 1 to 5, wherein the relations d1≦250 and d2≦250 are satisfied.

7. The exposure method according to any one of claims 1 to 5, wherein the refractive index of the resist layer is 1.60 to 1.80.

8. The exposure method according to any one of claims 1 to 5, wherein a topcoat layer is formed on the resist layer.

9. The exposure method according to any one of claims 1 to 5, wherein the space between the resist layer and the exposure system is filled with a medium having a refractive index of 1.44±0.02.

10. The exposure method according to Claim 9, wherein the medium is water.